WO2021172894A1 - Ensemble collecteur et dispositif d'échantillonnage d'un produit chimique le comprenant - Google Patents

Ensemble collecteur et dispositif d'échantillonnage d'un produit chimique le comprenant Download PDF

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Publication number
WO2021172894A1
WO2021172894A1 PCT/KR2021/002383 KR2021002383W WO2021172894A1 WO 2021172894 A1 WO2021172894 A1 WO 2021172894A1 KR 2021002383 W KR2021002383 W KR 2021002383W WO 2021172894 A1 WO2021172894 A1 WO 2021172894A1
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WO
WIPO (PCT)
Prior art keywords
chemical
passage
flow path
valve
common chamber
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Application number
PCT/KR2021/002383
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English (en)
Korean (ko)
Inventor
원종호
송용익
이진우
윤병춘
Original Assignee
(주)에스티아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by (주)에스티아이 filed Critical (주)에스티아이
Priority to CN202180016783.0A priority Critical patent/CN115151508A/zh
Publication of WO2021172894A1 publication Critical patent/WO2021172894A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0288—Container connection means
    • B67D7/0294—Combined with valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/08—Arrangements of devices for controlling, indicating, metering or registering quantity or price of liquid transferred
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/105—Three-way check or safety valves with two or more closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N2001/1031—Sampling from special places

Definitions

  • Embodiments relate to a manifold assembly and a chemical sampling device having the same, and to a manifold assembly capable of simplifying chemical discharge, cleaning, and sampling processes and improving stability and reliability, and a chemical sampling device having the same.
  • the chemical is supplied to the main storage tank through a tank lorry, etc., and a part of the chemical stored in the main storage tank is divided and stored in a plurality of sub storage tanks, so that it is sequentially supplied to one unit process or individually to a plurality of unit processes can be supplied.
  • the amount of chemical may be directly supplied to the sub storage tank through a drum, a bottle, or the like.
  • a sampling device for sampling chemicals at major locations such as a tank lorry, a drum, a bottle, a storage tank, and a pipe has been developed.
  • An object of the embodiment is to provide a manifold assembly capable of simplifying chemical discharge, cleaning, and sampling processes and improving stability and reliability, and a chemical sampling device having the same.
  • the embodiment aims to enable discharge, cleaning, and sampling of chemicals supplied from a plurality of sampling lines in one place.
  • the embodiment aims to minimize chemical contamination and purity degradation and errors in analysis results in discharging, cleaning, and sampling chemicals supplied from different sampling lines.
  • the embodiment aims to improve the accuracy of the chemical contamination level and component analysis work.
  • the embodiment aims to simplify the structure and improve space utilization.
  • a manifold assembly for achieving the above-described objects of the present invention includes a body having a common chamber formed therein; a first chemical flow path connected to the common chamber and supplying a first chemical; a first valve selectively opening and closing the first chemical flow path; a second chemical passage connected to the common chamber and supplying a second chemical; a second valve selectively opening and closing a second chemical flow path; and a discharge passage communicating with the common chamber and discharging the first chemical or the second chemical introduced into the common chamber to the outside of the body.
  • the embodiment does not need to move the sampling bottle containing the chemical at each key position, it is possible to obtain the advantageous effect of minimizing the chemical exposure to the operator and improving the stability and reliability.
  • the first chemical flow path may be formed in various structures capable of supplying the first chemical to the common chamber.
  • the first chemical flow path includes a first supply flow path formed in the body and supplied with the first chemical, a first inflow flow path formed on a side surface of the body in communication with the common chamber, and a first supply flow path and a first inflow flow path It is formed on the side surface of the body in communication with the first guide passage for guiding the first chemical to the first inflow passage.
  • the first supply flow path includes a first vertical flow path formed on the upper surface of the body, and a first horizontal flow path formed on a side surface of the body to communicate with the first vertical flow path.
  • the first valve may be formed in various structures capable of selectively opening and closing the first chemical flow path, and the present invention is not limited or limited by the type and structure of the first valve.
  • the first valve includes a valve body disposed to cover the first guide flow path, a cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the first guide flow path, and pressurized by the cylinder member. and optionally includes a diaphragm in close contact with the wall surface of the first guide passage.
  • the second chemical flow path may be formed in various structures capable of supplying the second chemical to the common chamber.
  • the second chemical flow path includes a second supply flow path formed in the body and supplied with the second chemical, a second inflow flow path formed on a side surface of the body to communicate with the common chamber, and a second supply flow path and a second inflow flow path and a second guide passage formed on the side surface of the body in communication with the second guide passage for guiding the second chemical to the second inflow passage.
  • the second supply flow path includes a second vertical flow path formed on the upper surface of the body, and a second horizontal flow path formed on a side surface of the body to communicate with the second vertical flow path.
  • the second valve may be formed in various structures capable of selectively opening and closing the second chemical flow path, and the present invention is not limited or limited by the type and structure of the second valve.
