WO2020082551A1 - 一种可精密调节的介质阻挡放电装置及方法 - Google Patents
一种可精密调节的介质阻挡放电装置及方法 Download PDFInfo
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- WO2020082551A1 WO2020082551A1 PCT/CN2018/121826 CN2018121826W WO2020082551A1 WO 2020082551 A1 WO2020082551 A1 WO 2020082551A1 CN 2018121826 W CN2018121826 W CN 2018121826W WO 2020082551 A1 WO2020082551 A1 WO 2020082551A1
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- upper cover
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- dielectric barrier
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- bottom plate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
Definitions
- the present disclosure relates to the technical field of high voltage and gas discharge, in particular to a dielectric barrier discharge device and method that can be precisely adjusted.
- Dielectric barrier discharge can generate low-temperature plasma at atmospheric pressure.
- Dielectric barrier discharge has been widely used in material modification, plasma display, atomic spectroscopy, etc., and has gradually formed a brand-new industry-plasma industry.
- the current dielectric barrier discharge device is mainly an integrated structure, in which the two electrodes used in the discharge test have the problem of inconvenience when replacing, which will result in a dielectric barrier discharge device that can only perform between the electrodes of one attribute For the discharge, when the plasma generated by the discharge between different electrode properties needs to be tested, it cannot be effectively analyzed.
- the present disclosure provides a finely adjustable dielectric barrier discharge device, which facilitates the replacement of the discharge electrode therein, and is used to realize the research of generating low temperature plasma by discharging gas under different electrode states.
- a precisely adjustable dielectric barrier discharge device includes a discharge cavity enclosed by an upper cover, a cavity barrel and a bottom plate, the discharge cavity is provided with two discharge electrodes, and the two discharge electrodes are realized by a translation unit Adjustment of the discharge gap between;
- the upper cover and the cavity barrel are connected in a detachable manner to achieve a fixed connection and quick disassembly between the upper cover and the cavity barrel.
- a further technical solution is that a driving ring is provided above the upper cover, a mounting ring is provided at the top of the upper cover, and a mounting groove matching the mounting ring is provided at the bottom of the driving ring, and the mounting ring is placed in the mounting groove to achieve the upper
- the cover is rotationally connected to the drive ring.
- a plurality of grooves are provided at the bottom of the drive ring, a fixing plate is installed in the groove, and a plurality of sockets are provided on the top of the upper cover, and the plurality of sockets are distributed on the same circumference.
- Several thread holes are also provided on the top, and several thread holes are also distributed on the same circumference.
- a further technical solution is that a plurality of locking blocks are fixed on the outer wall of the upper part of the cavity barrel, and several locking blocks are distributed on the same circumference, and a locking rod is fixed on the top of the locking block, and the locking The upper part of the rod is provided with a ring groove, and a conical block is fixed on the top of the locking rod;
- a chute between the wire hole and the jack, a locking pin is slidably installed in the chute, a positioning plate is also fixed in the chute, and a locking spring is provided between the positioning plate and the locking pin. Under the action, the action end of the locking pin extends into the jack;
- the wire wheel is located at the intersection of the chute and the wire hole.
- a wire is provided between the fixed plate and the locking pin. The wire is in contact with the outer wall of the wire wheel and the wire passes through the positioning plate. Under the action of the lock spring in a natural state, The locking pin extends into the ring groove on the locking rod. When the locking rod is placed in the insertion hole, the fixed connection between the upper cover and the cavity barrel is realized.
- a torsion spring is provided between the drive ring and the upper cover, and the drive ring and the upper cover can be reset by themselves after being staggered under the action of the torsion spring.
- a seal ring is provided between the top of the cavity barrel and the upper cover to ensure the tightness of the upper cover after being buckled on the cavity barrel.
- the upper surface of the upper cover is provided with an air inlet
- the bottom plate is provided with an exhaust port
- an insulating sleeve is provided above the upper cover.
- the insulating sleeve is made of ceramic material and is provided at the lower end of the insulating sleeve There is a flange, and the insulating sleeve is fixedly connected to the upper cover through the flange.
