WO2020220794A1 - 阵列基板、显示面板、显示装置及阵列基板的制造方法 - Google Patents
阵列基板、显示面板、显示装置及阵列基板的制造方法 Download PDFInfo
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- WO2020220794A1 WO2020220794A1 PCT/CN2020/075527 CN2020075527W WO2020220794A1 WO 2020220794 A1 WO2020220794 A1 WO 2020220794A1 CN 2020075527 W CN2020075527 W CN 2020075527W WO 2020220794 A1 WO2020220794 A1 WO 2020220794A1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
Definitions
- the present disclosure relates to the field of display technology, and more specifically to an array substrate, a display panel, a display device, and a manufacturing method of the array substrate.
- LCD liquid crystal display
- liquid crystal is a substance between solid and liquid. It is liquid under normal conditions, but its molecular arrangement is very regular like solid crystals. If an electric field is applied to it, its molecular arrangement can be changed.
- this feature can achieve screen display. For example, for a certain pixel of LCD, if the corresponding thin film transistor (TFT) switch is controlled to make a different potential difference between the pixel electrode and the common electrode, the liquid crystal sandwiched between the two electrodes The molecules can be deflected to different degrees, so that the polarized light becomes non-passing, partial passing or passing, thereby realizing the switching of single-point pixels and/or different grayscale display.
- TFT thin film transistor
- some embodiments of the present disclosure provide an array substrate.
- the array substrate includes: a substrate; a plurality of clock signal lines including at least a first clock signal line and a second clock signal line are located on the substrate, the first clock signal line has a first part, the The first part is located on a first area of the substrate, the second clock signal line has a second part, and the second part is located on a second area of the substrate that is different from the first area;
- the electric field shielding layers above the first part and the second part, the electric field shielding layer and the first clock signal line are electrically insulated from each other, and the electric field shielding layer and the second clock signal line are electrically insulated from each other. insulation.
- the array substrate further includes: an insulating layer located between the first part and the electric field shielding layer and between the second part and the electric field shielding layer, so that the electric field The shielding layer and the first clock signal line are electrically insulated from each other and the electric field shielding layer and the second clock signal line are electrically insulated from each other.
- the electric field shielding layer includes a first electric field shielding sublayer and a second electric field shielding sublayer, and the orthographic projection of the first electric field shielding sublayer on the substrate covers the The orthographic projection on the substrate, and the orthographic projection of the second electric field shielding sublayer on the substrate covers the orthographic projection of the second part on the substrate.
- the first electric field shielding sublayer in a width direction perpendicular to the extending direction of the clock signal line, has the same width as the first clock signal line, and the second electric field shielding sublayer has the same width as the first clock signal line.
- the second clock signal lines have the same width.
- the array substrate further includes:
- An active layer located on the gate insulating layer
- Source and drain on the gate insulating layer and the active layer Source and drain on the gate insulating layer and the active layer
- a passivation layer located on the active layer, the source electrode, the drain electrode and the gate insulating layer,
- the insulating layer is located in the same layer as at least one of the gate insulating layer and the passivation layer.
- the array substrate further includes: a pixel electrode or a common electrode on the passivation layer, wherein the electric field shielding layer and the pixel electrode or the common electrode are on the same layer.
- an embodiment of the present disclosure further provides a display panel, wherein the display panel includes the above-mentioned array substrate.
- the display panel further includes a sealant on the array substrate,
- the sealant covers the first area, and the sealant covers the first part of the first clock signal line.
- the display panel further includes a liquid crystal layer on the array substrate,
- the liquid crystal layer covers the second area, and the liquid crystal layer covers the second part of the second clock signal line.
- the plurality of clock signal lines further include a third clock signal line, the third clock signal line is located between the first clock signal line and the second clock signal line, and so A part of the third clock signal line is covered by the sealant, and another part of the third clock signal line is covered by the liquid crystal layer.
- the electric field shielding layer includes a third electric field shielding sublayer located on at least a part of the third clock signal line, and the orthographic projection of the third electric field shielding sublayer on the substrate covers An orthographic projection of at least a part of the third clock signal line on the substrate.
- the sealant covers an electric field shielding layer located above the first portion of the first clock signal line.
- the liquid crystal layer covers an electric field shielding layer located above the second portion of the second clock signal line.
- the sealant covers a part of the third electric field shielding sublayer, and the liquid crystal layer covers another part of the third electric field shielding sublayer.
- the display panel further includes a display driving circuit electrically connected to the array substrate, wherein the electric field shielding layer is electrically connected to the display driving circuit, and the display driving circuit provides a separate electric signal.
