WO2020090237A1 - Procédé de maintien, procédé d'usinage et dispositif de maintien - Google Patents

Procédé de maintien, procédé d'usinage et dispositif de maintien Download PDF

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Publication number
WO2020090237A1
WO2020090237A1 PCT/JP2019/035572 JP2019035572W WO2020090237A1 WO 2020090237 A1 WO2020090237 A1 WO 2020090237A1 JP 2019035572 W JP2019035572 W JP 2019035572W WO 2020090237 A1 WO2020090237 A1 WO 2020090237A1
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WO
WIPO (PCT)
Prior art keywords
holding
load
adhesive
held
mirror
Prior art date
Application number
PCT/JP2019/035572
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English (en)
Japanese (ja)
Inventor
充 井上
淳生 遠藤
一貴 木村
柴田　雄吾
Original Assignee
キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by キヤノン株式会社 filed Critical キヤノン株式会社
Publication of WO2020090237A1 publication Critical patent/WO2020090237A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005—Blocking means, chucks or the like; Alignment devices

Definitions

  • the present invention relates to a holding method, a processing method, and a holding device.
  • Patent Document 1 A technology has been proposed in which, when processing a thin optical element, such an optical element, that is, the object to be held, is adhered and fixed to the yatoy using an adhesive such as an alloy (see Patent Document 1).
  • the technique disclosed in Patent Document 1 strictly manages the shape accuracy of the bonding surface between the object to be held and the toy and the thickness of the adhesive when high-precision processing is required for the object to be held. Must be done, which is very difficult to achieve.
  • the held object itself is affected by deformation due to its own weight at the time of bonding and the shape error of the bonding surface and the bonding surface, from the yatoi the shape error of the bonding surface, and from the adhesive the uneven thickness. Therefore, it is bonded (fixed) to the yatoi in a distorted state. If the object to be held is adhered to the toy in a distorted state, even if highly accurate processing is performed on the object to be held, the distortion during adhesion will be restored when the object to be held is peeled off from the toy after processing. I will end up.
  • Patent Document 2 a technique for reducing distortion when adhering an object to be held to a toy has been proposed (see Patent Document 2).
  • a flexible tube is arranged on the surface of the toy, and the object to be held is placed in a state in which the inside of the tube is filled with an epoxy resin to form the object to be held.
  • the epoxy resin is hardened in a shape that follows.
  • a gas-permeable tube is arranged in parallel with the above-mentioned tube, and the atmospheric pressure inside the tube is appropriately controlled.
  • the present invention provides a holding method that is advantageous for holding an object to be held without deforming it.
  • a holding method is a holding method for holding an object to be held by using a toy, and a method of holding the object to be held on the holding surface of the toy via an adhesive, A first step of arranging an object to be held, and a step of applying a load to a second surface opposite to the first surface of the object to be held, which is opposed to the holding surface of the toy, before curing the adhesive; And a third step of curing the adhesive while adhering the held object to the holding surface while applying a load to the second surface of the held object.
  • FIG. 1 is a diagram for explaining a holding method according to one aspect of the present invention.
  • This holding method is a method of holding an object to be held (object to be processed) using the toy 1, and in the present embodiment, a thin optical element as the object to be held or the object to be processed, specifically, a mirror. Holds 3.
  • the toy 1 is a jig for holding an object to be held (high-precision machining, for example, polishing) on an object to be held (object to be processed), and is a holding surface 1a for holding a mirror 3. including.
  • the mirror 3 includes a first surface 3a and a second surface 3b opposite to the first surface 3a, and the first surface 3a forms a back surface including a convex surface and a second surface 3b.
  • the first surface 3a and the second surface 3b form a so-called meniscus shape.
  • the mirror 3 includes, for example, a mirror used in a liquid crystal exposure apparatus and a main mirror used in an astronomical telescope.
  • the holding method uses an adhesive 2 between the touchscreen 1 and the mirror 3, more specifically, between the holding surface 1a of the touchscreen 1 and the first surface 3a of the mirror 3. Fill. Then, before the adhesive 2 is cured, a load 4 is applied (loaded) to the second surface 3b of the mirror 3 which faces the holding surface 1a of the toy 1 and is opposite to the first surface 3a. At this time, the magnitude of the load 4 is determined based on the buoyant force acting on the mirror 3 from the adhesive 2 and the weight of the mirror 3, and the load 4 is applied to the second surface 3b of the mirror 3 with such a magnitude.
  • the magnitude of the load 4 is adjusted (determined) so that the sum of the magnitude of the load 4 and the weight of the mirror 3 becomes equal to the buoyancy acting on the mirror 3 from the adhesive 2. Then, the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3, and the mirror 3 is adhered to the holding surface 1a of the toy 1.
  • the adhesive 2 can be cured while the mirror 2 holds the mirror 3 with substantially zero gravity.
  • the mirror 3 is adhered (fixed) to the hairtoy 1, the influence of the deformation of the mirror 3 due to its own weight, the influence of the shape error of the hairtoy 1 and the mirror 3, and the influence of the uneven thickness of the adhesive 2 are suppressed. You can Therefore, according to the holding method of the present embodiment, the mirror 3 can be held by the toy 1 without being deformed.
  • the adhesive 2 may have a function of connecting the yattoy 1 and the mirror 3.
  • the adhesive 2 for example, gypsum (calcium sulfate) is suitable. Gypsum is advantageous in that it suppresses deformation during bonding because it has a low curing expansion coefficient. Further, gypsum is advantageous in terms of availability and cost.
  • a resin or a low melting point metal may be used as the adhesive 2. Resins and low-melting-point metals are advantageous in shortening the lead time because they have the characteristics that the curing time is short or they are easily peeled off.
