WO2020037847A1 - 一种液晶面板对位检测装置及方法 - Google Patents

一种液晶面板对位检测装置及方法 Download PDF

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Publication number
WO2020037847A1
WO2020037847A1 PCT/CN2018/115600 CN2018115600W WO2020037847A1 WO 2020037847 A1 WO2020037847 A1 WO 2020037847A1 CN 2018115600 W CN2018115600 W CN 2018115600W WO 2020037847 A1 WO2020037847 A1 WO 2020037847A1
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mark
liquid crystal
capacitance
crystal panel
alignment
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PCT/CN2018/115600
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English (en)
French (fr)
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田新斌
徐向阳
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深圳市华星光电技术有限公司
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Publication of WO2020037847A1 publication Critical patent/WO2020037847A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Definitions

  • the present invention relates to the technical field of liquid crystal panels, and in particular, to a liquid crystal panel alignment detection device and method capable of improving alignment accuracy of a liquid crystal panel.
  • liquid crystal displays Liquid Crystal Display, LCD
  • LCD liquid crystal display
  • TFT-LCD Thin Film Transistor Liquid Crystal Display
  • LCD liquid crystal display
  • TFT-LCD Thin Film Transistor Liquid Crystal Display
  • TFT-LCD has been widely used in all aspects of life, from small-sized mobile phones, video cameras, digital cameras, medium-sized laptops, desktops, large-sized home televisions, to large-scale projection equipment.
  • TFT-LCD coupled with perfect picture and fast response characteristics, has taken the lead in the display market.
  • the testing equipment of TFT-LCD liquid crystal panel is basically aligned by an optical image measuring instrument.
  • Optical image measuring instrument is a high-precision, high-efficiency, high-reliability device integrating optical, mechanical, electronic, and computer image processing technology.
  • the detection principle is: the object to be measured is enlarged by an optical magnification system, the image characteristics are collected by the CCD camera system and sent to the computer, and the shape, size, angle and position of the surface of the object to be measured are detected by calculation, and graphics are provided on the screen. Operators can compare images and shadows, which can intuitively distinguish possible deviations in measurement results.
  • optical image measuring equipment is relatively expensive and complicated to maintain.
  • FIG. 1 a schematic diagram of a common metal material alignment mark.
  • the alignment marks of some measured objects are made of metal, such as the common “L” mark (as shown in Figure 11), and the COF bonding mark (as shown in Figure 12). Alignment marks made of metal are reflective and opaque, and optical alignment is difficult to achieve.
  • An object of the present invention is to provide a liquid crystal panel alignment detection device and method, which can realize efficient and simple high-precision alignment detection of a liquid crystal panel, especially alignment of test items that are difficult to perform alignment using optics. Detection.
  • the present invention provides a liquid crystal panel alignment detection device.
  • the device includes a voltage source, a current source, a flat electrode, and a capacitance measurement module.
  • the flat electrode has the same pattern as the mark to be measured, and when detecting, The plate capacitor is placed opposite to the mark to be tested; the plate capacitor and the voltage source and the current source form a series circuit; the capacitance measurement module is electrically connected to the plate electrode and the reception mark respectively for measuring The capacitance value of the plate capacitor is used for alignment detection.
  • the present invention also provides a liquid crystal panel alignment detection method.
  • the method includes the following steps: placing a plate electrode with the same pattern as the mark to be tested against the mark to form a plate capacitor;
  • the plate capacitor is electrically connected to a voltage source and a current source to form a series circuit; performing capacitance value measurement on the plate capacitor to obtain a capacitance measurement value; comparing the capacitance measurement value with a calculated value of the capacitance of the plate capacitor, To complete the alignment detection.
  • the present invention forms a plate capacitor by placing a plate electrode opposite to a mark to be measured, and forms a series circuit with a voltage source and a current source, and then measures the capacitance value of the plate capacitor through a capacitance measurement module, and can perform alignment based on the measured capacitance measurement value. Detection. It is possible to use optical alignment for testing items such as array testing, box-forming testing, and COF splicing during the production of LCD panels in the factory. It can achieve high-precision alignment detection, and the cost of the detection device is low, and the detection method is simple and easy to operate.
  • Figure 1 a schematic diagram of common metal material alignment marks
  • FIG. 2 is a schematic structural diagram of a liquid crystal panel alignment detection device according to the present invention.
