WO2020082254A1 - Ultrafast pulse compression system and preparation method - Google Patents

Ultrafast pulse compression system and preparation method Download PDF

Info

Publication number
WO2020082254A1
WO2020082254A1 PCT/CN2018/111560 CN2018111560W WO2020082254A1 WO 2020082254 A1 WO2020082254 A1 WO 2020082254A1 CN 2018111560 W CN2018111560 W CN 2018111560W WO 2020082254 A1 WO2020082254 A1 WO 2020082254A1
Authority
WO
WIPO (PCT)
Prior art keywords
waveguide
organic polymer
polymer substrate
low
piezoelectric ceramic
Prior art date
Application number
PCT/CN2018/111560
Other languages
French (fr)
Chinese (zh)
Inventor
闫培光
陈浩
尹金德
邢凤飞
Original Assignee
深圳大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳大学 filed Critical 深圳大学
Priority to PCT/CN2018/111560 priority Critical patent/WO2020082254A1/en
Publication of WO2020082254A1 publication Critical patent/WO2020082254A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics

Definitions

  • the invention relates to the field of laser technology, in particular to an ultra-fast pulse compression system and a preparation method.
  • pulsed lasers can output pulse sequences with high peak power and large repetition frequency, which can be used as an ideal test light source in the fields of biological imaging, environmental sensing, medical treatment and basic research.
  • the current main solution is to use solid optical components, through dispersion and nonlinear effects, so that the pulse width is effectively compressed.
  • the main purpose of the present invention is to propose an ultra-fast pulse compression system and a preparation method to solve the problem that the compression device is easily affected by the external environment when the input pulse is pulse-width compressed in the prior art, it is difficult to integrate the package, and the preparation cost is high. Insufficient, and the compression effect on the input pulse needs to be changed by manual adjustment, which is difficult to operate and requires high operating experience.
  • the first aspect of the embodiments of the present invention provides an ultrafast pulse compression system, the system includes: a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system, and a low-dimensional layered material ;
  • the silicon surface of the silicon surface insulating substrate is prepared with a waveguide and a grating coupler
  • the polymer organic polymer substrate is bonded to the waveguide, and the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and the polymer organic polymer substrate Both ends of the cover the piezoelectric ceramic system;
  • the piezoelectric ceramic system provides a uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal;
  • the waveguide transmits the optical pulse signal
  • the grating coupler guides the optical pulse signal into the waveguide, and outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  • the waveguide includes a waveguide transmission area and an isolation area;
  • the isolation zone divides the waveguide into N waveguide transmission zones, where N is an integer greater than 1;
  • the optical pulse signal is transmitted in the waveguide transmission area.
  • the waveguide transmission region includes a pulse width modulation region
  • the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation region includes the polymer organic polymer substrate and the waveguide paste Area.
  • the grating coupler includes an input coupling grating and an output coupling grating
  • the input coupling grating and the output coupling grating are prepared on both sides of the waveguide;
  • the input coupling grating couples the optical pulse signal into the waveguide
  • the output coupling grating outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  • the high molecular organic polymer substrate includes a thin film prepared by the high molecular organic polymer.
  • the piezoelectric ceramic system includes two piezoelectric ceramics
  • the two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
  • the piezoelectric ceramic system further includes a level periodic adjustment device
  • the level periodic control device controls to provide a periodic voltage input to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
  • a second aspect of an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
  • silicon surface insulating substrate high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered materials
  • the polymer organic polymer substrate is bonded to the waveguide so that the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer Both ends of the organic polymer substrate cover the piezoelectric ceramic system;
  • the piezoelectric ceramic system is provided with a uniform lateral stress on the low-dimensional layered material through a high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the preparation of the waveguide and the grating coupler on the silicon surface of the silicon surface insulating substrate includes:
  • the waveguide and the grating coupler that meet the conditions of optical pulse signal transmission are prepared on the silicon surface of the silicon surface insulating substrate.
  • the grating coupler includes an input coupling grating and an output coupling grating
  • the input coupling grating and the output coupling grating are prepared on both sides of the waveguide.
  • the method for preparing the high molecular organic polymer substrate includes:
  • the polymer organic polymer solution is placed in a vessel and placed in a drying oven for drying to form a polymer organic polymer film to obtain the polymer organic polymer substrate.
  • the method for preparing the low-dimensional layered material includes:
  • the low-dimensional layered material with a large area and a single layer or a few layers is uniformly obtained by a chemical vapor deposition method or a mechanical stripping technique.
  • the bonding of the high molecular organic polymer substrate and the waveguide allows the
  • the side of the polymer organic polymer substrate with the low-dimensional layered material closely adheres to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are fixed to the two The surface of piezoelectric ceramics.
  • the ultrafast pulse compression system and preparation method provided by the embodiments of the present invention prepare a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and use the grating coupler to introduce an optical pulse signal into the waveguide for transmission through the waveguide
  • the interaction of the evanescent field with the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time, the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing
  • the electronic energy band of the low-dimensional material actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area
  • Embodiment 1 is a schematic structural diagram of an ultra-fast pulse compression system provided by Embodiment 1 of the present invention
  • FIG. 2 is a schematic structural diagram of a grating coupler provided by Embodiment 1 of the present invention.
  • FIG. 3 is a schematic diagram of an implementation process of the preparation method of the ultra-fast pulse compression system provided by Embodiment 2 of the present invention.
  • Ultra-fast pulse compression system 11, silicon surface insulating substrate; 12, high molecular organic polymer substrate; 13, piezoelectric ceramic system; 14, low-dimensional layered material; 111, waveguide; 112 , Grating coupler; 1121, input coupling grating; 1122, output coupling grating.
  • an embodiment of the present invention provides a structure of an ultra-fast pulse compression system 10, which includes a silicon surface insulating substrate 11, a polymer organic polymer substrate 12, a piezoelectric ceramic system 13 and a low-dimensional Layered material 14.
  • the ultrafast pulse compression system is a compression system based on ultrafast pulses.
  • the surface of the silicon surface insulating substrate 11 is covered with the material silicon (Si), which can improve the stability of the system.
  • the high-molecular organic polymer substrate 12 includes a thin film prepared by a high-molecular organic polymer.
  • the high-molecular organic polymer may include one of polymethyl methacrylate, polyvinyl alcohol, and polydimethylsiloxane; its thickness may be set to 20-50 ⁇ m. Since a low-dimensional layered material is provided between the high-molecular organic polymer substrate and the waveguide, the high-molecular organic polymer substrate can isolate the low-dimensional layered material from the external environment and avoid the low-dimensional layered material from being polluted by the external environment. Effectively increase the service life of low-dimensional layered materials.
  • the low-dimensional layered dimensional material 14 may be a one-dimensional layered material or a two-dimensional layered material.
  • a nonlinear saturable absorbing material it has a large third-order nonlinear coefficient, a strong light and Material interaction and ultra-fast carrier mobility.
  • the structural relationship between the above-mentioned silicon surface insulating substrate 11, high molecular organic polymer substrate 12, piezoelectric ceramic system 13 and low-dimensional layered material 14 is as follows :
  • the silicon surface of the silicon surface insulating substrate 11 is prepared with a waveguide 111 and a grating coupler 112; the polymer organic polymer substrate 12 is bonded to the waveguide 111, and the low molecular dimension is included between the polymer organic polymer substrate 12 and the waveguide 111
  • the layered material 14 and both ends of the polymer organic polymer substrate 12 cover the piezoelectric ceramic system 13.
  • the waveguide 111 is used to transmit optical pulse signals.
  • the optical pulse signals are transmitted in the waveguide transmission area prepared on the silicon surface insulating substrate, they have the characteristics of low insertion loss and single-mode transmission.
  • the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
  • the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation region includes a region where the high molecular organic polymer substrate is attached to the waveguide.
  • the optical pulse signal may be any optical signal that can be transmitted intermittently at a certain time interval, which is not specifically limited herein.
  • the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
  • the isolation area divides the waveguide into multiple waveguide transmission areas, and one or more of the waveguide transmission areas are selected to receive the optical pulse signal, while being attached to the polymer organic polymer substrate, including low-dimensional layered After the material is formed, a pulse width modulation region is formed, which is not specifically limited here.
  • the pulse width of the optical pulse signal is effectively compressed, thereby achieving pulse width modulation.
  • the grating coupler 112 is used to guide the optical signal into the waveguide, and output the modulated pulse-type optical signal to the waveguide with a preset output ratio.
  • the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide; the input coupling grating couples the optical pulse signal into the waveguide; the output coupling grating has a preset output In contrast, the modulated optical pulse signal is output to the waveguide.
  • the grating coupler prepared on the silicon surface insulating substrate can couple the optical pulse signal into the waveguide with high coupling efficiency, adjust the output ratio of the optical pulse signal output waveguide, and output at a preset output ratio Waveguides are used for testing and related applications.
  • multiple sets of input coupling gratings and output coupling gratings are provided.
  • the input coupling grating couples the optical pulse signal into the waveguide
  • the output coupling grating couples the optical pulse signal from the waveguide according to the output ratio.
  • the optical pulse signal can be coupled using fiber input or space light.
  • Input at the same time, can also use fiber coupling output or spatial light coupling output.
  • the isolation region divides the waveguide 111 into three waveguide transmission regions, and the input coupling grating 1121 and the output coupling grating 1122 are prepared on both sides of the waveguide 111 in the direction of the waveguide notch.
  • the piezoelectric ceramic system 13 is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the piezoelectric ceramic system includes two piezoelectric ceramics; the two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
  • the piezoelectric ceramic system further includes a level periodic control device; the level periodic control device controls the periodic voltage input provided to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
  • the two piezoelectric ceramics when they are arranged on both sides of the waveguide, they can be in the same direction as the input grating coupler and output grating coupler, or they can be in the same direction as the input grating coupler and output grating coupler vertical.
  • the isolation area divides the waveguide into three waveguide transmission areas, then the input grating coupler and the output grating coupler are arranged on the middle waveguide transmission area and are distributed along both sides of the waveguide gap direction; two The position direction of the piezoelectric ceramics is perpendicular to the position direction of the input grating coupler and the output grating coupler, and is arranged on the waveguide transmission area adjacent to the intermediate waveguide transmission area; both ends of the polymer organic polymer substrate cover On the piezoelectric ceramic system, when it is attached to the waveguide, the low-dimensional layered material is placed on the waveguide transmission area in the middle.
  • the ultrafast pulse compression system prepareds a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide
  • the interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal
  • the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional
  • the electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
  • an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
  • S101 Provide silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered material.
  • the surface of the silicon surface insulating substrate is covered with the material silicon (Si), which can improve the stability of the system.
  • the waveguide and the grating coupler are directly prepared on the silicon surface insulating substrate, which is compatible with the current mature CMOS processing technology, and has the advantages of batch controllability and on-chip integration.
  • a method of preparing a waveguide and a grating coupler on a silicon surface of a silicon surface insulating substrate includes preparing an optical pulse on the silicon surface of the silicon surface insulating substrate through an electron beam exposure process or a double beam etching process Waveguide and grating couplers for signal transmission conditions.
  • the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide and coupled with the waveguide, so that the grating coupler can couple the optical pulse signal with high coupling efficiency Enter the waveguide and output the optical pulse signal to the waveguide with a preset output ratio for further testing and related applications.
  • the polymer organic polymer substrate has a certain flexibility, and a single layer or a few layers of low-dimensional layered material covers the surface of the polymer organic polymer substrate uniformly over a large area to make the piezoelectric
  • the ceramic When the ceramic is applied to the two ends of the lateral stretching, it can provide a laterally uniform stress to the low-dimensional layered material on the substrate surface, thereby changing the electronic energy band of the low-dimensional layered material, and further actively regulating the low-dimensional layered material.
  • Non-linear optical characteristics to achieve the compression of the pulse width of the optical pulse signal.
  • a method for preparing a high-molecular organic polymer substrate includes dissolving a high-molecular organic polymer powder in an organic solvent to obtain a high-molecular organic polymer-based solution; In the process, it is placed in a drying oven and dried to form a polymer organic polymer film to obtain a polymer organic polymer substrate.
  • the thickness of the high molecular organic polymer substrate may be 20-50 ⁇ m;
  • the high molecular organic polymer may include polymethyl methacrylate, polyvinyl alcohol or polydimethylsiloxane.
  • the preparation method of the low-dimensional layered material includes, by chemical vapor deposition or mechanical stripping technology, a single layer or a few layers of large-area uniform low-dimensional layered material.
  • low-dimensional layered materials include carbon nanotubes, graphene, transition metal sulfides, and black phosphorus.
  • transition metal sulfides include molybdenum disulfide, tungsten disulfide, tungsten diselenide, molybdenum diselenide, zirconium diselenide, zirconium disulfide, tin disulfide, tin diselenide, tungsten ditelide , Molybdenum telluride, hafnium disulfide, hafnium diselenide, rhenium diselenide, rhenium disulfide and indium selenide.
  • the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
  • the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
  • the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  • the pulse width modulation area includes the area where the polymer organic polymer substrate is attached to the waveguide, in this area, the evanescent field in the waveguide interacts with the low-dimensional layered material, effectively compressing the pulse width of the optical pulse signal , So as to adjust the pulse width.
  • the piezoelectric ceramic system is provided with a uniform lateral stress to the low-dimensional layered material through the high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  • the piezoelectric ceramic system provides a periodic voltage input to the piezoelectric ceramic, causing the piezoelectric ceramic to periodically move laterally.
  • the modulation effect of the pulse width realizes the active compression modulation effect on the pulse width of the optical pulse signal.
  • the polymer organic polymer substrate and the waveguide are bonded together so that a low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer organic polymer
  • the two ends of the substrate covered on the piezoelectric ceramic system include:
  • the side of the polymer organic polymer substrate with the low-dimensional layered material is closely attached to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are respectively fixed on the surfaces of the two piezoelectric ceramics.
  • the preparation method of the ultrafast pulse compression system prepares a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system and a low-dimensional layered material; wherein, the silicon surface insulating substrate A waveguide and a grating coupler are also prepared on the silicon surface, and the grating pulse coupler is used to introduce the optical pulse signal into the waveguide for transmission; a low-dimensional layered material is provided between the polymer organic polymer substrate and the waveguide to pass through the waveguide
  • the interaction between the evanescent field and the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time covers the two ends of the polymer organic polymer substrate on the piezoelectric ceramic system, and the piezoelectric ceramic system is used to further actively control the low-dimensional
  • the nonlinear optical characteristics of the layered material control the compression of the pulse width of the optical pulse signal.
  • the modulated optical pulse signal is output to the waveguide through the grating coupler to achieve the active compression modulation effect on the pulse width of the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
  • the ultrafast pulse compression system prepareds a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide
  • the interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal
  • the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional
  • the electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal.
  • the ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

