WO2010134669A1 - 3d shape measurement apparatus - Google Patents

3d shape measurement apparatus Download PDF

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Publication number
WO2010134669A1
WO2010134669A1 PCT/KR2009/005165 KR2009005165W WO2010134669A1 WO 2010134669 A1 WO2010134669 A1 WO 2010134669A1 KR 2009005165 W KR2009005165 W KR 2009005165W WO 2010134669 A1 WO2010134669 A1 WO 2010134669A1
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beam splitter
distance
measurement
reference mirror
shape measuring
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PCT/KR2009/005165
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French (fr)
Korean (ko)
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임쌍근
이상윤
유준호
장석준
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주식회사 인텍플러스
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Publication of WO2010134669A1 publication Critical patent/WO2010134669A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses

Definitions

  • the present invention relates to a three-dimensional shape measuring apparatus, and more particularly, the beam splitter moving means to adjust the reference plane reflection distance and the reference plane reflection distance equal to the lowest point reflection distance and the lowest point reflection distance to the measurement object having the highest point and the lowest point difference.
  • the present invention relates to a three-dimensional shape measuring apparatus that can be installed in a beam splitter so that the reflection distance can be adjusted by adjusting the position of the beam splitter, thereby simplifying the overall structure.
  • the fine surface shape of precision parts can be measured by stylus type measurement, scanning electron microscopy, scanning probe microscope, and phase shifting interferometry. ), White-light scanning interferometry, and confocal scanning microscopy.
  • These methods mainly measure geometric shapes on two-dimensional planes, such as circles, lines, angles, and line widths, or inspect patterns for defects, foreign objects, and asymmetry, and are typically represented by optical microscopes, illumination, and CCD cameras. It is based on a probe system composed of imaging devices and image processing technology.
  • the white light scanning interferometer and the optical phase interferometer are three-dimensional measurements of micro shapes such as semiconductor pattern measurement, surface roughness measurement of soft materials, ball grid array (BGA) ball measurement, laser marking pattern measurement, and via hole measurement. It is attracting attention as a non-contact measuring method widely applied to the first half.
  • optical interference in which light originates from a certain reference point and travels together in different optical paths and then merges, resulting in light and dark forms in accordance with the optical path difference. Use the signal.
  • FIG. 2 is a configuration diagram of a conventional three-dimensional shape measuring device, the illumination light from the light source 100 is divided through the beam splitter 200, respectively, the reference plane (hereinafter referred to as “reference mirror”) 300 and the measurement object It is irradiated to the measurement target surface (hereinafter referred to as “measurement surface”), and reflected by the reference mirror 300 and the measurement surface and then merged through a beam splitter.
  • reference mirror the reference plane
  • measurement object the measurement object
  • the combined interference fringe is detected through a photographing apparatus 400 such as a CCD camera and the control computer 500 calculates the phase of the interference fringe, or extracts the point of maximum coherence from the envelope of the interference fringe. Make a height measurement.
  • a photographing apparatus 400 such as a CCD camera
  • the control computer 500 calculates the phase of the interference fringe, or extracts the point of maximum coherence from the envelope of the interference fringe. Make a height measurement.
  • the interference fringe appears at the point where the distance from the beam splitter to the measurement plane and the distance from the beam splitter match the reference mirror. Accordingly, for the measurement target having the step, the interference fringe is obtained according to the height information. After regularly dividing the interval, the interference pattern is obtained while the reference mirror or the measurement target is moved finely for each divided interval, and then the surface shape is measured by synthesizing the obtained multiple interference patterns.
  • the support means (tilting stage, etc.) 310 for movably supporting the reference mirror are provided. It is configured to adjust the distance between the beam splitter and the reference mirror by using the entire support means using an actuator (not shown) in the state, and thus for moving the support means and the support means for supporting the reference mirror to be movable.
  • an actuator not shown
  • the overall structure of the three-dimensional shape measuring device is not only complicated, but the overall size is too large.
  • a beam splitter moving means that can move the beam splitter in the beam splitter by moving the beam splitter and configured to adjust the reflection distance It is an object of the present invention to provide a three-dimensional shape measuring apparatus that can simplify the structure.