- a grounding head is provided on the inner side of the insulating sleeve for high-voltage electricity. The lower end of the grounding head passes through the circular hole in the center of the upper cover and extends into the discharge In the cavity, a first electrode is fixed on the lower end of the grounding head;
- a further technical solution is that a number of supporting rods evenly arranged in the circumferential direction are fixed on the bottom of the bottom plate, a grounding joint is provided on the bottom plate, the translation unit is an electric cylinder fixed on the bottom of the bottom plate, and is fixed on the piston rod of the electric cylinder There is a second electrode, the grounding connector is electrically connected to the second electrode, the grounding connector is used for grounding, and the axes of the first and second electrodes are arranged collinearly.
- a number of screws uniformly distributed on the same circumference are provided between the upper cover and the bottom plate, and the upper end and the lower end of the screw are respectively provided
- the nut, the upper end nut is in contact with the upper cover, and the lower end nut is in contact with the bottom plate to achieve a fixed connection between the cavity barrel, the upper cover, and the bottom plate.
- Another object of the present disclosure is to provide a method for a precision-adjustable dielectric barrier discharge device, which specifically adopts the following technical solutions:
- a method for precisely adjusting a dielectric barrier discharge device includes:
- the electric cylinder controls the expansion and contraction of the piston rod to realize the automatic adjustment of the discharge gap.
- a dielectric barrier discharge device with precise adjustment provided by the present disclosure is simple in structure and simple to use. It can evacuate the air in the discharge chamber and charge the discharge gas into the discharge chamber; the upper cover, the cavity barrel and the bottom plate The room can be firmly connected together to form a closed discharge cavity; the upper cover, the cavity tube and the bottom plate are easily disassembled to facilitate the replacement of the first and second electrodes.
- the electric cylinder can drive the change of the distance between the first and second electrodes, and each time the electric cylinder moves, the distance between the first and second electrodes increases or decreases by 0.5 mm, the adjustment accuracy is high, and it is convenient for gas Discharge to study.
- FIG. 3 is a cross-sectional view A-A of some implementation examples of the present application in FIG. 2;
- FIG 5 is another schematic diagram of the connection of the upper cover, the cavity barrel and the bottom plate of some implementation examples of the present application.
- FIG. 6 is a cross-sectional view of some implementation examples of this application in FIG. 5;
- FIG. 7 is a schematic diagram of the appearance of a cavity barrel of some implementation examples of this application.
- FIG. 9 is a partially enlarged schematic view of some implementation examples A of FIG. 6 of this application.
- a typical implementation example of the present application discloses a finely adjustable dielectric barrier discharge device, as shown in FIGS. 1 to 9, the present disclosure mainly includes an upper cover 1, a bottom plate 2, a support rod 21, and a grounding joint 22 , The cavity barrel 3, the screw 4, the nut 5, the insulating sleeve 6, the first electrode 63, the terminal 64, the electric cylinder 7, the second electrode 72 and the washer 8, the following describes the present disclosure in detail with reference to the drawings.
- the upper cover 1 and the bottom plate 2 are both circular plate-shaped structures, and the upper cover and the bottom plate are made of acrylic material.
- An air inlet 11 is provided on the upper surface of the upper cover, and the air inlet is provided eccentrically, and the air inlet penetrates the lower surface of the upper cover to form a through hole, and the air inlet is used to connect with the air intake pump.
- a suction port 23 is provided on the bottom plate, the suction port is eccentrically arranged, and the suction port penetrates the bottom plate. The suction port is used to connect with the suction pump.
- a cavity barrel 3 is provided between the upper cover and the bottom plate.
- the cavity barrel 3 is made of acrylic material.
- the upper end of the cavity barrel is in contact with the upper cover, and the lower end of the cavity barrel is in contact with the bottom plate.
- a number of screws 4 are evenly distributed on the same circumference between the upper cover and the bottom plate.
- Nuts 5 are respectively provided on the upper and lower ends of the screw.
- the upper nut contacts the upper cover and the lower nut It is in contact with the bottom plate, so that the fixed connection between the upper cover, the cavity barrel and the bottom plate is realized through a number of screws and nuts.
- a discharge cavity is formed between the upper cover, the cavity tube and the bottom plate.
- rubber gaskets 8 are respectively provided between the upper cover and the cavity tube and between the cavity tube and the bottom plate .
- the air inlet and the air exhaust port are both in communication with the discharge cavity.
- the discharge cavity is charged with discharge gas through the air intake, and the discharge cavity is evacuated through the air exhaust port.
