WO2020075567A1 - ノズルおよび気体噴出装置 - Google Patents

ノズルおよび気体噴出装置 Download PDF

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Publication number
WO2020075567A1
WO2020075567A1 PCT/JP2019/038668 JP2019038668W WO2020075567A1 WO 2020075567 A1 WO2020075567 A1 WO 2020075567A1 JP 2019038668 W JP2019038668 W JP 2019038668W WO 2020075567 A1 WO2020075567 A1 WO 2020075567A1
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WIPO (PCT)
Prior art keywords
nozzle
gas
nozzle member
extends
rotating body
Prior art date
Application number
PCT/JP2019/038668
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English (en)
French (fr)
Japanese (ja)
Inventor
小林 正樹
Original Assignee
ピュアトラスト株式会社
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Application filed by ピュアトラスト株式会社 filed Critical ピュアトラスト株式会社
Priority to CN201980066316.1A priority Critical patent/CN113164992A/zh
Priority to JP2020526051A priority patent/JP6749741B6/ja
Publication of WO2020075567A1 publication Critical patent/WO2020075567A1/ja

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/02Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
    • B05B3/04Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements driven by the liquid or other fluent material discharged, e.g. the liquid actuating a motor before passing to the outlet
    • B05B3/06Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements driven by the liquid or other fluent material discharged, e.g. the liquid actuating a motor before passing to the outlet by jet reaction

Definitions

  • the present invention relates to a nozzle for ejecting a gas as an object and a gas ejection device.
  • Objects such as HDD cases, food trays, parts trays, parts return boxes, and precision industrial parts are washed with a water-based cleaning solution, rinsed with pure water, and then dried. Drying needs to be done in a short time in order to streamline the production process. In order to dry these, air is generally blown to the cleaning object by a spray nozzle.
  • chips and cutting oil after processing mechanical parts are blown off with an air gun to remove them.
  • Patent Document 1 an air screw nozzle described in Japanese Patent No. 4783467 (Patent Document 1) can be cited.
  • the air screw nozzle described in Patent Document 1 is configured to include an air supply pipe for introducing compressed air, an air reservoir arranged at the tip of the air supply pipe, and a nozzle connected to the air reservoir.
  • the tip of the nozzle has a structure protruding from the surface of the air reservoir toward the object.
  • the present invention has been made in view of the problems of the prior art, further improves the hydrodynamic characteristics of the air ejection surface of the nozzle, and further generates a high-speed, high-pressure gas flow, and ejects it toward an object. It is an object of the present invention to provide a nozzle and a gas ejection device that operate.
  • a nozzle for injecting an air flow while rotating comprising: A rotating body that is rotatably held and that includes a fluid flow path that receives gas; A nozzle member that extends from the rotating body without being blocked, and jets the gas from an orifice; A protective cover accommodating the rotating body and the nozzle member; and a bottom plate defining a space accommodating the orifice inside the protective cover, The nozzle member is joined to the rotating body, and a nozzle is provided that extends from the joint portion with the rotating body to the orifice while holding the inner diameter of the nozzle member.
  • the nozzle member may extend between the fluid flow path and the orifice, and may extend obliquely with respect to the bottom plate in the circumferential direction and the vertical direction.
  • the nozzle member can extend up to the bottom plate at an angle of 5 to 60 ° with respect to the vertical.
  • the ratio of the cross-sectional area S of the lowermost part of the fluid flow path to the cross-sectional area S 1 of the nozzle member, S / S 1 is 2 to 100.
  • the upper end of the fluid flow path may extend to a position lower than the upper end of the nozzle to provide clearance.
  • the fluid channel can be formed so that the diameter thereof extends to reach the nozzle member.
  • a gas ejection device in which a plurality of nozzles are arranged close to each other, The nozzles are arranged close to each other so as not to interfere with each other's rotation, and all rotate in the same direction;
  • the nozzle is A rotating body that is rotatably held and that includes a fluid flow path that receives gas;
  • a nozzle member that extends from the rotating body without being blocked, and jets the gas from an orifice;
  • a protective cover accommodating the rotating body and the nozzle member; and a bottom plate defining a space accommodating the orifice inside the protective cover, With The nozzle member is joined to the rotating body, and extends from the joint portion with the rotating body while holding the inner diameter of the nozzle member and extending to the orifice by bending.
