WO2020029652A1 - 一种镜片镀膜治具 - Google Patents

一种镜片镀膜治具 Download PDF

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Publication number
WO2020029652A1
WO2020029652A1 PCT/CN2019/088301 CN2019088301W WO2020029652A1 WO 2020029652 A1 WO2020029652 A1 WO 2020029652A1 CN 2019088301 W CN2019088301 W CN 2019088301W WO 2020029652 A1 WO2020029652 A1 WO 2020029652A1
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WIPO (PCT)
Prior art keywords
jig
lens
lower plate
upper plate
coated
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PCT/CN2019/088301
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English (en)
French (fr)
Inventor
韦传冬
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瑞声声学科技(深圳)有限公司
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Publication of WO2020029652A1 publication Critical patent/WO2020029652A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0075—Arrays characterized by non-optical structures, e.g. having integrated holding or alignment means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements

Definitions

  • the utility model relates to the technical field of lens coating, in particular to a lens coating jig.
  • the coating process is widely used in industry. It is usually used in metal processing industry, semiconductor industry and optoelectronic industry. In recent years, due to the rapid development of the semiconductor industry and the optoelectronic industry, significant progress has been made in coating technology.
  • the coating fixture mainly refers to a type of coating that needs to be performed under a relatively high degree of vacuum, and specifically includes many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, and PLD laser sputtering deposition.
  • Photoelectric industry coating refers to the coating of single or multi-layer films on the surface of optical elements by physical or chemical methods.
  • the interference of incident, reflected and transmitted light at the film interface is used to achieve focusing, collimation, filtering, reflection and refraction. effect.
  • a lens receiving hole is opened on the upper plate of the jig and the lower plate of the jig.
  • the lens to be coated is completely placed in the lens receiving hole on the upper plate of the jig, and then The lower plate of the jig and the upper plate of the jig are attached and fixed, and finally the lens to be coated is coated.
  • the purpose of the utility model is to provide a lens coating jig, which can prevent the lens from being scattered during the coating process.
  • an embodiment of the present invention provides a lens coating jig, including:
  • the upper plate of the jig is provided with a depression surrounding the first lens accommodating hole, and the lower plate of the jig
  • a convex portion is provided at a position corresponding to the concave portion, and the convex portion is used to be embedded in the concave portion when the upper plate of the jig and the lower plate of the jig are bonded together, and is in contact with the lens to be coated. Abutting the outer periphery.
  • the embodiment of the utility model is provided with a recessed portion on the upper plate of the jig, and a convex portion is provided at a position corresponding to the recessed portion of the lower plate of the jig.
  • the convex portion is embedded in the concave portion and abuts against the outer peripheral edge of the lens to be coated. In this way, the abutment effect of the lens to be coated and the convex portion and the embedding between the convex portion and the concave portion can be achieved.
  • the fixing effect improves the stability between the lens coating jig and the lens to be coated.
  • the lens When the upper plate of the jig and the lower plate of the jig are deformed, the lens is still abutted by the convex portion embedded in the recessed portion, without losing the receiving hole.
  • the phenomenon of loose material occurs due to the fixed effect of the lens, so that the lens can be prevented from being loose during the lens coating process.
  • the number of the recessed portions is plural, and the plurality of the recessed portions are arranged at equal intervals around the first lens receiving hole; the number of the protruding portions is plural, and the plurality of the protruding portions surrounds the first lens receiving hole.
  • the second lens accommodating holes are arranged at equal intervals, and the concave portions correspond to the convex portions one-to-one.
  • the equidistant arrangement of multiple concave portions and convex portions makes the force of the lens to be coated uniform, avoids shaking of the lens to be coated during the working process of the coating fixture, and improves the distance between the coating fixture and the lens to be coated. Stability, and the depressions and protrusions arranged at equal intervals at the same time make the coating jig easy to manufacture.
  • each of the plurality of recessed portions communicates with the adjacent first lens receiving hole, and each of the plurality of protruding portions is disposed between the adjacent second lens receiving holes.
