WO2020082254A1 - Système de compression d'impulsions ultra-rapides et procédé de préparation - Google Patents

Système de compression d'impulsions ultra-rapides et procédé de préparation Download PDF

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Publication number
WO2020082254A1
WO2020082254A1 PCT/CN2018/111560 CN2018111560W WO2020082254A1 WO 2020082254 A1 WO2020082254 A1 WO 2020082254A1 CN 2018111560 W CN2018111560 W CN 2018111560W WO 2020082254 A1 WO2020082254 A1 WO 2020082254A1
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WIPO (PCT)
Prior art keywords
waveguide
organic polymer
polymer substrate
low
piezoelectric ceramic
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PCT/CN2018/111560
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English (en)
Chinese (zh)
Inventor
闫培光
陈浩
尹金德
邢凤飞
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深圳大学
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Priority to PCT/CN2018/111560 priority Critical patent/WO2020082254A1/fr
Publication of WO2020082254A1 publication Critical patent/WO2020082254A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics

Definitions

  • the invention relates to the field of laser technology, in particular to an ultra-fast pulse compression system and a preparation method.
  • pulsed lasers can output pulse sequences with high peak power and large repetition frequency, which can be used as an ideal test light source in the fields of biological imaging, environmental sensing, medical treatment and basic research.
  • the current main solution is to use solid optical components, through dispersion and nonlinear effects, so that the pulse width is effectively compressed.
  • the main purpose of the present invention is to propose an ultra-fast pulse compression system and a preparation method to solve the problem that the compression device is easily affected by the external environment when the input pulse is pulse-width compressed in the prior art, it is difficult to integrate the package, and the preparation cost is high. Insufficient, and the compression effect on the input pulse needs to be changed by manual adjustment, which is difficult to operate and requires high operating experience.
  • the first aspect of the embodiments of the present invention provides an ultrafast pulse compression system, the system includes: a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system, and a low-dimensional layered material ;
  • the silicon surface of the silicon surface insulating substrate is prepared with a waveguide and a grating coupler
  • the polymer organic polymer substrate is bonded to the waveguide, and the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and the polymer organic polymer substrate Both ends of the cover the piezoelectric ceramic system;
  • the piezoelectric ceramic system provides a uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal;
  • the waveguide transmits the optical pulse signal
  • the grating coupler guides the optical pulse signal into the waveguide, and outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  • the waveguide includes a waveguide transmission area and an isolation area;
  • the isolation zone divides the waveguide into N waveguide transmission zones, where N is an integer greater than 1;
  • the optical pulse signal is transmitted in the waveguide transmission area.
  • the waveguide transmission region includes a pulse width modulation region
  • the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation region includes the polymer organic polymer substrate and the waveguide paste Area.
  • the grating coupler includes an input coupling grating and an output coupling grating
  • the input coupling grating and the output coupling grating are prepared on both sides of the waveguide;
  • the input coupling grating couples the optical pulse signal into the waveguide
  • the output coupling grating outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  • the high molecular organic polymer substrate includes a thin film prepared by the high molecular organic polymer.
  • the piezoelectric ceramic system includes two piezoelectric ceramics
  • the two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
  • the piezoelectric ceramic system further includes a level periodic adjustment device
  • the level periodic control device controls to provide a periodic voltage input to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
  • a second aspect of an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
  • silicon surface insulating substrate high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered materials
  • the polymer organic polymer substrate is bonded to the waveguide so that the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer Both ends of the organic polymer substrate cover the piezoelectric ceramic system;
  • the piezoelectric ceramic system is provided with a uniform lateral stress on the low-dimensional layered material through a high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the preparation of the waveguide and the grating coupler on the silicon surface of the silicon surface insulating substrate includes:
  • the waveguide and the grating coupler that meet the conditions of optical pulse signal transmission are prepared on the silicon surface of the silicon surface insulating substrate.
  • the grating coupler includes an input coupling grating and an output coupling grating
  • the input coupling grating and the output coupling grating are prepared on both sides of the waveguide.
  • the method for preparing the high molecular organic polymer substrate includes:
  • the polymer organic polymer solution is placed in a vessel and placed in a drying oven for drying to form a polymer organic polymer film to obtain the polymer organic polymer substrate.
  • the method for preparing the low-dimensional layered material includes:
  • the low-dimensional layered material with a large area and a single layer or a few layers is uniformly obtained by a chemical vapor deposition method or a mechanical stripping technique.
