WO2020179988A1 - Epoxy resin composition - Google Patents

Epoxy resin composition Download PDF

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Publication number
WO2020179988A1
WO2020179988A1 PCT/KR2019/016955 KR2019016955W WO2020179988A1 WO 2020179988 A1 WO2020179988 A1 WO 2020179988A1 KR 2019016955 W KR2019016955 W KR 2019016955W WO 2020179988 A1 WO2020179988 A1 WO 2020179988A1
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Prior art keywords
epoxy resin
resin composition
weight
curing
present
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PCT/KR2019/016955
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French (fr)
Korean (ko)
Inventor
공병선
탁상용
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주식회사 케이씨씨
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Publication of WO2020179988A1 publication Critical patent/WO2020179988A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4284Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof together with other curing agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • C08G59/4246Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof polymers with carboxylic terminal groups
    • C08G59/4269Macromolecular compounds obtained by reactions other than those involving unsaturated carbon-to-carbon bindings
    • C08G59/4276Polyesters
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/62Alcohols or phenols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/62Alcohols or phenols
    • C08G59/621Phenols
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic

Definitions

  • the present invention relates to an epoxy resin composition for sealing semiconductor devices having low dielectric properties.
  • the semiconductor encapsulant is a material that protects the internal circuit of the semiconductor from external impacts and contaminants, and semiconductor encapsulants used in mobile devices in recent years not only provide basic properties such as heat dissipation and flow, but also reduce transmission loss when transmitting high-frequency signals. It is required to show a low dielectric constant (Dk) and a dielectric loss tangent (Df) in order to reduce, and related studies are being actively conducted.
  • Dk dielectric constant
  • Df dielectric loss tangent
  • Korean Patent Application Laid-Open No. 10-2014-0127957 discloses a low-dielectric epoxy resin composition formed by reacting a phenol resin and epihalohydrin under a base catalyst.
  • the epoxy resin composition does not satisfy the low dielectric constant (Dk) and dielectric loss tangent (Df) characteristics required by the recent mobile communication technology, and thus the demand for a composition for encapsulating semiconductor devices having low dielectric properties continues. There is a situation.
  • the present invention provides an epoxy resin composition having low dielectric properties and a semiconductor device encapsulated using the same.
  • the present invention provides an epoxy resin composition comprising an epoxy resin, a curing agent and a filler, and the curing agent includes an ester-based resin.
  • the epoxy resin composition according to the present invention secures a low dielectric constant and a dielectric loss tangent, so that when applied to a semiconductor device, it minimizes transmission loss during high-frequency signal transmission and enables fast information transmission.
  • the epoxy resin composition according to the present invention can effectively protect the semiconductor internal circuit by having a low moisture absorption rate.
  • the epoxy resin composition according to the present invention includes an epoxy resin, a curing agent and a filler, and the curing agent includes an ester-based resin.
  • the epoxy resin composition according to the present invention may further include a curing accelerator and additives commonly used in the art, if necessary.
  • a curing accelerator and additives commonly used in the art, if necessary.
  • the epoxy resin composition according to the present invention contains an epoxy resin as a main resin.
  • the epoxy resin is cured by reacting with a curing agent, and has a three-dimensional network structure after curing, thereby imparting a property of strong and firm adhesion to an adherend and heat resistance.
  • an epoxy resin commonly used in a semiconductor device encapsulant may be used without limitation.
  • usable epoxy resins include bisphenol A type epoxy resin, cresol novolak type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, naphthalene type epoxy resin, anthracene epoxy resin, biphenyl type epoxy resin, Tetramethyl biphenyl type epoxy resin, phenol novolac type epoxy resin, bisphenol A novolac type epoxy resin, bisphenol S novolac type epoxy resin, biphenyl novolac type epoxy resin, naphthol novolac type epoxy resin, naphthol phenol co-condensation furnace Rock type epoxy resin, naphthol cresol co-condensed novolak type epoxy resin, aromatic hydrocarbon formaldehyde resin modified phenol resin type epoxy resin, triphenyl methane type epoxy resin, tetraphenyl ethane type epoxy resin, dicyclopentadiene type epoxy resin, dicyclo At least one of a pent
  • the epoxy equivalent (EEW) of the epoxy resin is 100 to 400 g/eq, for example 150 to 300 g/eq, a softening point of 30 to 150°C, for example 40 to 130°C, and a viscosity (based on 150°C) of 0.01 To 30 poise, for example 0.02 to 20 poise. Since such an epoxy resin has a relatively low viscosity characteristic, flowability can be secured even if a high content of a filler is included, and kneading is easy.
  • the epoxy equivalent of the epoxy resin is less than 100 g/eq, flowability may be excessively decreased, and if it exceeds 400 g/eq, the glass transition temperature (Tg) may decrease and the coefficient of thermal expansion may increase. In addition, when the softening point and viscosity of the epoxy resin are out of the above range, dispersibility may be reduced.
  • the epoxy resin may be included in 1 to 20% by weight, for example, 1 to 10% by weight based on the total weight of the epoxy resin composition. If the content of the epoxy resin is less than 1% by weight, adhesiveness, electrical insulation, flowability, and moldability may be deteriorated, and if the content exceeds 20% by weight, the reliability of the semiconductor becomes poor due to the increase in moisture absorption, and Heat dissipation characteristics may be deteriorated due to a decrease in content.
  • the epoxy resin composition according to the present invention includes a curing agent.
  • the curing agent reacts with the epoxy resin to promote curing of the composition.
  • the epoxy resin composition according to the present invention includes an ester-based resin as a curing agent.
  • the ester-based resin can be used without particular limitation as long as the main chain of the constituent molecule is a resin containing an ester bond.
  • the ester-based resin may be prepared by polymerizing a carboxylic acid compound and a glycol compound or a phenol compound under a catalyst and a solvent.
  • the kind of the carboxylic acid compound is not particularly limited, for example, terephthalic acid, isophthalic acid, 1,4-cyclohexane dicarboxylic acid, or 1 selected from the group consisting of dipic acid, sebacic acid, phthalic anhydride, trimellitic anhydride, benzoic acid, tetrahydrophthalic anhydride Species or mixtures thereof may be used.
  • the type of the glycol compound is not particularly limited, for example, ethylene glycol, propylene glycol, 1,2-butylene glycol, and neopentyl glycol. ), 1,6-nucleic acid diol (1,6-Haxanediol), glycerol (Glycerol) one selected from the group consisting of, or a mixture thereof may be used.
  • the kind of the phenolic compound is not particularly limited, and for example, phenol, cresol, pt-butylphenol, 1-Naphthol, 2-Naphthol, cate Cole (Catechol), resorcinol (Resorcinol), hydroquinone (Hydroquinone) one selected from the group consisting of or a mixture thereof may be used.
  • the hydroxy group (OH) equivalent of the ester-based resin may be 50 to 400 g/eq, for example 100 to 300 g/eq, and the softening point may be 25 to 130°C, for example 50 to 100°C, and viscosity (Based on 150° C.) may be 0.1 to 3 poise, for example, 0.3 to 1.5 poise.
  • the hydroxy group (OH) equivalent of the ester-based resin exceeds 400 g/eq, the curing density decreases after the curing reaction and reliability may decrease, and when it is less than 50 g/eq, the curing reaction rate increases and the gel The incidence rate is high and the stability may be reduced.
  • the softening point exceeds 130° C.
  • the viscosity increases and flowability decreases, resulting in poor moldability, and when the softening point is less than 25° C., dispersibility may decrease and the yield may decrease due to aggregation.
  • the viscosity exceeds 3 poise, flowability may decrease, resulting in poor moldability, and if the viscosity is less than 0.1 poise, dispersibility may decrease and yield may decrease due to aggregation.
  • the epoxy resin composition according to the present invention may further include a phenolic resin as a curing agent.
  • phenolic resins that can be used include one or more selected from phenol novolak-type resins, cresol novolac-type resins, phenol alkyl resins, phenol xylok-type resins, and various novolak-type resins synthesized from bisphenol A. have.
