WO2020026943A1 - 複合シール材 - Google Patents
複合シール材 Download PDFInfo
- Publication number
- WO2020026943A1 WO2020026943A1 PCT/JP2019/029282 JP2019029282W WO2020026943A1 WO 2020026943 A1 WO2020026943 A1 WO 2020026943A1 JP 2019029282 W JP2019029282 W JP 2019029282W WO 2020026943 A1 WO2020026943 A1 WO 2020026943A1
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- WO
- WIPO (PCT)
- Prior art keywords
- sealing material
- composite sealing
- composite
- groove
- material according
- Prior art date
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- 239000002131 composite material Substances 0.000 title claims abstract description 139
- 239000000463 material Substances 0.000 title claims abstract description 20
- 239000003566 sealing material Substances 0.000 claims description 125
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 15
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000007789 sealing Methods 0.000 abstract description 65
- 239000002245 particle Substances 0.000 abstract description 9
- 239000007789 gas Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 description 15
- 239000011347 resin Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 10
- 229920001577 copolymer Polymers 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 229920001971 elastomer Polymers 0.000 description 5
- 239000005060 rubber Substances 0.000 description 5
- 239000000565 sealant Substances 0.000 description 5
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 5
- -1 and among them Substances 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 229920001780 ECTFE Polymers 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 2
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920002620 polyvinyl fluoride Polymers 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004693 Polybenzimidazole Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920002480 polybenzimidazole Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920000131 polyvinylidene Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 229920005609 vinylidenefluoride/hexafluoropropylene copolymer Polymers 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/102—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B11/00—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
- F16B11/006—Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding by gluing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
- F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
- F16J15/025—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
Definitions
- the present invention relates to a composite sealing material used in a vacuum state, for example, a composite sealing material used in a semiconductor manufacturing apparatus such as a dry etching apparatus and a plasma CVD apparatus.
- a sealing material used in a semiconductor manufacturing apparatus needs vacuum sealing performance as a basic performance.
- it is required to have performance such as plasma resistance and corrosion gas resistance.
- a first member 102 made of fluoro rubber and a first member 102 are used as a sealing material that is required to have such vacuum sealing performance, plasma resistance, and corrosion gas resistance.
- a first member 102 made of fluoro rubber and a first member 102 are used as a sealing material that is required to have such vacuum sealing performance, plasma resistance, and corrosion gas resistance.
- a composite sealing material 100 composed of a second member 104 made of a fluororesin having good plasma resistance and corrosion gas resistance is used (for example, Patent Document 1).
- the first member 102 is disposed on the one wall 156 side of the sealing groove 154 located on the atmosphere side.
- the second member 104 is disposed on the other wall 158 side of the seal groove 154 located on the side exposed to the etching gas or the plasma.
- the one member 152 and the other member 160 are brought close to each other, and the composite sealing material 100 is pressed between the one member 152 and the other member 160, whereby the first member 102 ensures a sealed state between the one member 152 and the other member 160, and prevents the etching gas or plasma from entering the first member 102 side by the second member 104.
- the seal performance can be maintained for a long period of time without deterioration.
- the composite sealing material 100 is deformed when pressed between the one member 152 and the other member 160, the composite sealing material 100 has a strong reaction force at the time of compression because it is a lump, and the sealing performance of the composite sealing material 100 is obtained. It is necessary to press the composite sealing material 100 with a strong pressing force.
- the second member 104 and the other wall 158 of the seal groove 154 come into contact with each other, and by repeating this, the second member 104 may be worn and particles may be generated. There is.
- the present invention has been made in view of such circumstances, and has performances such as vacuum sealability, plasma resistance, and corrosion gas resistance, does not require a strong pressing force during use, and may generate particles. It is another object of the present invention to provide a composite sealing material capable of maintaining vacuum sealing performance for a long period of time.
- the present invention has been invented in order to solve the above-described problems in the prior art, the composite sealing material of the present invention, An annular composite sealing material in which the first member and the second member are adjacent to each other on the left and right,
- the first member is: A seal body, A lip portion extending from the seal body toward the upper side in the thickness direction of the composite sealing material; With The lip of the first member is It is characterized in that it extends in an inclined posture toward the outside on the opposite side to the adjacent second member.
