WO2020021657A1 - Surface mounting machine - Google Patents

Surface mounting machine Download PDF

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Publication number
WO2020021657A1
WO2020021657A1 PCT/JP2018/027903 JP2018027903W WO2020021657A1 WO 2020021657 A1 WO2020021657 A1 WO 2020021657A1 JP 2018027903 W JP2018027903 W JP 2018027903W WO 2020021657 A1 WO2020021657 A1 WO 2020021657A1
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WO
WIPO (PCT)
Prior art keywords
substrate
component
correction
mark
imaging camera
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Application number
PCT/JP2018/027903
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French (fr)
Japanese (ja)
Inventor
洋平 岸本
Original Assignee
ヤマハ発動機株式会社
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Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Priority to CN201880095504.2A priority Critical patent/CN112514553B/en
Priority to JP2020531894A priority patent/JP6990309B2/en
Priority to KR1020207034372A priority patent/KR102432607B1/en
Priority to PCT/JP2018/027903 priority patent/WO2020021657A1/en
Publication of WO2020021657A1 publication Critical patent/WO2020021657A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0812Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/046Surface mounting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0815Controlling of component placement on the substrate during or after manufacturing

Definitions

  • the correction mark in a state where the light transmitting members are not overlapped is imaged by the board imaging camera, the position of the correction mark is detected as the first position, and the light transmitting member is
  • the overlapping correction mark is imaged by the substrate imaging camera and the position of the correction mark is detected as the second position, a difference occurs between the first position and the second position according to the inclination of the optical axis. Since the displacement of the component is proportional to the inclination of the optical axis of the board imaging camera, the displacement of the component is corrected based on the difference between the first position and the second position, whereby the inclination of the optical axis of the board imaging camera is corrected. Can be corrected.
  • the component displacement is corrected based on the difference between the first position and the second position. Can be corrected.
  • the correction unit may be attached to the surface mounter.
  • the correction unit is loaded into the surface mounter by the substrate transfer device that transfers the substrate, and the first position and the second position are detected using the loaded correction unit.
  • the production of the substrate must be stopped, and the productivity is reduced.
  • the correction unit since the correction unit is attached to the surface mounter, the first position and the second position can be detected without stopping the production of the substrate during the production of the substrate by the surface mounter. it can. As a result, it is possible to correct the positional deviation of the parts while suppressing a decrease in productivity.
  • the invention disclosed in this specification can be realized in various forms such as an apparatus, a method, a computer program for realizing the functions of the apparatus or the method, and a recording medium on which the computer program is recorded.
  • Embodiment 1 will be described with reference to FIGS.
  • the left-right direction shown in FIG. 1 is referred to as an X direction
  • the front-rear direction is referred to as a Y direction
  • the right side shown in FIG. 1 is referred to as an upstream side
  • the left side is referred to as a downstream side.
  • the same constituent members may be omitted from the drawings except for some parts.
  • the head unit 16 will be described with reference to FIG.
  • the head unit 16 according to the first embodiment is a so-called in-line type, and a plurality of mounting heads 25 are provided side by side in the X direction. Further, the head unit 16 is provided with a Z-axis servomotor 26 for individually moving the mounting heads 25 up and down, an R-axis servomotor 27 for rotating the mounting heads 25 around their axes, and the like.
  • the motor control unit 41 rotates each motor such as the X-axis servomotor 23, the Y-axis servomotor 24, the Z-axis servomotor 26, the R-axis servomotor 27, and the conveyor drive motor 46 under the control of the arithmetic processing unit 40.
  • the storage unit 42 stores various data. Various types of data include information on the type and the number of boards P to be produced, information on the mounting coordinates 63 of the component E (see FIG. 14), information on the mounting angle of the component E, information on the mounting order of the component E, The XY coordinates of the recognition mark F attached to P, relative position information of the mounting head 25 with respect to the board imaging camera 19, and the like are included. The XY coordinates of the recognition mark F and the relative position information of the mounting head 25 with respect to the board imaging camera 19 will be described later.
  • the control unit 38 captures an image of each reference mark Fa by the board imaging camera 19, and the XY coordinates (Xf1 ′, Yf1 ′) and (Xf2) of the center point of each reference mark Fa in the XY coordinate system whose origin is the board origin S2. ', Yf2').
  • the control unit 38 determines the XY coordinates (Xf1, Yf1) of the reference mark Fa1 stored in the storage unit 42 and the reference mark recognized by the board imaging camera 19.
  • the difference ( ⁇ X, ⁇ Y) between the XY coordinates (Xf1 ′, Xy1 ′) of Fa1 is defined as the position error of the substrate P.
  • the control unit 38 temporarily corrects the mounting coordinates of each component according to the position error ( ⁇ X, ⁇ Y).
  • the relative position information is the XY coordinates of each mounting head 25 with the origin of the board imaging camera 19.
  • the control unit 38 images the recognition mark F with the board imaging camera 19 to recognize the position of the board imaging camera 19 with respect to the board P, and determines the position of each mounting head 25 with respect to the board P from the relative position of each mounting head 25 with respect to the board P camera. Judge the position.
  • the control unit 38 recognizes that the position of the reference mark Fa1 is the position P2 because the center point of the reference mark Fa1 matches the center point of the image. I do. However, since the actual position of the reference mark Fa1 is the position P1, a deviation occurs between the position of the reference mark Fa1 recognized by the control unit 38 and the actual position of the reference mark Fa1.
  • DdX_c shown in FIG. 12 indicates the amount of the positional deviation. Although described in detail later, when the position P2 of the reference mark Fa1 recognized by the control unit 38 is shifted to the right from the position P1 of the actual reference mark Fa1, dX_c is a negative value.
  • the mounting coordinates are corrected by subtracting the positional deviation amount dX_c from the mounting coordinates before correction.
  • the positional deviation amount dX_c is added to the mounting coordinate of the component E. May be added to correct the mounting coordinates.
  • the positive / negative definition of the displacement amount dX_c will be described later. The same applies to the displacement amount dY_c.
  • the position of the board imaging camera 19 shown in FIG. 15 is set when the correction mark 35 is imaged by the board imaging camera 19 to generate image data in a state where the glass jig 36 does not overlap the correction mark 35. Is a position adjusted so that the center point of the correction mark 35 on the image represented by the symbol coincides with the center point of the image. This adjustment is performed by the processing of S101 to S105 described later.
  • the dotted line 19A_1 indicates the optical axis 19A of the board imaging camera 19 at that time.
  • the positional displacement of the component E is determined based on the difference between the first position M1 and the second position M2. Since the correction is performed, the positional deviation of the component E can be corrected.
  • the difference (dX_g, dY_g) between the first position M1 and the second position M2 can be converted into the displacement amount (dX_c, dY_c) by using the data representing the graph shown in FIG.
  • the glass jig 36 is moved to a position overlapping the correction mark 35 while the position of the substrate imaging camera 19 is fixed.
  • the case where the difference is detected between the first position M ⁇ b> 1 and the second position M ⁇ b> 2 by moving the glass jig 36 and capturing the correction mark 35 in the state where the glass jig 36 overlaps has been described as an example.
  • the substrate imaging camera 19 images the correction mark 35 while the glass jig 36 overlaps the correction mark 35.
  • dX_g Difference between first position and second position (X direction)
  • dY_g Difference between first position and second position (Y direction)
  • dX_c Displacement amount (X direction)
  • dY_c Displacement amount (Y direction)
  • P ... substrate

Abstract

A surface mounting machine 1 for mounting a component E on a substrate P, is provided with: a correction unit 20 including a mounting head 25 that suctions the component E and mounts the component E on the substrate P, a substrate imaging camera 19 that images the substrate P, a correction mark 35 that is given on a base 34, a glass jig 36 through which light from the substrate imaging camera 19 is transmitted, and a moving unit 37 that moves the glass jig 36 between a position overlapping the correction mark 35 and a position not overlapping the correction mark 35; a position detection unit (computation processing unit 40) that detects a first position M1 of the correction mark 35 by imaging the correction mark 35 which is in a state of not overlapping the glass jig 36 by means of the substrate imaging camera 19, and detects a second position M2 of the correction mark 35 by imaging the correction mark 35 which is in a state of overlapping the glass jig 36 by means of the substrate imaging camera 19; and a correcting unit (computation processing unit 40) that corrects positional deviation of the component E on the basis of the difference between the first position M1 and the second position M2.

Description

表面実装機Surface mounting machine
 本明細書で開示する技術は表面実装機に関する。 技術 The technology disclosed in this specification relates to a surface mounter.
 従来、基板を撮像する基板撮像カメラを用いて部品の位置ずれを補正する表面実装機が知られている(例えば、特許文献1参照)。
 具体的には、特許文献1に記載の部品実装装置(表面実装機に相当)は、ガラスなどの部材で構成された治具基板を本体装置内に搬入して位置決めし、作業ヘッドの基板認識用カメラ(基板撮像カメラに相当)により、先ず2つの治具基板マークを測定して治具基板の位置を確認し、次に予め判明している治具基板の基準マークの位置Aに移動する。
2. Description of the Related Art Conventionally, there has been known a surface mounter that corrects a positional shift of a component using a board imaging camera that captures an image of a board (for example, see Patent Document 1).
Specifically, a component mounting apparatus (corresponding to a surface mounting machine) described in Patent Document 1 carries a jig substrate made of a member such as glass into a main body device, positions the jig substrate, and recognizes a board of a work head. First, two jig board marks are measured by a camera for camera (corresponding to a board imaging camera) to confirm the position of the jig board, and then the jig board is moved to a known reference mark position A of the jig board. .
 基準マークの位置Aに直行できれば作業ヘッドの軸には移動誤差はないので、当該部品実装装置は自軸の移動座標を補正しない。これに対し、移動位置が基準マークの無い位置A´であったときは、当該部品実装装置は位置A-A´間の位置ずれ量のX座標値及びY座標値を記憶し、記憶された位置ずれ量のX座標値及びY座標値により部品の搭載位置を補正する。 If there is no movement error in the axis of the work head if it can go directly to the position A of the reference mark, the component mounting apparatus does not correct the movement coordinates of its own axis. On the other hand, when the moving position is the position A ′ without the reference mark, the component mounting apparatus stores the X coordinate value and the Y coordinate value of the positional deviation amount between the positions AA ′ and stores the X and Y coordinate values. The component mounting position is corrected based on the X coordinate value and the Y coordinate value of the displacement amount.
特開2006-59954号公報JP 2006-59954 A
 上述した特許文献1に記載の部品実装装置は作業ヘッドの移動誤差に起因する部品の位置ずれを補正するものであり、作業ヘッドの移動誤差以外に起因する部品の位置ずれについては検討されていなかった。 The component mounting apparatus described in Patent Document 1 described above corrects a component displacement caused by a movement error of the work head, and does not consider a component displacement caused by other than the work head movement error. Was.
 本明細書では、基板撮像カメラの光軸の傾きに起因する部品の位置ずれを補正する技術を開示する。 This specification discloses a technique for correcting a component displacement caused by a tilt of an optical axis of a board imaging camera.