  • the hydroxy group (OH) equivalent of the phenolic resin is 50 to 200 g/eq, for example 80 to 150 g/eq
  • the softening point is 50 to 150°C, for example 60 to 100°C
  • the viscosity (based on 150°C) is 0.5 to 2.5 poise, for example 1.0 to 2.0 poise.
  • the blending ratio of the ester-based resin and the phenol-based resin may be a weight ratio of 1: 0.1 to 5, for example, 1: 0.1 to 3.
  • the blending ratio of the ester-based resin and the phenol-based resin satisfies the above-described range, corrosion resistance and adhesion can be improved, and a low dielectric constant and dielectric loss tangent can be secured.
  • the curing agent may be included in 1 to 20% by weight, for example, 1 to 10% by weight based on the total weight of the epoxy resin composition. If the content of the curing agent is less than 1% by weight, problems may occur in curability and moldability, and if it exceeds 20% by weight, reliability may decrease due to an increase in moisture absorption, and strength may be relatively lowered.
  • the epoxy resin composition according to the present invention includes a filler.
  • the filler serves to improve heat dissipation and strength of the encapsulant and lower the moisture absorption.
  • inorganic fillers such as silica, silica nitride, alumina, aluminum nitride, and boron nitride may be used alone or in combination of two or more.
  • the epoxy resin composition according to the present invention may include spherical silica as a filler, and for example, spherical silica having an average particle diameter of 5 to 30 ⁇ m may be used.
  • spherical silica has the above-described average particle size distribution, it has sufficient workability and excellent heat dissipation properties can be secured.
  • the filler may be included in an amount of 70 to 95% by weight, for example, 80 to 95% by weight, based on the total weight of the epoxy resin composition. If the content of the filler is less than 70% by weight, strength may decrease due to an increase in moisture absorption and adhesion may decrease, and if the content of the filler exceeds 95% by weight, processability may be poor due to increased viscosity and lower flowability.
  • the epoxy resin composition according to the present invention may include a curing accelerator.
  • the curing accelerator plays a role in accelerating the curing reaction and improving the cycle of high temperature reliability and continuous workability.
  • the curing accelerator used in the present invention may be used without particular limitation as long as it accelerates the curing reaction of the curing agent.
  • the curing accelerator is 2-methylimidazole, 2-ethyl-4-methylimidazole, 2- Imidazole compounds such as phenylimidazole and (4-methyl-2-phenyl-1H-imidazol-5-yl)methanol; Amine compounds such as triethylamine, tributylamine, and benzyldimethylamine; Tertiary amine compounds such as 2-(dimethylaminomethyl)phenol, 2,4,6-tris(dimethylaminomethyl)phenol, and 1,8-diazabicyclo(5,4,0)undec-7-ene; And phenylphosphine, diphenylphosphine, triphenylphosphine, tributylphosphine, and tri(p-methylphenyl)phosphine.
  • the curing accelerator may be included in an amount of 0.01 to 5% by weight, for example, 0.01 to 2% by weight, based on the total weight of the epoxy resin composition. If the content of the curing accelerator is less than 0.01% by weight, curability may decrease, and if the content exceeds 5% by weight, flowability may decrease due to overcuring.
  • the epoxy resin composition according to the present invention may optionally further include conventional additives known in the art in addition to the above-described components as necessary.
  • additives that can be used in the present invention include at least one selected from a coupling agent, a colorant, an antifoaming agent, a leveling agent, an adhesion improving agent, a flame retardant, a light absorbing agent, a drying agent, a desiccant, and a wax.
  • the coupling agent may be a silane-based compound such as mercaptoalkylakoxysilane or gammaglydoxypropyltrimethoxysilane.
  • the colorant conventional colorants such as carbon black, bengala, organic dyes, inorganic dyes, etc. known in the art may be used alone or in combination of two or more.
  • the wax paraffin wax, natural wax, synthetic wax, or a mixture thereof may be used. Carnauba wax or the like may be used as the natural wax, and polyethylene wax may be used as the synthetic wax.
  • the content of the additive is not particularly limited, and may be 0.1 to 5% by weight based on the total weight of the epoxy resin composition.
  • the method for preparing the epoxy resin composition of the present invention is not particularly limited, and may be prepared using a method known in the art.
  • a melt-kneading method using a half-bari mixer, a kneader, a roll, a single-screw or twin-screw extruder, a conicaler, etc. may be used.
  • melt-mixing at a temperature of 100 to 130°C using a heat kneader cooling to room temperature, pulverizing into a powder state, and blending can be prepared.
  • the present invention provides a semiconductor device sealed by using the epoxy resin composition as described above.
  • the semiconductor device to which the composition of the present invention can be applied refers to an electronic circuit (integrated circuit) made by integrating and wiring a transistor, a diode, a resistor, a capacitor, etc. on a semiconductor chip or a substrate.
  • the method of encapsulating and manufacturing a semiconductor device using the epoxy resin composition of the present invention is not particularly limited, and may be manufactured by encapsulating a semiconductor device by a molding method such as a transfer mold, a compression mold, or an injection mold.
  • each component was blended using a container mixer, followed by melt mixing, cooling, pulverization, and blending processes, and then tableted to a predetermined size to prepare the epoxy resin compositions of Examples 1-6.
  • the unit used in Table 1 below is weight percent.
  • Epoxy resin 4,4-bis(2,3-epoxypropoxy)-3,3,5,5-tetramethyl(1,1-biphenyl) (YK-4000HK, MITSUBISHI CHEMICAL, Epoxy equivalent: 192 g /eq, softening point: 109 °C, viscosity (at 150 °C): 0.2 poise)
  • Curing agent 1-1 ester resin (OH equivalent: 209 g/eq, softening point: 78 °C, viscosity (150 °C): 0.6 poise)
  • Curing agent 1-2 ester resin (OH equivalent: 185 g/eq, softening point: 135 °C, viscosity (150 °C): 1.8 poise)
  • Curing agent 1-3 ester resin (OH equivalent: 169 g/eq, softening point: 152 °C, viscosity (150 °C): 1.6 poise)
  • Curing agent 2 phenolic resin (Phenol polymer with hydroxybenzaldehyde, MEH-7500-3S, Meiwa Kasei, OH equivalent: 103 g/eq, softening point: 83 °C, viscosity (150 °C): 1.4 poise)
  • Coupling agent 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane (KBM-403, ShinEtsu Corporation, specific gravity (25 °C): 1.070, flash point: 135 °C, refractive index (25 °C): 1.429, boiling point ( °C/mmHg): 120/2)
  • Colorant carbon black (MA-600, MITSUBISHI CHEMICAL, maximum cut size: 20 nm)
  • Wax polyethylene wax (Wax E, Clariant, Drop Point: 84 °C, acid value: 2 to 7 mgKOH/g)
  • Curing accelerator (4-methyl-2-phenyl-1H-imidazol-5-yl) methanol (2P4MHZ-PW, Shikoku company, melting point: 240 °C, molecular weight: 152 g/mol)
  • the epoxy resin composition prepared according to Example 1-6 and Comparative Example 1-4 was molded by transfer molding at 175°C for 70 seconds using a heat transfer molding machine to produce a 33 mm in diameter and 2.5 mm high package, which was then 175°C. After 4 hours post-cure (PMC: post mold cure) was cooled to room temperature.
  • PMC post mold cure
  • the moisture absorption was evaluated by comparing the weight of the specimen before and after leaving it for 24 hours in PCT conditions (121°C, 2 atm, 100%RH).
  • a small amount of the epoxy resin composition prepared according to Example 1-6 and Comparative Example 1-4 was spread widely and evenly on a gel timer, and the time required for gelation of the product was measured.
  • the epoxy resin composition of Example 1-6 according to the present invention exhibited excellent effects in all measured physical properties.
  • the epoxy resin composition of Example 1-6 has a lower dielectric constant and dielectric loss tangent than the epoxy resin composition of Comparative Example 1-4 without using the ester-based resin according to the present invention, and can minimize the moisture absorption rate. It could be confirmed that there is.
