WO2020122310A1 - Dispositif de verrouillage pour fournir un produit chimique, et appareil d'alimentation chimique automatique le comprenant - Google Patents

Dispositif de verrouillage pour fournir un produit chimique, et appareil d'alimentation chimique automatique le comprenant Download PDF

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Publication number
WO2020122310A1
WO2020122310A1 PCT/KR2019/000814 KR2019000814W WO2020122310A1 WO 2020122310 A1 WO2020122310 A1 WO 2020122310A1 KR 2019000814 W KR2019000814 W KR 2019000814W WO 2020122310 A1 WO2020122310 A1 WO 2020122310A1
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WO
WIPO (PCT)
Prior art keywords
locking
chemical
unit
link
locking device
Prior art date
Application number
PCT/KR2019/000814
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English (en)
Korean (ko)
Inventor
송용익
윤병춘
조제동
채희봉
최진규
김정곤
Original Assignee
(주)에스티아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)에스티아이 filed Critical (주)에스티아이
Priority to SG11202105251RA priority Critical patent/SG11202105251RA/en
Priority to CN201980081420.8A priority patent/CN113169100B/zh
Publication of WO2020122310A1 publication Critical patent/WO2020122310A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Definitions

  • the present invention relates to a locking device for chemical supply and a chemical automatic supply device having the same, and more specifically, to prevent a chemical from leaking, and a locking device for chemical supply capable of simultaneously implementing automatic locking and manual locking, and It relates to a chemical automatic supply device having this.
  • the chemical transports chemicals from a chemical tank of a tank lorry stopped outside the building to a chemical storage tank installed inside the building, and then transfers the chemical storage tank to a chamber where a unit process is performed.
  • a chemical hose for supplying chemical and a nitrogen hose for supplying nitrogen are connected to the tank lorry, and a male connector for chemical and a male connector for nitrogen are provided at the ends of the chemical hose and nitrogen hose. Each is coupled, and a cap for closing the open end of each male connector is covered with each.
  • the female storage tank side is provided with a female connector for chemical and a female connector for nitrogen for inserting the male connector of the chemical hose and the male connector of the nitrogen hose, respectively.
  • the chemical female connector and the nitrogen female connector are each covered with a cap for sealing the open end.
  • a chemical relay means called an automatic clean quick coupler unit (ACQC unit) is provided between the tank lorry and the chemical storage tank.
  • ACQC unit automatic clean quick coupler unit
  • the chemical storage tank is usually provided inside the building, and the ACQC unit serves as a relay between the chemical tank of the tank lorry outside the building and the chemical storage tank inside the building.
  • the chemical hose and the nitrogen hose are respectively seated in the mounting portion, and then the chemical hose and the nitrogen hose are linearly moved by the first transportation means and the second transportation means to be provided in the ACQC unit. Connect the male connector for the chemical hose and the nitrogen hose to the female connector for the chemical and the female connector for the nitrogen, respectively.
  • the male connector for the chemical and the female connector are connected, and the male connector for the nitrogen and the female connector are connected, supplying nitrogen at a constant pressure to the chemical tank of the tank lorry through the ACQC unit and discharging the chemical at the pressure of the supplied nitrogen. It is stored in the chemical storage tank through the chemical hose.
  • a locking unit is provided to maintain a state in which the male connector for chemical and the male connector for nitrogen are respectively coupled to the female connector for chemical and the female connector for nitrogen.
  • the locking unit is equipped with an eccentric cam to grip the male connector.
  • the eccentric cam is provided with a pair on one side of the female connector and the other side. Since two cylinders must be provided to drive the pair of eccentric cams, a lot of space for installing the cylinder is required.
  • Korea Patent Registration No. 10-1779493 is provided with a fixing unit to maintain a state in which the male connector for the chemical and the female connector for the chemical are combined.
  • the fixing unit includes a first catching member, a first catching member driving part, a second catching member, and a second catching member driving part operating in the horizontal direction and the vertical direction.
  • the second locking member is located at the lower portion of the male connector for the chemical, and when the remaining chemical is dropped due to undrying or leakage, the second locking member and the second locking member are located at the coupling portion of the male connector and the female connector. Damage caused by corrosion of the driving unit is generated.
  • first locking member is separated from the fixed one side of the first locking member driving unit
  • second locking member is also separated from the fixed one side of the second locking member driving unit, a male connector for chemical or a female connector cap for chemical
  • Korean Utility Model Registration No. 20-0201657 shows a manually operated locking unit.
  • a manually operated locking unit is additionally provided, and the manually operated locking unit is provided.
  • a plurality of fixing pins are used to fix the position of the lever and the like in order to prevent an accident that may occur by deviating from the correct position at each of the locked position and the unlocked position. There is a problem that the operation becomes cumbersome.
  • the present invention has been devised to solve the above-mentioned problems, and it is intended to provide a locking device for chemical supply capable of selecting an automatic mode that is locked by driving of a driving unit and a manual mode so that an operator is manually locked. have.
  • Another object of the present invention is to provide a locking device for chemical supply that can simplify a structure by simultaneously locking or unlocking two locking parts using one driving part.
  • Another object of the present invention is to provide a locking device for supplying a chemical that can prevent damage to the driving unit because the driving unit is not affected even when the dropping of the chemical occurs at the connecting portion of the male connector and the female connector.
  • Another object of the present invention is to provide a locking device for chemical supply, which allows an operator to easily and manually operate when a driving unit fails.
  • Locking device for the chemical supply of the present invention for achieving the above object, the driving unit for providing a driving force; A first locking unit 330 and a second locking unit 340, each of which is changed in position between a locked position at which the position of the lock object is fixed and a unlocked position to enable movement of the lock object; And at least one link member for transmitting the driving force of the driving unit 310 to the first locking unit 330 and the second locking unit 340.
  • the first locking portion 330 and the second locking portion 340 are provided to face each other based on a vertical direction, and locking can be achieved by contacting both sides of the locking object.
  • a first insertion groove which is formed in a direction perpendicular to the first hinge shaft 334c and the first hinge shaft 334c which is hinged to the second link member 322 and into which the first connection rod 332 is inserted.