- the composite sealing material of the present invention Used to seal between one member and the other member, when mounted in a seal groove provided in the one member, The first member is located on one wall side of the seal groove, and the second member is located on the other wall side.
- the lip first comes into contact with the other member first when the composite sealing material is mounted in the seal groove and the sealing performance is obtained by bringing one member and the other member close to each other. Since the sealing state can be ensured by contact, the sealing performance can be obtained with a weak pressing force.
- the composite sealing material of the present invention there is no possibility of generating particles, and the vacuum sealing performance can be maintained for a long period of time.
- the inclination angle of the lip portion is in a range of 30 to 60 degrees.
- a bulge is provided on a side opposite to the adjacent second member.
- the composite sealing material mounted in the sealing groove may fall off from the sealing groove when the sealing groove has a shape and a groove or a single groove. Can be reliably prevented.
- the bulging portion fits between the inclined surface (one wall) of the seal groove and the bottom wall, and it is possible to prevent the composite sealing material from dropping out of the seal groove.
- the composite sealing material of the present invention is characterized by being constituted by a plane.
- a concave portion is provided.
- the composite seal material is pressed and deformed when the composite seal material is mounted in the seal groove and the one member and the other member are brought close to each other to obtain the sealing performance. A part of the material enters the recess.
- the reaction force of the composite sealing material is weaker in the state in which the recess is provided than in the state in which the recess is not provided, and the sealing performance can be reliably obtained with a weak pressing force.
- the second member includes: The base, An extension piece extending from the base toward the upper side in the thickness direction of the composite sealing material, With The extension piece, It is characterized by being extended in an inclined posture toward the adjacent first member.
- the extension piece is the lip of the first member.
- the second piece comes into contact with the other member next to the portion, but since the extension piece has an inclined posture, it is deformed by a weak pressing force, and the reaction force of the composite sealing material can be reduced.
- the extension piece since the extension piece comes into contact with both the other wall and the other member of the seal groove, the extension piece reliably prevents the etching gas or plasma from entering the first member side. be able to.
- the inclination angle of the extension piece is in a range of 50 to 80 degrees.
- the other wall of the seal groove comes into contact with the second member when the composite sealing material is mounted in the seal groove and the one member and the other member are brought close to each other to obtain the sealing performance.
- the range is widened, and it is possible to reliably prevent the etching gas or the plasma from entering the first member side by the extension piece.
- the composite sealing material of the present invention is characterized by being constituted by a plane.
- the composite sealant is in good surface contact with the bottom wall of the seal groove, so that the seating of the composite sealant in the seal groove is good, and the composite sealant rolls in the seal groove. Can be reliably prevented.
- the contact area between the bottom wall of the seal groove and the bottom of the base is wide, it is possible to reliably prevent the etching gas or plasma from entering the first member.
- the composite sealing material of the present invention In the base, It is characterized in that a fitting projection fitted to the first member is provided.
- the fitting protrusion is provided in this manner, the second member and the first member are surely integrated, and either one of the first member and the second member falls off from the seal groove. This can be reliably prevented.
- the handleability of the composite sealing material is good.
- the first member comprises an elastic member;
- the second member is made of a material harder than the first member.
- the first member can ensure the sealing performance
- the second member can prevent, for example, etching gas or plasma from entering the first member. Therefore, a single composite sealing material can have performances such as vacuum sealing performance, plasma resistance, and corrosion gas resistance.
- the composite sealing material of the present invention is bonded to each other with an adhesive.
- the maximum height of the composite sealing material in the thickness direction is within a range of 1.10 to 1.70 times the maximum depth of the sealing groove.
- the maximum height is within such a range, when the composite sealing material is mounted in the seal groove and the one member and the other member are brought close to each other to obtain sealing performance, the lip portion surely contacts the other member. The sealability can be ensured by contact.
