WO2020158325A1 - Dispositif de support d'ajustement de position de composant optique, procédé de support d'ajustement de position de composant optique, programme de support d'ajustement de position de composant optique et procédé de fabrication de dispositif de lentille - Google Patents

Dispositif de support d'ajustement de position de composant optique, procédé de support d'ajustement de position de composant optique, programme de support d'ajustement de position de composant optique et procédé de fabrication de dispositif de lentille Download PDF

Info

Publication number
WO2020158325A1
WO2020158325A1 PCT/JP2020/000366 JP2020000366W WO2020158325A1 WO 2020158325 A1 WO2020158325 A1 WO 2020158325A1 JP 2020000366 W JP2020000366 W JP 2020000366W WO 2020158325 A1 WO2020158325 A1 WO 2020158325A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical member
lens device
adjustment support
data
evaluation data
Prior art date
Application number
PCT/JP2020/000366
Other languages
English (en)
Japanese (ja)
Inventor
長谷川　和哉
Original Assignee
富士フイルム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Priority to JP2020569474A priority Critical patent/JP7059406B2/ja
Publication of WO2020158325A1 publication Critical patent/WO2020158325A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • the present invention relates to an optical member position adjustment support device, an optical member position adjustment support method, an optical member position adjustment support program, and a lens device manufacturing method.
  • a lens device used for an image pickup device such as a digital camera or a projection device such as a projector has a plurality of optical members such as a lens, a diaphragm, and a mirror. Therefore, due to manufacturing errors and assembling errors of the optical members, a desired resolution characteristic may not be obtained even if the lens device is manufactured as designed.
  • Patent Document 1 in the lens optical system, in order to obtain a desired resolution characteristic, the amount of adjustment of the position of the adjusted lens in the plane perpendicular to the optical axis of the lens optical system is machine-learned. It is described that it asks for it. More specifically, in Patent Document 1, the performance value of the lens optical system is obtained in a state where the zoom lens of the lens optical system is moved to the tele end and the wide end, and the performance value is input to the neural network, A method of obtaining a movement adjustment amount of a lens to be adjusted by a neural network is described.
  • Patent Document 2 and Patent Document 3 in a module including an image sensor and a lens, a chart is imaged by the image sensor at different positions in the optical axis direction to obtain a resolution evaluation value. It is described that the position adjustment between the image sensor and the lens is performed based on the above.
  • Patent Document 1 obtains the performance value of the lens optical system with the focus position of the lens optical system fixed to one, and obtains the adjustment amount of the lens to be adjusted based on this performance value. is there. Therefore, for example, when there are a plurality of adjusted lenses, when it is necessary to adjust the tilt of the adjusted lens, or when it is necessary to adjust the position of the adjusted lens in the optical axis direction, The position cannot be adjusted accurately.
  • Patent Documents 2 and 3 are techniques for adjusting the positional relationship between the lens and the image sensor, and do not adjust the position of the optical member in the lens device.
  • the present invention has been made in view of the above circumstances, and an optical member position adjustment support device, an optical member position adjustment support method, and an optical member position that enable highly accurate position adjustment of an optical member in a lens device. It is an object to provide an adjustment support program and a lens device manufacturing method.
  • An optical member position adjustment support device of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an adjusted optical member and an evaluation position in the optical axis direction of the lens device into a plurality of values.
  • a measurement evaluation acquisition unit that acquires measurement evaluation data based on the first resolution performance data of the lens device obtained at the evaluation position, the measurement evaluation data, and the same configuration as the lens device.
  • An optical member position adjustment support method of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an optical member to be adjusted and an evaluation position in the optical axis direction of the lens device into a plurality of values.
  • An optical member position adjustment support program of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an adjusted optical member and an evaluation position in the optical axis direction of the lens device into a plurality of values.
  • a method for manufacturing a lens device according to the present invention is a method for manufacturing a lens device having a plurality of optical members including an optical member to be adjusted, wherein an image forming position of the lens device and an evaluation position in the optical axis direction of the lens device.
  • a first step of generating actually measured evaluation data based on the first resolution performance data of the lens device obtained at the evaluated position, and the actually measured evaluation data First information on the position of the adjusted optical member in each of the virtual lens devices, which is necessary for setting the resolution characteristics of each of the virtual lens devices of the same configuration as the lens device to a predetermined property, and
  • each virtual lens device based on the second resolution performance data of each virtual lens device obtained at the evaluation position Adjustment support which is information indicating the amount of adjustment of the position of the optical member to be adjusted in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic based on design evaluation data.
  • an optical member position adjustment support device an optical member position adjustment support method, an optical member position adjustment support program, and a lens device manufacturing method that enable highly accurate position adjustment of an optical member in a lens device.
  • FIG. 9 shows an example of the lens apparatus 1 manufactured using the position adjustment support device 100 of the optical member which is one Embodiment of this invention. It is a schematic diagram showing a schematic configuration of a position adjustment support device 100. It is a schematic diagram which shows the measuring system of the 1st resolution performance data required for generation of measurement evaluation data. It is the figure which looked at the resolution chart 2 shown in FIG. 2 from the lens apparatus 1 side in the optical axis direction Z. It is a schematic diagram which shows an example of the 1st resolution performance data corresponding to a low frequency pattern. It is a schematic diagram which shows an example of the 1st resolution performance data corresponding to a high frequency pattern. It is a figure which shows an example of the data registered into the database 103 shown in FIG. 9 is a schematic diagram showing the configuration of a position adjustment support device 100A that is a second modification of the position adjustment support device 100. FIG. 9 is a flowchart for explaining a modified example of the method for manufacturing the lens device 1.
  • FIG. 1 is a schematic view showing an example of a lens device 1 manufactured by using a position adjustment support device 100 for an optical member, which is an embodiment of the present invention.
  • the lens device 1 is used for an imaging device such as a digital camera or a projection device such as a projector. Below, the lens apparatus 1 is demonstrated as what is utilized for an imaging device.
  • the lens device 1 includes a plurality of optical members provided in the lens barrel 10 (four optical members including a first lens 11, a second lens 12, a third lens 13, and a fourth lens 14 in the example of FIG. 1). ) Is provided.
  • the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 are arranged in this order from the subject side along the optical axis K of the lens device 1.
  • the direction in which the optical axis K extends is called the optical axis direction Z.
  • the fourth lens 14 is a focus lens. By moving the fourth lens 14 in the optical axis direction Z, the image forming position of the subject by the lens device 1 can be changed.
  • the lens device 1 is manufactured, for example, as follows.
