WO2020004838A1

WO2020004838A1 - Vibration-resistant white light interference microscope and method for removing vibration effect thereof

Info

Publication number: WO2020004838A1
Application number: PCT/KR2019/007143
Authority: WO
Inventors: 이효진; 안승엽
Original assignee: 케이맥(주)
Priority date: 2018-06-25
Filing date: 2019-06-13
Publication date: 2020-01-02
Also published as: CN110869696B; CN110869696A; KR102019326B1

Abstract

The present invention relates to a vibration-resistant white light interference microscope, and a method for removing a vibration effect thereof. A vibration-resistant white light interference microscope according to one embodiment of the present invention, which includes: a light source unit configured to simultaneously generate a relatively broad spectrum of white light and a relatively narrow spectrum of laser light; a lens unit; and a scan drive unit configured to drive the lens unit, comprises: an interference pattern generating unit configured to make an interference pattern of the white light and an interference pattern of the laser light; an illumination imaging microscope optical unit configured to separate the interference pattern of the white light and the interference pattern of the laser light; a trigger generating unit comprising a photodiode configured to measure the interference pattern of the laser light and an FPGA controller configured to generate a trigger by analyzing the interference pattern of the laser light measured by the photodiode; a high speed camera configured to measure the interference pattern of the white light; and a controller configured to calculate and process measurement information about the interference pattern of the white light measured by the high speed camera.

Description

Vibration-resistant white light interference microscope and its vibration effect removal method

The present invention relates to a vibration resistant white light interference microscope and a method for removing the vibration effect thereof.

The white light interference microscope uses a semi-transparent mirror to divide the light path into two directions of the measurement sample and the reference mirror, and accordingly, the white light interference microscope generates light between the measurement light that is reflected back from the measurement surface and the reference light that is reflected back to the reference mirror. It is an apparatus which measures the level difference on the surface of a measurement object in a relatively quick time using an interference fringe.

Specifically, the white light interference microscope overcomes the disadvantages of contact point measurement methods such as stylus without being affected by the measurement error due to 2π ambiguity, which is a disadvantage of Phase Shift Interferometer (PSI). Therefore, it has the advantage of the non-contact area measuring method, and thus can measure the height of many points at one time.

In addition, the white light interference microscope is a high-precision measurement method, the vibration generated from the equipment or floor affects the optical path difference (OPD) during the z-axis scan is a major cause of measurement error. In this case, in measuring the fine vibration degree nano unit, the measurement repeatability is affected.

In particular, in the mass production line site, not only the floor vibration transmitted by the peripheral device, but also the vibration generated in the surrounding motor device such as an air conditioner and transmitted in the form of sound waves acts severely. Accordingly, even when using expensive equipment such as an isolator (Isolator) it is difficult to block the vibration, there is a problem that excessive cost occurs.

The conventional white light interference microscope sends a triggering signal to the camera every time the PZT scanner moves a certain distance (eg, 72 nm) along the z-axis to obtain an image. PZT scanners are expensive components and provide very precise control of the travel distance. However, when there is vibration, even if the PZT scanner has moved a certain distance in the z-axis direction, there is a high probability that the object has moved at a different distance from the objective lens and the sample.

In particular, when mass-producing equipment is attached to the gantry (Gantry) to measure the movement of a large area of the sample in multiple positions, the movement of the gantry and the movement of the stage supporting the sample is independent.

As such, even if the movement of the PZT scanner in the z-axis of the measuring instrument attached to the gantry is precisely controlled, the distance between the objective lens and the measuring sample of the measuring instrument may vary irregularly due to vibration.

In this case, the white light interference microscope acquires an image whenever the distance between the measurement light reciprocating the distance between the objective lens and the sample and the reference light reciprocating between the objective lens and the reflector attached to the objective lens changes at a predetermined interval. Analyze

Therefore, when the image is acquired at a point outside the interval such as the optical path difference between the reference light and the measurement light due to the vibration, accurate distance analysis is impossible, and when the vibration is severe, the measurement itself is impossible.

