WO2020134091A1 - Coreless substrate and package method therefor - Google Patents

Coreless substrate and package method therefor Download PDF

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Publication number
WO2020134091A1
WO2020134091A1 PCT/CN2019/099315 CN2019099315W WO2020134091A1 WO 2020134091 A1 WO2020134091 A1 WO 2020134091A1 CN 2019099315 W CN2019099315 W CN 2019099315W WO 2020134091 A1 WO2020134091 A1 WO 2020134091A1
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Prior art keywords
substrate
coreless
groove
metal layer
coreless substrate
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PCT/CN2019/099315
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French (fr)
Chinese (zh)
Inventor
黄文迅
庭玉文
崔永涛
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广州兴森快捷电路科技有限公司
深圳市兴森快捷电路科技股份有限公司
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Publication of WO2020134091A1 publication Critical patent/WO2020134091A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits

Definitions

  • the invention relates to the technical field of substrate processing, in particular to a coreless substrate and its packaging method.
  • the coreless technology in the package substrate has been developed to meet the growing trend of lighter, smaller and better electrical performance in the future for electronic applications. Then, as far as the manufacturing process of the 3L coreless substrate is concerned, the current manufacturing method is to laminate the entire product into a 6L substrate before separating the core layer to achieve the purpose of 3L. Considering the processing process when the product is still 6L, the core-less liquid will inevitably penetrate into the liquid tank. As the functions and performance of network systems, high-end servers, and mobile communication devices improve, the requirements for high pin count, data transmission speed, and signal integrity also increase. The penetration of the potion in the coreless substrate manufacturing process will bite or slightly corrode the copper surface of the product.
  • a coreless substrate packaging method includes the following steps:
  • the groove is located at an edge of the substrate or has a predetermined distance from the edge of the substrate.
  • the depth of the groove is less than the thickness of the metal layer.
  • the depth of the groove is 1/3 ⁇ 4/5 of the thickness of the metal layer.
  • the filler is a thermoplastic material.
  • the filler is PP prepreg.
  • the substrate has the first area and the second area, the first area is located inside the second area, and the step of exposing the substrate further includes:
  • the first area is exposed, and the second area is not exposed, so that the substrate is exposed to a margin.
  • the width of the second area is 1.5 mm to 3.5 mm.
  • the coreless substrate packaging method further includes the following steps:
  • the substrate After grooving the substrate, the substrate is pre-treated a second time.
  • a coreless substrate is processed by the coreless substrate packaging method described in any one of the above technical features.
  • the present invention has at least the following technical effects:
  • the coreless substrate and its packaging method of the present invention etch and groove the substrate, and fill the groove formed after the etched and grooved by the filler, and the filler and the groove form a dam structure to isolate the potion. Effectively solve the problem of biting or corrosion caused by the current infiltration of the drug solution into the copper surface line. This can prevent the liquid medicine from penetrating into the coreless substrate, ensure the performance and service life of the coreless substrate, and improve the product yield and product-related electrical properties to a certain extent, and ensure the molding quality of the PCB board.
  • FIG. 1 is a flowchart of a coreless substrate packaging method according to an embodiment of the invention.
  • FIG. 2 is a schematic view of the front view of the substrate after the slotting step
  • 3 is a schematic view of the front view of the substrate after the pressing step
  • FIG. 4 is a schematic structural view of the substrate before the exposure step.
  • connection and “connection” in this application, unless otherwise specified, include direct and indirect connection (connection).
  • connection in the description of the present invention, it should be understood that the terms “upper”, “lower”, “front”, “rear”, “left”, “right”, “vertical”, “horizontal”, “top”, The orientation or positional relationship indicated by “bottom”, “inner”, “outer”, “clockwise”, “counterclockwise”, etc.
  • the first feature is "on” or “below” the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly through an intermediary contact.
  • the first feature is “above”, “above” and “above” the second feature may be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature.
  • the first feature is “below”, “below”, and “below” the second feature may be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontal than the second feature.
  • the present invention provides a coreless substrate packaging method.
  • the coreless substrate packaging method is used to perform a packaging process on the substrate 100 to be packaged, so that the substrate 100 forms a coreless substrate.
  • the coreless substrate packaging method of the present invention can prevent the liquid medicine from infiltrating into the coreless substrate, ensure the performance and service life of the coreless substrate, improve the product yield and product-related electrical performance to a certain extent, and ensure the molding quality of the PCB board.
  • the coreless substrate packaging method includes the following steps:
  • the metal layer 120 of the substrate 100 is etched and grooved, so that the metal layer 120 is recessed, and a groove 130 is formed;
  • the substrate 100 is laminated, plated, and processed to form the package substrate 100.
  • the substrate 100 includes a base material 110 and a metal layer 120, and the metal layer 120 is located above the base material 110.
  • the metal layer 120 is copper.
  • the film processing is performed on the substrate 100, that is, the film is applied to the metal layer 120 of the substrate 100.
  • the film can play a protective role to protect the metal layer 120 on the substrate 100 to prevent the metal layer 120 from being bitten off during the subsequent etching and the like.
  • the substrate 100 after filming needs to be exposed. It can be understood that after the substrate 100 after the film is exposed, the film and the substrate 100 can be closely attached to prevent the metal layer 120 from being bitten off during the subsequent etching and the like.
  • the metal layer 120 that is not exposed can be etched away.
  • the metal layer 120 of the substrate 100 is etched and grooved, so that the surface of the metal layer 120 is recessed, and the recess may form a groove 130.
  • the bottom of the groove 130 and the surface of the metal layer 120 form a height difference.
  • the groove 130 is an annular structure.
  • the filler 140 can be pressed on the surface of the substrate 100 and can be filled into the groove 130.
  • the filler 140 may play a sealing role.