  • the second valve includes a valve body disposed to cover the second guide flow path, a cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the second guide flow path, and pressurized by the cylinder member. and optionally includes a diaphragm in close contact with the wall surface of the second guide passage.
  • the manifold assembly may include a third chemical flow path connected to the common chamber and supplying a third chemical, and a third valve selectively opening and closing the third chemical flow path.
  • the third chemical flow path may be formed in various structures capable of supplying the third chemical to the common chamber.
  • the third chemical flow path includes a third supply flow path formed in the body and supplied with the third chemical, a third inflow flow path formed on the side of the body to communicate with the common chamber, and a third supply flow path and a third inflow flow path It is formed on the side of the body in communication with the third guide passage for guiding the third chemical to the third inflow passage.
  • the third supply flow path includes a third vertical flow path formed on the upper surface of the body, and a third horizontal flow path formed on the side surface of the body to communicate with the third vertical flow path.
  • the third valve may be formed in various structures capable of selectively opening and closing the third chemical flow path, and the present invention is not limited or limited by the type and structure of the third valve.
  • the third valve includes a valve body disposed to cover the third guide flow path, a cylinder member provided to be linearly movable on the valve body in a direction approaching and spaced apart from the wall surface of the third guide flow path, and pressurized by the cylinder member. and optionally includes a diaphragm in close contact with the wall of the third guide passage.
  • a first inclined guide surface is formed on the wall surface of the first inflow passage, and the first inclined guide surface transfers the first chemical flowing into the first inflow passage to a reference line passing through the center of the common chamber. It can guide you in an inclined way.
  • a second inclined guide surface is formed on the wall surface of the second inflow passage, and the second inclined guide surface may guide the second chemical flowing into the second inflow passage to be inclined with respect to a reference line passing through the center of the common chamber.
  • a third inclined guide surface is formed on the wall surface of the third inflow passage, and the third inclined guide surface may guide the third chemical flowing into the third inflow passage to be inclined with respect to a reference line passing through the center of the common chamber.
  • the first to third chemicals introduced into the first inflow passage, the second inflow passage, and the third inflow passage pass through the center of the common chamber along the first inclined guide surface, the second inclined guide surface, and the third inclined guide surface. Since the chemical introduced into the common chamber can forcibly form a vortex in the form of a vortex by being guided at an angle with respect to the reference line of can be obtained
  • a chemical sampling device a first sampling line for supplying a first chemical; a second sampling line for supplying a second chemical; and a body having a common chamber formed therein, a first sampling line, and a first chemical flow path for supplying a first chemical to the common chamber, a first valve for selectively opening and closing the first chemical flow path, and a second sampling line are connected.
  • the first chemical flow path includes: a first supply flow path formed in the body and supplied with the first chemical; a first inflow passage formed on a side surface of the body to communicate with the common chamber; and a first guide passage formed on a side surface of the body in communication with the first supply passage and the first inflow passage, and guiding the first chemical to the first inflow passage, wherein the first valve is an outlet of the first supply passage and selectively opening and closing the inlet of the first inflow passage, the second chemical passage comprising: a second supply passage formed in the body and supplied with the second chemical; a second inflow passage formed on a side surface of the body to communicate with the common chamber; and a second guide passage formed on a side surface of the body in communication with the second supply passage and the second inlet passage, and guiding the second chemical to the second inlet passage, wherein the second valve is the outlet of the second supply passage. and selectively open and close the inlet of the second inflow passage.
  • the first supply passage the first vertical passage formed on the upper surface of the body; and a first horizontal flow path formed on a wall surface of the first guide flow path in communication with the first vertical flow path, wherein an end of the first horizontal flow path forms an outlet of the first supply flow path on the wall surface of the first guide flow path
  • the second supply passage includes: a second vertical passage formed on the upper surface of the body; and a second horizontal flow path formed on the wall surface of the second guide flow path to communicate with the second vertical flow path, wherein an end of the second horizontal flow path forms an outlet of the second supply flow path on the wall surface of the second guide flow path.
  • the second chemical is drained through the common chamber.
  • the second chemical by allowing the second chemical to be drained through the common chamber for a predetermined time (or by a predetermined flow rate) for a predetermined time (or by a predetermined flow rate) without immediately sampling the second chemical after sampling the first chemical, the residual residual in the common chamber It is possible to obtain advantageous effects of minimizing the contamination of the second chemical by the chemical (the first chemical), the decrease in purity, and the error of the analysis result, and improving the degree of chemical contamination and the reliability of the component analysis.
  • FIG. 1 is a view for explaining a chemical storage facility according to an embodiment of the present invention.
  • FIG. 2 is a view for explaining a manifold assembly according to an embodiment of the present invention.
  • FIG 3 is a view for explaining a discharge flow path as a manifold assembly according to an embodiment of the present invention.
  • FIG. 4 is a view for explaining a guide passage as a manifold assembly according to an embodiment of the present invention.
