WO2022029879A1 - Tape feeder test device and tape feeder test device correction method - Google Patents

Tape feeder test device and tape feeder test device correction method Download PDF

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Publication number
WO2022029879A1
WO2022029879A1 PCT/JP2020/029811 JP2020029811W WO2022029879A1 WO 2022029879 A1 WO2022029879 A1 WO 2022029879A1 JP 2020029811 W JP2020029811 W JP 2020029811W WO 2022029879 A1 WO2022029879 A1 WO 2022029879A1
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WO
WIPO (PCT)
Prior art keywords
tape feeder
image pickup
jig
side mark
imaging
Prior art date
Application number
PCT/JP2020/029811
Other languages
French (fr)
Japanese (ja)
Inventor
和美 星川
賢司 下坂
大輔 鈴木
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to PCT/JP2020/029811 priority Critical patent/WO2022029879A1/en
Priority to JP2022541368A priority patent/JP7428807B2/en
Publication of WO2022029879A1 publication Critical patent/WO2022029879A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02Feeding of components

Definitions

  • the present disclosure relates to a tape feeder inspection device that inspects a supply position for supplying parts from a tape feeder, and a correction method in the tape feeder inspection device.
  • a taping device that controls the feed amount of a tape accommodating an electronic component based on the image pickup data captured by the image pickup device (for example, Patent Document 1).
  • the taping device of Patent Document 1 is provided with a reference position mark on the upper surface of the tape feeding device for feeding the tape.
  • the taping device measures the amount of misalignment with respect to the reference position mark in the imaging data, and controls the feed amount so as to eliminate the amount of misalignment.
  • the tape feeder inspection device that inspects the tape feeder that sends out the tape and supplies the electronic components detects the amount of deviation of the supply position that supplies the electronic components from the tape feeder.
  • the tape feeder inspection device detects the amount of deviation by, for example, comparing the reference mark with the supply position of the actually mounted tape feeder.
  • the size of the tape feeder attached to the tape feeder inspection device varies depending on the width of the tape and the like. Therefore, if a reference mark is provided on the feeder mounting member or the like on which the tape feeder is mounted, the tape feeder and the mark may interfere with each other depending on the size of the tape feeder to be inspected.
  • An object of the present invention is to provide a correction method in an apparatus.
  • a jig having a jig side mark at a position corresponding to a supply position for supplying parts from a tape feeder can be attached to a device main body and the device main body.
  • a tape feeder inspection device including a support member fixed to the support member, a device-side mark supported by the support member, and an image pickup device for imaging the jig-side mark and the device-side mark.
  • the content of the present disclosure is not limited to the implementation of the tape feeder inspection device, and can be implemented as a correction method in the tape feeder inspection device, for example.
  • the jig can be attached to the main body of the device and the jig side mark of the jig and the device side mark can be imaged.
  • Remove the jig attach the tape feeder to be inspected to the equipment holding part, attach the jig in advance, and image the jig side mark, and the supply position based on the position of the device side mark when the tape feeder is attached. It is possible to inspect the amount of deviation.
  • the device side mark is supported by a support member fixed to the device main body. As a result, the position of the device side mark is set to a position away from the tape feeder by the support member, so that the device side mark can be imaged and the supply position can be detected even when tape feeders of various sizes are attached. ..
  • FIG. 1 is a perspective view in which a part of the exterior parts of the electronic component mounting device (hereinafter, may be abbreviated as “mounting device”) 10 is removed.
  • the mounting device 10 includes two electronic component mounting machines (hereinafter, may be abbreviated as “mounting machine”) 13 on the system base 12, and performs work of mounting electronic components on a circuit board.
  • the direction in which the mounting machines 13 are lined up is the X-axis direction
  • the direction parallel to the plane of the circuit board to be conveyed orthogonal to the X-axis direction is the Y-axis direction
  • the direction orthogonal to the X- and Z-axis directions It will be described as the Z-axis direction.
  • Each of the mounting machines 13 of the mounting device 10 mounts the mounting machine main body 19 having the beam portion 17 mounted on the frame portion 15, the transport device 21 for transporting the circuit board in the X-axis direction, and the electronic components on the circuit board. It is provided with a mounting head 23 to be mounted.
  • the mounting machine 13 moves the mounting head 23 in the X and Y axis directions by the moving device 25 of the beam unit 17.
  • a supply device 27 for supplying electronic components to the mounting head 23 is provided in front of the frame portion 15.
  • the mounting head 23 has a suction nozzle 31 that sucks electronic components, and mounts the electronic components on the circuit board fixed by the transport device 21.
  • the suction nozzle 31 has a structure in which, for example, an electronic component is sucked and held by a negative pressure, and the held electronic component is released by supplying a slight positive pressure.
  • the mounting head 23 of this embodiment is provided with, for example, a plurality of suction nozzles 31, and electronic components can be simultaneously sucked from each of the plurality of tape feeders 33 attached to the supply device 27 described later by the plurality of suction nozzles 31. ing.
  • the mounting head 23 is provided with an elevating device or the like for elevating and lowering the suction nozzle 31.
  • the mounting head 23 includes, for example, a plurality of suction nozzles 31 arranged side by side in the X-axis direction, and the plurality of suction nozzles 31 are simultaneously lowered along the Z-axis direction, and a plurality of tape feeders 33 arranged side by side in the X-axis direction. Adsorbs multiple electronic components from.
  • the device for holding the electronic component included in the mounting head 23 is not limited to the suction nozzle 31, and may be, for example, a chuck that sandwiches and holds the electronic component. Further, the mounting head 23 may be configured to sequentially suck a plurality of suction nozzles 31 without executing simultaneous suction.
  • the supply device 27 is arranged at the end (front end) of the frame portion 15 in the Y-axis direction, and includes a tape feeder holding base 35 to which a plurality of tape feeders 33 can be attached and detached.
  • the reel 37 of the tape feeder 33 is wound with a taped component 41 (see FIG. 2) in which the electronic component 39 is taped.
  • the taped component 41 includes a carrier tape 46 in which a large number of accommodating recesses 43 and feed holes 44 are formed at equal pitches, and a top cover tape 45 that covers the accommodating recess 43 in which the electronic component 39 is accommodated. And have.
  • a sprocket 49 is built in the feeder main body 47 of the tape feeder 33.
  • the taped component 41 of the reel 37 is pulled out to the upper end surface of the feeder main body 47.
  • the sprocket 49 is provided at the tip of the tape feeder 33, engages a protrusion formed on the outer peripheral portion with a feed hole 44 formed in the carrier tape 46, and feeds the taped component 41 in the Y-axis direction while rotating. ..
  • a metal frame 51 is provided at the tip of the upper surface of the feeder main body 47.
  • the frame 51 has an opening 51A formed at the upper portion of the tip in the Y-axis direction.
  • the tip side of the top cover tape 45 is held by a peeling device (not shown) in a state of being engaged with the opening 51A, and is pulled in the direction opposite to the feeding direction according to the feeding of the taped component 41 by the sprocket 49. It is stripped from the carrier tape 46.
  • the accommodating recess 43 is sequentially released in the opening 51A according to the feeding of the taped component 41.
  • the tape feeder 33 opens the accommodating recess 43 at the predetermined supply position P1 so that the electronic component 39 can be taken out.
  • the suction nozzle 31 of the mounting head 23 sucks the electronic component 39 from the accommodating recess 43 released at the supply position P1.
  • the tape feeder holding table 35 includes a slide portion 61 and an upright surface portion 63.
  • a plurality of slide grooves 65 are formed in the slide portion 61 along the Y-axis direction.
  • the tape feeder 33 can be slid with respect to the slide portion 61 in a state where the rail 67 provided at the lower part of the feeder main body 47 is fitted in the slide groove 65.
  • the upright surface portion 63 is erected at the end of the slide portion 61 on the transport device 21 side in the Y-axis direction.
  • a connector 71 and a pair of upright pins 73 are provided at the tip of the feeder main body 47.
  • the erection surface portion 63 is provided with a connector connection portion 69 connected to the connector 71 and a pair of fitting holes 75 into which a pair of erection pins 73 are inserted.
  • the tape feeder 33 is slid and moved by the slide portion 61, the connector 71 is connected to the connector connection portion 69, the upright pin 73 is inserted into the fitting hole 75, and the tape feeder 33 is mounted on the tape feeder holding base 35.
  • the tape feeder 33 receives a command from the mounting device 10 through the connector 71, and is in a state where the electronic component 39 can be supplied at the supply position P1.
  • FIG. 4 shows a perspective view of the tape feeder inspection device (hereinafter referred to as an inspection device) 81 of this embodiment.
  • FIG. 5 is a perspective view showing a state in which the jig 82 is attached to the inspection device 81.
  • the inspection device 81 includes a device main body 83, a support member 86, an image pickup device 87, and a control device 91.
  • the device main body 83 includes a feeder mounting member (hereinafter referred to as a mounting member) 85 and an image pickup device mounting member 89.
  • the device main body 83 has a flat plate 95 supported by the legs 93.
  • the mounting member 85 is fixed to the upper surface of the flat plate 95 and has the same structure as the tape feeder holding base 35 (see FIG. 3), so that one tape feeder 33 can be mounted.
  • the mounting member 85 includes a slide groove 65 of the tape feeder holding base 35 shown in FIG. 3, a connector connection portion 69, a slide groove 97 having the same structure as each of the fitting holes 75, and a pair of connector connection portions 98.
  • the similar structure referred to here is not limited to a structure that completely matches, and may be a structure simplified to the extent that a member to be attached such as a rail 67 of the tape feeder 33 can be attached.
  • the support member 86 is a member that supports the device-side mark 124 (see FIG. 8) described later.
  • the support member 86 is fixed to, for example, the upper end of a portion (a portion corresponding to the upright surface portion 63) of the mounting member 85 where the connector connecting portion 98 and the like are provided. Details of the structure of the support member 86 and the like will be described later.
  • the image pickup device mounting member 89 is fixed to the flat plate 95.
  • the image pickup apparatus 87 is supported by the image pickup apparatus attachment member 89 above the attachment member 85, and is fixed so that the image pickup direction is directed downward.
  • the image pickup apparatus 87 can take an image of the supply position P1 of the tape feeder 33 attached to the attachment member 85.
  • the image pickup device mounting member 89 includes a plurality of adjustment screws 101 for adjusting the image pickup position of the image pickup device 87.
  • the control device 91 is provided below the flat plate 95 and is connected to the image pickup device 87 via the image cable 103.
  • the control device 91 includes, for example, a CPU, RAM, ROM, etc., and is mainly composed of a computer, and performs image processing on the image pickup data of the image pickup device 87.
  • the control device 91 detects the supply position P1 and the like of the tape feeder 33 attached to the attachment member 85 based on the image pickup data.
  • the jig 82 is formed by simulating a part of the tape feeder 33 (the tip portion where the upright pin 73 is provided), and can be carried by an operator by hand. ing.
  • the jig 82 is provided with a rail (not shown) having the same structure as the rail 67 at the lower portion, and can slide and move through the slide groove 97.
  • the jig 82 has a pair of upright pins 105 that can be inserted into the fitting holes 99 of the mounting member 85.
  • a plurality of jig side marks 107 are provided on the upper surface 82A of the jig 82.
  • the jig side mark 107 is, for example, a circular mark printed on the upper surface 82A, and is provided at a position corresponding to the supply position P1.
  • four jig side marks 107 are provided on the upper surface 82A.
  • the four jig-side marks 107 are provided, for example, at positions corresponding to the four vertices of one square.
  • the intersection of the lines connecting the two jig-side marks 107, that is, the intersection of the diagonal lines of the square with the four jig-side marks 107 as the vertices (center of gravity, hereinafter referred to as the reference point P2) is the reference for inspecting the supply position P1. It becomes the position of.
  • FIG. 7 shows a state in which the tape feeder 33 is attached to the attachment member 85 and the supply position P1 is viewed from above, and the position of the jig side mark 107 imaged by attaching the jig 82 in advance.
  • the position of the image pickup apparatus 87 is adjusted so that the reference point P2 of the four jig-side marks 107 captured and detected in advance is the center of the image pickup region 109 of the image pickup apparatus 87. Adjust with screw 101 (see FIG. 4).
  • the control device 91 sets XY coordinates in the image pickup region 109, for example.
  • the control device 91 stores the position of the jig 82 mark 107 imaged by the image pickup device 87 in the image pickup region 109 with the jig 82 attached in XY coordinates.
  • the worker removes the jig 82, attaches the tape feeder 33 to be inspected to the mounting member 85, and causes the inspection device 81 to perform the inspection.
  • the control device 91 has a position of a reference point P2 set by imaging the jig 82 in advance and a supply position P1 (for example, a reference point P2) imaged with the tape feeder 33 attached.
  • An error in the position of the nearest accommodating recess 43) is detected, and information such as the detected error is notified as an inspection result.
  • the method of notifying the test result is not particularly limited.
  • the control device 91 displays an error in the XY coordinates of the reference point P2 and the supply position P1 on a display unit (not shown) of the inspection device 81, a PC connected to the control device 91, or the like.
  • the operator adjusts the tape feeder 33 based on the displayed information, and makes the positions of the supply position P1 and the reference point P2 coincide with each other in the X-axis direction and the Y-axis direction.
  • the operator performs the same work on the plurality of tape feeders 33 to match the relative positions of the supply positions P1 of the plurality of tape feeders 33.
  • the adjustment method for matching the supply position P1 with the reference point P2 is not particularly limited.
  • the worker may manually adjust the rotation position and rotation speed of the sprocket 49, the holding position of the taped component 41 with respect to the tape feeder 33, and the like.
  • the inspection device 81 may automatically adjust the rotation position of the sprocket 49, the rotation speed of the motor of the drive source of the sprocket 49, and the like.
  • a method of storing the error of the XY coordinates of the reference point P2 and the supply position P1 and using it for the work of mounting the electronic component on the circuit board may be used.
  • the error in the inspection result may be stored in the mounting device 10 without performing individual adjustments of the tape feeder 33 including the sprocket 49.
  • the suction position of the electronic component may be corrected based on the error of each tape feeder 33.
  • the mounting device 10 mounts the electronic component on the circuit board, the error between the position of the electronic component sucked by the suction nozzle 31 and the mounting position of the circuit board is corrected based on the error of each tape feeder 33.
  • the error for each tape feeder 33 may be adjusted by the mounting device 10 at the time of suction or mounting without adjusting the supply position P1 of the tape feeder 33. Further, the adjustment for the tape feeder 33 and the adjustment by the mounting device 10 may be used in combination.
  • the position of the jig side mark 107 once imaged and stored may be displaced.
