WO2020019793A1 - 传输装置及传输系统 - Google Patents
传输装置及传输系统 Download PDFInfo
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- WO2020019793A1 WO2020019793A1 PCT/CN2019/084425 CN2019084425W WO2020019793A1 WO 2020019793 A1 WO2020019793 A1 WO 2020019793A1 CN 2019084425 W CN2019084425 W CN 2019084425W WO 2020019793 A1 WO2020019793 A1 WO 2020019793A1
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- WIPO (PCT)
- Prior art keywords
- rollers
- roller
- adjacent
- rotating shaft
- transfer device
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
Definitions
- the present application relates to the field of equipment manufacturing, and in particular, to a transmission device and a transmission system.
- FIG. 1 is a schematic structural diagram of a conventional conveying device.
- the conveying device includes a plurality of rotating shafts 10 arranged in parallel.
- Each of the rotating shafts 10 is fixedly provided with a plurality of rollers 20, and a plurality of roller rows are formed in a direction perpendicular to the rotating shaft 10.
- Each roller 20 in each roller row is arranged in alignment with each other.
- the rotating shaft 10 drives the rollers 20 located thereon to rotate, and each of the rollers 20 drives the substrate to be conveyed in the conveying direction under the action of the friction force; wherein during the conveying process,
- the line is a straight line MM perpendicular to the rotation axis.
- the same position on the substrate surface is continuously rubbed by all the rollers in the roller row, which can easily cause surface damage at the same position on the substrate surface.
- the same position on the substrate surface and the roller contact for a long time will cause stress concentration
- the existing market has increasingly higher requirements for lighter and thinner display panels, and the substrates need to be thinned or plated, so that stress release occurs, resulting in unevenness on the surface of the substrate and affecting the production yield of the substrate.
- the present application provides a transfer device and a transfer system to solve the technical problem of substrate yield ratio.
- the present application provides a transmission device including a plurality of mutually parallel rotating shafts, each of which is provided with a roller group, and each of the roller groups includes at least two of the rollers;
- the rotating shaft is used for driving the roller to rotate, and the roller is used for carrying the target substrate and driving the target substrate to move in the conveying direction;
- two adjacent rollers located on the same rotating shaft are oppositely disposed, and an included angle between each of the rollers and the rotating shaft is ⁇ , 0 ⁇ ⁇ 90 °.
- the two adjacent roller groups are symmetrically arranged with a center perpendicular line connecting the centers of the two adjacent roller groups.
- rollers located in the same roller group are parallel to each other.
- Adjacent two of the rollers located in the same group of rollers are symmetrically arranged with a vertical line connecting the centers of the two adjacent rollers.
- the distance between two adjacent rollers in the same roller group is equal.
- the rollers on the two adjacent rotating shafts are symmetrically arranged with a center perpendicular line connecting the centers of the two adjacent rotating shafts.
- rollers on the two adjacent rotating shafts are staggered along the conveying direction.
- the transmission device further includes a driving device connected to the rotating shaft.
- the driving device is a motor.
- This application also proposes a transmission system including a transmission device, wherein the transmission device includes a plurality of mutually parallel rotating shafts, each of which is provided with at least two rollers;
- the rotating shaft is used for driving the roller to rotate, and the roller is used for carrying the target substrate and driving the target substrate to move in the conveying direction;
- two adjacent rollers located on the same rotating shaft are oppositely disposed, and an included angle between each of the rollers and the rotating shaft is ⁇ , 0 ⁇ ⁇ 90 °.
- the transmission device includes at least one roller set disposed on the rotating shaft, and each of the roller sets includes at least two of the rollers.
- rollers located in the same roller group are parallel to each other.
- Adjacent two of the rollers located in the same group of rollers are symmetrically arranged with a vertical line connecting the centers of the two adjacent rollers.
- the distance between two adjacent rollers in the same roller group is equal.
- the rollers on the two adjacent rotating shafts are symmetrically arranged with a center perpendicular line connecting the centers of the two adjacent rotating shafts.
- the rollers on two adjacent rotating shafts are staggered along the conveying direction.
- the transmission device further includes a driving device connected to the rotating shaft.
- the driving device is a motor.
- two adjacent rollers on the rotating shaft are oppositely arranged, and each of the rollers and the rotating shaft are at a certain angle, which increases the contact area between the target substrate and the roller, and disperses the target substrate and the roller.