Until recently, a number of methods have been proposed to solve this problem, but the complexity of the device configuration and the compensation delay have made it impossible to compensate above a certain frequency.

As a conventional technology related to the present invention, there is a Republic of Korea Patent Publication No. 10-2008-0051969 (2008.06.11. Publication Date), the prior art discloses the technical content of the white light interferometer and shape measurement method .

The present invention adds a high coherence laser interferometer to the optical path of a conventional white light interference microscope to provide a trigger to the camera whenever the difference in the optical path of the reference light and the measurement light is changed by a certain interval irrespective of the vibration during the scanning process. It is an object to provide a white light interference microscope.

In addition, an object of the present invention is to provide a vibration effect removal method of the vibration-resistant white light interference microscope.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention, which are not mentioned above, can be understood by the following description, and more clearly by the embodiments of the present invention. Also, it will be readily appreciated that the objects and advantages of the present invention may be realized by the means and combinations thereof indicated in the claims.

In order to achieve the above object, the vibration-resistant white light interference microscope according to an embodiment of the present invention comprises a light source unit for generating a relatively broad spectrum of white light and a relatively narrow spectrum of laser light at the same time; An interference fringe generation unit including a lens unit and a scan driver for driving the lens unit, the interference fringe generation unit making an interference fringe of the white light and an interference fringe of the laser light; An illumination imaging microscope optical unit separating the interference fringes of the white light and the interference fringes of the laser light; A trigger generator comprising a photodiode for measuring an interference fringe of the laser light and an FPGA controller for generating a trigger by analyzing the interference fringe of the laser light measured by the photodiode; A high speed camera measuring an interference fringe of the white light; And a controller configured to calculate and process the interference fringe measurement information of the white light measured by the high speed camera.

The light source unit includes a white light generator that generates the white light, and a laser light generator that generates the laser light.

The white light generator includes at least one white lamp, and the laser light generator includes at least one laser diode.

In addition, the laser light generated by the laser light generator may have a higher coherence and relatively brighter brightness than white light generated by the white light generator.

The illumination imaging microscope optical unit may image the interference fringes of the separated white light and the interference fringes of the laser light into the high speed camera and the photodiode.

The illumination imaging microscope optical unit may include a plurality of beam splitters, and the plurality of beam splitters may include a first beam splitter disposed close to the light source unit and a second beam splitter disposed close to the photodiode. do.

The apparatus may further include a first tube lens positioned between the light source unit and the first beam splitter, and a second tube lens provided in the illumination imaging microscope optical system and positioned between the first beam splitter and the second beam splitter. do.

The lens unit may include at least one convex lens, a reference mirror, and at least one of a translucent mirror, and the scan driver may include a PZT piezoelectric element that moves the lens unit by applying an external voltage.

Vibration effect removal method of the vibration-resistant white light interference microscope according to another embodiment of the present invention (a) generates a white light and a laser light using the light source unit, the interference pattern of the white light and the laser using the interference pattern generating unit Making an interference fringe of light, and separating the interference fringe of the white light and the interference fringe of the laser light using the illumination imaging microscope optics, wherein the white light is formed on the high speed camera and the laser light is formed on the photodiode. (b) analyzing the interference fringes of the laser light measured by the photodiode in the FPGA controller, wherein the FPGA controller provides a trigger to the high speed camera to remove vibration, and (c) the trigger is provided with the Measuring an interference fringe of the white light in a high speed camera The.

At this time, before the step (a), (a-1) further comprises the step of measuring the vibration of the head and the measurement object of the white light interference microscope, and setting the driving speed of the scan driver and the shooting speed of the high-speed camera In the step (a-1), the vibration of the head of the white light interference microscope and the measurement target is measured using a vibrometer, and the analysis is performed to obtain the maximum speed of the vibration, and faster than the maximum speed of the vibration. And setting the driving speed of the scan driver and the photographing speed of the high speed camera.