  • the position (imaging direction) of the image pickup device 87 is displaced, and the position of the stored jig side mark 107 is relatively displaced with respect to the tape feeder 33 to be inspected.
  • the device side mark 124 supported by the support member 86 is used.
  • the image pickup apparatus 87 includes a camera housing 111 and a reflection housing 113.
  • the camera housing 111 includes an image sensor 115 and a lens 117.
  • the substrate 116 on which the image sensor 115 is mounted is fixed in the camera housing 111.
  • the image pickup device 115 is, for example, an image pickup device such as a CCD or CMOS.
  • the lens 117 is fixed to the camera housing 111 so that the image pickup center of the image pickup element 115 and the center of the lens coincide with each other.
  • the reflective housing 113 is attached to the camera housing 111 and has a first prism 119.
  • the first prism 119 is an example of the image pickup reflective member of the present disclosure, and the relative position and angle with respect to the image pickup element 115 are fixed by the reflection housing 113.
  • the first prism 119 is fixed by the reflection housing 113 after adjusting the reflection angle.
  • the image pickup direction of the image pickup element 115 is bent by 90 degrees, and the reflection angle is adjusted so that the image pickup direction of the image pickup element 115 faces the mounting member 85 (jig 82 or tape feeder 33).
  • the image pickup apparatus 87 bends the image pickup direction by 90 degrees by the first prism 119, and takes an image of the jig 82 and the tape feeder 33 attached to the attachment member 85.
  • the image pickup reflecting member that changes the image pickup direction of the image pickup element 115 is not limited to the prism, and may be another reflection member such as a member whose surface is processed by a mirror or a reflection film.
  • the image pickup device mounting member 89 has, for example, a base 121, a first bracket 122, and a second bracket 123.
  • the base portion 121 is formed of, for example, a metal, a resin, or the like, and the base end portion is fixed to a flat plate 95 (see FIG. 4).
  • a second bracket 123 is attached to the base 121 with the first bracket 122 interposed therebetween.
  • the first bracket 122 is, for example, a member made of a resin material.
  • the second bracket 123 is, for example, a metal member made of aluminum.
  • the camera housing 111 is fixed to the second bracket 123 with bolts or the like.
  • the support member 86 is formed by bending a plate-shaped member, for example, and the base end portion is fixed to the mounting member 85 and extends from the mounting member 85.
  • the support member 86 is made of, for example, a metal or a resin.
  • a set of device-side marks 124 and a second prism 125 are attached to the tip of the support member 86.
  • the device-side mark 124 is, for example, a circular member.
  • the device-side mark 124 is arranged outside the image pickup range 127 reflected by the first prism 119, and is an image pickup element via a second prism 125 arranged in the image pickup range 127 reflected by the first prism 119. It is designed to be reflected in 115.
  • the support member 86 supports the device-side mark 124 and the second prism 125 at positions that do not interfere with the jig 82 and the tape feeder 33 attached to the mounting member 85.
  • the support member 86 supports the device-side mark 124 and the second prism 125 above the mounting member 85.
  • the second prism 125 is an example of the mark reflective member of the present disclosure.
  • the mark reflective member is not limited to the prism, and may be another reflective member such as a mirror or a member whose surface is processed with a reflective film.
  • the first distance L1 between the device-side mark 124 and the second prism 125 becomes equal to the second distance L2 between the jig 82 or the tape feeder 33 attached to the mounting member 85 and the second prism 125.
  • the upper surface 82A of the jig 82 has a plane along the X-axis direction and the Y-axis direction, and the jig side mark 107 is provided on the plane.
  • the second prism 125 is arranged in the imaging range 127 reflected by the first prism 119, and the device-side mark 124 is located at a position separated from the second prism 125 by the first distance L1 along the Y-axis direction (imaging range 127).
  • the first distance L1 is, for example, a straight line distance along the Y-axis direction connecting the center of the circular device-side mark 124 and the center of the reflection surface of the second prism 125.
  • the second distance L2 is, for example, the distance between the center of the reflecting surface of the second prism 125 and the upper surface 82A, and is a straight line distance along the Z-axis direction.
  • the second distance L2 is the distance between the center of the reflective surface of the second prism 125 and the upper surface near the supply position P1 of the tape feeder 33 attached to the attachment member 85.
  • the second distance L2 is the length of the perpendicular line drawn from the second prism 125 to the upper surface of the jig 82 or the tape feeder 33.
  • the first distance L1 and the second distance L2 are set to the same distance, the device side mark 124 is reflected and reflected on the image pickup element 115, so that the upper surface (upper surface 82A, etc.) of the jig 82 or the tape feeder 33 is reflected. ), That is, the image can be taken as if the device-side mark 124 is arranged on the same plane as the jig-side mark 107 and the upper surface of the carrier tape 46.
  • the second prism 125 is arranged at the same distance from both the device side mark 124 and the jig 82.
  • the device-side mark 124 reflected by the second prism 125 and reflected on the image pickup device 87 is projected as if it were on the upper surface 82A of the jig 82.
  • the device side mark 124 is also in focus (focused). Will be.
  • the position, shape, and the like of the device-side mark 124 can be accurately detected based on the imaging data, and the accuracy of correction of the reference point P2, which will be described later, can be improved.
  • the temperature rise of the image sensor 115 and the camera housing 111 causes the first bracket 122, the second bracket 123, and the like to expand, and the image pickup direction of the image pickup device 87 changes.
  • the image pickup direction of the image pickup apparatus 87 is tilted downward in the Z direction (see the arrow in FIG. 9). The change in the image pickup direction due to the temperature rise is gradual, and the image pickup element 115 or the like is saturated in about one hour after the energization is started.
  • the position of the jig side mark 107 set in the imaging area 109 deviates from the position where the jig 82 is initially attached and imaged with the passage of time. As a result, an error occurs in the detection accuracy of the supply position P1 based on the jig side mark 107. For example, if the position of the initially set jig side mark 107 shifts with the passage of time, the supply position P1 of the tape feeder 33 inspected and adjusted in order is adjusted to a position shifted from each other. As a result, even if the plurality of adjusted tape feeders 33 are mounted on the mounting device 10, the supply positions P1 are deviated from each other, so that simultaneous suction by the mounting head 23 becomes difficult.
  • the inspection start time will be delayed. Further, if the jig 82 is attached and the jig side mark 107 is re-imaged every time the tape feeder 33 is imaged, the inspection time becomes long. Further, if an attempt is made to prepare a member, a structure, and an inspection environment that eliminate the temperature change of the image pickup apparatus 87, the manufacturing cost and the like increase.
  • the support member 86 is fixed to the mounting member 85 away from the image pickup device 87, and is less susceptible to the heat of the image pickup device 87.
  • the device side mark 124 is supported by the support member 86 at a position where the displacement of the position does not occur due to the heat generated by the image pickup device 87, or even if the displacement is small, the device side mark 124 is supported by the support member 86.
  • the jig side mark 107 and the supply position P1 are detected with the side mark 124 as a reference.
  • FIG. 10 shows the state of the device side mark 124 and the supply position P1 imaged in the image pickup area 109. It should be noted that FIG. 10 shows the results of two imagings in one figure. Further, the reference point P2 is not actually imaged, but is shown in the figure for the sake of clarity. Further, in FIG. 10, in order to make the explanation easy to understand, the size of the member and the like are changed from the actual size. Further, in the following description, the device-side mark 124 and the detected reference point P2 imaged when the jig 82 is mounted will be referred to as the device-side mark 124A and the reference point P2A.
  • the device-side mark 124 and the detected reference point P2 imaged by attaching the tape feeder 33 to be inspected after removing the jig 82 will be referred to as the device-side mark 124B and the reference point P2B. Further, when the device-side marks 124A and 124B are generically referred to, they will be referred to as the device-side marks 124. The same applies to the reference point P2.
  • the device side mark 124 is supported by the support member 86 so as to be imaged at the end portion in the Y-axis direction, for example.
  • the worker adjusts the position of the image pickup apparatus 87 in the image pickup of the jig 82.
  • the device side mark 124A is imaged at the end portion in the Y-axis direction.
  • the reference point P2A is detected in the center of the imaging region 109 based on the four jig side marks 107 of the jig 82 (see FIG. 7). As shown in FIG.
  • the control device 91 of the inspection device 81 sets, for example, the XY coordinates along the X and Y axis directions in the image pickup region 109, and stores the XY coordinates of the device side mark 124A and the reference point P2A. ..
  • the coordinates of the device-side mark 124A are (mxA, myA), and the coordinates of the reference point P2A are (jmxA, jmyA).
  • the control device 91 calculates, for example, the amount of deviation of the reference point P2A with respect to the device-side mark 124A as an offset amount ( ⁇ x, ⁇ y).
  • the control device 91 stores the calculated offset amount ( ⁇ x, ⁇ y).
  • the worker removes the jig 82, attaches the tape feeder 33, and performs imaging.
  • the image pickup direction of the image pickup apparatus 87 changes due to the heat generation of the image pickup apparatus 87 described above.
  • the device-side mark 124B is displaced in the imaging region 109 by the amount of change in the imaging direction.
  • the control device 91 deviates from the coordinates (mxB, myB) of the device side mark 124B detected in the imaging of the tape feeder 33 by the offset amount calculated at the time of imaging of the jig 82, and the coordinates (jmxB, jmyB) of the reference point P2B. ).
  • the coordinates of the reference point P2B can be calculated by the following equation.
  • the reference point P2 can be corrected based on the amount of deviation of the device-side mark 124 in the imaging region 109, and the reference point P2B can be set in consideration of the change in the imaging direction.
  • the control device 91 detects the position of the supply position P1 of the tape feeder 33 to be inspected based on the coordinates (jmxB, jmyB) of the corrected reference point P2B.
  • the supply position P1 is, for example, the central position of the accommodation recess 43 closest to the coordinates (jmxB, jmyB) of the reference point P2B among the plurality of accommodation recesses 43.
  • the control device 91 calculates, for example, an error ( ⁇ x2, ⁇ y2) between the coordinates of the reference point P2B (jmxB, jmyB) and the coordinates of the supply position P1 as an error to be corrected.
  • the control device 91 notifies the display screen or the like of the error to be corrected.
  • the worker confirms the display screen and adjusts the supply position P1 of the tape feeder 33 to be inspected.
  • the control device 91 also detects the position of the device side mark 124B and the reference point P2B for each inspection even after the tape feeder 33 to be inspected is replaced, and detects an error in the supply position P1.
  • the device side mark 124A and the reference point P2A at the time of mounting the jig 82 are used as absolute references, and a plurality of tape feeders 33 are used. Can be uniformly inspected.
  • the supply positions P1 of the plurality of tape feeders 33 can be adjusted to the same position, and simultaneous suction by the mounting head 23 can be performed with high accuracy.
  • the amount of deviation between the device-side mark 124A and the device-side mark 124B may be detected as an offset amount ( ⁇ x, ⁇ y), and the reference points P2A and P2B may be corrected.
  • the control device 91 stores the coordinates (mxA, myA) of the device side mark 124A detected at the time of imaging of the jig 82, and the coordinates (mxA, myA) of the device side mark 124A and the tape feeder 33.
  • the offset amount ( ⁇ x, ⁇ y) is detected by calculating the difference in the coordinates (mxB, myB) of the device-side mark 124B detected at the time of imaging.
  • the XY coordinates of the device-side mark 124 and the reference point P2 are similarly displaced according to the change in the imaging direction. Therefore, the coordinates of the reference point P2B (jmxB, jmyB) are offset from the coordinates of the reference point P2A (jmxA, jmyA) by an offset amount ( ⁇ x, ⁇ y).
  • the control device 91 of the present embodiment detects the supply position P1 based on the position of the jig side mark 107 imaged in advance by attaching the jig 82. At that time, the control device 91 has a misalignment (offset amount ( ⁇ x, ⁇ y) between the device-side mark 124A when the jig 82 is attached and the image is taken and the device-side mark 124B when the tape feeder 33 is attached and the image is taken. )) Make corrections based on.
  • the device-side mark 124 is arranged at a position where the image pickup device 87 can take an image via the second prism 125.
  • the device-side mark 124 can be moved / arranged within a range where the second prism 125 can be reflected and imaged.
  • the degree of freedom in the position where the device-side mark 124 can be arranged is increased. Therefore, even when tape feeders 33 of various sizes are attached, the device-side mark 124 can be imaged to detect the supply position P1.
  • the support member 86 of this embodiment is fixed to the mounting member 85 to which the tape feeder 33 is slid and mounted.
  • the device-side mark 124 is fixed to the device main body 83 via the support member 86.
  • the device-side mark 124 can be stably fixed at a position away from the mounting member 85.
  • by attaching the support member 86 to the mounting member 85 and separating it from the image pickup device 87 it is possible to reduce the thermal change of the support member 86 due to the heat generated by the image pickup device 87 and suppress the occurrence of misalignment of the mark 124 on the device side. ..
  • the mounting position, mounting member, etc. of the support member 86 shown in FIG. 8 are examples.
  • the support member 86 may be attached to the base 121 of the image pickup device mounting member 89.
  • the second prism 125 and the device-side mark 124 can be stably fixed at a position farther from the image pickup device mounting member 89.
  • the inspection device 81 includes a set of the second prism 125 and the device side mark 124.
  • a plurality of sets (for example, two sets) of the second prism 125 and the device side mark 124 may be provided.
  • the inspection device 81 may image a plurality of device-side marks 124 in one imaging region 109 and perform correction of the reference point P2 based on the plurality of device-side marks 124.
  • the inspection device 81 detects two device-side marks 124C provided at both ends in the Y-axis direction, and is a midpoint of a straight line connecting the two device-side marks 124C.
  • the reference point P2B at the time of imaging of the tape feeder 33 may be detected based on the offset amount from the device-side mark 124D in the device to the reference point P2A. Further, the plurality of device-side marks 124 may be supported by the support member 86 (see FIG. 12) supported by the image pickup device mounting member 89 and the support member 86 (see FIG. 8) supported by the mounting member 85, respectively.
  • the image pickup apparatus 87 of this embodiment is arranged at a position where the jig side mark 107 is imaged via the first prism 119. According to this, the image pickup apparatus 87 can be arranged at a position where the jig side mark 107 reflected by the first prism 119 can be imaged. The degree of freedom in the position where the image pickup device 87 can be arranged is increased. As a result, it becomes possible to reduce the size of the inspection device 81.
  • the control device 91 is within the imaging region 109, for example, an error ( ⁇ x2, ⁇ y2) between the coordinates (jmxB, jmyB) of the reference point P2B and the coordinates of the supply position P1, an offset amount ( ⁇ x, ⁇ y), and the like.
