Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/10—Beam splitting or combining systems
  • G02B27/14—Beam splitting or combining systems operating by reflection only
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
  • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
  • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
  • B23K26/0738—Shaping the laser spot into a linear shape
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/70—Auxiliary operations or equipment
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
  • G02B27/0905—Dividing and/or superposing multiple light beams
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
  • G02B27/0911—Anamorphotic systems
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
  • G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/10—Beam splitting or combining systems
  • G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
  • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
  • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
  • H01S5/00—Semiconductor lasers
  • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30

Definitions

• the invention relates to a laser system and a
• Laser device for generating a useful light distribution (L) which is fed by several laser beams.
• Such line-like beam profiles are used, for example, in the processing of surfaces of semiconductors or glasses, for example in the production of TFT displays, in the doping of semiconductors, in the
• the laser systems comprise a plurality of laser light sources for supplying the desired useful light distribution in order to generate a high energy density and / or a spatially extensive linear intensity distribution.
• DE 10 2008 027 229 B4 shows one
• Beam profile can be converted.
• the laser radiation passes through a number of optical elements, which are added to it
• all laser light sources should therefore always be in operation. If a laser light source fails, or if the intensity of the useful light distribution is to be reduced by weakening or deactivating a laser light source, the optical elements are no longer illuminated uniformly. This can affect the quality and homogeneity of the useful light distribution.
• the invention is based, which
• the laser system as a whole is a device which comprises several devices and / or components.
• the laser system comprises at least two laser light sources for specifying
• the feed optics have at least a first optical input channel and a second optical input channel for the laser beams.
• the feed optics include at least a first optical output channel and a second optical output channel through which the laser beams emerge from the feed optics.
• Beam shape optics which are used to shape the desired Useful light distribution with a linear cross section is formed from the laser beams of the optical output channels.
• the first and the second optical input channel are each designed in such a way that an input beam group can be fed in, wherein an input beam group can comprise at least two laser beams.
• the first and the second optical output channel are each designed to guide one output beam group each, wherein each output beam group can in turn comprise at least two laser beams.
• the feed optics are set up in such a way that the laser beams fed in during the transition from the
• Input channels are sorted into the output channels.
• the feed optics act in such a way that each output beam group has at least one laser beam from the input beam group of the first
• optical input channel and a laser beam from the input beam group of the second optical input channel.
• each output beam group contains contributions from both optical input channels.
• a laser beam from one of the input channels is present in each of the output beam groups. This means that each optical output channel is also illuminated when, for example, the radiation from an optical one
• Input channel is reduced (for example, if one of the laser light sources is deactivated). This allows the The quality and homogeneity of the useful light distribution can be improved, in particular if the radiation power of the different laser light sources is relative to one another
• an optical channel (input channel, output channel) is distinguished in particular by the fact that a group of laser beams is guided in the channel in a spatially separated and / or optically separate manner from the other channels.
• An optical channel can be
• the input channel is in particular a section of the feed optics
• Optical elements through which a laser beam or a group of laser beams can be irradiated and then run separately from other beams or groups of beams.
• input beam groups are in the
• each output beam group comprises laser beams from at least the input beam group of the first optical input channel and the input beam group of the second optical input channel.
• the feed optics can basically be like this
• Feed optics passes through and into one of the Output channels is guided. In that respect they would
• Laser beams are not yet combined with other laser beams from the respective input beam channel to
• the feed optics preferably have for everyone
• optical input channel at least one optical element, which for beam deflection and / or beam guidance
• the optical element is also to this
• Optical elements which only selectively on a laser beam of an input beam group or on a respective one Subgroup acts, the laser beams in the
• the optical element is designed and arranged in such a way that the laser beam selectively detected by the optical element or the subgroup of selectively detected by the optical element
• Laser beams is guided into a different optical output channel than the laser beams of the same optical input channel that are not detected by the optical element. It is conceivable, for example, that the optical element selectively directs one of the laser beams of an input beam group to a different output channel than the others
• the feed optics preferably comprise one or more beam steering elements and / or one or more
• Beam guiding elements by means of which a beam path from the optical input channels to the optical
• the beam path preferably has a change in direction and in particular a plurality of changes in direction. In particular is
