WO2023121094A1

WO2023121094A1 - Three-dimensional shape measurement device for acquiring multiple pieces of image information

Info

Publication number: WO2023121094A1
Application number: PCT/KR2022/020107
Authority: WO
Inventors: 유준호; 정희원; 장진; 노진태
Original assignee: ㈜넥센서
Priority date: 2021-12-23
Filing date: 2022-12-12
Publication date: 2023-06-29

Abstract

The present invention relates to a three-dimensional shape measurement device for acquiring multiple pieces of image information during a single scan procedure and, more specifically, to a three-dimensional shape measurement device which: enables an improved measurement speed, various lateral resolutions, and maximization of a dynamic range of a measurement module compared to an existing three-dimensional shape measurement device which acquires a single piece of image information according to a single camera; and is capable of concurrently acquiring three-dimensional shape information and two-dimensional shape information including no interference signal from an object to be measured.

Description

Three-dimensional shape measurement device that acquires multiple image information

The present invention relates to a three-dimensional shape measurement device that acquires a plurality of image information, and more particularly, to an improved measurement speed compared to a three-dimensional shape measurement device that acquires single image information according to a single camera. It relates to a three-dimensional shape measuring device capable of maximizing various horizontal resolutions and dynamic range of a measurement module, and capable of simultaneously obtaining two-dimensional shape information and three-dimensional shape information not including an interference signal from a measurement target.

The white-light scanning interferometry measurement method is a method of measuring the minute surface shape of a precision part. It measures a geometric shape on a two-dimensional plane, such as a circle, line, angle, line width, etc. , asymmetry, etc., and is based on image processing technology and a probe system composed mainly of an optical microscope, lighting, and imaging devices represented by a CCD camera. From semiconductor pattern measurement to soft material surface roughness measurement, BGA ( Ball Grid Array) It is in the limelight as a non-contact measurement method that is widely applied to 3D measurement of micro shapes such as ball measurement, laser marking pattern measurement, and via hole measurement.

This measurement method is light interference in which the light is expressed in bright and dark forms according to the optical path difference between the two lights when the lights simultaneously departing from an arbitrary reference point are combined after moving through different optical paths. use the signal

As a prior literature related to such a white light interferometer, Korean Patent Registration No. 10-0598572 (July 7, 2006) describes a process of coating a transparent thin film layer on the surface of an opaque metal layer among semiconductor and LCD (Liquid Crystal Display) manufacturing processes. White-light Scanning Interferometry (WSI) has been proposed to measure information on the thickness of the transparent thin film layer or its surface shape, and its basic measurement principle is short coherence length of white light. In more detail, the principle that an interference signal is generated only when the reference light and the measurement light separated by a beam splitter, which is an optical splitter, experience almost the same optical path difference. When the interference signal is observed at each measurement point in the measurement area while moving the measurement object in the direction of the optical axis by a transport means such as a PZT actuator at minute intervals of several nanometers, each point has the same optical path as the reference mirror. A short interference signal is generated at the point where the difference occurs, and when the location of the interference signal is calculated at all measurement points within the measurement area, information on the 3D shape of the measurement surface is obtained, and the surface of the thin film layer is obtained from the obtained 3D information. shape to be measured.

1 is a diagram showing a surface shape measuring device using the white light scanning interferometry according to the prior art. As shown in FIG. 1, the basic concept of the three-dimensional shape measuring device is that illumination light from a light source 1 It is divided through (2) and irradiated to the reference plane and the measurement object surface of the measurement object, respectively, and is reflected from the reference mirror 3 and the measurement plane, and then combined through the light (beam) splitter 2.

The combined interference fringes are detected by a photographing device such as the CCD camera 4, and the phase of the interference fringes is calculated by the control computer 5, or the point with the maximum coherence is extracted from the envelope of the interference fringes. height can be measured.

Here, in the three-dimensional shape measuring device, the interference fringe appears at a point where the distance from the beam splitter to the measurement surface and the distance from the beam splitter to the reference mirror coincide. After dividing the pattern acquisition section into regular intervals, the reference mirror or the object to be measured is microscopically moved for each divided section to acquire the interference pattern, and then synthesize the obtained multiple interference patterns to measure the surface shape. In this way, from the beam splitter As a means for adjusting the distance from the measuring plane and the distance from the beam splitter to the reference mirror, the entire support means is moved using an actuator in the state of being installed on a support means (tilting stage, etc.) for movably supporting the reference mirror. It can be used to adjust the distance between the beam splitter and the reference mirror.

In addition, FIG. 2 shows a white light scanning interferometer based on a general Mirau-type microscope structure according to the prior art, including a light source, a light splitting unit, an interference module, an imaging unit, a transfer unit, and a control unit.

Referring to FIG. 2, the illumination light from the light source passes through the lens to become parallel light and is incident on the objective lens by the first beam splitter, and the measurement light in the lower direction and the upper direction are measured by the flat light splitter in the objective lens. The reference light is separated and incident on the reference mirror and measurement plane, respectively. Here, the reference light reflected from the reference mirror in the objective lens and the measurement light reflected from the measurement surface generate an interference signal on the image plane, thereby obtaining three-dimensional shape information of the surface.

At this time, a monochromatic light such as a laser can generate an interference signal at a long distance of several m, but in the case of a low-coherence light source, when using a short coherence length of several μm, the interference signal is also only within a few μm. After obtaining an interference signal from one measurement point while moving the measurement object in the direction of the optical axis at minute intervals of tens of nm to hundreds of nm, the interference signal is calculated from each pixel of the CCD camera, which is the imaging plane. It is possible to measure the 3D surface shape of the measuring surface for

In order to measure a three-dimensional shape with a height, the three-dimensional shape measuring device using the white light interferometry according to the prior art needs to obtain an interference pattern over the entire height while stepping in the direction of the optical axis at very short intervals, , This increases the time required for measurement, and when moving a step at a short interval, only one image can be obtained by one scan (single scan) for each step, and due to the limitation of the image according to the one scan It has a limitation that the horizontal resolution is bound to be limited.

In particular, in order to obtain high yield and mass production of recent semiconductors and electronic components, the measurement area of the target surface is in the range of several tens of millimeters and the precision is in the range of hundreds of nanometers to several micrometers. Observation in a specific area of the measurement object is more efficient, convenient and quick in the case of acquiring 2-dimensional shape information that does not include the interference signal from the measurement object and obtaining 3-dimensional shape information of the measurement object at the same time in order to obtain it quickly. Thus, it is possible to reduce the overall measurement time for obtaining three-dimensional shape information and at the same time provide conditions for more efficient measurement of three-dimensional shape information to the user.

Therefore, the need for the development of a more improved three-dimensional shape measuring device that meets such demands is continuously demanded.

The present invention has been devised to solve the above-mentioned problem, by dividing the interference pattern acquisition section regularly according to the height information, and in the scanning process according to the step movement of the three-dimensional shape measuring device for each divided section, the interference signal in the measurement target 3D shape information of the object to be measured can be obtained after or simultaneously with obtaining the 2D shape information that does not include, improved measurement speed and more efficient compared to single 3D shape information using a single existing camera. It is an object of the invention to provide a three-dimensional shape measurement device capable of providing a measurement environment.

To this end, the present invention emits light and includes a light source unit 100 positioned in one direction of the first light splitter; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or opposite the light source unit to the other side of the first beam splitter 200; and

In the three-dimensional shape measuring device including a first photographing unit 501 for photographing the reflected light from the surface of the object to be measured, which has passed through the first light splitter 200, the three-dimensional shape measuring device comprises: Located in the upper optical path of the optical splitter 200, the light reflected from the surface of the object to be measured and divided through the first optical splitter 200 is irradiated, and the first capturing unit 501 and the second capturing unit 501 described below are irradiated. splitting the light in each of the sub 502 directions; Alternatively, it is located in the lower optical path of the first optical splitter 200, and the light reflected from the surface of the object to be measured is irradiated in the direction of the first optical splitter 200 and the second capturing unit 502, respectively. a second light splitter 300 that splits the light; and a second capture unit 502 that captures the light reflected from the second beam splitter 300, wherein any one selected from the first capture unit 501 and the second capture unit 502 is included. The light photographed in is light without an interference signal, through which the two-dimensional shape information of the object to be measured can be obtained, and the photograph is taken by the other one selected from the first photographing unit 501 and the second photographing unit 502. The light emitted from the light source unit 100, passed through the first light splitter 200, irradiated onto the surface of the object to be measured and reflected, and reflected from the reference mirror 400 through the first light splitter 200. It provides a three-dimensional shape measuring device characterized in that it is possible to obtain three-dimensional shape information of a measurement object through the light of the interference pattern obtained by combining the light by the optical path obtained by the.

In addition, the three-dimensional shape measuring device according to the present invention includes between the optical path of the second light splitter 300 and the first photographing unit 501; or between the optical path of the second optical splitter 300 and the second photographing unit 502; a third light splitter 303 provided in; and a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the third beam splitter 303 captures the light emitted from the second beam splitter 300. The light is divided and irradiated to the third capture unit 503, and the light captured by at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 is Light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained, and light captured by at least one selected from the remaining two imaging units excluding the imaging unit that captures the light without the interference signal. is obtained by the light emitted from the light source unit 100, irradiated onto the surface of the object to be measured through the first light splitter 200 and reflected from the reference mirror 400 through the first light splitter 200 It is the light of the interference fringe in which the light from the optical path is combined, through which the 3D shape information of the object to be measured can be obtained.

In addition, the three-dimensional shape measuring device according to the present invention may additionally include a micro-drive device 600 to move the reference mirror 400.

In addition, the three-dimensional shape measuring device according to the present invention may be any one type selected from the Michelson type, the Mirau type, and the Linik type.

In addition, the three-dimensional shape measuring device according to the present invention may further include a synchronization board 500 generating a trigger for capturing each camera included in each capturing unit.

In addition, the first beam splitter 200 to the third beam splitter 300 in the three-dimensional shape measuring device according to the present invention may be any one of a cubic type, a pellicle type, or a plate type, respectively. can

In addition, each photographing unit in the three-dimensional shape measurement apparatus according to the present invention may include a camera and a tube lens, respectively.

In addition, in the present invention, when the three-dimensional shape measuring device includes the first capturing unit 501 and the second capturing unit 502, the three-dimensional shape measuring device i) the first capturing unit 501 and After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal by using any one of the second capture units 502, among the first capture unit 501 and the second capture unit 502 Obtaining 3D shape information by measuring a plurality of images by light of an interference fringe using the other one; ii) Alternatively, after acquiring 3D shape information by measuring a plurality of images of light of interference fringes using any one of the first and

second capture units

501 and 502, the first Acquisition of 2D shape information of a specific surface region of a measurement object without an interference signal by using the other one of the photographing unit 501 and the second photographing unit 502; iii) Alternatively, while measuring a plurality of images by light of an interference fringe using any one of the first and

second capture units

501 and 502, the first and

second capture units

501 and 502 Using the other one of the photographing units 502, 2D shape information of a specific surface area of the measurement object without an interference signal is obtained, and then, 3D shape information is obtained by measuring an image of the interference fringe by light again. Acquiring; can be characterized as.

In addition, in the present invention, when the three-dimensional shape measuring device includes the first capturing unit 501, the second capturing unit 502, and the third capturing unit 503, the three-dimensional shape measuring device i) the above After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal using at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503 , By measuring a plurality of images by light of the interference fringes using at least one of the remaining two capturing units except for the capturing unit capturing the 2D shape information of the specific surface area of the measurement object without the interference signal, the 3D shape obtain information; ii) or, by using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 to measure a plurality of images by light of interference fringes, 3D After obtaining the shape information, 2D shape information of a specific surface area of the object to be measured without an interference signal is obtained by using at least one of the two remaining photographing units except for the photographing unit that captures a plurality of images by light of the interference fringe. obtain; iii) Alternatively, while measuring a plurality of images by light of interference fringes using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503, the 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one of the remaining two imaging units except for the imaging unit that captures the image of the light of the interference pattern, and then the interference fringes again. Obtaining 3D shape information by measuring an image by light of; may be characterized.

