WO2020158325A1

WO2020158325A1 - Optical component position adjustment support device, method for supporting optical component position adjustment, optical component position adjustment support program, and method for manufacturing lens device

Info

Publication number: WO2020158325A1
Application number: PCT/JP2020/000366
Authority: WO
Inventors: 長谷川　和哉
Original assignee: 富士フイルム株式会社
Priority date: 2019-01-31
Filing date: 2020-01-09
Publication date: 2020-08-06
Also published as: JPWO2020158325A1; JP7059406B2

Abstract

Provided are an optical component position adjustment support device, a method for supporting optical component position adjustment, an optical component position adjustment support program, and a method for manufacturing a lens device, which allow highly accurate positional adjustment for an optical component in a lens device. A position adjustment support device 100 comprises: a measurement evaluation acquisition unit 101 for acquiring measurement evaluation data for a lens device 1 that is acquired in a condition in which a defocus amount has been changed; and an output unit which refers to the measurement evaluation data, first information that indicates an adjustment amount for the position of an optical component to be adjusted in each of a plurality of virtual lens devices having the same configuration as the lens device 1, and design evaluation data for each virtual lens device obtained in a condition in which a defocus amount has been changed in each virtual lens device, said adjustment amount required for making the resolution characteristic of each virtual lens device match a predetermined characteristic, and accordingly outputs adjustment support information, which indicates an adjustment amount for the position of the optical component to be adjusted.

Description

Optical member position adjustment support device, optical member position adjustment support method, optical member position adjustment support program, lens device manufacturing method

The present invention relates to an optical member position adjustment support device, an optical member position adjustment support method, an optical member position adjustment support program, and a lens device manufacturing method.

A lens device used for an image pickup device such as a digital camera or a projection device such as a projector has a plurality of optical members such as a lens, a diaphragm, and a mirror. Therefore, due to manufacturing errors and assembling errors of the optical members, a desired resolution characteristic may not be obtained even if the lens device is manufactured as designed.

Therefore, in Patent Document 1, in the lens optical system, in order to obtain a desired resolution characteristic, the amount of adjustment of the position of the adjusted lens in the plane perpendicular to the optical axis of the lens optical system is machine-learned. It is described that it asks for it. More specifically, in Patent Document 1, the performance value of the lens optical system is obtained in a state where the zoom lens of the lens optical system is moved to the tele end and the wide end, and the performance value is input to the neural network, A method of obtaining a movement adjustment amount of a lens to be adjusted by a neural network is described.

Further, in Patent Document 2 and Patent Document 3, in a module including an image sensor and a lens, a chart is imaged by the image sensor at different positions in the optical axis direction to obtain a resolution evaluation value. It is described that the position adjustment between the image sensor and the lens is performed based on the above.

JP, 2008-170981, A JP, 2010-021985, A WO2015/129120

The method described in Patent Document 1 obtains the performance value of the lens optical system with the focus position of the lens optical system fixed to one, and obtains the adjustment amount of the lens to be adjusted based on this performance value. is there. Therefore, for example, when there are a plurality of adjusted lenses, when it is necessary to adjust the tilt of the adjusted lens, or when it is necessary to adjust the position of the adjusted lens in the optical axis direction, The position cannot be adjusted accurately.

Patent Documents

2 and 3 are techniques for adjusting the positional relationship between the lens and the image sensor, and do not adjust the position of the optical member in the lens device.

The present invention has been made in view of the above circumstances, and an optical member position adjustment support device, an optical member position adjustment support method, and an optical member position that enable highly accurate position adjustment of an optical member in a lens device. It is an object to provide an adjustment support program and a lens device manufacturing method.

An optical member position adjustment support device of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an adjusted optical member and an evaluation position in the optical axis direction of the lens device into a plurality of values. In this state, a measurement evaluation acquisition unit that acquires measurement evaluation data based on the first resolution performance data of the lens device obtained at the evaluation position, the measurement evaluation data, and the same configuration as the lens device. First information indicating the adjustment amount of the position of the adjusted optical member in each of the virtual lens devices, which is necessary for setting the resolution characteristics of each of the plurality of virtual lens devices to a predetermined property, and each of the virtual lenses Design evaluation data of each virtual lens device based on the second resolution performance data of each virtual lens device obtained at the evaluation position while the distance is changed to the plurality of values in the device. Based on the above, and outputs adjustment support information that is information indicating the amount of adjustment of the position of the adjusted optical member in the lens device, which is necessary to make the resolution characteristic of the lens device the predetermined characteristic. And an output unit for

An optical member position adjustment support method of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an optical member to be adjusted and an evaluation position in the optical axis direction of the lens device into a plurality of values. In this state, a step of acquiring actually measured evaluation data based on the first resolution performance data of the lens device obtained at the evaluated position, the actually measured evaluation data, and a plurality of virtual images having the same configuration as the lens device. First information indicating the amount of adjustment of the position of the optical member to be adjusted in each of the virtual lens devices, which is necessary for setting the resolution characteristics of each of the lens devices to a predetermined property, and in each of the virtual lens devices described above, In the state of changing the distance to the plurality of values, based on the design evaluation data of each virtual lens device based on the second resolution performance data of each virtual lens device obtained at the evaluation position, based on An output step of outputting adjustment support information, which is information indicating an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution property of the lens device to the predetermined property. Be prepared.

An optical member position adjustment support program of the present invention changes a distance between an image forming position of a lens device having a plurality of optical members including an adjusted optical member and an evaluation position in the optical axis direction of the lens device into a plurality of values. In this state, a step of acquiring actually measured evaluation data based on the first resolution performance data of the lens device obtained at the evaluated position, the actually measured evaluation data, and a plurality of virtual images having the same configuration as the lens device. First information indicating the amount of adjustment of the position of the optical member to be adjusted in each of the virtual lens devices, which is necessary for setting the resolution characteristics of each of the lens devices to a predetermined property, and in each of the virtual lens devices described above, In the state of changing the distance to the plurality of values, based on the design evaluation data of each virtual lens device based on the second resolution performance data of each virtual lens device obtained at the evaluation position, based on An output step of outputting adjustment support information, which is information indicating an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution property of the lens device to the predetermined property. It is intended to be executed by a computer.

A method for manufacturing a lens device according to the present invention is a method for manufacturing a lens device having a plurality of optical members including an optical member to be adjusted, wherein an image forming position of the lens device and an evaluation position in the optical axis direction of the lens device. In a state in which the distance of is changed to a plurality of values, a first step of generating actually measured evaluation data based on the first resolution performance data of the lens device obtained at the evaluated position, and the actually measured evaluation data, First information on the position of the adjusted optical member in each of the virtual lens devices, which is necessary for setting the resolution characteristics of each of the virtual lens devices of the same configuration as the lens device to a predetermined property, and In the state where the distance is changed to the plurality of values in each virtual lens device, each virtual lens device based on the second resolution performance data of each virtual lens device obtained at the evaluation position Adjustment support, which is information indicating the amount of adjustment of the position of the optical member to be adjusted in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic based on design evaluation data. According to the second step of inputting the actually measured evaluation data to the position adjustment support device for the optical member including the output unit for outputting information, and the adjustment support information output from the position adjustment support device, the adjusted optical member And a third step of adjusting the position.

