WO2020174665A1 - Interféromètre de michelson et spectromètre infrarouge à transformée de fourier le comprenant - Google Patents

Interféromètre de michelson et spectromètre infrarouge à transformée de fourier le comprenant Download PDF

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Publication number
WO2020174665A1
WO2020174665A1 PCT/JP2019/007856 JP2019007856W WO2020174665A1 WO 2020174665 A1 WO2020174665 A1 WO 2020174665A1 JP 2019007856 W JP2019007856 W JP 2019007856W WO 2020174665 A1 WO2020174665 A1 WO 2020174665A1
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Prior art keywords
mirror
moving
unit
tilt
light
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PCT/JP2019/007856
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English (en)
Japanese (ja)
Inventor
和久田真也
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株式会社島津製作所
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Priority to PCT/JP2019/007856 priority Critical patent/WO2020174665A1/fr
Priority to JP2021501501A priority patent/JP7215562B2/ja
Publication of WO2020174665A1 publication Critical patent/WO2020174665A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

Definitions

  • the present invention relates to a Michelson interferometer and a Fourier transform infrared spectroscope including the same.
  • a Fourier transform infrared spectroscope uses, for example, a Michelson interferometer to acquire an interferogram.
  • the Michelson interferometer the infrared light incident on the beam splitter is split into two lights, and the two split lights are guided to a fixed mirror and a moving mirror, respectively.
  • the light reflected by the fixed mirror and the movable mirror returns to the beam splitter to generate interference light.
  • the moving mirror moves so that the distance between the moving mirror and the beam splitter changes.
  • the amplitude of the interference light changes with time.
  • Patent Document 1 describes a method of detecting the tilt of the moving mirror and adjusting the tilt of the fixed mirror based on the detection result. JP, 2016-142527, A
  • the mirror moving unit that moves the moving mirror is composed of, for example, a linear guide and a slider that holds the moving mirror.
  • the mirror moving portion deteriorates due to wear of the contact portion between the linear guide and the slider, the change in tilt of the moving mirror during movement becomes large.
  • An object of the present invention is to provide a Michelson interferometer and a Fourier transform infrared spectroscopic apparatus including the Michelson interferometer that allow a user to easily recognize when to replace the mirror moving part.
  • a Michelson interferometer includes a moving mirror, a mirror moving unit that moves the moving mirror in one direction and an opposite direction, and a tilt of the moving mirror during movement of the moving mirror by the mirror moving unit. And a determination unit that determines deterioration of the mirror moving unit based on a change in the inclination detected by the inclination detection unit.
  • the tilt detection unit detects the tilt of the moving mirror while the moving unit is moving the moving mirror. Deterioration of the mirror moving unit is determined based on the detected change in tilt. Thereby, the user can easily recognize the replacement time of the mirror moving unit based on the determination result.
  • the Michelson interferometer includes a fixed mirror, a detection light emitting portion that emits detection light for detecting the tilt of the moving mirror, and a light receiving portion having a light receiving surface divided into a plurality of light receiving regions.
  • the detection light emitted from the detection light emitting section is divided and guided to the fixed mirror and the movable mirror, and the detection interference light is generated from the detection light reflected by the fixed mirror and the movable mirror, respectively.
  • the light receiving section receives the interference light for detection generated in the optical element on the light receiving surface to output a plurality of light receiving signals corresponding to a plurality of light receiving areas, respectively, and detects the tilt.
  • the tilt angle of the moving mirror determines the phase difference between the plurality of interference light beams for detection, which are respectively incident on the plurality of light receiving regions based on the plurality of light receiving signals output from the light receiving unit. May be detected as
  • the tilt of the moving mirror can be detected with high accuracy. Therefore, the accuracy of determining the deterioration of the mirror moving unit is improved.
  • the Michelson interferometer is based on the tilt adjustment unit that adjusts the tilt of the fixed mirror and the phase difference detected by the tilt detection unit so that the tilt of the fixed mirror is adjusted according to the tilt of the moving mirror.