- An insulating sleeve 6 is provided above the upper cover.
- the insulating sleeve is made of ceramic material.
- a flange 61 is provided at the lower end of the insulating sleeve.
- the insulating sleeve is fixedly connected to the upper cover through the flange.
- the flange is made of aluminum alloy, and the flange and the upper cover can be screwed or adhesively connected.
- a grounding head 62 is provided on the inner side of the insulating sleeve.
- the grounding head is made of copper and is used for connecting high voltage electricity.
- the lower end of the grounding head passes through the circular hole 12 in the center of the upper cover and then extends into the discharge cavity.
- a first electrode 63 is fixed to the lower end of the grounding head, and the first electrode is made of aluminum material.
- a plurality of supporting rods 21 made of acrylic material uniformly arranged in the circumferential direction are fixed on the bottom of the bottom plate.
- the supporting rods are provided for supporting the discharge chamber, and a grounding joint 22 is provided on the bottom plate.
- An electric cylinder 7 is fixed to the bottom of the bottom plate, and a second electrode 72 is fixed to the piston rod 71 of the electric cylinder.
- the second electrode is also made of aluminum.
- the grounding connector is electrically connected to the second electrode, and the grounding connector is used for grounding, thereby further grounding the second electrode. Under the action of the electric cylinder, the distance that the second electrode moves up and down every time is 0.5mm.
- the axes of the first and second electrodes are arranged collinearly, and there is a discharge gap between the first electrode and the second electrode, and plasma is generated in the discharge gap.
- a driving ring 13 is provided above the upper cover, a mounting ring 14 is provided at the top of the upper cover, and a mounting groove matching the mounting ring is provided at the bottom of the driving ring. Install in the groove to realize the rotational connection between the upper cover and the drive ring.
- Four grooves 131 are provided at the bottom of the drive ring, and the grooves have a circular structure, and a fixing plate 132 is threadedly installed in the grooves.
- jacks 15 are provided on the top of the upper cover, and the four jacks are evenly distributed on the same circumference.
- Four line holes 16 are also provided on the top of the upper cover, and the four line holes are evenly distributed on the same circumference, and the circumferential radius where the line holes are located is larger than the circumferential radius where the jacks are located, four line holes and four jacks One to one correspondence.
- a fixed connection method is adopted between the bottom plate and the cavity barrel, and a good seal between the two is ensured, and a detachable connection method is adopted between the cavity barrel and the upper cover.
- Four locking blocks 31 are fixed on the outer wall of the upper part of the cavity barrel, and the four locking blocks are evenly distributed on the same circumference.
- a lock lever 32 is fixed on the top of the lock block, and a ring groove 33 is provided on the upper portion of the lock lever. The arrangement of the ring groove makes the outer diameter of the upper portion of the lock lever smaller than the outer diameter of the lower portion of the lock lever.
- a tapered block 34 is fixed on the top of the lock lever.
- the tapered block is a tapered structure with a small upper end and a large lower end, and the edges of the tapered block are provided with rounded corners.
- a sliding slot 17 is provided between the line hole and the jack, a locking pin 9 is slidably installed in the sliding slot, a positioning plate 91 is also fixed in the sliding slot, and a locking spring is provided between the positioning plate and the locking pin 92. The action end of the lock pin extends into the socket under the action of the lock spring.
- the wire wheel 93 is located at the intersection of the chute and the wire hole.
- a wire 94 is provided between the fixing plate and the locking pin. The upper end of the wire is fixedly connected to the fixing plate. The lower end of the wire is fixedly connected to the locking pin.
- the outer wall of is in contact with and the wire passes through the positioning plate.
- the locking pin In the natural state, under the action of the locking spring, the locking pin extends into the ring groove on the locking lever.
- the locking lever When the locking lever is placed in the insertion hole, the fixed connection between the upper cover and the cavity barrel is realized.
- a torsion spring is arranged between the drive ring and the upper cover, and under the action of the torsion spring, the drive ring and the upper cover can be reset after being staggered from each other.
- the drive ring When the drive ring is in the initial position, the cable is in a straight state but there is no tension on the cable.
- the pull wire When the drive ring is rotated, the pull wire can be pulled, which in turn compresses the lock spring.