  • the bent tube may extend between the fluid flow path and the orifice, and may extend at an angle to the bottom plate in the circumferential direction and the vertical direction.
  • the nozzle member may extend to the bottom plate at an angle of 5 to 60 ° with respect to the vertical.
  • the ratio of the cross-sectional area S of the lowermost part of the fluid flow path to the cross-sectional area S 1 of the nozzle member, S / S 1 may be 2 to 100.
  • the upper end of the fluid flow path may extend to a position lower than the upper end of the nozzle to provide clearance.
  • the fluid channel may be formed so that the diameter thereof extends to reach the nozzle member.
  • the bottom view of the gas ejection apparatus 100 which mounts the nozzle of this invention.
  • the top view which looked at the gas ejection apparatus 100 of a preferable embodiment from the direction of arrow C of FIG.
  • the schematic diagram which showed arrangement
  • FIG. 1 shows a bottom view of a gas ejection device 100 equipped with the nozzle of the present invention.
  • the gas ejection device 100 is configured to include a casing 110 and a nozzle 120 arranged inside the casing 110 in a plan view.
  • the housing 110 can be fixed to, for example, a frame (not shown) of a cleaning / drying system via a bolt hole 111 formed in the housing 110.
  • the bottom surface of the nozzle 120 is formed of a flat bottom plate 131, and the bottom plate 131 is formed with orifices 121a and 121 for ejecting air.
  • An aperture 121c having a diameter larger than that of the orifices 121a and 121b is formed in the bottom plate 131 in the portions of the orifices 121a and 121b, and the orifices 121a and 121b are positioned at the positions of the apertures 121c.
  • the bottom plate 131 is fixed to the inside of the housing 110 in a mode that does not form a protrusion on the object side.
  • the nozzle 120 includes a rotating body 126 and a protective cover 130 that protects the rotating body 126 from the outside.
  • the protective cover 130 is a member that rotates at high speed such as the rotating body 126 and the orifices 121a and 121b. Shield from the outside.
  • FIG. 1 schematically shows the position of the aperture 121c with respect to the orifices 121a and 121b when viewed from the bottom surface.
  • the orifices 121a and 121b do not protrude from the bottom surface of the nozzle 120 or are positioned at the lowest level of the nozzle 120.
  • Detailed configurations of the protective cover 130, the bottom plate 131, the rotating body 126, and the orifices 121a and 121b that configure the nozzle 120 will be described later.
  • the inside of the casing 110 constitutes a gas reservoir that temporarily accumulates gas supplied from a compressor or blower (not shown) to equalize the pressure and then supplies the gas to the plurality of nozzles 120 attached to the casing 110. To do.
  • air, argon, nitrogen or other gas pressurized by the compressor or blown by the blower is jetted toward the object, and in the embodiment shown in FIG. Direction, the gas is ejected slightly toward the protective cover 130 side than the tangential direction.
  • the nozzle 120 rotates in the direction of arrow B, which is opposite to the direction of arrow A, in response to the ejection pressure of the gas.
  • the rotation of the nozzle 120 moves the positions of the orifices 121a and 121b in the circumferential direction, and jets while rotating the nozzle 120 with respect to an object arranged on the downstream side of the nozzle 120.
  • the pressure of the gas supplied to 120 in this embodiment can be 0.2 to 1.5 MPa, and in the preferred embodiment, it is in the range of 0.3 to 1 MPa. Further, at that time, the rotational torque generated with respect to the nozzle 120 can be set to 3 kg ⁇ cm to 20 kg ⁇ cm. In order to reduce the operating electric power of the gas ejection device 100 and achieve the purpose of low carbon consumption, it is preferable to use a blower rather than a compressor that consumes more electric power.
  • two orifices 121a and 121b are formed per nozzle 120, but the number is not particularly limited as long as the required gas velocity can be obtained. Further, the orifices 121 a and 121 b are arranged symmetrically with respect to the center of the nozzle 120, and generate a rotational torque without deviation with respect to the nozzle 120.