  • the determination unit may further include an adjustment control unit that changes a drive signal for driving the tilt adjustment unit, and the determination unit may determine deterioration of the mirror moving unit based on the drive signal changed by the adjustment control unit.
  • the tilt of the fixed mirror is adjusted according to the tilt of the movable mirror, so that when light enters the optical element, stable interference light can be obtained in the optical element.
  • the drive signal for adjusting the tilt of the fixed mirror can be effectively used as a signal for determining the deterioration of the mirror moving unit.
  • the determination unit calculates the magnitude of the variation of the drive signal generated corresponding to each of the plurality of positions on the moving path of the moving mirror as the amount of change in the tilt of the moving mirror, and changes the calculated tilt. Deterioration of the mirror moving unit may be determined based on the amount.
  • the moving unit further includes a movement control unit that controls the mirror moving unit so as to move the entire movable range of the moving mirror.
  • the amount of change in tilt may be calculated for each predetermined unit portion within the movable range of the movable mirror.
  • the amount of change in the tilt of the moving mirror is calculated over the entire movable range of the moving mirror. This improves the reliability of the determination of deterioration of the mirror moving unit.
  • the Michelson interferometer may further include a determination result output unit that outputs a determination result of deterioration of the mirror moving unit.
  • the deterioration of the mirror moving part can be presented to the user based on the output judgment result.
  • a Fourier transform infrared spectroscopic device includes the Michelson interferometer described above.
  • the Fourier transform infrared spectroscope includes the Michelson interferometer described above. As a result, the user can easily recognize the replacement time of the mirror moving unit, so that proper maintenance can be performed when the mirror moving unit deteriorates. As a result, it becomes possible to analyze the sample with high accuracy over a long period of time.
  • FIG. 1 is a block diagram showing the basic configuration of a Fourier transform infrared spectroscopic device according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing the configuration of the moving mechanism of FIG.
  • FIG. 3 is a block diagram showing the functional configuration of the controller of the Michelson interferometer.
  • FIG. 4 is a flow chart showing an example of deterioration determination processing of the moving mechanism by the control device of FIG.
  • FIG. 5 is a diagram showing a specific example of changes in the tilt of the movable mirror.
  • FIG. 6 is a block diagram showing the configuration of part of a Fourier transform infrared spectroscopic device according to another embodiment.
  • a Michelson interferometer according to an embodiment of the present invention and a Fourier transform infrared spectroscopic apparatus including the Michelson interferometer will be described with reference to the drawings.
  • FIG. 1 is a block diagram showing the basic configuration of a Fourier transform infrared spectroscope according to an embodiment of the present invention.
  • the Fourier transform infrared spectroscopic apparatus 100 mainly includes a Michelson interferometer 1, a sample chamber 2, and an infrared light detector 3, and is configured to be connectable to an external device 200.
  • the Michelson interferometer 1 includes an infrared light source 10, a laser light source 20, laser mirrors 21 and 22, a fixed mirror 30, a tilt adjusting mechanism 31, a moving mirror 40, a moving mechanism 41, a laser light detecting section 50, a control device 60, and A beam splitter 90 is included.
  • the infrared light source 10 emits infrared light. This infrared light is used to generate interference light (hereinafter referred to as infrared interference light) that should be irradiated on the sample to be analyzed. Infrared light emitted from the infrared light source 10 enters the beam splitter 90, as indicated by a thick dashed-dotted arrow in FIG. 1. The beam splitter 90 splits the infrared light incident from the infrared light source 10 into two infrared lights. The two divided infrared lights respectively travel in two different directions.
  • a fixed mirror 30 and a movable mirror 40 are provided so as to respectively receive the two split infrared lights.
  • the fixed mirror 30 and the movable mirror 40 respectively reflect the light from the beam splitter 90.
  • the two infrared lights reflected by the fixed mirror 30 and the movable mirror 40 are returned to the beam splitter 90.
  • the infrared light reflected by the fixed mirror 30 and the infrared light reflected by the movable mirror 40 are overlapped with each other to generate infrared interference light.