  • the epoxy resin composition according to the present invention secures a low dielectric constant and a dielectric loss tangent, so that when applied to a semiconductor device, it minimizes transmission loss during high-frequency signal transmission and enables fast information transmission.
  • the epoxy resin composition according to the present invention can effectively protect the semiconductor internal circuit by having a low moisture absorption rate.

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  • Chemical Kinetics & Catalysis (AREA)
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Abstract

The present invention relates to an epoxy resin composition for sealing semiconductor devices, the epoxy resin composition having low dielectric properties.

Description

에폭시 수지 조성물Epoxy resin composition
본 발명은 낮은 유전특성을 갖는 반도체 소자 봉지용 에폭시 수지 조성물에 관한 것이다.The present invention relates to an epoxy resin composition for sealing semiconductor devices having low dielectric properties.
모바일 기기 및 사물인터넷(Internet of Things, IoT) 분야의 성장과 함께, 이에 기반한 이동통신 기술 규격 또한 급격한 발전을 해오고 있다. 최근 5G 통신 시대로 접어들면서, 고용량의 정보를 빠르고 정확하게 전달하기 위해 필요한 제반 기술에 대한 연구 개발이 지속적으로 이루어지고 있다. 기존 LTE 또는 4G 통신 시대에는 반도체 패키지용 회로기판(PCB)을 구성하는 소재의 개량이 중심이 되었으나, 5G 통신 시대로 접어들면서 패키지용 회로기판뿐만 아니라 반도체 봉지 조성물의 개량까지 요구되고 있다.Along with the growth of the mobile device and Internet of Things (IoT) fields, mobile communication technology standards based on this have also rapidly developed. With the recent entering of the 5G communication era, research and development on various technologies required to quickly and accurately deliver high-capacity information are continuously being conducted. In the existing LTE or 4G communication era, the improvement of materials constituting the semiconductor package circuit board (PCB) has been centered, but as the 5G communication era enters, not only the package circuit board but also the improvement of the semiconductor encapsulation composition is required.
반도체 봉지재는 반도체 내부 회로를 외부 충격 및 오염물질로부터 보호하는 역할을 하는 재료로서, 최근 모바일 기기에 사용되는 반도체 봉지재는 방열성 및 흐름성 등 기본적으로 요구되는 물성뿐만 아니라, 고주파 신호 전달 시 전송 손실을 줄이기 위해 낮은 유전상수(Dk) 및 유전정접(Df)을 나타낼 것이 요구되며, 관련 연구가 활발히 이루어지고 있다.The semiconductor encapsulant is a material that protects the internal circuit of the semiconductor from external impacts and contaminants, and semiconductor encapsulants used in mobile devices in recent years not only provide basic properties such as heat dissipation and flow, but also reduce transmission loss when transmitting high-frequency signals. It is required to show a low dielectric constant (Dk) and a dielectric loss tangent (Df) in order to reduce, and related studies are being actively conducted.
일례로, 한국 공개특허 10-2014-0127957호는 페놀 수지 및 에피할로히드린을 염기촉매 하에서 반응시켜 형성된 저유전성 에폭시 수지 조성물을 개시하고 있다. 그러나 상기 에폭시 수지 조성물은 최근 이동통신 기술이 요구하는 수준의 낮은 유전상수(Dk) 및 유전정접(Df) 특성을 만족시키지 못하고 있어, 낮은 유전특성을 갖는 반도체 소자 봉지용 조성물에 대한 요구가 계속되고 있는 실정이다.For example, Korean Patent Application Laid-Open No. 10-2014-0127957 discloses a low-dielectric epoxy resin composition formed by reacting a phenol resin and epihalohydrin under a base catalyst. However, the epoxy resin composition does not satisfy the low dielectric constant (Dk) and dielectric loss tangent (Df) characteristics required by the recent mobile communication technology, and thus the demand for a composition for encapsulating semiconductor devices having low dielectric properties continues. There is a situation.
본 발명은 낮은 유전특성을 갖는 에폭시 수지 조성물 및 이를 이용하여 봉지된 반도체 소자를 제공한다.The present invention provides an epoxy resin composition having low dielectric properties and a semiconductor device encapsulated using the same.
본 발명은 에폭시 수지, 경화제 및 충진제를 포함하고, 상기 경화제는 에스터계 수지를 포함하는 에폭시 수지 조성물을 제공한다.The present invention provides an epoxy resin composition comprising an epoxy resin, a curing agent and a filler, and the curing agent includes an ester-based resin.
본 발명에 따른 에폭시 수지 조성물은 낮은 유전상수 및 유전정접을 확보함으로써, 반도체 소자에 적용될 경우 고주파 신호 전달 시 전송 손실을 최소화함과 동시에 빠른 정보 전달을 가능하게 한다. 또한 본 발명에 따른 에폭시 수지 조성물은 낮은 흡습율을 가짐으로써 반도체 내부 회로를 효과적으로 보호할 수 있다.The epoxy resin composition according to the present invention secures a low dielectric constant and a dielectric loss tangent, so that when applied to a semiconductor device, it minimizes transmission loss during high-frequency signal transmission and enables fast information transmission. In addition, the epoxy resin composition according to the present invention can effectively protect the semiconductor internal circuit by having a low moisture absorption rate.
이하, 본 발명에 대하여 설명한다. 그러나, 하기 내용에 의해서만 한정되는 것은 아니며, 필요에 따라 각 구성요소가 다양하게 변형되거나 선택적으로 혼용될 수 있다. 따라서, 본 발명의 사상 및 기술범위에 포함되는 모든 변경, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다.Hereinafter, the present invention will be described. However, it is not limited only by the following contents, and each component may be variously modified or selectively used as necessary. Therefore, it is to be understood as including all changes, equivalents, and substitutes included in the spirit and scope of the present invention.
<에폭시 수지 조성물><Epoxy resin composition>
본 발명에 따른 에폭시 수지 조성물은 에폭시 수지, 경화제 및 충진제를 포함하고, 상기 경화제는 에스터계 수지를 포함한다. 또한 본 발명에 따른 에폭시 수지 조성물은 필요에 따라 경화 촉진제 및 당 분야에서 통상적으로 사용되는 첨가제를 더 포함할 수 있다. 이하 본 발명의 에폭시 수지 조성물의 조성을 살펴보면 다음과 같다.The epoxy resin composition according to the present invention includes an epoxy resin, a curing agent and a filler, and the curing agent includes an ester-based resin. In addition, the epoxy resin composition according to the present invention may further include a curing accelerator and additives commonly used in the art, if necessary. Hereinafter, the composition of the epoxy resin composition of the present invention will be described.
에폭시 수지Epoxy resin
본 발명에 따른 에폭시 수지 조성물은 에폭시 수지를 주(主) 수지로서 포함한다. 상기 에폭시 수지는 경화제와 반응하여 경화되며, 경화 후 삼차원 망상 구조를 가짐으로써 피착제에 강하고 견고하게 접착하는 성질과 내열성을 부여한다.The epoxy resin composition according to the present invention contains an epoxy resin as a main resin. The epoxy resin is cured by reacting with a curing agent, and has a three-dimensional network structure after curing, thereby imparting a property of strong and firm adhesion to an adherend and heat resistance.