  • the distance between the two points in the above is calculated by multiplying the difference in coordinate positions by the size 131 of one pixel (pixel).
  • the size 131 is, for example, the length of one pixel along the X-axis direction or the Y-axis direction.
  • the second imaging distance SL2 from the imaging device 87 to the jig 82 changes the imaging before the change shown in FIG. It fluctuates as compared with the first imaging distance SL1 from the device 87 to the jig 82.
  • the imaging distance fluctuates the object to be imaged is enlarged or reduced, and the size 131 of one pixel with respect to the object to be imaged fluctuates.
  • the imaging object such as the accommodating recess 43 and the supply position P1 is enlarged, and the size 131 of one pixel becomes the imaging object.
  • the size 131 of one pixel is processed as being larger than that at the time of imaging of the jig 82 of FIG. For example, even if ⁇ x is 100 pixels when the jig 82 is imaged, the size 131 becomes relatively large when the tape feeder 33 is imaged, so that ⁇ x is less than 100 pixels. As a result, an error occurs in the calculation of the distance between two points in the imaging region 109.
  • the control device 91 of the present embodiment corrects the size 131 of one pixel, that is, the resolution of the image pickup device 87, based on the difference between the first image pickup distance SL1 and the second image pickup distance SL2.
  • the control device 91 detects, for example, the difference between the first imaging distance SL1 and the second imaging distance SL2 based on the offset amount ( ⁇ x, ⁇ y) detected by imaging the tape feeder 33.
  • the inspection device 81 may have data in which the offset amount is associated with the difference between the first imaging distance SL1 and the second imaging distance SL2 in advance, and may be searched from the data. Alternatively, the inspection device 81 may calculate the difference in imaging distance based on the offset amount.
  • the control device 91 corrects the size 131 to be larger (or smaller) based on the detected difference in imaging distance (SL1-SL2). For example, the control device 91 corrects the size 131 to be smaller (decreased according to the enlargement ratio) as the imaging distance becomes shorter. As a result, the difference in resolution due to the imaging distance can be corrected, and the distance between two points can be calculated more accurately.
  • the method of detecting the difference in the imaging distance is not limited to the method using the offset amount described above.
  • the image pickup apparatus 87 may include a distance sensor capable of measuring the imaging distance, and may correct the size 131 based on the result of the distance sensor.
  • the control device 91 of the present embodiment has the first imaging distance SL1 from the imaging device 87 to the jig 82 in the imaging of the jig 82 based on the deviation amount (offset amount) of the positions of the device side marks 124A and 124B. And the difference from the second imaging distance SL2 from the image pickup device 87 to the tape feeder 33 in the image pickup of the tape feeder 33 is detected, and the resolution of the image pickup device 87 in the image pickup of the tape feeder 33 is set based on the detected difference. ..
  • the imaging distance changes.
  • the resolution at the time of imaging changes, and the ratio of the size 131 of one pixel (pixel) to the imaged object changes.
  • the difference between the first and second imaging distances SL1 and SL2 is detected based on the deviation (offset amount) of the device-side mark 124A at the time of two imaging, and the resolution (size 131, etc.) is determined based on the difference. Set.
  • the ratio of the pixel size 131 to the image pickup object can be adjusted according to the change in the image pickup distance, and the calculation accuracy of the distance between marks and the like can be improved.
  • the control device 91 does not have to adjust the size 131 for each pixel.
  • the control device 91 may increase or decrease the correction amount according to the number of pixels between the two points to correct the calculated distance. For example, even if the correction amount per pixel is determined based on the first and second imaging distances SL1 and SL2, the number of pixels between the two points is multiplied by the correction amount per pixel, and the distance correction is executed. good.
  • the electronic component 39 is an example of a component.
  • the first prism 119 is an example of a reflection member for imaging.
  • the second prism 125 is an example of a mark reflecting member.
  • the inspection device 81 images the device-side mark 124 supported by the support member 86 and the jig-side mark 107 of the jig 82 attached to the support member 86 by the image pickup device 87. ..
  • the device-side mark 124 is fixed to the device main body 83 and is arranged above the tape feeder 33, for example.
  • the image pickup apparatus 87 has taken an image of the jig side mark 107 or the like reflected by the first prism 119, but the present invention is not limited to this.
  • the image pickup apparatus 87 may take an image of the jig 82 or the tape feeder 33 without going through the first prism 119 or the like.
  • the image pickup device 87 may be installed so that the orthogonal direction of the upper surface 82A is the image pickup direction.
  • the first distance L1 and the second distance L2 are matched, but the first distance L1 and the second distance L2 do not have to be the same distance.
  • the first distance L1 and the second distance L2 may be changed within the depth of field (range of focus) of the image pickup apparatus 87.
  • the component of the present disclosure is not limited to the electronic component 39, and may be another component.
  • the jig side mark 107 is not limited to four, and may be one or a plurality of other marks.
  • the image pickup apparatus 87 images the apparatus side mark 124 reflected by the first prism 119 and the second prism 125, but the present invention is not limited to this.
  • the device-side mark 124 may be provided at the position of the second prism 125 in FIG.
  • the image pickup apparatus 87 may reflect the apparatus side mark 124 only by the first prism 119 to take an image.
  • the inspection device 81 does not have to include the second prism 125.
  • the control device 91 has executed the correction of the reference point P2 based on the offset amount ( ⁇ x, ⁇ y), but it is not necessary to execute the correction.
  • the worker may manually calculate the offset amount of the device side marks 124A and 124B and set the reference point P2B.

Abstract

Provided are a tape feeder test device capable of detecting a supply position by imaging a device-side mark, even when tape feeders of various sizes are mounted thereto, and a tape feeder test device correction method. A tape feeder test device equipped with: a device main body section to which it is possible to attach a jig provided with a jig-side mark in a location which corresponds to a supply position where a component is supplied from a tape feeder; a support member which is secured to the device main body section; a device-side mark supported by the support member; and an imaging device for imaging the jig-side mark and the device-side mark.

Description

テープフィーダ検査装置及びテープフィーダ検査装置における補正方法Correction method in tape feeder inspection device and tape feeder inspection device
 本開示は、テープフィーダから部品を供給する供給位置を検査するテープフィーダ検査装置、及びそのテープフィーダ検査装置における補正方法に関する。 The present disclosure relates to a tape feeder inspection device that inspects a supply position for supplying parts from a tape feeder, and a correction method in the tape feeder inspection device.
 従来、撮像装置で撮像した撮像データに基づいて、電子部品を収容するテープの送り量を制御するテーピング装置がある(例えば、特許文献1など)。特許文献1のテーピング装置は、テープを送るテープ送り装置の上面に、基準位置マークが設けられている。テーピング装置は、撮像データにおける基準位置マークに対する位置ずれ量を測定し、位置ずれ量をなくすように送り量を制御する。 Conventionally, there is a taping device that controls the feed amount of a tape accommodating an electronic component based on the image pickup data captured by the image pickup device (for example, Patent Document 1). The taping device of Patent Document 1 is provided with a reference position mark on the upper surface of the tape feeding device for feeding the tape. The taping device measures the amount of misalignment with respect to the reference position mark in the imaging data, and controls the feed amount so as to eliminate the amount of misalignment.
特開2011-11748号公報Japanese Unexamined Patent Publication No. 2011-11748
 ところで、テープを送り出し電子部品を供給するテープフィーダを検査するテープフィーダ検査装置では、テープフィーダから電子部品を供給する供給位置のずれ量を検出する。テープフィーダ検査装置は、例えば、基準となるマークと、実際に装着されたテープフィーダの供給位置などを比較することでずれ量を検出する。しかしながら、テープフィーダ検査装置に装着されるテープフィーダの大きさは、テープの幅などに応じて変動する。このため、テープフィーダを装着するフィーダ取付部材等に基準となるマークを設けようとすると、検査対象のテープフィーダの大きさによってはテープフィーダとマークとが干渉する虞がある。 By the way, the tape feeder inspection device that inspects the tape feeder that sends out the tape and supplies the electronic components detects the amount of deviation of the supply position that supplies the electronic components from the tape feeder. The tape feeder inspection device detects the amount of deviation by, for example, comparing the reference mark with the supply position of the actually mounted tape feeder. However, the size of the tape feeder attached to the tape feeder inspection device varies depending on the width of the tape and the like. Therefore, if a reference mark is provided on the feeder mounting member or the like on which the tape feeder is mounted, the tape feeder and the mark may interfere with each other depending on the size of the tape feeder to be inspected.
 本開示は、上記した実情に鑑みてなされたものであり、様々な大きさのテープフィーダが装着された場合でも、装置側マークを撮像して供給位置を検出できるテープフィーダ検査装置及びテープフィーダ検査装置における補正方法を提供することを課題とする。 This disclosure has been made in view of the above circumstances, and even when tape feeders of various sizes are attached, the tape feeder inspection device and the tape feeder inspection capable of capturing the device side mark and detecting the supply position. An object of the present invention is to provide a correction method in an apparatus.
 上記課題を解決するために、本開示は、テープフィーダから部品を供給する供給位置に応じた位置に治具側マークが設けられた治具を、取り付け可能な装置本体部と、前記装置本体部に対して固定される支持部材と、前記支持部材に支持される装置側マークと、前記治具側マークと前記装置側マークを撮像する撮像装置と、を備えるテープフィーダ検査装置を開示する。また、本開示の内容は、テープフィーダ検査装置の実施に限定されず、例えば、テープフィーダ検査装置における補正方法としても実施可能である。 In order to solve the above problems, in the present disclosure, a jig having a jig side mark at a position corresponding to a supply position for supplying parts from a tape feeder can be attached to a device main body and the device main body. Disclosed is a tape feeder inspection device including a support member fixed to the support member, a device-side mark supported by the support member, and an image pickup device for imaging the jig-side mark and the device-side mark. Further, the content of the present disclosure is not limited to the implementation of the tape feeder inspection device, and can be implemented as a correction method in the tape feeder inspection device, for example.
 本開示のテープフィーダ検査装置、テープフィーダ検査装置における補正方法によれば、治具を装置本体部に取り付けて、治具の治具側マークと、装置側マークとを撮像することができる。治具を取り外して検査対象のテープフィーダを装置保体部に装着し、予め治具を取り付けて撮像した治具側マークの位置と、テープフィーダ装着時の装置側マークの位置に基づいて供給位置のずれ量の検査等を行なうことができる。そして、この装置側マークを、装置本体部に対して固定される支持部材により支持する。これにより、支持部材によって装置側マークの位置を、テープフィーダから離れた位置にすることで、様々な大きさのテープフィーダが装着された場合でも、装置側マークを撮像して供給位置を検出できる。 According to the correction method in the tape feeder inspection device and the tape feeder inspection device of the present disclosure, the jig can be attached to the main body of the device and the jig side mark of the jig and the device side mark can be imaged. Remove the jig, attach the tape feeder to be inspected to the equipment holding part, attach the jig in advance, and image the jig side mark, and the supply position based on the position of the device side mark when the tape feeder is attached. It is possible to inspect the amount of deviation. Then, the device side mark is supported by a support member fixed to the device main body. As a result, the position of the device side mark is set to a position away from the tape feeder by the support member, so that the device side mark can be imaged and the supply position can be detected even when tape feeders of various sizes are attached. ..
テープフィーダを装着した電子部品装着装置を示す斜視図である。It is a perspective view which shows the electronic component mounting apparatus which mounted the tape feeder. テープフィーダの平面図であって、Y軸方向におけるテープフィーダの先端部を示す図である。It is a top view of the tape feeder, and is the figure which shows the tip part of the tape feeder in the Y-axis direction. 電子部品供給装置のテープフィーダ保持台を示す斜視図である。It is a perspective view which shows the tape feeder holding stand of the electronic component supply apparatus. テープフィーダ検査装置及びテープフィーダの斜視図である。It is a perspective view of a tape feeder inspection apparatus and a tape feeder. テープフィーダ検査装置に治具を取り付ける状態を示す斜視図である。It is a perspective view which shows the state which attaches a jig to a tape feeder inspection apparatus. 治具の先端の上面を示す拡大図である。It is an enlarged view which shows the upper surface of the tip of a jig. 取付部材にテープフィーダを取り付け、供給位置を上方から見た状態を示す模式図である。It is a schematic diagram which shows the state which attached the tape feeder to the attachment member, and looked at the supply position from above. 撮像装置及び支持部材の構造を示す模式図である。It is a schematic diagram which shows the structure of an image pickup apparatus and a support member. 撮像方向が変化した状態を示す模式図である。It is a schematic diagram which shows the state which changed the imaging direction. 撮像領域を示す図である。It is a figure which shows the image pickup area. 別例の補正方法を説明するための図である。It is a figure for demonstrating another example correction method. 別例の支持部材の構造を示す模式図である。It is a schematic diagram which shows the structure of the support member of another example.
 以下、本開示のテープフィーダ検査装置の検査対象であるテープフィーダの一実施例について、図を参照しつつ詳しく説明する。 Hereinafter, an embodiment of the tape feeder, which is the inspection target of the tape feeder inspection apparatus of the present disclosure, will be described in detail with reference to the drawings.
(電子部品装着装置の構成)
 まず、テープフィーダを装着可能な電子部品装着装置について説明する。図1は、電子部品装着装置(以下、「装着装置」と略す場合がある)10の外装部品の一部を取り除いた斜視図である。装着装置10は、システムベース12の上に2つの電子部品装着機(以下、「装着機」と略す場合がある)13を備え、回路基板に電子部品を装着する作業を行う。なお、以下の説明では、装着機13が並ぶ方向をX軸方向、X軸方向に直交し搬送される回路基板の平面に平行な方向をY軸方向、X,Z軸方向に直交する方向をZ軸方向と称して説明する。
(Configuration of electronic component mounting device)
First, an electronic component mounting device to which a tape feeder can be mounted will be described. FIG. 1 is a perspective view in which a part of the exterior parts of the electronic component mounting device (hereinafter, may be abbreviated as “mounting device”) 10 is removed. The mounting device 10 includes two electronic component mounting machines (hereinafter, may be abbreviated as “mounting machine”) 13 on the system base 12, and performs work of mounting electronic components on a circuit board. In the following description, the direction in which the mounting machines 13 are lined up is the X-axis direction, the direction parallel to the plane of the circuit board to be conveyed orthogonal to the X-axis direction is the Y-axis direction, and the direction orthogonal to the X- and Z-axis directions. It will be described as the Z-axis direction.
