WO2020199257A1 - 框胶检测装置和框胶检测方法 - Google Patents

框胶检测装置和框胶检测方法 Download PDF

Info

Publication number
WO2020199257A1
WO2020199257A1 PCT/CN2019/083380 CN2019083380W WO2020199257A1 WO 2020199257 A1 WO2020199257 A1 WO 2020199257A1 CN 2019083380 W CN2019083380 W CN 2019083380W WO 2020199257 A1 WO2020199257 A1 WO 2020199257A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
sealant
reflected light
point
detection point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2019/083380
Other languages
English (en)
French (fr)
Inventor
杜轩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Publication of WO2020199257A1 publication Critical patent/WO2020199257A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Definitions

  • the invention relates to the technical field of frame glue detection, in particular to a device and method for detecting the thickness of frame glue.
  • the thickness of the sealant may be inconsistent due to uneven coating or uneven distribution of spacers in the sealant. Therefore, after the color filter and the thin film transistor substrate are bonded through the frame glue, the peripheral thickness of the display panel will be different, which will cause light leakage.
  • the existing sealant detection device can only detect the width of the sealant, but cannot detect the thickness of the sealant, which increases the manufacturing cost of the display panel.
  • the existing sealant detection device can only detect the width of the sealant, but cannot detect the thickness of the sealant, which increases the manufacturing cost of the display panel.
  • the purpose of the present invention is to provide a sealant detection device and a sealant detection method, which can instantly detect whether the thickness of the sealant is consistent, thereby reducing the manufacturing cost of the display panel.
  • the present invention provides a sealant detection device for detecting the thickness of the sealant coated on a substrate, comprising: a carrying table for carrying the substrate; an optical sampling unit for feeding the frame
  • the multiple detection points on the glue surface emit light and receive the amount of reflected light from each detection point.
  • the optical sampling unit includes: a laser light source; a first transflective prism, which is arranged in the exit direction of the laser light source The light receiving element is arranged in the light reflection direction of the first transflective prism and is electrically connected to the processing unit for receiving the amount of reflected light from each detection point; the second transflective The half mirror prism is arranged in the light transmission direction of the first half mirror; the third half mirror prism is arranged in the light reflection direction of the second half mirror prism; And an objective lens, which is arranged above the carrying platform and in the light transmission direction of the third transflective prism; an illumination light source, wherein the third transflective prism is arranged at the exit of the illumination light source In the direction; the charge-coupled device is set in the light transmission direction of the second half-reflective prism, and is used to collect each of the detections at the detection height corresponding to the highest amount of reflected light of each detection point Point image; a moving unit for moving the optical sampling unit on a plurality of detection planes with
  • the detection height is the distance between the detection plane and the carrying platform.
  • the detection point is located at the focal point of the objective lens.
  • the processing unit is electrically connected to the charge coupled device, and is used to calculate the three-dimensional pattern of the sealant surface according to the collected image of each detection point and its corresponding detection height.
  • the present invention also provides a sealant detection device for detecting the thickness of the sealant coated on the substrate, which is characterized in that it comprises: a carrying table for carrying the substrate; an optical sampling unit with Transmitting light to a plurality of detection points on the surface of the sealant and receiving the amount of reflected light from each detection point; a moving unit for moving the optical sampling unit on a plurality of detection planes with different detection heights; And the processing unit is configured to: for the same detection point, compare the amount of reflected light corresponding to the plurality of detection heights to determine the highest amount of reflected light; and determine according to the detection height corresponding to the highest amount of reflected light of each detection point Whether the thickness of the sealant corresponding to each detection point is equal.