- the maximum width of the composite sealing material in the left-right direction from the end of the first member to the end of the second member is 1.01 to 1.30 times the narrowest width of the opening of the seal groove. It is characterized by being within.
- the composite sealing material may remain in the sealing groove and drop off from the sealing groove particularly when there is a sealing groove or a groove having one side. Can be reliably prevented.
- the seal groove It is characterized by being one of a dovetail groove, a one-piece groove and a square groove.
- the composite sealing material of the present invention can be particularly preferably used.
- the composite sealing material of the present invention, The one member and the other member are a semiconductor manufacturing apparatus.
- the required characteristics have various properties such as vacuum sealing property, plasma resistance, performance such as corrosion gas resistance, and no generation of particles. If so, these properties can be obtained, and the generation of particles can be surely prevented.
- a further groove is provided outside the seal groove provided in the one member, and a spacer member is provided in the another groove.
- the spacer member is further provided as described above, it is possible to reliably prevent the one member and the other member from directly contacting each other. Therefore, generation of metal particles due to metal touch can be reliably prevented.
- the composite sealing material of the present invention When the spacer member is disposed in another groove, The amount of protrusion of the spacer member protruding from the opening of the another groove toward the other member is within a range of 0.30 to 1.00 mm.
- one member and the other member can be reliably prevented from coming into direct contact with each other, and the sealing performance required for the composite sealing material can be reliably ensured over a long period of time. Can be maintained.
- the composite sealing material of this invention has the performances, such as vacuum sealing performance, plasma resistance, and corrosion gas resistance, does not require a strong pressing force at the time of use, there is no possibility of generating particles, A composite sealing material that can maintain sealing performance can be provided.
- FIG. 1 is a schematic view of a semiconductor manufacturing apparatus to which the composite sealing material of the present invention is mounted.
- FIG. 2 is an enlarged cross-sectional view of the AA cross section of the semiconductor manufacturing apparatus shown in FIG.
- FIG. 3 is an enlarged sectional view showing a main part of the composite sealing material of the present invention.
- FIG. 4 is a cross-sectional view showing a state in which the composite sealing material of the present invention is mounted in a sealing groove and the other member is in contact with a lip.
- FIG. 5 is a cross-sectional view showing a state in which the composite sealing material of the present invention is mounted in a sealing groove and one member and the other member are brought closer to each other to provide the sealing property of the composite sealing material.
- FIG. 1 is a schematic view of a semiconductor manufacturing apparatus to which the composite sealing material of the present invention is mounted.
- FIG. 2 is an enlarged cross-sectional view of the AA cross section of the semiconductor manufacturing apparatus shown in FIG.
- FIG. 3 is an enlarged
- FIG. 6 is a sectional view showing another embodiment of the composite sealing material of the present invention.
- FIG. 7 is a cross-sectional view showing a state in which the composite sealing material of the present invention is mounted in a single groove.
- FIG. 8 is a cross-sectional view showing a state where the composite sealing material of the present invention is mounted in a square groove.
- FIG. 9 is a cross-sectional view showing a state in which another groove is provided outside the seal groove, and a spacer member is provided in another groove.
- FIG. 10 is a cross-sectional view showing a state where a conventional composite sealing material is mounted in a sealing groove.
- FIG. 11 is a cross-sectional view showing a state in which a conventional composite sealing material is mounted in a sealing groove, and one member and the other member are brought closer to each other to provide sealing properties by the composite sealing material.
- the composite sealing material 10 of the present invention is mounted in a sealing groove 52 provided in one member 50 of a semiconductor manufacturing apparatus 80, and is provided between one member 50 and the other member 70. Is used to seal the
- the cross-sectional shape is such that, when mounted in the seal groove 52 (in the present embodiment, the groove), the one side 54 of the seal groove 52 (in the present embodiment, Side) and the second member 40 located on the other wall 56 side of the seal groove 52 (a severe environment side such as corrosive gas and plasma in the present embodiment).
- the member 20 and the second member 40 are connected to each other to form one composite sealing material 10.
