WO2020090237A1 - Holding method, machining method, and holding device - Google Patents

Holding method, machining method, and holding device Download PDF

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Publication number
WO2020090237A1
WO2020090237A1 PCT/JP2019/035572 JP2019035572W WO2020090237A1 WO 2020090237 A1 WO2020090237 A1 WO 2020090237A1 JP 2019035572 W JP2019035572 W JP 2019035572W WO 2020090237 A1 WO2020090237 A1 WO 2020090237A1
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Prior art keywords
holding
load
adhesive
held
mirror
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PCT/JP2019/035572
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French (fr)
Japanese (ja)
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充 井上
淳生 遠藤
一貴 木村
柴田 雄吾
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キヤノン株式会社
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Publication of WO2020090237A1 publication Critical patent/WO2020090237A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices

Definitions

  • the present invention relates to a holding method, a processing method, and a holding device.
  • Patent Document 1 A technology has been proposed in which, when processing a thin optical element, such an optical element, that is, the object to be held, is adhered and fixed to the yatoy using an adhesive such as an alloy (see Patent Document 1).
  • the technique disclosed in Patent Document 1 strictly manages the shape accuracy of the bonding surface between the object to be held and the toy and the thickness of the adhesive when high-precision processing is required for the object to be held. Must be done, which is very difficult to achieve.
  • the held object itself is affected by deformation due to its own weight at the time of bonding and the shape error of the bonding surface and the bonding surface, from the yatoi the shape error of the bonding surface, and from the adhesive the uneven thickness. Therefore, it is bonded (fixed) to the yatoi in a distorted state. If the object to be held is adhered to the toy in a distorted state, even if highly accurate processing is performed on the object to be held, the distortion during adhesion will be restored when the object to be held is peeled off from the toy after processing. I will end up.
  • Patent Document 2 a technique for reducing distortion when adhering an object to be held to a toy has been proposed (see Patent Document 2).
  • a flexible tube is arranged on the surface of the toy, and the object to be held is placed in a state in which the inside of the tube is filled with an epoxy resin to form the object to be held.
  • the epoxy resin is hardened in a shape that follows.
  • a gas-permeable tube is arranged in parallel with the above-mentioned tube, and the atmospheric pressure inside the tube is appropriately controlled.
  • the present invention provides a holding method that is advantageous for holding an object to be held without deforming it.
  • a holding method is a holding method for holding an object to be held by using a toy, and a method of holding the object to be held on the holding surface of the toy via an adhesive, A first step of arranging an object to be held, and a step of applying a load to a second surface opposite to the first surface of the object to be held, which is opposed to the holding surface of the toy, before curing the adhesive; And a third step of curing the adhesive while adhering the held object to the holding surface while applying a load to the second surface of the held object.
  • FIG. 1 is a diagram for explaining a holding method according to one aspect of the present invention.
  • This holding method is a method of holding an object to be held (object to be processed) using the toy 1, and in the present embodiment, a thin optical element as the object to be held or the object to be processed, specifically, a mirror. Holds 3.
  • the toy 1 is a jig for holding an object to be held (high-precision machining, for example, polishing) on an object to be held (object to be processed), and is a holding surface 1a for holding a mirror 3. including.
  • the mirror 3 includes a first surface 3a and a second surface 3b opposite to the first surface 3a, and the first surface 3a forms a back surface including a convex surface and a second surface 3b.
  • the first surface 3a and the second surface 3b form a so-called meniscus shape.
  • the mirror 3 includes, for example, a mirror used in a liquid crystal exposure apparatus and a main mirror used in an astronomical telescope.
  • the holding method uses an adhesive 2 between the touchscreen 1 and the mirror 3, more specifically, between the holding surface 1a of the touchscreen 1 and the first surface 3a of the mirror 3. Fill. Then, before the adhesive 2 is cured, a load 4 is applied (loaded) to the second surface 3b of the mirror 3 which faces the holding surface 1a of the toy 1 and is opposite to the first surface 3a. At this time, the magnitude of the load 4 is determined based on the buoyant force acting on the mirror 3 from the adhesive 2 and the weight of the mirror 3, and the load 4 is applied to the second surface 3b of the mirror 3 with such a magnitude.
  • the magnitude of the load 4 is adjusted (determined) so that the sum of the magnitude of the load 4 and the weight of the mirror 3 becomes equal to the buoyancy acting on the mirror 3 from the adhesive 2. Then, the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3, and the mirror 3 is adhered to the holding surface 1a of the toy 1.
  • the adhesive 2 can be cured while the mirror 2 holds the mirror 3 with substantially zero gravity.
  • the mirror 3 is adhered (fixed) to the hairtoy 1, the influence of the deformation of the mirror 3 due to its own weight, the influence of the shape error of the hairtoy 1 and the mirror 3, and the influence of the uneven thickness of the adhesive 2 are suppressed. You can Therefore, according to the holding method of the present embodiment, the mirror 3 can be held by the toy 1 without being deformed.
  • the adhesive 2 may have a function of connecting the yattoy 1 and the mirror 3.
  • the adhesive 2 for example, gypsum (calcium sulfate) is suitable. Gypsum is advantageous in that it suppresses deformation during bonding because it has a low curing expansion coefficient. Further, gypsum is advantageous in terms of availability and cost.
  • a resin or a low melting point metal may be used as the adhesive 2. Resins and low-melting-point metals are advantageous in shortening the lead time because they have the characteristics that the curing time is short or they are easily peeled off.
  • the load 4 is projected over the area of the adhesive 2, that is, in the second surface 3b of the mirror 3, the area where the first surface 3a of the mirror 3 and the adhesive 2 are in contact is projected on the second surface 3b. It is preferred that the area be evenly applied.
  • the load 4 is applied by spreading the liquid on the second surface of the mirror 3.
  • a sodium polytungstate aqueous solution is suitable. Since the sodium polytungstate aqueous solution has good solubility, it is advantageous in that the specific gravity can be increased and the concentration can be easily adjusted. Further, the sodium polytungstate aqueous solution is advantageous in that it is nontoxic to the human body and has high reusability.