- some embodiments of the present disclosure provide a display device.
- the display device includes the aforementioned display panel.
- some embodiments of the present disclosure provide a method of manufacturing an array substrate.
- the method includes: forming a plurality of clock signal lines including at least a first clock signal line and a second clock signal line on a substrate, the first clock signal line has a first part, and the first part is formed on the On the first area of the substrate, the second clock signal line has a second portion, and the second portion is formed on a second area of the substrate that is different from the first area; and An electric field shielding layer is formed above the first part and above the second part so that the electric field shielding layer and the first clock signal line are electrically insulated from each other, and the electric field shielding layer and the second clock signal line are electrically insulated from each other .
- the step of forming an electric field shielding layer over the first part and over the second part includes: in the first part of the first clock signal line and the second part of the second clock signal line An insulating layer is formed on each of them; and an electric field shielding layer is formed on the insulating layer.
- the method further includes: forming a gate on the substrate; forming a gate insulating layer on the gate; forming an active layer on the gate insulating layer; Forming a source electrode and a drain electrode on the gate insulating layer and the active layer; forming a passivation layer on the active layer, the source electrode, the drain electrode and the gate insulating layer; A through hole is formed on the passivation layer to expose a part of the source electrode or the drain electrode; and a pixel electrode or a common electrode is formed on the passivation layer so that the pixel electrode or the common electrode passes through the The through hole is electrically connected to the source electrode or the drain electrode.
- the step of forming a plurality of clock signal lines is performed simultaneously with the step of forming the gate.
- the step of forming the insulating layer is performed simultaneously with the step of forming the gate insulating layer and/or the step of forming the passivation layer.
- the step of forming the electric field shielding layer is performed simultaneously with the step of forming the pixel electrode or the common electrode.
- FIG. 1 is a top view showing an example display panel according to an embodiment of the present disclosure.
- FIG. 2 is a plan view and a side view showing a partial configuration of the display panel shown in FIG. 1 according to an embodiment of the present disclosure.
- FIG. 3 is a side view showing a further partial configuration example of a partial configuration of the display panel shown in FIG. 2 according to an embodiment of the present disclosure.
- FIG. 4 is a side view showing a further partial configuration of another partial configuration example of the display panel shown in FIG. 2 according to an embodiment of the present disclosure.
- 5A to 5G are schematic diagrams showing various stages of a product manufactured using an example method for manufacturing an array substrate according to an embodiment of the present disclosure.
- FIG. 6 is a flowchart showing an example method for manufacturing an array substrate according to an embodiment of the present disclosure.
- FIG. 7 is a schematic diagram schematically showing the electrical connection between the electric field shielding layer and the display driving circuit in the display panel according to an embodiment of the present disclosure.
- the terms “including” and “containing” and their derivatives mean including but not limiting; the term “or” is inclusive, meaning and/or.
- the orientation terms used such as “upper”, “lower”, “left”, “right”, etc., are used to indicate relative positional relationships to assist those skilled in the art to understand the present disclosure. Embodiments, and therefore those skilled in the art should understand: “up”/"down” in one direction can be changed to “down”/"up” in the opposite direction, and in the other direction, it may become other Position relationship, such as “left”/"right”, etc.
- on can mean that one layer is directly formed or disposed on another layer, or can mean a A layer is formed indirectly or arranged on another layer, that is, there are other layers between the two layers.
- first the terms “first”, “second”, etc. may be used herein to describe various components, components, elements, regions, layers and/or parts, these components, components, elements, regions, and layers And/or part should not be limited by these terms. Rather, these terms are used to distinguish one component, member, element, region, layer, and/or section from another.
- first part, the first member, the first element, the first region, the first layer and/or the first part discussed below may be referred to as the second part, the second member, the second element, the second region , The second layer and/or the second part without departing from the teachings of the present disclosure.
- the term "located on the same layer” used means that two layers, parts, components, elements or parts can be formed by the same patterning process, and the two layers, parts, components, The elements or parts are generally formed of the same material.
- the embodiments of the present disclosure are applied to an array substrate of a liquid crystal display device as an example for detailed description.
- the application field of the present disclosure is not limited to this.
- the technical solutions according to the embodiments of the present disclosure can be applied to other scenarios where a consistent clock signal or other signals need to be provided.
- the transistor is described as an example in which the transistor is a bottom-gate thin film transistor (TFT) in the following description, the present disclosure is not limited thereto.
- the technical solutions of the present application can also be implemented for top-gate transistors or other types of transistors, and only the corresponding layers provided for clock signal lines (or other signal lines) need to be adjusted. can.