  • a third link formed with a second hinge groove which is hinged to the third link member 323 and a second insertion groove through which the second connection rod 342 is inserted is formed in a direction perpendicular to the second hinge axis.
  • a second coupling member 345 is provided to cover the upper portion of the second insertion groove into which the second connection rod 342 is inserted to prevent the second connection rod 342 from being detached from the second insertion groove. Can be.
  • a first link pin coupling portion 333 having a larger diameter than the first connecting rod 332 is integrally formed;
  • a second link pin coupling portion 343 having a larger diameter than the second connection rod 342 is integrally formed at an end of the second connection rod 342;
  • the first link pin coupling portion 333 is caught in the first coupling member 335 and is prevented from falling through the first insertion groove 334b;
  • the second link pin coupling portion 343 may be caught by the second coupling member 345 and thus prevented from falling out of the second insertion groove.
  • the at least one link member may be formed of a second link member 322 and a third link member 323, which are rotated by linear motion of the first link pin 324.
  • Each of the first locking portion 330 and the second locking portion 340 has a fixed position at one end contacting the lock object as a rotation center; The first locking part 330 and the second locking part 340 are rotated around the fixed position by the rotational movement of the second link member 322 and the third link member 323 to lock the lock. Changes can be made between the position and the unlocked position.
  • first link member 321 that is linearly moved in the horizontal direction by the driving unit;
  • the linear motion of the first link pin 324 is made by the linear motion of the first link member 321, and the second link member ( 322) and the third link member 323 may be rotated.
  • a slot 321a having a length in a direction inclined with respect to the horizontal direction is formed in the first link member 321, and the first link pin 324 moves between one side and the other side in the slot 321a.
  • the first link pin 324 may be located in the straight portion 321b.
  • the second link member 322 and the third link member 323 may be rotated symmetrically with respect to each other based on the vertical direction.
  • One end of the second link member 322 and the third link member 323 is hinged by the first link pin 324;
  • the second link member 322 and the third link member 323 may be rotated symmetrically with respect to each other about the first link pin 324. have.
  • the linear motion of the first link pin 324 may be guided by a guide portion 350 having a length in the vertical direction.
  • the driving part is made of a rotating cylinder; A first link member 321-3 rotated by a driving hinge axis as a rotational center by driving of the driving unit;
  • the first link pin 324 is coupled to the other end of the first link member 321-3;
  • the first link pin 324 may be linearly moved in the vertical direction along the guide portion 350-3 by rotation of the first link member 321-3.
  • the first link pin 324 is coupled to the guide connecting members (351-1,351-2); When the driving unit is driven, the guide connecting members 351-1 and 351-2 may be moved up and down while being guided by the cylinder guides 312-1 and 312-2 having vertical lengths.
  • the drive unit is made of a cylinder that allows the linear motion to be made by the pressure of the fluid;
  • the driving unit includes an automatic mode for linearly moving the first link pin 324 by driving the cylinder, and a manual mode for manually moving the first link pin 324 when the driving force is not applied. It works as either;
  • a locking member 319-2 is provided to allow the fluid inside the cylinder to be exhausted to change the position of the first locking portion 330 and the second locking portion 340 manually. Can be.
  • the lock member 319-2 is made of a lock nut; When the lock nut is loosened, the fluid inside the cylinder is exhausted to the outside to enable operation of the manual mode. When the lock nut is locked, the fluid inside the cylinder is not exhausted to the outside, so that the first link pin 324 descends. It may not be to maintain a stationary state at a constant position.
  • the driving unit operates in one of an automatic mode in which the first link pin 324 is linearly moved by a driving force and a manual mode in which the first link pin 324 can be manually moved when the driving force is not applied. Is done; Handles may be formed on the guide connecting members 351-1 and 351-2 so as to linearly move the first link pin 324 to operate in the manual mode.
  • the driving unit operates in one of an automatic mode in which the first link pin 324 is linearly moved by a driving force and a manual mode in which the first link pin 324 can be manually moved when the driving force is not applied. Is done;
  • a handle may be formed on the at least one link member so as to linearly move the first link pin 324.
  • the control unit allows the chemical to flow through the male connector for the chemical and the female connector for the chemical. Can be controlled.
  • the control unit may control the lock object to be moved.
  • the first locking unit 330 and the first locking unit 330 is operated in an automatic mode in which the positions of the first locking unit 330 and the second locking unit 340 are changed by the driving force, or when the driving force is not applied. 2 It may be to operate in a manual mode to manually change the position of the locking portion 340.
  • the driving part may be formed of a cylinder that changes the position of the first locking part 330 and the second locking part 340 by the pressure of the fluid.
  • a drive connecting member in which linear motion is made by driving of the drive unit The first fluid supply unit 313 is supplied with the fluid so that the linear motion of the drive connecting member is in one direction, and the second fluid is supplied with the fluid so that the linear motion of the drive connecting member is in the other direction It may include a supply unit 314 and a neutral unit 312 so that the passive mode is realized by exhausting the fluid even when the driving connecting member moves in either direction of the linear motion.
  • the first fluid supply part 313 and the second fluid supply part 314 are integrally provided on both sides of the neutral part 312 between them;
  • a pair of springs 315a and 315b may be provided at side portions of the first fluid supply unit 313 and the second fluid supply unit 314 so that elastic forces are applied in opposite directions.
  • the neutral part 312 and the first fluid supply part 313 and the second fluid supply part 314 are integrally moved by the application of electricity, so that of the first fluid supply part 313 and the second fluid supply part 314 Any one may be connected to the first connector 316 and the second connector 317 where the fluid is introduced and discharged to move the driving connector 311 in one or the other direction.
  • the automatic chemical supply device of the present invention includes a locking device for supplying chemicals according to any one of claims 1 to 27.
  • the locking device for the chemical supply of the present invention at least one driving unit for providing a driving force; It includes; at least one locking portion, each of which is changed between the lock position where the position of the lock object is fixed and the unlocking position to enable the movement of the lock object; includes, so that the position of the locking portion is changed by the driving force It consists of operating in an automatic mode, or in a manual mode in which the position of the locking portion is manually changed when the driving force is not applied.