  • the load 4 is projected over the area of the adhesive 2, that is, in the second surface 3b of the mirror 3, the area where the first surface 3a of the mirror 3 and the adhesive 2 are in contact is projected on the second surface 3b. It is preferred that the area be evenly applied.
  • the load 4 is applied by spreading the liquid on the second surface of the mirror 3.
  • a sodium polytungstate aqueous solution is suitable. Since the sodium polytungstate aqueous solution has good solubility, it is advantageous in that the specific gravity can be increased and the concentration can be easily adjusted. Further, the sodium polytungstate aqueous solution is advantageous in that it is nontoxic to the human body and has high reusability.
  • the load 4 may be applied by disposing powder or metal particles or resin particles having a small diameter of about 10 mm on the second surface of the mirror 3.
  • Metal particles or resin particles are advantageous in that they can be easily recovered when the load 4 is removed.
  • the holding surface 1a of the yaytoy 1 has a concave shape (including a concave surface) corresponding to the convex shape of the first surface 3a of the mirror 3.
  • the concave shape of the holding surface 1a of the toy 1 has a curvature equal to the curvature of the convex surface of the first surface 3a of the mirror 3.
  • the holding method of the present embodiment is applied to, for example, a processing method for processing the mirror 3 that is a workpiece (holding object).
  • a processing method for processing the mirror 3 that is a workpiece (holding object) After the adhesive 2 is cured, the load 4 applied to the second surface 3b of the mirror 3 is removed (unloaded). Then, the second surface 3b of the mirror 3 held by the toy 1 is subjected to processing such as grinding or polishing. After the second surface 3b of the mirror 3 is processed, the mirror 3 is peeled from the toy 1. For example, by inserting (holding) the second surface 3b of the mirror 3 into the adhesive 2 with a wedge, the mirror 3 can be easily peeled from the toy 1. According to such a processing method, since the deformation (distortion) at the time of adhesion is not restored when the mirror 3 is peeled from the toy 1, the mirror 3 can be processed with high accuracy.
  • a holding method and a processing method of the present embodiment that is, a procedure for processing the mirror 3 by adhering (fixing) the mirror 3 to the yattoy 1 will be specifically described.
  • the yatoy 1 is placed on a work surface plate (not shown).
  • the adhesive 2 is supplied (applied) to the holding surface 1 a of the toy 1.
  • the mirror 3 is placed on the adhesive 2 supplied to the holding surface 1a of the eye toy 1 using a mirror carrying tool (not shown). In this way, the mirror 3 is arranged on the holding surface 1 of the toy 1 via the adhesive 2 (first step).
  • a load insertion tool (not shown) is used to remove the adhesive on the opposite side of the holding surface 1a of the toy 1 from the first surface 3a of the mirror 3.
  • a load 4 is applied to the second surface 3b (second step).
  • the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touch panel 1 (third step).
  • the load 4 applied to the second surface 3b of the mirror 3 is removed using a load discharging tool (not shown) (fourth step). Then, the second surface 3b of the mirror 3 held (fixed) by the toy 1 is processed (cutting, polishing, etc.) (fifth step).
  • the mirror 3 By holding and processing the mirror 3 in such a procedure, as described above, the mirror 3 can be held without being deformed, and the mirror 3 can be processed with high accuracy.
  • the pressure (hydrostatic pressure) P applied from the adhesive 2 to the mirror 3 is the density ⁇ 2 of the adhesive 2 , the gravitational acceleration g, and the adhesive 30 from the point 30. It can be expressed by the following equation (1) using the distance h 2 to the liquid surface.
  • buoyancy F received by the adhesive 2 on the entire first surface 3a of the mirror 3 is the sum of the pressures (hydrostatic pressures) P at the points on the first surface 3a of the mirror 3, and therefore the following formula (2) Can be expressed as
  • the pressure (hydrostatic pressure) that the minute area ds receives from the adhesive 2 is a cylinder 50 formed by extending the minute area ds in the vertical direction.
  • a balance equation is established between the sum of the weight of the mirror 3 and the weight of the load 4 included in.
  • the density of the mirror 3 is ⁇ 3
  • the vertical length of the mirror 3 included in the cylinder 50 is h 3
  • the density of the load 4 is ⁇ 4
  • the vertical length of the load 4 included in the cylinder is h 4 .
  • the balance equation is expressed by the following equation (4).
  • the holding device HA that performs the above-described holding method also constitutes one aspect of the present invention.
  • the holding device HA includes a toy 1, a supply unit SU for supplying the adhesive 2 to the holding surface 1a of the toy 1, and a mirror for mounting the mirror 3 on the adhesive 2 supplied to the holding surface 1a of the toy 1. It has a carrying tool CT and a load input tool LIT for applying a load 4 to the second surface 3b of the mirror 3.
  • the holding device HA performs processing for integrally controlling the load discharge tool LET for removing the load 4 applied to the second surface 3b of the mirror 3 and each part of the holding device HA to hold the mirror 3 in the toy 1, that is, It has processing part PU which performs each process of the above-mentioned holding method.
  • the processing unit PU includes a first processing unit PU1 that controls the supply unit SU and the mirror carrying tool CT to perform a step of disposing the mirror 3 on the holding surface 1a of the yattoo 1 via the adhesive 2. .. Further, the processing unit PU includes the second processing unit PU2 that controls the load input tool LIT to perform the step of applying the load 4 to the second surface 3b of the mirror 3 before the adhesive 2 is cured. Further, the processing unit PU controls the load insertion tool LIT to cure the adhesive 2 while applying the load 4 to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touchscreen 1. It includes a third processing unit PU3 that performs processing. Further, the processing unit PU includes a fourth processing unit PU4 that controls the load discharging tool LET to cure the adhesive 2 and then remove the load 4 applied to the second surface 3b of the mirror 3.
  • the mirror 3 can be held by the toy 1 without being deformed.