  • the raised portion includes an end surface away from the lower plate of the jig, and a side wall extending from the end surface to the lower plate of the jig, and the side wall is used for attaching the upper plate of the jig and the When the lower plate of the jig is bonded, the outer periphery of the lens to be coated abuts.
  • a surface of the sidewall for abutting the outer peripheral edge of the lens to be coated is an arc surface. This arrangement not only increases the contact area between the lens to be coated and the convex portion, but also prevents the gap between the lens to be coated and the side wall, thereby making the force of the lens to be coated uniform and effectively preventing the film to be coated. The lens was damaged due to uneven force.
  • the plurality of first lens receiving holes and the plurality of second lens receiving holes are evenly arranged.
  • a clamping portion is provided on one of the upper plate of the jig and a lower plate of the jig, and a holding hole is provided on the other, and the upper plate of the jig and the lower plate of the jig are affixed. When closed, the holding portion is held in the holding hole.
  • the upper part of the jig and the lower part of the jig can be connected very conveniently through the clamping part and the clamping hole, which is convenient for the subsequent coating work, reducing the workload of the worker and improving the work efficiency.
  • FIG. 1 is a schematic structural diagram of a lens coating jig provided by a first embodiment of the present invention
  • FIG. 2 is a schematic structural view of another angle of the lens coating jig provided by the first embodiment of the present invention.
  • FIG. 3 is a plan view of a lens coating jig provided by the first embodiment of the present invention.
  • FIG. 4 is a cross-sectional view at A-A in FIG. 3;
  • FIG. 5 is an enlarged view at B in FIG. 4.
  • the first embodiment of the present invention relates to a lens coating jig 100, as shown in FIGS. 1, 2 and 5.
  • the lens coating jig 100 includes a jig upper plate 1 and a jig lower plate 2 opposite to the jig upper plate 1.
  • the jig upper plate 1 is provided with a plurality of first lens receiving holes 10
  • the jig lower plate 2 is provided with A plurality of second lens accommodating holes 20 corresponding to the first lens accommodating holes 10 are provided on the upper plate 1 of the jig, and a depression 11 surrounding the first lens accommodating hole 10 is provided.
  • the lower plate 2 of the jig corresponds to the depression 11.
  • a raised portion 21 is provided at the position. The raised portion 21 is used to be embedded in the recessed portion 11 when the fixture upper plate 1 and the fixture lower plate 2 are bonded together, and abut against the outer peripheral edge 30 of the lens 3 to be coated.
  • the embodiments of the present utility model have lens receiving holes on the upper plate 1 and the lower plate 2 of the jig, so the lenses can be placed on the upper plate 1 or the lower plate 2 of the jig.
  • a concave portion 11 is provided on the upper plate 1 of the jig
  • a convex portion 21 is provided at a position corresponding to the concave portion 11 of the lower plate 2 of the jig.
  • the convex portion 21 is embedded in the concave portion 11 and abuts against the outer peripheral edge 30 of the lens 3 to be coated.
  • the abutment effect of the lens 3 to be coated with the convex portion 21 and The embedded and fixed effect between the convex portion 21 and the concave portion 11 improves the stability between the lens coating jig 100 and the lens 3 to be coated.
  • the lens is still The convex portion 21 embedded in the recessed portion 11 abuts, and the bulk material phenomenon does not occur due to the loss of the fixing effect of the receiving hole, so that the lens bulk material can be avoided during the lens coating process.
  • the number of the recessed portions 11 is plural, and the plurality of recessed portions 11 are arranged at equal intervals around the first lens receiving hole 10;
  • the number of the raised portions 21 is multiple.
  • the plurality of raised portions 21 are arranged at equal intervals around the second lens receiving hole 20.
  • the recessed portions 11 correspond to the raised portions 21 one-to-one.
