WO2020045846A1 - Magnetic levitation transfer device - Google Patents

Magnetic levitation transfer device Download PDF

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Publication number
WO2020045846A1
WO2020045846A1 PCT/KR2019/009793 KR2019009793W WO2020045846A1 WO 2020045846 A1 WO2020045846 A1 WO 2020045846A1 KR 2019009793 W KR2019009793 W KR 2019009793W WO 2020045846 A1 WO2020045846 A1 WO 2020045846A1
Authority
WO
WIPO (PCT)
Prior art keywords
tray
centering
permanent magnets
rail
unit
Prior art date
Application number
PCT/KR2019/009793
Other languages
French (fr)
Korean (ko)
Inventor
김영일
조윤호
정승교
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to KR1020217009558A priority Critical patent/KR102609214B1/en
Publication of WO2020045846A1 publication Critical patent/WO2020045846A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0258—Trays, totes or bins

Definitions

  • the present invention relates to a magnetic levitation transfer device.
  • LCDs liquid crystal display devices
  • OLEDs organic light emitting diodes
  • the size of the display device is increasing in size, and as the display device becomes larger in size, more dust is generated during the manufacturing process, and therefore, it is important to suppress dust that may occur in the manufacturing chamber.
  • Korean Patent Application Publication No. 2017-110065 (filed Sep. 17, 2015) includes a tray on which a substrate is seated, a magnetic transfer unit provided below the tray to magnetically float and transfer the tray by magnetic force, and a tray that is not in contact with the tray to transfer the tray.
  • a substrate transfer apparatus including a guide unit for guiding a guide and a gap maintaining means provided in at least one region between the magnetic transfer unit and the guide unit.
  • the magnetic levitation unit since the magnetic levitation unit is operated at a predetermined interval away from the driving device, the accumulated charges during the process cannot escape, and these charges cause static electricity in the trays and cause dust on the trays and substrates. Can adsorb and contaminate the substrate.
  • the tray since the magnetically levitated magnet located between the tray and the magnetic conveyance unit causes only the central portion of the lower side of the tray to magnetically float, the tray has an unstable structure in which the tray can be twisted left and right. Due to this, the tray periodically contacts the gap maintaining means (usually using a roller) during driving, and dust may be generated by the contact, or damage of the gap maintaining means may occur due to an impact upon contact.
  • the gap maintaining means usually using a roller
  • the permanent magnets installed in the magnetically levitated unit and the magnetic conveyance unit may be exposed to a high temperature environment. Due to the characteristics of the device using only the permanent magnets, the potato (magnet loosening) phenomenon occurs due to the heat around the periphery. As a result, operational reliability may be degraded.
  • the tray when an external force is applied, the tray may be displaced upwards, which may lower operating reliability.
  • Korean Patent No. 707390 (filed Dec. 19, 2005) includes a carrier fixing a substrate; A lower transfer part configured to horizontally move the carrier in a magnetically floating state; And an upper transfer part that maintains an upper portion of the carrier in a non-contact state.
  • a lower portion of the carrier is provided with a permanent magnet, and the lower transfer part is controlled to have the same or opposite polarity as that of the permanent magnet.
  • a substrate transfer apparatus provided with an electromagnet.
  • the tray when the power is cut off, the tray may move in the direction of gravity in a magnetically floating state, which may cause damage due to a collision between components, or lower operating reliability.
  • the present invention has been made to solve the above problems of the prior art, and an object thereof is to provide a magnetic levitation transfer device that can suppress the generation of static electricity in the tray.
  • Another object of the present invention is to provide a transfer apparatus of a magnetic levitation method that can prevent the generation and scattering of dust.
  • Another object of the present invention is to provide a magnetic levitation transfer apparatus that can prevent contamination while improving the potato phenomenon of the permanent magnet.
  • Another object of the present invention is to provide a transfer apparatus of a magnetic levitation method that can prevent the separation of the tray.
  • Another object of the present invention is to provide a conveyance apparatus of a magnetic levitation method of simple structure and installation.
  • Another object of the present invention is to provide a magnetic levitation transfer apparatus capable of operating a brake even if the power is cut off during transportation.
  • Magnetic levitation transfer apparatus is a substrate is seated, the tray provided with a guide groove on the lower surface; A rail base provided on an upper surface of the rail accommodated in the guide groove of the tray; A magnetic levitation unit provided between the tray and the rail base or the rail to lift the tray from the rail base by magnetic force; A magnetic conveying unit provided between the tray and the rail and transferring the tray along the rail by a magnetic force; A centering unit provided between the tray and the rail and maintaining the tray with a predetermined distance from the rail by a magnetic force; And an antistatic unit disposed adjacent to the tray and discharging electrons charged in the tray.
  • the magnetic levitation unit is long along the moving direction of the tray on the upper surface of the rail base so as to face the pair of first floating permanent magnets provided on both sides of the lower side of the tray and the first floating permanent magnets. It includes a pair of second floating permanent magnets provided, the first, second floating permanent magnets may be configured to have the same polarity.
  • the electronic device further includes at least two second floating permanent magnets, and the first and second centering permanent magnets have the same polarity.
  • the magnetic conveying unit is provided to face the inner side of the guide groove of the tray, and is located between the rack magnets and a pair of rack magnets in which permanent magnets of different polarities are alternately arranged, and is long in the center of the rail.
  • the rotary shaft may include a plurality of pinion magnets arranged at regular intervals along the rotation shaft, alternately arranged with permanent magnets having different polarities, and a driving motor for rotating the rotation shaft.
  • the centering unit may include a pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray and a pair of second centering permanent parts provided on both sides of the rail to face the first centering magnets.
  • the magnet and the first and second centering permanent magnets may be configured to have the same polarity.
  • the centering unit may include at least two or more third centering permanent magnets provided at predetermined intervals on the upper surface of the guide groove of the tray, and at least one of the three centering permanent magnets disposed on the upper surface of the rail.
  • the fourth centering magnet is further included, and the third and fourth centering permanent magnets may be configured to have the same polarity.
  • the centering unit may include a pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray and a pair of second centering permanent parts provided on both sides of the rail to face the first centering magnets.
  • the magnet and the first and second centering permanent magnets may be configured to have different polarities.
  • the centering unit further includes a pair of third centering permanent magnets provided below the first centering permanent magnets so as to be adjacent to the second centering permanent magnets, and the third centering permanent magnet is the second centering ring. It may be configured to have the same polarity as the permanent magnet.
  • the centering unit further includes a fourth centering permanent magnet provided on the upper surface of the guide groove of the tray and a fifth centering permanent magnet provided on the upper surface of the rail so as to face the fourth centering permanent magnet.
  • the 4,5 centering permanent magnet may be configured to have different polarities.
  • the fifth centering permanent magnet may be configured as a yoke magnet.
  • the centering unit may include at least two or more fourth centering permanent magnets provided at a predetermined interval on an upper surface of the guide groove of the tray, and at least one provided on an upper surface of the rail to be positioned between the fourth centering permanent magnets.
  • the fifth centering magnet is further included, and the fourth and fifth centering permanent magnets may be configured to have the same polarity.
  • the antistatic part may be provided on at least one side of both sides of the rail and may be formed of a metal member which may be in contact with the tray.
  • the antistatic part may be configured in the form of a roller for guiding the tray in a conveying direction.
  • the antistatic part may be formed of a metal member provided on an upper surface of the rail base and installed within a predetermined distance from the tray.
  • the antistatic part may be configured in the form of a wire arranged in a long direction along the conveying direction of the tray.
  • the present invention may further include a pair of separation prevention rollers provided at both sides of the rail and provided at predetermined intervals from both sides of the guide groove of the tray.
  • the separation preventing rollers may be installed adjacent to the magnetic levitation unit.
  • the present invention may further include a chamber having a hole on the upper surface of which the substrate seated on the tray is exposed, and shielding the tray, the magnetic levitating unit, the magnetic conveying unit, and the centering unit on the rail base.
  • the present invention may further include a pair of separation prevention rollers provided at both sides of the upper surface of the inside of the chamber and provided at predetermined intervals from the tray.
  • the magnetically levitated conveying apparatus includes an antistatic part in contact or non-contact with the tray, thereby suppressing the generation of static electricity in the tray, preventing dust from adsorbing to the tray and the substrate, and preventing contamination of the substrate. It can prevent.
  • the present invention by improving the phenomenon in which the permanent magnet is arranged to the left and right sides of the lower side of the tray to be twisted from side to side, it is possible to reduce the phenomenon of dust generated in contact with the interval maintaining means that the tray can be provided separately when running.
  • the chamber is provided on the rail base to surround the magnetic levitation unit, the magnetic transfer unit and the centering unit, it is possible to suppress the flying and diffusion of dust that may occur during the transfer, the substrate placed on the tray This can be prevented from contamination.
  • the present invention can improve the potato phenomenon of the permanent magnets included in the magnetic levitating unit, the magnetic conveying unit and the centering unit by blocking the ambient heat, and can increase the operational reliability of the permanent magnet.
  • the present invention can improve productivity by lowering the cleaning frequency of removing the deposition material from the magnetically levitated unit by preventing the chamber from contamination of the magnetic levitated unit.
  • the present invention by providing a buffer roller on both sides of the rail or the inside of the chamber, the tray and the buffer roller to maintain a non-contact state at regular intervals, but prevents the tray from being separated by the buffer roller when an external force is applied.
  • the operation reliability of the tray can be improved.
  • the present invention is simple in structure and installation because the tray is floated and transported using the permanent magnets included in the magnetically levitated unit and the magnetic conveyance unit, and the time taken for maintenance and repair later can be shortened.
  • the magnetic transfer unit is composed of a rack magnet provided in the tray and the pinion magnet provided in the rail, the magnetic transfer unit can perform a brake function even if the power of the permanent magnet is applied to cut off the power. In addition, this prevents damage to the components and increases operational reliability.
  • FIG. 1 is a perspective view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • FIG. 2 and 3 is a front view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • Figure 4 is a block diagram showing a magnetic transfer unit in the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • Figure 5 is a perspective view of the first embodiment of the antistatic portion applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • Figure 6 is a perspective view of the second embodiment of the antistatic portion applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • FIG. 7 to 10 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • FIG. 11 is a front view showing a magnetic levitation transfer apparatus according to another embodiment of the present invention.
  • FIGS 12 to 15 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to another embodiment of the present invention.
  • FIG. 1 to 3 are a perspective view and a front view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention
  • Figure 4 is a magnetic transfer unit is shown in the magnetic levitation transfer apparatus according to an embodiment of the present invention Configuration diagram.
  • the magnetically levitated conveying apparatus 1 includes a rail base 10, a tray 20, a magnetic levitating unit 30, a magnetic conveying unit 40, and a centering unit. And 50.
  • the rail base 10 is composed of a plate provided with a long rail 11 in the longitudinal direction on the upper surface.
  • the rail 11 may be provided with a space portion (11h) long in the longitudinal direction in order to install the magnetic transfer unit 40 to be described below.
  • the tray 20 is composed of a plate on which the substrate P is placed, and is configured to fix the substrate P in an upright state.
  • the tray 20 is provided with first and second carrier parts 21 and 22 extending on both sides of the lower part, and guide grooves (B) between the tray 20 and the first and second carrier parts 21 and 22. 20h) may be formed, and the guide groove 20h may be guided along the rail 11.
  • the magnetic levitation unit 30 is configured to lift the tray 20 from the rail base 10 using permanent magnets.
  • the magnetic levitation unit 30 includes a pair of first floating permanent magnets 31 and 32 provided on both lower sides of the first and second carrier parts 21 and 22 and the first floating object. It may include a pair of second floating permanent magnets (33, 34) provided on both sides of the upper surface of the rail base 10 so as to face the permanent magnets (31, 32).
  • first and second floating permanent magnets 31 to 34 may be variously changed, but the first and second floating permanent magnets 31 to 34 may float the tray 20. It should be configured to have the same polarity in the positions opposite each other.
  • first and second floating permanent magnets 31 to 34 may be stably floated from the rail base 10 as a pair is provided side by side on both sides.
  • the magnetic transfer unit 40 is configured to transfer the tray 20 along the rail 11 using permanent magnets.
  • the magnetic conveying unit 40 is located between the first and second rack magnets 41 and 42 and the first and second rack magnets 41 and 42 provided on opposite inner surfaces of the carriers. And a plurality of cylindrical pinion magnets 44 and a plurality of cylindrical pinion magnets 44 provided at regular intervals on the rotating shaft 43, the rotary shaft 43 arranged in the space portion of the rail 21 in the longitudinal direction. It may include a drive motor 45.
  • the first rack magnet 41 is composed of a plate-shaped back yoke 41a and a permanent magnet portion 41b in which different polarities are alternately arranged on the back yoke 41a, and a bar-shaped permanent magnet portion 41b. May be arranged in an oblique shape on the surface of the back yoke 41a.
  • the second rack magnet 42 may also be configured in the same manner as the first rack magnet 41.