  • the bonding of the high molecular organic polymer substrate and the waveguide allows the
  • the side of the polymer organic polymer substrate with the low-dimensional layered material closely adheres to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are fixed to the two The surface of piezoelectric ceramics.
  • the ultrafast pulse compression system and preparation method provided by the embodiments of the present invention prepare a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and use the grating coupler to introduce an optical pulse signal into the waveguide for transmission through the waveguide
  • the interaction of the evanescent field with the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time, the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing
  • the electronic energy band of the low-dimensional material actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area
  • Embodiment 1 is a schematic structural diagram of an ultra-fast pulse compression system provided by Embodiment 1 of the present invention
  • FIG. 2 is a schematic structural diagram of a grating coupler provided by Embodiment 1 of the present invention.
  • FIG. 3 is a schematic diagram of an implementation process of the preparation method of the ultra-fast pulse compression system provided by Embodiment 2 of the present invention.
  • Ultra-fast pulse compression system 11, silicon surface insulating substrate; 12, high molecular organic polymer substrate; 13, piezoelectric ceramic system; 14, low-dimensional layered material; 111, waveguide; 112 , Grating coupler; 1121, input coupling grating; 1122, output coupling grating.
  • an embodiment of the present invention provides a structure of an ultra-fast pulse compression system 10, which includes a silicon surface insulating substrate 11, a polymer organic polymer substrate 12, a piezoelectric ceramic system 13 and a low-dimensional Layered material 14.
  • the ultrafast pulse compression system is a compression system based on ultrafast pulses.
  • the surface of the silicon surface insulating substrate 11 is covered with the material silicon (Si), which can improve the stability of the system.
  • the high-molecular organic polymer substrate 12 includes a thin film prepared by a high-molecular organic polymer.
  • the high-molecular organic polymer may include one of polymethyl methacrylate, polyvinyl alcohol, and polydimethylsiloxane; its thickness may be set to 20-50 ⁇ m. Since a low-dimensional layered material is provided between the high-molecular organic polymer substrate and the waveguide, the high-molecular organic polymer substrate can isolate the low-dimensional layered material from the external environment and avoid the low-dimensional layered material from being polluted by the external environment. Effectively increase the service life of low-dimensional layered materials.
  • the low-dimensional layered dimensional material 14 may be a one-dimensional layered material or a two-dimensional layered material.
  • a nonlinear saturable absorbing material it has a large third-order nonlinear coefficient, a strong light and Material interaction and ultra-fast carrier mobility.
  • the structural relationship between the above-mentioned silicon surface insulating substrate 11, high molecular organic polymer substrate 12, piezoelectric ceramic system 13 and low-dimensional layered material 14 is as follows :
  • the silicon surface of the silicon surface insulating substrate 11 is prepared with a waveguide 111 and a grating coupler 112; the polymer organic polymer substrate 12 is bonded to the waveguide 111, and the low molecular dimension is included between the polymer organic polymer substrate 12 and the waveguide 111
  • the layered material 14 and both ends of the polymer organic polymer substrate 12 cover the piezoelectric ceramic system 13.
  • the waveguide 111 is used to transmit optical pulse signals.
  • the optical pulse signals are transmitted in the waveguide transmission area prepared on the silicon surface insulating substrate, they have the characteristics of low insertion loss and single-mode transmission.
  • the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
  • the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation region includes a region where the high molecular organic polymer substrate is attached to the waveguide.
  • the optical pulse signal may be any optical signal that can be transmitted intermittently at a certain time interval, which is not specifically limited herein.
  • the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
  • the isolation area divides the waveguide into multiple waveguide transmission areas, and one or more of the waveguide transmission areas are selected to receive the optical pulse signal, while being attached to the polymer organic polymer substrate, including low-dimensional layered After the material is formed, a pulse width modulation region is formed, which is not specifically limited here.
  • the pulse width of the optical pulse signal is effectively compressed, thereby achieving pulse width modulation.
  • the grating coupler 112 is used to guide the optical signal into the waveguide, and output the modulated pulse-type optical signal to the waveguide with a preset output ratio.
  • the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide; the input coupling grating couples the optical pulse signal into the waveguide; the output coupling grating has a preset output In contrast, the modulated optical pulse signal is output to the waveguide.
  • the grating coupler prepared on the silicon surface insulating substrate can couple the optical pulse signal into the waveguide with high coupling efficiency, adjust the output ratio of the optical pulse signal output waveguide, and output at a preset output ratio Waveguides are used for testing and related applications.
  • multiple sets of input coupling gratings and output coupling gratings are provided.