- the first member 20 is made of an elastic member, and examples of the elastic member include rubber.
- the rubber may be either natural rubber or synthetic rubber, and among them, fluorine rubber is preferable.
- Binary vinylidene fluoride such as vinylidene fluoride / hexafluoropropylene copolymer, vinylidene fluoride / trifluorochloroethylene copolymer, vinylidene fluoride / pentafluoropropylene copolymer, etc. Rubber, vinylidene fluoride / tetrafluoroethylene / hexafluoropropylene copolymer, vinylidene fluoride / tetrafluoroethylene / perfluoroalkylvinyl ether copolymer, vinylidene fluoride / tetrafluoroethylene / propylene copolymer, etc.
- Ternary vinylidene fluoride rubbers tetrafluoroethylene / propylene copolymers, tetrafluoroethylene / perfluoroalkylvinyl ether copolymers, and thermoplastic fluororubbers.
- the second member 40 is preferably made of a harder material than the first member 20, for example, a synthetic resin.
- the synthetic resin examples include one or more synthetic resins selected from a fluorine resin, a polyimide resin, a polyamideimide resin, a polyetherimide resin, a polyphenylene sulfide resin, a polybenzimidazole resin, and a polyetherketone resin.
- a fluororesin is particularly preferable.
- the fluororesin polytetrafluoroethylene (PTFE) resin, tetrafluoroethylene-perfluoroalkylvinyl ether copolymer (PFA) resin, tetrafluoroethylene-hexafluoropropylene copolymer (FEP) Resin, tetrafluoroethylene-ethylene copolymer (ETFE) resin, polyvinylidene fluorite (PVDF) resin, polychlorotrifluoroethylene (PCTFE) resin, chlorotrifluoroethylene-ethylene copolymer (ECTFE) resin, polyvinyl fluoride Ride (PVF) resin.
- PTFE polytetrafluoroethylene
- PFA tetrafluoroethylene-perfluoroalkylvinyl ether copolymer
- FEP tetrafluoroethylene-hexafluoropropylene copolymer
- FEP tetraflu
- the first member 20 made of such an elastic member includes a seal main body 22 located on the bottom wall 58 side of the seal groove 52 provided in the one member 50, and the seal main body 22 and the opening 60 side of the seal groove 52 from the seal main body 22. And a lip portion 24 extending toward the front end.
- the lip portion 24 extends in an inclined posture toward the outside on the side opposite to the adjacent second member 40, and as shown in FIG. 4, the one member 50 and the other member 70 are brought close to each other.
- the part is a part that comes into contact with the other member 70 first, and is a part that is provided with sealing properties.
- the inclination angle ⁇ 1 of the lip portion 24 is preferably in the range of 30 to 60 degrees, more preferably in the range of 35 to 50 degrees, and even more preferably in the range of 40 to 45 degrees.
- the swelling portion 26 is provided on the side of the seal body 22 of the first member 20 opposite to the second member 40 (one wall 54 side).
- the bulging portion 26 can reliably prevent the composite seal material 10 mounted in the seal groove 52 from falling off from the seal groove 52.
- the bulging portion 26 fits between the one wall 54 and the bottom wall 58 of the seal groove 52, and it is possible to reliably prevent the composite sealing material 10 from dropping out of the seal groove 52. .
- the bottom portion 28 of the seal main body 22 is formed of a flat surface, whereby the bottom wall 58 of the seal groove 52 and the bottom portion 28 come into surface contact. Therefore, the seating of the composite sealing material 10 in the sealing groove 52 is good, and the rolling of the composite sealing material 10 in the sealing groove 52 can be reliably prevented.
- the seal body 22 When the first member 20 is mounted in the seal groove 52, the seal body 22 is located in the seal groove 52, and most of the lip portion 24 moves from the opening 60 of the seal groove 52 toward the other member 70. It is designed to protrude.
- the second member 40 adjacent to the first member 20 has a base 42 located on the bottom wall 58 side, and from the base 42 toward the upper side in the thickness direction of the composite sealing material 10 (the other member 70 side). And an extension piece 44 extended.