  • the moving mechanism 41 moves the moving mirror 40 so that the distance between the moving mirror 40 and the beam splitter 90 changes.
  • the amplitude of the infrared interference light generated in the beam splitter 90 changes with time.
  • the beam splitter 90 emits the generated infrared interference light in a direction different from the direction toward the infrared light source 10, the direction toward the fixed mirror 30, and the direction toward the movable mirror 40.
  • the sample chamber 2 is provided on the path along which the infrared interference light emitted from the beam splitter 90 travels.
  • the sample chamber 2 contains the sample to be analyzed.
  • the infrared interference light emitted from the beam splitter 90 passes through the sample contained in the sample chamber 2.
  • the infrared interference light emitted from the beam splitter 90 is reflected by the sample contained in the sample chamber 2.
  • the infrared light detector 3 detects infrared interference light that has passed through the sample in the sample chamber 2 or reflected by the sample.
  • the infrared light detector 3 includes, for example, a light receiving element, receives the infrared interference light from the sample, and outputs a signal corresponding to the received light amount to the control device 60 as a light receiving signal.
  • the control device 60 data indicating an interferogram is generated based on the light reception signal input from the infrared light detector 3.
  • the generated data is output to the external device 200.
  • the Fourier transform of the generated data makes it possible to obtain the absorption spectrum of the sample.
  • FIG. 2 is a diagram showing the configuration of the moving mechanism 41 of FIG.
  • the moving mechanism 41 includes a linear guide 42, a slider 43, and a drive unit 44.
  • the linear guide 42 is fixed to the main body portion (not shown) of the Michelson interferometer 1 so as to extend parallel to the path of the infrared light emitted from the beam splitter 90 to the moving mirror 40.
  • the slider 43 is configured to be movable on the linear guide 42 while holding the movable mirror 40. At least one of the slider 43 and the linear guide 42 has a built-in bearing for reducing the occurrence of friction at the contact portion between the slider 43 and the linear guide 42.
  • the drive unit 44 includes, for example, a voice coil motor, and drives the slider 43 so that the slider 43 reciprocates within a predetermined movable range MA on the linear guide 42.
  • the inclination of the movable mirror 40 is the posture of the movable mirror 40, and is the angle of the reflecting surface of the movable mirror 40 with respect to the traveling direction of the infrared light emitted from the beam splitter 90 to the movable mirror 40.
  • the laser light source 20 the two laser mirrors 21 and 22 and the laser light detection unit 50 of FIG. 1 are used as a configuration for realizing dynamic alignment.
  • one laser mirror 21 is provided between the infrared light source 10 and the beam splitter 90, and the other laser mirror 22 is provided between the beam splitter 90 and the sample chamber 2.
  • the laser light source 20 emits laser light toward the laser mirror 21.
  • the laser mirror 21 reflects the laser light from the laser light source 20 toward the beam splitter 90 so as to follow the path of the infrared light emitted from the infrared light source 10.
  • the laser light incident on the beam splitter 90 is split into two laser lights, like the infrared light.
  • the two divided laser beams are guided to the fixed mirror 30 and the movable mirror 40, respectively, and reflected by the fixed mirror 30 and the movable mirror 40, respectively.
  • the laser light reflected by the fixed mirror 30 and the laser light reflected by the movable mirror 40 are overlapped with each other to generate laser interference light.
  • the generated laser interference light is emitted from the beam splitter 90 toward the laser mirror 22 so as to follow the path of the infrared interference light.
  • the laser light detection unit 50 is provided at a position off the path of the infrared interference light from the beam splitter 90 to the sample chamber 2.
  • the laser mirror 22 reflects the laser interference light from the beam splitter 90 toward the laser light detector 50.
  • the laser light detection unit 50 includes a light receiving element having a light receiving surface divided into a plurality of (four in this example) light receiving areas.
  • the four light receiving regions of this example are divided by two boundary lines that pass through the center of the light receiving surface and are orthogonal to each other.
  • the laser interference light reflected from the laser mirror 22 toward the laser light detector 50 is incident on the light receiving surface so as to cross each of the two boundaries.