 本明細書で開示する表面実装機は、基板に部品を実装する表面実装機であって、前記部品を保持して前記基板に実装する実装ヘッドと、前記基板を撮像する基板撮像カメラと、基台に付されている補正用マークと、前記基板撮像カメラからの光を透過させる光透過部材と、前記光透過部材を前記補正用マークに重なる位置と重ならない位置との間で移動させる移動部とを有する補正用ユニットと、前記光透過部材と重なっていない状態の前記補正用マークを前記基板撮像カメラで撮像して前記補正用マークの位置を第1位置として検出するとともに、前記光透過部材が重なっている状態の前記補正用マークを前記基板撮像カメラで撮像して前記補正用マークの位置を第2位置として検出する位置検出部と、前記第1位置と前記第2位置との差に基づいて前記部品の位置ずれを補正する補正部と、を備える。 A surface mounter disclosed in the present specification is a surface mounter that mounts components on a substrate, the mounting head holding the components and mounting the components on the substrate, a substrate imaging camera that images the substrate, and a base mounting camera. A correction mark attached to a base, a light transmitting member that transmits light from the substrate imaging camera, and a moving unit that moves the light transmitting member between a position overlapping the correction mark and a position not overlapping the correction mark. A correction unit having the following: and the correction mark, which is not overlapped with the light transmitting member, is captured by the substrate imaging camera, and the position of the correction mark is detected as a first position, and the light transmitting member is A position detection unit that captures the correction mark in a state in which the correction mark overlaps with the substrate imaging camera and detects the position of the correction mark as a second position; And a correcting unit for correcting the positional deviation of the component based on.
 表面実装機が動作すると発熱による歪みによって基板撮像カメラの光軸が傾くことがある。基板撮像カメラの光軸が傾くと、表面実装機が基板撮像カメラで基板を撮像して基板の位置を認識するとき、表面実装機が認識した基板の位置と実際の基板の位置とにずれが生じ、光軸の傾きに起因する部品の位置ずれが生じる。
 基板撮像カメラの光軸が傾いている場合、光透過部材が重なっていない状態の補正用マークを基板撮像カメラで撮像して補正用マークの位置を第1位置として検出するとともに、光透過部材が重なっている状態の補正用マークを基板撮像カメラで撮像して補正用マークの位置を第2位置として検出すると、第1位置と第2位置とに光軸の傾きに応じた差が生じる。部品の位置ずれ量は基板撮像カメラの光軸の傾きに比例するので、第1位置と第2位置との差に基づいて部品の位置ずれを補正することにより、基板撮像カメラの光軸の傾きに起因する部品の位置ずれを補正できる。
When the surface mounter operates, the optical axis of the board imaging camera may be tilted due to distortion due to heat generation. When the optical axis of the board imaging camera is tilted, when the surface mounter images the board with the board imaging camera and recognizes the position of the board, there is a deviation between the board position recognized by the surface mounter and the actual board position. This causes a component displacement due to the inclination of the optical axis.
When the optical axis of the board imaging camera is inclined, the correction mark in a state where the light transmitting members are not overlapped is imaged by the board imaging camera, the position of the correction mark is detected as the first position, and the light transmitting member is When the overlapping correction mark is imaged by the substrate imaging camera and the position of the correction mark is detected as the second position, a difference occurs between the first position and the second position according to the inclination of the optical axis. Since the displacement of the component is proportional to the inclination of the optical axis of the board imaging camera, the displacement of the component is corrected based on the difference between the first position and the second position, whereby the inclination of the optical axis of the board imaging camera is corrected. Can be corrected.
 前記基板に付されている認識マークを前記基板撮像カメラで撮像して前記基板の位置を認識する認識部を備えてもよい。 (4) A recognition unit may be provided for recognizing a position of the substrate by capturing an image of the recognition mark attached to the substrate with the substrate imaging camera.
 基板撮像カメラで認識マークを撮像して基板の位置を認識する場合、基板撮像カメラの光軸が傾いていると、認識部が認識する基板の位置と実際の基板の位置とにずれが生じ、部品の位置ずれが生じる。上記の表面実装機によると、基板撮像カメラで認識マークを撮像して基板の位置を認識する場合に、第1位置と第2位置との差に基づいて部品の位置ずれを補正するので、部品の位置ずれを補正できる。 When recognizing the position of a board by imaging the recognition mark with the board imaging camera, if the optical axis of the board imaging camera is inclined, a deviation occurs between the board position recognized by the recognition unit and the actual board position, The parts are displaced. According to the surface mounter described above, when the position of the substrate is recognized by capturing the recognition mark with the substrate imaging camera, the component displacement is corrected based on the difference between the first position and the second position. Can be corrected.
 前記補正用ユニットは当該表面実装機に取り付けられていてもよい。 The correction unit may be attached to the surface mounter.
 例えば、基板を搬送する基板搬送装置によって補正用ユニットを表面実装機内に搬入し、搬入した補正用ユニットを用いて第1位置と第2位置とを検出することも考えられる。しかしながら、その場合は基板の生産を停止しなければならず、生産性が低下する。
 上記の表面実装機によると、補正用ユニットが当該表面実装機に取り付けられているので、表面実装機による基板の生産中に基板の生産を停止することなく第1位置と第2位置とを検出できる。これにより、生産性の低下を抑制しつつ部品の位置ずれを補正できる。
For example, it is conceivable that the correction unit is loaded into the surface mounter by the substrate transfer device that transfers the substrate, and the first position and the second position are detected using the loaded correction unit. However, in that case, the production of the substrate must be stopped, and the productivity is reduced.
According to the above surface mounter, since the correction unit is attached to the surface mounter, the first position and the second position can be detected without stopping the production of the substrate during the production of the substrate by the surface mounter. it can. As a result, it is possible to correct the positional deviation of the parts while suppressing a decrease in productivity.
 前記補正部は、前記第1位置と前記第2位置との差に基づいて前記部品の実装座標を補正することによって前記部品の位置ずれを補正してもよい。 The correction unit may correct a position shift of the component by correcting a mounting coordinate of the component based on a difference between the first position and the second position.
 上記の表面実装機によると、第1位置と第2位置との差に基づいて部品の実装座標を補正することにより、部品の位置ずれを補正できる。 According to the above surface mounter, the component displacement can be corrected by correcting the component mounting coordinates based on the difference between the first position and the second position.
 前記第1位置と前記第2位置との差を位置ずれ量に換算する換算用データを記憶している記憶部を備え、前記補正部は、前記換算用データを用いて前記第1位置と前記第2位置との差を前記位置ずれ量に換算し、換算した前記位置ずれ量に基づいて前記部品の位置ずれを補正してもよい。 A storage unit that stores conversion data for converting a difference between the first position and the second position into a positional deviation amount, wherein the correction unit uses the conversion data to store the first position and the The difference from the second position may be converted into the displacement amount, and the displacement of the component may be corrected based on the converted displacement amount.
 上記の表面実装機によると、換算用データを用いることにより、二つの位置の差を位置ずれ量に換算できる。 According to the surface mounter described above, the difference between the two positions can be converted into a positional deviation amount by using the conversion data.
 前記位置検出部は、当該表面実装機による前記基板の生産中に前記第1位置と前記第2位置とを所定のタイミングで繰り返し検出してもよい。 The position detection unit may repeatedly detect the first position and the second position at a predetermined timing during the production of the substrate by the surface mounter.
 表面実装機が基板を生産しているときの表面実装機の温度は必ずしも一定ではないので、基板撮像カメラの光軸の傾きも表面実装機の温度の変化に応じて変動する。このため、第1位置と第2位置とを検出しても、時間が経過するとそれら二つの位置の差が変動し、部品の位置ずれが大きくなる可能性がある。
 上記の表面実装機によると、第1位置と第2位置との検出を基板の生産中に所定のタイミングで繰り返し実行するので、基板の生産中に基板撮像カメラの光軸の傾きが変動しても部品の位置ずれを補正できる。
Since the temperature of the surface mounter when the surface mounter is producing a substrate is not always constant, the inclination of the optical axis of the substrate imaging camera also changes according to the change in the temperature of the surface mounter. For this reason, even if the first position and the second position are detected, the difference between the two positions fluctuates as time elapses, and there is a possibility that the positional deviation of the components increases.
According to the surface mounter described above, the detection of the first position and the second position is repeatedly performed at a predetermined timing during the production of the board, so that the inclination of the optical axis of the board imaging camera fluctuates during the production of the board. Can also correct the misalignment of the parts.
 本明細書によって開示される発明は、装置、方法、これらの装置または方法の機能を実現するためのコンピュータプログラム、そのコンピュータプログラムを記録した記録媒体等の種々の態様で実現できる。 The invention disclosed in this specification can be realized in various forms such as an apparatus, a method, a computer program for realizing the functions of the apparatus or the method, and a recording medium on which the computer program is recorded.
実施形態1に係る表面実装機を上側から見た模式図FIG. 2 is a schematic view of the surface mounter according to the first embodiment as viewed from above. ヘッドユニットを前側から見た正面図Front view of the head unit viewed from the front ヘッドユニットを右側から見た側面図Side view of the head unit viewed from the right 実装ヘッド、基板撮像カメラ及び補正用ユニットを右側から見た模式図Schematic view of the mounting head, substrate imaging camera, and correction unit viewed from the right 表面実装機の電気的構成を示すブロック図Block diagram showing the electrical configuration of the surface mounter 基板の模式図Schematic diagram of substrate 認識マークを用いた部品の実装座標及び実装角度の補正を説明するための模式図Schematic diagram for explaining correction of component mounting coordinates and component angles using recognition marks 基板撮像カメラに対する実装ヘッドの位置を示す模式図Schematic diagram showing the position of the mounting head with respect to the substrate imaging camera 表面実装機の動作を示す模式図(動作1及び動作2)Schematic diagram showing the operation of the surface mounter (operation 1 and operation 2) 表面実装機の動作を示す模式図(動作3及び動作4)Schematic diagram showing the operation of the surface mounter (operation 3 and operation 4) 表面実装機の動作を示す模式図(動作5)Schematic diagram showing the operation of the surface mounter (operation 5) 基板撮像カメラの光軸の傾きを示す模式図Schematic diagram showing the inclination of the optical axis of the substrate imaging camera 基板撮像カメラの光軸が傾いていない場合の部品の実装位置を示す模式図Schematic diagram showing mounting positions of components when the optical axis of the board imaging camera is not tilted 基板撮像カメラの光軸が傾いている場合の部品の実装位置を示す模式図Schematic diagram showing the mounting position of components when the optical axis of the board imaging camera is inclined 補正前の実装座標及び補正後の実装座標を示す表Table showing mounting coordinates before correction and mounting coordinates after correction 補正用ユニットを用いた位置ずれ量を説明するための模式図Schematic diagram for explaining the amount of displacement using the correction unit 補正用マークの第1位置及び第2位置を示す模式図Schematic diagram showing first and second positions of a correction mark. 二つの位置の差と位置ずれ量との対応関係を示すグラフGraph showing the correspondence between the difference between two positions and the amount of displacement 位置ずれ量検出処理のフローチャートFlow chart of position shift amount detection processing
 <実施形態1>
 実施形態1を図1ないし図18によって説明する。以降の説明では図1に示す左右方向をX方向、前後方向をY方向、図2に示す上下方向をZ方向という。また、以降の説明では図1に示す右側を上流側、左側を下流側という。また、以降の説明では同一の構成部材には一部を除いて図面の符号を省略している場合がある。
<First embodiment>
Embodiment 1 will be described with reference to FIGS. In the following description, the left-right direction shown in FIG. 1 is referred to as an X direction, the front-rear direction is referred to as a Y direction, and the up-down direction shown in FIG. In the following description, the right side shown in FIG. 1 is referred to as an upstream side, and the left side is referred to as a downstream side. In the following description, the same constituent members may be omitted from the drawings except for some parts.
 (1)表面実装機の全体構成
 図1を参照して、表面実装機1の全体構成について説明する。表面実装機1はプリント基板P(以下、単に基板Pという)に電子部品などの部品Eを実装するものである。図1に示すように、基板Pには認識マークF(基準マークFa1,Fa2や部品位置決めマークFb1,Fb2)が付されている。認識マークFについての説明は後述する。
(1) Overall Configuration of Surface Mounter The overall configuration of the surface mounter 1 will be described with reference to FIG. The surface mounter 1 mounts a component E such as an electronic component on a printed board P (hereinafter simply referred to as a board P). As shown in FIG. 1, a recognition mark F (reference marks Fa1 and Fa2 and component positioning marks Fb1 and Fb2) is provided on the board P. The description of the recognition mark F will be described later.