- the contact point reduces the risk of stress concentration and improves the yield of the product.
- FIG. 1 is a schematic structural diagram of an existing transmission device
- FIG. 2 is a top view of a transmission device according to a first embodiment of the present application.
- FIG. 3 is a top view of a first rotating shaft in a transmission device according to a first embodiment of the present application
- FIG. 4 is a top view of a first rotating shaft in a transmission device according to a second embodiment of the present application.
- FIG. 5 is a top view of a first rotating shaft in a transmission device according to a third embodiment of the present application.
- FIG. 6 is a mechanical analysis diagram of a first rotating shaft in a transmission device according to a first embodiment of the present application
- FIG. 7 is a top view of a conveying device according to a fourth embodiment of the present application.
- FIG. 2 is a top view of a transmission device according to an embodiment of the present application.
- the conveying device includes a plurality of rotating shafts 10 parallel to each other, and each of the rotating shafts is provided with at least two rollers.
- a driving device (not shown) in the conveying device drives the rotating shaft to rotate, and the rotating shaft drives a roller on the rotating shaft to cause the roller to convey the substrate in the conveying direction under the action of friction.
- the transmission direction is a tangential direction of the rotation direction of the roller, and the tangent point is an intersection point of the roller and the substrate.
- the driving device may be a motor.
- the roller is used for carrying a target substrate and driving the target substrate to move in a conveying direction.
- Two adjacent rollers located on the same rotating shaft are oppositely arranged, and an included angle between each of the rollers and the rotating shaft is ⁇ , 0 ⁇ ⁇ 90 °.
- the transmission device includes four of the rotating shafts, that is, a first rotating shaft 11, a second rotating shaft 12, a third rotating shaft 13, and a fourth rotating shaft 14.
- each of the rotating shafts includes eight rollers.
- the transmission device includes at least one roller set disposed on the rotating shaft, and each of the roller sets includes at least two of the rollers.
- FIG. 3 is a top view of a first rotating shaft in a transmission device according to a first embodiment of the present application.
- the conveying device includes four said roller sets, namely a first roller set 21, a second roller set 22, a third roller set 23, and a fourth roller set 24.
- Each of the roller groups includes two of the rollers. Adjacent two roller groups are symmetrically arranged with the center perpendicular line connecting the centers of the adjacent two roller groups as an axis.
- the first roller group 21 and the second roller group 22 are disposed axially symmetrically with respect to a central axis AA.
- the second roller group 22 and the third roller group 23 are disposed axially symmetrically with respect to a central axis BB.
- the third roller group 23 and the fourth roller group 24 are disposed axially symmetrically with respect to a central axis CC.
- an included angle between each of the rollers and the first rotating shaft 11 is equal.
- two adjacent rollers face in opposite directions.
- the included angle between the first roller 211 and the second roller 212 in the first roller group 21 and the first rotating shaft 11 are equal, but the directions of the first roller 211 and the second roller 212 are opposite.
- Adjacent two of the rollers located in the same group of rollers are symmetrically arranged with a vertical line connecting the centers of the two adjacent rollers. That is, in FIG. 3, the first roller 211 and the second roller 212 are symmetrically disposed with a vertical line connecting the center of the first roller and the second roller as an axis.
- FIG. 4 is a top view of a first rotating shaft in a transmission device according to a second embodiment of the present application.
- the first rotating shaft 11 includes four wheels.
- An included angle between the rollers located in the same roller group and the first rotating shaft 11 is not equal, and two adjacent rollers face in opposite directions.
- the included angle between the first roller 311 and the second roller 312 in the first roller group 31 and the first rotating shaft 11 are not equal, such as the included angle a and the included angle b in FIG. 4, and the first roller 311 and The second roller 312 faces in opposite directions.
- FIG. 5 is a top view of a first rotating shaft in a transmission device according to a third embodiment of the present application.
- the first roller group 41 and the second roller group 42 include four rollers, and the rollers located in the same roller group are parallel to each other.
- the included angles between the rollers located in the same roller group and the first rotating shaft 11 are the same, and their orientations are also the same.
- the distance between two adjacent roller groups may be equal or different.
- the distance between two adjacent rollers located in the same roller group may be equal or different.
- the friction force of the target substrate by the roller is the same as the rotation direction of the roller.
