WO2020080544A1 - Dispositif de mesure, composant de dispositif de mesure et dispositif de traitement d'opération de dispositif de mesure - Google Patents

Dispositif de mesure, composant de dispositif de mesure et dispositif de traitement d'opération de dispositif de mesure Download PDF

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WO2020080544A1
WO2020080544A1 PCT/JP2019/041213 JP2019041213W WO2020080544A1 WO 2020080544 A1 WO2020080544 A1 WO 2020080544A1 JP 2019041213 W JP2019041213 W JP 2019041213W WO 2020080544 A1 WO2020080544 A1 WO 2020080544A1
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cantilever
vibration
measuring device
vibrating body
virtual
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PCT/JP2019/041213
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English (en)
Japanese (ja)
Inventor
浩司 藪野
山本　泰之
壮平 松本
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国立大学法人 筑波大学
国立研究開発法人産業技術総合研究所
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Priority to JP2020553366A priority Critical patent/JP7362060B2/ja
Publication of WO2020080544A1 publication Critical patent/WO2020080544A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

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  • the present invention relates to a measuring device for measuring mass, elasticity, and the like from the vibration behavior of a vibrating body such as a cantilever, a component for the measuring device, and a processing device for the measuring device.
  • two cantilevers of the same shape are provided on the same support member so that they can perform coupled vibration, and the measurement target added to the cantilever based on the shape of the natural vibration mode of the two cantilevers.
  • a technique for measuring the minute mass of an object is disclosed (for example, refer to Patent Document 1). It is said that by coupling two cantilevers, it is possible to detect minute changes in mass and elasticity with high sensitivity as compared with the case of using one cantilever.
  • the term "coupling” as used herein means that a part of the two cantilevers is connected by a very weak spring, and the displacement of one affects the displacement of the other.
  • the present invention has been made by paying attention to the above-mentioned unsolved problems of the related art, and an object thereof is to provide a measuring device having higher sensitivity, a component for the measuring device, and an arithmetic processing device for the measuring device. There is.
  • one of the two coupled cantilevers is removed. Then, instead of the removed cantilever, the force that should be applied to the other cantilever when two cantilevers are coupled is theoretically calculated in real time and applied to the actuator attached to the other cantilever. As a result, only the other cantilever is vibrated as if the two cantilevers are coupled and vibrating. By doing this, only one cantilever needs to be manufactured, and it becomes possible to ideally approximate the physical characteristics of the cantilever, and it is also possible to ideally reduce the coupling effect. It becomes possible to solve the above problems.
  • a measurement device that detects a value corresponding to a physical quantity of a measurement target by using the amplitudes of two vibrating bodies, and is used as one of the two vibrating bodies.
  • the actual vibrating body an actuator that applies a force in a preset displacement direction to the actual vibrating body, a vibration displacement detection unit that detects the vibrating displacement of the actual vibrating body, and a virtual vibrating body that can be coupled to each other.
  • Coupling control that simulates the virtual vibrating body as one of the two vibrating bodies and drives and controls the actuator based on the vibrating displacement of the real vibrating body detected by the virtual vibrating body and the vibration displacement detection unit.
  • a measuring device including an arithmetic processing device that executes a process.
  • a component for the measuring device which is an actual vibration body, an actuator that applies a force in a preset displacement direction to the real vibration body, and an actual vibration.
  • a component for a measuring device which includes a vibration displacement detection unit that detects a vibration displacement of a body.
  • the arithmetic processing device for the measuring device according to the above aspect which is virtually coupled to the actual vibrating body by using the vibration displacement of the actual vibrating body.
  • an arithmetic processing device for a measuring device that simulates a virtual vibrating body and generates a signal for driving and controlling an actuator.
  • a feedback value proportional to the vibration speed (displacement speed) of one of the vibrating bodies is positively fed back to give an equal excitation input to the two vibrating bodies.
  • self-excited vibration is generated in the two vibrating bodies.
  • the feedback gain is gradually increased (or decreased) from a preset value.
  • self-excited vibration occurs only in the low-order natural vibration mode.
  • the amplitude ratio of the two vibrating bodies at this time strictly corresponds to the low-order natural vibration mode.
  • the measurement target is added to one of the two vibrating bodies, and the amplitude ratio when the self-excited vibration occurs is measured. Then, for example, the mass of the measurement target is measured from the change in the amplitude ratio when the measurement target is added to the amplitude ratio when the measurement target is not added.