- the extension piece 44 is extended in an inclined posture toward the adjacent first member 20, thereby mounting the composite sealing material 10 in the seal groove 52 and bringing the one member 50 and the other member 70 close to each other.
- the extension piece 44 comes into contact with the other member 70 next to the lip portion 24 of the first member 20 as shown in FIG.
- the extension piece 44 since the extension piece 44 has an inclined posture, it is deformed by a weak pressing force, and the reaction force of the composite sealing material 10 can be weakened.
- the inclination angle ⁇ 2 of the extension piece 44 is preferably in the range of 50 to 80 degrees, more preferably in the range of 55 to 75 degrees, and further preferably in the range of 60 to 70 degrees.
- the thickness T3 of the extension piece 44 is preferably in the range of 5 to 15% with respect to the maximum width T1 from the end of the first member 20 to the end of the second member 40 in the left-right direction of the composite sealing material 10. Within the range, more preferably within the range of 8 to 13%, even more preferably within the range of 10 to 12%.
- the extension piece 44 is deformed by a weak pressing force, and the reaction force of the composite seal material 10 can be reduced.
- the bottom portion 46 of the base portion 42 is formed as a plane, so that the bottom portion 46 of the base portion 42 and the bottom wall 58 of the seal groove 52 come into surface contact. Accordingly, the seating of the composite sealant 10 in the seal groove 52 is good, and the rolling of the composite sealant 10 in the seal groove 52 can be reliably prevented.
- the contact area between the bottom wall 58 of the seal groove 52 and the bottom 46 of the base 42 is widened, so that the etching gas or plasma is reliably prevented from entering the first member 20 side. be able to.
- the base 42 is provided with a fitting projection 48 to be fitted with the adjacent first member 20, so that the second member 40 and the first member 20 are surely integrated. Therefore, it is possible to reliably prevent any one of the first member 20 and the second member 40 from falling off from the seal groove 52.
- the handleability of the composite sealing material 10 can be improved.
- first member 20 and the second member 40 are integrated via the fitting projection 48 in this way, it is preferable to bond them together with an adhesive, preferably a heat-resistant adhesive.
- the maximum height H1 of the composite sealing material 10 in the thickness direction is set to the maximum depth H2 of the sealing groove 52. Is preferably in the range of 1.10 to 1.70 times, more preferably in the range of 1.20 to 1.60 times, and still more preferably in the range of 1.35 to 1.40 times. good.
- the lip portion 24 The sealing performance can be obtained by reliably contacting the other member 70.
- the maximum width T1 from the left and right ends of the first member 20 to the end of the second member 40 of the composite sealing material 10 is preferably 1: 1 with respect to the narrowest width T2 of the opening 60 of the sealing groove 52.
- the range is preferably from 01 to 1.30 times, more preferably from 1.02 to 1.20 times, and still more preferably from 1.04 to 1.10 times.
- the composite sealing material 10 remains in the seal groove 52 and falls off from the seal groove 52 when the seal groove 52 is a special groove or a single groove. This can be reliably prevented.
- the composite sealing material 10 including the first member 20 and the second member 40 is disposed in the sealing groove 52, as shown in FIG. 2, and then, as shown in FIG. When the one member 50 and the other member 70 approach each other, first, the lip portion 24 comes into contact with the other member 70, and the sealing between the one member 50 and the other member 70 is started.
- the extension piece 44 of the second member 40 also comes into contact with the other member 70 and the other wall 56 of the seal groove 52 while being tilted toward the first member 20 by the other member 70, so that the etching is surely performed. Gas or plasma can be prevented from entering the first member 20 side.
- the thickness of the extension piece 44 is set as described above, even when the extension piece 44 comes into contact with the other wall 56 of the seal groove 52, it does not slide strongly and there is no possibility of generating particles. is there.
- a concave portion 90 may be provided in the bottom portion 28 of the seal body 22 of the first member 20.