  • the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 are arranged in the lens barrel 10 according to the design values, and the first lens 11 and the fourth lens 14 are arranged in the lens barrel 10.
  • the second lens 12 and the third lens 13 are temporarily fixed to the lens barrel 10 so that they can be moved with respect to the lens barrel 10.
  • the lens device 1 in which the first lens 11 and the fourth lens 14 are fixed to the lens barrel 10 and the second lens 12 and the third lens 13 are temporarily fixed to the lens barrel 10 will be described below. Also referred to as device 1.
  • the positions of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 in the lens device 1 before adjustment are referred to as initial positions.
  • the second lens is adjusted so that the resolution performance (specifically, the optical transfer function (Modulated Transfer Function: MTF)) of the lens device 1 before the adjustment becomes a predetermined performance (hereinafter, referred to as a desired performance).
  • MTF Modulated Transfer Function
  • 12 and the position of each of the third lens 13 in the optical axis direction Z, and the position of each of the second lens 12 and the third lens 13 including the inclination of the optical axis of each of the second lens 12 and the third lens 13. Adjust. After completion of this adjustment, the second lens 12 and the third lens 13 are permanently fixed to the lens barrel 10, and the lens device 1 is completed.
  • the position adjustment assisting device 100 described below has an initial position of each of the second lens 12 and the third lens 13 in the optical axis direction Z such that the resolution performance of the lens device 1 before the adjustment becomes a desired performance.
  • This position adjustment work is performed by automatically generating the adjustment amount from the position and the adjustment amount of the inclination of the optical axis of each of the second lens 12 and the third lens 13 with respect to the initial position based on huge simulation data. It is to support.
  • FIG. 2 is a schematic diagram showing a schematic configuration of the position adjustment support device 100.
  • the position adjustment support device 100 includes a measurement evaluation acquisition unit 101, an adjustment support information generation unit 102, and a database (DB) 103.
  • the position adjustment support device 100 includes various processors that execute programs to perform processing, a RAM (Random Access Memory), and a ROM (Read Only Memory).
  • the database 103 is included in the ROM, for example.
  • a processor whose circuit configuration can be changed after manufacturing such as a CPU (Central Processing Unit) and an FPGA (Field Programmable Gate Array) that are general-purpose processors that execute programs to perform various processes
  • a programmable electric logic device (PLD) which is the above, or a dedicated electric circuit, which is a processor having a circuit configuration specifically designed to execute a specific process such as an ASIC (Application Specific Integrated Circuit), is included. .. More specifically, the structures of these various processors are electric circuits in which circuit elements such as semiconductor elements are combined.
  • the position adjustment support device 100 may be configured by one of various processors, or may be a combination of two or more processors of the same type or different types (for example, a combination of a plurality of FPGAs or a combination of a CPU and an FPGA). It may be configured.
  • the processor of the position adjustment support device 100 functions as the actual measurement evaluation acquisition unit 101 and the adjustment support information generation unit 102 by executing the program including the position adjustment support program stored in the ROM.
  • the measurement evaluation acquisition unit 101 acquires the measurement evaluation data and temporarily stores it in the RAM.
  • the actually measured evaluation data is obtained in a state in which the distance between the image forming position of the lens device 1 before adjustment and the evaluation position in the optical axis direction Z of the lens device 1 before adjustment is changed to a plurality of values.
  • 2 is data based on the first resolution performance data of the lens apparatus 1 in FIG.
  • FIG. 3 is a schematic diagram showing a measurement system of the first resolution performance data necessary for generating the measurement evaluation data.
  • a resolution chart 2 in which a predetermined pattern is formed is arranged at a predetermined position on the object side front side of the lens device 1 before adjustment.
  • the image pickup device 3 is arranged at a position opposite to the subject side of the lens device 1 before adjustment so as to be movable in the optical axis direction Z.
  • the position of the light receiving surface of the image sensor 3 in the optical axis direction Z is the evaluation position for evaluating the imaging performance of the lens device 1.
  • FIG. 4 is a view of the resolution chart 2 shown in FIG. 2 viewed from the lens device 1 side in the optical axis direction Z.
  • the resolution chart 2 is a rectangular plane perpendicular to the optical axis direction Z, the direction X coincides with the longitudinal direction of the light receiving surface of the image sensor 3, and the direction Y perpendicular to the direction X indicates the light receiving surface of the image sensor 3. It matches the lateral direction.
  • the direction X and the direction Y are perpendicular to the optical axis direction Z.
  • a first pattern 21 is formed in the central portion that intersects the optical axis K of the lens device 1 before adjustment.
  • the first pattern 21 includes a low frequency pattern LP having a low spatial frequency in which lines extending in the direction Y are arranged at a first interval in the direction X and a low frequency pattern LP in the direction Y.
  • the extending line includes a high frequency pattern HP having a high spatial frequency and arranged in the direction X at a second interval narrower than the first interval.
  • the second pattern 22 is formed at a predetermined position on the circumference of a circle 24 centered on a point intersecting the optical axis K of the lens device 1 before adjustment.
  • the third pattern 23 is formed on the circumference of the circle 24 at a position different from the position where the second pattern 22 is formed.
  • the second pattern 22 and the third pattern 23 are each composed of a pair of a low frequency pattern LP and a high frequency pattern HP.
  • Each of the first pattern 21, the second pattern 22, and the third pattern 23 is a pattern in which straight lines extending in the direction Y are arranged in the direction X, but straight lines extending in the direction X are in the direction Y. It may be an arrayed pattern or may include both patterns. Further, the number of patterns included in the resolution chart 2 is not limited to three, that is, the first pattern 21, the second pattern 22, and the third pattern 23, and may be four or more.
  • the center position intersecting the optical axis K is set as a reference image height, and the center of the center position is on the circumference of a circle.
  • the position is defined as the image height whose value depends on the radius of this circle.
  • the second pattern 22 and the third pattern 23 on the circumference of the circle 24 in the captured image of the resolution chart 2 shown in FIG. 4 have the same image height.
  • the first pattern 21, the second pattern 22 and the third pattern 23 can be said to have different image heights.
  • the image height of the first pattern 21 constitutes the first image height
  • the image height of the second pattern 22 constitutes the second image height
  • the image height of the third pattern 23 is the third image height. Make up.
  • the position of the fourth lens 14 of the lens device 1 before adjustment is further fixed to a predetermined position.
  • the position of the fourth lens 14 of the lens device 1 before adjustment (in other words, the focus position) is fixed, and the position of the resolution chart 2 is also fixed. Therefore, the image formation position of the resolution chart 2 by the lens device 1 before adjustment is fixed.
  • the resolution chart 2 is imaged by the image sensor 3 at each moving position while moving the image sensor 3 in the optical axis direction Z within a predetermined range.
  • the distance in other words, defocus amount
  • 5 and 6 show an example of the result of obtaining the MTF value indicating the resolution performance of each pattern to be obtained.
