KR20170110065A - Apparatus for transferring substrate - Google Patents

Abstract

The present invention relates to an image forming apparatus comprising a tray on which a substrate is placed, a magnetic transfer unit provided on the lower side of the tray for magnetic levitation of the tray and transferring it by magnetic force, a guide unit for guiding the transfer of the tray, And a space holding means provided in at least one region between the units.

Description

[0001] Apparatus for transferring substrate [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus for transferring a tray on which a substrate is placed in a non-contact manner.

2. Description of the Related Art Generally, a liquid crystal display device (LCD), a plasma display panel (PDP), a field emission display (FED), an electro luminescence display device A flat panel display device (FPD) such as an organic light emitting diode (ELD) is manufactured by performing a plurality of processes on a substrate. That is, a deposition process, a photolithography process, and an etching process are repeated a plurality of times on a substrate, and processes such as cleaning, lapping, and cutting are performed to manufacture a flat panel display.

The manufacturing process of such a flat panel display device proceeds in a plurality of chambers provided with an optimal environment. To this end, an in-line method has been considered in which a substrate is placed on a tray, and then the tray is vertically or inclinedly moved to pass through a plurality of chambers.

The conveying device for conveying the substrate may include a tray on which the substrate is placed and a driving roller that contacts the bottom of the tray and provides thrust to the tray by being rotated by the motor. That is, in the conventional conveying apparatus, the lower portion of the tray and the drive roller provided below the chamber are brought into contact with each other, and the tray is moved by the rotational force of the drive roller. An example of such a transfer device is disclosed in Korean Patent Publication No. 2003-0068292.

However, as the frictional force between the driving roller and the lower portion of the tray increases, particles are generated. Particles are adhered to the transferred substrate to cause defects in the display device, which causes defects in devices due to development of high-performance / high-performance devices. Further, particles may be introduced into the vacuum pump for forming a vacuum in the chamber, which may cause the failure of the vacuum pump.

The present invention provides a substrate transfer apparatus capable of preventing the generation of particles by contacting with a tray in a non-contact manner.

The present invention provides a substrate transfer apparatus capable of preventing particles from being generated by transferring a tray by magnetic levitation.

According to an aspect of the present invention, there is provided a substrate transfer apparatus including: a tray on which a substrate is placed; A magnetic transfer unit provided on the lower side of the tray for magnetically levitating the tray and transferring the magnetic flux by magnetic force; A guide unit provided on the upper side of the tray and guiding the conveyance of the tray in a non-contact manner with the tray; And a transport guide provided between the tray and an inner wall of the chamber, wherein the transport guide moves in a direction toward and away from the tray at least in a part of the chamber.

And a transfer base including a contact area provided in contact with the lower side of the tray and an extending area extending downward from both sides of the contact area.

The magnetic transfer unit includes a magnetic levitation portion provided on one side of the transfer base for magnetically levitating the tray and a magnetic transfer portion provided below the magnetic levitation portion and for transferring the magnetically levitated tray in one direction .

Wherein the magnetic levitation portion includes first magnet levitation means in contact with the transfer base and including at least one magnet, and at least one magnet spaced apart from the first magnet levitation means, And at least one of the first magnetic levitation means and the second magnetic levitation means.

The magnetic transfer unit includes a magnetic rotating means including a rotating shaft and a plurality of magnets provided to surround the rotating shaft, and magnetic transfer means spaced apart from the magnetic rotating means and including a plurality of magnets.

And a receiving means for receiving the magnetic rotating means therein and contacting the second magnetic levitation means on the upper side.

Wherein the guide unit includes a first guide magnet coupled to an upper portion of the tray and a second guide magnet spaced a predetermined distance from the first guide magnet and provided on an upper wall of the chamber, At least one of repulsive force and attractive force acts.

The transfer guide is provided between the extension region and the inner wall of the chamber.

And gap holding means provided in at least one region between the magnetic transfer unit and the guide unit.

Between the extended region and the magnetic levitation portion, and between the extended region and the conveyance guide.

The tray moves the loading chamber, the plurality of deposition chambers, and the traverse chamber.

The transport guide provided in the traverse chamber is located at a first position near the tray when the tray is transported and at a second position away from the tray when the tray is transported.

The substrate transfer apparatus according to the embodiments of the present invention is provided with a magnetic transfer unit for magnetically floating the tray on the lower side of the tray on which the substrate is placed and a guide unit for guiding the movement of the tray on the upper side of the tray and on the side of the tray do. Therefore, since no friction is generated between the tray and the magnetic transfer unit, particles are not generated, thereby causing no product defects due to particles, and failures of accessories such as a vacuum pump and the like.

The substrate transfer apparatus according to the embodiments of the present invention can move at least a part of the transfer guide for guiding the transfer of the tray in the direction in which the transfer guide approaches and away from the tray. That is, the conveyance guide of the traverse chamber is disposed closely to the tray at the time of conveyance of the tray and at a distance from the tray to facilitate the positional movement of the tray at the time of conveyance of the tray. Therefore, the movement margin of the tray can be increased when the tray is moved in the traverse chamber.

1 is a front view of a substrate transfer apparatus according to an embodiment of the present invention;
2 is a side view of a substrate transfer apparatus according to an embodiment of the present invention;
3 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention.
4 is a schematic view of a magnetic transfer part of the substrate transfer apparatus according to the first embodiment of the present invention;
5 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the second embodiment of the present invention.
6 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the third embodiment of the present invention.
7 is a side view of a guide unit of a substrate transfer apparatus according to an embodiment of the present invention.
8 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fourth embodiment of the present invention.
9 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fifth embodiment of the present invention.
10 and 11 are side views of a substrate transfer apparatus according to a sixth embodiment of the present invention;

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of other various forms of implementation, and that these embodiments are provided so that this disclosure will be thorough and complete, It is provided to let you know completely.