  • the pinion magnet 44 is cylindrical in shape, and the permanent magnets 44a having different polarities are alternately arranged in diagonal lines.
  • the pinion magnet 44 may be installed to surround the rotation shaft 43, and a plurality of pinion magnets 44 may be provided at predetermined intervals along the rotation shaft 43.
  • the rotating shaft 43 and the pinion magnets 44 are rotated, and the attraction force and the repulsive force are repeatedly repeated between the first and second rack magnets 41 and 42 and the pinion magnets 44.
  • the first and second rack magnets 41 and 42 may move along the arrangement direction of the pinion magnets 44.
  • the centering unit 50 is configured to maintain the tray 20 and the first and second carrier parts 21 and 22 with the rail 11 at a predetermined distance by using a permanent magnet.
  • the centering unit 50 has a pair of first centering rings provided on both sides of the guide groove 20h of the tray 20, that is, on opposite surfaces of the first and second carrier parts 21 and 22. It consists of a permanent magnet (51, 52), a pair of second centering permanent magnets (53, 54) provided on both sides of the rail to face the first centering magnets (51, 52), the first, second center ring
  • the permanent magnets 51 to 54 may be configured to have the same polarity.
  • first centering permanent magnets 51, 52, 51 ′, 52 ′ may be provided on the upper and lower sides of the first and second carrier parts 21 and 22 and four second centering permanent magnets may be provided.
  • Fields 53, 54, 53 ′, 54 ′ may be provided on both sides of the rail 11.
  • the centering unit 50 may include a pair of third centering permanent magnets 55 and 56 provided at predetermined intervals on the upper surface of the guide groove 20h of the tray 20, that is, the lower surface of the tray 20. And a fourth centering permanent magnet 57 provided on the upper surface of the rail 11 to be positioned between the third centering permanent magnets 55 and 56, and the third and fourth centering permanent magnets 55. 57 may be configured to have the same polarity.
  • the tray 20 When the repulsive force is applied between the first and second centering permanent magnets 51 to 54, 51 'to 54', the first and second carrier parts 21 and 22 are spaced in both directions about the rail 11 at predetermined intervals. When the repulsive force is applied between the third and fourth centering permanent magnets 55 to 57, the tray 20 may maintain a predetermined interval in an upward direction about the rail 11.
  • the repulsive force acts between the first and second permanent magnets 31 to 34, and thus the first and second carriers 21 and 22 on which the first permanent magnets 31 and 32 are mounted are formed.
  • the two floating permanent magnets 33 and 34 are lifted from the mounted rail base 10, and the tray 20 also remains lifted from the rail 11.
  • Repulsive force acts between the first and second centering permanent magnets 51 to 54.51 'to 54', and thus the first and second centering permanent magnets 51, 52, 51 'and 52' are mounted.
  • the carriers 21 and 22 maintain a predetermined distance from both sides of the rail 11 on which the second centering permanent magnets 53, 54, 53 ′ and 54 ′ are mounted.
  • the repulsive force acts between the third and fourth centering permanent magnets 55 to 57, so that the tray 20 on which the third centering permanent magnets 55 and 56 are mounted is the fourth centering permanent magnet 57.
  • the tray 20 on which the third centering permanent magnets 55 and 56 are mounted is the fourth centering permanent magnet 57.
  • the fourth centering permanent magnet 57 In addition to being spaced apart from the upper surface of the mounted rail 11 by a predetermined distance to maintain the centering state.
  • the tray 20 may not only be lifted on the rail base 10 by the permanent magnets, but may also remain centered.
  • the rotating shaft 43 and the pinion magnets 44 are rotated, and the attraction and repulsive force are applied between the first and second rack magnets 41 and 42 and the pinion magnets 44. Acting alternately, the first and second rack magnets 41 and 42 are moved in the longitudinal direction of the rail 11.
  • first and second carriers 21 and 22 on which the first and second rack magnets 41 and 42 and the tray 20 connected thereto are not connected to the rail 11 in the longitudinal direction of the rail 11. Can be transported along.
  • FIG. 5 is a perspective view to which the first embodiment of the antistatic part is applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • the magnetically levitated conveying apparatus may be provided with a plurality of contact rollers 61 to remove static electricity from the trays.
  • the contact rollers 61 may include the tray 20 and the first and second carriers. It may be located in various positions in contact with the parts (21, 22), but is not limited.
  • the contact rollers 61 may be rotatably provided on both sides of the rail 11, and may be provided at predetermined intervals in the longitudinal direction of the rail 11.
  • some of the contact rollers 61 may be configured to contact the first and second carrier parts 21 and 22 at all times. . In addition, only when the impact is applied from the outside, some of the contact rollers 61 may be configured to contact the first and second carrier parts 21 and 22.
  • the tray 20 and the first and second carrier parts 21 and 22 may be made of metal, and the contact rollers 61 may be made of a metal material, and the contact rollers 61 may be grounded.
  • the tray 20, and the first and second carrier parts 21 and 22 When static electricity is generated in the substrate P, the tray 20, and the first and second carrier parts 21 and 22, dust, impurities, and the like may be collected in the substrate P. However, when the first and second carrier parts 21 and 22 are in contact with the contact rollers 61, the contact rollers 61 are connected to the substrate P, the tray 20, and the first and second carrier parts ( 21 and 22, it is possible to absorb static electricity and effectively prevent contamination of the substrate P due to static electricity.
  • FIG. 6 is a perspective view in which a second embodiment of the antistatic unit is applied to a magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • the magnetic levitation transfer apparatus may be provided with a non-contact wire 62 to remove the static electricity of the tray, the non-contact wire 62 is the tray 20 and the first and second carrier parts (21, 22) It may be located in a variety of locations close to the), and may be provided with a plurality in order to increase the antistatic effect, but is not limited.
  • the non-contact wire 62 may be provided in the rail base 10 or the rail 11 in the longitudinal direction, and the non-contact wire 62 may be at least one of the first and second carrier parts 21 and 22. It can be installed to maintain the spacing within 2cm.
  • the non-contact wire 62 is a form in which a microfiber is wound around the wire, and a plurality of electrical conduction points of the microfiber may be configured to absorb and ground static electricity.
  • the non-contact wire 62 Absorbs static electricity from the substrate P, the tray 20, and the first and second carrier parts 21 and 22, and effectively prevents contamination of the substrate P due to static electricity.
  • FIG. 7 to 10 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
  • the magnetic levitation type conveying apparatus has a configuration in which a contact or non-contact electrostatic eliminator is applied, and may variously configure the magnetic levitation unit and the centering unit.
  • the magnetic levitation unit 130 includes first and second floating permanent magnets 131 to 134 provided on opposite surfaces of the tray 20 and the rail 11.
  • the first and second floating permanent magnets 131 to 134 may be configured to have the same polarity so that the repulsive force may act on each other.
  • At least two or more first floating permanent magnets 131 and 132 are provided on the lower surface of the tray 20 at predetermined intervals, and at least two or more second floating permanent magnets 133 and 134 are disposed on the upper surface of the rail 11. It is provided at intervals, and as the number of first and second permanent magnets 131 to 134 increases, the tray 20 may be stably lifted from the rails 11.
  • the tray 20 on which the first floating permanent magnets 131 and 132 are mounted may be replaced with the second floating permanent magnets ( It is possible to float from the rail 11 on which the 133 and 134 are mounted, and maintain the vertical gap between the tray 20 and the rail 11 uniformly.
  • the first and second floating permanent magnets 131 to 1340 are disposed inside the first and second carriers 21 and 22, the first and second floating permanent magnets 131 to 1340 may be protected from external heat or magnetic fields, and the operation reliability may be improved by preventing potato phenomenon. .
  • the centering unit 150 is composed of first and second centering permanent magnets 151 to 154 provided on opposite surfaces of the first and second carriers 21 and 22 and the rail 11, and the first , 2 centering permanent magnets (151 ⁇ 154) may be configured to have a different polarity so that the attraction force to each other.
  • the pair of first centering permanent magnets 151 and 152 are provided on opposite surfaces of the first and second carrier parts 21 and 22, and the pair of second centering permanent magnets 153 and 154 are provided on both sides of the rail 11.
  • the magnetic force of the first and second centering permanent magnets 151 to 154 may be identically configured.
  • the tray 20 can be positioned at the center of the rail 11 by keeping the distance between the rail 11 and the first and second carrier parts 21 and 22 uniform.
  • a pair of separation preventing rollers 71 and 72 may be provided at both sides of the rail 11, and may be provided at both upper sides of the rail 11 adjacent to the magnetic levitation unit 130.
  • the first and second carrier parts 21 and 22 collide with the release preventing rollers 71 and 72 so that they are excessively separated. It can prevent.
  • the tray 20 and the first and second carrier parts 21 and 22 are in the original position with respect to the rail 11. Can be returned to.
  • the magnetic levitation unit 30 includes first and second floating permanent magnets 31 to 34 provided between the first and second carrier parts 21 and 22 and the rail base 10.
  • the pair of separation prevention rollers 171 and 172 may be provided at both lower sides of the rail 11 adjacent to the magnetic levitation unit 30.
  • the centering unit 250 may include first, second and third centering permanent magnets 251 to 256 provided on opposite surfaces of the first and second carriers 21 and 22 and the rails 11, and a tray ( 20 and the fifth and sixth centering permanent magnets 257 and 258 provided on opposite surfaces of the rail 11.
  • a pair of first centering permanent magnets 251 and 252 are provided on opposite surfaces of the first and second carrier parts 21 and 22, and a pair of second centering permanent magnets 253 and 254 are provided on both sides of the rail 11.
  • the first and second centering permanent magnets 251 to 254 may be configured to have different polarities so that the attraction force acts on each other.
  • the magnetic forces of the first and second centering permanent magnets 251 to 254 may be configured in the same manner.
  • a pair of third centering permanent magnets (255, 256) is provided on the opposite side of the first and second carrier portion, located below the first centering permanent magnets (251, 252) so as to be close to the second centering permanent magnets (253, 254)
  • the second and third permanent magnets 253 to 256 may be configured to have the same polarity so that the repulsive force acts on each other.
  • the fifth centering permanent magnet 257 is provided in the center of the lower surface of the tray 20, the sixth centering permanent magnet 258 is provided in the center of the upper surface of the rail 11, the fifth, sixth centering permanent magnets (257,258). ) May be configured to have different polarities so that attractive forces act on each other.
  • the sixth centering permanent magnet 258 may be configured as a yoke 258 ′ which is a ferromagnetic material, and the central portion of the yoke may be configured to protrude to further concentrate the magnetic force in the center.
  • the distance between both sides of the rail 11 and the first and second carrier parts 21 and 22 and the distance between the upper surface of the rail 11 and the tray 20 can be maintained uniformly.
  • the rail 11 is prevented from twisting in both directions, and at the same time positioned at the center of the rail 11.
  • the first and second permanent magnets 251 ⁇ ⁇ may be prevented by sagging of the first and second carrier parts 21 and 22.
  • the attraction between 254 or the attraction between the fifth and sixth permanent magnets 257 and 258 can be stably acted.
  • At least two or more fifth centering permanent magnets 257a and 257b are provided on the bottom surface of the tray 20 at predetermined intervals, and at least one sixth centering permanent magnet 258 is provided. It is provided on the upper surface of the rail 11 so as to be located between the five centering permanent magnets (257a, 257b), the fifth and sixth centering permanent magnets (257a, 257b, 258) to have the same polarity so that the repulsive force to each other Can be configured.
  • the repulsive force acts between the fifth and sixth permanent magnets 257a, 257b, and 258 of the same polarity, the gap between the upper surface of the rail 11 and the tray 20 is stably maintained, and the tray ( By providing an additional flotation force to 20), even if a heavy substrate is placed, the tray 20 can be stably lifted from the rail 11.
  • FIG. 11 is a front view showing a magnetic levitation transfer apparatus according to another embodiment of the present invention.
  • the magnetically levitated conveying apparatus is configured in the same manner as in one embodiment, and a chamber (C) that can block external heat as well as shield magnetic fields of permanent magnets is additionally applied.
  • the chamber C is provided with a hole h on the upper surface of which the substrate seated on the tray 20 is exposed, and the tray 20, the magnetic levitating unit 30, and the magnetic conveying unit 40 above the rail base 10. ) And the centering unit 250 may be installed.
  • the chamber blocks external heat to protect the permanent magnets contained in the magnetically levitated unit 30, the magnetic transfer unit 40 and the centering unit 50, and the permanent magnets operate stably. Operational reliability can be increased.
  • a pair of separation prevention rollers 271 and 272 may be provided on both sides of the inner upper surface of the chamber (C).
  • the separation preventing rollers 271 and 272 may contact the tray 20 or the first and second carrier parts 21 and 22 to prevent the tray 20 from being excessively separated.
  • FIGS 12 to 15 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to another embodiment of the present invention.
  • the magnetic levitation type conveying apparatus is a configuration in which a chamber for protecting permanent magnets is applied, and the magnetic levitation unit and the centering unit may be variously configured.