- the composite seal material 10 is pressed when the composite seal material 10 is mounted in the seal groove 52 and the one member 50 and the other member 70 are brought close to each other to obtain the sealing performance. As a result, a part of the composite sealing material 10 enters the recess 90. Therefore, the reaction force of the composite sealing material 10 is weaker in the state where the recess 90 is provided than in the state where the recess 90 is not provided, and the sealing performance can be reliably obtained with a weak pressing force.
- the shape of the bulging portion 26 of the first member 20 is substantially triangular in cross section, or as shown in FIG. 6C, there is no bulging portion 26 itself. Even the embodiments are good in some cases.
- the case where the seal groove 52 is present and the groove is described as an example. However, in the case of a single groove as shown in FIG. It may be a groove.
- another groove 92 is provided outside (atmosphere side) of the seal groove 52 provided in the one member 50, and a spacer member 94 is disposed in the other groove 92. It may be provided.
- PEEK polyether ether ketone
- the one member 50 and the other member 70 are made of metal, metal touch can be prevented, and generation of metal particles can be reliably prevented.
- the protrusion amount H 3 of the spacer member 94 projecting from the opening 96 of the other groove 92 toward the other member 70 is preferably 0.30 to 1 It is within the range of 0.000 mm, more preferably within the range of 0.40 to 0.80 mm, and even more preferably within the range of 0.45 to 0.55 mm.
- composite sealing material 10 of the present invention can be variously modified without departing from the purpose of the present invention.
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- Computer Hardware Design (AREA)
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- Gasket Seals (AREA)
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Abstract
Description
第1部材と第2部材とが左右に隣接されてなる環状の複合シール材であって、
前記第1部材が、
シール本体部と、
前記シール本体部から、前記複合シール材の厚さ方向の上方側に向かって延設されたリップ部と、
を備え、
前記第1部材のリップ部は、
隣接する前記第2部材とは逆側の外方に向かって傾斜姿勢で延出されていることを特徴とする。
前記複合シール材は、
一方部材と他方部材との間を封止するのに用いられ、前記一方部材に設けられたシール溝内に装着した際において、
前記シール溝の一方壁側に前記第1部材が位置し、他方壁側に前記第2部材が位置することを特徴とする。
前記リップ部の傾斜角度が、30~60度の範囲内であることを特徴とする。
前記第1部材のシール本体部には、
隣接する前記第2部材とは逆側の側部に膨出部が設けられていることを特徴とする。
前記シール本体部の底部は、
平面で構成されていることを特徴とする。
前記シール本体部の底部には、
凹部が設けられていることを特徴とする。
前記第2部材は、
基部と、
前記基部から、前記複合シール材の厚さ方向の上方側に向かって延設された延設片と、
を備え、
前記延設片は、
隣接する前記第1部材に向かって傾斜姿勢で延出されていることを特徴とする。
前記延設片の傾斜角度が、50~80度の範囲内であることを特徴とする。
前記基部の底部は、