 装着装置10の装着機13の各々は、フレーム部15に上架されたビーム部17を有する装着機本体19と、回路基板をX軸方向に搬送する搬送装置21と、回路基板に電子部品を装着する装着ヘッド23とを備えている。装着機13は、ビーム部17の移動装置25によって装着ヘッド23をX,Y軸方向に移動させる。フレーム部15の前方には、装着ヘッド23に電子部品を供給する供給装置27が設けられている。 Each of the mounting machines 13 of the mounting device 10 mounts the mounting machine main body 19 having the beam portion 17 mounted on the frame portion 15, the transport device 21 for transporting the circuit board in the X-axis direction, and the electronic components on the circuit board. It is provided with a mounting head 23 to be mounted. The mounting machine 13 moves the mounting head 23 in the X and Y axis directions by the moving device 25 of the beam unit 17. A supply device 27 for supplying electronic components to the mounting head 23 is provided in front of the frame portion 15.
 装着ヘッド23は、電子部品を吸着する吸着ノズル31を有し、搬送装置21によって固定された回路基板に対して電子部品を装着する。吸着ノズル31は、例えば、負圧にて電子部品を吸着保持し、僅かな正圧が供給されることで保持した電子部品を離脱する構造とされている。本実施例の装着ヘッド23は、例えば、複数の吸着ノズル31を備え、後述する供給装置27に取り付けられた複数のテープフィーダ33の各々から複数の吸着ノズル31により同時に電子部品を吸着可能となっている。装着ヘッド23は、吸着ノズル31を昇降させる昇降装置等を備えている。装着ヘッド23は、例えば、X軸方向に並んで配置された複数の吸着ノズル31を備え、複数の吸着ノズル31をZ軸方向に沿って同時に下降させ、X軸方向に並ぶ複数のテープフィーダ33から複数の電子部品を吸着する。尚、装着ヘッド23が備える電子部品を保持する装置は、吸着ノズル31に限らず、例えば、電子部品を挟んで保持するチャックでも良い。また、装着ヘッド23は、同時吸着を実行せず、複数の吸着ノズル31を順番に吸着動作させる構成でも良い。 The mounting head 23 has a suction nozzle 31 that sucks electronic components, and mounts the electronic components on the circuit board fixed by the transport device 21. The suction nozzle 31 has a structure in which, for example, an electronic component is sucked and held by a negative pressure, and the held electronic component is released by supplying a slight positive pressure. The mounting head 23 of this embodiment is provided with, for example, a plurality of suction nozzles 31, and electronic components can be simultaneously sucked from each of the plurality of tape feeders 33 attached to the supply device 27 described later by the plurality of suction nozzles 31. ing. The mounting head 23 is provided with an elevating device or the like for elevating and lowering the suction nozzle 31. The mounting head 23 includes, for example, a plurality of suction nozzles 31 arranged side by side in the X-axis direction, and the plurality of suction nozzles 31 are simultaneously lowered along the Z-axis direction, and a plurality of tape feeders 33 arranged side by side in the X-axis direction. Adsorbs multiple electronic components from. The device for holding the electronic component included in the mounting head 23 is not limited to the suction nozzle 31, and may be, for example, a chuck that sandwiches and holds the electronic component. Further, the mounting head 23 may be configured to sequentially suck a plurality of suction nozzles 31 without executing simultaneous suction.
 供給装置27は、Y軸方向におけるフレーム部15の端部(前端部)に配設され、複数のテープフィーダ33が着脱可能なテープフィーダ保持台35を備えている。テープフィーダ33のリール37には、電子部品39をテーピング化したテープ化部品41(図2参照)が巻回させている。図2に示すように、テープ化部品41は、多数の収容凹部43及び送り穴44が等ピッチで形成されたキャリアテープ46と、電子部品39が収容された収容凹部43を覆うトップカバーテープ45とを備えている。図3に示すように、テープフィーダ33のフィーダ本体47には、スプロケット49が内蔵されている。リール37のテープ化部品41は、フィーダ本体47の上端面に引き出される。スプロケット49は、テープフィーダ33の先端部に設けられ、外周部分に形成された突起をキャリアテープ46に形成された送り穴44に係合させ、回転しながらテープ化部品41をY軸方向へ送り出す。 The supply device 27 is arranged at the end (front end) of the frame portion 15 in the Y-axis direction, and includes a tape feeder holding base 35 to which a plurality of tape feeders 33 can be attached and detached. The reel 37 of the tape feeder 33 is wound with a taped component 41 (see FIG. 2) in which the electronic component 39 is taped. As shown in FIG. 2, the taped component 41 includes a carrier tape 46 in which a large number of accommodating recesses 43 and feed holes 44 are formed at equal pitches, and a top cover tape 45 that covers the accommodating recess 43 in which the electronic component 39 is accommodated. And have. As shown in FIG. 3, a sprocket 49 is built in the feeder main body 47 of the tape feeder 33. The taped component 41 of the reel 37 is pulled out to the upper end surface of the feeder main body 47. The sprocket 49 is provided at the tip of the tape feeder 33, engages a protrusion formed on the outer peripheral portion with a feed hole 44 formed in the carrier tape 46, and feeds the taped component 41 in the Y-axis direction while rotating. ..
 図2に示すように、フィーダ本体47の上面の先端部分には、金属製のフレーム51が設けられている。フレーム51は、Y軸方向の先端の上部に開口51Aが形成されている。トップカバーテープ45は、開口51Aに係合させられた状態で先端側を剥離装置(図示省略)に保持され、スプロケット49によるテープ化部品41の送り出しに応じて送り出しの方向とは反対側に引っ張られキャリアテープ46から剥ぎ取られる。収容凹部43は、開口51Aにおいて、テープ化部品41の送り出しに応じて順次解放される。テープフィーダ33は、所定の供給位置P1において、収容凹部43を開放し、電子部品39を取り出し可能な状態にする。装着ヘッド23の吸着ノズル31は、この供給位置P1において解放された収容凹部43から電子部品39を吸着する。 As shown in FIG. 2, a metal frame 51 is provided at the tip of the upper surface of the feeder main body 47. The frame 51 has an opening 51A formed at the upper portion of the tip in the Y-axis direction. The tip side of the top cover tape 45 is held by a peeling device (not shown) in a state of being engaged with the opening 51A, and is pulled in the direction opposite to the feeding direction according to the feeding of the taped component 41 by the sprocket 49. It is stripped from the carrier tape 46. The accommodating recess 43 is sequentially released in the opening 51A according to the feeding of the taped component 41. The tape feeder 33 opens the accommodating recess 43 at the predetermined supply position P1 so that the electronic component 39 can be taken out. The suction nozzle 31 of the mounting head 23 sucks the electronic component 39 from the accommodating recess 43 released at the supply position P1.
 また、図3に示すように、テープフィーダ保持台35は、スライド部61と、立設面部63とを備えている。スライド部61には、Y軸方向に沿って複数のスライド溝65が形成されている。テープフィーダ33は、フィーダ本体47の下部に設けられたレール67をスライド溝65に嵌合させた状態で、スライド部61に対してスライドさせることが可能となっている。立設面部63は、Y軸方向におけるスライド部61の搬送装置21側の端部に立設している。フィーダ本体47の先端には、コネクタ71と、一対の立設ピン73が設けられている。また、立設面部63には、コネクタ71に接続されるコネクタ接続部69と、一対の立設ピン73を挿入する一対の嵌合穴75が設けられている。テープフィーダ33は、スライド部61でスライド移動させられ、コネクタ71をコネクタ接続部69に接続し、立設ピン73を嵌合穴75に挿入しテープフィーダ保持台35に装着される。テープフィーダ33は、コネクタ71を通じて装着装置10から指令を受信し、供給位置P1で電子部品39を供給可能な状態となる。 Further, as shown in FIG. 3, the tape feeder holding table 35 includes a slide portion 61 and an upright surface portion 63. A plurality of slide grooves 65 are formed in the slide portion 61 along the Y-axis direction. The tape feeder 33 can be slid with respect to the slide portion 61 in a state where the rail 67 provided at the lower part of the feeder main body 47 is fitted in the slide groove 65. The upright surface portion 63 is erected at the end of the slide portion 61 on the transport device 21 side in the Y-axis direction. A connector 71 and a pair of upright pins 73 are provided at the tip of the feeder main body 47. Further, the erection surface portion 63 is provided with a connector connection portion 69 connected to the connector 71 and a pair of fitting holes 75 into which a pair of erection pins 73 are inserted. The tape feeder 33 is slid and moved by the slide portion 61, the connector 71 is connected to the connector connection portion 69, the upright pin 73 is inserted into the fitting hole 75, and the tape feeder 33 is mounted on the tape feeder holding base 35. The tape feeder 33 receives a command from the mounting device 10 through the connector 71, and is in a state where the electronic component 39 can be supplied at the supply position P1.
(テープフィーダ検査装置の構成)
 次に、上記したテープフィーダ33を検査するテープフィーダ検査装置について説明する。図4は、本実施例のテープフィーダ検査装置(以下、検査装置という)81の斜視図を示している。図5は、検査装置81に治具82を取り付ける状態を示す斜視図である。図4及び図5に示すように検査装置81は、装置本体部83と、支持部材86と、撮像装置87と、制御装置91と、を備えている。また、装置本体部83は、フィーダ取付部材(以下、取付部材という)85と、撮像装置取付部材89と、を備えている。
(Configuration of tape feeder inspection device)
Next, a tape feeder inspection device for inspecting the above-mentioned tape feeder 33 will be described. FIG. 4 shows a perspective view of the tape feeder inspection device (hereinafter referred to as an inspection device) 81 of this embodiment. FIG. 5 is a perspective view showing a state in which the jig 82 is attached to the inspection device 81. As shown in FIGS. 4 and 5, the inspection device 81 includes a device main body 83, a support member 86, an image pickup device 87, and a control device 91. Further, the device main body 83 includes a feeder mounting member (hereinafter referred to as a mounting member) 85 and an image pickup device mounting member 89.
 装置本体部83は、脚部93によって支持された平板95を有している。取付部材85は、平板95の上面に固定さており、テープフィーダ保持台35(図3参照)と同様の構造を有することで、1つのテープフィーダ33を取り付け可能となっている。具体的には、取付部材85は、図3に示すテープフィーダ保持台35のスライド溝65、コネクタ接続部69、嵌合穴75のそれぞれと同様の構造のスライド溝97、コネクタ接続部98、一対の嵌合穴99を有している。ここでいう同様の構造とは、完全に一致する構造に限らず、テープフィーダ33のレール67などの取り付け対象の部材を取り付け可能な程度に簡易化された構造でも良い。支持部材86は、後述する装置側マーク124(図8参照)を支持する部材である。支持部材86は、例えば、取付部材85におけるコネクタ接続部98等が設けられた部分(立設面部63に相当する部分)の上端に固定されている。支持部材86の構造等の詳細については、後述する。 The device main body 83 has a flat plate 95 supported by the legs 93. The mounting member 85 is fixed to the upper surface of the flat plate 95 and has the same structure as the tape feeder holding base 35 (see FIG. 3), so that one tape feeder 33 can be mounted. Specifically, the mounting member 85 includes a slide groove 65 of the tape feeder holding base 35 shown in FIG. 3, a connector connection portion 69, a slide groove 97 having the same structure as each of the fitting holes 75, and a pair of connector connection portions 98. Has a fitting hole 99 of. The similar structure referred to here is not limited to a structure that completely matches, and may be a structure simplified to the extent that a member to be attached such as a rail 67 of the tape feeder 33 can be attached. The support member 86 is a member that supports the device-side mark 124 (see FIG. 8) described later. The support member 86 is fixed to, for example, the upper end of a portion (a portion corresponding to the upright surface portion 63) of the mounting member 85 where the connector connecting portion 98 and the like are provided. Details of the structure of the support member 86 and the like will be described later.
 撮像装置取付部材89は、平板95に固定されている。撮像装置87は、取付部材85の上方において撮像装置取付部材89によって支持されて、撮像方向を下方に向けて固定されている。撮像装置87は、取付部材85に取り付けたテープフィーダ33の供給位置P1を撮像可能となっている。撮像装置取付部材89は、撮像装置87の撮像位置を調整するための複数の調整ネジ101を備えている。 The image pickup device mounting member 89 is fixed to the flat plate 95. The image pickup apparatus 87 is supported by the image pickup apparatus attachment member 89 above the attachment member 85, and is fixed so that the image pickup direction is directed downward. The image pickup apparatus 87 can take an image of the supply position P1 of the tape feeder 33 attached to the attachment member 85. The image pickup device mounting member 89 includes a plurality of adjustment screws 101 for adjusting the image pickup position of the image pickup device 87.
 制御装置91は、平板95の下方に設けられ、画像ケーブル103を介して撮像装置87と接続されている。制御装置91は、例えば、CPU、RAM、ROM等を備え、コンピュータを主体として構成され、撮像装置87の撮像データを画像処理する。制御装置91は、撮像データに基づいて、取付部材85に取り付けられたテープフィーダ33の供給位置P1等を検出する。 The control device 91 is provided below the flat plate 95 and is connected to the image pickup device 87 via the image cable 103. The control device 91 includes, for example, a CPU, RAM, ROM, etc., and is mainly composed of a computer, and performs image processing on the image pickup data of the image pickup device 87. The control device 91 detects the supply position P1 and the like of the tape feeder 33 attached to the attachment member 85 based on the image pickup data.
 図5に示すように、治具82は、テープフィーダ33の一部(立設ピン73が設けられた先端部分)を模擬して形成されており、作業者が手で持ち運ぶことが可能となっている。治具82は、レール67と同様の構造のレール(図示略)が下部に設けられ、スライド溝97をスライド移動可能となっている。また、図6に示すように、治具82は、取付部材85の嵌合穴99に挿入可能な一対の立設ピン105を有している。治具82の上面82Aには、複数の治具側マーク107が設けられている。治具側マーク107は、例えば、上面82Aに印刷された円形のマークであり、供給位置P1に応じた位置に設けれている。本実施例では、4つの治具側マーク107が上面82Aに設けられている。4つの治具側マーク107は、例えば、1つの正方形の4つの頂点に相当する位置に設けられている。2つの治具側マーク107を結ぶ線の交点、即ち、4つの治具側マーク107を頂点とする正方形の対角線の交点(重心、以下、基準点P2という)が、供給位置P1を検査する基準の位置となる。 As shown in FIG. 5, the jig 82 is formed by simulating a part of the tape feeder 33 (the tip portion where the upright pin 73 is provided), and can be carried by an operator by hand. ing. The jig 82 is provided with a rail (not shown) having the same structure as the rail 67 at the lower portion, and can slide and move through the slide groove 97. Further, as shown in FIG. 6, the jig 82 has a pair of upright pins 105 that can be inserted into the fitting holes 99 of the mounting member 85. A plurality of jig side marks 107 are provided on the upper surface 82A of the jig 82. The jig side mark 107 is, for example, a circular mark printed on the upper surface 82A, and is provided at a position corresponding to the supply position P1. In this embodiment, four jig side marks 107 are provided on the upper surface 82A. The four jig-side marks 107 are provided, for example, at positions corresponding to the four vertices of one square. The intersection of the lines connecting the two jig-side marks 107, that is, the intersection of the diagonal lines of the square with the four jig-side marks 107 as the vertices (center of gravity, hereinafter referred to as the reference point P2) is the reference for inspecting the supply position P1. It becomes the position of.