  • FIG. 3 is a flowchart of a method for detecting the alignment of a liquid crystal panel according to the present invention.
  • the "first" or “down” of the second feature may include the first and second features in direct contact, and may also include the first and second features. Not directly, but through another characteristic contact between them.
  • the first feature is “above”, “above”, and “above” the second feature, including that the first feature is directly above and obliquely above the second feature, or merely indicates that the first feature is higher in level than the second feature.
  • the first feature is “below”, “below”, and “below” of the second feature, including the fact that the first feature is directly below and obliquely below the second feature, or merely indicates that the first feature is less horizontal than the second feature.
  • the liquid crystal panel alignment detection device is an electrical alignment detection device, which includes a voltage source, a current source, a flat electrode, and a capacitance measurement module.
  • the plate electrode and the mark under test have the same pattern and are placed opposite to the mark under test to form a plate capacitor; the plate capacitor and the voltage source and the current source form a series circuit; the capacitance measurement module is electrically connected to the plate electrode and the mark under test for measurement The capacitance of a plate capacitor consisting of a plate electrode and a test mark for alignment detection.
  • a flat capacitor is composed of a dielectric material (air is also a dielectric) sandwiched between two metal plates that are closely spaced and placed in parallel.
  • the capacitance of the plate capacitor varies with the relative area of the two metal plates and the distance between the two metal plates.
  • the capacitance of the plate capacitor is proportional to the relative area of the two metal plates, inversely proportional to the distance d between the two metal plates, and proportional to the dielectric constant ⁇ of the dielectric between the two metal plates.
  • C ⁇ * ⁇ 0 * S / d.
  • C is the calculated value of the capacitance in F
  • ⁇ is the relative dielectric constant in F / m
  • ⁇ 0 is the vacuum dielectric constant in F / m
  • S is the relative area of the two metal plates in m 2
  • d is The plate spacing between two metal plates, in m.
  • the plate electrode having the same pattern as the mark to be tested corresponds to one of the metal plates of the plate capacitor, the mark to be tested on the liquid crystal panel is equivalent to another metal plate of the plate capacitor, and the plate electrode can conduct electricity with the mark to be tested. through.
  • the area S is known, and the area of the mark to be measured can be measured when the liquid crystal panel is designed and manufactured for the first time. The manufacturing process is unchanged, and S is unchanged.
  • the electrode plate spacing d can be determined by the present invention.
  • the liquid crystal panel alignment detection device described above can be directly obtained according to a preset distance.
  • the plate electrode is placed opposite to the mark to be tested to form a plate capacitor, and a series circuit is formed with a voltage source and a current source, and then the capacitance value of the plate capacitor is measured by a capacitance measurement module, and the alignment detection can be performed based on the measured capacitance measurement value.
  • the series voltage source and current source are equivalent to an ideal current source. If the area where the two metal plates overlap is larger, the capacitance measurement value obtained by the measurement is larger. Therefore, under a certain gap, the calculated capacitance value of the plate capacitor is the theoretical capacitance value when the two metal plates are completely overlapped.
  • the capacitance measurement module can use an instrument specifically for capacitance measurement, or a multimeter with a capacitance measurement function.
  • the liquid crystal panel alignment detection device according to the present invention is an electrical alignment detection device, and includes a voltage source U0, a current source I0, a plate electrode 21, and a capacitance measurement module 22.
  • the plate electrode 21 and the mark to be tested 29 have the same pattern and are placed opposite to the mark to be measured 29 to form a plate capacitor C0; the plate capacitor C0 and the voltage source U0 and the current source I0 form a series circuit; the capacitance measurement module 22 is electrically connected to the plate electrode respectively 21 and the reception test mark 29 are used to measure the capacitance value of the plate capacitor C0 composed of the plate electrode 21 and the reception test mark 29 for alignment detection.
  • the calculated capacitance value of the plate capacitor C0 is the theoretical capacitance value when the two metal plates are completely overlapped. That is, the plate electrode 21 and the mark to be tested 29 are completely coincident, the capacitance value measured by the capacitance measurement module 22 and the calculated capacitance value will be very close, which means that the test alignment is correct.
  • the plate electrode 21 is a replaceable plate electrode, and a plate electrode having a corresponding pattern is replaced according to a different mark pattern to be tested.