- the lock pin moves in the ring groove and gradually moves out of the socket until the lock pin is separated from the lock rod.
- the cover is removed from the cavity barrel.
- a sealing ring 8 is provided between the top of the cavity barrel and the upper cover to ensure the tightness of the upper cover after being buckled on the cavity barrel.
- the installation method between the upper cover and the cavity barrel can quickly achieve the fixed connection between the upper cover and the cavity barrel, and It can be quickly disassembled to facilitate the replacement of the first and second electrodes, and to study the discharge under different sizes of the first and second electrodes.
- Another implementation example of the present application discloses a method of using a finely adjustable dielectric barrier discharge device.
- the method of using the present disclosure is described below:
- the air inlet is closed, and part of the air in the discharge chamber is extracted through the air extraction port, which can realize the change of the air pressure in the discharge chamber, and can realize the gas discharge of atmospheric pressure or low pressure;
- the discharge chamber can also be evacuated through the air extraction port, and then closed.
- the gas port is used to fill the discharge chamber with discharge gas (such as nitrogen, helium, argon, etc.) through the air inlet to achieve the discharge of the flushing gas;
- high voltage source such as power frequency, radio frequency, microwave, pulse power, etc.
- the electric cylinder controls the expansion and contraction of the piston rod to realize the automatic adjustment and precise adjustment of the discharge gap to accurately grasp the influence of the discharge gap on the gas discharge and the generated plasma.
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Abstract