  • the orifices 21a and 121b are configured so as to be deflected radially outward rather than the tangential direction of the positions where the orifices 121a and 121b are arranged, and eject the gas. Form an efficient swirl flow in the side space.
  • the orifices 121a and 121b may be arranged in a tangential direction, or may be oriented toward the center side of the tangent line.
  • An air supply unit (not shown) and a mounting unit (not shown) configured to rotatably hold the nozzle 120 are arranged on the back side of the nozzle 120 in the plane of the drawing, and gas is supplied to the nozzle 120. Along with the supply, the nozzle 120 is rotatably held. Further, in the preferred embodiment shown in FIG. 1, the nozzles 121 are arranged so that the adjacent nozzles 120 rotate in the same direction. Therefore, the relative rotation speed between the two nozzles 120 is twice the rotation speed of the nozzles 120, and the gas that enters the gap between the adjacent nozzles 120 due to viscous resistance accompanying the rotation of the nozzles 120 facing each other. The invasion is blocked, and as a result, another air flow toward the object can be formed, and the cleaning efficiency can be further improved.
  • FIG. 2 is a plan view of the gas ejection device 100 of the preferred embodiment as seen from the direction of arrow C in FIG.
  • the nozzle 120 is arranged so as to rotate from the right-hand side of the drawing to the left-hand side.
  • the gas is injected in the opposite direction.
  • the gas ejection device 100 is arranged in the housing 110 so that the two nozzles 120 do not interfere with each other's rotation.
  • An air supply member 112 is provided above the housing 110, and gas from a compressor (not shown) or a blower for the nozzle 120 is directed to the orifices 121a and 121b of the nozzle 120, as indicated by arrow D. To supply.
  • the airflow is directed to the left orifice 121a, but in the preferred embodiment, gas is evenly supplied to both the left and right orifices 121a and 121b.
  • the orifices 121a and 12ab are positioned at the lowest level of the nozzle 120 in the preferred embodiment without the tip of the orifices 121a and 12ab protruding from the lowest part of the nozzle 120. Further, since the orifices 121a and 121b themselves are arranged inside the lowest portion, there is no structure that obstructs the air flow on the object side of the nozzle 120, and an obstructing flow is not formed in the space up to the object, which improves efficiency. It is possible to supply a high-velocity gas flow to the object 200.
  • the left-hand side orifice 121a in FIG. 2 is formed by inclining the nozzle member 127 so that the orifice 121a does not face in the rotational direction and the upstream side in the rotational direction of the orifice 121a becomes longer.
  • the cutting angle of the nozzle member 127 is such that the downstream side in the rotational direction of the cutting surface is flush with the upstream side in the rotational direction on the horizontal plane, or the cutting surface of the nozzle member 127 is inclined with respect to the horizontal plane and the upstream side in the rotational direction is There is no particular limitation as long as it extends close to the bottom and is arranged such that the downstream side in the rotational direction is farther from the bottom.
  • the space formed between the bottom plate 131 and the protective cover 130 that protects the movable portion of the nozzle 120 including the bottom plate from the outside functions like a nozzle cone for the injected gas.
  • the gas is provided to form a swirling flow that descends to the object 200 while swirling, and the gas is jetted to the object 200 more efficiently.
  • the object 200 is made to flow through the line so as to straddle the nozzle 120, and the pair of nozzles 120 arranged in a direction intersecting the flow direction of the line injects gas toward the object 200.
  • FIG. 3 is a schematic diagram showing the arrangement of the nozzle 120 in the preferred embodiment with respect to the housing 110, as seen from the direction of arrow E in FIG.
  • the nozzle 120 is held by an appropriate frame or the like of the gas ejection device 100, and is held so that the nozzle 120 rotates at high speed.
  • the orifices 121a and 121b are “cut off” with respect to the central axis, and the airflow ejected from the airflow hitting from the upstream side in the rotation direction through the orifices 121a and 121b is near the orifices 121a and 121b. It is arranged so as not to be disturbed.
  • the gas flows ejected from the orifices 121a and 121b collide with the object 200 at an angle of ⁇ 30 ° and blow off adhered substances on the object 200, such as dust, cutting dust, water droplets and other foreign matter, Surface cleaning / drying and other treatments are possible.