 具体的には、図7は、取付部材85にテープフィーダ33を取り付け、供給位置P1を上方から見た状態を示しており、事前に治具82を取り付けて撮像した治具側マーク107の位置を重ねて図示している。例えば、図7に示すように、事前に撮像して検出した4つの治具側マーク107の基準点P2が、撮像装置87の撮像領域109の中心となるように、撮像装置87の位置を調整ネジ101(図4参照)で調整する。制御装置91は、例えば、撮像領域109内にXY座標を設定する。制御装置91は、治具82を装着した状態で撮像装置87により撮像した治具82の治具側マーク107の撮像領域109における位置をXY座標で記憶する。 Specifically, FIG. 7 shows a state in which the tape feeder 33 is attached to the attachment member 85 and the supply position P1 is viewed from above, and the position of the jig side mark 107 imaged by attaching the jig 82 in advance. Are superimposed and illustrated. For example, as shown in FIG. 7, the position of the image pickup apparatus 87 is adjusted so that the reference point P2 of the four jig-side marks 107 captured and detected in advance is the center of the image pickup region 109 of the image pickup apparatus 87. Adjust with screw 101 (see FIG. 4). The control device 91 sets XY coordinates in the image pickup region 109, for example. The control device 91 stores the position of the jig 82 mark 107 imaged by the image pickup device 87 in the image pickup region 109 with the jig 82 attached in XY coordinates.
 作業員は、治具82を取り外して、検査対象のテープフィーダ33を取付部材85に装着し、検査装置81に検査を実行させる。図7に示すように、制御装置91は、治具82を事前に撮像して設定した基準点P2の位置と、テープフィーダ33を装着した状態で撮像した供給位置P1(例えば、基準点P2に最も近い収容凹部43の位置)の誤差を検出し、検出した誤差等の情報を検査結果として報知する。検査結果を報知する方法は特に限定されない。例えば、制御装置91は、検査装置81の表示部(図示略)や制御装置91に接続されたPC等に、基準点P2と供給位置P1のXY座標の誤差等を表示する。作業者は、表示された情報に基づいてテープフィーダ33の調整を行ない、X軸方向及びY軸方向において、供給位置P1と基準点P2の位置を一致させる。作業者は、複数のテープフィーダ33について同様の作業を行なうことで、複数のテープフィーダ33の供給位置P1の相対的な位置を一致させる。尚、供給位置P1を基準点P2に一致させる調整方法は、特に限定されない。例えば、作業員が、スプロケット49の回転位置、回転速度、テープフィーダ33に対するテープ化部品41の保持位置等を手動で調整しても良い。あるいは、検査装置81が、スプロケット49の回転位置や、スプロケット49の駆動源のモータの回転速度等を自動で調整しても良い。また、基準点P2と供給位置P1のXY座標の誤差を記憶させ、回路基板に電子部品を装着する作業に利用する方法でも良い。例えば、スプロケット49を含むテープフィーダ33の個々の調整を実行せず、検査結果の誤差を装着装置10に記憶しても良い。そして、装着装置10が、吸着ノズル31によってテープフィーダ33から電子部品を吸着する際に、その電子部品の吸着位置を、テープフィーダ33ごとの誤差に基づいて修正しても良い。あるいは、装着装置10が、電子部品を回路基板に装着する際に、テープフィーダ33ごとの誤差に基づいて吸着ノズル31に吸着された電子部品の位置と、回路基板の装着位置との誤差を修正しても良い。即ち、テープフィーダ33の供給位置P1を調整せずに、テープフィーダ33ごとの誤差を、吸着や装着の際に装着装置10によって調整しても良い。また、テープフィーダ33に対する調整と、装着装置10による調整を併用しても良い。 The worker removes the jig 82, attaches the tape feeder 33 to be inspected to the mounting member 85, and causes the inspection device 81 to perform the inspection. As shown in FIG. 7, the control device 91 has a position of a reference point P2 set by imaging the jig 82 in advance and a supply position P1 (for example, a reference point P2) imaged with the tape feeder 33 attached. An error in the position of the nearest accommodating recess 43) is detected, and information such as the detected error is notified as an inspection result. The method of notifying the test result is not particularly limited. For example, the control device 91 displays an error in the XY coordinates of the reference point P2 and the supply position P1 on a display unit (not shown) of the inspection device 81, a PC connected to the control device 91, or the like. The operator adjusts the tape feeder 33 based on the displayed information, and makes the positions of the supply position P1 and the reference point P2 coincide with each other in the X-axis direction and the Y-axis direction. The operator performs the same work on the plurality of tape feeders 33 to match the relative positions of the supply positions P1 of the plurality of tape feeders 33. The adjustment method for matching the supply position P1 with the reference point P2 is not particularly limited. For example, the worker may manually adjust the rotation position and rotation speed of the sprocket 49, the holding position of the taped component 41 with respect to the tape feeder 33, and the like. Alternatively, the inspection device 81 may automatically adjust the rotation position of the sprocket 49, the rotation speed of the motor of the drive source of the sprocket 49, and the like. Further, a method of storing the error of the XY coordinates of the reference point P2 and the supply position P1 and using it for the work of mounting the electronic component on the circuit board may be used. For example, the error in the inspection result may be stored in the mounting device 10 without performing individual adjustments of the tape feeder 33 including the sprocket 49. Then, when the mounting device 10 sucks the electronic component from the tape feeder 33 by the suction nozzle 31, the suction position of the electronic component may be corrected based on the error of each tape feeder 33. Alternatively, when the mounting device 10 mounts the electronic component on the circuit board, the error between the position of the electronic component sucked by the suction nozzle 31 and the mounting position of the circuit board is corrected based on the error of each tape feeder 33. You may. That is, the error for each tape feeder 33 may be adjusted by the mounting device 10 at the time of suction or mounting without adjusting the supply position P1 of the tape feeder 33. Further, the adjustment for the tape feeder 33 and the adjustment by the mounting device 10 may be used in combination.
 ここで、複数のテープフィーダ33を取付部材85に付け替えながら検査する間に、一度撮像して記憶した治具側マーク107の位置がズレてしまう可能性がある。例えば、撮像動作によって撮像装置87に熱が発生すると、撮像装置87の位置(撮像方向)がズレ、検査対象のテープフィーダ33に対し、記憶した治具側マーク107の位置が相対的にズレてしまう可能性がある。そこで、本実施例の検査装置81では、治具側マーク107に加え、支持部材86に支持された装置側マーク124を用いる。 Here, while inspecting while replacing the plurality of tape feeders 33 with the mounting member 85, there is a possibility that the position of the jig side mark 107 once imaged and stored may be displaced. For example, when heat is generated in the image pickup device 87 due to the image pickup operation, the position (imaging direction) of the image pickup device 87 is displaced, and the position of the stored jig side mark 107 is relatively displaced with respect to the tape feeder 33 to be inspected. There is a possibility that it will end up. Therefore, in the inspection device 81 of this embodiment, in addition to the jig side mark 107, the device side mark 124 supported by the support member 86 is used.
 詳述すると、図8に示すように、撮像装置87は、カメラ筐体111と、反射筐体113とを備えている。カメラ筐体111は、撮像素子115と、レンズ117を備えている。撮像素子115を実装する基板116は、カメラ筐体111内に固定されている。撮像素子115は、例えば、CCDやCMOS等の撮像素子である。レンズ117は、撮像素子115の撮像中心と、レンズの中心が一致するように、カメラ筐体111に対して固定されている。 More specifically, as shown in FIG. 8, the image pickup apparatus 87 includes a camera housing 111 and a reflection housing 113. The camera housing 111 includes an image sensor 115 and a lens 117. The substrate 116 on which the image sensor 115 is mounted is fixed in the camera housing 111. The image pickup device 115 is, for example, an image pickup device such as a CCD or CMOS. The lens 117 is fixed to the camera housing 111 so that the image pickup center of the image pickup element 115 and the center of the lens coincide with each other.
 反射筐体113は、カメラ筐体111に対して取り付けられ、第1プリズム119を有する。第1プリズム119は、本開示の撮像用反射部材の一例であり、反射筐体113によって撮像素子115に対する相対的な位置や角度が固定されている。第1プリズム119は、反射角度を調整した上で反射筐体113によって固定されている。例えば、撮像素子115の撮像方向を90度曲げ、撮像素子115の撮像方向が取付部材85(治具82やテープフィーダ33)側へ向くように、反射角度が調整されている。撮像装置87は、撮像方向を第1プリズム119によって90度曲げ、取付部材85に取り付けられた治具82やテープフィーダ33を撮像する。尚、撮像素子115の撮像方向を変更する撮像用反射部材は、プリズムに限らず、鏡や反射膜で表面加工された部材等の他の反射部材でも良い。 The reflective housing 113 is attached to the camera housing 111 and has a first prism 119. The first prism 119 is an example of the image pickup reflective member of the present disclosure, and the relative position and angle with respect to the image pickup element 115 are fixed by the reflection housing 113. The first prism 119 is fixed by the reflection housing 113 after adjusting the reflection angle. For example, the image pickup direction of the image pickup element 115 is bent by 90 degrees, and the reflection angle is adjusted so that the image pickup direction of the image pickup element 115 faces the mounting member 85 (jig 82 or tape feeder 33). The image pickup apparatus 87 bends the image pickup direction by 90 degrees by the first prism 119, and takes an image of the jig 82 and the tape feeder 33 attached to the attachment member 85. The image pickup reflecting member that changes the image pickup direction of the image pickup element 115 is not limited to the prism, and may be another reflection member such as a member whose surface is processed by a mirror or a reflection film.
 撮像装置取付部材89は、例えば、基部121、第1ブラケット122、第2ブラケット123を有している。基部121は、例えば、金属や樹脂等により形成されており、平板95(図4参照)に基端部を固定されている。基部121は、第1ブラケット122を間に挟んで第2ブラケット123が取り付けられている。第1ブラケット122は、例えば、樹脂材料で形成された部材である。第2ブラケット123は、例えば、アルミで形成された金属製の部材である。カメラ筐体111は、第2ブラケット123に対してボルト等によって固定されている。 The image pickup device mounting member 89 has, for example, a base 121, a first bracket 122, and a second bracket 123. The base portion 121 is formed of, for example, a metal, a resin, or the like, and the base end portion is fixed to a flat plate 95 (see FIG. 4). A second bracket 123 is attached to the base 121 with the first bracket 122 interposed therebetween. The first bracket 122 is, for example, a member made of a resin material. The second bracket 123 is, for example, a metal member made of aluminum. The camera housing 111 is fixed to the second bracket 123 with bolts or the like.
 また、支持部材86は、例えば、板状の部材を屈曲させて形成されており、基端部を取付部材85に固定され、取付部材85から伸びている。支持部材86は、例えば、金属や樹脂により形成されている。支持部材86の先端には、一組の装置側マーク124及び第2プリズム125が取り付けられている。装置側マーク124は、例えば、円形の部材である。装置側マーク124は、第1プリズム119で反射された撮像範囲127の外に配置されており、第1プリズム119で反射された撮像範囲127内に配置された第2プリズム125を介して撮像素子115に映り込むようになっている。支持部材86は、取付部材85に取り付けられた治具82やテープフィーダ33と干渉しない位置で、装置側マーク124及び第2プリズム125を支持する。例えば、支持部材86は、取付部材85の上方において、装置側マーク124及び第2プリズム125を支持する。これにより、検査対象のテープフィーダ33の幅(テープ化部品41のテープ幅)が大きくなっても、検査対象のテープフィーダ33と干渉せずに、装置側マーク124及び第2プリズム125を支持して映り込ませることができる。第2プリズム125は、本開示のマーク用反射部材の一例である。尚、マーク用反射部材は、プリズムに限らず、鏡や反射膜で表面加工された部材等の他の反射部材でも良い。 Further, the support member 86 is formed by bending a plate-shaped member, for example, and the base end portion is fixed to the mounting member 85 and extends from the mounting member 85. The support member 86 is made of, for example, a metal or a resin. A set of device-side marks 124 and a second prism 125 are attached to the tip of the support member 86. The device-side mark 124 is, for example, a circular member. The device-side mark 124 is arranged outside the image pickup range 127 reflected by the first prism 119, and is an image pickup element via a second prism 125 arranged in the image pickup range 127 reflected by the first prism 119. It is designed to be reflected in 115. The support member 86 supports the device-side mark 124 and the second prism 125 at positions that do not interfere with the jig 82 and the tape feeder 33 attached to the mounting member 85. For example, the support member 86 supports the device-side mark 124 and the second prism 125 above the mounting member 85. As a result, even if the width of the tape feeder 33 to be inspected (tape width of the taped component 41) becomes large, the device side mark 124 and the second prism 125 are supported without interfering with the tape feeder 33 to be inspected. It can be reflected. The second prism 125 is an example of the mark reflective member of the present disclosure. The mark reflective member is not limited to the prism, and may be another reflective member such as a mirror or a member whose surface is processed with a reflective film.