  • the three-dimensional shape measuring device of the present invention for solving the above problems is divided into a light source, a beam splitter for dividing the illumination light from the light source and irradiating the illumination light to the measurement object, a reference mirror to which the illumination light from the beam splitter is irradiated;
  • a three-dimensional shape measuring device comprising a photographing apparatus for photographing a surface of a measurement object and an interference fringe reflected and reflected from the reference mirror, and a control computer for processing an image photographed by the photographing apparatus, wherein the beam splitter includes the measurement.
  • a beam splitter moving means for adjusting the position of the beam splitter so as to provide a reflection distance equal to the maximum reflection distance of the highest point of the object and the lowest reflection distance of the measurement object, respectively.
  • the reference mirror is fixed, and the beam splitter is moved through the beam splitter moving means to adjust the reference plane reflecting distance and the same reference plane reflecting distance as the lowest reflecting distance to the measurement object.
  • FIG. 1 is a block diagram of a three-dimensional shape measuring apparatus according to the present invention.
  • FIG. 2 is a configuration diagram of a conventional three-dimensional shape measuring device.
  • Figure 1 is a configuration diagram of a three-dimensional shape measuring apparatus according to the present invention
  • Figure 2 is a configuration diagram of a conventional three-dimensional shape measuring apparatus.
  • the three-dimensional shape measuring device is provided with beam splitter moving means 20 for moving the beam splitter 2.
  • the present invention is configured such that the beam splitter 2 can be moved to adjust the reference plane reflection distance equal to the lowest point reflection distance and the reference plane reflection distance equal to the lowest point reflection distance to the measurement object. By moving, the distance between the beam splitter and the reference mirror 3 is adjusted so that the reflection distance can be adjusted.
  • the stereoscopic image measuring apparatus of the present invention includes a light splitter 2, a beam splitter 2 for dividing illumination light from the light source 1 and irradiating illumination light onto a measurement object, and illumination light from the beam splitter 2.
  • a photographing apparatus 4 for photographing a reference mirror 3 to be irradiated, a surface of a measurement object, and an interference fringe reflected from the reference mirror 3 and merged, and an image photographed by the photographing apparatus 4 It comprises a control computer (5), the beam splitter (2) to provide a beam splitter (2) to provide a reflection distance equal to the reflection distance of the highest point of the measurement target and the lowest reflection distance of the measurement target (3), respectively. It is provided with a beam splitter moving means 20 for adjusting the position of 2).
  • Each component constituting the stereoscopic image measuring apparatus according to the present invention has the same function as that of the conventional stereoscopic image measuring apparatus, but will be outlined as follows.
  • the light source 1 may measure the shape of the measurement surface of the measurement object from the interference fringe formed on the reflection of the light as a means for irradiating light to the measurement object.
  • the interference pattern formed by the light emitted from the light source 1 is a pattern that is reflected by the reference mirror 3 and the measurement surface of the measurement object and then merged through the beam splitter 2 to obtain the interference pattern. 2) and the distance between the measurement plane and the distance from the beam splitter 2 to the reference mirror 3 should match. Accordingly, for the measurement target having the step, the interference fringe acquisition section is regularly divided according to the height information. After the interference pattern is obtained while the reference mirror 3 or the measurement object is moved in detail for each divided section, the surface shape is measured by synthesizing the obtained plurality of interference patterns.
  • the present invention is provided with the beam splitter moving means 20 as a means for adjusting the distance between the beam splitter 2 and the reference mirror 3 in this way.
  • the beam splitter 2 Since the distance to be adjusted between the empty splitter 2 with the reference mirror 3 through the beam splitter moving means 20 is very fine, the beam splitter 2 should be able to be moved very finely, and thus the beam splitter 2 In order to finely move), a micro driver may be used as the beam splitter moving means 20.
  • micro-drivers capable of finely moving the beam splitter 2 are not limited to any one.
  • a piezoelectric driver which is used for fine position adjustment is preferable.
  • the beam splitter may be configured using any one of cubic type, thin film type, or flat plate type, and one of the beam splitters has already been used. Omit.