  • the magnetic levitation unit and the centering unit illustrated in FIGS. 12 to 15 are configurations corresponding to those illustrated in FIGS. 7 to 11, and exhibit the same operations and effects, and detailed descriptions thereof will be omitted.

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Abstract

A magnetic levitation transfer device according to one embodiment of the present invention comprises: a tray having a substrate loaded on the upper part thereof and having a guide groove provided on the lower part thereof; a rail base having, on the upper surface thereof, a rail to be accommodated in the guide groove of the tray; a magnetic levitation unit provided between the tray and the rail base or the rail, and composed of permanent magnets for levitating the tray from the rail base by magnetic force; a magnetic transfer unit provided between the tray and the rail, and composed of permanent magnets for transferring the tray along the rail by magnetic force; a centering unit provided between the tray and the rail, and composed of permanent magnets for maintaining a predetermined gap between the tray and the rail by magnetic force; and an anti-static part which is provided to be adjacent to the tray and which discharges electrons charged in the tray.

Description

자기 부상 방식의 이송장치 Magnetically levitated conveying device
본 발명은 자기 부상 방식의 이송장치에 관한 것이다.The present invention relates to a magnetic levitation transfer device.
최근 LCD (Liquid Crystal Display device), OLED (Organic Light Emitting Diode)등의 디스플레이 장치가 광범위하게 쓰이고 있으며 그 수요가 증가하고 있다.Recently, display devices such as liquid crystal display devices (LCDs) and organic light emitting diodes (OLEDs) are widely used, and demand thereof is increasing.
또한, 디스플레이 장치의 크기가 대형화 되고 있는 추세인데, 디스플레이 장치가 대형화될수록 제조 공정 중 분진이 더 많이 발생하고, 그에 따라 제조 챔버 내에서 발생할 수 있는 분진을 억제하는 것이 중요하다.In addition, the size of the display device is increasing in size, and as the display device becomes larger in size, more dust is generated during the manufacturing process, and therefore, it is important to suppress dust that may occur in the manufacturing chamber.
기존의 디스플레이 장치 제조 공정에서, 디스플레이 기판을 안착 시키는 캐리어(Carrier)가 진공 챔버 내에서 이동할 때, 캐리어의 하부가 진공 챔버에 설치 된 롤러 유닛과 접촉되는 방식을 사용한다. In a conventional display device manufacturing process, when a carrier for mounting a display substrate moves in a vacuum chamber, a lower part of the carrier is used in contact with a roller unit installed in the vacuum chamber.
상기와 같은 접족 방식의 이송장치는 캐리어 하부와 롤러 유닛이 접촉하면서 생기는 마찰력에 의해 분진이 발생하고, 이러한 분진은 제조 공정 중 디스플레이 기판에 부착되어 불량을 발생시킨다. In the tangential transfer device as described above, dust is generated by frictional force generated when the lower portion of the carrier and the roller unit come into contact with each other, and the dust is attached to the display substrate during the manufacturing process to generate a defect.
이를 해결하기 위해 자석을 이용하여 자기부상 방식으로 챔버 내에서 캐리어를 이동함으로써, 제조 공정 시 발생 할 수 있는 분진을 최소화 할 수 있다.In order to solve this problem, by moving the carrier in the chamber in a magnetic levitation method using a magnet, it is possible to minimize the dust that can occur during the manufacturing process.
한국공개특허 제2017-110065호(2015.09.17 출원)에는 기판이 안착되는 트레이와, 트레이의 하측에 마련되며 트레이를 자기 부상시키고 자력에 의해 이송시키는 자기 이송 유닛과, 트레이와 비접촉되어 트레이의 이송을 가이드하는 가이드 유닛과, 자기 이송 유닛과 가이드 유닛 사이의 적어도 일 영역에 마련된 간격 유지 수단을 포함하는 기판 이송 장치가 개시된다.Korean Patent Application Publication No. 2017-110065 (filed Sep. 17, 2015) includes a tray on which a substrate is seated, a magnetic transfer unit provided below the tray to magnetically float and transfer the tray by magnetic force, and a tray that is not in contact with the tray to transfer the tray. Disclosed is a substrate transfer apparatus including a guide unit for guiding a guide and a gap maintaining means provided in at least one region between the magnetic transfer unit and the guide unit.
그러나, 상기의 기술에 따르면, 자기 부상 유닛이 구동 장치와 일정 간격 이격된 상태로 작동되기 때문에 공정 중 축적된 전하가 빠져나갈 수 없고, 이러한 전하에 의해 트레이에 정전기를 유발하여 트레이 및 기판에 분진을 흡착시키고, 기판을 오염시킬 수 있다.However, according to the above technique, since the magnetic levitation unit is operated at a predetermined interval away from the driving device, the accumulated charges during the process cannot escape, and these charges cause static electricity in the trays and cause dust on the trays and substrates. Can adsorb and contaminate the substrate.
또한, 상기의 기술에 따르면, 트레이와 자기 이송 유닛 사이에 위치하는 자기 부상 자석이 트레이의 하측의 중앙 부분만 자기 부상시키기 때문에 트레이 이송 시, 트레이가 좌우로 틀어질 수 있는 불안한 구조로 이루어진다. 이로 인하여 주행 시 트레이는 간격유지 수단(보통 Roller 사용)과 주기적으로 접촉하게 되고, 접촉에 의해 분진이 발생하거나, 접촉 시 충격으로 인해 간격 유지 수단의 손상이 발생할 수 있다. In addition, according to the above technique, since the magnetically levitated magnet located between the tray and the magnetic conveyance unit causes only the central portion of the lower side of the tray to magnetically float, the tray has an unstable structure in which the tray can be twisted left and right. Due to this, the tray periodically contacts the gap maintaining means (usually using a roller) during driving, and dust may be generated by the contact, or damage of the gap maintaining means may occur due to an impact upon contact.
또한, 상기의 기술에 따르면, 자기 부상 유닛과 자기 반송 유닛에 설치된 영구 자석이 고온의 환경에 노출될 수 있는데, 영구 자석만을 사용하는 장치의 특성상 주변부의 열로 인하여 감자(자력풀림) 현상이 발생하고, 이로 인하여 작동 신뢰성이 저하될 수 있다.In addition, according to the above technique, the permanent magnets installed in the magnetically levitated unit and the magnetic conveyance unit may be exposed to a high temperature environment. Due to the characteristics of the device using only the permanent magnets, the potato (magnet loosening) phenomenon occurs due to the heat around the periphery. As a result, operational reliability may be degraded.
또한, 상기의 기술에 따르면, 양산 Sputter 장비에서는 Sputtering 된 증착 물질이 캐리어의 하부에 까지 증착이 되는 현상이 발생되라도, 증착 물질이 자기 부상 장치를 오염시키기 쉽고, 자기 부상 장치로부터 증착 물질을 제거하는 크리닝 빈도가 높아짐에 따라 생산성이 저하될 수 있다. In addition, according to the above technique, even in a mass production sputtering equipment, even if a phenomenon in which the sputtered deposition material is deposited up to the lower part of the carrier occurs, the deposition material tends to contaminate the magnetically levitated device, and the deposition material is removed from the magnetic levitated device. As the cleaning frequency increases, productivity may decrease.
또한, 상기의 기술에 따르면, 외력이 가해질 경우, 트레이가 상부로 이탈할 수 있고, 이로 인하여 작동 신뢰성이 저하될 수 있다.In addition, according to the above technique, when an external force is applied, the tray may be displaced upwards, which may lower operating reliability.
한국등록특허 제707390호(2005.12.19 출원)에는 기판을 고정하는 캐리어; 상기 캐리어를 자기 부상한 상태에서 수평이송하는 하부 이송부; 및 상기 캐리어의 상부를 비접촉 상태로 유지시키는 상부 이송부;를 포함하여 이루어지며, 특히 상기 캐리어의 하부에는 영구자석이 구비되고, 상기 하부 이송부에는 상기 영구자석과 동일 또는 반대극 성을 띄도록 제어되는 전자석이 구비되는 기판 이송장치가 개시된다.Korean Patent No. 707390 (filed Dec. 19, 2005) includes a carrier fixing a substrate; A lower transfer part configured to horizontally move the carrier in a magnetically floating state; And an upper transfer part that maintains an upper portion of the carrier in a non-contact state. Particularly, a lower portion of the carrier is provided with a permanent magnet, and the lower transfer part is controlled to have the same or opposite polarity as that of the permanent magnet. Disclosed is a substrate transfer apparatus provided with an electromagnet.
그러나, 상기의 기술에 따르면, 챔버 내부에 전자석을 설치하기 위한 추가 설비(ATM Box 등)를 필요로 하기 때문에 구조 및 설치가 복잡하고, 추후에 유지 및 보수하는데 많이 시간이 소요될 수 있다.However, according to the above technique, since it requires an additional facility (such as an ATM box) for installing an electromagnet inside the chamber, the structure and installation are complicated, and it may take a long time to maintain and repair later.
또한, 상기의 기술에 따르면, 전원이 차단되면 트레이가 자기 부상된 상태로 중력 방향으로 움직일 수 있고, 이로 인하여 구성 요소들 사이에 충돌로 인하여 파손이 발생되거나, 작동 신뢰성이 떨어질 수 있다.In addition, according to the above technique, when the power is cut off, the tray may move in the direction of gravity in a magnetically floating state, which may cause damage due to a collision between components, or lower operating reliability.
본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출된 것으로서, 트레이의 정전기 유발을 억제할 수 있는 자기 부상 방식의 이송장치를 제공하는데 그 목적이 있다.The present invention has been made to solve the above problems of the prior art, and an object thereof is to provide a magnetic levitation transfer device that can suppress the generation of static electricity in the tray.
또한, 본 발명의 다른 목적은, 분진의 발생 및 비산을 방지할 수 있는 자기 부상 방식의 이송장치를 제공하는데 있다.In addition, another object of the present invention is to provide a transfer apparatus of a magnetic levitation method that can prevent the generation and scattering of dust.
또한, 본 발명의 다른 목적은, 영구 자석의 감자 현상을 개선하는 동시에 오염을 방지할 수 있는 자기 부상 방식의 이송장치를 제공하는데 있다.In addition, another object of the present invention is to provide a magnetic levitation transfer apparatus that can prevent contamination while improving the potato phenomenon of the permanent magnet.
또한, 본 발명의 다른 목적은, 트레이의 이탈을 방지할 수 있는 자기 부상 방식의 이송장치를 제공하는데 있다.In addition, another object of the present invention is to provide a transfer apparatus of a magnetic levitation method that can prevent the separation of the tray.
또한, 본 발명의 다른 목적은, 구조 및 설치가 간단한 자기 부상 방식의 이송장치를 제공하는데 있다.In addition, another object of the present invention is to provide a conveyance apparatus of a magnetic levitation method of simple structure and installation.
또한, 본 발명의 다른 목적은, 반송 시에 전원이 차단되더라도 브레이크 동작할 수 있는 자기 부상 방식의 이송장치를 제공하는데 있다.In addition, another object of the present invention is to provide a magnetic levitation transfer apparatus capable of operating a brake even if the power is cut off during transportation.
본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치는 기판이 안착되고, 하면에 가이드 홈이 구비된 트레이; 상기 트레이의 가이드 홈에 수용되는 레일이 상면에 구비된 레일 베이스; 상기 트레이와 레일 베이스 또는 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일 베이스로부터 부상시키는 자기 부상 유닛; 상기 트레이와 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일을 따라 이송시키는 자기 이송 유닛; 상기 트레이와 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일과 소정 간격을 유지시키는 센터링 유닛; 및 상기 트레이와 인접하게 구비되고, 상기 트레이에 충전된 전자를 방출시키는 정전기 방지부(ionizer);를 포함한다.Magnetic levitation transfer apparatus according to an embodiment of the present invention is a substrate is seated, the tray provided with a guide groove on the lower surface; A rail base provided on an upper surface of the rail accommodated in the guide groove of the tray; A magnetic levitation unit provided between the tray and the rail base or the rail to lift the tray from the rail base by magnetic force; A magnetic conveying unit provided between the tray and the rail and transferring the tray along the rail by a magnetic force; A centering unit provided between the tray and the rail and maintaining the tray with a predetermined distance from the rail by a magnetic force; And an antistatic unit disposed adjacent to the tray and discharging electrons charged in the tray.
상기 자기 부상 유닛은, 상기 트레이의 하부 양측에 구비된 한 쌍의 제1부상용 영구자석과, 상기 제1부상용 영구자석들과 대향되도록 상기 레일 베이스의 상면에 상기 트레이의 이동 방향을 따라 길게 구비된 한 쌍의 제2부상용 영구자석을 포함하고, 상기 제1,2부상용 영구자석들은 동일한 극성을 가지도록 구성될 수 있다.The magnetic levitation unit is long along the moving direction of the tray on the upper surface of the rail base so as to face the pair of first floating permanent magnets provided on both sides of the lower side of the tray and the first floating permanent magnets. It includes a pair of second floating permanent magnets provided, the first, second floating permanent magnets may be configured to have the same polarity.