- FIG. 1 is a top view showing an example display panel 10 according to an embodiment of the present disclosure.
- the display panel 10 may include an effective display area (AA) 100 and a bezel area 110.
- AA 100 includes a pixel array composed of multiple pixels, which can be used to display a desired image according to a driving signal provided by a display driving circuit.
- the bezel area 110 may be used to prevent light from leaking from the edge of the display panel 10.
- the bezel area 110 may be used to prevent light from leaking from the edge of the display panel 10.
- the edge of the display panel 10 if there is no obstruction by the frame area 110, light emitted through the light guide plate of the backlight module will cause light leakage at the edge of the display panel 10. It will also cause obvious light spots.
- the bezel area 110 is also provided with various signals (including but not limited to: clock signals, gate drive signals, data drive signals, high-level signals, low-level signals). Signal, ground, etc.).
- various signals including but not limited to: clock signals, gate drive signals, data drive signals, high-level signals, low-level signals). Signal, ground, etc.
- FIG. 2 is a top view and a side view showing a partial configuration 120 of the display panel 10 shown in FIG. 1 according to an embodiment of the present disclosure.
- the upper half of FIG. 2 shows a top view of the portion 120 of the display panel 10 shown in FIG. 1
- the lower half of FIG. 2 shows that the portion 120 of the display panel 10 shown in FIG. Sectional view or side view of section line AA' in the top view of the part.
- FIG. 2 only shows the parts related to the embodiment of the present disclosure, and does not show the parts well-known to those skilled in the art.
- some details in Fig. 2 will be further shown in conjunction with Figs. 3 to 5 when necessary.
- the partial structure 120 of the display panel 10 can be provided with multiple lines, including (but not limited to): multiple clock signal lines CLK1 130-1 to CLK 8 130-8, Start Vertical Signal line or frame initial signal line STV1, pre-frame reset signal STV2, high-level signal lines VDD1, VDD2, low-level signal lines LVSS, VSS, ground signal line GND, common electrode signal line Vcom, and maintenance during production RP signal line and feedback signal line FEED for debugging.
- this is only a possible embodiment of the partial structure 120 of the bezel area 110 of the display panel 10 according to the embodiment of the present disclosure, and the present disclosure is not limited thereto.
- the partial structure 120 of the bezel area 110 of the display panel 10 may include more or fewer lines, or include different lines.
- clock signal lines CLK1 130-1 to CLK8 130-8 are shown, which can be used to provide a gate driver on the display panel 10 (Gate driver on Array or GOA for short) 160
- Each shift register in provides a clock signal, so that each shift register can output a gate driving signal for driving a corresponding pixel row.
- the first clock signal line CLK1 130-1 may be electrically connected to the shift register at the bottom of the GOA 160 to provide it with the clock signal required when scanning the corresponding pixel row.
- the second clock signal line CLK2 130-2, the third clock signal line CLK3 130-3, and the fourth clock signal line CLK4 130-4 can be electrically connected to the corresponding shift registers in the GOA 160 to provide them with The clock signal required for the corresponding pixel row scan.
- each adjacent clock signal line is shown in FIG. 2 as if it is electrically connected to an adjacent shift register and then to an adjacent pixel row signal, in fact the adjacent clock signal line It can be electrically connected to non-adjacent shift registers, and the adjacent shift registers can provide gate drive signals to non-adjacent pixel rows.
- GOA is provided in the left and right side frames of the display panel 10 shown in FIG.
- the GOA on the left side of the panel (for example, the GOA 160 electrically connected to the clock signal lines shown in FIG. 2) can Provides gate drive signals for odd rows of pixels, and the GOA on the right side of the panel can provide gate drive signals for even rows of pixels.
- the electrical connection relationship between each clock signal line and the GOA 160 may not be connected in sequence from left to right according to the clock signal line as shown in FIG. 2, but may be electrically connected in other order.
- the first clock signal line CLK1 130-1 can be electrically connected to the bottom shift register
- the third clock signal line CLK3 130-3 can be electrically connected to the shift register of the upper row
- the fifth clock signal line CLK5 130-5 can be electrically connected. Connect the shift register of the previous row, and so on.
- each clock signal line CLK1 130-1 to CLK8 130-8 (in the top view of the upper half of FIG. 2, the direction perpendicular to the extending direction of the clock signal line is taken as the width The direction) may be approximately 120 micrometers ( ⁇ m).