  • the groove 130 and the filler 140 are closely combined to form the effect of the height difference dam to isolate the liquid medicine, so as to prevent the liquid medicine from seeping into the substrate 100 and corroding the metal layer 120 during the subsequent wet processing of the substrate 100.
  • wet processing refers to a process in which the substrate 100 passes a potion and the like during the packaging process, and those skilled in the art often refer to it as a wet process, which will not be repeated here.
  • a series of processes such as lamination, electroplating, and processing are performed on the substrate 100 to which the filler 140 is pressed, so that the substrate 100 forms a coreless substrate.
  • steps of performing a series of processes such as lamination, electroplating, and processing on the substrate 100 of the pressure-filling member 140 are prior art, and are not repeated here. That is to say, the coreless substrate packaging method of the present invention is based on the existing coreless substrate packaging process, the substrate 130 is etched into the groove 130, and the filler 140 is used to press-fit the groove 130.
  • the coreless substrate packaging method of the present invention performs etching and slotting on the substrate 100, and fills the groove 130 formed after the etching and slotting through the filler 140, and the filler 140 and the groove 130 form a dam structure to isolate the potion. Effectively solve the problem of biting or corrosion caused by the current infiltration of the drug solution into the copper surface line. This can prevent the liquid medicine from penetrating into the coreless substrate, ensure the performance and service life of the coreless substrate, and improve the product yield and product-related electrical properties to a certain extent, and ensure the molding quality of the PCB board.
  • the groove 130 is located at the edge of the substrate 100 or has a predetermined distance from the edge of the substrate 100. That is to say, the groove 130 may be a board edge groove, that is, the groove 130 is located at the edge of the substrate 100, and the groove 130 communicates with the side area of the substrate 100, as shown in FIG. 2. In this way, the circuit layer structure formed later can be easily peeled off from the substrate 110 and the finished product can be obtained.
  • the groove 130 may also have a certain distance from the edge of the substrate 100.
  • the metal layer 120 and the filler 140 can be closely combined, In order to ensure the sealing performance of the substrate 100, to avoid the penetration of the chemical liquid into the substrate 100 during the wet processing of the substrate 100, and thus to prevent the chemical liquid from biting or corroding the metal layer 120 of the substrate 100, to ensure the performance and service life of the coreless substrate, and To a certain extent, improve the product yield and the relevant electrical properties of the finished product to ensure the molding quality of the PCB board.
  • the depth of the groove 130 is less than the thickness of the metal layer 120. That is to say, during the etching process of the substrate 100, the metal layer 120 remains on the bottom of the groove 130. In this way, the circuit layer structure formed later can be easily peeled off from the substrate 110 and the finished product can be obtained. After the filling member 140 is filled into the groove 130, the groove 130 can be tightly combined with the filling member 140 to ensure the sealing effect and avoid the penetration of the medicine.
  • the depth of the groove 130 is 1/3 ⁇ 4/5 of the thickness of the metal layer 120.
  • the depth range of the above-mentioned groove 130 can not only facilitate the peeling of the circuit layer structure formed later from the substrate 110, but also ensure the sealing performance of the filling member 140 after filling.
  • the depth of the groove 130 may also be equal to the thickness of the metal layer 120. That is to say, after the groove 130 is formed on the substrate 100, the bottom of the groove 130 exposes the substrate 110 without the metal layer 120. After the filler 140 is pressed against the substrate 100, the filler 140 can be tightly combined with the base material 110 to ensure the sealing effect.
  • the filler 140 is a thermoplastic material. In this way, it can be ensured that the filler 140 flows into the groove 130 to be filled when being pressed. Further, the filler 140 is a PP (Polypropylene) prepreg. During pressing, the etched groove 130 is filled with PP prepreg to achieve the combined effect of the PP+ metal layer 120 forming a dam isolation, thereby preventing the penetration of the drug solution.
  • PP Polypropylene
  • the substrate 100 has a first area 121 and a second area 122.
  • the first area 121 is located inside the second area 122.
  • the step of exposing the substrate 100 further includes:
  • the first area 121 is exposed, and the second area 122 is not exposed, so that the substrate 100 is exposed to a margin.
  • the first area 121 of the substrate 100 refers to the middle area of the substrate 100
  • the second area 122 of the substrate 100 refers to the edge area of the substrate 100.
  • the first region 121 of the substrate 100 is exposed, and the metal layer 120 in the first region 121 of the substrate 100 may be in close contact with the film. Since the second region 122 of the substrate 100 is not exposed, an exposure margin can be formed to facilitate etching of the metal layer 120.
  • the metal layer 120 in the first region 121 of the substrate 100 will not be etched away, and the metal layer 120 in the second region 122 will be etched away.
  • the etched metal layer 120 is recessed relative to the unetched metal layer 120 to form the groove 130.
  • the filler 140 may be filled into the groove 130, so that the filler 140 and the metal layer 120 form a dam structure to ensure the sealing effect and prevent the penetration of the medicine solution.
  • the width of the second region 122 is 1.5 mm to 3.5 mm. That is, the width of the groove 130 to the edge of the substrate 100 is 1.5 mm to 3.5 mm. That is, in Fig. 4, the width of the groove 130 in the left-right direction is 1.5 mm to 3.5 mm. Preferably, the width of the groove 130 is 2.5 mm.
  • the coreless substrate packaging method before slotting the substrate 100, the coreless substrate packaging method further includes the following steps:
  • the substrate 100 Before filming the substrate 100, the substrate 100 is subjected to the first pretreatment.
  • the substrate 100 is subjected to the first pretreatment, that is, the substrate 100 is cleaned for the first time. In this way, the substrate 100 can be ensured to be clean and convenient for film sticking.
  • the substrate 100 is only pickled during the first cleaning, but not slightly etched. Pickling is to clean the surface of the substrate 100, which is helpful for film sticking, so as to prevent impurities from attaching to the effective area of the substrate 100 during manufacturing and causing the metal layer 120 to sag.