An ultrafast pulse compression system and a preparation method. The ultrafast pulse compression system (10) comprises: a silicon surface insulating substrate (11), a macromolecular organic polymer substrate (12), a piezoelectric ceramic system (13) and a low-dimensional layered material (14); a waveguide (111) and a grating coupler (112) are prepared on the silicon surface of the silicon surface insulating substrate; the macromolecular organic polymer substrate is attached to the waveguide, the low-dimensional layered material is included between the macromolecular organic polymer substrate and the waveguide, and two ends of the macromolecular organic polymer substrate are covered on the piezoelectric ceramic system; and the piezoelectric ceramic system provides a uniform lateral stress to the low-dimensional layered material by means of the macromolecular organic polymer substrate, thereby modulating the pulse width of an optical pulse signal. The ultrafast pulse compression system has a compact structure, uniform stressed area, long service life and high fatigue resistance performance, and is able to actively control the degree of pulse compression, having advantages such as controllable batch preparation and on-chip integration.

Description

一种超快脉冲压缩系统及制备方法Ultra-fast pulse compression system and preparation method 技术领域Technical field
本发明涉及激光技术领域，尤其涉及一种超快脉冲压缩系统及制备方法。The invention relates to the field of laser technology, in particular to an ultra-fast pulse compression system and a preparation method.
背景技术Background technique
随着科学的发展，很多如激光热核反应、激光同位素分离、精密测距等的应用技术均要求能够获得超短脉冲，因此激光器的应用也越来越广泛。而相比与连续型激光器，脉冲型激光器能够输出高峰值功率，大重复频率的脉冲序列，可以在生物成像，环境传感，医疗和基础研究等领域作为一种理想的测试光源。对于输出脉冲特性的优化，目前主要的方案是使用固体光学组件，通过色散和非线性作用，使脉冲的宽度得到有效的压缩。With the development of science, many application technologies such as laser thermonuclear reaction, laser isotope separation, and precision ranging require the acquisition of ultrashort pulses, so the application of lasers is becoming more and more widespread. Compared with continuous lasers, pulsed lasers can output pulse sequences with high peak power and large repetition frequency, which can be used as an ideal test light source in the fields of biological imaging, environmental sensing, medical treatment and basic research. For the optimization of the output pulse characteristics, the current main solution is to use solid optical components, through dispersion and nonlinear effects, so that the pulse width is effectively compressed.
然而，该类型的方案虽然能够有效的对输入脉冲进行脉宽压缩，但受限与系统内固体器件的空间光路搭建，该压缩装置易被外部环境影响，较难集成化封装，制备成本高等不足。另外，该类型的压缩系统需要通过手动调节的方式改变对输入脉冲的压缩效果，操作难度大，对操作经验的要求较高。由于上述缺点限制了固体光学组件搭建的压缩系统的实际应用。However, although this type of solution can effectively compress the pulse width of the input pulse, it is limited to the spatial optical path of the solid device in the system. The compression device is easily affected by the external environment, it is difficult to integrate the package, and the manufacturing cost is high. . In addition, this type of compression system needs to change the compression effect on the input pulse by manual adjustment, which is difficult to operate and requires high operating experience. The above-mentioned shortcomings limit the practical application of the compression system built by solid optical components.
技术问题technical problem
本发明的主要目的在于提出一种超快脉冲压缩系统及制备方法，以解决现有技术中对输入脉冲进行脉宽压缩时，压缩装置易被外部环境影响，较难集成化封装，制备成本高等不足，且需要通过手动调节的方式改变对输入脉冲的压缩效果，操作难度大，对操作经验的要求较高的问题。The main purpose of the present invention is to propose an ultra-fast pulse compression system and a preparation method to solve the problem that the compression device is easily affected by the external environment when the input pulse is pulse-width compressed in the prior art, it is difficult to integrate the package, and the preparation cost is high. Insufficient, and the compression effect on the input pulse needs to be changed by manual adjustment, which is difficult to operate and requires high operating experience.
技术解决方案Technical solution
为实现上述目的，本发明实施例第一方面提供一种超快脉冲压缩系统，所述系统包括：硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料；To achieve the above object, the first aspect of the embodiments of the present invention provides an ultrafast pulse compression system, the system includes: a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system, and a low-dimensional layered material ;
所述硅表面绝缘衬底的硅表面制备有波导和光栅耦合器；The silicon surface of the silicon surface insulating substrate is prepared with a waveguide and a grating coupler;
所述高分子有机聚合物衬底与所述波导贴合，所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上；The polymer organic polymer substrate is bonded to the waveguide, and the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and the polymer organic polymer substrate Both ends of the cover the piezoelectric ceramic system;
所述压电陶瓷系统通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而调制所述光脉冲信号的脉冲宽度；The piezoelectric ceramic system provides a uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal;
所述波导传输所述光脉冲信号；The waveguide transmits the optical pulse signal;
所述光栅耦合器引导所述光脉冲信号进入所述波导，并以预设的输出比将所述调制后的光脉冲信号输出所述波导。The grating coupler guides the optical pulse signal into the waveguide, and outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
结合本发明第一方面，本发明第一方面的第一实施方式中，所述波导包括波导传输区和隔离区；With reference to the first aspect of the present invention, in a first embodiment of the first aspect of the present invention, the waveguide includes a waveguide transmission area and an isolation area;
所述隔离区将所述波导划分为N个所述波导传输区，N为大于1的整数；The isolation zone divides the waveguide into N waveguide transmission zones, where N is an integer greater than 1;
所述光脉冲信号在所述波导传输区中传输。The optical pulse signal is transmitted in the waveguide transmission area.
结合本发明第一方面的第一实施方式，本发明第一方面的第二实施方式中，所述波导传输区包括脉冲宽度调制区；With reference to the first embodiment of the first aspect of the present invention, in the second embodiment of the first aspect of the present invention, the waveguide transmission region includes a pulse width modulation region;
所述光脉冲信号在所述脉冲宽度调制区中传输并进行脉冲宽度调制。The optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
结合本发明第一方面的第一实施方式和第二实施方式，本发明第一方面的第三实施方式中，所述脉冲宽度调制区包括所述高分子有机聚合物衬底与所述波导贴合的区域。With reference to the first embodiment and the second embodiment of the first aspect of the present invention, in the third embodiment of the first aspect of the present invention, the pulse width modulation region includes the polymer organic polymer substrate and the waveguide paste Area.
结合本发明第一方面，本发明第一方面的第四实施方式中，所述光栅耦合器包括输入耦合光栅和输出耦合光栅；With reference to the first aspect of the present invention, in a fourth implementation manner of the first aspect of the present invention, the grating coupler includes an input coupling grating and an output coupling grating;
所述输入耦合光栅和所述输出耦合光栅制备在所述波导两侧；The input coupling grating and the output coupling grating are prepared on both sides of the waveguide;
所述输入耦合光栅将所述光脉冲信号耦合进入所述波导；The input coupling grating couples the optical pulse signal into the waveguide;
所述输出耦合光栅以预设的输出比，将所述调制后的光脉冲信号输出所述波导。The output coupling grating outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
结合本发明第一方面，本发明第一方面的第五实施方式中，所述高分子有机聚合物衬底包括通过高分子有机聚合物制备的薄膜。With reference to the first aspect of the present invention, in a fifth embodiment of the first aspect of the present invention, the high molecular organic polymer substrate includes a thin film prepared by the high molecular organic polymer.
结合本发明第一方面，本发明第一方面的第六实施方式中，所述压电陶瓷系统包括两个压电陶瓷；With reference to the first aspect of the present invention, in a sixth embodiment of the first aspect of the present invention, the piezoelectric ceramic system includes two piezoelectric ceramics;
所述两个压电陶瓷分别设置在所述波导两侧。The two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
结合本发明第一方面，本发明第一方面的第七实施方式中，所述压电陶瓷系统还包括电平周期性调控装置；With reference to the first aspect of the present invention, in a seventh embodiment of the first aspect of the present invention, the piezoelectric ceramic system further includes a level periodic adjustment device;