  • the inclination angles of the orifices 121a and 121b with respect to the vertical direction are merely examples, and can be arbitrarily set within a range of 5 ° to 60 ° with respect to the vertical direction.
  • FIG. 4 is a diagram showing a detailed configuration of the nozzle 120 of this embodiment.
  • FIG. 4A is a partial cross-sectional view showing the internal side surface configuration of the nozzle 120.
  • FIG. 4B is a bottom view of the nozzle 120, and also shows a planar configuration of the lower portion of the nozzle 120.
  • the nozzle 120 includes a fixing portion 122, an air feeding portion 123, a rotating body 120, and a protective cover 130.
  • a rotating body 126 is rotatably held inside the air supply unit 123 via a bearing 124.
  • the inner wall of the rotating body 126 defines a fluid flow path L through which the jetted gas passes.
  • Bearings 124 can be thrust bearings, but any other configuration of bearings can be utilized.
  • the fixing portion 122 has a function of fixing the nozzle 120 to the frame of the gas ejection device 100, and has an aperture 122a for supplying gas to the fluid flow path L at the center.
  • a slight clearance 122a is formed between the upper end of the fixed portion 122 and the upper end of the rotating body 126 to prevent the rotation of the rotating body 126 from being obstructed by pressure from above. Further, the clearance 122a allows the rotating body 126 to be slightly displaced upward due to the gas pressure ejected from the orifices 121a and 121b, thereby reducing the load on the bearing and facilitating high-speed rotation. .
  • the air supply unit 123 provides a bearing holding space, and the bearings 124 are dually arranged between the outer side wall 125 of the rotating body 126 and the inner side wall 125 a of the air supply unit 123, and the rotating body 126 is provided. It enables high speed rotation.
  • the rotator 126 is rotatably arranged inside the air supply unit 123, and gas is introduced into the fluid flow path L formed in the center of the rotator 126. Orifices 121a and 121b are formed below the rotator 126, and the gas supplied through the fluid flow path L of the rotator 126 is ejected toward the object.
  • the orifice 121b is shown as a cross-section in the rotation direction (from the right hand side to the left hand side of the paper) as a cross section.
  • the front side of the paper extends near the bottom plate 131, and the back side of the paper is separated from the bottom plate 131.
  • the end in position is shown in detail.
  • the inclination formed by the orifices 121a and 121b with respect to the horizontal plane is shaded by the orifices 121a and 121b with respect to the rotation direction of the nozzle 120, and the air flow accompanying the movement of the orifices 121a and 121b is ejected from the orifices 121a and 121b.
  • angle is such that the generated air flow does not interfere with the air flow accompanying rotation.
  • this angle is ⁇
  • a range of ⁇ to (180- ⁇ ) ° in the clockwise direction with respect to the horizontal plane is set. can do.
  • the fluid flow path L is formed so as to gradually increase in diameter from the upper part of the rotating body 126 toward the rear of the orifices 121a and 121b, and is arranged so as not to prevent an increase in the dynamic pressure of gas.
  • a nozzle member 127 extends from the bottom of the rotating body 126 toward the bottom plate 131, and the orifices 121 a and 121 b are exposed at the tip of the nozzle member 127 from the bottom plate 131 at an angle ⁇ .
  • the nozzle member 127 is formed of a rigid material such as a metal pipe, and the other end of the orifice 121a of the nozzle member 127 rotates in the fluid flow path L near the bottom of the rotating body 126 without blocking the diameter of the flow path. It is directly bonded to the body 126 by a method such as welding, brazing or soldering.
  • the nozzle member 127 Since the nozzle member 127 is directly joined to the rotating body 126 without using a joint, the gas is conveyed to the orifices 121a and 121b as it is while maintaining the inner diameter of the nozzle member 127 with the pressure chamber as the minimum. It is possible. Further, by directly joining the nozzle member 127 to the rotating body 126, it is possible to reduce the size of the nozzle 120, enable high-speed rotation, and improve the change of the injection angle ⁇ and the durability due to long-term high-speed rotation. it can.