According to the present invention, a high coherence laser interferometer is added to the optical path of a conventional white light interference microscope to provide a trigger to the camera whenever the difference in the optical path between the reference light and the measurement light is changed by a certain interval irrespective of the vibration during the scanning process. The vibration effect of the white light interference microscope can be eliminated. According to this, since the trigger is observed by observing the actual distance, the specification of the scan driver does not have to be high, and thus, an excessively expensive cost is not provided, thereby providing an economically advantageous effect.

In addition to the effects described above, the specific effects of the present invention will be described together with the following description of specifics for carrying out the invention.

1 is a conceptual diagram schematically showing a vibration-resistant white light interference microscope according to an embodiment of the present invention.

FIG. 2 is a graph illustrating a high coherence interference signal and a camera trigger generation point in a case where there is no vibration (a) and when there is vibration (b) in a vibration-resistant white light interference microscope according to an embodiment of the present invention. .

Figure 3 is a high coherence interference signal when vibration in the vibration-resistant white light interference microscope according to an embodiment of the present invention: Vp = 13μm / s, the interference waveform when (Class C) vibration of 4Hz 498nm amplitude and The graph shows the phase by way of example.

4 is a high coherence interference signal when the vibration in the vibration-resistant white light interference microscope according to an embodiment of the present invention: Vp = 13μm / s, 4Hz 995nm amplitude (twice the Class C) when the vibration This graph shows an example of the interference waveform and its phase.

5 is a high coherence interference signal when the vibration in the vibration-resistant white light interference microscope according to an embodiment of the present invention: Vp = 26μm / s, 4Hz 995nm amplitude (twice the Class C) when the vibration This graph shows an example of the interference waveform and its phase.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

In order to clearly describe the present invention, parts irrelevant to the description are omitted, and like reference numerals designate like elements throughout the specification. In addition, some embodiments of the invention will be described in detail with reference to exemplary drawings. In adding reference numerals to components of each drawing, the same components may have the same reference numerals as much as possible even though they are shown in different drawings. In addition, in describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description may be omitted.

In describing the components of the present invention, terms such as first, second, A, B, (a), and (b) can be used. These terms are only to distinguish the components from other components, and the terms are not limited in nature, order, order or number of the components. If a component is described as being "connected", "coupled" or "connected" to another component, that component may be directly connected to or connected to that other component, but between components It is to be understood that the elements may be "interposed" or each component may be "connected", "coupled" or "connected" through other components.

In addition, in the implementation of the present invention may be described by subdividing the components for convenience of description, these components may be implemented in one device or module, or one component is a plurality of devices or modules It can also be implemented separately.

The white light interference microscope overcomes the disadvantages of contact point measurement methods, such as a stylus, without being affected by the measurement error due to 2π ambiguity, which is a disadvantage of the phase shift interferometer (PSI). Area) It has the merit of measuring method.

However, the white light interference microscope is a high-precision measurement method, and when a vibration effect is given through the equipment or the floor, there is a problem of measuring error due to the influence on the optical path difference (OPD) during the z-axis scan. In other words, the measurement of minute vibration units may affect measurement repeatability.

The present invention is designed to solve this problem, and adds a high coherence laser interferometer to the light path of a conventional white light interference microscope. This provides a trigger to the camera whenever the difference in the optical path between the reference and measured light changes at any interval, regardless of vibration during the scan process. As a result, the vibration influence of the white light interference microscope can be eliminated.

Hereinafter, a vibration-resistant white light interference microscope and a method of removing the vibration influence thereof according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 1, the vibration-resistant white light interference microscope 100 according to the embodiment of the present invention includes a light source unit 110, an illumination imaging microscope optical unit 130, an interference fringe generating unit 150, and a trigger generating unit 170. , And the controller 190.

The light source unit 110 includes a white light generator 111 and a laser light generator 113.

The white light generator 111 refers to a white lamp for measuring and generates light of a broad spectrum.

The laser light generator 113 may include a laser diode, which generates light having a relatively narrow spectrum compared to the white light generator 111.

In addition, the laser light generator 113 generates light having high coherence and bright brightness.

Unlike the white light for measurement, laser light is light used for reference confirmation.

The illumination imaging microscope optical unit 130 separates the interference pattern of the white light generated by the white light generator 111 and the interference pattern of the laser light generated by the laser light generator 113.