  • the laser light detector 50 outputs to the control device 60 a plurality of light reception signals corresponding to the laser interference lights respectively incident on the four light reception regions.
  • the control device 60 includes, for example, a CPU (central processing unit) and a memory, or a microcomputer, and controls the operations of the infrared light source 10, the laser light source 20, the tilt adjusting mechanism 31, and the moving mechanism 41. In the control device 60, the phase difference between the plurality of light reception signals input from the laser light detection unit 50 is acquired.
  • a CPU central processing unit
  • a memory or a microcomputer
  • the tilt adjusting mechanism 31 includes a plurality of piezo elements for adjusting the tilt of the fixed mirror 30.
  • the inclination of the fixed mirror 30 is the posture of the fixed mirror 30, and is the angle of the reflecting surface of the fixed mirror 30 with respect to the traveling direction of the infrared light emitted from the beam splitter 90 to the fixed mirror 30.
  • the phase difference between the plurality of light receiving signals acquired when the relative relationship between the tilt of the fixed mirror 30 and the tilt of the movable mirror 40 is in an ideal state is stored in advance as a target phase difference. Has been done.
  • the control device 60 performs feedback control of the tilt adjusting mechanism 31 based on the acquired phase difference and the target phase difference.
  • the control device 60 drives the plurality of piezo elements of the tilt adjusting mechanism 31 so that the phase difference between the plurality of received light signals approaches the target phase difference.
  • the tilt of the fixed mirror 30 changes according to the tilt of the movable mirror 40, and stable generation of infrared interference light in the beam splitter 90 is guaranteed.
  • the tilt adjusting mechanism 31 there is a limit to the range in which the tilt of the fixed mirror 30 can be adjusted depending on the performance and size of the plurality of piezoelectric elements. Therefore, when the tilt of the movable mirror 40 changes beyond the adjustable range of the tilt of the fixed mirror 30, stable generation of infrared interference light is not guaranteed.
  • the change in the tilt of the movable mirror 40 during movement increases as the degree of wear of the contact portion between the linear guide 42 and the slider 43 in the movement mechanism 41 increases. Therefore, when the change of the tilt of the movable mirror 40 exceeds the adjustable range of the tilt of the fixed mirror 30, at least one of the linear guide 42 and the slider 43 of the moving mechanism 41 needs to be replaced with a new component.
  • deterioration of the moving mechanism 41 is caused based on at least one drive signal of the plurality of drive signals for driving the plurality of piezo elements of the tilt adjusting mechanism 31. To be judged. That is, it is determined whether or not at least a part of the moving mechanism 41 is in the replacement time. When it is determined that the moving mechanism 41 is deteriorated, a signal indicating the determination result is output to the external device 200.
  • the plurality of drive signals described above are voltage signals.
  • the external device 200 includes, for example, a CPU and a memory or a microcomputer.
  • the external device 200 generates an absorption spectrum of the sample from the data of the interferogram provided from the control device 60 of the Fourier transform infrared spectroscopic device 100.
  • the external device 200 further includes a display unit such as a liquid crystal display.
  • the external device 200 when a signal indicating the determination result that the moving mechanism 41 is deteriorated is given from the control device 60 of the Fourier transform infrared spectroscopy device 100, for example, the parts of the moving mechanism 41 should be replaced. Message is displayed on the display. Thereby, the user can easily recognize the replacement time of the moving mechanism 41.
  • FIG. 3 is a block diagram showing a functional configuration in the control device 60 of Michelson interferometer 1.
  • the control device 60 includes a light source control unit 61, a movement control unit 62, an inclination detection unit 63, an adjustment control unit 64, a determination unit 65, a determination result output unit 66, and an acquisition unit 67 as functional units.
  • These functional units are realized by the CPU of the control device 60 executing the deterioration determination processing program stored in the memory in advance. Note that some or all of the above-described plurality of constituent elements included in the control device 60 may be realized by hardware such as an electronic circuit.