 表面実装機1は基台14、基板Pを搬送する基板搬送装置15、基板Pに搭載する部品Eを供給する4つのテープ部品供給装置11、及び、テープ部品供給装置11によって供給された部品Eを基板Pに実装する部品実装装置12を備えている。
 基台14は平面視長方形状をなすとともに上面が平坦とされている。図1において二点鎖線で示す矩形枠Aは基板Pに部品Eを実装するときの作業位置(以下、作業位置Aという)を示している。
The surface mounter 1 includes a base 14, a substrate transport device 15 for transporting the substrate P, four tape component supply devices 11 for supplying components E mounted on the substrate P, and components E supplied by the tape component supply device 11. Is mounted on the board P.
The base 14 has a rectangular shape in plan view and has a flat upper surface. In FIG. 1, a rectangular frame A indicated by a two-dot chain line indicates a work position (hereinafter, referred to as a work position A) when the component E is mounted on the board P.
 (1-1)基板搬送装置
 基板搬送装置15は基板PをX方向の上流側から作業位置Aに搬入し、作業位置Aで部品Eが実装された基板Pを下流側に搬出するものである。基板搬送装置15はX方向に循環駆動する一対のコンベアベルト15A及び15B、それらのコンベアベルト15A及び15Bを駆動するコンベア駆動モータ46(図5参照)などを備えている。後側のコンベアベルト15Aは前後方向に移動可能であり、基板Pの幅に応じて2つのコンベアベルト15Aと15Bとの間隔を調整可能である。
(1-1) Board Transfer Apparatus The board transfer apparatus 15 carries the board P from the upstream side in the X direction to the work position A, and unloads the board P on which the component E is mounted at the work position A to the downstream side. . The substrate transfer device 15 includes a pair of conveyor belts 15A and 15B that are driven to circulate in the X direction, and a conveyor drive motor 46 (see FIG. 5) that drives the conveyor belts 15A and 15B. The rear conveyor belt 15A is movable in the front-rear direction, and the distance between the two conveyor belts 15A and 15B can be adjusted according to the width of the substrate P.
 (1-2)テープ部品供給装置
 テープ部品供給装置11は部品実装装置12のY方向の両側においてX方向に並んで2箇所ずつ、計4箇所に配されている。これらのテープ部品供給装置11には複数のフィーダ13がX方向に横並び状に整列して取り付けられている。各フィーダ13は所謂テープフィーダであり、複数の部品Eが収容された部品テープが巻回されたリール(不図示)、及び、リールから部品テープを引き出す電動式のテープ送出装置等を備えており、部品実装装置12側の端部に設けられた部品供給位置から部品Eを一つずつ供給する。
(1-2) Tape Component Supply Devices The tape component supply devices 11 are arranged at two locations in the X direction on both sides of the component mounting device 12 in the X direction, for a total of four locations. A plurality of feeders 13 are attached to these tape component supply devices 11 so as to be arranged side by side in the X direction. Each of the feeders 13 is a so-called tape feeder, and includes a reel (not shown) around which a component tape containing a plurality of components E is wound, an electric tape feeding device that pulls out the component tape from the reel, and the like. The components E are supplied one by one from a component supply position provided at the end of the component mounting apparatus 12.
 なお、ここでは部品供給装置としてテープ部品供給装置11を例に説明するが、部品供給装置は部品Eが載置されているトレイを供給する所謂トレイフィーダであってもよいし、半導体ウェハを供給するものであってもよい。 Here, the tape component supply device 11 will be described as an example of the component supply device, but the component supply device may be a so-called tray feeder that supplies a tray on which the component E is placed, or may supply a semiconductor wafer. May be used.
 (1-3)部品実装装置
 部品実装装置12は図示しないバックアップ機構、ヘッドユニット16、ヘッド搬送部17、2つの部品撮像カメラ18、2つの基板撮像カメラ19、補正用ユニット20、図5に示す制御部38、操作部39などを備えている。
(1-3) Component Mounting Device The component mounting device 12 is shown in FIG. 5 with a backup mechanism, a head unit 16, a head transport unit 17, two component imaging cameras 18, two board imaging cameras 19, a correction unit 20, not shown. A control unit 38, an operation unit 39, and the like are provided.
 図示しないバックアップ機構は作業位置Aの下方に配されている。バックアップ機構は基板搬送装置15によって作業位置Aに搬入された基板Pを作業位置Aに固定するとともに基板Pを下から支えるものである。
 ヘッドユニット16はテープ部品供給装置11によって供給される部品Eを吸着(保持の一例)して基板Pに搭載するものである。ヘッドユニット16の構成については後述する。
A backup mechanism (not shown) is arranged below the work position A. The backup mechanism fixes the substrate P carried into the work position A by the substrate transfer device 15 at the work position A and supports the substrate P from below.
The head unit 16 is configured to adsorb the component E supplied by the tape component supply device 11 (an example of holding) and mount the component E on the substrate P. The configuration of the head unit 16 will be described later.
 ヘッド搬送部17はヘッドユニット16を所定の可動範囲内でX方向及びY方向に搬送するものである。ヘッド搬送部17はヘッドユニット16をX方向に往復移動可能に支持しているビーム21、ビーム21をY方向に往復移動可能に支持している一対のY軸ガイドレール22、ヘッドユニット16をX方向に往復移動させるX軸サーボモータ23、ビーム21をY方向に往復移動させるY軸サーボモータ24などを備えている。 (4) The head transport unit 17 transports the head unit 16 in the X direction and the Y direction within a predetermined movable range. The head transport section 17 includes a beam 21 that supports the head unit 16 so as to be able to reciprocate in the X direction, a pair of Y-axis guide rails 22 that support the beam 21 so that the beam 21 can be reciprocated in the Y direction, and An X-axis servo motor 23 for reciprocating in the direction, a Y-axis servo motor 24 for reciprocating the beam 21 in the Y direction, and the like are provided.
 2つの部品撮像カメラ18はそれぞれX方向に並んだ2つのテープ部品供給装置11の間に設けられている。部品撮像カメラ18はヘッドユニット16が備える実装ヘッド25に吸着されている部品Eを下から撮像して実装ヘッド25に対する部品Eの相対位置や姿勢などを認識するためのものである。 The two component imaging cameras 18 are provided between the two tape component supply devices 11 arranged in the X direction. The component imaging camera 18 is for capturing an image of the component E adsorbed to the mounting head 25 provided in the head unit 16 from below, and recognizing the relative position and orientation of the component E with respect to the mounting head 25.
 2つの基板撮像カメラ19はヘッドユニット16に設けられている。基板撮像カメラ19は作業位置Aに搬入された基板Pに付されている認識マークFを撮像して基板Pの位置や傾きを認識するためのものである。基板撮像カメラ19の構成については後述する。
 ここで、表面実装機1は基板撮像カメラ19を2つ備えているが、理解を容易にするため、以降の説明では基板撮像カメラ19は左側の1つだけであると仮定して説明する。
Two board imaging cameras 19 are provided in the head unit 16. The board imaging camera 19 is for recognizing the position and inclination of the board P by taking an image of the recognition mark F attached to the board P carried into the working position A. The configuration of the board imaging camera 19 will be described later.
Here, the surface mounter 1 includes two board imaging cameras 19, but for the sake of easy understanding, the following description will be made assuming that there is only one board imaging camera 19 on the left side.
 補正用ユニット20は基板搬送装置15の後側に取り付けられている。補正用ユニット20は基板撮像カメラ19の光軸19A(図12参照)の傾きに起因する部品Eの位置ずれを補正するためのものである。補正用ユニット20の構成については後述する。 The correction unit 20 is mounted on the rear side of the substrate transfer device 15. The correction unit 20 is for correcting a displacement of the component E due to the inclination of the optical axis 19A (see FIG. 12) of the board imaging camera 19. The configuration of the correction unit 20 will be described later.
 (1-3-1)ヘッドユニット
 図2を参照して、ヘッドユニット16について説明する。実施形態1に係るヘッドユニット16は所謂インライン型であり、複数の実装ヘッド25がX方向に並んで設けられている。また、ヘッドユニット16にはこれらの実装ヘッド25を個別に昇降させるZ軸サーボモータ26やこれらの実装ヘッド25を軸周りに回転させるR軸サーボモータ27などが設けられている。
(1-3-1) Head Unit The head unit 16 will be described with reference to FIG. The head unit 16 according to the first embodiment is a so-called in-line type, and a plurality of mounting heads 25 are provided side by side in the X direction. Further, the head unit 16 is provided with a Z-axis servomotor 26 for individually moving the mounting heads 25 up and down, an R-axis servomotor 27 for rotating the mounting heads 25 around their axes, and the like.
 各実装ヘッド25は部品Eを吸着及び解放するものであり、ノズルシャフト28と、ノズルシャフト28の下端部に着脱可能に取り付けられている吸着ノズル29とを有している。吸着ノズル29にはノズルシャフト28を介して図示しない空気供給装置から負圧及び正圧が供給される。吸着ノズル29は負圧が供給されることによって部品Eを吸着し、正圧が供給されることによってその部品Eを解放する。 Each mounting head 25 sucks and releases the component E, and has a nozzle shaft 28 and a suction nozzle 29 which is detachably attached to a lower end of the nozzle shaft 28. Negative pressure and positive pressure are supplied to the suction nozzle 29 from a not-shown air supply device via a nozzle shaft 28. The suction nozzle 29 sucks the component E when the negative pressure is supplied, and releases the component E when the positive pressure is supplied.
 なお、ここではインライン型のヘッドユニット16を例に説明するが、ヘッドユニット16は例えば複数の実装ヘッド25が円周上に配列された所謂ロータリーヘッドであってもよい。 Here, the in-line type head unit 16 will be described as an example, but the head unit 16 may be, for example, a so-called rotary head in which a plurality of mounting heads 25 are arranged on a circumference.
 (1-3-2)基板撮像カメラ
 図3及び図4を参照して、基板撮像カメラ19について説明する。図3に示すように、ヘッドユニット16の下面には平板状の台座30が固定されており、基板撮像カメラ19は台座30の上面に固定されている。
(1-3-2) Substrate Imaging Camera The substrate imaging camera 19 will be described with reference to FIGS. As shown in FIG. 3, a flat pedestal 30 is fixed to the lower surface of the head unit 16, and the board imaging camera 19 is fixed to the upper surface of the pedestal 30.
 図4に模式的に示すように、基板撮像カメラ19はエリアセンサ31及び光学系32を備えている。エリアセンサ31は撮像素子が行列状に配されているものであり、撮像面が前側を向く姿勢で配されている。光学系32はミラー33、被写体を照射する図示しない光源、図示しないレンズなどで構成されている。ミラー33はエリアセンサ31の前側において前側から後側に向かって上に45度傾いた姿勢で配されており、基板撮像カメラ19の下方に位置する被写体(図4では補正用ユニット20)の反射光像をエリアセンサ31に入射させる。基板撮像カメラ19の光軸19Aのうちミラー33から補正用ユニット20に至る部分は補正用ユニット20の基台34に対して垂直になるように設計されている。 (4) As schematically shown in FIG. 4, the board imaging camera 19 includes an area sensor 31 and an optical system 32. The area sensor 31 includes image sensors arranged in rows and columns, and the image sensor is disposed so that the image pickup surface faces forward. The optical system 32 includes a mirror 33, a light source (not shown) for irradiating a subject, a lens (not shown), and the like. The mirror 33 is arranged at a position inclined upward by 45 degrees from the front side to the rear side on the front side of the area sensor 31, and reflects a subject (the correction unit 20 in FIG. 4) located below the board imaging camera 19. The light image is made incident on the area sensor 31. The portion of the optical axis 19A of the board imaging camera 19 from the mirror 33 to the correction unit 20 is designed to be perpendicular to the base 34 of the correction unit 20.