According to the present invention, an optical member position adjustment support device, an optical member position adjustment support method, an optical member position adjustment support program, and a lens device manufacturing method that enable highly accurate position adjustment of an optical member in a lens device. Can be provided.

It is a schematic diagram which shows an example of the lens apparatus 1 manufactured using the position adjustment support device 100 of the optical member which is one Embodiment of this invention. It is a schematic diagram showing a schematic configuration of a position adjustment support device 100. It is a schematic diagram which shows the measuring system of the 1st resolution performance data required for generation of measurement evaluation data. It is the figure which looked at the resolution chart 2 shown in FIG. 2 from the lens apparatus 1 side in the optical axis direction Z. It is a schematic diagram which shows an example of the 1st resolution performance data corresponding to a low frequency pattern. It is a schematic diagram which shows an example of the 1st resolution performance data corresponding to a high frequency pattern. It is a figure which shows an example of the data registered into the database 103 shown in FIG. 9 is a schematic diagram showing the configuration of a position adjustment support device 100A that is a second modification of the position adjustment support device 100. FIG. 9 is a flowchart for explaining a modified example of the method for manufacturing the lens device 1.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view showing an example of a lens device 1 manufactured by using a position adjustment support device 100 for an optical member, which is an embodiment of the present invention. The lens device 1 is used for an imaging device such as a digital camera or a projection device such as a projector. Below, the lens apparatus 1 is demonstrated as what is utilized for an imaging device.

The lens device 1 includes a plurality of optical members provided in the lens barrel 10 (four optical members including a first lens 11, a second lens 12, a third lens 13, and a fourth lens 14 in the example of FIG. 1). ) Is provided. The first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 are arranged in this order from the subject side along the optical axis K of the lens device 1. The direction in which the optical axis K extends is called the optical axis direction Z.

Of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14, for example, the fourth lens 14 is a focus lens. By moving the fourth lens 14 in the optical axis direction Z, the image forming position of the subject by the lens device 1 can be changed.

The lens device 1 is manufactured, for example, as follows. The first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 are arranged in the lens barrel 10 according to the design values, and the first lens 11 and the fourth lens 14 are arranged in the lens barrel 10. Fixed to. The second lens 12 and the third lens 13 are temporarily fixed to the lens barrel 10 so that they can be moved with respect to the lens barrel 10. The lens device 1 in which the first lens 11 and the fourth lens 14 are fixed to the lens barrel 10 and the second lens 12 and the third lens 13 are temporarily fixed to the lens barrel 10 will be described below. Also referred to as device 1. The positions of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 in the lens device 1 before adjustment are referred to as initial positions.

After that, the second lens is adjusted so that the resolution performance (specifically, the optical transfer function (Modulated Transfer Function: MTF)) of the lens device 1 before the adjustment becomes a predetermined performance (hereinafter, referred to as a desired performance). 12 and the position of each of the third lens 13 in the optical axis direction Z, and the position of each of the second lens 12 and the third lens 13 including the inclination of the optical axis of each of the second lens 12 and the third lens 13. Adjust. After completion of this adjustment, the second lens 12 and the third lens 13 are permanently fixed to the lens barrel 10, and the lens device 1 is completed.

The position adjustment assisting device 100 described below has an initial position of each of the second lens 12 and the third lens 13 in the optical axis direction Z such that the resolution performance of the lens device 1 before the adjustment becomes a desired performance. This position adjustment work is performed by automatically generating the adjustment amount from the position and the adjustment amount of the inclination of the optical axis of each of the second lens 12 and the third lens 13 with respect to the initial position based on huge simulation data. It is to support.

FIG. 2 is a schematic diagram showing a schematic configuration of the position adjustment support device 100. The position adjustment support device 100 includes a measurement evaluation acquisition unit 101, an adjustment support information generation unit 102, and a database (DB) 103. The position adjustment support device 100 includes various processors that execute programs to perform processing, a RAM (Random Access Memory), and a ROM (Read Only Memory). The database 103 is included in the ROM, for example.

As various processors in this specification, a processor whose circuit configuration can be changed after manufacturing such as a CPU (Central Processing Unit) and an FPGA (Field Programmable Gate Array) that are general-purpose processors that execute programs to perform various processes A programmable electric logic device (PLD), which is the above, or a dedicated electric circuit, which is a processor having a circuit configuration specifically designed to execute a specific process such as an ASIC (Application Specific Integrated Circuit), is included. .. More specifically, the structures of these various processors are electric circuits in which circuit elements such as semiconductor elements are combined.

The position adjustment support device 100 may be configured by one of various processors, or may be a combination of two or more processors of the same type or different types (for example, a combination of a plurality of FPGAs or a combination of a CPU and an FPGA). It may be configured.

The processor of the position adjustment support device 100 functions as the actual measurement evaluation acquisition unit 101 and the adjustment support information generation unit 102 by executing the program including the position adjustment support program stored in the ROM.

When the measurement evaluation data indicating the resolution performance of the lens device 1 before adjustment is input, the measurement evaluation acquisition unit 101 acquires the measurement evaluation data and temporarily stores it in the RAM.

The actually measured evaluation data is obtained in a state in which the distance between the image forming position of the lens device 1 before adjustment and the evaluation position in the optical axis direction Z of the lens device 1 before adjustment is changed to a plurality of values. 2 is data based on the first resolution performance data of the lens apparatus 1 in FIG.

FIG. 3 is a schematic diagram showing a measurement system of the first resolution performance data necessary for generating the measurement evaluation data. In the measurement system shown in FIG. 3, a resolution chart 2 in which a predetermined pattern is formed is arranged at a predetermined position on the object side front side of the lens device 1 before adjustment. Further, the image pickup device 3 is arranged at a position opposite to the subject side of the lens device 1 before adjustment so as to be movable in the optical axis direction Z. In the measurement system of FIG. 3, the position of the light receiving surface of the image sensor 3 in the optical axis direction Z is the evaluation position for evaluating the imaging performance of the lens device 1.

FIG. 4 is a view of the resolution chart 2 shown in FIG. 2 viewed from the lens device 1 side in the optical axis direction Z. The resolution chart 2 is a rectangular plane perpendicular to the optical axis direction Z, the direction X coincides with the longitudinal direction of the light receiving surface of the image sensor 3, and the direction Y perpendicular to the direction X indicates the light receiving surface of the image sensor 3. It matches the lateral direction. The direction X and the direction Y are perpendicular to the optical axis direction Z.

In the resolution chart 2, a first pattern 21 is formed in the central portion that intersects the optical axis K of the lens device 1 before adjustment. As shown in an enlarged view in FIG. 4, the first pattern 21 includes a low frequency pattern LP having a low spatial frequency in which lines extending in the direction Y are arranged at a first interval in the direction X and a low frequency pattern LP in the direction Y. The extending line includes a high frequency pattern HP having a high spatial frequency and arranged in the direction X at a second interval narrower than the first interval.

Further, in the resolution chart 2, the second pattern 22 is formed at a predetermined position on the circumference of a circle 24 centered on a point intersecting the optical axis K of the lens device 1 before adjustment. Further, the third pattern 23 is formed on the circumference of the circle 24 at a position different from the position where the second pattern 22 is formed. Similarly to the first pattern 21, the second pattern 22 and the third pattern 23 are each composed of a pair of a low frequency pattern LP and a high frequency pattern HP.