  • the light source control unit 61 controls the infrared light source 10 so that infrared light is emitted when the sample is analyzed. Further, the light source control unit 61 controls the laser light source 20 so that the laser light is emitted at the time of analyzing the sample and determining the deterioration of the moving mechanism 41.
  • the movement control unit 62 controls the movement mechanism 41 so that the movement mirror 40 moves on the linear guide 42 when the sample is analyzed. In addition, the movement control unit 62 controls the movement mechanism 41 so that the movement mirror 40 moves at a constant speed over the entire movable range MA on the linear guide 42 when the deterioration of the movement mechanism 41 is determined.
  • the tilt detection unit 63 detects the phase difference between the plurality of received light signals output from the laser light detection unit 50 as the tilt of the movable mirror 40, and gives the detected phase difference to the adjustment control unit 64.
  • the adjustment control unit 64 changes the voltage values of the plurality of drive signals respectively applied to the plurality of piezo elements of the tilt adjusting mechanism 31, based on the phase difference given from the tilt detecting unit 63. Specifically, the adjustment control unit 64 drives a plurality of piezo elements of the tilt adjusting mechanism 31 so that the phase difference provided by the tilt detecting unit 63 approaches the predetermined target phase difference. The voltage value of the drive signal is changed.
  • the determining unit 65 determines the deterioration of the moving mechanism 41 based on the drive signal applied to any of the plurality of piezo elements of the tilt adjusting mechanism 31. For example, the determination unit 65 calculates the magnitude of variation of one drive signal generated at a plurality of positions within the movable range MA as the amount of change in the tilt of the movable mirror 40. The determination unit 65 also determines the deterioration of the moving mechanism 41 based on the calculated change amount of the tilt of the moving mirror 40. Note that the determination unit 65 may determine the deterioration of the moving mechanism 41 based on the variations in the plurality of phase differences calculated corresponding to the plurality of positions within the movable range MA, instead of the drive signal. Good (see dotted arrow in Figure 3). The determination result output unit 66 outputs the determination result of the deterioration of the moving mechanism 41 by the determination unit 65 to the external device 200.
  • the acquisition unit 67 generates data indicating an interferogram based on the received light signal output from the infrared light detector 3.
  • the acquisition unit 67 may further generate an absorption spectrum of the sample by performing a Fourier transform on the generated data.
  • the functions of the determination unit 65 and the determination result output unit 66 described above may be realized in the external device 200.
  • FIG. 4 is a flowchart showing an example of a degradation determination process of the moving mechanism 41 by the control device 60 of FIG.
  • the deterioration determination process of the moving mechanism 41 is started, for example, when the power of the Fourier transform infrared spectroscopic device 100 is turned on or when the operation characteristic of the Fourier transform infrared spectroscopic device 100 is self-diagnosed.
  • the Fourier transform infrared spectroscopic device 100 may have an operation unit for instructing the deterioration determination process of the moving mechanism 41.
  • the deterioration determination process of the moving mechanism 41 may be started in response to the operation of the operation unit by the user.
  • the laser light source 20 emits a laser beam by the light source controller 61 of FIG.
  • the control device 60 causes the memory of the control device 60 to store the voltage value of the drive signal for driving one piezoelectric element of the tilt adjusting mechanism 31 while moving the movable mirror 40 (step S11).
  • the movement control unit 62 of FIG. 3 controls the movement mechanism 41 so that the movement mirror 40 moves the entire movable range MA in one direction at a constant speed.
  • the tilt detection unit 63 detects the phase difference between the plurality of received light signals sequentially output from the laser light detection unit 50 as the tilt of the movable mirror 40 at a predetermined sampling cycle.
  • the adjustment control unit 64 changes the drive signal applied to the plurality of piezo elements of the tilt adjusting mechanism 31 each time the phase difference is calculated.
  • the determination unit 65 sequentially stores the voltage value of one of the plurality of drive signals in the memory while associating it with the position of the movable mirror 40 within the movable range MA.
  • the memory of the control device 60 stores a plurality of voltage values respectively corresponding to a plurality of positions within the movable range MA of the movable mirror 40.