- signal lines may be respectively, for example, 80 ⁇ m (for example, VDD1 151, VDD2 153, VSS 159, STV2 157, etc.), 100 ⁇ m (for example, LVSS 155, RP 147, FEED 145, STV1 141, etc.), 150 ⁇ m (for example, GND 149, etc.) and/or 340 ⁇ m (for example, Vcom 143, etc.).
- the width of these signal lines may depend on design requirements and is not limited to the embodiment shown in FIG. 2.
- the common electrode signal line Vcom 143 usually needs to be connected to each pixel to provide an electrical signal to the common electrode in each pixel, in order to ensure that the electrical signal of the common electrode of the pixel at each position in the display panel 10 is as large as possible Uniformity, the Vcom 143 shown in FIG. 2 is usually designed to go around the frame area 110 of the display panel 10 to provide electrical signals required by the common electrode to pixels at different positions from various directions.
- the length of the common electrode line Vcom143 designed in this way is much longer than other signal lines.
- the width can be widened to form the widest signal line as shown in FIG. 2, for example.
- other signal lines can also adjust their corresponding widths according to actual needs, and are not limited to the specific design shown in FIG. 2.
- multiple signal lines including multiple clock signal lines CLK 1 130-1 to CLK8 130-8 may be disposed on the array substrate 220.
- the black matrix 215 may be used, for example, to make each signal line invisible to the outside, and to avoid possible light leakage at the edge of the display panel 10.
- the array substrate 220 and the color filter substrate 210 are only used here for illustrative purposes. Therefore, only the elements directly related to the embodiments of the present disclosure are depicted, and therefore, there may be many problems on them. Other elements shown (for example, layers, materials, devices, etc.).
- the color filter substrate 210 and the array substrate 220 can be connected by a sealant 230 and the liquid crystal layer 240 can be sealed inside the display panel 10.
- the process of connecting the color filter substrate 210 and the array substrate 220 is generally referred to as a "box-pairing” or "box-forming" process.
- the sealant 230 may be formed on the outer side of the liquid crystal layer 240 (ie, the left side in the figure) to keep the liquid crystal layer 240 inside the display panel 10.
- the width of the sealant 230 may be about 1.1 mm (that is, the distance from the boundary line 231 to the boundary line 233 in the lower half of FIG. 2), and the boundary line 233 of the sealant 230 is black
- the distance from the boundary line of the matrix 215 may be about 0.3 mm
- the distance from the left (outer) boundary line of the ground signal line 149 to the boundary line of the black matrix 215 may be about 0.1 mm
- the distance of the boundary line of the substrate 210 is about 0.2 mm. In this way, it can be ensured that the width of the frame area 110 of the display panel 10 is generally about 3 mm and less than 5 mm.
- the embodiments of the present disclosure are not limited thereto.
- sealants of different materials can be used, the width of the sealant 230 can be reduced.
- different signal line layout designs can be used (for example, a 4-clock signal line design, etc.), the overall width of all signal lines can be changed, thereby further reducing the frame.
- FIG. 3 is a side view showing a further partial configuration 250 of the partial configuration example 120 of the display panel 10 shown in FIG. 2 according to an embodiment of the present disclosure.
- FIG. 3 shows the part enclosed by the dashed frame 250 in FIG. 2 and related structures around it.
- Three clock signal lines are shown in FIG. 3, namely: a third clock signal line 130-3, a fourth clock signal line 130-4, and a fifth clock signal line 130-5.
- One or more insulating layers are respectively formed above each clock signal line.
- the steps of forming each clock signal line and/or these insulating layers may be an original part of the process of manufacturing the TFT array on the array substrate 220, so as not to add any new The process saves manufacturing time and reduces costs.
- the third clock signal line 130-3, the fourth clock signal line 130-4, and the fifth clock signal line 130-5 may be simultaneously formed in the step for forming the gate of the TFT (for example, , See Figure 5A).
- the gate mask pattern at a position corresponding to each clock signal line on a mask plate (or photomask) for forming the gate of the TFT.
- the clock signal lines are also formed at the same time in the same process of forming the gate.
- the insulating layers 131-3, 131-4, and 131-5 may be simultaneously formed in a step for forming a gate insulating layer (Gate Insulation or GI for short) of a TFT (for example, see FIG.
- the insulating layers 132-3, 132-4, and 132-5 may be simultaneously formed in a step for forming a passivation layer (Passivation or PVX for short) of the TFT (for example, see FIG. 5E).
- Passivation passivation or PVX for short
- FIG. 3 is only used to illustrate the structure, and therefore, the simplified schematic diagram is given, which does not mean that the actual product must be the structure shown in FIG. 3.