  • the horizontal axis represents the position of the light receiving surface of the image sensor 3 in the optical axis direction Z in the measurement system of FIG. 3, and the vertical axis represents the MTF value.
  • FIG. 5 shows the resolution performance data 21L, the resolution performance data 22L, and the resolution performance data 23L.
  • the resolution performance data 21L is data indicating the MTF value of the low frequency pattern LP of the first pattern 21 in each of the plurality of captured images described above.
  • the resolution performance data 22L is data indicating the MTF value of the low-frequency pattern LP of the second pattern 22 in each of the plurality of captured images described above.
  • the resolution performance data 23L is data indicating the MTF value of the low-frequency pattern LP of the third pattern 23 in each of the plurality of captured images described above.
  • FIG. 6 shows resolution performance data 21H, resolution performance data 22H, and resolution performance data 23H.
  • the resolution performance data 21H is data indicating the MTF value of the high frequency pattern HP of the first pattern 21 in each of the plurality of captured images described above.
  • the resolution performance data 22H is data indicating the MTF value of the high frequency pattern HP of the second pattern 22 in each of the plurality of captured images described above.
  • the resolution performance data 23H is data indicating the measurement result of the MTF value of the high frequency pattern HP of the third pattern 23 in each of the plurality of captured images described above.
  • the resolution performance data 21L, the resolution performance data 22L, the resolution performance data 23L, the resolution performance data 21H, the resolution performance data 22H, and the resolution performance data 23H respectively form first resolution performance data. ..
  • the peak value of the MTF value in the resolution performance data 21L shown in FIG. 5 is generated as the measurement evaluation data 21Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measurement evaluation data 21La. It
  • the peak value of the MTF value in the resolution performance data 22L shown in FIG. 5 is generated as the measured evaluation data 22Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 22La.
  • the peak value of the MTF value in the resolution performance data 23L shown in FIG. 5 is generated as the measured evaluation data 23Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 23La.
  • the peak value of the MTF value in the resolution performance data 21H shown in FIG. 6 is generated as the measurement evaluation data 21Hb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measurement evaluation data 21Ha.
  • the peak value of the MTF value in the resolution performance data 22H shown in FIG. 6 is generated as the measured evaluation data 22Hb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 22Ha.
  • the peak value of the MTF value in the resolution performance data 23H shown in FIG. 6 is generated as the measured evaluation data 23Hb, and the information of the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 23Ha.
  • the actual measurement evaluation data 21La, the actual measurement evaluation data 22La, the actual measurement evaluation data 23La, the actual measurement evaluation data 21Ha, the actual measurement evaluation data 22Ha, and the actual measurement evaluation data 23Ha are the results of the lens apparatus 1 when the peak value of the MTF value is obtained.
  • the information corresponds to the distance between the image position and the light receiving surface (evaluation position) of the image sensor 3.
  • the present invention is not limited to this.
  • the position of the image sensor 3 is fixed and the resolution chart 2 is moved in the optical axis direction Z, so that the image formation position of the resolution chart 2 by the lens device 1 and the light reception of the image sensor 3 are received.
  • the distance to the surface may be changed.
  • the optical axis direction Z of the resolution chart 2 is obtained. The information of the position of is used.
  • the position of the image sensor 3 is fixed, and the fourth lens 14, which is a focus lens, is moved in the optical axis direction Z, so that the image forming position of the resolution chart 2 by the lens device 1 is changed.
  • the distance from the light receiving surface of the image sensor 3 may be changed.
  • the information corresponding to the above distance (defocus amount) when the peak value in the actually measured evaluation data is obtained is replaced with the information on the position of the image pickup element 3 in the optical axis direction of the fourth lens 14.
  • Information on the position of Z is used.
  • the resolution performance data can also be acquired by projecting the resolution chart 2 on the screen via the lens device 1 and capturing the projected image. In this case, in FIG.
  • the resolution chart 2 is displayed as a display image on a display unit such as a liquid crystal display panel, and this display image is projected on the screen by the lens device 1. Further, instead of the image pickup device 3, an image pickup device for picking up a projected image of the resolution chart 2 projected on this screen is provided. Then, for example, with the position of the screen fixed and the focus position of the lens device 1 fixed, a projection image is taken by the imaging device while moving the display unit in the optical axis direction, and the first resolution performance data is generated. Good. In this configuration, the position of the imaging device becomes the evaluation position, and the distance between the image formation position of the resolution chart 2 by the lens device 1 and the evaluation position changes due to the movement of the display unit.
  • the adjustment support information generation unit 102 shown in FIG. 2 is based on each actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101 and the design evaluation data and the first information registered in the database 103, before adjustment.
  • the adjustment support information which is the information indicating the adjustment amount of the positions of the second lens 12 and the third lens 13 in the lens device 1 necessary for setting the resolution property of the lens device 1 to a desired property, is output.
  • the adjustment support information generation unit 102 also functions as an “output unit” that outputs the adjustment support information.
  • FIG. 7 is a diagram showing an example of data registered in the database 103 shown in FIG.
  • the database 103 stores design data with errors of n (n is a natural number of 2 or more) virtual lens devices A1, A2, A3, A4, A5,..., An having the same configuration as the lens device 1 of FIG. It is registered.
  • the design data with error includes the design values (shape, refractive index, etc.) of each of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 of the lens device 1, the first lens 11, the It is data in which a random error is added to a design value (arrangement interval or the like in the optical axis direction Z) regarding the arrangement of the second lens 12, the third lens 13, and the fourth lens 14.
  • the error given to each of the virtual lens devices A1 to An is the assembly error of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14, the first lens 11, the second lens 12, the An error in the range of several times of various errors such as a manufacturing error of each of the third lens 13 and the fourth lens 14 is randomly given by, for example, Monte Carlo simulation.
  • the first design evaluation data, the second design evaluation data, and the first information are registered in association with each of the n design data with error.
  • the first design evaluation data and the second design evaluation data are collectively referred to as design evaluation data.
  • the first design evaluation data is based on the design data with error of the corresponding virtual lens device Ak (k is 1 to n), and the virtual lens device of this design data with error is measured by the measurement system of FIG. 5 and FIG. 6 obtained when applied to the simulation is simulated, and the actual measurement evaluation data 21La and the actual measurement evaluation data 21Lb obtained based on the simulation result are simulated. , Simulation values of the measurement evaluation data 22La, the measurement evaluation data 22Lb, the measurement evaluation data 23La, and the measurement evaluation data 23Lb.