In addition, the illumination imaging microscope optical unit 130 may separate the interference fringes of the white light and the interference fringes of the laser light to form an image on the sensors of the high speed camera 180 and the photodiode 171, respectively.

The illumination imaging microscope optical unit 130 includes a plurality of

beam splitters

131 and 133. For convenience of explanation, the one arranged on the light source unit 110 side is called the first beam splitter 131, and the one disposed on the photodiode 171 side is called the second beam splitter 133.

The first and

second beam splitters

131 and 133 may be semi-transparent mirrors that reflect a part of light and transmit a part of the remaining light.

The interference fringe generator 150 serves to make an interference fringe of white light and an interference fringe of a laser beam.

Specifically, the interference fringe generating unit 150 includes a lens unit 151, a scan driver 153, and a PZT controller 155.

The lens unit 151 refers to an optical system including at least one of a convex lens, a reference mirror, and a translucent mirror.

The lens unit 151 may use a well-known Mirau interferometer or a Michaelson interferometer.

For example, the case where the lens unit 151 is a Mirae interferometer will be described.

As shown in FIG. 1, the convex lens is disposed at the top and focuses on the reference mirror located at the center, and the light passes the sample (ie, the measurement object S) past the translucent mirror disposed at the bottom. You are beaten and come back. Here, interference occurs due to the difference between the optical path reflected by the reference mirror and the optical path returned to the sample. The result is an interference fringe.

The scan driver 153 refers to a piezoelectric element that generates a voltage by receiving a force from the outside or generates a movement by receiving a voltage. Specifically, the scan driver 153 is used as a driving element that receives a voltage.

The scan driver 153 is used to precisely move the lens unit 151.

The PZT controller 155 operates the scan driver 153 by receiving a command signal from a controller (eg, a PC) 190.

Meanwhile, at least one

tube lens

121 and 123 may be provided in the light source unit 110 and the illumination imaging microscope optical unit 130.

The tube lens 121 positioned on the light source unit 110 side is referred to as a first tube lens, and the tube lens 123 positioned on the illumination imaging microscope optical unit 130 side is referred to as a second tube lens. These

tube lenses

121 and 123 are lens members, and light emitted from one point may be made into parallel light, and light passing in parallel may be manufactured to be collected into one point.

For example, the first tube lens 121 serves to make the light diverging at one point into parallel light, and the second tube lens 123 may serve to collect the light passing in parallel at one point.

The trigger generating unit 170 may generate a trigger when analyzing the interference fringes of the laser light and confirming an accurate Z-axis value to reach a position requiring measurement.

As a specific example, the trigger generator 170 includes a photo diode 171 and an FPGA controller 173.

The photodiode 171 measures the interference fringe of the laser light. For example, the photodiode 171 may use a device having tens of thousands to tens of millions of fps as a single pixel device.

The FPGA controller 173 analyzes the interference fringes of the laser light measured from the photodiode 171 to generate a trigger.

The high speed camera 180 measures an interference fringe of white light. For example, the high speed camera 180 may have tens to millions of pixels, and thus may measure a large area of white light interference fringes at once.

The controller 190 is an apparatus for calculating and processing image processing and data, and may use a conventionally known PC or the like.

Hereinafter, a method of removing vibration influences of a vibration-resistant white light interference microscope according to an embodiment of the present invention will be described. In the following description, reference is made to the reference numerals of FIG. 1 for the components of the apparatus.

Vibration-resistant white light interference microscope 100 adds a high coherence interferometer using a laser diode, that is, the laser light generator 113 and the photodiode 171 to the optical path of a conventional white light interference microscope. Whenever the optical path difference between the reference light and the measurement light changes by a predetermined interval irrespective of the vibration in the scanning process, a trigger is provided to the high speed camera 180 to remove the vibration influence.