  • the equidistant arrangement of the plurality of recessed portions 11 and the raised portions 21 makes the force of the lens 3 to be coated uniform, avoids the lens 3 to be shaken during the working process of the coating fixture 100, and improves the coating fixture 100 and
  • the stability between the to-be-coated lenses and the concave portions 11 and the convex portions 21 provided at equal intervals at the same time make the coating jig 100 easy to manufacture.
  • the height of the convex portion 21 in this embodiment can be adjusted according to the actual situation, so as to increase the convex portion
  • the 21-height manner increases the contact area between the convex portion 21 and the lens 3 to be coated, thereby enhancing the abutment effect between the convex portion 21 and the lens 3 to be coated.
  • the plurality of recessed portions 11 communicate with the adjacent first lens receiving holes 10, and the plurality of protruding portions 21 are respectively disposed between the adjacent second lens receiving holes 20.
  • the structure of the recessed portion 11 provided in this way is convenient for processing, and at the same time, the coating fixture 100 has a good appearance effect.
  • the protruding portion 21 includes an end surface 211 away from the lower plate 2 of the jig, and a side wall 212 extending from the end surface 211 to the lower plate 2 of the jig.
  • the side wall 212 is used for the upper plate 1 and the lower plate of the jig. 2 At the time of bonding, it comes into contact with the outer peripheral edge 30 of the lens 3 to be coated.
  • the protruding portion 21 may be integrally formed with the lower plate 2 of the jig, and the integrally formed protruding portion 21 and the lower plate 2 of the jig are structurally stable, and the protruding portion 21 and the jig may be processed independently. Lower plate 2 and then fix the raised portion 21 on the lower plate 2 of the fixture. This arrangement makes it easier to modify the process when the height of the raised portion 21 needs to be increased. It is only necessary to remove and replace the raised portion 21 The higher raised portion 21 is sufficient.