 また、装置側マーク124と第2プリズム125との間の第1距離L1は、取付部材85に取り付けた治具82やテープフィーダ33と第2プリズム125との間の第2距離L2と等しくなっている。詳述すると、例えば、治具82の上面82Aは、X軸方向及びY軸方向に沿った平面を有し、その平面に治具側マーク107が設けられている。第2プリズム125は、第1プリズム119で反射される撮像範囲127に配置され、装置側マーク124は、第2プリズム125からY軸方向に沿って第1距離L1だけ離れた位置(撮像範囲127の外側へ離れた位置)に配置されている。第1距離L1は、例えば、円形の装置側マーク124の中心と、第2プリズム125の反射面の中心とを結び、Y軸方向に沿った直線の距離である。また、第2距離L2は、例えば、第2プリズム125の反射面の中心と、上面82Aとの間の距離であり、Z軸方向に沿った直線の距離である。また、第2距離L2は、第2プリズム125の反射面の中心と、取付部材85に取り付けられたテープフィーダ33の供給位置P1付近の上面との間の距離である。換言すれば、第2距離L2は、第2プリズム125から治具82やテープフィーダ33の上面に下ろした垂線の長さである。このように、第1距離L1と第2距離L2とを同一距離にして装置側マーク124を反射させて撮像素子115に映り込ませることで、治具82やテープフィーダ33の上面(上面82Aなど)上、即ち、治具側マーク107やキャリアテープ46の上面と同一平面上に、あたかも装置側マーク124を配置したかのように撮像することができる。 Further, the first distance L1 between the device-side mark 124 and the second prism 125 becomes equal to the second distance L2 between the jig 82 or the tape feeder 33 attached to the mounting member 85 and the second prism 125. ing. More specifically, for example, the upper surface 82A of the jig 82 has a plane along the X-axis direction and the Y-axis direction, and the jig side mark 107 is provided on the plane. The second prism 125 is arranged in the imaging range 127 reflected by the first prism 119, and the device-side mark 124 is located at a position separated from the second prism 125 by the first distance L1 along the Y-axis direction (imaging range 127). It is located at a position away from the outside of. The first distance L1 is, for example, a straight line distance along the Y-axis direction connecting the center of the circular device-side mark 124 and the center of the reflection surface of the second prism 125. The second distance L2 is, for example, the distance between the center of the reflecting surface of the second prism 125 and the upper surface 82A, and is a straight line distance along the Z-axis direction. The second distance L2 is the distance between the center of the reflective surface of the second prism 125 and the upper surface near the supply position P1 of the tape feeder 33 attached to the attachment member 85. In other words, the second distance L2 is the length of the perpendicular line drawn from the second prism 125 to the upper surface of the jig 82 or the tape feeder 33. In this way, the first distance L1 and the second distance L2 are set to the same distance, the device side mark 124 is reflected and reflected on the image pickup element 115, so that the upper surface (upper surface 82A, etc.) of the jig 82 or the tape feeder 33 is reflected. ), That is, the image can be taken as if the device-side mark 124 is arranged on the same plane as the jig-side mark 107 and the upper surface of the carrier tape 46.
 従って、本実施例では、第2プリズム125を、装置側マーク124と治具82の両方から等しい距離に配置する。第2プリズム125で反射して撮像装置87に映り込んだ装置側マーク124が、あたかも治具82の上面82A上にあるかのように映し出される。そして、第1及び第2距離L1,L2を一致させることで、撮像装置87の焦点を治具82やテープフィーダ33に合せた場合に、装置側マーク124に対する焦点も合う(ピントが合う)状態となる。これにより、撮像データに基づいて装置側マーク124の位置や形状等を精度良く検出することができ、後述する基準点P2の補正の精度を高めることができる。 Therefore, in this embodiment, the second prism 125 is arranged at the same distance from both the device side mark 124 and the jig 82. The device-side mark 124 reflected by the second prism 125 and reflected on the image pickup device 87 is projected as if it were on the upper surface 82A of the jig 82. Then, by matching the first and second distances L1 and L2, when the image pickup device 87 is focused on the jig 82 or the tape feeder 33, the device side mark 124 is also in focus (focused). Will be. As a result, the position, shape, and the like of the device-side mark 124 can be accurately detected based on the imaging data, and the accuracy of correction of the reference point P2, which will be described later, can be improved.
 ここで、例えば、撮像素子115や基板116への通電を開始すると、撮像素子115周辺から熱が発生し、やがてカメラ筐体111内の温度が上昇する。例えば、図9に示すように、撮像素子115やカメラ筐体111の温度上昇によって、第1ブラケット122や第2ブラケット123等が膨張し、撮像装置87の撮像方向が変化する。撮像装置87の撮像方向が、Z方向において下方側へと傾く(図9の矢印参照)。温度上昇による撮像方向の変化は緩やかであり、撮像素子115等への通電を開始してから1時間程度で飽和する。撮像方向が変化することで、時間の経過とともに、撮像領域109内に設定した治具側マーク107の位置が、当初、治具82を取り付けて撮像した位置からずれてしまう。その結果、治具側マーク107に基づく供給位置P1の検出精度に誤差が発生する。例えば、時間の経過とともに、最初に設定した治具側マーク107の位置がズレていくと、順番に検査して調整したテープフィーダ33の供給位置P1が、互いにズレた位置に調整されてしまう。その結果、調整した複数のテープフィーダ33を装着装置10に装着しても、互いの供給位置P1がズレているため、装着ヘッド23による同時吸着が困難となる。 Here, for example, when energization of the image sensor 115 or the substrate 116 is started, heat is generated from the periphery of the image sensor 115, and the temperature inside the camera housing 111 eventually rises. For example, as shown in FIG. 9, the temperature rise of the image sensor 115 and the camera housing 111 causes the first bracket 122, the second bracket 123, and the like to expand, and the image pickup direction of the image pickup device 87 changes. The image pickup direction of the image pickup apparatus 87 is tilted downward in the Z direction (see the arrow in FIG. 9). The change in the image pickup direction due to the temperature rise is gradual, and the image pickup element 115 or the like is saturated in about one hour after the energization is started. As the imaging direction changes, the position of the jig side mark 107 set in the imaging area 109 deviates from the position where the jig 82 is initially attached and imaged with the passage of time. As a result, an error occurs in the detection accuracy of the supply position P1 based on the jig side mark 107. For example, if the position of the initially set jig side mark 107 shifts with the passage of time, the supply position P1 of the tape feeder 33 inspected and adjusted in order is adjusted to a position shifted from each other. As a result, even if the plurality of adjusted tape feeders 33 are mounted on the mounting device 10, the supply positions P1 are deviated from each other, so that simultaneous suction by the mounting head 23 becomes difficult.
 これに対し、例えば、撮像方向の変化が飽和するまで待つと、検査の開始時間に遅延が生じる。また、テープフィーダ33を撮像するごとに治具82を装着して治具側マーク107の再撮像を実行すると、検査時間が長くなってしまう。また、撮像装置87の温度変化をなくすような部材、構造、検査環境を準備しようとすると、製造コスト等が増大する。 On the other hand, if, for example, waiting until the change in the imaging direction is saturated, the inspection start time will be delayed. Further, if the jig 82 is attached and the jig side mark 107 is re-imaged every time the tape feeder 33 is imaged, the inspection time becomes long. Further, if an attempt is made to prepare a member, a structure, and an inspection environment that eliminate the temperature change of the image pickup apparatus 87, the manufacturing cost and the like increase.
 そこで、図8に示すように、支持部材86は、撮像装置87から離れた取付部材85に固定されており、撮像装置87の熱の影響を受けにくくなっている。本実施例の検査装置81では、撮像装置87で発生した熱によって位置の変位が発生しない、あるいは仮に発生したとしても変位が少ない位置に、支持部材86によって装置側マーク124を支持し、その装置側マーク124を基準として治具側マーク107や供給位置P1を検出する。 Therefore, as shown in FIG. 8, the support member 86 is fixed to the mounting member 85 away from the image pickup device 87, and is less susceptible to the heat of the image pickup device 87. In the inspection device 81 of the present embodiment, the device side mark 124 is supported by the support member 86 at a position where the displacement of the position does not occur due to the heat generated by the image pickup device 87, or even if the displacement is small, the device side mark 124 is supported by the support member 86. The jig side mark 107 and the supply position P1 are detected with the side mark 124 as a reference.
 図10は、撮像領域109に撮像された装置側マーク124や供給位置P1の状態を示している。尚、図10は、2回の撮像結果を1つの図で示している。また、基準点P2は、実際には撮像されるものでないが、説明を分かり易くするため図示している。また、図10では、説明を分かり易くするため、部材の大きさ等を、実際の大きさから変更している。また、以下の説明では、治具82を装着時に撮像した装置側マーク124や検出した基準点P2を、装置側マーク124A、基準点P2Aと称して説明する。また、治具82を取り外した後、検査対象のテープフィーダ33を装着して撮像した装置側マーク124や検出した基準点P2を、装置側マーク124B、基準点P2Bと称して説明する。また、装置側マーク124A,124Bを総称する場合は、装置側マーク124と称して説明する。基準点P2についても同様である。 FIG. 10 shows the state of the device side mark 124 and the supply position P1 imaged in the image pickup area 109. It should be noted that FIG. 10 shows the results of two imagings in one figure. Further, the reference point P2 is not actually imaged, but is shown in the figure for the sake of clarity. Further, in FIG. 10, in order to make the explanation easy to understand, the size of the member and the like are changed from the actual size. Further, in the following description, the device-side mark 124 and the detected reference point P2 imaged when the jig 82 is mounted will be referred to as the device-side mark 124A and the reference point P2A. Further, the device-side mark 124 and the detected reference point P2 imaged by attaching the tape feeder 33 to be inspected after removing the jig 82 will be referred to as the device-side mark 124B and the reference point P2B. Further, when the device-side marks 124A and 124B are generically referred to, they will be referred to as the device-side marks 124. The same applies to the reference point P2.
 装置側マーク124は、例えば、Y軸方向における端部に撮像されるように、支持部材86によって支持されている。作業員は、治具82の撮像において、撮像装置87の位置を調整する。治具82の撮像において、例えば、装置側マーク124Aは、Y軸方向の端部に撮像される。また、治具82の4つの治具側マーク107に基づいて(図7参照)、基準点P2Aが撮像領域109の中央で検出される。図10に示すように、検査装置81の制御装置91は、例えば、X,Y軸方向に沿ったXY座標を撮像領域109に設定し、装置側マーク124A及び基準点P2AのXY座標を記憶する。装置側マーク124Aの座標が、(mxA,myA)、基準点P2Aの座標が、(jmxA,jmyA)となる。 The device side mark 124 is supported by the support member 86 so as to be imaged at the end portion in the Y-axis direction, for example. The worker adjusts the position of the image pickup apparatus 87 in the image pickup of the jig 82. In the image pickup of the jig 82, for example, the device side mark 124A is imaged at the end portion in the Y-axis direction. Further, the reference point P2A is detected in the center of the imaging region 109 based on the four jig side marks 107 of the jig 82 (see FIG. 7). As shown in FIG. 10, the control device 91 of the inspection device 81 sets, for example, the XY coordinates along the X and Y axis directions in the image pickup region 109, and stores the XY coordinates of the device side mark 124A and the reference point P2A. .. The coordinates of the device-side mark 124A are (mxA, myA), and the coordinates of the reference point P2A are (jmxA, jmyA).
 制御装置91は、例えば、装置側マーク124Aに対する基準点P2Aのズレ量を、オフセット量(Δx,Δy)として演算する。オフセット量(Δx,Δy)は、次式で表される。
 (Δx,Δy)=(jmxA,jmyA)-(mxA,myA)
 制御装置91は、演算したオフセット量(Δx,Δy)を記憶する。
The control device 91 calculates, for example, the amount of deviation of the reference point P2A with respect to the device-side mark 124A as an offset amount (Δx, Δy). The offset amount (Δx, Δy) is expressed by the following equation.
(Δx, Δy) = (jmxA, jmyA)-(mxA, myA)
The control device 91 stores the calculated offset amount (Δx, Δy).
 次に、作業員は、治具82を取り外してテープフィーダ33を装着し撮像を実行する。テープフィーダ33の撮像において上記した撮像装置87の発熱により、撮像装置87の撮像方向が変化する。装置側マーク124Bは、撮像方向の変化量だけ、撮像領域109における位置がずれる。制御装置91は、テープフィーダ33の撮像において検出した装置側マーク124Bの座標(mxB,myB)から、治具82の撮像時に演算したオフセット量だけズレた位置を基準点P2Bの座標(jmxB,jmyB)として設定する。基準点P2Bの座標は、次式で演算できる。
 (jmxB,jmyB)=(mxB,myB)+(Δx,Δy)
 これにより、撮像領域109における装置側マーク124のズレ量に基づいて基準点P2を補正でき、撮像方向の変化を加味した基準点P2Bを設定できる。
Next, the worker removes the jig 82, attaches the tape feeder 33, and performs imaging. In the image pickup of the tape feeder 33, the image pickup direction of the image pickup apparatus 87 changes due to the heat generation of the image pickup apparatus 87 described above. The device-side mark 124B is displaced in the imaging region 109 by the amount of change in the imaging direction. The control device 91 deviates from the coordinates (mxB, myB) of the device side mark 124B detected in the imaging of the tape feeder 33 by the offset amount calculated at the time of imaging of the jig 82, and the coordinates (jmxB, jmyB) of the reference point P2B. ). The coordinates of the reference point P2B can be calculated by the following equation.
(JmxB, jmyB) = (mxB, myB) + (Δx, Δy)
As a result, the reference point P2 can be corrected based on the amount of deviation of the device-side mark 124 in the imaging region 109, and the reference point P2B can be set in consideration of the change in the imaging direction.
 そして、制御装置91は、補正後の基準点P2Bの座標(jmxB,jmyB)に基づいて、検査対象のテープフィーダ33の供給位置P1の位置を検出する。供給位置P1は、例えば、複数の収容凹部43のうち、基準点P2Bの座標(jmxB,jmyB)から最も近い収容凹部43の中央位置である。制御装置91は、例えば、基準点P2Bの座標(jmxB,jmyB)と、供給位置P1の座標との誤差(Δx2,Δy2)を、補正すべき誤差として演算する。制御装置91は、補正すべき誤差を表示画面等に報知する。作業員は、表示画面を確認して、検査対象のテープフィーダ33の供給位置P1を調整する。 Then, the control device 91 detects the position of the supply position P1 of the tape feeder 33 to be inspected based on the coordinates (jmxB, jmyB) of the corrected reference point P2B. The supply position P1 is, for example, the central position of the accommodation recess 43 closest to the coordinates (jmxB, jmyB) of the reference point P2B among the plurality of accommodation recesses 43. The control device 91 calculates, for example, an error (Δx2, Δy2) between the coordinates of the reference point P2B (jmxB, jmyB) and the coordinates of the supply position P1 as an error to be corrected. The control device 91 notifies the display screen or the like of the error to be corrected. The worker confirms the display screen and adjusts the supply position P1 of the tape feeder 33 to be inspected.