  • the flat electrode 21 includes flat electrodes of different patterns such as an L-shaped flat electrode, a circular flat electrode, and the like. That is, the plate electrode 21 according to the present invention can be replaced at any time according to the mark pattern to be measured.
  • the test items such as array test, cell test, and COF bonding during the LCD panel manufacturing process
  • multiple plate electrodes with corresponding patterns need to be made, such as “L” mark, COF bonding mark Etc.
  • the operation is simple and convenient.
  • the liquid crystal panel alignment detection device of the present invention uses optical alignment for testing items such as array testing, box formation testing, and COF splicing during the manufacture of liquid crystal panels in the factory, which can achieve high-precision alignment detection, and the detection device The cost is low, and the detection method is simple and easy to operate.
  • the invention also provides a liquid crystal panel alignment detection method, which can use optical alignment for testing items such as array testing, box formation testing, and COF bonding during the manufacturing process of a liquid crystal panel in a factory to achieve high-precision alignment detection.
  • FIG. 3 a flowchart of a method for detecting the alignment of a liquid crystal panel according to the present invention.
  • the method includes: S31: Placing a plate electrode with the same pattern as the mark to be tested opposite the mark to be tested to form a plate capacitor; S32 electrically connecting the plate capacitor with a voltage source and a current source to form a series circuit; S33 : Performing a capacitance value measurement on the plate capacitor to obtain a capacitance measurement value; S34: comparing the capacitance measurement value with a capacitance calculation value of the plate capacitor to complete alignment detection.
  • the method of the present invention forms a plate capacitor by placing a plate electrode opposite to a mark to be measured, and forms a series circuit with a voltage source and a current source, and then measures the capacitance value of the plate capacitor, and can perform alignment detection based on the measured capacitance measurement value.
  • the method further includes: replacing a plate electrode having a corresponding pattern according to a different mark pattern to be tested.
  • the plate electrode according to the present invention is a replaceable plate electrode, and a plate electrode having a corresponding pattern is replaced according to different marks patterns to be tested.
  • the flat electrodes include flat electrodes of different patterns such as L-shaped flat electrodes, circular flat electrodes, and the like. That is, the flat electrode according to the present invention can be replaced at any time according to the mark pattern to be tested.
  • Multiple plate electrodes with corresponding patterns can be made in advance according to test items such as array test, box test, and COF bonding during the LCD panel manufacturing process, so that the corresponding patterns can be replaced at any time during the actual inspection.
  • the flat electrode is easy to operate.
  • the plate electrode having the same pattern as the mark to be measured corresponds to one of the metal plates of the plate capacitor, the mark to be tested on the liquid crystal panel is equivalent to another metal plate of the plate capacitor, and the plate electrode can conduct electricity with the mark to be measured through.
  • the capacitance of the plate capacitor varies with the relative area of the two metal plates and the distance between the two metal plates.
  • the capacitance of the plate capacitor is proportional to the relative area of the two metal plates, inversely proportional to the distance d between the two metal plates, and proportional to the dielectric constant ⁇ of the dielectric between the two metal plates.
  • the area S is known, and the area of the mark to be measured can be measured when the liquid crystal panel is designed and manufactured for the first time. The manufacturing process is unchanged, and S is unchanged.
  • the electrode plate spacing d can be determined by the present invention.
  • the liquid crystal panel alignment detection device described above can be directly obtained according to a preset distance.
  • comparing the capacitance measurement value with the capacitance calculation value of the plate capacitor to complete the alignment detection further includes: determining whether a difference between the capacitance measurement value and the capacitance calculation value is within a predetermined range. If the difference is set, if it is within the preset difference, the alignment is determined to be correct. With a certain alignment interval (ie, the plate spacing d), the calculated capacitance value of the plate capacitor is the theoretical capacitance value when the two metal plates are completely overlapped. That is, if the flat electrode is completely coincident with the mark to be measured, the capacitance value measured by the capacitance measurement module and the calculated capacitance value will be very close, which means that the test alignment is correct.