所述电平周期性调控装置控制对所述压电陶瓷提供周期性的电压输入，令所述压电陶瓷周期性的横向移动。The level periodic control device controls to provide a periodic voltage input to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
本发明实施例第二方面提供一种超快脉冲压缩系统的制备方法，包括：A second aspect of an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
提供硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料；Provide silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered materials;
在所述硅表面绝缘衬底的硅表面制备波导和光栅耦合器；Preparing a waveguide and a grating coupler on the silicon surface of the silicon surface insulating substrate;
将所述高分子有机聚合物衬底与所述波导贴合，令所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，同时，将所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上；The polymer organic polymer substrate is bonded to the waveguide so that the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer Both ends of the organic polymer substrate cover the piezoelectric ceramic system;
令所述压电陶瓷系统通过高分子有机聚合物衬底对所述低维层状材料提供均匀的横向应力，从而调制所述光脉冲信号的脉冲宽度。The piezoelectric ceramic system is provided with a uniform lateral stress on the low-dimensional layered material through a high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
结合本发明第二方面，本发明第二方面的第一实施方式中，所述在所述硅表面绝缘衬底的硅表面制备波导和光栅耦合器包括：With reference to the second aspect of the present invention, in a first embodiment of the second aspect of the present invention, the preparation of the waveguide and the grating coupler on the silicon surface of the silicon surface insulating substrate includes:
通过电子束曝光工艺或双束刻蚀工艺，在所述硅表面绝缘衬底的硅表面制备符合光脉冲信号传输条件的所述波导和所述光栅耦合器。Through the electron beam exposure process or the double beam etching process, the waveguide and the grating coupler that meet the conditions of optical pulse signal transmission are prepared on the silicon surface of the silicon surface insulating substrate.
结合本发明第二方面的第一实施方式，本发明第二方面的第二实施方式中，所述光栅耦合器包括输入耦合光栅和输出耦合光栅；With reference to the first embodiment of the second aspect of the present invention, in the second embodiment of the second aspect of the present invention, the grating coupler includes an input coupling grating and an output coupling grating;
所述输入耦合光栅和所述输出耦合光栅制备在所述波导两侧。The input coupling grating and the output coupling grating are prepared on both sides of the waveguide.
结合本发明第二方面，本发明第二方面的第三实施方式中，所述高分子有机聚合物衬底的制备方法包括：With reference to the second aspect of the present invention, in a third embodiment of the second aspect of the present invention, the method for preparing the high molecular organic polymer substrate includes:
将高分子有机聚合物粉末溶于有机溶剂中，得到基于所述高分子有机聚合物的溶液；Dissolving the polymer organic polymer powder in an organic solvent to obtain a solution based on the polymer organic polymer;
将所述高分子有机聚合物溶液于器皿中，置于烘干箱内烘干，形成高分子有机聚合物薄膜，获得所述高分子有机聚合物衬底。The polymer organic polymer solution is placed in a vessel and placed in a drying oven for drying to form a polymer organic polymer film to obtain the polymer organic polymer substrate.
结合本发明第二方面，本发明第二方面的第四实施方式中，所述低维层状材料的制备方法包括：With reference to the second aspect of the present invention, in a fourth embodiment of the second aspect of the present invention, the method for preparing the low-dimensional layered material includes:
通过化学气相沉积法或机械剥离技术得到单层或少层大面积均匀的所述低维层状材料。The low-dimensional layered material with a large area and a single layer or a few layers is uniformly obtained by a chemical vapor deposition method or a mechanical stripping technique.
结合本发明第二方面的第一实施方式至第四实施方式，本发明第二方面的第五实施方式中，所述将所述高分子有机聚合物衬底与所述波导贴合，令所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，同时，将所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上包括：With reference to the first to fourth embodiments of the second aspect of the present invention, in the fifth embodiment of the second aspect of the present invention, the bonding of the high molecular organic polymer substrate and the waveguide allows the The low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, covering both ends of the polymer organic polymer substrate on the piezoelectric ceramic system includes:
通过转移技术将所述低维层状材料转移到所述高分子有机聚合物衬底上；Transfer the low-dimensional layered material to the high-molecular organic polymer substrate by a transfer technique;
在所述压电陶瓷系统中设置两个压电陶瓷；Setting two piezoelectric ceramics in the piezoelectric ceramic system;
将所述高分子有机聚合物衬底中有所述低维层状材料的一面与所述波导紧密贴合，同时将所述高分子有机聚合物衬底的两端分别固定在两个所述压电陶瓷的表面。The side of the polymer organic polymer substrate with the low-dimensional layered material closely adheres to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are fixed to the two The surface of piezoelectric ceramics.
有益效果Beneficial effect
本发明实施例提供的超快脉冲压缩系统及制备方法，在硅表面绝缘衬底的硅表面上制备了波导和光栅耦合器，利用光栅耦合器将光脉冲信号引入波导中进行传输，通过波导中倏逝场与低维层状材料的相互作用，压缩光脉冲信号的脉冲宽度，同时利用压电陶瓷系统，通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而改变低维材料的电子能带，主动调控低维层状材料的非线性光学特性，控制光脉冲信号脉冲宽度的压缩，最后通过光栅耦合器将调制后的光脉冲信号输出波导，实现对光脉冲信号的脉冲宽度的主动压缩调制效果。本发明实施例所提供的超快脉冲压缩系统结构紧凑、受力面积均匀、具有较长的使用寿命和较高的抗疲劳性能，并且不需要手动调节，具有批量可控制备，片上集成等优点。The ultrafast pulse compression system and preparation method provided by the embodiments of the present invention prepare a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and use the grating coupler to introduce an optical pulse signal into the waveguide for transmission through the waveguide The interaction of the evanescent field with the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time, the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing The electronic energy band of the low-dimensional material actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal The effect of active compression modulation on the pulse width. The ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
附图说明BRIEF DESCRIPTION
图1为本发明实施例一所提供的超快脉冲压缩系统的结构示意图；1 is a schematic structural diagram of an ultra-fast pulse compression system provided by Embodiment 1 of the present invention;
图2为本发明实施例一所提供的光栅耦合器的结构示意图；2 is a schematic structural diagram of a grating coupler provided by Embodiment 1 of the present invention;
图3为本发明实施例二所提供的超快脉冲压缩系统的制备方法的实现流程示意图。FIG. 3 is a schematic diagram of an implementation process of the preparation method of the ultra-fast pulse compression system provided by Embodiment 2 of the present invention.
附图说明：10、超快脉冲压缩系统；11、硅表面绝缘衬底；12、高分子有机聚合物衬底；13、压电陶瓷系统；14、低维层状材料；111、波导；112、光栅耦合器；1121、输入耦合光栅；1122、输出耦合光栅。BRIEF DESCRIPTION OF THE DRAWINGS: 10. Ultra-fast pulse compression system; 11, silicon surface insulating substrate; 12, high molecular organic polymer substrate; 13, piezoelectric ceramic system; 14, low-dimensional layered material; 111, waveguide; 112 , Grating coupler; 1121, input coupling grating; 1122, output coupling grating.
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。The implementation, functional characteristics and advantages of the present invention will be further described in conjunction with the embodiments and with reference to the drawings.
本发明的最佳实施方式Best Mode of the Invention
应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not intended to limit the present invention.
需要说明的是，在本文中，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者装置不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者装置所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括该要素的过程、方法、物品或者装置中还存在另外的相同要素。It should be noted that in this article, the terms "include", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, It also includes other elements that are not explicitly listed, or include elements inherent to this process, method, article, or device. Without more restrictions, the element defined by the sentence "include one ..." does not exclude that there are other identical elements in the process, method, article or device that includes the element.
在后续的描述中，发明实施例序号仅仅为了描述，不代表实施例的优劣。In the subsequent description, the serial numbers of the embodiments of the invention are for description only, and do not represent the advantages and disadvantages of the embodiments.