 制御装置91は、検査対象のテープフィーダ33が交換された後も同様に、検査毎に装置側マーク124Bや基準点P2Bの位置を検出し、供給位置P1の誤差を検出する。これにより、撮像装置87の撮像方向が変化した場合であってもその変化を補正し、治具82の装着時の装置側マーク124A及び基準点P2Aを絶対的な基準として、複数のテープフィーダ33について、一律な検査を実施できる。その結果、複数のテープフィーダ33の供給位置P1を、同じ位置に調整でき、装着ヘッド23による同時吸着を精度良く実行させることができる。 The control device 91 also detects the position of the device side mark 124B and the reference point P2B for each inspection even after the tape feeder 33 to be inspected is replaced, and detects an error in the supply position P1. As a result, even if the image pickup direction of the image pickup apparatus 87 changes, the change is corrected, and the device side mark 124A and the reference point P2A at the time of mounting the jig 82 are used as absolute references, and a plurality of tape feeders 33 are used. Can be uniformly inspected. As a result, the supply positions P1 of the plurality of tape feeders 33 can be adjusted to the same position, and simultaneous suction by the mounting head 23 can be performed with high accuracy.
 尚、上記した補正方法は、一例である。例えば、図11に示すように、装置側マーク124Aと装置側マーク124Bとのズレ量をオフセット量(Δx,Δy)として検出し、基準点P2A,P2Bを補正しても良い。詳述すると、制御装置91は、治具82の撮像時に検出した装置側マーク124Aの座標(mxA,myA)を記憶しておき、装置側マーク124Aの座標(mxA,myA)と、テープフィーダ33の撮像時に検出した装置側マーク124Bの座標(mxB,myB)の差を演算することで、オフセット量(Δx,Δy)を検出する。撮像方向の変化に応じて、装置側マーク124と基準点P2のXY座標は、同様に変位する。このため、基準点P2Bの座標(jmxB,jmyB)は、基準点P2Aの座標(jmxA,jmyA)からオフセット量(Δx,Δy)だけずれた位置となる。この場合、制御装置91は、次式により、基準点P2Bを演算することができる。
 (jmxB,jmyB)=(jmxA,jmyA)+(Δx,Δy)
 この場合にも、制御装置91は、補正した基準点P2Bに基づいて、供給位置P1を検出できる。
The above-mentioned correction method is an example. For example, as shown in FIG. 11, the amount of deviation between the device-side mark 124A and the device-side mark 124B may be detected as an offset amount (Δx, Δy), and the reference points P2A and P2B may be corrected. More specifically, the control device 91 stores the coordinates (mxA, myA) of the device side mark 124A detected at the time of imaging of the jig 82, and the coordinates (mxA, myA) of the device side mark 124A and the tape feeder 33. The offset amount (Δx, Δy) is detected by calculating the difference in the coordinates (mxB, myB) of the device-side mark 124B detected at the time of imaging. The XY coordinates of the device-side mark 124 and the reference point P2 are similarly displaced according to the change in the imaging direction. Therefore, the coordinates of the reference point P2B (jmxB, jmyB) are offset from the coordinates of the reference point P2A (jmxA, jmyA) by an offset amount (Δx, Δy). In this case, the control device 91 can calculate the reference point P2B by the following equation.
(JmxB, jmyB) = (jmxA, jmyA) + (Δx, Δy)
Also in this case, the control device 91 can detect the supply position P1 based on the corrected reference point P2B.
 従って、本実施例の制御装置91は、治具82を取り付けて予め撮像した治具側マーク107の位置に基づいて、供給位置P1を検出する。その際、制御装置91は、治具82を取り付けて撮像した際の装置側マーク124Aと、テープフィーダ33を取り付けて撮像した際の装置側マーク124Bとの位置のズレ(オフセット量(Δx,Δy))に基づく補正を行なう。 Therefore, the control device 91 of the present embodiment detects the supply position P1 based on the position of the jig side mark 107 imaged in advance by attaching the jig 82. At that time, the control device 91 has a misalignment (offset amount (Δx, Δy) between the device-side mark 124A when the jig 82 is attached and the image is taken and the device-side mark 124B when the tape feeder 33 is attached and the image is taken. )) Make corrections based on.
 これによれば、装置側マーク124A,124Bを基準とした補正を行なうことができる。そして、この装置側マーク124を、第2プリズム125を介して撮像装置87により撮像可能な位置に配置する。これにより、装置側マーク124を、第2プリズム125で反射させて撮像できる範囲に移動・配置等できる。装置側マーク124が配置可能な位置の自由度が高くなる。従って、様々な大きさのテープフィーダ33が装着された場合でも、装置側マーク124を撮像して供給位置P1を検出できる。 According to this, it is possible to perform correction based on the device side marks 124A and 124B. Then, the device-side mark 124 is arranged at a position where the image pickup device 87 can take an image via the second prism 125. As a result, the device-side mark 124 can be moved / arranged within a range where the second prism 125 can be reflected and imaged. The degree of freedom in the position where the device-side mark 124 can be arranged is increased. Therefore, even when tape feeders 33 of various sizes are attached, the device-side mark 124 can be imaged to detect the supply position P1.
 また、本実施例の支持部材86は、テープフィーダ33をスライドさせて装着する取付部材85に対して固定されている。装置側マーク124は、支持部材86を介して装置本体部83に対して固定される。これにより、取付部材85から離れた位置において、装置側マーク124を安定的に固定できる。また、支持部材86を取付部材85に取り付け、撮像装置87から離すことで、撮像装置87で発生する熱による支持部材86の熱変化を小さくし、装置側マーク124の位置ずれの発生を抑制できる。 Further, the support member 86 of this embodiment is fixed to the mounting member 85 to which the tape feeder 33 is slid and mounted. The device-side mark 124 is fixed to the device main body 83 via the support member 86. As a result, the device-side mark 124 can be stably fixed at a position away from the mounting member 85. Further, by attaching the support member 86 to the mounting member 85 and separating it from the image pickup device 87, it is possible to reduce the thermal change of the support member 86 due to the heat generated by the image pickup device 87 and suppress the occurrence of misalignment of the mark 124 on the device side. ..
 尚、図8に示す支持部材86の取り付け位置、取り付ける部材等は、一例である。例えば、図12に示すように、支持部材86を、撮像装置取付部材89の基部121に取り付けても良い。これにより、撮像装置取付部材89からより離れた位置において、第2プリズム125や装置側マーク124を安定的に固定できる。 The mounting position, mounting member, etc. of the support member 86 shown in FIG. 8 are examples. For example, as shown in FIG. 12, the support member 86 may be attached to the base 121 of the image pickup device mounting member 89. As a result, the second prism 125 and the device-side mark 124 can be stably fixed at a position farther from the image pickup device mounting member 89.
 また、図8に示す実施例では、検査装置81は、1組の第2プリズム125及び装置側マーク124を備えた。これに対し、図12に示すように、複数組み(例えば、2組)の第2プリズム125及び装置側マーク124を設けても良い。検査装置81は、1つの撮像領域109内において、複数の装置側マーク124を撮像し、複数の装置側マーク124に基づいて、基準点P2の補正を実行しても良い。例えば、図8に破線の丸で示すように、検査装置81は、Y軸方向の両端に設けられた2つの装置側マーク124Cを検出し、その2つの装置側マーク124Cを結ぶ直線の中点にある装置側マーク124Dから基準点P2Aまでのオフセット量を基準に、テープフィーダ33の撮像時の基準点P2Bを検出しても良い。また、複数の装置側マーク124を、撮像装置取付部材89で支持した支持部材86(図12参照)と、取付部材85で支持した支持部材86(図8参照)でそれぞれ支持しても良い。 Further, in the embodiment shown in FIG. 8, the inspection device 81 includes a set of the second prism 125 and the device side mark 124. On the other hand, as shown in FIG. 12, a plurality of sets (for example, two sets) of the second prism 125 and the device side mark 124 may be provided. The inspection device 81 may image a plurality of device-side marks 124 in one imaging region 109 and perform correction of the reference point P2 based on the plurality of device-side marks 124. For example, as shown by a broken line circle in FIG. 8, the inspection device 81 detects two device-side marks 124C provided at both ends in the Y-axis direction, and is a midpoint of a straight line connecting the two device-side marks 124C. The reference point P2B at the time of imaging of the tape feeder 33 may be detected based on the offset amount from the device-side mark 124D in the device to the reference point P2A. Further, the plurality of device-side marks 124 may be supported by the support member 86 (see FIG. 12) supported by the image pickup device mounting member 89 and the support member 86 (see FIG. 8) supported by the mounting member 85, respectively.
 また、本実施例の撮像装置87は、第1プリズム119を介して治具側マーク107を撮像する位置に配置されている。これによれば、第1プリズム119で反射した治具側マーク107を撮像可能な位置に、撮像装置87を配置できる。撮像装置87が配置可能な位置の自由度が高くなる。その結果、検査装置81の小型化を図ることが可能となる。 Further, the image pickup apparatus 87 of this embodiment is arranged at a position where the jig side mark 107 is imaged via the first prism 119. According to this, the image pickup apparatus 87 can be arranged at a position where the jig side mark 107 reflected by the first prism 119 can be imaged. The degree of freedom in the position where the image pickup device 87 can be arranged is increased. As a result, it becomes possible to reduce the size of the inspection device 81.
 ここで、制御装置91は、例えば、基準点P2Bの座標(jmxB,jmyB)と、供給位置P1の座標との誤差(Δx2,Δy2)や、オフセット量(Δx,Δy)など、撮像領域109内における2点間の距離を、座標位置の差に1ピクセル(画素)の大きさ131を乗算して演算する。この場合、大きさ131は、例えば、X軸方向又はY軸方向に沿った1ピクセルの長さである。一方で、図9に示すように、撮像装置87の撮像方向が変化すると、撮像装置87から治具82(又はテープフィーダ33)までの第2撮像距離SL2は、図8に示す変化前の撮像装置87から治具82までの第1撮像距離SL1に比べて変動する。撮像距離が変動することで撮像の対象物が拡大又は縮小され、撮像対象物に対する1ピクセルの大きさ131が変動する。例えば、第2撮像距離SL2が、第1撮像距離SL1に比べて短くなった場合、収容凹部43や供給位置P1等の撮像対象物が拡大され、1ピクセルの大きさ131は、撮像対象物に対して相対的に大きくなる。従って、図8の治具82の撮像時に比べて、1ピクセルの大きさ131が、より大きいものとして処理される。例えば、治具82の撮像時にΔxが100ピクセルであっても、テープフィーダ33の撮像時に大きさ131が相対的に大きくなることで、Δxが100ピクセル未満となる。その結果、撮像領域109内における2点間の距離の演算において誤差が生じる。 Here, the control device 91 is within the imaging region 109, for example, an error (Δx2, Δy2) between the coordinates (jmxB, jmyB) of the reference point P2B and the coordinates of the supply position P1, an offset amount (Δx, Δy), and the like. The distance between the two points in the above is calculated by multiplying the difference in coordinate positions by the size 131 of one pixel (pixel). In this case, the size 131 is, for example, the length of one pixel along the X-axis direction or the Y-axis direction. On the other hand, as shown in FIG. 9, when the imaging direction of the imaging device 87 changes, the second imaging distance SL2 from the imaging device 87 to the jig 82 (or the tape feeder 33) changes the imaging before the change shown in FIG. It fluctuates as compared with the first imaging distance SL1 from the device 87 to the jig 82. As the imaging distance fluctuates, the object to be imaged is enlarged or reduced, and the size 131 of one pixel with respect to the object to be imaged fluctuates. For example, when the second imaging distance SL2 is shorter than the first imaging distance SL1, the imaging object such as the accommodating recess 43 and the supply position P1 is enlarged, and the size 131 of one pixel becomes the imaging object. On the other hand, it becomes relatively large. Therefore, the size 131 of one pixel is processed as being larger than that at the time of imaging of the jig 82 of FIG. For example, even if Δx is 100 pixels when the jig 82 is imaged, the size 131 becomes relatively large when the tape feeder 33 is imaged, so that Δx is less than 100 pixels. As a result, an error occurs in the calculation of the distance between two points in the imaging region 109.
 そこで、本実施例の制御装置91は、第1撮像距離SL1と第2撮像距離SL2の差に基づいて、1ピクセルの大きさ131、即ち、撮像装置87の分解能を補正する。制御装置91は、例えば、テープフィーダ33を撮像して検出したオフセット量(Δx,Δy)に基づいて、第1撮像距離SL1と第2撮像距離SL2の差を検出する。例えば、予め、オフセット量と、第1撮像距離SL1及び第2撮像距離SL2の差を対応付けたデータを検査装置81が保有し、そのデータから検索しても良い。あるいは、検査装置81は、オフセット量に基づいて、撮像距離の差を演算しても良い。制御装置91は、検出した撮像距離の差(SL1-SL2)に基づいて、大きさ131をより大きく(又はより小さく)補正する。例えば、制御装置91は、撮像距離がより短くなるに従って、大きさ131をより小さく補正する(拡大率に応じて小さくする)。これにより、撮像距離による分解能の差を補正し、2点間の距離等をより正確に演算できる。尚、撮像距離の差を検出する方法は、上記したオフセット量を用いる方法に限らない。例えば、撮像装置87は、撮像距離を測定可能な距離センサを備え、距離センサの結果に基づいて大きさ131を補正しても良い。 Therefore, the control device 91 of the present embodiment corrects the size 131 of one pixel, that is, the resolution of the image pickup device 87, based on the difference between the first image pickup distance SL1 and the second image pickup distance SL2. The control device 91 detects, for example, the difference between the first imaging distance SL1 and the second imaging distance SL2 based on the offset amount (Δx, Δy) detected by imaging the tape feeder 33. For example, the inspection device 81 may have data in which the offset amount is associated with the difference between the first imaging distance SL1 and the second imaging distance SL2 in advance, and may be searched from the data. Alternatively, the inspection device 81 may calculate the difference in imaging distance based on the offset amount. The control device 91 corrects the size 131 to be larger (or smaller) based on the detected difference in imaging distance (SL1-SL2). For example, the control device 91 corrects the size 131 to be smaller (decreased according to the enlargement ratio) as the imaging distance becomes shorter. As a result, the difference in resolution due to the imaging distance can be corrected, and the distance between two points can be calculated more accurately. The method of detecting the difference in the imaging distance is not limited to the method using the offset amount described above. For example, the image pickup apparatus 87 may include a distance sensor capable of measuring the imaging distance, and may correct the size 131 based on the result of the distance sensor.
 従って、本実施例の制御装置91は、装置側マーク124A,124Bの位置のズレ量(オフセット量)に基づいて、治具82の撮像における撮像装置87から治具82までの第1撮像距離SL1と、テープフィーダ33の撮像における撮像装置87からテープフィーダ33までの第2撮像距離SL2との差を検出し、検出した差に基づいて、テープフィーダ33の撮像における撮像装置87の分解能を設定する。 Therefore, the control device 91 of the present embodiment has the first imaging distance SL1 from the imaging device 87 to the jig 82 in the imaging of the jig 82 based on the deviation amount (offset amount) of the positions of the device side marks 124A and 124B. And the difference from the second imaging distance SL2 from the image pickup device 87 to the tape feeder 33 in the image pickup of the tape feeder 33 is detected, and the resolution of the image pickup device 87 in the image pickup of the tape feeder 33 is set based on the detected difference. ..