  • a certain alignment interval ie, the plate spacing d

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

一种液晶面板对位检测装置及方法，通过将平板电极（21）与待测标记（29）相对放置组成平板电容器（C0），并与电压源（U0）、电流源（I0）组成串联电路，再通过电容测量模块（22）测量平板电容器（C0）的电容值，根据测量所得电容测量值即可进行对位检测。可以对厂内液晶面板制作过程中阵列测试、成盒测试、COF接合等采用光学对位较为困难的测试项目，可实现高精度对位检测，而且检测装置成本较低，检测方式简单易操作。

Description

一种液晶面板对位检测装置及方法 技术领域
本发明涉及液晶面板技术领域，尤其涉及一种可以提高液晶面板对位精度的液晶面板对位检测装置及方法。
 背景技术
随着光电与半导体技术的发展，液晶显示器(Liquid Crystal Display，LCD)也得到了蓬勃发展。在诸多液晶显示器中，薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display，简称TFT-LCD)具有高空间利用效率、低消耗功率、无辐射以及低电磁干扰等优越特性。在当今信息社会，TFT-LCD已经广泛应用于生活的各个方面，从小尺寸的手机、摄像机、数码相机，中尺寸的笔记本电脑、台式机，大尺寸的家用电视，到大型投影设备等。TFT-LCD在轻、薄优势的基础上，加上完美的画面及快速的响应特性，在显示器市场上独占鳌头。
目前的TFT-LCD液晶面板检测（test）设备基本上都是通过光学影像测量仪进行对位。光学影像测量仪是集光学、机械、电子、计算机图像处理技术于一体的高精度、高效率、高可靠性的设备。其检测原理是：由光学放大系统对被测物体进行放大，经过CCD摄像系统采集影像特征并送入计算机，通过计算获取检测被测物体表面形状尺寸、角度及位置，并在屏幕上产生图形供操作员进行图影对照，从而能够直观地分辨测量结果可能存在的偏差。但是光学影像测量仪设备较为昂贵，维护复杂。
 技术问题
参考图1，常见的金属材质对位标记示意图。有些被测物体的对位标记（mark）属于金属材质，比如常见的“L”型mark（如图标号11所示），COF接合（bonding）mark（如图标号12所示）等。金属材质的对位标记具有反光不透光特点，采用光学对位较难实现。
因此，如何有效且简单的对液晶面板进行高精度对位，特别是对采用光学进行对位较为困难的测试项目进行对位检测成为亟待解决的技术问题。
 技术解决方案
本发明的目的在于，提供一种液晶面板对位检测装置及方法，可以实现有效且简单的对液晶面板进行高精度对位检测，特别是对采用光学进行对位较为困难的测试项目进行对位检测。
为实现上述目的，本发明提供了一种液晶面板对位检测装置，所述装置包括电压源、电流源、平板电极以及电容测量模块；所述平板电极与待测标记图案相同，并在检测时与所述待测标记相对放置组成平板电容器；所述平板电容器与所述电压源、电流源组成串联电路；所述电容测量模块分别电连接所述平板电极和所述接待测标记，用于测量所述平板电容器的电容值以进行对位检测。
为实现上述目的，本发明还提供了一种液晶面板对位检测方法，所述方法包括如下步骤：将与待测标记图案相同的平板电极与所述待测标记相对放置，组成平板电容器；将所述平板电容器与电压源、电流源电连接，组成串联电路；对所述平板电容器的进行电容值测量，获取电容测量值；将所述电容测量值与所述平板电容器的电容计算值比较，以完成对位检测。
 有益效果
本发明通过将平板电极与待测标记相对放置组成平板电容器，并与电压源、电流源组成串联电路，再通过电容测量模块测量平板电容器的电容值，根据测量所得电容测量值即可进行对位检测。可以对厂内液晶面板制作过程中阵列测试、成盒测试、COF 接合等采用光学对位较为困难的测试项目，可实现高精度对位检测，而且检测装置成本较低，检测方式简单易操作。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1，常见的金属材质对位标记示意图；
图2，本发明液晶面板对位检测装置的架构示意图；
图3，本发明液晶面板对位检测方法的流程图。
 本发明的实施方式