상기 에폭시 수지로는 반도체 소자 봉지재에 통상적으로 사용되는 에폭시 수지를 제한 없이 사용할 수 있다. 사용 가능한 에폭시 수지의 비제한적인 예로는 비스페놀 A형 에폭시 수지, 크레졸 노볼락형 에폭시 수지, 비스페놀 F형 에폭시 수지, 비스페놀 S형 에폭시 수지, 나프탈렌형 에폭시 수지, 안트라센 에폭시 수지, 비페닐형 에폭시 수지, 테트라메틸 비페닐형 에폭시 수지, 페놀 노볼락형 에폭시 수지, 비스페놀 A 노볼락형 에폭시 수지, 비스페놀 S 노볼락형 에폭시 수지, 비페닐 노볼락형 에폭시 수지, 나프톨 노볼락형 에폭시 수지, 나프톨 페놀 공축 노볼락형 에폭시 수지, 나프톨 크레졸 공축 노볼락형 에폭시 수지, 방향족 탄화수소 포름알데히드 수지 변형 페놀 수지형 에폭시 수지, 트리페닐 메탄형 에폭시 수지, 테트라페닐 에탄형 에폭시 수지, 디사이클로펜타디엔형 에폭시 수지, 디사이클로펜타디엔 페놀 부가반응형 에폭시 수지, 페놀 아랄킬형 에폭시 수지, 다관능성 페놀 수지, 나프톨 아랄킬형 에폭시 수지 중 1종 이상을 들 수 있으나, 반드시 이에 한정되는 것은 아니다.As the epoxy resin, an epoxy resin commonly used in a semiconductor device encapsulant may be used without limitation. Non-limiting examples of usable epoxy resins include bisphenol A type epoxy resin, cresol novolak type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, naphthalene type epoxy resin, anthracene epoxy resin, biphenyl type epoxy resin, Tetramethyl biphenyl type epoxy resin, phenol novolac type epoxy resin, bisphenol A novolac type epoxy resin, bisphenol S novolac type epoxy resin, biphenyl novolac type epoxy resin, naphthol novolac type epoxy resin, naphthol phenol co-condensation furnace Rock type epoxy resin, naphthol cresol co-condensed novolak type epoxy resin, aromatic hydrocarbon formaldehyde resin modified phenol resin type epoxy resin, triphenyl methane type epoxy resin, tetraphenyl ethane type epoxy resin, dicyclopentadiene type epoxy resin, dicyclo At least one of a pentadiene phenol addition reaction type epoxy resin, a phenol aralkyl type epoxy resin, a polyfunctional phenol resin, and a naphthol aralkyl type epoxy resin may be mentioned, but is not limited thereto.
상기 에폭시 수지의 에폭시 당량(EEW)은 100 내지 400 g/eq, 예를 들어 150 내지 300 g/eq, 연화점은 30 내지 150℃, 예를 들어 40 내지 130℃, 점도(150 ℃ 기준)는 0.01 내지 30 poise, 예를 들어 0.02 내지 20 poise일 수 있다. 이러한 에폭시 수지는 상대적으로 낮은 점도 특성을 가지므로, 고함량의 충진제가 포함되더라도 흐름성을 확보할 수 있으며, 혼련이 용이하다.The epoxy equivalent (EEW) of the epoxy resin is 100 to 400 g/eq, for example 150 to 300 g/eq, a softening point of 30 to 150°C, for example 40 to 130°C, and a viscosity (based on 150°C) of 0.01 To 30 poise, for example 0.02 to 20 poise. Since such an epoxy resin has a relatively low viscosity characteristic, flowability can be secured even if a high content of a filler is included, and kneading is easy.
상기 에폭시 수지의 에폭시 당량이 100 g/eq 미만이면 과도하게 흐름성이 떨어질 수 있고, 400 g/eq를 초과하면 유리전이온도(Tg)가 떨어지고 열팽창계수가 증가할 수 있다. 또한, 상기 에폭시 수지의 연화점 및 점도가 상기 범위를 벗어나면 분산성이 저하될 수 있다. If the epoxy equivalent of the epoxy resin is less than 100 g/eq, flowability may be excessively decreased, and if it exceeds 400 g/eq, the glass transition temperature (Tg) may decrease and the coefficient of thermal expansion may increase. In addition, when the softening point and viscosity of the epoxy resin are out of the above range, dispersibility may be reduced.
상기 에폭시 수지는 에폭시 수지 조성물 총 중량을 기준으로 1 내지 20 중량%, 예를 들어 1 내지 10 중량%로 포함될 수 있다. 상기 에폭시 수지의 함량이 1 중량% 미만이면 접착성, 전기절연성, 흐름성 및 성형성이 저하될 수 있으며, 함량이 20 중량%를 초과하면 흡습량 증가로 반도체의 신뢰성이 불량해지고, 충진제의 상대적 함량 감소로 방열특성이 저하될 수 있다.The epoxy resin may be included in 1 to 20% by weight, for example, 1 to 10% by weight based on the total weight of the epoxy resin composition. If the content of the epoxy resin is less than 1% by weight, adhesiveness, electrical insulation, flowability, and moldability may be deteriorated, and if the content exceeds 20% by weight, the reliability of the semiconductor becomes poor due to the increase in moisture absorption, and Heat dissipation characteristics may be deteriorated due to a decrease in content.
경화제Hardener
본 발명에 따른 에폭시 수지 조성물은 경화제를 포함한다. 상기 경화제는 에폭시 수지와 반응하여 조성물의 경화를 진행시키는 역할을 한다.The epoxy resin composition according to the present invention includes a curing agent. The curing agent reacts with the epoxy resin to promote curing of the composition.
본 발명에 따른 에폭시 수지 조성물은 경화제로 에스터계 수지를 포함한다. 상기 에스터계 수지는 구성 분자의 주쇄가 에스테르 결합을 포함하고 있는 수지라면 특별한 한정없이 사용할 수 있다. 일례로 상기 에스터계 수지는 카르복실산 화합물과 글리콜 화합물 또는 페놀 화합물을 촉매 및 용매 하에서 중합하여 제조된 것일 수 있다.The epoxy resin composition according to the present invention includes an ester-based resin as a curing agent. The ester-based resin can be used without particular limitation as long as the main chain of the constituent molecule is a resin containing an ester bond. For example, the ester-based resin may be prepared by polymerizing a carboxylic acid compound and a glycol compound or a phenol compound under a catalyst and a solvent.
상기 카르복실산 화합물의 종류는 특별히 제한되지 않으며, 예를 들어 테레프탈산(Terephthalic acid), 이소프탈산(Isophthalic acid), 1,4-사이클로헥산디카르복실산(1,4-Cyclohexane dicarboxylic acid), 아디프산(Adipic acid), 세바식산(Sebacic acid), 무수프탈산(Phthalic anhydride), 트리멜리트산무수물(Trimellitic anhydride), 벤조산(Benzoic acid), 테트라하이드로무수프탈산(Tetrahydrophthalic anhydride)으로 이루어진 군에서 선택된 1종 또는 이들의 혼합물을 사용할 수 있다.The kind of the carboxylic acid compound is not particularly limited, for example, terephthalic acid, isophthalic acid, 1,4-cyclohexane dicarboxylic acid, or 1 selected from the group consisting of dipic acid, sebacic acid, phthalic anhydride, trimellitic anhydride, benzoic acid, tetrahydrophthalic anhydride Species or mixtures thereof may be used.
상기 글리콜 화합물의 종류는 특별히 제한되지 않으며, 예를 들어 에틸렌글리콜(Ethylene glycol), 프로필렌글리콜(Propylene glycol), 1,2-부틸렌글리콜(1,2-Butylene glycol), 네오펜틸글리콜(Neopentyl glycol), 1,6-핵산디올(1,6-Haxanediol), 글리세롤(Glycerol)로 이루어진 군에서 선택된 1종 또는 이들의 혼합물을 사용할 수 있다.The type of the glycol compound is not particularly limited, for example, ethylene glycol, propylene glycol, 1,2-butylene glycol, and neopentyl glycol. ), 1,6-nucleic acid diol (1,6-Haxanediol), glycerol (Glycerol) one selected from the group consisting of, or a mixture thereof may be used.
상기 페놀 화합물의 종류는 특별히 제한되지 않으며, 예를 들어 페놀, 크레졸(Cresol), p-t-부틸페놀(p-t-Butylphenol), 1-나프톨(1-Naphthol), 2-나프톨(2-Naphthol), 카테콜(Catechol), 레조르시놀(Resorcinol), 하이드로퀴논(Hydroquinone)으로 이루어진 군에서 선택된 1종 또는 이들의 혼합물을 사용할 수 있다.The kind of the phenolic compound is not particularly limited, and for example, phenol, cresol, pt-butylphenol, 1-Naphthol, 2-Naphthol, cate Cole (Catechol), resorcinol (Resorcinol), hydroquinone (Hydroquinone) one selected from the group consisting of or a mixture thereof may be used.