 (1-3-3)補正用ユニット
 図1及び図4を参照して、補正用ユニット20について説明する。図1に示すように、補正用ユニット20は基台34、基台34の上面に付されている補正用マーク35、基台34の上面に配されているガラス治具36(光透過部材の一例)、及び、ガラス治具36をX方向に往復移動させる移動部37(図4参照)を備えている。
(1-3-3) Correction Unit The correction unit 20 will be described with reference to FIGS. As shown in FIG. 1, the correction unit 20 includes a base 34, a correction mark 35 provided on the upper surface of the base 34, and a glass jig 36 (a light transmitting member) provided on the upper surface of the base 34. An example) and a moving unit 37 (see FIG. 4) for reciprocating the glass jig 36 in the X direction.
 補正用マーク35は例えば円形のマークである。
 ガラス治具36は透明な立方体状のガラスである。本実施形態に係るガラス治具36の厚みは10mmであり、屈折率は1.52である。
 移動部37は基台34に固定されている。移動部37は例えばエアシリンダであり、上側から見てガラス治具36を補正用マーク35に重なる位置と重ならない位置との間で移動させる。
The correction mark 35 is, for example, a circular mark.
The glass jig 36 is a transparent cubic glass. The thickness of the glass jig 36 according to the present embodiment is 10 mm, and the refractive index is 1.52.
The moving section 37 is fixed to the base 34. The moving unit 37 is, for example, an air cylinder, and moves the glass jig 36 between a position overlapping the correction mark 35 and a position not overlapping when viewed from above.
 なお、補正用マーク35の形状、ガラス治具36の形状、厚み、屈折率などは上述した例に限定されるものではなく、適宜に決定できる。また、移動部37はエアシリンダに限定されるものではなく、例えば電気モータであってもよい。また、移動部37が固定される位置は基台34に限られない。例えば、移動部37は表面実装機1の図示しないフレームに固定されてもよい。 The shape of the correction mark 35, the shape, thickness, refractive index, and the like of the glass jig 36 are not limited to the examples described above, and can be determined as appropriate. Further, the moving unit 37 is not limited to an air cylinder, and may be, for example, an electric motor. Further, the position where the moving section 37 is fixed is not limited to the base 34. For example, the moving unit 37 may be fixed to a frame (not shown) of the surface mounter 1.
 (2)部品実装装置の電気的構成
 図5に示すように、部品実装装置12は制御部38及び操作部39を備えている。制御部38は演算処理部40(位置検出部、補正部及び認識部の一例)、モータ制御部41、記憶部42、画像処理部43、外部入出力部44、フィーダ通信部45などを備えている。
(2) Electrical Configuration of Component Mounting Apparatus As shown in FIG. 5, the component mounting apparatus 12 includes a control unit 38 and an operation unit 39. The control unit 38 includes an arithmetic processing unit 40 (an example of a position detection unit, a correction unit, and a recognition unit), a motor control unit 41, a storage unit 42, an image processing unit 43, an external input / output unit 44, a feeder communication unit 45, and the like. I have.
 演算処理部40はCPU、ROM、RAMなどを備えており、ROMに記憶されている制御プログラムを実行することによって表面実装機1の各部を制御する。なお、演算処理部40はCPUに替えて、あるいはCPUに加えてASIC(Application Specific Integrated Circuit)やFPGA(Field Programmable Gate Array)などを備えていてもよい。 The arithmetic processing unit 40 includes a CPU, a ROM, a RAM, and the like, and controls each unit of the surface mounter 1 by executing a control program stored in the ROM. The arithmetic processing unit 40 may include an ASIC (Application Specific Integrated Circuit) or an FPGA (Field Programmable Gate Array) in place of or in addition to the CPU.
 モータ制御部41は演算処理部40の制御の下でX軸サーボモータ23、Y軸サーボモータ24、Z軸サーボモータ26、R軸サーボモータ27、コンベア駆動モータ46などの各モータを回転させる。
 記憶部42には各種のデータが記憶されている。各種のデータには生産が予定されている基板Pの品種や生産枚数に関する情報、部品Eの実装座標63(図14参照)や部品Eの実装角度に関する情報、部品Eの実装順序に関する情報、基板Pに付されている認識マークFのXY座標、基板撮像カメラ19に対する実装ヘッド25の相対位置情報などが含まれる。認識マークFのXY座標、及び、基板撮像カメラ19に対する実装ヘッド25の相対位置情報についての説明は後述する。
The motor control unit 41 rotates each motor such as the X-axis servomotor 23, the Y-axis servomotor 24, the Z-axis servomotor 26, the R-axis servomotor 27, and the conveyor drive motor 46 under the control of the arithmetic processing unit 40.
The storage unit 42 stores various data. Various types of data include information on the type and the number of boards P to be produced, information on the mounting coordinates 63 of the component E (see FIG. 14), information on the mounting angle of the component E, information on the mounting order of the component E, The XY coordinates of the recognition mark F attached to P, relative position information of the mounting head 25 with respect to the board imaging camera 19, and the like are included. The XY coordinates of the recognition mark F and the relative position information of the mounting head 25 with respect to the board imaging camera 19 will be described later.
 画像処理部43は部品撮像カメラ18や基板撮像カメラ19から出力される画像信号が取り込まれるように構成されており、出力された画像信号に基づいてデジタル画像を生成する。
 外部入出力部44はいわゆるインターフェースであり、部品実装装置12の本体に設けられている各種センサ類47から出力される検出信号が取り込まれるように構成されている。また、外部入出力部44は演算処理部40から出力される制御信号に基づいて各種アクチュエータ類48(補正用ユニット20の移動部37を含む)に対する動作制御を行うように構成されている。
The image processing unit 43 is configured to capture an image signal output from the component imaging camera 18 or the board imaging camera 19, and generates a digital image based on the output image signal.
The external input / output unit 44 is a so-called interface, and is configured to receive detection signals output from various sensors 47 provided on the main body of the component mounting apparatus 12. The external input / output unit 44 is configured to perform operation control on various actuators 48 (including the moving unit 37 of the correction unit 20) based on a control signal output from the arithmetic processing unit 40.
 フィーダ通信部45はフィーダ13に接続されており、フィーダ13を統括して制御する。
 操作部39は液晶ディスプレイなどの表示装置や、タッチパネル、キーボード、マウスなどの入力装置を備えている。作業者は操作部39を操作して各種の設定などを行うことができる。
The feeder communication unit 45 is connected to the feeder 13 and controls the feeder 13 in an integrated manner.
The operation unit 39 includes a display device such as a liquid crystal display, and an input device such as a touch panel, a keyboard, and a mouse. The operator can operate the operation unit 39 to perform various settings and the like.
 (3)認識マーク
 図6を参照して、基板Pに付されている認識マークF(所謂フィデューシャルマーク)について説明する。基板Pには認識マークFとして基準マークFa(Fa1及びFa2)及び部品位置決めマークFb(Fb1及びFb2)が付されている。基準マークFaは円形のマークであり、本実施形態では基板Pの右上及び左下に付されている。部品位置決めマークFbも円形のマークであり、高い実装精度が求められる部品Eの実装位置50の近傍(本実施形態では右上及び左下)に付されている。
(3) Recognition Mark The recognition mark F (so-called fiducial mark) attached to the substrate P will be described with reference to FIG. A reference mark Fa (Fa1 and Fa2) and a component positioning mark Fb (Fb1 and Fb2) are provided as recognition marks F on the substrate P. The reference mark Fa is a circular mark, and is attached to the upper right and lower left of the substrate P in this embodiment. The component positioning mark Fb is also a circular mark, and is attached near the mounting position 50 of the component E requiring high mounting accuracy (upper right and lower left in the present embodiment).
 基板Pには4つの角のうちいずれか一つの角(本実施形態では右上の角S1)を原点とするXY座標系(以下、「基板PのXY座標系」という)が設定されている。記憶部42には認識マークFのXY座標や部品Eの実装座標が基板PのXY座標系で記憶されている。 X An XY coordinate system (hereinafter, referred to as “XY coordinate system of substrate P”) having the origin at one of the four corners (upper right corner S1 in the present embodiment) is set on substrate P. The storage section 42 stores the XY coordinates of the recognition mark F and the mounting coordinates of the component E in the XY coordinate system of the board P.
 図7に示すように、基板Pの搬送経路Gには前述した作業位置Aが設定されている。表面実装機1にはヘッドユニット16の位置を定義するXY座標系(以下、「ヘッドユニット16のXY座標系」という)が設定されており、記憶部42には作業位置Aの4つの角のうちいずれか一つの角(本実施形態では右上の角)が基板原点S2としてヘッドユニット16のXY座標系で記憶されている。 作業 As shown in FIG. 7, the work position A described above is set in the transfer path G of the substrate P. An XY coordinate system (hereinafter, referred to as an “XY coordinate system of the head unit 16”) that defines the position of the head unit 16 is set in the surface mounter 1, and the four corners of the working position A are stored in the storage unit 42. One of the corners (upper right corner in the present embodiment) is stored in the XY coordinate system of the head unit 16 as the substrate origin S2.
 作業位置Aに固定された基板Pに位置誤差や角度誤差があると基板Pの右上の角S1の位置が基板原点S2と一致しなくなる。このため、作業位置Aの基板原点S2を基板PのXY座標系の原点S1と見做して部品Eを実装すると部品Eの位置ずれや角度ずれが生じる。このため、制御部38は認識マークFに基づいて基板Pの位置誤差及び角度誤差を検出し、検出した位置誤差及び角度誤差に基づいて部品Eの実装座標及び実装角度を補正する。補正の手順は基準マークFaと部品位置決めマークFbとで実質的に同じであるのでここでは基準マークFaを例に説明する。 (4) If there is a position error or an angle error in the substrate P fixed at the work position A, the position of the upper right corner S1 of the substrate P does not match the substrate origin S2. For this reason, when the component E is mounted with the substrate origin S2 of the work position A regarded as the origin S1 of the XY coordinate system of the substrate P, a positional deviation or an angular deviation of the component E occurs. For this reason, the control unit 38 detects a position error and an angle error of the substrate P based on the recognition mark F, and corrects the mounting coordinates and the mounting angle of the component E based on the detected position error and angle error. Since the correction procedure is substantially the same for the reference mark Fa and the component positioning mark Fb, the description will be made using the reference mark Fa as an example.
 先ず、制御部38は基板撮像カメラ19によって各基準マークFaを撮像し、基板原点S2を原点とするXY座標系において各基準マークFaの中心点のXY座標(Xf1´、Yf1´)及び(Xf2´,Yf2´)を認識する。
 そして、制御部38は、例えば右上の基準マークFa1を基準とする場合は、記憶部42に記憶されている基準マークFa1のXY座標(Xf1,Yf1)と、基板撮像カメラ19によって認識した基準マークFa1のXY座標(Xf1´、Xy1´)との差(ΔX,ΔY)を基板Pの位置誤差とする。そして、制御部38は位置誤差(ΔX,ΔY)に応じて各部品の実装座標を仮補正する。
First, the control unit 38 captures an image of each reference mark Fa by the board imaging camera 19, and the XY coordinates (Xf1 ′, Yf1 ′) and (Xf2) of the center point of each reference mark Fa in the XY coordinate system whose origin is the board origin S2. ', Yf2').
When the upper right reference mark Fa1 is used as a reference, for example, the control unit 38 determines the XY coordinates (Xf1, Yf1) of the reference mark Fa1 stored in the storage unit 42 and the reference mark recognized by the board imaging camera 19. The difference (ΔX, ΔY) between the XY coordinates (Xf1 ′, Xy1 ′) of Fa1 is defined as the position error of the substrate P. Then, the control unit 38 temporarily corrects the mounting coordinates of each component according to the position error (ΔX, ΔY).