  • the position of the movable mirror 40 on the movable range MA at the time of detecting the tilt of the movable mirror 40 is represented by a variable x.
  • the position x is 0 at the start of the deterioration determination process. Since the movable mirror 40 moves at a constant speed, the value of the position x increases by 1 each time the inclination of the movable mirror 40 is detected. At this time, the voltage value of the drive signal generated at each position x is V(x).
  • the determination unit 65 of the control device 60 sets the position x to 0 (step S12).
  • the determination unit 65 also extracts the maximum value and the minimum value from the plurality of voltage values from the voltage value V(x) to the voltage value V(x+n-1) stored in the memory (step S13).
  • n is a fixed value that is experimentally or empirically set to appropriately perform the deterioration determination process of the moving mechanism 41, and is set to, for example, 500.
  • the determination unit 65 calculates the difference D(x) between the maximum value and the minimum value extracted in the immediately preceding step S13 (step S14).
  • the difference D(x) represents the magnitude of variation in a plurality of voltage values from the voltage value V(x) to the voltage value V(x+n-1), and from the position x to the position (x+n-1). This corresponds to the amount of change in the tilt of the movable mirror 40 when moving between them.
  • the determination unit 65 determines whether the difference D(x) calculated in the immediately preceding step S14 is larger than the threshold value Dth (step S15).
  • the threshold value Dth is experimentally or empirically set to appropriately perform the deterioration determination process of the moving mechanism 41, and is set to, for example, 30V.
  • the determination unit 65 determines that the moving mechanism 41 is deteriorated.
  • the determination result output unit 66 also outputs the determination result of the deterioration of the moving mechanism 41 (step S18). As a result, the deterioration determination process of the moving mechanism 41 ends.
  • FIG. 5 is a diagram showing a specific example of change in the inclination of moving mirror 40.
  • FIG. 5A shows a change in the tilt of the movable mirror 40 when the moving mechanism 41 is not deteriorated, as a voltage value of one drive signal for driving the tilt adjusting mechanism 31.
  • FIG. 5B shows a change in the tilt of the movable mirror 40 when the moving mechanism 41 is deteriorated, as a voltage value of one drive signal for driving the tilt adjusting mechanism 31.
  • the vertical axis represents the voltage value
  • the horizontal axis represents the position in the movable range MA.
  • the dynamic ranges on the vertical axes in FIGS. 5A and 5B are equal.
  • the voltage value of the drive signal changes comparatively gently over the entire movable range MA.
  • the voltage value of the drive signal is more disturbed than in the example of FIG. 5A.
  • the tilt detection unit 63 detects the tilt of the moving mirror 40 while the moving mechanism 41 is moving the moving mirror 40. Deterioration of the moving mechanism 41 is determined based on the detected change in inclination. Thereby, the user can easily recognize the replacement time of the moving mechanism 41 based on the determination result.
  • deterioration of the moving mechanism 41 is determined based on a drive signal for driving the tilt adjusting mechanism 31. Therefore, the drive signal used for the dynamic alignment for adjusting the inclination of the fixed mirror 30 can be effectively used as a signal for determining the deterioration of the moving mechanism 41.
  • the tilt adjusting mechanism 31 adjusts the tilt of the fixed mirror 30 according to the change of the tilt of the movable mirror 40 during movement. Not limited to.
  • the Fourier transform infrared spectroscopic device 100 may not be provided with the tilt adjusting mechanism 31. In this case, even if the drive signal for the tilt adjusting mechanism 31 is not generated, it is possible to determine the deterioration of the moving mechanism 41 based on the variations in the plurality of phase differences calculated corresponding to the plurality of positions within the movable range MA. You can
  • the deterioration determination process of the moving mechanism 41 is performed when the power of the Fourier transform infrared spectroscopic device 100 is turned on, when the operation characteristics of the Fourier transform infrared spectroscopic device 100 are self-diagnosed, or by the user. It is performed at the time of the instruction of the deterioration determination process, but the present invention is not limited to this.
  • the deterioration determination process of the moving mechanism 41 may be performed during the analysis of the sample.