  • 5A is a cross-sectional view illustrating a first chemical flow path as a manifold assembly according to an embodiment of the present invention.
  • 5B is a view showing a conventional structure in which a plurality of sampling lines are connected to one discharge passage.
  • FIG. 6 is a cross-sectional view illustrating a second chemical flow path as a manifold assembly according to an embodiment of the present invention.
  • FIG. 7 is a cross-sectional view illustrating a third chemical flow path as a manifold assembly according to an embodiment of the present invention.
  • FIG 8 and 9 are views for explaining an operation structure of a valve as a manifold assembly according to an embodiment of the present invention.
  • FIG. 10 is a view for explaining an inclined guide surface as a manifold assembly according to an embodiment of the present invention.
  • the singular form may also include the plural form unless otherwise specified in the phrase, and when it is described as "at least one (or one or more) of A and (and) B, C", it is combined with A, B, C It may include one or more of all possible combinations.
  • a component is 'connected', 'coupled' or 'connected' to another component
  • the component is not only directly connected, coupled or connected to the other component, but also with the component It may also include a case of 'connected', 'coupled' or 'connected' due to another element between the other elements.
  • the upper (above) or lower (below) is one as well as when two components are in direct contact with each other. Also includes a case in which the above another component is formed or disposed between two components.
  • the meaning of not only an upper direction but also a lower direction based on one component may be included.
  • the manifold assembly 100 includes a body 110 having a common chamber 112 formed therein; a first chemical flow path 120 connected to the common chamber 112 and supplying a first chemical; a first valve 152 for selectively opening and closing the first chemical flow path 120; a second chemical flow path 130 connected to the common chamber 112 and supplying a second chemical; a second valve 154 for selectively opening and closing the second chemical flow path 130; and a discharge passage 114 communicating with the common chamber 112 and discharging the first chemical or the second chemical introduced into the common chamber 112 to the outside of the body 110 .
  • the manifold assembly 100 is provided to collect the chemicals supplied from the sampling lines L1, L2, and L3.
  • the manifold assembly 100 is mounted on the chemical storage facility 1 to configure the chemical sampling device 10 for sampling chemicals at major locations such as tank lorries, drums, bottles, storage tanks, and pipes. have.
  • the chemical storage facility 1 includes an ACQC unit 2 , a first chemical storage tank 3 , a chemical distribution device 4 and a plurality of second chemical storage tanks 5 and 6 . can do.
  • the ACQC unit (Automatic Clean Quick Coupler Unit) (2) delivers the chemical supplied from the tank lorry to the first chemical storage tank (3), and the chemical distribution device (4) is among the chemicals stored in the first chemical storage tank (3). A portion is divided and supplied to a plurality of second chemical storage tanks (5, 6).
  • the chemical sampling device 10 is connected to each chemical storage tank 3, 5, 6 through a plurality of sampling lines L1, L2, and L3, and each sampling line L1, L2, L3 has a chemical An opening/closing valve (V) and a pump (P) for controlling the transfer may be provided.
  • V opening/closing valve
  • P pump
  • a gas eg nitrogen or air
  • the sampling lines L1, L2, and L3 are described as an example connected to the chemical storage tank, but according to another embodiment of the present invention, the sampling line is a tank lorry, a drum, a bottle, a storage tank, and a pipe. It can be connected to all kinds of chemical sources that supply, store, or transport chemicals, such as, and the present invention is not limited or limited by the object or location to which the sampling line is connected.
  • the manifold assembly 100 independently opens and closes a plurality of chemical flow paths 120, 130, 140 to which a plurality of sampling lines L1, L2, and L3 are individually connected, and each chemical flow path 120, 130, 140 independently. It includes a plurality of valves (152, 154, 156).
  • sampling lines L1 , L2 , and L3 are connected to each chemical flow path.
  • two or four or more sampling lines may be connected to the manifold assembly, and the present invention is not limited or limited by the number of sampling lines (the number of chemical channels).
  • the manifold assembly 100 includes a body 110 having a common chamber 112 formed therein, and a first chemical that is connected to the common chamber 112 and supplies a first chemical.
  • the third valve 156 that communicates with the common chamber 112 and the chemical (one of the first chemical, the second chemical, and the third chemical) introduced into the common chamber 112 is discharged to the outside of the body 110 . It includes a discharge passage 114 for discharging.
  • a common chamber 112 in which a chemical (one of a first chemical, a second chemical, and a third chemical) is accommodated is formed in the body 110 .
  • the body 110 may be formed in various structures having a common chamber 112 therein, and the present invention is not limited or limited by the shape and structure of the body 110 .
  • the body 110 may be formed to have a substantially triangular cross-sectional shape.
  • the common chamber 112 is provided to form a sealed accommodation space in which the chemical is accommodated in the body 110 .
  • the common chamber 112 may be formed in various structures capable of accommodating chemicals, and the present invention is not limited or limited by the structure and shape of the common chamber 112 .
