CN113169100B - 用于供应化学制剂的锁定装置及具备此的化学制剂自动供应装置 - Google Patents

用于供应化学制剂的锁定装置及具备此的化学制剂自动供应装置 Download PDF

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Publication number
CN113169100B
CN113169100B CN201980081420.8A CN201980081420A CN113169100B CN 113169100 B CN113169100 B CN 113169100B CN 201980081420 A CN201980081420 A CN 201980081420A CN 113169100 B CN113169100 B CN 113169100B
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China
Prior art keywords
locking
driving
connection
chemical
locking device
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Chinese (zh)
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CN113169100A (zh
Inventor
宋勇益
尹炳春
赵济东
蔡熙峯
崔鎭圭
金正坤
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STI Co Ltd
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STI Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
CN201980081420.8A 2018-12-14 2019-01-21 用于供应化学制剂的锁定装置及具备此的化学制剂自动供应装置 Active CN113169100B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020180162311A KR102005957B1 (ko) 2018-12-14 2018-12-14 케미컬 공급을 위한 록킹장치 및 이를 구비한 케미컬 자동공급장치
KR10-2018-0162311 2018-12-14
PCT/KR2019/000814 WO2020122310A1 (fr) 2018-12-14 2019-01-21 Dispositif de verrouillage pour fournir un produit chimique, et appareil d'alimentation chimique automatique le comprenant

Publications (2)

Publication Number Publication Date
CN113169100A CN113169100A (zh) 2021-07-23
CN113169100B true CN113169100B (zh) 2024-03-29

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CN201980081420.8A Active CN113169100B (zh) 2018-12-14 2019-01-21 用于供应化学制剂的锁定装置及具备此的化学制剂自动供应装置

Country Status (4)

Country Link
KR (1) KR102005957B1 (fr)
CN (1) CN113169100B (fr)
SG (1) SG11202105251RA (fr)
WO (1) WO2020122310A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102311339B1 (ko) * 2020-02-06 2021-10-13 호산테크 주식회사 케미컬 이송용 자동 접속장치
KR102249036B1 (ko) * 2020-10-19 2021-05-07 (주)에스티아이 케미컬 필터 교체장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010053914A (ko) * 1999-12-02 2001-07-02 윤종용 케미컬 이송 장치
KR100984073B1 (ko) * 2009-11-30 2010-09-28 주식회사 피에쓰링크 승강장 스크린 도어 시스템의 록킹장치
KR101572537B1 (ko) * 2015-06-15 2015-11-27 주식회사 에이치에스티 케미컬탱크롤리와 acqc 유닛간의 자동 체결 시스템
KR20180002239A (ko) * 2016-06-29 2018-01-08 김태형 케미컬을 이송하는 자동 청정 접속장치의 커넥터 폐쇄장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0141985B1 (ko) * 1994-08-11 1998-07-15 공희택 고순도 케미칼 이송용 호스의 자동연결장치
US8936482B2 (en) * 2011-11-30 2015-01-20 GM Global Technology Operations LLC High voltage safety lock sensing—single sensor linear actuator
KR101692787B1 (ko) * 2015-05-12 2017-01-05 현대중공업 주식회사 차단기
KR101894482B1 (ko) * 2016-06-17 2018-09-03 김태형 케미컬을 이송하는 자동 청정 접속장치의 자동 삽입 시스템

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010053914A (ko) * 1999-12-02 2001-07-02 윤종용 케미컬 이송 장치
KR100984073B1 (ko) * 2009-11-30 2010-09-28 주식회사 피에쓰링크 승강장 스크린 도어 시스템의 록킹장치
KR101572537B1 (ko) * 2015-06-15 2015-11-27 주식회사 에이치에스티 케미컬탱크롤리와 acqc 유닛간의 자동 체결 시스템
KR20180002239A (ko) * 2016-06-29 2018-01-08 김태형 케미컬을 이송하는 자동 청정 접속장치의 커넥터 폐쇄장치

Also Published As

Publication number Publication date
SG11202105251RA (en) 2021-06-29
KR102005957B1 (ko) 2019-08-01
CN113169100A (zh) 2021-07-23
WO2020122310A1 (fr) 2020-06-18

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