  • the detection height is the distance between the detection plane and the carrying platform.
  • the optical sampling unit includes: a laser light source; a first transflective prism arranged in the emission direction of the laser light source; a light receiving element arranged in the first transflective The prism is in the light reflection direction and is electrically connected to the processing unit for receiving the amount of reflected light from each of the detection points; the second transflective prism is arranged on the first transflective edge The light transmission direction of the mirror; the third half mirror prism is arranged in the light reflection direction of the second half mirror; and the objective lens is arranged above the carrier and the third In the light transmission direction of the transflective prism.
  • the detection point is located at the focal point of the objective lens.
  • the sealant detection device further includes an illuminating light source, wherein the third transflective prism is arranged in the exit direction of the illuminating light source.
  • the sealant detection device further includes a charge-coupled device, which is arranged in the light transmission direction of the second half-reflective prism, and is used to measure the highest amount of reflected light at each detection point. At the corresponding detection height, an image of each detection point is collected.
  • the processing unit is electrically connected to the charge coupled device, and is used to calculate the three-dimensional pattern of the sealant surface according to the collected image of each detection point and its corresponding detection height.
  • the present invention also provides a sealant detection method for detecting the thickness of the sealant coated on the substrate, which is characterized in that it includes: respectively facing the frame on the detection planes with different detection heights.
  • the multiple detection points on the glue surface emit lasers and receive the amount of reflected light from each detection point; for the same detection point, compare the amount of reflected light corresponding to the multiple detection heights to determine the highest amount of reflected light; and The detection height corresponding to the highest amount of reflected light of the detection point is judged whether the thickness of the sealant corresponding to each detection point is equal.
  • the sealant detection method further includes: collecting an image of each detection point at a detection height corresponding to the highest amount of reflected light of each detection point; and according to the collection of each detection point The image and its corresponding detection height are calculated to obtain the three-dimensional pattern of the sealant surface.
  • the three-dimensional pattern includes sealant thickness data corresponding to each of the detection points.
  • the present invention can instantly detect whether the thickness of the sealant is consistent, thereby reducing the manufacturing cost of the display panel.
  • Figure 1 is a schematic structural diagram of a sealant detection device provided by an embodiment of the present invention.
  • FIG. 2 is a functional block diagram of the sealant detection device of Figure 1;
  • Fig. 3 is a flowchart of a sealant detection method provided by an embodiment of the present invention.
  • FIG. 1 shows a schematic structural diagram of a sealant detection device provided by an embodiment of the present invention.
  • FIG. 2 shows a functional block diagram of the sealant detection device of FIG. 1.
  • the sealant detection device 1 is used to detect the thickness D of the sealant 3 coated on the substrate 2, and includes: a carrying table 10, an optical sampling unit 11, a moving unit 12 and a processing unit 13.
  • the carrier 10 is used to carry the substrate 2;
  • the moving unit 12 is used to move the optical sampling unit 11 on a plurality of detection planes P with different detection heights H;
  • the optical sampling unit 11 is used to The multiple detection points 30 on the surface emit light L1 and receive the amount of reflected light L2 from each detection point 30.
  • the detection height H is the distance between the detection plane P and the carrying platform 10;
  • the light L1 is laser light.