  • the common chamber 112 may be formed to have a substantially circular block shape and disposed in the central portion of the body 110 . According to another embodiment of the present invention, it is also possible to form the common chamber to have a rectangular block shape or other shape.
  • the inner wall surface of the common chamber 112 is formed in a curved shape.
  • the common chamber 112 is formed in a circular block shape or an elliptical block shape.
  • the chemical introduced into the common chamber 112 is prevented from remaining on the inner wall surface (eg, corner portion) of the common chamber 112 .
  • the advantageous effect of minimization can be obtained.
  • the first chemical flow path 120 is connected to the common chamber 112 and is provided to supply a first chemical to the common chamber 112 .
  • the first chemical flow path 120 may be formed in various structures capable of supplying the first chemical to the common chamber 112 .
  • the first chemical flow path 120 is formed in the body 110 and communicates with the first supply flow path 122 to which the first chemical is supplied, and the common chamber 112 , the body 110 .
  • ) is formed on the side surface of the body 110 in communication with the first inflow passage 124 and the first supply passage 122 and the first inflow passage 124, and a first chemical is introduced into the first inflow passage. It includes a first guide passage 126 for guiding to (124).
  • the first supply passage 122 is a first vertical passage 122a formed on the upper surface (refer to FIG. 2 ) of the body 110, and the first vertical passage 122a in communication with the body 110 of the It is formed in an approximately “L” shape including the first horizontal flow path 122b formed on the side surface.
  • the first inflow passage 124 communicates with the side of the common chamber 112 so as to pass through the side of the body 110 . That is, one end of the first inflow passage 124 communicates with the side of the common chamber 112 , and the other end of the first inflow passage 124 is exposed to the side of the body 110 .
  • the first inflow passage 124 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112 .
  • the first guide passage 126 is formed on the outer surface (eg, side) of the body 110 to communicate the first supply passage 122 and the first inflow passage 124 , and the first supply passage 122 . ) guides the first chemical supplied to the first inflow passage 124 .
  • the first guide flow path 126 is formed in the form of a dome concave on one side of the body 110 to be disposed between the side surface of the body 110 and a first valve 152 to be described later,
  • the outlet of the first supply passage 122 (the outlet of the first horizontal passage 122b) and the inlet of the first inflow passage 124 are located on the first guide passage 126 .
  • the outlet of the first horizontal flow path 122b and the inlet of the first inflow flow path 124 are located on the first guide flow path 126 means that the exit of the first horizontal flow path 122b and the first inflow flow path are located on the first guide flow path 126 . It is defined that the inlet of 124 is exposed on the wall surface of the first guide passage 126 facing the first valve 152 .
  • the first valve 152 is provided to selectively open and close the first chemical flow path 120 .
  • the first valve 152 is provided to selectively open and close the outlet of the first supply passage 122 and the inlet of the first inlet passage 124 .
  • the first supply passage 122 and the first inflow passage 124 are can be spatially completely separated.
  • the first valve 152 may block the outlet of the first supply channel 122 and/or the inlet of the first inlet channel 124 .
  • the supply of the first chemical through the first sampling line L1 may be stopped by blocking the first chemical from flowing into the first inflow passage 124 by the first valve 152 . Accordingly, it is possible to further block the first chemical from flowing into the common chamber 112 .
  • the first chemical remaining in the common chamber 112 , the discharge passage 114 , and the first inflow passage 124 may be cleaned using other chemicals.
  • the supply of the first chemical through the first sampling line L1 is stopped and the second chemical (or the third chemical through the third sampling line) is supplied through the second sampling line L2
  • the second chemical or the third chemical through the third sampling line
  • the first chemical remaining in the common chamber 112 , the discharge passage 114 , and the first inflow passage 124 may be cleaned.
  • the second chemical and the third chemical remaining in the common chamber 112 , the discharge passage 114 , and the first inflow passage 124 may be cleaned in the same manner.
  • the present invention is not necessarily limited thereto, and the chemical remaining in the common chamber 112 and the discharge passage 114 may be cleaned using the cleaning water.
  • the washing water is connected to the third sampling line L3, the washing water is ejected through the third sampling line L3 immediately after use of the first chemical to the common chamber 112, the discharge passage 114, and Chemicals remaining in the first inflow passage 124 may be cleaned. Other chemicals can then be sampled.
  • the area between the valve and the discharge passage can be cleaned using a different chemical. That is, since the first to third inflow passages, the common chamber, and the discharge passage are disposed adjacent to each other, the remaining chemicals may be cleaned using other chemicals. Accordingly, it is possible to prevent chemical contamination and decrease in purity, and errors in analysis results, and advantageous effects of improving the reliability of chemical contamination analysis can be obtained.
  • the first valve 152 may block the outlet of the first supply channel 122 and/or the inlet of the first inlet channel 124 . Therefore, when the supply of the first chemical through the first sampling line L1 is stopped, the first chemical of the first supply passage 122 is blocked from flowing into the common chamber 112 through the first inflow passage 124 .