  • the load 4 may be applied by disposing powder or metal particles or resin particles having a small diameter of about 10 mm on the second surface of the mirror 3.
  • Metal particles or resin particles are advantageous in that they can be easily recovered when the load 4 is removed.
  • the holding surface 1a of the yaytoy 1 has a concave shape (including a concave surface) corresponding to the convex shape of the first surface 3a of the mirror 3.
  • the concave shape of the holding surface 1a of the toy 1 has a curvature equal to the curvature of the convex surface of the first surface 3a of the mirror 3.
  • the holding method of the present embodiment is applied to, for example, a processing method for processing the mirror 3 that is a workpiece (holding object).
  • a processing method for processing the mirror 3 that is a workpiece (holding object) After the adhesive 2 is cured, the load 4 applied to the second surface 3b of the mirror 3 is removed (unloaded). Then, the second surface 3b of the mirror 3 held by the toy 1 is subjected to processing such as grinding or polishing. After the second surface 3b of the mirror 3 is processed, the mirror 3 is peeled from the toy 1. For example, by inserting (holding) the second surface 3b of the mirror 3 into the adhesive 2 with a wedge, the mirror 3 can be easily peeled from the toy 1. According to such a processing method, since the deformation (distortion) at the time of adhesion is not restored when the mirror 3 is peeled from the toy 1, the mirror 3 can be processed with high accuracy.
  • a holding method and a processing method of the present embodiment that is, a procedure for processing the mirror 3 by adhering (fixing) the mirror 3 to the yattoy 1 will be specifically described.
  • the yatoy 1 is placed on a work surface plate (not shown).
  • the adhesive 2 is supplied (applied) to the holding surface 1 a of the toy 1.
  • the mirror 3 is placed on the adhesive 2 supplied to the holding surface 1a of the eye toy 1 using a mirror carrying tool (not shown). In this way, the mirror 3 is arranged on the holding surface 1 of the toy 1 via the adhesive 2 (first step).
  • a load insertion tool (not shown) is used to remove the adhesive on the opposite side of the holding surface 1a of the toy 1 from the first surface 3a of the mirror 3.
  • a load 4 is applied to the second surface 3b (second step).
  • the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touch panel 1 (third step).
  • the load 4 applied to the second surface 3b of the mirror 3 is removed using a load discharging tool (not shown) (fourth step). Then, the second surface 3b of the mirror 3 held (fixed) by the toy 1 is processed (cutting, polishing, etc.) (fifth step).
  • the mirror 3 By holding and processing the mirror 3 in such a procedure, as described above, the mirror 3 can be held without being deformed, and the mirror 3 can be processed with high accuracy.
  • the pressure (hydrostatic pressure) P applied from the adhesive 2 to the mirror 3 is the density ⁇ 2 of the adhesive 2 , the gravitational acceleration g, and the adhesive 30 from the point 30. It can be expressed by the following equation (1) using the distance h 2 to the liquid surface.
  • buoyancy F received by the adhesive 2 on the entire first surface 3a of the mirror 3 is the sum of the pressures (hydrostatic pressures) P at the points on the first surface 3a of the mirror 3, and therefore the following formula (2) Can be expressed as
  • the pressure (hydrostatic pressure) that the minute area ds receives from the adhesive 2 is a cylinder 50 formed by extending the minute area ds in the vertical direction.
  • a balance equation is established between the sum of the weight of the mirror 3 and the weight of the load 4 included in.
  • the density of the mirror 3 is ⁇ 3
  • the vertical length of the mirror 3 included in the cylinder 50 is h 3
  • the density of the load 4 is ⁇ 4
  • the vertical length of the load 4 included in the cylinder is h 4 .
  • the balance equation is expressed by the following equation (4).
  • the holding device HA that performs the above-described holding method also constitutes one aspect of the present invention.
  • the holding device HA includes a toy 1, a supply unit SU for supplying the adhesive 2 to the holding surface 1a of the toy 1, and a mirror for mounting the mirror 3 on the adhesive 2 supplied to the holding surface 1a of the toy 1. It has a carrying tool CT and a load input tool LIT for applying a load 4 to the second surface 3b of the mirror 3.
  • the holding device HA performs processing for integrally controlling the load discharge tool LET for removing the load 4 applied to the second surface 3b of the mirror 3 and each part of the holding device HA to hold the mirror 3 in the toy 1, that is, It has processing part PU which performs each process of the above-mentioned holding method.
  • the processing unit PU includes a first processing unit PU1 that controls the supply unit SU and the mirror carrying tool CT to perform a step of disposing the mirror 3 on the holding surface 1a of the yattoo 1 via the adhesive 2. .. Further, the processing unit PU includes the second processing unit PU2 that controls the load input tool LIT to perform the step of applying the load 4 to the second surface 3b of the mirror 3 before the adhesive 2 is cured. Further, the processing unit PU controls the load insertion tool LIT to cure the adhesive 2 while applying the load 4 to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touchscreen 1. It includes a third processing unit PU3 that performs processing. Further, the processing unit PU includes a fourth processing unit PU4 that controls the load discharging tool LET to cure the adhesive 2 and then remove the load 4 applied to the second surface 3b of the mirror 3.
  • the mirror 3 can be held by the toy 1 without being deformed.

Abstract

Provided is a holding method for holding an article to be held by using a fixture, the holding method being characterized by having: a first step for disposing, via an adhesive, the article to be held on a holding surface of the fixture which holds the article to be held; a second step for applying, before the adhesive is cured, a load on a second surface opposite to the first surface of the article to be held, the second surface facing the holding surface of the fixture; and a third step for curing the adhesive and bonding the article to be held to the holding surface in a state where the load is applied on the second surface of the article to be held.

Description

保持方法、加工方法及び保持装置Holding method, processing method and holding device
 本発明は、保持方法、加工方法及び保持装置に関する。 The present invention relates to a holding method, a processing method, and a holding device.