- FIG. 6 is a mechanical analysis diagram of a first rotation shaft in a transmission device according to a first embodiment of the present application.
- the lateral stresses F11 and F21 on the target substrate are forces of the same size and opposite directions That is, the target substrate is subjected to a sum of F12 and F22 in the first roller group.
- the rollers on the two adjacent rotating shafts are symmetrically arranged with the center perpendicular line connecting the centers of the two adjacent rotating shafts as an axis.
- the transmission device includes a first rotating shaft 11, a second rotating shaft 12, a third rotating shaft 13, and a fourth rotating shaft 14.
- Each of the rotating shafts is arranged in parallel in the horizontal direction, and the number of the rollers arranged on each of the rotating shafts is equal, and the rollers on two adjacent rotating shafts correspond one to one.
- the first rotating shaft 11 and the second rotating shaft 12 are symmetrically disposed with the central axis DD of the first rotating shaft 11 and the second rotating shaft 12.
- the first roller group 21 on the first rotating shaft 11 and a central axis DD of the first roller 121 on the second rotating shaft 12 are symmetrically disposed;
- rollers on the second rotating shaft 12 and the rollers on the third rotating shaft 13 are arranged symmetrically, the rollers on the third rotating shaft 13 and the rollers on the fourth rotating shaft 14 Set symmetrically.
- FIG. 7 is a top view of a transmission device according to a fourth embodiment of the present application.
- rollers on the two adjacent rotating shafts are staggered along the conveying direction.
- One of the rollers on a certain rotation shaft is disposed between two rollers on the rotation shaft adjacent thereto.
- the second roller 612 on the second rotating shaft 12 is located on the central axis of the first roller 211 and the second roller 212 corresponding to the first rotating shaft 11.
- the line connecting the contact point between the roller and the target substrate in FIG. 7 is a tortuous curve. Compared with the straight line MM in FIG. 1, the curve length is longer; that is, the application increases the contact between the roller and the target substrate. The area distributes the contact points between the target substrate and the roller, reducing the risk of stress concentration.