FIG. 1 is a front view of a substrate transfer apparatus according to a first embodiment of the present invention, and FIG. 2 is a side view of a substrate transfer apparatus according to the first embodiment of the present invention. That is, FIG. 1 is a front view and FIG. 2 is a side view from the direction in which the substrate is seated. FIG. 3 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention, and FIG. 4 is a schematic view of the magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention.

Referring to FIGS. 1 to 4, a substrate transfer apparatus according to an embodiment of the present invention includes a tray 100 for mounting and transferring a substrate thereon, And a guide unit 300 provided at an upper portion of the tray 100 and guiding the conveyance of the tray 100. The guide unit 300 includes a guide unit 300,

The tray 100 is provided with an empty hollow square frame to mount the substrate. That is, the tray 100 is provided with four bars having predetermined lengths spaced vertically and horizontally by a predetermined distance, and the edges of the bars are brought into contact with each other, so that the center portion can be formed into a hollow rectangular frame. Further, the tray 100 may be provided with a plurality of clamps for clamping the substrate so that the substrate can be detached. At this time, the substrate can be contacted to the four sides of the tray 100 with a predetermined width and fixed by a clamp. The tray 100 is loaded with the substrate and transported in a vertical or inclined state. That is, a plurality of chambers are connected in one direction, and a predetermined process such as a thin film deposition process is performed on the substrate while the tray 100 on which the substrate is mounted moves within the plurality of chambers. The plurality of chambers through which the tray 100 moves include a loading chamber for placing the substrate on the tray 100, a plurality of deposition chambers for depositing a predetermined thin film on the substrate mounted on the tray 100, And a traverse chamber that lifts and moves the position of the substrate. That is, after the tray 100 seats the substrate in the loading chamber, a plurality of thin films are deposited on the substrate while moving the plurality of deposition chambers, and the position in the traverse chamber can be shifted toward the loading chamber. Here, the loading chamber, the plurality of deposition chambers, and the traverse chamber can maintain a vacuum state. In addition, the substrate may be a variety of substrates for manufacturing a flat panel display device including a liquid crystal display device, and may be made of a material including, for example, glass, plastic, film, and the like. A transfer base 110, which is in contact with a part of the transfer unit 200, is provided below the tray 100. The transfer base 110 may be provided in the entire area under the tray 100. That is, the transfer base 110 is provided at the same length as the lower portion of the tray 100, and may be connected to the lower portion of the tray 100 to have a predetermined thickness downward. The transfer base 110 includes a first area 111 having the same width as the width of the tray 100 and a second area 111 provided below the first area 111 and having a width narrower than the width of the tray 100, And a second area 112 provided at a width 1/2 of the width of the tray 110. Here, a part of the transfer unit 200 may be brought into contact with the second area 112. [ Of course, the transfer base 110 may be provided in various shapes.

The magnetic transfer unit 200 magnetically levitates the tray 100 to maintain the non-contact state with the tray 100 and transport the tray 100. The magnetic transfer unit 200 includes a magnetic levitation portion 210 for magnetically levitating the tray 100 and a magnetic levitation portion 210 for magnetically levitating the magnetic levitation portion 210, And a magnetic transfer part 220 for transferring the magnetic field 100.