 薄型の光学素子を加工する際に、かかる光学素子、即ち、被保持物を、アロイなどの接着剤を用いてヤトイに接着して固定する技術が提案されている(特許文献1参照)。但し、特許文献1に開示された技術は、被保持物に対して高精度な加工が要求される場合、被保持物とヤトイとの接着面の形状精度や接着剤の厚さを厳重に管理しなければならないため、その実現が非常に困難である。 A technology has been proposed in which, when processing a thin optical element, such an optical element, that is, the object to be held, is adhered and fixed to the yatoy using an adhesive such as an alloy (see Patent Document 1). However, the technique disclosed in Patent Document 1 strictly manages the shape accuracy of the bonding surface between the object to be held and the toy and the thickness of the adhesive when high-precision processing is required for the object to be held. Must be done, which is very difficult to achieve.
 また、被保持物は、自身からは接着時の自重による変形や接着面や接着面の形状誤差の影響を、ヤトイからは接着面の形状誤差の影響を、接着剤からは厚さむらの影響を受けるため、歪んだ状態でヤトイに接着(固定)される。被保持物が歪んだ状態でヤトイに接着されると、被保持物に対して高精度な加工を行ったとしても、加工後に被保持物をヤトイから剥がす際に接着時の歪みが復元してしまう。 In addition, the held object itself is affected by deformation due to its own weight at the time of bonding and the shape error of the bonding surface and the bonding surface, from the yatoi the shape error of the bonding surface, and from the adhesive the uneven thickness. Therefore, it is bonded (fixed) to the yatoi in a distorted state. If the object to be held is adhered to the toy in a distorted state, even if highly accurate processing is performed on the object to be held, the distortion during adhesion will be restored when the object to be held is peeled off from the toy after processing. I will end up.
 そこで、被保持物をヤトイに接着する際の歪みを低減するための技術も提案されている(特許文献2参照)。特許文献2に開示された技術では、ヤトイの表面に可撓性のチューブを配置し、かかるチューブの内部にエポキシ樹脂を満たした状態で被保持物を載置して、被保持物の形状に倣った形状でエポキシ樹脂を硬化させる。更に、特許文献2に開示された技術では、上述したチューブと並行して気体を通したチューブを配置し、かかるチューブの内部の気圧を適宜制御している。 Therefore, a technique for reducing distortion when adhering an object to be held to a toy has been proposed (see Patent Document 2). According to the technique disclosed in Patent Document 2, a flexible tube is arranged on the surface of the toy, and the object to be held is placed in a state in which the inside of the tube is filled with an epoxy resin to form the object to be held. The epoxy resin is hardened in a shape that follows. Furthermore, in the technique disclosed in Patent Document 2, a gas-permeable tube is arranged in parallel with the above-mentioned tube, and the atmospheric pressure inside the tube is appropriately controlled.
特開2002-187056号公報Japanese Unexamined Patent Publication No. 2002-187056 米国特許第5,228,243号公報US Pat. No. 5,228,243
 しかしながら、特許文献2に開示された技術では、チューブ間の保持がなされず、かかる部分で被保持物の形状が歪んでしまうため、被保持物の変形が十分に抑制されているとはいえない。更に、特許文献2に開示された技術では、チューブがヤトイに固定されていないため、被保持物の加工時に必要な保持力が不足することが容易に想定される。 However, in the technique disclosed in Patent Document 2, the tubes are not held, and the shape of the held object is distorted at such portions, so it cannot be said that the deformation of the held object is sufficiently suppressed. .. Further, in the technique disclosed in Patent Document 2, since the tube is not fixed to the toy, it is easily assumed that the holding force required when processing the held object is insufficient.
 本発明は、被保持物を変形させずに保持するのに有利な保持方法を提供する。 The present invention provides a holding method that is advantageous for holding an object to be held without deforming it.
 本発明の一側面としての保持方法は、ヤトイを用いて被保持物を保持する保持方法であって、前記被保持物を保持する前記ヤトイの保持面の上に、接着剤を介して、前記被保持物を配置する第1工程と、前記接着剤を硬化させる前に、前記ヤトイの保持面と対向する前記被保持物の第1面とは反対側の第2面に荷重をかける第2工程と、前記被保持物の前記第2面に荷重をかけた状態で前記接着剤を硬化させて前記保持面に前記被保持物を接着させる第3工程と、を有することを特徴とする。 A holding method according to one aspect of the present invention is a holding method for holding an object to be held by using a toy, and a method of holding the object to be held on the holding surface of the toy via an adhesive, A first step of arranging an object to be held, and a step of applying a load to a second surface opposite to the first surface of the object to be held, which is opposed to the holding surface of the toy, before curing the adhesive; And a third step of curing the adhesive while adhering the held object to the holding surface while applying a load to the second surface of the held object.
 本発明によれば、例えば、被保持物を変形させずに保持するのに有利な保持方法を提供することができる。 According to the present invention, for example, it is possible to provide a holding method that is advantageous for holding an object to be held without deforming it.
 本発明のその他の特徴及び利点は、添付図面を参照とした以下の説明により明らかになるであろう。なお、添付図面においては、同じ若しくは同様の構成には、同じ参照番号を付す。 Other features and advantages of the present invention will be apparent from the following description with reference to the accompanying drawings. Note that, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals.
 添付図面は明細書に含まれ、その一部を構成し、本発明の実施の形態を示し、その記述と共に本発明の原理を説明するために用いられる。
本発明の一側面としての保持方法を説明するための図である。 本発明の一側面としての保持方法及び加工方法を具体的に説明するための図である。 本発明の一側面としての保持方法及び加工方法を具体的に説明するための図である。 本発明の一側面としての保持方法及び加工方法を具体的に説明するための図である。 本発明の一側面としての保持方法及び加工方法を具体的に説明するための図である。 本発明の一側面としての保持方法及び加工方法を具体的に説明するための図である。 ミラーの第2面にかける荷重の大きさを決定する方法を説明するための図である。 本発明の一側面としての保持装置の構成を示す概略図である。
The accompanying drawings are included in the specification and constitute a part of the specification, illustrate the embodiments of the present invention, and together with the description, serve to explain the principles of the present invention.
