WO2020037147A1 - Supplementary metrology position coordinates determination system including an alignment sensor for use with a robot - Google Patents

Supplementary metrology position coordinates determination system including an alignment sensor for use with a robot Download PDF

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Publication number
WO2020037147A1
WO2020037147A1 PCT/US2019/046702 US2019046702W WO2020037147A1 WO 2020037147 A1 WO2020037147 A1 WO 2020037147A1 US 2019046702 W US2019046702 W US 2019046702W WO 2020037147 A1 WO2020037147 A1 WO 2020037147A1
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WO
WIPO (PCT)
Prior art keywords
scale
configuration
imaging
end tool
robot
Prior art date
Application number
PCT/US2019/046702
Other languages
English (en)
French (fr)
Inventor
Kim Atherton
Michael Nahum
Casey Edward Emtman
Original Assignee
Mitutoyo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US16/104,033 external-priority patent/US10751883B2/en
Priority claimed from US16/146,640 external-priority patent/US10871366B2/en
Application filed by Mitutoyo Corporation filed Critical Mitutoyo Corporation
Priority to CN201980053434.9A priority Critical patent/CN112584984A/zh
Priority to JP2021507031A priority patent/JP7431216B2/ja
Priority to DE112019004129.0T priority patent/DE112019004129T5/de
Publication of WO2020037147A1 publication Critical patent/WO2020037147A1/en
Priority to US17/176,850 priority patent/US11745354B2/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • B25J9/1697—Vision controlled systems

Definitions

  • This disclosure relates to robot systems, and more particularly to systems for determining coordinates of an end tool position of a robot.
  • Robotic systems are increasingly utilized for manufacturing and other processes.
  • Various types of robots that may be utilized include articulated robots, selective compliance articulated robot arm (SCARA) robots, cartesian robots, cylindrical robots, spherical robots, etc.
  • SCARA selective compliance articulated robot arm
  • a SCARA robot system may typically have a base, with a first arm portion rotationally coupled to the base, and a second arm portion rotationally coupled to an end of the first arm portion.
  • an end tool may be coupled to an end of the second arm portion (e.g., for performing certain work and/or inspection operations).
  • Such systems may include position sensors (e.g., rotary encoders) utilized for
  • such systems may have a positioning accuracy of approximately 100 microns, as limited by certain factors (e.g., the rotary encoder performance in combination with the
  • U.S. Patent No. 4,725,965 which is hereby incorporated herein by reference in its entirety, discloses certain calibration techniques for improving the accuracy of a SCARA system.
  • a technique is provided for calibrating a SCARA type robot comprising a first rotatable arm portion and a second rotatable arm portion which carries an end tool.
  • the calibration technique is in relation to the fact that the SCARA robot may be controlled using a kinematic model, which, when accurate, allows the arm portions to be placed in both a first and second angular configuration at which the end tool carried by the second arm portion remains at the same position.
  • the arm portions are placed in a first configuration to locate the end tool above a fixed datum point. Then, the arm portions are placed in a second angular configuration to nominally locate the end tool again in registration with the datum point.
  • the error in the kinematic model is computed from the shift in the position of the end tool from the datum point when the arm portions are switched from the first to the second angular configuration.
  • the kinematic model is then compensated in accordance with the computed error. The steps are repeated until the error reaches zero, at which time the kinematic model of the SCARA robot is considered to be calibrated.
  • the calibration technique may include the use of certain cameras.
  • the datum point may be the center of the viewing area of a stationary television camera (i.e. , located on the ground below the end tool), and the output signal of the camera may be processed to determine the shift in the position of the end tool from the center of the viewing area of the camera when the links are switched from the first to the second configuration.
  • the second arm portion may carry a camera, and the technique may begin by placing the arm portions in a first angular configuration, at which a second predetermined interior angle is measured between the arm portions, to center the camera carried by the second arm portion directly above a fixed datum point.
  • the arm portions are then placed in a second angular configuration, at which an interior angle, equal to the second predetermined interior angle, is measured between the arm portions, to nominally center the camera again above the datum point.
  • the output signal of the camera is then processed to determine the shift in the position of the datum point, as seen by the camera, upon switching the arm portions from the first to the second angular
  • the error in the known position of the camera is then determined in accordance with the shift in the position of the datum point as seen by the camera. The steps are then repeated as part of the calibration process until the error approaches zero.
  • a supplementary metrology position coordinates determination system for use in conjunction with a robot as part of a robot system.
  • the robot e.g., an articulated robot, a SCARA robot, a cartesian robot, a cylindrical robot, a spherical robot, etc.
  • the movable arm configuration includes an end tool mounting configuration that is located proximate to a distal end of the movable arm configuration.
  • the robot is configured to move the movable arm configuration so as to move at least a portion of an end tool that is mounted to the end tool mounting configuration along at least two dimensions in an end tool working volume.
  • the motion control system is configured to control an end tool position or a measuring point position of the end tool with a level of accuracy defined as a robot accuracy, based at least in part on sensing and controlling the position of the movable arm configuration using at least one position sensor (e.g., a rotary encoder, a linear encoder, etc.) included in the robot.
  • a position sensor e.g., a rotary encoder, a linear encoder, etc.
  • the supplementary metrology position coordinates determination system includes a first imaging configuration, an XY scale, an operational alignment subsystem comprising at least an alignment sensor, an image triggering portion and a metrology position coordinate processing portion.
  • the first imaging configuration includes a first camera and has an optical axis.
  • the operational alignment subsystem may further comprise an operational alignment actuator configuration as described in greater detail below.
  • the XY scale includes a nominally planar substrate and a plurality of respective imageable features distributed on the substrate, wherein the respective imageable features are located at respective known XY scale coordinates on the XY scale.
  • a scale plane may be defined to nominally coincide with the planar substrate of the XY scale, and a direction normal to the scale plane may be defined as a scale imaging axis direction.
  • the alignment sensor is located proximate to the first camera and is mounted in a rigid configuration relative to the first camera, and the alignment sensor is configured to provide an alignment signal indicative of the scale imaging axis direction.
  • the image triggering portion is configured to input at least one input signal that is related to the end tool position or a measuring point position of the end tool and determine the timing of a first imaging trigger signal based on the at least one input signal and to output the first imaging trigger signal to the first imaging configuration.
  • the first imaging configuration is configured to acquire a digital image of the XY scale at an image acquisition time in response to receiving the first imaging trigger signal.
  • the metrology position coordinate processing portion is configured to input the acquired image and identify at least one respective imageable feature included in the acquired image of the XY scale and the related respective known XY scale coordinate location.
  • the XY scale may be an incremental scale or an absolute scale.
  • the supplementary metrology position coordinates determination system is configured with a movable one of the XY scale or the first imaging configuration coupled to the operational alignment actuator configuration which is coupled to, or part of, the movable arm configuration.
  • the other one of the XY scale or the first imaging configuration is coupled to a stationary element proximate to the robot.
  • the stationary one of the XY scale or the first imaging configuration defines a first reference position.
  • the robot system is configured to operate the operational alignment subsystem and the operational alignment actuator configuration to adjust an alignment of the moveable one of the XY scale or the first imaging configuration based on the alignment signal provided by the alignment sensor to provide an operational configuration of the supplementary metrology position coordinates determination system wherein the XY scale and the first imaging configuration are arranged with the optical axis of the first imaging configuration parallel to the direction of the scale imaging axis direction as indicated by the alignment signal, and the scale plane is located within the range of focus of the first imaging configuration along the scale imaging axis direction.
  • the supplementary metrology position coordinates determination system is configured such that when the moveable one of the XY scale or the first imaging configuration and the stationary one of the XY scale or the first imaging configuration are arranged in the operational configuration, and the movable arm configuration is positioned with the XY scale in a field of view of the first imaging configuration, then the metrology position coordinate processing portion is operable to determine metrology position coordinates that indicate a relative position between the movable one of the XY scale or the first imaging configuration and the first reference position with an accuracy level that is better than the robot accuracy, based on determining an image position of the identified at least one respective imageable feature in the acquired image.
  • the determined metrology position coordinates are indicative of the end tool position or a measuring point position of the end tool at the image acquisition time, with an accuracy level that is better than the robot accuracy, at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction.
  • the operational alignment actuator configuration may comprise at least a first rotating element that rotates about a first rotation axis that is nominally parallel to the scale plane if the XY scale is the moveable one, and nominally orthogonal to the optical axis if the first imaging configuration is the moveable one.
  • the operational alignment actuator configuration may further comprise at least a second rotating element that rotates about a second rotation axis that is nominally orthogonal to the first rotation axis. According to a convention used herein, two axes oriented such that the dot product of their direction vectors is zero will be understood to be orthogonal, regardless of whether or not they intersect.
  • the first and second rotating elements may be included in the movable arm configuration. In other such implementations, the first and second rotating elements may be included in a discrete operational alignment actuator configuration that is located proximate to a distal end of the movable arm configuration.
  • the supplementary metrology position coordinates determination system is configured with a movable one of the XY scale or the first imaging configuration coupled to the movable arm configuration.
  • the other one of the XY scale or the first imaging configuration is coupled to a stationary element proximate to the robot.
  • the stationary one of the XY scale or the first imaging configuration defines a first reference position.
  • the robot system is configured to provide at least a nominal operational configuration of the supplementary metrology position coordinates determination system wherein in the nominal operational configuration at least one of the XY scale or the first imaging configuration are arranged with the optical axis of the first imaging configuration nominally parallel to the direction of the scale imaging axis direction (e.g. as based on the robot accuracy) and with the scale plane located within the range of focus of the first imaging configuration along the scale imaging axis direction.
  • the robot system is further configured to operate the operational alignment subsystem to determine a residual misalignment between the optical axis and the scale imaging axis as indicated by the alignment signal provided by the alignment sensor (e.g. with an accuracy that is better than the robot accuracy.)
  • the supplementary metrology position coordinates determination system may be configured such that when the moveable one of the XY scale or the first imaging configuration and the stationary one of the XY scale or the first imaging configuration are arranged in the nominal operational configuration, and the movable arm configuration is positioned with the XY scale in a field of view of the first imaging configuration, then the metrology position coordinate processing portion is operable to acquire the digital image of the XY scale at an image acquisition time, and determine a corresponding residual misalignment.
  • the supplementary metrology position coordinates determination system may then determine a first set of metrology position coordinates that indicate a relative position between the movable one of the XY scale or the first imaging configuration and the first reference position with an accuracy level that is better than the robot accuracy, at least for a vector component of the first set of metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction, based on an image position of the identified at least one respective imageable feature in the acquired image and the corresponding residual misalignment.
  • the metrology position coordinate processing portion may be further configured to determine a second set of metrology position coordinates that are indicative of the end tool position or a measuring point position of the end tool at the image acquisition time based on the first set of metrology position coordinates and the corresponding residual misalignment, with an accuracy level that is better than the robot accuracy, at least for a vector component of the second set of metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction.
  • the alignment sensor may be configured to output an alignment beam to the XY scale, and receive a reflected alignment beam therefrom on a position sensitive detector of the alignment sensor, and provide the alignment signal based on at least one output from the position sensitive detector.
  • the movable one of the XY scale or the first imaging configuration is configured in a rigid relationship to at least one of the end tool mounting configuration, and/or an end tool that is mounted to the end tool mounting configuration
  • the supplementary metrology position coordinates determination system is configured to determine the metrology position coordinates of the end tool position or a measuring point position of the end tool at the image acquisition time, based on the determined metrology position coordinates that are indicative of the relative position of the movable one of the XY scale or the first imaging configuration and a known coordinate position offset between the end tool position or a measuring point position of the end tool and the movable one of the XY scale or the first imaging
  • the robot is configured to move the end tool and the movable one of the XY scale or the first imaging configuration in a plane parallel to the scale plane, while the supplementary metrology position coordinates determination system is in the operational configuration.
  • the robot system may be operated in either a robot position coordinates mode or a supplementary metrology position coordinates mode.
  • the robot position coordinates mode may correspond to an independent and/or standard mode of operation for the robot (e.g., a mode in which the robot is operated independently, such as when a supplementary metrology position coordinates determination system is not active or is otherwise not provided).
  • the robot positions coordinates mode the robot movements and corresponding end tool position or a measuring point position of the end tool are controlled and determined with the level of accuracy defined as the robot accuracy (i.e. , utilizing the position sensors included in the robot).
  • metrology position coordinates may be determined that are indicative of the end tool position or a measuring point position of the end tool at an image acquisition time, with an accuracy level that is better than the robot accuracy (e.g., better than the accuracy of the position sensors included in the robot), at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction.
  • determined position information e.g., the determined metrology position coordinates that are indicative of the relative position, the determined metrology position coordinates of the end tool position or a measuring point position of the end tool and/or other related determined position information
  • a designated function e.g., as part of workpiece measurements, positioning control of the robot, etc.
  • FIGURE 1 is a block diagram of a first exemplary implementation of a robot system including an articulated robot and a supplementary metrology position coordinates determination system including a first exemplary implementation of an operational alignment subsystem according to principles disclosed herein;
  • FIGURE 2A is an isometric diagram of a second exemplary implementation of a robot system similar to the robot system of FIGURE 1 , in which a first imaging configuration and an alignment sensor of an operational alignment subsystem are coupled to a stationary element;
  • FIGURE 2B is an isometric diagram of the robot system of FIGURE 2A, illustrating certain errors that may be indicated by the alignment sensor;
  • FIGURE 3A is an isometric diagram of a third exemplary implementation of a robot system in which an XY scale is coupled to a stationary element and a first imaging configuration and an alignment sensor of an operational alignment subsystem are coupled to a moving element;
  • FIGURE 3B is an isometric diagram of the robot system of FIGURE 3A, illustrating certain errors that may be indicated by the alignment sensor;
  • FIGURE 4 is an isometric diagram of an exemplary implementation of an incremental XY scale
  • FIGURE 5 is an isometric diagram of an exemplary implementation of an absolute XY scale
  • FIGURE 6 is a flow diagram illustrating a first exemplary implementation of a routine for operating a robot system including a robot and a supplementary metrology position coordinates determination system as disclosed herein;
  • FIGURE 7 is a flow diagram illustrating a first exemplary implementation of a routine for determining an end tool position in which robot position sensors may be utilized during a first portion of a movement timing and a determined relative position of a supplementary metrology position
  • FIGURE 8 is a block diagram of a fourth exemplary embodiment
  • FIGURE 9 is an isometric diagram of a portion of a fifth exemplary implementation of a robot system similar to the robot system of FIGURE 8 including an articulated robot, in which in which a first imaging configuration and an alignment sensor of an operational alignment subsystem are coupled to a stationary element, with the alignment sensor governing an operational alignment of an XY scale located on a moving element;
  • FIGURE 10 is isometric diagrams of a portion of a sixth exemplary implementation of a robot system including an articulated robot, in which a first imaging configuration and an alignment sensor of an operational alignment subsystem are coupled to a moving element, with the alignment sensor governing the operational alignment of the first imaging configuration relative to an XY scale located on a stationary element;
  • FIGURE 11 is a flow diagram illustrating a second exemplary implementation of a routine for operating a robot system including a robot and a supplementary metrology position coordinates determination system as disclosed herein;
  • FIGURE 12 is isometric diagram showing a portion of an implementation of a robot system similar to the robot system of FIGURES 2A and 2B, in which an XY scale and an alignment sensor and an alignment actuator configuration of an operational alignment subsystem are coupled to a moving element, and the alignment sensor and alignment actuator are used to govern the operational alignment of the XY scale relative to an imaging configuration located on a stationary element;
  • FIGURE 13 is isometric diagram showing a portion of an implementation of a robot system similar to the robot system of FIGURES 2A and 2B, in which an imaging configuration and an alignment sensor and an alignment actuator configuration of an operational alignment subsystem are coupled to a moving element, and the alignment sensor and alignment actuator are used to govern the operational alignment of the imaging configuration relative to an XY scale located on a stationary element; and
  • FIGURE 14 is a diagram of a first exemplary configuration for an alignment sensor usable in various implementations of an operational alignment subsystem according to principles disclosed herein.
  • FIGURE 1 is a block diagram of a first exemplary implementation of a robot system 100 including an articulated robot 110 and a supplementary metrology position coordinates determination system 150.
  • the supplementary metrology position coordinates determination system 150 is shown to include a first exemplary implementation of an operational alignment subsystem OAS comprising at least an alignment sensor ASen connected to operational alignment subsystem processing circuits/routines 190, as described in greater detail below.
  • the articulated robot 110 includes first and second arm portions 120 and 130, first and second rotary joints 125 and 135, position sensors SEN1 and SEN2, an end tool configuration ETCN, and a robot motion control and processing system 140.
  • the first arm portion 120 is mounted to the first rotary joint 125 at a proximal end PE1 of the first arm portion 120.
  • the first rotary joint 125 (e.g., located at an upper end of a supporting base portion BSE) has a rotary axis RA1 aligned along a z axis direction such that the first arm portion 120 moves about the first rotary joint 125 in an x-y plane that is perpendicular to the z axis.
  • the second rotary joint 135 is located at a distal end DE1 of the first arm portion 120.
  • the second rotary joint 135 has its rotary axis RA2 nominally aligned along the z axis direction.
  • the second arm portion 130 is mounted to the second rotary joint 135 at a proximal end PE2 of the second arm portion 130, such that the second arm portion 130 moves about the second rotary joint 135 in an x-y plane that is nominally perpendicular to the z axis.
  • the position sensors SEN1 and SEN2 may be utilized for determining the angular positions (i.e., in the x-y plane) of the first and second arm portions 120 and 130 about the first and second rotary joints 125 and 135, respectively.
  • the end tool configuration ETCN may include a Z-motion mechanism ZMM, a Z-arm portion ZARM, a position sensor SEN3 and an end tool coupling portion ETCP which couples to an end tool ETL.
  • the end tool ETL may include an end tool sensing portion ETSN and an end tool stylus ETST with a measuring point MP ⁇ e.g., for contacting a surface of a workpiece WP).
  • the Z-motion mechanism ZMM is located proximate to the distal end DE2 of the second arm portion 130.