• the beam path is folded several times, for example in the manner of a Z-fold
• the optical precision can be increased by folding the beam path.
• the in particular folded beam path runs in a plane that is perpendicular to the plane of the beam path in the following one
• Beam shape optics is. In this respect also includes
• Beam shape optics a plurality of optical elements, by means of which a beam path is specified, which in particular likewise has one or more changes in direction
• a level in which the beam path runs can in turn be assigned to the folded beam path.
• the feed optics are preferably designed such that the first optical input channel and the second optical input channel are arranged such that
• Laser beams with different beam directions for example with opposite beam directions and in particular from opposite sides can be irradiated into the channels.
• the channels can be irradiated into the channels.
• Infeed optics have their own housing, with a
• Input channel are arranged on opposite sides of the housing.
• Laser sources opposite each other with respect to the Arrange feed optics in the laser system can also be provided for further laser light sources, which are arranged in particular on further free sides of the housing. That’s why
• Laser light sources spaced apart. This increases operational safety, since cooling and power supply are made possible, for example. Also be
• Path adjustment optics which are set up to change the optical path of at least one laser beam in comparison to other laser beams of this respective output channel. Is preferred for everyone optical
• Such a path adjustment optics provided output channel.
• the path adjustment optics is designed in particular in such a way that it detects only one laser beam of the output channel or only a subset of laser beams of the output channel.
• a path adjustment lens can, for example, have a combination of deflecting mirrors, by means of which a length-adjustable additional optical path can be defined. The respectively detected laser beam or the respectively detected subgroup of laser beams then runs through this variable additional path.
• the feed optics can be designed in this way be that more than two input beam groups can be irradiated.
• the feed optics are advantageously designed such that the beams of a
• Output beam groups can be divided.
• Feed optics are further preferably such
• each of the output beam groups each have at least one laser beam from each of the plurality
• Such a system is still largely homogeneously illuminated when one or more laser light sources are deactivated.
• the beam shaping optics have shaping optics which detect the laser beams which emerge from the optical output channels.
• the shaping optics are designed to form a beam package with a beam cross section that is extended in a line-like manner from the detected laser beams.
• the shaping optics have several separate conversion elements, one each
• Conversion element is assigned to a respective output beam group. Since each output beam group contains contributions from several input channels, as explained, the shaping optics are illuminated homogeneously even when a laser source is not emitting.
• Combination beam can be combined.
• the beam shape optics can additionally comprise combination optics, which is set up to block the laser beams
• the shaping optics is preferably arranged such that it then has the
• a homogenizing optic can also be provided, which the
• Beam packets from the forming optics are recorded and further formed in order to give the useful light distribution the desired properties.
• the laser beams of the output beam groups can optionally be optically shaped independently of one another in the beam shaping optics. It is conceivable that the
• Beam shape optics has at least one telescope, in particular anamorphic telescope, which acts on one or more laser beams of an optical output channel.
• a telescope can in particular have two in the beam path
• the telescope is as
• Laser beams are deformed anamorphically in the respective channel.
• the telescope is designed to a cylindrical distortion of the imaging scale along an axis perpendicular to the direction of propagation of the
• the beam shape optics for each output beam group or for certain output beam groups have two anamorphic telescopes arranged serially in the beam path, which telescopes are different
• Distortion directions are effective (especially with regard to two vertical directions). This allows the
• Beam properties can be set with respect to the two vertical axes.
• the telescopes mentioned are
• the laser light sources can therefore be any laser light sources.
• An advantageous aspect of the invention also consists in that each laser light source for emitting at least two separate (i.e. spatially separated from one another
• laser beams are formed.
• the two laser light sources radiate into different optical input channels, the at least two being emitted by a laser light source Laser beams form an input beam group.
• Such laser light sources can, for example, as
• frequency-doubled or frequency-multiplied lasers can be realized, in which the conversion residual beam is also fed to a new conversion and thus two or more output beams can be provided.
• Figures 1 and 2 is a laser system and a
• the laser system 10 comprises two laser light sources 12a, 12b for emitting laser beams.
• each of the laser light sources 12a, 12b is designed such that that two separate laser beams 14 are emitted in parallel.
• the laser beams from each laser light source 12a, 12b each form an input beam group 16a or 16b. It goes without saying that the input beam groups can also be fed by several laser light sources,
• Input beam groups 16a, 16b are each passed through an optical input channel 18a and 18b, respectively
• Infeed optics 20 have an associated beam access 22a or 22b for each optical input channel 18a or 18b (see FIG. 2).
• An optical input channel 18a or 18b can, for example, have suitable optical elements or optical devices for coupling the laser beams into the feed optics 20.
• the feed optics 20 also have a first and a second optical output channel 24a or 24b.