Each of the first pattern 21, the second pattern 22, and the third pattern 23 is a pattern in which straight lines extending in the direction Y are arranged in the direction X, but straight lines extending in the direction X are in the direction Y. It may be an arrayed pattern or may include both patterns. Further, the number of patterns included in the resolution chart 2 is not limited to three, that is, the first pattern 21, the second pattern 22, and the third pattern 23, and may be four or more.

In the present specification, in a captured image obtained by capturing the resolution chart 2 by the image sensor 3, the center position intersecting the optical axis K is set as a reference image height, and the center of the center position is on the circumference of a circle. The position is defined as the image height whose value depends on the radius of this circle.

Therefore, it can be said that the second pattern 22 and the third pattern 23 on the circumference of the circle 24 in the captured image of the resolution chart 2 shown in FIG. 4 have the same image height. Further, the first pattern 21, the second pattern 22 and the third pattern 23 can be said to have different image heights. The image height of the first pattern 21 constitutes the first image height, the image height of the second pattern 22 constitutes the second image height, and the image height of the third pattern 23 is the third image height. Make up.

In the measurement system shown in FIG. 3, the position of the fourth lens 14 of the lens device 1 before adjustment is further fixed to a predetermined position. As described above, in the measurement system of FIG. 3, the position of the fourth lens 14 of the lens device 1 before adjustment (in other words, the focus position) is fixed, and the position of the resolution chart 2 is also fixed. Therefore, the image formation position of the resolution chart 2 by the lens device 1 before adjustment is fixed.

In the measurement system shown in FIG. 3, the resolution chart 2 is imaged by the image sensor 3 at each moving position while moving the image sensor 3 in the optical axis direction Z within a predetermined range. As a result, the distance (in other words, defocus amount) between the image formation position of the resolution chart 2 imaged by the lens device 1 before adjustment and the light receiving surface (evaluation position) of the image sensor 3 is changed to a plurality of values. In this state, a plurality of captured images of the resolution chart 2 are obtained.

In each of the plurality of captured images having different defocus amounts obtained in this way, the image of the low frequency pattern LP of the first pattern 21, the image of the low frequency pattern LP of the second pattern 22, and the third image Obtained from each of the image of the low frequency pattern LP of the pattern 23, the image of the high frequency pattern HP of the first pattern 21, the image of the high frequency pattern HP of the second pattern 22, and the image of the high frequency pattern HP of the third pattern 23. 5 and 6 show an example of the result of obtaining the MTF value indicating the resolution performance of each pattern to be obtained. 5 and 6, the horizontal axis represents the position of the light receiving surface of the image sensor 3 in the optical axis direction Z in the measurement system of FIG. 3, and the vertical axis represents the MTF value.

FIG. 5 shows the resolution performance data 21L, the resolution performance data 22L, and the resolution performance data 23L. The resolution performance data 21L is data indicating the MTF value of the low frequency pattern LP of the first pattern 21 in each of the plurality of captured images described above. The resolution performance data 22L is data indicating the MTF value of the low-frequency pattern LP of the second pattern 22 in each of the plurality of captured images described above. The resolution performance data 23L is data indicating the MTF value of the low-frequency pattern LP of the third pattern 23 in each of the plurality of captured images described above.

FIG. 6 shows resolution performance data 21H, resolution performance data 22H, and resolution performance data 23H. The resolution performance data 21H is data indicating the MTF value of the high frequency pattern HP of the first pattern 21 in each of the plurality of captured images described above. The resolution performance data 22H is data indicating the MTF value of the high frequency pattern HP of the second pattern 22 in each of the plurality of captured images described above. The resolution performance data 23H is data indicating the measurement result of the MTF value of the high frequency pattern HP of the third pattern 23 in each of the plurality of captured images described above. The resolution performance data 21L, the resolution performance data 22L, the resolution performance data 23L, the resolution performance data 21H, the resolution performance data 22H, and the resolution performance data 23H respectively form first resolution performance data. ..

The peak value of the MTF value in the resolution performance data 21L shown in FIG. 5 is generated as the measurement evaluation data 21Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measurement evaluation data 21La. It

The peak value of the MTF value in the resolution performance data 22L shown in FIG. 5 is generated as the measured evaluation data 22Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 22La. It

The peak value of the MTF value in the resolution performance data 23L shown in FIG. 5 is generated as the measured evaluation data 23Lb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 23La. It

The peak value of the MTF value in the resolution performance data 21H shown in FIG. 6 is generated as the measurement evaluation data 21Hb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measurement evaluation data 21Ha. It

The peak value of the MTF value in the resolution performance data 22H shown in FIG. 6 is generated as the measured evaluation data 22Hb, and the information on the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 22Ha. It

The peak value of the MTF value in the resolution performance data 23H shown in FIG. 6 is generated as the measured evaluation data 23Hb, and the information of the position of the image sensor 3 when the peak value is obtained is generated as the measured evaluation data 23Ha. It

The actual measurement evaluation data 21La, the actual measurement evaluation data 22La, the actual measurement evaluation data 23La, the actual measurement evaluation data 21Ha, the actual measurement evaluation data 22Ha, and the actual measurement evaluation data 23Ha are the results of the lens apparatus 1 when the peak value of the MTF value is obtained. The information corresponds to the distance between the image position and the light receiving surface (evaluation position) of the image sensor 3.

Generation of each of these actually measured evaluation data is performed by automatically controlling the measurement system shown in FIG. 3 by, for example, a computer.

Although the measurement system shown in FIG. 3 moves the image pickup device 3, the present invention is not limited to this. For example, in the measurement system shown in FIG. 3, the position of the image sensor 3 is fixed and the resolution chart 2 is moved in the optical axis direction Z, so that the image formation position of the resolution chart 2 by the lens device 1 and the light reception of the image sensor 3 are received. The distance to the surface may be changed. In this case, as information corresponding to the above distance (defocus amount) when the peak value in the actually measured evaluation data is obtained, instead of the information on the position of the image sensor 3, the optical axis direction Z of the resolution chart 2 is obtained. The information of the position of is used.

Further, in the measurement system shown in FIG. 3, the position of the image sensor 3 is fixed, and the fourth lens 14, which is a focus lens, is moved in the optical axis direction Z, so that the image forming position of the resolution chart 2 by the lens device 1 is changed. The distance from the light receiving surface of the image sensor 3 may be changed. In this case, the information corresponding to the above distance (defocus amount) when the peak value in the actually measured evaluation data is obtained is replaced with the information on the position of the image pickup element 3 in the optical axis direction of the fourth lens 14. Information on the position of Z is used.

The resolution performance data can also be acquired by projecting the resolution chart 2 on the screen via the lens device 1 and capturing the projected image. In this case, in FIG. 3, the resolution chart 2 is displayed as a display image on a display unit such as a liquid crystal display panel, and this display image is projected on the screen by the lens device 1. Further, instead of the image pickup device 3, an image pickup device for picking up a projected image of the resolution chart 2 projected on this screen is provided. Then, for example, with the position of the screen fixed and the focus position of the lens device 1 fixed, a projection image is taken by the imaging device while moving the display unit in the optical axis direction, and the first resolution performance data is generated. Good. In this configuration, the position of the imaging device becomes the evaluation position, and the distance between the image formation position of the resolution chart 2 by the lens device 1 and the evaluation position changes due to the movement of the display unit.