상기 자기 부상 유닛은, 상기 트레이의 가이드 홈 내부 상면에 구비된 적어도 두 개 이상의 제1부상용 영구자석과, 상기 제1부상용 영구자석들과 대향되도록 상기 레일의 상면에 상기 트레이의 이동 방향을 따라 길게 구비된 적어도 두 개 이상의 제2부상용 영구자석을 더 포함하고, 상기 제1,2센터링 영구자석들은 동일한 극성을 가지도록 구성될 수 있다.The magnetic levitation unit, at least two or more first floating permanent magnets provided on the upper surface of the guide groove of the tray, and the moving direction of the tray on the upper surface of the rail so as to face the first floating permanent magnets According to the present invention, the electronic device further includes at least two second floating permanent magnets, and the first and second centering permanent magnets have the same polarity.
상기 자기 이송 유닛은, 상기 트레이의 가이드 홈 내측면에 대향되게 구비되고, 다른 극성의 영구자석들이 교번하여 배열된 한 쌍의 랙 자석과, 상기 랙 자석들 사이에 위치하고, 상기 레일의 중심에 길게 배열된 회전축과, 상기 회전축을 따라 일정 간격을 두고 설치되고, 다른 극성의 영구자석들이 교번하여 배열된 복수개의 피니언 자석과, 상기 회전축을 회전시키는 구동 모터를 포함할 수 있다.The magnetic conveying unit is provided to face the inner side of the guide groove of the tray, and is located between the rack magnets and a pair of rack magnets in which permanent magnets of different polarities are alternately arranged, and is long in the center of the rail. The rotary shaft may include a plurality of pinion magnets arranged at regular intervals along the rotation shaft, alternately arranged with permanent magnets having different polarities, and a driving motor for rotating the rotation shaft.
상기 센터링 유닛은, 상기 트레이의 가이드 홈 내부 양측면에 대향되게 구비된 한 쌍의 제1센터링 영구자석과, 상기 제1센터링 자석들과 대향되도록 상기 레일의 양측면에 구비된 한 쌍의 제2센터링 영구자석과, 상기 제1,2센터링 영구자석은 동일한 극성을 가지도록 구성될 수 있다.The centering unit may include a pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray and a pair of second centering permanent parts provided on both sides of the rail to face the first centering magnets. The magnet and the first and second centering permanent magnets may be configured to have the same polarity.
상기 센터링 유닛은, 상기 트레이의 가이드 홈 내부 상면에 소정 간격을 두고 구비된 적어도 두 개 이상의 제3센터링 영구자석과, 상기 제3센터링 영구자석들 사이에 위치되도록 상기 레일의 상면에 구비된 적어도 하나 이상의 제4센터링 자석을 더 포함하고, 상기 제3,4센터링 영구자석은 동일한 극성을 가지도록 구성될 수 있다.The centering unit may include at least two or more third centering permanent magnets provided at predetermined intervals on the upper surface of the guide groove of the tray, and at least one of the three centering permanent magnets disposed on the upper surface of the rail. The fourth centering magnet is further included, and the third and fourth centering permanent magnets may be configured to have the same polarity.
상기 센터링 유닛은, 상기 트레이의 가이드 홈 내부 양측면에 대향되게 구비된 한 쌍의 제1센터링 영구자석과, 상기 제1센터링 자석들과 대향되도록 상기 레일의 양측면에 구비된 한 쌍의 제2센터링 영구자석과, 상기 제1,2센터링 영구자석은 서로 다른 극성을 가지도록 구성될 수 있다.The centering unit may include a pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray and a pair of second centering permanent parts provided on both sides of the rail to face the first centering magnets. The magnet and the first and second centering permanent magnets may be configured to have different polarities.
상기 센터링 유닛은, 상기 제2센터링 영구자석들과 인접하도록 상기 제1센터링 영구자석들 하측에 구비된 한 쌍의 제3센터링 영구자석을 더 포함하고, 상기 제3센터링 영구자석은 상기 제2센터링 영구자석과 동일한 극성을 가지도록 구성될 수 있다.The centering unit further includes a pair of third centering permanent magnets provided below the first centering permanent magnets so as to be adjacent to the second centering permanent magnets, and the third centering permanent magnet is the second centering ring. It may be configured to have the same polarity as the permanent magnet.
상기 센터링 유닛은, 상기 트레이의 가이드 홈 내부 상면에 구비된 제4센터링 영구자석과, 상기 제4센터링 영구자석과 대향되도록 상기 레일의 상면에 구비된 제5센터링 영구자석을 더 포함하고, 상기 제4,5센터링 영구자석은 서로 다른 극성을 가지도록 구성될 수 있다.The centering unit further includes a fourth centering permanent magnet provided on the upper surface of the guide groove of the tray and a fifth centering permanent magnet provided on the upper surface of the rail so as to face the fourth centering permanent magnet. The 4,5 centering permanent magnet may be configured to have different polarities.
상기 제5센터링 영구자석은, 요크 자석으로 구성될 수 있다.The fifth centering permanent magnet may be configured as a yoke magnet.
상기 센터링 유닛은, 상기 트레이의 가이드 홈 내부 상면에 소정 간격을 두고 구비된 적어도 두 개 이상의 제4센터링 영구자석과, 상기 제4센터링 영구자석들 사이에 위치되도록 상기 레일의 상면에 구비된 적어도 하나 이상의 제5센터링 자석을 더 포함하고, 상기 제4,5센터링 영구자석은 동일한 극성을 가지도록 구성될 수 있다.The centering unit may include at least two or more fourth centering permanent magnets provided at a predetermined interval on an upper surface of the guide groove of the tray, and at least one provided on an upper surface of the rail to be positioned between the fourth centering permanent magnets. The fifth centering magnet is further included, and the fourth and fifth centering permanent magnets may be configured to have the same polarity.
상기 정전기 방지부는, 상기 레일의 양측면 중 적어도 일측에 구비되고, 상기 트레이와 접촉될 수 있는 금속 부재로 구성될 수 있다.The antistatic part may be provided on at least one side of both sides of the rail and may be formed of a metal member which may be in contact with the tray.
상기 정전기 방지부는, 상기 트레이를 이송 방향으로 안내하는 롤러 형태로 구성될 수 있다.The antistatic part may be configured in the form of a roller for guiding the tray in a conveying direction.
상기 정전기 방지부는, 상기 레일 베이스 상면에 구비되고, 상기 트레이와 소정 간격 이내에 설치될 수 있는 금속 부재로 구성될 수 있다.The antistatic part may be formed of a metal member provided on an upper surface of the rail base and installed within a predetermined distance from the tray.
상기 정전기 방지부는, 상기 트레이의 이송 방향을 따라 길게 배열된 와이어 형태로 구성될 수 있다.The antistatic part may be configured in the form of a wire arranged in a long direction along the conveying direction of the tray.
본 발명은, 상기 레일의 양측면에 구비되고, 상기 트레이의 가이드 홈 내부 양측면과 소정 간격을 두고 구비된 한 쌍의 이탈 방지용 롤러;를 더 포함할 수 있다.The present invention may further include a pair of separation prevention rollers provided at both sides of the rail and provided at predetermined intervals from both sides of the guide groove of the tray.
상기 이탈 방지용 롤러들은, 상기 자기 부상 유닛과 인접하게 설치될 수 있다.The separation preventing rollers may be installed adjacent to the magnetic levitation unit.
본 발명은, 상기 트레이에 안착된 기판이 노출되는 홀이 상면에 구비되고, 상기 레일 베이스 상측에 상기 트레이와 자기 부상 유닛과 자기 이송 유닛 및 센터링 유닛을 차폐시키는 챔버;를 더 포함할 수 있다.The present invention may further include a chamber having a hole on the upper surface of which the substrate seated on the tray is exposed, and shielding the tray, the magnetic levitating unit, the magnetic conveying unit, and the centering unit on the rail base.
본 발명은, 상기 챔버 내부 상면 양측에 구비되고, 상기 트레이와 소정 간격을 두고 구비된 한 쌍의 이탈 방지용 롤러;를 더 포함할 수 있다.The present invention may further include a pair of separation prevention rollers provided at both sides of the upper surface of the inside of the chamber and provided at predetermined intervals from the tray.
본 발명에 따른 자기 부상 방식의 이송장치는 트레이과 접촉식 또는 비접촉식으로 정전기 방지부를 구비함으로서, 트레이에 정전기가 유발되는 것을 억제하고, 분진이 트레이 및 기판에 흡착되는 것을 방지할 뿐 아니라 기판의 오염을 방지할 수 있다.The magnetically levitated conveying apparatus according to the present invention includes an antistatic part in contact or non-contact with the tray, thereby suppressing the generation of static electricity in the tray, preventing dust from adsorbing to the tray and the substrate, and preventing contamination of the substrate. It can prevent.
또한, 본 발명은, 트레이의 하부 좌우 측면에 영구자석을 배치하여 좌우로 틀어지는 현상을 개선함으로서, 주행 시 트레이가 별도로 구비될 수 있는 간격유지 수단과 접촉하여 분진이 발생하는 현상을 줄일 수 있다.In addition, the present invention, by improving the phenomenon in which the permanent magnet is arranged to the left and right sides of the lower side of the tray to be twisted from side to side, it is possible to reduce the phenomenon of dust generated in contact with the interval maintaining means that the tray can be provided separately when running.
또한, 본 발명은, 챔버가 레일 베이스 상측에 자기 부상 유닛과 자기 이송 유닛과 센터링 유닛을 감싸도록 구비됨으로서, 이송 시 발생할 수 있는 분진이 비상 및 확산되는 것을 억제할 수 있고, 트레이에 올려진 기판이 오염되는 것을 방지할 수 있다. In addition, the present invention, the chamber is provided on the rail base to surround the magnetic levitation unit, the magnetic transfer unit and the centering unit, it is possible to suppress the flying and diffusion of dust that may occur during the transfer, the substrate placed on the tray This can be prevented from contamination.
또한, 본 발명은, 챔버가 주변 열을 차단함으로서, 자기 부상 유닛과 자기 이송 유닛과 센터링 유닛에 포함된 영구자석의 감자 현상을 개선하고, 영구자석의 작동 신뢰성을 높일 수 있다.In addition, the present invention can improve the potato phenomenon of the permanent magnets included in the magnetic levitating unit, the magnetic conveying unit and the centering unit by blocking the ambient heat, and can increase the operational reliability of the permanent magnet.
또한, 본 발명은, 챔버가 자기 부상 유닛의 오염을 방지함으로서, 자기 부상 유닛에서 증착 물질을 제거하는 크리닝 빈도를 낮추어 생산성을 향상시킬 수 있다.In addition, the present invention can improve productivity by lowering the cleaning frequency of removing the deposition material from the magnetically levitated unit by preventing the chamber from contamination of the magnetic levitated unit.
또한, 본 발명은, 레일 양측면이나, 챔버 내측에 완충 롤러를 설치함으로서, 상시에 트레이와 완충 롤러가 소정 간격을 두고 비접촉 상태를 유지하지만, 외력이 가해질 때 완충 롤러에 의해 트레이가 이탈되는 것을 방지하고, 트레이의 작동 신뢰성을 높일 수 있다.In addition, the present invention, by providing a buffer roller on both sides of the rail or the inside of the chamber, the tray and the buffer roller to maintain a non-contact state at regular intervals, but prevents the tray from being separated by the buffer roller when an external force is applied. The operation reliability of the tray can be improved.
또한, 본 발명은, 자기 부상 유닛과 자기 이송 유닛에 포함된 영구 자석을 사용하여 트레이를 부상 및 이송시키기 때문에 구조 및 설치가 간단하고, 추후에 유지 및 보수하는데 걸리는 시간을 단축시킬 수 있다.In addition, the present invention is simple in structure and installation because the tray is floated and transported using the permanent magnets included in the magnetically levitated unit and the magnetic conveyance unit, and the time taken for maintenance and repair later can be shortened.
또한, 본 발명은, 자기 이송 유닛이 트레이에 구비된 랙 자석과 레일에 구비된 피니언 자석으로 구성되기 때문에 상시 영구 자석의 인력이 작용하여 전원이 차단되더라도 자기 이송 유닛이 브레이크 기능을 수행할 수 있고, 부품들의 파손을 방지할 뿐 아니라 작동 신뢰성을 높일 수 있다.In addition, the present invention, since the magnetic transfer unit is composed of a rack magnet provided in the tray and the pinion magnet provided in the rail, the magnetic transfer unit can perform a brake function even if the power of the permanent magnet is applied to cut off the power. In addition, this prevents damage to the components and increases operational reliability.