  • FIG. 1A is a diagram showing a configuration example of the vibrating unit 1 when measuring the mass of a measurement object using such a mass measuring method.
  • the vibrating section 1 includes a cantilever 1A, a cantilever 1B, a support member 1C, and an overhang portion 1D.
  • the cantilevers 1A and 1B are both made of the same material and have the same shape, and are arranged in parallel (coupled) with the support member 1C in a cantilever state in which one end is fixed to the support member 1C and the other end is a free end. There is. That is, the cantilevers 1A and 1B have the same spring rigidity and mass.
  • the root portions of the cantilevers 1A and 1B on the fixed end side are connected by an overhang portion 1D formed so as to project from the support member 1C.
  • the overhang portion 1D plays a role of a vibration transmitting portion for transmitting vibration between the cantilevers 1A and 1B, and the overhang portion 1D has a structure in which the cantilevers 1A and 1B are coupled and vibrated.
  • an object to be measured is attached to the cantilever 1B, and the cantilevers 1A and 1B are externally displaced as velocity feedback to generate self-excited vibrations in the cantilevers 1A and 1B.
  • ⁇ Mass measuring method in the present embodiment> When measuring the mass of an object to be measured using such a mass measuring method, the measuring device according to the present embodiment, as shown in FIG. 1B, cantilever 1A and overhang portion 1D (support member 1C). Is implemented as a virtual model on an arithmetic processing unit including a digital signal processor (DSP) or the like.
  • DSP digital signal processor
  • FIG. 2 is a diagram showing an example of an equivalent model of the dynamic system of the vibrating section 1 included in the measuring device according to the present embodiment.
  • the vibrating section 1 is an equivalent model of a “spring-mass (mass) -damper” system (hereinafter also referred to as a coupled model) in which two coupled cantilevers 1A and 1B are taken into consideration. .)
  • the cantilever 1A includes a first spring a1 having a spring constant k whose one end is supported by a supporting member 1C and a first damper a2 having a damping constant c whose one end is supported by the supporting member 1C.
  • the first spring a1 and the first object a3 having a mass m supported by the other end of the first damper a2.
  • the cantilever 1B includes a second spring b1 having a spring constant k supported at one end by a supporting member 1C and a second damper b2 having a damping constant c supported at one end by the supporting member 1C. And a second object b3 having a mass m supported by the other end of the second spring and the second damper, and a model in which a measurement object having a mass ⁇ m is added to the second object b3 having a mass m.
  • each of the cantilevers 1A and 1B has the same mass as the first spring a1 or the second spring b1 having the same spring constant k and the first damper a2 or the second damper b2 having the same damping constant c.
  • the model is provided with each of the first object a3 and the second object b3 that it has.
  • the first object a3 and the second object b3 are connected by the third spring c1 having the spring constant kc.
  • the third spring c1 having the spring constant kc corresponds to the overhang portion 1D in FIG. 1 and represents the coupled effect of the two cantilevers 1A and 1B.
  • a portion surrounded by a broken line in FIG. 2 is simulated as a virtual model.
  • an exciting force F is further applied from the outside to the support points of the cantilevers (virtual vibrating body) 1A and the cantilevers (actual vibrating body) 1B.
  • the equation of motion of the system is as shown in the following equations (1) and (2).
  • the equation (1) shows the equation of motion of the virtual model including the cantilever 1A
  • the equation (2) shows the equation of motion of the existing cantilever 1B.
  • x1 is the displacement of the cantilever 1A
  • dx1 / dt is the first-order differential value of the displacement of the cantilever 1A
  • d 2 x1 / dt 2 is the second-order differential value of the displacement of the cantilever 1A
  • x2 displacement of the cantilever 1B is the first derivative value of the cantilever 1B
  • d 2 x2 / dt 2 is the second order differential value of the cantilever 1B.
  • an external excitation force F applied to the cantilevers 1A and 1B so as to generate self-excited oscillation is given by the following equation (3) using the displacement x2 of the cantilever 1B.
  • b in the equation (3) is a feedback gain set to generate self-excited oscillation.
  • the feedback gain b is set to the value of the feedback gain when the self-excited oscillation occurs in the actual measurement environment. This feedback gain b does not need to be updated unless the measurement environment changes, and may be updated when measurement is performed in a different measurement environment.