一种可精密调节的介质阻挡放电装置及方法，介质阻挡放电装置包括由上盖（1）、腔体筒（3）和底板（2）之间围成的放电腔体，放电腔体内设置有两个放电电极（63、72），通过平移单元实现两个放电电极（63、72）之间放电间隙的调整；上盖（1）、腔体筒（3）之间通过可拆卸的方式相连，实现上盖（1）与腔体筒（3）之间的固定连接及快速拆卸。上盖（1）、腔体筒（3）和底板（2）之间可以牢固的连接在一起，进而围成封闭的放电腔体；上盖（1）、腔体筒（3）和底板（2）之间又便于拆卸，以便于第一电极（63）、第二电极（72）的更换。通过电动缸（7）可以驱动第一电极（63）、第二电极（72）之间距离的改变，且电动缸（7）每动作一次，第一电极（63）、第二电极（72）之间的距离增大或减小0.5mm，调节精度高，可方便对气体放电进行研究。
Description
本公开涉及高电压与气体放电技术领域，特别是涉及一种可精密调节的介质阻挡放电装置及方法。
介质阻挡放电可以在大气压下产生出低温等离子体，介质阻挡放电已在材料改性、等离子体显示、原子光谱等方面都获得了广泛应用，并已逐渐形成一个崭新的工业-等离子体工业。
目前的介质阻挡放电装置主要为一体式结构，其中用于放电试验的两个电极在更换时存在不方便更换的问题，这样就会导致一种介质阻挡放电装置只能进行一种属性的电极间的放电，当需要测试不同电极属性之间的放电产生的等离子体的情况无法进行有效的分析。
因此，亟需一种更为合适的介质阻挡放电装置，能够便于实现装置中电极的更换。
发明内容
为了解决现有技术的不足，本公开提供了一种可精密调节的介质阻挡放电装置，方便其中的放电电极的更换，用于实现在不同电极状态下使气体放电产生低温等离子体的研究。
为了实现上述目的，本申请采用以下技术方案：
一种可精密调节的介质阻挡放电装置，包括由上盖、腔体筒和底板之间围成的放电腔体，所述放电腔体内设置有两个放电电极，通过平移单元实现两个放电电极之间放电间隙的调整；
上盖、腔体筒之间通过可拆卸的方式相连，实现上盖与腔体筒之间的固定连接及快速拆卸。
进一步的技术方案，所述上盖的上方设有驱动环，上盖的顶部设有安装环，在驱动环的底部设有与安装环配合的安装槽，安装环置于安装槽中以实现上盖与驱动环的转动连接。
更进一步的技术方案，驱动环的底部设有若干凹槽，凹槽内安装有固定板，在上盖的顶部设有若干个插孔，若干个插孔在同一圆周上分布，在上盖的顶部还设有若干个线孔，若干个线孔也在同一圆周上分布。
进一步的技术方案，所述腔体筒上部的外壁上固定有若干个锁止块，若干个锁止块在同一圆周上分布，所述锁止块的顶部固定有锁止杆，所述锁止杆的上部设有环槽，在锁止杆的顶部固定有锥形块；
线孔与插孔之间设有滑槽，滑槽内滑动安装有锁止销，滑槽内还固定有定位板，定位板与锁止销之间设有锁止弹簧，在锁止弹簧的作用下锁止销的作用端伸入插孔中；
线轮位于滑槽与线孔的交汇处，在固定板与锁止销之间设有拉线，拉线与线轮的外壁接触且拉线穿过定位板，自然状态下在锁止弹簧的作用下，锁止销伸入到锁止杆上的环槽中，锁止杆置于插孔中时，进而实现上盖与腔体筒的固定连接。
进一步的技术方案，驱动环与上盖之间设有扭簧，驱动环与上盖之间在扭簧的作用下相互错开后可以自行复位。
进一步的技术方案，驱动环位于初始位置时，拉线处于绷直状态但拉线上无拉力，旋转驱动环时，拉动拉线，进而使得锁止弹簧受压缩，与此同时锁止销在环槽中移动并逐渐从插孔中移出，直至锁止销与锁止杆分离后，将上盖从腔体筒上卸下。
进一步的技术方案，所述腔体筒的顶部与所述上盖之间设有密封圈，以保证将上盖扣在腔体筒上后的密封性。
进一步的技术方案，所述上盖的上表面设有进气口，所述底板上设有抽气口，上盖的上方设有绝缘套管，绝缘套管为陶瓷材质在绝缘套管的下端设有法兰，绝缘套管通过法兰与上盖固定连接，在绝缘套管的内侧设有接地头，用于接高压电，接地头的下端穿过上盖中心的圆孔后伸入放电腔体内，在接地头的下端固定有第一电极；
进一步的技术方案，在底板的底部固定有若干沿周向均匀设置的支撑杆，在底板上设有接地接头，平移单元为固定在底板的底部上的电动缸，在电动缸的活塞杆上固定有第二电极，接地接头与第二电极电连接，接地接头用于接地，第一、第二电极的轴线共线设置。
作为上盖与腔体筒之间为可拆卸方式连接的另一种技术方案，所述上盖与底板之间设有若干在同一圆周上均匀分布的螺杆，在螺杆的上端与下端分别设有螺母，上端螺母与上盖接触，下端螺母与底板接触，实现腔体筒与上盖、底板三者之间固定连接。
本公开的另一目的是提供了一种可精密调节的介质阻挡放电装置的方法，具体采用以下技术方案：