The adjustment support information generation unit 102 shown in FIG. 2 is based on each actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101 and the design evaluation data and the first information registered in the database 103, before adjustment. The adjustment support information, which is the information indicating the adjustment amount of the positions of the second lens 12 and the third lens 13 in the lens device 1 necessary for setting the resolution property of the lens device 1 to a desired property, is output. The adjustment support information generation unit 102 also functions as an “output unit” that outputs the adjustment support information.

FIG. 7 is a diagram showing an example of data registered in the database 103 shown in FIG. The database 103 stores design data with errors of n (n is a natural number of 2 or more) virtual lens devices A1, A2, A3, A4, A5,..., An having the same configuration as the lens device 1 of FIG. It is registered.

The design data with error includes the design values (shape, refractive index, etc.) of each of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14 of the lens device 1, the first lens 11, the It is data in which a random error is added to a design value (arrangement interval or the like in the optical axis direction Z) regarding the arrangement of the second lens 12, the third lens 13, and the fourth lens 14.

The error given to each of the virtual lens devices A1 to An is the assembly error of the first lens 11, the second lens 12, the third lens 13, and the fourth lens 14, the first lens 11, the second lens 12, the An error in the range of several times of various errors such as a manufacturing error of each of the third lens 13 and the fourth lens 14 is randomly given by, for example, Monte Carlo simulation.

In the database 103, the first design evaluation data, the second design evaluation data, and the first information are registered in association with each of the n design data with error. The first design evaluation data and the second design evaluation data are collectively referred to as design evaluation data.

The first design evaluation data is based on the design data with error of the corresponding virtual lens device Ak (k is 1 to n), and the virtual lens device of this design data with error is measured by the measurement system of FIG. 5 and FIG. 6 obtained when applied to the simulation is simulated, and the actual measurement evaluation data 21La and the actual measurement evaluation data 21Lb obtained based on the simulation result are simulated. , Simulation values of the measurement evaluation data 22La, the measurement evaluation data 22Lb, the measurement evaluation data 23La, and the measurement evaluation data 23Lb.

The second design evaluation data is based on the design data with error of the corresponding virtual lens device Ak (k is 1 to n), and the virtual lens device of this design data with error is measured by the measurement system of FIG. 5 and FIG. 6 obtained when applied to FIG. 6 is simulated, and the actual measurement evaluation data 21Ha and the actual measurement evaluation data 21Hb obtained based on the simulation result are simulated. , Simulation values of the measurement evaluation data 22Ha, the measurement evaluation data 22Hb, the measurement evaluation data 23Ha, and the measurement evaluation data 23Hb.

The first information sets the resolution performance of the virtual lens device Ak (k is any of 1 to n) corresponding to this, which is determined based on the design data with error, to the above-mentioned desired performance. This is information on the adjustment amount (position adjustment amount in the optical axis direction Z, inclination adjustment amount of the optical axis) of the second lens 12 and the third lens 13 necessary for this. The first information is also obtained by simulation.

The adjustment support information generation unit 102 extracts from the database 103 the design evaluation data that is most similar to the combination of the twelve actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101. There are various extraction methods. For example, a first graph is generated from twelve actual measurement evaluation data, n second graphs are generated from each design evaluation data, and the shapes of the n second graphs and the shape of the first graph are compared. , The design evaluation data that is the origin of the second graph closest to the shape of the first graph is taken as the extraction result.

The adjustment support information generation unit 102 extracts the design evaluation data that is most similar to the combination of the twelve pieces of actual measurement evaluation data, and outputs the first information corresponding to the extracted design evaluation data as the adjustment support information. This adjustment support information is notified to the manufacturer of the lens device 1 by being displayed on a display unit (not shown), for example. The manufacturer adjusts the positions of the second lens 12 and the third lens 13 in the optical axis direction Z and the inclination of the optical axis according to the adjustment support information.

When the positions of the second lens 12 and the third lens 13 in the optical axis direction Z and the inclinations of the optical axes are adjusted by a manufacturing apparatus rather than by a human hand, the above adjustment support information is output to this manufacturing apparatus. The manufacturing apparatus adjusts the position of the second lens 12 and the third lens 13 in the optical axis direction Z and the inclination of the optical axis according to the adjustment support information.

As described above, the position adjustment assisting device 100 performs the actual measurement generated based on the first resolution performance data obtained by changing the distance between the image forming position of the lens device 1 and the position of the light receiving surface of the image sensor 3. The adjustment support information is output using the evaluation data as an input. Therefore, the adjustment support information can include information on the inclinations of the optical axes of the second lens 12 and the third lens 13 and the positions in the optical axis direction Z. Therefore, even with a lens device having many optical members, it is possible to accurately adjust the optical member to be adjusted.

Further, according to the position adjustment support device 100, the optimum evaluation is performed by the simple process of extracting the design evaluation data most similar to the combination of the twelve actually measured evaluation data from the design evaluation data registered in the database 103. Adjustment support information can be output. Therefore, it is possible to shorten the time until the output of the adjustment support information and reduce the manufacturing cost of the position adjustment support device 100.

Further, the position adjustment assisting apparatus 100 acquires the peak value of the MTF value and the position of the image sensor 3 when the peak value is obtained as the measurement evaluation data. Therefore, when there are a plurality of adjusted optical members, it is possible to generate adjustment support information capable of obtaining high resolution characteristics even when adjusting the tilt or the position of the optical member in the optical axis direction.

Further, the actual measurement evaluation data and the design evaluation data are data showing the resolution performance for the first pattern 21 near the optical axis K, and the second pattern 22 and the second pattern 22 having an image height larger than that of the first pattern 21, respectively. Data showing the resolution performance for the third pattern 23. Therefore, it is possible to generate the adjustment support information having desired characteristics including not only the periphery of the optical axis K of the lens apparatus 1 but also the resolution characteristics at positions apart from the optical axis K.

The actual measurement evaluation data and the design evaluation data each include data indicating the resolution performance with respect to the second pattern 22 and the third pattern 23 located at different positions with the same image height. Therefore, it is possible to accurately generate the adjustment support information including the inclinations of the second lens 12 and the third lens 13, the distance between the second lens 12 and the adjacent optical member, and the distance between the third lens 13 and the adjacent optical member. You can

The actual measurement evaluation data and the design evaluation data each include data indicating the resolution performance for the low frequency pattern LP having a low spatial frequency and data indicating the resolution performance for the high frequency pattern HP having a high spatial frequency. Therefore, the accuracy of the adjustment support information can be improved.

Hereinafter, modified examples of the position adjustment support device 100 will be described.

(First modification)

The adjustment support information generation unit 102 extracts, from the database 103, a plurality of design evaluation data similar to the combination of the twelve actual measurement evaluation data acquired by the actual measurement evaluation acquisition unit 101, and corresponds to the plurality of design evaluation data. The adjustment support information may be generated and output using one piece of information.