  • the second design evaluation data is based on the design data with error of the corresponding virtual lens device Ak (k is 1 to n), and the virtual lens device of this design data with error is measured by the measurement system of FIG. 5 and FIG. 6 obtained when applied to FIG. 6 is simulated, and the actual measurement evaluation data 21Ha and the actual measurement evaluation data 21Hb obtained based on the simulation result are simulated. , Simulation values of the measurement evaluation data 22Ha, the measurement evaluation data 22Hb, the measurement evaluation data 23Ha, and the measurement evaluation data 23Hb.
  • the first information sets the resolution performance of the virtual lens device Ak (k is any of 1 to n) corresponding to this, which is determined based on the design data with error, to the above-mentioned desired performance. This is information on the adjustment amount (position adjustment amount in the optical axis direction Z, inclination adjustment amount of the optical axis) of the second lens 12 and the third lens 13 necessary for this.
  • the first information is also obtained by simulation.
  • the adjustment support information generation unit 102 extracts from the database 103 the design evaluation data that is most similar to the combination of the twelve actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101.
  • the adjustment support information generation unit 102 extracts the design evaluation data that is most similar to the combination of the twelve pieces of actual measurement evaluation data, and outputs the first information corresponding to the extracted design evaluation data as the adjustment support information.
  • This adjustment support information is notified to the manufacturer of the lens device 1 by being displayed on a display unit (not shown), for example.
  • the manufacturer adjusts the positions of the second lens 12 and the third lens 13 in the optical axis direction Z and the inclination of the optical axis according to the adjustment support information.
  • the above adjustment support information is output to this manufacturing apparatus.
  • the manufacturing apparatus adjusts the position of the second lens 12 and the third lens 13 in the optical axis direction Z and the inclination of the optical axis according to the adjustment support information.
  • the position adjustment assisting device 100 performs the actual measurement generated based on the first resolution performance data obtained by changing the distance between the image forming position of the lens device 1 and the position of the light receiving surface of the image sensor 3.
  • the adjustment support information is output using the evaluation data as an input. Therefore, the adjustment support information can include information on the inclinations of the optical axes of the second lens 12 and the third lens 13 and the positions in the optical axis direction Z. Therefore, even with a lens device having many optical members, it is possible to accurately adjust the optical member to be adjusted.
  • the optimum evaluation is performed by the simple process of extracting the design evaluation data most similar to the combination of the twelve actually measured evaluation data from the design evaluation data registered in the database 103. Adjustment support information can be output. Therefore, it is possible to shorten the time until the output of the adjustment support information and reduce the manufacturing cost of the position adjustment support device 100.
  • the position adjustment assisting apparatus 100 acquires the peak value of the MTF value and the position of the image sensor 3 when the peak value is obtained as the measurement evaluation data. Therefore, when there are a plurality of adjusted optical members, it is possible to generate adjustment support information capable of obtaining high resolution characteristics even when adjusting the tilt or the position of the optical member in the optical axis direction.
  • the actual measurement evaluation data and the design evaluation data are data showing the resolution performance for the first pattern 21 near the optical axis K, and the second pattern 22 and the second pattern 22 having an image height larger than that of the first pattern 21, respectively.
  • the actual measurement evaluation data and the design evaluation data each include data indicating the resolution performance with respect to the second pattern 22 and the third pattern 23 located at different positions with the same image height. Therefore, it is possible to accurately generate the adjustment support information including the inclinations of the second lens 12 and the third lens 13, the distance between the second lens 12 and the adjacent optical member, and the distance between the third lens 13 and the adjacent optical member. You can
  • the actual measurement evaluation data and the design evaluation data each include data indicating the resolution performance for the low frequency pattern LP having a low spatial frequency and data indicating the resolution performance for the high frequency pattern HP having a high spatial frequency. Therefore, the accuracy of the adjustment support information can be improved.
  • the adjustment support information generation unit 102 extracts, from the database 103, a plurality of design evaluation data similar to the combination of the twelve actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101, and corresponds to the plurality of design evaluation data.
  • the adjustment support information may be generated and output using one piece of information.
  • the adjustment support information generation unit 102 generates, for example, a first graph from twelve actual measurement evaluation data, generates n second graphs from each design evaluation data, and calculates the shape of the n second graphs and the first graph.
  • the shape of the graph is compared with the design evaluation data (the first design evaluation data) that is the origin of the second graph closest to the shape of the first graph, and the second closest to the shape of the first graph.
  • the design evaluation data (referred to as the second design evaluation data) from which the two graphs are generated is taken as the extraction result.
  • the adjustment support information generation unit 102 outputs the average value of the first information corresponding to each of the first design evaluation data and the second design evaluation data as the adjustment support information. For example, the adjustment support information generation unit 102 simply averages the tilt adjustment amount that is the first information corresponding to the first design evaluation data and the tilt adjustment amount that is the first information corresponding to the second design evaluation data. And outputs it as the adjustment support information of the inclination of the optical axis, and outputs the position adjustment amount which is the first information corresponding to the first design evaluation data and the position adjustment amount which is the first information corresponding to the second design evaluation data. Simply average and output as adjustment support information for the position in the optical axis direction.
  • the adjustment support information generation unit 102 sets the tilt adjustment amount, which is the first information corresponding to the first design evaluation data, and the tilt adjustment amount, which is the first information corresponding to the second design evaluation data, to the first design.
  • the weight corresponding to the evaluation data is increased and the weighted average is output, and output as inclination adjustment support information.
  • the adjustment support information generation unit 102 sets the position adjustment amount, which is the first information corresponding to the first design evaluation data, and the position adjustment amount, which is the first information corresponding to the second design evaluation data, to the first design.
  • the weight corresponding to the evaluation data is increased and the weighted average is output, which is output as the adjustment support information of the position in the optical axis direction.
  • the adjustment support information is generated by the plurality of first information corresponding to the plurality of design evaluation data, so that the accuracy of the adjustment support information can be improved.
  • FIG. 8 is a schematic diagram showing a configuration of a position adjustment support device 100A which is a second modification of the position adjustment support device 100.
  • the position adjustment support device 100A is different from the position adjustment support device 100 in that the adjustment support information generation unit 102 generates the adjustment support information by the information generation model 102a.