  • a surface of the side wall 212 for receiving the outer peripheral edge 30 of the coated lens 3 is an arc surface. Since the outer peripheral edge of the lens is also a round surface, this arrangement not only increases the contact area between the lens 3 to be coated and the convex portion 21, but also prevents a gap between the lens 3 to be coated and the side wall 212, so that The force on the to-be-coated lens 3 is uniform, which effectively prevents the to-be-coated lens 3 from being damaged due to uneven force.
  • the plurality of first lens receiving holes 10 and the plurality of second lens receiving holes 20 are all arranged in an even array.
  • the fixture lower plate 2 in the present embodiment is provided with a clamping hole 22, the fixture upper plate 1 is provided with a clamping portion 12, and the fixture upper plate 1 and the fixture lower plate 2 are affixed. When closed, the holding hole 22 is held in the holding portion 12.
  • the clamping portion 12 can also be provided on the lower plate 2 of the jig, and the clamping hole 22 can be provided on the upper plate 1 of the jig, which does not affect the effect of the present invention.
  • the upper part 1 and the lower part 2 of the jig can be connected very conveniently through the clamping part 22 and the clamping hole 12, which facilitates the subsequent coating work, reduces the workload of the worker, and improves the work efficiency.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Eyeglasses (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)

Abstract

一种镜片镀膜治具（100），包括：治具上板（1）和与治具上板（1）相对设置且共同夹持待镀膜镜片（3）的治具下板（2），治具上板（1）设置有多个第一镜片收容孔（10），治具下板（2）设置有与各第一镜片收容孔（10）对应的且尺寸相同第二镜片收容孔（20），治具上板（1）上设有环绕第一镜片收容孔（10）的凹陷部（11），治具下板（2）与凹陷部（11）对应的位置上设有凸起部（21），凸起部（21）用于在治具上板（1）和治具下板（2）贴合时嵌入凹陷部（11）内、并与待镀膜镜片（3）的外周缘（30）抵接。镜片镀膜治具（100）能够避免在镜片在镀膜制程中散料。

Description

一种镜片镀膜治具 技术领域
本实用新型涉及镜片镀膜技术领域，特别涉及一种镜片镀膜治具。
 背景技术