  • the supply of the first chemical to the first inflow passage 124 is immediately stopped by the first valve 152 , and the second chemical through the second sampling line L2 (or the third chemical through the third sampling line) ) can be supplied.
  • the configuration of cleaning before sampling other chemicals is the same as described above.
  • the uncontaminated first chemical may be sampled by opening the first valve and discharging the first chemical in the first sampling line and the first inflow path before sampling. That is, according to the embodiment, since the discharge of the first chemical is controlled by the first valve, another valve may not be provided in the sampling line.
  • the present invention is not necessarily limited thereto, and a separate valve may be further provided if necessary.
  • the first valve 152 may be formed in various structures capable of selectively opening and closing the first chemical flow path 120 , and the present invention is not limited or limited by the type and structure of the first valve 152 . .
  • the first valve 152 selectively opens and closes the outlet of the first supply passage 122 and the inlet of the first inflow passage 124 (eg, simultaneously), thereby selectively opening and closing the first chemical passage 120 .
  • the first valve 152 approaches the wall surface of the valve body 150a and the first guide flow path 126 disposed to cover the first guide flow path 126 , and A cylinder member 150b provided to be movable in a straight line on the valve body 150a in a direction spaced apart, and a diaphragm 150c pressed by the cylinder member 150b and selectively in close contact with the wall surface of the first guide passage 126 ) is included.
  • the valve body 150a of the first valve 152 is coupled to the outer surface of the body 110 so as to cover the first guide passage 126 , and the first guide passage 126 is the valve body of the first valve 152 . It is formed between the outer surface of the body 110 and (150a).
  • the cylinder member 150b of the first valve 152 approaches and separates the wall surface (the side surface of the body 110) of the first guide passage 126 of the valve body 150a of the first valve 152. It is provided to be movable in a straight line inside.
  • the cylinder member 150b of the first valve 152 may be configured to linearly move on the valve body 150a of the first valve 152 by hydraulic or pneumatic pressure, and the cylinder member 150b of the first valve 152 may be configured to move linearly.
  • the present invention is not limited or limited by the linear movement method. In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.
  • the diaphragm 150c may be formed of a flexible material, is pressed by the cylinder member 150b, and selectively adheres to the wall surface of the first guide passage 126 .
  • the first supply passage 122 and the first inflow passage 124 communicate with each other (see FIG. 8), and the diaphragm 150c is
  • the first guide passage 126 is in close contact with the wall surface, the first supply passage 122 and the first inflow passage 124 are spatially blocked. (See FIG. 9 )
  • the second chemical flow path 130 is connected to the common chamber 112 and is provided to supply the second chemical to the common chamber 112 .
  • the second chemical flow path 130 may be formed in various structures capable of supplying the second chemical to the common chamber 112 .
  • the second chemical flow path 130 is formed on the side of the body 110 to communicate with the second supply flow path 132 , which is formed in the body 110 and supplied with the second chemical, and the common chamber 112 . It is formed on the side surface of the body 110 in communication with the second inflow passage 134 , and the second supply passage 132 and the second inflow passage 134 , and guides the second chemical to the second inflow passage 134 . and a second guide passage 136 .
  • the second supply passage 132 is a second vertical passage 132a formed on the upper surface (refer to FIG. 2 ) of the body 110, and the second vertical passage 132a in communication with the body 110 of the It is formed in an approximately “L” shape including the second horizontal flow path 132b formed on the side surface.
  • the second inflow passage 134 communicates with the side of the common chamber 112 so as to pass through the side of the body 110 . That is, one end of the second inflow passage 134 communicates with the side of the common chamber 112 , and the other end of the second inflow passage 134 is exposed to the side of the body 110 .
  • the second guide passage 136 is formed on the outer surface (eg, side) of the body 110 to communicate the second supply passage 132 and the second inflow passage 134 , and the second supply passage 132 . ) to guide the second chemical supplied to the second inflow passage 134 .
  • the second inflow passage 134 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112 .
  • the second guide passage 136 is formed in a concave dome shape on the other side of the body 110 so as to be disposed between the side surface of the body 110 and a second valve 154 to be described later, and the second The outlet of the supply passage 132 (the outlet of the second horizontal passage 132b) and the inlet of the second inflow passage 134 are located on the second guide passage 136 .
  • the fact that the outlet of the second horizontal passage 132b and the inlet of the second inflow passage 134 are located on the second guide passage 136 means that the outlet of the second horizontal passage 132b and the inlet of the second inflow passage 134 are located on the second guide passage 136 . It is defined that the inlet of 134 is exposed on the wall surface of the second guide passage 136 facing the second valve 154 .
  • the second valve 154 is provided to selectively open and close the second chemical flow path 130 .
  • the second valve 154 is provided to open and close the outlet of the second supply passage 132 and/or the inlet of the second inlet passage 134 .