- the application also provides a transmission system, which includes the transmission device described above.
- the transmission system may be any equipment or component having a roller transfer function, such as an etching equipment, a photoresist coating setting, a stripping equipment, an alignment layer coating equipment, and the like.
- the transmission device includes a plurality of mutually parallel rotating shafts, each of which is provided with at least two rollers; the rotating shafts are used to drive the rollers to rotate.
- the roller is used for carrying the target substrate and driving the target substrate to move in the conveying direction; wherein two adjacent rollers located on the same rotating shaft are oppositely disposed, and an angle between each of the rollers and the rotating shaft is ⁇ , 0 ⁇ ⁇ 90 °.
- two adjacent rollers on the rotating shaft are oppositely arranged, and each of the rollers and the rotating shaft are at a certain angle, which increases the contact area between the target substrate and the roller, and disperses the target substrate and the roller. The contact point reduces the risk of stress concentration and improves the yield of the product.
Landscapes
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Friction Gearing (AREA)
Abstract
一种传送装置及传输系统,该传送装置包括多个相互平行的转轴(10),每一该转轴(10)上设置有至少两个滚轮;该转轴(10)用于带动该滚轮转动,该滚轮用于承载目标基板、并带动该目标基板沿传送方向移动;位于同一该转轴(10)上的相邻俩滚轮相对设置,每一该滚轮与该转轴(10)的夹角为θ,0<θ<90°。
Description
本申请涉及设备制造领域,特别涉及一传送装置及传输系统。
在显示面板的制造过程中,需要经过多种工艺,例如配向层工艺、摩擦工艺、成盒工艺等,在各工艺之间需要通过传送装置对基板进行传输。
图1为现有传送装置的结构示意图,传送装置包括多个平行设置的转轴10,每一所述转轴10上固定设置有多个滚轮20,沿与转轴10垂直的方向形成多个滚轮列,各滚轮列中的各个滚轮20相互对齐设置。当传送装置工作时,转轴10带动位于其上的滚轮20转动,各个滚轮20在在摩擦力的作用下带动基板沿传送方向传输;其中,传送过程中,目标基板与所述滚轮的接触点的连线为垂直于所述转轴的直线MM。
在基板传送过程中,基板表面的同一位置经滚轮列中全部滚轮的连续摩擦,容易导致基板表面的同一位置处的表面损伤,另外,基板表面的同一位置与滚轮长时间接触,会造成应力集中;而且,现有市场对显示面板轻薄化的要求越来越高,基板均需要进行减薄或镀膜处理,使得产生应力释放,导致基板表面凹凸不平,影响基板的生产良率。
本申请提供一种传送装置及传输系统,以解决基板良率交底的技术问题。
本申请提供一种传送装置,其包括多个相互平行的转轴,每一所述转轴上设置有滚轮组,每一所述滚轮组包括至少两个所述滚轮;
所述转轴用于带动所述滚轮转动,所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动;
其中,位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。
在本申请的传送装置中,相邻俩所述滚轮组以相邻俩所述滚轮组的中心连线的中垂线为轴对称设置。
在本申请的传送装置中,
位于同一所述滚轮组内的所述滚轮相互平行。
在本申请的传送装置中,
位于同一所述滚轮组内的相邻俩所述滚轮以相邻俩所述滚轮的中心连线的中垂线为轴对称设置。
在本申请的传送装置中,
位于同一所述滚轮组内的相邻俩所述滚轮的间距相等。
在本申请的传送装置中,
相邻俩所述转轴上的所述滚轮以相邻俩所述转轴的中心连线的中垂线为轴对称设置。
在本申请的传送装置中,
相邻俩所述转轴上的所述滚轮沿传送方向交错设置。
在本申请的传送装置中,
所述传送装置还包括连接所述转轴的驱动器件。