In addition, in the three-dimensional shape measurement apparatus according to the present invention, the camera in the photographing unit for photographing the light without the interference signal and the camera in the photographing unit for photographing the light including the interference signal differ in focus from each other, It may be characterized in that there is no interference signal in a photographing unit that photographs light without an interference signal.

In addition, in the present invention, when the three-dimensional shape measuring device includes the first capturing unit 501 and the second capturing unit 502, the three-dimensional shape measuring device includes the second beam splitter 300 and the second capturing unit 502. By additionally providing a reflection mirror 350 between optical paths of the photographing unit 502, the light split and irradiated from the second optical splitter 300 is reflected by the reflection mirror 350 and the second photographing unit ( 502) may be characterized in that it is irradiated.

In addition, in the present invention, when the three-dimensional shape measuring device includes the first capturing unit 501, the second capturing unit 502, and the third capturing unit 503, the second beam splitter 300 and By additionally providing a reflective mirror 350 between the light paths of the second photographing unit 502, the light split and irradiated from the second light splitter 300 is reflected by the reflective mirror 350 to capture the second image. irradiated with section 502; Alternatively, by additionally providing a reflection mirror 350' between the optical path of the third optical splitter 303 and the third photographing unit 503, the light split from the third optical splitter 303 and irradiated is It may be characterized by being reflected by the reflection mirror 350' and irradiated to the third photographing unit 503.

In addition, the present invention emits light, the light source unit 100 located in one direction of the first light splitter; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned on the other side of the first beam splitter 200 facing the light source unit; And a first photographing unit 501 for photographing the reflected light from the surface of the measurement object that has passed through the first light splitter 200; It is located in the optical path in the lower direction of the light splitter 200, and the light reflected from the surface of the object to be measured is irradiated, splitting the light in the direction of the first light splitter 200 and the second photographing unit 502, respectively; a second light splitter 300; and a second capture unit 502 that captures the light reflected from the second beam splitter 300, wherein any one selected from the first capture unit 501 and the second capture unit 502 is included. The light photographed in is light without an interference signal, through which the two-dimensional shape information of the object to be measured can be obtained, and the photograph is taken by the other one selected from the first photographing unit 501 and the second photographing unit 502. The light emitted from the light source unit 100, passed through the first light splitter 200, irradiated onto the surface of the object to be measured and reflected, and reflected from the reference mirror 400 through the first light splitter 200. It provides a three-dimensional shape measuring device characterized in that it is possible to obtain three-dimensional shape information of a measurement object through the light of the interference pattern obtained by combining the light by the optical path obtained by the.

In addition, the present invention emits light, the light source unit 100 located in one direction of the first light splitter; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or in the other direction of the first beam splitter 200; And a first photographing unit 501 for photographing the reflected light from the surface of the measurement object passing through the first light splitter 200; The light reflected from the surface and divided through the first beam splitter 200 is irradiated, splitting the light in the direction of the first photographing unit 501 and the reflection mirror 350, respectively, and the first beam splitter 200 ) and the second optical splitter 300 located in the optical path between the first photographing unit 501; a reflection mirror 350 positioned apart from the second beam splitter 300 and reflecting split light reflected from the second beam splitter 300 to a second capture unit 502; and a second photographing unit 502 for photographing the light reflected from the reflection mirror 350, so that the first photographing part 501 is irradiated from the first light splitter 200 to capture the second light After passing through the splitter 300 and photographing the divided light, the second photographing unit 502 is irradiated from the first light splitter 200 and is divided by reflecting the second light splitter 300, and then the reflection Photographing the light reflected from the mirror 350, the three-dimensional shape measuring device further includes a synchronization board 500 generating a trigger for photographing of each camera included in each photographing unit, and the first photographing device The light photographed by any one selected from the unit 501 and the second photographing unit 502 is emitted from the light source unit 100, passes through the first light splitter 200, and is reflected on the surface of the object to be measured. Light of an interference fringe in which light from an optical path obtained by passing through the first light splitter 200 and being reflected from the reference mirror 400 is combined, through which three-dimensional shape information of the object to be measured can be obtained, The light photographed by the other one selected from the first photographing unit 501 and the second photographing unit 502 is light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained. A three-dimensional shape measuring device is provided.

In this case, the three-dimensional shape measuring device includes a third optical splitter 303 provided between the optical path of the second optical splitter 300 and the reflection mirror 350; And a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the synchronization board 500 in the three-dimensional shape measuring device includes a camera included in the third photographing unit. A trigger may be generated for the photographing of, and the third beam splitter 303 splits the light irradiated from the second beam splitter 300, and the divided light reflected from the third beam splitter 303 The light irradiated to the third capture unit 503, passed through the third beam splitter 303, and split is irradiated to the reflection mirror 350, and the first capture unit 501 and the second capture unit 502 ) And the light photographed by at least one selected from the third photographing unit 503 is emitted from the light source unit 100 and irradiated onto the surface of the measurement object through the first light splitter 200 and reflected light, It is the light of the interference fringe in which the light by the light path obtained by being reflected from the reference mirror 400 through the first light splitter 200 is combined, through which the three-dimensional shape information of the object to be measured can be obtained. The light captured by at least one selected from the remaining two imaging units excluding the imaging unit that photographs the light of the interference pattern is light without an interference signal, and through this, it is characterized in that two-dimensional shape information of the object to be measured can be obtained. .

The three-dimensional shape measuring device according to the present invention divides the interference pattern acquisition section regularly according to the height information of the measurement object, and includes the interference signal from the measurement object in the scanning process according to the step movement of the three-dimensional shape measuring device for each divided section. Obtain 2D image information that does not exist, and 3D shape information of the object to be measured at the same time, so observation in a specific area of the object to be measured can be made more in-depth, convenient, and speedy. It is possible to provide a more efficient measurement environment by measuring 2D information and 3D information about a measurement target in comparison with dimensional shape information.

In particular, rather than each of a plurality of 2D image information for 3D shape measurement obtained through an interferometer according to a single normal camera, the camera in the photographing unit acquires 2D image information not including an interference signal according to the present invention. The 2D image information obtained through this may be clearer image information than each of the 2D image information obtained through the photographing unit for measuring the 3D shape. Because, in the case of each of the plurality of 2D image information measured by the photographing unit for measuring the 3D shape, an interference signal is generated at the optimal focus (focusing) position, and the 2D image is distorted according to the interference signal. In addition, since the obtained two-dimensional image is out of focus and blurred, it is impossible to obtain a clear image at both the optimal focus and the out-of-focus position, but in the present invention This is because the 2D image information obtained through the camera in the photographing unit that obtains the 2D image information not including the interference signal of can solve this problem.

1 is a diagram showing a schematic configuration of a three-dimensional shape measuring apparatus using white light scanning interferometry according to the prior art.

FIG. 2 is a diagram showing a schematic configuration of a three-dimensional shape measuring apparatus using white light scanning interferometry based on a Mirau-type microscope structure according to the prior art.

FIG. 3 is a diagram showing the configuration of a three-dimensional shape measuring device in which the second light splitter 300 is positioned in the upper optical path of the first light splitter 200 according to an embodiment of the present invention.

FIG. 4 is a diagram showing the configuration of a three-dimensional shape measuring device in which the second light splitter 300 is located in the lower optical path of the first light splitter 200 according to another embodiment of the present invention.

5a) is a diagram showing a part below the first beam splitter in a Michelson-type three-dimensional shape measurement device according to an embodiment of the present invention, and FIG. 5b) is a first beam splitter in a Mirau-type three-dimensional shape measurement device. 5c) is a diagram showing the parts below the first light splitter in the linic-type three-dimensional shape measuring device.

6 is an interferometer in a linic type according to another embodiment of the present invention, in which the second beam splitter 300 is located in the upper optical path of the first beam splitter 200. is a drawing showing

7 is an interferometer in a linic type according to another embodiment of the present invention, in which the second beam splitter 300 is located in the lower optical path of the first beam splitter 200. Configuration of the three-dimensional shape measurement device is a drawing showing

8 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter 300 ) and the optical path of the second photographing unit 502, the third beam splitter 303 is provided.

9 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter 300 ) and the optical path of the first photographing unit 501, the third beam splitter 303 is provided.

10 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the lower optical path of the first optical splitter 200, and the second optical splitter 300 ) and the optical path of the second photographing unit 502, the third beam splitter 303 is provided.

11 is a three-dimensional shape measurement apparatus composed of two photographing units according to an embodiment of the present invention, an image obtained by light including an interference signal by a camera in the first photographing unit and an interference signal by a camera in the second photographing unit. It is a diagram showing images obtained by light not including .

12 shows a second optical splitter 300 according to another embodiment of the present invention located in an optical path in the upper direction of the first optical splitter 200, and the second optical splitter 300 and the second photographing unit It is a diagram showing the configuration of a three-dimensional shape measuring device including a reflection mirror 350 between optical paths of 502.

13 is a diagram showing the second optical splitter 300 located in the upper optical path of the first optical splitter 200 according to another embodiment of the present invention, the second optical splitter 300 and the second photographing unit (502) It is a diagram showing the configuration of a three-dimensional shape measuring device of a linic type, including a reflection mirror 350 between optical paths.

14 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter 300 ) and the optical path of the second capturing unit 502, a third optical splitter 303 is provided, and a reflection mirror 350 is provided between the third optical splitter 303 and the optical path of the second capturing unit 502. It is a diagram showing the configuration of a three-dimensional shape measuring device including.

15 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter 300 ) and the optical path of the second capturing unit 502, a third optical splitter 303 is provided, and a reflection mirror 350' is provided between the third optical splitter 303 and the optical path of the third capturing unit 503. ) It is a diagram showing the configuration of a three-dimensional shape measuring device including.

[Description of code]

100: light source

101: lighting lens

200: first light splitter 300: second light splitter 303: third light splitter

350, 350’: Reflective mirror

400: reference mirror (mirror type or linic type)

410: objective lens

450: Interference module optical splitter (Mirau type)

500: synchronization board

501: first capture unit 502: second capture unit 503: third capture unit

511: first camera 512: second camera 513: third camera

521: first tube lens 522: second tube lens 523: second tube lens

600: fine drive

700: object to be measured

Hereinafter, with reference to the accompanying drawings, a three-dimensional shape measuring device for measuring the three-dimensional shape of a measurement object according to the present invention is described in detail so that those skilled in the art can easily practice the present invention. let me explain

In each drawing of the present invention, the size or dimensions of the structures are enlarged or reduced from the actual ones for clarity of the present invention, and the known configurations are omitted so that the characteristic configurations are revealed, so they are not limited to the drawings. .

In describing the principles of preferred embodiments of the present invention in detail, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted.

In addition, since the embodiments described in this specification and the configurations shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent all of the technical ideas of the present invention, various alternatives may be used at the time of this application. It should be understood that there may be equivalents and variations.

A three-dimensional shape measuring device according to the present invention, emits light, and is located in one direction of the first beam splitter 100; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or opposite the light source unit to the other side of the first beam splitter 200; And a first photographing unit 501 for photographing the reflected light from the surface of the measurement object that has passed through the first light splitter 200; Located in the upper optical path of the first optical splitter 200, the light reflected from the surface of the object to be measured and divided through the first optical splitter 200 is irradiated, and the first photographing unit 501 and the second Dividing the light in the direction of the photographing unit 502, respectively; Alternatively, it is located in the lower optical path of the first optical splitter 200, and the light reflected from the surface of the object to be measured is irradiated in the direction of the first optical splitter 200 and the second capturing unit 502, respectively. a second light splitter 300 that splits the light; and a second capture unit 502 that captures the light reflected from the second beam splitter 300, wherein any one selected from the first capture unit 501 and the second capture unit 502 is included. The light photographed in is light without an interference signal, through which the two-dimensional shape information of the object to be measured can be obtained, and the photograph is taken by the other one selected from the first photographing unit 501 and the second photographing unit 502. The light emitted from the light source unit 100, passed through the first light splitter 200, irradiated onto the surface of the object to be measured and reflected, and reflected from the reference mirror 400 through the first light splitter 200. It is characterized in that it is possible to obtain three-dimensional shape information of the object to be measured through the light of the interference fringe obtained by combining the light by the light path obtained by the optical path, and this will be described in more detail with reference to FIGS.