It is a figure for explaining the holding method as one side of the present invention. It is a figure for explaining concretely a holding method and a processing method as one side of the present invention. It is a figure for explaining concretely a holding method and a processing method as one side of the present invention. It is a figure for explaining concretely a holding method and a processing method as one side of the present invention. It is a figure for explaining concretely a holding method and a processing method as one side of the present invention. It is a figure for explaining concretely a holding method and a processing method as one side of the present invention. It is a figure for demonstrating the method of determining the magnitude of the load applied to the 2nd surface of a mirror. It is a schematic diagram showing composition of a holding device as one side of the present invention.
 図1は、本発明の一側面としての保持方法を説明するための図である。かかる保持方法は、ヤトイ1を用いて被保持物(被加工物)を保持する方法であって、本実施形態では、被保持物や被加工物として薄型の光学素子、具体的には、ミラー3を保持する。 FIG. 1 is a diagram for explaining a holding method according to one aspect of the present invention. This holding method is a method of holding an object to be held (object to be processed) using the toy 1, and in the present embodiment, a thin optical element as the object to be held or the object to be processed, specifically, a mirror. Holds 3.
 ヤトイ1は、被保持物(被加工物)に対して高精度な加工、例えば、研磨を行う際に、被保持物を保持するための治具であって、ミラー3を保持する保持面1aを含む。ミラー3は、本実施形態では、第1面3aと、第1面3aとは反対側の第2面3bとを含み、第1面3aは、凸面を含む裏面を形成し、第2面3bは、凹面形状を有する(凹面を含む)反射面を形成する。このように、第1面3a及び第2面3bは、所謂、メニスカス形状を形成する。ミラー3は、例えば、液晶露光装置に用いられるミラーや天体望遠鏡に用いされる主鏡などを含む。 The toy 1 is a jig for holding an object to be held (high-precision machining, for example, polishing) on an object to be held (object to be processed), and is a holding surface 1a for holding a mirror 3. including. In the present embodiment, the mirror 3 includes a first surface 3a and a second surface 3b opposite to the first surface 3a, and the first surface 3a forms a back surface including a convex surface and a second surface 3b. Form a reflective surface having a concave shape (including a concave surface). Thus, the first surface 3a and the second surface 3b form a so-called meniscus shape. The mirror 3 includes, for example, a mirror used in a liquid crystal exposure apparatus and a main mirror used in an astronomical telescope.
 本実施形態における保持方法は、図1に示すように、ヤトイ1とミラー3との間、詳細には、ヤトイ1の保持面1aとミラー3の第1面3aとの間に接着剤2を充填する。次いで、接着剤2を硬化させる前に、ヤトイ1の保持面1aと対向するミラー3の第1面3aとは反対側の第2面3bに荷重4をかける(載荷する)。この際、接着剤2からミラー3に作用する浮力と、ミラー3の重量とに基づいて、荷重4の大きさを決定し、かかる大きさでミラー3の第2面3bに荷重4をかける。具体的には、荷重4の大きさとミラー3の重量との和が接着剤2からミラー3に作用する浮力と等しくなるように荷重4の大きさを調整(決定)する。そして、ミラー3の第2面3bに荷重4をかけた状態で接着剤2を硬化させて、ヤトイ1の保持面1aにミラー3を接着させる。 As shown in FIG. 1, the holding method according to the present embodiment uses an adhesive 2 between the touchscreen 1 and the mirror 3, more specifically, between the holding surface 1a of the touchscreen 1 and the first surface 3a of the mirror 3. Fill. Then, before the adhesive 2 is cured, a load 4 is applied (loaded) to the second surface 3b of the mirror 3 which faces the holding surface 1a of the toy 1 and is opposite to the first surface 3a. At this time, the magnitude of the load 4 is determined based on the buoyant force acting on the mirror 3 from the adhesive 2 and the weight of the mirror 3, and the load 4 is applied to the second surface 3b of the mirror 3 with such a magnitude. Specifically, the magnitude of the load 4 is adjusted (determined) so that the sum of the magnitude of the load 4 and the weight of the mirror 3 becomes equal to the buoyancy acting on the mirror 3 from the adhesive 2. Then, the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3, and the mirror 3 is adhered to the holding surface 1a of the toy 1.
 本実施形態の保持方法によれば、ヤトイ1がミラー3を略無重力で保持した状態で接着剤2を硬化させることができる。これにより、ミラー3をヤトイ1に接着(固定)する際における、ミラー3の自重による変形の影響、ヤトイ1及びミラー3の形状誤差の影響、接着剤2の厚さむらの影響を抑制することができる。従って、本実施形態の保持方法は、ミラー3を変形させることなく、ヤトイ1で保持することができる。 According to the holding method of this embodiment, the adhesive 2 can be cured while the mirror 2 holds the mirror 3 with substantially zero gravity. Thereby, when the mirror 3 is adhered (fixed) to the hairtoy 1, the influence of the deformation of the mirror 3 due to its own weight, the influence of the shape error of the hairtoy 1 and the mirror 3, and the influence of the uneven thickness of the adhesive 2 are suppressed. You can Therefore, according to the holding method of the present embodiment, the mirror 3 can be held by the toy 1 without being deformed.
 ここで、接着剤2は、ヤトイ1とミラー3とを結合する機能を有していればよい。接着剤2としては、例えば、石膏(硫酸カルシウム)が好適である。石膏は、硬化膨張率が低いため、接着時の変形を抑える点で有利である。更に、石膏は、入手性やコストの点でも有利である。また、接着剤2として、樹脂又は低融点金属を用いてもよい。樹脂や低融点金属は、硬化時間が短い、或いは、剥離しやすいという特徴を有しているため、リードタイムの短縮の点で有利である。 _Here, the adhesive 2 may have a function of connecting the yattoy 1 and the mirror 3. As the adhesive 2, for example, gypsum (calcium sulfate) is suitable. Gypsum is advantageous in that it suppresses deformation during bonding because it has a low curing expansion coefficient. Further, gypsum is advantageous in terms of availability and cost. Alternatively, a resin or a low melting point metal may be used as the adhesive 2. Resins and low-melting-point metals are advantageous in shortening the lead time because they have the characteristics that the curing time is short or they are easily peeled off.