  • F b ⁇ dx2 / dt (3)
  • the equation of motion of equation (6) is virtually simulated using the fourth-order Runge-Kutta method in the arithmetic processing device. Further, the right side of the equation (7) is applied to the existing cantilever 1B as the exciting force F.
  • the state variable X is set to the following equation (8), the equation (6) is converted into a state equation, and then the fourth-order Runge- It is solved using the Kutta method, and the state quantity (equation (10)) is derived from the state quantity (equation (9)) at time t after a unit step time, that is, at time t + h.
  • the virtual displacement of the cantilever 1A is calculated as x1 (t + h), and the speed is calculated as dx1 (t + h).
  • the exciting force F required to reproduce the expression (7) is expressed by the following expression (12).
  • F kc ⁇ (x1-x2) + b ⁇ (dx2 / dt) ... (12) That is, the exciting force F required to realize the equation (7) is the velocity feedback component (linear velocity feedback component) for self-oscillation and the displacement feedback (linear displacement feedback component) for simulating the coupling effect. Ingredient) and the sum. From the above, the calculation necessary for simulating the coupled cantilever and the information to be fed back are known.
  • FIG. 3 is a schematic configuration diagram showing an example of the measuring device 100.
  • the measuring apparatus 100 uses an actual vibrating body portion 11 including an existing cantilever 1B, a displacement meter 23 that detects the amplitude of the cantilever 1B, and an actuator that vibrates the cantilever 1B, and a detection signal from the displacement meter 23 to generate a virtual signal.
  • An arithmetic processing unit 12 configured by a digital signal processor (DSP) or the like for performing a coupled control process for simulating the motion of the cantilever 1A and controlling the actuator, and an actuator 22 according to a command signal from the arithmetic processing unit 12.
  • a drive circuit 13 for driving the display device and a display device 14 are included.
  • the actual vibrating body section 11 includes an existing cantilever 1B, a support member 21 that supports one end of the cantilever 1B, and an actuator 22 that vibrates the support member 21.
  • the parts described in FIGS. 4 and 5 correspond to parts for the measuring device.
  • the support member 21 supports one end of the elongated plate-shaped cantilever 1B so that the width direction of the cantilever 1B is vertical to the vertical direction.
  • the support member 21 also includes a holding portion 21a that holds the cantilever 1B, and a guide portion 21b that slidably supports the holding portion 21a in a direction orthogonal to the longitudinal direction of the cantilever 1B.
  • the holding portion 21a and the guide portion 21b are slidably supported via a linear bearing or the like.
  • the actuator 22 is configured to include, for example, a uniaxial piezo actuator, includes a shaft portion 22a that expands and contracts, and a support portion 22b that supports one end of the shaft portion 22a.
  • the holding portion 21a is provided at the other end of the shaft portion 22a. Is fixed.
  • the expansion / contraction direction of the shaft portion 22a and the guide direction of the holding portion 21a in the guide portion 21b are arranged so as to coincide with each other, and the actuator 22 expands / contracts the shaft portion 22a in response to a drive signal from the drive circuit 13 to hold the holding portion.
  • 21a moves with the guide portion 21b as a guide, and the cantilever 1B held by the holding portion 21a moves.
  • the actuator 22 is moved so as to alternately expand and contract the shaft portion 22a, whereby the holding portion 21a vibrates, and as a result, the cantilever 1B vibrates.
  • the displacement meter 23 is arranged at a position where the distance to the tip of the cantilever 1B can be measured, and measures the distance to the tip of the cantilever 1B.
  • the amplitude of the cantilever 1B can be detected by calculating the displacement of the distance to the tip of the cantilever 1B detected by the displacement meter 23.
  • FIG. 6 is a block diagram showing an example of the dynamics of the entire measuring device 100.
  • the equations (1) to (12) which have been described as being dimensionally in terms of calculation in the arithmetic processing unit 12 configured by a DSP or the like, need to be converted into a dimensionless amount.
  • the equations (6) and (7) are made dimensionless, they can be expressed by the following equations (13) and (14).
  • FIG. 6 is a block diagram showing the equations (13) and (14).
  • the displacement x2 of the cantilever 1B is detected by the displacement meter 23, multiplied by the gain G1 of the displacement meter 23 by the calculator 31, and then converted into a digital signal by the AD converter (ADC) 32, and calculated. It is processed by the processing device 12. That is, the output of the AD converter 32 is multiplied by the gain G2 in the calculator 33, and then passed through the LPF (low-pass filter) unit 34 and the differentiator (vibration velocity detecting unit) 35, and the first-order differential value dx2 of the displacement x2.