 そして、制御部38は、記憶部42に記憶されている基準マークFa1のXY座標(Xf1,Yf1)と記憶部42に記憶されている基準マークFa2のXY座標(Xf2,Yf2)とを通る直線の傾きと、基板撮像カメラ19によって認識した基準マークFa1のXY座標(Xf1´、Yf1´)と基板撮像カメラ19によって認識した基準マークFa2のXY座標(Xf2´、Yf2´)とを通る直線の傾きとの差から基板Pの角度誤差Δθを求める。
 そして、制御部38は、基準マークFa1を回転中心として各部品Eの仮補正した実装座標を角度誤差Δθの分だけ回転させることによって補正するとともに、各部品Eの実装角度をそれぞれ角度誤差Δθの分だけ補正する。
Then, the control unit 38 sets a straight line passing through the XY coordinates (Xf1, Yf1) of the reference mark Fa1 stored in the storage unit 42 and the XY coordinates (Xf2, Yf2) of the reference mark Fa2 stored in the storage unit 42. And a straight line passing through the XY coordinates (Xf1 ′, Yf1 ′) of the reference mark Fa1 recognized by the board imaging camera 19 and the XY coordinates (Xf2 ′, Yf2 ′) of the reference mark Fa2 recognized by the board imaging camera 19. The angle error Δθ of the substrate P is obtained from the difference from the inclination.
The control unit 38 corrects the provisionally corrected mounting coordinates of each component E by rotating the mounting coordinates of each component E around the reference mark Fa1 by the angle error Δθ, and also changes the mounting angle of each component E to the angle error Δθ. Correct by the minute.
 なお、ここでは基準マークFaが基板Pの右上と左下との2個所だけに付されている場合を例に説明したが、これは一例である。基準マークFaは例えば基板Pの四隅に付されていてもよい。部品位置決めマークFbについても同様である。また、上述した認識マークFを用いた部品Eの実装座標及び実装角度の補正は一例である。認識マークFを用いた部品Eの実装座標及び実装角度の補正は上述した例に限られるものではない。 Here, the case where the reference mark Fa is attached only to the upper right and the lower left of the substrate P has been described as an example, but this is an example. The reference marks Fa may be provided at four corners of the substrate P, for example. The same applies to the component positioning mark Fb. The correction of the mounting coordinates and the mounting angle of the component E using the recognition mark F described above is an example. The correction of the mounting coordinates and the mounting angle of the component E using the recognition mark F is not limited to the example described above.
 (4)基板撮像カメラに対する実装ヘッドの相対位置情報
 図8を参照して、基板撮像カメラ19に対する実装ヘッド25の相対位置情報について説明する。相対位置情報は基板撮像カメラ19を原点とする各実装ヘッド25のXY座標である。制御部38は基板撮像カメラ19で認識マークFを撮像して基板Pに対する基板撮像カメラ19の位置を認識し、基板撮像カメラ19に対する各実装ヘッド25の相対位置から基板Pに対する各実装ヘッド25の位置を判断する。
(4) Relative Position Information of the Mounting Head with respect to the Board Imaging Camera With reference to FIG. The relative position information is the XY coordinates of each mounting head 25 with the origin of the board imaging camera 19. The control unit 38 images the recognition mark F with the board imaging camera 19 to recognize the position of the board imaging camera 19 with respect to the board P, and determines the position of each mounting head 25 with respect to the board P from the relative position of each mounting head 25 with respect to the board P camera. Judge the position.
 なお、前述したように、実際には表面実装機1は基板撮像カメラ19を二つ備えている。このため、左側の4つの実装ヘッド25は左側の基板撮像カメラ19に対する相対位置が記憶され、右側の4つの実装ヘッド25は右側の基板撮像カメラ19に対する相対位置が記憶されてもよい。 As described above, the surface mounter 1 actually includes two board imaging cameras 19 as described above. Therefore, the four mounting heads 25 on the left side may store the relative positions with respect to the substrate imaging camera 19 on the left side, and the four mounting heads 25 on the right side may store the relative positions with respect to the substrate imaging camera 19 on the right side.
 (5)表面実装機の動作
 図9から図11を参照して、表面実装機1の動作について説明する。図9から図11に示す基板Pの上面に付されている+記号50は部品Eの実装位置を示している。
 表面実装機1は以下に説明する動作1から動作5を1シーケンスとし、このシーケンスを繰り返すことによって基板Pに部品Eを実装する。なお、前述したように基板Pには部品位置決めマークFbが付されている場合もあるが、ここでは基準マークFaを例に説明する。
(5) Operation of Surface Mounter The operation of the surface mounter 1 will be described with reference to FIGS. The + symbol 50 attached to the upper surface of the substrate P shown in FIGS. 9 to 11 indicates the mounting position of the component E.
The surface mounter 1 mounts the component E on the substrate P by repeating operation 1 to operation 5 described below as one sequence and repeating this sequence. As described above, the board P may be provided with the component positioning mark Fb, but the reference mark Fa will be described as an example here.
 (動作1)部品吸着
 図9に示すように、制御部38はヘッドユニット16をテープ部品供給装置11の上方に移動させ、各実装ヘッド25を下降させて部品Eを吸着させる。
(Operation 1) Component Suction As shown in FIG. 9, the control unit 38 moves the head unit 16 above the tape component supply device 11 and lowers each mounting head 25 to suck the component E.
 (動作2)部品認識
 図9に示すように、制御部38はヘッドユニット16をX方向に搬送して部品撮像カメラ18の上方を通過させる。部品撮像カメラ18はY方向に延びるラインセンサを備えており、上方を通過する実装ヘッド25に吸着されている部品Eを時系列で撮像して部品Eの画像データを生成する。制御部38は生成した画像データを解析して実装ヘッド25に対する部品Eの相対位置や実装ヘッド25の軸線周りの部品Eの回転角度などを認識する。
(Operation 2) Component Recognition As shown in FIG. 9, the control unit 38 conveys the head unit 16 in the X direction and passes the head unit 16 above the component imaging camera 18. The component imaging camera 18 includes a line sensor extending in the Y direction, and images the component E adsorbed by the mounting head 25 passing above in time series to generate image data of the component E. The control unit 38 analyzes the generated image data and recognizes the relative position of the component E with respect to the mounting head 25, the rotation angle of the component E around the axis of the mounting head 25, and the like.
 (動作3)左下の基準マークの撮像
 図10に示すように、制御部38は基板撮像カメラ19を左下の基準マークFa2の上方に移動させて基準マークFa2を撮像する。
(Operation 3) Imaging of Reference Mark at Lower Left As shown in FIG. 10, the control unit 38 moves the board imaging camera 19 above the reference mark Fa2 at the lower left to capture an image of the reference mark Fa2.
 (動作4)右下の基準マークの撮像
 図10に示すように、制御部38は基板撮像カメラ19を右上の基準マークFa1の上方に移動させて基準マークFa1を撮像する。そして、制御部38は撮像した基準マークFa1,Fa2の位置に基づいて基板Pの位置誤差や角度誤差を検出し、各部品Eの実装座標や実装角度を補正する。
(Operation 4) Imaging of Reference Mark at Lower Right As shown in FIG. 10, the controller 38 moves the board imaging camera 19 above the reference mark Fa1 at the upper right to capture an image of the reference mark Fa1. Then, the control unit 38 detects a position error and an angle error of the board P based on the positions of the captured reference marks Fa1 and Fa2, and corrects the mounting coordinates and the mounting angle of each component E.
 (動作5)部品の搭載
 図11に示すように、制御部38は実装ヘッド25を部品Eの実装座標によって示される位置に移動させ、実装ヘッド25を下降させて部品Eを搭載する。
(Operation 5) Mounting of Component As shown in FIG. 11, the control unit 38 moves the mounting head 25 to a position indicated by the mounting coordinates of the component E, lowers the mounting head 25, and mounts the component E.
 (6)基板撮像カメラの光軸の傾きに起因する部品の位置ずれの補正
 図12から図18を参照して、基板撮像カメラ19の光軸19Aの傾きに起因する部品Eの位置ずれの補正について説明する。なお、基板撮像カメラ19の光軸19Aはミラー33(図4参照)に反射されることによって屈折しているが、便宜上、図12及び図15では基板撮像カメラ19の光軸19Aを直線で示している。また、部品Eの位置ずれの補正はX方向及びY方向の両方について行われるが、補正の方法は実質的に同じであるのでここではX方向を例に説明する。
(6) Correction of component displacement caused by inclination of optical axis of substrate imaging camera Referring to FIGS. 12 to 18, correction of component displacement of component E caused by inclination of optical axis 19A of substrate imaging camera 19. Will be described. Although the optical axis 19A of the board imaging camera 19 is refracted by being reflected by the mirror 33 (see FIG. 4), the optical axis 19A of the board imaging camera 19 is shown by a straight line in FIGS. 12 and 15 for convenience. ing. The correction of the displacement of the component E is performed in both the X direction and the Y direction. However, since the correction method is substantially the same, the X direction will be described here as an example.
 図12は、基板撮像カメラ19の光軸19Aが傾いている場合を示している。図12に示す基板撮像カメラ19の位置は、基板撮像カメラ19で基準マークFa1を撮像して画像データを生成した場合に当該画像データによって表される画像上の基準マークFa1の中心点が画像の中心点と一致するように調整された位置である。 FIG. 12 shows a case where the optical axis 19A of the board imaging camera 19 is inclined. The position of the substrate imaging camera 19 shown in FIG. 12 is such that when the substrate imaging camera 19 images the reference mark Fa1 and generates image data, the center point of the reference mark Fa1 on the image represented by the image data is This is a position adjusted to match the center point.
 前述したように基板撮像カメラ19の光軸19Aは基板Pに対して垂直になるように設計されているが、表面実装機1が動作するとZ軸サーボモータ26やR軸サーボモータ27などの発熱によってヘッドユニット16が歪み、図12に示すように光軸19Aが傾くことがある。基板撮像カメラ19の光軸19Aが傾いていると、制御部38が認識する基準マークFa1の位置と実際の基準マークFa1の位置とにずれが生じる。 As described above, the optical axis 19A of the board imaging camera 19 is designed to be perpendicular to the board P. However, when the surface mounter 1 operates, the heat generated by the Z-axis servo motor 26, the R-axis servo motor 27, etc. As a result, the head unit 16 may be distorted, and the optical axis 19A may be inclined as shown in FIG. If the optical axis 19A of the board imaging camera 19 is tilted, a deviation occurs between the position of the reference mark Fa1 recognized by the control unit 38 and the actual position of the reference mark Fa1.
 具体的には、制御部38は、基板撮像カメラ19が位置P2にあるとき、基準マークFa1の中心点が画像の中心点と一致することから、基準マークFa1の位置は位置P2であると認識する。しかしながら、実際の基準マークFa1の位置は位置P1であるので、制御部38が認識する基準マークFa1の位置と実際の基準マークFa1の位置とにずれが生じる。 Specifically, when the board imaging camera 19 is at the position P2, the control unit 38 recognizes that the position of the reference mark Fa1 is the position P2 because the center point of the reference mark Fa1 matches the center point of the image. I do. However, since the actual position of the reference mark Fa1 is the position P1, a deviation occurs between the position of the reference mark Fa1 recognized by the control unit 38 and the actual position of the reference mark Fa1.
 図12に示すdX_cはその位置ずれ量を表している。詳しくは後述するが、制御部38が認識する基準マークFa1の位置P2が実際の基準マークFa1の位置P1より右側にずれている場合は、dX_cは負の値になるものとする。 DdX_c shown in FIG. 12 indicates the amount of the positional deviation. Although described in detail later, when the position P2 of the reference mark Fa1 recognized by the control unit 38 is shifted to the right from the position P1 of the actual reference mark Fa1, dX_c is a negative value.