3 to 7 are an embodiment of a three-dimensional shape measuring device having a second optical splitter 300 above or below the optical path of the first optical splitter 200 according to the present invention, based on these Each component of the three-dimensional shape measuring device according to will be described below in more detail.

3 to 7, the three-dimensional shape measuring device according to the present invention includes a light source unit 100, a first beam splitter 200, a second beam splitter 300, and a reference mirror 400 as main components. ), a micro-drive device 600, a first capturing unit 501 and a second capturing unit 502.

Here, the light source unit 100 is a means for emitting light to the measurement object and can measure the shape of the measurement surface of the measurement object from the interference fringe formed by the reflection of this light on the measurement object, as shown in FIG. As described above, it is located in one direction (left side) of the first light splitter 200, and its position may be located without limitation when it corresponds to a position where there is no obstruction to emit light.

The light source of the light source unit 100 may use a white light source. The white light source is a light source for obtaining data on the three-dimensional shape of the object to be measured, and may be one of a tungsten halogen lamp, a xenon lamp, a white light emitting diode, and the like, and the light source is a broadband white light can be

On the other hand, the first light splitter 200 splits the light (light) irradiated (emitted) from the light source unit so that some of it is transmitted in a straight line and lost, and the other part is irradiated in the direction of the measurement object 700. It is a beam splitter that is reflected and divided in 200, and serves to divide and pass the reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 to be described later.

Here, the first optical splitter 200 may be selected from any one of a cubic type, a pellicle type, or a plate type, but is not limited thereto, and a second type to be described below. The optical splitter 300, the third optical splitter 320, and the interference module optical splitter 450 may also be selected from any one of a cubic type, a pellicle type, and a plate type. , but not limited thereto.

In addition, an illumination lens 101 may be included between the first light splitter and the light source unit to transmit light from the light source to the light splitter.

Meanwhile, the three-dimensional shape measuring device according to the present invention may be any one type selected from among a Michelson type, a Mirau type, and a Linik type.

more specifically. The three-dimensional shape measurement device according to the present invention may have various configurations of three-dimensional shape measurement devices (interferometers) depending on the magnification of the objective lens used. In general, a Michelson type is used for low magnifications of 1 to 5 times, and 10 times - For a medium magnification of 50 times, a Mirau type may be used, and for a high magnification of 100 times or more, a Linic type may be mainly used. In order to form an interference fringe, it is configured to be irradiated to the surface of the measurement object through a path different from the light irradiated to the surface of the measurement object and combined with the reflected light, and the above Michelson type, Mirau type, and Linic type According to this, by being located between the first light splitter 200 and the object to be measured 700 in the three-dimensional shape measuring device or in the other direction of the first light splitter 200, the position and size may have different configurations.

Looking at this in more detail through FIG. 5, FIG. 5a) is a part below the light source unit and the first beam splitter 200 in FIG. 3 or the light source unit and the second beam splitter 300 in FIG. 4 in the Michelson-type three-dimensional shape measuring device. Figure 5b) is a picture showing the parts below the light source unit and the first beam splitter 200 in FIG. 3 or the light source unit and the second beam splitter 300 in FIG. 4 in the Mirau type three-dimensional shape measurement device. It is a picture showing the following parts, and FIG. 4c) corresponds to a picture showing a configuration corresponding to the linic type. According to this, the reference mirror 400 is the first optical splitter 200 and the measurement object ), more specifically, located between the objective lens 410 and the measurement object 700 in the three-dimensional shape device (Michelson type or Mirau type) or located in the other direction of the first beam splitter 200 (Linic type) )can do.

More specifically, in the case of the Michelson type, as shown in FIG. 5a), in the three-dimensional shape measuring device according to the present invention, the reference mirror 400 is the first beam splitter (200, in the case of FIG. 3) or the second optical beam splitter. It is located in the vertical direction between the divider (300, in the case of FIG. 4) and the measurement object 700, and the optical path between the reference mirror 400 and the measurement object is obliquely tilted to the reference mirror 400. Interference A module beam splitter 450 may be provided, and in the case of a Mirau type, as shown in FIG. 5B), the three-dimensional shape measurement apparatus according to the present invention includes a reference mirror 400, In the case of FIG. 3) or the second optical splitter (300, in the case of FIG. 4) and the object to be measured 700, between the reference mirror 400 and the object to be measured is an interference module optical splitter (450 parallel to the reference mirror). ) may be provided, and in the case of the linic type, as shown in FIG. 5c), in the three-dimensional shape measuring device according to the present invention, the reference mirror 400 faces the light source unit in the other direction of the first beam splitter 200. can be positioned to do so.

More detailed configurations related to this in the three-dimensional shape measuring device according to the Michelson type, Mirau type, or Linik type are techniques already known to those skilled in the art, and further description thereof will be omitted.

On the other hand, the second light splitter 300 in the three-dimensional shape measuring device according to the present invention is located on the upper light path of the first light splitter 200 or on the lower light path of the first light splitter 200, and emits light from the light source unit. After being irradiated to the surface of the object to be measured, the light reflected from the surface of the object to be measured and split through the first light splitter 200 is irradiated (located in the upper light path of the first light splitter 200), Splitting the light in the direction of the first capturing unit 501 and the second capturing unit 502, respectively; Alternatively, the light emitted from the light source unit is irradiated onto the surface of the object to be measured, and then the light reflected from the surface of the object to be measured is irradiated (when located in the lower light path of the first light splitter 200), and is converted into the first light splitter. 200 and splitting light in the direction of the second photographing unit 502, respectively; here, the second light splitter 300 in the present invention is directed upward of the first light splitter 200. Being located in the optical path or located in the lower optical path corresponds to the main technical feature of the present invention.

Here, in the case where the second light splitter 300 in the present invention is located in the optical path in the upper direction of the first light splitter 200 (in the opposite direction to the direction in which the measurement object is located), preferably the second light splitter 300 The splitter 300 may be located in an optical path between the first light splitter 200 and the first photographing unit 501, and the second light splitter 300 extends downward of the first light splitter 200 ( direction in which the object to be measured) is located in the optical path, it may be preferably located between the first optical splitter 200 and the object to be measured 700, more preferably the first optical splitter 200 and the object It may be located in an optical path between the lenses 410 .

Meanwhile, the second optical splitter 300 may also be selected from any one of a cubic type, a pellicle type, and a plate type, similarly to the first optical splitter, but is not limited thereto. possible.

In addition, the first photographing unit 501 in the present invention may be provided to photograph the reflected light from the surface of the object to be measured, passing through the first light splitter 200 or the second light splitter 300, Here, the first photographing unit 501 is located in the optical axis direction along the optical path between the first optical splitter 200 and the second optical splitter 300, and the second optical splitter 300 is the first optical splitter. When located in the optical path in the upper direction of (200), the divided light is captured by passing through the second optical splitter 300 by introducing the second optical splitter, and the second optical splitter 300 captures the first light When located in the optical path in the downward direction of the splitter 200, the split light is converted into a first light splitter by passing through the second light splitter 300 and the first light splitter 200 respectively by introduction of the second light splitter 300. The photographing unit 501 takes pictures.

On the other hand, when the first photographing unit 501 photographs light including an interference fringe, the light reflected from the surface of the object to be measured and then passing through the first optical splitter and the reference mirror ( 400) serves to capture an interference pattern in which light along an optical path reflected from the first beam splitter is combined, and the first photographing unit includes a camera and a tube lens for condensing light including the interference pattern with the camera. can do.

Here, a CCD or CMOS camera (charge-coupled device camera) may be used as the camera in the first photographing unit, but any device capable of measuring the shape of the measurement surface of the measurement object from the interference fringes may be used without limitation.

In addition, the second photographing unit 502 serves to photograph the light reflected from the second beam splitter 300, and when photographing the light including the interference fringe, the first photographing unit 501 It is possible to obtain 3-dimensional information of the object to be measured by photographing light according to the same interference fringe as in, and may have the same or different configuration as the first photographing unit.

In addition, the second photographing unit 502 may include a camera and a tube lens for condensing light including interference fringes with the camera, as in the first photographing unit 501, and the camera may include a CCD or CMOS camera ( A charge-coupled device camera) may be used, but any device capable of measuring the shape of the measurement surface of the measurement object from the interference fringes may be used without limitation, which may be further provided with a third photographing unit to be described later or The same can be applied to the fourth photographing unit and the like.

Here, in the case of constructing a three-dimensional shape measuring device with only the first capturing unit 501 excluding the second optical splitter 300 and the second capturing unit 502 in the present invention, , Corresponds to a three-dimensional shape measurement device capable of obtaining only single image information according to a single photographing unit (camera).

That is, in the case of the three-dimensional shape measurement device according to the prior art, the light emitted from the light source unit is irradiated to the surface of the measurement object and then reflected from the surface of the measurement object again. , In the present invention, through the second beam splitter 300, in addition to the light split into the first capture unit, the light is split in the direction of the second capture unit 502, which is the third beam splitter 303 to be described later. Through this, the light is additionally divided and the light is split in the direction of the third capturing unit 503, so that the split light through the second optical splitter 300 and/or the third optical splitter 303 is transmitted to the second capturing unit. 502 and/or the third beam splitter 303, at least one of the plurality of imaging units obtains two-dimensional shape information that does not include an interference signal in the measurement target, and also among the remaining imaging units. By including at least one image including an interference fringe, it is possible to obtain 3D shape information of the object to be measured, so that observation in a specific area of the object to be measured can be made more in-depth, conveniently and quickly. corresponds to the characteristic.

On the other hand, in the three-dimensional shape measuring device according to the present invention according to FIG. 3, the light photographed by one of the first photographing unit 501 and the second photographing unit 502 is emitted from the light source unit 100 and The light of the interference pattern in which the light irradiated and reflected on the surface of the object to be measured through the light splitter 200 and the light obtained by the optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined. applies to

That is, the light irradiated from the light source 100 is split in the first beam splitter 200, which is used to obtain an interference pattern according to the structure of the Michelson type, Mirau type or Linik type depending on the environment of the objective lens used. Although the configuration of the optical path may be different, the light divided from the light source 100 through the first beam splitter 200 when viewed with respect to the first photographing unit 501 of FIG. 3 or 4 is i) After being reflected from the measurement surface of the object to be measured, it passes through the first light splitter 200 according to FIG. 3 and sequentially in the direction of the second light splitter 300 (or, according to FIG. 4, the second light splitter 300) ii) the incoming light sequentially in the direction of the first light splitter 200 through , and ii) the second light splitter 300 through the first light splitter 200 according to FIG. 3 after being reflected through the reference mirror 400 ) direction (or sequentially in the direction of the first beam splitter 200 through the second beam splitter 300 according to FIG. It is possible to obtain the light of the interference fringe in which the lights of are combined.

Here, according to FIG. 3, in order to obtain such an interference fringe in either the first capture unit 501 or the second capture unit 502, the first beam splitter 200 passes through the surface of the object to be measured and is reflected therefrom. The distance reached by the 1 beam splitter 200 and the distance from the first beam splitter 200 through the reference mirror 400 and the distance reached by the first beam splitter 200 after being reflected therefrom must match. , Accordingly, after dividing the interference fringe acquisition section regularly according to each height information for the measurement object having a step difference, the interference fringe is obtained while moving the part including the reference mirror 400 in detail for each divided section. 3D information of the object to be measured can be obtained by measuring the surface shape.

In addition, in FIG. 3 or 4, the present invention provides two-dimensional shape information of the object to be measured through a photographing unit of the first photographing unit 501 and the second photographing unit 502 for photographing light that does not contain an interference signal. can be obtained.

That is, in the three-dimensional shape measurement device including the first capture unit 501 and the second capture unit 502, one capture unit measures light including an interference signal to obtain 3D shape information of a measurement object. By acquiring a plurality of image information and separately obtaining two-dimensional shape information of a clean object to be measured without an interference signal, the three-dimensional shape measurement device according to the present invention obtains two-dimensional shape information of the object in real time and At the same time, it has the advantage of being able to more easily obtain the three-dimensional shape information of the measurement object through the image information including the interference signal.