  • the Z-motion mechanism ZMM (e.g., a linear actuator) is configured to move the Z-arm portion ZARM up and down in the z axis direction.
  • the Z-arm portion ZARM may also be configured to rotate about an axis parallel to the z axis direction.
  • the end tool ETL is coupled at the end tool coupling portion ETCP, and has a corresponding end tool position ETP with corresponding coordinates (e.g., x, y and z coordinates).
  • the end tool position ETP may correspond to, or be proximate to, the distal end DE3 of the Z-arm portion ZARM (e.g., at or proximate to the end tool coupling portion ETCP).
  • the motion control system 140 is configured to control the end tool position ETP of the end tool ETL with a level of accuracy defined as a robot accuracy. More specifically, the motion control system 140 is generally configured to control the x and y coordinates of the end tool position ETP with the robot accuracy based at least in part on sensing and controlling the angular positions ⁇ i.e., in the x-y plane) of the first and second arm portions 120 and 130 about the first and second rotary joints 125 and 135, respectively, using the position sensors SEN1 and SEN2.
  • the motion control and processing system 140 may include first and second rotary joint control and sensing portions 141 and 142 that may receive signals from the position sensors SEN1 and SEN2, respectively, for sensing the angular positions of the first and second arm portions 120 and 130, and/or may provide control signals ( e.g ., to motors, etc.) in the first and second rotary joints 125 and 135 for rotating the first and second arm portions 120 and 130.
  • the motion control system 140 is generally configured to control the z coordinate of the end tool position ETP with the robot accuracy based at least in part on sensing and controlling the linear position (i.e., along the z axis) of the Z-arm portion ZARM using the Z-motion mechanism ZMM and the position sensor SEN3.
  • the motion control and processing system 140 may include a Z-motion mechanism control and sensing portion 143 that may receive signals from the position sensor SEN3 for sensing the linear position of the Z-arm portion ZARM, and/or may provide control signals to the Z-motion mechanism ZMM (e.g., a linear actuator) to control the z position of the Z-arm portion ZARM.
  • the motion control and processing system 140 may also receive signals from the end tool sensing portion ETSN.
  • the end tool sensing portion ETSN may include circuitry and/or configurations related to the operations of the end tool ETL for sensing a workpiece WP.
  • the end tool ETL e.g., a touch probe, a scanning probe, a camera, etc.
  • the end tool ETL may be utilized for contacting or otherwise sensing surface locations/positions/points on a workpiece WP, for which various corresponding signals may be received, determined and/or processed by the end tool sensing portion ETSN which may provide corresponding signals to the motion control and processing system 140.
  • the motion control and processing system 140 may include an end tool control and sensing portion 144 that may provide control signals to and/or receiving sensing signals from the end tool sensing portion ETSN.
  • the end tool control and sensing portion 144 and the end tool sensing portion ETSN may be merged and/or indistinguishable.
  • the first and second rotary joint control and sensing portions 141 and 142, the Z-motion mechanism control and sensing portion 143, and the end tool control and sensing portion 144 may all provide outputs to and/or receive control signals from a robot position processing portion 145 which may control and/or determine the overall positioning of the articulated robot 110 and corresponding end tool position ETP as part of the robot motion control and processing system 140.
  • the supplementary metrology position coordinates determination system 150 may be included with or otherwise added to an articulated robot 110 ( e.g ., as part of a retrofit configuration for being added to an existing articulated robot 110, etc.) In general, the supplementary metrology position coordinates determination system 150 may be utilized to provide an improved level of accuracy for the determination of the end tool position ETP. More specifically, as will be described in more detail below, the supplementary metrology position coordinates determination system 150 may be utilized to determine a relative position that is indicative of the metrology position coordinates of the end tool position ETP, with an accuracy level that is better than the robot accuracy, at least for x and y metrology position
  • the supplementary metrology position coordinates determination system 150 includes a first imaging configuration 160, an XY scale 170, an image triggering portion 181 , and a metrology position coordinate processing portion 185.
  • the first imaging configuration 160 is coupled to a stationary element STE.
  • the stationary element STE may comprise a frame arranged above at least a portion of an operable work volume OPV of the articulated robot 110, and for which the first imaging configuration 160 is fixed to the frame above a portion of the operable work volume OPV.
  • the stationary element STE may include one or more structural support elements SSP (e.g., extending from a floor, ceiling, etc.) for maintaining the stationary element STE in a fixed location (e.g., with a fixed position and/or orientation) relative to the articulated robot 110.
  • SSP structural support elements
  • the first imaging configuration 160 includes a first camera CAM1 and has an optical axis OA1 that is aligned parallel to the z axis (e.g. nominally aligned based on the robot accuracy, or better aligned based on an alignment sensor signal.)
  • the first imaging configuration 160 has an effective focus range REFP along its optical axis OA1.
  • the range REFP may be bound by first and second effective focus positions EFP1 and EFP2, as will be described in more detail below.
  • the first imaging configuration 160 has an effective focus position EFP that falls within the range REFP.
  • the range REFP may correspond to the range of focus of the VFL lens.
  • a VFL lens that is utilized may be a tunable acoustic gradient index of refraction (TAG) lens.
  • TAG acoustic gradient index of refraction
  • a lens controller e.g., as included in the first imaging configuration control and image processing portion 180
  • the effective focus position EFP of the first imaging configuration 160 may be (rapidly) moved within the range REFP (e.g., an autofocus search range).
  • the effective focus position EFP1 (or EFPmax) may correspond to a maximum optical power of the TAG lens
  • the effective focus position EFP2 (or EFPmin) may correspond to a maximum negative optical power of the TAG lens.
  • the middle of the range REFP may be designated as EFPnom, and may correspond to zero optical power of the TAG lens.
  • such a VFL lens e.g., a TAG lens
  • a corresponding range REFP may be advantageously chosen such that the configuration limits or eliminates the need for macroscopic mechanical adjustments of the first imaging configuration 160 and/or adjustment of distances between components in order to change the effective focus position EFP.
  • an unknown amount of tilt or “sag” at the distal end DE2 of the second arm portion 130 may occur (e.g., due to the weight and/or specific orientations of the first and second arm portions 120 and 130, etc.)
  • the precise focus distance from the first imaging may be advantageously chosen such that the configuration limits or eliminates the need for macroscopic mechanical adjustments of the first imaging configuration 160 and/or adjustment of distances between components in order to change the effective focus position EFP.
  • configuration 160 to the XY scale 170 may be unknown and/or may vary with different orientations of the arms, etc.
  • a VFL lens it may be desirable for a VFL lens to be utilized that can scan or otherwise adjust the effective focus position EFP to determine and accurately focus at the XY scale 170.
  • the XY scale 170 comprises a nominally planar substrate SUB (shown in FIGURE 4).
  • a scale plane may be defined to nominally coincide with the planar substrate SUB, and a direction normal to the scale plane may defined as a scale imaging axis direction SIA.
  • the XY scale 170 is aligned in an operational configuration wherein the scale imaging axis direction SIA is at least nominally aligned with (that is, parallel to) the optical axis OA1 of the first imaging configuration 160.
  • the operational alignment actuator configuration AAct of the operational alignment subsystem OAS may be omitted (or unused) and the scale imaging axis direction SIA is simply nominally aligned with the optical axis OA1 and/or the z axis for one or more poses of the articulated robot 110 (e.g. based on the robot accuracy).
  • alignment is “passive” or open loop and may suffer small alignment errors associated with a small sag/tilt misalignment angle MisAng (e.g. as shown in FIGURE 2B), based on or due to the robot accuracy and/or unavoidable robot deformations resulting from gravity for various poses of the articulated robot 110 shown in FIGURE 1.
  • such small alignment errors may be considered to fall within the definition of a“nominal” operational configuration and/or the definition of“nominal” alignment in various implementations outlined herein.
  • an operational alignment actuator configuration AAct (e.g. the discrete operational alignment actuator configuration AAct shown in FIGURE 1 ) is included and used in the operational alignment subsystem OAS. MIGHT WANT TO PROPAGATE THIS MOST RECENT EDITING
  • the operational alignment actuator configuration AAct may actively align the scale imaging axis direction SIA with the optical axis OA1 for one or more poses of the articulated robot 110, at any desired time(s) during operation of the articulated robot 110. It will be appreciated that such an alignment is active or closed loop and small alignment errors according to the small sag/tilt misalignment angle MisAng outlined above may be actively corrected at any desired time(s) during operation of the articulated robot 110.
  • the alignment errors may be actively corrected by using alignment control signal(s) ACont generated in the alignment control portion 192 to control the discrete operational alignment actuator configuration AAct to adjust an alignment of the moveable XY scale 170 based on the alignment signal(s) Asig provided by the alignment sensor ASen, to provide an operational configuration the XY scale 170 and the first imaging configuration 160 wherein the optical axis OA1 and the scale imaging axis direction SIA are arranged to be parallel, as indicated by the alignment signal Asig.
  • alignment control signal(s) ACont generated in the alignment control portion 192 to control the discrete operational alignment actuator configuration AAct to adjust an alignment of the moveable XY scale 170 based on the alignment signal(s) Asig provided by the alignment sensor ASen, to provide an operational configuration the XY scale 170 and the first imaging configuration 160 wherein the optical axis OA1 and the scale imaging axis direction SIA are arranged to be parallel, as indicated by the alignment signal Asig.
  • the operational alignment subsystem OAS comprises the alignment sensor ASen, the discrete operational alignment actuator AAct, and operational alignment subsystem processing circuits/routines 190.
  • the operational alignment subsystem processing circuits/routines 190 include at least an alignment signal processing portion 191 , which may provide signal processing that may provide primary signal conditioning and or correction for the alignment signal(s) Asig of the alignment sensor Asen, and/or analysis that determines a misalignment angle/vector or residual misalignment angle/vector that corresponds to the alignment signal(s) Asig, as described in greater detail below.
  • the operational alignment subsystem processing circuits/routines 190 may further include an alignment control portion 192, which is generally configured to adjust an alignment of a moveable one of an XY scale or a first imaging configuration based on the alignment signal(s) Asig provided by the alignment sensor ASen, to provide an operational configuration of the XY scale and the first imaging configuration wherein an optical axis (e.g. OA1 ) of the first imaging
  • the configuration of the operational alignment subsystem processing circuits/routines 190 shown in FIGURE 1 and outlined above is exemplary only, and not limiting.
  • the various portions of the alignment subsystem processing circuits/routines 190 may be located outside the external control system ECS (e.g. in the operational alignment sensor ASen) or may be merged with and/or
  • the operational alignment subsystem processing circuits/routines 190 may exchange position and/or alignment information and/or control signals with the robot motion and control processing system 140 as indicated by the dashed line 193, in order to implement various operating principles or features disclosed herein.
  • the XY scale 170 may include a plurality of respective imageable features that are distributed on the substrate SUB.
  • the respective imageable features are located at respective known x and y scale coordinates on the XY scale 170.
  • the XY scale 170 may be an
  • the image triggering portion 181 and/or the metrology position coordinate processing portion 185 may be included as part of an external control system ECS ( e.g ., as part of an external computer, etc.)
  • the image triggering portion 181 may be included as part of a first imaging configuration control and processing portion 180.
  • the image triggering portion 181 is configured to input at least one input signal that is related to the end tool position ETP and to determine the timing of a first imaging trigger signal based on the at least one input signal, and to output the first imaging trigger signal to the first imaging configuration 160.
  • the first imaging configuration 160 is configured to acquire a digital image of the XY scale 170 at an image
  • the metrology position coordinate processing portion 185 is configured to input the acquired image and to identify at least one respective imageable feature included in the acquired image of the XY scale 170 and the related respective known XY scale coordinate location.
  • the external control system ECS may also include a standard robot position coordinates mode portion 147 and a supplementary metrology position coordinates mode portion 187, for implementing corresponding modes, as will be described in more detail below.
  • the first imaging configuration 160 may include a component (e.g., a subcircuit, routine, etc.) that activates an image integration of the camera CAM1 periodically (e.g., at a set timing interval) for which the first imaging trigger signal may activate a strobe light timing or other mechanism to effectively freeze motion and correspondingly determine an exposure within the integration period.
  • a component e.g., a subcircuit, routine, etc.
  • the first imaging trigger signal may activate a strobe light timing or other mechanism to effectively freeze motion and correspondingly determine an exposure within the integration period.
  • a resulting image may be discarded, wherein if a first imaging trigger signal is received during the integration period, the resulting image may be saved and/or otherwise processed/analyzed to determine a relative position, as will be described in more detail below.
  • different types of end tools ETL may provide different types of outputs that may be utilized with respect to the image triggering portion 181.
  • the image triggering portion 181 may be configured to input that touch signal, or a signal derived therefrom, as the at least one input signal that the timing of a first imaging trigger signal is determined based on.
  • the image triggering portion 181 may be configured to input that respective sample timing signal, or a signal derived therefrom, as the at least one input signal.
  • the image triggering portion 181 may be configured to input that workpiece image acquisition signal, or a signal derived therefrom, as the at least one input signal.
  • the supplementary metrology position coordinates determination system 150 is configured with the XY scale 170 coupled to the second arm portion 130 proximate to the distal end DE2 of the second arm portion 130 and the first imaging configuration 160 coupled to a stationary element STE (e.g., a frame arranged above the articulated robot 110) and defining a first reference position REF1.
  • a stationary element STE e.g., a frame arranged above the articulated robot 110
  • a supplementary metrology position coordinates determination system may be configured with the first imaging configuration 160 coupled to the second arm portion 130 proximate to the distal end DE2 of the second arm portion 130 and the XY scale 170 coupled to a stationary element STE and defining a first reference position REF1.
  • the location of the XY scale 170 along the z axis is within the range of focus of the first imaging configuration 160 (e.g ., for which the focus position may be adjusted by a VFL lens or otherwise), and the supplementary metrology position coordinates determination system 150 is configured such that the metrology position coordinate processing portion 185 is operable to determine a relative position ⁇ e.g., including x and y coordinates) between the movable one of the XY scale 170 or the first imaging configuration 160 and the first reference position REF1 with an accuracy level that is better than the robot accuracy, based on determining an image position of the identified at least one respective imageable feature in the acquired image.
  • a relative position ⁇ e.g., including x and y coordinates between the movable one of the XY scale 170 or the first imaging configuration 160 and the first reference position REF1 with an accuracy level that is better than the robot accuracy
  • the determined relative position is indicative of the metrology position coordinates of the end tool position ETP at the image acquisition time, with an accuracy level that is better than the robot accuracy, at least for x and y metrology position coordinates in an x-y plane that is transverse or perpendicular to the z axis.
  • the supplementary metrology position coordinates determination system 150 may be configured to determine the metrology position coordinates of the end tool position ETP at the image acquisition time, based on the determined relative position and a known coordinate position offset (x and y coordinate offset) between the end tool position ETP and the movable one of the XY scale 170 or the first imaging configuration 160. It will be appreciated that such a system may have certain advantages over various alternative systems. For example, in various implementations a system such as that disclosed herein may be smaller and/or less expensive than alternative systems utilizing technologies such as laser trackers or photogrammetry for tracking robot
  • FIGURES 2A and 2B are an isometric diagrams of a second exemplary implementation of a robot system 200 similar to the robot system 100 of FIGURE 1 in which the first imaging configuration 160 and the alignment sensor ASen of an operational alignment subsystem OAS are coupled to a stationary element STE ( e.g ., the stationary element STE of FIGURE 1 ).
  • FIGURE 2B is an isometric diagram of the robot system of FIGURE 2A, illustrating certain errors that may be indicated by the alignment sensor ASen.
  • 1XX or 2XX) of FIGURES 2A and 2B may correspond to and/or have similar operations as identically or similarly numbered counterpart components ⁇ e.g., 1XX) of FIGURE 1 , and may be understood to be similar or identical thereto and may otherwise be understood by analogy thereto and as otherwise described below.
  • This numbering scheme to indicate elements having analogous and/or identical design and/or function is also applied to various other figures herein which include identically or similarly numbered counterpart components.
  • reference numbers for obviously similar or identical elements in later figures are omitted to avoid visual clutter and more clearly show and emphasize new or different elements introduced on those later figures.
  • Such similar or identical elements may be recognized in the various figures and may understood by analogy to previous description except as otherwise indicated by description or context.
  • the operational alignment actuator configuration AAct shown in FIGURE 1 is omitted and the XY scale 170 is coupled to the second arm portion 130 proximate to the distal end DE2 of the second arm portion 130.
  • the stationary element STE that the first imaging configuration 160 is coupled to may comprise a frame arranged above the articulated robot 110.
  • different reference axes and lines may be designated for referencing certain movements, coordinates and angles of the components of the articulated robot 110.
  • the first and second arm portions 120 and 130 may each have designated horizontal center lines CL1 and CL2, respectively, passing down the centers of the respective arm portions.
  • An angle A1 may be designated as occurring between the center line CL1 of the first arm portion 120 and an x-z plane ( e.g ., in accordance with an amount of rotation of the first rotary joint 125 about the first rotary axis RA1 ).
  • An angle A2 may be designated as occurring between the horizontal center line CL1 of the first arm portion 120 and the horizontal center line CL2 of the second arm portion 130 ⁇ e.g., in accordance with an amount of rotation of the second rotary joint 135 about the second rotary axis RA2).
  • the end tool configuration ETCN may be coupled to the second arm portion 130 proximate to the distal end DE2 of the second arm portion 130 and may be designated as having an end tool axis EA of the end tool ETL that nominally intersects the center line CL2 of the second arm portion 130, and for which the end tool axis EA may generally be assumed to be parallel to the rotary axis RA2 and the z axis.
  • the end tool axis EA passes through the end tool position ETP, and has a known coordinate position offset (/. e. , for x and y coordinates) from the XY scale 170.
  • the XY scale 170 may have a designated reference point (e.g., at a center or edge of the XY scale 170) which has a known coordinate position offset (e.g., a known distance) in an x-y plane from the end tool axis EA and correspondingly from the end tool position ETP.
  • a known coordinate position offset may be expressed in terms of a known x offset and a known y offset.