  • LPF low-pass filter
  • differentiator vibration velocity detecting unit
  • a feedback component for self-sustained pulsation is created by multiplying the first-order differential value dx2 * / dt * of the displacement x2 * by the velocity feedback gain ⁇ . This feedback component is input to the adder 37.
  • the output x2 * of the computing unit 33 is further input to the computing unit 38 and also to the computing unit 39 directly or via the differentiator 40.
  • the calculator 39 obtains the displacement x1 * of the virtual cantilever 1A using the Runge-Kutta method based on the output x2 * of the calculator 33 and the output dx2 * / dt * of the differentiator 40.
  • the displacement x1 * is input to the calculator 39, and the difference between the displacement x1 * and the displacement x2 * is output from the calculator 39. This difference is multiplied by the displacement feedback gain kc * for coupling the virtual cantilever 1A and the existing cantilever 1B by the multiplier 41 to generate a feedback component for simulating the coupling rigidity.
  • This feedback component is input to the adder 37.
  • the output ⁇ ⁇ (dx2 * / dt * ) of the multiplier 36 as the velocity feedback component and the output kc ⁇ (x1 * ⁇ x2 * ) of the multiplier 41 as the displacement feedback component are added by the adder 37 to generate the vibration. It is output as the input displacement ⁇ x.
  • the vibration input displacement ⁇ x is input to the calculator 42, multiplied by the gain G3, and then output to the actuator 22 via the DA converter (DAC) 43.
  • the output of the DA converter 43 is multiplied by the piezoelectric constant d33 of the actuator 22 (piezoactuator) by the multiplier (feedback control unit) 44 and input to the cantilever 1B as the vibration input displacement ⁇ x.
  • a feedback loop simulating the coupled effect of the virtual vibrator is constructed.
  • the gains G2 and G3 are set, for example, based on the representative length and the representative time for converting the dimensionless quantity into the dimensional quantity.
  • the material of the cantilever 1B is C5191P (phosphor bronze plate).
  • the shape of the cantilever 1B is 210 [mm] in length from the fixed end, 15 [mm] in width, and 0.3 [mm] in thickness.
  • the natural frequency f1 of the cantilever 1B is 3.964 Hz, and the dimensionless damping coefficient ⁇ is 1.770 ⁇ 10 ⁇ 3 .
  • the coupled rigidity between the virtual cantilever 1A and the existing cantilever 1B can be set to a desired value. I checked if it was. Specifically, the confirmation was performed by utilizing the change situation of the secondary mode natural frequency f2 of the existing cantilever 1B when the displacement feedback gain kc * for simulating the virtual coupled stiffness is changed.
  • FIG. 7A shows the value set as the displacement feedback gain kc * and the measured value of the secondary mode natural frequency f2 of the existing cantilever 1B at that time.
  • the secondary mode natural frequency f2 of the cantilever 1B can be obtained from the frequency analysis of free vibration of the cantilever 1B detected from the detection value of the displacement meter 23, for example.
  • FIG. 7B shows the correspondence between the set value set as the displacement feedback gain kc * and the experimental value kce * of the coupled stiffness calculated from the secondary mode natural frequency f2.
  • the horizontal axis is the set value set as the displacement feedback gain kc *
  • the vertical axis is the experimental value kce * of the coupled rigidity.
  • the experimental value kce * of the coupled rigidity was calculated from the following equation (15).
  • the value kce * can theoretically be expressed by equation (15).
  • ⁇ and ⁇ in the equations (13) and (14) are coefficients representing the characteristics of the existing cantilever 1B, and both ⁇ and ⁇ are zero here.
  • kce * (1/2) ⁇ ⁇ (f2 / f1) 2 ⁇ 1 ⁇ ... (15)
  • the displacement feedback gain kc * and the experimental value kce * of the coupled rigidity that is, the natural frequency f1 of the cantilever 1B obtained from the free vibration experiment when the displacement feedback gain kc * is given.
  • the relationship with the experimental value kce * of the coupled rigidity obtained from the equation (15) using the eigenfrequency f2 of the secondary mode of the cantilever 1B is almost located on the straight line with the inclination “1”. That is, it was confirmed that by adjusting the displacement feedback gain kc * , the virtual cantilever 1A connected to the cantilever 1B can be simulated at the desired experimental value kce * of the coupled rigidity.