The adjustment support information generation unit 102 generates, for example, a first graph from twelve actual measurement evaluation data, generates n second graphs from each design evaluation data, and calculates the shape of the n second graphs and the first graph. The shape of the graph is compared with the design evaluation data (the first design evaluation data) that is the origin of the second graph closest to the shape of the first graph, and the second closest to the shape of the first graph. The design evaluation data (referred to as the second design evaluation data) from which the two graphs are generated is taken as the extraction result.

Then, the adjustment support information generation unit 102 outputs the average value of the first information corresponding to each of the first design evaluation data and the second design evaluation data as the adjustment support information. For example, the adjustment support information generation unit 102 simply averages the tilt adjustment amount that is the first information corresponding to the first design evaluation data and the tilt adjustment amount that is the first information corresponding to the second design evaluation data. And outputs it as the adjustment support information of the inclination of the optical axis, and outputs the position adjustment amount which is the first information corresponding to the first design evaluation data and the position adjustment amount which is the first information corresponding to the second design evaluation data. Simply average and output as adjustment support information for the position in the optical axis direction.

Alternatively, the adjustment support information generation unit 102 sets the tilt adjustment amount, which is the first information corresponding to the first design evaluation data, and the tilt adjustment amount, which is the first information corresponding to the second design evaluation data, to the first design. The weight corresponding to the evaluation data is increased and the weighted average is output, and output as inclination adjustment support information. Further, the adjustment support information generation unit 102 sets the position adjustment amount, which is the first information corresponding to the first design evaluation data, and the position adjustment amount, which is the first information corresponding to the second design evaluation data, to the first design. The weight corresponding to the evaluation data is increased and the weighted average is output, which is output as the adjustment support information of the position in the optical axis direction.

According to the first modified example, the adjustment support information is generated by the plurality of first information corresponding to the plurality of design evaluation data, so that the accuracy of the adjustment support information can be improved.

(Second modified example)

FIG. 8 is a schematic diagram showing a configuration of a position adjustment support device 100A which is a second modification of the position adjustment support device 100. The position adjustment support device 100A is different from the position adjustment support device 100 in that the adjustment support information generation unit 102 generates the adjustment support information by the information generation model 102a.

The information generation model 102a is a model generated by machine learning in which n pieces of design evaluation data registered in the database 103 and the first information corresponding to each design evaluation data are used as teacher data. Is input to generate and output adjustment support information suitable for the measured evaluation data. As machine learning for generating the information generation model 102a, an arbitrary algorithm such as deep learning, a partial least squares method, a support vector regression method, a random forest method, or a decision tree method can be used.

According to the second modified example, the adjustment support information is generated by the information generation model 102a generated by machine learning, so that the accuracy of the adjustment support information can be increased. Here, the information generation model 102a also functions as an "output unit" that outputs the adjustment support information.

(Third modification)

In the above description, 12 pieces of actually measured evaluation data are input to the position adjustment support device 100 to obtain the final adjustment support information, and the second lens 12 and the third lens 13 are set once according to the adjustment support information. Only the adjustment was made to complete the lens device 1. However, depending on the resolution performance of the lens device 1 before adjustment, the reliability of the measured evaluation data for the high frequency pattern HP may be low.

Therefore, first, six pieces of actually measured evaluation data for the low-frequency pattern LP are input to the position adjustment support device 100 to obtain adjustment support information for the primary adjustment, and the second lens 12 and the third lens 12 according to the adjustment support information. The coarse adjustment of the lens 13 is performed. Next, six pieces of actually measured evaluation data for the high frequency pattern HP obtained by the lens device 1 after the coarse adjustment are input to the position adjustment support device 100 to obtain the adjustment support information for the final adjustment, and to obtain this adjustment support information. Therefore, it is preferable to perform the final adjustment (secondary adjustment) of the second lens 12 and the third lens 13. Hereinafter, the operation in this case will be described in detail.

FIG. 9 is a flowchart for explaining a modified example of the method for manufacturing the lens device 1. First, for the lens device 1 before adjustment, using the measurement system shown in FIG. 3, the measurement evaluation data 21La, the measurement evaluation data 21Lb, the measurement evaluation data 22La, the measurement evaluation data 22Lb, the measurement evaluation data 23La, and the measurement evaluation. The actually measured evaluation data group ML including the data 23Lb is generated (step S1), and the actually measured evaluation data group ML is input to the position adjustment support device 100 (step S2).

In the position adjustment support device 100, when the actual measurement evaluation acquisition unit 101 acquires the actual measurement evaluation data group ML, the adjustment support information generation unit 102 causes the adjustment support information generation unit 102 to be the first design evaluation most similar to the actual measurement evaluation data group ML from the database 103. The data is extracted, and the first information corresponding to the extracted first design evaluation data is output as the adjustment support information IL (step S3).

Next, according to this adjustment support information IL, position adjustment work (primary adjustment) of the second lens 12 and the third lens 13 is performed (step S4). Then, for the lens device 1 after this position adjustment work, using the measurement system shown in FIG. 3, the actual measurement evaluation data 21Ha, the actual measurement evaluation data 21Hb, the actual measurement evaluation data 22Ha, the actual measurement evaluation data 22Hb, the actual measurement evaluation data 23Ha, A measurement evaluation data group MH including the measurement evaluation data 23Hb is generated (step S5), and the measurement evaluation data group MH is input to the position adjustment support device 100 (step S6).

In the position adjustment support device 100, when the actual measurement evaluation acquisition unit 101 acquires the actual measurement evaluation data group MH, the adjustment support information generation unit 102 causes the adjustment support information generation unit 102 to select the second design evaluation most similar to the actual measurement evaluation data group MH from the database 103. The data is extracted, and the first information corresponding to the extracted second design evaluation data is output as the adjustment support information IH (step S7).

Next, according to the adjustment support information IH, position adjustment work (secondary adjustment) of the second lens 12 and the third lens 13 is performed (step S8), and in that state, the second lens 12 and the third lens 13 are performed. Is fixed to the lens barrel 10 to complete the lens device 1.

As described above, the process of generating the adjustment support information IL from the measured evaluation data group ML corresponding to the low frequency pattern LP, the process of generating the adjustment support information IH from the measured evaluation data group MH corresponding to the high frequency pattern HP, By separately performing the above, the positions of the second lens 12 and the third lens 13 are adjusted with high accuracy and the resolution characteristics of the lens device 1 are desired, regardless of the resolution performance of the lens device 1 before adjustment. Can be a property of

When the adjustment support information generation unit 102 generates the adjustment support information by the information generation model 102a, the first design evaluation data and the corresponding first information are used as the teacher data as the information generation model 102a. A low-frequency model generated by machine learning and a high-frequency model generated by machine learning using second design evaluation data and corresponding first information as teacher data may be prepared. ..

Then, when the measured evaluation data group ML is input, the adjustment support information generation unit 102 applies this to the low frequency model to generate the adjustment support information IL for primary adjustment by the low frequency model. When the actually measured evaluation data group MH is input, this may be applied to the high frequency model to generate the adjustment support information IH for secondary adjustment by the high frequency model.

Further, although the lens device 1 is configured to include only lenses as optical members, the optical members included in the lens device 1 may include components other than lenses such as a diaphragm, a prism, and a mirror. Further, the number of optical members to be adjusted in the lens device 1 may not be plural, but may be only one.

As described above, the following items are disclosed in this specification.