  • the coreless substrate packaging method further includes:
  • the substrate 100 is pre-processed a second time.
  • the substrate 100 is subjected to the second pretreatment, that is, the substrate 100 is washed for the second time.
  • the dirt on the edge of the substrate 100 can be cleaned, and the metal layer 120 can be dented due to foreign matter after lamination.
  • the packaging method of the coreless substrate 100 of the present invention can etch the substrate 100.
  • the filling member 140 fills the groove 130 during lamination, and the filling member 140+metal layer 120 is used to form a dam, thereby preventing the penetration of the drug solution Production plan.
  • this method only adds the structure of photo-etching and etching the grooves 130 on the substrate 100, and can use existing equipment without adding new equipment investment.
  • the use of a coreless substrate packaging method to produce a coreless substrate can improve product yield and product-related electrical performance to a certain extent.
  • the invention also provides a coreless substrate.
  • the coreless substrate is processed by the coreless substrate packaging method in any of the above embodiments.
  • the coreless substrate is processed by the coreless substrate packaging method, the problem of corrosion or biting of the copper surface circuit caused by the penetration of the chemical liquid into the substrate 100 during the wet process is avoided, and the performance and service life of the coreless substrate are guaranteed. To a certain extent, improve the product yield and the relevant electrical properties of the finished product to ensure the molding quality of the PCB board.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A coreless substrate and a package method therefor. The package method for the coreless substrate comprises the following steps: performing film pasting on a substrate (100); exposing the substrate (100); performing etching and grooving on a metal layer (120) of the substrate (100), so that the metal layer (120) is recessed to form a groove (130); laminating a filling piece (140) at the substrate (100), so that the groove (130) is filled with the filling piece (140); and performing lamination, electroplating and processing on the substrate (100) to form a package substrate. The filling piece (140) and the groove (130) form a dam structure to isolate liquid medicine; in this way, the liquid medicine can be prevented from being permeated into the coreless substrate; the performance and the service life of the coreless substrate are ensured; the product yield and the relevant electrical performance of a finished product are improved to a certain extent, and the formation quality of a PCB is ensured.

Description

无芯基板及其封装方法Coreless substrate and its packaging method 技术领域Technical field
本发明涉及基板加工技术领域,特别是涉及一种无芯基板及其封装方法。The invention relates to the technical field of substrate processing, in particular to a coreless substrate and its packaging method.
背景技术Background technique
封装基板中的无芯技术已被研发来满足电子应用未来日益增长的更轻、更小和原来越好电性能的发展趋势要求。然后,就3L无芯基板的制造流程而言,目前的制作方法是整个产品先层压制作成6L基板后,才进行分离掉芯板层达到3L的目的。考虑到产品还是6L时候的加工过程,无芯基本在液体槽中难免会有药水渗入。由于网络系统、高端服务器和移动通信设备功能和性能的改进,对高引脚数、数据传输速度和信号完整性的要求也增加。无芯基板制作过程药水的渗入会对产品铜面线路进行少量咬蚀或者轻微腐蚀,即使采用线路检查设备对无芯基板进行检查,也仅发现表面上的问题,而线路铜内部与各种槽体药水的轻微反应变化根本发现不了,导致产品的性能和使用寿命在一定程度上收到影响,影响PCB板的成型质量。The coreless technology in the package substrate has been developed to meet the growing trend of lighter, smaller and better electrical performance in the future for electronic applications. Then, as far as the manufacturing process of the 3L coreless substrate is concerned, the current manufacturing method is to laminate the entire product into a 6L substrate before separating the core layer to achieve the purpose of 3L. Considering the processing process when the product is still 6L, the core-less liquid will inevitably penetrate into the liquid tank. As the functions and performance of network systems, high-end servers, and mobile communication devices improve, the requirements for high pin count, data transmission speed, and signal integrity also increase. The penetration of the potion in the coreless substrate manufacturing process will bite or slightly corrode the copper surface of the product. Even if the coreless substrate is inspected by the circuit inspection equipment, only the surface problems are found. The slight reaction change of the body lotion cannot be found at all, which leads to a certain degree of impact on the performance and service life of the product, affecting the molding quality of the PCB board.
发明内容Summary of the invention
基于此,有必要针对目前药水渗入铜面线路导致的咬蚀或者腐蚀问题,提供一种无芯基板及其封装方法。Based on this, it is necessary to provide a coreless substrate and its packaging method for the bite or corrosion problems caused by the current infiltration of the copper liquid into the copper circuit.
上述目的通过下述技术方案实现:The above objectives are achieved through the following technical solutions:
一种无芯基板封装方法,包括如下步骤:A coreless substrate packaging method includes the following steps:
对所述基板进行贴膜;Filming the substrate;
对所述基板进行曝光;Expose the substrate;
对所述基板的金属层进行刻蚀开槽,以使所述金属层凹陷,并形成凹槽;Etching and slotting the metal layer of the substrate to recess the metal layer and form a groove;
将填充件压合于所述基板,以使所述填充件对所述凹槽进行填充;Pressing the filler to the substrate, so that the filler fills the groove;
对所述基板进行层压、电镀、加工,以形成封装基板。Laminating, plating, and processing the substrate to form a package substrate.
在其中一个实施例中,所述凹槽位于所述基板的边缘或与所述基板边缘存在预设间距。In one of the embodiments, the groove is located at an edge of the substrate or has a predetermined distance from the edge of the substrate.
在其中一个实施例中,所述凹槽的深度小于所述金属层的厚度。In one of the embodiments, the depth of the groove is less than the thickness of the metal layer.