The magnetic levitation portion 210 includes a first magnetic levitation means 211 provided in contact with the transfer base 110 and a second magnetic levitation means 212 provided apart from the first magnetic levitation means 211 can do. Here, the second magnetic levitation unit 212 may be provided between the tray 100 and a plurality of chamber inner walls through which the tray 100 is transferred. At this time, the second magnetic levitation unit 212 can be fixed to the inner walls of the plurality of chambers to which the tray 100 is transferred, and can be fixed at a predetermined height from the bottom of the chamber. That is, the tray 100 on which the substrate is placed can be conveyed through a plurality of chambers connected in series, and the first magnetic levitation means 211 is disposed on the second region 112 of the conveyance base 110 under the tray 100, And the second magnetic levitation means 212 is provided between the tray 100 and the chamber facing the first magnetic levitation means 211 and can be coupled to the inner wall or the bottom surface of the chamber. The first magnetic levitation means 211 includes a first fixing member 211a fixed to both sides of the second region 112 of the transfer base 110 and a second fixing member 211b fixed to both sides of the first fixing member 211a At least one first magnet 211b provided on a predetermined side surface of the first fixing member 211a and at least one second magnet 211c provided on a predetermined area of the lower surface of the first fixing member 211a. That is, the first and second magnets 211b and 211c may be provided one by one, and at least one of the first and second magnets 211b and 211c may be provided in two or more. For example, one first magnet 211b may be provided and two or more second magnets 211c may be provided. The first fixing member 211a may be provided in a substantially hexahedron shape having a predetermined height and width and may have the same length as the second region 112 along the second region 112 of the transfer base 110, And may have the same width as the depression depth of the region 112. Therefore, the first magnetic levitation means 211 can be flush with the transfer base 110. That is, the width of the first fixing member 211a and the second area 112 therebetween may be the same as the width of the first area 111 of the transfer base 110 or the tray 100. Of course, the width of the second region 112 and the first magnetic levitation means 211 on one side and the other side may be larger or smaller than the width of the transfer base 110 or the tray 100. The first and second magnets 211b and 211c may be embedded in the first fixing member 211a at a predetermined depth. That is, the first and second magnets 211b and 211c are fixed to the first and second fixing members 211a and 211b so that the surfaces of the first and second magnets 211b and 211c may be flush with the surface of the first fixing member 211a. As shown in FIG. On the other hand, the first fixing member 211a may be made of a material such as metal, ceramic, plastic, etc., which does not react with the magnetic force of the magnets. For example, the first fixing member 211a may be made of tungsten. The second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 at a predetermined distance from the first magnetic levitation means 211. In other words, the second magnetic levitation means 212 may be provided on the inner wall of the chamber, and may be spaced apart from the first magnetic levitation means 211 so that the inner surface thereof faces the first magnetic levitation means 211. The second magnetic levitation means 212 includes a second fixing member 212a facing the first plate 211a of the first magnetic levitation means 211 with a predetermined distance therebetween, And third and fourth magnets 212b and 212c facing the first magnet 211b and the second magnet 211c, respectively. The third and fourth magnets 212b and 212c may be provided in correspondence with the number of the first and second magnets 211b and 211c and may be provided at least one of the first and second magnets 211b and 211c Either one or more may be provided. For example, when one first magnet 211b is provided and two or more second magnets 211c are provided, one third magnet 212b may be provided and two or more fourth magnets 212c may be provided . The second fixing member 212a is connected to the inner wall of the chamber or the bottom surface of the chamber and fixed to the first fixing member 211a having a rectangular shape in cross section, And the other side may be provided in the shape of " On the other hand, the first magnet 211b and the third magnet 212b have different polarities so that attraction force can act accordingly. However, the second magnet 211c and the fourth magnet 212c have the same polarity, and repulsive force can act accordingly. A repulsive force acts between the second and fourth magnets 211c and 212c to magnetize the tray 100 and attracting force between the first and third magnets 211b and 212b Up and down movement can be prevented. That is, the tray 100 can magnetically move upward due to the repulsive force between the second and fourth magnets 211c and 212c. As a force acts between the first and third magnets 211b and 212b, . The second fixing member 212a may be made of a material such as metal, ceramic, or plastic that does not react with the magnetic force of the magnets as in the first fixing member 211a. For example, the second fixing member 212a may be made of tungsten have. The first magnetic levitation means 211 may be provided in the entire region of the transfer base 110 in the longitudinal direction of the tray 100, that is, in the traveling direction of the tray 100, The tray 100 may be provided in the entire region where the tray 100 is moved. That is, since the tray 100 passes through the plurality of chambers, the second magnetic levitation means 212 can be provided on the inner walls of the plurality of chambers in the region facing the first magnetic levitation means 211. However, at least one of the first and second magnetic levitation means 211 and 212 may be provided at a predetermined interval. For example, a plurality of second magnetic levitation means 212 may be provided in the entire area in the longitudinal direction, and a plurality of first magnetic levitation means 211 may be provided at predetermined intervals. The first and second magnets 211b and 211c of the first magnetic levitation means 211 and the third and fourth magnets 212b and 212c of the second magnetic levitation means 212 are arranged in the entire area in the longitudinal direction Or a plurality of spaced apart spacers may be provided. For example, the first and second magnets 211b and 211c may be provided over the entire area, and the third and fourth magnets 212b and 212c may be provided with a predetermined gap. On the other hand, gap maintaining means 213 for maintaining a gap between the first magnetic levitation means 211 and the second magnetic levitation means 212 may be provided. That is, since the attraction force acts on the first and third magnets 211b and 212b facing each other, the distance between the first and second magnetic levitation means 211 and 212 during the movement of the tray 100 on the magnetic levitation is narrow The gap between the first and second magnetic levitation means 211 and 212 can be maintained by providing the gap holding means 213. The first and third magnets 211b and 212b may be attached to each other. The gap maintaining means 213 may be provided in the lower region of the first and third magnets 211b and 212b. That is, the gap maintaining means 213 may be provided between the outer surface of the first magnetic levitation means 211 and the inner surface of the second magnetic levitation means 212. Further, the interval maintaining means 213 may be provided in the entire area in the longitudinal direction between the first and second magnetic levitation means 211 and 212, and a plurality of the spacing means may be provided at predetermined intervals.

The magnetic transfer unit 220 includes a magnetic rotating unit 221 provided at a predetermined distance from a lower side of the transfer base 110 and a magnetic transfer unit 221 provided below the transfer base 110, (Not shown). The magnetic rotating means 221 may be spaced apart from the lower side of the transfer base 110 by a predetermined distance. Here, the magnetic rotating means 221 may have the same width as that of the tray 100, or may have a width larger or smaller than the width of the tray 100. 3 and 4, the magnetic rotating means 221 may include a rotating shaft 221a and a plurality of fifth magnets 221b formed on the surface of the rotating shaft 221a. The rotary shaft 221a is provided in a substantially circular bar shape and can be rotated in one direction and the other direction by a rotary motor (not shown). The plurality of fifth magnets 221b may be provided on the surface of the rotary shaft 221a at a predetermined angle, for example, in the form of a thread. That is, a plurality of the fifth magnets 221b may be provided on the rotating shaft 221a at an angle of, for example, 45 degrees as shown in FIG. At this time, the plurality of magnets 221b may be alternately provided with S poles and N poles, for example, at an angle of 45 degrees. The magnetic transfer means 222 may be provided below the transfer base 110. That is, the magnetic transfer means 222 may be provided below the second region 112 of the transfer base 110 between the magnetic levitation portions 210. The magnetic transfer means 222 may be repeatedly provided with magnets having different polarities. 4, the magnetic transfer means 222 includes a third fixing member 222a fixed to the lower side of the second region 112 of the transfer base 110 and a second fixing member 222b fixed to one side of the third fixing member 222a And the plurality of sixth magnets 222b may have different polarities, that is, S poles and N poles may be alternately provided. At this time, the plurality of sixth magnets 222b of the magnetic transfer means 222 may be provided to have the same angle as the plurality of fifth magnets 221b of the magnetic rotating means 221, for example, an angle of 45 degrees . Therefore, since the polarity of the magnetic rotation means 221 and the polarity of the magnetic transfer means 222 have polarities different from each other or have the same polarity, and accordingly the attractive force or the repulsive force acts thereon, The magnetic transfer means 222 moves in one direction. That is, the rotational motion of the magnetic rotating means 221 is converted into a linear motion by the magnetic transfer means 222 to move the tray 100 magnetically levitated.