도 1은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치가 도시된 사시도.1 is a perspective view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 2 및 도 3은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치가 도시된 정면도.2 and 3 is a front view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 4는 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 자기 이송 유닛가 도시된 구성도.Figure 4 is a block diagram showing a magnetic transfer unit in the magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 5는 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 정전기 방지부의 제1실시예가 적용된 사시도.Figure 5 is a perspective view of the first embodiment of the antistatic portion applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 6은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 정전기 방지부의 제2실시예가 적용된 사시도.Figure 6 is a perspective view of the second embodiment of the antistatic portion applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 7 내지 도 10은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 적용된 자기 부상 유닛과 센터링 유닛의 다양한 실시예가 도시된 정면도.7 to 10 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
도 11은 본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치가 도시된 정면도.11 is a front view showing a magnetic levitation transfer apparatus according to another embodiment of the present invention.
도 12 내지 도 15는 본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치에 적용된 자기 부상 유닛과 센터링 유닛의 다양한 실시예가 도시된 정면도.12 to 15 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to another embodiment of the present invention.
이하에서는, 본 실시예에 대하여 첨부되는 도면을 참조하여 상세하게 살펴보도록 한다. 다만, 본 실시예가 개시하는 사항으로부터 본 실시예가 갖는 발명의 사상의 범위가 정해질 수 있을 것이며, 본 실시예가 갖는 발명의 사상은 제안되는 실시예에 대하여 구성요소의 추가, 삭제, 변경 등의 실시변형을 포함한다고 할 것이다. Hereinafter, with reference to the accompanying drawings for the present embodiment will be described in detail. However, the scope of the inventive concept of the present embodiment may be determined from the matters disclosed by the present embodiment, and the inventive concept of the present embodiment may be implemented by adding, deleting, or changing components with respect to the proposed embodiment. It will be said to include variations.
도 1 내지 도 3은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치가 도시된 사시도 및 정면도이고, 도 4는 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 자기 이송 유닛가 도시된 구성도이다.1 to 3 are a perspective view and a front view showing a magnetic levitation transfer apparatus according to an embodiment of the present invention, Figure 4 is a magnetic transfer unit is shown in the magnetic levitation transfer apparatus according to an embodiment of the present invention Configuration diagram.
본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치(1)는, 레일 베이스(10)와, 트레이(20)와, 자기 부상 유닛(30)과, 자기 이송 유닛(40)과, 센터링 유닛(50)을 포함한다.The magnetically levitated conveying apparatus 1 according to an embodiment of the present invention includes a rail base 10, a tray 20, a magnetic levitating unit 30, a magnetic conveying unit 40, and a centering unit. And 50.
상기 레일 베이스(10)는 상면에 길이 방향으로 긴 레일(11)이 설치된 플레이트로 구성된다. 물론, 레일(11)은 하기에서 설명될 자기 이송 유닛(40)을 설치하기 위하여 길이 방향으로 긴 공간부(11h)가 구비될 수 있다. The rail base 10 is composed of a plate provided with a long rail 11 in the longitudinal direction on the upper surface. Of course, the rail 11 may be provided with a space portion (11h) long in the longitudinal direction in order to install the magnetic transfer unit 40 to be described below.
상기 트레이(20)는 기판(P)이 올려지는 플레이트로 구성되는데, 기판(P)이 세워진 상태로 고정시킬 수 있도록 구성된다.The tray 20 is composed of a plate on which the substrate P is placed, and is configured to fix the substrate P in an upright state.
또한, 상기 트레이(20)는 하부 양측에 연장된 제1,2캐리어부(21,22)가 구비되는데, 상기 트레이(20)와 제1,2캐리어부(21,22) 사이에 가이드 홈(20h)이 형성되고, 상기 가이드 홈(20h)이 상기 레일(11)을 따라 안내될 수 있다. In addition, the tray 20 is provided with first and second carrier parts 21 and 22 extending on both sides of the lower part, and guide grooves (B) between the tray 20 and the first and second carrier parts 21 and 22. 20h) may be formed, and the guide groove 20h may be guided along the rail 11.
상기 자기 부상 유닛(30)은 영구자석을 사용하여 트레이(20)를 레일 베이스(10)로부터 부상시키도록 구성된다. The magnetic levitation unit 30 is configured to lift the tray 20 from the rail base 10 using permanent magnets.
실시예에 따르면, 상기 자기 부상 유닛(30)은 제1,2캐리어부(21,22)의 하부 양측에 구비된 한 쌍의 제1부상용 영구자석(31,32)과, 제1부상용 영구자석들(31,32)과 대향되도록 레일 베이스(10)의 상면 양측에 구비된 한 쌍의 제2부상용 영구자석(33,34)을 포함할 수 있다. According to an embodiment, the magnetic levitation unit 30 includes a pair of first floating permanent magnets 31 and 32 provided on both lower sides of the first and second carrier parts 21 and 22 and the first floating object. It may include a pair of second floating permanent magnets (33, 34) provided on both sides of the upper surface of the rail base 10 so as to face the permanent magnets (31, 32).
물론, 제1,2부상용 영구자석들(31~34)의 설치 위치는 다양하게 변경될 수 있으나, 제1,2부상용 영구자석들(31~34)은 트레이(20)를 부상시킬 수 있도록 서로 대향된 위치에 동일한 극성을 가지도록 구성되어야 한다. Of course, the installation positions of the first and second floating permanent magnets 31 to 34 may be variously changed, but the first and second floating permanent magnets 31 to 34 may float the tray 20. It should be configured to have the same polarity in the positions opposite each other.
또한, 제1,2부상용 영구자석들(31~34)은 양측에 한 쌍이 나란히 구비됨에 따라 트레이(20)를 레일 베이스(10)로부터 안정적으로 부상시킬 수 있다.In addition, the first and second floating permanent magnets 31 to 34 may be stably floated from the rail base 10 as a pair is provided side by side on both sides.
상기 자기 이송 유닛(40)은 영구자석을 사용하여 트레이(20)를 레일(11)을 따라 이송시키도록 구성된다.The magnetic transfer unit 40 is configured to transfer the tray 20 along the rail 11 using permanent magnets.
실시예에 따르면, 상기 자기 이송 유닛(40)은 캐리어들의 대향된 내측면에 구비된 제1,2랙 자석(41,42)과, 제1,2랙 자석들(41,42) 사이에 위치되고 레일(21)의 공간부에 길이 방향을 따라 길게 배열된 회전축(43)과, 회전축(43)에 일정 간격을 두고 설치된 복수개의 원통형 피니언 자석(44)과, 회전축(43)을 회전 구동시키는 구동 모터(45)를 포함할 수 있다.According to an embodiment, the magnetic conveying unit 40 is located between the first and second rack magnets 41 and 42 and the first and second rack magnets 41 and 42 provided on opposite inner surfaces of the carriers. And a plurality of cylindrical pinion magnets 44 and a plurality of cylindrical pinion magnets 44 provided at regular intervals on the rotating shaft 43, the rotary shaft 43 arranged in the space portion of the rail 21 in the longitudinal direction. It may include a drive motor 45.
제1랙 자석(41)은 플레이트 형상의 백 요크(41a)와, 백 요크(41a)에 다른 극성이 교번하게 배치된 영구자석부(41b)로 구성되는데, 바 형상의 영구자석부(41b)가 백 요크(41a) 표면에 사선 형태로 배열될 수 있다. 제2랙 자석(42)도 제1랙 자석(41)과 동일하게 구성될 수 있다. The first rack magnet 41 is composed of a plate-shaped back yoke 41a and a permanent magnet portion 41b in which different polarities are alternately arranged on the back yoke 41a, and a bar-shaped permanent magnet portion 41b. May be arranged in an oblique shape on the surface of the back yoke 41a. The second rack magnet 42 may also be configured in the same manner as the first rack magnet 41.
피니언 자석(44)은 원통 형상으로서, 극성이 다른 영구자석부(44a)가 교번하여 사선 형태로 배치된다. 그리고, 피니언 자석(44)은 회전축(43)을 감싸도록 설치되고, 회전축(43)을 따라 소정 간격을 두고 복수개가 구비될 수 있다. The pinion magnet 44 is cylindrical in shape, and the permanent magnets 44a having different polarities are alternately arranged in diagonal lines. In addition, the pinion magnet 44 may be installed to surround the rotation shaft 43, and a plurality of pinion magnets 44 may be provided at predetermined intervals along the rotation shaft 43.
구동 모터(45)가 작동되면, 회전축(43)과 피니언 자석들(44)이 회전되고, 제1,2랙 자석(41,42)과 피니언 자석들(44) 사이에 인력과 척력이 반복적으로 작용되며, 제1,2랙 자석(41,42)이 피니언 자석들(44)의 배열 방향을 따라 이동될 수 있다. When the drive motor 45 is operated, the rotating shaft 43 and the pinion magnets 44 are rotated, and the attraction force and the repulsive force are repeatedly repeated between the first and second rack magnets 41 and 42 and the pinion magnets 44. The first and second rack magnets 41 and 42 may move along the arrangement direction of the pinion magnets 44.
상기 센터링 유닛(50)은 영구자석을 사용하여 트레이(20)와 제1,2캐리어부(21,22)를 레일(11)과 소정 간격을 유지하도록 구성된다.The centering unit 50 is configured to maintain the tray 20 and the first and second carrier parts 21 and 22 with the rail 11 at a predetermined distance by using a permanent magnet.
실시예에 따르면, 상기 센터링 유닛(50)은 트레이(20)의 가이드 홈(20h) 내부 양측면 즉, 제1,2캐리어부(21,22)의 대향된 면에 구비된 한 쌍의 제1센터링 영구자석(51,52)과, 제1센터링 자석들(51,52)과 대향되도록 레일의 양측면에 구비된 한 쌍의 제2센터링 영구자석(53,54)으로 구성되고, 제1,2센터링 영구자석들(51~54)은 동일한 극성을 가지도록 구성될 수 있다. According to an embodiment, the centering unit 50 has a pair of first centering rings provided on both sides of the guide groove 20h of the tray 20, that is, on opposite surfaces of the first and second carrier parts 21 and 22. It consists of a permanent magnet (51, 52), a pair of second centering permanent magnets (53, 54) provided on both sides of the rail to face the first centering magnets (51, 52), the first, second center ring The permanent magnets 51 to 54 may be configured to have the same polarity.
네 개의 제1센터링 영구자석(51,52,51',52')이 제1,2캐리어부(21,22)의 대향된 면 상/하측에 구비될 수 있고, 네 개의 제2센터링 영구자석들(53,54,53',54')이 레일(11)의 양측면 상/하측에 구비될 수 있다. Four first centering permanent magnets 51, 52, 51 ′, 52 ′ may be provided on the upper and lower sides of the first and second carrier parts 21 and 22 and four second centering permanent magnets may be provided. Fields 53, 54, 53 ′, 54 ′ may be provided on both sides of the rail 11.
또한, 상기 센터링 유닛(50)은 트레이(20)의 가이드 홈(20h) 내부 상면 즉, 트레이(20)의 하면에 소정 간격을 두고 구비된 한 쌍의 제3센터링 영구자석(55,56)과, 제3센터링 영구자석들(55,56) 사이에 위치되도록 레일(11)의 상면에 구비된 제4센터링 영구자석(57)을 더 포함하도록 구성되고, 제3,4센터링 영구자석들(55~57)은 동일한 극성을 가지도록 구성될 수 있다.In addition, the centering unit 50 may include a pair of third centering permanent magnets 55 and 56 provided at predetermined intervals on the upper surface of the guide groove 20h of the tray 20, that is, the lower surface of the tray 20. And a fourth centering permanent magnet 57 provided on the upper surface of the rail 11 to be positioned between the third centering permanent magnets 55 and 56, and the third and fourth centering permanent magnets 55. 57 may be configured to have the same polarity.
제1,2센터링 영구자석들(51~54,51'~54') 사이에 척력이 작용하면, 제1,2캐리어부(21,22)가 레일(11)을 중심으로 양측 방향으로 소정 간격을 유지할 수 있고, 제3,4센터링 영구자석들(55~57) 사이에 척력이 작용하면, 트레이(20)가 레일(11)을 중심으로 상측 방향으로 소정 간격을 유지할 수 및 있다. When the repulsive force is applied between the first and second centering permanent magnets 51 to 54, 51 'to 54', the first and second carrier parts 21 and 22 are spaced in both directions about the rail 11 at predetermined intervals. When the repulsive force is applied between the third and fourth centering permanent magnets 55 to 57, the tray 20 may maintain a predetermined interval in an upward direction about the rail 11.
상기와 같이 구성된 자기 부상 방식의 이동 장치의 동작을 살펴보면, 다음과 같다. Looking at the operation of the magnetic levitated mobile device configured as described above, as follows.
제1,2부상용 영구자석들(31~34) 사이에 척력이 작용하고, 그에 따라 제1부상용 영구자석들(31,32)이 장착된 제1,2캐리어(21,22)가 제2부상용 영구자석들(33,34)이 장착된 레일 베이스(10)로부터 부상되고, 트레이(20) 역시 레일(11)로부터 부상된 상태를 유지한다. The repulsive force acts between the first and second permanent magnets 31 to 34, and thus the first and second carriers 21 and 22 on which the first permanent magnets 31 and 32 are mounted are formed. The two floating permanent magnets 33 and 34 are lifted from the mounted rail base 10, and the tray 20 also remains lifted from the rail 11.