  • the known coordinate position offset between the end tool position ETP and the XY scale 170 may be utilized as part of the process for determining the metrology position coordinates of the end tool position ETP. More specifically, as noted above, the supplementary metrology position coordinates determination system 150 may be configured such that the metrology position coordinate processing portion 185 operates to determine a relative position between the XY scale 170 and the first reference position REF1 (/. e. , as defined by the stationary first imaging configuration 160), based on determining an image position of the identified at least one respective imageable feature (/.e., of the XY scale 170) in the acquired image.
  • the supplementary metrology position coordinates determination system 150 may further be configured to determine the metrology position coordinates of the end tool position ETP, based on the determined relative position and a known coordinate position offset between the end tool position ETP and the movable XY scale 170.
  • the known coordinate position offset e.g., expressed in terms of a known x offset and a known y offset
  • the XY scale 170 may be designated as having a reference position (e.g. , an origin location) at X0, Y0, Z0 (e.g., which for an origin location may have values of 0,0,0).
  • the reference location REF1 (/.e., as defined by the stationary first imaging configuration 160) may be at relative coordinates of X1 , Y1 , Z1 , and a center of a corresponding field of view FOV1 (e.g.,
  • corresponding to an acquired image may be at relative coordinates of X1 , Y1 , Z0.
  • a location of the end tool axis EA in an x-y plane extending from the XY scale 170 may be designated as having relative coordinates of X2, Y2, Z0.
  • the end tool position ETP may be designated as having coordinates of X2, Y2, Z2.
  • the end tool ETL may have a measuring point MP (e.g., at the end of an end tool stylus ETST for contacting a workpiece) which may be designated as having coordinates X3, Y3, Z3.
  • the X3 and Y3 coordinates may be equal to the X2 and Y2 coordinates, respectively.
  • an acquired image may be analyzed by the metrology position coordinate processing portion 185 to determine a relative position (e.g ., to determine the X1 , Y1 coordinates corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 160).
  • a relative position e.g ., to determine the X1 , Y1 coordinates corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 160.
  • standard camera/scale image processing techniques ⁇ e.g., for determining a location of camera relative to a scale.
  • such techniques may be utilized to determine the location of a field of view (e.g., as corresponding to a position of a camera) within a scale range (e.g., within the XY scale 170).
  • a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 170 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining a relative position between the XY scale 170 and the first reference position REF1 (/. e. , as defined by the stationary first imaging configuration 160).
  • the relative X2, Y2 coordinates may then be determined according to the known coordinate position offset between the end tool position ETP and the XY scale 170 (e.g., adding the x and y position offset values to X1 and Y1 in order to determine X2 and Y2).
  • FIGURES 2A and 2B show an implementation wherein the first imaging configuration 160 and the alignment sensor ASen of an operational alignment subsystem OAS are coupled to the stationary element STE, and the XY scale 170 is coupled to the movable second arm portion 130.
  • the alignment sensor ASen is located proximate to the first camera CAM1 and is mounted in a rigid configuration relative to the first camera CAM1 and the first imaging configuration 160, according to known methods. In this rigid configuration it is desirable to have the alignment beam ABeam that is output by the alignment sensor Asen aligned parallel, or nearly parallel, to the optical axis OA1 of the first imaging configuration 160.
  • the scale imaging axis SIA is aligned parallel to the optical axis OA1 as required to establish a desired operational configuration according to principles disclosed and claimed herein.
  • the alignment beam ABeam and the optical axis OA1 are only close to parallel, the practical result is a constant offset error that may be irrelevant, or else compensated, in various applications.
  • FIGURE 2A shows an idealized case of a nominal operational configuration, which according to a convention previously explained herein is a passive or open loop alignment configuration wherein the scale imaging axis SIA, defined to be normal to the XY scale 170, and the optical axis OA1 are set up nominally parallel to one another during a set up procedure, and operated in that configuration thereafter.
  • a nominal operational configuration which according to a convention previously explained herein is a passive or open loop alignment configuration wherein the scale imaging axis SIA, defined to be normal to the XY scale 170, and the optical axis OA1 are set up nominally parallel to one another during a set up procedure, and operated in that configuration thereafter.
  • the various arm portions of the robot system 200 have no significant sag or twist, and the desired operational configuration (wherein the scale imaging axis SIA, defined to be normal to the XY scale 170, is aligned parallel to the optical axis OA1 ) is set up once, and the desired operational configuration is maintained at the illustrated position as well as other positions of robot system 200 in the absence of any residual misalignments MisAng due to sag or twist, or the like.
  • the alignment sensor ASen may be of any type suitable for determining direction normal to the XY scale over a limited range of residual misalignments MisAng (shown in FIGURE 2B) relative to a nominal or reference orientation.
  • An exemplary configuration usable in the alignment sensor ASen is described further below with reference to FIGURE 14. Exemplary
  • the movable XY scale is configured in a rigid relationship relative to the end tool mounting configuration ETMC, the end tool ETL, the (e.g. the end tool position ETP), and the measuring point MP of the end tool ETL.
  • a coordinate offset between the XY scale 170 and the end tool position ETP, and/or the measuring point MP is constant, and may be calibrated.
  • the residual misalignment e.g.
  • a misalignment angle or vector) of the end tool ETL may be known and the corresponding misalignment or error of the end tool position ETP and/or the measuring point MP may be determined and at least partially corrected or compensated based on the indicated residual misalignment, as described in greater detail with reference to FIGURE 2B.
  • FIGURE 2B shows the same configuration shown in FIGURE 2A, except in a non-idealized or actual case in which the various arm portions of the robot system 200 have a significant amount of sag or twist (e.g. on the order or tens or hundreds of microns). According to the previously outlined convention, this configuration may still be described as providing a nominal operational configuration that provides positioning and measurement results within the expected or specified nominal range of robot accuracy, (e.g. as has been expected and/or tolerated in various prior art robot systems.)
  • the various arm portions of the robot system 200 have significant sag and/or twist, which results in the XY scale 170 deflecting to a corresponding residual misalignment MisAng (e.g a residual misalignment angle).
  • the angle of such residual misalignment MisAng is small and the XY scale 170 may be significantly displaced in Z without being significant displaced in X and Y due to the residual misalignment MisAng.
  • the optical axis OA1 is shown to intersect the XY scale at the same X and Y coordinates (X1 ,Y1 ), but at a different Z coordinate (Z0’, instead of Z0).
  • the end tool position ETP and the measuring point position MP of the“touch probe” end tool ETL are significantly displaced in Z, as well as being significant displaced in X and Y due to the angle of the residual misalignment MisAng interacting with their respective offsets LoffEPT and LoffMP relative to the scale plane of the XY scale 170. It may be seen that the offsets LoffEPT and LoffMP are along the direction normal to the scale plane (and/or the nominal Z axis.) The offsets may be known by design or calibration.
  • the coordinate displacements or errors of the measuring point position MP, (X3’-X3) may be approximated as SIN(MisAngX)*LoffMP, and (Y3’-Y3) may be approximately as SIN(MisAngY)*LoffMP, where MisAngX and MisAngY are the angle components of the residual misalignment MisAng in the XZ and YZ planes, respectively.
  • the coordinate displacements or errors of the end tool position ETP, (X2’-X2) may be approximated as
  • SIN(MisAngX)*LoffETP, and (Y2’-Y2) may be approximately as
  • displacements or errors which are based on the residual misalignment MisAng, may be used to at least partially correct or compensate a set of metrology position coordinates that are indicative of the end tool position ETP or a measuring point position MP of the end tool when a residual misalignment is present as outlined above, at least for a vector component of that set of metrology position coordinates that is at least one of transverse or
  • the coordinate displacements or errors associated with (Z2’-Z2) and/or (Z3’-Z3) may be approximated based on the residual misalignment MisAng indicated by the alignment sensor ASen and the known geometry and orientations and mechanical characteristics (e.g. beam
  • errors that would otherwise be present in the Z coordinate of a set of metrology position coordinates may also be at least partially corrected of compensated based on the residual misalignment indicated by the alignment sensor ASen.
  • the magnitude of the residual misalignment MisAng may be assessed in operations of the operational alignment subsystem OAS, and if the magnitude exceeds a predetermined threshold (e.g. related a error limit) then operations related to compensating or correcting for a translation or displacement of the XY scale 170 across the field of view FOV1 may be performed.
  • a predetermined threshold e.g. related a error limit
  • X and Y displacements of the XY scale 170 due to large residual misalignments may be approximated based on the residual misalignment MisAng indicated by the alignment sensor ASen and the known geometry and orientations and mechanical characteristics (e.g. beam properties) of the various arm portions and bearings of the robot system 200.
  • errors that would otherwise be present in the X and Y image position coordinates of imageable features of the XY scale 170, and/or a corresponding set of metrology position coordinates may be at least partially corrected of
  • the decision whether or not such X and Y image position corrections are to be included in a set of metrology position coordinates that indicate a relative position between the movable one of the XY scale or the first imaging configuration and the first reference position may be based on the magnitude of the residual misalignment and the accuracy desired in a particular application.
  • FIGURES 3A and 3B are an isometric diagrams of a third exemplary implementation of a robot system 300 similar to the robot system 100 of FIGURE 1 and the robot system 200 of FIGURES 2A and 2B, except the first imaging configuration 160 and the alignment sensor ASen of an operational alignment subsystem OAS are coupled to a to the movable second arm portion 130 proximate to the distal end DE2 of the second arm portion 130, and the XY scale 170 is coupled to the stationary element STE and defines the first reference position REF1.
  • FIGURE 3B is an isometric diagram of the robot system of FIGURE 3A, illustrating certain errors that may be indicated by the alignment sensor ASen.
  • the operational alignment actuator configuration AAct shown in FIGURE 1 is omitted.
  • FIGURES 3A and 3B may correspond to identically or similarly numbered counterpart components ⁇ e.g., 1XX, 2XX) of FIGURES 1 , 2A and 2B and may be similar or identical thereto and may be understood by analogy thereto and as otherwise described below. In some cases, obviously similar or identical elements in later figures may have their reference numbers omitted to avoid visual clutter, but they may be understood as previously outlined.
  • FIGURE 3A may be understood in many respects by analogy with the previous description of FIGURE 2A, therefore only significant difference are emphasized below.
  • the first imaging configuration 160 may have a designated reference point (e.g., at a center of an effective lens position of the first imaging configuration 160), which is illustrated as having the coordinates (X1 , Y1 , Z1 ).
  • FIGURE 3A shows an idealized case of a nominal operational configuration, which according to the same convention previously describe with reference to
  • FIGURE 2A is a passive or open loop alignment configuration wherein the scale imaging axis SIA and the optical axis OA1 are set up nominally parallel to one another and operated in that configuration thereafter.
  • the various arm portions of the robot system 200 have no significant sag or twist, and the desired nominal operational configuration is maintained.
  • the movable first imaging configuration 160 and the alignment sensor ASen are configured in a rigid relationship relative to one another and to the end tool mounting configuration ETMC, the end tool ETL, the (e.g. the end tool position ETP), and the measuring point MP of the end tool ETL.
  • a coordinate offset between the designated reference point of the first imaging configuration 160 and the end tool position ETP, and/or the measuring point MP is constant, and may be calibrated.
  • the residual misalignment e.g. a misalignment angle or vector
  • the corresponding misalignment or error of the end tool position ETP and/or the measuring point MP may be determined and at least partially corrected or compensated based on the indicated residual misalignment, which may be understood by analogy with the similar
  • FIGURE 3B shows the same configuration shown in FIGURE 3A, except in a non-idealized or actual case in which the various arm portions of the robot system 300 have a significant amount of sag or twist (e.g. on the order or tens or hundreds of microns). According to the previously outlined convention, this configuration may still be described as providing a nominal operational configuration that provides positioning and measurement results within the expected or specified nominal range of robot accuracy, (e.g. as has been expected and/or tolerated in various prior art robot systems.) FIGURE 3A may be understood in many respects by analogy with the previous description of FIGURE 2B, therefore only significant difference are emphasized below.
  • the field of view FOV1 of the first imaging configuration 160 will translate across the XY scale 170 from its desired or reference alignment position (e.g. as shown in FIGURE 3A) depending on the residual misalignment MisAng, leading to an FOV
  • the apparent position of the first imaging configuration 160 relative to the XY scale 170 is generally inferred based on determining an image position of at least one respective identifiable feature of the XY scale 170 in an acquired image,
  • the FOV misalignment error outlined above is not generally detectable, and manifests as a corresponding error in the determined image position of the least one respective identifiable feature of the XY scale 170.
  • the scale feature positioned along the optical axis OA1 in an acquired image has the“translated” X and Y position coordinates (X1’, Y1’), which are different than the actual position coordinates (X1 , Y1 ) of the designated reference point of the first imaging configuration 160, resulting in a corresponding error (the FOV misalignment error) when estimating or determining the position of the first imaging configuration based on that acquired image.
  • the residual misalignment e.g. a misalignment angle or vector
  • the corresponding FOV misalignment error may be determined and at least partially corrected or compensated based on the indicated residual
  • misalignment MisAng One of ordinary skill in the art will recognize that the FOV misalignment error (X1’-X1 ) along the X direction may be approximated as SIN(MisAngX)*ID, and the FOV misalignment error (Y1’-Y1 ) along the Y direction may be approximated as SIN(MisAngY)*ID, where MisAngX and MisAngY are the angle components of the residual misalignment MisAng in the XZ and YZ planes, respectively. It will be understood that such determined FOV misalignment displacements or errors, which are based on the residual misalignment MisAng, may be used to at least partially correct or compensate an image position error and/or the resulting set of metrology position
  • image position correction outlined immediately above may be combined with the previously outlined corrections of the that may arise in relation to end tool position ETP and/or the measuring point MP due to their respective offsets in combination with a residual misalignment errors, to determine a set of metrology position coordinates that are indicative of the end tool position ETP or a measuring point position of the end tool at an image acquisition time, with an accuracy level that is better than the robot accuracy, at least for a vector component of the second set of metrology position coordinates that is at least one of transverse or
  • the coordinate displacements or errors associated with (Z2’-Z2) and/or (Z3’-Z3) may be approximated based on the residual misalignment indicated by the alignment sensor ASen and the known geometry and orientations and mechanical characteristics (e.g. beam properties) of the various arm portions and bearings of the robot system 300.
  • errors that would otherwise be present in the Z coordinate of a set of metrology position coordinates may also be at least partially corrected of compensated based on the residual misalignment indicated by the alignment sensor ASen.
  • a robot system 200, 300 comprises a robot comprising a movable arm configuration MAC and a motion control system.
  • the movable arm configuration MAC comprises an end tool mounting configuration ETMC that is located proximate to a distal end of the movable arm configuration MAC, and the robot is configured to move the movable arm configuration MAC so as to move at least a portion of an end tool ETL that is mounted to the end tool mounting configuration ETMC along at least two dimensions in an end tool working volume.
  • the motion control system is configured to control an end tool position ETP or a measuring point position MP of the end tool ETL with a level of accuracy defined as a robot accuracy, based at least in part on sensing and controlling the position of the movable arm configuration MAC using at least one position sensor SEN included in the robot.
  • the robot system further comprises a supplementary metrology position coordinates determination system 150, comprising a first imaging configuration 160, and XY scale 170, an operational alignment subsystem OAS, an image triggering portion 181 , a metrology position coordinate processing portion 185.
  • the first imaging configuration 160 comprises a first camera CAM1 , and has an optical axis OA1.
  • the XY scale 170 comprised a nominally planar substrate and a plurality of respective imageable features distributed on the substrate, wherein the respective imageable features are located at respective known XY scale coordinates on the XY scale and a scale plane is defined to nominally coincide with the planar substrate of the XY scale, and a direction normal to the scale plane is defined as a scale imaging axis direction SIA.
  • the operational alignment subsystem OAS comprises at least an alignment sensor ASen, wherein the alignment sensor ASen is located proximate to the first camera CAM1 and is mounted in a rigid configuration relative to the first camera CAM1 , and the alignment sensor ASen is configured to provide an alignment signal Asig indicative of the scale imaging axis direction SIA.
  • the image triggering portion configured to input at least one input signal that is related to the end tool position ETP or a measuring point position MP of the end tool ETL and determine the timing of a first imaging trigger signal based on the at least one input signal and output the first imaging trigger signal to the first imaging configuration 160, wherein the first imaging configuration 160 is configured to acquire a digital image of the XY scale at an image acquisition time in response to receiving the first imaging trigger signal.
  • the metrology position coordinate processing portion is configured to input the acquired image and identify at least one respective imageable feature included in the acquired image of the XY scale, and the related respective known XY scale coordinate location.
  • the supplementary metrology position coordinates determination system 150 is configured with a movable one of the XY scale 170, or the first imaging configuration 160 and the alignment sensor Asen, coupled to the movable arm configuration MAC, and the other one of the XY scale 170 or the first imaging configuration 160 and the alignment sensor Asen coupled to a stationary element STE proximate to the robot, with the stationary one of the XY scale 170 or the first imaging configuration 160 defining a first reference position.
  • the robot system is configured to provide at least a nominal operational configuration of the supplementary metrology position coordinates determination system 150, wherein in the nominal operational configuration of the supplementary metrology position coordinates determination system 150 the XY scale 170 and the first imaging configuration 160 are arranged with the optical axis OA1 of the first imaging configuration 160 nominally parallel to the direction of the scale imaging axis direction SIA and with the scale plane located within the range of focus of the first imaging configuration 160 along the scale imaging axis direction SIA.
  • the robot system is further configured to operate the operational alignment subsystem OAS to determine a residual misalignment MisAng between the optical axis OA1 and the scale imaging axis SIA as indicated by the alignment signal ASig provided by the alignment sensor ASen.
  • the supplementary metrology position coordinates determination system 150 is further configured such that when the moveable one of the XY scale 170 or the first imaging configuration 160 and the stationary one of the XY scale 170 or the first imaging configuration 160 are arranged in the nominal operational configuration, and the movable arm configuration MAC is positioned with the XY scale 170 in a field of view FOV1 of the first imaging configuration 160, then the metrology position coordinate processing portion 150 is operable to acquire the digital image of the XY scale 170 at an image acquisition time, and determine a corresponding residual misalignment MisAng.