The guide unit 300 includes a first guide magnet 310 coupled to an upper portion of the tray 100 and a second guide magnet 320 spaced apart from the first guide magnet 310 by a predetermined distance, . Here, the first and second guide magnets 310 and 320 may have the same polarity so that the repulsive force acts on each other, and may have different polarities so that attraction force acts on each other. In addition, the first and second guide magnets 310 and 320 may be provided in various shapes. For example, the first and second guide magnets 310 and 320 may be provided in a linear shape facing each other. The first guide magnet 310 is provided in a circular rod shape and the second guide magnet 320 is formed in a shape of a curved section bent in the shape of, for example, "∩" so as to surround the first guide magnet 310 from above Lt; / RTI > That is, the second guide magnet 320 may be provided to surround the first guide magnet 310 at a predetermined interval. The upper end of the tray 100 is pressed by the second guide magnet 320 at both sides of the first guide magnet 310 so that the force of pushing or pulling the first guide magnet 310 is applied, Is guided so as not to collapse while being transported.

On the other hand, the magnets of the present invention may use an electromagnet in which a core and a coil are combined, a permanent magnet, or a combination of an electromagnet and a permanent magnet.

As described above, the substrate transfer apparatus according to an embodiment of the present invention includes a magnetic transfer unit 200 for magnetically floating the tray 100 on the lower side of the tray 100 on which the substrate is placed, A guide unit 300 for guiding the tray 100 is provided. The magnetic transfer unit 200 includes a magnetic levitation portion 210 for magnetically levitating the tray 100 and a magnetic transfer portion 220 for moving the magnetized levitation tray 100 by converting rotational motion into linear motion by magnetic force ). Accordingly, in the substrate transfer apparatus according to the embodiment of the present invention, after the tray 100 is magnetically levitated by the magnetic levitation portion 210, the magnetic rotary portion 220 rotates in one direction to form the magnetically levitated tray 100 And is moved in one direction. In this embodiment of the present invention, since no friction is generated between the tray 100 and the magnetic transfer unit 200, particles are not generated. Therefore, the product is not defective by the particles, and the failure of the accessories such as the vacuum pump does not occur.

Meanwhile, the substrate transfer apparatus according to the present invention can be implemented in various ways such that the tray 100 is magnetically levitated from the bottom of the tray 100 and the tray 100 is transferred using magnetic force. That is, the structure of the lower portion of the tray 100 can be variously changed. Another example of this invention is shown in Figs. 5 and 6. Fig. 5 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the second embodiment of the present invention, and a second embodiment of the present invention will be described with reference to FIG.

Referring to FIG. 5, the substrate transfer apparatus according to the second embodiment of the present invention includes a tray 100 for loading and transferring a substrate, and a transfer unit 100 for transferring the tray 100 by magnetic levitation. A magnetic transfer unit 200 and a guide unit 300 provided at an upper portion of the tray 100 and guiding the transfer of the tray 100. [ Here, description of the same configuration as the first embodiment of the present invention will be omitted or simplified.

A transfer base 110 is provided below the tray 100. The transfer base 110 includes a first region 111 which is equal to the width of the tray 100 and a second region 111 which is provided below the first region 111, A second region 112 that is narrower than the first region 111 and a third region 113 that is provided below the second region 112 and that surrounds the magnetic rotation means 222. The third region 113 includes an extended portion extending downward from the second region 112, a horizontal portion 113a horizontally provided below the extended portion, and a vertical portion 113a extending downward from both sides of the horizontal portion 113a. (113b, 113c). Here, the horizontal portion 113a is provided to be wider than the width of the magnetic rotating means 221, and the vertical portions 113b and 113c are provided to be higher than the height of the magnetic rotating means 221. Therefore, the horizontal portion 113a and the vertical portions 113b and 113c on both sides of the horizontal portion 113a are provided so as to surround the upper and side portions of the magnetic rotating means 221, respectively.

The magnetic transfer unit 200 includes a magnetic levitation portion 210 for magnetically levitating the tray 100 and a magnetic levitation portion 210 for magnetically levitating the magnetic levitation portion 210, And a magnetic transfer unit 220 for transferring the magnetic field. The magnetic levitation portion 210 includes a first magnetic levitation means 211 provided in the second region 112 of the transfer base 110 and a second magnetic levitation means 211 provided apart from the first magnetic levitation means 211, A gap holding means 213 for holding the gap between the first and second magnetic levitation means 211 and 212 and a holding means 214 for supporting the second magnetic levitation means 212 . The first magnetic levitation means 211 includes a first fixing member 211a fixed to the side surface and a lower surface of the second region 112 of the transfer base 110 and a second fixing member 211b provided on a predetermined region of the side surface of the first fixing member 211a At least one first magnet 211b and at least one second magnet 211c provided in a predetermined area on the lower surface of the first fixing member 211a. The first fixing member 211a may be provided on one side in an " a "shape and the other side may be provided in an" At this time, the first fixing member 211a may protrude from the first region 111 of the transfer base 110. That is, the width of the first fixing member 211a and the second area 112 therebetween may be greater than the width of the first area 111 of the transfer base 110 or the tray 100. Also, at least one of the first and second magnets 211b and 211c may be provided, or at least one of the first and second magnets 211b and 211c may be provided. For example, one first magnet 211b may be provided and two or more second magnets 211c may be provided. The second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 at a predetermined distance from the first magnetic levitation means 211. The second magnetic levitation means 212 includes a second fixed member 212a facing the first fixed member 211a of the first magnetic levitation means 211 and spaced apart from the first fixed member 211a by a predetermined distance, And third and fourth magnets 212b and 212c facing the first and second magnets 211b and 211c, respectively. The third and fourth magnets 212b and 212c may be provided corresponding to the number of the first and second magnets 211b and 211c and may be at least one of the first and second magnets 211b and 211c Either one or more may be provided. For example, when one first magnet 211b is provided and two or more second magnets 211c are provided, one third magnet 212b may be provided and two or more fourth magnets 212c may be provided . Further, the second fixing member 212a may be provided in a shape of one side to be spaced apart from the first fixing member 211a by a predetermined distance, and the other side may be provided in a shape of " The supporting means 214 is provided below the second magnetic levitation means 212 and can support the second magnetic levitation means 212. [ That is, the supporting means 214 is provided between the horizontal portion of the second magnetic levitation means 212 and the bottom of the chamber to support the horizontal portion of the second magnetic levitation means 212. The supporting means 214 supports the horizontal portion of the second magnetic levitation means 212 to more stably support the second magnetic levitation means 212. [ That is, the vertical portion of the second magnetic levitation means 212 is fixed from the inner wall of the chamber, and the horizontal portion is supported by the support means 214, so that the second magnet levitation means 212 can be realized more stably. A part of the transfer base 110 and a magnetic transfer unit 220 may be provided inside the support means 214. That is, the third region 113 of the transfer base 100 may be provided inside the support means 214, and the magnetic transfer portion 220 may be provided inside the third region 220.