제1,2센터링 영구자석들(51~54.51'~54') 사이에 척력이 작용하고, 그에 따라 제1센터링 영구자석들(51,52,51',52')이 장착된 제1,2캐리어(21,22)가 제2센터링 영구자석들(53,54,53',54')이 장착된 레일(11)의 양측면으로부터 소정 간격을 이격된 상태를 유지한다. Repulsive force acts between the first and second centering permanent magnets 51 to 54.51 'to 54', and thus the first and second centering permanent magnets 51, 52, 51 'and 52' are mounted. The carriers 21 and 22 maintain a predetermined distance from both sides of the rail 11 on which the second centering permanent magnets 53, 54, 53 ′ and 54 ′ are mounted.
제3,4센터링 영구자석들(55~57) 사이에 척력이 작용하고, 그에 따라 제3센터링 영구자석들(55,56)이 장착된 트레이(20)가 제4센터링 영구자석(57)이 장착된 레일(11)의 상면으로부터 소정 간격 이격될 뿐 아니라 센터링 상태를 유지한다.The repulsive force acts between the third and fourth centering permanent magnets 55 to 57, so that the tray 20 on which the third centering permanent magnets 55 and 56 are mounted is the fourth centering permanent magnet 57. In addition to being spaced apart from the upper surface of the mounted rail 11 by a predetermined distance to maintain the centering state.
이와 같이, 영구자석들에 의해 트레이(20)가 레일 베이스(10) 위에 부상될 뿐 아니라 센터링된 상태를 유지할 수 있다.As such, the tray 20 may not only be lifted on the rail base 10 by the permanent magnets, but may also remain centered.
또한, 구동 모터(45)가 작동되면, 회전축(43)과 피니언 자석들(44)이 회전되고, 제1,2랙 자석(41,42)과 피니언 자석들(44) 사이에 인력과 척력이 교대로 작용되고, 제1,2랙 자석(41,42)이 레일(11)의 길이 방향으로 이동된다. In addition, when the driving motor 45 is operated, the rotating shaft 43 and the pinion magnets 44 are rotated, and the attraction and repulsive force are applied between the first and second rack magnets 41 and 42 and the pinion magnets 44. Acting alternately, the first and second rack magnets 41 and 42 are moved in the longitudinal direction of the rail 11.
따라서, 제1,2랙 자석(41,42)이 장착된 제1,2캐리어(21,22) 및 이와 연결된 트레이(20)가 레일(11)과 비접속 상태로 레일(11)의 길이 방향을 따라 이송될 수 있다. Accordingly, the first and second carriers 21 and 22 on which the first and second rack magnets 41 and 42 and the tray 20 connected thereto are not connected to the rail 11 in the longitudinal direction of the rail 11. Can be transported along.
도 5는 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 정전기 방지부의 제1실시예가 적용된 사시도이다.5 is a perspective view to which the first embodiment of the antistatic part is applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
본 발명에 따른 자기 부상 방식의 이송장치는 트레이의 정전기를 제거하기 위하여 복수개의 접촉식 롤러(61)가 구비될 수 있는데, 접촉식 롤러들(61)은 트레이(20)와 제1,2캐리어부(21,22)와 접촉 가능한 위치에 다양하게 위치될 수 있으며, 한정되지 아니한다.The magnetically levitated conveying apparatus according to the present invention may be provided with a plurality of contact rollers 61 to remove static electricity from the trays. The contact rollers 61 may include the tray 20 and the first and second carriers. It may be located in various positions in contact with the parts (21, 22), but is not limited.
일예로, 접촉식 롤러들(61)은 레일(11)의 양측면에 돌출된 상태로 회전 가능하게 구비되고, 레일(11)의 길이 방향으로 소정 간격을 두고 구비될 수 있다.For example, the contact rollers 61 may be rotatably provided on both sides of the rail 11, and may be provided at predetermined intervals in the longitudinal direction of the rail 11.
트레이(20)와 제1,2캐리어부(21,22)가 이동하는 동안, 접촉식 롤러들(61) 중 일부가 상시 제1,2캐리어부(21,22)와 접촉하도록 구성할 수 있다. 또한, 외부로부터 충격이 가해지는 경우에 한정하여 접촉식 롤러들(61) 중 일부가 제1,2캐리어부(21,22)와 접촉하도록 구성할 수도 있다. While the tray 20 and the first and second carrier parts 21 and 22 are moved, some of the contact rollers 61 may be configured to contact the first and second carrier parts 21 and 22 at all times. . In addition, only when the impact is applied from the outside, some of the contact rollers 61 may be configured to contact the first and second carrier parts 21 and 22.
트레이(20)와 제1,2캐리어부(21,22)는 금속 재질이고, 접촉식 롤러들(61)도 금속 재질로 구성되며, 접촉식 롤러들(61)이 접지하도록 구성할 수 있다.The tray 20 and the first and second carrier parts 21 and 22 may be made of metal, and the contact rollers 61 may be made of a metal material, and the contact rollers 61 may be grounded.
기판(P)과 트레이(20) 및 제1,2캐리어부(21,22)에 정전기가 발생되면, 분진, 불순물 등이 기판(P)에 포집될 수 있다. 하지만, 제1,2캐리어부(21,22)가 접촉식 롤러들(61)와 접촉하면, 접촉식 롤러들(61)이 기판(P)과 트레이(20) 및 제1,2캐리어부(21,22)로부터 정전기를 흡수하고, 정전기로 인한 기판(P)의 오염을 효과적으로 방지할 수 있다. When static electricity is generated in the substrate P, the tray 20, and the first and second carrier parts 21 and 22, dust, impurities, and the like may be collected in the substrate P. However, when the first and second carrier parts 21 and 22 are in contact with the contact rollers 61, the contact rollers 61 are connected to the substrate P, the tray 20, and the first and second carrier parts ( 21 and 22, it is possible to absorb static electricity and effectively prevent contamination of the substrate P due to static electricity.
도 6은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 정전기 방지부의 제2실시예가 적용된 사시도이다.6 is a perspective view in which a second embodiment of the antistatic unit is applied to a magnetic levitation transfer apparatus according to an embodiment of the present invention.
본 발명에 따른 자기 부상 방식의 이송장치는 트레이의 정전기를 제거하기 위하여 비접촉식 와이어(62)가 구비될 수 있는데, 비접촉식 와이어(62)는 트레이(20)와 제1,2캐리어부(21,22)와 근접한 위치에 다양하게 위치될 수 있으며, 정전기 방지 효과를 높이기 위하여 복수개가 구비될 수 있으나, 한정되지 아니한다.The magnetic levitation transfer apparatus according to the present invention may be provided with a non-contact wire 62 to remove the static electricity of the tray, the non-contact wire 62 is the tray 20 and the first and second carrier parts (21, 22) It may be located in a variety of locations close to the), and may be provided with a plurality in order to increase the antistatic effect, but is not limited.
일예로, 비접촉식 와이어(62)는 레일 베이스(10) 또는 레일(11)에 길이 방향으로 길게 구비될 수 있으며, 비접촉식 와이어(62)는 제1,2캐리어부(21,22) 중 적어도 하나와 2cm 이내의 간격을 유지하도록 설치될 수 있다.For example, the non-contact wire 62 may be provided in the rail base 10 or the rail 11 in the longitudinal direction, and the non-contact wire 62 may be at least one of the first and second carrier parts 21 and 22. It can be installed to maintain the spacing within 2cm.
비접촉식 와이어(62)는 와이어에 마이크로 화이바가 감긴 형태로서, 마이크로 화이바의 수많은 전기 전도 포인트가 정전기를 흡수하여 접지하도록 구성할 수 있다. The non-contact wire 62 is a form in which a microfiber is wound around the wire, and a plurality of electrical conduction points of the microfiber may be configured to absorb and ground static electricity.
기판(P)과 트레이(20) 및 제1,2캐리어부(21,22)에 정전기가 발생되더라도 트레이(20)와 제1,2캐리어부(21,22)가 이송되면, 비접촉식 와이어(62)가 기판(P)과 트레이(20) 및 제1,2캐리어부(21,22)로부터 정전기를 흡수하고, 정전기로 인한 기판(P)의 오염을 효과적으로 방지할 수 있다. Even if static electricity is generated in the substrate P, the tray 20, and the first and second carrier parts 21 and 22, when the tray 20 and the first and second carrier parts 21 and 22 are transferred, the non-contact wire 62 ) Absorbs static electricity from the substrate P, the tray 20, and the first and second carrier parts 21 and 22, and effectively prevents contamination of the substrate P due to static electricity.
도 7 내지 도 10은 본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치에 적용된 자기 부상 유닛과 센터링 유닛의 다양한 실시예가 도시된 정면도이다.7 to 10 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to an embodiment of the present invention.
본 발명의 일 실시예에 따른 자기 부상 방식의 이송장치는 접촉식 또는 비접촉식 정전기 제거부가 적용된 구성으로서, 자기 부상 유닛과 센터링 유닛을 다양하게 구성할 수 있다. The magnetic levitation type conveying apparatus according to an embodiment of the present invention has a configuration in which a contact or non-contact electrostatic eliminator is applied, and may variously configure the magnetic levitation unit and the centering unit.
도 7에 도시된 바와 같이, 자기 부상 유닛(130)은 트레이(20)와 레일(11)의 서로 대향된 면에 구비된 제1,2부상용 영구자석들(131~134)로 구성되고, 제1,2부상용 영구자석들(131~134)은 서로 척력이 작용할 수 있도록 동일한 극성을 가지도록 구성될 수 있다.As shown in FIG. 7, the magnetic levitation unit 130 includes first and second floating permanent magnets 131 to 134 provided on opposite surfaces of the tray 20 and the rail 11. The first and second floating permanent magnets 131 to 134 may be configured to have the same polarity so that the repulsive force may act on each other.
적어도 두 개 이상의 제1부상용 영구자석(131,132)은 트레이(20)의 하면에 소정 간격을 두고 구비되고, 적어도 두 개 이상의 제2부상용 영구자석(133,134)은 레일(11)의 상면에 소정 간격을 두고 구비되며, 제1,2부상용 영구자석(131~134)의 개수가 늘어날수록 안정적으로 트레이(20)를 레일(11)로부터 부상시킬 수 있다.At least two or more first floating permanent magnets 131 and 132 are provided on the lower surface of the tray 20 at predetermined intervals, and at least two or more second floating permanent magnets 133 and 134 are disposed on the upper surface of the rail 11. It is provided at intervals, and as the number of first and second permanent magnets 131 to 134 increases, the tray 20 may be stably lifted from the rails 11.
동일한 극성의 제1,2부상용 영구자석들(131~134) 사이에 척력이 작용하면, 제1부상용 영구자석들(131,132)이 장착된 트레이(20)를 제2부상용 영구자석들(133,134)이 장착된 레일(11)로부터 부상시키고, 트레이(20)와 레일(11) 사이의 상하 간격을 균일하게 유지할 수 있다.When repulsive force is applied between the first and second floating permanent magnets 131 to 134 of the same polarity, the tray 20 on which the first floating permanent magnets 131 and 132 are mounted may be replaced with the second floating permanent magnets ( It is possible to float from the rail 11 on which the 133 and 134 are mounted, and maintain the vertical gap between the tray 20 and the rail 11 uniformly.
제1,2부상용 영구자석(131~1340이 제1,2캐리어(21,22) 내부에 배치됨으로서, 외부의 열이나 자기장으로부터 보호할 수 있고, 감자 현상을 방지하여 작동 신뢰성을 높일 수 있다. Since the first and second floating permanent magnets 131 to 1340 are disposed inside the first and second carriers 21 and 22, the first and second floating permanent magnets 131 to 1340 may be protected from external heat or magnetic fields, and the operation reliability may be improved by preventing potato phenomenon. .
또한, 센터링 유닛(150)은 제1,2캐리어(21,22)와 레일(11)의 서로 대향된 면에 구비된 제1,2센터링 영구자석들(151~154)으로 구성되고, 제1,2센터링 영구자석들(151~154)은 서로 인력이 작용할 수 있도록 다른 극성을 가지도록 구성될 수 있다.In addition, the centering unit 150 is composed of first and second centering permanent magnets 151 to 154 provided on opposite surfaces of the first and second carriers 21 and 22 and the rail 11, and the first , 2 centering permanent magnets (151 ~ 154) may be configured to have a different polarity so that the attraction force to each other.
한 쌍의 제1센터링 영구자석(151,152)은 제1,2캐리어부(21,22)의 대향된 면에 구비되고, 한 쌍의 제2센터링 영구자석(153,154)은 레일(11)의 양측면에 구비되며, 제1,2센터링 영구자석들(151~154)의 자력은 동일하게 구성될 수 있다.The pair of first centering permanent magnets 151 and 152 are provided on opposite surfaces of the first and second carrier parts 21 and 22, and the pair of second centering permanent magnets 153 and 154 are provided on both sides of the rail 11. The magnetic force of the first and second centering permanent magnets 151 to 154 may be identically configured.