Abstract

L'invention concerne un procédé de maintien pour maintenir un article à maintenir à l'aide d'un dispositif de fixation, le procédé de maintien étant caractérisé en ce qu'il comprend : une première étape consistant à disposer, par l'intermédiaire d'un adhésif, l'article à maintenir sur une surface de maintien du dispositif de fixation qui maintient l'article à maintenir ; une deuxième étape consistant à appliquer, avant que l'adhésif ne soit durci, une charge sur une seconde surface opposée à la première surface de l'article à maintenir, la seconde surface faisant face à la surface de maintien du dispositif de fixation ; et une troisième étape consistant à durcir l'adhésif et lier l'article à maintenir à la surface de maintien dans un état dans lequel la charge est appliquée sur la seconde surface de l'article à maintenir.
PCT/JP2019/035572 2018-10-31 2019-09-10 Procédé de maintien, procédé d'usinage et dispositif de maintien WO2020090237A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018205715A JP2020069606A (ja) 2018-10-31 2018-10-31 保持方法、加工方法及び保持装置
JP2018-205715 2018-10-31

Publications (1)

Publication Number Publication Date
WO2020090237A1 true WO2020090237A1 (fr) 2020-05-07

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JP (1) JP2020069606A (fr)
WO (1) WO2020090237A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691507A (ja) * 1992-09-11 1994-04-05 Olympus Optical Co Ltd レンズ貼付皿
JP2002172533A (ja) * 2000-12-06 2002-06-18 Olympus Optical Co Ltd レンズ貼付方法および貼付装置
JP2003025202A (ja) * 2001-07-11 2003-01-29 Olympus Optical Co Ltd レンズ貼付方法および貼付装置
JP2003103443A (ja) * 2001-07-25 2003-04-08 Seiko Epson Corp 研磨用治具及び搬送用トレー
JP2010137316A (ja) * 2008-12-10 2010-06-24 Olympus Corp レンズ貼付方法及びレンズ貼付装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691507A (ja) * 1992-09-11 1994-04-05 Olympus Optical Co Ltd レンズ貼付皿
JP2002172533A (ja) * 2000-12-06 2002-06-18 Olympus Optical Co Ltd レンズ貼付方法および貼付装置
JP2003025202A (ja) * 2001-07-11 2003-01-29 Olympus Optical Co Ltd レンズ貼付方法および貼付装置
JP2003103443A (ja) * 2001-07-25 2003-04-08 Seiko Epson Corp 研磨用治具及び搬送用トレー
JP2010137316A (ja) * 2008-12-10 2010-06-24 Olympus Corp レンズ貼付方法及びレンズ貼付装置

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