 撮像装置87の撮像位置や角度等が、撮像装置87の発熱等によって変化した場合、撮像距離が変化する。撮像距離が変化することで、撮像時の分解能が変化し、撮像対象物に対する1画素(ピクセル)の大きさ131の比率が変化する。その結果、マークや位置間の距離を画素数に基づいて演算した場合、撮像距離が変化することで、距離の演算精度が低下する。そこで、2回の撮像時の装置側マーク124Aのずれ(オフセット量)に基づいて第1及び第2撮像距離SL1,SL2の差を検出し、その差に基づいて分解能(大きさ131など)を設定する。これにより、撮像距離の変化に合せて撮像対象物に対する画素の大きさ131の比率を合せることができ、マーク間等の距離の演算精度を向上できる。 When the imaging position, angle, etc. of the imaging device 87 change due to heat generation of the imaging device 87, the imaging distance changes. As the imaging distance changes, the resolution at the time of imaging changes, and the ratio of the size 131 of one pixel (pixel) to the imaged object changes. As a result, when the distance between marks and positions is calculated based on the number of pixels, the imaging distance changes, and the calculation accuracy of the distance decreases. Therefore, the difference between the first and second imaging distances SL1 and SL2 is detected based on the deviation (offset amount) of the device-side mark 124A at the time of two imaging, and the resolution (size 131, etc.) is determined based on the difference. Set. As a result, the ratio of the pixel size 131 to the image pickup object can be adjusted according to the change in the image pickup distance, and the calculation accuracy of the distance between marks and the like can be improved.
 尚、制御装置91は、1ピクセル毎の大きさ131を調整しなくとも良い。例えば、制御装置91は、2点間の画素数に応じて、補正量を増減させ、演算する距離を補正しても良い。例えば、第1及び第2撮像距離SL1,SL2に基づいて1画素当たりの補正量を決定し、2点間の画素数に1画素当たりの補正量を乗算し、距離の補正を実行しても良い。 The control device 91 does not have to adjust the size 131 for each pixel. For example, the control device 91 may increase or decrease the correction amount according to the number of pixels between the two points to correct the calculated distance. For example, even if the correction amount per pixel is determined based on the first and second imaging distances SL1 and SL2, the number of pixels between the two points is multiplied by the correction amount per pixel, and the distance correction is executed. good.
 因みに、上記実施例において、電子部品39は、部品の一例である。第1プリズム119は、撮像用反射部材の一例である。第2プリズム125は、マーク用反射部材の一例である。 Incidentally, in the above embodiment, the electronic component 39 is an example of a component. The first prism 119 is an example of a reflection member for imaging. The second prism 125 is an example of a mark reflecting member.
 以上、上記した実施例によれば、以下の効果を奏する。
 本実施例の一態様では、検査装置81は、支持部材86に支持される装置側マーク124と、支持部材86に取り付けられた治具82の治具側マーク107を、撮像装置87により撮像する。これにより、装置側マーク124を、装置本体部83に対して固定し、例えば、テープフィーダ33の上方に配置する。支持部材86によって装置側マーク124の位置を、テープフィーダ33から離れた位置にすることで、様々な大きさのテープフィーダ33が装着された場合でも、装置側マーク124を撮像して供給位置P1を検出できる。
As described above, according to the above-mentioned embodiment, the following effects are obtained.
In one embodiment of the present embodiment, the inspection device 81 images the device-side mark 124 supported by the support member 86 and the jig-side mark 107 of the jig 82 attached to the support member 86 by the image pickup device 87. .. As a result, the device-side mark 124 is fixed to the device main body 83 and is arranged above the tape feeder 33, for example. By setting the position of the device-side mark 124 to a position away from the tape feeder 33 by the support member 86, even when tape feeders 33 of various sizes are mounted, the device-side mark 124 is imaged and the supply position P1. Can be detected.
 尚、本開示は、上記実施例に限定されるものではなく、当業者の知識に基づいて種々の変更、改良を施した種々の態様で実施することが可能である。
 例えば、上記実施例では、撮像装置87は、第1プリズム119で反射させた治具側マーク107等を撮像したが、これに限らない。例えば、撮像装置87は、第1プリズム119等を介さずに治具82やテープフィーダ33を撮像しても良い。例えば、撮像装置87を、上面82Aの直交方向が撮像方向となるように設置しても良い。
 また、上記実施例では、第1距離L1と第2距離L2とを一致させたが、第1距離L1と第2距離L2とは、同一距離でなくとも良い。例えば、第1距離L1と第2距離L2とを、撮像装置87の被写界深度(ピントが合う範囲)内で変更しても良い。
 また、本開示の部品は、電子部品39に限らず、他の部品でも良い。
 治具側マーク107は、4つに限らず、1又は他の複数個でも良い。
It should be noted that the present disclosure is not limited to the above embodiment, and can be carried out in various embodiments with various changes and improvements based on the knowledge of those skilled in the art.
For example, in the above embodiment, the image pickup apparatus 87 has taken an image of the jig side mark 107 or the like reflected by the first prism 119, but the present invention is not limited to this. For example, the image pickup apparatus 87 may take an image of the jig 82 or the tape feeder 33 without going through the first prism 119 or the like. For example, the image pickup device 87 may be installed so that the orthogonal direction of the upper surface 82A is the image pickup direction.
Further, in the above embodiment, the first distance L1 and the second distance L2 are matched, but the first distance L1 and the second distance L2 do not have to be the same distance. For example, the first distance L1 and the second distance L2 may be changed within the depth of field (range of focus) of the image pickup apparatus 87.
Further, the component of the present disclosure is not limited to the electronic component 39, and may be another component.
The jig side mark 107 is not limited to four, and may be one or a plurality of other marks.
 また、上記実施例では、撮像装置87は、第1プリズム119及び第2プリズム125で反射させた装置側マーク124を撮像したが、これに限らない。例えば、装置側マーク124を、図8における第2プリズム125の位置に設けても良い。そして、撮像装置87は、装置側マーク124を第1プリズム119だけで反射させ撮像しても良い。この場合、検査装置81は、第2プリズム125を備えなくとも良い。
 制御装置91は、オフセット量(Δx,Δy)に基づく基準点P2の補正を実行したが、実行しなくとも良い。例えば、作業員が、手作業で装置側マーク124A,124Bのオフセット量を計算し、基準点P2Bを設定しても良い。
Further, in the above embodiment, the image pickup apparatus 87 images the apparatus side mark 124 reflected by the first prism 119 and the second prism 125, but the present invention is not limited to this. For example, the device-side mark 124 may be provided at the position of the second prism 125 in FIG. Then, the image pickup apparatus 87 may reflect the apparatus side mark 124 only by the first prism 119 to take an image. In this case, the inspection device 81 does not have to include the second prism 125.
The control device 91 has executed the correction of the reference point P2 based on the offset amount (Δx, Δy), but it is not necessary to execute the correction. For example, the worker may manually calculate the offset amount of the device side marks 124A and 124B and set the reference point P2B.
 33 テープフィーダ、39 電子部品(部品)、81 検査装置(テープフィーダ検査装置)、83 装置本体部、85 フィーダ取付部材、86 支持部材、89 撮像装置取付部材、91 制御装置、107 治具側マーク、119 第1プリズム(撮像用反射部材)、124,124A,124B 装置側マーク、125 第2プリズム(マーク用反射部材)、P1 供給位置、SL1 第1撮像距離、SL2 第2撮像距離。
 
33 Tape feeder, 39 Electronic parts (parts), 81 Inspection device (tape feeder inspection device), 83 Device body, 85 Feeder mounting member, 86 Support member, 89 Imaging device mounting member, 91 Control device, 107 Jig side mark , 119 1st prism (reflection member for imaging), 124, 124A, 124B device side mark, 125 2nd prism (reflection member for marking), P1 supply position, SL1 first imaging distance, SL2 second imaging distance.

Claims (8)

  1.  テープフィーダから部品を供給する供給位置に応じた位置に治具側マークが設けられた治具を、取り付け可能な装置本体部と、
     前記装置本体部に対して固定される支持部材と、
     前記支持部材に支持される装置側マークと、
     前記治具側マークと前記装置側マークを撮像する撮像装置と、
     を備えるテープフィーダ検査装置。
    A jig with a jig side mark at a position corresponding to the supply position where parts are supplied from the tape feeder can be attached to the main body of the device.
    A support member fixed to the main body of the device and
    The device side mark supported by the support member and
    An image pickup device that captures the jig side mark and the device side mark, and
    A tape feeder inspection device equipped with.
  2.  前記装置側マークを反射させて前記撮像装置に撮像させるマーク用反射部材と、
     前記装置本体部に取り付けた前記テープフィーダの前記供給位置を、前記治具を前記装置本体部に取り付けて前記撮像装置により予め撮像した前記治具側マークの位置に基づいて検出する場合、前記治具を前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークと、前記テープフィーダを前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークとの位置のずれに基づく補正を行なう制御装置と、
     を備える請求項1に記載のテープフィーダ検査装置。
    A mark reflecting member that reflects the device-side mark and causes the image pickup device to take an image.
    When the supply position of the tape feeder attached to the main body of the device is detected based on the position of the mark on the jig side previously imaged by the image pickup device by attaching the jig to the main body of the device, the above-mentioned cure is performed. Positions of the device side mark when the tool is attached to the device main body and imaged by the image pickup device and the device side mark when the tape feeder is attached to the device body and imaged by the image pickup device. A control device that corrects based on the deviation, and
    The tape feeder inspection apparatus according to claim 1.
  3.  前記装置側マークと前記マーク用反射部材との間の第1距離が、
     前記マーク用反射部材と前記治具との間の第2距離と等しい、請求項2に記載のテープフィーダ検査装置。
    The first distance between the device-side mark and the mark reflective member is
    The tape feeder inspection device according to claim 2, which is equal to the second distance between the mark reflecting member and the jig.
  4.  前記制御装置は、
     前記治具を前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークと、前記テープフィーダを前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークとの位置のずれに基づいて、前記治具の撮像における前記撮像装置から前記治具までの第1撮像距離と、前記テープフィーダの撮像における前記撮像装置から前記テープフィーダまでの第2撮像距離との差を検出し、検出した差に基づいて、前記テープフィーダの撮像における前記撮像装置の分解能を設定する、請求項2又は請求項3に記載のテープフィーダ検査装置。
    The control device is
    The device side mark when the jig is attached to the device main body and imaged by the image pickup device, and the device side mark when the tape feeder is attached to the device body and imaged by the image pickup device. Difference between the first imaging distance from the imaging device to the jig in the imaging of the jig and the second imaging distance from the imaging device to the tape feeder in the imaging of the tape feeder based on the positional deviation. The tape feeder inspection device according to claim 2 or 3, wherein the resolution of the image pickup device in the imaging of the tape feeder is set based on the detected difference.
  5.  前記装置本体部は、
     前記テープフィーダをスライドさせて装着するフィーダ取付部材を備え、
     前記支持部材は、
     前記フィーダ取付部材に対して固定される、請求項1から請求項4の何れか1項に記載のテープフィーダ検査装置。
    The main body of the device is
    A feeder mounting member for sliding and mounting the tape feeder is provided.
    The support member is
    The tape feeder inspection device according to any one of claims 1 to 4, which is fixed to the feeder mounting member.
  6.  前記装置本体部は、
     前記撮像装置を取り付ける撮像装置取付部材を備え、
     前記支持部材は、
     前記撮像装置取付部材に対して固定される、請求項1から請求項4の何れか1項に記載のテープフィーダ検査装置。
    The main body of the device is
    An image pickup device mounting member for mounting the image pickup device is provided.
    The support member is
    The tape feeder inspection device according to any one of claims 1 to 4, which is fixed to the image pickup device mounting member.
  7.  撮像用反射部材を備え、
     前記撮像装置は、
     前記撮像用反射部材を介して前記治具側マークを撮像する位置に配置される、請求項1から請求項6の何れか1項に記載のテープフィーダ検査装置。
    Equipped with a reflective member for imaging
    The image pickup device
    The tape feeder inspection device according to any one of claims 1 to 6, which is arranged at a position where the jig side mark is imaged via the image pickup reflective member.
  8.  撮像装置と、マーク用反射部材と、前記マーク用反射部材を介して前記撮像装置に撮像される装置側マークと、テープフィーダから部品を供給する供給位置に応じた位置に治具側マークが設けられた治具を、取り付け可能な装置本体部と、を備えるテープフィーダ検査装置における補正方法であって、
     前記装置本体部に取り付けた前記テープフィーダの前記供給位置を、前記治具を前記装置本体部に取り付けて前記撮像装置により予め撮像した前記治具側マークの位置に基づいて検出する場合、前記治具を前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークと、前記テープフィーダを前記装置本体部に取り付けて前記撮像装置により撮像した際の前記装置側マークとの位置のずれに基づく補正を行なう、テープフィーダ検査装置における補正方法。
     
    The image pickup device, the mark reflection member, the device side mark imaged by the image pickup device via the mark reflection member, and the jig side mark are provided at positions corresponding to the supply positions where parts are supplied from the tape feeder. It is a correction method in a tape feeder inspection device including a device main body to which the jig can be attached.
    When the supply position of the tape feeder attached to the device main body is detected based on the position of the jig side mark previously imaged by the image pickup device by attaching the jig to the device main body, the cure is performed. Positions of the device side mark when the tool is attached to the device main body and imaged by the image pickup device and the device side mark when the tape feeder is attached to the device body and imaged by the image pickup device. A correction method in a tape feeder inspection device that corrects based on deviation.
PCT/JP2020/029811 2020-08-04 2020-08-04 Tape feeder test device and tape feeder test device correction method WO2022029879A1 (en)

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Publication number Priority date Publication date Assignee Title
JP2007158049A (en) * 2005-12-06 2007-06-21 Matsushita Electric Ind Co Ltd Adjustment apparatus for tape feeder
JP2009123895A (en) * 2007-11-14 2009-06-04 Yamaha Motor Co Ltd Device for inspecting characteristics of feeder, surface mounting machine and truck
JP2012033829A (en) * 2010-08-03 2012-02-16 Fuji Mach Mfg Co Ltd Component mounting machine and image processing method
WO2015001599A1 (en) * 2013-07-01 2015-01-08 富士機械製造株式会社 Feeder adjusting device
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