  • the optical sampling unit 11 includes: a laser light source 110, a light receiving element 111, a first transflective prism 112, a second transflective prism 113, and a third transflective prism 114 And objective 115.
  • the first transflective prism 112 is arranged in the emission direction of the laser light source 110.
  • the light receiving element 111 is arranged in the light reflection direction of the first half mirror 112 and is electrically connected to the processing unit 13 for receiving the amount of reflected light L2 from each detection point 30.
  • the second transflective prism 113 is arranged in the light transmission direction of the first transflective prism 112.
  • the third transflective prism 114 is disposed in the light reflection direction of the second transflective prism 113.
  • the objective lens 115 is provided above the carrying table 10 and in the light transmission direction of the third half mirror 114.
  • the processing unit 13 is configured to: for the same detection point 30, compare the amount of reflected light L2 corresponding to a plurality of detection heights H to determine the highest amount of reflected light; and determine according to the detection height H corresponding to the highest amount of reflected light of each detection point 30 Whether the thickness D of the sealant 3 corresponding to each detection point 30 is equal.
  • the detection point 30 is located at the focal point of the objective lens 115.
  • the sealant detection device 1 further includes an illumination light source 14 and a charge-coupled device (Charge-coupled Device, CCD) 15.
  • the third transflective prism 114 is arranged in the exit direction of the illumination light source 14, and the illumination light source 14 illuminates the surface of the sealant 3 through the third transflective prism 114.
  • the charge-coupled device 15 is arranged in the light transmission direction of the second semi-transparent prism 113, and is used to collect an image of each detection point 30 at a detection height H corresponding to the highest amount of reflected light of each detection point 30.
  • the processing unit 13 is electrically connected to the charge coupled device 15 and is used to calculate the three-dimensional pattern on the surface of the sealant 3 according to the collected images of each detection point 30 and the corresponding detection height H.
  • Fig. 3 is a flowchart of a sealant detection method provided by an embodiment of the present invention. 1 and 2 at the same time, the sealant detection method of the present invention is used to detect the thickness D of the sealant 3 coated on the substrate 2 and includes the following steps:
  • Step S01 respectively on the detection plane P with different detection heights H, emit laser light L1 to a plurality of detection points 30 on the surface of the sealant 3, and receive the amount of reflected light L2 from each detection point 30.
  • Step S02 For the same detection point 30, compare the amount of reflected light L2 corresponding to multiple detection heights H to determine the highest amount of reflected light.
  • Step S03 Determine whether the thickness D of the sealant 3 corresponding to each detection point 30 is equal according to the detection height H corresponding to the highest amount of reflected light of each detection point 30.
  • the processing unit 13 can determine that the thickness D of the sealant 3 is not consistent. Conversely, when the detection heights H in step S03 are the same, the processing unit 13 determines that the thickness D of the sealant 3 is consistent.
  • the sealant detection method further includes the following steps:
  • the image of each detection point 30 is collected; according to the collected image of each detection point 30 and the corresponding detection height H, the three-dimensional pattern on the surface of the sealant 3 is calculated .
  • the three-dimensional pattern includes the thickness D data of the sealant 3 corresponding to each detection point 30.
  • the device and method for detecting sealant provided by the present invention mainly determine whether the thickness of sealant corresponding to each detection point is equal based on the detection height corresponding to the highest reflected light amount of each detection point. In this way, it can be instantly detected whether the thickness of the sealant is consistent, thereby reducing the manufacturing cost of the display panel.
  • the present invention can instantly detect whether the thickness of the sealant is consistent, thereby reducing the manufacturing cost of the display panel.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