Here, in the case of light that does not contain the interference signal, the image of the video does not include an interference fringe, so that the surface state of the measurement object can be obtained cleaner and clearer, and through this, defects or foreign substances on the surface of the measurement object can be obtained. 2D inspection is possible, 2D measurement of geometric shapes such as pattern line width and circle diameter is possible on a 2D plane, and imaging units including interference signals (the first imaging unit 501 and the second imaging unit 501) Using any one of the parts 502), after dividing the interference fringe acquisition section regularly according to each height information for the measurement object having a step, the part including the reference mirror 400 is divided for each divided section. 3D surface information of the object to be measured can be obtained by acquiring the interference fringe while moving it in detail.

Here, the three-dimensional shape measurement apparatus according to the present invention sets the focus of the camera in the photographing unit for photographing the light without the interference signal and the camera in the photographing unit for photographing the light including the interference signal to be different from each other, It is possible to ensure that there is no interference signal in a photographing unit that photographs light without an interference signal.

That is, in the camera in the photographing unit for photographing light without the interference signal and in the photographing unit for photographing light including the interference signal, the focal position of each camera is first made different, and then the micro actuator is used. While moving the measurement object, the reference mirror, or the measurement module including the reference mirror in the direction of the optical axis, the 2D image information is photographed when the measurement object and the focus are matched in the photographing unit that captures the 2D image information, A photographing unit for acquiring 3D shape information before or after or both before and after acquires images including each interference signal in the range of tens to thousands, preferably 50 to 1000 images, to create a 3D image. shape measurements can be performed.

On the other hand, as shown in FIG. 4 , when the second optical splitter 300 is located in the lower optical path of the first optical splitter 200, in order to obtain an interference fringe from the first capturing unit 501, it is necessary to proceed as described above. Similarly, the distance from the first light splitter 200 through the surface of the object to be measured and reflected therefrom to reach the first light splitter 200 again, and the distance from the first light splitter 200 through the reference mirror 400 and reflected therefrom. However, in order to obtain an interference fringe from the second photographing unit 502 in FIG. 4, the object to be measured from the first optical splitter 200 The distance reached by reflection through the surface of and the second beam splitter 300, and the distance from the first beam splitter 200 through the reference mirror 400 to the second beam splitter 300. It is only necessary to match the distance up to one distance, and this is because the second beam splitter 300 in FIG. Since the light does not pass through the first light splitter 200, the distances each light reaches to the second light splitter 300 must be matched.

That is, in the three-dimensional shape measuring device according to the present invention, by adding the second beam splitter 300, as shown in FIG. When positioned, the first photographing unit 501 in the three-dimensional shape measuring device according to the present invention captures the divided light irradiated from the first light splitter 200 and passed through the second light splitter 300, , The second photographing unit 502 captures the split light by being irradiated from the first light splitter 200 and reflecting the second light splitter 300, and as shown in FIG. 4, the second light splitter 300 ) is located in the lower optical path of the first optical splitter 200, the first photographing unit 501 is irradiated from the second optical splitter 200 and passes through the first optical splitter 300. The divided light is photographed, and the second photographing unit 502 reflects the second light splitter 300 to photograph the divided light, and the first photographing unit 501 and the second photographing unit 502 The light photographed from any one of the light source unit 100 is emitted from the light source unit 100 and irradiated onto the surface of the object to be measured through the first light splitter 200 and reflected, and the reference mirror through the first light splitter 200. The light obtained by reflection at 400 corresponds to the light of the interference pattern in which the light from the optical path is combined, and the light photographed by the other photographing unit is light without an interference signal, through which 2D shape information of the object to be measured is obtained. 2D and 3D information of the object to be measured can be obtained together.

For example, in the case of FIG. 3 , after being reflected from the surface (measurement surface) of the object to be measured, the light passing through the first light splitter 200 and entering the direction of the second light splitter 300 is reflected from the reference mirror 400 Interference fringes obtained by combining the light entering the direction of the second optical splitter 300 through the first optical splitter 200 are split in the second optical splitter 300, and are divided by passing through the second optical splitter 300. The light to be captured is irradiated to the first capture unit 501, and the light reflected and divided by the second beam splitter 300 is irradiated in the direction of the second capture unit 502 so that the user can view the first capture unit and the 3D image information along with 2D image information of the object to be measured can be obtained by photographing light including interference fringes in one of the second photographing units and photographing light without an interference signal in the other photographing unit. there is.

In this case, the camera in the photographing unit for photographing the light without the interference signal and the camera in the photographing unit for photographing the light including the interference signal capture the light without the interference signal by making the focus of each camera different from each other. It is possible to prevent interference signals from the photographing unit.

In addition, in the case of FIG. 4, the light reflected from the surface (measurement surface) of the object to be measured and then entering the direction of the second optical splitter 300 and the light reflected from the reference mirror 400 are reflected in the direction of the second optical splitter 300. Interference fringes obtained by combining light coming into the beam splitter are split in the second beam splitter 300, and the split light passing through the second beam splitter 300 passes through the first beam splitter 200 to take the first shot. The light irradiated to the unit 501, reflected by the second light splitter 300 and divided is irradiated in the direction of the second capturing unit 502, so that the user can select one of the first capturing unit and the second capturing unit. 3D image information as well as 2D image information of the object to be measured can be obtained by photographing light including interference fringes and photographing light without an interference signal in the other photographing unit.

Meanwhile, FIG. 6 is an interferometer in a linic type according to another embodiment of the present invention, in which the second beam splitter 300 is located above the optical path of the first beam splitter 200. A diagram showing the configuration.

As shown in FIG. 6, in the linic type, the reference mirror 400 faces the light source unit and is located in the other direction of the first beam splitter 200, and accordingly, the reflection from the surface (measurement surface) of the object to be measured is reflected. Then, the interference fringes obtained by combining the light entering the first beam splitter 200 and the light reflected from the reference mirror 400 and entering the first beam splitter 200 are divided by the second beam splitter 300. As such, the light passing through the second light splitter 300 and being divided is irradiated to the first capturing unit 501, and the light reflected and divided by the second optical splitter 300 is the second capturing unit ( 502), the user captures the light including the interference fringe in one of the first capture unit and the second capture unit, and captures light without an interference signal in the other capture unit, thereby measuring the object to be measured. 3D image information can be acquired together with 2D image information.

7 is an interferometer in a linic type according to another embodiment of the present invention, in which the second beam splitter 300 is located in the lower optical path of the first beam splitter 200. As a diagram showing the configuration of the measuring device, like the reference mirror 400 in FIG. 6, the reference mirror 400 faces the light source and is located in the other direction of the first beam splitter 200, but the second As a structural result of the location of the splitter 300 and the second capture unit 502, the second capture unit 502 cannot capture the light reflected from the reference mirror 400, so that the light including the interference fringes won't be made

Therefore, only the first photographing unit 501 can photograph the light including the interference fringes. At this time, the first photographing unit 501 reflects the light from the surface (measurement surface) of the object to be measured, and then the second optical splitter. It is possible to capture light of an interference fringe obtained by combining the light passing through and entering the first beam splitter 200 and the light reflected from the reference mirror 400 and entering the first beam splitter 200. 2 The photographing unit 502 may photograph only the 2D image information of the object to be measured by photographing light without an interference signal.

Meanwhile, in the case of the linic-type three-dimensional shape measuring device according to FIG. 7, a light splitter may be additionally included between the first light splitter 200 and the reference mirror 400, which is to improve the visibility of the interference signal. It is to maintain the same optical environment of the reference light irradiated to and reflected from the reference mirror 400 and the measurement light irradiated and reflected from the measurement object, which is photographed by the first photographing unit 501 in consideration of light dispersion, preferably More specifically, the same optical splitter as the second optical splitter 300 may be used.

In the case of the stereoscopic image measuring device having the configuration shown in FIG. 7, the image without interference fringes captured by the second photographing unit 502 corresponds to 2D information obtained by the structure not originally including interference fringes. Therefore, it is possible to promote convenience in measuring a clearer two-dimensional image without reflected light reflected from the reference mirror than in the case where the interference fringes obtained from each of the photographing units in FIGS. 3, 4, and 6 are included. there is.

In addition, the second capture unit 502 in the three-dimensional shape measuring device according to the present invention has the same configuration as the first capture unit 501 or to obtain image information desired by the user, the first capture unit 501 may have a different configuration.

For example, the first photographing unit 501 and the second photographing unit 502 have tube lenses having different magnifications or intra-camera lenses having different magnifications, thereby capturing images of different magnifications of a specific surface area of an object to be measured. It is configured to be simultaneously acquired, so that the first capture unit 501 can provide image information for a small area at high magnification through a camera, and the second capture unit 502 can provide image information for a wide area at low magnification. It can be configured to provide, or it can be configured to provide the opposite configuration.

For example, the first capture unit 501 that captures light including interference fringes acquires image information for a small area at high magnification, and the second capture unit 502 captures light that does not include interference fringes at low magnification. By acquiring image information for a large area of , after the user recognizes the surface information of the measurement object in advance based on the low magnification information of the large area obtained from the second photographing

unit

502, 3 images of the measurement object for a small area are obtained. It can be configured to obtain dimension information, or it can be configured to provide the opposite configuration.

As another exemplary configuration, the first capture unit 501 and the second capture unit 502 measure the specific surface area of the measurement object with different brightness, so that the specific surface area of the measurement object is different from each other. Images of different brightnesses can be acquired simultaneously. As an exemplary configuration, the first capture unit 501 that captures light including interference fringes acquires an image of normal brightness, and the second capture unit 502 captures light without interference fringes. By obtaining a 2D surface image that is brighter than the image obtained by the first photographing unit, it is possible to increase the accuracy of geometric information and improve detection of defects using the clearer 2D image of the object to be measured.

For example, the first photographing unit 501 captures an image with a long exposure time of the camera (or captures without using a filter) through a camera that measures the brightness of an image of a specific surface area of a measurement object differently. Information can be provided, and the second capture unit 502 captures image information that is underexposed by taking a short exposure time of the camera (or using a brightness control filter (eg, ND filter)). It may be configured to provide, or may be configured to provide the opposite configuration, and in this case, preferably, each camera in each photographing unit may have a tube lens of the same magnification or an intra-camera lens of the same magnification, respectively. there is.

Hereinafter, exemplary configurations of the three-dimensional shape measuring device according to the present invention will be described in more detail according to FIGS. 3 and 4 .

3 and 4 show a Mirau-type three-dimensional shape measurement device, according to which, the reference mirror 400 is located between the first light splitter 200 and the measurement object 700, and the reference mirror 400 A configuration in which the objective lens 410 is positioned between the mirror 400 and the first beam splitter 200 is shown.

Looking at the optical path for measuring the interference fringe in more detail, the white light reflected from the light source unit 100 emitting white light and the like by the first beam splitter 200 and split passes through the objective lens 410 to the Mirau type interference module. Part of the white light that is split in the light splitter 450 and passed through the interference module light splitter 450 is irradiated to the surface of the object to be measured, then reflected from the surface, passes through the interference module light splitter 450, and then passes through the first light splitter 450. It is irradiated in the direction of the splitter 200, and the remaining part of the split after being reflected by the interference module light splitter 450 is reflected from the reference mirror 400 and reflected again by the interference module light splitter 450, and then the first It is irradiated in the direction of the light splitter 200 and the light from each optical path is combined to form an interference fringe.

That is, the white light reflected and divided by the interference module light splitter 450 functions as reference light irradiated to the reference mirror 400, and the white light transmitted from the interference module light splitter 450 toward the object to be measured is directed toward the object to be measured. It performs the function of measurement light because it is irradiated, and the interference module beam splitter 450 separates the light irradiated from the light source into reference light and measurement light, and when the separated reference light and measurement light are reflected and returned, they interfere with each other to interfere with the interference light. will make

At this time, in the scanning process according to the step movement of the three-dimensional shape measuring device for each divided section by dividing the interference pattern acquisition section according to the height information of the object to be measured, the reference mirror 400 or the reference mirror When the components including 400 are moved finely, each optical path can be matched or different, so that appropriate image information of the surface can be obtained.