 荷重4は、接着剤2の領域にわたって、即ち、ミラー3の第2面3bのうち、ミラー3の第1面3aと接着剤2とが接触している領域が第2面3bに投影された領域に均一にかけることが好ましい。本実施形態では、ミラー3の第2面上に液体を張ることで荷重4をかける。かかる液体としては、例えば、ポリタングステン酸ナトリウム水溶液が好適である。ポリタングステン酸ナトリウム水溶液は、溶解性が良好であるため、比重を高くすることが可能であり、且つ、濃度調整が容易である点で有利である。更に、ポリタングステン酸ナトリウム水溶液は、人体に無毒である点や再利用性が高い点でも有利である。 The load 4 is projected over the area of the adhesive 2, that is, in the second surface 3b of the mirror 3, the area where the first surface 3a of the mirror 3 and the adhesive 2 are in contact is projected on the second surface 3b. It is preferred that the area be evenly applied. In this embodiment, the load 4 is applied by spreading the liquid on the second surface of the mirror 3. As such a liquid, for example, a sodium polytungstate aqueous solution is suitable. Since the sodium polytungstate aqueous solution has good solubility, it is advantageous in that the specific gravity can be increased and the concentration can be easily adjusted. Further, the sodium polytungstate aqueous solution is advantageous in that it is nontoxic to the human body and has high reusability.
 また、ミラー3の第2面上に、粉末、或いは、10mm程度の小径の金属粒又は樹脂粒を配置することで荷重4をかけてもよい。金属粒又は樹脂粒は、荷重4を取り除く際に、回収が容易である点で有利である。 Further, the load 4 may be applied by disposing powder or metal particles or resin particles having a small diameter of about 10 mm on the second surface of the mirror 3. Metal particles or resin particles are advantageous in that they can be easily recovered when the load 4 is removed.
 ヤトイ1の保持面1aは、ミラー3の第1面3aの凸面形状に対応して、凹面形状を有する(凹面を含む)。ヤトイ1の保持面1aの凹面形状は、本実施形態では、ミラー3の第1面3aの凸面の曲率と等しい曲率を有する。これにより、接着剤2の厚さを均一化し、接着剤2の硬化時の膨張や収縮によるミラー3の変形への影響を均一化することが可能となる。 The holding surface 1a of the yaytoy 1 has a concave shape (including a concave surface) corresponding to the convex shape of the first surface 3a of the mirror 3. In this embodiment, the concave shape of the holding surface 1a of the toy 1 has a curvature equal to the curvature of the convex surface of the first surface 3a of the mirror 3. As a result, the thickness of the adhesive 2 can be made uniform, and the influence on the deformation of the mirror 3 due to the expansion and contraction of the adhesive 2 during curing can be made uniform.
 本実施形態の保持方法は、例えば、被加工物(被保持物)であるミラー3を加工する加工方法に適用される。かかる加工方法では、接着剤2を硬化させた後に、ミラー3の第2面3bにかけている荷重4を取り除く(除荷する)。そして、ヤトイ1に保持されたミラー3の第2面3bに対して、研削加工や研磨加工などの加工を行う。ミラー3の第2面3bを加工した後、ヤトイ1からミラー3を剥離する。例えば、ミラー3の第2面3bを吸着(保持)しながら、接着剤2にくさびを入れることで、ヤトイ1からミラー3を容易に剥離することができる。このような加工方法によれば、ヤトイ1からミラー3を剥離する際に接着時の変形(歪み)が復元することがないため、ミラー3を高精度に加工することができる。 The holding method of the present embodiment is applied to, for example, a processing method for processing the mirror 3 that is a workpiece (holding object). In this processing method, after the adhesive 2 is cured, the load 4 applied to the second surface 3b of the mirror 3 is removed (unloaded). Then, the second surface 3b of the mirror 3 held by the toy 1 is subjected to processing such as grinding or polishing. After the second surface 3b of the mirror 3 is processed, the mirror 3 is peeled from the toy 1. For example, by inserting (holding) the second surface 3b of the mirror 3 into the adhesive 2 with a wedge, the mirror 3 can be easily peeled from the toy 1. According to such a processing method, since the deformation (distortion) at the time of adhesion is not restored when the mirror 3 is peeled from the toy 1, the mirror 3 can be processed with high accuracy.
 図2A乃至図2Eを参照して、本実施形態の保持方法及び加工方法、即ち、ヤトイ1にミラー3を接着(固定)してミラー3を加工する手順について具体的に説明する。 With reference to FIGS. 2A to 2E, a holding method and a processing method of the present embodiment, that is, a procedure for processing the mirror 3 by adhering (fixing) the mirror 3 to the yattoy 1 will be specifically described.
 まず、図2Aに示すように、作業定盤(不図示)の上にヤトイ1を配置する。次いで、図2Bに示すように、ヤトイ1の保持面1aに接着剤2を供給(塗布)する。次に、図2Cに示すように、ヤトイ1の保持面1aに供給された接着剤2の上に、ミラー運搬工具(不図示)を用いてミラー3を載置する。このように、ヤトイ1の保持面1の上に、接着剤2を介して、ミラー3を配置する(第1工程)。 First, as shown in FIG. 2A, the yatoy 1 is placed on a work surface plate (not shown). Next, as shown in FIG. 2B, the adhesive 2 is supplied (applied) to the holding surface 1 a of the toy 1. Next, as shown in FIG. 2C, the mirror 3 is placed on the adhesive 2 supplied to the holding surface 1a of the eye toy 1 using a mirror carrying tool (not shown). In this way, the mirror 3 is arranged on the holding surface 1 of the toy 1 via the adhesive 2 (first step).