  • a mode selector may be provided to select the automatic mode and the manual mode.
  • the automatic mode is locked by the driving of the driving unit and the manual mode is manually selected so that the operator is manually locked, it is possible to supply the chemical even when the driving unit is broken.
  • the structure can be simplified by allowing two locking parts to be locked or unlocked simultaneously using one driving part.
  • the operator can easily manually operate it, thereby improving the efficiency of work.
  • FIG. 1 is a cross-sectional view showing a chemical automatic supply device equipped with a locking device for chemical supply according to the present invention.
  • FIG. 2 is a view showing a state in which the female connector cap for chemicals is inserted into the insertion groove of the female connector for chemicals.
  • FIG. 3 is a view showing a state in which the female connector cap for chemicals is removed from the insertion groove of the female connector for chemicals.
  • FIG. 4 is a perspective view showing a locking device for chemical supply according to a first embodiment of the present invention.
  • FIG. 5 is a perspective view showing a guide unit, a second and third link member, and first and second locking units in a locking device for chemical supply according to a first embodiment of the present invention.
  • FIG. 6 is a perspective view showing a state in which some components of the second link member and the first locking unit are disassembled in the locking device for chemical supply according to the first embodiment of the present invention.
  • FIG. 7 is a front view showing a case where the locking device for the chemical supply according to the first embodiment of the present invention is in the locked position.
  • FIG 8 is a front view showing a case in which the locking device for chemical supply according to the first embodiment of the present invention is in the unlocked position.
  • FIG. 9 is a view showing the configuration and operation state of the driving unit in the locking device for chemical supply according to the first embodiment of the present invention.
  • FIG. 10 is a perspective view showing a locking device for chemical supply according to a second embodiment of the present invention.
  • FIG 11 is a front view showing a case where the locking device for chemical supply according to the second embodiment of the present invention is in the unlocked position.
  • FIG. 12 is a front view showing a case where the locking device for supplying chemicals according to the second embodiment of the present invention is in a locked position.
  • FIG. 13 is a perspective view showing a locking device for chemical supply according to a third embodiment of the present invention.
  • FIG 14 is a front view showing a case in which the locking device for chemical supply according to the third embodiment of the present invention is in the unlocked position.
  • 15 is a front view showing a case where the locking device for the chemical supply according to the third embodiment of the present invention is in the locked position.
  • FIG. 16 is a perspective view showing a locking device for chemical supply according to a fourth embodiment of the present invention.
  • 17 is a front view showing a case where the locking device for chemical supply according to the fourth embodiment of the present invention is in the unlocked position.
  • FIG. 18 is a front view showing a case where the locking device for the chemical supply according to the fourth embodiment of the present invention is in the locked position.
  • female connector cap detachable unit 191 Chemical cap fixing part
  • housing body 210 chemical female connector
  • 321b straight part 321c,351-1a: handle
  • first link pin 330 first locking portion
  • first locking member 331a,341a contact
  • first link pin coupling portion 334 second link pin
  • first coupling member 340 second locking portion
  • first lock detection sensor 362 second lock detection sensor
  • first unlocking detection sensor 364 second unlocking detection sensor
  • connector guide portion 710 upper housing
  • the locking device for the chemical supply according to the present invention (300,400) is applied to the automatic chemical supply device 100, the female connector for the chemical provided in the housing body 200, 210 and the female connector for nitrogen
  • the direction in which the male connector 510 for the chemical is located is referred to as the rear
  • the direction in which the chemical female connector 210 is located is referred to as the front.
  • the chemical automatic supply device 100 is composed of a transport housing 105, a mounting unit 150, a transport unit 160, a female connector cap detachable unit 190, and a locking device (300,400).
  • a female connector 210 for chemical and a female connector for nitrogen are installed on one side of the housing main body 200 facing the transfer load housing 105.
  • housing body 200 Inside the housing body 200, there are configurations for distributing the chemical supplied through the chemical hose 500 to a chemical storage tank (not shown), or for cleaning the chemical female connector 210 and the nitrogen female connector. It is equipped.
  • the mounting unit 150 may be formed in a pair to mount the chemical hose 500 and the nitrogen hose 600, respectively.
  • the transfer unit 160 is provided inside the transfer unit housing 105, the chemical hose 500 and the nitrogen hose 600 is mounted on the mounting portion 150, the female connector for chemical 210 And nitrogen female connector.
  • the transfer unit 160 may be made of a pair for transferring the chemical hose 500 and the nitrogen hose 600, respectively.
  • the transfer unit 160, the stage 161, the mounting portion 150 is mounted on the upper, and the transfer portion 150 on the stage 161 in the front-rear direction to the chemical hose 500 and Nitrogen hose 600 may be made of a driving unit for transporting the chemical female connector 210 and the nitrogen female connector side.
  • the driving unit is controlled by the control unit.
  • the male connector 510 for chemical is inserted into and coupled to the female connector 210 for chemical, and the nitrogen water
  • the connector is inserted into the female connector for nitrogen and coupled. In this state, the chemical transfer is performed between the chemical tank and the chemical storage tank.
  • the female connector cap detachment unit 190, a chemical female connector 210 provided on the side of the chemical storage tank and a chemical female connector cap 211 for sealing the open ends of the nitrogen female connector and the nitrogen arm This is a configuration for coupling or separating a connector cap (not shown).
  • the female connector cap detachment unit 190 may be formed of a chemical female connector cap detachment unit for detachment of a chemical female connector cap 211, a nitrogen female connector cap detachment unit for removal of a nitrogen female connector cap. .
  • the female connector cap detachable unit 190 for chemicals includes a cap fixing part 191 for chemicals, a front and rear guide 192 for chemicals, a front and rear driving unit for chemicals 193, a vertical guide for chemicals 194, and a vertical driving unit for chemicals. (195).
  • the chemical cap fixing part 191 is for fixing the chemical female connector cap 211 to the chemical female connector cap detachable unit 190.
  • One end of the female connector cap 211 for the chemical is integrally coupled to the cap fixing part 191 for the chemical.
  • the front and rear guide 192 for the chemical has a length in the front-rear direction, and guides the chemical cap fixing part 191 to be transferred back and forth on the front-rear guide 192 for the chemical.