一种框胶检测装置（1），用于检测涂布于基板（2）上的框胶（3）厚度（D）。框胶检测装置（1）包括：承载台（10）、光学取样单元（11）、移动单元（12）和处理单元（13）。承载台（10）用于承载基板（2）。光学取样单元（11）用于向框胶（3）表面的多个检测点（30）发射光线（L1），且接收来自各检测点（30）的反射光量（L2）。移动单元（12）用于在多个具有不同检测高度（H）的检测平面（P）上移动光学取样单元（11）。处理单元（13）被配置为：对于同一个检测点（30），比较对应于多个检测高度（H）的反射光量（L2）以决定最高反射光量；以及根据各检测点（30）的最高反射光量所对应的检测高度（H），判断对应于各检测点（30）的框胶厚度（D）是否相等。

Description

框胶检测装置和框胶检测方法 技术领域
本发明涉及框胶检测技术领域，尤其涉及一种检测框胶厚度的装置和方法。
 背景技术
在显示面板的制造过程中，需要进行框胶涂布工艺。然而，框胶会因涂布不均或其内的隔垫物分布不均而造成框胶的厚度不一致。因此，在彩色滤光片和薄膜晶体管基板透过框胶黏合后，显示面板的周边厚度会存在差异，进而造成漏光。
现有的框胶检测装置仅能检测框胶的宽度，而不能检测框胶的厚度，使得显示面板的制作成本增加。
因此，有必要提供一种框胶检测装置和框胶检测方法，以解决上述问题。
 技术问题
现有的框胶检测装置仅能检测框胶的宽度，而不能检测框胶的厚度，使得显示面板的制作成本增加。
 技术解决方案
本发明的目的在于提供一种框胶检测装置和框胶检测方法，可以即时检测出框胶的厚度是否一致，从而降低显示面板的制作成本。
为实现上述目的，本发明提供一种框胶检测装置，用于检测涂布于基板上的框胶厚度，包括：承载台，用于承载所述基板；光学取样单元，用于向所述框胶表面的多个检测点发射光线，且接收来自各所述检测点的反射光量，所述光学取样单元包括：激光光源；第一半透半反稜镜，设于所述激光光源的出射方向上；光接收元件，设于所述第一半透半反稜镜的光反射方向上，且电连接于所述处理单元，用于接收来自各所述检测点的反射光量；第二半透半反稜镜，设于所述第一半透半反稜镜的光透射方向上；第三半透半反稜镜，设于所述第二半透半反稜镜的光反射方向上；以及物镜，设于所述承载台的上方和所述第三半透半反稜镜的光透射方向上；照明光源，其中所述第三半透半反稜镜设于所述照明光源的出射方向上；电荷耦合器件，设于所述第二半透半反稜镜的光透射方向上，且用于在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像；移动单元，用于在多个具有不同检测高度的检测平面上移动所述光学取样单元；以及处理单元，被配置为：对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
在一些实施例中，所述检测高度为所述检测平面和所述承载台之间的距离。
在一些实施例中，对于同一个检测点，当光学取样单元接收到最高反射光量时，所述检测点系位于所述物镜的焦点上。
在一些实施例中，所述处理单元电连接于所述电荷耦合器件，且用于根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
为实现上述目的，本发明还提供一种框胶检测装置，用于检测涂布于基板上的框胶厚度，其特征在于，包括：承载台，用于承载所述基板；光学取样单元，用于向所述框胶表面的多个检测点发射光线，且接收来自各所述检测点的反射光量；移动单元，用于在多个具有不同检测高度的检测平面上移动所述光学取样单元；以及处理单元，被配置为：对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
在一些实施例中，所述检测高度为所述检测平面和所述承载台之间的距离。
在一些实施例中，所述光学取样单元包括：激光光源；第一半透半反稜镜，设于所述激光光源的出射方向上；光接收元件，设于所述第一半透半反稜镜的光反射方向上，且电连接于所述处理单元，用于接收来自各所述检测点的反射光量；第二半透半反稜镜，设于所述第一半透半反稜镜的光透射方向上；第三半透半反稜镜，设于所述第二半透半反稜镜的光反射方向上；以及物镜，设于所述承载台的上方和所述第三半透半反稜镜的光透射方向上。
在一些实施例中，对于同一个检测点，当光学取样单元接收到最高反射光量时，所述检测点系位于所述物镜的焦点上。
在一些实施例中，所述框胶检测装置还包括照明光源，其中所述第三半透半反稜镜设于所述照明光源的出射方向上。
在一些实施例中，所述框胶检测装置还包括电荷耦合器件，设于所述第二半透半反稜镜的光透射方向上，且用于在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像。
在一些实施例中，所述处理单元电连接于所述电荷耦合器件，且用于根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
为实现上述目的，本发明还提供一种框胶检测方法，用于检测涂布于基板上的框胶厚度，其特征在于，包括：分别在具有不同检测高度的检测平面上，向所述框胶表面的多个检测点发射激光，且接收来自各所述检测点的反射光量；对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