  • the coupled cantilevers 1A and 1B can be simulated in real time. Therefore, the mass of the measuring object can be measured from the ratio of the amplitude of the cantilever 1B to which the measuring object is attached and the amplitude of the virtual cantilever 1A. Further, the sensitivity of measuring the mass of the object to be measured can be adjusted by arbitrarily changing the coupled rigidity. Further, the coupling rigidity can be arbitrarily changed, that is, the coupling rigidity can be made smaller than that in the case where two existing cantilevers are mechanically connected to form a coupling connection. . That is, it is possible to realize the measuring device 100 with higher accuracy.
  • the cantilever 1A and the overhang portion 1D are virtually simulated by the arithmetic processing device 12, in the measuring device that measures the mass of the measuring object using one existing cantilever. It can be realized only by mounting the simulation device 100a including the arithmetic processing unit 12, the drive circuit 13, and the display device 14 shown in FIG. Therefore, the accuracy of the measurement device can be easily improved by adding the simulation device 100a to the existing measurement device.
  • the measuring device 100 may be configured so that the amplitude of self-excited oscillation can be suppressed to a smaller value. That is, the value expressed by the following equation (16) is used with F as the excitation force.
  • F kc ⁇ (x1-x2) + b ⁇ (dx2 / dt) + F (x, (dx / dt)) (16)
  • f (x, (dx / dt)) in the equation (16) is a nonlinear velocity feedback component, and its phase needs to be antiphase or in-phase with dx2 / dt.
  • f (x, (dx / dt)) is set as shown in the following equation (17) and bn in the equation (17) is adjusted, the amplitude of the virtual cantilever 1A and the existing cantilever 1B can be reduced. Can be suppressed. As a result, the divergence of vibrations of the cantilevers 1A and 1B can be suppressed, and the divergence can be suppressed, so that the linear mode can be accurately measured.
  • Equations of motion shown in the equations (1) and (2) can be expressed by the following equations (18) and (19).
  • the virtual cantilever 1A is assumed to have the same shape and the same characteristics as the existing cantilever 1B has been described, but the present invention is not limited to this.
  • the virtual cantilever 1A and the existing cantilever 1B may have the same natural frequency, and may not have the same shape as long as the natural frequencies are the same.
  • the term “identical” here includes not only the case where they are exactly the same but also the case where there is a difference (for example, a deviation of 1% to 2%) that can be regarded as substantially the same.
  • the natural frequency of the cantilever 1B that could be actually measured within the measurable range is used and the natural frequencies of the cantilevers 1A and 1B are adjusted to be the same, the difference between the natural frequencies of the two is the minimum. Including cases where
  • the arithmetic processing unit 12 may further execute initial processing.
  • the actuator 22 is driven to drive only the existing cantilever 1B, and the frequency at which self-excited oscillation occurs is acquired.
  • the feedback gain is changed to obtain the frequency at the time when the vibration starts, that is, the resonance frequency.
  • This is set as a natural frequency, and information based on the acquired natural frequency is set as information necessary for simulating the virtual cantilever 1A.
  • the cantilever 1A is simulated using the set information.
  • This initial processing may be performed at a preset timing, for example, at the start of measurement of a series of measurement objects or periodically.
  • the natural frequency is a theoretical value, and the frequency that actually resonates is the resonance frequency. Unless the effect of viscosity is strong, the resonance frequency is almost equal to the natural frequency.
  • the initial process may include the process of setting the feedback gain b.
  • the arithmetic processing device 12 performs the arithmetic processing has been described, but the present invention is not limited to this.
  • an analog circuit for performing the above arithmetic processing may be configured and the arithmetic processing may be performed by this analog circuit. That is, as the length of the cantilever 1B becomes shorter, the vibration frequency of the cantilever 1B becomes higher, and higher-speed calculation is required. Therefore, it is necessary to use a higher performance digital signal processor or the like as the processing unit 12. Will increase costs.
  • the arithmetic processing unit 12 shown in FIG. 3 with an analog circuit, it can be realized without using a high-performance digital signal processor or the like, that is, an increase in cost can be suppressed. .
  • the function of the arithmetic processing unit 12 is realized by an analog circuit, it is preferable to form an analog resonance circuit that outputs an electric signal equivalent to that of the equation (1).