 次いで、図2Dに示すように、接着剤2を硬化させる前に、荷重投入工具(不図示)を用いて、ヤトイ1の保持面1aと対向するミラー3の第1面3aとは反対側の第2面3bに荷重4をかける(第2工程)。そして、ミラー3の第2面3bに荷重4をかけた状態を維持しながら接着剤2が硬化するまで待機する。このように、ミラー3の第2面3bに荷重4をかけた状態で接着剤2を硬化させてヤトイ1の保持面1aにミラー3を接着させる(第3工程)。 Then, as shown in FIG. 2D, before the adhesive 2 is cured, a load insertion tool (not shown) is used to remove the adhesive on the opposite side of the holding surface 1a of the toy 1 from the first surface 3a of the mirror 3. A load 4 is applied to the second surface 3b (second step). Then, while maintaining the state in which the load 4 is applied to the second surface 3b of the mirror 3, it waits until the adhesive 2 is cured. In this way, the adhesive 2 is cured while the load 4 is applied to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touch panel 1 (third step).
 次に、図2Eに示すように、接着剤2を硬化させた後に、荷重排出工具(不図示)を用いて、ミラー3の第2面3bにかけている荷重4を取り除く(第4工程)。そして、ヤトイ1に保持(固定)されたミラー3の第2面3bを加工(切削加工や研磨加工など)する(第5工程)。 Next, as shown in FIG. 2E, after the adhesive 2 is cured, the load 4 applied to the second surface 3b of the mirror 3 is removed using a load discharging tool (not shown) (fourth step). Then, the second surface 3b of the mirror 3 held (fixed) by the toy 1 is processed (cutting, polishing, etc.) (fifth step).
 このような手順でミラー3を保持及び加工することで、上述したように、ミラー3を変形させることなく保持することができ、且つ、ミラー3を高精度に加工することができる。 By holding and processing the mirror 3 in such a procedure, as described above, the mirror 3 can be held without being deformed, and the mirror 3 can be processed with high accuracy.
 図3を参照して、接着剤2を硬化させる前にミラー3の第2面3bにかける荷重4の大きさを決定する方法について説明する。ミラー3の第1面3aの側のある点30において、接着剤2からミラー3にかかる圧力(静水圧)Pは、接着剤2の密度ρ、重力加速度g、点30から接着剤2の液面までの距離hを用いて、以下の式(1)で表すことができる。 A method for determining the magnitude of the load 4 applied to the second surface 3b of the mirror 3 before the adhesive 2 is cured will be described with reference to FIG. At a certain point 30 on the side of the first surface 3 a of the mirror 3, the pressure (hydrostatic pressure) P applied from the adhesive 2 to the mirror 3 is the density ρ 2 of the adhesive 2 , the gravitational acceleration g, and the adhesive 30 from the point 30. It can be expressed by the following equation (1) using the distance h 2 to the liquid surface.
 P=ρ×g×h   ・・・(1)
 更に、ミラー3の第1面3aの全面が接着剤2から受ける浮力Fは、ミラー3の第1面3aの各点の圧力(静水圧)Pの総和であるため、以下の式(2)で表すことができる。
P = ρ 2 × g × h 2 (1)
Further, the buoyancy F received by the adhesive 2 on the entire first surface 3a of the mirror 3 is the sum of the pressures (hydrostatic pressures) P at the points on the first surface 3a of the mirror 3, and therefore the following formula (2) Can be expressed as
 F=ΣP   ・・・(2)
 式(2)に示す浮力Fが、ミラー3の重量M3gと、荷重4の大きさM4gとの和と等しくなるように、具体的には、以下の式(3)を満たすように、荷重4の大きさM4gを決定する。
F = ΣP (2)
The buoyancy F shown in Expression (2) is equal to the sum of the weight M 3g of the mirror 3 and the magnitude M 4g of the load 4, specifically, to satisfy the following Expression (3), The magnitude M 4g of load 4 is determined.
 F=M3g+M4g   ・・・(3)
 更に、ミラー3の第1面3aの側の微小面積をdsとすると、微小面積dsが接着剤2から受ける圧力(静水圧)は、微小面積dsを鉛直方向に延ばすことで形成される円筒50に含まれるミラー3と荷重4の重量との和との間に釣り合いの式が成り立つ。ミラー3の密度をρ、円筒50に含まれるミラー3の鉛直方向の長さをhとし、荷重4の密度をρ、円筒に含まれる荷重4の鉛直方向の長さをhとすると、釣り合いの式は、以下の式(4)で表される。
F = M 3g + M 4g (3)
Furthermore, assuming that the minute area on the first surface 3a side of the mirror 3 is ds, the pressure (hydrostatic pressure) that the minute area ds receives from the adhesive 2 is a cylinder 50 formed by extending the minute area ds in the vertical direction. A balance equation is established between the sum of the weight of the mirror 3 and the weight of the load 4 included in. The density of the mirror 3 is ρ 3 , the vertical length of the mirror 3 included in the cylinder 50 is h 3 , the density of the load 4 is ρ 4 , and the vertical length of the load 4 included in the cylinder is h 4 . Then, the balance equation is expressed by the following equation (4).
 P×ds={(ρ×g×h)+(ρ×g×h)}×ds   ・・・(4)
 式(4)がミラー3の第1面3aの側の全面で成り立てば、無重力状態で変形を抑えたミラー3の保持を実現することができる。式(4)の両辺をdsで除し、式(1)を代入すると、以下の式(5)が得られ、これが無重力状態で変形を抑えたミラー3の保持を実現する条件となる。
P × ds = {(ρ 3 × g × h 3 ) + (ρ 4 × g × h 4 )} × ds (4)
If the formula (4) is satisfied on the entire surface of the mirror 3 on the first surface 3a side, it is possible to realize the holding of the mirror 3 in which deformation is suppressed in a weightless state. By dividing both sides of the equation (4) by ds and substituting the equation (1), the following equation (5) is obtained, which is a condition for realizing the holding of the mirror 3 in which deformation is suppressed in a weightless state.