  • the front and rear driving units for chemical 193 may be formed of an air cylinder or a motor, and provide a driving force such that the cap fixing units 191 for the chemical are transferred in the front and rear directions on the front and rear guides 192 for chemicals.
  • the upper and lower guides 194 for chemicals are formed to have a length in the vertical direction to serve as guides, and the upper and lower driving units 195 for chemicals may be formed of an air cylinder or a motor.
  • the cap fixing part 191 for chemicals, the front and rear guides 192 for chemicals, and the front and rear driving parts 193 for chemicals are integrally transferred in the vertical direction by the upper and lower driving parts 195 for chemicals on the upper and lower guides 194 for chemicals.
  • the chemical female connector 210 is provided with an insertion groove 210a along the front-rear direction, and while not transferring the chemical between the chemical tank and the chemical storage tank, the chemical female connector cap 211 as shown in FIG. 2 ) Is inserted into the insertion groove 210a.
  • the chemical cap fixing unit 191 is transferred to the rear, and the female connector cap 211 for chemicals inserted into the insertion groove 210a is shown in FIG. 3. As described above, it is pulled out from the insertion groove 210a.
  • a locking device 300 for chemical supply according to a first embodiment of the present invention will be described with reference to FIGS. 4 to 6.
  • the locking device 300 is provided for fixing the male connector 510 for the chemical and the female connector cap 211 for the chemical, and the locking device 400 for fixing the male connector for nitrogen and the female connector for nitrogen is provided. It may be further provided.
  • the locking device 300 is provided between a driving unit 310 providing a driving force, a locking position at which a position of a lock object is fixed by a driving force of the driving unit 310, and an unlocking position enabling movement of the locking object.
  • the locking device 300 is a first link pin 324 that is linearly moved by the driving unit 310, the second link member 322 is rotated by the linear movement of the first link pin 324 And a third link member 323.
  • the driving unit 310 further includes a first link member 321 that linearly moves in a first direction that is horizontal, and the second link member 322 and the third link member 323 are the first link members. It can be configured such that the rotational movement is made by the linear movement of the 1 link member (321).
  • a handle 321c is formed on the first link member 321 to allow an operator to hold the hand and move the first link member 321 in a manual mode, which will be described later.
  • the driving part 310 may be formed of a motor or a cylinder so that the first link member 321 is linearly moved in the first direction.
  • the cylinder generates a driving force by the pressure of the fluid, and may be a pneumatic cylinder or a hydraulic cylinder.
  • a pneumatic cylinder is shown.
  • the driving part 310 includes a driving connecting member 311 to which the first link member 321 is coupled, and a cylinder guide guiding the driving connecting member 311 to move linearly along the horizontal direction in the first direction ( 312).
  • the cylinder guide 312 is formed long along the horizontal direction, which is the first direction.
  • One side of the drive connecting member 311 is coupled to the first link member 321, and the other side is provided to be movable linearly along the cylinder guide 312.
  • the driving connecting member 311 is linearly moved along the first direction on the cylinder guide 312.
  • the first link member 321 is made of a plate having an upper portion coupled to the driving connecting member 311 using a fastening member (not shown).
  • a slot 321a in which a portion of the plate is cut is formed in the first link member 321.
  • the slot 321a is formed to have a length in a direction inclined with respect to the first direction.
  • the first link pin 324 is moved between one side and the other side in the slot 321a.
  • a straight portion 321b formed in a direction parallel to the first direction is formed at an upper end of the slot 321a.
  • the second link member 322 and the third link member 323 are hinged to one end of the first link pin 324, and the other end of the first link pin 324 is a guide part 350 ), the linear motion in the second direction perpendicular to the guide portion 350 is guided.
  • the second link member 322 and the third link member 323 are provided symmetrically to each other based on the longitudinal direction of the guide portion 350 in the second direction.
  • the second link member 322 and the third link member 323 are links having a predetermined length, and both ends are hinged to each other.
  • the upper end of the second link member 322 and the third link member 323 are hinged together by the first link pin 324, and the second link pin 334 and the third link at the lower end.
  • the pins 344 are hinged to each other, and are inclined so that the gap between the second link member 322 and the third link member 323 gradually increases toward the downward direction from the first link pin 324. have.
  • the second link member 322 and the first locking portion 330 are hinged by a second link pin 334, and the third link member 323 and the second locking portion 340 are third links. It is hinged by a pin 344.
  • the first locking portion 330 and the second locking portion 340 will be described with reference to FIGS. 4 to 6.
  • the first locking portion 330 and the second locking portion 340 are provided to face each other based on the longitudinal direction of the guide portion 350, which is the second direction, so that the male connector 510 for the locking object or The lock is made by contacting one side and the other side of the chemical female connector cap 211, respectively.
  • the first locking portion 330 is composed of a first locking member 331 and a first connecting rod 332, and the second locking portion 340 has a second locking member 341 and a second connecting rod ( 342).
  • the first locking member 331 and the second locking member 341 are installed to be symmetric as the same shape, and the first connecting rod 332 and the second connecting rod 342 can be installed to be symmetric as the same shape. have.
  • the first locking member 331 and the second locking member 341 are made of a cam shape, the outer circumferential surface is a contact portion (331a, 341a) and a portion of the cylinder is cut off a non-contact portion made of a flat shape (331b,341b) ).
  • the first locking member 331 and the second locking member 341 are fixed to be rotatable using a fixing member (not shown) on the rear end face 210b of the chemical female connector 210.
  • first locking member 331 and the second locking member 341 is rotated around each rotation center to release contact between the contact portion 331a and the lock object, and the non-contact portion 331b
  • the non-contacting portion 331b is spaced apart from the object to be locked and is in an unlocked state in which the object to be locked can move.
  • the first locking member 331 so that the front end surfaces 331c and 341c of the first locking member 331 and the second locking member 341 are in close contact with one side of the rear end surface 210b of the chemical female connector 210.
  • the second locking member 341 is coupled to the female connector 210 for the chemical is fixed position.
  • the first locking member 331 and the second locking member 341 are configured to rotate with their respective centers as the center of rotation.