  • the second supply passage 132 and the second inlet passage 134 are spatially separated. can be completely separated.
  • supply of the second chemical through the second sampling line L2 may be stopped by blocking the second chemical from flowing into the second inflow passage 134 by the second valve 154 . Accordingly, it is possible to block the flow of the second chemical into the common chamber 112 .
  • the second chemical remaining in the common chamber 112 , the inflow passage 134 , and the discharge passage 114 may be cleaned using other chemicals or washing water as described above.
  • the function of the second valve 154 may be the same as that of the first valve.
  • the second valve 154 may be formed in various structures capable of selectively opening and closing the second chemical flow path 130 , and the present invention is not limited or limited by the type and structure of the second valve 154 . .
  • the second valve 154 opens and closes the outlet of the second supply passage 132 and the inlet of the second inlet passage 134 together (eg, simultaneously), thereby selectively opening and closing the second chemical passage 130 .
  • the second valve 154 is a valve body 150a disposed to cover the second guide passage 136, and the valve body 150a in a direction approaching and spaced apart from the wall surface of the second guide passage 136. It includes a cylinder member 150b provided to be movable in a straight line, and a diaphragm 150c pressed by the cylinder member 150b and optionally in close contact with the wall surface of the second guide passage 136. (FIG. 8 and see Fig. 9)
  • the valve body 150a of the second valve 154 is coupled to the outer surface of the body 110 to cover the second guide passage 136 , and the second guide passage 136 is the valve body of the second valve 154 . It is formed between the outer surface of the body 110 and (150a).
  • the cylinder member 150b of the second valve 154 approaches and separates the wall surface (side surface of the body 110) of the second guide passage 136 of the valve body 150a of the second valve 154 in a direction away from it. It is provided to be movable in a straight line inside.
  • the cylinder member 150b of the second valve 154 may be configured to linearly move on the valve body 150a of the second valve 154 by hydraulic pressure or pneumatic pressure, and the cylinder member 150b of the second valve 154 . ), the present invention is not limited or limited by the linear movement method. In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.
  • the diaphragm 150c may be formed of a flexible material, is pressed by the cylinder member 150b, and selectively adheres to the wall surface of the second guide passage 136 .
  • the second supply passage 132 and the second inlet passage 134 communicate with each other, and the diaphragm 150c connects to the second guide passage ( In a state in close contact with the wall surface of the 136, the second supply passage 132 and the second inlet passage 134 are spatially blocked.
  • the third chemical flow path 140 is connected to the common chamber 112 and is provided to supply the third chemical to the common chamber 112 .
  • the third chemical flow path 140 may be formed in various structures capable of supplying the third chemical to the common chamber 112 .
  • the third chemical flow path 140 is formed in the body 110 and a third supply flow path 142 to which the third chemical is supplied, and a third inflow formed on the side surface of the body 110 to communicate with the common chamber 112 .
  • the third guide is formed on the side surface of the body 110 in communication with the flow path 144 and the third supply flow path 142 and the third inflow flow path 144 and guides the third chemical to the third inflow flow path 144 .
  • a flow path 146 is formed in the body 110 and a third supply flow path 142 to which the third chemical is supplied, and a third inflow formed on the side surface of the body 110 to communicate with the common chamber 112 .
  • the third guide is formed on the side surface of the body 110 in communication with the flow path 144 and the third supply flow path 142 and the third inflow flow path 144 and guides the third chemical to the third inflow flow path 144 .
  • a flow path 146 is formed on the side surface of the body 110 in communication with the flow path 144 and the third supply flow path
  • the third supply passage 142 is a third vertical passage 142a formed on the upper surface (refer to FIG. 2 ) of the body 110, and the third vertical passage 142a in communication with the body 110 of the It is formed in an approximately "L" shape including the third horizontal flow path 142b formed on the side surface.
  • the third inflow passage 144 communicates with the side of the common chamber 112 so as to pass through the side of the body 110 . That is, one end of the third inflow passage 144 communicates with the side of the common chamber 112 , and the other end of the third inflow passage 144 is exposed to the side of the body 110 .
  • the third inflow passage 144 may be formed to face the center of the common chamber 112 along a reference line passing through the center of the common chamber 112 .
  • the third guide passage 146 is formed on the outer surface (eg, side) of the body 110 so as to communicate the third supply passage 142 and the third inlet passage 144 , and the third supply passage 142 . ) guides the third chemical supplied to the third inflow passage 144 .
  • the third guide flow path 146 is formed in a concave dome shape on another side of the body 110 so as to be disposed between the side surface of the body 110 and a third valve 156 to be described later,
  • the outlet of the third supply passage 142 (the outlet of the third horizontal passage 142b) and the inlet of the third inflow passage 144 are located on the third guide passage 146 .