实施例一Example one
如图1所示，本发明实施例给出了一种超快脉冲压缩系统10的结构，其包括硅表面绝缘衬底11、高分子有机聚合物衬底12、压电陶瓷系统13和低维层状材料14。As shown in FIG. 1, an embodiment of the present invention provides a structure of an ultra-fast pulse compression system 10, which includes a silicon surface insulating substrate 11, a polymer organic polymer substrate 12, a piezoelectric ceramic system 13 and a low-dimensional Layered material 14.
在本发明实施例中，超快脉冲压缩系统即基于超快脉冲的压缩系统。In the embodiment of the present invention, the ultrafast pulse compression system is a compression system based on ultrafast pulses.
在具体应用中，硅表面绝缘衬底11的表面覆盖有材料硅（Si），可以提高系统的稳定性。In a specific application, the surface of the silicon surface insulating substrate 11 is covered with the material silicon (Si), which can improve the stability of the system.
在具体应用中，高分子有机聚合物衬底12包括通过高分子有机聚合物制备的薄膜。In a specific application, the high-molecular organic polymer substrate 12 includes a thin film prepared by a high-molecular organic polymer.
在实际应用中，高分子有机聚合物可以包括聚甲基丙烯酸甲酯、聚乙烯醇和聚二甲基硅氧烷中的一种；其厚度可以设置为20~50μm。由于在高分子有机聚合物衬底与波导之间设置低维层状材料，高分子有机聚合物衬底能够将低维层状材料与外部环境隔离，避免低维层状材料被外部环境污染，有效的提高低维层状材料的使用寿命。In practical applications, the high-molecular organic polymer may include one of polymethyl methacrylate, polyvinyl alcohol, and polydimethylsiloxane; its thickness may be set to 20-50 μm. Since a low-dimensional layered material is provided between the high-molecular organic polymer substrate and the waveguide, the high-molecular organic polymer substrate can isolate the low-dimensional layered material from the external environment and avoid the low-dimensional layered material from being polluted by the external environment. Effectively increase the service life of low-dimensional layered materials.
在具体应用中，低维层状维材料14可以为一维层状材料或二维层状材料，其作为非线性可饱和吸收材料，具有较大的三阶非线性系数，较强的光与材料相互作用和超快的载流子迁移率。In specific applications, the low-dimensional layered dimensional material 14 may be a one-dimensional layered material or a two-dimensional layered material. As a nonlinear saturable absorbing material, it has a large third-order nonlinear coefficient, a strong light and Material interaction and ultra-fast carrier mobility.
本发明实施例所提供的超快脉冲压缩系统中，上述的硅表面绝缘衬底11、高分子有机聚合物衬底12、压电陶瓷系统13和低维层状材料14之间的结构关系如下：In the ultrafast pulse compression system provided by the embodiment of the present invention, the structural relationship between the above-mentioned silicon surface insulating substrate 11, high molecular organic polymer substrate 12, piezoelectric ceramic system 13 and low-dimensional layered material 14 is as follows :
硅表面绝缘衬底11的硅表面制备有波导111和光栅耦合器112；高分子有机聚合物衬底12与波导111贴合，高分子有机聚合物衬底12与波导111之间包括有低维层状材料14，高分子有机聚合物衬底12的两端覆盖在压电陶瓷系统13上。The silicon surface of the silicon surface insulating substrate 11 is prepared with a waveguide 111 and a grating coupler 112; the polymer organic polymer substrate 12 is bonded to the waveguide 111, and the low molecular dimension is included between the polymer organic polymer substrate 12 and the waveguide 111 The layered material 14 and both ends of the polymer organic polymer substrate 12 cover the piezoelectric ceramic system 13.
在本发明实施例中，波导111，用于传输光脉冲信号，光脉冲信号在硅表面绝缘衬底上所制备的波导传输区中传输时，具有插入损耗低，单模传输等特点。In the embodiment of the present invention, the waveguide 111 is used to transmit optical pulse signals. When the optical pulse signals are transmitted in the waveguide transmission area prepared on the silicon surface insulating substrate, they have the characteristics of low insertion loss and single-mode transmission.
在一个实施例中，波导包括波导传输区和隔离区；隔离区将波导划分为N个波导传输区，N为大于1的整数；光脉冲信号在波导传输区中传输。In one embodiment, the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
在一个实施例中，波导传输区包括脉冲宽度调制区；光脉冲信号在脉冲宽度调制区中传输并进行脉冲宽度调制。其中，脉冲宽度调制区包括高分子有机聚合物衬底与波导贴合的区域。In one embodiment, the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation. Among them, the pulse width modulation region includes a region where the high molecular organic polymer substrate is attached to the waveguide.
在具体应用中，光脉冲信号可以为任意的能够按照一定时间间隔时断时续的发送的光信号，在此不对其做具体限定。In a specific application, the optical pulse signal may be any optical signal that can be transmitted intermittently at a certain time interval, which is not specifically limited herein.
在具体应用中，隔离区可以为任意的能够将波导划分为多个用于传输光脉冲信号的波导传输区的物质或者介质；例如，制备波导时，间隔性地在硅表面去除相同大小的长方体，令波导传输区之间互不相通。In specific applications, the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
在具体应用中，隔离区将波导划分为多个波导传输区，选择其中一条或多条波导传输区用以接收光脉冲信号，同时与高分子有机聚合物衬底贴合，包括低维层状材料后，形成脉冲宽度调制区，在此不对其做具体限定。In specific applications, the isolation area divides the waveguide into multiple waveguide transmission areas, and one or more of the waveguide transmission areas are selected to receive the optical pulse signal, while being attached to the polymer organic polymer substrate, including low-dimensional layered After the material is formed, a pulse width modulation region is formed, which is not specifically limited here.
在具体应用中，光脉冲信号传输至脉冲宽度调制区时，由于波导中的倏逝场与低维层状材料相互作用，有效压缩了光脉冲信号的脉冲宽度，从而实现脉冲宽度的调制。In specific applications, when the optical pulse signal is transmitted to the pulse width modulation area, due to the interaction of the evanescent field in the waveguide with the low-dimensional layered material, the pulse width of the optical pulse signal is effectively compressed, thereby achieving pulse width modulation.
在本发明实施例中，光栅耦合器112，用于引导光信号进入波导，并以预设的输出比将调制后的脉冲型光信号输出波导。In the embodiment of the present invention, the grating coupler 112 is used to guide the optical signal into the waveguide, and output the modulated pulse-type optical signal to the waveguide with a preset output ratio.
在一个实施例中，光栅耦合器包括输入耦合光栅和输出耦合光栅；输入耦合光栅和输出耦合光栅制备在波导两侧；输入耦合光栅将光脉冲信号耦合进入波导；输出耦合光栅以预设的输出比，将调制后的光脉冲信号输出波导。In one embodiment, the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide; the input coupling grating couples the optical pulse signal into the waveguide; the output coupling grating has a preset output In contrast, the modulated optical pulse signal is output to the waveguide.
在具体应用中，硅表面绝缘衬底上所制备的光栅耦合器，能够将光脉冲信号以高的耦合效率耦合进入波导，调节光脉冲信号输出波导的输出比，令以预设的输出比输出波导，用于测试和相关应用；同时，当需要接收多个光脉冲信号进入不同的波导传输区时，设置多组输入耦合光栅和输出耦合光栅。In specific applications, the grating coupler prepared on the silicon surface insulating substrate can couple the optical pulse signal into the waveguide with high coupling efficiency, adjust the output ratio of the optical pulse signal output waveguide, and output at a preset output ratio Waveguides are used for testing and related applications. At the same time, when multiple optical pulse signals need to be received to enter different waveguide transmission areas, multiple sets of input coupling gratings and output coupling gratings are provided.
在具体应用中，输入耦合光栅将光脉冲信号耦合进入波导，和输出耦合光栅将光脉冲信号按照输出比从波导中输出的耦合输入输出过程中，光脉冲信号的耦合可以使用光纤输入或空间光输入，同时，也可采用光纤耦合输出或空间光耦合输出。In specific applications, the input coupling grating couples the optical pulse signal into the waveguide, and the output coupling grating couples the optical pulse signal from the waveguide according to the output ratio. In the process of coupling input and output, the optical pulse signal can be coupled using fiber input or space light. Input, at the same time, can also use fiber coupling output or spatial light coupling output.
如图2所示，示出了制备在硅表面绝缘衬底11的硅表面上的波导111和光栅耦合器112的一种结构：隔离区将波导111分为三个波导传输区，输入耦合光栅1121和输出耦合光栅1122，沿波导缺口方向制备在波导111两侧。As shown in FIG. 2, there is shown a structure of the waveguide 111 and the grating coupler 112 prepared on the silicon surface of the silicon surface insulating substrate 11: the isolation region divides the waveguide 111 into three waveguide transmission regions, and the input coupling grating 1121 and the output coupling grating 1122 are prepared on both sides of the waveguide 111 in the direction of the waveguide notch.
在本发明实施例中，压电陶瓷系统13，用于通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而调制光脉冲信号的脉冲宽度。In the embodiment of the present invention, the piezoelectric ceramic system 13 is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