  • the movable mirror 40 moves the entire movable range MA in one direction during the deterioration determination process, but the present invention is not limited to this.
  • the movable mirror 40 may move a part of the movable range MA in one direction or the other direction.
  • the movable mirror 40 may reciprocate in at least a part of the movable range MA in one direction and the other direction. Even in these cases, the deterioration determination of the moving mechanism 41 can be performed based on the drive signal given to the tilt adjusting mechanism 31 when the moving mirror 40 moves.
  • the deterioration determination of the moving mechanism 41 is performed based on whether or not the difference D(x) is greater than a preset threshold Dth.
  • a preset threshold Dth different threshold values Dth may be set.
  • the determination unit 65 of FIG. 3 determines the degree of deterioration of the moving mechanism 41 based on which level the calculated difference D(x) is divided by the plurality of threshold values Dth. Good. By outputting the degree of deterioration of the moving mechanism 41 from the determination result output unit 66, the user can grasp the degree of deterioration of the moving mechanism 41.
  • the laser light emitted from the laser light source 20 is reflected by the laser mirror 21 and guided to the beam splitter 90, and the laser light traveling from the beam splitter 90 to the sample chamber 2 is used for the laser.
  • the present invention is not limited to this.
  • the Michelson interferometer 1 is replaced with a configuration using the above-mentioned laser mirrors 21 and 22 so that the laser light emitted from the laser light source 20 follows the path of the infrared light and enters the laser light detection unit 50. And may have the following configurations.
  • FIG. 6 is a block diagram showing the configuration of part of a Fourier transform infrared spectroscopic device according to another embodiment.
  • the Fourier transform infrared spectroscopic apparatus of the present example includes collimator mirrors 81 and 82 instead of the configuration of the laser mirrors 21 and 22 in the Fourier transform infrared spectroscopic apparatus 100 of FIG.
  • the collimator mirrors 81 and 82 are arranged so that the reflection surfaces thereof face the beam splitter 90.
  • the infrared light source 10 is arranged so that infrared light can be emitted toward the reflecting surface of the collimator mirror 81.
  • Infrared light emitted from the infrared light source 10 of this example is reflected by the collimator mirror 81 and enters the beam splitter 90, as shown by the thick dashed-dotted arrow in FIG.
  • the beam splitter 90 splits the incident infrared light into two infrared lights and guides them to the fixed mirror 30 and the movable mirror 40.
  • the two split infrared lights are reflected by the fixed mirror 30 and the movable mirror 40 and returned to the beam splitter 90.
  • infrared interference light is generated in the beam splitter 90.
  • the generated infrared interference light is emitted from the beam splitter 90, reflected by the collimator mirror 82, and guided to the sample chamber 2.
  • the collimator mirror 81 is formed with a through hole 81h parallel to the traveling direction of infrared light from the collimator mirror 81 toward the beam splitter 90.
  • the laser light source 20 is provided at a portion of the collimator mirror 81 opposite to the reflection surface so as to face the through hole 81h.
  • the collimator mirror 82 is formed with a through hole 82h parallel to the traveling direction of the infrared interference light traveling from the beam splitter 90 to the collimator mirror 82.
  • a laser beam detector 50 is provided at a portion of the collimator mirror 82 opposite to the reflection surface so as to face the through hole 82h.
  • the laser light source 20 emits laser light so as to pass through the through hole 81h.
  • the laser light that has passed through the through hole 81h follows the path of the infrared light, enters the beam splitter 90, is split, and is guided to the fixed mirror 30 and the movable mirror 40.
  • Each of the split laser beams is reflected by the fixed mirror 30 and the movable mirror 40 and returned to the beam splitter 90.
  • laser interference light is generated.
  • the generated laser interference light is emitted from the beam splitter 90 to the collimator mirror 82 so as to follow the path of the infrared interference light, and enters the laser light detection unit 50 through the through hole 82h.
  • the moving mechanism 41 is an example of a mirror moving unit
  • the beam splitter 90 is an example of an optical element.