The principle of acquiring such image information can also be applied to the Mirau-type three-dimensional shape measurement device according to FIG. 4, except that in the case of FIG. 200, each interference light irradiated to the second photographing unit 502 is reflected by the second beam splitter 300 and directly removed without passing through the first beam splitter 200 again. 2 There is a difference only in what is photographed by the photographing unit 502 .

On the other hand, the light photographed by any one selected from the first photographing unit 501 and the second photographing unit 502 in FIGS. 3 and 4 must have no interference signal to obtain 2D surface information of the object to be measured. Therefore, the camera in the photographing unit for photographing the light without the interference signal and the camera in the photographing unit for photographing the light including the interference signal set the focus of each camera to be different from each other, thereby making the light without the interference signal different from each other. Light without an interference signal can be photographed in a photographing unit for photographing.

In addition, looking at the measurement method of the three-dimensional shape measuring device of the linic type according to FIG. 6, the divided white light reflected from the light source unit 100 by the first beam splitter 200 passes through the objective lens 410 to the surface of the measurement object. After being irradiated, it is reflected from the surface again, passes through the first light splitter 200, and is irradiated in the direction of the second light splitter 300, and the remaining part passed through the first light splitter 200 and divided is the reference mirror ( 400), is reflected from the first light splitter 200, and then irradiated toward the second light splitter 300, and the light from each optical path is combined to form an interference pattern, and an interference signal is generated. In the case of light not included, as in FIGS. 3 and 4, the camera in the photographing unit for photographing light without an interference signal and the camera in the photographing unit for photographing light containing an interference signal differ in focus from each other. Light without an interference signal may be photographed by a photographing unit that photographs light without an interference signal.

In addition, the measurement method of the three-dimensional shape measuring device of the linic type according to FIG. 7 is the same as that of FIG. After being irradiated onto the surface of the object to be measured through the objective lens 410, it is reflected back from the surface, passes through the second beam splitter 300, and is irradiated in the direction of the first beam splitter 200, and the first beam splitter 200 The rest of the divided light passes through the reference mirror 400 and is reflected therefrom and irradiated to the first light splitter 200 again, and the light from each optical path is combined to form an interference fringe, thereby forming the first photographing image. In the unit 501, light including an interference signal can be photographed, and in the second photographing unit 502, each camera in FIGS. 3, 4, and 6 according to the structural characteristics of the linic type according to FIG. It is possible to photograph light that does not contain an interference signal in a two-dimensional surface image of the object to be measured without the need for an operation of making the focal points different from each other.

On the other hand, the three-dimensional shape measuring device according to the present invention may additionally include a micro-drive device 600 to move the reference mirror 400 or components including the reference mirror, and through this, the reference mirror is moved by Interference fringes can be obtained by matching the optical paths of the light reflected from the reference mirror 400 and the light reflected from the object to be measured.

Here, a device capable of moving a distance in the range of several tens of um (1 to 1000 um) may be used as the micro-drive device 600, and for example, a piezoelectric actuator widely used for fine position control may be used.

For example, the reference mirror 400 in the three-dimensional shape measuring device of the Mirau type according to FIG. 3; Alternatively, the objective lens unit including the reference mirror 400 and the objective lens 410; is vertically vertical in the direction of the extension lines of the first beam splitter 200 and the second beam splitter 300 by the fine driving device 600. By reciprocating driving to enable movement, information on the height of the surface of the object to be measured can be obtained.

On the other hand, the three-dimensional shape measurement apparatus according to the present invention may further include a synchronization board 500 generating a trigger for capturing each camera included in each capturing unit.

For example, as shown in FIG. 3, the three-dimensional shape measuring device according to the present invention may further include a synchronization board 500 generating triggers for capturing images of the cameras of the first and second capturing units. Through this, the interference pattern acquisition section is regularly divided according to the height information of the object to be measured, and in the scanning process according to the step movement of the three-dimensional shape measuring device for each divided section, after each step movement is performed, each plurality of scans for scanning are performed. of camera can be controlled.

In addition, the three-dimensional shape measurement device according to the present invention may additionally include a fine drive controller (not shown) for controlling the fine drive device 600 for fine movement of the reference mirror 400, and the fine drive The control unit may independently control the micro-drive device 600, or combine the control of the micro-drive device 600 with a control signal for generating a trigger for each camera photographing in the synchronization board 500 can be controlled at the same time.

In addition, the three-dimensional shape measurement device according to the present invention may additionally include an image controller (not shown) that serves to process images captured through the first screen capture unit 501 and the second capture unit 502. can

In addition, when the three-dimensional shape measuring device according to the present invention includes the first capturing unit 501 and the second capturing unit 502, the three-dimensional shape measuring device includes i) the first capturing unit 501 and After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal by using any one of the second capture units 502, among the first capture unit 501 and the second capture unit 502 Using the other one, the light emitted from the light source unit 100 and irradiated and reflected on the surface of the object to be measured through the first light splitter 200 and the reference mirror 400 through the first light splitter 200 Obtain 3D shape information by measuring a plurality of images by light of interference fringes in which light from an optical path obtained by reflection in ) is combined; ii) Alternatively, after acquiring 3D shape information by measuring a plurality of images of light of interference fringes using any one of the first and second capture units 501 and 502, the first Acquisition of 2D shape information of a specific surface region of a measurement object without an interference signal by using the other one of the photographing unit 501 and the second photographing unit 502; iii) Alternatively, while measuring a plurality of images by light of an interference fringe using any one of the first and second capture units 501 and 502, the first and second capture units 501 and 502 Using the other one of the photographing units 502, 2D shape information of a specific surface area of the measurement object without an interference signal is obtained, and then, 3D shape information is obtained by measuring an image of the interference fringe by light again. obtain; can be configured to.

In this case, preferably, by moving the reference mirror 400, it is possible to obtain 3D shape information of the object to be measured by measuring a plurality of images of the light of the interference fringe.

In this case, as described above, the movement of the reference mirror 400 can be performed by using the micro-drive device 600, and after first obtaining 2D shape information without an interference signal in the image of the object to be measured. While moving the reference mirror 400 while using the micro-drive device 600, tens to hundreds of images including interference signals are obtained, and based on this, 3D shape information of the measurement object is obtained, or the image In the opposite case in terms of the acquisition order, the 3D shape information of the object to be measured is acquired first and then the 2D shape information is obtained, or the image by the light of the interference fringe is used to acquire the 3D shape information of the object to be measured. It is also possible to obtain 2D shape information during the process of multiple measurements.

On the other hand, in the present invention, a three-dimensional shape measuring device including three or more imaging units, which is expanded from a three-dimensional shape measuring device consisting of only two photographing units for surface image information of a measurement object, at least one of which is 2D shape information of a specific surface area of the object to be measured is obtained by measuring light without an interference signal, and at least one of the remaining imaging units except for the imaging unit that measures the light without an interference signal is caused by the light of the interference fringe. By acquiring a plurality of images, it may be configured to acquire 3D shape information.

More specifically, the three-dimensional shape measuring device according to the present invention includes: between the optical path of the second beam splitter 300 and the first photographing unit 501; or between the optical path of the second optical splitter 300 and the second photographing unit 502; a third light splitter 303 provided in; and a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the third beam splitter 303 captures the light emitted from the second beam splitter 300. The light is divided and irradiated to the third capture unit 503, and the light captured by at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 is As light without an interference signal, it is possible to obtain 2D shape information of the measurement object through this, and also, except for the photographing unit for photographing the light without the interference signal, the remaining two photographing units (first photographing unit 501, Light captured by at least one selected from among the second capture unit 502 and the third capture unit 503 except for the previously selected one) is emitted from the light source unit 100 to form the first beam splitter 200. Light of an interference fringe in which the light irradiated and reflected on the surface of the object to be measured through the first light splitter 200 and the light obtained by the optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined, It is possible to provide a three-dimensional shape measuring device characterized in that it can obtain the three-dimensional shape information of.

That is, the three-dimensional shape measuring device according to the present invention may additionally include a third capturing unit 502 in addition to the configuration of the second capturing unit according to FIG. A detailed description can be made with reference to a Mirau-type three-dimensional shape measuring device.

8 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter 300 ) and the third light splitter 303 is provided between the optical path of the second photographing unit 502, and FIG. It consists of two photographing parts, and the second light splitter 300 is located in the upper optical path of the first light splitter 200, and is located between the second light splitter 300 and the light path of the first photographing part 501. 10 is a view showing the configuration of a three-dimensional shape measuring device equipped with a 3 beam splitter 303, and FIG. 10 is composed of three photographing units according to another embodiment of the present invention, and the second beam splitter 300 is Configuration of a three-dimensional shape measuring device located in the lower optical path of the first optical splitter 200 and provided with the third optical splitter 303 between the second optical splitter 300 and the optical path of the second photographing unit 502 is a drawing showing

That is, in the case of FIGS. 8 and 9, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and in the case of FIG. 10, the second optical splitter 300 is the first optical splitter. 200, and in FIG. 8, a third light splitter 303 is provided between the second light splitter 300 and the light path of the second photographing unit 502, and FIG. A third beam splitter 303 is provided between the optical path of the 2 beam splitter 300 and the first capture unit 501, and FIG. 10 shows the second optical splitter 300 and the second capture unit ( 502) shows a configuration in which a third optical splitter 303 is provided between optical paths.

For example, the three-dimensional shape measurement device according to FIG. 8 includes a third light splitter 303 provided between the second light splitter 300 and the optical path of the second projection unit 502; and a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the third beam splitter 303 captures the light emitted from the second beam splitter 300. The light is split, and the split light reflected from the third beam splitter 303 is irradiated to the third capture unit 503, and the split light passing through the third beam splitter 303 is split into the second capture unit ( 502) will be investigated.

In this case, the light photographed by the first, second, and third photographing units in the three-dimensional shape measuring device according to FIG. 7 is emitted from the light source unit 100 to form the first beam splitter 200. It corresponds to the light of the interference pattern in which the light irradiated and reflected on the surface of the measurement object through the first light splitter 200 and the light obtained by the optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined. By setting the focus of each camera to be different from each other so that at least one of the cameras captures light without an interference signal, the photographing unit that photographs the light without an interference signal captures the light without an interference signal to obtain a two-dimensional surface image of the object to be measured. , and the light photographed by at least one selected from the remaining two photographing units excluding the photographing unit photographing the light without the interference signal is emitted from the light source unit 100 and passes through the first optical splitter 200 to measure the object. Light of an interference fringe in which the light irradiated and reflected on the surface of and the light obtained by the optical path obtained by being reflected from the reference mirror 400 through the first optical splitter 200 are combined, through which the three-dimensional object to be measured is obtained. It enables the acquisition of shape information.

That is, the three-dimensional shape measuring device composed of three photographing units according to FIG. 8 includes a third optical splitter 303 as an additional optical splitter between the optical path of the second beam splitter 300 and the second projection unit 502 And the divided and reflected light can be additionally obtained as image information by an additional photographing unit, and as such a configuration, the present invention provides an optical path of the second optical splitter 300 and the second photographing unit 502. Between 1 to n (n is a natural number of 100 or less), preferably 1 to 8, more preferably 1 to 5, still more preferably 1 to 3 optical splitters and corresponding additionally provided. It may include each photographing unit, and accordingly, in each photographing unit, the light irradiated and reflected on the surface of the object to be measured and an optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 Improved measurement speed through the ability to capture the light of the interference fringe combined with the light by a separate camera. There is an effect of maximizing various horizontal resolutions and dynamic range of the measurement module, and separately from this, at least one of the entire photographing units, including the additional photographing unit, can photograph light without an interference signal, so that the measurement object 2 It can be configured to acquire a dimensional surface image, and this can be equally applied to the three-dimensional shape measuring device according to FIGS. 9 and 10.