The magnetic transfer unit 220 may include a magnetic rotating unit 221 and magnetic transfer unit 222 spaced apart from the magnetic rotating unit 221 by a predetermined distance. The magnetic transfer means 222 is provided in at least one region of the horizontal portion 113a and the vertical portions 113b and 113c and is provided at a predetermined distance from the horizontal portion 113a and the vertical portions 113b and 113c . The magnetic rotating means 221 includes a rotating shaft 221a and a plurality of fifth magnets 221b arranged to surround the surface of the rotating shaft 221a at a predetermined angle as in the embodiment of the present invention. The magnetic transfer means 222 may be provided in the vertical portions 113b and 113c. That is, the magnetic transfer means 222 may be provided on both sides of the magnetic rotating means 221. [ Of course, the magnetic transfer means 222 may be provided in the horizontal region 113a or may be provided in both the horizontal portion 113a and the vertical portions 113b and 113c. The magnetic transfer means 222 may be provided with a predetermined fixing member, and the polarities of the S pole and the N pole may be alternately provided on the fixing member. At this time, the magnetic transfer means 222 may be provided to have the same angle as the fifth magnets 221b of the magnetic rotating means 221, for example, an angle of 45 degrees. Therefore, since the polarity of the magnetic rotation means 221 and the polarity of the magnetic transfer means 222 have the same polarity and accordingly the attractive force acts thereon, the magnetic transfer means 222 is rotated in accordance with the rotation of the magnetic rotation means 221 And moves in one direction. That is, the rotational motion of the magnetic rotating means 221 is converted into a linear motion by the magnetic transfer means 222 to move the tray 100 magnetically levitated.

6 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the third embodiment of the present invention.

Referring to FIG. 6, a substrate transfer apparatus according to a third embodiment of the present invention includes a tray 100 for loading and transferring a substrate, a transfer unit 100 for transferring the tray 100 by magnetic levitation, A magnetic transfer unit 200 and a guide unit 300 provided at an upper portion of the tray 100 and guiding the transfer of the tray 100. [ The third embodiment of the present invention differs from the second embodiment of the present invention described with reference to FIG. 5 in the structure of the magnetic levitation portion 210 of the magnetic transfer unit 200, Here's an example:

The magnetic levitation portion 210 of the magnetic transfer unit 200 includes the first magnetic levitation means 211 provided in the second region 112 of the transfer base 110 and the first magnetic levitation means 211 separated from the first magnetic levitation means 211 A second magnetic levitation means 212 provided for the first magnetic levitation means 212 and a second magnetic levitation means 212 for maintaining the interval between the first and second magnetic levitation means 211 and 212, The support means 214 may be formed of a flexible material. The first magnetic levitation means 211 is fixed to the side and bottom surfaces of the second region 112 of the transfer base 110 and is provided with a first magnetic levitation means 211, At least one first magnet 211b provided in a predetermined area of the upper surface of the first fixing member 211a and at least one second magnet 211b provided in a predetermined area of the lower surface of the first fixing member 211a, (Not shown). That is, in the first and second embodiments of the present invention, the first magnet 211b is provided on the side surface of the first fixing member 211a. However, in the third embodiment of the present invention, And may be provided on the upper surface of the fixing member 211a. The first magnet 211b may be disposed on the upper surface of the first fixing member 211a so as to be spaced apart from the side surface of the first region 111 of the transfer base 110. [ The second magnetic levitation means 212 may be provided so as to face the first magnetic levitation means 211 at a predetermined distance from the first magnetic levitation means 211. The second magnetic levitation means 212 includes a second fixed member 212a facing the first fixed member 211a of the first magnetic levitation means 211 and spaced apart from the first fixed member 211a by a predetermined distance, And third and fourth magnets 212b and 212c facing the first and second magnets 211b and 211c, respectively. Here, the second fixing member 212a is spaced apart from the first fixing member 211a by a predetermined distance, and is formed so as to have a "C" shape at one side and a "C" shape at the other side so as to face the upper surface of the first fixing member 211a . However, the second fixing member 212a may be short on the upper side and long on the lower side, and may be spaced apart from the first fixing member 211a at the same intervals in all areas. Here, the first magnet 211b and the third magnet 221b may have different polarities and thus attraction force, and the second magnet 211c and the fourth magnet 212c may have the same polarity with each other, Repulsive force can act. Further, a magnet may be further provided on the side surface of the first fixing member 211a and the side surface of the second fixing member 212a facing the side surface of the first fixing member 211a.

7 is a side view of the guide unit 300 according to an embodiment of the present invention.