(1)

A plurality of optical members (for example, the first lens 11, the second lens 12, the third lens 13, and the third lens 13 of the above-described embodiment) including the adjusted optical member (for example, the second lens 12 and the third lens 13 of the above-described embodiment). The first position of the lens device obtained at the evaluation position in a state in which the distance between the imaging position of the lens device having the four lenses 14) and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. Of the resolution performance data (for example, the resolution performance data 21L, the resolution performance data 22L, the resolution performance data 23L, the resolution performance data 21H, the resolution performance data 22H, and the resolution performance data 23H of the above-described embodiment). A measurement evaluation acquisition unit that acquires measurement evaluation data based on

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic First information indicating the adjustment amount, and in the state in which the distance in each of the virtual lens devices is changed to the plurality of values, in the second resolution performance data of each of the virtual lens devices obtained at the evaluation position. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics. A position adjustment support device for an optical member, which includes an output unit (for example, the adjustment support information generation unit 102 of the above-described embodiment) that outputs adjustment support information that is information indicating

(2)

(1) The position adjustment support device for an optical member as described above,

The output unit extracts one of the design evaluation data similar to the measured evaluation data from the design evaluation data of each virtual lens device, and obtains the extracted design evaluation data of the virtual lens device. A position adjustment support device for an optical member, which outputs, as the adjustment support information, the first information necessary for setting a resolution property to the predetermined property.

(3)

(1) The position adjustment support device for an optical member as described above,

The output unit extracts a plurality of the design evaluation data similar to the actual measurement evaluation data from the design evaluation data of each virtual lens device, and obtains each of the plurality of the design evaluation data. A position adjustment assisting device for an optical member, which generates the adjustment assisting information by using the first information necessary for setting the resolution characteristic of the device to the predetermined characteristic.

(4)

(1) The position adjustment support device for an optical member as described above,

The output unit outputs the adjustment support information from the measured evaluation data by a model (for example, the information generation model 102a of the above-described embodiment) generated by machine learning using the design evaluation data and the first information as teacher data. Position adjustment support device for optical member to be generated.

(5)

The position adjustment support device for an optical member according to any one of (1) to (4),

The first resolution performance data is data indicating the resolution performance of the lens device in the state where the distance is each of the plurality of values,

The actual measurement evaluation data includes information corresponding to the peak value of the resolution performance in the first resolution performance data and the distance in the state where the peak value is obtained (for example, the image sensor 3 of the embodiment described above). Position) and a position adjustment support device for an optical member.

(6)

The position adjustment support device for an optical member according to any one of (1) to (5),

The actual measurement evaluation data is first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position (for example, actual measurement evaluation data 21La, 21Lb, 21Ha, 21Hb in the above-described embodiment), Second actual measurement evaluation data based on the first resolution performance data at the second image height different from the first image height at the evaluation position (for example, actual measurement evaluation data 22La, 22Lb, 22Ha, 22Hb in the above-described embodiment). And a position adjustment support device for an optical member including.

(7)

(6) The position adjustment support device for an optical member as described above,

The second actual measurement evaluation data is first sub actual measurement evaluation data based on the first resolution performance data at the first position of the second image height at the evaluation position (for example, the actual measurement evaluation data 22La of the above-described embodiment, 22Lb, 22Ha, 22Hb) and second sub-measurement evaluation data based on the first resolution performance data at a second position different from the first position of the second image height at the evaluation position (for example, the above-described implementation. Position evaluation support device for an optical member, including the actual measurement evaluation data 23La, 23Lb, 23Ha, 23Hb).

(8)

The position adjustment support device for an optical member according to any one of (1) to (7),

The first resolution performance data is the first sub-resolution performance data (for example, the resolution performance data 21L of the above-described embodiment) for the evaluation object of the first spatial frequency (for example, the low frequency pattern LP of the above-described embodiment). , 22L, 23L) and a second spatial frequency different from the first spatial frequency (for example, the high-frequency pattern HP of the above-described embodiment), the second sub-resolution performance data (for example, the resolution of the above-described embodiment).

Performance data

21H, 22H, 23H),

The actual measurement evaluation data is based on the first sub-resolution performance data (for example, the actual measurement evaluation data 21La, 21Lb, 22La, 21Lb, 23La, 23Lb of the embodiment described above) and the second sub-resolution performance data. A position adjustment support device for an optical member, which includes a base (for example, actual measurement evaluation data 21Ha, 21Hb, 22Ha, 22Hb, 23Ha, 23Hb of the above-described embodiment).

(9)

The position adjustment support device for an optical member according to any one of (1) to (8),

The adjustment support information includes an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device, and an adjustment amount of the inclination of the optical axis of the adjusted optical member. ..

(10)

The position adjustment support device for an optical member according to any one of (1) to (9),

The above-mentioned lens device is a position of an optical member including a plurality of above-mentioned adjusted optical members, and at least one fixed optical member (for example, the 1st lens 11 and the 4th lens 14 of the above-mentioned embodiment) which does not require position adjustment. Adjustment support device.

(11)

Obtained at the evaluation position in a state in which the distance between the imaging position of the lens device having a plurality of optical members including the adjusted optical member and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. Acquiring actual measurement evaluation data based on the first resolution performance data of the lens device,

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic First information indicating the adjustment amount, and in the state in which the distance in each of the virtual lens devices is changed to the plurality of values, in the second resolution performance data of each of the virtual lens devices obtained at the evaluation position. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics. An output step of outputting adjustment support information which is information indicating the position adjustment support method of the optical member.

(12)

(11) A method for supporting position adjustment of an optical member as described above,

In the output step, one design evaluation data similar to the actual measurement evaluation data is extracted from the design evaluation data of each virtual lens device, and the extracted design evaluation data of the virtual lens device is obtained. A method for assisting position adjustment of an optical member, which outputs the first information necessary for setting a resolution characteristic to the predetermined characteristic as the adjustment assistance information.

(13)

(11) A method for supporting position adjustment of an optical member as described above,

In the output step, a plurality of the design evaluation data similar to the measured evaluation data is extracted from the design evaluation data of each virtual lens device, and each of the plurality of the design evaluation data is obtained the virtual lens. A position adjustment support method for an optical member, which generates the adjustment support information by using the first information necessary for setting the resolution characteristic of the device to the predetermined characteristic.

(14)

(11) A method for supporting position adjustment of an optical member as described above,

In the output step, an optical member position adjustment support method for generating the adjustment support information from the actual measurement evaluation data by a model generated by machine learning using the design evaluation data and the first information as teacher data.

(15)

The method for assisting position adjustment of an optical member according to any one of (11) to (14),

The first resolution performance data is data indicating the resolution performance of the lens device in the state where the distance is each of the plurality of values,

The actual measurement evaluation data is a position adjustment support method for an optical member including a peak value of the resolution performance in the first resolution performance data and information corresponding to the distance in a state where the peak value is obtained. ..

(16)

A method for assisting position adjustment of an optical member according to any one of (11) to (15),

The actual measurement evaluation data is the first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position, and the second image height different from the first image height at the evaluation position. A position adjustment support method for an optical member, comprising: second measurement evaluation data based on first resolution performance data.