- the structure of the upper and lower layers with the same width as shown in FIG. 3 is usually not formed, but a structure that wraps and covers the clock signal line is formed as shown on the left side of FIG. 5F.
- FIG. 3 shows that each clock signal line is provided with two insulating layers
- the present disclosure is not limited to this, but any number of insulating layers may be provided.
- the main reason for the two insulating layers in FIG. 3 is to simplify the production process, and to not significantly change the original production process and increase the production cost.
- the insulating layer provided can also be one of the gate insulating layer and the passivation layer, rather than both. For example, by adding a mask to shield the position corresponding to the clock signal line when forming one of the gate insulating layer or the passivation layer of the TFT, thereby avoiding the formation of the corresponding insulating layer.
- a new process can also be added to specifically form a separate insulating layer on the clock signal line instead of using the above steps in the TFT manufacturing process.
- part of the clock signal lines on the array substrate (for example, the fifth clock signal line shown in FIG. 2 CLK5 130-5 to the eighth clock signal line CLK8 130-8) are covered by the liquid crystal layer 240, and part of the clock signal lines (for example, the first clock signal line CLK1 130-1 to the third clock signal line CLK3 shown in FIG. 130-3) is covered by the sealant 230, and a part of the clock signal line (for example, the fourth clock signal line CLK4 130-4 shown in FIG. 2) is partially covered by the sealant 230 and partially covered by the liquid crystal layer 240, As shown in Figure 2 and Figure 3.
- FIG. 4 is a side view showing a further partial configuration 250 of another partial configuration example 120 of the display panel 10 shown in FIG. 2 according to an embodiment of the present disclosure. Similar to FIG. 3, FIG. 4 shows the part encircled by the dashed frame 250 in FIG. 2 and related structures around it. Similarly, FIG. 4 also shows three clock signal lines, namely: a third clock signal line 130-3, a fourth clock signal line 130-4, and a fifth clock signal line 130-5. Also similar to FIG. 3, one or more insulating layers (for example, 131-3, 131-4, 131-5, 132-3, 132-4, and 132-5) are respectively formed above each clock signal line, No detailed description here.
- a conductive layer or an electric field shielding layer may be formed above the insulating layer. Shielding layers 133-3, 133-4 and 133-5).
- the direction of the electric field caused by each clock signal line (for example, the third clock signal line 130-3, the fourth clock signal line 130-4, or the fifth clock signal line 130-5) can be made They all point to the electric field shielding layer instead of the sealant 230 and the liquid crystal layer 240 with different dielectric constants, so that the coupling effects of the clock signal lines are roughly the same, and the difference between the clock signals output by it is significantly reduced. This avoids the undesirable effects of horizontal stripes on the display screen eventually caused.
- the electric field shielding layers 133-3, 133-4, and 133-5 can all be electrically connected to a separate circuit of the display driving circuit (Chip on Film or COF) of the display panel 10, such as Vcom2 (as shown in Figure 7). (Shown), and isolated from the Vcom 143 that provides the common electrode driving signal to the common electrode in each pixel, so as to avoid affecting the normal display of the pixel.
- a separate circuit of the display driving circuit (Chip on Film or COF) of the display panel 10 such as Vcom2 (as shown in Figure 7). (Shown), and isolated from the Vcom 143 that provides the common electrode driving signal to the common electrode in each pixel, so as to avoid affecting the normal display of the pixel.
- the electric field shielding layer located on each clock signal line may be referred to as the electric field shielding sublayer.
- the electric field shielding layer is located on the third clock signal line 130. -3.
- the electric field shielding layers on the fifth clock signal line 130-5 and the fourth clock signal line 130-4 are respectively called the first electric field shielding sublayer, the second electric field shielding sublayer and the third electric field shielding sublayer, and They are denoted by reference numerals 133-3, 133-5, and 133-4, respectively. It should be understood that such an expression is mainly for the convenience of description.
- these electric field shielding sublayers are all located on the same layer, thereby constituting the electric field shielding sublayer.
- FIGS. 5A to 5G are diagrams showing examples of methods for manufacturing an array substrate according to an embodiment of the present disclosure (for example, the array substrate 220 including each signal line and its auxiliary structure shown in FIGS. 3 and 4) is manufactured Schematic diagram of each stage of the product. It should be noted that the method of FIGS. 5A to 5G is implemented as a part of the process of manufacturing TFTs on the array substrate, and therefore the right side of each of FIGS. 5A to 5G shows that the corresponding TFT Schematic diagram of each stage of TFT in the process.
- a clock signal line 530 (for example, each of the clock signal lines in FIG. 2, FIG. 3, or FIG. 4) may be formed on the substrate 510 first.