  • the rotation centers of the first locking member 331 and the second locking member 341 may be configured such that the outer circumferential surfaces are the centers of the contact portions 331a and 341a.
  • the first connecting rod 332 and the second connecting rod 342 have a circular cross-section, and the first locking member 331 and the second locking member 341 are coupled to one end.
  • the other end is hinged to the second link member 322 and the third link member 323 so as to be rotatable.
  • the rotation center of the first locking member 331 becomes the entire rotation center of the first locking portion 330 including the first connecting rod 332, and the rotation center of the first locking member 331 is fixed. Location.
  • the rotation center of the second locking member 341 becomes the rotation center of the entire second locking portion 340 including the second connecting rod 342, and the rotation center of the second locking member 341 Is a fixed position.
  • a first link pin coupling portion 333 having a larger diameter than the first connecting rod 332 is formed, and at the end of the second connecting rod 342, the first A second link pin coupling portion 343 having a larger diameter than the two connecting rods 342 is formed.
  • FIG. 6 shows the disassembled configuration of the first locking portion 330 and the second link member 322.
  • the first locking portion 330 may further include a second link pin 334 and a first coupling member 335.
  • a first link pin coupling portion 333 may be formed at an end of the first connection rod 332.
  • a second link pin insertion hole 323a into which the second link pin 334 is inserted is formed at one end of the second link member 322.
  • the second link pin 334 is inserted into the second link pin insertion hole 323a and hinged to the first hinge shaft 334c, and at one end, the first hinge shaft 334c is integrally formed. It is composed of a second link pin body 334a in which the first insertion groove 334b is formed.
  • the first hinge shaft 334c has a cylindrical shape protruding from the second link pin body 334a, and when inserted into the second link pin insertion hole 323a, the second link pin insertion hole 323a ) Since it is rotatable inside, the second link pin 334 functions as a hinge.
  • the first insertion groove 334b is formed in a groove shape with an open top in a direction parallel to the longitudinal direction of the second link member 322 and the first connection rod 332, so that the first connection rod 332 is It is inserted and seated.
  • the central axis along the longitudinal direction of the first insertion groove 334b is formed to be perpendicular to the first hinge axis 334c.
  • a pair of fastening holes 334d are formed on both upper surfaces of the second link pin body 334a with the first insertion groove 334b therebetween.
  • the first coupling member 335 is formed of a plate having a substantially square shape, and a pair of fastening holes 335a is formed. While the first connection rod 332 is inserted into the first insertion groove 334b, the upper portion of the first connection rod 332 and the first insertion groove 334b is covered, and a fastening member (not shown) is attached. When inserted into the fastening hole 335a of the first coupling member 335 and the fastening hole 334d of the second link pin 334, the first connection rod 332 and the second link pin ( 334) is made, it is possible to prevent the separation from the first insertion groove (334b).
  • the first link pin coupling portion 333 when the first connection rod 332 is inserted into the first insertion groove 334b, the first link pin coupling portion 333 includes the first coupling member 335 and the second link pin body 334a. It can be reliably prevented from being locked in the longitudinal direction of the first connection rod 332.
  • the configuration in which the second locking portion 340 and the third link member 323 are connected is the same as the configuration in which the first locking portion 330 and the second link member 322 are connected.
  • the second locking portion 340 further includes a third link pin 344 having the same configuration as the second link pin 334, and a second coupling member 345 having the same configuration as the first coupling member 335. It can contain.
  • a second link pin coupling portion 343 having the same configuration as the first link pin coupling portion 333 may be formed at an end of the second connection rod 342.
  • the third link pin 344 has a first hinge shaft 334c, a second link pin body 334a, a second hinge shaft having the same configuration as the first insertion groove 334b, a third link pin body, a third 2 Insertion grooves are formed.
  • the second hinge shaft of the third link pin 344 is inserted into a third link pin insertion hole formed at one end of the third link member 323, so that the third link member 323 and the third link pin ( 344) are hinged.
  • the second connecting rod 342 covers the upper portion of the second connecting rod 342 and the second inserting groove while being inserted into the second inserting groove, and the second coupling member 345 using a fastening member When the and the third link pin 344 is coupled, it is possible to prevent the second connecting rod 342 from being separated from the second insertion groove 344b.
  • the guide part 350 is guided by the guide rail 352 in a state coupled to the guide rail 352, the guide rail 352 having a predetermined length in the vertical direction, which is the second direction, while being guided by the guide rail 352. It may be made of a guide connecting member 351 moved to.
  • the first link pin 324 is integrally coupled to the guide connecting member 351 so that when the guide connecting member 351 moves in the second direction, the first link pin 324 moves together. .
  • the guide part 350 is fixedly coupled to the frame 110.
  • a plurality of sensors 361, 362, 363, and 364 may be provided to detect when the first locking part 330 and the second locking part 340 are in a locked position and an unlocked position.
  • the plurality of sensors 361, 362, 363, and 364 include a lock detection sensor 361,362 for detecting that the first locking part 330 and the second locking part 340 are in the locked position, the first locking part 330 and the second
  • the locking unit 340 may be formed of unlocking detection sensors 363 and 364 for detecting that the locking position is the unlocking position.
  • the lock detection sensors 361 and 362 may be composed of a first lock detection sensor 361 and a second lock detection sensor 362 provided on both sides of the guide object 350 as an upper side than the position of the lock object. .
  • the unlocking detection sensors 363 and 364 may be formed of a first unlocking detection sensor 363 and a second unlocking detection sensor 364 provided at positions adjacent to the lateral direction of the lock object.
  • first link pin coupling portion 333 and the second link pin coupling portion 343 can be respectively sensed.
  • the first lock detection sensor 361 and the second lock detection sensor 362 may be provided.
  • the first locking portion 330 and the second locking portion 340 are in the unlocked position, the first locking is at a position where the first connecting rod 332 and the second connecting rod 342 can be sensed, respectively.
  • a release detection sensor 363 and a second unlock release detection sensor 364 may be provided.
  • the lock detection sensors 361 and 362 and the unlock release detection sensors 363 and 364 may be provided at other positions in addition to the positions to be configured to sense different parts of the first locking part 330 and the second locking part 340. have.