在一个实施例中，压电陶瓷系统包括两个压电陶瓷；两个压电陶瓷分别设置在波导两侧。In one embodiment, the piezoelectric ceramic system includes two piezoelectric ceramics; the two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
在具体应用中，压电陶瓷系统还包括电平周期性调控装置；电平周期性调控装置控制对压电陶瓷提供周期性的电压输入，令压电陶瓷周期性的横向移动。In a specific application, the piezoelectric ceramic system further includes a level periodic control device; the level periodic control device controls the periodic voltage input provided to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
在具体应用中，两个压电陶瓷设置在波导两侧时，可以与输入光栅耦合器以及输出光栅耦合器所在的位置方向相同，也可以与输入光栅耦合器以及输出光栅耦合器所在的位置方向垂直。In specific applications, when the two piezoelectric ceramics are arranged on both sides of the waveguide, they can be in the same direction as the input grating coupler and output grating coupler, or they can be in the same direction as the input grating coupler and output grating coupler vertical.
在本发明实施例中，隔离区将波导分为三个波导传输区，则输入光栅耦合器和输出光栅耦合器，设置在中间的波导传输区上，沿波导缺口方向的两侧分布；两个压电陶瓷的位置方向与输入光栅耦合器以及输出光栅耦合器所在的位置方向垂直，且设置在与中间的波导传输区相邻的波导传输区上；高分子有机聚合物衬底的两端覆盖在压电陶瓷系统上，其与波导贴合时，低维层状材料置于中间的波导传输区上。In the embodiment of the present invention, the isolation area divides the waveguide into three waveguide transmission areas, then the input grating coupler and the output grating coupler are arranged on the middle waveguide transmission area and are distributed along both sides of the waveguide gap direction; two The position direction of the piezoelectric ceramics is perpendicular to the position direction of the input grating coupler and the output grating coupler, and is arranged on the waveguide transmission area adjacent to the intermediate waveguide transmission area; both ends of the polymer organic polymer substrate cover On the piezoelectric ceramic system, when it is attached to the waveguide, the low-dimensional layered material is placed on the waveguide transmission area in the middle.
本发明实施例所提供的超快脉冲压缩系统，在硅表面绝缘衬底的硅表面上制备了波导和光栅耦合器，利用光栅耦合器将光脉冲信号引入波导中进行传输，通过波导中倏逝场与低维层状材料的相互作用，压缩光脉冲信号的脉冲宽度，同时利用压电陶瓷系统，通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而改变低维材料的电子能带，进一步主动调控低维层状材料的非线性光学特性，控制光脉冲信号脉冲宽度的压缩，最后通过光栅耦合器将调制后的光脉冲信号输出波导，实现对光脉冲信号的脉冲宽度的主动压缩调制效果。本发明实施例所提供的超快脉冲压缩系统结构紧凑、受力面积均匀、具有较长的使用寿命和较高的抗疲劳性能，并且不需要手动调节，具有批量可控制备，片上集成等优点。The ultrafast pulse compression system provided by the embodiment of the present invention prepares a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide The interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time, the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional The electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal. Pulse width active compression modulation effect. The ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
本发明的实施方式Embodiments of the invention
实施例二Example 2
如图3所示，本发明实施例提供了一种超快脉冲压缩系统的制备方法，包括：As shown in FIG. 3, an embodiment of the present invention provides a method for preparing an ultra-fast pulse compression system, including:
S101、提供硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料。S101. Provide silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered material.
在上述步骤S101中，硅表面绝缘衬底的表面覆盖有材料硅（Si），可以提高系统的稳定性。In the above step S101, the surface of the silicon surface insulating substrate is covered with the material silicon (Si), which can improve the stability of the system.
S102、在所述硅表面绝缘衬底的硅表面制备波导和光栅耦合器。S102. Prepare a waveguide and a grating coupler on the silicon surface of the silicon surface insulating substrate.
在上述步骤S102中，直接在硅表面绝缘衬底上制备波导和光栅耦合器，与目前成熟的CMOS加工工艺兼容，具有批量可控制备，片上集成等优点。In the above step S102, the waveguide and the grating coupler are directly prepared on the silicon surface insulating substrate, which is compatible with the current mature CMOS processing technology, and has the advantages of batch controllability and on-chip integration.
在一个实施例中，在硅表面绝缘衬底的硅表面制备波导和光栅耦合器的方法包括，通过电子束曝光工艺或双束刻蚀工艺，在硅表面绝缘衬底的硅表面制备符合光脉冲信号传输条件的波导和光栅耦合器。In one embodiment, a method of preparing a waveguide and a grating coupler on a silicon surface of a silicon surface insulating substrate includes preparing an optical pulse on the silicon surface of the silicon surface insulating substrate through an electron beam exposure process or a double beam etching process Waveguide and grating couplers for signal transmission conditions.
在具体应用中，光栅耦合器包括输入耦合光栅和输出耦合光栅；输入耦合光栅和输出耦合光栅制备在波导两侧，与波导耦合，以使光栅耦合器能够将光脉冲信号以高的耦合效率耦合进入波导，并以预设的输出比将光脉冲信号输出波导，用于进一步的测试和相关应用。In specific applications, the grating coupler includes an input coupling grating and an output coupling grating; the input coupling grating and the output coupling grating are prepared on both sides of the waveguide and coupled with the waveguide, so that the grating coupler can couple the optical pulse signal with high coupling efficiency Enter the waveguide and output the optical pulse signal to the waveguide with a preset output ratio for further testing and related applications.
S103、将所述高分子有机聚合物衬底与所述波导贴合，令所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，同时，将所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上。S103. Laminating the high molecular organic polymer substrate and the waveguide, so that the low-dimensional layered material is included between the high molecular organic polymer substrate and the waveguide, and at the same time, the Both ends of the high molecular organic polymer substrate cover the piezoelectric ceramic system.
在上述步骤S103中，高分子有机聚合物衬底具有一定的柔软性，单层或少层的低维层状材料大面积均匀的覆盖在高分子有机聚合物衬底的表面，以使压电陶瓷向其两端施加横向拉伸时，能够对衬底表面的低维层状材料提供横向均匀的应力作用，从而改变低维层状材料的电子能带，进一步主动调控低维层状材料的非线性光学特性，实现对光脉冲信号脉冲宽度的压缩作用。In the above step S103, the polymer organic polymer substrate has a certain flexibility, and a single layer or a few layers of low-dimensional layered material covers the surface of the polymer organic polymer substrate uniformly over a large area to make the piezoelectric When the ceramic is applied to the two ends of the lateral stretching, it can provide a laterally uniform stress to the low-dimensional layered material on the substrate surface, thereby changing the electronic energy band of the low-dimensional layered material, and further actively regulating the low-dimensional layered material. Non-linear optical characteristics, to achieve the compression of the pulse width of the optical pulse signal.
在一个实施例中，高分子有机聚合物衬底的制备方法包括，将高分子有机聚合物粉末溶于有机溶剂中，得到基于高分子有机聚合物的溶液；将高分子有机聚合物溶液于器皿中，置于烘干箱内烘干，形成高分子有机聚合物薄膜，获得高分子有机聚合物衬底。In one embodiment, a method for preparing a high-molecular organic polymer substrate includes dissolving a high-molecular organic polymer powder in an organic solvent to obtain a high-molecular organic polymer-based solution; In the process, it is placed in a drying oven and dried to form a polymer organic polymer film to obtain a polymer organic polymer substrate.
在本发明实施例中，高分子有机聚合物衬底的厚度可以为20~50μm；In the embodiment of the present invention, the thickness of the high molecular organic polymer substrate may be 20-50 μm;
在具体应用中，高分子有机聚合物可以包括聚甲基丙烯酸甲酯、聚乙烯醇或聚二甲基硅氧烷。In specific applications, the high molecular organic polymer may include polymethyl methacrylate, polyvinyl alcohol or polydimethylsiloxane.
在一个实施例中，低维层状材料的制备方法包括，通过化学气相沉积法或机械剥离技术得到单层或少层大面积均匀的低维层状材料。In one embodiment, the preparation method of the low-dimensional layered material includes, by chemical vapor deposition or mechanical stripping technology, a single layer or a few layers of large-area uniform low-dimensional layered material.
在具体应用中，低维层状材料包括碳纳米管、石墨烯、过渡金属硫化物和黑磷。In specific applications, low-dimensional layered materials include carbon nanotubes, graphene, transition metal sulfides, and black phosphorus.
在具体应用中，过渡金属硫化物包括二硫化钼、二硫化钨、二硒化钨、二硒化钼、二硒化锆、二硫化锆、二硫化锡、二硒化锡、二碲化钨、二碲化钼、二硫化铪、二硒化铪、二硒化铼、二硫化铼和硒化铟。In specific applications, transition metal sulfides include molybdenum disulfide, tungsten disulfide, tungsten diselenide, molybdenum diselenide, zirconium diselenide, zirconium disulfide, tin disulfide, tin diselenide, tungsten ditelide , Molybdenum telluride, hafnium disulfide, hafnium diselenide, rhenium diselenide, rhenium disulfide and indium selenide.