  • the information generation model 102a is a model generated by machine learning in which n pieces of design evaluation data registered in the database 103 and the first information corresponding to each design evaluation data are used as teacher data. Is input to generate and output adjustment support information suitable for the measured evaluation data.
  • machine learning for generating the information generation model 102a an arbitrary algorithm such as deep learning, a partial least squares method, a support vector regression method, a random forest method, or a decision tree method can be used.
  • the adjustment support information is generated by the information generation model 102a generated by machine learning, so that the accuracy of the adjustment support information can be increased.
  • the information generation model 102a also functions as an "output unit" that outputs the adjustment support information.
  • FIG. 9 is a flowchart for explaining a modified example of the method for manufacturing the lens device 1.
  • the actually measured evaluation data group ML including the data 23Lb is generated (step S1), and the actually measured evaluation data group ML is input to the position adjustment support device 100 (step S2).
  • the adjustment support information generation unit 102 causes the adjustment support information generation unit 102 to be the first design evaluation most similar to the actual measurement evaluation data group ML from the database 103.
  • the data is extracted, and the first information corresponding to the extracted first design evaluation data is output as the adjustment support information IL (step S3).
  • step S4 position adjustment work (primary adjustment) of the second lens 12 and the third lens 13 is performed (step S4). Then, for the lens device 1 after this position adjustment work, using the measurement system shown in FIG. 3, the actual measurement evaluation data 21Ha, the actual measurement evaluation data 21Hb, the actual measurement evaluation data 22Ha, the actual measurement evaluation data 22Hb, the actual measurement evaluation data 23Ha, A measurement evaluation data group MH including the measurement evaluation data 23Hb is generated (step S5), and the measurement evaluation data group MH is input to the position adjustment support device 100 (step S6).
  • the adjustment support information generation unit 102 causes the adjustment support information generation unit 102 to select the second design evaluation most similar to the actual measurement evaluation data group MH from the database 103.
  • the data is extracted, and the first information corresponding to the extracted second design evaluation data is output as the adjustment support information IH (step S7).
  • step S8 position adjustment work (secondary adjustment) of the second lens 12 and the third lens 13 is performed (step S8), and in that state, the second lens 12 and the third lens 13 are performed. Is fixed to the lens barrel 10 to complete the lens device 1.
  • the process of generating the adjustment support information IL from the measured evaluation data group ML corresponding to the low frequency pattern LP, the process of generating the adjustment support information IH from the measured evaluation data group MH corresponding to the high frequency pattern HP By separately performing the above, the positions of the second lens 12 and the third lens 13 are adjusted with high accuracy and the resolution characteristics of the lens device 1 are desired, regardless of the resolution performance of the lens device 1 before adjustment. Can be a property of
  • the adjustment support information generation unit 102 When the adjustment support information generation unit 102 generates the adjustment support information by the information generation model 102a, the first design evaluation data and the corresponding first information are used as the teacher data as the information generation model 102a.
  • a low-frequency model generated by machine learning and a high-frequency model generated by machine learning using second design evaluation data and corresponding first information as teacher data may be prepared. ..
  • the adjustment support information generation unit 102 applies this to the low frequency model to generate the adjustment support information IL for primary adjustment by the low frequency model.
  • this may be applied to the high frequency model to generate the adjustment support information IH for secondary adjustment by the high frequency model.
  • the lens device 1 is configured to include only lenses as optical members, the optical members included in the lens device 1 may include components other than lenses such as a diaphragm, a prism, and a mirror. Further, the number of optical members to be adjusted in the lens device 1 may not be plural, but may be only one.
  • a plurality of optical members for example, the first lens 11, the second lens 12, the third lens 13, and the third lens 13 of the above-described embodiment
  • the first position of the lens device obtained at the evaluation position in a state in which the distance between the imaging position of the lens device having the four lenses 14) and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values.
  • the resolution performance data for example, the resolution performance data 21L, the resolution performance data 22L, the resolution performance data 23L, the resolution performance data 21H, the resolution performance data 22H, and the resolution performance data 23H of the above-described embodiment).
  • a measurement evaluation acquisition unit that acquires measurement evaluation data based on The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic First information indicating the adjustment amount, and in the state in which the distance in each of the virtual lens devices is changed to the plurality of values, in the second resolution performance data of each of the virtual lens devices obtained at the evaluation position. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics.
  • a position adjustment support device for an optical member which includes an output unit (for example, the adjustment support information generation unit 102 of the above-described embodiment) that outputs adjustment support information that is information indicating
  • the position adjustment support device for an optical member as described above, The output unit extracts one of the design evaluation data similar to the measured evaluation data from the design evaluation data of each virtual lens device, and obtains the extracted design evaluation data of the virtual lens device.
  • a position adjustment support device for an optical member which outputs, as the adjustment support information, the first information necessary for setting a resolution property to the predetermined property.
  • the position adjustment support device for an optical member as described above extracts a plurality of the design evaluation data similar to the actual measurement evaluation data from the design evaluation data of each virtual lens device, and obtains each of the plurality of the design evaluation data.
  • a position adjustment assisting device for an optical member which generates the adjustment assisting information by using the first information necessary for setting the resolution characteristic of the device to the predetermined characteristic.
  • the output unit outputs the adjustment support information from the measured evaluation data by a model (for example, the information generation model 102a of the above-described embodiment) generated by machine learning using the design evaluation data and the first information as teacher data.
  • a model for example, the information generation model 102a of the above-described embodiment
  • the position adjustment support device for an optical member according to any one of (1) to (4),
  • the first resolution performance data is data indicating the resolution performance of the lens device in the state where the distance is each of the plurality of values
  • the actual measurement evaluation data includes information corresponding to the peak value of the resolution performance in the first resolution performance data and the distance in the state where the peak value is obtained (for example, the image sensor 3 of the embodiment described above).
  • Position and a position adjustment support device for an optical member.
  • the position adjustment support device for an optical member according to any one of (1) to (5),
  • the actual measurement evaluation data is first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position (for example, actual measurement evaluation data 21La, 21Lb, 21Ha, 21Hb in the above-described embodiment), Second actual measurement evaluation data based on the first resolution performance data at the second image height different from the first image height at the evaluation position (for example, actual measurement evaluation data 22La, 22Lb, 22Ha, 22Hb in the above-described embodiment).