  • the control unit may control the chemical to flow through the lock object. That is, when the object to be locked is a male connector 510 for a chemical, in the state where the male connector 510 for a chemical is inserted into the female connector 210 for a chemical, the locking sensor 361362 is detected to be in a locked position. When it is controlled, the chemical is supplied through the male connector 510 for the chemical and the female connector 210 for the chemical. When the lock target is the female connector cap 211 for the chemical, the locking sensor 361,362 is detected to be in the locked position while the chemical female connector cap 211 is inserted into the chemical female connector 210. When it is determined, it is determined that the female connector cap 211 for the chemical is normally inserted into the female connector 210 for the chemical, and the next operation may be performed.
  • the control unit may control the lock object to be moved. That is, when the locking object is a male connector 510 for a chemical or a female connector cap 211 for a chemical, the male connector 510 for a chemical or the female connector cap 211 for a chemical becomes a movable state, and thus the chemical
  • the male connector 510 for use and the female connector 210 for the chemical can be fastened and separated, and the female female connector cap 211 for the chemical and the female connector 210 for the chemical can be fastened and separated.
  • the structure can be simplified by allowing two locking parts 330 and 340 to be simultaneously locked or unlocked using one driving part 310.
  • the lower part of the connecting portion of the male connector 510 for the chemical and the female connector 210 for the chemical is not provided with the component 310 constituting the locking device 300, even if the drop of the chemical occurs, the drive part is affected It is possible to prevent damage to the driving unit.
  • an operator can easily manually operate it, thereby improving work efficiency.
  • the driving connecting member 311 is expressed in a state separated from the first link member 321, but the driving connecting member 311 and the first link member 321 are integrally coupled.
  • the driving connecting member 311 In the locked position of FIGS. 4 and 7, the driving connecting member 311 should be expressed in a state that is moved to the left, but is shown in a separated state to clearly express the configuration.
  • the driving connecting member 311 is located on the left side on the cylinder guide 312, and the first link member 321 is also located on the left side because it moves integrally with the driving connecting member 311.
  • the first link pin 324 is located in the straight upper portion 321b of the slot 321a.
  • the first link pin 324 does not descend along the slot 321a by being caught at the lower end of the straight portion 321b.
  • the first link pin 324 is moved upward on the guide rail 352.
  • the first link pin 324 is hinged to the upper ends of the second link member 322 and the third link member 323, and thus, between the second link member 322 and the third link member 323. Is provided to be symmetric about the guide rail 352 at a narrow angle.
  • the non-contacting part 331b of the first locking member 331 and the non-contacting part 341b of the second locking member 341 are positioned downwardly, and the contacting part of the first locking member 331 ( 331a) and the contact portion 341a of the second locking member 341 are respectively in contact with one side and the other side of the lock target, so that the lock target can remain fixed without moving.
  • the first connecting rod 332 of the first locking portion 330 and the second connecting rod 342 of the second locking portion 340 are positioned long along the vertical direction.
  • the first link pin coupling portion 333 is positioned below the first lock detection sensor 361
  • the second link pin coupling portion 343 is located below the second lock detection sensor 362. Will be located.
  • the first lock detection sensor 361 detects the first link pin coupling portion 333, and the second lock detection sensor 362 detects the second link pin coupling portion 343, so that the controller controls the It is determined that the first locking portion 330 and the second locking portion 340 are in the locked position.
  • the driving connecting member 311 is located on the right side on the cylinder guide 312, and the first link member 321 is also integrally moved with the driving connecting member 311, so that it is located on the right side.
  • the first link pin 324 exits from the straight portion 321b and is positioned at the bottom of the slot 321a along the inclined slot 321a. At the same time, the first link pin 324 is moved downward on the guide rail 352.
  • first locking member 331, the first connecting rod 332 and the second link pin 334 rotate clockwise with the fixed center of the first locking member 331 as a rotation center
  • the second locking member 341, the second connecting rod 342 and the third link pin 344 are rotated counterclockwise with the fixed center of the second locking member 341 as a rotation center.
  • the second link member 322 and the third link member 323 rotate in a direction away from each other about the first link pin 324, the second link member 322 and the third link member Between (323) is positioned to be symmetrical about the guide rail 352 at a wide angle.
  • the non-contact portion 331b of the first locking member 331 and the non-contact portion 341b of the second locking member 341 are rotated to face the lock target, the non-contact portions 331b, 341b ) Is spaced from the lock target.
  • the contact portion 331a of the first locking member 331 and the contact portion 341a of the second locking member 341 are rotated so as not to respectively contact one side and the other side of the lock target. Therefore, the lock object is in a state that can be moved or moved.
  • the first connecting rod 332 of the first locking portion 330 is rotated around the first locking member 331 to be positioned above the first unlocking detection sensor 363, and the second locking The second connecting rod 342 of the portion 340 is rotated around the second locking member 341 to be positioned on the upper portion of the second unlocking detection sensor 364.
  • the first unlocking detection sensor 363 detects the first connection rod 332, and the second unlocking detection sensor 364 senses the second connection rod 342, so that the control unit controls the first locking unit. It is determined that the 330 and the second locking portion 340 are in the unlocked position.
  • the driving unit 310 according to the first embodiment of the present invention will be described with reference to FIG. 9.
  • the driving unit 310 is an automatic mode in which the first link pin 324 linearly moves in the vertical direction by the driving force of the driving unit 310, and when the driving force by the driving unit 310 is not applied, the first One link pin 324 may be configured to operate in any one of a manual mode that can be manually moved.
  • the manual mode is necessary in case the drive unit 310 fails.
  • the manual mode is not provided, a problem that the chemical cannot be supplied may occur when the driving unit 310 is broken. Therefore, even if the driving unit 310 does not provide driving force due to a failure, the operator can manually configure the first locking unit 330 and the second locking unit 340 in the locked position and the unlocked position, respectively. Can be.