7, a guide unit 300 according to an embodiment of the present invention includes a first plate 311 coupled to an upper portion of a tray 100, a first guide magnet 321 provided on a first plate 311, A second guide magnet 320 spaced from the first guide magnet 310 by a predetermined distance and provided on the second plate 321; A side plate 330 extending downward from a side surface of the second plate 321, a third guide magnet 340 provided on a side surface of the first plate 311, A fourth guide magnet 350 provided on the side plate 330 and spaced apart from the side plates 330 and the guide magnets 310, 320, 340, 350, And a second gap maintaining means 360 for holding the second gap. The third and fourth guide magnets 340 and 350 may be provided between the second plate 321 on the upper side of the second guide magnet 320 and the side plate 330 facing the second guide magnet 320, 311 and the facing side plate 330 and between the second plate 321 and the side plate 330 facing the side plate. The first and second guide magnets 310 and 320 may have the same polarity so that the repulsive force acts on each other, and may have different polarities so that attraction force acts on each other. Further, the third and fourth guide magnets 340 and 350 may have the same polarity so that repulsive force acts therebetween. Therefore, the upper end of the tray 100 is guided by the attraction force or the repulsion force of the first and second guide magnets 310 and 320 and the repulsive force of the third and fourth guide magnets 340 and 350 so that the tray 100 does not collapse As shown in FIG. That is, since the repulsive force acts on the side surface by the third and fourth guide magnets 340 and 350, the perpendicular transport of the tray 100 is performed more smoothly than the case of using the first and second guide magnets 310 and 320 can do. Further, since the second interval maintaining means 360 is further provided, the swing width of the tray 100 can be kept constant, and the vertical conveyance of the tray 100 can be further smoothly performed.

A transport guide for guiding the transport of the tray 100 may further be provided on the lower side of the tray 100. The transfer guide may be spaced apart from the tray 100 by a predetermined distance with the tray 100 therebetween. The transfer guide may be provided between the tray 100 and the inner wall of the chamber. That is, the conveyance guide may be provided between the side of the chamber and the tray 100 so as to be spaced apart from the tray 100 by a predetermined distance. For example, the transport guide may be provided outside the magnetic levitation portion 210 of Figs. 3, 5, and 6. That is, the transfer guide may be provided between the second magnet levitation means 212 of the magnetically levitated portion 210 and the inner wall of the chamber. When the transfer guide is provided between the second magnetic levitation means 212 and the chamber inner wall, the second magnetic levitation means 212 can be fixed from the bottom surface of the chamber. A substrate transfer apparatus having such a transfer guide will be described with reference to FIGS. 8 and 9. FIG.

8 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fourth embodiment of the present invention.

Referring to FIG. 8, a substrate transfer apparatus according to a fourth embodiment of the present invention includes a tray 100 for loading and transferring a substrate, a transfer unit 100 for transferring the tray 100 by magnetic levitation, A magnetic transfer unit 200 and a guide unit 300 for guiding the tray 100. [ The guide unit 300 may be provided on the upper side and the lower side of the tray 100. A structure illustrated in FIG. 7 may be provided on the upper side of the tray 100. On the lower side of the tray 100, And a conveyance guide 370 for guiding the conveyance of the sheet. Here, the fourth embodiment of the present invention has the same structure as the first to third embodiments, and the description thereof will be simplified or omitted.

The transfer base 110 is provided on the lower side of the tray 100. The transfer base 110 has a first region 111 which is equal to the width of the tray 100 and a second region 111 which is provided on the side of the first region 111, And an extended region 114 which surrounds the rotating means 221. That is, the extension region 114 may extend from the side of the first region 111 downward. Here, the extended region 114 may be provided at a larger interval than the width of the magnetic rotating means 221 so as to be spaced apart from the magnetic rotating means 221 by a predetermined distance. The extension region 114 may be provided in a plate shape having a predetermined width and length. In addition, a spacing maintenance means 213 may be provided in a predetermined region inside the extension region 114. [ That is, in the third embodiment of the present invention described with reference to FIG. 6, the gap maintaining means 213 is provided between the first and second magnetic levitation means 211 and 212 to maintain the gap therebetween. The fourth embodiment of the present invention is characterized in that the extension region 114 between the extension region 114 and the magnetic transfer unit 220 to maintain the gap between the extension region 114 and the magnetic transfer transfer unit 220 connected to the tray 100 The gap maintaining means 213 may be provided on the inner side of the frame. Of course, the gap maintaining means 213 may be provided in one region of the magnetic transfer portion 220. [ That is, the gap maintaining unit 213 may be fixed to a predetermined region of the extended region 114 or the magnetic transfer unit 220 between the extended region 114 and the magnetic transfer unit 220. At least one seventh magnet 115 may be provided in at least one region of the extended region 114, that is, in the outer region.

The magnetic transfer unit 200 includes a magnetic levitation portion 210 for magnetically levitating the tray 100 and a magnetic levitation portion 210 for magnetically levitating the magnetic levitation portion 210, And a magnetic transfer unit 220 for transferring the magnetic field. The magnetic levitation portion 210 includes a first magnetic levitation means 211 fixed to the first region 111 of the transfer base 110 and a second magnetic levitating means 211 provided apart from the first magnetic levitation means 211. [ And may include lifting means 212. The first magnetic levitation means 211 includes a first fixing member 211a fixed to the lower surface of the first region 111 of the transfer base 110 and a second fixing member 211b fixed to the lower surface of the first region 111 of the transfer base 110, Of the first magnet 211b. The upper side of the first fixing member 211a is coupled to the lower side of the first region 111, and the lower side of the first fixing member 211a can be horizontal. At this time, the width of the first fixing member 211a may be larger than the width of the first region 111. [ Since the first fixing member 211a is formed to have a width greater than the width of the first region 111, the extended region 114, which extends downward in contact with the side surface of the first fixing member 211a, As shown in FIG. At least one first magnet 211b may be provided under the first fixing member 211a. For example, three first magnets 211b may be provided at the same interval. The second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 at a predetermined distance from the first magnetic levitation means 211. The second magnetic levitation means 212 includes a second fixed member 212a facing the first fixed member 211a of the first magnetic levitation means 211 and spaced apart from the first fixed member 211a by a predetermined distance, And at least one third magnet 212b facing at least one first magnet 211b of the first magnet 211b. The second fixing member 212a may be formed in the same shape as the first fixing member 211a so as to be spaced apart from the first fixing member 211a by a predetermined distance. For example, the first and second fixing members 211a and 212a may have a rectangular cross-sectional shape. At this time, the second fixing member 212a of the second magnetic levitation means 212 may be fixed to one region of the magnetic transfer means 220. [