在上述步骤S101至步骤S103中，光脉冲信号在硅表面绝缘衬底上所制备的波导传输区中传输时，具有插入损耗低，单模传输等特点。In the above steps S101 to S103, when the optical pulse signal is transmitted in the waveguide transmission area prepared on the silicon surface insulating substrate, it has the characteristics of low insertion loss and single-mode transmission.
在一个实施例中，波导包括波导传输区和隔离区；隔离区将波导划分为N个波导传输区，N为大于1的整数；光脉冲信号在波导传输区中传输。In one embodiment, the waveguide includes a waveguide transmission area and an isolation area; the isolation area divides the waveguide into N waveguide transmission areas, where N is an integer greater than 1; and the optical pulse signal is transmitted in the waveguide transmission area.
在具体应用中，隔离区可以为任意的能够将波导划分为多个用于传输光脉冲信号的波导传输区的物质或者介质；例如，制备波导时，间隔性地在硅表面去除相同大小的长方体，令波导传输区之间互不相通。In specific applications, the isolation area can be any substance or medium that can divide the waveguide into multiple waveguide transmission areas for transmitting optical pulse signals; for example, when preparing the waveguide, the same size cuboid is removed on the silicon surface at intervals So that the waveguide transmission areas are not connected to each other.
在一个实施例中，波导传输区包括脉冲宽度调制区；光脉冲信号在脉冲宽度调制区中传输并进行脉冲宽度调制。其中，脉冲宽度调制区包括高分子有机聚合物衬底与波导贴合的区域，在此区域中，波导中的倏逝场与低维层状材料相互作用，有效压缩了光脉冲信号的脉冲宽度，从而实现脉冲宽度的调整。In one embodiment, the waveguide transmission area includes a pulse width modulation area; the optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation. Among them, the pulse width modulation area includes the area where the polymer organic polymer substrate is attached to the waveguide, in this area, the evanescent field in the waveguide interacts with the low-dimensional layered material, effectively compressing the pulse width of the optical pulse signal , So as to adjust the pulse width.
S104、令所述压电陶瓷系统通过高分子有机聚合物衬底对所述低维层状材料提供均匀的横向应力，从而调制所述光脉冲信号的脉冲宽度。S104. The piezoelectric ceramic system is provided with a uniform lateral stress to the low-dimensional layered material through the high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
在上述步骤S104中，压电陶瓷系统对压电陶瓷提供周期性的电压输入，令压电陶瓷周期性的横向移动。给高分子有机聚合物衬底提供纳米级的横向应力作用，使得紧贴高分子有机聚合物衬底的低维层状材料受到应力而改变其非线性可饱和吸收特性，进一步改变对光脉冲信号脉冲宽度的调制效果，实现对光脉冲信号脉冲宽度的主动压缩调制效果。In the above step S104, the piezoelectric ceramic system provides a periodic voltage input to the piezoelectric ceramic, causing the piezoelectric ceramic to periodically move laterally. Provides nano-scale lateral stress to the polymer organic polymer substrate, so that the low-dimensional layered material close to the polymer organic polymer substrate is stressed and changes its nonlinear saturable absorption characteristics, further changing the light pulse signal The modulation effect of the pulse width realizes the active compression modulation effect on the pulse width of the optical pulse signal.
在上述步骤S101至步骤S104中，将高分子有机聚合物衬底与波导贴合，令高分子有机聚合物衬底与波导之间包括有低维层状材料，同时，将高分子有机聚合物衬底的两端覆盖在压电陶瓷系统上包括：In the above steps S101 to S104, the polymer organic polymer substrate and the waveguide are bonded together so that a low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer organic polymer The two ends of the substrate covered on the piezoelectric ceramic system include:
通过转移技术将低维层状材料转移到高分子有机聚合物衬底上；Transfer low-dimensional layered materials to high molecular organic polymer substrates by transfer technology;
在压电陶瓷系统中设置两个压电陶瓷；Set two piezoelectric ceramics in the piezoelectric ceramic system;
将高分子有机聚合物衬底中有低维层状材料的一面与波导紧密贴合，同时将高分子有机聚合物衬底的两端分别固定在两个压电陶瓷的表面。The side of the polymer organic polymer substrate with the low-dimensional layered material is closely attached to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are respectively fixed on the surfaces of the two piezoelectric ceramics.
本发明实施例提供的超快脉冲压缩系统的制备方法，制备了硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料；其中，在硅表面绝缘衬底的硅表面上还制备了波导和光栅耦合器，利用光栅耦合器将光脉冲信号引入波导中进行传输；在高分子有机聚合物衬底与波导之间设置低维层状材料，通过波导中倏逝场与低维层状材料的相互作用，压缩光脉冲信号的脉冲宽度，同时将高分子有机聚合物衬底的两端覆盖在压电陶瓷系统上，利用压电陶瓷系统进一步主动调控低维层状材料的非线性光学特性，控制光脉冲信号脉冲宽度的压缩，最后通过光栅耦合器将调制后的光脉冲信号输出波导，实现对光脉冲信号的脉冲宽度的主动压缩调制效果。本发明实施例所提供的超快脉冲压缩系统结构紧凑、受力面积均匀、具有较长的使用寿命和较高的抗疲劳性能，并且不需要手动调节，具有批量可控制备，片上集成等优点。The preparation method of the ultrafast pulse compression system provided by the embodiment of the present invention prepares a silicon surface insulating substrate, a high molecular organic polymer substrate, a piezoelectric ceramic system and a low-dimensional layered material; wherein, the silicon surface insulating substrate A waveguide and a grating coupler are also prepared on the silicon surface, and the grating pulse coupler is used to introduce the optical pulse signal into the waveguide for transmission; a low-dimensional layered material is provided between the polymer organic polymer substrate and the waveguide to pass through the waveguide The interaction between the evanescent field and the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time covers the two ends of the polymer organic polymer substrate on the piezoelectric ceramic system, and the piezoelectric ceramic system is used to further actively control the low-dimensional The nonlinear optical characteristics of the layered material control the compression of the pulse width of the optical pulse signal. Finally, the modulated optical pulse signal is output to the waveguide through the grating coupler to achieve the active compression modulation effect on the pulse width of the optical pulse signal. The ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .
以上所述实施例仅用以说明本发明的技术方案，而非对其限制；尽管前述实施例对本发明进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围，均应包含在本发明的保护范围之内。The above-mentioned embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the foregoing embodiments have described the present invention in detail, those of ordinary skill in the art should understand that they can still implement the foregoing embodiments The recorded technical solutions are modified, or some of the technical features are equivalently replaced; and these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention and should be included in this Within the scope of protection of the invention.
工业实用性Industrial applicability
本发明实施例所提供的超快脉冲压缩系统，在硅表面绝缘衬底的硅表面上制备了波导和光栅耦合器，利用光栅耦合器将光脉冲信号引入波导中进行传输，通过波导中倏逝场与低维层状材料的相互作用，压缩光脉冲信号的脉冲宽度，同时利用压电陶瓷系统，通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而改变低维材料的电子能带，进一步主动调控低维层状材料的非线性光学特性，控制光脉冲信号脉冲宽度的压缩，最后通过光栅耦合器将调制后的光脉冲信号输出波导，实现对光脉冲信号的脉冲宽度的主动压缩调制效果。本发明实施例所提供的超快脉冲压缩系统结构紧凑、受力面积均匀、具有较长的使用寿命和较高的抗疲劳性能，并且不需要手动调节，具有批量可控制备，片上集成等优点。The ultrafast pulse compression system provided by the embodiment of the present invention prepares a waveguide and a grating coupler on a silicon surface of an insulating substrate on a silicon surface, and uses the grating coupler to introduce an optical pulse signal into the waveguide for transmission, and passes through the waveguide The interaction between the field and the low-dimensional layered material compresses the pulse width of the optical pulse signal, and at the same time, the piezoelectric ceramic system is used to provide uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby changing the low-dimensional The electronic energy band of the material further actively controls the nonlinear optical characteristics of the low-dimensional layered material, controls the compression of the pulse width of the optical pulse signal, and finally outputs the modulated optical pulse signal to the waveguide through the grating coupler to realize the optical pulse signal. Pulse width active compression modulation effect. The ultra-fast pulse compression system provided by the embodiments of the present invention has the advantages of compact structure, uniform bearing area, long service life and high fatigue resistance, and does not require manual adjustment, has batch controllable preparation, on-chip integration and other advantages .