상기 에스터계 수지의 히드록시기(OH) 당량은 50 내지 400 g/eq, 예를 들어 100 내지 300 g/eq일 수 있고, 연화점은 25 내지 130℃, 예를 들어 50 내지 100℃일 수 있고, 점도(150 ℃ 기준)는 0.1 내지 3 poise, 예를 들어 0.3 내지 1.5 poise일 수 있다. 상기 에스터계 수지의 히드록시기(OH) 당량이 400 g/eq를 초과하는 경우 경화반응 후 경화밀도가 저하되어 신뢰성이 저하될 수 있고, 50 g/eq 미만인 경우 경화반응 속도가 증가하여 겔(Gel) 발생율이 높고 안정성이 저하될 수 있다. 연화점이 130℃을 초과하는 경우 점도가 증가하여 흐름성이 저하되어 성형성 불량이 야기될 수 있으며, 25℃ 미만인 경우 분산성이 저하되어 뭉침으로 인해 수율이 감소될 수 있다. 점도가 3 poise를 초과하는 경우 흐름성이 저하되어 성형성 불량이 야기될 수 있으며, 0.1 poise 미만인 경우 분산성이 저하되어 뭉침으로 인해 수율이 감소될 수 있다.The hydroxy group (OH) equivalent of the ester-based resin may be 50 to 400 g/eq, for example 100 to 300 g/eq, and the softening point may be 25 to 130°C, for example 50 to 100°C, and viscosity (Based on 150° C.) may be 0.1 to 3 poise, for example, 0.3 to 1.5 poise. When the hydroxy group (OH) equivalent of the ester-based resin exceeds 400 g/eq, the curing density decreases after the curing reaction and reliability may decrease, and when it is less than 50 g/eq, the curing reaction rate increases and the gel The incidence rate is high and the stability may be reduced. When the softening point exceeds 130° C., the viscosity increases and flowability decreases, resulting in poor moldability, and when the softening point is less than 25° C., dispersibility may decrease and the yield may decrease due to aggregation. If the viscosity exceeds 3 poise, flowability may decrease, resulting in poor moldability, and if the viscosity is less than 0.1 poise, dispersibility may decrease and yield may decrease due to aggregation.
본 발명에 따른 에폭시 수지 조성물은 경화제로서 페놀계 수지를 더 포함할 수 있다. 사용 가능한 페놀계 수지의 비제한적인 예로는 페놀 노볼락형 수지, 크레졸 노볼락형 수지, 페놀 알킬 수지, 페놀 자일록형 수지, 비스페놀 A로부터 합성된 각종 노볼락형 수지 중 선택된 1종 이상을 들 수 있다.The epoxy resin composition according to the present invention may further include a phenolic resin as a curing agent. Non-limiting examples of phenolic resins that can be used include one or more selected from phenol novolak-type resins, cresol novolac-type resins, phenol alkyl resins, phenol xylok-type resins, and various novolak-type resins synthesized from bisphenol A. have.
상기 페놀계 수지의 히드록시기(OH) 당량은 50 내지 200 g/eq, 예를 들어 80 내지 150 g/eq, 연화점은 50 내지 150℃, 예를 들어 60 내지 100℃, 점도(150 ℃ 기준)는 0.5 내지 2.5 poise, 예를 들어 1.0 내지 2.0 poise일 수 있다. 상기 페놀계 수지의 히드록시기(OH) 당량, 연화점 및 점도가 전술한 범위를 벗어나는 경우, 에폭시 수지 조성물의 분산성 및 흐름성이 저하될 수 있다.The hydroxy group (OH) equivalent of the phenolic resin is 50 to 200 g/eq, for example 80 to 150 g/eq, the softening point is 50 to 150°C, for example 60 to 100°C, and the viscosity (based on 150°C) is 0.5 to 2.5 poise, for example 1.0 to 2.0 poise. When the hydroxy group (OH) equivalent, softening point and viscosity of the phenolic resin are out of the above-described ranges, dispersibility and flowability of the epoxy resin composition may be deteriorated.
일례로, 상기 에스터계 수지 및 페놀계 수지의 배합비는 1 : 0.1 내지 5, 예를 들어 1 : 0.1 내지 3의 중량비일 수 있다. 상기 에스터계 수지 및 페놀계 수지의 배합비가 전술한 범위를 만족하는 경우, 내식성 및 부착성을 향상시킬 수 있을 뿐만 아니라, 낮은 유전상수 및 유전정접을 확보할 수 있다.For example, the blending ratio of the ester-based resin and the phenol-based resin may be a weight ratio of 1: 0.1 to 5, for example, 1: 0.1 to 3. When the blending ratio of the ester-based resin and the phenol-based resin satisfies the above-described range, corrosion resistance and adhesion can be improved, and a low dielectric constant and dielectric loss tangent can be secured.
상기 경화제는 에폭시 수지 조성물 총 중량을 기준으로 1 내지 20 중량%, 예를 들어 1 내지 10 중량%로 포함될 수 있다. 상기 경화제의 함량이 1 중량% 미만이면 경화성 및 성형성에 문제가 생길 수 있으며, 20 중량%를 초과하면 흡습량 증가로 신뢰성이 저하되고, 상대적으로 강도가 낮아질 수 있다.The curing agent may be included in 1 to 20% by weight, for example, 1 to 10% by weight based on the total weight of the epoxy resin composition. If the content of the curing agent is less than 1% by weight, problems may occur in curability and moldability, and if it exceeds 20% by weight, reliability may decrease due to an increase in moisture absorption, and strength may be relatively lowered.
충진제Filler
본 발명에 따른 에폭시 수지 조성물은 충진제를 포함한다. 상기 충진제는 봉지재의 방열성 및 강도를 향상시키고 흡습량을 낮추는 역할을 한다.The epoxy resin composition according to the present invention includes a filler. The filler serves to improve heat dissipation and strength of the encapsulant and lower the moisture absorption.
상기 충진제로는 예를 들어 실리카, 실리카 나이트라이드, 알루미나, 알루미늄 나이트라이드, 보론 나이트라이드 등의 무기 충진제를 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.As the filler, inorganic fillers such as silica, silica nitride, alumina, aluminum nitride, and boron nitride may be used alone or in combination of two or more.
일례로, 본 발명에 따른 에폭시 수지 조성물은 충진제로서 구상 실리카를 포함할 수 있고, 예를 들어, 평균 입경이 5 내지 30 ㎛인 구상 실리카를 사용할 수 있다. 상기 구상 실리카가 전술한 평균 입경 분포를 갖는 경우 가공성을 충분히 가짐과 동시에 우수한 방열성을 확보할 수 있다.For example, the epoxy resin composition according to the present invention may include spherical silica as a filler, and for example, spherical silica having an average particle diameter of 5 to 30 μm may be used. When the spherical silica has the above-described average particle size distribution, it has sufficient workability and excellent heat dissipation properties can be secured.
상기 충진제는 에폭시 수지 조성물 총 중량을 기준으로 70 내지 95 중량%, 예를 들어 80 내지 95 중량%로 포함될 수 있다. 상기 충진제의 함량이 70 중량% 미만이면 흡습량 증가로 강도가 저하되고 밀착성이 떨어질 수 있으며, 충진제의 함량이 95 중량%를 초과하면 점도 증가 및 흐름성 저하로 가공성이 불량해질 수 있다.The filler may be included in an amount of 70 to 95% by weight, for example, 80 to 95% by weight, based on the total weight of the epoxy resin composition. If the content of the filler is less than 70% by weight, strength may decrease due to an increase in moisture absorption and adhesion may decrease, and if the content of the filler exceeds 95% by weight, processability may be poor due to increased viscosity and lower flowability.
경화 촉진제Hardening accelerator
본 발명에 따른 에폭시 수지 조성물은 경화 촉진제를 포함할 수 있다. 경화 촉진제는 경화반응 촉진과 더불어 고온 신뢰성 및 연속 작업성의 주기를 향상시키는 역할을 한다.The epoxy resin composition according to the present invention may include a curing accelerator. The curing accelerator plays a role in accelerating the curing reaction and improving the cycle of high temperature reliability and continuous workability.