The magnetic transferring unit 220 includes a magnetic rotating means 221, magnetic transfer means 222 spaced apart from the magnetic rotating means 221 by a predetermined distance and accommodating means 223 for accommodating the magnetic rotating means 221 inside . The receiving means 223 may receive the magnetic rotating means 221 therein and the lower side may be fixed to the chamber bottom surface. At this time, the receiving means 223 is provided in an empty shape so that the magnetic rotating means 221 can be received therein and rotated. Further, the receiving means 223 may be provided such that at least a part of the magnetic transfer means 222 is exposed on the side surface. The second magnetic levitation means 212 may be provided on the upper surface of the receiving means 223. That is, the second fixing member 212a of the second magnetic levitation means 212 can be fixed to the upper portion of the receiving means 223. The magnetic transfer means 222 may include at least one magnet and may be provided in the extension region 114 facing the magnetic rotation means 221. That is, the extended region 114 is provided outside the receiving means 223 at a predetermined distance from the receiving means 223 and the magnetic rotating means 221 accommodated in the receiving means 223 is provided inside the extended region 114, Magnetic transfer means 222 including at least one magnet may be provided so as to face the magnetism transfer means.

Meanwhile, a transfer guide 370 may be provided between the magnetic transfer unit 200 and the chamber. That is, the guide unit 300 can guide the conveyance of the tray 100 from the upper side and the lower side of the tray 100, and the magnetic transfer unit 200 And a conveyance guide 370 for guiding the conveyance of the sheet. The transfer guide 370 is provided between the magnetic transfer unit 200 and the inner surface of the chamber and may have a predetermined width and height. In addition, at least one magnet may be provided in a predetermined region of the transfer guide 370. That is, the transport guide 370 includes a vertical plate 371 provided between the magnetic transfer unit 200 and the chamber in the height direction, and at least one eighth magnet 372 provided in a predetermined area of the vertical plate 371 can do. The vertical plate 371 may be provided at the height of the first magnetic levitation means 211, for example. That is, the vertical plate 371 may be provided at a height up to the interface between the first area 111 of the transfer base 110 and the first fixing member 211a of the first magnetic levitation unit 211. At least one eighth magnet 372 is provided on the vertical plate 371. The eighth magnet 372 may be provided facing the seventh magnet 115 provided in the extended region 114. [ At this time, the seventh magnet 115 of the extension region 114 and the eighth magnet 372 of the vertical plate 371 may have different polarities or the same polarity, so that attraction or repulsive force may act. On the other hand, the conveyance guide 370 in the deposition chamber can be fixed, and the conveyance guide 370 in the traverse chamber can move in the direction away from and closer to the tray 100. [ At this time, the conveyance guide in the traverse chamber can move in a non-contact manner by using the magnetic levitation. That is, the conveyance guide 370 of the traverse chamber can use the same principle as the self-conveyance unit described with reference to FIG. For example, a magnetic rotating means may be provided on the lower side of the vertical plate 371 and spaced apart from the vertical plate 371 to provide a rotating shaft (not shown) and a plurality of magnets (not shown) on the surface of the rotating shaft. Magnets of different polarities may be provided at predetermined intervals on the lower surface of the vertical plate 371 apart from the rotating means. Therefore, since the polarity of the magnetic rotation means on the lower side of the vertical plate 371 and the polarity of the magnetic transfer means on the upper side thereof have polarities different from each other or have the same polarity, The magnetic transfer means is moved in one direction or another direction in accordance with the rotation. That is, the rotational motion of the magnetic rotating means is converted into linear motion by the magnetic transfer means to move the vertical plate 371 magnetically levitated.

9 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fifth embodiment of the present invention.

Referring to FIG. 9, a substrate transfer apparatus according to a fifth embodiment of the present invention includes a tray 100 for loading and transferring a substrate, a transfer unit 100 for transferring the tray 100 by magnetic levitation, A magnetic transfer unit 200 and a guide unit 300 for guiding the tray 100. [ The guide unit 300 may be provided on the upper side and the lower side of the tray 100. A structure illustrated in FIG. 7 may be provided on the upper side of the tray 100. On the lower side of the tray 100, And a conveyance guide 370 for guiding the conveyance of the sheet. Here, the fifth embodiment of the present invention differs from the fourth embodiment of the present invention described with reference to Fig. 8 in the formation position of the gap holding means 213. Fig. In other words, the substrate transfer apparatus according to the fifth embodiment of the present invention is the same as the substrate transfer apparatus according to the fourth embodiment of the present invention, and the gap holding means 213 includes the transfer guide 370 and the extension region 114, respectively. The gap maintaining means 213 may be provided in a predetermined region of the extension region 114 between the transfer guide 370 and the extension region 114 or the transfer guide 370. For example, below the magnet 115 of the extension region 114. [ The gap holding means 213 is provided between the substrate transfer unit 200 and the transfer guide 370 so that the substrate transfer unit 200 is transferred inside the transfer guide 370 even when the substrate transfer unit 200 is shaken . Of course, the gap maintaining means 213 may be provided between the extension region 114 and the magnetic transfer portion 220 as well as between the transfer guide 370 and the extension region 114. That is, at least two or more of the interval maintaining units 213 may be provided in at least two areas.