Claims (14)

  1. 一种超快脉冲压缩系统，其特征在于，包括：硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料； An ultra-fast pulse compression system, characterized by comprising: silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered material;
    所述硅表面绝缘衬底的硅表面制备有波导和光栅耦合器；The silicon surface of the silicon surface insulating substrate is prepared with a waveguide and a grating coupler;
    所述高分子有机聚合物衬底与所述波导贴合，所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上；The polymer organic polymer substrate is bonded to the waveguide, and the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and the polymer organic polymer substrate Both ends of the cover the piezoelectric ceramic system;
    所述压电陶瓷系统通过高分子有机聚合物衬底对低维层状材料提供均匀的横向应力，从而调制所述光脉冲信号的脉冲宽度；The piezoelectric ceramic system provides a uniform lateral stress to the low-dimensional layered material through the polymer organic polymer substrate, thereby modulating the pulse width of the optical pulse signal;
    所述波导传输所述光脉冲信号；The waveguide transmits the optical pulse signal;
    所述光栅耦合器引导所述光脉冲信号进入所述波导，并以预设的输出比将所述调制后的光脉冲信号输出所述波导。The grating coupler guides the optical pulse signal into the waveguide, and outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  2. 如权利要求1所述的超快脉冲压缩系统，其特征在于，所述波导包括波导传输区和隔离区； The ultrafast pulse compression system according to claim 1, wherein the waveguide includes a waveguide transmission region and an isolation region;
    所述隔离区将所述波导划分为N个所述波导传输区，N为大于1的整数；The isolation zone divides the waveguide into N waveguide transmission zones, where N is an integer greater than 1;
    所述光脉冲信号在所述波导传输区中传输。The optical pulse signal is transmitted in the waveguide transmission area.
  3. 如权利要求2所述的超快脉冲压缩系统，其特征在于，所述波导传输区包括脉冲宽度调制区； The ultra-fast pulse compression system of claim 2, wherein the waveguide transmission area includes a pulse width modulation area;
    所述光脉冲信号在所述脉冲宽度调制区中传输并进行脉冲宽度调制。The optical pulse signal is transmitted in the pulse width modulation area and subjected to pulse width modulation.
  4. 如权利要求1至3任一项所述的超快脉冲压缩系统，其特征在于，所述脉冲宽度调制区包括所述高分子有机聚合物衬底与所述波导贴合的区域。 The ultrafast pulse compression system according to any one of claims 1 to 3, wherein the pulse width modulation region includes a region where the high molecular organic polymer substrate is bonded to the waveguide.
  5. 如权利要求1所述的超快脉冲压缩系统，其特征在于，所述光栅耦合器包括输入耦合光栅和输出耦合光栅； The ultra-fast pulse compression system according to claim 1, wherein the grating coupler comprises an input coupling grating and an output coupling grating;
    所述输入耦合光栅和所述输出耦合光栅制备在所述波导两侧；The input coupling grating and the output coupling grating are prepared on both sides of the waveguide;
    所述输入耦合光栅将所述光脉冲信号耦合进入所述波导；The input coupling grating couples the optical pulse signal into the waveguide;
    所述输出耦合光栅以预设的输出比，将所述调制后的光脉冲信号输出所述波导。The output coupling grating outputs the modulated optical pulse signal to the waveguide at a preset output ratio.
  6. 如权利要求1所述的超快脉冲压缩系统，其特征在于，所述高分子有机聚合物衬底包括通过高分子有机聚合物制备的薄膜。 The ultrafast pulse compression system according to claim 1, wherein the high molecular organic polymer substrate comprises a thin film prepared by a high molecular organic polymer.
  7. 如权利要求1所述的超快脉冲压缩系统，其特征在于，所述压电陶瓷系统包括两个压电陶瓷； The ultrafast pulse compression system of claim 1, wherein the piezoelectric ceramic system includes two piezoelectric ceramics;
    所述两个压电陶瓷分别设置在所述波导两侧。The two piezoelectric ceramics are respectively disposed on both sides of the waveguide.
  8. 如权利要求7所述的超快脉冲压缩系统，其特征在于，所述压电陶瓷系统还包括电平周期性调控装置； The ultra-fast pulse compression system according to claim 7, characterized in that the piezoelectric ceramic system further comprises a periodic level control device;
    所述电平周期性调控装置控制对所述压电陶瓷提供周期性的电压输入，令所述压电陶瓷周期性的横向移动。The level periodic control device controls to provide a periodic voltage input to the piezoelectric ceramic, so that the piezoelectric ceramic periodically moves laterally.
  9. 一种超快脉冲压缩系统的制备方法，其特征在于，包括： A method for preparing an ultra-fast pulse compression system is characterized by including:
    提供硅表面绝缘衬底、高分子有机聚合物衬底、压电陶瓷系统和低维层状材料；Provide silicon surface insulating substrate, high molecular organic polymer substrate, piezoelectric ceramic system and low-dimensional layered materials;
    在所述硅表面绝缘衬底的硅表面制备波导和光栅耦合器；Preparing a waveguide and a grating coupler on the silicon surface of the silicon surface insulating substrate;
    将所述高分子有机聚合物衬底与所述波导贴合，令所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，同时，将所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上；The polymer organic polymer substrate is bonded to the waveguide so that the low-dimensional layered material is included between the polymer organic polymer substrate and the waveguide, and at the same time, the polymer Both ends of the organic polymer substrate cover the piezoelectric ceramic system;
    令所述压电陶瓷系统通过高分子有机聚合物衬底对所述低维层状材料提供均匀的横向应力，从而调制所述光脉冲信号的脉冲宽度。The piezoelectric ceramic system is provided with a uniform lateral stress on the low-dimensional layered material through a high molecular organic polymer substrate, thereby modulating the pulse width of the optical pulse signal.
  10. 如权利要求9所述的超快脉冲压缩系统的制备方法，其特征在于，所述在所述硅表面绝缘衬底的硅表面制备波导和光栅耦合器包括： The method for manufacturing an ultra-fast pulse compression system according to claim 9, wherein the preparation of the waveguide and grating coupler on the silicon surface of the silicon surface insulating substrate comprises:
    通过电子束曝光工艺或双束刻蚀工艺，在所述硅表面绝缘衬底的硅表面制备符合光脉冲信号传输条件的所述波导和所述光栅耦合器。Through the electron beam exposure process or the double beam etching process, the waveguide and the grating coupler that meet the conditions of optical pulse signal transmission are prepared on the silicon surface of the silicon surface insulating substrate.
  11. 如权利要求10所述的超快脉冲压缩系统的制备方法，其特征在于，所述光栅耦合器包括输入耦合光栅和输出耦合光栅； The method for manufacturing an ultra-fast pulse compression system according to claim 10, wherein the grating coupler includes an input coupling grating and an output coupling grating;
    所述输入耦合光栅和所述输出耦合光栅制备在所述波导两侧。The input coupling grating and the output coupling grating are prepared on both sides of the waveguide.
  12. 如权利要求9所述的超快脉冲压缩系统的制备方法，其特征在于，所述高分子有机聚合物衬底的制备方法包括： The method for preparing an ultra-fast pulse compression system according to claim 9, wherein the method for preparing the high molecular organic polymer substrate comprises:
    将高分子有机聚合物粉末溶于有机溶剂中，得到基于所述高分子有机聚合物的溶液；Dissolving the polymer organic polymer powder in an organic solvent to obtain a solution based on the polymer organic polymer;
    将所述高分子有机聚合物溶液于器皿中，置于烘干箱内烘干，形成高分子有机聚合物薄膜，获得所述高分子有机聚合物衬底。 The polymer organic polymer solution is placed in a vessel and placed in a drying oven for drying to form a polymer organic polymer film to obtain the polymer organic polymer substrate.
  13. 如权利要求9所述的超快脉冲压缩系统的制备方法，其特征在于，所述低维层状材料的制备方法包括： The method for preparing an ultra-fast pulse compression system according to claim 9, wherein the method for preparing the low-dimensional layered material includes:
    通过化学气相沉积法或机械剥离技术得到单层或少层大面积均匀的所述低维层状材料。The low-dimensional layered material with a large area and a single layer or a few layers is uniformly obtained by a chemical vapor deposition method or a mechanical stripping technique.
  14. 如权利要求9至13任一项所述的超快脉冲压缩系统的制备方法，其特征在于，所述将所述高分子有机聚合物衬底与所述波导贴合，令所述高分子有机聚合物衬底与所述波导之间包括有所述低维层状材料，同时，将所述高分子有机聚合物衬底的两端覆盖在所述压电陶瓷系统上包括： The method for preparing an ultra-fast pulse compression system according to any one of claims 9 to 13, wherein the polymer organic polymer substrate is bonded to the waveguide to make the polymer organic The low-dimensional layered material is included between the polymer substrate and the waveguide, and covering both ends of the high molecular organic polymer substrate on the piezoelectric ceramic system includes:
    通过转移技术将所述低维层状材料转移到所述高分子有机聚合物衬底上；Transfer the low-dimensional layered material to the high-molecular organic polymer substrate by a transfer technique;
    在所述压电陶瓷系统中设置两个压电陶瓷；Setting two piezoelectric ceramics in the piezoelectric ceramic system;
    将所述高分子有机聚合物衬底中有所述低维层状材料的一面与所述波导紧密贴合，同时将所述高分子有机聚合物衬底的两端分别固定在两个所述压电陶瓷的表面。The side of the polymer organic polymer substrate with the low-dimensional layered material closely adheres to the waveguide, and at the same time, the two ends of the polymer organic polymer substrate are fixed to the two The surface of piezoelectric ceramics.
PCT/CN2018/111560 2018-10-24 2018-10-24 Ultrafast pulse compression system and preparation method WO2020082254A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/111560 WO2020082254A1 (en) 2018-10-24 2018-10-24 Ultrafast pulse compression system and preparation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/111560 WO2020082254A1 (en) 2018-10-24 2018-10-24 Ultrafast pulse compression system and preparation method