- the gate 520 of the TFT structure (and the corresponding gate (or scanning) signal line, etc.) can be formed on the substrate 510.
- the clock signal line 530 and the gate 520 may be simultaneously formed in the same step. However, in other embodiments, they may be formed sequentially at different times.
- a gate insulating layer 531 covering the clock signal line 530 may be formed on the clock signal line 530.
- a gate insulating layer 531 of a TFT structure may be formed on the gate 520.
- the gate insulating layer 531 on the clock signal line 530 and the gate insulating layer 531 on the gate 520 may be formed simultaneously in the same step. However, in other embodiments, they may be formed sequentially at different times.
- an active layer 532 may be formed on the gate insulating layer 531. Since the active layer 532 may be formed through a mask, the pattern on the mask may be designed so that the active layer 532 is not formed on the gate insulating layer 531 on the clock signal line 530. In other words, there is no need to form the active layer 532 for the clock signal line 530.
- a source electrode 533 and a drain electrode 534 may be formed on the gate insulating layer 531 and/or the active layer 532.
- the source electrode 533 and the drain electrode 534 can be formed by a mask, the pattern on the mask can be designed so that the source electrode 533 is not formed on the gate insulating layer 531 on the clock signal line 530 And drain 534. In other words, there is no need to form the source electrode 533 and the drain electrode 534 for the clock signal line 530.
- a passivation layer 535 may be formed on the gate insulating layer 531 on the clock signal line 530.
- a passivation layer 535 of a TFT structure may be formed on the active layer 532, the source electrode 533, the drain electrode 534, and the gate insulating layer 531.
- the passivation layer 535 above the clock signal line 530 and the passivation layer 535 above the gate 520 may be simultaneously formed in the same step. However, in other embodiments, they may be formed sequentially at different times.
- a through hole may be formed on the passivation layer 535, so that a part of the drain electrode 534 covered by it is exposed to facilitate subsequent electrical connection with the pixel electrode. Since the through hole may be formed through a mask, the pattern on the mask may be designed so that the through hole is not formed on the passivation layer 535 above the clock signal line 530. In other words, there is no need to form a via hole for the passivation layer 535 of the clock signal line 530.
- an electric field shielding layer (or pixel electrode) 536 may be formed on the passivation layer 535 above the clock signal line 530.
- a pixel electrode 536 electrically connected to the drain electrode 534 may be formed at a through hole at a designated position on the passivation layer 535 above the gate electrode 520 on the right side of FIG. 5G.
- the electric field shielding layer 536 above the clock signal line 530 and the pixel electrode 536 above the gate 520 may be simultaneously formed in the same step. However, in other embodiments, they may be formed sequentially at different times.
- the pixel electrode 536 and/or the electric field shielding layer 536 may be made of a transparent conductive material, such as indium tin oxide (ITO).
- the clock signal line related structure shown in FIG. 4 can be formed, and the effect of avoiding or reducing the horizontal stripes is achieved.
- FIGS. 5A to 5G only show a solution for manufacturing the clock signal line 530 with the corresponding electric field shielding layer 536 using, for example, a 5-masks process, but the present disclosure is not limited thereto.
- the common electrode in the case of other array substrate manufacturing processes, for example, in the case where the common electrode is formed after the passivation layer 535 instead of the pixel electrode, the common electrode can also be formed over the clock signal line 530 while manufacturing the common electrode.
- Electric field shielding layer 536 This can also avoid or reduce different coupling effects caused by different covering materials (for example, the sealant 230 and the liquid crystal layer 240).
- FIG. 6 is a flowchart illustrating an example method 600 for manufacturing an array substrate according to an embodiment of the present disclosure.
- the method 600 may start in step S610.
- step S610 at least a first clock signal line (for example, the third clock signal line CLK3 130-3 in FIG. 4) and a second clock signal line (for example, the fifth clock signal line in FIG. 4) may be formed on the substrate.
- Multiple clock signal lines including the clock signal line CLK5 130-5) for example, the first clock signal line CLK1 130-1 to the eighth clock signal line CLK8 130-8 in FIG. 2).
- the first clock signal line may have a first part formed on a first area (for example, an area corresponding to the sealant 230) of the substrate (for example, the substrate 220), and the second clock signal line may There is a second part formed on a second area of the substrate (for example, an area corresponding to the liquid crystal layer 240).
- an electric field shielding layer (for example, the multiple electric field shielding layers 133-3, 133-4, 133-5 shown in FIG. 4) may be formed above the first part and the second part, so that the electric field The shielding layer and the first clock signal line are electrically insulated from each other, and the electric field shielding layer and the second clock signal line are electrically insulated from each other.