  • a position adjustment support device for an optical member including.
  • the position adjustment support device for an optical member as described above The second actual measurement evaluation data is first sub actual measurement evaluation data based on the first resolution performance data at the first position of the second image height at the evaluation position (for example, the actual measurement evaluation data 22La of the above-described embodiment, 22Lb, 22Ha, 22Hb) and second sub-measurement evaluation data based on the first resolution performance data at a second position different from the first position of the second image height at the evaluation position (for example, the above-described implementation.
  • Position evaluation support device for an optical member including the actual measurement evaluation data 23La, 23Lb, 23Ha, 23Hb).
  • the first resolution performance data is the first sub-resolution performance data (for example, the resolution performance data 21L of the above-described embodiment) for the evaluation object of the first spatial frequency (for example, the low frequency pattern LP of the above-described embodiment). , 22L, 23L) and a second spatial frequency different from the first spatial frequency (for example, the high-frequency pattern HP of the above-described embodiment), the second sub-resolution performance data (for example, the resolution of the above-described embodiment).
  • Performance data 21H, 22H, 23H The actual measurement evaluation data is based on the first sub-resolution performance data (for example, the actual measurement evaluation data 21La, 21Lb, 22La, 21Lb, 23La, 23Lb of the embodiment described above) and the second sub-resolution performance data.
  • a position adjustment support device for an optical member which includes a base (for example, actual measurement evaluation data 21Ha, 21Hb, 22Ha, 22Hb, 23Ha, 23Hb of the above-described embodiment).
  • the position adjustment support device for an optical member according to any one of (1) to (8),
  • the adjustment support information includes an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device, and an adjustment amount of the inclination of the optical axis of the adjusted optical member. ..
  • the position adjustment support device for an optical member is a position of an optical member including a plurality of above-mentioned adjusted optical members, and at least one fixed optical member (for example, the 1st lens 11 and the 4th lens 14 of the above-mentioned embodiment) which does not require position adjustment. Adjustment support device.
  • an adjustment amount of the position of the adjusted optical member in the lens device which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics.
  • An output step of outputting adjustment support information which is information indicating the position adjustment support method of the optical member.
  • a method for assisting position adjustment of an optical member which outputs the first information necessary for setting a resolution characteristic to the predetermined characteristic as the adjustment assistance information.
  • (13) A method for supporting position adjustment of an optical member as described above, In the output step, a plurality of the design evaluation data similar to the measured evaluation data is extracted from the design evaluation data of each virtual lens device, and each of the plurality of the design evaluation data is obtained the virtual lens.
  • a position adjustment support method for an optical member which generates the adjustment support information by using the first information necessary for setting the resolution characteristic of the device to the predetermined characteristic.
  • the method for assisting position adjustment of an optical member according to any one of (11) to (14),
  • the first resolution performance data is data indicating the resolution performance of the lens device in the state where the distance is each of the plurality of values
  • the actual measurement evaluation data is a position adjustment support method for an optical member including a peak value of the resolution performance in the first resolution performance data and information corresponding to the distance in a state where the peak value is obtained. ..
  • a method for assisting position adjustment of an optical member according to any one of (11) to (15),
  • the actual measurement evaluation data is the first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position, and the second image height different from the first image height at the evaluation position.
  • a position adjustment support method for an optical member comprising: second measurement evaluation data based on first resolution performance data.
  • a method for assisting position adjustment of an optical member according to any one of (11) to (17), The first resolution performance data, the first sub-resolution performance data for the evaluation object of the first spatial frequency, and the second sub-resolution performance for the evaluation object of the second spatial frequency different from the first spatial frequency.
  • the adjustment support information includes an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device and an adjustment amount of the tilt of the optical axis of the adjusted optical member. ..
  • the lens apparatus is a method of assisting position adjustment of an optical member, which includes a plurality of the optical members to be adjusted and at least one fixed optical member that does not require position adjustment.
  • an adjustment amount of the position of the adjusted optical member in the lens device which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics.
  • a first step of generating measured evaluation data based on (for example, step S1 and step S5 of the above-described embodiment), The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic
  • the virtual images based on the second resolution performance data of the virtual lens devices obtained at the evaluation position.
  • information indicating the amount of adjustment of the position of the optical member to be adjusted in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic.
  • a second step (for example, step S2 or step S6 of the above-described embodiment) of inputting the actual measurement evaluation data to a position adjustment support device for an optical member that includes an output unit that outputs certain adjustment support information, Manufacturing a lens device including a third step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support apparatus (for example, step S4 or step S8 of the above-described embodiment).
  • a method of manufacturing a lens device comprising:
  • the first step includes a first sub-step (for example, step S1 of the above-described embodiment) that generates the actual measurement evaluation data based on the first resolution performance data for the evaluation object having the first spatial frequency, and the first sub-step.
  • a second sub-process (for example, step S5 of the above-described embodiment) that generates the actual measurement evaluation data based on the first resolution performance data for the evaluation object having the second spatial frequency higher than the one spatial frequency.
  • the second step is divided into a third sub step (for example, step S2 of the above-described embodiment) of inputting the actually measured evaluation data generated in the first sub step to the position adjustment support device, and the second sub step.
  • the third step is a fifth sub step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support device in the third sub step (for example, step S4 in the above-described embodiment).
  • a sixth sub-step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support device by the fourth sub-step (for example, step S8 of the above-described embodiment), Including After performing the primary adjustment of the position of the optical member to be adjusted by performing the first sub-step, the third sub-step, and the fifth sub-step, the second sub-step, the fourth sub-step, the sixth A method of manufacturing a lens device, wherein a sub-process is performed to perform a secondary adjustment of the position of the optical member to be adjusted.
  • the present invention it is possible to adjust the position of the optical member easily and with high accuracy, and to set the resolution characteristic of the lens device to a desired characteristic.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Studio Devices (AREA)