在其中一个实施例中,所述凹槽的深度为所述金属层厚度的1/3~4/5。In one of the embodiments, the depth of the groove is 1/3˜4/5 of the thickness of the metal layer.
在其中一个实施例中,所述填充件为热塑性材料。In one of the embodiments, the filler is a thermoplastic material.
在其中一个实施例中,所述填充件为PP半固化片。In one of the embodiments, the filler is PP prepreg.
在其中一个实施例中,所述基板具有所述第一区域以及第二区域,所述第一区域位于所述第二区域的内侧,对所述基板进行曝光的步骤还包括:In one of the embodiments, the substrate has the first area and the second area, the first area is located inside the second area, and the step of exposing the substrate further includes:
管控所述基板的曝光区域;Control the exposure area of the substrate;
对所述第一区域曝光,所述第二区域不曝光,使所述基板形成曝光留边。The first area is exposed, and the second area is not exposed, so that the substrate is exposed to a margin.
在其中一个实施例中,所述第二区域的宽度为1.5mm~3.5mm。In one of the embodiments, the width of the second area is 1.5 mm to 3.5 mm.
在其中一个实施例中,所述无芯基板封装方法还包括如下步骤:In one of the embodiments, the coreless substrate packaging method further includes the following steps:
在对所述基板进行贴膜之前,对基板进行第一次前处理;Before filming the substrate, perform the first pretreatment on the substrate;
对所述基板进行开槽之后,对所述基板进行第二次前处理。After grooving the substrate, the substrate is pre-treated a second time.
一种无芯基板,所述无芯基板采用如上述任一技术特征所述的无芯基板封装方法加工而成。A coreless substrate. The coreless substrate is processed by the coreless substrate packaging method described in any one of the above technical features.
采用上述技术方案后,本发明至少具有如下技术效果:After adopting the above technical solutions, the present invention has at least the following technical effects:
本发明的无芯基板及其封装方法,对基板进行刻蚀开槽,并通过填充件对刻蚀开槽后形成的凹槽进行填充,填充件与凹槽形成堤坝结构隔绝药水。有效的解决目前药水渗入铜面线路导致的咬蚀或者腐蚀问题。这样可以防止药水渗入无芯基板,保证无芯基板的性能和使用寿命,并在一定程度上提高产品良率和成品相关电性能,保证PCB板的成型质量。The coreless substrate and its packaging method of the present invention etch and groove the substrate, and fill the groove formed after the etched and grooved by the filler, and the filler and the groove form a dam structure to isolate the potion. Effectively solve the problem of biting or corrosion caused by the current infiltration of the drug solution into the copper surface line. This can prevent the liquid medicine from penetrating into the coreless substrate, ensure the performance and service life of the coreless substrate, and improve the product yield and product-related electrical properties to a certain extent, and ensure the molding quality of the PCB board.
附图说明BRIEF DESCRIPTION
图1为本发明一实施例的无芯基板封装方法的流程图;1 is a flowchart of a coreless substrate packaging method according to an embodiment of the invention;
图2为基板在开槽步骤后的主视结构示意图;2 is a schematic view of the front view of the substrate after the slotting step;
图3为基板在压合步骤后的主视结构示意图;3 is a schematic view of the front view of the substrate after the pressing step;
图4为基板在曝光步骤之前的俯视结构示意图。FIG. 4 is a schematic structural view of the substrate before the exposure step.
其中:among them:
100-基板;100-substrate;
110-基材;110-substrate;
120-金属层;120- metal layer;
121-第一区域;121-The first area;
122-第二区域;122-Second area;
130-凹槽;130-groove;
140-填充件。140-filler.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白,以下通过实施例,并结合附图,对本发明的无芯基板及其封装方法进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the coreless substrate and the packaging method of the present invention will be further described in detail through the embodiments and the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
本文中为部件所编序号本身,例如“第一”、“第二”等,仅用于区分所描述的对象,不具有任何顺序或技术含义。而本申请所说“连接”、“联接”,如无特别说明,均包括直接和间接连接(联接)。在本发明的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。The serial numbers themselves, such as "first", "second", etc., are used to distinguish the described objects, and do not have any order or technical meaning. The "connection" and "connection" in this application, unless otherwise specified, include direct and indirect connection (connection). In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description Rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as limiting the present invention.
在本发明中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特 征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise clearly specified and defined, the first feature is "on" or "below" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly through an intermediary contact. Moreover, the first feature is “above”, “above” and “above” the second feature may be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature is "below", "below", and "below" the second feature may be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontal than the second feature.
参见图1至图3,本发明提供了一种无芯基板封装方法。该无芯基板封装方法用于对待封装的基板100进行封装处理,以使基板100形成无芯基板。本发明的无芯基板封装方法可以防止药水渗入无芯基板,保证无芯基板的性能和使用寿命,并在一定程度上提高产品良率和成品相关电性能,保证PCB板的成型质量。Referring to FIGS. 1 to 3, the present invention provides a coreless substrate packaging method. The coreless substrate packaging method is used to perform a packaging process on the substrate 100 to be packaged, so that the substrate 100 forms a coreless substrate. The coreless substrate packaging method of the present invention can prevent the liquid medicine from infiltrating into the coreless substrate, ensure the performance and service life of the coreless substrate, improve the product yield and product-related electrical performance to a certain extent, and ensure the molding quality of the PCB board.
在一实施例中,无芯基板封装方法包括如下步骤:In an embodiment, the coreless substrate packaging method includes the following steps:
对基板100进行贴膜;Filming the substrate 100;
对基板100进行曝光;Expose the substrate 100;
对基板100的金属层120进行刻蚀开槽,以使金属层120凹陷,并形成凹槽130;The metal layer 120 of the substrate 100 is etched and grooved, so that the metal layer 120 is recessed, and a groove 130 is formed;
将填充件140压合于基板100,以使填充件140对凹槽130进行填充;Pressing the filler 140 to the substrate 100, so that the filler 140 fills the groove 130;
对基板100进行层压、电镀、加工,以形成封装基板100。The substrate 100 is laminated, plated, and processed to form the package substrate 100.