镀膜制程在工业界的应用极广，一般常使用在金属加工业、半导体业以及光电产业等。近几年来，由于半导体业及光电产业的迅速发展，使得镀膜技术得到了重大的进展。其中镀膜治具主要指一类需要在较高真空度下进行的镀膜，具体包括很多种类，包括真空离子蒸发，磁控溅射，MBE分子束外延，PLD激光溅射沉积等很多种。光电产业镀膜是指以物理或者化学方法在光学原件表面镀上单层或者多层薄膜，利用入射、反射及透射光线在薄膜界面产生的干涉作用实现聚焦、准直、滤光、反射以及折射等效果。现有技术的镜片镀膜治具在治具上板与治具下板上开镜片收容孔，在镜片镀膜的过程中，将待镀膜的镜片完全放置于治具上板的镜片收容孔内，再将治具下板与治具上板贴合固定，最后对待镀膜镜片镀膜。
发明人发现现有技术中至少存在如下问题：镜片镀膜过程中治具上板与治具下板容易变形，单靠镜片收容孔结构无法对镜片起到很好的固定作用，放置于多个镜片收容孔内的多个镜片会因治具上板与治具下板的变形而无法被牢稳固定，导致散料。
 技术问题
本实用新型的目的在于提供一种镜片镀膜治具，使其能够避免在镜片在镀膜制程中散料。
 技术解决方案
为解决上述技术问题，本实用新型的实施方式提供了一种镜片镀膜治具，包含：
治具上板和与所述治具上板相对设置且共同夹持待镀膜镜片的治具下板，所述治具上板设置有多个第一镜片收容孔，所述治具下板设置有多个与所述第一镜片收容孔对应的且尺寸相同的第二镜片收容孔，所述治具上板上设有环绕所述第一镜片收容孔的凹陷部，所述治具下板与所述凹陷部对应的位置上设有凸起部，所述凸起部用于在所述治具上板和所述治具下板贴合时嵌入所述凹陷部内、并与待镀膜镜片的外周缘抵接。
 有益效果
本实用新型实施方式相对于现有技术而言，在治具上板上设有凹陷部，治具下板与凹陷部对应的位置上设有凸起部，在治具上板和治具下板贴合时，凸起部嵌入凹陷部内，并与待镀膜镜片的外周缘抵接，如此设置便可通过待镀膜镜片与凸起部的抵接作用和凸起部与凹陷部之间的嵌入固定作用，提高镜片镀膜治具与待镀膜镜片之间的稳定性，在治具上板和治具下板变形时，镜片仍被嵌入凹陷部内的凸起部抵接、不会由于失去收容孔的固定作用而发生散料现象，从而能够避免在镜片镀膜过程中镜片散料。
另外，所述凹陷部的数量为多个，多个所述凹陷部环绕所述第一镜片收容孔等间隔设置；所述凸起部的数量为多个，多个所述凸起部环绕所述第二镜片收容孔等间隔设置，所述凹陷部与所述凸起部一一对应。多个凹陷部与凸起部的等间隔的设置使得待镀膜镜片的受力均匀，避免了待镀膜镜片在镀膜治具的工作过程中产生摇晃，提高了镀膜治具与待镀膜镜片之间的稳定性，同时等间隔设置的凹陷部与凸起部使得镀膜治具便于加工制作。
另外，多个所述凹陷部分别连通相邻的所述第一镜片收容孔，多个所述凸起部分别设置在相邻的所述第二镜片收容孔之间。
另外，所述凸起部包括远离所述治具下板的端面、自所述端面延伸至所述治具下板的侧壁，所述侧壁用于在所述治具上板和所述治具下板贴合时与所述待镀膜镜片的外周缘抵接。
另外，所述侧壁用于抵接所述待镀膜镜片外周缘的面为弧面。如此设置既增大了待镀膜镜片与凸起部之间的接触面积，也使得待镀膜镜片与侧壁之间不会存在间隙，从而使待镀膜镜片的受力均匀，有效的防止了待镀膜镜片因受力不均而损坏。
另外，多个所述第一镜片收容孔和多个所述第二镜片收容孔皆均匀阵列排布。
另外，所述治具上板和所述治具下板的一者上设置有卡持部、另一者上设置有卡持孔，在所述治具上板和所述治具下板贴合时，所述卡持部卡持于所述卡持孔内。通过卡持部和卡持孔可以非常方便的将治具上板和治具下板连接在一起，便于后期镀膜工作，减少工人工作量，提高工作效率。
 附图说明
图1是本实用新型第一实施方式提供的镜片镀膜治具的结构示意图；
图2是本实用新型第一实施方式提供的镜片镀膜治具另一种角度的结构示意图；
图3是本实用新型第一实施方式提供的镜片镀膜治具的俯视图；
图4是图3中A-A处的剖视图；
图5是图4中B处的放大图。
 本发明的实施方式
为使本实用新型的目的、技术方案和优点更加清楚，下面将结合附图对本实用新型的各实施方式进行详细的阐述。然而，本领域的普通技术人员可以理解，在本实用新型各实施方式中，为了使读者更好地理解本实用新型而提出了许多技术细节。但是，即使没有这些技术细节和基于以下各实施方式的种种变化和修改，也可以实现本实用新型各权利要求所要求保护的技术方案。
本实用新型的第一实施方式涉及一种镜片镀膜治具100，如图1、图2及图5所示。
镜片镀膜治具100包括治具上板1和与治具上板1相对设置的治具下板2，治具上板1设置有多个第一镜片收容孔10，治具下板2设置有多个与第一镜片收容孔10对应的第二镜片收容孔20，治具上板1上设有环绕所述第一镜片收容孔10的凹陷部11，治具下板2与凹陷部11对应的位置上设有凸起部21，凸起部21用于在治具上板1和治具下板2贴合时嵌入凹陷部11内、并与待镀膜镜片3的外周缘30抵接。