본 발명에서 사용되는 경화 촉진제는 상기 경화제의 경화 반응을 촉진하는 것이라면 특별한 제한 없이 사용될 수 있으며, 일례로 상기 경화 촉진제는 2-메틸이미다졸, 2-에틸-4-메틸이미다졸, 2-페닐이미다졸, (4-메틸-2-페닐-1H-이미다졸-5-일)메탄올 등의 이미다졸 화합물; 트리에틸아민, 트리부틸아민, 벤질디메틸아민 등의 아민 화합물; 2-(디메틸아미노메틸)페놀, 2,4,6-트리스(디메틸아미노메틸)페놀, 1,8-디아자비사이클로(5,4,0)운덱-7-엔 등의 삼급 아민 화합물; 및 페닐포스핀, 디페닐포스핀, 트리페닐포스핀, 트리부틸포스핀, 트리(p-메틸페닐)포스핀 중에서 선택된 1종 이상일 수 있다.The curing accelerator used in the present invention may be used without particular limitation as long as it accelerates the curing reaction of the curing agent. For example, the curing accelerator is 2-methylimidazole, 2-ethyl-4-methylimidazole, 2- Imidazole compounds such as phenylimidazole and (4-methyl-2-phenyl-1H-imidazol-5-yl)methanol; Amine compounds such as triethylamine, tributylamine, and benzyldimethylamine; Tertiary amine compounds such as 2-(dimethylaminomethyl)phenol, 2,4,6-tris(dimethylaminomethyl)phenol, and 1,8-diazabicyclo(5,4,0)undec-7-ene; And phenylphosphine, diphenylphosphine, triphenylphosphine, tributylphosphine, and tri(p-methylphenyl)phosphine.
상기 경화 촉진제는 에폭시 수지 조성물 총 중량을 기준으로 0.01 내지 5 중량%, 예를 들어 0.01 내지 2 중량%로 포함될 수 있다. 상기 경화 촉진제의 함량이 0.01 중량% 미만이면 경화성이 저하될 수 있으며, 함량이 5 중량%를 초과하면 과경화로 인해 흐름성이 저하될 수 있다.The curing accelerator may be included in an amount of 0.01 to 5% by weight, for example, 0.01 to 2% by weight, based on the total weight of the epoxy resin composition. If the content of the curing accelerator is less than 0.01% by weight, curability may decrease, and if the content exceeds 5% by weight, flowability may decrease due to overcuring.
첨가제additive
본 발명에 따른 에폭시 수지 조성물은 필요에 따라 전술한 성분들 이외에 당 분야에 알려진 통상적인 첨가제를 선택적으로 더 포함할 수 있다. 본 발명에서 사용 가능한 첨가제의 비제한적인 예로는 커플링제, 착색제, 소포제, 레벨링제, 접착력 개선제, 난연제, 광 흡수제, 건조제, 흡습제 및 왁스 중 선택된 1종 이상을 들 수 있다.The epoxy resin composition according to the present invention may optionally further include conventional additives known in the art in addition to the above-described components as necessary. Non-limiting examples of the additives that can be used in the present invention include at least one selected from a coupling agent, a colorant, an antifoaming agent, a leveling agent, an adhesion improving agent, a flame retardant, a light absorbing agent, a drying agent, a desiccant, and a wax.
커플링제는 도막의 부착성을 증진시키기 위한 물질로서, 머캅토알킬알콕시실란(mercaptoalkylakoxysilane), 감마글리독시프로필트리메톡시실란 등의 실란계 화합물을 사용할 수 있다. 착색제로는 당 분야에 공지된 카본블랙, 벵갈라, 유기염료, 무기염료 등의 통상의 착색제를 단독 사용하거나 2종 이상 혼용할 수 있다. 왁스로는 파라핀 왁스, 천연 왁스, 합성 왁스 또는 이들의 혼합물을 사용할 수 있다. 천연 왁스로는 카르나우바 왁스 등을 사용할 수 있고, 합성 왁스로는 폴리에틸렌 왁스 등을 사용할 수 있다.As a material for enhancing the adhesion of the coating film, the coupling agent may be a silane-based compound such as mercaptoalkylakoxysilane or gammaglydoxypropyltrimethoxysilane. As the colorant, conventional colorants such as carbon black, bengala, organic dyes, inorganic dyes, etc. known in the art may be used alone or in combination of two or more. As the wax, paraffin wax, natural wax, synthetic wax, or a mixture thereof may be used. Carnauba wax or the like may be used as the natural wax, and polyethylene wax may be used as the synthetic wax.
상기 첨가제의 함량은 특별히 한정되지 않으며, 에폭시 수지 조성물의 총 중량을 기준으로 0.1 내지 5 중량%일 수 있다.The content of the additive is not particularly limited, and may be 0.1 to 5% by weight based on the total weight of the epoxy resin composition.
본 발명의 에폭시 수지 조성물을 제조하는 방법은 특별히 제한되지 않으며, 당 분야에 공지된 방법을 사용하여 제조될 수 있다. 일례로, 반바리 믹서, 니더, 롤, 단축 또는 이축의 압출기, 코니더 등을 이용한 용융 혼련 방법을 사용할 수 있다. 예를 들어, 전술한 성분들을 균일하게 섞은 후, 용융 혼합기(heat kneader)를 이용하여 100 내지 130℃의 온도에서 용융 혼합하고, 상온으로 냉각시켜 분말상태로 분쇄한 후 블렌딩하여 제조할 수 있다.The method for preparing the epoxy resin composition of the present invention is not particularly limited, and may be prepared using a method known in the art. As an example, a melt-kneading method using a half-bari mixer, a kneader, a roll, a single-screw or twin-screw extruder, a conicaler, etc. may be used. For example, after uniformly mixing the above-described components, melt-mixing at a temperature of 100 to 130°C using a heat kneader, cooling to room temperature, pulverizing into a powder state, and blending can be prepared.
<반도체 소자><Semiconductor element>
본 발명은 상기한 바와 같은 에폭시 수지 조성물을 이용하여 봉지된 반도체 소자를 제공한다. 구체적으로, 본 발명의 조성물을 적용할 수 있는 반도체 장치란 트랜지스터, 다이오드, 저항, 콘덴서 등을 반도체 칩이나 기판 위에 집적하고 배선하여 만들어지는 전자회로(집적회로)를 의미한다. The present invention provides a semiconductor device sealed by using the epoxy resin composition as described above. Specifically, the semiconductor device to which the composition of the present invention can be applied refers to an electronic circuit (integrated circuit) made by integrating and wiring a transistor, a diode, a resistor, a capacitor, etc. on a semiconductor chip or a substrate.
본 발명의 에폭시 수지 조성물을 이용하여 반도체 장치를 봉지, 제조하는 방법은 특별히 제한되지 않으며, 트랜스퍼 몰드, 컴프레션 몰드, 인젝션 몰드 등의 성형방법으로 반도체 소자를 봉지하여 제조할 수 있다.The method of encapsulating and manufacturing a semiconductor device using the epoxy resin composition of the present invention is not particularly limited, and may be manufactured by encapsulating a semiconductor device by a molding method such as a transfer mold, a compression mold, or an injection mold.
이하, 실시예를 통하여 본 발명을 보다 구체적으로 설명한다. 그러나, 하기 실시예는 본 발명의 이해를 돕기 위한 것일 뿐 어떠한 의미로든 본 발명의 범위가 실시예로 한정되는 것은 아니다.Hereinafter, the present invention will be described in more detail through examples. However, the following examples are only intended to aid understanding of the present invention, and the scope of the present invention is not limited to the examples in any sense.
[실시예 1-6][Example 1-6]
하기 표 1에 기재된 조성에 따라 각 성분을 컨테이너 믹서를 이용하여 배합한 후, 용융 혼합, 냉각, 분쇄, 블렌딩 공정을 거쳐 일정 크기로 타정하여 실시예 1-6의 에폭시 수지 조성물을 각각 제조하였다. 하기 표 1의 사용량 단위는 중량%이다.According to the composition shown in Table 1 below, each component was blended using a container mixer, followed by melt mixing, cooling, pulverization, and blending processes, and then tableted to a predetermined size to prepare the epoxy resin compositions of Examples 1-6. The unit used in Table 1 below is weight percent.