 ρ×g×h=(ρ×g×h)+(ρ×g×h)   ・・・(5)
 なお、図4に示すように、上述した保持方法を行う保持装置HAも本発明の一側面を構成する。保持装置HAは、ヤトイ1と、ヤトイ1の保持面1aに接着剤2を供給する供給部SUと、ヤトイ1の保持面1aに供給された接着剤2の上にミラー3を載置するミラー運搬工具CTと、ミラー3の第2面3bに荷重4をかける荷重投入工具LITとを有する。また、保持装置HAは、ミラー3の第2面3bにかけている荷重4を取り除く荷重排出工具LETと、保持装置HAの各部を統括的に制御してミラー3をヤトイ1に保持させる処理、即ち、上述した保持方法の各工程を行う処理部PUとを有する。
ρ 2 × g × h 2 = (ρ 3 × g × h 3 ) + (ρ 4 × g × h 4 ) ... (5)
Note that, as shown in FIG. 4, the holding device HA that performs the above-described holding method also constitutes one aspect of the present invention. The holding device HA includes a toy 1, a supply unit SU for supplying the adhesive 2 to the holding surface 1a of the toy 1, and a mirror for mounting the mirror 3 on the adhesive 2 supplied to the holding surface 1a of the toy 1. It has a carrying tool CT and a load input tool LIT for applying a load 4 to the second surface 3b of the mirror 3. Further, the holding device HA performs processing for integrally controlling the load discharge tool LET for removing the load 4 applied to the second surface 3b of the mirror 3 and each part of the holding device HA to hold the mirror 3 in the toy 1, that is, It has processing part PU which performs each process of the above-mentioned holding method.
 処理部PUは、供給部SU及びミラー運搬工具CTを制御して、ヤトイ1の保持面1aの上に、接着剤2を介して、ミラー3を配置する工程を行う第1処理部PU1を含む。また、処理部PUは、荷重投入工具LITを制御して、接着剤2を硬化させる前に、ミラー3の第2面3bに荷重4をかける工程を行う第2処理部PU2を含む。更に、処理部PUは、荷重投入工具LITを制御して、ミラー3の第2面3bに荷重4をかけた状態で接着剤2を硬化させてヤトイ1の保持面1aにミラー3を接着させる処理を行う第3処理部PU3を含む。更に、処理部PUは、荷重排出工具LETを制御して、接着剤2を硬化させた後に、ミラー3の第2面3bにかけている荷重4を取り除く工程を行う第4処理部PU4を含む。 The processing unit PU includes a first processing unit PU1 that controls the supply unit SU and the mirror carrying tool CT to perform a step of disposing the mirror 3 on the holding surface 1a of the yattoo 1 via the adhesive 2. .. Further, the processing unit PU includes the second processing unit PU2 that controls the load input tool LIT to perform the step of applying the load 4 to the second surface 3b of the mirror 3 before the adhesive 2 is cured. Further, the processing unit PU controls the load insertion tool LIT to cure the adhesive 2 while applying the load 4 to the second surface 3b of the mirror 3 to bond the mirror 3 to the holding surface 1a of the touchscreen 1. It includes a third processing unit PU3 that performs processing. Further, the processing unit PU includes a fourth processing unit PU4 that controls the load discharging tool LET to cure the adhesive 2 and then remove the load 4 applied to the second surface 3b of the mirror 3.
 本実施形態の保持装置HAによれば、ミラー3を変形させることなく、ヤトイ1で保持することができる。 According to the holding device HA of the present embodiment, the mirror 3 can be held by the toy 1 without being deformed.
 本発明は上記実施の形態に制限されるものではなく、本発明の精神及び範囲から離脱することなく、様々な変更及び変形が可能である。従って、本発明の範囲を公にするために、以下の請求項を添付する。 The present invention is not limited to the above embodiments, and various changes and modifications can be made without departing from the spirit and scope of the present invention. Therefore, in order to make the scope of the present invention public, the following claims are attached.
 本願は、2018年10月31日提出の日本国特許出願特願2018-205715を基礎として優先権を主張するものであり、その記載内容の全てを、ここに援用する。 This application claims priority on the basis of Japanese patent application Japanese Patent Application No. 2018-205715 filed on October 31, 2018, and the entire contents of the description are incorporated herein.

Claims (12)

  1.  ヤトイを用いて被保持物を保持する保持方法であって、
     前記被保持物を保持する前記ヤトイの保持面の上に、接着剤を介して、前記被保持物を配置する第1工程と、
     前記接着剤を硬化させる前に、前記ヤトイの保持面と対向する前記被保持物の第1面とは反対側の第2面に荷重をかける第2工程と、
     前記被保持物の前記第2面に荷重をかけた状態で前記接着剤を硬化させて前記保持面に前記被保持物を接着させる第3工程と、
     を有することを特徴とする保持方法。
    A holding method for holding an object to be held using a toy,
    A first step of disposing the held object via an adhesive on the holding surface of the unit that holds the held object;
    A second step of applying a load to a second surface of the held object, which is opposite to the first surface of the held object, before the adhesive is cured;
    A third step of curing the adhesive in a state where a load is applied to the second surface of the held object to bond the held object to the holding surface;
    A holding method comprising:
  2.  前記第2工程では、前記第2面のうち、前記第1面と前記接着剤とが接触している領域が前記第2面に投影された領域に前記荷重をかけることを特徴とする請求項1に記載の保持方法。 In the second step, the load is applied to an area of the second surface where the first surface and the adhesive are in contact with each other and the area projected onto the second surface. The holding method described in 1.
  3.  前記第2工程では、前記接着剤から前記被保持物に作用する浮力と、前記被保持物の重量とに基づいて、前記荷重の大きさを決定し、当該大きさで前記第2面に前記荷重をかけることを特徴とする請求項1に記載の保持方法。 In the second step, the magnitude of the load is determined on the basis of the buoyancy force acting on the held object from the adhesive and the weight of the held object, and the magnitude of the load is determined by the size of the load on the second surface. The holding method according to claim 1, wherein a load is applied.