本实用新型实施方式相对于现有技术而言，由于治具上板1与治具下板2上均设有镜片收容孔，因此可以将镜片放置在治具上板1或治具下板2上以便于检查镜片外观；同时，在治具上板1上设有凹陷部11，治具下板2与凹陷部11对应的位置上设有凸起部21，在治具上板1和治具下板2贴合时，凸起部21嵌入凹陷部11内，并与待镀膜镜片3的外周缘30抵接，如此设置便可通过待镀膜镜片3与凸起部21的抵接作用和凸起部21与凹陷部11之间的嵌入固定作用，提高镜片镀膜治具100与待镀膜镜片3之间的稳定性，在治具上板1和治具下板2变形时，镜片仍被嵌入凹陷部11内的凸起部21抵接、不会由于失去收容孔的固定作用而发生散料现象，从而能够避免在镜片镀膜过程中镜片散料。
值得一提的是，如图3、图4及图5所示，在本实施方式中，凹陷部11的数量为多个，多个凹陷部11环绕第一镜片收容孔10等间隔设置；凸起部21的数量为多个，多个凸起部21环绕第二镜片收容孔20等间隔设置，凹陷部11与所述凸起部21一一对应。多个凹陷部11与凸起部21的等间隔的设置使得待镀膜镜片3的受力均匀，避免了待镀膜镜片3在镀膜治具100的工作过程中产生摇晃，提高了镀膜治具100与待镀膜镜片之间的稳定性，同时等间隔设置的凹陷部11与凸起部21使得镀膜治具100便于加工制作。
不难理解，为了进一步避免镀膜治具100在操作过程中镜片散料，使得镜片脱离治具上板1，本实施方式中凸起部21的高度可以根据实际情况调节，以通过增加凸起部21高度的方式使得凸起部21与待镀膜镜片3之间的接触面积增大，从而加强凸起部21与待镀膜镜片3之间的抵接作用。
具体的说，多个凹陷部11分别连通相邻的第一镜片收容孔10，多个凸起部21分别设置在相邻的第二镜片收容孔20之间。如此设置的凹陷部11结构加工方便，同时也使得镀膜治具100具有良好的外观效果。
具体的说，凸起部21包括远离治具下板2的端面211、自端面211延伸至治具下板2的侧壁212，侧壁212用于在治具上板1和治具下板2贴合时与待镀膜镜片3的外周缘30抵接。可以理解的是，本实施方式中凸起部21可以与治具下板2一体成型，一体成型的凸起部21与治具下板2结构稳定，也可以独立加工凸起部21与治具下板2，再将凸起部21固定在治具下板2上，如此设置使得在需要增加凸起部21的高度时，简化了改装流程，只需将凸起部21取下并换上更高的凸起部21即可。
需要说明的是，在本实施方式中，侧壁212用于抵接待镀膜镜片3外周缘30的面为弧面。由于镜片的外周缘也为圆面，如此设置既增大了待镀膜镜片3与凸起部21之间的接触面积，也使得待镀膜镜片3与侧壁212之间不会存在间隙，从而使待镀膜镜片3的受力均匀，有效的防止了待镀膜镜片3因受力不均而损坏。
优选的，多个第一镜片收容孔10和多个第二镜片收容孔20皆均匀阵列排布。
值得一提的是，本实施方式中的治具下板2上设置有卡持孔22、治具上板1上设置有卡持部12，在治具上板1和治具下板2贴合时，卡持孔22卡持于卡持部12内。本领域技术人员可以理解，也可以在治具下板2上设置卡持部12，在治具上板1上设置卡持孔22，并不影响本实用新型的效果。通过卡持部22和卡持孔12可以非常方便的将治具上板1和治具下板2连接在一起，便于后期镀膜工作，减少工人工作量，提高工作效率。
本领域的普通技术人员可以理解，上述各实施方式是实现本实用新型的具体实施例，而在实际应用中，可以在形式上和细节上对其作各种改变，而不偏离本实用新型的精神和范围。

Claims (7)

  1. 一种镜片镀膜治具，其特征在于：包括治具上板和与所述治具上板相对设置且共同夹持待镀膜镜片的治具下板，所述治具上板设置有多个第一镜片收容孔，所述治具下板设置有与各所述第一镜片收容孔对应的且尺寸相同的第二镜片收容孔，所述治具上板上设有环绕所述第一镜片收容孔的凹陷部，所述治具下板与所述凹陷部对应的位置上设有凸起部，所述凸起部用于在所述治具上板和所述治具下板贴合时嵌入所述凹陷部内、并与待镀膜镜片的外周缘抵接。
  2. 根据权利要求1所述的镜片镀膜治具，其特征在于，所述凹陷部的数量为多个，多个所述凹陷部环绕所述第一镜片收容孔等间隔设置；所述凸起部的数量为多个，多个所述凸起部环绕所述第二镜片收容孔等间隔设置，所述凹陷部与所述凸起部一一对应。
  3. 根据权利要求2所述的镜片镀膜治具，其特征在于，多个所述凹陷部分别连通相邻的所述第一镜片收容孔，多个所述凸起部分别设置在相邻的所述第二镜片收容孔之间。
  4. 根据权利要求1所述的镜片镀膜治具，其特征在于，所述凸起部包括远离所述治具下板的端面、自所述端面延伸至所述治具下板的侧壁，所述侧壁用于在所述治具上板和所述治具下板贴合时与所述待镀膜镜片的外周缘抵接。
  5. 根据权利要求4所述的镜片镀膜治具，其特征在于，所述侧壁用于抵接所述待镀膜镜片外周缘的面为弧面。
  6. 根据权利要求1所述的镜片镀膜治具，其特征在于，多个所述第一镜片收容孔和多个所述第二镜片收容孔皆均匀阵列排布。
  7. 根据权利要求1所述的镜片镀膜治具，其特征在于，所述治具上板和所述治具下板的一者上设置有卡持部、另一者上设置有卡持孔，在所述治具上板和所述治具下板贴合时，所述卡持部卡持于所述卡持孔内。
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