  • the beam splitter moving means 20 provided as a means for moving the beam splitter 2 has been described only by adjusting the distance between the beam splitter 2 and the reference mirror 3, which is a beam splitter ( It can also be used as a means for adjusting the distance between the 2) and the measurement object, the position where the beam splitter moving means 20 is installed, the light passing through the beam splitter 2 is the reference mirror (3), the measurement object And it is sufficient if it is installed in a position that does not interfere with the transfer to the photographing apparatus (4).
  • the beam splitter may acquire the interference signal reflected from the measurement object by moving in the horizontal direction toward the reference mirror (in the drawing) or the vertical direction toward the measurement object (in the drawing).
  • Reference numeral 11 denotes a collimating lens that transmits the light of the light source to the beam splitter
  • reference numeral 41 denotes an imaging lens that focuses the reflected light with the photographing apparatus.
  • the beam splitter is moved by a beam splitting means installed in the beam splitter so that the reference plane reflecting distance and the same reference plane reflecting distance as the lowest reflecting distance to the measurement object can be adjusted so that stereoscopic image measurement is possible.
  • the overall structure of the device can be simplified.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention relates to a 3D shape measurement apparatus wherein a beam splitter moving means is installed on a beam splitter to adjust a distance of light reflected from a reference surface, which is identical with the distance of light reflected from the lowest point with respect to a measurement target having difference between the highest and lowest points, and a distance of light reflected from a reference surface which is identical with the distance of light reflected from the lowest point. The distance of light reflected can be adjusted by adjusting the position of the beam splitter, thereby simplifying the overall structure.

Description

입체 형상 측정장치Three-dimensional shape measuring device
본 발명은 입체 형상 측정 장치에 관한 것으로서, 더욱 상세하게는 최고점과 최저점 단차를 가지는 측정 대상물에 대한 최저점 반사거리와 동일한 기준면 반사거리 및 최저점 반사거리와 동일한 기준면 반사거리를 조절할 수 있도록 빔분할기 이동수단을 빔분할기에 설치하여 빔분할기의 위치를 조절함에 의해 반사거리가 조절될 수 있게 함으로써, 전체적인 구조를 단순화시킬 수 있게 한 입체 형상 측정장치에 관한 것이다. The present invention relates to a three-dimensional shape measuring apparatus, and more particularly, the beam splitter moving means to adjust the reference plane reflection distance and the reference plane reflection distance equal to the lowest point reflection distance and the lowest point reflection distance to the measurement object having the highest point and the lowest point difference. The present invention relates to a three-dimensional shape measuring apparatus that can be installed in a beam splitter so that the reflection distance can be adjusted by adjusting the position of the beam splitter, thereby simplifying the overall structure.
정밀 부품의 미세한 표면 형상을 측정하는 방법으로는 촉침식(Stylus type) 측정법, 주사식 전자 현미경(Scanning Electron Microscope) 측정법, 주사식 촉침 현미경(Scanning Probe Microscope) 측정법, 광위상 천이 간섭계(Phase Shifting Interferometry) 측정법, 백색광 주사 간섭계(White-Light Scanning Interferometry) 측정법, 동초점 주사 현미경(Confocal Scanning Microscope) 측정법 등이 있다.The fine surface shape of precision parts can be measured by stylus type measurement, scanning electron microscopy, scanning probe microscope, and phase shifting interferometry. ), White-light scanning interferometry, and confocal scanning microscopy.
이러한 측정법들은 주로 2차원 평면상의 기하학적 형상, 예를 들어 원이나 선, 각도, 선폭 등을 측정하거나 패턴의 결함, 이물질, 비대칭성 등을 검사하며, 주로 광학 현미경, 조명, 그리고 CCD 카메라로 대표되는 촬상소자로 구성된 프로브 시스템과 영상처리기술에 그 바탕을 두고 있다.These methods mainly measure geometric shapes on two-dimensional planes, such as circles, lines, angles, and line widths, or inspect patterns for defects, foreign objects, and asymmetry, and are typically represented by optical microscopes, illumination, and CCD cameras. It is based on a probe system composed of imaging devices and image processing technology.