  • the supplementary metrology position coordinates determination system may then determine a first set of metrology position coordinates that indicate a relative position between the movable one of the XY scale 170 or the first imaging configuration 160 and the first reference position with an accuracy level that is better than the robot accuracy at least for a vector component of the first set of metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction, based on an image position of the identified at least one respective imageable feature in the acquired image and the corresponding residual misalignment MisAng.
  • the metrology position coordinate processing portion 150 may further be operable to determine a second set of metrology position coordinates that are indicative of the end tool position ETP or a measuring point position MP of the end tool ETL at the image acquisition time based on the first set of metrology position coordinates and the corresponding residual misalignment MisAng, with an accuracy level that is better than the robot accuracy, at least for a vector component of the second set of metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction SIA.
  • FIGURE 4 is an isometric diagram of an exemplary implementation of an incremental XY scale 170A.
  • the incremental XY scale 170A includes an array of evenly spaced incremental imageable features IIF.
  • the incremental XY scale 170A may have a periodicity that is smaller than 100 microns ( e.g ., for which periodic spacings XSP1 and YSP1 between the incremental imageable features IIF along the respective x and y axes may each be less than 100 microns).
  • the position information that is determined utilizing the incremental XY scale 170A may have an accuracy of at least 10 microns.
  • the accuracy determined utilizing such an XY scale 170A may be approximately 10x better than the robot accuracy.
  • the incremental XY scale 170A may have an even higher periodicity of approximately 10 microns, for which, if the magnification of the first imaging configuration 160 is approximately 1x and interpolation is performed by a factor of 10x, an approximately 1 micron accuracy may be achieved. Such a configuration would have an approximately 100x
  • a location of a field of view FOV of the first imaging configuration 160 within the incremental XY scale 170A may provide an indication of a relative position between the XY scale 170A and the first reference position REF1.
  • the first imaging configuration 160 may be utilized in combination with the incremental XY scale 170A as part of a camera/scale image processing configuration.
  • the metrology position coordinate processing portion 185 may determine a relative incremental position between the XY scale 170A and the first reference position REF1 based on the location of the field of view FOV within the incremental XY scale 170A, as indicated by the portion of the XY scale 170A in the acquired image, and as is known in the art for camera/scale image processing techniques (e.g., as described in the previously incorporated references).
  • the incremental XY scale 170A may be of various sizes relative to the field of view FOV (e.g., the incremental XY scale 170A may be at least 4x, 10x, 20x, etc. larger than the field of view FOV).
  • the incremental position indicated by the XY scale 170A may be combined with position information from the articulated robot 110 to determine a relatively precise and/or absolute position.
  • the sensors SEN1 and SEN2 e.g., rotary encoders
  • the sensors SEN1 and SEN2 may indicate the end tool position ETP with the robot accuracy, for which the incremental position indicated by the XY scale 170A may be utilized to further refine the determined end tool position ETP to have an accuracy that is better than the robot accuracy.
  • the metrology position coordinate processing portion 185 may be configured to identify one or more respective imageable features IIF included in the acquired image of the XY scale 170A based on the image positions of the one or more imageable features IFF in the acquired image and based on articulated robot position data derived from the motion control system 140 corresponding to the image acquisition time.
  • the respective imageable features IFF of the XY scale 170A may comprise a set of similar imageable features IFF that are distributed on the substrate such that they are spaced apart from one another at regular intervals by a distance that is more than a maximum position error that is allowed within the robot accuracy.
  • the imageable features IFF are spaced apart (e.g., at spacings XSP1 and YSP1 ) by more than a maximum position error MPE as represented by a circle
  • the robot accuracy for the position determination is sufficient to determine the location with an accuracy that is greater than the spacing between the imageable features IFF.
  • a single imageable feature IFF on the XY scale 170A i.e., wherein the imageable features are all at known x and y metrology position coordinates on the XY scale 170A according to the even spacings across the scale
  • the location of single imageable feature IFF in the acquired image may then be utilized to further refine the end tool position ETP to have an accuracy that is better than the robot accuracy, at least for x and y metrology position coordinates of the end tool position ETP in an x-y plane that is perpendicular to the z axis.
  • the XY scale 170A may be designated as having a reference position (e.g., an origin location) at X0, Y0, Z0 (e.g., which for an origin location may have values of 0,0,0).
  • the reference location REF1 i.e., as defined by the stationary first imaging configuration 160
  • a center of a corresponding field of view FOV e.g ., as captured in an acquired image
  • X1 , Y1 , Z0 may be at relative coordinates of X1 , Y1 , Z0.
  • a location of the end tool axis EA in an x-y plane extending from the XY scale 170 may be designated as having relative coordinates of X2, Y2, Z0.
  • the end tool position ETP may be designated as having coordinates of X2, Y2, Z2.
  • an acquired image may be analyzed by the metrology position coordinate processing portion 185 to determine the X1 , Y1 coordinates corresponding to the center of the field of view FOV of the stationary first imaging configuration 160.
  • a determination may be made in accordance with standard camera/scale image processing techniques, for determining a location of a field of view ⁇ e.g., corresponding to a location of a camera) within a scale range ⁇ e.g., within the XY scale 170A).
  • the reference position/origin location X0, Y0, Z0 is not required to be in the field of view FOV for such a determination to be made ⁇ i.e., the relative position may be determined from the scale information at any location along the XY scale 170A, as provided in part by the scale elements comprising the evenly spaced incremental imageable features IIF).
  • such a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 170 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining a relative position between the XY scale 170 and the first reference position REF1 ⁇ i.e., as defined by the stationary first imaging configuration 160).
  • the relative X2, Y2 coordinates ⁇ i.e., of the end tool position ETP) may then be determined according to the known coordinate position offset between the end tool position ETP and the XY scale 170 (e.g., adding the x and y position offset values to X1 and Y1 in order to determine X2 and Y2).
  • the acquired image may indicate that the center of the field of view FOV is in the middle of four incremental imageable features IIF, but may not indicate which specific four incremental imageable features IIF of the XY scale 170 are included in the image.
  • the position information from the articulated robot 110 may be accurate enough to provide such information, for which the specific four incremental imageable features IIF of the XY scale 170A may be identified (e.g., based in part on the principles noted above by which the imageable features IFF are spaced apart by more than a maximum position error as represented by a representative circular area MPE so that each imageable feature IFF may be uniquely identified).
  • the acquired image may then be analyzed by the metrology position coordinate processing portion 185 to determine precisely where the center of the field of view (/. e. , at the coordinates X1 , Y1 , Z0) occurs within that section of the XY scale (/.e., which includes the specific four incremental imageable features IIF).
  • the process may then continue as indicated above (e.g., for correspondingly determining the X2 and Y2
  • the alignment beam ABeam is reflected from an alignment reflective feature ARF on surface parallel to the scale plane.
  • the reflective features ARF may be the imageable features IFF and the alignment beam ABeam may be positioned to reflect off of such features based on moving the robot to do so (using the robot accuracy is sufficient.)
  • the alignment sensor need not operate everywhere on the XY scale 170A, and does not need to operate continuously.
  • the alignment beam ABeam may be operated intermittently to avoid related“noise” in the acquired scale images, for example.
  • the alignment reflective features ARF are larger than the spot size of the alignment beam Abeam. IFF this conflicts with a desired size of the imageable features IFF, then additional larger features ARF may be provided at various locations on the XY scale, as schematically represented by the optional alignment reflective features ARF show in FIGURE 4.
  • the alignment beam Abeam may have a wavelength that is invisible to the first imaging configuration 160 (e.g. based on camera sensitivity or wavelength filtering), and the XY scale 170A may include a wavelength specific reflective layer everywhere, which allows the alignment sensor ASen to operated everywhere on the XY scale 170A and/or
  • FIGURE 5 is an isometric diagram of an exemplary implementation of an absolute XY scale 170B.
  • the absolute XY scale 170B includes an array of evenly spaced incremental imageable features IIF, and also includes a set of absolute imageable features AIF having unique identifiable patterns ⁇ e.g., a 16-bit pattern).
  • a location of a field of view FOV of the first imaging configuration 160 within the absolute XY scale 170B (/. e.
  • the set of absolute imageable features AIF are distributed on the substrate SUB such that they are spaced apart (e.g., at spacings XSP2 and YSP2) by less than a distance corresponding to a distance across a field of view FOV of the first imaging configuration 160 (/.e., so that at least one absolute imageable feature AIF will always be included in a field of view).
  • the metrology position coordinate processing portion 185 is configured to identify at least one respective absolute imageable feature AIF included in the acquired image of the XY scale 170B based on the unique identifiable pattern of the respective absolute imageable feature AIF. It will be appreciated that such implementations are able to independently determine an absolute position that is indicative of the end tool position ETP with an accuracy that is better than the robot accuracy, at least for x and y metrology position coordinates of the end tool position ETP in an x-y plane that is perpendicular to the z axis ( e.g ., and which, in contrast to the incremental XY scale 170B, may not require combining with position information from the articulated robot 110 to determine the absolute position).
  • the acquired image may indicate that the center of the field of view FOV is in the middle of a number of incremental imageable features IIF.
  • the position information from the included two absolute imageable features AIF indicates which section of the XY scale 170B the image includes, for which the included incremental imageable features IIF of the XY scale 170 may also be identified.
  • the acquired image may, accordingly, be analyzed by the metrology position coordinate processing portion 185 to determine precisely where the center of the field of view (/. e.
  • the process may then continue as indicated above (e.g., for correspondingly determining the X2 and Y2 coordinates of the end tool position ETP).
  • FIGURE 6 is a flow diagram illustrating an exemplary implementation of a routine 600 for operating a robot system including a robot and a supplementary metrology position coordinates determination system that includes an operational alignment subsystem that does not include an operational alignment actuator configuration AAct.
  • a determination is made as to whether the robot system is to be operated in a supplementary metrology position coordinates mode.
  • a selection and/or activation of a supplementary metrology position coordinates mode or a standard robot position coordinates mode may be made by a user and/or may be automatically made by the system in response to certain operations and/or instructions.
  • a supplementary metrology position coordinates mode may be entered ( e.g ., automatically or in accordance with a selection by a user) when the articulated robot moves into a particular position ⁇ e.g., moves an end tool from a general area where assembly or other operations are performed to a more specific area where workpiece inspection operations are typically performed and where the supplementary metrology position coordinates mode would be utilized).
  • a particular position e.g., moves an end tool from a general area where assembly or other operations are performed to a more specific area where workpiece inspection operations are typically performed and where the supplementary metrology position coordinates mode would be utilized.
  • such modes may be
  • a hybrid mode may be operated either independently or as part of a supplementary metrology position coordinates mode and/or may be implemented as a switching between the modes, as will be described in more detail below with respect to FIGURE 7.
  • the routine proceeds to a block 615, where the robot system is operated in a standard robot position coordinates mode.
  • the position sensors e.g., rotary encoders
  • the first and second rotary encoders may indicate the positions of the first and second arm portions with a lower degree of accuracy than the position information that is determined utilizing the XY scale.
  • the robot position coordinates mode may correspond to an independent and/or standard mode of operation for the articulated robot (e.g., a mode in which the articulated robot is operated independently, such as when a supplementary metrology position coordinates determination system is not active or is otherwise not provided). If the robot system is to be operated in a supplementary metrology position coordinates mode, the routine proceeds to a block 620, where the robot and supplementary metrology position coordinates
  • determination system are arranged to at provide a“nominal” operational configuration of the supplementary metrology position coordinates
  • The“nominal” operational configuration has been previously defined according to a convention used herein.
  • a scale plane is defined to nominally coincide with a planar substrate of the XY scale, and a direction normal to the scale plane is defined as a scale imaging axis direction.
  • the“nominal” operational configuration and at least one of the XY scale or the first imaging configuration is arranged with the optical axis of the first imaging configuration nominally parallel to the scale imaging axis direction, and the scale plane is located in the focus range of the first imaging configuration along the scale imaging axis direction.
  • At a block 630 at least one input signal is received (/. e. , at an image triggering portion) that is related to an end tool position or a measuring point position of the end tool of an articulated robot.
  • a timing is determined of a first imaging trigger signal based on the at least one input signal and the first imaging trigger signal is output to a first imaging configuration.
  • the first imaging configuration acquires a digital image of an XY scale at an image acquisition time in response to receiving the first imaging trigger signal.
  • the operational alignment subsystem is operated (e.g. by the robot system) to determine a residual misalignment between the optical axis and the scale imaging axis as indicated by the alignment signal provided by the alignment sensor, the residual misalignment corresponding to the acquired digital image.
  • a residual misalignment that corresponds to the acquired digital may depend on the situation. For the best accuracy, it may be desirable that the residual misalignment is established with the movable arm configuration of the robot in the same (or nearly the same) position and/or pose that is to be used during the operations of block 630.
  • the operations of block 635 and 630 may be performed at different locations and/or times and the residual misalignment determined at block 635 may sufficiently correspond to the digital image acquired at block 630.
  • the acquired image is received ( e.g ., at a metrology position coordinate processing portion), and at least one respective imageable feature included in the acquired image of the XY scale and the related respective known XY scale coordinate location are identified.
  • a first set of metrology position coordinates are determined that indicate a relative position between the movable one of the XY scale or the first imaging configuration and the first reference position with an accuracy better than the robot accuracy, at least for a vector component of the first set of metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction.
  • the first set of metrology position coordinates are determined based on an image position of the identified at least one respective imageable feature in the acquired image and the corresponding residual misalignment (e.g. as previously outlined with reference to FIGURES 2A, 2B, 3A and/or 3B).
  • a second set of metrology position coordinates may be determined that are indicative of the end tool position or a measuring point position of the end tool at the image acquisition time, based on the first set of metrology position coordinates and the corresponding residual misalignment, with an accuracy level that is better than the robot accuracy, at least for a vector component of the second set of metrology position
  • the routine may end.
  • the routine may be partially or completely repeated.
  • the determined position information e.g., from the block 655 may correspond to or otherwise be utilized for determining a first surface location on a workpiece, and the routine may be repeated for which a second surface location on the workpiece may then be determined (e.g., as part of a workpiece measurement such as measuring a feature of a workpiece).
  • the operations at the block 620 need not be repeated.
  • the first and second determined metrology position coordinates determined by repeating the routine 600 that are indicative of the first and second relative positions and/or related position information may be utilized to determine a dimension of the workpiece that corresponds to a distance between the first and second surface locations on the workpiece that correspond to the respective end tool positions or measuring point positions of the end tool when contacting the respective first and second surface locations on the workpiece, etc. at respective image acquisition times.
  • position sensors e.g., rotary encoders, linear encoders, etc.
  • more accurate position information may be determined utilizing the techniques as described herein. More specifically, the determination of the first and second surface locations (i.e.
  • the corresponding dimension of the workpiece e.g., of a workpiece feature
  • the corresponding dimension of the workpiece e.g., of a workpiece feature
  • FIGURE 7 is a flow diagram illustrating one exemplary implementation of a routine 700 for determining an end tool position in which different techniques may be utilized during different portions of a movement timing.
  • a routine 700 for determining an end tool position in which different techniques may be utilized during different portions of a movement timing.
  • one or more arm portions of the articulated robot are moved from first rotary positions to second rotary positions (e.g., which may include rotating the arm portions around rotary joints from first rotary orientations to a second rotary orientations).
  • a decision block 710 a determination is made as to whether a hybrid mode will be utilized for determining the end tool position during the movement timing.
  • a hybrid mode may also be representative of a process which includes switching between the supplementary metrology position coordinates mode and the standard robot position coordinates mode.
  • the routine continues to a block 720, where the position sensors (e.g., rotary encoders) of the articulated robot are solely utilized for determining the end tool position during the movement timing.
  • the position sensors e.g., rotary encoders
  • the routine proceeds to a block 730, for which during a first portion of a movement timing, the position sensors included in the articulated robot are utilized for determining the end tool position. During such operations, a relative position of a supplementary metrology position coordinates determination system may not be determined and/or is otherwise not utilized to determine the end tool position.
  • FIGURE 8 is a block diagram of a fourth exemplary embodiment
  • a robot system 800 including a robot 810 and a robot 810
  • the supplementary metrology position coordinates determination system 850 is shown to include a second exemplary implementation of an operational alignment subsystem OAS comprising an alignment sensor ASen and an operational alignment actuator configuration AAct comprising elements included in a movable arm configuration MAC' and a robot motion control and processing system 840 of the robot system 800, as described in greater detail below.
  • the alignment sensor ASen and the operational alignment actuator configuration AAct are connected to (or otherwise interoperate with) operational alignment subsystem processing circuits/routines 890.
  • the robot 810 (e.g., an articulated robot) includes a movable arm configuration MAC' and a robot motion control and processing system 840.
  • the supplementary metrology position coordinates determination system 850 includes a first imaging configuration 860, an XY scale 870, an image triggering portion 881 and a metrology position coordinate processing portion 885.
  • the XY scale 870 is coupled to the movable arm configuration MAC'.
  • the first imaging configuration 860 has a first optical axis OA1 that may be parallel to a scale imaging axis direction SIA when in an operational configuration.
  • the movable arm configuration MAC' includes a lower base portion BSE', arm portions 821 -825, motion mechanisms 831-835, position sensors SENT-SEN5', and an end tool mounting
  • each of the arm portions 821 -825 may have respective proximal ends PE1-PE5 and respective distal ends DE1 -DE5. In various implementations, some or all of the arm portions 821 -825 may be mounted to respective motion mechanisms 831 -835 at respective proximal ends PE1 -PE5 of the respective arm portions 821 -825.
  • some or all of the motion mechanisms 831 -835 may enable motion (e.g., rotation, linear motion, etc.) of the respective arm portions 821 -825 (e.g., about or along respective rotary axes RA1 '-RA5, etc.)
  • the position sensors SEN1'-SEN5' e.g., rotary encoders, linear encoders, etc.
  • the positions e.g., angular orientations, linear positions, etc.
  • the movable arm configuration MAC' may have a portion that is designated as a terminal portion (e.g., the fifth arm portion 825).