一种可精密调节的介质阻挡放电装置的方法，包括：
封闭进气口，通过抽气口抽取放电腔体内的部分空气，实现放电腔体内气压的变化，可实现大气压或低气压的气体放电；或通过抽气口将放电腔体抽真空，然后封闭抽气口，通过进气口向放电腔体内充入放电气体，在接线头上连接高压源，以实现冲入气体的放电；
拆卸上盖、腔体筒，更换第一、第二电极，实现不同属性第一电极、第二电极的放电；
通过电动缸控制活塞杆的伸缩，实现放电间隙的自动调节。
与现有技术相比，本公开的有益效果是：
本公开提供的一种可精密调节的介质阻挡放电装置，结构简单、使用简单，可以将放电 腔体内的空气抽出，又可以向放电腔体内充入放电气体；上盖、腔体筒和底板之间可以牢固的连接在一起，进而围成封闭的放电腔体；上盖、腔体筒和底板之间又便于拆卸，以便于第一、第二电极的更换。通过电动缸可以驱动第一、第二电极之间距离的改变，且电动缸每动作一次，第一、第二电极之间的距离增大或减小0.5mm，调节精度高，可方便对气体放电进行研究。
构成本申请的一部分的说明书附图用来提供对本申请的进一步理解，本申请的示意性实施例及其说明用于解释本申请，并不构成对本申请的不当限定。
图1为本申请一些实施例子的三维示意图；
图2为本申请一些实施例子的正面示意图；
图3为图2中本申请一些实施例子的A-A剖视图；
图4为本申请一些实施例子的仰视图；
图5为本申请一些实施例子上盖、腔体筒和底板的另一种连接示意图；
图6为图5本申请一些实施例子的剖视图；
图7为本申请一些实施例子的腔体筒的外形示意图；
图8为本申请一些实施例子的上盖的俯视示意图；
图9为图6中本申请一些实施例子A处局部放大示意图；
图中：1上盖，11进气口，12圆孔，13驱动环，131凹槽，132固定板，14安装环，15插孔，16线孔，17滑槽，2底板，21支撑杆，22接地接头，23抽气口，3腔体筒，31锁止块，32锁止杆，33环槽，34锥形块，4螺杆，5螺母，6绝缘套管，61法兰，62接线头，63第一电极，7电动缸，71活塞杆，72第二电极，8垫圈，9锁止销，91定位板，92锁止弹簧，93线轮，94拉线。
应该指出，以下详细说明都是例示性的，旨在对本申请提供进一步的说明。除非另有指明，本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。
需要注意的是，这里所使用的术语仅是为了描述具体实施方式，而非意图限制根据本申 请的示例性实施方式。如在这里所使用的，除非上下文另外明确指出，否则单数形式也意图包括复数形式，此外，还应当理解的是，当在本说明书中使用术语“包含”和/或“包括”时，其指明存在特征、步骤、操作、器件、组件和/或它们的组合。
本申请的一种典型的实施例子，公开了一种可精密调节的介质阻挡放电装置，如图1至图9所示，本公开主要包括上盖1、底板2、支撑杆21、接地接头22、腔体筒3、螺杆4、螺母5、绝缘套管6、第一电极63、接线头64、电动缸7、第二电极72和垫圈8，下面结合附图对本公开进行详细描述。
如图1至图4所示，上盖1和底板2均为圆形的板状结构，且上盖和底板均为亚克力材质。在上盖的上表面设有进气口11，进气口偏心设置，且进气口贯穿上盖的下表面形成通孔，进气口用于与进气泵连接。在底板上设有抽气口23，抽气口偏心设置，且抽气口贯穿底板。抽气口用于与抽气泵连接。
在上盖与底板之间设有腔体筒3，腔体筒3为亚克力材质，腔体筒的上端与上盖接触，腔体筒的下端与底板接触，为实现腔体筒与上盖、底板三者之间的固定连接，在上盖与底板之间设有若干在同一圆周上均匀分布的螺杆4，在螺杆的上端与下端分别设有螺母5，上端螺母与上盖接触，下端螺母与底板接触，这样通过若干螺杆和螺母实现上盖、腔体筒和底板之间的固定连接。上盖、腔体筒和底板之间形成放电腔体，为保证放电腔体良好的密封性，在上盖与腔体筒之间、腔体筒与底板之间分别设有橡胶材质的垫圈8。进气口、抽气口均与放电腔体连通，使用时通过进气口向放电腔体充入放电气体，通过抽气口将放电腔体抽真空。
在上盖的上方设有绝缘套管6，绝缘套管为陶瓷材质在绝缘套管的下端设有法兰61，绝缘套管通过法兰与上盖固定连接。法兰为铝合金材质，法兰与上盖之间可以螺纹连接，也可以粘接连接。在绝缘套管的内侧设有接地头62，接地头为铜材质，用于接高压电。接地头的下端穿过上盖中心的圆孔12后伸入放电腔体内，在接地头的下端固定有第一电极63，第一电极为铝质材料。