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开，下文中对特定例子的部件和设置进行描述。当然，它们仅仅为示例，并且目的不在于限制本发明。此外，本发明可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。此外，本发明提供了的各种特定的工艺和材料的例子，但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。
本发明所述的液晶面板对位检测装置是一种电学对位检测装置，包括电压源、电流源、平板电极以及电容测量模块。平板电极与待测标记两者图案相同，并与待测标记相对放置组成平板电容器；平板电容器与电压源、电流源组成串联电路；电容测量模块分别电连接平板电极和接待测标记，用于测量平板电极和接待测标记组成的平板电容器的电容值，以进行对位检测。
本发明的实施原理参照平板电容器，平板电容器是由两块相距很近且平行放置的金属板中间夹上一层绝缘物质--电介质(空气也是一种电介质)所构成的。平板电容器的电容量是随两金属板的相对面积和两金属板间的距离的变化而变化的。平板电容器的电容量与两金属板的相对面积成正比、与两金属板间的距离d成反比、与两金属板间电介质的介电常数ε成正比的。
平板电容器计算公式为：C=ε*ε0 * S/d。其中：C为电容计算值，单位F；ε为相对介电常数，单位F/m；ε0为真空介电常数，单位F/m；S为两金属板的相对面积，单位m 2；d为两金属板间之间的极板间距，单位m。
本发明中与待测标记图案完全相同的平板电极相当于平板电容器的其中一块金属板，液晶面板上的待测标记相当于平板电容器的另一块金属板，且平板电极能与待测标记电学导通。在本发明中，面积S是已知的，在液晶面板第一次产品设计制作出来时待测标记的面积就可量测得到，制程不变，S不变；极板间距d可以由本发明所述的液晶面板对位检测装置根据预先设置的距离即可直接获知。
通过将平板电极与待测标记相对放置组成平板电容器，并与电压源、电流源组成串联电路，再通过电容测量模块测量平板电容器的电容值，根据测量所得电容测量值即可进行对位检测。其中，串联的电压源、电流源等效于一个理想的电流源。若两金属板重合的面积越大，则测量所得电容测量值越大。所以，在一定的对位间距（gap）下，计算得到的平板电容器的电容值即为两金属板完全重合时的理论电容值。也即，若检测装置上的平板电极与液晶面板上的待测标记（mark）完全重合，则电容测量模块所测得的电容值与计算所得电容值会非常接近，即代表测试对位正确。电容测量模块可以采用专测电容的仪器，或者采用具有测电容功能的万用表。
参考图2，本发明液晶面板对位检测装置的架构示意图。本发明所述的液晶面板对位检测装置是一种电学对位检测装置，包括电压源U0、电流源I0、平板电极21以及电容测量模块22。平板电极21与待测标记29两者图案相同，并与待测标记29相对放置组成平板电容器C0；平板电容器C0与电压源U0、电流源I0组成串联电路；电容测量模块22分别电连接平板电极21和接待测标记29，用于测量平板电极21和接待测标记29组成的平板电容器C0的电容值，以进行对位检测。
在一定的对位间距（即图中所示极板间距d）下，计算得到的平板电容器C0的电容值即为两金属板完全重合时的理论电容值。也即，所述平板电极21与所述待测标记29完全重合，则电容测量模块22所测得的电容值与计算所得电容值会非常接近，即代表测试对位正确。
所述平板电极21为可更换平板电极，根据不同的待测标记图案更换具有相应图案的平板电极。可选的，所述平板电极21包括L型图案平板电极、圆形图案平板电极等不同图案的平板电极。也即本发明所述的平板电极21可以根据待测标记图案随时进行更换。可以预先根据液晶面板制作过程中阵列测试（Array test）、成盒测试（Cell test）、COF 接合（bonding）等测试项目需要制作相应图案的多个平板电极，例如“L”mark、COF bonding mark等，以在实际检测时随时更换相应图案的平板电极，操作简单方便。
本发明所述的液晶面板对位检测装置对厂内液晶面板制作过程中阵列测试、成盒测试、COF 接合等采用光学对位较为困难的测试项目，可实现高精度对位检测，而且检测装置成本较低，检测方式简单易操作。
本发明还提供了一种液晶面板对位检测方法，可以对厂内液晶面板制作过程中阵列测试、成盒测试、COF 接合等采用光学对位较为困难的测试项目，实现高精度对位检测。
参考图3，本发明液晶面板对位检测方法的流程图。所述方法包括：S31：将与待测标记图案相同的平板电极与所述待测标记相对放置，组成平板电容器；S32将所述平板电容器与电压源、电流源电连接，组成串联电路；S33：对所述平板电容器的进行电容值测量，获取电容测量值；S34：将所述电容测量值与所述平板电容器的电容计算值比较，以完成对位检测。