平面で構成されていることを特徴とする。
前記基部には、
前記第1部材に嵌め合わされる嵌合凸部が設けられていることを特徴とする。
前記第1部材が、弾性部材から成り、
前記第2部材が、前記第1部材よりも硬質の材料から成ることを特徴とする。
前記第1部材と第2部材とが、互いに接着剤で接着されていることを特徴とする。
前記複合シール材の厚さ方向の最大高さが、前記シール溝の最大深さに対して、1.10~1.70倍の範囲内であることを特徴とする。
前記複合シール材の左右方向における第1部材の端部から第2部材の端部までの最大幅が、前記シール溝の開口の最狭幅に対して、1.01~1.30倍の範囲内であることを特徴とする。
前記シール溝が、
あり溝、片あり溝、角溝のいずれかであることを特徴とする。
前記一方部材と他方部材が、半導体製造装置であることを特徴とする。
前記一方部材に設けられたシール溝の外側に、さらに別の溝が設けられており、前記別の溝内には、スペーサー部材が配設されていることを特徴とする。
前記スペーサー部材が別の溝に配設された際において、
前記別の溝の開口から前記他方部材側に突出する前記スペーサー部材の突出量が0.30~1.00mmの範囲内であることを特徴とする。
20 第1部材
22 シール本体部
24 リップ部
26 膨出部
28 底部
40 第2部材
42 基部
44 延設片
46 底部
48 嵌合凸部
50 一方部材
52 シール溝
54 一方壁
56 他方壁
58 底壁
60 開口
70 他方部材
80 半導体製造装置
90 凹部
92 別の溝
94 スペーサー部材
96 開口
100 複合シール材
102 第1部材
104 第2部材
150 半導体製造装置
152 一方部材
154 シール溝
156 一方壁
158 他方壁
160 他方部材
T1 複合シール材の最大幅
T2 シール溝の開口における最狭幅
θ1 リップ部の傾斜角度
θ2 延設片の傾斜角度
H1 複合シール材の厚さ方向の最大高さ
H2 シール溝の最大深さ
H3 スペーサー部材の突出量
Claims (18)
- 第1部材と第2部材とが左右に隣接されてなる環状の複合シール材であって、
前記第1部材が、
シール本体部と、
前記シール本体部から、前記複合シール材の厚さ方向の上方側に向かって延設されたリップ部と、
を備え、
前記第1部材のリップ部は、
隣接する前記第2部材とは逆側の外方に向かって傾斜姿勢で延出されていることを特徴とする複合シール材。 - 前記リップ部の傾斜角度が、30~60度の範囲内であることを特徴とする請求項1に記載の複合シール材。
- 前記第1部材のシール本体部には、
隣接する前記第2部材とは逆側の側部に膨出部が設けられていることを特徴とする請求項1または2に記載の複合シール材。 - 前記シール本体部の底部は、
平面で構成されていることを特徴とする請求項1~3のいずれか一項に記載の複合シール材。 - 前記シール本体部の底部には、
凹部が設けられていることを特徴とする請求項1~3のいずれか一項に記載の複合シール材。 - 前記第2部材は、
基部と、
前記基部から、前記複合シール材の厚さ方向の上方側に向かって延設された延設片と、
を備え、
前記延設片は、
隣接する前記第1部材に向かって傾斜姿勢で延出されていることを特徴とする請求項1~5のいずれか一項に記載の複合シール材。 - 前記延設片の傾斜角度が、50~80度の範囲内であることを特徴とする請求項6に記載の複合シール材。
- 前記基部の底部は、
平面で構成されていることを特徴とする請求項6または7に記載の複合シール材。 - 前記基部には、
前記第1部材に嵌め合わされる嵌合凸部が設けられていることを特徴とする請求項6~8のいずれか一項に記載の複合シール材。 - 前記第1部材が、弾性部材から成り、
前記第2部材が、前記第1部材よりも硬質の材料から成ることを特徴とする請求項1~9のいずれか一項に記載の複合シール材。 - 前記第1部材と第2部材とが、互いに接着剤で接着されていることを特徴とする請求項1~10のいずれか一項に記載の複合シール材。
- 前記複合シール材は、
一方部材と他方部材との間を封止するのに用いられ、前記一方部材に設けられたシール溝内に装着した際において、
前記シール溝の一方壁側に前記第1部材が位置し、他方壁側に前記第2部材が位置することを特徴とする請求項1~11のいずれか一項に記載の複合シール材。 - 前記複合シール材の厚さ方向の最大高さが、前記シール溝の最大深さに対して、1.10~1.70倍の範囲内であることを特徴とする請求項12に記載の複合シール材。
- 前記複合シール材の左右方向における第1部材の端部から第2部材の端部までの最大幅が、前記シール溝の開口の最狭幅に対して、1.01~1.30倍の範囲内であることを特徴とする請求項12または13に記載の複合シール材。
- 前記シール溝が、
あり溝、片あり溝、角溝のいずれかであることを特徴とする請求項12~14のいずれか一項に記載の複合シール材。 - 前記一方部材と他方部材が、半導体製造装置であることを特徴とする請求項12~15のいずれか一項に記載の複合シール材。
- 前記一方部材に設けられたシール溝の外側に、さらに別の溝が設けられており、前記別の溝内には、断面略四角形状のスペーサー部材が配設されていることを特徴とする請求項12~16のいずれか一項に記載の複合シール材。
- 前記スペーサー部材が別の溝に配設された際において、
前記別の溝の開口から前記他方部材側に突出する前記スペーサー部材の突出量が0.30~1.00mmの範囲内であることを特徴とする請求項17に記載の複合シール材。
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JP2020533470A JP7068464B2 (ja) | 2018-08-02 | 2019-07-25 | 複合シール材 |