Vibration Measurement and PZT Drive Speed Setting Step

First, the vibration of the head of the white light interference microscope and the measurement target, that is, the sample S, is measured using a vibrometer, and the measured vibration is analyzed to obtain the maximum speed of the vibration. Then, the driving speed of the scan driver 153 is set faster than the maximum speed of the vibration. The FPS of the high speed camera 180 is set according to the driving speed of the scan driver 153. In this case, the driving speed of the scan driver 153 and the high speed camera 180 have a proportional relationship. The measurement is performed at the driving speed of the set scan driver 153 and the photographing speed of the high speed camera 180. Thereafter, the scan driver 153 may move at a constant speed.

White light and laser light imaging stage

In the light source unit 110, white light and laser light are generated. The white light and the laser light are converted into parallel light via the first tube lens 121. The white light and the laser light, which have become parallel light, strike the first beam splitter 131 and are partially transmitted and disappeared, while the other is reflected and bent in the sample direction.

Subsequently, the white light and the laser light are focused past the convex lens in the lens unit 151, and the focusing position is formed in the reference mirror.

The white light and the laser light hit a translucent mirror, partly toward the reference mirror and partly toward the sample S. The white light and the laser light directed toward the reference mirror and the sample hit the reference mirror and the sample and are reflected to the translucent mirror.

At this time, the white light and the laser light reflected by hitting the reference mirror hit the translucent mirror, part of which is lost after transmission, and part of which is reflected and proceeds in the direction of the high speed camera 180 and the photodiode 171.

In addition, the white light and the laser light reflected by the sample hit the semi-transparent mirror, part of which is reflected and lost, and part of the white light and the laser light that are transmitted through the high speed camera 180 and the photodiode 171.

Subsequently, the light traveling toward the high speed camera 180 and the photodiode 171 is combined to cause interference. In this case, the intensity of the light may vary depending on the light path difference. The light causing the interference passes through the convex lens inside the lens unit 151 and is converted into parallel light.

On the other hand, the light converted into parallel light hits the first beam splitter 131 of the illumination imaging microscope optical unit 130, part of which is reflected and disappeared, and part of the light is transmitted through the high speed camera 180 and the photodiode 171. Proceeds in the direction.

The white light and the laser light transmitted through the first beam splitter 131 are focused through the second tube lens 123, and the focusing position is formed in the sensors of the high speed camera 180 and the photodiode 171.

The white light and laser light focused past the second tube lens 123 hit the second beam splitter 133 of the illumination imaging microscope optics 130, some of which are reflected and directed towards the photodiode 171, some of which are transmitted. Toward the high speed camera 180.

As described above, the white light and the laser light are formed only on the sensors of the high speed camera 180 and the photodiode 171 by the second tube lens 123, respectively.

Laser light interference pattern analysis step

The interference fringe of the laser light measured by the photodiode 171 is analyzed by the FPGA controller 173.

When the phase of the interference fringe of the laser beam corresponds to nπ / 2, the FPGA controller 173 gives a trigger to the high speed camera 180. Vibration is eliminated by triggering nπ / 2 (n = 0, 1, 2, 3, 4, 5,…)

White light interference fringe measurement

The triggered high speed camera 180 measures the white light interference fringe at that moment.

The measured white light interference fringe is accumulated over the entire scan period.

The controller 190 may process and analyze pixel-specific information of the high speed camera 180. In this case, Fourier Domain Analysis (FDA) may be used for the analysis. FDA analyzes can provide height-by-pixel height information and step information from pixel-by-pixel heights.

On the other hand, Figures 2 to 5 are graphs for explaining the vibration effect removal method of the vibration-resistant white light interference microscope according to an embodiment of the present invention.

The photodiode output signal of a high coherence interferometer using a laser diode is

By the way

Since θin is the angle of the reference light incident on the sample, it is approximated as follows.

If there is vibration, z has the following values.

And if

If is close to a constant, the photodiode output signal of a high coherence interferometer using a laser diode when there is finally vibration is as follows, and the vibrations are shown in (a) and (b) of FIG. do.

In the high coherence interferometer output signal, 1 fringe occurs whenever the optical path difference between the reference light and the measured light becomes nλ _ref , so it appears whenever the value of actual z (t) changes by λ _ref / 2 regardless of vibration. do.