  • the model can be formed as if the displacement signal of the real cantilever 1B is input to the fixed end of the virtual cantilever 1A, and the model is coupled with the real cantilever 1B.
  • the combined virtual cantilever 1A can be realized with higher accuracy.
  • the uniaxial piezo actuator is used as the actuator 22
  • the present invention is not limited to this.
  • an actuator that can reciprocate the fixed end of the cantilever 1B such as a magnet
  • the tip side of the cantilever 1B may be vibrated.
  • any actuator that can vibrate the tip of the cantilever 1B, such as a magnet or a piezo actuator, can be applied.
  • the present invention is not limited to this.
  • it may be applied to a probe used in an AFM (Atomic Force Microscope) or the like to simulate a virtual model in which a real probe and a virtual probe are coupled and coupled.
  • AFM Acoustic Force Microscope
  • the physical quantity to be measured is not limited to mass, and may be any of the surface shape, elastic modulus, viscoelasticity, and force field.
  • the force field here includes an electric field in space, a magnetic field in space, a spatial distribution of gravitational force, and the like.
  • both of the two cantilevers may be affected by the electric field.
  • one cantilever 1A is a virtual cantilever
  • a situation equivalent to a case in which the two cantilevers are separated to a position where one cantilever is not affected by the electric field is assumed to be virtual.
  • the mass of the moving body can be detected. That is, since the gravitational force changes with the movement of the mass on the ground, the mass of the moving body can be detected by detecting the change in the gravitational force.
  • the invention is not limited to this.
  • a capacitance displacement sensor, an encoder, an optical displacement gauge (for example, a displacement sensor using the optical lever method), a strain gauge, or the like can be used.
  • the eddy current may be measured, and the displacement of the cantilever 1B may be detected from the displacement amount.
  • any method may be used as long as the displacement of the cantilever 1B can be detected.
  • the cantilever 1A and the overhang portion 1D are virtually simulated by the arithmetic processing unit 12
  • the present invention is not limited to this.
  • the cantilever 1A and the cantilever 1B may be actually provided, and the existing cantilever 1A and the cantilever 1B may be virtually coupled by the arithmetic processing unit 12.
  • the amplitude of the cantilever 1A and the amplitude of the cantilever 1B are detected, and based on these, the equivalent model in which the cantilever 1A and the cantilever 1B are virtually coupled to each other is used to obtain the cantilever. It suffices to control the actuators that drive 1A and 1B.
  • a plurality of cantilevers for improving sensitivity may be further provided between the cantilevers 1A and 1B.
  • FIG. 9 shows a virtual cantilever CL1 corresponding to the virtual cantilever 1A, a real cantilever CLn (n is an integer of n ⁇ 3) corresponding to the real cantilever 1B, and existing between the cantilevers CL1 and CLn.
  • FIG. 6 is an explanatory diagram for explaining a method of measuring an atomic force using the vibrating unit 1 having one or a plurality of cantilevers CLi (i is 2 ⁇ i ⁇ n ⁇ 1) for improving sensitivity.
  • the atomic force to be measured is applied to the existing cantilever CLn, and this atomic force is measured.
  • the virtual cantilever CL1 and the real cantilever CLn have the same natural frequency.
  • the virtual cantilever CL1 As a method of matching the natural frequencies, the virtual cantilever CL1, the sensitivity improving cantilevers CL2 to CLn-1 and the existing cantilever CLn are made of the same material and shape, and have the same spring rigidity and mass. And a method of making the ratio of spring rigidity and mass match.
  • the cantilevers CL2 to CLn-1 for improving sensitivity are formed in the same manner as the cantilevers CL1 and CLn. That is, in the state of a cantilever having one end fixed to the support member 1C and the other end being a free end, the cantilevers are juxtaposed side by side, and the root portions of the adjacent cantilevers on the fixed end side are formed on the support member 1C.
  • the virtual cantilever CL1, the cantilevers CL2 to CLn-1 for improving the sensitivity, and the existing cantilever CLn are coupled and vibrated by being connected by the overhang portion 1D.
  • the virtual cantilevers CL2 to CLn-1 for improving the sensitivity are realized as virtual models on the arithmetic processing device, like the virtual cantilever CL1.
  • the natural frequencies of the sensitivity-improving virtual cantilevers CL2 to CLn-1 are the natural frequencies of the virtual cantilever CL1 and the real cantilever CLn. It need not be the same as the frequency.