  • the end tool mounting configuration ETMC is located proximate to (e.g., located at) the distal end DE5 of the fifth arm portion 825 (e.g., designated as the terminal portion), which corresponds to a distal end of the movable arm configuration MAC'.
  • the XY scale 870 may be coupled to the movable arm configuration MAC' so as to be proximate to the distal end of the movable arm configuration MAC'.
  • the XY scale 870 is coupled to the fifth arm portion 825 at a location that is proximate to the distal end of the movable arm configuration MAC'.
  • the supplementary metrology position coordinates determination system is configured with the movable one of the XY scale (e.g. 870) or the first imaging configuration (e.g. 860) coupled to the operational alignment actuator configuration AAct, which is coupled to, or part of, the movable arm configuration (e.g. MAC’).
  • the operational alignment actuator configuration AAct comprises a first rotating element 835/825 and a second rotating element 834/824 that are included in the movable arm configuration MAC’.
  • the end tool mounting configuration ETMC may include various elements for coupling and maintaining the end tool ETL proximate to the distal end of the movable arm configuration MAC'.
  • the end tool mounting configuration ETMC may include an autojoint connection, a magnetic coupling portion and/or other coupling elements as are known in the art for mounting an end tool ETL to a corresponding element.
  • the end tool mounting configuration ETMC may also include electrical connections (e.g., a power connection, one or more signal lines, etc.) for providing power to and/or sending signals to and from at least part of the end tool ETL (e.g., to and from the end tool sensing portion ETSN).
  • the end tool ETL may include the end tool sensing portion ETSN and the end tool stylus ETST with the measuring point MP of the end tool (e.g., for contacting a surface of a workpiece WP).
  • the fifth motion mechanism 835 is located proximate to the distal end DE4 of the fourth arm portion 824.
  • the fifth motion mechanism 835 e.g., a rotary joint with a corresponding motor
  • the end tool ETL is mounted to (e.g., coupled to) the end tool mounting configuration ETMC, and has a corresponding end tool position ETP with corresponding metrology position coordinates (e.g.
  • the end tool position ETP may correspond to or be proximate to the position of the end tool mounting configuration ETMC (e.g., at or proximate to the distal end DE5 of the fifth arm portion 825 which may correspond to the distal end of the movable arm configuration MAC').
  • the motion control system 840 is configured to control the end tool position ETP of the end tool ETL with a level of accuracy defined as a robot accuracy. More specifically, the motion control system 840 is generally configured to control the metrology position coordinates (e.g., x, y and z coordinates) of the end tool position ETP with the robot accuracy based at least in part on utilizing the motion mechanisms 831 -835 and position sensors SENT-SEN5' for sensing and controlling the positions of the arm portions 821- 825.
  • the metrology position coordinates e.g., x, y and z coordinates
  • the motion control and processing system 840 may include motion mechanism control and sensing portions 841 -845 that may respectively receive signals from the respective position sensors SENT- SEN5', for sensing the positions (e.g., angular positions, linear positions, etc.) of the respective arm portions 821 -825, and/or may provide control signals to the respective motion mechanisms 831 -835 (e.g., including rotary joints, linear actuators, motors, etc.) for moving the respective arm portions 821 -825.
  • the respective motion mechanisms 831 -835 e.g., including rotary joints, linear actuators, motors, etc.
  • the motion control and processing system 840 may also receive signals from the end tool sensing portion ETSN.
  • the end tool sensing portion ETSN may include circuitry and/or configurations related to the operations of the end tool ETL for sensing a workpiece WP.
  • the end tool ETL e.g., a touch probe, a scanning probe, a camera, etc.
  • the end tool ETL may utilized for contacting or otherwise sensing surface locations/positions/points on a workpiece WP, for which various corresponding signals may be received, determined and/or processed by the end tool sensing portion ETSN which may provide corresponding signals to the motion control and processing system 840.
  • the motion control and processing system 840 may include an end tool control and sensing portion 846 that may provide control signals to and/or receive sensing signals from the end tool sensing portion ETSN.
  • the end tool control and sensing portion 846 and the end tool sensing portion ETSN may be merged and/or indistinguishable.
  • the motion mechanism control and sensing portions 841 -845 and the end tool control and sensing portion 846 may all provide outputs to and/or receive control signals from a robot position processing portion 847 which may control and/or determine the overall positioning of the movable arm configuration MAC' of the robot 810 and corresponding end tool position ETP as part of the robot motion control and processing system 840.
  • the supplementary metrology position coordinates determination system 850 may be included with or otherwise added to a robot 810 (e.g., as part of a retrofit configuration for being added to an existing robot 810, etc.)
  • the supplementary metrology position coordinates determination system 850 may be utilized to provide an improved level of accuracy for the determination of the end tool position ETP. More specifically, as will be described in more detail below, the supplementary metrology position coordinates determination system 850 may be utilized to determine metrology position coordinates that are indicative of the end tool position ETP, with an accuracy level that is better than the robot accuracy, at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction SIA.
  • this may correspond to the accuracy level being better than the robot accuracy at least for x and y metrology position coordinates in an x-y plane that is perpendicular to the z axis).
  • the first imaging configuration 860 is coupled to the stationary element STE proximate to the robot 810.
  • the stationary element STE may comprise a frame arranged above at least a portion of an end tool working volume ETWV', and for which the first imaging configuration 860 is fixed to the frame above a portion of the end tool working volume ETWV'.
  • the stationary element STE may include one or more structural support elements SSP (e.g., extending from a floor, ceiling, etc.) for maintaining the stationary element STE in a fixed location (e.g., with a fixed position and/or orientation) relative to the robot 810.
  • the end tool working volume ETWV consists of a volume in which at least a portion of at least one of the end tool ETL and/or the XY scale 870 may be moved.
  • the end tool working volume ETWV' is illustrated as including a volume in which the measuring point MP of the end tool ETL may be moved when inspecting a workpiece.
  • an end tool working volume may alternatively include a volume in which the XY scale 870 may move when the end tool ETL is moved for inspecting a workpiece.
  • the robot 810 is configured to move the movable arm configuration MAC' so as to move at least a portion of the end tool ETL (e.g., the measuring point MP of the end tool ETL’) that is mounted to the end tool mounting configuration ETMC along at least two dimensions (e.g., x and y dimensions) in the end tool working volume ETWV'.
  • the portion of the end tool ETL e.g., the measuring point MP of the end tool ETL’
  • the robot 810 is configured to move the movable arm configuration MAC' so as to move at least a portion of the end tool ETL (e.g., the measuring point MP of the end tool ETL’) that is mounted to the end tool mounting configuration ETMC along at least two dimensions (e.g., x and y dimensions) in the end tool working volume ETWV'.
  • the portion of the end tool ETL e.g., the measuring point MP of the end tool ETL’
  • three dimensions e.g., x, y and z
  • the first imaging configuration 860 includes a first camera CAM1 and has an optical axis OA1. In an operational configuration of the
  • the optical axis OA1 of the first imaging configuration 860 is parallel to the direction of the scale imaging axis direction SIA.
  • the first imaging configuration 860 has an effective focus range REFP along its optical axis OA1.
  • the range REFP may be bound by first and second effective focus positions EFP1 and EFP2, as will be described in more detail below.
  • the first imaging configuration 860 has an effective focus position EFP that falls within the range REFP.
  • the range REFP may correspond to the range of focus of the VFL lens.
  • a VFL lens that is utilized may be a tunable acoustic gradient index of refraction (TAG) lens.
  • TAG acoustic gradient index of refraction
  • a lens controller e.g., as included in a first imaging configuration control and processing portion 880
  • the effective focus position EFP of the first imaging configuration 860 may be (e.g., rapidly) moved within the range REFP (e.g., an autofocus search range).
  • the effective focus position EFP1 (or EFPmax) may correspond to a maximum optical power of the TAG lens
  • the effective focus position EFP2 (or EFPmin) may correspond to a maximum negative optical power of the TAG lens.
  • the middle of the range REFP may be designated as EFPnom, and may correspond to zero optical power of the TAG lens.
  • VFL lens e.g., a TAG lens
  • REFP corresponding range
  • the precise focus distance from the first imaging configuration 860 to the XY scale 870 may be unknown and/or may vary with different orientations of the arm portions, etc.
  • the distance between the XY scale 870 and the first imaging configuration 860 may generally change in accordance with the general operations of the movable arm configuration MAC' which may move the end tool position ETP to different locations/distances from the first imaging configuration 860 along the scale imaging axis direction SIA (e.g., as part of the operations for scanning a surface of a workpiece WP, etc.)
  • the movable arm configuration MAC' may move the end tool position ETP to different locations/distances from the first imaging configuration 860 along the scale imaging axis direction SIA (e.g., as part of the operations for scanning a surface of a workpiece WP, etc.)
  • VFL lens it may be desirable for a VFL lens to be utilized that can scan or otherwise adjust the effective focus position EFP to determine and accurately focus at the XY scale 870.
  • such techniques utilizing a VFL lens may be utilized in combination with other focus adjusting techniques (e.g., utilized in combination with changeable objective lenses that may also be included in the first imaging configuration 860, etc.)
  • the operational alignment subsystem OAS comprises the alignment sensor ASen, the operational alignment actuator AAct which comprises elements of the movable arm configuration MAC’, and operational alignment subsystem processing circuits/routines 890.
  • the operational alignment subsystem processing circuits/routines 890 include an alignment signal processing portion 891 which may provide signal processing that may provide primary signal conditioning and or correction for the alignment signal(s) Asig of the alignment sensor Asen, and/or analysis that determines a misalignment angle/vector or residual misalignment angle/vector that corresponds to the alignment signal(s) Asig, as described in greater detail below.
  • the operational alignment subsystem processing circuits/routines 890 further include an alignment control portion 892, which is generally configured to adjust an alignment of a moveable one of an XY scale or a first imaging configuration based on the alignment signal(s) Asig provided by the alignment sensor ASen, to provide an operational configuration of the XY scale and the first imaging configuration, wherein an optical axis (e.g. OA1 ) of the first imaging configuration and the scale imaging axis direction SIA are arranged to be parallel, as indicated by the alignment signal Asig, as outlined above.
  • an optical axis e.g. OA1
  • the configuration of the operational alignment subsystem processing circuits/routines 890 shown in FIGURE 8 and outlined above is exemplary only, and not limiting.
  • the various portions of the alignment subsystem processing circuits/routines 890 may be located outside the external control system ECS (e.g. in the operational alignment sensor ASen), or may be merged with and/or
  • the operational alignment subsystem processing circuits/routines 890 exchanges position and/or alignment information and/or control signals with the robot motion and control processing system 840 as indicated by the dashed line 893 in order to implement various operating principles or features disclosed herein.
  • the various elements and operations outlined above are described in greater detail below.
  • the XY scale 870 may be the same as the XY scale 170 described above with respect to FIGURES 4 and 5, or is otherwise configured according to principles disclosed herein.
  • the robot system 800 may be operable to provide an operational configuration of the supplementary metrology position coordinates determination system 850 as describe in greater detail below with reference to FIGURE 9 and 10.
  • the movable XY scale 870 is arranged so that the direction of the scale imaging axis direction SIA is parallel to the optical axis OA1 of the first imaging configuration 860 as indicated by the alignment signal Asig of the alignment sensor ASen, and the scale plane is located within the range of focus REFP of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • the robot system 800 is configured to operate the operational alignment subsystem OAS and the operational alignment actuator configuration AAct to adjust an alignment of the moveable one of the XY scale 870 or the first imaging configuration 860 based on the alignment signal provided by the alignment sensor ASen to provide an operational configuration of the supplementary metrology position coordinates determination system 850, wherein in the operational configuration of the supplementary metrology position coordinates determination system 850 the XY scale 870 and the first imaging configuration 860 are arranged with the optical axis OA1 of the first imaging configuration 860 parallel to the scale imaging axis direction SIA as indicated by the alignment signal(s) Asig.
  • the image triggering portion 881 and/or the metrology position coordinate processing portion 885 may be included as part of an external control system ECS' (e.g., as part of an external computer, etc.)
  • the image triggering portion 881 may be included as part of the first imaging configuration control and processing portion 880.
  • the image triggering portion 881 is configured to input at least one input signal that is related to the end tool position ETP and to determine the timing of a first imaging trigger signal based on the at least one input signal, and to output the first imaging trigger signal to the first imaging configuration 860.
  • the first imaging configuration 860 is configured to acquire a digital image of the XY scale 870 at an image
  • the metrology position coordinate processing portion 885 is configured to input the acquired image and to identify at least one respective imageable feature included in the acquired image of the XY scale 870 and the related respective known XY scale coordinate location.
  • the external control system ECS' may also include a standard robot position coordinates mode portion 849 and a supplementary metrology position coordinates mode portion 887, for implementing corresponding modes, as will be described in more detail below.
  • the first imaging configuration 860 may include a component (e.g., a subcircuit, routine, etc.) that activates an image integration of the camera CAM1 periodically (e.g., at a set timing interval) for which the first imaging trigger signal from the image triggering portion 881 may activate a strobe light timing or other mechanism to effectively freeze motion and correspondingly determine an exposure within the integration period.
  • a component e.g., a subcircuit, routine, etc.
  • the first imaging trigger signal from the image triggering portion 881 may activate a strobe light timing or other mechanism to effectively freeze motion and correspondingly determine an exposure within the integration period.
  • a resulting image may be discarded, wherein if a first imaging trigger signal is received during the integration period, the resulting image may be saved and/or may otherwise be processed/analyzed to
  • different types of end tools ETL may provide different types of outputs that may be utilized with respect to the image triggering portion 881.
  • the image triggering portion 881 may be configured to input that touch signal or a signal derived therefrom as the at least one input signal that the timing of a first imaging trigger signal is determined based on.
  • a central axis of the touch probe may be oriented along the scale imaging axis direction SIA (e.g., with the central axis of the touch probe corresponding to the end tool axis EA).
  • the image triggering portion 881 may be configured to input that respective sample timing signal or a signal derived therefrom as the at least one input signal.
  • the image triggering portion 881 may be configured to input that workpiece image acquisition signal or a signal derived therefrom as the at least one input signal.
  • the supplementary metrology position coordinates determination system 850 is configured with the XY scale 870 coupled to the operational alignment actuator configuration AAct, which is coupled to, or part of, the movable arm configuration (e.g. MAC’).
  • the operational alignment actuator configuration AAct comprises a first rotating element 835/825 and a second rotating element 834/824 that are included in the movable arm configuration MAC’.
  • the first imaging configuration 860 and the alignment sensor ASen are coupled to a stationary element STE (e.g., a frame arranged above and proximate to the robot 810) and defines a first reference position REF1.
  • a supplementary metrology position coordinates determination system may be configured with the first imaging configuration 860 and the alignment sensor ASen coupled to the operational alignment actuator configuration AAct, which is coupled to, or part of, the movable arm configuration (e.g. MAC’) proximate to the distal end of the movable arm configuration MAC', and with the XY scale 870 coupled to a stationary element STE and defining a first reference position REF1.
  • the movable arm configuration e.g. MAC’
  • the supplementary metrology position coordinates determination system 850 may be configured such that the moveable one of the XY scale 870 or the first imaging configuration 860 and the stationary one of the XY scale 870 or the first imaging configuration 860 are arranged in the operational configuration as based on (or indicated by) the alignment signal Asig from the alignment sensor ASen, with with the XY scale 870 located in a field of view FOV and focus range of the first imaging configuration 860 by the movable arm configuration MAC'.
  • the metrology position coordinate processing portion 885 is then operate to determine metrology position coordinates that indicate a relative position between the movable one of the XY scale 870 or the first imaging configuration 860 and the first reference position REF1 with an accuracy level that is better than the robot accuracy, at least at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction SIA, based on determining an image position of the identified at least one respective imageable feature in the acquired image.
  • the determined metrology position coordinates are indicative of the end tool position ETP and/or the measuring point position MP of the end tool at the image acquisition time, with an accuracy level that is better than the robot accuracy, at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction SIA.
  • the supplementary metrology position coordinates determination system 850 may be configured to determine the metrology position coordinates of the end tool position ETP at the image acquisition time and/or the measuring point position MP of the end tool, based on the determined metrology position coordinates that indicate the relative position of the movable one of the XY scale 870 or the first imaging configuration 860 and a known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the movable one of the XY scale 870 or the first imaging configuration 860.
  • the robot systems such as those illustrated in FIGURES 1 and 8 may have certain advantages over various alternative systems.
  • systems such as those disclosed herein may be smaller and/or less expensive than alternative systems utilizing technologies such as laser trackers or photogrammetry for tracking robot movement/positions, and may also have higher accuracy in some implementations.
  • the disclosed systems also do not take up or obscure any part of the end tool working volume ETWV or ETWV', such as alternative systems that may include a scale or fiducial on the ground or stage, or otherwise in the same area (e.g., in the end tool working volume ETWV or ETWV) where workpieces may otherwise be worked on and/or inspected, etc.
  • FIGURES 9 and 10 are similar in that they both show implementations that use active alignment to remove the X and X errors previously outlined with reference to FIGURES 2B and 3B. Active alignment substantially eliminates these errors. That active alignment is a“closed loop” alignment procedure based on the signal(s) ASig from the alignment sensor ASen. It will be understood that sag and twist (e.g. similar to that shown in FIGURES 2B and 3B) are present in the movable arm configuration MAC’ shown in these figures, but the sag and twist are not illustrated, to avoid visual clutter. It will be understood that the effects of sag and twist may be
  • the active alignment may be performed manually or automatically at least once at a desired time during operations of the robot system 900 (1000) in order to establish the desired operational configuration, or intermittently at any desired time (e.g. when the robot pose is changed), or frequently or continuously in some implementations.
  • the Z errors may be at least approximately corrected as previously outlined with reference to FIGURES 2B and 3B.
  • the magnitude of the adjustments of the operational alignment actuators AAct that is necessary to correct for sag and twist in order to achieve the operational configuration may be known and recorded in the operational alignment subsystem circuits/routines 890 (or 190).