可以理解的,基板100包括基材110以及金属层120,金属层120位于基材110的上方。通常金属层120为铜。It can be understood that the substrate 100 includes a base material 110 and a metal layer 120, and the metal layer 120 is located above the base material 110. Generally, the metal layer 120 is copper.
对基板100进行贴膜处理,即将膜贴在基板100的金属层120。膜能够起到保护作用,以保护基板100上的金属层120,避免基板100在后续刻蚀等过程中金属层120被咬掉。贴膜步骤完成后,需要对贴膜后的基板100进行曝光处理。可以理解的,贴膜后的基板100曝光处理后,可以使膜与基板100紧贴,避免基板100在后续刻蚀等过程中金属层120被咬掉。未被曝光处的金属层120则可被刻蚀掉。The film processing is performed on the substrate 100, that is, the film is applied to the metal layer 120 of the substrate 100. The film can play a protective role to protect the metal layer 120 on the substrate 100 to prevent the metal layer 120 from being bitten off during the subsequent etching and the like. After the filming step is completed, the substrate 100 after filming needs to be exposed. It can be understood that after the substrate 100 after the film is exposed, the film and the substrate 100 can be closely attached to prevent the metal layer 120 from being bitten off during the subsequent etching and the like. The metal layer 120 that is not exposed can be etched away.
然后对基板100的金属层120进行刻蚀开槽,使得金属层120的表面凹陷,该凹陷可以形成凹槽130。此时,凹槽130的底部与金属层120的表面形成高度差。可以理解的,该凹槽130为环形结构。这样,对基板100进行压合操作时,填充件140可以压合在基板100的表面,并可填充至凹槽130中。填充件140可以起密封作用。层压后,凹槽130与填充件140紧密结合形成高度差堤坝隔绝药水的效果,避免后续对基板100进行湿处理的过程中有药水渗入基板100 腐蚀金属层120。可以理解的,湿处理是指基板100在封装过程中过药水等流程,本领域技术人员常称为湿流程,这里不再赘述。Then, the metal layer 120 of the substrate 100 is etched and grooved, so that the surface of the metal layer 120 is recessed, and the recess may form a groove 130. At this time, the bottom of the groove 130 and the surface of the metal layer 120 form a height difference. It can be understood that the groove 130 is an annular structure. In this way, when the substrate 100 is pressed, the filler 140 can be pressed on the surface of the substrate 100 and can be filled into the groove 130. The filler 140 may play a sealing role. After lamination, the groove 130 and the filler 140 are closely combined to form the effect of the height difference dam to isolate the liquid medicine, so as to prevent the liquid medicine from seeping into the substrate 100 and corroding the metal layer 120 during the subsequent wet processing of the substrate 100. It can be understood that wet processing refers to a process in which the substrate 100 passes a potion and the like during the packaging process, and those skilled in the art often refer to it as a wet process, which will not be repeated here.
最后再对压合填充件140的基板100进行层压、电镀、加工等一系列的处理,以使基板100形成无芯基板。值得说明的是,对压合填充件140的基板100进行层压、电镀、加工等一系列的处理的步骤为现有技术,在此不一一赘述。也就是说,本发明的无芯基板封装方法是在现有无芯基板封装流程的基础上,对基板100刻蚀出凹槽130,采用填充件140对凹槽130进行压合处理。Finally, a series of processes such as lamination, electroplating, and processing are performed on the substrate 100 to which the filler 140 is pressed, so that the substrate 100 forms a coreless substrate. It is worth noting that the steps of performing a series of processes such as lamination, electroplating, and processing on the substrate 100 of the pressure-filling member 140 are prior art, and are not repeated here. That is to say, the coreless substrate packaging method of the present invention is based on the existing coreless substrate packaging process, the substrate 130 is etched into the groove 130, and the filler 140 is used to press-fit the groove 130.
本发明的无芯基板封装方法对基板100进行刻蚀开槽,并通过填充件140对刻蚀开槽后形成的凹槽130进行填充,填充件140与凹槽130形成堤坝结构隔绝药水。有效的解决目前药水渗入铜面线路导致的咬蚀或者腐蚀问题。这样可以防止药水渗入无芯基板,保证无芯基板的性能和使用寿命,并在一定程度上提高产品良率和成品相关电性能,保证PCB板的成型质量。The coreless substrate packaging method of the present invention performs etching and slotting on the substrate 100, and fills the groove 130 formed after the etching and slotting through the filler 140, and the filler 140 and the groove 130 form a dam structure to isolate the potion. Effectively solve the problem of biting or corrosion caused by the current infiltration of the drug solution into the copper surface line. This can prevent the liquid medicine from penetrating into the coreless substrate, ensure the performance and service life of the coreless substrate, and improve the product yield and product-related electrical properties to a certain extent, and ensure the molding quality of the PCB board.
在一实施例中,凹槽130位于基板100的边缘或与基板100边缘存在预设间距。也就是说,该凹槽130可以为板边槽,即凹槽130位于基板100的边缘,该凹槽130与基板100的侧边区域连通,如图2所示。这样可以便于后期形成的电路层结构从基材110上剥离,并得到成品。当然,在本发明的其他实施方式中,该凹槽130也可以与基板100的边缘存在一定的间距。In one embodiment, the groove 130 is located at the edge of the substrate 100 or has a predetermined distance from the edge of the substrate 100. That is to say, the groove 130 may be a board edge groove, that is, the groove 130 is located at the edge of the substrate 100, and the groove 130 communicates with the side area of the substrate 100, as shown in FIG. 2. In this way, the circuit layer structure formed later can be easily peeled off from the substrate 110 and the finished product can be obtained. Of course, in other embodiments of the present invention, the groove 130 may also have a certain distance from the edge of the substrate 100.