  • the input coupling grating couples the optical pulse signal into the waveguide
  • the output coupling grating couples the optical pulse signal from the waveguide according to the output ratio.
  • the optical pulse signal can be coupled using fiber input or space light.
  • Input at the same time, can also use fiber coupling output or spatial light coupling output.
  • the isolation region divides the waveguide 111 into three waveguide transmission regions, and the input coupling grating 1121 and the output coupling grating 1122 are prepared on both sides of the waveguide 111 in the direction of the waveguide notch.
  • the piezoelectric ceramic system 13 is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the piezoelectric ceramic system includes two piezoelectric ceramics; the two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
  • the piezoelectric ceramic system further includes a level periodic control device; the level periodic control device controls the periodic voltage input provided to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
  • the two piezoelectric ceramics when they are arranged on both sides of the waveguide, they can be in the same direction as the input grating coupler and output grating coupler, or they can be in the same direction as the input grating coupler and output grating coupler vertical.
  • the isolation area divides the waveguide into three waveguide transmission areas, then the input grating coupler and the output grating coupler are arranged on the middle waveguide transmission area and are distributed along both sides of the waveguide gap direction; two The position direction of the piezoelectric ceramics is perpendicular to the position direction of the input grating coupler and the output grating coupler, and is arranged on the waveguide transmission area adjacent to the intermediate waveguide transmission area; both ends of the polymer organic polymer substrate cover On the piezoelectric ceramic system, when it is attached to the waveguide, the low-dimensional layered material is placed on the waveguide transmission area in the middle.
  • the ultrafast pulse compression system prepareds a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide
  • the interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal
  • the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional
  • the electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
  • an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
  • S101 Provide silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered material.
  • the surface of the silicon surface insulating substrate is covered with the material silicon (Si), which can improve the stability of the system.
  • the waveguide and the grating coupler are directly prepared on the silicon surface insulating substrate, which is compatible with the current mature CMOS processing technology, and has the advantages of batch controllability and on-chip integration.
  • a method of preparing a waveguide and a grating coupler on a silicon surface of a silicon surface insulating substrate includes preparing an optical pulse on the silicon surface of the silicon surface insulating substrate through an electron beam exposure process or a double beam etching process Waveguide and grating couplers for signal transmission conditions.
  • the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide and coupled with the waveguide, so that the grating coupler can couple the optical pulse signal with high coupling efficiency Enter the waveguide and output the optical pulse signal to the waveguide with a preset output ratio for further testing and related applications.
  • the polymer organic polymer substrate has a certain flexibility, and a single layer or a few layers of low-dimensional layered material covers the surface of the polymer organic polymer substrate uniformly over a large area to make the piezoelectric
  • the ceramic When the ceramic is applied to the two ends of the lateral stretching, it can provide a laterally uniform stress to the low-dimensional layered material on the substrate surface, thereby changing the electronic energy band of the low-dimensional layered material, and further actively regulating the low-dimensional layered material.
  • Non-linear optical characteristics to achieve the compression of the pulse width of the optical pulse signal.
  • a method for preparing a high-molecular organic polymer substrate includes dissolving a high-molecular organic polymer powder in an organic solvent to obtain a high-molecular organic polymer-based solution; In the process, it is placed in a drying oven and dried to form a polymer organic polymer film to obtain a polymer organic polymer substrate.
  • the thickness of the high molecular organic polymer substrate may be 20-50 ⁇ m;
  • the high molecular organic polymer may include polymethyl methacrylate, polyvinyl alcohol or polydimethylsiloxane.
  • the preparation method of the low-dimensional layered material includes, by chemical vapor deposition or mechanical stripping technology, a single layer or a few layers of large-area uniform low-dimensional layered material.
  • low-dimensional layered materials include carbon nanotubes, graphene, transition metal sulfides, and black phosphorus.
  • transition metal sulfides include molybdenum disulfide, tungsten disulfide, tungsten diselenide, molybdenum diselenide, zirconium diselenide, zirconium disulfide, tin disulfide, tin diselenide, tungsten ditelide , Molybdenum telluride, hafnium disulfide, hafnium diselenide, rhenium diselenide, rhenium disulfide and indium selenide.
  • the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
  • the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
  • the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation area includes the area where the polymer organic polymer substrate is attached to the waveguide, in this area, the evanescent field in the waveguide interacts with the low-dimensional layered material, effectively compressing the pulse width of the optical pulse signal , So as to adjust the pulse width.