For example, in FIG. 9, 1 to n (n is a natural number of 100 or less), preferably 1 to 8, more preferably 1 to n optical paths between the second optical splitter 300 and the first photographing unit 501. may include 1 to 5, more preferably 1 to 3 light splitters and each photographing unit to be additionally provided corresponding thereto, and accordingly, each photographing unit irradiates and reflects light on the surface of the object to be measured. A separate camera captures the light of the interference pattern in which the light of the optical path obtained by passing through the first light splitter 200 and being reflected from the reference mirror 400 is combined, and at least one of the photographing units is an interference signal It can be configured to acquire the 2D surface information of the object to be measured.

10, 1 to n (n is a natural number of 100 or less), preferably 1 to 8, more preferably 1 to n optical paths between the second optical splitter 300 and the second photographing unit 502. Preferably, it may include 1 to 5, more preferably 1 to 3 light splitters and each photographing unit to be additionally provided corresponding thereto. Accordingly, each photographing unit irradiates and reflects on the surface of the object to be measured. The two-dimensional surface of the object to be measured, in which at least one of the photographing units has no interference signal, while capturing the light of the interference pattern in which the light and the light of the optical path obtained by being reflected from the reference mirror 400 are combined with a separate camera. It can be configured to obtain information.

Here, when the three-dimensional shape measurement device according to the present invention further includes a synchronization board 500 generating a trigger for capturing each camera included in each photographing unit, the synchronization board 500 first A trigger can be generated for each camera of the photographing unit to the third photographing unit, and in addition to this, in the present invention, by including a separate photographing unit in addition to the third photographing unit, in the case of including a total of n photographing units A trigger may be generated for photographing of a total of n additionally included cameras.

In addition, the third capture unit in the three-dimensional shape measuring device may include a camera and a tube lens similarly to the first capture unit and the second capture unit.

In addition, when the three-dimensional shape measuring device includes the first capturing unit 501, the second capturing unit 502, and the third capturing unit 503, the three-dimensional shape measuring device i) the first capturing unit 501, the second capture unit 502, and the third capture unit 503 are used to obtain 2D shape information of a specific surface area of a measurement object without an interference signal, and then the interference signal The object to be measured is emitted from the light source unit 100 through the first optical splitter 200 by using at least one of the two remaining capturing units except for the capturing unit that captures the 2D shape information of the specific surface area of the measurement object without By measuring a plurality of images by the light of the interference fringes in which the light irradiated and reflected on the surface of and the light obtained by the optical path obtained by passing through the first light splitter 200 and being reflected from the reference mirror 400 are combined, 3 obtain dimensional shape information; ii) or, by using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 to measure a plurality of images by light of interference fringes, 3D After obtaining the shape information, 2D shape information of a specific surface area of the object to be measured without an interference signal is obtained by using at least one of the two remaining photographing units except for the photographing unit that captures a plurality of images by light of the interference fringe. obtain; iii) Alternatively, while measuring a plurality of images by light of interference fringes using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503, the 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one of the remaining two imaging units except for the imaging unit that captures the image of the light of the interference pattern, and then the interference fringes again. Acquiring 3D shape information by measuring an image by light of; may be configured to.

Even in this case, preferably, by moving the reference mirror 400, it is possible to acquire 3D shape information of the object to be measured by measuring a plurality of light images of the interference fringes.

Meanwhile, the second beam splitter 300, the second capture unit 502, the third beam splitter 303 and additional beam splitters, the third capture unit 503 and the additional The photographing unit is a unique component added in the present invention, which is largely differentiated from the three-dimensional shape measuring device according to the prior art. In the scanning process according to the step movement of the three-dimensional shape measuring device for each section divided according to the height information of the object to be measured, by quickly acquiring a plurality of image information simultaneously or with a close time difference during the scanning process at each step, Improved measurement speed, as opposed to single image information from a single camera. It has the effect of maximizing the dynamic range of various horizontal resolutions and measurement modules.

More specifically, the three-dimensional shape measurement apparatus according to the present invention further includes a synchronization board 500 generating a trigger for shooting of each camera included in each photographing unit, and each photographing unit has the same magnification. It is configured to acquire image information or image information of the same brightness, and by sequentially generating triggers to cameras in each capturing unit in the synchronization board, the scan speed can be increased compared to the case of having a single capturing unit.

In addition, the three-dimensional shape measurement apparatus according to the present invention further includes a synchronization board 500 generating a trigger for shooting of each camera included in each photographing unit, and at least two of each photographing unit By having tube lenses having different magnifications or lenses in the camera having different magnifications, images of different magnifications between specific surface areas of the object to be measured may be simultaneously obtained.

In addition, the three-dimensional shape measurement apparatus according to the present invention further includes a synchronization board 500 generating a trigger for shooting of each camera included in each photographing unit, and at least two of each photographing unit By measuring specific surface regions of the measurement object with different brightness, images of different brightness between specific surface regions of the measurement object may be simultaneously obtained. In this case, preferably, each camera in the imaging unit may have a tube lens having the same magnification or an intra-camera lens having the same magnification.

For example, a three-dimensional shape measuring device composed of two photographing units according to an embodiment of the present invention has two photographing units (cameras) compared to a single photographing unit (camera) according to the prior art, thereby dramatically improving the scan speed. can have an effect That is, when the three-dimensional shape measuring device according to the present invention includes two photographing units (and two cameras accordingly), the synchronization board can generate a trigger for every minute movement at equal intervals as the microdrive device moves. In addition, when each of the two photographing units (cameras) alternately receives the trigger generated from the synchronization board and acquires an image, it is possible to measure at almost twice the speed compared to a single photographing unit (camera) according to the prior art. .

That is, in the time required for image measurement, the control signals such as the control and movement time of the micro-drive device and the synchronization board require a very short time. According to the need for preparation time for shooting, etc., the time actually required for shooting is relatively long compared to the control and movement time of the micro-drive device, and in the present invention, as the micro-drive device moves, By alternately using a plurality of cameras, it is possible to solve the problem caused by the delay of the camera itself in the case of using a single photographing unit (camera), and thus the total required image information acquisition time can be drastically reduced.

For example, in the case of a three-dimensional shape measuring device having two photographing units according to the present invention, when 100 images are required as the total number of images for three-dimensional shape information, the camera in each photographing unit only needs to take 50 images, so a single photograph is taken. It has the advantage that the image acquisition time can be reduced by almost half compared to the case of using a camera (camera).

In addition, the three-dimensional shape measuring device according to the present invention has a variety of horizontal resolution and dynamic range of the measurement module compared to the three-dimensional shape measuring device including only a single photographing unit (camera) according to the prior art through a plurality of photographing units (cameras). There is an effect that can be maximized.

Explaining this in more detail, according to the present invention In a three-dimensional shape measuring device composed of two photographing units (cameras), the case in which the image magnification is different according to each photographing unit (camera) is described. 2 The photographing unit 502 photographs at a low magnification, and in the case of having photographing units (cameras) having different magnifications, the synchronization board 500 photographs each camera at every minute movement at equal intervals according to the movement of the micro-drive device. A trigger is generated, and at this time, each camera simultaneously acquires an image according to the trigger, so that the first photographing unit 501 can provide high-magnification image information for a small area with one scan. The second photographing unit 502 is configured to provide low-magnification image information for a large area, and thus has the advantage of simultaneously acquiring images of different magnifications of a specific surface area of the object to be measured.

In addition, in the three-dimensional shape measuring device composed of two photographing units according to the present invention, when the brightness of the image according to each photographing unit (camera) is different, the first photographing unit 501 captures a dark image, When the second photographing unit 502 is configured to capture a brighter image and has a photographing unit (camera) that measures the brightness of the image differently, each small movement at equal intervals according to the movement of the micro-drive device. The synchronization board 500 generates a trigger for each camera to shoot, and at this time, each camera simultaneously acquires an image according to the trigger, so that the first capture unit 501 shortens the exposure time of the camera ( Alternatively, it is possible to provide information on an image captured so that the exposure is insufficient by using a brightness control filter (eg, ND filter), etc., and the second capture unit 502 takes a long exposure time of the camera (or , It is configured to provide high-exposure image information by taking pictures without using a brightness control filter (eg, ND filter), etc., so that images with various brightness within a specific surface area of the measurement object can be acquired at the same time. Through this, it is possible to measure this when there is a different area of the reflectance in a specific area within the measurement object, and through this, there is an effect of maximizing the dynamic range.

In addition, in the three-dimensional shape measurement apparatus according to the present invention, at least one photographing unit obtains a plurality of image information by measuring light including an interference signal in order to obtain three-dimensional shape information of a measurement object, and separately from this, another One or more photographing units additionally obtain 2D shape information of a clean object to be measured without an interference signal, and in the case of light that does not contain the interference signal, the image of the image does not include an interference fringe, thereby making the surface state of the object to be measured more clearly. Since it can be obtained cleanly and clearly, the operator has the advantage of being able to utilize a clearer two-dimensional image of the object to be measured.

11, FIG. 11 is a photograph showing image information obtained by the three-dimensional shape measuring device according to the present invention when there is an interference signal and when there is no interference signal, and more specifically, one of the present invention In the three-dimensional shape measuring device composed of two photographing units according to the embodiment, an image (right image) obtained by light containing an interference signal by a camera in the first photographing unit and not including an interference signal by a camera in the second photographing unit It is a photograph showing each image (left image) obtained by the light not showing.

As shown in FIG. 11, since the second capture unit 502 does not include an interference signal, it is possible to obtain 2D information of the object to be measured more clearly and cleanly, through which the user can obtain more information about the object to be measured. In a clearly recognized state, in order to obtain 3D shape information of the measurement object, the first photographing unit 501 obtains image information of the measurement object including the interference signal and then moves the reference mirror 400, 3D shape information of the measurement object may be obtained by obtaining image information of the measurement object including the interference signal from the other location and synthesizing them.

On the other hand, when the three-dimensional shape measuring device according to the present invention includes the second light splitter 300 and the second capture unit 502, this is By additionally providing a reflective mirror 350 between optical paths, the light split and irradiated from the second light splitter 300 is reflected by the reflective mirror 350 and irradiated to the second photographing unit 502 in a three-dimensional manner. A shape measuring device can be configured.

12 and 13, FIG. 12 shows that the second optical splitter 300 is located in the upper optical path of the first optical splitter 200 according to another embodiment of the present invention, As a diagram showing the configuration of a three-dimensional shape measuring device including a reflective mirror 350 between the second beam splitter 300 and the second capturing unit 502, the second capturing unit through the introduction of the reflective mirror 350 Since the position can be changed, the overall structure or shape of the three-dimensional shape measuring device can be changed.

Here, the reflection mirror 350 according to the present invention is positioned apart from the second light splitter 300, and reflects the divided light reflected from the second light splitter 300 to the second photographing unit 502. will play a role

13 shows that the second optical splitter 300 is located in the upper optical path of the first optical splitter 200 according to another embodiment of the present invention, and the second optical splitter 300 and the second optical splitter 300 This is a diagram showing the configuration of a linic-type three-dimensional shape measuring device including a reflection mirror 350 between photographing units 502, in which the second beam splitter 300 is the first beam splitter 200, as in FIG. A reference mirror 400 located in an optical path in an upper direction of and facing the light source unit and located in the other direction of the first optical splitter 200 is provided, so that the first photographing unit 501 is the first optical splitter 200 passes through the second beam splitter 300 and captures the split light, and the second photographing unit 502 is irradiated from the first beam splitter 200 and passes through the second beam splitter 300 After being divided by reflection, the light reflected from the reflective mirror 350 is photographed. At this time, the light captured by the first photographing unit and the second photographing unit is emitted from the light source unit 100, respectively, to capture the first image. The light of the interference pattern in which the light irradiated and reflected on the surface of the object to be measured through the light splitter 200 and the light obtained by the optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined. , wherein one of the first capture unit and the second capture unit acquires 2D shape information of a specific surface area of the measurement object without an interference signal, and the other acquires 2D shape information of a specific surface area of the measurement object including an interference signal. It can be configured to acquire 3D shape information of.