本发明所述方法通过将平板电极与待测标记相对放置组成平板电容器，并与电压源、电流源组成串联电路，再测量平板电容器的电容值，根据测量所得电容测量值即可进行对位检测。
所述方法进一步包括：根据不同的待测标记图案更换具有相应图案的平板电极。以及，本发明所述的平板电极为可更换平板电极，根据不同的待测标记图案更换具有相应图案的平板电极。可选的，所述平板电极包括L型图案平板电极、圆形图案平板电极等不同图案的平板电极。也即本发明所述的平板电极可以根据待测标记图案随时进行更换。可以预先根据液晶面板制作过程中阵列测试、成盒测试、COF 接合等测试项目需要制作相应图案的多个平板电极，例如“L”mark、COF bonding mark等，以在实际检测时随时更换相应图案的平板电极，操作简单方便。
所述电容计算值为：C=ε*ε0 * S/d，其中，C为所述电容计算值，单位F；ε为相对介电常数，单位F/m；ε0为真空介电常数，单位F/m；S为所述待测标记与所述平板电极相对面的面积，单位m 2；d为所述待测标记与所述平板电极之间的极板间距，单位m。本发明中与待测标记图案完全相同的平板电极相当于平板电容器的其中一块金属板，液晶面板上的待测标记相当于平板电容器的另一块金属板，且平板电极能与待测标记电学导通。平板电容器的电容量是随两金属板的相对面积和两金属板间的距离的变化而变化的。平板电容器的电容量与两金属板的相对面积成正比、与两金属板间的距离d成反比、与两金属板间电介质的介电常数ε成正比的。在本发明中，面积S是已知的，在液晶面板第一次产品设计制作出来时待测标记的面积就可量测得到，制程不变，S不变；极板间距d可以由本发明所述的液晶面板对位检测装置根据预先设置的距离即可直接获知。
步骤S34所述的将所述电容测量值与所述平板电容器的电容计算值比较，以完成对位检测进一步包括：判断所述电容测量值与所述电容计算值之间的差值是否在预设差值范围内，若在预设差值范围内，则判定对位正确。在一定的对位间距（即极板间距d）下，计算得到的平板电容器的电容值即为两金属板完全重合时的理论电容值。也即，所述平板电极与所述待测标记完全重合，则电容测量模块所测得的电容值与计算所得电容值会非常接近，即代表测试对位正确。
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Claims (7)

  1. 一种液晶面板对位检测装置，其中，所述装置包括电压源、电流源、平板电极以及电容测量模块；所述平板电极与待测标记图案相同，并在检测时与所述待测标记相对放置组成平板电容器；所述平板电容器与所述电压源、电流源组成串联电路；所述电容测量模块分别电连接所述平板电极和所述接待测标记，用于测量所述平板电容器的电容值以进行对位检测。
  2. 如权利要求1所述的液晶面板对位检测装置，其中，所述平板电极为可更换平板电极，根据不同的待测标记图案更换具有相应图案的平板电极。
  3. 如权利要求1所述的液晶面板对位检测装置，其中，所述平板电极包括L型图案平板电极、圆形图案平板电极。
  4. 一种液晶面板对位检测方法，其中，所述方法包括如下步骤：将与待测标记图案相同的平板电极与所述待测标记相对放置，组成平板电容器；将所述平板电容器与电压源、电流源电连接，组成串联电路；对所述平板电容器的进行电容值测量，获取电容测量值；将所述电容测量值与所述平板电容器的电容计算值比较，以完成对位检测。
  5. 如权利要求4所述的液晶面板对位检测方法，其中，所述方法进一步包括：根据不同的待测标记图案更换具有相应图案的平板电极。
  6. 如权利要求4所述的液晶面板对位检测方法，其中，所述电容计算值为： C=ε*ε0 * S/d，其中，C为所述电容计算值，单位F；ε为相对介电常数，单位F/m；ε0为真空介电常数，单位F/m；S为所述待测标记与所述平板电极相对面的面积，单位m 2；d为所述待测标记与所述平板电极之间的极板间距，单位m。
  7. 如权利要求4所述的液晶面板对位检测方法，其中，所述的将所述电容测量值与所述平板电容器的电容计算值比较，以完成对位检测的步骤进一步包括：判断所述电容测量值与所述电容计算值之间的差值是否在预设差值范围内，若在预设差值范围内，则判定对位正确。
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