在一些实施例中，所述框胶检测方法还包括：在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像；以及根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
在一些实施例中，所述三维图案包括对应于各所述检测点的框胶厚度资料。
 有益效果
本发明可以即时检测出框胶的厚度是否一致，从而降低显示面板的制作成本。
 附图说明
为让本发明的特征以及技术内容能更明显易懂，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考用，并非用来对本发明加以限制。
图1为本发明实施例提供的框胶检测装置的结构示意图;
图2为图1的框胶检测装置的功能框图;
图3为本发明实施例提供的框胶检测方法流程图。
 本发明的实施方式
为了使本发明的目的、技术手段及其效果更加清楚明确，以下将结合附图对本发明作进一步地阐述。应当理解，此处所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例，并不用于限定本发明。
请参考图1，其示出本发明实施例提供的框胶检测装置的结构示意图。同时参考图2，其示出图1的框胶检测装置的功能框图。框胶检测装置1用于检测涂布于基板2上的框胶3的厚度D，其包括：承载台10、光学取样单元11、移动单元12和处理单元13。如图1所示，承载台10用于承载基板2；移动单元12用于在多个具有不同检测高度H的检测平面P上移动光学取样单元11；光学取样单元11用于向框胶3的表面的多个检测点30发射光线L1，且接收来自各检测点30的反射光量L2。在本实施例中，检测高度H为检测平面P和承载台10之间的距离；光线L1为激光。
如图2所示，光学取样单元11包括：激光光源110、光接收元件111、第一半透半反稜镜112、第二半透半反稜镜113、第三半透半反稜镜114和物镜(objective)115。第一半透半反稜镜112设于激光光源110的出射方向上。光接收元件111设于第一半透半反稜镜112的光反射方向上，且电连接于处理单元13，用于接收来自各检测点30的反射光量L2。第二半透半反稜镜113设于第一半透半反稜镜112的光透射方向上。第三半透半反稜镜114设于第二半透半反稜镜113的光反射方向上。物镜115设于承载台10的上方和第三半透半反稜镜114的光透射方向上。
处理单元13被配置为：对于同一个检测点30，比较对应于多个检测高度H的反射光量L2以决定最高反射光量；以及根据各检测点30的最高反射光量所对应的检测高度H，判断对应于各检测点30的框胶3的厚度D是否相等。在本实施例中，对于同一个检测点30，当光学取样单元11接收到最高反射光量时，检测点30系位于物镜115的焦点上。
继续参考图2，框胶检测装置1还包括照明光源14和电荷耦合器件 (Charge-coupled Device，CCD)15。第三半透半反稜镜114设于照明光源14的出射方向上，且照明光源14通过第三半透半反稜镜114照亮框胶3的表面。电荷耦合器件15设于第二半透半反稜镜113的光透射方向上，且用于在各检测点30的最高反射光量所对应的检测高度H上，采集各检测点30的图像。再者，处理单元13电连接于电荷耦合器件15，且用于根据各检测点30的采集图像及其对应的检测高度H，计算得到框胶3表面的三维图案。
图3为本发明实施例提供的框胶检测方法流程图。同时参考图1和图2，本发明框胶检测方法用于检测涂布于基板2上的框胶3的厚度D，包括如下步骤：
步骤S01、分别在具有不同检测高度H的检测平面P上，向框胶3表面的多个检测点30发射激光L1，且接收来自各检测点30的反射光量L2。
步骤S02、对于同一个检测点30，比较对应于多个检测高度H的反射光量L2以决定最高反射光量。
步骤S03、根据各检测点30的最高反射光量所对应的检测高度H，判断对应于各检测点30的框胶3的厚度D是否相等。
由于物镜115的焦距为固定，当步骤S03中的多个检测高度H显示不相同，处理单元13将可判断框胶3的厚度D为不一致。反之，当步骤S03中的各个检测高度H显示相同，处理单元13则判断框胶3的厚度D为一致。
在一些实施例中，所述框胶检测方法还包括如下步骤：
在各检测点30的最高反射光量所对应的检测高度H上，采集各检测点30的图像；根据各检测点30的采集图像及其对应的检测高度H，计算得到框胶3表面的三维图案。具体地，所述三维图案包括对应于各检测点30的框胶3的厚度D资料。通过上述步骤，可以图案呈现出框胶3的整体厚度D。
综上所述，本发明提供的一种用于检测框胶的装置和方法,主要根据各检测点的最高反射光量所对应的检测高度，来判断对应于各检测点的框胶厚度是否相等，如此可以即时检测出框胶的厚度是否一致，从而降低显示面板的制作成本。
应当理解的是，本发明的应用不限于上述的举例，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，所有这些改进和变换都应属于本发明所附权利要求的保护范围。
 工业实用性
本发明可以即时检测出框胶的厚度是否一致，从而降低显示面板的制作成本。