Abstract

L'invention concerne un dispositif de support d'ajustement de position de composant optique, un procédé de support d'ajustement de position de composant optique, un programme de support d'ajustement de position de composant optique, et un procédé de fabrication d'un dispositif de lentille, qui permettent un ajustement de position très précis pour un composant optique dans un dispositif de lentille. Un dispositif de support d'ajustement de position (100) comprend : une unité d'acquisition d'évaluation de mesure (101) pour acquérir des données d'évaluation de mesure pour un dispositif de lentille (1) qui est acquis dans une condition dans laquelle une quantité de défocalisation a été modifiée ; et une unité de sortie qui se réfère aux données d'évaluation de mesure, des premières informations qui indiquent une quantité d'ajustement pour la position d'un composant optique à être ajusté dans chacun d'une pluralité de dispositifs de lentille virtuelle ayant la même configuration que le dispositif de lentille (1), et des données d'évaluation de conception pour chaque dispositif de lentille virtuelle obtenues dans une condition dans laquelle une quantité de défocalisation a été modifiée dans chaque dispositif de lentille virtuelle, ladite quantité d'ajustement requise pour rendre la caractéristique de résolution de chaque dispositif de lentille virtuelle correspondant à une caractéristique prédéterminée, et délivre en conséquence des informations de support d'ajustement, qui indiquent une quantité d'ajustement pour la position du composant optique à ajuster.
PCT/JP2020/000366 2019-01-31 2020-01-09 Dispositif de support d'ajustement de position de composant optique, procédé de support d'ajustement de position de composant optique, programme de support d'ajustement de position de composant optique et procédé de fabrication de dispositif de lentille WO2020158325A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020569474A JP7059406B2 (ja) 2019-01-31 2020-01-09 光学部材の位置調整支援装置、光学部材の位置調整支援方法、光学部材の位置調整支援プログラム、レンズ装置の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-016083 2019-01-31
JP2019016083 2019-01-31