That is, the three-dimensional shape measuring device according to the present invention includes a first beam splitter, a second beam splitter 300, a first capture unit and a second capture unit 502, and the second beam splitter 300 and the second beam splitter 300 2 In the case of additionally providing a reflection mirror 350 between the optical paths of the photographing unit 502, the present invention emits light, and the light source unit 100 positioned in one direction of the first light splitter; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned on the other side of the first beam splitter 200 facing the light source unit; And a first photographing unit 501 for photographing the reflected light from the surface of the measurement object that has passed through the first light splitter 200; It is located in the optical path in the lower direction of the light splitter 200, and the light reflected from the surface of the object to be measured is irradiated, splitting the light in the direction of the first light splitter 200 and the second photographing unit 502, respectively; a second light splitter 300; and a second capture unit 502 that captures the light reflected from the second beam splitter 300, wherein any one selected from the first capture unit 501 and the second capture unit 502 is included. The light photographed in is light without an interference signal, through which the two-dimensional shape information of the object to be measured can be obtained, and the photograph is taken by the other one selected from the first photographing unit 501 and the second photographing unit 502. The light emitted from the light source unit 100, passed through the first light splitter 200, irradiated onto the surface of the object to be measured and reflected, and reflected from the reference mirror 400 through the first light splitter 200. It is possible to provide a three-dimensional shape measuring device characterized in that it is possible to obtain three-dimensional shape information of a measurement object through the light of the interference fringe obtained by combining the light by the optical path obtained by this.

For example, the first photographing unit 501 acquires 3D shape information of a measurement object by capturing a plurality of images by photographing light having an interference signal, and the second photographing unit 502 acquires information on the 3D shape of an object without an interference signal. 2D shape information of the object to be measured may be obtained by photographing light, or as described above, each photographing unit may photograph light including or not including an interference signal.

In addition, as an embodiment of the three-dimensional shape measuring device including the reflective mirror 350, the present invention emits light, and is located in one direction of the first light splitter, the light source unit 100; A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ; a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or in the other direction of the first beam splitter 200; And a first photographing unit 501 for photographing the reflected light from the surface of the measurement object passing through the first light splitter 200; The light reflected from the surface and divided through the first beam splitter 200 is irradiated, splitting the light in the direction of the first photographing unit 501 and the reflection mirror 350, respectively, and the first beam splitter 200 ) and the second optical splitter 300 located in the optical path between the first photographing unit 501; a reflection mirror 350 positioned apart from the second beam splitter 300 and reflecting split light reflected from the second beam splitter 300 to a second capture unit 502; and a second photographing unit 502 for photographing the light reflected from the reflection mirror 350, so that the first photographing part 501 is irradiated from the first light splitter 200 to capture the second light After passing through the splitter 300 and photographing the divided light, the second photographing unit 502 is irradiated from the first light splitter 200 and is divided by reflecting the second light splitter 300, and then the reflection Photographing the light reflected from the mirror 350, the three-dimensional shape measuring device further includes a synchronization board 500 generating a trigger for photographing of each camera included in each photographing unit, and the first photographing device The light photographed by any one selected from the unit 501 and the second photographing unit 502 is emitted from the light source unit 100, passes through the first light splitter 200, and is reflected on the surface of the object to be measured. Light of an interference fringe in which light from an optical path obtained by passing through the first light splitter 200 and being reflected from the reference mirror 400 is combined, through which three-dimensional shape information of the object to be measured can be obtained, The light photographed by the other one selected from the first photographing unit 501 and the second photographing unit 502 is light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained. It is possible to provide a three-dimensional shape measuring device that does.

In addition, the three-dimensional shape measuring device according to the present invention includes a first light splitter 200, a second light splitter 300, a third light splitter 303, a first capture unit, a second capture unit 502, and a third light splitter. In the case of including the photographing unit 503, this is achieved by additionally providing a reflection mirror 350 between the optical path of the second optical splitter 300 and the second photographing unit 502, so that the second optical splitter 300 The light divided from ) and irradiated is reflected by the reflective mirror 350 and irradiated to the second photographing unit 502; Alternatively, by additionally providing a reflection mirror 350' between the optical path of the third optical splitter 303 and the third photographing unit 503, the light split from the third optical splitter 303 and irradiated is It may be configured to be reflected by the reflection mirror 350' and irradiated to the third photographing unit 503.

14 and 15, FIG. 14 is composed of three photographing units according to another embodiment of the present invention, and the second optical splitter 300 is located above the first optical splitter 200. Located in the directional optical path, a third optical splitter 303 is provided between the optical path of the second optical splitter 300 and the second capturing unit 502, and the third optical splitter 303 and the second capturing unit 502 are provided. 502 is a diagram showing the configuration of a three-dimensional shape measuring device including a reflection mirror 350, which is a third optical splitter provided between the optical path of the second optical splitter 300 and the reflecting mirror 350. (303); and a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the third beam splitter 303 captures the light emitted from the second beam splitter 300. The light is divided, and the divided light reflected from the third beam splitter 303 is irradiated to the third photographing unit 503, and the divided light passing through the third beam splitter 303 is divided into the reflection mirror 350. ) is configured to investigate.

15 is composed of three photographing units according to another embodiment of the present invention, the second optical splitter 300 is located in the upper optical path of the first optical splitter 200, and the second optical splitter A third beam splitter 303 is provided between the optical path of the optical path of the optical path 300 and the second capture unit 502, and a reflection mirror 350' is provided between the third optical splitter 303 and the third capture unit 503. As a diagram showing the configuration of a three-dimensional shape measuring device including a), the position of the third photographing unit 503 can be changed through the introduction of the reflection mirror 350' according to FIG. 15, and the overall structure of the three-dimensional shape measuring device Or the shape can be changed.

In this case, as an embodiment of the present invention, the three-dimensional shape measuring device includes a third light splitter 303 provided between the optical path of the second light splitter 300 and the reflection mirror 350; And a third photographing unit 503 for photographing the light reflected and split from the third beam splitter 303, wherein the synchronization board 500 in the three-dimensional shape measuring device includes a camera included in the third photographing unit. A trigger may be generated for the photographing of, and the third beam splitter 303 splits the light irradiated from the second beam splitter 300, and the divided light reflected from the third beam splitter 303 The light irradiated to the third capture unit 503, passed through the third beam splitter 303, and split is irradiated to the reflection mirror 350, and the first capture unit 501 and the second capture unit 502 ) And the light photographed by at least one selected from the third photographing unit 503 is emitted from the light source unit 100 and irradiated onto the surface of the measurement object through the first light splitter 200 and reflected light, It is the light of the interference fringe in which the light by the light path obtained by being reflected from the reference mirror 400 through the first light splitter 200 is combined, through which the three-dimensional shape information of the object to be measured can be obtained. The light captured by at least one selected from the remaining two imaging units excluding the imaging unit that photographs the light of the interference fringe is light without an interference signal, through which 2D shape information of the object to be measured can be obtained.

Here, the reflective mirrors 350 and 350' according to the present invention are positioned apart from the second light splitter 300 or the third light splitter 300, and are reflected from the second light splitter 300 and divided. The light is reflected to the second capture unit 502 (350, see FIG. 14) or the divided light reflected from the third beam splitter 303 is reflected to the third capture unit 503 (350′, see FIG. 15). ) will play a role.

The reflective mirrors 350 and 350' in the three-dimensional shape measuring device according to the present invention are the positions of the second optical splitter 300 and the third optical splitter 303 in addition to the positions of the reflective mirrors according to FIGS. 12 to 15. It can be variously modified according to various combinations and Michelson type, Mirau type, and Linic type according to.

In addition, when the three-dimensional shape measuring device in the present invention includes the reflective mirrors 350 and 350', it may additionally include a micro-drive device 600 to move the reference mirror 400, Each of the photographing units may include a camera and a tube lens, respectively.

In addition, when the three-dimensional shape measurement device includes the first light splitter 200, the second light splitter 300, the first and second capture units 502, the three-dimensional shape measurement device i) After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal by using either the first capture unit 501 or the second capture unit 502, the reference mirror 400 is moved. While using the other one of the first capture unit 501 and the second capture unit 502, the light emitted from the light source unit 100 passes through the first light splitter 200 and is irradiated onto the surface of the object to be measured and reflected. Obtaining 3D shape information or ; ii) Alternatively, after acquiring 3D shape information by measuring a plurality of images of light of interference fringes using any one of the first and

second capture units

501 and 502, the first and

second capture units

501 and 502 Using the other one of the photographing units 502, 2D shape information of a specific surface area of the measurement object without an interference signal is obtained, and then, 3D shape information is obtained by measuring an image of the interference fringe by light again. obtain; can be configured to.

In addition, the three-dimensional shape measuring device according to the present invention includes a first light splitter 200, a second light splitter 300, a third light splitter 303, a first capture unit, a second capture unit 502, and a second light splitter 502. In the case of including 3 capture units 503, this is i) the interference signal is generated by using at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503. After acquiring the 2D shape information of the specific surface area of the object to be measured, while moving the reference mirror 400,

The first beam splitter 200 is emitted from the light source unit 100 by using at least one of the two remaining capturing units except for the capturing unit that captures the 2D shape information of the specific surface area of the measurement object without the interference signal. Measurement of multiple images of light of interference fringes in which the light irradiated and reflected on the surface of the measurement object through the first optical splitter 200 and the optical path obtained by being reflected from the reference mirror 400 through the first optical splitter 200 are combined By doing so, obtaining three-dimensional shape information; ii) or, by using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 to measure a plurality of images by light of interference fringes, 3D After obtaining the shape information, 2D shape information of a specific surface area of the object to be measured without an interference signal is obtained by using at least one of the two remaining photographing units except for the photographing unit that captures a plurality of images by light of the interference fringe. obtain; iii) Alternatively, while measuring a plurality of images by light of interference fringes using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503, the 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one of the remaining two imaging units except for the imaging unit that captures the image of the light of the interference pattern, and then the interference fringes again. Obtaining 3D shape information by measuring an image by light of; can be obtained.

In addition, when the three-dimensional shape measuring device in the present invention includes the reflective mirrors 350 and 350', the three-dimensional shape measuring device synchronizes generating a trigger for shooting of each camera included in each photographing unit. It may further include a board 500. In this case, each photographing unit is configured to obtain image information of the same magnification or image information of the same brightness, and sequentially from the synchronization board to the camera in each photographing unit. By generating a trigger, the scan speed can be increased compared to the case of having a single imaging unit, or at least two of each imaging unit have tube lenses of different magnifications or intra-camera lenses of different magnifications, thereby measuring Images of different magnifications of a specific surface area of the object can be acquired simultaneously, or at least two of each photographing unit measures the specific surface area of the measurement object with different brightness, so that different magnifications of the specific surface area of the measurement object can be obtained. Brightness images can be acquired simultaneously.

The present invention has been described above with reference to the embodiments shown in the drawings, but this is only exemplary, and those skilled in the art can make various modifications and equivalent other embodiments. you will understand the point. Therefore, the technical protection scope of the present invention should be defined by the claims below.

The three-dimensional shape measuring device according to the present invention enables measurement of two-dimensional information and three-dimensional information about a measurement object compared to single three-dimensional shape information according to a conventional single camera, so that observation in a specific area of the measurement object is more accurate. It can be done efficiently, conveniently and quickly, reducing the overall measurement time to obtain three-dimensional shape information in industrial fields that require measurement of three-dimensional shape information, and at the same time enabling users to measure more efficient three-dimensional shape information can provide.