值得说明的是,无论凹槽130位于基板100的边缘还是与基板100的边缘存在预设间距,填充件140对凹槽130进行填充后,都可以使金属层120与填充件140进行紧密结合,以保证基板100的密封性能,避免基板100在湿处理过程中有药水渗入基板100,进而避免药水对基板100的金属层120咬蚀或者腐蚀,保证无芯基板的性能和使用寿命,并在一定程度上提高产品良率和成品相关电性能,保证PCB板的成型质量。It is worth noting that no matter whether the groove 130 is located at the edge of the substrate 100 or there is a preset distance from the edge of the substrate 100, after the filler 140 fills the groove 130, the metal layer 120 and the filler 140 can be closely combined, In order to ensure the sealing performance of the substrate 100, to avoid the penetration of the chemical liquid into the substrate 100 during the wet processing of the substrate 100, and thus to prevent the chemical liquid from biting or corroding the metal layer 120 of the substrate 100, to ensure the performance and service life of the coreless substrate, and To a certain extent, improve the product yield and the relevant electrical properties of the finished product to ensure the molding quality of the PCB board.
在一实施例中,凹槽130的深度小于金属层120的厚度。也就是说,基板100在刻蚀过程中,凹槽130的底部会残留金属层120。这样可以便于后期形成的电路层结构从基材110上剥离,并得到成品。当填充件140填充到凹槽130后,凹槽130可以与填充件140紧密的结合,保证密封效果,避免药水渗入。In one embodiment, the depth of the groove 130 is less than the thickness of the metal layer 120. That is to say, during the etching process of the substrate 100, the metal layer 120 remains on the bottom of the groove 130. In this way, the circuit layer structure formed later can be easily peeled off from the substrate 110 and the finished product can be obtained. After the filling member 140 is filled into the groove 130, the groove 130 can be tightly combined with the filling member 140 to ensure the sealing effect and avoid the penetration of the medicine.
进一步地,凹槽130的深度为金属层120厚度的1/3~4/5。上述凹槽130的深度范围既可以便于后期形成的电路层结构从基材110上剥离,还能够保证填充件140填充后的密封性能。Further, the depth of the groove 130 is 1/3˜4/5 of the thickness of the metal layer 120. The depth range of the above-mentioned groove 130 can not only facilitate the peeling of the circuit layer structure formed later from the substrate 110, but also ensure the sealing performance of the filling member 140 after filling.
当然,在本发明的其他实施方式中,凹槽130的深度也可等于金属层120的厚度。也就是说,基板100上开设凹槽130后,凹槽130的底部露出基材110,没有金属层120。填充件140压合在基板100后,填充件140可以与基材110紧密结合,保证密封效果。Of course, in other embodiments of the present invention, the depth of the groove 130 may also be equal to the thickness of the metal layer 120. That is to say, after the groove 130 is formed on the substrate 100, the bottom of the groove 130 exposes the substrate 110 without the metal layer 120. After the filler 140 is pressed against the substrate 100, the filler 140 can be tightly combined with the base material 110 to ensure the sealing effect.
在一实施例中,填充件140为热塑性材料。这样可以保证填充件140在压合时流入凹槽130进行填充。进一步地,填充件140为PP(聚丙烯,Polypropylene)半固化片。压合时,通过PP半固化片填充刻蚀处理的凹槽130,达到PP+金属层120形成堤坝隔绝的结合效果,从而防止药水渗入。In one embodiment, the filler 140 is a thermoplastic material. In this way, it can be ensured that the filler 140 flows into the groove 130 to be filled when being pressed. Further, the filler 140 is a PP (Polypropylene) prepreg. During pressing, the etched groove 130 is filled with PP prepreg to achieve the combined effect of the PP+ metal layer 120 forming a dam isolation, thereby preventing the penetration of the drug solution.
参见图1和图4,在一实施例中,基板100具有第一区域121以及第二区域122,第一区域121位于第二区域122的内侧,对基板100进行曝光的步骤还包括:Referring to FIGS. 1 and 4, in an embodiment, the substrate 100 has a first area 121 and a second area 122. The first area 121 is located inside the second area 122. The step of exposing the substrate 100 further includes:
管控基板100的曝光区域;Control the exposure area of the substrate 100;
对第一区域121曝光,第二区域122不曝光,使基板100形成曝光留边。The first area 121 is exposed, and the second area 122 is not exposed, so that the substrate 100 is exposed to a margin.
可以理解的,基板100的第一区域121是指基板100的中部区域,基板100的第二区域122是指基板100的边缘区域。对基板100的第一区域121进行曝光,可以是基板100第一区域121中的金属层120与膜紧贴。由于基板100的第二区域122不曝光,可以形成曝光留边,方便对金属层120进行刻蚀操作。具体的,当对基板100进行刻蚀处理时,基板100第一区域121中的金属层120不会被刻蚀掉,而第二区域122中的金属层120会被刻蚀掉。此时,被刻蚀掉的金属层120相对于未被刻蚀的金属层120凹陷,以形成凹槽130。形成凹槽130后,填充件140可以填充到凹槽130中,以使填充件140与金属层120形成堤坝结构,保证密封效果,避免药水渗入。It can be understood that the first area 121 of the substrate 100 refers to the middle area of the substrate 100, and the second area 122 of the substrate 100 refers to the edge area of the substrate 100. The first region 121 of the substrate 100 is exposed, and the metal layer 120 in the first region 121 of the substrate 100 may be in close contact with the film. Since the second region 122 of the substrate 100 is not exposed, an exposure margin can be formed to facilitate etching of the metal layer 120. Specifically, when the substrate 100 is etched, the metal layer 120 in the first region 121 of the substrate 100 will not be etched away, and the metal layer 120 in the second region 122 will be etched away. At this time, the etched metal layer 120 is recessed relative to the unetched metal layer 120 to form the groove 130. After the groove 130 is formed, the filler 140 may be filled into the groove 130, so that the filler 140 and the metal layer 120 form a dam structure to ensure the sealing effect and prevent the penetration of the medicine solution.