Publications (1)

Publication Number Publication Date
WO2020082254A1 true WO2020082254A1 (en) 2020-04-30

Family

ID=70330222

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/111560 WO2020082254A1 (en) 2018-10-24 2018-10-24 Ultrafast pulse compression system and preparation method

Country Status (1)

Country Link
WO (1) WO2020082254A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013925B3 (en) * 2008-03-12 2009-05-07 Batop Gmbh Saturable absorber mirror for use as mode coupler for pulse lasers, has mechanical distance piece provided for changing thickness of air layer, which is formed between saturable absorber layer system and dielectric Bragg-mirror
CN103904544A (en) * 2013-11-15 2014-07-02 南通蓝诺光电科技有限公司 Two-dimensional stratified material saturable absorber device and manufacturing method thereof
CN104150476A (en) * 2014-08-15 2014-11-19 苏州斯迪克新材料科技股份有限公司 Nondestructive transfer method for graphene prepared through chemical vapor deposition
CN104596683A (en) * 2015-02-12 2015-05-06 南京大学 Pressure sensor based on stratified materials and piezoelectric effect measuring system
CN106785844A (en) * 2017-01-20 2017-05-31 中国科学院物理研究所 A kind of two-dimension nano materials mode-locked all-fiber laser of use mirror structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013925B3 (en) * 2008-03-12 2009-05-07 Batop Gmbh Saturable absorber mirror for use as mode coupler for pulse lasers, has mechanical distance piece provided for changing thickness of air layer, which is formed between saturable absorber layer system and dielectric Bragg-mirror
CN103904544A (en) * 2013-11-15 2014-07-02 南通蓝诺光电科技有限公司 Two-dimensional stratified material saturable absorber device and manufacturing method thereof
CN104150476A (en) * 2014-08-15 2014-11-19 苏州斯迪克新材料科技股份有限公司 Nondestructive transfer method for graphene prepared through chemical vapor deposition
CN104596683A (en) * 2015-02-12 2015-05-06 南京大学 Pressure sensor based on stratified materials and piezoelectric effect measuring system
CN106785844A (en) * 2017-01-20 2017-05-31 中国科学院物理研究所 A kind of two-dimension nano materials mode-locked all-fiber laser of use mirror structure

Similar Documents

Publication Publication Date Title
Chen et al. Flexible and tunable silicon photonic circuits on plastic substrates
Mashanovich et al. Germanium mid-infrared photonic devices
CN112068336B (en) Electric control type polarization entanglement state generation chip based on periodically polarized lithium niobate waveguide
CN109116590B (en) Silicon and lithium niobate hybrid integrated optical modulator and preparation method thereof
Beecher et al. 320 fs pulse generation from an ultrafast laser inscribed waveguide laser mode-locked by a nanotube saturable absorber
Munk et al. Eight-channel silicon-photonic wavelength division multiplexer with 17 GHz spacing
CN103018928B (en) Tunable microwave photonic filter based on photoinjection semiconductor laser system
McKay et al. Brillouin-based phase shifter in a silicon waveguide
CN113168070A (en) Wavelength conversion device
CN110596988B (en) Preparation method of on-chip high-quality factor chalcogenide micro-ring resonant cavity
Jin et al. Silicon-based graphene electro-optical modulators
Amiri et al. Generating of 57–61 GHz frequency band using a panda ring resonator
WO2020082254A1 (en) Ultrafast pulse compression system and preparation method
Lenin Babu et al. 4-Channel DWDM demultiplexer on silicon photonic crystal slab
JP2015069127A (en) Silicon carbide waveguide element
CN209525543U (en) A kind of ultrafast pulse compressibility
CN109188732B (en) Ultrafast pulse compression system and preparation method
CN112162420A (en) Micro-ring coupling modulation structure based on graphene fine-tuning coupling efficiency and use method thereof
Song et al. Analysis and demonstration of Mach–Zehnder polymer modulators using in-plane coplanar waveguide structure
Tao et al. Single-wall carbon nanotube assisted all-optical wavelength conversion at 2.05 µm
CN106710637A (en) Micrometric displacement positioning mechanism based on piezoelectric stack
CN109814206A (en) Adjustable wavelength division multiplexer based on graphene film and toroidal cavity resonator
CN109149333B (en) Waveguide integrated optical modulator and preparation method thereof
CN112104425A (en) Integrated computing chip and manufacturing method thereof
CN113448135A (en) Graphene-based high-linearity micro-ring auxiliary MZ modulator

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18937720

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 06/08/2021)

122 Ep: pct application non-entry in european phase

Ref document number: 18937720

Country of ref document: EP

Kind code of ref document: A1