(17)

(16) The position adjustment support method for an optical member as described above,

The second actual measurement evaluation data, the first sub-measurement evaluation data based on the first resolution performance data at the first position of the second image height of the evaluation position, and the second image height of the evaluation position A position adjustment support method for an optical member, comprising: a second sub actually measured evaluation data based on the first resolution performance data at a second position different from the first position.

(18)

A method for assisting position adjustment of an optical member according to any one of (11) to (17),

The first resolution performance data, the first sub-resolution performance data for the evaluation object of the first spatial frequency, and the second sub-resolution performance for the evaluation object of the second spatial frequency different from the first spatial frequency. Including data and

A method for assisting position adjustment of an optical member, wherein the actual measurement evaluation data includes one based on the first sub-resolution performance data and one based on the second sub-resolution performance data.

(19)

The method for assisting position adjustment of an optical member according to any one of (11) to (18),

The adjustment support information includes an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device and an adjustment amount of the tilt of the optical axis of the adjusted optical member. ..

(20)

A method for assisting position adjustment of an optical member according to any one of (11) to (19),

The lens apparatus is a method of assisting position adjustment of an optical member, which includes a plurality of the optical members to be adjusted and at least one fixed optical member that does not require position adjustment.

(21)

Obtained at the evaluation position in a state in which the distance between the imaging position of the lens device having a plurality of optical members including the adjusted optical member and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. Acquiring actual measurement evaluation data based on the first resolution performance data of the lens device,

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic First information indicating the adjustment amount, and in the state in which the distance in each of the virtual lens devices is changed to the plurality of values, in the second resolution performance data of each of the virtual lens devices obtained at the evaluation position. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution characteristics of the lens device to the predetermined characteristics. And an output step of outputting adjustment support information that is information indicating the position of the optical member position adjustment support program.

(22)

A method for manufacturing a lens device having a plurality of optical members including an optical member to be adjusted,

First resolution performance data of the lens device obtained at the evaluation position in a state in which the distance between the imaging position of the lens device and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. A first step of generating measured evaluation data based on (for example, step S1 and step S5 of the above-described embodiment),

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device, which is necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic In the state where the distance is changed to the plurality of values in the first information and the virtual lens devices, the virtual images based on the second resolution performance data of the virtual lens devices obtained at the evaluation position. Based on the design evaluation data of the lens device, information indicating the amount of adjustment of the position of the optical member to be adjusted in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic. A second step (for example, step S2 or step S6 of the above-described embodiment) of inputting the actual measurement evaluation data to a position adjustment support device for an optical member that includes an output unit that outputs certain adjustment support information,

Manufacturing a lens device including a third step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support apparatus (for example, step S4 or step S8 of the above-described embodiment). Method.

(23)

A method of manufacturing a lens device according to (22), comprising:

The first step includes a first sub-step (for example, step S1 of the above-described embodiment) that generates the actual measurement evaluation data based on the first resolution performance data for the evaluation object having the first spatial frequency, and the first sub-step. A second sub-process (for example, step S5 of the above-described embodiment) that generates the actual measurement evaluation data based on the first resolution performance data for the evaluation object having the second spatial frequency higher than the one spatial frequency. ,

The second step is divided into a third sub step (for example, step S2 of the above-described embodiment) of inputting the actually measured evaluation data generated in the first sub step to the position adjustment support device, and the second sub step. And a fourth sub-step (for example, step S6 of the above-described embodiment) of inputting the actually-measured evaluation data generated as described above into the position adjustment support device,

The third step is a fifth sub step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support device in the third sub step (for example, step S4 in the above-described embodiment). ), and a sixth sub-step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support device by the fourth sub-step (for example, step S8 of the above-described embodiment), Including

After performing the primary adjustment of the position of the optical member to be adjusted by performing the first sub-step, the third sub-step, and the fifth sub-step, the second sub-step, the fourth sub-step, the sixth A method of manufacturing a lens device, wherein a sub-process is performed to perform a secondary adjustment of the position of the optical member to be adjusted.

According to the present invention, it is possible to adjust the position of the optical member easily and with high accuracy, and to set the resolution characteristic of the lens device to a desired characteristic.

1 lens device

10 lens barrel

11 First lens

12 Second lens

13 Third lens

14 Fourth lens

K optical axis

Z optical axis direction

100, 100A position adjustment support device

101 Actual measurement evaluation acquisition unit

102 Adjustment support information generation unit

102a information generation model

103 database

2 resolution chart

21 First pattern

22 second pattern

23 Third pattern

24 yen

LP low frequency pattern

HP high frequency pattern

21L, 22L, 23L, 21H, 22H, 23H Resolution performance data

21La, 21Lb, 21Ha, 21Hb Actual evaluation data

22La, 22Lb, 22Ha, 22Hb Actual evaluation data

23La, 23Lb, 23Ha, 23Hb Actual evaluation data

Claims

Obtained at the evaluation position in a state in which the distance between the image forming position of the lens device having a plurality of optical members including the adjusted optical member and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. An actual measurement evaluation acquisition unit that acquires actual measurement evaluation data based on the first resolution performance data of the lens device,

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic. In the state where the distance is changed to the plurality of values in each virtual lens device and the first information indicating the adjustment amount, the second resolution performance data of each virtual lens device obtained at the evaluation position is obtained. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution property of the lens device to the predetermined property. An output unit that outputs adjustment support information that is information indicating the position adjustment support device for an optical member.
The position adjustment support device for an optical member according to claim 1,

The output unit extracts one of the design evaluation data similar to the actual measurement evaluation data from the design evaluation data of each virtual lens device, and the virtual design of the virtual lens device is such that the extracted design evaluation data is obtained. A position adjustment support device for an optical member, which outputs, as the adjustment support information, the first information necessary for setting a resolution characteristic to the predetermined characteristic.
The position adjustment support device for an optical member according to claim 1,

The output unit extracts a plurality of the design evaluation data similar to the actual measurement evaluation data from the design evaluation data of each of the virtual lens devices, and obtains each of the plurality of the design evaluation data. A position adjustment assisting device for an optical member, which generates the adjustment assisting information by using the first information necessary for setting a resolution characteristic of the device to the predetermined characteristic.
The position adjustment support device for an optical member according to claim 1,

The position adjustment support device for an optical member, wherein the output unit generates the adjustment support information from the actual evaluation data by a model generated by machine learning using the design evaluation data and the first information as teacher data.
The position adjustment support device for an optical member according to any one of claims 1 to 4,

The first resolution performance data is data indicating the resolution performance of the lens device in a state where the distance is each of the plurality of values,

The actual measurement evaluation data includes an optical member position adjustment support device including a peak value of the resolution performance in the first resolution performance data and information corresponding to the distance in a state where the peak value is obtained. ..
The position adjustment support device for an optical member according to any one of claims 1 to 5,

The actual measurement evaluation data is the first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position, and the second image height different from the first image height at the evaluation position. A position adjustment support device for an optical member, comprising: second measurement evaluation data based on first resolution performance data.
The position adjustment support device for an optical member according to claim 6,

The second actual measurement evaluation data, the first sub-measurement evaluation data based on the first resolution performance data at the first position of the second image height of the evaluation position, and the second image height of the evaluation position. A position adjustment support device for an optical member, comprising: a second sub actually measured evaluation data based on the first resolution performance data at a second position different from the first position.
The position adjustment support device for an optical member according to any one of claims 1 to 7,