  • FIG. 10 is a diagram showing an example of an equivalent model (coupling model) of the dynamic system of the vibrating section 1.
  • the virtual cantilever CL1 includes a first spring K1 having a spring constant k1 whose one end is supported by the support member 1C and a first mass K1 which is supported at the other end of the first spring K1.
  • the model is provided with the object M1.
  • the existing cantilever CLn includes an n-th spring Kn having a spring constant kn, one end of which is supported by the support member 1C, and an n-th spring Kn, as shown by a cantilever in a frame of a dashed-dotted line at the right end of FIG.
  • n-th body Mn having a mass mn supported at the other end is provided, and the n-th spring Kn is a model in which the spring constant kn is added with the spring rigidity ⁇ k according to the atomic force of the measurement target. .
  • the virtual cantilever CLi (2 ⁇ i ⁇ n ⁇ 1) for improving sensitivity has an i-th spring Ki having a spring constant ki whose one end is supported by the support member 1C and a mass supported by the other end of the i-th spring Ki. It becomes a model including the i-th object Mi of mi. Further, in the coupled model shown in FIG. 10, the first object M1 and the second object M2 are connected by the spring Kc1 having the spring constant kc, and similarly, the adjacent objects are connected by the spring having the spring constant kc, and the real objects exist.
  • a measuring device having such a vibrating portion 1 when performing measurement, of the cantilevers supported by the supporting member 1C, an existing atomic force of the cantilever CLn, for example, an atomic force of the measurement target is applied to the supporting member 1C.
  • a vibration input is given to the cantilever CL1, which is a virtual cantilever that is a cantilever located at the end of the supported cantilevers.
  • Non-Patent Document 2 when the rigidity decreases ( ⁇ k ⁇ 0), the amplitude ratio of the secondary mode is measured. On the contrary, when the rigidity increases ( ⁇ k> 0), the amplitude ratio of the primary mode is measured.
  • the case where the rigidity decreases in the coupled model shown in FIG. 9 will be described according to Non-Patent Document 1.
  • equation (20) can be expressed by the following equation (21).
  • Condition 1 Increase the number of cantilevers n as much as possible. That is, a large number of cantilevers for improving sensitivity are provided.
  • Condition 2 ⁇ n mn / m1 is made as small as possible.
  • Condition 3 The masses m2 to mn-1 of the sensitivity improving cantilevers CL2 to CLn-1 are made larger than the mass m1 of the cantilever CL1.
  • Condition 4 The spring rigidity of each of the cantilevers CL2 to CLn-1, that is, the spring constant k2 to kn-1 is set to be larger than the spring rigidity of each of the cantilevers CL1 or the spring constant of k1.
  • the virtual cantilever CL1 and the sensitivity improving cantilevers CL2 to CLn-1 are realized as virtual cantilevers instead of existing cantilevers. is doing. Therefore, even if it is difficult to actually manufacture a plurality of cantilevers, in the measuring apparatus 100 according to the present embodiment, a virtual cantilever CL1 that is another cantilever other than the existing cantilever CLn and a cantilever for sensitivity improvement. Since CL2 to CLn-1 are virtually simulated, by manufacturing only the existing cantilevers CLn, it is possible to easily manufacture a high-sensitivity cantilever coupled with many cantilevers for improving sensitivity. it can.
  • Non-Patent Document 1 and Non-Patent Document 2 since it is assumed that a large number of existing cantilevers are coupled, it is technically difficult to manufacture, whereas in the present embodiment, the existing cantilevers are present. Since only one is required, it is technically easy to manufacture.
  • the virtual cantilever CL1 and a large number of cantilevers CL2 to CLn-1 for sensitivity improvement are created "simulated", but in the present invention, existing cantilevers exist, and further, the coupled
  • an arithmetic processing unit capable of executing the above with an existing cantilever, a performance superior to that of the known technology is realized, and therefore, it does not correspond to an abstract concept.
  • the sensitivity improving cantilevers CL2 to CLn-1 are realized as virtual cantilevers instead of existing cantilevers. Therefore, it is easy to increase the number of simulated cantilevers for improving sensitivity, and the sensitivity can be further improved as the number of coupled cantilevers increases.
  • the number of cantilevers for improving sensitivity is limited by physical size, strength, cost, etc., and thus cannot be increased indefinitely. Since the sensitivity can be easily improved in this way, even physical quantities that could not be measured due to low sensitivity can be measured by improving the sensitivity as described above, and the usability is improved. It can be improved and versatility can be improved.