在本申请的传送装置中,
所述驱动器件为马达。
本申请还提出了一种传输系统,包括传送装置,其中,所述传送装置包括多个相互平行的转轴,每一所述转轴上设置有至少两个滚轮;
所述转轴用于带动所述滚轮转动,所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动;
其中,位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。
在本申请的传送装置中,
所述传送装置包括设置于所述转轴上的至少一滚轮组,每一所述滚轮组包括至少两个所述滚轮。
在本申请的传送装置中,
位于同一所述滚轮组内的所述滚轮相互平行。
在本申请的传送装置中,
位于同一所述滚轮组内的相邻俩所述滚轮以相邻俩所述滚轮的中心连线的中垂线为轴对称设置。
在本申请的传送装置中,
位于同一所述滚轮组内的相邻俩所述滚轮的间距相等。
在本申请的传送装置中,
相邻俩所述转轴上的所述滚轮以相邻俩所述转轴的中心连线的中垂线为轴对称设置。
在本申请的传送装置中,相邻俩所述转轴上的所述滚轮沿传送方向交错设置。
在本申请的传送装置中,
所述传送装置还包括连接所述转轴的驱动器件。
在本申请的传送装置中,
所述驱动器件为马达。
本申请通过将所述转轴上的相邻俩所述滚轮相对设置,且每一所述滚轮与所述转轴呈一定夹角,增加了目标基板与滚轮的接触面积,分散了目标基板与滚轮的接触点,降低了应力集中的风险,提高了产品的良率。
为了更清楚地说明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单介绍,显而易见地,下面描述中的附图仅仅是发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1为现有传送装置的结构示意图;
图2为本申请实施例一传送装置的俯视图;
图3为本申请实施例一传送装置中第一转轴的俯视图;
图4为本申请实施例二传送装置中第一转轴的俯视图;
图5为本申请实施例三传送装置中第一转轴的俯视图;
图6为本申请实施例一传送装置中第一转轴力学分析图;
图7为本申请实施例四传送装置的俯视图。
以下各实施例的说明是参考附加的图示,用以例示本申请可用以实施的特定实施例。本申请所提到的方向用语,例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明及理解本申请,而非用以限制本申请。在图中,结构相似的单元是用以相同标号表示。
请参阅图2,图2为本申请实施例一传送装置的俯视图。
所述传送装置包括多个相互平行的转轴10,每一所述转轴上设置有至少两个滚轮。
所述传送装置中的驱动器件(未画出)带动所述转轴转动,转轴带动其上的滚轮转动,以使滚轮在摩擦力的作用下沿传送方向传输基板。所述传输方向为所述滚轮转动方向的切向,切点为所述滚轮与所述基板的交点。
在一种实施例中,所述驱动器件可以为马达。
所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动。位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。
在本实施例中,所述传送装置包括四个所述转轴,即第一转轴11、第二转轴12、第三转轴13及第四转轴14。每一所述转轴包括八个滚轮为例进行说明。
所述传送装置包括设置于所述转轴上的至少一滚轮组,每一所述滚轮组包括至少两个所述滚轮。
请参阅图3,图3为本申请实施例一传送装置中第一转轴的俯视图。
所述传送装置包括四个所述滚轮组,即第一滚轮组21、第二滚轮组22、第三滚轮组23及第四滚轮组24。每一所述滚轮组包括两个所述滚轮。相邻俩所述滚轮组以相邻俩所述滚轮组的中心连线的中垂线为轴呈对称设置。
所述第一滚轮组21与所述第二滚轮组22以中心轴线AA呈轴对称设置。所述第二滚轮组22与所述第三滚轮组23以中心轴线BB呈轴对称设置。所述第三滚轮组23与所述第四滚轮组24以中心轴线CC呈轴对称设置。
在一种实施例中,每一所述滚轮与所述第一转轴11的夹角相等。
在一种实施例中,相邻俩所述滚轮的朝向相反。
第一滚轮组21中的第一滚轮211和第二滚轮212与所述第一转轴11的夹角相等,但所述第一滚轮211与所述第二滚轮212的朝向相反。
位于同一所述滚轮组内的相邻俩所述滚轮以相邻俩所述滚轮的中心连线的中垂线为轴对称设置。即图3中所述第一滚轮211与所述第二滚轮212以所述第一滚轮与所述第二滚轮中心连线的中垂线为轴对称设置。
请参阅图4,图4为本申请实施例二传送装置中第一转轴的俯视图。
所述第一转轴11包括四个所述滚轮组。
位于同一所述滚轮组内的所述滚轮与所述第一转轴11的夹角不相等,且相邻俩所述滚轮的朝向相反。第一滚轮组31中的第一滚轮311和第二滚轮312与所述第一转轴11的夹角不相等,如图4中的夹角a与夹角b,且所述第一滚轮311与所述第二滚轮312的朝向相反。
请参阅图5,图5为本申请实施例三传送装置中第一转轴的俯视图。
所述第一滚轮组41及所述第二滚轮组42包括四个所述滚轮,且位于同一所述滚轮组内的所述滚轮相互平行。位于同一所述滚轮组内的所述滚轮与所述第一转轴11的夹角相等,且朝向也相同。
在实施例一至实施例三中,相邻俩所述滚轮组的间距可以相等或不等。位于同一所述滚轮组内的相邻俩所述滚轮的间距可以相等或不等。
由于所述滚轮与所述目标基板呈一定角度,根据力学分析,目标基板受到所述滚轮的摩擦力与所述滚轮的旋转方向相同。
请参阅图6,图6为本申请实施例一传送装置中第一转轴力学分析图。