For example, when λ _ref = 520 nm is used, if a trigger is given at every π / 2 interval of fringe as shown in FIG. 2, about λ _ref / 8 (about 65 nm when λ _ref = 520 nm) is independent of vibration. Trigger at intervals. Whenever this trigger is generated, a low coherence interference fringe can be measured. And when looking for trigger positions in interfering signals, GPUs or FPGAs can be used to enable real-time processing.

Obtaining one signal per λ _ref / 8 yields a sufficient number of low coherence interferences by Nyquist theory because the length of the center wavelength of the low coherence interference signal (about 570 nm) and the wavelength of the high coherence interference signal are similar. You get a signal.

When the measurement is performed by the method described above, an image can be obtained whenever a constant change is made between the reference light and the measurement light irrespective of vibration, thereby making accurate measurement. If the sign of the rate of change of the optical path difference between the reference light and the measurement light is changed by a very large vibration, it passes again where it has already passed. This is a problem because the phase value of the high coherence interference signal cannot be matched one-to-one with I (z (t)), so that an accurate z (t) cannot be obtained.

In the phase of the interference waveform shown in FIG. 3, there is a section that almost stops the phase increase, but does not affect the finding of the trigger point because it does not proceed in the reverse direction (in this case, the decreasing direction).

Near this point, the distance change between the objective lens and the specimen S (see FIG. 1) due to the movement and vibration of the scan driver 153 (see FIG. 1) is canceled and z (t) hardly changes so that no trigger signal is generated. .

In the case where the scan driver 153 (see FIG. 1) and the moving direction of vibration are the same, z (t) increases at a high speed and trigger generation is accelerated. In contrast, the maximum frame per second (FPS) of the high speed camera 180 (refer to FIG. 1) used should be at least twice that of the FPS when there is no vibration.

Looking at the phase of the interference waveform shown in FIG. 4, there is a section in which the phase change is changed. In this section, the circuit proceeds in the reverse direction (in this case, the decreasing direction), and during the reverse direction, phases of 0, π / 2, π, and 3π / 2 appear to generate a trigger.

These points correspond to the distance between the reference light and the measured light that were acquired during the previous quick trigger, and are repeated. When the camera moves forward, the camera takes another shot and takes three shots in the same area.

In the reverse movement section, the direction in which the scan driving unit 153 (see FIG. 1 is moved) and the distance change direction between the sample (S, FIG. 1) due to vibration are opposite and the movement speed due to vibration is faster. The picture is taken again at the distance between the light and the measured light.

Subsequently, when the direction of movement due to vibration is changed, the scan driving unit 153 (see FIG. 1) and the direction of vibration are the same, and z (t) is increased at a high speed to accelerate the trigger generation. Shoot again to proceed.

As described above, when the change in z (t) due to vibration is larger than the change due to the movement of the scan driver 153 (see FIG. 1), measurement is impossible. This expression represents the case where the time differential value of the interference signal phase has a negative value and can be expressed by the following equation.

When, the speed becomes

Where Vp> 0 and dt> 0

, The rate of change of z (t) is reversed, resulting in reverse progression.

By the way

Always,

It becomes the situation of. therefore

The condition must be satisfied so that the backward progress problem does not occur. If the peak speed of the vibration is faster than the speed of the scan driver 153 (refer to FIG. 1), the vibration may not be removed and measured.

Also,

If the condition is satisfied, the measurement can be performed even at the higher vibration.

5,

It can be seen that the backward progress does not occur by satisfying the condition of.

If Vp≥50um / s, it is possible to measure Class B at 4Hz and Class A at 8Hz or more, which is the case when there is no isolator in the general production line. Therefore, it can be seen that the application of this method allows accurate measurements using white light interference microscopes on all production lines.

As described above, according to the configuration and operation of the present invention, by adding a high coherence laser interferometer to the optical path of the existing white light interference microscope, whenever the optical path difference between the reference light and the measurement light changes at regular intervals regardless of the vibration during the scanning process A trigger can be provided to the camera to eliminate the vibration effects of a vibration-resistant white light interference microscope. According to this, since the actual distance is triggered and triggered, the specification of the PZT scanner does not have to be high, and it does not cost excessively, thus providing an economically advantageous effect.