  • the magnitude of the residual misalignment MisAng with the operational alignment actuators AAct in a known or reference state prior to such adjustments may be known and recorded.
  • the sag/twist misalignment e.g. a sag/twist
  • the distal end of the movable arm configuration MAC’ and/or the end tool ETL may be at least approximately or known or inferred.
  • the coordinate displacements or errors associated with the Z2 and/or Z3 coordinates shown in FIGURES 9 and 10 may be approximated based on a sag/twist misalignment determined as outlined above in combinations with known geometry and orientations and mechanical characteristics (e.g. beam properties) of the various arm portions and bearings of the robot system 900 (or 1000). In such implementations, it will be
  • errors that would otherwise be present in the Z coordinate of a set of metrology position coordinates may be at least partially corrected of compensated based on a sag/twist misalignment determined as outlined above, which is ultimately based on a residual misalignment indicated by the alignment sensor ASen.
  • an sag/twist misalignment determined as outlined above which is ultimately based on a residual misalignment indicated by the alignment sensor ASen.
  • operational alignment actuator configuration AAct comprises the motion mechanism 834 and 835, which are included in the movable arm configuration MAC’ and used in the operational alignment subsystem OAS.
  • the scale imaging axis direction SIA may actively aligned with the optical axis OA1 for one or more poses of the articulated robot 110, at any desired time(s) during operation of the articulated robot 110. It will be
  • MisAng outlined previously herein may be actively corrected at any desired time(s) during operation of the articulated robot 110.
  • any desired time(s) during operation of the articulated robot 110 In the illustrated
  • the alignment errors may be actively corrected by using alignment control signal(s) generated in the alignment control portion 892 to control the operational alignment actuator configuration AAct to adjust an alignment of the moveable XY scale 870 based on the alignment signal(s) Asig provided by the alignment sensor ASen, to provide an operational configuration the XY scale 870 and the first imaging configuration 860 wherein the optical axis OA1 and the scale imaging axis direction SIA are arranged to be parallel, as indicated by the alignment signal Asig.
  • the operational alignment subsystem processing circuits/routines 890 may exchange certain position and/or alignment information and/or control signals with the robot motion and control processing system 840 as indicated by the dashed line 893, in order to implement various operating principles or features disclosed herein.
  • Many aspects and features shown in FIGURES 9 and 10 may generally be understood based on the foregoing explanation and description of analogous aspects and features in various previous figures. Certain other aspects and features are described in greater detail below.
  • FIGURE 9 is an isometric diagram of a portion of a fifth exemplary implementation of a robot system 900 similar to the robot system 800 of
  • FIGURE 8 in which the first imaging configuration 860 and an alignment sensor ASen of an operational alignment subsystem OAS are is coupled to a stationary element STE.
  • the alignment sensor ASen governs an operational alignment of an XY scale 870 located on a moving element.
  • certain named or numbered components e.g., 8XX, 8XX' or 9XX
  • FIGURE 9 may correspond to and/or have similar operations as identically or similarly named or numbered counterpart components (e.g., 8XX) of FIGURE 8, or of other figures, and may be understood to be similar or identical thereto and may otherwise be
  • the stationary element STE that the first imaging configuration 860 is coupled to may comprise a frame arranged above the robot 810.
  • the movable arm configuration MAC' includes the arm portions 821 -825.
  • an operational alignment actuator configuration AAct comprises the motion mechanism 834 and 835, which are included in the movable arm configuration MAC’ and used in the operational alignment subsystem OAS.
  • the XY scale 870 is coupled to the arm portion or bracket 825, and thereby to the operational alignment actuator configuration AAct, and thereby to the remainder of the movable arm configuration MAC'. In other configurations, other coupling configurations may be utilized for coupling the XY scale 870 to the movable arm configuration MAC'.
  • the position and/or orientation of the XY scale 870 as coupled to the movable arm configuration MAC' may be adjustable, although may also be temporarily locked or otherwise fixed in a given position/orientation (e.g., for a series of measurements, etc.)
  • the first imaging configuration 860 in an operational configuration of the supplementary metrology position coordinates determination system 850, may be arranged with the optical axis OA1 of the first imaging configuration 860 parallel to the direction of the scale imaging axis direction SIA and with the scale plane located within the range of focus of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • the robot 810 is briefly described here, as it is a known type.
  • the first arm portion 821 e.g., an upper base portion
  • the first motion mechanism 831 e.g., a rotary joint
  • the first motion mechanism 831 is located at an upper end of the lower supporting base portion BSE' and has a rotary axis RAT aligned along the Z axis.
  • optical axis OA1 and scale imaging axis direction SIA may be aligned with the Z axis, such that the first arm portion 821 rotates in a plane that is perpendicular to the optical axis OA1 and scale imaging axis direction SIA when they are arranged in the desired operational configuration.
  • the position sensor SENT e.g., a rotary encoder
  • the second motion mechanism may be utilized for determining the angular position (e.g., the angular orientation) of the first arm portion 821.
  • the second motion mechanism 832 is located proximate to a distal end DE1 of the first arm portion 821.
  • the second motion mechanism 832 has a rotary axis RA2' which nominally perpendicular to the Z axis.
  • the second arm portion 822 is mounted to the second motion mechanism 832 at a proximal end PE2 of the second arm portion 822, such that the second arm portion 822 moves about the rotary axis RA2'.
  • the position sensor SEN2' may be utilized for determining the angular position A2’ of the second arm portion 822.
  • the third motion mechanism 833 is located at a distal end DE2 of the second arm portion 822.
  • the third motion mechanism 833 has a rotary axis RA3' which is nominally perpendicular to the Z axis.
  • the third arm portion 823 is mounted to the third motion mechanism
  • the fourth motion mechanism 834 is located at a distal end DE3 of the third arm portion 823.
  • the fourth motion mechanism 834 has a rotary axis RA4 which is nominally perpendicular to the Z axis.
  • the fourth arm portion 824 is mounted to the fourth motion mechanism 834 at a proximal end PE4 of the fourth arm portion 824, such that the fourth arm portion 824 rotates about the rotary axis RA4.
  • the position sensor SEN4 may be utilized for determining the angular position (e.g., in a plane that may be parallel to the Z axis) of the fourth arm portion 824.
  • the fifth motion mechanism 835 may be located at a distal end DE4 of the fourth arm portion 824 and has a rotary axis RA5, which may be nominally perpendicular to the rotary axis RA4 in various implementations.
  • the fifth arm portion 825 e.g. a bracket
  • the position sensor SEN5 may be utilized for determining an angular position of the fifth arm portion 825 and/or the XY scale 870, about the rotary axis RA5. In some implementations, it may be desirable to arrange the scale plane of the XY scale 870 parallel to the rotary axis RA5, as described in greater detail below. As illustrated in FIGURE 9 the second and third arm portions 822 and 823 may each have designated center lines CL2' and CL3, respectively, passing down the centers of the respective arm portions.
  • An angle A2' (e.g., which may correspond to an amount of rotation of the second motion mechanism 832) may be designated as occurring between the center line CL2' of the second arm portion 822 and plane (e.g., parallel to the scale plane in the operational configuration, which may be in an x-y plane when the optical axis OA1 is parallel to the z axis).
  • An angle A3' may be designated as occurring between the center line CL2' of the second arm portion 822 and the center line CL3 of the third arm portion 823 (e.g., in accordance with an amount of rotation of the third motion mechanism 833 about the third rotary axis RA3').
  • the other arm portions may similarly have corresponding reference lines and/or axes, etc. for referencing certain movements, coordinates and angles of the components of the movable arm configuration MAC'.
  • the movable XY scale 870 may be described as being coupled to a central sub-portion (e.g., including the arm portion 823 and at least some proximal elements thereto) of the movable arm configuration MAC' through a distal sub- portion comprising a rotating element (e.g., arm portion 824 coupled to a motion mechanism 834) that rotates about a rotary axis RA4 and a rotating element (e.g., a bracket or arm portion 825 coupled to a motion mechanism 835) that rotates about a rotary axis RA5.
  • a rotating element e.g., arm portion 824 coupled to a motion mechanism 834
  • a rotating element e.g., a bracket or arm portion 825 coupled to a motion mechanism 835
  • Mechanisms 834 and 835 may be regarded as an operational alignment actuator configuration AAct, and may be used to provide the desired
  • the rotation axis RA5 is nominally parallel to the scale plane of the XY scale 870, and nominally orthogonal to the scale imaging axis SIA.
  • the rotation axis RA4 is nominally orthogonal to the rotation axis RA5. According to a convention used herein, two axes oriented such that the dot product of their direction vectors is zero will be understood to be orthogonal or perpendicular, regardless of whether or not they intersect. It will be understood that this arrangement of rotation axis allows for simple and convenient motion control and sensor processing, but it is exemplary only and not limiting.
  • the rotating elements of the operational alignment actuator configuration AAct are included in the movable arm configuration MAC’ in this implementation, in other implementations, the rotating elements (typically, first and second rotating elements) may be included in a discrete operational alignment actuator configuration that is located proximate to a distal end of a movable arm configuration MAC (e.g. as described below with reference to FIGURES 12 and 13.
  • the rotation axis RA4 is parallel to one or more other rotational axes (e.g. RA2, RA3) of the movable arm configuration MAC’. It will be appreciated that in such a case, if the rotation axis RA4 is counter-rotated in a direction opposite and equal to an angular rotation of a parallel rotation axis in the movable arm configuration MAC’, that the desired operational configuration of the supplementary metrology position coordinates determination system 850 may be maintained throughout various movements or positionings of the robot 810, if desired. More generally, the XY either locked, or adjustable/rotatable to different fixed orientations/positions relative to the movable arm configuration MAC', in order to achieve a desired orientation/position for a particular measurement.
  • the XY either locked, or adjustable/rotatable to different fixed orientations/positions relative to the movable arm configuration MAC', in order to achieve a desired orientation/position for a particular measurement.
  • the end tool ETL may be mounted (e.g., coupled) to the end tool mounting configuration ETMC proximate to the distal end DE5 of the fifth arm portion 825.
  • the end tool ETL may be mounted (e.g., coupled) to the end tool mounting configuration ETMC proximate to the distal end DE5 of the fifth arm portion 825.
  • the end tool ETL may be mounted (e.g., coupled) to the end tool mounting configuration ETMC proximate to the distal end DE5 of the fifth arm portion 825.
  • the end tool ETL may be mounted (e.g., coupled) to the end tool mounting configuration ETMC proximate to the distal end DE5 of the fifth arm portion 825.
  • the end tool axis EA passes through the end tool position ETP, and has a known coordinate position offset from the XY scale 870 (e.g. as shown for by the offset LoffMP, for the Z coordinate position offset component), and in the operational configuration is parallel to the scale imaging axis direction SIA (e.g., such that the end tool ETL with the stylus ETST is oriented parallel to the scale imaging axis direction SIA).
  • a known coordinate position offset between the end tool position ETP and the XY scale 870.
  • the XY scale 870 may have a designated reference point (e.g., at a center or edge of the XY scale 870) which has a known coordinate position offset (e.g., a known distance in a plane that is parallel to the scale plane or otherwise) from the end tool axis EA (e.g., and correspondingly from the end tool position ETP).
  • a known coordinate position offset may be expressed in terms of known offset components.
  • the known coordinate position offset between the end tool position ETP and the XY scale 870 may be utilized as part of the process for determining the metrology position coordinates of the end tool position ETP.
  • the supplementary metrology position coordinates determination system 850 may be configured such that the metrology position coordinate processing portion 885 operates to determine metrology position coordinates that indicate a relative position between the XY scale 870 and the first reference position REF1 (i.e. , as defined by the stationary first imaging configuration 860), based on determining an image position of the identified at least one respective imageable feature (i.e. , of the XY scale 870) in the acquired image.
  • the supplementary metrology position coordinates determination system 850 may further be configured to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool, based on the
  • determined metrology position coordinates which indicate the relative position (i.e., between the XY scale 870 and the first reference position REF1 ), and a known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the movable XY scale 870.
  • the known coordinate position offset (e.g., expressed in terms of known offset components, such as a known x offset and a known y offset and a known z offset) may be added to or otherwise combined with the determined metrology position coordinates that indicate the relative position (i.e., between the XY scale 870 and the first reference position REF1 ) in order to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool ETL.
  • known offset components such as a known x offset and a known y offset and a known z offset
  • the XY scale 870 may be designated as having an origin at X0, Y0, Z0 (e.g., for an origin location at the center of the scale, which may have scale coordinate values of 0,0,0).
  • the reference location REF1 i.e., as defined by the stationary first imaging configuration 860
  • a center of a corresponding field of view FOV1 e.g., corresponding to an acquired image
  • FOV1 e.g., corresponding to an acquired image
  • a location of the end tool axis EA in an x- y plane extending from the XY scale 870 may be designated as having relative metrology position coordinates of X2, Y2.
  • the end tool position ETP may be designated as having metrology position coordinates of X2, Y2, Z2.
  • the end tool ETL may have a measuring point MP (e.g., at the end of an end tool stylus ETST for contacting a workpiece) which may be designated as having metrology position coordinates X3, Y3, Z3.
  • the X3 and Y3 coordinates may be equal to the X2 and Y2 coordinates, respectively.
  • an acquired image may be analyzed by the metrology position coordinate processing portion 885 to determine the scale coordinates that correspond to the metrology position coordinates X1 , Y1 corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 860.
  • Such a determination may be made in accordance with standard camera/scale image processing techniques (e.g., for determining a location of camera relative to a scale).
  • standard camera/scale image processing techniques e.g., for determining a location of camera relative to a scale.
  • such techniques may be utilized to determine the location of a field of view FOV1 (e.g., as corresponding to a position of a camera) within a scale range (e.g., within the XY scale 870), as described above with respect to FIGURES 4 and 5.
  • a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 870 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining metrology position coordinates that indicate a relative position between the XY scale 870 and the first reference position REF1 (i.e.
  • the relative X2, Y2 coordinates (i.e., of the end tool position ETP) may then be determined according to the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool ETL and the XY scale 870 (e.g., adding known x and y and z position offset values to X1 and Y1 and Z0 in order to determine X2, Y2, Z2 and/or X3, Y3 and Z3.
  • the residual misalignment MisAng is reduced to zero as based on and indicated by the misalignment sensor ASen, in the desired operational configuration provided as outlined above. Therefore, errors that depend on the residual misalignment MisAng (e.g. previously outlined with reference to
  • FIGURES 2A-3B are substantially prevented, and need not be corrected or compensated.
  • the various offset amounts and/or misalignment errors between various components may be determined and/or saved as calibration data and used as outlined herein without the need for additional correction or compensation that would otherwise arise due to a non-zero residual misalignment.
  • FIGURE 10 is isometric diagrams of a portion of a sixth exemplary implementation of a robot system 1000 similar to the robot system 900 of FIGURE 9, except that the first imaging configuration 860 and the alignment sensor ASen of an operational alignment subsystem OAS are coupled to a moving element of the movable arm configuration MAC’, with the alignment sensor ASen governing the operational alignment of the first imaging
  • the stationary element STE that the XY scale 870 is coupled to may comprise a frame arranged above the robot 810.
  • the operational alignment actuator configuration AAct comprises the motion mechanisms 834 and 835, which are included in the movable arm configuration MAC’ and used in the operational alignment subsystem OAS, as previously outlined with reference to FIGURE 9.
  • the first imaging configuration 860 and the alignment sensor ASen are coupled to the arm portion or bracket 825, and thereby to the operational alignment actuator configuration AAct, and thereby to the remainder of the movable arm configuration MAC'.
  • other coupling configurations may be utilized for coupling the first imaging configuration 860 to the movable arm configuration MAC'.
  • the position and/or orientation of the first imaging configuration 860 as coupled to the movable arm configuration MAC' may be adjustable, although may also be temporarily locked or otherwise fixed in a given position/orientation (e.g., for a series of measurements, etc.)
  • the first imaging configuration 860 in an operational configuration of the supplementary metrology position coordinates determination system 850, may be arranged with the optical axis OA1 of the first imaging configuration 860 parallel to the direction of the scale imaging axis direction SIA and with the scale plane located within the range of focus of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • the robot 810 may be substantially as previously described with reference to FIGURE 9.
  • the movable first imaging configuration 860 (e.g., as illustrated in FIGURE 10) may be described as being coupled to a central sub-portion (e.g., including the arm portion 823 and at least some proximal elements thereto) of the movable arm configuration MAC' through a distal sub-portion comprising a rotating element (e.g., arm portion 824 coupled to a motion mechanism 834) that rotates about a rotary axis RA4 and a rotating element (e.g., a bracket or arm portion 825 coupled to a motion mechanism 835) that rotates about a rotary axis RA5.
  • a rotating element e.g., arm portion 824 coupled to a motion mechanism 834
  • a rotating element e.g., a bracket or arm portion 825 coupled to a motion mechanism 835
  • the motion mechanisms 834 and 835 may be regarded as an operational alignment actuator configuration AAct, and may be used to provide the desired operational alignment outlined above and described in greater detail below.
  • the rotation axis RA4 is nominally orthogonal to the rotation axis RA5. According to a
  • rotating elements of the operational alignment actuator configuration AAct are included in the movable arm configuration MAC’ in this implementation, in other implementations, the rotating elements (typically, first and second rotating elements) may be included in a discrete operational alignment actuator configuration that is located proximate to a distal end of a movable arm configuration MAC (e.g. as described below with reference to FIGURES 12 and 13.
  • the rotation axis RA4 is parallel to one or more other rotational axes (e.g. RA2, RA3) of the movable arm configuration MAC’. It will be appreciated that in such a case, if the rotation axis RA4 is counter-rotated in a direction opposite and equal to an angular rotation of a parallel rotation axis in the movable arm configuration MAC’, that the desired operational configuration of the supplementary metrology position coordinates determination system 850 may be maintained throughout various movements or positionings of the robot 810, if desired.
  • the XY either locked, or adjustable/rotatable to different fixed orientations/positions relative to the movable arm configuration MAC', in order to achieve a desired orientation/position for a particular measurement.