  • the fact that the outlet of the third horizontal passage 142b and the inlet of the third inflow passage 144 are located on the third guide passage 146 means that the outlet of the third horizontal passage 142b and the third inflow passage are located on the third guide passage 146 . It is defined that the inlet of 144 is exposed on the wall surface of the third guide passage 146 facing the third valve 156 .
  • the third valve 156 is provided to selectively open and close the third chemical flow path 140 .
  • the third valve 156 is provided to open and close the outlet of the third supply passage 142 and/or the inlet of the third inlet passage 144 .
  • the third supply passage 142 and the third inlet passage 144 are can be spatially completely separated.
  • the supply of the third chemical through the third sampling line L3 may be stopped. Accordingly, it is possible to block the third chemical from flowing into the common chamber 112 .
  • the third chemical remaining in the common chamber 112 , the third inlet passage 144 , and the discharge passage 114 may be cleaned using other chemicals or washing water as described above.
  • the third valve 156 may be formed in various structures capable of selectively opening and closing the third chemical flow path 140 , and the present invention is not limited or limited by the type and structure of the third valve 156 . .
  • the third valve 156 selectively opens and closes the outlet of the third supply channel 142 and the inlet of the third inlet channel 144 (eg, simultaneously), thereby selectively opening and closing the third chemical channel 140 .
  • the third valve 156 is a valve body 150a disposed to cover the third guide flow path 146, and the valve body 150a in a direction approaching and spaced apart from the wall surface of the third guide flow path 146. It includes a cylinder member 150b provided to be movable in a straight line, and a diaphragm 150c pressed by the cylinder member 150b and optionally in close contact with the wall surface of the third guide passage 146. (FIG. 8 and see Fig. 9)
  • the valve body 150a of the third valve 156 is coupled to the outer surface of the body 110 to cover the third guide passage 146 , and the third guide passage 146 is the valve body of the third valve 156 . It is formed between the outer surface of the body 110 and (150a).
  • the cylinder member 150b of the third valve 156 approaches and separates from the wall surface (the side surface of the body 110) of the third guide passage 146 of the valve body 150a of the third valve 156. It is provided to be movable in a straight line inside.
  • the cylinder member 150b of the third valve 156 may be configured to linearly move on the valve body 150a of the third valve 156 by hydraulic pressure or pneumatic pressure, and the cylinder member 150b of the third valve 156 may be configured to move linearly.
  • the present invention is not limited or limited by the linear movement method. In some cases, it is also possible to configure the cylinder member 150b to move linearly by a motor or other driving source.
  • the diaphragm 150c may be formed of a flexible material, is pressed by the cylinder member 150b, and is selectively in close contact with the wall surface of the third guide passage 146 .
  • the third supply passage 142 and the third inlet passage 144 communicate with each other, and the diaphragm 150c connects to the third guide passage (
  • the third supply passage 142 and the third inflow passage 144 are spatially blocked.
  • the first valve 152 to the third valve 156 are disposed on the side surface of the body 110 to be spaced at equal intervals along the circumferential direction of the common chamber 112 .
  • the inlets of the first supply passage 122 to the third supply passage 142 are formed on the upper surface of the body 110 , and the first valve 152 to the third supply passage 142 are formed on the side surface of the body 110 .
  • each sampling line is connected to the inlet of the first supply passage 122 to the third supply passage 142 without interference by the first valve 152 to the third valve 156 .
  • the discharge flow path 114 is formed on the bottom surface of the body 110 to communicate with the common chamber 112 , and the first chemical, the second chemical, or the third chemical introduced into the common chamber 112 is in the discharge flow path 114 . It may be discharged to the outside of the body 110 through a connected discharge line.
  • the chemical discharged through the discharge line may be accommodated in a container (not shown), and the container filled with the chemical may be transported to a contamination level and component analysis site after fastening the lid.
  • a chemical can be accommodated, and various storage means having a selectively detachable lid can be used, and the present invention is not limited or limited by the structure and shape of the container.
  • a sampling bottle capable of accommodating a chemical may be used as the container, and the lid may be fastened or detached while rotating along a thread formed in the inlet of the container.
  • the residual chemical remaining in the common chamber 112 before discharging the chemical through the discharge passage 114 may be collected through a drain facility (not shown).
  • the embodiment does not immediately sample the second chemical after sampling the first chemical, but allows the second chemical to pass through the common chamber 112 for a predetermined time (or by a predetermined flow rate) to be discharged to the drain facility Accordingly, it is possible to obtain advantageous effects of minimizing contamination and purity degradation of the second chemical due to the residual chemical (first chemical) remaining in the common chamber 112 , and improving the degree of chemical contamination and reliability of component analysis.
  • the second inflow passage 134 by allowing the first inflow passage 124 , the second inflow passage 134 , and the third inflow passage 144 to all communicate with the common chamber 112 , the second When the chemical is drained, due to the second chemical introduced into the common chamber 112, other chemicals that may remain in the first inflow passage 124 and the third inflow passage 144 and the outer surface of the diaphragm 150c ( Since other chemicals attached to the side facing the common chamber 112) can also be removed (drained), it is possible to obtain an advantageous effect of more effectively suppressing contamination of the second chemical and deterioration of purity.