The first resolution performance data is a first sub-resolution performance data for an evaluation object of a first spatial frequency, and a second sub-resolution performance for an evaluation object of a second spatial frequency different from the first spatial frequency. Including data and

The position adjustment support device for an optical member, wherein the actual measurement evaluation data includes one based on the first sub-resolution performance data and one based on the second sub-resolution performance data.
The position adjustment support device for an optical member according to any one of claims 1 to 8,

The adjustment support information includes an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device and an adjustment amount of the tilt of the optical axis of the adjusted optical member. ..
The position adjustment support device for an optical member according to any one of claims 1 to 9,

The lens device is an optical member position adjustment support device including a plurality of the adjusted optical members and at least one fixed optical member that does not require position adjustment.
The evaluation is data obtained by changing the distance between the imaging position of the lens device having a plurality of optical members including the optical member to be adjusted and the evaluation position in the optical axis direction of the lens device to a plurality of values. A step of acquiring actual measurement evaluation data based on the first resolution performance data of the lens device at a position;

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic. The second information performance of each virtual lens device at the evaluation position, which is data obtained in a state where the distance is changed to the plurality of values in each virtual lens device and the first information indicating the adjustment amount. Position of the optical member to be adjusted in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic based on the design evaluation data of each virtual lens device based on the data. And a step of outputting adjustment support information that is information indicating the adjustment amount of the optical member position adjustment support method.
The optical member position adjustment support method according to claim 11,

In the output step, one of the design evaluation data similar to the measured evaluation data is extracted from the design evaluation data of each virtual lens device, and the extracted design evaluation data of the virtual lens device is obtained. A method for assisting position adjustment of an optical member, which outputs the first information necessary for setting a resolution characteristic to the predetermined characteristic as the adjustment assistance information.
The optical member position adjustment support method according to claim 11,

In the output step, a plurality of the design evaluation data similar to the actual measurement evaluation data is extracted from the design evaluation data of each virtual lens device, and each of the plurality of the design evaluation data is obtained the virtual lens. A position adjustment support method for an optical member, which generates the adjustment support information by using the first information necessary for setting a resolution characteristic of an apparatus to the predetermined characteristic.
The optical member position adjustment support method according to claim 11,

In the output step, an optical member position adjustment support method for generating the adjustment support information from the actually measured evaluation data by a model generated by machine learning using the design evaluation data and the first information as teacher data.
The method for supporting position adjustment of an optical member according to any one of claims 11 to 14,

The first resolution performance data is data indicating the resolution performance of the lens device in a state where the distance is each of the plurality of values,

The actually measured evaluation data is a position adjustment support method for an optical member including a peak value of the resolution performance in the first resolution performance data and information corresponding to the distance in a state where the peak value is obtained. ..
A method for assisting position adjustment of an optical member according to any one of claims 11 to 15,

The actual measurement evaluation data is the first actual measurement evaluation data based on the first resolution performance data at the first image height at the evaluation position, and the second image height different from the first image height at the evaluation position. A position adjustment support method for an optical member, comprising: second measurement evaluation data based on first resolution performance data.
A method for supporting position adjustment of an optical member according to claim 16,

The second actual measurement evaluation data, the first sub-measurement evaluation data based on the first resolution performance data at the first position of the second image height of the evaluation position, and the second image height of the evaluation position. A position adjustment support method for an optical member, comprising: a second sub actually measured evaluation data based on the first resolution performance data at a second position different from the first position.
A method for supporting position adjustment of an optical member according to any one of claims 11 to 17,

The first resolution performance data is a first sub-resolution performance data for an evaluation object of a first spatial frequency, and a second sub-resolution performance for an evaluation object of a second spatial frequency different from the first spatial frequency. Including data and

The position adjustment support method for an optical member, wherein the actually measured evaluation data includes one based on the first sub-resolution performance data and one based on the second sub-resolution performance data.
A method for supporting position adjustment of an optical member according to any one of claims 11 to 18,

The adjustment support information includes a position adjustment support method for an optical member including an adjustment amount of the position of the adjusted optical member in the optical axis direction of the lens device and an adjustment amount of an inclination of the optical axis of the adjusted optical member. ..
A method for assisting position adjustment of an optical member according to any one of claims 11 to 19,

The lens device is a method of assisting position adjustment of an optical member, which includes a plurality of the adjusted optical members and at least one fixed optical member that does not require position adjustment.
Obtained at the evaluation position in a state in which the distance between the image forming position of the lens device having a plurality of optical members including the adjusted optical member and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. Acquiring actual measurement evaluation data based on the first resolution performance data of the lens device,

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic. In the state where the distance is changed to the plurality of values in each virtual lens device and the first information indicating the adjustment amount, the second resolution performance data of each virtual lens device obtained at the evaluation position is obtained. Based on the design evaluation data of each of the virtual lens devices based on the above, an adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution property of the lens device to the predetermined property. And an output step of outputting adjustment support information which is information indicating the position adjustment support program for the optical member.
A method for manufacturing a lens device having a plurality of optical members including an optical member to be adjusted,

First resolution performance data of the lens device obtained at the evaluation position in a state in which the distance between the imaging position of the lens device and the evaluation position in the optical axis direction of the lens device is changed to a plurality of values. A first step of generating measured evaluation data based on

The measured evaluation data and the position of the optical member to be adjusted in each virtual lens device necessary for setting the resolution characteristics of each of the virtual lens devices having the same configuration as the lens device to a predetermined characteristic. The first information and each virtual based on the second resolution performance data of each virtual lens device obtained at the evaluation position in a state in which the distance is changed to the plurality of values in each virtual lens device. Based on the design evaluation data of the lens device, with information indicating the adjustment amount of the position of the adjusted optical member in the lens device, which is necessary for setting the resolution characteristic of the lens device to the predetermined characteristic. A second step of inputting the actual measurement evaluation data to a position adjustment support device for an optical member, which includes an output unit that outputs certain adjustment support information,

A third step of adjusting the position of the adjusted optical member according to the adjustment support information output from the position adjustment support apparatus.
The method of manufacturing a lens device according to claim 22, wherein

The first step, the first sub-step of generating the measurement evaluation data based on the first resolution performance data for the evaluation object of the first spatial frequency, the second spatial frequency higher than the first spatial frequency A second sub-step of generating the measured evaluation data based on the first resolution performance data for the evaluation object of

The second step includes a third sub-step of inputting the measured evaluation data generated in the first sub-step to the position adjustment support device, and the measured evaluation data generated in the second sub-step in the position. A fourth sub-step of inputting to the adjustment support device,

The third step is a fifth sub-step of adjusting the position of the adjusted optical member according to the adjustment support information output from the position adjustment support device in the third sub-step, and the fourth sub-step A sixth sub-step of adjusting the position of the optical member to be adjusted according to the adjustment support information output from the position adjustment support device,

After performing the first sub-step, the third sub-step, and the fifth sub-step to perform the primary adjustment of the position of the adjusted optical member, the second sub-step, the fourth sub-step, and the sixth sub-step. A method of manufacturing a lens device, wherein a sub-step is performed to perform secondary adjustment of the position of the optical member to be adjusted.