Although the present invention has been described with reference to the drawings exemplified as above, the present invention is not limited to the embodiments and drawings disclosed herein, and various modifications may be made by those skilled in the art within the scope of the technical idea of the present invention. It is obvious that modifications can be made. In addition, even if the above described embodiments of the present invention while not explicitly described and described the effect of the effect of the configuration of the present invention, it is obvious that the effect predictable by the configuration is also to be recognized.

Claims

A light source unit which simultaneously generates a relatively broad spectrum of white light and a relatively narrow spectrum of laser light;

An interference fringe generation unit including a lens unit and a scan driver for driving the lens unit, the interference fringe generation unit making an interference fringe of the white light and an interference fringe of the laser light;

An illumination imaging microscope optical unit separating the interference fringes of the white light and the interference fringes of the laser light;

A trigger generator comprising a photodiode for measuring an interference fringe of the laser light and an FPGA controller for generating a trigger by analyzing the interference fringe of the laser light measured by the photodiode;

A high speed camera measuring an interference fringe of the white light; And

A control unit for calculating and processing interference fringe measurement information of the white light measured by the high speed camera;

Vibration-resistant white light interference microscope comprising a.
The method of claim 1,

The light source unit,

A white light generator for generating the white light;

Including a laser light generating unit for generating the laser light

Vibration-resistant white light interference microscope.
The method of claim 2,

The white light generator includes at least one white lamp,

The laser light generator includes at least one laser diode

Vibration-resistant white light interference microscope.
The method of claim 2,

The laser light generated by the laser light generator has a higher coherence and a relatively brighter brightness than the white light generated by the white light generator.

Vibration-resistant white light interference microscope.
The method of claim 1,

The illumination imaging microscope optical unit,

Imaging the separated interference pattern of the white light and the interference pattern of the laser light on the high speed camera and the photodiode.

Vibration-resistant white light interference microscope.
The method of claim 5,

The illumination imaging microscope optics comprises a plurality of beam splitters,

The plurality of beam splitters,

A first beam splitter disposed close to the light source unit;

A second beam splitter disposed proximate the photodiode

Vibration-resistant white light interference microscope.
The method of claim 6,

A first tube lens positioned between the light source unit and the first beam splitter;

And a second tube lens provided in the illumination imaging microscope optical system and positioned between the first beam splitter and the second beam splitter.

Vibration-resistant white light interference microscope.
The method of claim 1,

The lens unit,

At least one convex lens, at least one of a reference mirror and a translucent mirror,

The scan driver,

It includes a piezoelectric element for moving the lens unit receives an external voltage

Vibration-resistant white light interference microscope.
As a method for removing the vibration effect of the vibration-resistant white light interference microscope of claim 1,

(a) generating white light and laser light using the light source unit, making an interference pattern of the white light and an interference pattern of the laser light using the interference pattern generating unit, and using the illumination imaging microscope optical unit And separating the interference fringes of the laser light, wherein the white light is formed in the high speed camera and the laser light is formed in the photodiode.

(b) analyzing the interference fringes of the laser light measured by the photodiode in the FPGA controller, the FPGA controller providing a trigger to the high speed camera to remove vibration; And

(c) measuring an interference fringe of the white light in the high speed camera provided with the trigger;

Vibration effect removal method of the vibration-resistant white light interference microscope comprising a.
The method of claim 9,

Before step (a) above,

(a-1) measuring vibrations of the head of the white light interference microscope and the measurement object, and setting a driving speed of the scan driver and a shooting speed of the high speed camera,

In the step (a-1), the vibration of the head of the white light interference microscope and the measurement target is measured using a vibrometer, and the measured vibration is obtained to obtain the maximum speed of the vibration;

Setting a driving speed of the scan driver and a shooting speed of the high speed camera faster than a maximum speed of vibration;

Vibration resistance elimination method of white light interference microscope.