이들 측정법 중에서 백색광 주사 간섭계 측정법 및 광위상 천이 간섭계 측정법은 반도체 패턴 측정에서부터 연질재료의 표면 거칠기 측정, BGA(Ball Grid Array) 볼 측정, 레이저 마킹 패턴 측정, Via Hole 측정 등 미세형상에 대한 3차원 측정 전반에 폭넓게 적용되는 비접촉식 측정법으로서 각광을 받고 있다.Among these measurement methods, the white light scanning interferometer and the optical phase interferometer are three-dimensional measurements of micro shapes such as semiconductor pattern measurement, surface roughness measurement of soft materials, ball grid array (BGA) ball measurement, laser marking pattern measurement, and via hole measurement. It is attracting attention as a non-contact measuring method widely applied to the first half.
이들 두 가지 측정법은 서로 다른 측정 원리에 기초한 것이지만 다중파장과 단색파장을 이용한다는 점을 제외하고는 동일한 광학 및 측정 시스템에서 구현할 수 있으므로 상용화된 측정 시스템에서는 이 두 가지 측정법을 함께 이용할 수 있다.Although these two methods are based on different measurement principles, they can be implemented in the same optical and measurement system except that they use multiple wavelengths and monochromatic wavelengths, so they can be used together in commercial measurement systems.
이들 측정법은 임의의 기준점에서 동시에 출발한 광이 각기 다른 광경로(Optical Path)를 이동한 후 합쳐질 때 두 개의 광이 지난 거리차(Optical Path Difference)에 따라 빛이 밝고 어두운 형태로 표현되는 광 간섭 신호를 이용한다. These measurements are based on optical interference, in which light originates from a certain reference point and travels together in different optical paths and then merges, resulting in light and dark forms in accordance with the optical path difference. Use the signal.
도 2는 기존의 입체 형상 측정장치의 구성도로서, 광원(100)으로부터의 조명광이 빔분할기(200)를 통해 분할되어 각각 기준면(이하, "기준미러"라 통칭함)(300)와 측정 대상물의 측정 대상면(이하, "측정면"이라 통칭함)에 조사되고, 기준미러(300)와 측정면에서 반사된 후 빔분할기를 통해 합쳐진다. 2 is a configuration diagram of a conventional three-dimensional shape measuring device, the illumination light from the light source 100 is divided through the beam splitter 200, respectively, the reference plane (hereinafter referred to as "reference mirror") 300 and the measurement object It is irradiated to the measurement target surface (hereinafter referred to as "measurement surface"), and reflected by the reference mirror 300 and the measurement surface and then merged through a beam splitter.
이렇게 합쳐진 간섭무늬를 CCD 카메라와 같은 촬영장치(400)를 통해 검출하고 제어 컴퓨터(500)에서 간섭 무늬의 위상 계산하거나, 또는 간섭 무늬의 포락선(envelope)으로부터 가간섭성이 최대인 점을 추출해서 높이 측정을 한다. The combined interference fringe is detected through a photographing apparatus 400 such as a CCD camera and the control computer 500 calculates the phase of the interference fringe, or extracts the point of maximum coherence from the envelope of the interference fringe. Make a height measurement.
이러한 입체 형상 측정장치에서 간섭무늬는 빔분할기로부터 측정면과의 거리 및 빔분할기로부터 기준미러와의 거리가 일치하는 지점에서 나타나고, 이에 따라, 단차를 가지는 측정 대상에 대해서는 높이 정보에 따라 간섭무늬 획득 구간을 일정하게 분할한 후, 분할된 구간별로 기준미러나 측정 대상을 미소 이동시키면서 간섭무늬를 획득해한 후 획득된 다수의 간섭무늬를 합성하여 표면 형상을 측정해야 한다. In the three-dimensional shape measuring device, the interference fringe appears at the point where the distance from the beam splitter to the measurement plane and the distance from the beam splitter match the reference mirror. Accordingly, for the measurement target having the step, the interference fringe is obtained according to the height information. After regularly dividing the interval, the interference pattern is obtained while the reference mirror or the measurement target is moved finely for each divided interval, and then the surface shape is measured by synthesizing the obtained multiple interference patterns.