  • the nozzle member 127 is displaced in the height direction and the radial direction from the horizontal direction to the vertical direction between the fluid flow path of the rotating body 126 and the orifices 121a and 121b, and is displaced toward the bottom plate 131 by 30 with respect to the vertical direction. It extends obliquely and extends from the bottom plate 131 to a position where the orifices 121a 121b project.
  • the orifices 121a and 121b cut the nozzle member 127 with an inclination such that the upstream side in the rotational direction of the cutting plane with respect to the rotational direction of the nozzle 120 extends downward than the downstream side.
  • the so-called nozzle member 127 is formed into a "cut-out" shape with respect to the central axis of the nozzle member 127 so that the orifices 121a and 12ab are not exposed in the rotational direction.
  • the orifices 121a and 121b are arranged so as to be shielded from the air flow accompanying the rotation of the nozzle 120 by the wall on the upstream side in the rotational direction of the nozzle 120.
  • the angle of the cutting is not particularly limited as long as the wall on the upstream side in the rotation direction of the nozzle member 127 can block the orifices 121a and 121b, but in a preferred embodiment, for example, 20 ° to the horizontal plane.
  • the angle can be in the range of 160 °. Further, the angle is defined as a direction capable of blocking the orifices 121a and 121b.
  • the orifices 121 a and 121 b are arranged at an angle of 30 ° with respect to the bottom plate 131 of the nozzle 120, and the orifices 121 a and 121 b are cut perpendicularly to the central axis of the nozzle member 127.
  • the ends of the orifices 121a and 121b on the downstream side in the rotation direction are arranged at 30 ° above the horizontal surface with respect to the ends on the upstream side in the rotation direction.
  • the shape and angle can be changed in consideration of the aerodynamic characteristics, and the angle ⁇ is in the range of 5 ° to 60 °, more preferably 20 ° to 40 °.
  • the orifices 121a and 121b extend beyond the bottom surface of the aperture 121c (not shown) shown in FIG. 1 to the lowest level of the housing 110, and enter the space between the housing 110 and the bottom plate 131. It is housed including the tip.
  • a stud 128 for fixing the rotating plate 132 is formed on the lower portion of the rotating body 126, and the bottom plate 131 can be fixed by screws 129 through the pedestal portion.
  • the bottom plate 131 provides a space between the bottom portion of the housing 110 and the bottom plate 131 to provide a function of a nozzle cone, and the nozzle 120 serves as an object. It is possible to efficiently inject a high-pressure, high-speed gas flow to 200.
  • FIG. 4B is a diagram showing a bottom surface structure of the nozzle 120 of the preferred embodiment together with its internal arrangement.
  • the nozzle 120 is housed inside the protective cover 130, a nozzle member 127 extending radially symmetrically about the rotating body 126 in the center thereof is arranged, and orifices 121 a and 121 b are formed at one end of the nozzle member 127. , The other end communicates with the fluid flow path L of the rotating body 126.
  • an aperture 121c (not shown) is formed at a position where the orifices 121a and 121b of the bottom plate 131 are arranged so as not to interfere with the air ejection from the orifices 121a and 121b, and the air ejection to the object 200 is prevented.
  • the nozzle member 127 is connected to the rotating body 126 by welding W so that they are integrated with each other to prevent performance deterioration due to loosening of a joint such as a joint due to high-speed rotation for a long period of time. It is possible to prevent the decrease in the amount of gas flowing into the nozzle member 127 due to the introduction of the structure, prevent the pressure loss before and after the joint, and transport the gas to the orifices 121a and 121b.
  • the nozzle 120 of the preferred embodiment is directly attached to the nozzle member 127 without a structure in which the gas supplied to the fluid passage L formed on the inner wall of the rotating body 126 is blocked. Supplied. Therefore, the gas supplied to the fluid flow path L as a steady flow at V / s is a fluid continuity equation, where S is the cross-sectional area of the lowermost part of the fluid flow path L and S 1 is the cross-sectional area of the nozzle member 127.
  • S the cross-sectional area of the lowermost part of the fluid flow path L
  • S 1 is the cross-sectional area of the nozzle member 127.