由于所述第一滚轮组中的两个滚轮受到的摩擦力为F1和F2,其中F1和F2以中心轴线AA对称,因此是目标基板受到的横向应力F11和F21为大小相同、方向相反的力,即所述目标基板受到所述第一滚轮组中的合力为F12和F22的和。
对于实施例二或实施例三,由于相邻俩所述滚轮组对称设计,因此横向应力相互之间将会彼此抵消。
在一种实施例中,相邻俩所述转轴上的所述滚轮以相邻俩所述转轴的中心连线的中垂线为轴呈对称设置。
请参阅图2,所述传送装置包括第一转轴11、第二转轴12、第三转轴13及第四转轴14。各转轴沿横向平行排布,每一所述转轴上的所设置的滚轮数量相等,且相邻两所述转轴上的滚轮一一对应。
所述第一转轴11与所述第二转轴12以所述第一转轴11与所述第二转轴12的中心轴线DD呈对称设置。
所述第一转轴11上的第一滚轮组21与所述第二转轴12上的第一滚轮121一中心轴线DD呈对称设置;
所述第二转轴12上的所述滚轮与所述第三转轴13上的所述滚轮呈对称设置,所述第三转轴13上的所述滚轮与所述第四转轴14上的所述滚轮呈对称设置。
请参阅图7,图7为本申请实施例四传送装置的俯视图。
相邻俩所述转轴上的所述滚轮沿传送方向交错设置。
某一所述转轴上的一所述滚轮设置于与之相邻的所述转轴上的两个滚轮之间。
在一种实施例中,所述第二转轴12上的第二滚轮612位于第一转轴11上对应的第一滚轮211及第二滚轮212的中轴线上。
图7中所述滚轮与所述目标基板的接触点连线为曲折的曲线,与图1中的直线MM相比,曲线长度更长;即本申请增大了所述滚轮与目标基板的接触面积,分散了目标基板与滚轮的接触点,降低了应力集中的风险。
本申请还提供一种传输系统,所述传输系统包括上述所述的传送装置。所述传输系统可以为刻蚀设备、光刻胶涂覆设置、剥离设备、配向层涂覆设备等任何具有滚轮传送功能的设备或部件。
本申请提出了一种传送装置及传输系统,所述传送装置包括多个相互平行的转轴,每一所述转轴上设置有至少两个滚轮;所述转轴用于带动所述滚轮转动,所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动;其中,位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。本申请通过将所述转轴上的相邻俩所述滚轮相对设置,且每一所述滚轮与所述转轴呈一定夹角,增加了目标基板与滚轮的接触面积,分散了目标基板与滚轮的接触点,降低了应力集中的风险,提高了产品的良率。
综上所述,虽然本申请已以优选实施例揭露如上,但上述优选实施例并非用以限制本申请,本领域的普通技术人员,在不脱离本申请的精神和范围内,均可作各种更动与润饰,因此本申请的保护范围以权利要求界定的范围为准。
Claims (18)
- 一种传送装置,其包括多个相互平行的转轴,每一所述转轴上设置有滚轮组,每一所述滚轮组包括至少两个所述滚轮;所述转轴用于带动所述滚轮转动,所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动;其中,位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。
- 根据权利要求1所述的传送装置,其中,相邻俩所述滚轮组以相邻俩所述滚轮组的中心连线的中垂线为轴对称设置。
- 根据权利要求2所述的传送装置,其中,位于同一所述滚轮组内的所述滚轮相互平行。
- 根据权利要求2所述的传送装置,其中,位于同一所述滚轮组内的相邻俩所述滚轮以相邻俩所述滚轮的中心连线的中垂线为轴对称设置。
- 根据权利要求4所述的传送装置,其中,位于同一所述滚轮组内的相邻俩所述滚轮的间距相等。
- 根据权利要求1所述的传送装置,其中,相邻俩所述转轴上的所述滚轮以相邻俩所述转轴的中心连线的中垂线为轴对称设置。
- 根据权利要求1所述的传送装置,其中,相邻俩所述转轴上的所述滚轮沿传送方向交错设置。
- 根据权利要求1所述的传送装置,其中,所述传送装置还包括连接所述转轴的驱动器件。
- 根据权利要求8所述的传送装置,其中,所述驱动器件为马达。
- 一种传输系统,包括传送装置,其中,所述传送装置包括多个相互平行的转轴,每一所述转轴上设置有至少两个滚轮;所述转轴用于带动所述滚轮转动,所述滚轮用于承载目标基板、并带动所述目标基板沿传送方向移动;其中,位于同一所述转轴上的相邻俩所述滚轮相对设置,每一所述滚轮与所述转轴的夹角为θ,0<θ<90°。
- 根据权利要求10所述的传送装置,其中,所述传送装置包括设置于所述转轴上的至少一滚轮组,每一所述滚轮组包括至少两个所述滚轮。
- 根据权利要求11所述的传送装置,其中,位于同一所述滚轮组内的所述滚轮相互平行。
- 根据权利要求11所述的传送装置,其中,位于同一所述滚轮组内的相邻俩所述滚轮以相邻俩所述滚轮的中心连线的中垂线为轴对称设置。
- 根据权利要求13所述的传送装置,其中,位于同一所述滚轮组内的相邻俩所述滚轮的间距相等。
- 根据权利要求10所述的传送装置,其中,相邻俩所述转轴上的所述滚轮以相邻俩所述转轴的中心连线的中垂线为轴对称设置。
- 根据权利要求10所述的传送装置,其中,相邻俩所述转轴上的所述滚轮沿传送方向交错设置。
- 根据权利要求10所述的传送装置,其中,所述传送装置还包括连接所述转轴的驱动器件。
- 根据权利要求17所述的传送装置,其中,所述驱动器件为马达。
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| CN108217200A (zh) * | 2018-01-16 | 2018-06-29 | 深圳市华星光电技术有限公司 | 基板传送装置 |
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