[비교예 1-4][Comparative Example 1-4]
하기 표 2에 기재된 조성에 따른 것을 제외하고는, 실시예 1-6과 동일한 방법으로 비교예 1-4의 에폭시 수지 조성물을 각각 제조하였다. 하기 표 2의 사용량 단위는 중량%이다.Except for those according to the composition shown in Table 2 below, the epoxy resin composition of Comparative Example 1-4 was prepared in the same manner as in Example 1-6, respectively. The unit used in Table 2 is weight percent.
Figure PCTKR2019016955-appb-T000001
Figure PCTKR2019016955-appb-T000001
Figure PCTKR2019016955-appb-T000002
Figure PCTKR2019016955-appb-T000002
에폭시 수지: 4,4-비스(2,3-에폭시프로폭시)-3,3,5,5-테트라메틸(1,1-바이페닐)(YK-4000HK, MITSUBISHI CHEMICAL社, 에폭시 당량: 192 g/eq, 연화점: 109 ℃, 점도(150 ℃ 기준): 0.2 poise)Epoxy resin: 4,4-bis(2,3-epoxypropoxy)-3,3,5,5-tetramethyl(1,1-biphenyl) (YK-4000HK, MITSUBISHI CHEMICAL, Epoxy equivalent: 192 g /eq, softening point: 109 ℃, viscosity (at 150 ℃): 0.2 poise)
경화제 1-1: 에스터계 수지(OH 당량: 209 g/eq, 연화점: 78 ℃, 점도(150 ℃ 기준): 0.6 poise)Curing agent 1-1: ester resin (OH equivalent: 209 g/eq, softening point: 78 °C, viscosity (150 °C): 0.6 poise)
경화제 1-2: 에스터계 수지(OH 당량: 185 g/eq, 연화점: 135 ℃, 점도(150 ℃ 기준): 1.8 poise)Curing agent 1-2: ester resin (OH equivalent: 185 g/eq, softening point: 135 °C, viscosity (150 °C): 1.8 poise)
경화제 1-3: 에스터계 수지(OH 당량: 169 g/eq, 연화점: 152 ℃, 점도(150 ℃ 기준): 1.6 poise)Curing agent 1-3: ester resin (OH equivalent: 169 g/eq, softening point: 152 °C, viscosity (150 °C): 1.6 poise)
경화제 2: 페놀계 수지(Phenol polymer with hydroxybenzaldehyde, MEH-7500-3S, Meiwa Kasei社, OH 당량: 103 g/eq, 연화점: 83 ℃, 점도(150 ℃ 기준): 1.4 poise)Curing agent 2: phenolic resin (Phenol polymer with hydroxybenzaldehyde, MEH-7500-3S, Meiwa Kasei, OH equivalent: 103 g/eq, softening point: 83 ℃, viscosity (150 ℃): 1.4 poise)
충진제: 구상 실리카(평균 입경 15 ㎛)Filler: spherical silica (average particle diameter 15 µm)
커플링제: 2-(3,4-에폭시사이클로헥실)에틸트리메톡시실란(KBM-403, ShinEtsu社, 비중(25 ℃): 1.070, 인화점: 135 ℃, 굴절률(25 ℃): 1.429, 끓는점(℃/mmHg): 120/2)Coupling agent: 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane (KBM-403, ShinEtsu Corporation, specific gravity (25 ℃): 1.070, flash point: 135 ℃, refractive index (25 ℃): 1.429, boiling point ( ℃/mmHg): 120/2)
착색제: 카본 블랙(MA-600, MITSUBISHI CHEMICAL社, 최대 입경(cut size): 20 nm)Colorant: carbon black (MA-600, MITSUBISHI CHEMICAL, maximum cut size: 20 nm)
왁스: 폴리에틸렌 왁스(Wax E, Clariant社, Drop Point: 84 ℃, 산가: 2 내지 7 mgKOH/g)Wax: polyethylene wax (Wax E, Clariant, Drop Point: 84 ℃, acid value: 2 to 7 mgKOH/g)
경화 촉진제: (4-메틸-2-페닐-1H-이미다졸-5-일)메탄올(2P4MHZ-PW, Shikoku社, 녹는점: 240 ℃, 분자량: 152 g/mol)Curing accelerator: (4-methyl-2-phenyl-1H-imidazol-5-yl) methanol (2P4MHZ-PW, Shikoku company, melting point: 240 ℃, molecular weight: 152 g/mol)
[실험예 - 물성 평가][Experimental Example-Evaluation of Physical Properties]
실시예 1-6 및 비교예 1-4에서 각각 제조된 에폭시 수지 조성물의 물성을 하기와 같이 측정하였으며, 이의 결과를 하기 표 3 및 표 4에 나타내었다.The physical properties of the epoxy resin compositions prepared in Examples 1-6 and 1-4, respectively, were measured as follows, and the results are shown in Tables 3 and 4 below.
시편 제조Specimen preparation
실시예 1-6 및 비교예 1-4에 따라 제조된 에폭시 수지 조성물을 가열 이송 성형기를 이용하여 175℃에서 70초간 트랜스퍼 몰딩으로 성형시켜 지름 33 mmХ높이 2.5 mm 패키지를 제작한 다음, 이를 175℃에서 4시간 동안 후경화(PMC: post mold cure)시킨 후 상온으로 냉각하였다. The epoxy resin composition prepared according to Example 1-6 and Comparative Example 1-4 was molded by transfer molding at 175°C for 70 seconds using a heat transfer molding machine to produce a 33 mm in diameter and 2.5 mm high package, which was then 175°C. After 4 hours post-cure (PMC: post mold cure) was cooled to room temperature.
유전상수(Dk) 및 유전정접(Df)Dielectric constant (Dk) and dielectric loss tangent (Df)
유전특성 측정기(Impedance Analyzer, Novocontrol社)로 1Hz, 1.5V 조건으로 30℃에서 평가하였다.It was evaluated at 30℃ under the conditions of 1Hz and 1.5V with a dielectric property analyzer (Impedance Analyzer, Novocontrol).
흡습율Moisture absorption
PCT 조건(121℃, 2기압, 100%RH)에서 24시간 방치 전후의 시편 무게를 비교하여 흡습율을 평가하였다.The moisture absorption was evaluated by comparing the weight of the specimen before and after leaving it for 24 hours in PCT conditions (121°C, 2 atm, 100%RH).
Spiral flowSpiral flow
EMMI-I-66 규격의 유동성(Spiral Flow) 몰드를 이용하여 가열이송성형기(압력=70kg/㎠, 온도=175℃, 경화시간=120초)로 측정하였다. Measurements were made with a heat transfer molding machine (pressure = 70kg/cm2, temperature = 175°C, curing time = 120 seconds) using a Spiral Flow mold of EMMI-I-66 standard.
Gel timeGel time
실시예 1-6 및 비교예 1-4에 따라 제조된 에폭시 수지 조성물 소량을 겔 타이머에 넓고 고르게 펴, 제조물의 겔화 소요시간을 측정하였다.A small amount of the epoxy resin composition prepared according to Example 1-6 and Comparative Example 1-4 was spread widely and evenly on a gel timer, and the time required for gelation of the product was measured.
열팽창계수(α1, α2)Coefficient of thermal expansion (α1, α2)
시편 제작 몰드(가로=60mm, 세로=10mm, 두께=3mm)를 이용하여 가열이송성형기(압력=70kg/㎠, 온도=175℃, 경화시간=120초)에서 몰딩한 후, 175℃의 오븐에서 4시간동안 후경화시킨 다음, 시편을 절단(가로=10mm, 세로=10mm, 두께=3mm)하여 TMA(ThermoMechanical Analyser)로 측정하였다. After molding in a heat transfer molding machine (pressure=70kg/㎠, temperature=175℃, curing time=120 seconds) using a specimen making mold (width=60mm, length=10mm, thickness=3mm), in an oven at 175℃ After post-curing for 4 hours, the specimen was cut (width = 10 mm, length = 10 mm, thickness = 3 mm) and measured by TMA (Thermo Mechanical Analyser).