  • FIG. 10 is a view for explaining an inclined guide surface of the manifold assembly 100 according to an embodiment of the present invention.
  • the same or equivalent reference numerals are assigned to the same and equivalent parts as those of the above-described configuration, and detailed description thereof will be omitted.
  • a first inclined guide surface 124a is formed on the wall surface of the first inflow passage 124 , and the first inclined guide surface 124a shares the first chemical flowing into the first inflow passage 124 .
  • the guide may be guided obliquely with respect to the reference line CL passing through the center x of the chamber 112 .
  • a second inclined guide surface is formed on the wall surface of the second inflow passage 134 , and the second inclined guide surface transfers the second chemical flowing into the second inflow passage 134 to the center (x) of the common chamber 112 .
  • the guide may be inclined with respect to the passing reference line CL.
  • a third inclined guide surface 144a is formed on the wall surface of the third inflow passage 144 , and the third inclined guide surface 144a transmits the third chemical flowing into the third inflow passage 144 to the common chamber 112 . It can guide inclined with respect to the reference line (CL) passing through the center (x) of.
  • the inclination angle ⁇ of the first inclined guide surface 124a, the second inclined guide surface, and the third inclined guide surface 144a is varied within a range that can forcibly form a vortex in the form of a vortex inside the common chamber 112. It may be changed, and the present invention is not limited or limited by the inclination angle ⁇ of the first inclined guide surface 124a, the second inclined guide surface, and the third inclined guide surface 144a.
  • the first to third chemicals introduced into the first inflow passage 124, the second inflow passage 134, and the third inflow passage 144 are the first inclined guide surface 124a, the second inclined guide surface,
  • the chemical introduced into the common chamber 112 creates a vortex in the form of a vortex. Since it can be forcibly formed, it is possible to obtain an advantageous effect of more effectively removing residual chemicals that may remain in the common chamber 112 and the first to third inflow passages 124 , 134 , and 144 .

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Multiple-Way Valves (AREA)

Abstract

Un mode de réalisation concerne un ensemble collecteur qui comprend : un corps dans lequel une chambre commune est formée ; un premier canal d'écoulement de produit chimique relié à la chambre commune et fournissant un premier produit chimique ; une première vanne pour ouvrir ou fermer sélectivement le premier canal d'écoulement de produit chimique ; un second canal d'écoulement de produit chimique relié à la chambre commune et fournissant un second produit chimique ; une seconde vanne pour ouvrir ou fermer sélectivement le second canal d'écoulement de produit chimique ; et un canal d'écoulement d'évacuation relié à la chambre commune et évacuant hors du corps le premier ou le second produit chimique introduit dans la chambre commune. Par conséquent, l'ensemble collecteur peut avoir des effets avantageux : de simplifier un procédé d'évacuation, de nettoyage et d'échantillonnage d'un produit chimique ; et d'augmenter la stabilité et la fiabilité.
PCT/KR2021/002383 2020-02-27 2021-02-25 Ensemble collecteur et dispositif d'échantillonnage d'un produit chimique le comprenant WO2021172894A1 (fr)

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KR1020200024491A KR102174254B1 (ko) 2020-02-27 2020-02-27 매니폴드 어셈블리 및 이를 구비한 케미컬 샘플링 장치

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KR102174254B1 (ko) * 2020-02-27 2020-11-04 (주)에스티아이 매니폴드 어셈블리 및 이를 구비한 케미컬 샘플링 장치
KR102388430B1 (ko) * 2021-11-02 2022-04-21 엔비스아나(주) 미세분석용 매니폴드 밸브 어셈블리

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US20050185953A1 (en) * 2004-02-23 2005-08-25 Mitsubishi Paper Mills Limited Processing device of photo-sensitive material
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KR102174254B1 (ko) * 2020-02-27 2020-11-04 (주)에스티아이 매니폴드 어셈블리 및 이를 구비한 케미컬 샘플링 장치

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JPH07243591A (ja) * 1994-03-02 1995-09-19 Stec Kk 液体材料気化流量制御器
JP2003284976A (ja) * 2002-03-28 2003-10-07 Asahi Sunac Corp 塗装装置
US20050185953A1 (en) * 2004-02-23 2005-08-25 Mitsubishi Paper Mills Limited Processing device of photo-sensitive material
KR20120030659A (ko) * 2010-09-20 2012-03-29 주식회사 유피케미칼 캐니스터
KR20170116155A (ko) * 2015-03-27 2017-10-18 가부시키가이샤 스크린 홀딩스 처리액 공급 장치 및 처리액 공급 장치의 제어 방법
KR102174254B1 (ko) * 2020-02-27 2020-11-04 (주)에스티아이 매니폴드 어셈블리 및 이를 구비한 케미컬 샘플링 장치

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