On the other hand, at least a part of the transport guide 370 can move in one direction and the opposite direction. For example, the transport guide in the deposition chamber is fixed and the transport guide in the transport chamber is movable. That is, the conveyance guide provided in the traverse chamber guides the conveyance of the tray 100 by maintaining the first interval with the tray 100 when the tray 100 is moved from the deposition chamber, and the conveyance of the tray 100 is terminated And when it is transported toward the loading chamber, it moves toward the inner wall of the chamber and maintains a second gap larger than the first gap with the tray 100. [ The movement of the tray 100 in the traverse chamber can increase the movement margin of the tray 100 when the tray 100 is moved. That is, it is possible to smoothly traverse the tray 100 beyond the influence of the magnetic force, i.e., change the lane. A substrate transfer apparatus to which the transfer guide 370 moves will be described with reference to FIGS. 10 and 11. FIG.

10 and 11, a substrate transfer apparatus according to a sixth embodiment of the present invention includes a tray 100 for loading and transferring a substrate, And a guide unit 300 provided below the tray 100 and including a conveyance guide 370 for guiding the conveyance of the tray 100. The guide unit 300 includes a guide unit 300, The conveying guide 370 can move in one direction and the other direction opposite to each other, and can move in a direction approaching and away from the tray 100. This movable transport guide 370 may be provided at least in the traverse chamber.

The transport guide 370 includes a vertical plate 371a and a horizontal plate 371b and a vertical plate 371a may be provided above the horizontal plate 371b. That is, the vertical plate 371a may be provided perpendicularly from a predetermined region of the horizontal plate 371b in the upward direction. At least one eighth magnet 372 may be provided on the vertical plate 371a so as to face the seventh magnet 115 provided in the extended region 114 of the tray 100. [ The horizontal plate 371b is provided below the vertical plate 371a and may be provided horizontally. Here, a moving part 395 may be provided below the horizontal plate 371b. At least a part of the lower part of the moving part 395 is provided to surround the guide rail 390 and can be moved in one direction and the other direction opposite to each other along the guide rail 390. As the moving unit 395 moves, the transport guide 370 located above the moving unit 395 moves. A support portion 380 is provided below the guide rail 390. The support portion 380 supports the guide rail 390 and the transport guide 370 on the upper side thereof. In addition, driving means (not shown) for driving the moving part 395 may be provided in the support part 380. The driving means includes a cylinder, a motor, and the like, and moves the moving portion 395 in one direction that is close to the tray 100 as shown in Fig. 10 and in the other direction away from the tray 100 as shown in Fig. . Here, the conveyance guide 371 is located at a first position where the tray 100 is brought close to the tray 100 when the tray 100 is conveyed from the deposition chamber. In order to transport the tray 100 toward the loading chamber, the moving unit 395 is driven by the lane change, that is, the driving unit when traversed, so that the transport guide 371 is moved in the direction away from the tray 100, Position. After the transport guide 371 is moved, the tray 100 is lifted, traversed and transported to the loading chamber, and then the transport guide 371 is moved to the first position again.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention.

100: Tray 200: magnetic transfer unit
300: guide unit 210: magnetic levitation part
220:

Claims (12)

A tray on which a substrate is placed;
A magnetic transfer unit provided on the lower side of the tray for magnetically levitating the tray and transferring the magnetic flux by magnetic force;
A guide unit provided on the upper side of the tray and guiding the conveyance of the tray in a non-contact manner with the tray; And
And a transfer guide provided between the tray and an inner wall of the chamber,
Wherein the transfer guide moves in a direction toward and away from the tray in at least a partial area of the chamber.
The substrate transporting apparatus according to claim 1, further comprising a transport base including a contact region provided in contact with the lower side of the tray and an extending region extending downward from both sides of the contact region.
The apparatus according to claim 2, wherein the magnetic transfer unit comprises: a magnetic levitation portion provided in one region of the transfer base to levitate the tray;
And a magnetic transfer section provided below the magnetic levitation section for transferring the magnetically levitated tray in one direction by a magnetic force.
4. The apparatus of claim 3, wherein the magnetic levitation portion comprises: first magnetic levitation means in contact with the transport base and including at least one magnet;
And second magnetic levitation means spaced apart from said first magnetic levitation means and including at least one magnet, wherein at least one of attraction and repulsion acts on said first magnetic levitation means.
The magnetic transfer apparatus according to claim 4, wherein the magnetic transfer section comprises: a magnetic rotating means including a rotating shaft and a plurality of magnets provided to surround the rotating shaft;
And magnetic transfer means spaced apart from the magnetic rotation means and including a plurality of magnets.
The substrate transfer device according to claim 5, further comprising a receiving means for receiving the magnetic rotating means therein and for contacting the second magnetic levitation means on the upper side.
The apparatus according to claim 2, wherein the guide unit comprises: a first guide magnet coupled to an upper portion of the tray; and a second guide magnet disposed on an upper wall of the chamber spaced apart from the first guide magnet by a predetermined distance, Wherein at least one of a repulsive force and an attractive force acts on the second guide magnet.
3. The substrate transfer apparatus according to claim 2, wherein the transfer guide is provided between the extension region and the inner wall of the chamber.
3. The substrate transfer apparatus according to claim 2, further comprising gap holding means provided in at least one region between the magnetic transfer unit and the guide unit.
The substrate transfer device according to claim 9, further comprising: at least one region between the extended region and the magnetic levitation portion, or between the extended region and the transfer guide.
The apparatus of claim 1, wherein the tray moves the loading chamber, the plurality of deposition chambers, and the traverse chamber. 12. The substrate transport apparatus according to claim 11, wherein the transport guide provided in the traverse chamber is located at a first position close to the tray when the tray is transported, and is located at a second position away from the tray when the tray is transported.

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