  • the nozzle member 127 is formed with the minimum curvature so as to minimize the pressure loss, the efficiency is minimized from the fluid flow path L to the orifices 121a and 121b while minimizing the pressure loss and the air supply resistance. This makes it possible to speed up the air flow.
  • the area ratio of the innermost diameter of the lowermost portion of the fluid flow path L to the inner diameter of the nozzle member 127 depends on the viscous resistance of the ejected gas, but S / S 1 is 2 to 100, Considering the pressure loss of the nozzle member 127 and the flow velocity of the gas ejected from the orifices 121a and 121b, the range may be 5 to 60.
  • the length of the nozzle member 127 is about 0.5 to 3 times the length of the fluid flow path L.
  • the bends are angled horizontally and vertically from the fluid flow path L with respect to both the height and radial directions.
  • FIG. 5 is a diagram showing a second embodiment of the gas ejection device 140 of the present embodiment.
  • the gas ejection device 140 of the second embodiment has four nozzles 120 mounted on a housing 150 and can be fixed to a frame (not shown) or the like of a cleaning / drying system by a bolt hole 161. Further, each of the nozzles 120 is configured to rotate in the direction of arrow B. As a result, in a region where the nozzle 120 of the gas ejection device 140 is adjacent to the nozzle 120, as the nozzle 120 rotates, an air flow toward the object is generated near the center as can be understood from FIG. ⁇ Drying becomes possible.
  • FIG. 6 is a diagram showing a gas ejection device 160 according to a third embodiment of this embodiment.
  • the gas jetting device 160 of the embodiment of FIG. 3 is supplied with compressed air from a compressor, has two nozzles 120 mounted on a casing 170, and has a bolt hole 171 for a frame (not shown) of a cleaning / drying system or the like. Can be fixed. Further, the nozzle 120 has a diameter of 75 mm and is configured to facilitate high speed operation. Each of the nozzles 120 is configured to rotate in the direction of arrow B.
  • the two nozzles 120 are arranged so that the ejection ranges of the nozzles 120 overlap with the center line in the traveling direction.
  • FIG. 6 including the region where the nozzle 120 of the gas ejection device 150 is adjacent, an air flow toward the object is generated more efficiently near the center part, and the cleaning / drying efficiency is improved. It becomes possible.
  • the object 200 is processed by receiving the gas injection from the nozzles 120 in two pairs between the nozzles 120 arranged to intersect with the flow direction.
  • the space formed by the bottom plate 131 and the protective cover 130 in the lower part of the housing 110 functions as a nozzle cone for efficiently directing the gas ejected from the orifices 121a and 121b toward the object 200. Further, it is possible to make the gas jetted from the orifices 121a and 121b at an angle toward the object 200 as a swirling flow, and efficiently jet the gas toward the object 200.
  • an air knife nozzle can be added to the bottom surface according to a specific application, or a nozzle having another shape can be added.
  • a nozzle and a gas ejection device that further improve the hydrodynamic characteristics of the air ejection surface of the nozzle, generate a high-speed and high-pressure gas flow, and eject the gas toward an object.
  • Gas ejection device 110 Housing 111: Bolt hole 112: Air supply member 120: Nozzle 121a, b: Orifice 121c: Aperture 122: Fixed part 123: Air supply part 124: Bearing 126: Rotating body 127: Nozzle member 128 : Stud 129: Screw 130: Protective cover 131: Bottom plate L: Fluid flow path

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  • Nozzles (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
PCT/JP2019/038668 2018-10-08 2019-10-01 ノズルおよび気体噴出装置 WO2020075567A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201980066316.1A CN113164992A (zh) 2018-10-08 2019-10-01 喷嘴和气体喷出装置
JP2020526051A JP6749741B6 (ja) 2018-10-08 2019-10-01 気体噴出装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-190538 2018-10-08
JP2018190538 2018-10-08

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WO2020075567A1 true WO2020075567A1 (ja) 2020-04-16

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JP (3) JP6749741B6 (enrdf_load_stackoverflow)
CN (1) CN113164992A (enrdf_load_stackoverflow)
WO (1) WO2020075567A1 (enrdf_load_stackoverflow)

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WO2022181666A1 (ja) * 2021-02-26 2022-09-01 イースタン技研株式会社 エアノズル

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