  • the driving part 310 includes a first fluid supply part 313 in which fluid (air in the case of a pneumatic cylinder) is supplied so that the linear movement of the driving connection member 311 is performed in one direction, and the driving connection member 311
  • the second fluid supply unit 314 is supplied with the fluid so that the linear motion of the other side is made, and the drive connection member 311 moves in either direction of both sides of the linear motion so that the fluid is exhausted so that the manual It may include a neutral portion 312 to allow the mode to be implemented.
  • the first fluid supply part 313 and the second fluid supply part 314 may be integrally provided on both sides of the neutral part 312 therebetween.
  • a pair of springs 315a and 315b are provided at side portions of the first fluid supply unit 313 and the second fluid supply unit 314 so that elastic forces are applied in opposite directions.
  • the first fluid supply unit 313 is provided with an inlet 313a through which fluid flows into the first fluid supply unit 313 and an outlet 313b through which fluid is discharged outside the first fluid supply unit 313.
  • the second fluid supply unit 314 is provided with an inlet 314a through which fluid flows into the second fluid supply unit 314 and an outlet 314b through which fluid is discharged out of the second fluid supply unit 314.
  • the neutral portion 312 is provided with a pair of outlets 312a and 312b that allow fluid to be discharged out of the neutral portion 312.
  • a first connector 316 and a second connector 317 are provided for inflow and outflow of the fluid for linear movement of the drive connection member 311.
  • the first connector 316 is in communication with a space 318a in which the pressure of the fluid acts on one side of the drive connector 311, and the second connector 317 is of the drive connector 311. It communicates with the space 318b where the pressure of the fluid acts on the other side.
  • the neutral part 312 and the first fluid supply part 313 and the second fluid supply part 314 are integrally moved by the application of electricity, so that of the first fluid supply part 313 and the second fluid supply part 314 Either one is connected to the first connector 316 and the second connector 317.
  • the pressure direction of the fluid acting on the driving connection member 311 becomes opposite directions to the driving connection The direction of movement of the member 311 is reversed.
  • the pair of springs 315a and 315b maintain the equilibrium of the force.
  • the first connector 316 communicates with the outlet 312a
  • the second connector 317 communicates with another outlet 312b. Therefore, when an operator applies a force to the left side of the drive connecting member 311 by hand, the fluid is discharged through the first connector 316 and the outlet 312a, and the drive connecting member 311 moves to the left. Conversely, when a worker applies a force to the right side of the driving connecting member 311 by hand, the fluid is discharged through the second connecting hole 317 and the outlet 312b, and the driving connecting member 311 moves to the right. Therefore, when the operator manually moves the first link member 321 while holding the handle 321c, the first locking part 330 and the second locking part 340 are moved to one of the locked position and the unlocked position. I can do it.
  • 9(b) is a state in which electricity is applied and the neutral part 312, the first fluid supply part 313, and the second fluid supply part 314 are moved to the right.
  • the first connector 316 communicates with the inlet 313a of the first fluid supply unit 313, and the second connector 317 communicates with the outlet 313b of the first fluid supply unit 313.
  • the spring 315a connected to the first fluid supply unit 313 is tensioned, and the spring 315b connected to the second fluid supply unit 314 is compressed.
  • FIG. 9(c) is a state in which electricity is applied contrary to FIG. 9(b) and the neutral part 312, the first fluid supply part 313, and the second fluid supply part 314 are moved to the left.
  • the first connector 316 communicates with the outlet 314b of the second fluid supply 314, and the second connector 317 communicates with the inlet 314a of the second fluid supply 314.
  • the spring 315a connected to the first fluid supply unit 313 is compressed, and the spring 315b connected to the second fluid supply unit 314 is in a tensioned state.
  • the first locking unit 330 and the second locking unit 340 are automatically locked or unlocked. Can be moved to the position of
  • the operator can select either an automatic mode or a manual mode by operating a mode selection unit provided in the automatic chemical supply device.
  • the mode selector may be configured as a switch.
  • the locking device 300-1 according to the second embodiment of the present invention will be described with reference to FIGS. 10 to 12.
  • the locking device 300-1 of the second embodiment is similar to the locking device 300 of the first embodiment, the first link pin 324, the second link member 322 and the third link member 323, the first A first locking portion 330 made of a locking member 331 and a first connecting rod 332, a second locking portion 340 made of a second locking member 341 and a first connecting rod 342, a second Link pin 334 and third link pin 344, first lock detection sensor 361, second lock detection sensor 362, first unlock release detection sensor 363, second unlock release detection sensor 364 ).
  • the third and fourth embodiments described later also have the same configuration.
  • FIG. 11 shows the case where the locking device 300-1 is in the unlocked position
  • FIG. 12 shows the case where the locking device 300-1 is in the locked position.
  • a locking device 400-1 for nitrogen may be provided together with a chemical locking device 300-1.
  • the locking device 300-1 includes a driving unit 310-1 providing driving force.
  • the first link pin 324 is guided by the driving of the driving unit 310-1 to linearly move in the vertical direction.
  • the first link pin 324 is coupled to a guide connecting member 351-1, and the guide connecting member 351-1 is integrally coupled to a driving connecting member 311-1, and the driving connecting The member 311-1 is guided on the cylinder guide 312-1 formed in a length in the vertical direction, and thus can be linearly moved in the vertical direction.
  • a handle 351-1a is formed on the guide connecting member 351-1 so that an operator can hold and move it by hand in manual mode.
  • the cylinder guide 312-1 has a length in the vertical direction and is linearly moved in the vertical direction.
  • the neutral part 312 described with reference to FIG. 9 may be provided in the driving part 310-1 to operate in a manual mode.
  • the fluid inside the driving unit 310-1 when operating in the manual mode in the locked position as shown in FIG. 12, the fluid inside the driving unit 310-1 has a guide connecting member 351-1, a driving connecting member 311-1, and a first link.
  • the load due to the weight of the pin 324 is applied. Due to this, the fluid is discharged to the outside through the outlets 312a and 312b, so that the guide connecting member 351-1, the driving connecting member 311-1, and the first link pin 324 move downward.
  • the first locking portion 330 and the second locking portion 340 may also be unable to maintain a locked state. Therefore, the driving part 310-1 of the second embodiment is not provided with a neutral part 312 having outlets 312a and 312b communicating with the outside, and may be configured to operate only in an automatic mode.