 上述した位置ずれ(位置ずれ量dX_c)が生じると、制御部38が認識する基板Pの位置と実際の基板Pの位置とがずれることにより、実際に部品Eが実装される位置が、当該部品Eが実装されるべき位置から右側に|dX_c|だけずれる。以下、図13A及び図13Bを参照して説明する。 When the above-described position shift (position shift amount dX_c) occurs, the position of the board P recognized by the control unit 38 is shifted from the actual position of the board P, so that the position where the component E is actually mounted is changed. E is shifted to the right from the position where E is to be mounted by | dX_c |. Hereinafter, description will be made with reference to FIGS. 13A and 13B.
 図13Aは基板撮像カメラ19の光軸19Aが傾いていない場合(すなわち前述した位置ずれが生じていない場合)を示している。図13Aにおいて位置P3は基板P上において部品Eが実装されるべき位置である。ここで、前述した認識マークFを用いた補正により、部品Eの実装座標はX1に補正されているとする。前述した位置ずれが生じていなければ、制御部38が実装ヘッド25をX1に移動させると、実装ヘッド25が位置P3の上方に位置するので、位置P3に部品Eを実装できる。 FIG. 13A shows a case where the optical axis 19A of the board imaging camera 19 is not tilted (that is, a case where the above-described displacement has not occurred). In FIG. 13A, a position P3 is a position where the component E is to be mounted on the board P. Here, it is assumed that the mounting coordinates of the component E have been corrected to X1 by the correction using the recognition mark F described above. If the above-described positional deviation does not occur, when the control unit 38 moves the mounting head 25 to X1, the mounting head 25 is located above the position P3, and thus the component E can be mounted at the position P3.
 図13Bは基板撮像カメラの光軸が傾いている場合(すなわち前述した位置ずれが生じている場合)を示している。前述した位置ずれが生じていると、位置P3はX1から左側に|dX_c|だけずれる。このため、制御部38が実装ヘッド25をX1に移動させると、実装ヘッド25自体は下に向かってほぼ傾きなく下降するので、位置P3から右側に|dX_c|だけずれた位置P4に部品Eが実装されてしまう。 FIG. 13B shows a case where the optical axis of the board imaging camera is inclined (that is, a case where the above-described positional shift occurs). If the above-described positional shift occurs, the position P3 is shifted to the left from X1 by | dX_c |. For this reason, when the control unit 38 moves the mounting head 25 to X1, the mounting head 25 itself descends almost downward without inclination, so that the component E is located at the position P4 shifted rightward from the position P3 by | dX_c |. Will be implemented.
 上述した位置ずれが生じている場合、部品Eの実装座標X1から負の値である位置ずれ量dX_cを減算すると、部品Eの実装座標はX2(=X1+|dX_c|)となる。このため、制御部38は実装ヘッド25をX1から左側に|dX_c|だけずれた位置に移動させることになり、位置P3に部品Eを実装できる。 (4) In the case where the above-described positional deviation has occurred, when the positional deviation amount dX_c, which is a negative value, is subtracted from the mounting coordinate X1 of the component E, the mounting coordinate of the component E becomes X2 (= X1 + | dX_c |). For this reason, the control unit 38 moves the mounting head 25 to the position shifted to the left by | dX_c | from X1, and can mount the component E at the position P3.
 そこで、詳しくは後述するが、制御部38は、部品Eの位置ずれを補正するために、補正用ユニット20を用いて位置ずれ量(dX_c、dY_c)を検出する。dY_cはY方向の位置ずれ量である。そして、図14に示すように、制御部38は各部品Eの実装座標からそれぞれ位置ずれ量(dX_c、dY_c)を減算することによって各部品Eの実装座標を補正する。 Therefore, as will be described in detail later, the control unit 38 detects the amount of displacement (dX_c, dY_c) using the correction unit 20 in order to correct the displacement of the component E. dY_c is a displacement amount in the Y direction. Then, as shown in FIG. 14, the control unit 38 corrects the mounting coordinates of each component E by subtracting the positional deviation amounts (dX_c, dY_c) from the mounting coordinates of each component E.
 なお、ここでは補正前の実装座標から位置ずれ量dX_cを減算することによって実装座標を補正するが、位置ずれ量dX_cの正負の定義が逆になる場合は部品Eの実装座標に位置ずれ量dX_cを加算することによって実装座標を補正すればよい。位置ずれ量dX_cの正負の定義については後述する。位置ずれ量dY_cについても同様である。 Here, the mounting coordinates are corrected by subtracting the positional deviation amount dX_c from the mounting coordinates before correction. However, if the positive and negative definitions of the positional deviation amount dX_c are reversed, the positional deviation amount dX_c is added to the mounting coordinate of the component E. May be added to correct the mounting coordinates. The positive / negative definition of the displacement amount dX_c will be described later. The same applies to the displacement amount dY_c.
 (6-1)補正用ユニットを用いた位置ずれ量の検出
 図15から図17を参照して、補正用ユニット20を用いた位置ずれ量(dX_c、dY_c)の検出について説明する。ここでは位置ずれ量dX_cを例に説明する。
(6-1) Detection of Position Displacement Using Correction Unit The detection of the position displacement (dX_c, dY_c) using the correction unit 20 will be described with reference to FIGS. Here, the displacement amount dX_c will be described as an example.
 図15に示す基板撮像カメラ19の位置は、ガラス治具36が補正用マーク35に重なっていない状態で基板撮像カメラ19によって補正用マーク35を撮像して画像データを生成した場合に当該画像データによって表される画像上の補正用マーク35の中心点が画像の中心点と一致するように調整された位置である。この調整は後述するS101~S105の処理によって行われる。点線19A_1はそのときの基板撮像カメラ19の光軸19Aを示している。 The position of the board imaging camera 19 shown in FIG. 15 is set when the correction mark 35 is imaged by the board imaging camera 19 to generate image data in a state where the glass jig 36 does not overlap the correction mark 35. Is a position adjusted so that the center point of the correction mark 35 on the image represented by the symbol coincides with the center point of the image. This adjustment is performed by the processing of S101 to S105 described later. The dotted line 19A_1 indicates the optical axis 19A of the board imaging camera 19 at that time.
 図15において点線19A_2は、基板撮像カメラ19の位置を変更せず、ガラス治具36を補正用マーク35に重なる位置に移動させた場合の光軸19Aを示している。補正用マーク35の上にガラス治具36を重ねるとガラス治具36の屈折率(ここでは1.52)に応じて光軸19Aが屈折する。
 このため、図16に示すように、この状態で補正用マーク35を撮像すると補正用マーク35は画像55の中心からずれた位置に撮像される。ここで、図16において位置M1は画像55の中心点である。位置M1は補正用マーク35の第1位置の一例である。また、位置M2は画像55上の補正用マーク35の中心点である。位置M2は補正用マーク35の第2位置の一例である。
In FIG. 15, a dotted line 19A_2 indicates the optical axis 19A when the glass jig 36 is moved to a position overlapping the correction mark 35 without changing the position of the substrate imaging camera 19. When the glass jig 36 is overlaid on the correction mark 35, the optical axis 19A is refracted according to the refractive index (here, 1.52) of the glass jig 36.
For this reason, as shown in FIG. 16, when the correction mark 35 is imaged in this state, the correction mark 35 is imaged at a position shifted from the center of the image 55. Here, the position M1 in FIG. 16 is the center point of the image 55. The position M1 is an example of a first position of the correction mark 35. The position M2 is the center point of the correction mark 35 on the image 55. The position M2 is an example of a second position of the correction mark 35.
 制御部38は、画像55から補正用マーク35の中心点(すなわち第2位置M2)を検出し、検出した位置から画像55の中心点(すなわち第1位置M1)までの距離dX_gを検出する。すなわち、制御部38は、ガラス治具36が重なっていない状態で検出した補正用マーク35の位置である第1位置M1と、ガラス治具36が重なっていない状態で検出した補正用マーク35の位置である第2位置M2との差dX_gを検出する。 The control unit 38 detects the center point of the correction mark 35 (that is, the second position M2) from the image 55, and detects the distance dX_g from the detected position to the center point of the image 55 (that is, the first position M1). That is, the control unit 38 determines the position of the correction mark 35 detected when the glass jig 36 does not overlap with the first position M1 and the correction mark 35 detected when the glass jig 36 does not overlap. The difference dX_g from the second position M2, which is the position, is detected.
 ここで、本実施形態では、ガラス治具36が重なっている状態で検出した補正用マーク35の中心点が画像の中心点より右側に位置している場合は差dX_gが負の値になり、左側に位置している場合はdX_gが正の値になるものとする。前述した図12に示すように基板撮像カメラ19の光軸19Aが下に向かって左側に傾いている場合は、ガラス治具36が重なっている状態で検出した補正用マーク35の中心点は画像の中心点より右側に位置するので、差dX_gは負の値になる。 Here, in the present embodiment, when the center point of the correction mark 35 detected in a state where the glass jig 36 is overlapped is located on the right side of the center point of the image, the difference dX_g becomes a negative value, When it is located on the left side, dX_g has a positive value. When the optical axis 19A of the board imaging camera 19 is inclined leftward downward as shown in FIG. 12 described above, the center point of the correction mark 35 detected when the glass jig 36 is overlapped is the image point. , The difference dX_g becomes a negative value.
 図17は、ガラスの厚みが10mmであり、屈折率が1.52である場合の差dX_gと位置ずれ量dX_cの絶対値(以下、位置ずれ量|dX_c|と表す)との対応関係を示すグラフである。ここで、差dX_gと位置ずれ量dX_cの絶対値との対応関係はガラスの厚みや屈折率によって異なる。このため、ガラスの厚みや屈折率が上述した例(厚みが10mm、屈折率が1.52)と異なる場合はそれに応じたグラフを用いるものとする。 FIG. 17 shows the correspondence between the difference dX_g and the absolute value of the displacement amount dX_c (hereinafter, referred to as the displacement amount | dX_c |) when the thickness of the glass is 10 mm and the refractive index is 1.52. It is a graph. Here, the correspondence between the difference dX_g and the absolute value of the displacement amount dX_c differs depending on the thickness and the refractive index of the glass. Therefore, if the thickness or refractive index of the glass is different from the above-described example (thickness is 10 mm and refractive index is 1.52), a graph corresponding to the difference is used.
 図17に示すように、差dX_gと位置ずれ量|dX_c|とは正比例する。記憶部42には図17に示すグラフを表すデータ(例えば差dX_gから位置ずれ量|dX_c|を求める一次関数)が記憶されている。当該データは換算用データの一例である。制御部38は差dX_gに対応する位置ずれ量|dX_c|を当該データから特定することによって位置ずれ量|dX_c|を検出する。例えば差dX_gが1.0μmであったとすると、検出される位置ずれ量|dX_c|は凡そ28μmとなる。 差 As shown in FIG. 17, the difference dX_g is directly proportional to the displacement | dX_c |. The storage unit 42 stores data representing the graph shown in FIG. 17 (for example, a linear function for obtaining the positional deviation amount | dX_c | from the difference dX_g). The data is an example of conversion data. The control unit 38 detects the displacement | dX_c | by specifying the displacement | dX_c | corresponding to the difference dX_g from the data. For example, if the difference dX_g is 1.0 μm, the detected positional deviation amount | dX_c | is approximately 28 μm.
 (6-2)位置ずれ量検出処理
 図18を参照して、上述した位置ずれ量を検出するために制御部38によって実行される位置ずれ量検出処理について説明する。本処理は基板Pの生産を開始する前に実行されるとともに、基板Pの生産中に10分間隔(所定のタイミングの一例)で実行される。なお、10分間隔は一例であり、位置ずれ量検出処理を実行するタイミングは適宜に決定できる。
(6-2) Position Shift Amount Detection Processing With reference to FIG. 18, a position shift amount detection processing executed by the control unit 38 to detect the above-described position shift amount will be described. This process is executed before starting the production of the substrate P, and is also executed at intervals of 10 minutes (an example of a predetermined timing) during the production of the substrate P. Note that the 10-minute interval is an example, and the timing at which the positional deviation amount detection processing is executed can be determined as appropriate.