유리전이온도Glass transition temperature
시편 제작 몰드(가로=60mm, 세로=10mm, 두께=3mm)를 이용하여 가열이송성형기(압력=70kg/㎠, 온도=175℃, 경화시간=120초)에서 몰딩한 후, 175℃의 오븐에서 4시간동안 후경화시킨 다음, 시편을 절단(가로=10mm, 세로=10mm, 두께=3mm)하여 TMA(ThermoMechanical Analyser)로 측정하였다.After molding in a heat transfer molding machine (pressure=70kg/㎠, temperature=175℃, curing time=120 seconds) using a specimen making mold (width=60mm, length=10mm, thickness=3mm), in an oven at 175℃ After post-curing for 4 hours, the specimen was cut (width = 10 mm, length = 10 mm, thickness = 3 mm) and measured by TMA (Thermo Mechanical Analyser).
Flexural ModulusFlexural Modulus
시편 제작 몰드(가로=125mm, 세로=12.5mm, 두께=6mm)를 이용하여 가열이송성형기(압력=70kg/㎠, 온도=175℃, 경화시간=120초)에서 몰딩한 후, 175℃의 오븐에서 4시간동안 후경화시킨 다음, UTM(Universal Testing Machine)으로 측정하였다. After molding in a heat transfer molding machine (pressure=70kg/㎠, temperature=175℃, curing time=120 seconds) using a specimen making mold (width = 125mm, length = 12.5mm, thickness = 6mm), an oven at 175℃ After curing for 4 hours at, it was measured by UTM (Universal Testing Machine).
Mold ShrinkageMold Shrinkage
시편 제작 몰드(가로=125mm, 세로=12.5mm, 두께=6mm)를 이용하여 가열이송성형기(압력=70kg/㎠, 온도=175℃, 경화시간=120초)에서 몰딩한 후, 175℃의 오븐에서 4시간동안 후경화시킨 다음, 버니어 캘리퍼스(Vernier Calipers)를 이용하여 수축된 시편의 길이를 측정하였다. After molding in a heat transfer molding machine (pressure=70kg/㎠, temperature=175℃, curing time=120 seconds) using a specimen making mold (width = 125mm, length = 12.5mm, thickness = 6mm), an oven at 175℃ After curing for 4 hours at, the length of the contracted specimen was measured using a Vernier Calipers.
Hot HardnessHot Hardness
Spiral flow 몰드 직후 금형 상부 경화물 표면에서 Shore-D type 경도계를 이용하여 측정하였다. Immediately after the spiral flow mold, it was measured using a Shore-D type hardness tester on the surface of the hardened product above the mold.
Figure PCTKR2019016955-appb-T000003
Figure PCTKR2019016955-appb-T000003
Figure PCTKR2019016955-appb-T000004
Figure PCTKR2019016955-appb-T000004
상기 표 3 및 표 4에 나타난 바와 같이, 본 발명에 따른 실시예 1-6의 에폭시 수지 조성물은 측정된 모든 물성에서 우수한 효과를 나타냄을 확인할 수 있었다. 특히 실시예 1-6의 에폭시 수지 조성물은 본 발명에 따른 에스터계 수지를 사용하지 않은 비교예 1-4의 에폭시 수지 조성물에 비해 낮은 유전상수 및 유전정접을 가질 뿐만 아니라, 흡습율을 최소화 할 수 있음을 확인할 수 있었다.As shown in Tables 3 and 4, it was confirmed that the epoxy resin composition of Example 1-6 according to the present invention exhibited excellent effects in all measured physical properties. In particular, the epoxy resin composition of Example 1-6 has a lower dielectric constant and dielectric loss tangent than the epoxy resin composition of Comparative Example 1-4 without using the ester-based resin according to the present invention, and can minimize the moisture absorption rate. It could be confirmed that there is.
본 발명에 따른 에폭시 수지 조성물은 낮은 유전상수 및 유전정접을 확보함으로써, 반도체 소자에 적용될 경우 고주파 신호 전달 시 전송 손실을 최소화함과 동시에 빠른 정보 전달을 가능하게 한다. 또한 본 발명에 따른 에폭시 수지 조성물은 낮은 흡습율을 가짐으로써 반도체 내부 회로를 효과적으로 보호할 수 있다.The epoxy resin composition according to the present invention secures a low dielectric constant and a dielectric loss tangent, so that when applied to a semiconductor device, it minimizes transmission loss during high-frequency signal transmission and enables fast information transmission. In addition, the epoxy resin composition according to the present invention can effectively protect the semiconductor internal circuit by having a low moisture absorption rate.

Claims (5)

  1. 에폭시 수지, 경화제 및 충진제를 포함하고,Including an epoxy resin, a curing agent and a filler,
    상기 경화제는 에스터계 수지를 포함하고,The curing agent includes an ester-based resin,
    상기 에스터계 수지의 히드록시기(OH) 당량은 50 내지 400 g/eq이고, 연화점은 25 내지 130 ℃인 에폭시 수지 조성물.The hydroxy group (OH) equivalent of the ester-based resin is 50 to 400 g/eq, and the softening point is 25 to 130°C.
  2. 제1항에 있어서, 상기 경화제는 페놀계 수지를 더 포함하는 에폭시 수지 조성물.The epoxy resin composition of claim 1, wherein the curing agent further comprises a phenolic resin.
  3. 제2항에 있어서, 상기 에스터계 수지 및 페놀계 수지의 배합비는 1 : 0.1 내지 5 중량비인 에폭시 수지 조성물.The epoxy resin composition according to claim 2, wherein the blending ratio of the ester-based resin and the phenol-based resin is 1:0.1 to 5 weight ratio.
  4. 제1항에 있어서, 상기 에폭시 수지 조성물 총 중량을 기준으로, 에폭시 수지 1 내지 20 중량%, 경화제 1 내지 20 중량% 및 충진제 70 내지 95 중량%를 포함하는 에폭시 수지 조성물.The epoxy resin composition according to claim 1, comprising 1 to 20% by weight of an epoxy resin, 1 to 20% by weight of a curing agent, and 70 to 95% by weight of a filler based on the total weight of the epoxy resin composition.
  5. 제1항 내지 제4항 중 어느 한 항에 따른 에폭시 수지 조성물을 이용하여 봉지된 것을 특징으로 하는 반도체 소자.A semiconductor device, characterized in that it is sealed using the epoxy resin composition according to any one of claims 1 to 4.
PCT/KR2019/016955 2019-03-07 2019-12-03 Epoxy resin composition WO2020179988A1 (en)

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JPH08143642A (en) * 1994-09-13 1996-06-04 Yuka Shell Epoxy Kk Epoxy resin composition for sealing semiconductor and its production
JPH08283387A (en) * 1995-04-20 1996-10-29 Yuka Shell Epoxy Kk Liquid epoxy resin composition
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CN104761719B (en) * 2015-04-01 2017-05-24 广东生益科技股份有限公司 Active ester, thermosetting resin composition containing active ester, prepreg and laminated board
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JPH08143642A (en) * 1994-09-13 1996-06-04 Yuka Shell Epoxy Kk Epoxy resin composition for sealing semiconductor and its production
JPH08120057A (en) * 1994-10-26 1996-05-14 Yuka Shell Epoxy Kk Epoxy resin composition
JPH08283387A (en) * 1995-04-20 1996-10-29 Yuka Shell Epoxy Kk Liquid epoxy resin composition
KR20120121912A (en) * 2011-03-31 2012-11-06 세키스이가가쿠 고교가부시키가이샤 Preliminary-cured material, roughened preliminary-cured material, and laminated body
JP2013075440A (en) * 2011-09-30 2013-04-25 Sekisui Chem Co Ltd Method for manufacturing laminate, and laminate structure

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