다른 극성의 제1,2센터링 영구자석들(151~154) 사이에 인력이 작용하면, 레일(11)을 중심으로 양측의 제1,2캐리어부(21,22)에서 동일한 크기의 인력이 작용하고, 레일(11)과 제1,2캐리어부(21,22) 사이의 간격을 균일하게 유지함으로서, 트레이(20)를 레일(11)의 중심에 위치시킬 수 있다. When the attraction force is applied between the first and second centering permanent magnets 151 to 154 having different polarities, the attraction force of the same size is applied to the first and second carrier portions 21 and 22 on both sides of the rail 11. In addition, the tray 20 can be positioned at the center of the rail 11 by keeping the distance between the rail 11 and the first and second carrier parts 21 and 22 uniform.
한편, 한 쌍의 이탈 방지용 롤러(71,72)가 레일(11)의 양측면에 구비될 수 있는데, 자기 부상 유닛(130)과 인접한 레일(11)의 양측면 상부에 구비될 수 있다.Meanwhile, a pair of separation preventing rollers 71 and 72 may be provided at both sides of the rail 11, and may be provided at both upper sides of the rail 11 adjacent to the magnetic levitation unit 130.
외부 충격으로 트레이(20)와 제1,2캐리어부(21,22)가 흔들리면, 제1,2캐리어부(21,22)가 이탈 방지용 롤러들(71,72)에 부딪혀 과도하게 이탈되는 것을 방지할 수 있다. 또한, 자기 부상 유닛(130)과 센터링 유닛(150)에 포함된 영구자석들의 자력이 작용하면, 트레이(20)와 제1,2캐리어부(21,22)가 레일(11)을 중심으로 원위치로 복귀될 수 있다.When the tray 20 and the first and second carrier parts 21 and 22 are shaken due to an external impact, the first and second carrier parts 21 and 22 collide with the release preventing rollers 71 and 72 so that they are excessively separated. It can prevent. In addition, when the magnetic force of the permanent magnets included in the magnetic levitation unit 130 and the centering unit 150 is applied, the tray 20 and the first and second carrier parts 21 and 22 are in the original position with respect to the rail 11. Can be returned to.
도 8에 도시된 바와 같이, 자기 부상 유닛(30)은 제1,2캐리어부(21,22)와 레일 베이스(10) 사이에 구비된 제1,2부상용 영구자석들(31~34)로 구성되고, 한 쌍의 이탈 방지용 롤러(171,172)는 자기 부상 유닛(30)과 인접한 레일(11)의 양측면 하부에 구비될 수 있다.As shown in FIG. 8, the magnetic levitation unit 30 includes first and second floating permanent magnets 31 to 34 provided between the first and second carrier parts 21 and 22 and the rail base 10. The pair of separation prevention rollers 171 and 172 may be provided at both lower sides of the rail 11 adjacent to the magnetic levitation unit 30.
또한, 센터링 유닛(250)은 제1,2캐리어(21,22)와 레일(11)의 서로 대향된 면에 구비된 제1,2,3센터링 영구자석들(251~256)과, 트레이(20)와 레일(11)의 서로 대향된 면에 구비된 제5,6센터링 영구자석들(257,258)로 구성될 수 있다.In addition, the centering unit 250 may include first, second and third centering permanent magnets 251 to 256 provided on opposite surfaces of the first and second carriers 21 and 22 and the rails 11, and a tray ( 20 and the fifth and sixth centering permanent magnets 257 and 258 provided on opposite surfaces of the rail 11.
한 쌍의 제1센터링 영구자석(251,252)은 제1,2캐리어부(21,22)의 대향된 면에 구비되고, 한 쌍의 제2센터링 영구자석(253,254)은 레일(11)의 양측면에 구비되며, 제1,2센터링 영구자석들(251~254)은 서로 인력이 작용하도록 다른 극성을 가지도록 구성될 수 있다. 물론, 제1,2센터링 영구자석들(251~254)의 자력은 동일하게 구성될 수 있다. A pair of first centering permanent magnets 251 and 252 are provided on opposite surfaces of the first and second carrier parts 21 and 22, and a pair of second centering permanent magnets 253 and 254 are provided on both sides of the rail 11. The first and second centering permanent magnets 251 to 254 may be configured to have different polarities so that the attraction force acts on each other. Of course, the magnetic forces of the first and second centering permanent magnets 251 to 254 may be configured in the same manner.
한 쌍의 제3센터링 영구자석(255,256)은 제1,2캐리어부의 대향된 면에 구비되는데, 제2센터링 영구자석들(253,254)과 근접하도록 제1센터링 영구자석들(251,252)의 하측에 위치하며, 제2,3영구자석들(253~256)은 서로 척력이 작용하도록 동일한 극성을 가지도록 구성될 수 있다.A pair of third centering permanent magnets (255, 256) is provided on the opposite side of the first and second carrier portion, located below the first centering permanent magnets (251, 252) so as to be close to the second centering permanent magnets (253, 254) The second and third permanent magnets 253 to 256 may be configured to have the same polarity so that the repulsive force acts on each other.
제5센터링 영구자석(257)은 트레이(20)의 하면 중심에 구비되고, 제6센터링 영구자석(258)은 레일(11)의 상면 중심에 구비되며, 제5,6센터링 영구자석들(257,258)은 서로 인력이 작용하도록 다른 극성을 가지도록 구성될 수 있다.The fifth centering permanent magnet 257 is provided in the center of the lower surface of the tray 20, the sixth centering permanent magnet 258 is provided in the center of the upper surface of the rail 11, the fifth, sixth centering permanent magnets (257,258). ) May be configured to have different polarities so that attractive forces act on each other.
제6센터링 영구자석(258)은 도 9에 도시된 바와 같이 강자성체인 요크(258')로 구성될 수 있으며, 요크의 중앙 부분이 돌출된 형상으로 구성하여 자력을 중심에 더욱 집중시킬 수 있다.As shown in FIG. 9, the sixth centering permanent magnet 258 may be configured as a yoke 258 ′ which is a ferromagnetic material, and the central portion of the yoke may be configured to protrude to further concentrate the magnetic force in the center.
이와 같이 구성된 센터링 유닛(250)의 작동을 살펴보면, 다른 극성의 제1,2영구자석들(251~254) 사이에 인력이 작용하고, 다른 극성의 제5,6영구자석들(257,258) 사이에 인력이 작용한다. Looking at the operation of the centering unit 250 configured as described above, the attraction between the first and second permanent magnets 251 ~ 254 of different polarity, and between the fifth and sixth permanent magnets (257,258) of different polarity Attraction is working.
따라서, 레일(11)의 양측면과 제1,2캐리어부(21,22) 사이의 간격과 레일(11)의 상면과 트레이(20) 사이의 간격을 균일하게 유지할 수 있고, 트레이(20)가 레일(11)의 양측 방향으로 틀어지는 것을 방지하는 동시에 레일(11)의 중심에 위치하도록 한다.Accordingly, the distance between both sides of the rail 11 and the first and second carrier parts 21 and 22 and the distance between the upper surface of the rail 11 and the tray 20 can be maintained uniformly. The rail 11 is prevented from twisting in both directions, and at the same time positioned at the center of the rail 11.
또한, 동일한 극성의 제2,3영구자석들(253~256) 사이에 척력이 작용하면, 제1,2캐리어부(21,22)의 처짐을 방지하여 제1,2영구자석들(251~254) 사이의 인력 또는 제5,6영구자석들(257,258) 사이의 인력이 안정적으로 작용할 수 있도록 한다.In addition, when a repulsive force is applied between the second and third permanent magnets 253 to 256 of the same polarity, the first and second permanent magnets 251 ˜˜ may be prevented by sagging of the first and second carrier parts 21 and 22. The attraction between 254 or the attraction between the fifth and sixth permanent magnets 257 and 258 can be stably acted.
도 10에 도시된 바와 같이, 적어도 두 개 이상의 제5센터링 영구자석(257a,257b)이 트레이(20)의 하면에 소정 간격을 두고 구비되고, 적어도 하나 이상의 제6센터링 영구자석(258)이 제5센터링 영구자석들(257a,257b) 사이에 위치하도록 레일(11)의 상면에 구비되며, 제5,6센터링 영구자석들(257a,257b,258)은 서로 척력이 작용하도록 동일한 극성을 가지도록 구성될 수 있다.As shown in FIG. 10, at least two or more fifth centering permanent magnets 257a and 257b are provided on the bottom surface of the tray 20 at predetermined intervals, and at least one sixth centering permanent magnet 258 is provided. It is provided on the upper surface of the rail 11 so as to be located between the five centering permanent magnets (257a, 257b), the fifth and sixth centering permanent magnets (257a, 257b, 258) to have the same polarity so that the repulsive force to each other Can be configured.
이와 같이 구성된 센터링 유닛(250)의 작동을 살펴보면, 다른 극성의 제1,2영구자석들(251~254) 사이에 인력이 작용하기 때문에 레일(11)의 양측면과 제1,2캐리어부(21,22) 사이의 간격을 균일하게 유지하고, 트레이(20)가 레일(11)의 중심에 위치하도록 한다.Referring to the operation of the centering unit 250 configured as described above, since the attraction force between the first and second permanent magnets 251 to 254 of different polarity, both sides of the rail 11 and the first and second carrier portions 21. The spacing between and 22 is kept even, and the tray 20 is positioned at the center of the rail 11.
또한, 동일한 극성의 제5,6영구자석들(257a,257b,258) 사이에 척력이 작용하기 때문에 안정적으로 레일(11)의 상면과 트레이(20) 사이의 간격을 균일하게 유지하고, 트레이(20)에 추가적인 부상력을 제공하여 중량이 무거운 기판이 올려지더라도 트레이(20)를 레일(11)로부터 안정적으로 부상시킬 수 있다. In addition, since the repulsive force acts between the fifth and sixth permanent magnets 257a, 257b, and 258 of the same polarity, the gap between the upper surface of the rail 11 and the tray 20 is stably maintained, and the tray ( By providing an additional flotation force to 20), even if a heavy substrate is placed, the tray 20 can be stably lifted from the rail 11.
도 11은 본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치가 도시된 정면도이다.11 is a front view showing a magnetic levitation transfer apparatus according to another embodiment of the present invention.
본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치는 일 실시예와 동일하게 구성되고, 외부의 열을 차단할 뿐 아니라 영구자석들의 자기장을 차폐할 수 있는 챔버(C)가 추가로 적용된다.The magnetically levitated conveying apparatus according to another embodiment of the present invention is configured in the same manner as in one embodiment, and a chamber (C) that can block external heat as well as shield magnetic fields of permanent magnets is additionally applied.
챔버(C)는 트레이(20)에 안착된 기판이 노출되는 홀(h)이 상면에 구비되고, 레일 베이스(10) 상측에 트레이(20)와 자기 부상 유닛(30)과 자기 이송 유닛(40) 및 센터링 유닛(250)을 차폐시키도록 설치될 수 있다.The chamber C is provided with a hole h on the upper surface of which the substrate seated on the tray 20 is exposed, and the tray 20, the magnetic levitating unit 30, and the magnetic conveying unit 40 above the rail base 10. ) And the centering unit 250 may be installed.
고온 환경 하에서 사용되면, 챔버가 외부의 열을 차단하여 자기 부상 유닛(30)과 자기 이송 유닛(40) 및 센터링 유닛(50)에 포함된 영구자석들을 보호하고, 영구자석들이 안정적으로 작동하도록 하여 작동 신뢰성을 높일 수 있다.When used in a high temperature environment, the chamber blocks external heat to protect the permanent magnets contained in the magnetically levitated unit 30, the magnetic transfer unit 40 and the centering unit 50, and the permanent magnets operate stably. Operational reliability can be increased.
또한, 한 쌍의 이탈 방지용 롤러(271,272)가 챔버(C)의 내부 상면 양측에 구비될 수 있다. In addition, a pair of separation prevention rollers 271 and 272 may be provided on both sides of the inner upper surface of the chamber (C).
외부의 상하 방향 충격이 가해진 경우, 이탈 방지용 롤러(271,272)가 트레이(20) 또는 제1,2캐리어부(21,22)와 접촉하여 트레이(20)가 과도하게 이탈되는 것을 방지할 수 있다.When an external vertical impact is applied, the separation preventing rollers 271 and 272 may contact the tray 20 or the first and second carrier parts 21 and 22 to prevent the tray 20 from being excessively separated.
다른 구성 요소들은 상기의 실시예에서 설명한 바와 동일하여, 자세한 설명은 생략하기로 한다. Other components are the same as described in the above embodiment, and detailed description thereof will be omitted.