进一步地,第二区域122的宽度为1.5mm~3.5mm。也就是说,凹槽130到基板100边缘的宽度为1.5mm~3.5mm。即在图4中,凹槽130沿左右方向的宽 度为1.5mm~3.5mm。较佳地,凹槽130的宽度为2.5mm。Further, the width of the second region 122 is 1.5 mm to 3.5 mm. That is, the width of the groove 130 to the edge of the substrate 100 is 1.5 mm to 3.5 mm. That is, in Fig. 4, the width of the groove 130 in the left-right direction is 1.5 mm to 3.5 mm. Preferably, the width of the groove 130 is 2.5 mm.
参见图1,在一实施例中,在对基板100进行开槽之前,无芯基板封装方法还包括如下步骤:Referring to FIG. 1, in an embodiment, before slotting the substrate 100, the coreless substrate packaging method further includes the following steps:
在对基板100进行贴膜之前,对基板100进行第一次前处理。Before filming the substrate 100, the substrate 100 is subjected to the first pretreatment.
可以理解的,对基板100进行第一次前处理,即对基板100进行第一次清洗。这样,可以保证基板100清洁,便于贴膜。示例性地,基板100在第一次清洗时只进行酸洗,不过微蚀。酸洗为清洁基板100的表面,利于贴膜,避免制作时杂质贴附基板100的有效区导致金属层120凹陷。It can be understood that the substrate 100 is subjected to the first pretreatment, that is, the substrate 100 is cleaned for the first time. In this way, the substrate 100 can be ensured to be clean and convenient for film sticking. Exemplarily, the substrate 100 is only pickled during the first cleaning, but not slightly etched. Pickling is to clean the surface of the substrate 100, which is helpful for film sticking, so as to prevent impurities from attaching to the effective area of the substrate 100 during manufacturing and causing the metal layer 120 to sag.
在一实施例中,无芯基板封装方法还包括:In an embodiment, the coreless substrate packaging method further includes:
对基板100进行开槽之后,对基板100进行第二次前处理。After the substrate 100 is grooved, the substrate 100 is pre-processed a second time.
可以理解的,对基板100进行第二次前处理,即对基板100进行第二次清洗。这样可以清洁基板100边缘的脏污,避免层压后异物导致金属层120凹陷。It can be understood that the substrate 100 is subjected to the second pretreatment, that is, the substrate 100 is washed for the second time. In this way, the dirt on the edge of the substrate 100 can be cleaned, and the metal layer 120 can be dented due to foreign matter after lamination.
本发明的无芯基板100封装方法可以对基板100刻蚀操作,这样,层压时填充件140对凹槽130进行填充,利用填充件140+金属层120形成堤坝的特点,从而达到防止药水渗入的制作方案。值得说明的是,该方法在目前制作无芯基板流程的基础上,仅增加光成像刻蚀出基板100上的凹槽130的结构,可以使用现有的设备,无需增添新的设备投资。并且,采用无芯基板封装方法制作无芯基板,可以在一定程度上提高产品良率和成品相关电性能。The packaging method of the coreless substrate 100 of the present invention can etch the substrate 100. In this way, the filling member 140 fills the groove 130 during lamination, and the filling member 140+metal layer 120 is used to form a dam, thereby preventing the penetration of the drug solution Production plan. It is worth noting that, on the basis of the current process of manufacturing coreless substrates, this method only adds the structure of photo-etching and etching the grooves 130 on the substrate 100, and can use existing equipment without adding new equipment investment. In addition, the use of a coreless substrate packaging method to produce a coreless substrate can improve product yield and product-related electrical performance to a certain extent.
本发明还提供一种无芯基板,无芯基板采用上述任一实施例中的无芯基板封装方法加工而成。The invention also provides a coreless substrate. The coreless substrate is processed by the coreless substrate packaging method in any of the above embodiments.
由于无芯基板采用该无芯基板封装方法加工而成,避免了湿流程时药水渗透进入基板100内导致腐蚀或咬蚀铜面线路的问题,保证无芯基板的性能和使用寿命,并在一定程度上提高产品良率和成品相关电性能,保证PCB板的成型质量。Because the coreless substrate is processed by the coreless substrate packaging method, the problem of corrosion or biting of the copper surface circuit caused by the penetration of the chemical liquid into the substrate 100 during the wet process is avoided, and the performance and service life of the coreless substrate are guaranteed. To a certain extent, improve the product yield and the relevant electrical properties of the finished product to ensure the molding quality of the PCB board.
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书的记载范围。The technical features of the above-mentioned embodiments can be arbitrarily combined. To simplify the description, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, All should be considered as the scope of the description.
以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above examples only express several implementations of the present invention, and their descriptions are more specific and detailed, but they should not be construed as limiting the patent scope of the present invention. It should be noted that, for a person of ordinary skill in the art, without departing from the concept of the present invention, a number of modifications and improvements can also be made, which all fall within the protection scope of the present invention. Therefore, the protection scope of the invention patent shall be subject to the appended claims.

Claims (10)

  1. 一种无芯基板封装方法,其特征在于,包括如下步骤:A coreless substrate packaging method, characterized in that it includes the following steps:
    对所述基板进行贴膜;Filming the substrate;
    对所述基板进行曝光;Expose the substrate;
    对所述基板的金属层进行刻蚀开槽,以使所述金属层凹陷,并形成凹槽;Etching and slotting the metal layer of the substrate to recess the metal layer and form a groove;
    将填充件压合于所述基板,以使所述填充件对所述凹槽进行填充;Pressing the filler to the substrate, so that the filler fills the groove;
    对所述基板进行层压、电镀、加工,以形成封装基板。Laminating, plating, and processing the substrate to form a package substrate.