Claims (14)

  1. 一种框胶检测装置，用于检测涂布于基板上的框胶厚度，包括：
    承载台，用于承载所述基板；
    光学取样单元，用于向所述框胶表面的多个检测点发射光线，且接收来自各所述检测点的反射光量，所述光学取样单元包括：
    激光光源；
    第一半透半反稜镜，设于所述激光光源的出射方向上；
    光接收元件，设于所述第一半透半反稜镜的光反射方向上，且电连接于所述处理单元，用于接收来自各所述检测点的反射光量；
    第二半透半反稜镜，设于所述第一半透半反稜镜的光透射方向上；
    第三半透半反稜镜，设于所述第二半透半反稜镜的光反射方向上；以及
    物镜，设于所述承载台的上方和所述第三半透半反稜镜的光透射方向上；
    照明光源，其中所述第三半透半反稜镜设于所述照明光源的出射方向上；
    电荷耦合器件，设于所述第二半透半反稜镜的光透射方向上，且用于在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像；
    移动单元，用于在多个具有不同检测高度的检测平面上移动所述光学取样单元；以及
    处理单元，被配置为：
    对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及
    根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
  2. 如权利要求1所述的框胶检测装置，其中，所述检测高度为所述检测平面和所述承载台之间的距离。
  3. 如权利要求1所述的框胶检测装置，其中，对于同一个检测点，当光学取样单元接收到最高反射光量时，所述检测点系位于所述物镜的焦点上。
  4. 如权利要求1所述的框胶检测装置，其中，所述处理单元电连接于所述电荷耦合器件，且用于根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
  5. 一种框胶检测装置，用于检测涂布于基板上的框胶厚度，包括：
    承载台，用于承载所述基板；
    光学取样单元，用于向所述框胶表面的多个检测点发射光线，且接收来自各所述检测点的反射光量；
    移动单元，用于在多个具有不同检测高度的检测平面上移动所述光学取样单元；以及
    处理单元，被配置为：
    对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及
    根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
  6. 如权利要求5所述的框胶检测装置，其中，所述检测高度为所述检测平面和所述承载台之间的距离。
  7. 如权利要求5所述的框胶检测装置，其中，所述光学取样单元包括：
    激光光源；
    第一半透半反稜镜，设于所述激光光源的出射方向上；
    光接收元件，设于所述第一半透半反稜镜的光反射方向上，且电连接于所述处理单元，用于接收来自各所述检测点的反射光量；
    第二半透半反稜镜，设于所述第一半透半反稜镜的光透射方向上；
    第三半透半反稜镜，设于所述第二半透半反稜镜的光反射方向上；以及
    物镜，设于所述承载台的上方和所述第三半透半反稜镜的光透射方向上。
  8. 如权利要求7所述的框胶检测装置，其中，对于同一个检测点，当光学取样单元接收到最高反射光量时，所述检测点系位于所述物镜的焦点上。
  9. 如权利要求7所述的框胶检测装置，还包括照明光源，其中所述第三半透半反稜镜设于所述照明光源的出射方向上。
  10. 如权利要求7所述的框胶检测装置，还包括电荷耦合器件，设于所述第二半透半反稜镜的光透射方向上，且用于在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像。
  11. 如权利要求10所述的框胶检测装置，其中，所述处理单元电连接于所述电荷耦合器件，且用于根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
  12. 一种框胶检测方法，用于检测涂布于基板上的框胶厚度，包括：
    分别在具有不同检测高度的检测平面上，向所述框胶表面的多个检测点发射激光，且接收来自各所述检测点的反射光量；
    对于同一个检测点，比较对应于所述多个检测高度的反射光量以决定最高反射光量；以及
    根据各所述检测点的最高反射光量所对应的检测高度，判断对应于各所述检测点的框胶厚度是否相等。
  13. 如权利要求12所述的框胶检测方法，还包括：
    在各所述检测点的最高反射光量所对应的检测高度上，采集各所述检测点的图像；以及
    根据各所述检测点的采集图像及其对应的检测高度，计算得到所述框胶表面的三维图案。
  14. 如权利要求13所述的框胶检测方法，其中，所述三维图案包括对应于各所述检测点的框胶厚度资料。
PCT/CN2019/083380 2019-04-04 2019-04-19 框胶检测装置和框胶检测方法 Ceased WO2020199257A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910270556.5 2019-04-04
CN201910270556.5A CN110044277B (zh) 2019-04-04 2019-04-04 框胶检测装置和框胶检测方法

Publications (1)

Publication Number Publication Date
WO2020199257A1 true WO2020199257A1 (zh) 2020-10-08

Family

ID=67276238

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/083380 Ceased WO2020199257A1 (zh) 2019-04-04 2019-04-19 框胶检测装置和框胶检测方法

Country Status (2)