- step S620 may include: forming an insulating layer on each of the first part of the first clock signal line and the second part of the second clock signal line (for example, FIG. 4 A plurality of insulating layers 131-3, 131-4, 131-5, 132-3, 132-4, and 132-5 are shown); and an electric field shielding layer is formed on the insulating layer.
- the method 600 may further include: forming a gate (for example, the gate 520) on a substrate (for example, the substrate 510); and forming a gate insulating layer (for example, a gate insulating layer) on the gate.
- an active layer for example, active layer 532 is formed on the gate insulating layer; a source (for example, source 533) and a drain (for example, drain) are formed on the gate insulating layer and the active layer 534); forming a passivation layer (for example, passivation layer 535) on the active layer, source, drain, and gate insulating layer; forming a through hole on the passivation layer to expose part of the source or drain And forming a pixel electrode or a common electrode (for example, a pixel electrode 536) on the passivation layer, so that the pixel electrode or the common electrode is electrically connected to the source or drain via the through hole.
- a passivation layer for example, passivation layer 535
- the step of forming a plurality of clock signal lines may be performed simultaneously with the step of forming the gate (for example, see FIG. 5A).
- the step of forming the insulating layer may be performed simultaneously with the step of forming the gate insulating layer and/or the step of forming the passivation layer (for example, see FIG. 5B or FIG. 5E).
- the step of forming the electric field shielding layer may be performed simultaneously with the step of forming the pixel electrode layer or the step of forming the common electrode layer (for example, see FIG. 5G).
- the step of forming a corresponding electric field shielding layer on the insulating layer includes: forming an electric field shielding layer on the insulating layer having the same width as the clock signal line below it.
- a display panel is also provided, which may include any one or more of the array substrates described above and a display driving circuit electrically connected to the array substrate.
- the electric field shielding layer in the array substrate may be electrically connected to the display driving circuit, and the display driving circuit provides a separate electrical signal (for example, Vcom2 independent of Vcom, as shown in FIG. 7) .
- a display device is also provided, which may include the display panel as described above.
- each pixel in the display device emit light at the same gray scale as uniformly as possible, and avoid or at least reduce the poor display of the display.
- Phenomenon such as horizontal stripes, light spots, etc., thereby improving the yield of the display and the user experience.