  4.  前記第2工程では、前記荷重の大きさと前記被保持物の重量との和が前記浮力の大きさと等しくなるように、前記荷重の大きさを決定することを特徴とする請求項3に記載の保持方法。 The magnitude of the load is determined in the second step so that the sum of the magnitude of the load and the weight of the held object is equal to the magnitude of the buoyancy. Retention method.
  5.  前記第2工程では、前記第2面上に液体を張ることで前記荷重をかけることを特徴とする請求項1に記載の保持方法。 The holding method according to claim 1, wherein in the second step, the load is applied by stretching a liquid on the second surface.
  6.  前記液体は、ポリタングステン酸ナトリウム水溶液を含むことを特徴とする請求項5に記載の保持方法。 The holding method according to claim 5, wherein the liquid contains an aqueous solution of sodium polytungstate.
  7.  前記第2工程では、前記第2面上に金属粒又は樹脂粒を配置することで前記荷重をかけることを特徴とする請求項1に記載の保持方法。 The holding method according to claim 1, wherein in the second step, the load is applied by disposing metal particles or resin particles on the second surface.
  8.  前記接着剤は、硫酸カルシウム、樹脂又は低融点金属を含むことを特徴とする請求項1に記載の保持方法。 The holding method according to claim 1, wherein the adhesive contains calcium sulfate, resin, or a low melting point metal.
  9.  前記第1面は、凸面を含み、
     前記第2面は、凹面を含むことを特徴とする請求項1に記載の保持方法。
    The first surface includes a convex surface,
    The holding method according to claim 1, wherein the second surface includes a concave surface.
  10.  前記保持面は、凹面を含み、
     前記保持面の前記凹面は、前記第1面の前記凸面の曲率と等しい曲率を有することを特徴とする請求項9に記載の保持方法。
    The holding surface includes a concave surface,
    The holding method according to claim 9, wherein the concave surface of the holding surface has a curvature equal to that of the convex surface of the first surface.
  11.  被加工物を加工する加工方法であって、
     前記被加工物を保持するヤトイの保持面の上に、接着剤を介して、前記被加工物を配置する第1工程と、
     前記接着剤を硬化させる前に、前記ヤトイの保持面と対向する前記被加工物の第1面とは反対側の第2面に荷重をかける第2工程と、
     前記被加工物の前記第2面に荷重をかけた状態で前記接着剤を硬化させて前記保持面に前記被加工物を接着させる第3工程と、
     前記接着剤を硬化させた後に、前記被加工物の前記第2面にかけている荷重を取り除く第4工程と、
     前記ヤトイに保持された前記被加工物の前記第2面を加工する第5工程と、
     を有することを特徴とする加工方法。
    A processing method for processing a workpiece,
    A first step of arranging the work piece via an adhesive on a holding surface of a toy holding the work piece;
    A second step of applying a load to a second surface of the workpiece opposite to the first surface of the workpiece, which is opposed to the holding surface of the toy, before the adhesive is cured;
    A third step of curing the adhesive while applying a load to the second surface of the workpiece to bond the workpiece to the holding surface;
    A fourth step of removing the load applied to the second surface of the workpiece after the adhesive is cured,
    A fifth step of processing the second surface of the workpiece held by the toy,
    A processing method comprising:
  12.  被保持物を保持する保持装置であって、
     前記被保持物を保持するヤトイと、
     前記被保持物を前記ヤトイに保持させる処理を行う処理部と、
     を有し、
     前記処理部は、
     前記被保持物を保持する前記ヤトイの保持面の上に、接着剤を介して、前記被保持物を配置する第1工程と、
     前記接着剤を硬化させる前に、前記ヤトイの保持面と対向する前記被保持物の第1面とは反対側の第2面に荷重をかける第2工程と、
     前記被保持物の前記第2面に荷重をかけた状態で前記接着剤を硬化させて前記保持面に前記被保持物を接着させる第3工程と、
     を行うことを特徴とする保持装置。
    A holding device for holding an object to be held,
    A toy holding the object to be held,
    A processing unit that performs a process of holding the held object in the yatto,
    Have
    The processing unit is
    A first step of disposing the held object via an adhesive on the holding surface of the unit that holds the held object;
    A second step of applying a load to a second surface of the held object, which is opposite to the first surface of the held object, before the adhesive is cured;
    A third step of curing the adhesive in a state where a load is applied to the second surface of the held object to bond the held object to the holding surface;
    A holding device characterized by performing.
PCT/JP2019/035572 2018-10-31 2019-09-10 Holding method, machining method, and holding device WO2020090237A1 (en)

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JP2018205715A JP2020069606A (en) 2018-10-31 2018-10-31 Holding method, processing method, and holding device

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691507A (en) * 1992-09-11 1994-04-05 Olympus Optical Co Ltd Lens sticking bowl
JP2002172533A (en) * 2000-12-06 2002-06-18 Olympus Optical Co Ltd Lens pasting method and pasting device
JP2003025202A (en) * 2001-07-11 2003-01-29 Olympus Optical Co Ltd Lens sticking method and sticking device
JP2003103443A (en) * 2001-07-25 2003-04-08 Seiko Epson Corp Polishing tool and conveying tray
JP2010137316A (en) * 2008-12-10 2010-06-24 Olympus Corp Lens joining method and lens joining device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691507A (en) * 1992-09-11 1994-04-05 Olympus Optical Co Ltd Lens sticking bowl
JP2002172533A (en) * 2000-12-06 2002-06-18 Olympus Optical Co Ltd Lens pasting method and pasting device
JP2003025202A (en) * 2001-07-11 2003-01-29 Olympus Optical Co Ltd Lens sticking method and sticking device
JP2003103443A (en) * 2001-07-25 2003-04-08 Seiko Epson Corp Polishing tool and conveying tray
JP2010137316A (en) * 2008-12-10 2010-06-24 Olympus Corp Lens joining method and lens joining device

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