SG11202013081UA SG11202013081UA (en) | 2018-08-02 | 2019-07-25 | Composite seal material |
CN201980044418.3A CN112469932B (zh) | 2018-08-02 | 2019-07-25 | 复合密封件 |
US17/262,949 US20210310561A1 (en) | 2018-08-02 | 2019-07-25 | Composite Seal Material |
KR1020207037609A KR20210011030A (ko) | 2018-08-02 | 2019-07-25 | 복합 시일재 |
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PCT/JP2019/029282 WO2020026943A1 (ja) | 2018-08-02 | 2019-07-25 | 複合シール材 |
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US (1) | US20210310561A1 (ja) |
JP (1) | JP7068464B2 (ja) |
KR (1) | KR20210011030A (ja) |
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CN113969980A (zh) * | 2020-07-23 | 2022-01-25 | 中国科学院微电子研究所 | 一种真空装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005164027A (ja) * | 2003-11-10 | 2005-06-23 | Nippon Valqua Ind Ltd | 複合シール材 |
JP2006090463A (ja) * | 2004-09-24 | 2006-04-06 | Nok Corp | ガスケット |
JP2006220229A (ja) * | 2005-02-10 | 2006-08-24 | Nippon Valqua Ind Ltd | あり溝用シール材 |
WO2009113417A1 (ja) * | 2008-03-13 | 2009-09-17 | 日本バルカー工業株式会社 | シール材 |
JP2014214778A (ja) * | 2013-04-24 | 2014-11-17 | 三菱電線工業株式会社 | シール材 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5126995B1 (ja) | 1970-10-16 | 1976-08-10 | ||
WO2009038022A1 (ja) * | 2007-09-21 | 2009-03-26 | Nippon Valqua Industries, Ltd. | 複合シール材 |
-
2019
- 2019-07-25 CN CN201980044418.3A patent/CN112469932B/zh active Active
- 2019-07-25 KR KR1020207037609A patent/KR20210011030A/ko not_active Application Discontinuation
- 2019-07-25 JP JP2020533470A patent/JP7068464B2/ja active Active
- 2019-07-25 WO PCT/JP2019/029282 patent/WO2020026943A1/ja active Application Filing
- 2019-07-25 SG SG11202013081UA patent/SG11202013081UA/en unknown
- 2019-07-25 US US17/262,949 patent/US20210310561A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005164027A (ja) * | 2003-11-10 | 2005-06-23 | Nippon Valqua Ind Ltd | 複合シール材 |
JP2006090463A (ja) * | 2004-09-24 | 2006-04-06 | Nok Corp | ガスケット |
JP2006220229A (ja) * | 2005-02-10 | 2006-08-24 | Nippon Valqua Ind Ltd | あり溝用シール材 |
WO2009113417A1 (ja) * | 2008-03-13 | 2009-09-17 | 日本バルカー工業株式会社 | シール材 |
JP2014214778A (ja) * | 2013-04-24 | 2014-11-17 | 三菱電線工業株式会社 | シール材 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113969980A (zh) * | 2020-07-23 | 2022-01-25 | 中国科学院微电子研究所 | 一种真空装置 |
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SG11202013081UA (en) | 2021-01-28 |
US20210310561A1 (en) | 2021-10-07 |
CN112469932A (zh) | 2021-03-09 |
KR20210011030A (ko) | 2021-01-29 |
JPWO2020026943A1 (ja) | 2021-08-02 |
CN112469932B (zh) | 2023-05-09 |
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