在底板的底部固定有若干沿周向均匀设置的亚克力材质的支撑杆21，支撑杆的设置用于实现对放电腔体的支撑，在底板上设有接地接头22。在底板的底部固定有电动缸7，在电动缸的活塞杆71上固定有第二电极72，第二电极也为铝制材料。接地接头与第二电极电连接，接地接头用于接地，进而使得第二电极实现接地。在电动缸的作用下，第二电极每次上下移动的距离为0.5mm。第一、第二电极的轴线共线设置，且第一电极与第二电极之间具有放电间隙，在放电间隙中产生等离子体。
在本申请的另一实施例子中，为方便第一、第二电极的更换，上盖、腔体筒和底板之间可以采取其它安装方式。如图5至图8所示，在上盖的上方设有驱动环13，在上盖的顶部设有安装环14，在驱动环的底部设有与安装环配合的安装槽，安装环置于安装槽中以实现上盖与驱动环的转动连接。在驱动环的底部设有四个凹槽131，在凹槽为圆形结构，在凹槽内螺纹安装有固定板132。在上盖的顶部设有四个插孔15，四个插孔在同一圆周上均匀分布。在上盖的顶部还设有四个线孔16，四个线孔也在同一圆周上均匀分布，且线孔所在的圆周半径大于插孔所在的圆周半径，四个线孔与四个插孔一一对应。
底板与腔体筒之间则采用固定连接的方式，并保证两者之间良好的密封性，腔体筒与上盖之间则采取可拆卸式的连接方式。在腔体筒上部的外壁上固定有四个锁止块31，四个锁止块在同一圆周上均匀分布。在锁止块的顶部固定有锁止杆32，在锁止杆的上部设有环槽33，环槽的设置使得锁止杆的上部外径小于锁止杆下部的外径。在锁止杆的顶部固定有锥形块34，锥形块为上端小、下端大的锥形结构，且锥形块的边棱上设有圆角。在线孔与插孔之间设有滑槽17，在滑槽内滑动安装有锁止销9，在滑槽内还固定有定位板91，在定位板与锁止销之间设有锁止弹簧92，在锁止弹簧的作用下锁止销的作用端伸入插孔中。线轮93位于滑槽与线孔的交汇处，在固定板与锁止销之间设有拉线94，拉线的上端与固定板固定连接，拉线的下端与锁止销固定连接，拉线与线轮的外壁接触且拉线穿过定位板。自然状态下在锁止弹簧的作用下，锁止销伸入到锁止杆上的环槽中，锁止杆置于插孔中时，进而实现上盖与腔体筒的固定连接。在驱动环与上盖之间设有扭簧，在扭簧的作用下驱动环与上盖之间相互错开后可以自行复位。且驱动环位于初始位置时，拉线处于绷直状态但拉线上无拉力。旋转驱动环时，可以拉动拉线，进而使得锁止弹簧受压缩，与此同时锁止销在环槽中移动并逐渐从插孔中移出，直至锁止销与锁止杆分离后，便可以将上盖从腔体筒上卸下。在腔体筒的顶部与上盖之间设有密封圈8，以保证将上盖扣在腔体筒上后的密封性。
相对于上盖、腔体筒与底板之间通过螺杆固定连接的方式而言，上盖与腔体筒之间的安装方式既可以快速的实现上盖与腔体筒之间的固定连接，又可以实现快速拆卸，以便于更换第一、第二电极，研究不同尺寸的第一、第二电极下的放电情况。
本申请的另一实施例子中公开了一种可精密调节的介质阻挡放电装置的使用方法，下面对本公开的使用方法进行描述：
封闭进气口，通过抽气口抽取放电腔体内的部分空气，可以实现放电腔体内气压的变化，可实现大气压或低气压的气体放电；也可以通过抽气口将放电腔体抽真空，然后封闭抽气口， 通过进气口向放电腔体内充入放电气体(如氮气、氦气、氩气等)，以实现冲入气体的放电；
在接线头上连接高压源(如工频、射频、微波、脉冲电源等)；
改变第一、第二电极的材料、厚度、形状或尺寸，实现不同属性第一、第二电极的放电；
通过电动缸控制活塞杆的伸缩，实现放电间隙的自动调节和精准调节，以准确把握放电间隙对气体放电和产生的等离子体的影响。
以上所述仅为本申请的优选实施例而已，并不用于限制本申请，对于本领域的技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本申请的保护范围之内。
Claims (10)
- 一种可精密调节的介质阻挡放电装置，其特征是，包括由上盖、腔体筒和底板之间围成的放电腔体，所述放电腔体内设置有两个放电电极，通过平移单元实现两个放电电极之间放电间隙的调整；上盖、腔体筒之间通过可拆卸的方式相连，实现上盖与腔体筒之间的固定连接及快速拆卸。
- 如权利要求1所述的一种可精密调节的介质阻挡放电装置，其特征是，所述上盖的上方设有驱动环，上盖的顶部设有安装环，在驱动环的底部设有与安装环配合的安装槽，安装环置于安装槽中以实现上盖与驱动环的转动连接。
- 如权利要求2所述的一种可精密调节的介质阻挡放电装置，其特征是，驱动环的底部设有若干凹槽，凹槽内安装有固定板，在上盖的顶部设有若干个插孔，若干个插孔在同一圆周上分布，在上盖的顶部还设有若干个线孔，若干个线孔也在同一圆周上分布。