  2. 根据权利要求1所述的无芯基板封装方法,其特征在于,所述凹槽位于所述基板的边缘或与所述基板边缘存在预设间距。The method for packaging a coreless substrate according to claim 1, wherein the groove is located at an edge of the substrate or at a predetermined distance from the edge of the substrate.
  3. 根据权利要求1所述的无芯基板封装方法,其特征在于,所述凹槽的深度小于所述金属层的厚度。The coreless substrate packaging method of claim 1, wherein the depth of the groove is smaller than the thickness of the metal layer.
  4. 根据权利要求2所述的无芯基板封装方法,其特征在于,所述凹槽的深度为所述金属层厚度的1/3~4/5。The method for packaging a coreless substrate according to claim 2, wherein the depth of the groove is 1/3 to 4/5 of the thickness of the metal layer.
  5. 根据权利要求1至4任一项所述的无芯基板封装方法,其特征在于,所述填充件为热塑性材料。The coreless substrate packaging method according to any one of claims 1 to 4, wherein the filler is a thermoplastic material.
  6. 根据权利要求5所述的无芯基板封装方法,其特征在于,所述填充件为PP半固化片。The coreless substrate packaging method according to claim 5, wherein the filler is a PP prepreg.
  7. 根据权利要求1至4任一项所述的无芯基板封装方法,其特征在于,所述基板具有所述第一区域以及第二区域,所述第一区域位于所述第二区域的内侧,对所述基板进行曝光的步骤还包括:The coreless substrate packaging method according to any one of claims 1 to 4, wherein the substrate has the first region and a second region, the first region is located inside the second region, The step of exposing the substrate further includes:
    管控所述基板的曝光区域;Control the exposure area of the substrate;
    对所述第一区域曝光,所述第二区域不曝光,使所述基板形成曝光留边。The first area is exposed, and the second area is not exposed, so that the substrate is exposed to a margin.
  8. 根据权利要求7所述的无芯基板封装方法,其特征在于,所述第二区域的宽度为1.5mm~3.5mm。The coreless substrate packaging method according to claim 7, wherein the width of the second region is 1.5 mm to 3.5 mm.
  9. 根据权利要求1至4任一项所述的无芯基板封装方法,其特征在于,所述无芯基板封装方法还包括如下步骤:The coreless substrate packaging method according to any one of claims 1 to 4, wherein the coreless substrate packaging method further comprises the following steps:
    在对所述基板进行贴膜之前,对基板进行第一次前处理;Before filming the substrate, perform the first pretreatment on the substrate;
    对所述基板进行开槽之后,对所述基板进行第二次前处理。After grooving the substrate, the substrate is pre-treated a second time.
  10. 一种无芯基板,其特征在于,所述无芯基板采用如权利要求1至9任一项所述的无芯基板封装方法加工而成。A coreless substrate, characterized in that the coreless substrate is processed by the coreless substrate packaging method according to any one of claims 1 to 9.
PCT/CN2019/099315 2018-12-28 2019-08-05 Coreless substrate and package method therefor WO2020134091A1 (en)

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Publication number Priority date Publication date Assignee Title
CN109743840B (en) * 2018-12-28 2021-05-25 广州兴森快捷电路科技有限公司 Coreless substrate and packaging method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002134908A (en) * 2000-10-30 2002-05-10 Ibiden Co Ltd Manufacturing method of printed board
CN101605430A (en) * 2009-07-16 2009-12-16 东莞康源电子有限公司 The compression method of layer gasket of rigid-flexible product
CN104582287A (en) * 2014-12-31 2015-04-29 广州兴森快捷电路科技有限公司 Film removing method for leadless gilt plate
CN108401382A (en) * 2018-01-23 2018-08-14 广州兴森快捷电路科技有限公司 Rigid-flex combined board and preparation method thereof
CN108811303A (en) * 2018-06-13 2018-11-13 广州兴森快捷电路科技有限公司 Package substrate and its processing method
CN109743840A (en) * 2018-12-28 2019-05-10 广州兴森快捷电路科技有限公司 Coreless substrate and its packaging method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138869A (en) * 2009-12-28 2011-07-14 Ngk Spark Plug Co Ltd Method of manufacturing multilayer wiring substrate, and multilayer wiring substrate
JP2011199077A (en) * 2010-03-19 2011-10-06 Ngk Spark Plug Co Ltd Method of manufacturing multilayer wiring board
JP5606268B2 (en) * 2010-10-27 2014-10-15 日本特殊陶業株式会社 Manufacturing method of multilayer wiring board
TWI571994B (en) * 2015-06-30 2017-02-21 旭德科技股份有限公司 Package substrate and manufacturing method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002134908A (en) * 2000-10-30 2002-05-10 Ibiden Co Ltd Manufacturing method of printed board
CN101605430A (en) * 2009-07-16 2009-12-16 东莞康源电子有限公司 The compression method of layer gasket of rigid-flexible product
CN104582287A (en) * 2014-12-31 2015-04-29 广州兴森快捷电路科技有限公司 Film removing method for leadless gilt plate
CN108401382A (en) * 2018-01-23 2018-08-14 广州兴森快捷电路科技有限公司 Rigid-flex combined board and preparation method thereof
CN108811303A (en) * 2018-06-13 2018-11-13 广州兴森快捷电路科技有限公司 Package substrate and its processing method
CN109743840A (en) * 2018-12-28 2019-05-10 广州兴森快捷电路科技有限公司 Coreless substrate and its packaging method

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