  • the end tool ETL may be mounted (e.g., coupled) proximate to the distal end DE5 of the fifth arm portion 825, in a configuration having function characteristics and features substantially as previously described with reference to FIGURE 9 (with the exception of various minor difference in various offset dimensions, or the like.)
  • there may be a known coordinate position offset between the end tool position ETP and the first imaging configuration 860 e.g. as shown for by the offset LoffMP, for the Z coordinate position offset component).
  • the first imaging configuration 860 may have a designated reference point (e.g., at the center of its lens, at the metrology coordinate location label X1 , Y1 , Z1 ) which has a known coordinate position offset from the end tool position ETP.
  • a known coordinate position offset may be expressed in terms of known offset components.
  • the known coordinate position offset between the end tool position ETP and the first imaging configuration 860 may be utilized as part of the process for determining the metrology position coordinates of the end tool position ETP.
  • the supplementary metrology position coordinates determination system 850 may be configured such that the metrology position coordinate processing portion 885 operates to determine metrology position coordinates that indicate a relative position between the first imaging configuration 860 and the first reference position REF1 (i.e. , as defined by the stationary XY scale 870), based on determining an image position of the identified at least one respective imageable feature (i.e., of the XY scale 870) in the acquired image.
  • the supplementary metrology position coordinates determination system 850 may further be configured to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool, based on the determined metrology position coordinates which indicate the relative position (i.e., between the first imaging configuration 860 and the first reference position REF1 ), and a known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the movable first imaging configuration 860.
  • the relative position i.e., between the first imaging configuration 860 and the first reference position REF1
  • the known coordinate position offset (e.g., expressed in terms of known offset components, such as a known x offset and a known y offset and a known z offset) may be added to or otherwise combined with the determined metrology position coordinates that indicate the relative position (i.e., between the first imaging configuration 860 and the first reference position REF1 ) in order to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool ETL.
  • the XY scale 870 may be designated as having an origin at the REF1 position X0, Y0, Z0.
  • the origin location at the center of the scale may have scale coordinate values of 0,0,0, which makes the scale coordinate system and the metrology coordinate systems coincide in this particular implementation.
  • the location at a center of a field of view FOV1 (e.g., corresponding to an acquired image) along the optical axis of the first imaging configuration 860 may be at metrology coordinates of X1 , Y1 , Z0.
  • the reference point of the first imaging configuration 860 may then be understood to have metrology coordinates of X1 , Y1 , Z1 , in the desired operational configuration.
  • the end tool position ETP may be designated as having metrology position coordinates of X2, Y2, Z2.
  • the end tool ETL may have a measuring point MP (e.g., at the end of an end tool stylus ETST for contacting a workpiece) which may be designated as having metrology position coordinates X3, Y3, Z3.
  • a measuring point MP e.g., at the end of an end tool stylus ETST for contacting a workpiece
  • the X2, Y2 and X3, Y3 coordinates may be equal to the X1 , Y1 coordinates, respectively.
  • an acquired image may be analyzed by the metrology position coordinate processing portion 885 to determine the scale coordinates that correspond to the metrology position coordinates X1 , Y1 corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 860.
  • Such a determination may be made in accordance with standard camera/scale image processing techniques (e.g., for determining a location of camera relative to a scale).
  • standard camera/scale image processing techniques e.g., for determining a location of camera relative to a scale.
  • such techniques may be utilized to determine the location of a field of view FOV1 (e.g., as corresponding to a position of a camera) within a scale range (e.g., within the XY scale 870), as described above with respect to FIGURES 4 and 5.
  • a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 870 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining metrology position coordinates that indicate a relative position between the first imaging configuration 860 and the first reference position REF1 (i.e.
  • the relative X, Y coordinates (i.e., of the end tool position ETP) and/or the measuring point position MP of the end tool ETL may then be determined according to the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool ETL and the first imaging configuration 860 (e.g., adding known x and y and z position offset values to X1 and Y1 and Z1 in order to determine X2, Y2, Z2 and/or X3, Y3 and Z3.)
  • the residual misalignment MisAng is reduced to zero as based on and indicated by the misalignment sensor ASen, in the desired operational configuration provided as outlined above. Therefore, errors that depend on the residual misalignment MisAng (e.g. previously outlined with reference to FIGURES 2A-3B) are substantially prevented, and need not be corrected or compensated.
  • the various offset amounts and/or misalignment errors between various components may be determined and/or saved as calibration data and used as outlined herein without the need for additional correction or compensation that would otherwise arise due to a non-zero residual misalignment.
  • an operational alignment subsystem OAS may alternatively provide a discrete set of operation alignment actuators AAct, if desired (e.g. if the associated movable arm configuration does not already include appropriate actuators for use by the operational alignment subsystem OAS.)
  • Such a discrete set of operational alignment actuators AAct may be operated substantially as outlined above with reference to FIGURES 9 and 10, and may provide similar benefits according to the principles disclosed herein.
  • FIGURES 12 and 13 show such
  • FIGURE 12 is isometric diagram showing a portion of an implementation of a robot system 1200 similar to the robot system of FIGURES 2A and 2B, in which an XY scale 870 and an alignment sensor ASen and an alignment actuator configuration AAct of an operational alignment subsystem OAS are coupled to a moving element, and the alignment sensor ASen and alignment actuator configuration AAct are used to govern the operational alignment of the XY scale 870 relative to an imaging configuration 860 located on a stationary element STE.
  • the features and operations associated with the operational alignment subsystem OAS are analogous to those outlined above with reference to FIGURE 9. It will be appreciated that, similar to the
  • FIGURES 2A, 2B and 9 components (e.g., 1XX, 8XX) of FIGURES 2A, 2B and 9) or of other figures, and may be understood to be similar or identical thereto and may otherwise be understood by analogy thereto and as otherwise described below.
  • this naming and numbering scheme to indicate elements having analogous and/or identical design and/or function is generally applied to the various figures of this application (e.g., FIGURES 1 -5, 8, 9,10, 12 and 13).
  • the stationary element STE that the first imaging configuration 860 is coupled to may comprise a frame arranged above the robot 810.
  • the movable arm configuration MAC may be the same as that shown in FIGURE 2A. In the implementation shown in
  • an operational alignment actuator configuration AAct comprises the discrete motion mechanisms 834’ and 835’, which may part of the
  • the operational alignment actuator configuration AAct may be coupled to the arm portion or bracket 825 which may be coupled to the XY scale 870 and the end tool ETL in an end tool configuration ETCN that is mechanically and electrically connected to the movable arm configuration MAC at the end tool mounting configuration ETMC.
  • the discrete motion mechanisms 834’ and 835’ need only suffice for motion over a relatively small range of angles about the rotational axes RA4’ and RA5’, respectively. Thus, they may be integrated in a low profile and compact dual axis actuator as schematically shown in FIGURE 12. Teachings related to such actuators are disclosed, for example, in US Patent Nos.
  • control and position signals from the discrete motion mechanisms 834’ and 835’ may be combined with those of the robot system that includes the movable arm configuration MAC as previously disclosed herein, and/or as generally known in the art.
  • the position and/or orientation of the XY scale 870, as coupled to the operational alignment actuator configuration AAct and thereby to the movable arm configuration MAC, may be adjustable, although it may also be temporarily locked or otherwise fixed in a given position/orientation (e.g., for a series of measurements, etc.)
  • the first imaging configuration 860 in an operational configuration of the supplementary metrology position coordinates determination system 850, may be arranged with the optical axis OA1 of the first imaging configuration 860 parallel to the direction of the scale imaging axis direction SIA and with the scale plane located within the range of focus of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • the motion mechanism 834’ has a rotary axis RA4 which may nominally perpendicular to the Z axis in some implementations (e.g. in the absence of significant sag or twist.)
  • the motion mechanism 834’ may include an actuator portion AP824 (e.g. a plate) that is coupled to the motion mechanism 834’, such that the actuator portion AP824 rotates about the rotary axis RA4.
  • a position sensor of the motion mechanism 834’ may be utilized for determining the angular position (e.g., in a plane that may be parallel to the Z axis) of the actuator portion AP824.
  • a motion mechanism 835’ may be coupled to the actuator portion AP824 and has a rotary axis RA5, which may be nominally perpendicular to the rotary axis RA4 in various implementations.
  • the motion mechanism 835’ may include an actuator portion AP825 (e.g. a plate) that is coupled to the motion mechanism 835’, such that the actuator portion AP825 rotates about the rotary axis RA5.
  • An arm portion 825’ e.g. a bracket
  • a position sensor of the motion mechanism 835’ may be utilized for determining an angular position of actuator portion AP825, the arm portion 825’ and/or the XY scale 870, about the rotary axis RA5. In some implementations, it may be desirable to arrange the scale plane of the XY scale 870 parallel to the rotary axis RA5.
  • the movable XY scale 870 may be described as being coupled to a central sub-portion (e.g., including the arm portion 130 and at least some proximal elements thereto) of the movable arm configuration MAC through the discrete operational alignment actuator configuration AAct, which comprises a rotating element (e.g., actuator portion AP824 coupled to the motion mechanism 834’) that rotates about a rotary axis RA4 and a rotating element (e.g., the actuator portion AP825 and/or bracket or arm portion 825’ coupled to the motion mechanism 835’) that rotates about a rotary axis RA5.
  • a rotating element e.g., actuator portion AP824 coupled to the motion mechanism 834’
  • a rotating element e.g., the actuator portion AP825 and/or bracket or arm portion 825’ coupled to the motion mechanism 835’
  • the rotation axis RA5 is nominally parallel to the scale plane of the XY scale 870, and nominally orthogonal to the scale imaging axis SIA.
  • the rotation axis RA4 is nominally orthogonal to the rotation axis RA5. It will be understood that this arrangement of rotation axes allows for simple and convenient motion control and sensor processing, but it is exemplary only and not limiting.
  • the movable arm configuration MAC is configured such that once the desired operational configuration of the supplementary metrology position coordinates
  • the operational alignment determination system 850 is established by the use of the alignment sensor ASen and the operational alignment actuator AAct, that desired operational configuration may then be nominally maintained throughout various movements or positionings of the robot 810, if desired. If it is desired to insure the best possible alignment in the operational configuration, then the operational alignment may be adjusted at any desired time by adjusting the position of the operational alignment actuator(s) AAct to provide the desired operational alignment as based on and indicated the alignment sensor ASen.
  • the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the XY scale 870 may be utilized as part of the process for determining the metrology position coordinates of the end tool position ETP.
  • the supplementary metrology position coordinates determination system 850 may be configured such that the metrology position coordinate processing portion 885 operates to determine metrology position coordinates that indicate a relative position between the XY scale 870 and the first reference position REF1 (i.e. , as defined by the stationary first imaging configuration 860), based on determining an image position of the identified at least one respective imageable feature (i.e., of the XY scale 870) in the acquired image.
  • the supplementary metrology position coordinates determination system 850 may further be configured to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool, based on the determined metrology position coordinates which indicate the relative position (i.e., between the XY scale 870 and the first reference position REF1 ), and a known
  • the known coordinate position offset (e.g., expressed in terms of known offset components, such as a known x offset and a known y offset and a known z offset) may be added to or otherwise combined with the determined metrology position coordinates that indicate the relative position (i.e., between the XY scale 870 and the first reference position REF1 ) in order to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool ETL.
  • known offset components such as a known x offset and a known y offset and a known z offset
  • an acquired image may be analyzed by the metrology position coordinate processing portion 885 to determine the scale coordinates that correspond to the metrology position coordinates X1 , Y1 corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 860.
  • Such a determination may be made in accordance with standard camera/scale image processing techniques (e.g., for determining a location of camera relative to a scale).
  • such techniques may be utilized to determine the location of a field of view FOV1 (e.g., as corresponding to a position of a camera) within a scale range (e.g., within the XY scale 870), as described above with respect to FIGURES 4 and 5.
  • a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 870 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining metrology position coordinates that indicate a relative position between the XY scale 870 and the first reference position REF1 (i.e. , as defined by the stationary first imaging configuration 860).
  • the relative X2, Y2 coordinates (i.e., of the end tool position ETP) may then be determined according to the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool ETL and the XY scale 870 (e.g., adding known x and y and z position offset values to X1 and Y1 and Z0 in order to determine X2, Y2, Z2 and/or X3, Y3 and Z3.
  • the residual misalignment MisAng is reduced to zero as based on and indicated by the misalignment sensor ASen, in the desired operational configuration provided as outlined above. Therefore, errors that depend on the residual misalignment MisAng (e.g. previously outlined with reference to
  • FIGURES 2A-3B are substantially prevented, and need not be corrected or compensated.
  • the various offset amounts and or misalignment errors between various components may be determined and/or saved as calibration data and used as outlined herein without the need for additional correction or compensation that would otherwise arise due to a non-zero residual misalignment.
  • FIGURE 13 is isometric diagram showing a portion of an implementation of a robot system 1300 similar to the robot system of FIGURES 12 and 3A and 3B, in which an imaging configuration 860 and an alignment sensor ASen and an alignment actuator configuration AAct of an operational alignment subsystem OAS are coupled to a moving element, and the alignment sensor ASen and the alignment actuator configuration AAct are used to govern the operational alignment of the imaging configuration 860 relative to an XY scale 870 located on a stationary element STE.
  • FIGURES 3A, 3B, 10 and 12 components (e.g., 1XX, 8XX) of FIGURES 3A, 3B, 10 and 12) or of other figures, and may be understood to be similar or identical thereto and may otherwise be understood by analogy thereto and as otherwise described below.
  • the stationary element STE that the XY scale 870 is coupled to may comprise a frame arranged above the robot 810.
  • the movable arm configuration MAC may be the same as that shown in FIGURE 2A or 3B.
  • an operational alignment actuator configuration AAct comprises the discrete motion mechanisms 834’ and 835’, which may part of the operational alignment subsystem OAS.
  • the operational alignment actuator configuration AAct may be coupled to the arm portion or bracket 825 which may be coupled to the first imaging configuration 860 and the end tool ETL in an end tool configuration ETCN that is mechanically and electrically connected to the movable arm configuration MAC at the end tool mounting configuration ETMC.
  • the discrete motion mechanisms 834’ and 835’ need only suffice for motion over a relatively small range of angles about the rotational axes RA4’ and RA5’, respectively.
  • they may be integrated in a low profile and compact dual axis actuator as schematically shown in FIGURE 13. Teachings related to such actuators are disclosed, for example, in US Patent Nos. 5,583,691 and 9,323,025, which are hereby incorporated herein by reference in their entirety.
  • the control and position signals from the discrete motion mechanisms 834’ and 835’ may be combined with those of the robot system that includes the movable arm configuration MAC as previously disclosed herein, and/or as generally known in the art.
  • the position and/or orientation of the first imaging configuration 860 may be adjustable, although it may also be temporarily locked or otherwise fixed in a given position/orientation (e.g., for a series of measurements, etc.)
  • the first imaging configuration 860 in an operational configuration of the supplementary metrology position coordinates determination system 850, may be arranged with the optical axis OA1 of the first imaging configuration 860 parallel to the direction of the scale imaging axis direction SIA and with the scale plane located within the range of focus of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • the motion mechanism 834’ has a rotary axis RA4 which may be nominally perpendicular to the Z axis in some implementations (e.g. in the absence of significant sag or twist.)
  • the motion mechanism 834’ may include an actuator portion AP824 (e.g. a plate) that is coupled to the motion mechanism 834’, such that the actuator portion AP824 rotates about the rotary axis RA4.
  • a position sensor of the motion mechanism 834’ may be utilized for determining the angular position (e.g., in a plane that may be parallel to the Z axis) of the actuator portion AP824.
  • a motion mechanism 835’ may be coupled to the actuator portion AP824 and has a rotary axis RA5, which may be nominally perpendicular to the rotary axis RA4 in various implementations.
  • the motion mechanism 835’ may include an actuator portion AP825 (e.g. a plate) that is coupled to the motion mechanism 835’, such that the actuator portion AP825 rotates about the rotary axis RA5.
  • An arm portion 825’ e.g. a bracket
  • a position sensor of the motion mechanism 835’ may be utilized for determining an angular position of actuator portion AP825, the arm portion 825’ and/or the XY scale 870, about the rotary axis RA5.
  • the movable first imaging configuration 860 may be described as being coupled to a central sub-portion (e.g., including the arm portion 130 and at least some proximal elements thereto) of the movable arm configuration MAC through the discrete operational alignment actuator configuration AAct, which comprises a rotating element (e.g., actuator portion AP824 coupled to the motion mechanism 834’) that rotates about a rotary axis RA4 and a rotating element (e.g., the actuator portion AP825 and/or bracket or arm portion 825’ coupled to the motion mechanism 835’) that rotates about a rotary axis RA5.
  • a rotating element e.g., actuator portion AP824 coupled to the motion mechanism 834’
  • a rotating element e.g., the actuator portion AP825 and/or bracket or arm portion 825’ coupled to the motion mechanism 835’
  • the rotation axis RA5 is nominally perpendicular to and aligned with the optical axis OA1 the first imaging configuration 860.
  • the rotation axis RA4 is nominally orthogonal to the rotation axis RA5. It will be understood that this arrangement of rotation axes allows for simple and convenient motion control and sensor processing, but it is exemplary only and not limiting.
  • the movable arm configuration MAC is configured such that once the desired operational configuration of the supplementary metrology position coordinates
  • the operational alignment determination system 850 is established by the use of the alignment sensor ASen and the operational alignment actuator AAct, that desired operational configuration may then be nominally maintained throughout various movements or positionings of the robot 810, if desired. If it is desired to insure the best possible alignment in the operational configuration, then the operational alignment may be adjusted at any desired time by adjusting the position of the operational alignment actuator(s) AAct to provide the desired operational alignment as based on and indicated the alignment sensor ASen.
  • the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the first imaging configuration 860 may be utilized as part of the process for determining the metrology position coordinates of the end tool position ETP.
  • the supplementary metrology position coordinates determination system 850 may be configured such that the metrology position coordinate processing portion 885 operates to determine metrology position coordinates that indicate a relative position between the first imaging configuration 860 and the first reference position REF1 (i.e. , as defined by the stationary XY scale 870), based on determining an image position of the identified at least one respective imageable feature (i.e., of the XY scale 870) in the acquired image.