  • the piezoelectric ceramic system is provided with a uniform lateral stress to the low-dimensional layered material through the high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the piezoelectric ceramic system provides a periodic voltage input to the piezoelectric ceramic, causing the piezoelectric ceramic to periodically move laterally.
  • the modulation effect of the pulse width realizes the active compression modulation effect on the pulse width of the optical pulse signal.
  • the polymer organic polymer substrate and the waveguide are bonded together so that a low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer organic polymer
  • the two ends of the substrate covered on the piezoelectric ceramic system include:
  • the side of the polymer organic polymer substrate with the low-dimensional layered material is closely attached to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are respectively fixed on the surfaces of the two piezoelectric ceramics.
  • the preparation method of the ultrafast pulse compression system prepares a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system and a low-dimensional layered material; wherein, the silicon surface insulating substrate A waveguide and a grating coupler are also prepared on the silicon surface, and the grating pulse coupler is used to introduce the optical pulse signal into the waveguide for transmission; a low-dimensional layered material is provided between the polymer organic polymer substrate and the waveguide to pass through the waveguide
  • the interaction between the evanescent field and the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time covers the two ends of the polymer organic polymer substrate on the piezoelectric ceramic system, and the piezoelectric ceramic system is used to further actively control the low-dimensional
  • the nonlinear optical characteristics of the layered material control the compression of the pulse width of the optical pulse signal.
  • the modulated optical pulse signal is output to the waveguide through the grating coupler to achieve the active compression modulation effect on the pulse width of the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
  • the ultrafast pulse compression system prepareds a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide
  • the interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal
  • the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional
  • the electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention concerne un système de compression d'impulsions ultra-rapides et un procédé de préparation. Le système de compression d'impulsions ultra-rapides (10) comprend : un substrat isolant de surface de silicium (11), un substrat polymère organique macromoléculaire (12), un système céramique piézoélectrique (13) et un matériau stratifié à faible dimension (14) ; un guide d'ondes (111) et un coupleur de réseau (112) sont préparés sur la surface de silicium du substrat isolant de surface de silicium ; le substrat polymère organique macromoléculaire est fixé au guide d'ondes, le matériau stratifié à faible dimension est inclu entre le substrat polymère organique macromoléculaire et le guide d'ondes, et deux extrémités du substrat polymère organique macromoléculaire sont recouvertes sur le système céramique piézoélectrique ; et le système céramique piézoélectrique fournit une contrainte latérale uniforme au matériau stratifié à faible dimension au moyen du substrat polymère organique macromoléculaire, ce qui permet de moduler la largeur d'impulsion d'un signal d'impulsion optique. Le système de compression d'impulsions ultra-rapides a une structure compacte, une zone contrainte uniforme, une longue durée de vie et une performance de résistance à la fatigue élevée, et peut commander activement le degré de compression d'impulsions, ayant des avantages tels qu'une préparation de lots contrôlable et une intégration sur puce.
PCT/CN2018/111560 2018-10-24 2018-10-24 Système de compression d'impulsions ultra-rapides et procédé de préparation WO2020082254A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013925B3 (de) * 2008-03-12 2009-05-07 Batop Gmbh Sättigbarer Absorberspiegel mit einem Luftspalt
CN103904544A (zh) * 2013-11-15 2014-07-02 南通蓝诺光电科技有限公司 二维层状材料可饱和吸收体器件及其制备方法
CN104150476A (zh) * 2014-08-15 2014-11-19 苏州斯迪克新材料科技股份有限公司 化学气相沉积法制备石墨烯的无损伤转移方法
CN104596683A (zh) * 2015-02-12 2015-05-06 南京大学 基于层状材料的压力传感器及压电效应测量系统
CN106785844A (zh) * 2017-01-20 2017-05-31 中国科学院物理研究所 一种采用反射镜结构的二维纳米材料锁模全光纤激光器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013925B3 (de) * 2008-03-12 2009-05-07 Batop Gmbh Sättigbarer Absorberspiegel mit einem Luftspalt
CN103904544A (zh) * 2013-11-15 2014-07-02 南通蓝诺光电科技有限公司 二维层状材料可饱和吸收体器件及其制备方法
CN104150476A (zh) * 2014-08-15 2014-11-19 苏州斯迪克新材料科技股份有限公司 化学气相沉积法制备石墨烯的无损伤转移方法
CN104596683A (zh) * 2015-02-12 2015-05-06 南京大学 基于层状材料的压力传感器及压电效应测量系统
CN106785844A (zh) * 2017-01-20 2017-05-31 中国科学院物理研究所 一种采用反射镜结构的二维纳米材料锁模全光纤激光器

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