Publications (1)

Publication Number Publication Date
WO2020158325A1 true WO2020158325A1 (fr) 2020-08-06

Family

ID=71842050

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/000366 WO2020158325A1 (fr) 2019-01-31 2020-01-09 Dispositif de support d'ajustement de position de composant optique, procédé de support d'ajustement de position de composant optique, programme de support d'ajustement de position de composant optique et procédé de fabrication de dispositif de lentille

Country Status (2)

Country Link
JP (1) JP7059406B2 (fr)
WO (1) WO2020158325A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022209056A1 (fr) * 2021-03-31 2022-10-06 富士フイルム株式会社 Procédé de dérivation d'aberration de front d'onde, procédé de génération de modèle d'apprentissage automatique, procédé de fabrication de système optique de lentille, dispositif de dérivation d'aberration de front d'onde, et programme de dérivation d'aberration de front d'onde

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098875A (ja) * 2000-09-26 2002-04-05 Olympus Optical Co Ltd 光学系の調整方法及び調整装置
JP2008170981A (ja) * 2006-12-14 2008-07-24 Fujifilm Corp レンズ光学系の偏芯調整方法及び装置並びにプログラム
JP2008244494A (ja) * 2000-12-28 2008-10-09 Nikon Corp 結像特性調整方法、露光方法及び露光装置、プログラム、情報記録媒体、デバイス製造方法、並びに製造方法
JP2010230745A (ja) * 2009-03-26 2010-10-14 Suwa Optronics:Kk レンズ調芯装置およびレンズ調芯装置の制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098875A (ja) * 2000-09-26 2002-04-05 Olympus Optical Co Ltd 光学系の調整方法及び調整装置
JP2008244494A (ja) * 2000-12-28 2008-10-09 Nikon Corp 結像特性調整方法、露光方法及び露光装置、プログラム、情報記録媒体、デバイス製造方法、並びに製造方法
JP2008170981A (ja) * 2006-12-14 2008-07-24 Fujifilm Corp レンズ光学系の偏芯調整方法及び装置並びにプログラム
JP2010230745A (ja) * 2009-03-26 2010-10-14 Suwa Optronics:Kk レンズ調芯装置およびレンズ調芯装置の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022209056A1 (fr) * 2021-03-31 2022-10-06 富士フイルム株式会社 Procédé de dérivation d'aberration de front d'onde, procédé de génération de modèle d'apprentissage automatique, procédé de fabrication de système optique de lentille, dispositif de dérivation d'aberration de front d'onde, et programme de dérivation d'aberration de front d'onde

Also Published As

Publication number Publication date
JP7059406B2 (ja) 2022-04-25
JPWO2020158325A1 (ja) 2021-10-28

Similar Documents

Publication Publication Date Title
CN110447220B (zh) 校准装置、校准方法、光学装置、摄影装置以及投影装置
JP6664000B2 (ja) 較正装置、較正方法、光学装置、撮影装置、および投影装置
JP6576945B2 (ja) 較正装置、較正方法、光学装置、撮影装置、投影装置、計測システムおよび計測方法
US8773652B2 (en) Method and device for aligning a lens with an optical system
WO2017195801A1 (fr) Dispositif d'étalonnage, procédé d'étalonnage, dispositif optique, dispositif d'imagerie, dispositif de projection, système de mesure et procédé de mesure
US20150346471A1 (en) Method for the image-based calibration of multi-camera systems with adjustable focus and/or zoom
JP5919100B2 (ja) 補償光学システムの調整方法および補償光学システム
JP5841844B2 (ja) 画像処理装置及び画像処理方法
JP6112909B2 (ja) シャック・ハルトマンセンサーを用いた形状計測装置、形状計測方法
JP2012202694A (ja) カメラ校正方法
Huang High precision optical surface metrology using deflectometry
JP5595463B2 (ja) 波面光学測定装置
WO2020158325A1 (fr) Dispositif de support d'ajustement de position de composant optique, procédé de support d'ajustement de position de composant optique, programme de support d'ajustement de position de composant optique et procédé de fabrication de dispositif de lentille
JP2017037194A (ja) 露光装置の制御方法、露光装置、プログラム、および物品の製造方法
Fontbonne et al. Experimental validation of hybrid optical–digital imaging system for extended depth-of-field based on co-optimized binary phase masks
KR102124291B1 (ko) 광학식 정밀측정기의 렌즈 측정오차 교정방법
CN105933593A (zh) 聚焦位置检测装置和聚焦位置检测方法
Schenker et al. Effects of misalignments on the modulation transfer function measurement of camera lenses analyzed in optomechanical simulations
CN101918793A (zh) 测距装置
JP2009264894A (ja) 検査装置
CN114062265A (zh) 一种用于视觉系统的支撑结构稳定性的评估方法
KR0139572B1 (ko) 신경망 회로를 이용한 영상 왜곡 보정 방법
WO2022209056A1 (fr) Procédé de dérivation d'aberration de front d'onde, procédé de génération de modèle d'apprentissage automatique, procédé de fabrication de système optique de lentille, dispositif de dérivation d'aberration de front d'onde, et programme de dérivation d'aberration de front d'onde
Jungwirth et al. Quad target method: optical simulation to model the step height and projected fringe frequency
Gorevoy et al. Modeling and optimization of a geometrical calibration procedure for stereoscopic video endoscopes

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20747904

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2020569474

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20747904

Country of ref document: EP

Kind code of ref document: A1