• the laser beams 14 irradiated through the first and second optical input channels 18a, 18b become even closer in the following
• Output channels 24a and 24b passed.
• an output beam group 26a or 26b of laser beams 14 is provided on each of the first and second optical output channels 24a, 24b.
• the output beam groups 26a, 26b emerging from the optical output channels 24a, 24b are then replaced by one
• Beam shape optics 28 captured and in the desired
• Formed useful light distribution L which in the example shown has a linear beam cross section.
• the beam shaping optics 28 In order to form the line-shaped useful light distribution L from the laser beams 14 of the output beam groups 26a, 26b, the beam shaping optics 28 usually comprise various optically functional devices. Is conceivable
• Output beam groups 26a or 26b or subgroups thereof first pass through one or more telescopes 30.
• Such telescopes 30 can in particular be anamorphic, so that the beam cross section in FIG
• the laser beams 14 are then e.g. passed through a shaping optics 32, which from the laser beams 14 of the output beam groups 26a, 26b one or more beam packets with an elongated
• the beam bundles preformed in this way are e.g. mixed with homogenization optics 34 and smoothed in the intensity curve so that the desired useful light distribution L can be provided.
• the forming optics 32 can in principle have a plurality of separate conversion elements 33 (cf. FIG. 1). It is conceivable, for example, that one conversion element 33 each onto the laser beams 14 from only one of the Output beam groups 26a, 26b act. However, this configuration is not mandatory.
• the shaping optics 32 can also comprise a common conversion element for all laser beams of the output beam groups 26a, 26b. In this case, the beam shaping optics 28 can be one of the shaping optics
• beam shaping optics 28 can also have combination optics 35 which combine the laser beams of an output beam group 26a, 26b of a respective output channel 24a, 24b.
• the feed optics 20 have a plurality of
• Beam guiding elements and / or beam guiding elements 36 by means of which a beam path 38 in the
• Feed optics 20 is predetermined. In the illustrated embodiment
• the beam path 38 is folded several times, so that a comparatively long optical path can be covered in a compact installation space, and so sufficient space is provided for optical elements (not shown) for shaping the beam properties.
• the feed optics 20 are designed such that the laser beams 14 of an input beam group 16a, 16b initially run separately from one another and also separately from the laser beams of the respective other input beam group.
• the feed optics 20 also include an optics element 40 for beam deflection and / or beam guidance (here: deflection mirror), which is only on one laser beam each
• Input beam group 16a or 16b acts.
• the optical element 40 is designed such that it directs the detected laser beam into the respective other optical output channel 24a or 24b than that of the
• Optical element 40 not detected laser beams 14 of the respective input beam group 16a or 16b. This ensures that each output beam group 26a, 26b each has at least one laser beam 14 from the
• Feed optics 20 designed to rearrange the laser beams 14 grouped into the two input beam groups 16a and 16b so that they run in a different pairing in the respective output beam groups 26a, 26b of the optical output channels 24a, 24b.
• the feed optics 20 can also be a
• Path adjustment optics 42 comprise, by means of which a
• optical path of at least one laser beam can be changed in comparison to the other laser beams 14.
• the laser system 10 As can be seen in FIG. 2, the laser system 10
• Feed optics 20 and / or beam shaping optics 28 each have their own module housing 44. Due to the modular structure, a compact system can be used
• the beam paths in the feed optics 20 and in the beam shaping optics 28 do not connect linearly to one another, but one
• the example shown is the beam path 38 in FIG.
• the module housing 44 of the feed optics 20 can be shaped as a flat, cuboid or box-like housing (i.e. with an extent perpendicular to the plane mentioned, which is less than the dimension parallel to the plane).
• the laser beams (output beam group 26a, 26b) provided in the optical output channels 24a, 24b can then in turn be passed on in another direction.
• the beam shape optics 28 can have a beam path that is in one plane
• the beam accesses 22a, 22b for the first optical input channel 18a and the second optical input channel 18b are arranged on different sides of the module housing 44 of the feed optics 20.
• the laser light sources 12a, 12b can be mutually related with respect to the feed optics 20 be arranged opposite each other and emit in opposite beam directions.
• Laser light sources can of course also be arranged such that their respective beam directions form an acute or obtuse angle with one another.
• the laser light sources can also use parallel ones
• the various laser light sources 12a, 12b are arranged such that their housings are spaced apart. Work on one of the two laser light sources can thus take place without the other laser light source being affected.

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• Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• Engineering & Computer Science (AREA)
• General Physics & Mathematics (AREA)
• Plasma & Fusion (AREA)
• Mechanical Engineering (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Electromagnetism (AREA)
• Laser Beam Processing (AREA)
• Lasers (AREA)
• Mounting And Adjusting Of Optical Elements (AREA)

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• 2019
  • 2019-01-31 DE DE102019102511.7A patent/DE102019102511B4/de active Active
• 2020
  • 2020-01-13 TW TW109101094A patent/TWI722760B/zh active
  • 2020-01-16 CN CN202080011371.3A patent/CN113366375A/zh active Pending
  • 2020-01-16 KR KR1020217027056A patent/KR20210120045A/ko not_active Application Discontinuation
  • 2020-01-16 JP JP2021541537A patent/JP7377273B2/ja active Active
  • 2020-01-16 WO PCT/EP2020/050985 patent/WO2020156821A1/de active Application Filing

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