- 如权利要求1所述的一种可精密调节的介质阻挡放电装置，其特征是，所述腔体筒上部的外壁上固定有若干个锁止块，若干个锁止块在同一圆周上分布，所述锁止块的顶部固定有锁止杆，所述锁止杆的上部设有环槽，在锁止杆的顶部固定有锥形块；线孔与插孔之间设有滑槽，滑槽内滑动安装有锁止销，滑槽内还固定有定位板，定位板与锁止销之间设有锁止弹簧，在锁止弹簧的作用下锁止销的作用端伸入插孔中；线轮位于滑槽与线孔的交汇处，在固定板与锁止销之间设有拉线，拉线与线轮的外壁接触且拉线穿过定位板，自然状态下在锁止弹簧的作用下，锁止销伸入到锁止杆上的环槽中，锁止杆置于插孔中时，进而实现上盖与腔体筒的固定连接。
- 如权利要求2所述的一种可精密调节的介质阻挡放电装置，其特征是，驱动环与上盖之间设有扭簧，驱动环与上盖之间在扭簧的作用下相互错开后可以自行复位。
- 如权利要求2所述的一种可精密调节的介质阻挡放电装置，其特征是，驱动环位于初始位置时，拉线处于绷直状态但拉线上无拉力，旋转驱动环时，拉动拉线，进而使得锁止弹簧受压缩，与此同时锁止销在环槽中移动并逐渐从插孔中移出，直至锁止销与锁止杆分离后，将上盖从腔体筒上卸下。
- 如权利要求1所述的一种可精密调节的介质阻挡放电装置，其特征是，所述腔体筒的顶部与所述上盖之间设有密封圈，以保证将上盖扣在腔体筒上后的密封性。
- 如权利要求1所述的一种可精密调节的介质阻挡放电装置，其特征是，所述上盖的上表面设有进气口，所述底板上设有抽气口，上盖的上方设有绝缘套管，绝缘套管为陶瓷材质在绝缘套管的下端设有法兰，绝缘套管通过法兰与上盖固定连接，在绝缘套管的内侧设有接 地头，用于接高压电，接地头的下端穿过上盖中心的圆孔后伸入放电腔体内，在接地头的下端固定有第一电极；在底板的底部固定有若干沿周向均匀设置的支撑杆，在底板上设有接地接头，平移单元为固定在底板的底部上的电动缸，在电动缸的活塞杆上固定有第二电极，接地接头与第二电极电连接，接地接头用于接地，第一、第二电极的轴线共线设置。
- 如权利要求1所述的一种可精密调节的介质阻挡放电装置，其特征是，所述上盖与底板之间设有若干在同一圆周上均匀分布的螺杆，在螺杆的上端与下端分别设有螺母，上端螺母与上盖接触，下端螺母与底板接触，实现腔体筒与上盖、底板三者之间固定连接。
- 一种可精密调节的介质阻挡放电装置的方法，其特征是，包括：封闭进气口，通过抽气口抽取放电腔体内的部分空气，实现放电腔体内气压的变化，可实现大气压或低气压的气体放电；或通过抽气口将放电腔体抽真空，然后封闭抽气口，通过进气口向放电腔体内充入放电气体，在接线头上连接高压源，以实现冲入气体的放电；拆卸上盖、腔体筒，更换第一、第二电极，实现不同属性第一电极、第二电极的放电；通过电动缸控制活塞杆的伸缩，实现放电间隙的自动调节。
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| CN104640338A (zh) * | 2015-02-01 | 2015-05-20 | 华南理工大学 | 一种遥控式介质阻挡放电电极装置及使用方法 |
| CN206024218U (zh) * | 2016-09-19 | 2017-03-15 | 大连大学 | 放电间隙可调的封闭式介质阻挡放电平板反应器 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2033484A (en) * | 2021-12-27 | 2023-06-30 | Institute Of Energy Hefei Comprehensive Nat Science Center Anhui Energy Laboratory | Adjustment device for control of density of extracted particles from ion source and control method thereof |
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| CN109195297B (zh) | 2020-09-18 |
| CN109195297A (zh) | 2019-01-11 |
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