도 12 내지 도 15는 본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치에 적용된 자기 부상 유닛과 센터링 유닛의 다양한 실시예가 도시된 정면도이다.12 to 15 are front views showing various embodiments of the magnetic levitation unit and the centering unit applied to the magnetic levitation transfer apparatus according to another embodiment of the present invention.
본 발명의 다른 실시예에 따른 자기 부상 방식의 이송장치는 영구자석들을 보호하는 챔버가 적용된 구성으로서, 자기 부상 유닛과 센터링 유닛을 다양하게 구성할 수 있다. The magnetic levitation type conveying apparatus according to another embodiment of the present invention is a configuration in which a chamber for protecting permanent magnets is applied, and the magnetic levitation unit and the centering unit may be variously configured.
도 12 내지 도 15에 도시된 자기 부상 유닛과 센터링 유닛은 도 7 내지 도 11에 도시된 것과 대응된 구성으로서, 동일한 작동과 효과를 나타내며, 자세한 설명은 생략하기로 한다.The magnetic levitation unit and the centering unit illustrated in FIGS. 12 to 15 are configurations corresponding to those illustrated in FIGS. 7 to 11, and exhibit the same operations and effects, and detailed descriptions thereof will be omitted.

Claims (19)

  1. 기판이 상부에 안착되고, 가이드 홈이 하부에 구비된 트레이;A tray having a substrate seated thereon and a guide groove disposed below;
    상기 트레이의 가이드 홈에 수용되는 레일이 상면에 구비된 레일 베이스;A rail base provided on an upper surface of the rail accommodated in the guide groove of the tray;
    상기 트레이와 레일 베이스 또는 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일 베이스로부터 부상시키는 영구자석들로 구성된 자기 부상 유닛; A magnetic levitation unit provided between the tray and the rail base or the rail, the magnetic levitation unit comprising permanent magnets for floating the tray from the rail base by magnetic force;
    상기 트레이와 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일을 따라 이송시키는 영구자석들로 구성된 자기 이송 유닛;A magnetic conveying unit provided between the tray and the rail, the magnetic conveying unit comprising permanent magnets for conveying the tray along the rail by magnetic force;
    상기 트레이와 레일 사이에 구비되고, 상기 트레이를 자력에 의해 상기 레일과 소정 간격을 유지시키는 영구자석들로 구성된 센터링 유닛; 및A centering unit provided between the tray and the rail, the centering unit comprising permanent magnets for maintaining the tray at a predetermined distance from the rail by magnetic force; And
    상기 트레이와 인접하게 구비되고, 상기 트레이에 충전된 전자를 방출시키는 정전기 방지부(anti-static part);를 포함하는 자기 부상 방식의 이송장치.And an anti-static part provided adjacent to the tray and discharging the electrons charged in the tray.
  2. 제1항에 있어서,The method of claim 1,
    상기 자기 부상 유닛은,The magnetic levitation unit,
    상기 트레이의 하부 양측에 구비된 한 쌍의 제1부상용 영구자석과, A pair of first floating permanent magnets provided at both lower sides of the tray;
    상기 제1부상용 영구자석들과 대향되도록 상기 레일 베이스의 상면에 상기 트레이의 이동 방향을 따라 길게 구비된 한 쌍의 제2부상용 영구자석을 포함하고,And a pair of second floating permanent magnets provided on the upper surface of the rail base so as to face the first floating permanent magnets in a moving direction of the tray.
    상기 제1,2부상용 영구자석들은 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.The first and second floating permanent magnets are configured to have the same polarity of the magnetic lifting type transfer device.
  3. 제1항에 있어서,The method of claim 1,
    상기 자기 부상 유닛은,The magnetic levitation unit,
    상기 트레이의 가이드 홈 내부 상면에 구비된 적어도 두 개 이상의 제1부상용 영구자석과,At least two or more first permanent magnets provided on the upper surface of the guide groove of the tray;
    상기 제1부상용 영구자석들과 대향되도록 상기 레일의 상면에 상기 트레이의 이동 방향을 따라 길게 구비된 적어도 두 개 이상의 제2부상용 영구자석을 더 포함하고,Further comprising at least two or more second floating permanent magnets provided along the moving direction of the tray on the upper surface of the rail so as to face the first floating permanent magnets,
    상기 제1,2센터링 영구자석들은 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.And the first and second centering permanent magnets are configured to have the same polarity.
  4. 제1항에 있어서,The method of claim 1,
    상기 자기 이송 유닛은,The magnetic transfer unit,
    상기 트레이의 가이드 홈 내측면에 대향되게 구비되고, 다른 극성의 영구자석들이 교번하여 배열된 한 쌍의 랙 자석과,A pair of rack magnets provided opposite the inner side of the guide groove of the tray and arranged with alternating permanent magnets of different polarity;
    상기 랙 자석들 사이에 위치하고, 상기 레일의 중심에 길게 배열된 회전축과,A rotating shaft positioned between the rack magnets and arranged long in the center of the rail;
    상기 회전축을 따라 일정 간격을 두고 설치되고, 다른 극성의 영구자석들이 교번하여 배열된 복수개의 피니언 자석과,A plurality of pinion magnets installed at predetermined intervals along the rotation axis and arranged with alternating permanent magnets of different polarities;
    상기 회전축을 회전시키는 구동 모터를 포함하는 자기 부상 방식의 이송 장치.Magnetic levitation transfer device including a drive motor for rotating the rotary shaft.
  5. 제1항에 있어서,The method of claim 1,
    상기 센터링 유닛은, The centering unit,
    상기 트레이의 가이드 홈 내부 양측면에 대향되게 구비된 한 쌍의 제1센터링 영구자석과,A pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray;
    상기 제1센터링 자석들과 대향되도록 상기 레일의 양측면에 구비된 한 쌍의 제2센터링 영구자석과,A pair of second centering permanent magnets provided on both sides of the rail to face the first centering magnets;
    상기 제1,2센터링 영구자석은 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.The first and second centering permanent magnets are configured to have the same polarity magnetic levitation type transfer device.
  6. 제5항에 있어서,The method of claim 5,
    상기 센터링 유닛은,The centering unit,
    상기 트레이의 가이드 홈 내부 상면에 소정 간격을 두고 구비된 적어도 두 개 이상의 제3센터링 영구자석과,At least two or more third centering permanent magnets provided on the upper surface of the guide groove of the tray at predetermined intervals;
    상기 제3센터링 영구자석들 사이에 위치되도록 상기 레일의 상면에 구비된 적어도 하나 이상의 제4센터링 자석을 더 포함하고,Further comprising at least one fourth centering magnet provided on the upper surface of the rail to be located between the third centering permanent magnets,
    상기 제3,4센터링 영구자석은 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.And the third and fourth centering permanent magnets are configured to have the same polarity.
  7. 제1항에 있어서,The method of claim 1,
    상기 센터링 유닛은, The centering unit,
    상기 트레이의 가이드 홈 내부 양측면에 대향되게 구비된 한 쌍의 제1센터링 영구자석과,A pair of first centering permanent magnets provided opposite to both sides of the guide groove of the tray;
    상기 제1센터링 자석들과 대향되도록 상기 레일의 양측면에 구비된 한 쌍의 제2센터링 영구자석과,A pair of second centering permanent magnets provided on both sides of the rail to face the first centering magnets;
    상기 제1,2센터링 영구자석은 서로 다른 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.The first and second centering permanent magnets are configured to have a different polarity of the magnetic levitation type transfer device.
  8. 제7항에 있어서,The method of claim 7, wherein
    상기 센터링 유닛은,The centering unit,
    상기 제2센터링 영구자석들과 인접하도록 상기 제1센터링 영구자석들 하측에 구비된 한 쌍의 제3센터링 영구자석을 더 포함하고,And a pair of third centering permanent magnets provided below the first centering permanent magnets so as to be adjacent to the second centering permanent magnets.
    상기 제3센터링 영구자석은 상기 제2센터링 영구자석과 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.And the third centering permanent magnet is configured to have the same polarity as the second centering permanent magnet.
  9. 제8항에 있어서,The method of claim 8,
    상기 센터링 유닛은,The centering unit,
    상기 트레이의 가이드 홈 내부 상면에 구비된 제4센터링 영구자석과,A fourth centering permanent magnet provided on the upper surface of the guide groove of the tray;
    상기 제4센터링 영구자석과 대향되도록 상기 레일의 상면에 구비된 제5센터링 영구자석을 더 포함하고,Further comprising a fifth centering permanent magnet provided on the upper surface of the rail so as to face the fourth centering permanent magnet,
    상기 제4,5센터링 영구자석은 서로 다른 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.The fourth and fifth centering permanent magnet is a magnetic levitation transfer device is configured to have a different polarity.
  10. 제11항에 있어서,The method of claim 11,
    상기 제5센터링 영구자석은,The fifth centering permanent magnet,
    요크 자석으로 구성되는 자기 부상 방식의 이송 장치.Magnetically levitated conveying device composed of yoke magnet.
  11. 제8항에 있어서,The method of claim 8,
    상기 센터링 유닛은,The centering unit,
    상기 트레이의 가이드 홈 내부 상면에 소정 간격을 두고 구비된 적어도 두 개 이상의 제4센터링 영구자석과,At least two or more fourth centering permanent magnets provided on the upper surface of the guide groove of the tray at predetermined intervals;
    상기 제4센터링 영구자석들 사이에 위치되도록 상기 레일의 상면에 구비된 적어도 하나 이상의 제5센터링 자석을 더 포함하고,Further comprising at least one fifth centering magnet provided on the upper surface of the rail so as to be located between the fourth centering permanent magnets,
    상기 제4,5센터링 영구자석은 동일한 극성을 가지도록 구성되는 자기 부상 방식의 이송 장치.And the fourth and fifth centering permanent magnets are configured to have the same polarity.
  12. 제1항에 있어서,The method of claim 1,
    상기 정전기 방지부는,The antistatic part,
    상기 레일의 양측면 중 적어도 일측에 구비되고, 상기 트레이와 접촉될 수 있는 금속 부재로 구성되는 자기 부상 방식의 이송 장치. A magnetic levitation type transfer apparatus provided on at least one side of both sides of the rail and composed of a metal member that can be in contact with the tray.
  13. 제12항에 있어서,The method of claim 12,
    상기 정전기 방지부는,The antistatic part,
    상기 트레이를 이송 방향으로 안내하는 롤러 형태로 구성되는 자기 부상 방식의 이송 장치.Magnetic levitation conveying device configured in the form of a roller for guiding the tray in the conveying direction.
  14. 제1항에 있어서,The method of claim 1,
    상기 정전기 방지부는,The antistatic part,
    상기 레일 베이스 상면에 구비되고, 상기 트레이와 소정 간격 이내에 설치될 수 있는 금속 부재로 구성되는 자기 부상 방식의 이송 장치.The magnetic levitation type conveying apparatus is provided on the rail base upper surface, consisting of a metal member that can be installed within a predetermined distance from the tray.
  15. 제14항에 있어서,The method of claim 14,
    상기 정전기 방지부는,The antistatic part,
    상기 트레이의 이송 방향을 따라 길게 배열된 와이어 형태로 구성되는 자기 부상 방식의 이송 장치.Magnetic levitation type conveying apparatus is configured in the form of a wire arranged long along the conveying direction of the tray.
  16. 제1항에 있어서,The method of claim 1,
    상기 레일의 양측면에 구비되고, 상기 트레이의 가이드 홈 내부 양측면과 소정 간격을 두고 구비된 한 쌍의 이탈 방지용 롤러;를 더 포함하는 자기 부상 방식의 이송장치.And a pair of separation prevention rollers provided on both sides of the rail and provided at predetermined intervals from both sides of the guide groove of the tray.
  17. 제16항에 있어서,The method of claim 16,
    상기 이탈 방지용 롤러들은,The separation prevention rollers,
    상기 자기 부상 유닛과 인접하게 설치되는 자기 부상 방식의 이송 장치.Magnetic levitation transfer device is installed adjacent to the magnetic levitation unit.
  18. 제1항 내지 제17항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 17,
    상기 트레이에 안착된 기판이 노출되는 홀이 상면에 구비되고, 상기 레일 베이스 상측에 상기 트레이와 자기 부상 유닛과 자기 이송 유닛 및 센터링 유닛을 차폐시키는 챔버;를 더 포함하는 자기 부상 방식의 이송 장치.And a chamber having a hole on the upper surface of which the substrate seated on the tray is exposed and shielding the tray, the magnetic levitating unit, the magnetic conveying unit and the centering unit on the rail base.
  19. 제18항에 있어서,The method of claim 18,
    상기 챔버 내부 상면 양측에 구비되고, 상기 트레이와 소정 간격을 두고 구비된 한 쌍의 이탈 방지용 롤러;를 더 포함하는 자기 부상 방식의 이송 장치.And a pair of separation prevention rollers provided on both sides of the upper surface of the chamber and provided at predetermined intervals from the tray.
PCT/KR2019/009793 2018-08-31 2019-08-06 Magnetic levitation transfer device WO2020045846A1 (en)

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