  • the laser light is an example of the detection light
  • the laser light source 20 is an example of the detection light emitting unit
  • the laser light detection unit 50 is an example of the light receiving unit
  • the laser interference light is an example of the detection interference light.
  • the tilt adjusting mechanism 31 is an example of the tilt adjusting unit.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention concerne un interféromètre de Michelson qui comprend un miroir fixe, un miroir mobile, un mécanisme de déplacement et un séparateur de faisceau. Le miroir mobile est disposé de façon à être apte à se déplacer dans une direction et dans la direction opposée à la première direction. Le mécanisme de déplacement déplace le miroir mobile dans ladite une direction et dans la direction opposée. L'interféromètre de Michelson comprend en outre une unité de détection d'inclinaison et une unité de détermination. L'unité de détection d'inclinaison détecte l'inclinaison du miroir mobile lorsque le miroir mobile se déplace. L'unité de détermination détermine la détérioration du mécanisme de déplacement sur la base d'un changement de l'inclinaison détectée.
PCT/JP2019/007856 2019-02-28 2019-02-28 Interféromètre de michelson et spectromètre infrarouge à transformée de fourier le comprenant WO2020174665A1 (fr)

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Application Number Priority Date Filing Date Title
PCT/JP2019/007856 WO2020174665A1 (fr) 2019-02-28 2019-02-28 Interféromètre de michelson et spectromètre infrarouge à transformée de fourier le comprenant
JP2021501501A JP7215562B2 (ja) 2019-02-28 2019-02-28 マイケルソン干渉計およびそれを備えるフーリエ変換赤外分光装置

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Application Number Priority Date Filing Date Title
PCT/JP2019/007856 WO2020174665A1 (fr) 2019-02-28 2019-02-28 Interféromètre de michelson et spectromètre infrarouge à transformée de fourier le comprenant

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JPS63168522A (ja) * 1986-12-30 1988-07-12 Shimadzu Corp 干渉計の調整装置
JPS6459019A (en) * 1987-08-29 1989-03-06 Shimadzu Corp Fourier transformation type spectrophotometer
JP2012042257A (ja) * 2010-08-17 2012-03-01 Konica Minolta Holdings Inc 平行移動機構、干渉計および分光器
WO2012064655A1 (fr) * 2010-11-11 2012-05-18 Thermo Electron Scientific Instruments Llc Asservissement en vitesse d'un séparateur de faisceau et de miroirs mobiles pour interféromètre
WO2012073681A1 (fr) * 2010-12-03 2012-06-07 コニカミノルタホールディングス株式会社 Source de lumière laser, interféromètre et spectromètre
WO2014132379A1 (fr) * 2013-02-28 2014-09-04 株式会社島津製作所 Spectromètre infrarouge à transformée de fourier
JP2016142527A (ja) * 2015-01-29 2016-08-08 株式会社島津製作所 フーリエ変換型分光光度計

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Publication number Priority date Publication date Assignee Title
JP5949613B2 (ja) 2013-03-21 2016-07-13 株式会社島津製作所 分光光度計

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168522A (ja) * 1986-12-30 1988-07-12 Shimadzu Corp 干渉計の調整装置
JPS6459019A (en) * 1987-08-29 1989-03-06 Shimadzu Corp Fourier transformation type spectrophotometer
JP2012042257A (ja) * 2010-08-17 2012-03-01 Konica Minolta Holdings Inc 平行移動機構、干渉計および分光器
WO2012064655A1 (fr) * 2010-11-11 2012-05-18 Thermo Electron Scientific Instruments Llc Asservissement en vitesse d'un séparateur de faisceau et de miroirs mobiles pour interféromètre
WO2012073681A1 (fr) * 2010-12-03 2012-06-07 コニカミノルタホールディングス株式会社 Source de lumière laser, interféromètre et spectromètre
WO2014132379A1 (fr) * 2013-02-28 2014-09-04 株式会社島津製作所 Spectromètre infrarouge à transformée de fourier
JP2016142527A (ja) * 2015-01-29 2016-08-08 株式会社島津製作所 フーリエ変換型分光光度計

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