Claims

a light source unit 100 that emits light and is positioned in one direction of the first light splitter;

A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ;

a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or opposite the light source unit to the other side of the first beam splitter 200; and

In the three-dimensional shape measurement device comprising a; first photographing unit 501 for photographing the reflected light from the surface of the measurement object passing through the first light splitter 200;

The three-dimensional shape measurement device is located in the upper optical path of the first light splitter 200, and the light reflected from the surface of the object to be measured and split through the first light splitter 200 is irradiated, Splitting the light in the directions of the photographing unit 501 and the second photographing unit 502, respectively; Alternatively, it is located in the lower optical path of the first optical splitter 200, and the light reflected from the surface of the object to be measured is irradiated in the direction of the first optical splitter 200 and the second capturing unit 502, respectively. a second light splitter 300 that splits the light; and

Further comprising a second photographing unit 502 for photographing the light reflected from the second beam splitter 300,

The light photographed by any one selected from the first photographing unit 501 and the second photographing unit 502 is light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained,

The light photographed by the other one selected from the first photographing unit 501 and the second photographing unit 502 is emitted from the light source unit 100 and irradiated onto the surface of the measurement object through the first light splitter 200. It is the light of the interference fringe in which the reflected light and the light by the light path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined, through which the 3D shape information of the object to be measured can be obtained. A three-dimensional shape measuring device characterized in that it can.
According to claim 1,

The three-dimensional shape measurement device may include between the optical path of the second optical splitter 300 and the first photographing unit 501; or between the optical path of the second optical splitter 300 and the second photographing unit 502; a third light splitter 303 provided in; And a third photographing unit 503 for photographing the divided light reflected from the third beam splitter 303,

The third beam splitter 303 splits the light emitted from the second beam splitter 300 and irradiates it to the third capture unit 503,

The light captured by at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503 is light without an interference signal, through which the 2D shape information of the object to be measured is obtained. can be obtained,

In addition, the light photographed by at least one selected from the remaining two photographing units excluding the photographing unit photographing the light without the interference signal is emitted from the light source unit 100 and passed through the first optical splitter 200 to the surface of the measurement object. It is the light of the interference pattern in which the light irradiated and reflected is combined with the light from the optical path obtained by passing through the first light splitter 200 and being reflected from the reference mirror 400, through which the 3D shape information of the object to be measured is obtained. A three-dimensional shape measuring device characterized in that it can obtain.
According to claim 1 or 2,

The three-dimensional shape measurement device, characterized in that it additionally comprises a micro-drive device (600) for the movement of the reference mirror (400).
According to claim 1 or 2,

The three-dimensional shape measuring device is characterized in that the three-dimensional shape measuring device is any one type selected from the Michelson type, Mirau type and Linik type.
According to claim 1 or 2,

The three-dimensional shape measuring device further comprises a synchronization board (500) generating a trigger for shooting of each camera included in each photographing unit.
According to claim 1 or 2,

The three-dimensional shape measuring device, characterized in that each of the photographing unit includes a camera and a tube lens, respectively.
According to claim 1 or 2,

The first light splitter 200 and the second light splitter 300 in claim 1 are each one of a cubic type, a pellicle type, or a plate type,

The first to third beam splitters 200 to 300 in claim 2 are three-dimensional shapes, each of which is a Cubic type, a Pellicle type, or a Plate type. Device.
According to claim 1,

The three-dimensional shape measuring device,

i) After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal using either the first capture unit 501 or the second capture unit 502,

Obtaining 3D shape information by measuring a plurality of light images of interference fringes using the other one of the first capturing unit 501 and the second capturing unit 502;

ii) Alternatively, after acquiring 3D shape information by measuring a plurality of images of light of interference fringes using any one of the first and second capture units 501 and 502, the first Acquisition of 2D shape information of a specific surface region of a measurement object without an interference signal by using the other one of the photographing unit 501 and the second photographing unit 502;

iii) Alternatively, while measuring a plurality of images by light of an interference fringe using any one of the first and second capture units 501 and 502, the first and second capture units 501 and 502 Using the other one of the photographing units 502, 2D shape information of a specific surface area of the measurement object without an interference signal is obtained, and then, 3D shape information is obtained by measuring an image of the interference fringe by light again. Obtaining; three-dimensional shape measuring device characterized in that.
According to claim 2,

The three-dimensional shape measuring device

i) 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503. After obtaining

3D shape information is obtained by measuring a plurality of images by light of interference fringes using at least one of the remaining two capturing units except for the capturing unit that captures the 2D shape information of the specific surface area of the measurement object without the interference signal. or obtain;

ii) or, by using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 to measure a plurality of images by light of interference fringes, 3D After obtaining the shape information, 2D shape information of a specific surface area of the object to be measured without an interference signal is obtained by using at least one of the two remaining photographing units except for the photographing unit that captures a plurality of images by light of the interference fringe. obtain;

iii) Alternatively, while measuring a plurality of images by light of interference fringes using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503, the 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one of the remaining two imaging units except for the imaging unit that captures the image of the light of the interference pattern, and then the interference fringes again. Obtaining three-dimensional shape information by measuring an image by light of the; three-dimensional shape measuring device characterized in that.
According to claim 1 or 2,

A camera in the photographing unit for photographing light without the interference signal and a camera in the photographing unit for photographing light including the interference signal are different in focus from each other, in the photographing unit for photographing the light without the interference signal. A three-dimensional shape measuring device characterized in that there is no interference signal.
According to claim 1,

By additionally providing a reflection mirror 350 between the optical path of the second optical splitter 300 and the second photographing unit 502,

The three-dimensional shape measuring device, characterized in that the light split and irradiated from the second beam splitter 300 is reflected by the reflection mirror 350 and irradiated to the second photographing unit 502.
According to claim 2,

By additionally providing a reflective mirror 350 between the optical path of the second optical splitter 300 and the second photographing unit 502, the light split and irradiated from the second optical splitter 300 is reflected through the reflective mirror ( 350) and irradiated to the second photographing unit 502;

Alternatively, by additionally providing a reflection mirror 350' between the optical path of the third optical splitter 303 and the third photographing unit 503, the light split from the third optical splitter 303 and irradiated is A three-dimensional shape measuring device characterized by being reflected by the reflection mirror 350' and irradiated to the third photographing unit 503.
a light source unit 100 that emits light and is positioned in one direction of the first light splitter;

A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ;

a reference mirror 400 positioned on the other side of the first beam splitter 200 facing the light source unit; and

In the three-dimensional shape measurement device comprising a; first photographing unit 501 for photographing the reflected light from the surface of the measurement object passing through the first light splitter 200;

The three-dimensional shape measurement device is located in the lower optical path of the first light splitter 200, and the light reflected from the surface of the object to be measured is irradiated, and the first light splitter 200 and the second photographing unit ( 502) a second light splitter 300 splitting light in each direction; and

Further comprising a second photographing unit 502 for photographing the light reflected from the second beam splitter 300,

The light photographed by any one selected from the first photographing unit 501 and the second photographing unit 502 is light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained,

The light photographed by the other one selected from the first photographing unit 501 and the second photographing unit 502 is emitted from the light source unit 100 and irradiated onto the surface of the measurement object through the first light splitter 200. It is the light of the interference fringe in which the reflected light and the light by the light path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined, through which the 3D shape information of the object to be measured can be obtained. A three-dimensional shape measuring device characterized in that it can.
a light source unit 100 that emits light and is positioned in one direction of the first light splitter;

A first beam splitter 200 that splits the light emitted from the light source unit 100 in the direction of the object to be measured 700, and splits and passes reflected light from the surface of the object to be measured in the direction of the first photographing unit 501 ;

a reference mirror 400 positioned between the first beam splitter 200 and the object to be measured 700 or in the other direction of the first beam splitter 200; and

In the three-dimensional shape measurement device comprising a; first photographing unit 501 for photographing the reflected light from the surface of the measurement object passing through the first light splitter 200;

The three-dimensional shape measuring device irradiates light that is reflected from the surface of the object to be measured and divided through the first beam splitter 200, and splits the light in the direction of the first photographing unit 501 and the reflection mirror 350, respectively. and a second optical splitter 300 located in an optical path between the first optical splitter 200 and the first photographing unit 501;

a reflection mirror 350 positioned apart from the second beam splitter 300 and reflecting split light reflected from the second beam splitter 300 to a second photographing unit 502; and

By further comprising a second photographing unit 502 for photographing the light reflected from the reflection mirror 350,

The first photographing unit 501 captures the divided light emitted from the first light splitter 200 and passing through the second light splitter 300;

The second photographing unit 502 captures the light reflected from the first beam splitter 200, reflected from the second beam splitter 300, divided, and reflected from the reflection mirror 350;

The three-dimensional shape measurement device further includes a synchronization board 500 for generating a trigger for shooting of each camera included in each photographing unit,

Light captured by any one selected from the first capture unit 501 and the second capture unit 502 is emitted from the light source unit 100 and irradiated onto the surface of the measurement object through the first light splitter 200. It is the light of the interference fringe in which the reflected light and the light from the optical path obtained by being reflected from the reference mirror 400 through the first light splitter 200 are combined, through which the 3D shape information of the object to be measured is obtained. can do,

The light photographed by the other one selected from the first photographing unit 501 and the second photographing unit 502 is light without an interference signal, through which two-dimensional shape information of the object to be measured can be obtained. A three-dimensional shape measuring device.
According to claim 14,

The three-dimensional shape measuring device includes a third optical splitter 303 provided between the optical path of the second optical splitter 300 and the reflection mirror 350; And a third photographing unit 503 for photographing the divided light reflected from the third beam splitter 303,

The synchronizing board 500 in the three-dimensional shape measurement device may generate a trigger for shooting by a camera included in the third shooting unit,

The third beam splitter 303 splits the light emitted from the second beam splitter 300, and the divided light reflected from the third beam splitter 303 is irradiated to the third capture unit 503, The split light passing through the third light splitter 303 is irradiated to the reflection mirror 350,

Light captured by at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503 is emitted from the light source unit 100, respectively, to form a first beam splitter 200. Light of an interference fringe in which light irradiated and reflected on the surface of the object to be measured through and reflected from the reference mirror 400 through the first light splitter 200 is combined with light from an optical path, which is measured through 3D shape information of the object can be acquired,

In addition, the light photographed by at least one selected from the remaining two photographing units excluding the photographing unit photographing the light of the interference fringe is light without an interference signal, through which the two-dimensional shape information of the object to be measured can be obtained. Characterized by a three-dimensional shape measuring device.
According to any one of claims 13 to 15,

The three-dimensional shape measurement device, characterized in that it additionally comprises a micro-drive device (600) for the movement of the reference mirror (400).
According to any one of claims 13 to 15,

The three-dimensional shape measuring device is characterized in that the three-dimensional shape measuring device is any one type selected from the Michelson type, Mirau type and Linik type.
According to any one of claims 13 to 15,

The three-dimensional shape measuring device, characterized in that each of the photographing unit includes a camera and a tube lens, respectively.
According to claim 13 or 14,

The three-dimensional shape measuring device

i) After obtaining 2D shape information of a specific surface area of a measurement object without an interference signal using either the first capture unit 501 or the second capture unit 502,

Obtaining 3D shape information by measuring a plurality of light images of interference fringes using the other one of the first capturing unit 501 and the second capturing unit 502;

ii) Alternatively, after obtaining 3D shape information by measuring a plurality of images of light of interference fringes using any one of the first and second capture units 501 and 502, the first Acquisition of 2D shape information of a specific surface region of a measurement object without an interference signal by using the other one of the photographing unit 501 and the second photographing unit 502;

iii) Alternatively, while measuring a plurality of images by light of an interference fringe using any one of the first and second capture units 501 and 502, the first and second capture units 501 and 502 Using the other one of the photographing units 502, 2D shape information of a specific surface area of the measurement object without an interference signal is obtained, and then, 3D shape information is obtained by measuring an image of the interference fringe by light again. Obtaining; three-dimensional shape measuring device characterized in that.
According to claim 15,

The three-dimensional shape measuring device

i) 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one selected from among the first capture unit 501, the second capture unit 502, and the third capture unit 503. After obtaining

3D shape information is obtained by measuring a plurality of images by light of interference fringes using at least one of the remaining two capturing units except for the capturing unit that captures the 2D shape information of the specific surface area of the measurement object without the interference signal. or obtain;

ii) or, by using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503 to measure a plurality of images by light of interference fringes, 3D After obtaining the shape information, 2D shape information of a specific surface area of the object to be measured without an interference signal is obtained by using at least one of the two remaining photographing units except for the photographing unit that captures a plurality of images by light of the interference fringe. obtain;

iii) Alternatively, while measuring a plurality of images by light of interference fringes using at least one selected from the first capture unit 501, the second capture unit 502, and the third capture unit 503, the 2D shape information of a specific surface area of a measurement object without an interference signal is obtained by using at least one of the remaining two imaging units except for the imaging unit that captures the image of the light of the interference pattern, and then the interference fringes again. Obtaining three-dimensional shape information by measuring an image by light of the; three-dimensional shape measuring device characterized in that.