 S101では、制御部38は基板撮像カメラ19を補正用ユニット20の補正用マーク35の上方に移動させる。
 S102では、制御部38は補正用ユニット20のガラス治具36が補正用マーク35に重なっていない状態で基板撮像カメラ19によって補正用マーク35を撮像する。
In S101, the control unit 38 moves the board imaging camera 19 above the correction mark 35 of the correction unit 20.
In S102, the control unit 38 images the correction mark 35 by the board imaging camera 19 in a state where the glass jig 36 of the correction unit 20 does not overlap the correction mark 35.
 S103では、制御部38はS102で撮像した画像上で補正用マーク35の中心点を検出し、画像の中心点と補正用マーク35の中心点との差(dX、dY)を求める。
 S104では、制御部38はdX及びdYがいずれも0(あるいは所定の閾値未満)であるか否か(言い換えると画像上の補正用マーク35の中心点が画像の中心点と一致しているか否か)を判断し、少なくとも一方が0でない場合はS105に進み、いずれも0である場合はS106に進む。
In S103, the control unit 38 detects the center point of the correction mark 35 on the image captured in S102, and obtains the difference (dX, dY) between the center point of the image and the center point of the correction mark 35.
In S104, the control unit 38 determines whether dX and dY are both 0 (or less than a predetermined threshold) (in other words, whether the center point of the correction mark 35 on the image matches the center point of the image) Is determined, and if at least one is not 0, the process proceeds to S105, and if both are 0, the process proceeds to S106.
 S105では、制御部38はヘッドユニット16をX方向にdX、Y方向にdY移動させる。制御部38はヘッドユニット16を移動させた後、S102に戻って処理を繰り返す。
 S106では、制御部38はガラス治具36を補正用マーク35に重なる位置に移動させる。
In S105, the control unit 38 moves the head unit 16 by dX in the X direction and by dY in the Y direction. After moving the head unit 16, the control unit 38 returns to S102 and repeats the processing.
In S106, the control unit 38 moves the glass jig 36 to a position overlapping the correction mark 35.
 S107では、制御部38はガラス治具36が補正用マーク35に重なっている状態で基板撮像カメラ19によって補正用マーク35を撮像する。
 S108では、制御部38はS107で撮像した画像上で補正用マーク35の中心点を検出し、画像の中心点から補正用マーク35の中心点までの距離(dX_g,dY_g)を検出する。言い換えると、制御部38は第1位置M1と第2位置M2とのX方向及びY方向の差(dX_g,dY_g)を検出する。
In S107, the control unit 38 captures an image of the correction mark 35 with the substrate imaging camera 19 in a state where the glass jig 36 overlaps the correction mark 35.
In S108, the control unit 38 detects the center point of the correction mark 35 on the image captured in S107, and detects the distance (dX_g, dY_g) from the center point of the image to the center point of the correction mark 35. In other words, the control unit 38 detects a difference (dX_g, dY_g) between the first position M1 and the second position M2 in the X direction and the Y direction.
 S109では、制御部38は前述した図17に示すグラフを表すデータを用いて差dX_gに対応する位置ずれ量dX_c、及び、差dY_gに対応する位置ずれ量dY_cを検出する。 In S109, the control unit 38 detects the positional deviation amount dX_c corresponding to the difference dX_g and the positional deviation amount dY_c corresponding to the difference dY_g using the data representing the graph shown in FIG. 17 described above.
 制御部38は、上述した位置ずれ量検出処理によって位置ずれ量を検出すると、次に位置ずれ量検出処理を実行するまでは、その位置ずれ量を用いて部品Eの実装座標を補正する。そして、制御部38は次に位置ずれ量検出処理を実行すると、それ以降に実装される部品Eについては次に検出された位置ずれ量を用いて実装座標を補正する。 When the control unit 38 detects the positional deviation amount by the above-described positional deviation amount detection processing, the control unit 38 corrects the mounting coordinates of the component E using the positional deviation amount until the next positional deviation amount detection processing is executed. Then, when the control unit 38 next executes the positional deviation amount detection processing, the mounting coordinates of the component E mounted thereafter are corrected using the positional deviation amount detected next.
 (7)実施形態の効果
 実施形態1に係る表面実装機1によると、ガラス治具36が重なっていない状態の補正用マーク35を基板撮像カメラ19で撮像して補正用マーク35の位置を第1位置M1として検出するとともに、ガラス治具36が重なっている状態の補正用マーク35を基板撮像カメラ19で撮像して補正用マーク35の位置を第2位置M2として検出し、第1位置M1と第2位置M2との差(dX_g,dY_g)に基づいて部品Eの位置ずれを補正するので、基板撮像カメラ19の光軸19Aの傾きに起因する部品Eの位置ずれを補正できる。
(7) Effects of the Embodiment According to the surface mounter 1 according to the first embodiment, the position of the correction mark 35 is determined by imaging the correction mark 35 with the glass jig 36 not overlapping with the substrate imaging camera 19. The position of the correction mark 35 is detected as the second position M2 by detecting the position of the correction mark 35 with the glass jig 36 being overlapped with the substrate imaging camera 19 and detecting the position of the correction mark 35 as the second position M2. The displacement of the component E is corrected based on the difference (dX_g, dY_g) between the component E and the second position M2, so that the displacement of the component E due to the inclination of the optical axis 19A of the board imaging camera 19 can be corrected.
 表面実装機1によると、基板撮像カメラ19で認識マークFを撮像して基板Pの位置を認識する場合に、第1位置M1と第2位置M2との差に基づいて部品Eの位置ずれを補正するので、部品Eの位置ずれを補正できる。 According to the surface mounter 1, when the position of the substrate P is recognized by imaging the recognition mark F with the substrate imaging camera 19, the positional displacement of the component E is determined based on the difference between the first position M1 and the second position M2. Since the correction is performed, the positional deviation of the component E can be corrected.
 表面実装機1によると、補正用ユニット20が表面実装機1に取り付けられているので、表面実装機1による基板Pの生産中に基板Pの生産を停止することなく第1位置M1と第2位置M2とを検出できる。これにより、生産性の低下を抑制しつつ部品Eの位置ずれを補正できる。 According to the surface mounter 1, since the correction unit 20 is attached to the surface mounter 1, the first position M1 and the second position M1 can be set without stopping the production of the substrate P during the production of the substrate P by the surface mounter 1. The position M2 can be detected. This makes it possible to correct the displacement of the component E while suppressing a decrease in productivity.
 表面実装機1によると、第1位置M1と第2位置M2との差に基づいて部品Eの実装座標を補正することにより、部品Eの位置ずれを補正できる。 According to the surface mounter 1, by correcting the mounting coordinates of the component E based on the difference between the first position M1 and the second position M2, the positional deviation of the component E can be corrected.
 表面実装機1によると、図17に示すグラフを表すデータを用いることにより、第1位置M1と第2位置M2との差(dX_g,dY_g)を位置ずれ量(dX_c,dY_c)に換算できる。 According to the surface mounter 1, the difference (dX_g, dY_g) between the first position M1 and the second position M2 can be converted into the displacement amount (dX_c, dY_c) by using the data representing the graph shown in FIG.
 表面実装機1によると、基板Pの生産中に10分間隔で位置ずれ量検出処理を実行するので、基板Pの生産中に基板撮像カメラ19の光軸19Aの傾きが変動しても部品Eの位置ずれを補正できる。 According to the surface mounter 1, the position shift amount detection processing is executed at intervals of 10 minutes during the production of the board P. Therefore, even if the inclination of the optical axis 19A of the board imaging camera 19 changes during the production of the board P, the component E Can be corrected.
 <他の実施形態>
 本明細書によって開示される技術は上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も本明細書によって開示される技術的範囲に含まれる。
<Other embodiments>
The technology disclosed in the present specification is not limited to the embodiments described in the above description and the drawings. For example, the following embodiments are also included in the technical scope disclosed in the present specification.
 (1)上記実施形態では部品Eの実装座標から位置ずれ量(dX_c,dY_c)を減算することによって部品Eの位置ずれを補正する場合を例に説明したが、部品Eの位置ずれを補正する方法はこれに限られない。
 例えば、基板撮像カメラ19に対する実装ヘッド25の相対位置情報を補正することによって部品Eの位置ずれを補正してもよい。具体的には例えば、前述した図13Bに示す例の場合、基板撮像カメラ19に対する実装ヘッド25の相対位置情報から|dX_c|を減じると、制御部38は実装ヘッド25をX1に移動させるために、|dX_c|を減じる前に比べて|dX_c|だけ多く移動させることになる。このため実装ヘッド25が位置P3の上方に位置し、位置P3に部品Eを実装できる。
 また、例えば、前述した図13Bに示す例の場合、基板原点S2を左側に|dX_c|だけ移動させてもよい。このようにすると、制御部38は左側に|dX_c|だけ移動した基板原点S2から左側にX1だけ離間した位置に実装ヘッド25を移動させることになるので、実装ヘッド25が位置P3の上方に位置する。これにより位置P3に部品Eを実装できる。
(1) In the above-described embodiment, a case has been described as an example in which the positional deviation of the component E is corrected by subtracting the positional deviation amount (dX_c, dY_c) from the mounting coordinates of the component E. However, the positional deviation of the component E is corrected. The method is not limited to this.
For example, the displacement of the component E may be corrected by correcting the relative position information of the mounting head 25 with respect to the board imaging camera 19. Specifically, for example, in the case of the example shown in FIG. 13B described above, if | dX_c | is subtracted from the relative position information of the mounting head 25 with respect to the board imaging camera 19, the control unit 38 moves the mounting head 25 to X1. , | DX_c | is reduced by | dX_c | more than before the subtraction. Therefore, the mounting head 25 is located above the position P3, and the component E can be mounted at the position P3.
For example, in the case of the example shown in FIG. 13B described above, the substrate origin S2 may be moved to the left by | dX_c |. By doing so, the control unit 38 moves the mounting head 25 to a position separated by X1 to the left from the substrate origin S2 moved to the left by | dX_c |, so that the mounting head 25 is positioned above the position P3. I do. Thus, the component E can be mounted at the position P3.
 (2)上記実施形態では補正用ユニット20が表面実装機1に取り付けられている場合を例に説明したが、補正用ユニット20は表面実装機1に取り付けられていなくてもよい。具体的には例えば、基板搬送装置15によって補正用ユニット20を表面実装機1内に搬入し、搬入した補正用ユニット20を用いて第1位置M1と第2位置M2との差(dX_g,dY_g)を検出してもよい。このようにすると、補正用ユニット20が取り付けられていない既存の表面実装機においても基板撮像カメラ19の光軸の傾きに起因する部品の位置ずれを補正できる。 (2) In the above embodiment, the case where the correction unit 20 is attached to the surface mounter 1 is described as an example, but the correction unit 20 may not be attached to the surface mounter 1. Specifically, for example, the correction unit 20 is loaded into the surface mounter 1 by the substrate transfer device 15, and the difference (dX_g, dY_g) between the first position M1 and the second position M2 is determined using the loaded correction unit 20. ) May be detected. In this manner, even in an existing surface mounter to which the correction unit 20 is not attached, it is possible to correct the component displacement caused by the inclination of the optical axis of the board imaging camera 19.