  • the supplementary metrology position coordinates determination system 850 may further be configured to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool, based on the determined metrology position coordinates which indicate the relative position (i.e., between first imaging configuration 860 and the first reference position REF1 ), and a known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool and the movable first imaging configuration 860.
  • the known coordinate position offset e.g., expressed in terms of known offset
  • a known x offset and a known y offset and a known z offset may be added to or otherwise combined with the determined metrology position coordinates that indicate the relative position (i.e., between the first imaging configuration 860 and the first reference position REF1 ) in order to determine the metrology position coordinates of the end tool position ETP and/or the measuring point position MP of the end tool ETL.
  • an acquired image may be analyzed by the metrology position coordinate processing portion 885 to determine the scale coordinates that correspond to the metrology position coordinates X1 , Y1 corresponding to the center of the field of view FOV1 of the stationary first imaging configuration 860.
  • Such a determination may be made in accordance with standard camera/scale image processing techniques (e.g., for determining a location of camera relative to a scale).
  • such techniques may be utilized to determine the location of a field of view FOV1 (e.g., as corresponding to a position of a camera) within a scale range (e.g., within the XY scale 870), as described above with respect to FIGURES 4 and 5.
  • a determination may include identifying at least one respective imageable feature included in the acquired image of the XY scale 870 and the related respective known XY scale coordinate location.
  • Such a determination may correspond to determining metrology position coordinates that indicate a relative position between the first imaging configuration 860 and the first reference position REF1 (i.e. , as defined by the stationary XY scale 870).
  • the relative X2, Y2 and/or X3 Y3 coordinates may then be determined according to the known coordinate position offset between the end tool position ETP and/or the measuring point position MP of the end tool ETL and the XY scale 870 (e.g., adding known x and y and z position offset values to X1 and Y1 and Z0 in order to determine X2, Y2, Z2 and/or X3, Y3 and Z3.
  • FIGURE 11 is a flow diagram illustrating an exemplary embodiment
  • a routine 1100 for operating a robot system including a robot and a supplementary metrology position coordinates determination system that includes an operational alignment subsystem comprising an operational alignment actuator configuration AAct.
  • a determination is made as to whether the robot system is to be operated in a supplementary metrology position coordinates mode.
  • a selection and/or activation of a supplementary metrology position coordinates mode or a standard robot position coordinates mode may be made by a user and/or may be automatically made by the system in response to certain operations and/or instructions.
  • a supplementary metrology position coordinates mode may be entered (e.g., automatically or in accordance with a selection by a user) when the robot moves into a particular position (e.g., moves an end tool from a general area where assembly or other operations are performed to a more specific area where workpiece inspection operations are typically performed and/or where the supplementary metrology position coordinates mode would otherwise be utilized).
  • such modes may be implemented by an external control system (e.g., such as the external control system ECS of FIGURE 1 utilizing a standard robot position coordinates mode portion 147 and a supplementary metrology position coordinates mode portion 187 or the external control system ECS' of FIGURE 8 utilizing a standard robot position coordinates mode portion 849 and a supplementary metrology position coordinates mode portion 887).
  • an external control system e.g., such as the external control system ECS of FIGURE 1 utilizing a standard robot position coordinates mode portion 147 and a supplementary metrology position coordinates mode portion 187 or the external control system ECS' of FIGURE 8 utilizing a standard robot position coordinates mode portion 849 and a supplementary metrology position coordinates mode portion 887.
  • a hybrid mode may be operated either independently or as part of a supplementary metrology position coordinates mode and/or may be implemented as a switching between the modes, as previously outlined with respect to FIGURE 7.
  • the routine proceeds to a block 1115, where the robot system is operated in a standard robot position coordinates mode.
  • the position sensors e.g., rotary encoders, linear encoders, etc.
  • the robot are utilized to control and determine the robot movements and corresponding end tool position or measuring point position of the end tool with the robot accuracy (e.g., which is based at least in part on the accuracy of the position sensors of the robot).
  • the position sensors of the robot may indicate the position of the movable arm configuration MAC or MAC' (e.g., the positions of the arm portions) with a lower degree of accuracy than the position information that is determined utilizing the XY scale.
  • the robot position coordinates mode may correspond to an independent and/or standard mode of operation for the robot (e.g., a mode in which the robot is operated independently, such as when a supplementary metrology position coordinates determination system is not active or is otherwise not provided).
  • the routine proceeds to a block 1120, where the robot and the supplementary metrology position coordinates determination system are configured to operate the operational alignment subsystem and the operational alignment actuator configuration to adjust an alignment of the moveable one of the XY scale or the first imaging configuration based on the alignment signal provided by the alignment sensor to provide an operational configuration of the supplementary metrology position coordinates determination system.
  • a scale plane is defined to nominally coincide with the planar substrate of the XY scale, and a direction normal to the scale plane is defined as a scale imaging axis direction.
  • the XY scale and the first imaging configuration are arranged with the optical axis of the first imaging configuration parallel to the direction of the scale imaging axis direction as indicated by the alignment signal, and with the scale plane located within the range of focus of the first imaging configuration along the scale imaging axis direction.
  • this process for providing the operational configuration may include making various position adjustments using the operational alignment actuators AAct, which may include discrete actuators of the operational alignment subsystem OAS and/or actuators included in the movable arm configuration MAC’ or MAC’ .
  • the fourth and fifth motion mechanisms 834 and 835 may be operated to rotate the fourth and fifth arm portions 824 and 825 so as to rotate the XY scale 870 to cause the scale imaging axis direction SIA to be parallel to the optical axis OA1 as indicated by the alignment signal of the alignment sensor ASen.
  • such adjustments may be made automatically or as directed by a user or an inspection program, or the like.
  • various adjustments may be made to the first imaging configuration 860 (e.g., the magnification and/or range of focus may be adjusted, etc.) so as to cause the scale plane to be located within the range of focus of the first imaging configuration 860 along the scale imaging axis direction SIA.
  • At a block 1130 at least one input signal is received (e.g., at an image triggering portion, such as the image triggering portion 181 , or 881 , etc.) that is related to an end tool position or a measuring point position of the end tool of the robot.
  • a timing is determined of a first imaging trigger signal based on the at least one input signal and the first imaging trigger signal is output to a first imaging configuration.
  • the first imaging configuration acquires a digital image of an XY scale at an image acquisition time in response to receiving the first imaging trigger signal.
  • different types of end tools may provide different types of outputs that may be utilized with respect to the at least one input signal.
  • the end tool is a touch probe that is used for measuring a workpiece and that outputs a touch signal when it touches the workpiece
  • that touch signal or a signal derived therefrom may be input as the at least one input signal that the timing of a first imaging trigger signal is determined based on.
  • the end tool is a scanning probe that is used for measuring a workpiece and that provides respective workpiece measurement sample data corresponding to a respective sample timing signal
  • that respective sample timing signal or a signal derived therefrom may be input as the at least one input signal.
  • the end tool is a camera that is used to provide a respective workpiece measurement image corresponding to a respective workpiece image acquisition signal
  • that workpiece image acquisition signal or a signal derived therefrom may be input as the at least one input signal.
  • the acquired image is received (e.g., at a metrology position coordinate processing portion, such as the metrology position coordinate processing portion 185, or 885, etc.), and at least one respective imageable feature included in the acquired image of the XY scale and the related respective known XY scale coordinate location are identified.
  • a metrology position coordinate processing portion such as the metrology position coordinate processing portion 185, or 885, etc.
  • metrology position coordinates that indicate a relative position between a movable one of the XY scale or the first imaging configuration and the first reference position are determined with an accuracy level that is better than a robot accuracy, based on determining an image position of the identified at least one respective imageable feature in the acquired image.
  • determined metrology position coordinates are indicative of the end tool position at the image acquisition time, with an accuracy level that is better than the robot accuracy, at least for a vector component of the metrology position coordinates that is at least one of transverse or perpendicular to the scale imaging axis direction.
  • determined position information e.g., the determined metrology position coordinates that are indicative of the relative position, the determined metrology position coordinates of the end tool position or measuring point position of the end tool, and/or other related determined position information
  • a designated function e.g., for workpiece measurement, positioning control of the movable arm configuration of the robot, etc.
  • the routine may be partially or completely repeated.
  • the determined position information e.g., from the block 1160
  • the routine may be repeated for which a second surface location on the workpiece may then be determined (e.g., as part of a workpiece measurement such as measuring a feature of a workpiece).
  • whether or not the operations at the block 1120 are to be repeated may depend on the particular situation.
  • the operational alignment outlined at the block 1120 is established with the movable arm configuration of the robot in the same (or nearly the same) position and/or pose that is to be used during the operations of blocks 1130 and/or 1140 the operation adjust an alignment of the moveable one of the XY scale or the first imaging configuration based on the alignment signal provided by the alignment sensor.
  • the robot arm is established with the movable arm configuration of the robot in the same (or nearly the same) position and/or pose that is to be used during the operations of blocks 1130 and/or 1140 the operation adjust an alignment of the moveable one of the XY scale or the first imaging configuration based on the alignment signal provided by the alignment sensor.
  • repeating the operations at the block 1120 may be omitted in some such situations, if desired.
  • the first and second determined metrology position coordinates determined by repeating the routine 1100 that are indicative of the first and second relative positions and/or related position information are utilized to determine a dimension of the workpiece that corresponds to a distance between the first and second surface locations on the workpiece that correspond to the respective end tool positions or measuring point positions of the end tool when contacting the respective first and second surface locations on the workpiece, etc. at respective image acquisition times.
  • position sensors e.g., rotary encoders, linear encoders, etc.
  • more accurate position information may be determined utilizing the techniques as described herein. More specifically, the determination of the first and second surface locations (i.e.
  • the corresponding dimension of the workpiece e.g., of a workpiece feature
  • the corresponding dimension of the workpiece e.g., of a workpiece feature
  • routines and corresponding operational alignment subsystems OAS may be used in the operations of block 740 of FIGURE 7.
  • FIGURE 14 is a diagram 1400 of a first exemplary configuration for an alignment sensor ASen usable in various implementations of an operational alignment subsystem OAS according to principles disclosed herein. According to one type of description, it may be regarded as a laser auto collimator for detecting the residual misalignment MisAng of the XY scale 170 or 870, or the like, using the alignment beam ABeam.
  • alignment sensor ASen may generally include a laser beam light source LD (e.g. a laser diode and lens), a polarization beam splitter PBS, a quarter-wave plate PX corresponding to the wavelength of the laser beam source LD, an object lens L, and a position sensor PSD.
  • LD laser beam light source
  • PBS polarization beam splitter
  • PX quarter-wave plate
  • the light emitting point of the light source LD is positioned at the focal point of the object lens L.
  • the polarization beam splitter PBS is positioned on the optical path a light beam emitted by the light source LD, and is distant from the light source LD by a distance "b".
  • the polarization beam splitter PBS polarizes the light in the alignment beam
  • the quarter-wave plate PX rotates the polarization of the light in the alignment beam ABeam according to known principles, and the alignment beam ABeam is then output through the object lens L to the XY scale 170 (870), as previously described herein.
  • the XY scale 170 reflects the alignment beam ABeam as the reflected alignment beam ABeam R, as previously described herein.
  • the reflected alignment beam ABeam R returns through the object lens L and the quarter-wave plate PX, and is reflected from the polarization beam splitter PBS to the position sensor PSD, as shown.
  • the position detector PSD is spaced from the polarization beam splitter PBS by a distance "b".
  • the position detector PSD may be a known type of quadrant detector, than can provide a known type of differential signals indicative of the displacement or position“d” along respective“X” and ⁇ ” axes, for the reflected alignment beam ABeamR.
  • Such signals may be regarded as the previously outlined alignment signals ASig of the alignment sensor ASen.
  • the element name“XY scale” has been used in this disclosure with reference to the elements 170, 170A, 170B, 870, and the like, this element name is exemplary only, and not limiting. It is referred to as an“XY scale” with reference to a cartesian coordinate system, and its description as comprising a nominally planar substrate (e.g., arranged nominally perpendicular to a scale imaging axis direction, which may be parallel to a z axis in certain implementations). However, more generally, the element name XY scale should be understood to refer to any reference scale comprising a plurality of features or markings that correspond to known two dimensional coordinates on that reference scale (e.g.
  • scale features may be expressed and/or marked to be in a cartesian coordinate system on that reference scale, or in a polar coordinate system, or any other convenient coordinate system.
  • features may comprise features distributed evenly or unevenly throughout an operational scale area, and may comprise graduated or ungraduated scale markings, provided that such features correspond to known two dimensional coordinates on the scale and are able to operate as disclosed herein.
  • the robot systems and corresponding movable arm configurations disclosed and illustrated herein are generally shown and described with reference to a certain number of arm portions (e.g., 3 arm portions, 5 arm portions, etc.), such systems are not so limited. In various implementations, provided that it includes arm portions such as those described and/or claimed herein, the robot system may include fewer or more arm portions if desired. It will be understood that the XY scale or reference scale and a camera that is used to image the scale may undergo rotation relative to one another, depending on the motion and/or position of the robot system. It will be appreciated that methods known in the art (e.g.
  • the metrology position coordinates referred to herein may in various implementations take into account any such relative rotation.
  • the metrology position coordinates referred to herein may comprise a set of coordinates that include a precise determination and/or indication of any such relative rotation, if desired.

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CN201980053434.9A CN112584984A (zh) 2018-08-16 2019-08-15 用于机器人的包括对准传感器的辅助度量位置坐标确定系统
JP2021507031A JP7431216B2 (ja) 2018-08-16 2019-08-15 ロボットと共に使用される位置合わせセンサを含む補足計測位置座標決定システム
DE112019004129.0T DE112019004129T5 (de) 2018-08-16 2019-08-15 Zusatzmesstechnik-Positionskoordinatenbestimmungssystem, das einen Ausrichtungssensor zur Verwendung mit einem Roboter enthält
US17/176,850 US11745354B2 (en) 2018-08-16 2021-02-16 Supplementary metrology position coordinates determination system including an alignment sensor for use with a robot

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US16/146,640 US10871366B2 (en) 2018-08-16 2018-09-28 Supplementary metrology position coordinates determination system for use with a robot
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113847894A (zh) * 2021-09-23 2021-12-28 深圳市人工智能与机器人研究院 一种机器人多定位系统坐标统一方法及系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4753569A (en) * 1982-12-28 1988-06-28 Diffracto, Ltd. Robot calibration
US5768759A (en) * 1996-11-19 1998-06-23 Zevatech, Inc. Method and apparatus for reflective in-flight component registration
US7899577B2 (en) * 2006-07-03 2011-03-01 Fanuc Ltd Measuring system and calibration method
US8190272B2 (en) * 2008-12-16 2012-05-29 The Boeing Company Geometric inspection of machined objects
US9517560B2 (en) * 2013-07-22 2016-12-13 Canon Kabushiki Kaisha Robot system and calibration method of the robot system
US20170334072A1 (en) * 2015-02-19 2017-11-23 Peter Kovacs Arrangement and Method for the Model-Based Calibration of a Robot in a Working Space
US20190061150A1 (en) * 2017-08-22 2019-02-28 Fanuc Corporation Robot system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2627602B1 (fr) * 1988-02-18 1990-07-20 Telemecanique Electrique Procede et dispositif pour l'estimation des parametres du modele geometrique d'un manipulateur
JP2816089B2 (ja) * 1993-12-22 1998-10-27 松下電工株式会社 ロボットの加工経路補正方法
JPH0996506A (ja) * 1995-09-29 1997-04-08 Ricoh Co Ltd ３次元視覚センサによる位置調整方法および３次元画像認識装置
JP2003117861A (ja) 2001-10-15 2003-04-23 Denso Corp ロボットの位置補正システム
JP5849403B2 (ja) 2011-02-15 2016-01-27 セイコーエプソン株式会社 ロボットコントローラー、ロボット、及び、ロボットシステム
CN104457566A (zh) * 2014-11-10 2015-03-25 西北工业大学 一种无须示教机器人系统的空间定位方法
JP2017077609A (ja) * 2015-10-21 2017-04-27 ファナック株式会社 ロボットの手首部の機構パラメータを校正する校正装置および校正方法
JP6430986B2 (ja) * 2016-03-25 2018-11-28 ファナック株式会社 ロボットを用いた位置決め装置
US10099377B2 (en) * 2016-06-29 2018-10-16 Applied Materials, Inc. Methods and systems providing misalignment correction in robots
CN107088892A (zh) * 2017-04-01 2017-08-25 西安交通大学 一种基于双目视觉的工业机器人运动精度检测方法
US10871366B2 (en) * 2018-08-16 2020-12-22 Mitutoyo Corporation Supplementary metrology position coordinates determination system for use with a robot
US10751883B2 (en) * 2018-08-16 2020-08-25 Mitutoyo Corporation Robot system with supplementary metrology position coordinates determination system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4753569A (en) * 1982-12-28 1988-06-28 Diffracto, Ltd. Robot calibration
US5768759A (en) * 1996-11-19 1998-06-23 Zevatech, Inc. Method and apparatus for reflective in-flight component registration
US7899577B2 (en) * 2006-07-03 2011-03-01 Fanuc Ltd Measuring system and calibration method
US8190272B2 (en) * 2008-12-16 2012-05-29 The Boeing Company Geometric inspection of machined objects
US9517560B2 (en) * 2013-07-22 2016-12-13 Canon Kabushiki Kaisha Robot system and calibration method of the robot system
US20170334072A1 (en) * 2015-02-19 2017-11-23 Peter Kovacs Arrangement and Method for the Model-Based Calibration of a Robot in a Working Space
US20190061150A1 (en) * 2017-08-22 2019-02-28 Fanuc Corporation Robot system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113847894A (zh) * 2021-09-23 2021-12-28 深圳市人工智能与机器人研究院 一种机器人多定位系统坐标统一方法及系统
CN113847894B (zh) * 2021-09-23 2024-03-29 深圳市人工智能与机器人研究院 一种机器人多定位系统坐标统一方法及系统

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