  • the locking device 300-2 according to the third embodiment of the present invention will be described with reference to FIGS. 13 to 15.
  • FIG. 14 shows the case where the locking device 300-2 is in the unlocked position
  • FIG. 15 shows the case where the locking device 300-2 is in the locked position
  • a locking device 400-2 for nitrogen may be provided together with the chemical locking device 300-2.
  • the locking device 300-2 includes a driving unit 310-2 providing driving force.
  • the first link pin 324 is guided by the driving of the driving unit 310-2 to linearly move in the vertical direction.
  • the first link pin 324 is coupled to a guide connecting member 351-2, and the guide connecting member 351-2 is integrally coupled to a driving connecting member 311-2, and the driving connecting The member 311-2 is linearly moved in the vertical direction while being guided by the cylinder guide 312-2 formed in the vertical direction.
  • a handle 351-2a is formed on the guide connecting member 351-2 so that an operator can hold and move it by hand in manual mode.
  • the driving unit 310-2 of the third embodiment has the cylinder guide 312-2 having a length in the vertical direction and linear motion in the vertical direction.
  • the locking member 319-2 is provided to enable both the automatic mode and the manual mode.
  • the lock member 319-2 may be made of, for example, a lock nut.
  • the fluid inside the cylinder can be exhausted to the outside, so it is possible to operate in the manual mode.
  • the fluid inside the cylinder is sealed so as not to be exhausted to the outside, so that the guide connecting member 351-2 is not lowered by its own weight and remains stationary at a constant position. And automatic mode operation.
  • the driving unit 310-2 of the third embodiment is also provided with a neutral part 312 described in FIG. 9, but in the third embodiment, the neutral part 312 is configured to prevent fluid from being discharged to the outside.
  • the solenoid valve (not shown) is in a closed state so that the fluid is not discharged through the pair of outlets 312a and 312b, and the lock nut 319-2 is operated by the operator. Manual mode can be implemented by manipulation.
  • the third embodiment can selectively operate the automatic mode and the manual mode.
  • the locking device 300-3 according to the fourth embodiment of the present invention will be described with reference to FIGS. 16 to 18.
  • Fig. 17 shows the case where the locking device 300-3 is in the unlocked position
  • Fig. 18 shows the case where the locking device 300-3 is in the locked position.
  • the locking device 300-3 includes a driving part 310-3, a first link member 321-3, a guide part 350-3, a guide connecting member 351-3, and a driving hinge Axis 370-3.
  • the driving part 310-3 is made of a rotating cylinder.
  • a first link member 321-3 rotating with the driving hinge shaft 370-3 as a rotation center is connected to the driving unit 310-3.
  • the first link pin 324 is coupled to the other end of the first link member 321-3.
  • the first link pin 324 is integrally coupled to the guide connecting member 351-3, and the guide connecting member 351-3 moves linearly in the vertical direction along the guide portion 350-3. have.
  • the first link member 321-3 rotates the driving hinge shaft 370-3 clockwise around the rotation center.
  • the first link pin 324 and the guide connecting member 351-3 move upward along the longitudinal direction of the guide portion 350-3.
  • the first locking portion 330 rotates around the first locking member 331, and the second locking portion 340 rotates around the second locking member 341 to become the locking position of FIG. 18. .
  • the locking device 300-3 can be implemented by a simple configuration.
  • the locking positions and the unlocking positions of the two locking parts 330 and 340 are controlled by using one driving part 310,310-1,310-2,310-3, but two driving parts are used.
  • the first locking portion 330 and the second locking portion 340 may be configured to control the locking position and the unlocking position, respectively.
  • the first locking unit 330 is operated in an automatic mode or a manual mode
  • the first locking unit 340 and the second fluid supply unit 314 and the neutral unit 312 are also provided in one driving unit so that the second locking unit 340 can operate in an automatic mode or a manual mode.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

L'objectif de la présente invention est de fournir un dispositif de remplacement de filtre chimique et un procédé de remplacement qui peuvent empêcher un produit chimique de fuir vers l'extérieur lorsqu'un filtre chimique est en cours de remplacement, minimiser le risque d'accidents qui peuvent se produire lorsque le filtre chimique est remplacé, rendre le volume du dispositif compact en volume, et réduire également le travail requis pour remplacer le filtre chimique. Un dispositif de remplacement de filtre chimique (1) de la présente invention pour atteindre l'objectif comprend : une unité de montage d'ensemble filtre (300) sur laquelle est monté un ensemble filtre (2) comprenant une première cartouche (10-1) à utiliser pour filtrer une substance chimique ou une seconde cartouche (10-2) qui a été utilisée pour filtrer le produit chimique, et un boîtier de filtre (20) et une tête de filtre (30) qui sont couplés verticalement et reçoivent la première cartouche (10-1) ou la seconde cartouche (10-2) ; et un moyen de remplacement de cartouche qui sépare le boîtier de filtre (20) de l'ensemble filtre (2) dans un état dans lequel l'ensemble filtre (2) est monté sur l'unité de montage d'ensemble filtre (300), et qui, après la seconde cartouche (10-2) est séparé de l'ensemble filtre (2), couple le boîtier de filtre séparé (20) à l'ensemble filtre (2) lorsque la première cartouche (10-1) est couplée à l'ensemble filtre (2) duquel a été séparée la seconde cartouche (10-2).
PCT/KR2019/000814 2018-12-14 2019-01-21 Dispositif de verrouillage pour fournir un produit chimique, et appareil d'alimentation chimique automatique le comprenant WO2020122310A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG11202105251RA SG11202105251RA (en) 2018-12-14 2019-01-21 Locking device for supplying chemical, and automatic chemical supply apparatus including same
CN201980081420.8A CN113169100B (zh) 2018-12-14 2019-01-21 用于供应化学制剂的锁定装置及具备此的化学制剂自动供应装置

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KR1020180162311A KR102005957B1 (ko) 2018-12-14 2018-12-14 케미컬 공급을 위한 록킹장치 및 이를 구비한 케미컬 자동공급장치
KR10-2018-0162311 2018-12-14

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SG11202105251RA (en) 2021-06-29

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