  • the sensitivity can be easily improved in this way, even a light-weight substance or the like that could not be measured until now can be easily measured.
  • m1 is the mass of the first object M1 that the virtual cantilever CL1 has, so in the present embodiment, the sensitivity can be improved as the mass m1 is increased virtually, and the sensitivity can be easily improved. be able to.
  • the techniques described in Non-Patent Document 1 and Non-Patent Document 2 have a limit because increasing the mass m1 is limited by physical size, strength, cost, and the like.
  • the spring rigidity of the sensitivity improving cantilevers CL2 to CLn-1 is It is preferably higher than the spring rigidity of the cantilevers CL1 and CLn.
  • the sensitivity improving cantilevers CL2 to CLn-1 are not necessarily required to be provided that the sensitivity improving cantilevers CL2 to CLn-1 have a spring rigidity higher than that of the cantilevers CL1 and CLn.
  • CLn-1 do not have to be the same material and shape, and may have different spring stiffness and mass.
  • Vibration part 1A Cantilever (virtual vibration body) 1B cantilever (actual vibrator) 1C Supporting member 1D Overhang part 11 Actual vibrating body part 12 Arithmetic processing device 13 Driving circuit 14 Display device 21 Supporting member 21a Holding part 21b Guide part 22 Actuator 22a Shaft part 22b Supporting part 23 Displacement meter 100 Measuring device 100a Simulation device CL1 Virtual Cantilevers CL2-CLn-1 Cantilevers CLn for improving sensitivity Real-life cantilevers

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Abstract

La présente invention permet de traiter le problème consistant à améliorer la sensibilité d'un dispositif de mesure. Afin de résoudre le problème, l'invention concerne un dispositif de mesure qui détecte une valeur équivalente à la quantité physique d'une cible de mesure par les amplitudes de deux vibrateurs, le dispositif de mesure comprenant : un porte-à-faux réel (k1B) en tant qu'un des deux vibreurs ; un actionneur (22) qui applique une force dans une direction de déplacement prédéfinie au porte-à-faux (1B) ; une unité de détection de déplacement de vibration qui comprend un dispositif de mesure de déplacement (23) du porte-à-faux (1B) ; et un dispositif de traitement d'opération qui simule un porte-à-faux (1A) virtuellement lié au porte-à-faux (1B) de façon à pouvoir s'accoupler avec le porte-à-faux (1B) comme l'autre des deux vibreurs et qui exécute un traitement de commande couplé afin d'entraîner et de commander l'actionneur (22) en fonction du porte-à-faux (1A) et du déplacement de vibration du porte-à-faux (1B) détecté par l'unité de détection de déplacement de vibration.
PCT/JP2019/041213 2018-10-19 2019-10-18 Dispositif de mesure, composant de dispositif de mesure et dispositif de traitement d'opération de dispositif de mesure WO2020080544A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003083840A (ja) * 2001-09-17 2003-03-19 Hitachi Ltd 振動試験装置ならびに振動応答評価方法
JP2016065817A (ja) * 2014-09-25 2016-04-28 洋明 津野 超微小質量検出装置
US20180074018A1 (en) * 2015-03-25 2018-03-15 Endress+Hauser Gmbh+Co. Kg Electromagnetic driving/receiving unit for a field device of automation technology

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JP2009133772A (ja) 2007-11-30 2009-06-18 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
JP5419767B2 (ja) 2010-03-24 2014-02-19 オリンパス株式会社 検出センサ、物質検出方法
JP6117180B2 (ja) 2012-03-27 2017-04-19 住友精密工業株式会社 物理量センサ

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Publication number Priority date Publication date Assignee Title
JP2003083840A (ja) * 2001-09-17 2003-03-19 Hitachi Ltd 振動試験装置ならびに振動応答評価方法
JP2016065817A (ja) * 2014-09-25 2016-04-28 洋明 津野 超微小質量検出装置
US20180074018A1 (en) * 2015-03-25 2018-03-15 Endress+Hauser Gmbh+Co. Kg Electromagnetic driving/receiving unit for a field device of automation technology

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Title
CAI, GUIBING ET AL.: "Net-overhang Coupled Microcantilevers for Sensitive Mass Detection", SENSORS 2013 IEEE, 4 November 2013 (2013-11-04), XP032532488, DOI: 10.1109/ICSENS.2013.6688214 *

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