- functions described in this document as being implemented by pure hardware, pure software and/or firmware can also be implemented by means of special hardware, a combination of general hardware and software, etc.
- functions described as being implemented by dedicated hardware e.g., field programmable gate array (FPGA), application specific integrated circuit (ASIC), etc.
- general-purpose hardware e.g., central processing unit (CPU), digital signal processing It can be realized by a combination of DSP and software, and vice versa.
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Abstract
Description
Claims (22)
- 一种阵列基板,包括:衬底;位于所述衬底上的至少包括第一时钟信号线和第二时钟信号线在内的多条时钟信号线,所述第一时钟信号线具有第一部分,所述第一部分位于所述衬底的第一区域上,所述第二时钟信号线具有第二部分,所述第二部分位于所述衬底的不同于所述第一区域的第二区域上;和位于所述第一部分上方和所述第二部分上方的电场屏蔽层,所述电场屏蔽层与所述第一时钟信号线彼此电绝缘,以及所述电场屏蔽层与所述第二时钟信号线彼此电绝缘。
- 根据权利要求1所述的阵列基板,还包括:绝缘层,位于所述第一部分和所述电场屏蔽层之间以及位于所述第二部分和所述电场屏蔽层之间,以使得所述电场屏蔽层与所述第一时钟信号线彼此电绝缘并使得所述电场屏蔽层与所述第二时钟信号线彼此电绝缘。
- 根据权利要求1所述的阵列基板,其中,所述电场屏蔽层包括第一电场屏蔽子层和第二电场屏蔽子层,所述第一电场屏蔽子层在所述衬底上的正投影覆盖所述第一部分在所述衬底上的正投影,并且所述第二电场屏蔽子层在所述衬底上的正投影覆盖所述第二部分在所述衬底上的正投影。
- 根据权利要求3所述的阵列基板,其中,在与时钟信号线的延伸方向垂直的宽度方向上,所述第一电场屏蔽子层与所述第一时钟信号线具有相同的宽度,所述第二电场屏蔽子层与所述第二时钟信号线具有相同的宽度。
- 根据权利要求1~4中任一项所述的阵列基板,还包括:位于所述衬底上的栅极;位于所述栅极上的栅极绝缘层;位于所述栅极绝缘层的有源层;位于所述栅极绝缘层和所述有源层上的源极和漏极;和位于所述有源层、所述源极、所述漏极和所述栅极绝缘层上的钝化层,其中,所述绝缘层与所述栅极绝缘层和所述钝化层中的至少一个位于同一层。
- 根据权利要求5所述的阵列基板,还包括:位于所述钝化层上的像素电极或公共电极,其中,所述电场屏蔽层与所述像素电极或所述公共电极位于同一层。
- 一种显示面板,其中,所述显示面板包括根据权利要求1~6中任一项所述的阵列基板。
- 根据权利要求7所述的显示面板,还包括位于所述阵列基板上的密封胶,其中,所述密封胶覆盖所述第一区域,并且所述密封胶覆盖所述第一时钟信号线的所述第一部分。
- 根据权利要求8所述的显示面板,还包括位于所述阵列基板上的液晶层,其中,所述液晶层覆盖所述第二区域,并且所述液晶层覆盖所述第二时钟信号线的所述第二部分。
- 根据权利要求9所述的显示面板,其中,所述多条时钟信号线还包括第三时钟信号线,所述第三时钟信号线位于所述第一时钟信号线与所述第二时钟信号线之间,并且,所述第三时钟信号线的一部分被所述密封胶覆盖,所述第三时钟信号线的另一部分被所述液晶层覆盖。
- 根据权利要求10所述的显示面板,其中,所述电场屏蔽层包括位于所述第三时钟信号线的至少一部分上的第三电场屏蔽子层,所述第三电场屏蔽子层在所述衬底上的正投影覆盖所述第三时钟信号线的至少一部分在所述衬底上的正投影。
- 根据权利要求8~11中任一项所述的显示面板,其中,所述密封胶覆盖位于所述第一时钟信号线的所述第一部分上方的电场屏蔽层。
- 根据权利要求9~11中任一项所述的显示面板,其中,所述液晶层覆盖位于所述第二时钟信号线的所述第二部分上方的电场屏蔽层。
- 根据权利要求11所述的显示面板,其中,所述密封胶覆盖所述第三电场屏蔽子层的一部分,所述液晶层覆盖所述第三电场屏蔽子层的另一部分。
- 根据权利要求7~14中任一项所述的显示面板,还包括与所述阵列基板电连接的显示驱动电路,其中,所述电场屏蔽层与所述显示驱动电路电连接,并由所述显示驱动电路提供单独的电信号。
- 一种显示装置,其中,所述显示装置包括根据权利要求7~15中任一项所述的显示面板。
- 一种制造阵列基板的方法,包括:在衬底上形成至少包括第一时钟信号线和第二时钟信号线在内的多条时钟信号线,所述第一时钟信号线具有第一部分,所述第一部分形成于所述衬底的第一区域上,所述第二时钟信号线具有第二部分,以及所述第二部分形成于所述衬底的不同于所述第一区域的第二区域上;以及在所述第一部分上方和所述第二部分上方形成电场屏蔽层,使得所述电场屏蔽层与所述第一时钟信号线彼此电绝缘,以及所述电场屏蔽层与所述第二时钟信号线彼此电绝缘。
- 根据权利要求17所述的方法,其中,在所述第一部分上方和所述第二部分上方形成电场屏蔽层的步骤包括:在所述第一时钟信号线的第一部分和所述第二时钟信号线的第二部分中的每一个上形成绝缘层;以及在所述绝缘层上形成电场屏蔽层。
- 根据权利要求18所述的方法,还包括:在所述衬底上形成栅极;在所述栅极上形成栅极绝缘层;在所述栅极绝缘层上形成有源层;在所述栅极绝缘层和所述有源层上形成源极和漏极;在所述有源层、所述源极、所述漏极和所述栅极绝缘层上形成钝化层;在所述钝化层上形成通孔,以暴露所述源极或所述漏极的一部分;以及在所述钝化层上形成像素电极或公共电极,使得所述像素电极或所述公共电极经由所述通孔与所述源极或所述漏极电连接。
- 根据权利要求19所述的方法,其中,形成多条时钟信号线的步骤是与形成栅极的步骤同时进行的。
- 根据权利要求19或20所述的方法,其中,形成绝缘层的步骤是与形成所述栅极绝缘层的步骤和/或形成所述钝化层的步骤同时进行的。
- 根据权利要求19~21中任一项所述的方法,其中,形成电场屏蔽层的步骤是与形成所述像素电极或所述公共电极的步骤同时进行的。
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