Country Link
CN (1) CN110044277B (zh)
WO (1) WO2020199257A1 (zh)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010028460A1 (en) * 1996-01-23 2001-10-11 Maris Humphrey J. Optical stress generator and detector
US20060163503A1 (en) * 2005-01-21 2006-07-27 Yuta Urano Method for inspecting pattern defect and device for realizing the same
CN203116699U (zh) * 2013-02-05 2013-08-07 南京信息工程大学 用于纳米厚度薄膜动态观测的偏振光显微系统
CN203454973U (zh) * 2013-09-18 2014-02-26 京东方科技集团股份有限公司 一种封框胶检测装置以及显示面板成盒设备
CN109540004A (zh) * 2018-11-29 2019-03-29 中国科学院微电子研究所 一种光学检测系统及其检测方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5781303A (en) * 1997-08-29 1998-07-14 Becton Dickinson And Company Method for determining the thickness of an optical sample
US6052191A (en) * 1998-10-13 2000-04-18 Northrop Grumman Corporation Coating thickness measurement system and method of measuring a coating thickness
CN1808056B (zh) * 2001-09-21 2011-09-14 Kmac株式会社 利用二维检测器测量薄膜特性的装置及测量方法
CN102301200A (zh) * 2009-02-02 2011-12-28 三鹰光器株式会社 非接触表面形状测量方法及其装置
CN101650169A (zh) * 2009-07-17 2010-02-17 山东富美科技有限公司 一种刮刀平整度检测系统
CN102778202B (zh) * 2012-03-23 2016-01-27 北京京东方光电科技有限公司 一种膜厚测量装置及方法
TWI571628B (zh) * 2015-11-06 2017-02-21 艾斯邁科技股份有限公司 基板檢測裝置及其方法
CN108917626A (zh) * 2018-08-01 2018-11-30 深圳中科飞测科技有限公司 一种检测装置及检测方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010028460A1 (en) * 1996-01-23 2001-10-11 Maris Humphrey J. Optical stress generator and detector
US20060163503A1 (en) * 2005-01-21 2006-07-27 Yuta Urano Method for inspecting pattern defect and device for realizing the same
CN203116699U (zh) * 2013-02-05 2013-08-07 南京信息工程大学 用于纳米厚度薄膜动态观测的偏振光显微系统
CN203454973U (zh) * 2013-09-18 2014-02-26 京东方科技集团股份有限公司 一种封框胶检测装置以及显示面板成盒设备
CN109540004A (zh) * 2018-11-29 2019-03-29 中国科学院微电子研究所 一种光学检测系统及其检测方法

Also Published As

Publication number Publication date
CN110044277A (zh) 2019-07-23
CN110044277B (zh) 2020-11-24

Similar Documents

Publication Publication Date Title
US5790247A (en) Technique for determining defect positions in three dimensions in a transparent structure
CN102954970B (zh) 用于检测玻璃衬底的表面缺陷的设备
WO1997013140A9 (en) Technique for determining defect positions in three dimensions in a transparent structure
TWI817991B (zh) 光學系統，照明模組及自動光學檢測系統
CN203502360U (zh) 基板检查装置
CN115015112A (zh) 一种缺陷检测装置和方法
JP2006071284A (ja) ガラス基板欠陥の表裏識別方法
WO2004005902A1 (ja) 光学的測定方法およびその装置
JP2011523701A (ja) 基板の品質検査装置及びその検査方法
KR20130143226A (ko) 도광판 검사장치
WO2020199257A1 (zh) 框胶检测装置和框胶检测方法
JP2005241586A (ja) 光学フィルムの検査装置および光学フィルムの検査方法
TW202200995A (zh) 孔洞檢測系統以及孔洞檢測方法
KR20140012250A (ko) 라인 빔을 이용한 유리기판 결함 측정 장치 및 측정 방법
JP4664463B2 (ja) 基板検査装置
JP2001004348A (ja) ガラス容器外周面の凹凸検査方法及び装置
JP2002131242A (ja) 表面検査用撮影装置
JPH10111252A (ja) ガラス板の欠点検出装置
CN105938107A (zh) 一种自动光学检测聚焦定位方法
JP7531233B2 (ja) カラー光学検査装置及びこれを含むシステム
JPH0682386A (ja) 塗装シートの欠陥検査装置
KR101745117B1 (ko) 고정확도 광전기 유리 기판 실시간 감별 장치 및 그 방법
TWI405962B (zh) A stain detection method and a device thereof
KR102737491B1 (ko) 검사장비의 광학계
CN114184624B (zh) 一种透明介质薄层的缺陷检测方法和装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19923430

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19923430

Country of ref document: EP

Kind code of ref document: A1