 (3)上記実施形態では位置ずれ量検出処理を基板Pの生産を開始する前に実行するとともに、基板Pの生産中に10分間隔で実行する場合を例に説明した。しかしながら、位置ずれ量検出処理を実行するタイミングはこれに限られるものではなく、適宜に決定できる。例えば所定枚数の基板Pを生産する毎に実行してもよいし、所定数の部品Eを実装する毎に実行してもよい。 (3) In the above-described embodiment, an example has been described in which the displacement detection processing is executed before the production of the substrate P is started, and is executed at intervals of 10 minutes during the production of the substrate P. However, the timing for executing the positional deviation amount detection processing is not limited to this, and can be determined as appropriate. For example, it may be executed each time a predetermined number of boards P are produced, or each time a predetermined number of components E are mounted.
 (4)上記実施形態ではガラス治具36が重なっていない状態の補正用マーク35を撮像した後、基板撮像カメラ19の位置を固定したままでガラス治具36を補正用マーク35に重なる位置に移動させ、ガラス治具36が重なっている状態の補正用マーク35を撮像して第1位置M1と第2位置M2との差を検出する場合を例に説明した。
 これに対し、ガラス治具36が重なっていない状態の補正用マーク35を撮像した後、ガラス治具36が補正用マーク35に重なっている状態で基板撮像カメラ19によって補正用マーク35を撮像して画像を生成し、画像上の補正用マーク35の中心点が画像の中心点と一致するように基板撮像カメラ19の位置を調整してもよい。そして、ガラス治具36が重なっていない状態で補正用マーク35を撮像したときの基板撮像カメラ19の位置と、ガラス治具36が重なっている状態で補正用マーク35を撮像したときの基板撮像カメラ19の位置との差を第1位置M1と第2位置M2との差としてもよい。
(4) In the above embodiment, after capturing the correction mark 35 in a state where the glass jig 36 does not overlap, the glass jig 36 is moved to a position overlapping the correction mark 35 while the position of the substrate imaging camera 19 is fixed. The case where the difference is detected between the first position M <b> 1 and the second position M <b> 2 by moving the glass jig 36 and capturing the correction mark 35 in the state where the glass jig 36 overlaps has been described as an example.
On the other hand, after imaging the correction mark 35 where the glass jig 36 does not overlap, the substrate imaging camera 19 images the correction mark 35 while the glass jig 36 overlaps the correction mark 35. Image, and the position of the board imaging camera 19 may be adjusted such that the center point of the correction mark 35 on the image coincides with the center point of the image. Then, the position of the substrate imaging camera 19 when the correction mark 35 is imaged when the glass jig 36 is not overlapped, and the substrate imaging when the correction mark 35 is imaged when the glass jig 36 is overlapped. The difference between the position of the camera 19 and the first position M1 may be determined as the difference between the first position M1 and the second position M2.
 (5)上記実施形態では部品Eを吸着することによって部品Eを保持する実装ヘッド25を例に説明したが、実装ヘッド25は部品Eを挟む所謂チャッキングによって保持するものであってもよい。 (5) In the above embodiment, the mounting head 25 that holds the component E by sucking the component E has been described as an example. However, the mounting head 25 may be configured to hold the component E by so-called chucking.
1…表面実装機、19…基板撮像カメラ、20…補正用ユニット、25…実装ヘッド、34…基台、35…補正用マーク、36…ガラス治具(光透過部材の一例)、37…移動部、40…演算処理部(位置検出部、補正部及び認識部の一例)、42・・・記憶部、M1…補正用マーク35の中心点(第1位置の一例)、M2…補正用マーク35の中心点(第2位置の一例)、63…実装座標、E…部品、Fa1,Fa2…基準マーク(認識マークの一例)、Fb1,Fb2…部品位置決めマーク(認識マークの一例)、dX_g…第1位置と第2位置との差(X方向)、dY_g…第1位置と第2位置との差(Y方向)、dX_c…位置ずれ量(X方向)、dY_c…位置ずれ量(Y方向)、P…基板 DESCRIPTION OF SYMBOLS 1 ... Surface mounting machine, 19 ... Substrate imaging camera, 20 ... Correction unit, 25 ... Mounting head, 34 ... Base, 35 ... Correction mark, 36 ... Glass jig (an example of a light transmission member), 37 ... Move Unit, 40: arithmetic processing unit (an example of a position detecting unit, a correcting unit, and a recognizing unit); 42, a storage unit; M1, a center point of the correcting mark 35 (an example of a first position); M2, a correcting mark 35 center point (an example of a second position), 63 ... mounting coordinates, E ... parts, Fa1, Fa2 ... reference marks (examples of recognition marks), Fb1, Fb2 ... parts positioning marks (examples of recognition marks), dX_g ... Difference between first position and second position (X direction), dY_g: Difference between first position and second position (Y direction), dX_c: Displacement amount (X direction), dY_c: Displacement amount (Y direction) ), P ... substrate

Claims (6)

  1.  基板に部品を実装する表面実装機であって、
     前記部品を保持して前記基板に実装する実装ヘッドと、
     前記基板を撮像する基板撮像カメラと、
     基台に付されている補正用マークと、前記基板撮像カメラからの光を透過させる光透過部材と、前記光透過部材を前記補正用マークに重なる位置と重ならない位置との間で移動させる移動部とを有する補正用ユニットと、
     前記光透過部材と重なっていない状態の前記補正用マークを前記基板撮像カメラで撮像して前記補正用マークの位置を第1位置として検出するとともに、前記光透過部材が重なっている状態の前記補正用マークを前記基板撮像カメラで撮像して前記補正用マークの位置を第2位置として検出する位置検出部と、
     前記第1位置と前記第2位置との差に基づいて前記部品の位置ずれを補正する補正部と、
    を備える表面実装機。
    A surface mounter for mounting components on a substrate,
    A mounting head that holds the component and mounts it on the board;
    A board imaging camera for imaging the board,
    A correction mark attached to a base, a light transmitting member that transmits light from the substrate imaging camera, and a movement that moves the light transmitting member between a position overlapping the correction mark and a position not overlapping the correction mark. A correction unit having
    The correction mark in a state not overlapping with the light transmitting member is imaged by the substrate imaging camera to detect a position of the correction mark as a first position, and the correction in a state where the light transmitting member overlaps is performed. A position detection unit that captures a mark for use with the substrate imaging camera and detects the position of the correction mark as a second position;
    A correction unit configured to correct a position shift of the component based on a difference between the first position and the second position;
    A surface mounting machine provided with.
  2.  請求項1に記載の表面実装機であって、
     前記基板に付されている認識マークを前記基板撮像カメラで撮像して前記基板の位置を認識する認識部を備える、表面実装機。
    The surface mounting machine according to claim 1,
    A surface mounter, comprising: a recognition unit that recognizes a position of the substrate by imaging a recognition mark attached to the substrate with the substrate imaging camera.
  3.  請求項1又は請求項2に記載の表面実装機であって、
     前記補正用ユニットは当該表面実装機に取り付けられている、表面実装機。
    The surface mounting machine according to claim 1 or claim 2,
    The surface mounter, wherein the correction unit is attached to the surface mounter.
  4.  請求項1乃至請求項3のいずれか一項に記載の表面実装機であって、
     前記補正部は、前記第1位置と前記第2位置との差に基づいて前記部品の実装座標を補正することによって前記部品の位置ずれを補正する、表面実装機。
    The surface mounter according to any one of claims 1 to 3, wherein
    The surface mounter, wherein the correction unit corrects a displacement of the component by correcting mounting coordinates of the component based on a difference between the first position and the second position.
  5.  請求項1乃至請求項4のいずれか一項に記載の表面実装機であって、
     前記第1位置と前記第2位置との差を位置ずれ量に換算する換算用データを記憶している記憶部を備え、
     前記補正部は、前記換算用データを用いて前記第1位置と前記第2位置との差を前記位置ずれ量に換算し、換算した前記位置ずれ量に基づいて前記部品の位置ずれを補正する、表面実装機。
    The surface mounter according to any one of claims 1 to 4, wherein
    A storage unit that stores conversion data for converting a difference between the first position and the second position into a positional deviation amount;
    The correction unit converts the difference between the first position and the second position into the positional shift amount using the conversion data, and corrects the positional shift of the component based on the converted positional shift amount. , Surface mounter.
  6.  請求項1乃至請求項5のいずれか一項に記載の表面実装機であって、
     前記位置検出部は、当該表面実装機による前記基板の生産中に前記第1位置と前記第2位置とを所定のタイミングで繰り返し検出する、表面実装機。
    The surface mounter according to any one of claims 1 to 5, wherein
    The surface mounter, wherein the position detector repeatedly detects the first position and the second position at a predetermined timing during the production of the substrate by the surface mounter.
PCT/JP2018/027903 2018-07-25 2018-07-25 Surface mounting machine WO2020021657A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022029879A1 (en) * 2020-08-04 2022-02-10 株式会社Fuji Tape feeder test device and tape feeder test device correction method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070135A (en) * 2006-09-12 2008-03-27 Juki Corp Detecting method of optical axis shift of imaging apparatus and part position detecting method and device
JP2012146907A (en) * 2011-01-14 2012-08-02 Panasonic Corp Electronic component mounting method
JP2014041910A (en) * 2012-08-22 2014-03-06 Sony Corp Part mounting device, position correcting method, board manufacturing method and information processing device
WO2014147701A1 (en) * 2013-03-18 2014-09-25 富士機械製造株式会社 Component mounting device and method of calibration in component mounting device
JP2017045913A (en) * 2015-08-28 2017-03-02 パナソニックIpマネジメント株式会社 Component mounting device and component mounting method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876962B2 (en) * 1993-01-07 1999-03-31 松下電器産業株式会社 Board appearance inspection device
CN1066907C (en) * 1994-03-30 2001-06-06 松下电器产业株式会社 Method and apparatus for assembling of electronic unit
JP4128156B2 (en) * 2004-06-03 2008-07-30 松下電器産業株式会社 Component mounting method and apparatus
JP2006059954A (en) 2004-08-19 2006-03-02 Yamagata Casio Co Ltd Apparatus and method of mounting part
JP4541095B2 (en) * 2004-10-15 2010-09-08 富士機械製造株式会社 Position-related data converter and component mounting board work system
JP4901451B2 (en) * 2006-12-19 2012-03-21 Juki株式会社 Component mounting equipment
JP5169981B2 (en) * 2009-04-27 2013-03-27 ソニー株式会社 Optical pickup, optical disc apparatus, optical pickup manufacturing method, and optical pickup control method
US9628676B2 (en) * 2012-06-07 2017-04-18 Complete Genomics, Inc. Imaging systems with movable scan mirrors
US20140111644A1 (en) * 2012-10-24 2014-04-24 GM Global Technology Operations LLC Vehicle assembly with display and corrective lens
JP6307278B2 (en) * 2014-01-09 2018-04-04 ヤマハ発動機株式会社 Surface mounter and position shift detection method
JP6708920B2 (en) * 2015-11-16 2020-06-10 ミツミ電機株式会社 Lens driving device, camera module, and camera mounting device
JP2017217682A (en) * 2016-06-10 2017-12-14 パナソニックIpマネジメント株式会社 Laser beam machining device and laser beam machining method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070135A (en) * 2006-09-12 2008-03-27 Juki Corp Detecting method of optical axis shift of imaging apparatus and part position detecting method and device
JP2012146907A (en) * 2011-01-14 2012-08-02 Panasonic Corp Electronic component mounting method
JP2014041910A (en) * 2012-08-22 2014-03-06 Sony Corp Part mounting device, position correcting method, board manufacturing method and information processing device
WO2014147701A1 (en) * 2013-03-18 2014-09-25 富士機械製造株式会社 Component mounting device and method of calibration in component mounting device
JP2017045913A (en) * 2015-08-28 2017-03-02 パナソニックIpマネジメント株式会社 Component mounting device and component mounting method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022029879A1 (en) * 2020-08-04 2022-02-10 株式会社Fuji Tape feeder test device and tape feeder test device correction method
JP7428807B2 (en) 2020-08-04 2024-02-06 株式会社Fuji Tape feeder inspection device and correction method in tape feeder inspection device

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