이렇게 빔분할기로부터 측정면과의 거리 및 빔분할기로부터 기준미러와의 거리를 조절하기 위한 수단으로 도시한 바와 같이 기준미러를 이동 가능하게 지지하기 위한 지지수단(틸팅스테이지 등)(310)에 설치한 상태에서 액츄에이터(미도시)를 이용하여 지지수단 전체를 이용시켜 빔분할기와 기준미러 사이의 거리를 조절할 수 있게 구성되어 있으며, 이렇게 기준미러를 이동가능하게 지지하는 지지수단과 지지수단을 이동시키기 위한 액츄에이터를 설치하기 위해서는 많은 공간이 요구될 뿐만 아니라 이들을 다른 구성요소와 연결하기 위해서는 입체 형상 측정 장치 전체의 구조가 복잡해질 뿐만 아니라 전체 크기가 지나치게 커는 단점이 있었다. Thus, as shown in the means for adjusting the distance from the beam splitter to the measurement surface and the distance from the beam splitter to the reference mirror, the support means (tilting stage, etc.) 310 for movably supporting the reference mirror are provided. It is configured to adjust the distance between the beam splitter and the reference mirror by using the entire support means using an actuator (not shown) in the state, and thus for moving the support means and the support means for supporting the reference mirror to be movable. In order to install the actuator, not only a lot of space is required, but also to connect them with other components, the overall structure of the three-dimensional shape measuring device is not only complicated, but the overall size is too large.
본 발명의 상기와 같은 종래 기술의 문제점을 해결하기 위해 개발된 것으로써, 빔분할기에 빔분할기를 이동시킬 수 있는 빔분할기 이동수단을 설치하여 빔분할기를 이동시켜 반사거리를 조절할 수 있게 구성함으로써 전체구조를 단순화시킬 수 있게 한 입체 형상 측정장치를 제공하는 것을 목적으로 한다.In order to solve the problems of the prior art as described above of the present invention, by installing a beam splitter moving means that can move the beam splitter in the beam splitter by moving the beam splitter and configured to adjust the reflection distance It is an object of the present invention to provide a three-dimensional shape measuring apparatus that can simplify the structure.
위와 같은 문제점을 해결하기 위한 본 발명의 입체 형상 측정장치는 광원과, 상기 광원으로부터의 조명광을 분할시켜 측정 대상물에 조명광을 조사하는 빔분할기와, 상기 빔분할기로부터의 조명광이 조사되는 기준미러와, 측정 대상물의 표면과 상기 기준미러로부터 반사되어 합쳐진 간섭무늬를 촬영하는 촬영장치, 및 상기 촬영장치를 통해 촬영된 영상을 처리하는 제어 컴퓨터를 포함하는 입체 형상 측정장치에 있어서, 상기 빔분할기에는 상기 측정 대상물의 최고점의 반사거리 및 상기 측정 대상물의 최저점 반사거리와 각각 동일한 반사거리를 제공할 수 있도록 빔분할기의 위치를 조절하기 위한 빔분할기 이동수단을 더 구비함을 특징으로 한다. The three-dimensional shape measuring device of the present invention for solving the above problems is divided into a light source, a beam splitter for dividing the illumination light from the light source and irradiating the illumination light to the measurement object, a reference mirror to which the illumination light from the beam splitter is irradiated; A three-dimensional shape measuring device comprising a photographing apparatus for photographing a surface of a measurement object and an interference fringe reflected and reflected from the reference mirror, and a control computer for processing an image photographed by the photographing apparatus, wherein the beam splitter includes the measurement. And a beam splitter moving means for adjusting the position of the beam splitter so as to provide a reflection distance equal to the maximum reflection distance of the highest point of the object and the lowest reflection distance of the measurement object, respectively.
본 발명은 기준미러는 고정시키고, 빔분할기 이동수단을 통해 빔분할기를 이동시켜 측정 대상물에 대한 최저점 반사거리와 동일한 기준면 반사거리 및 최저점 반사거리와 동일한 기준면 반사거리를 조절할 수 있도록 구성함으로써 입체 영상 측정 장치의 전체적인 구조를 단순화시킬 수 있는 효과가 있다. According to the present invention, the reference mirror is fixed, and the beam splitter is moved through the beam splitter moving means to adjust the reference plane reflecting distance and the same reference plane reflecting distance as the lowest reflecting distance to the measurement object. There is an effect that can simplify the overall structure of the device.
도 1은 본 발명에 따른 입체 형상 측정장치의 구성도이고, 1 is a block diagram of a three-dimensional shape measuring apparatus according to the present invention,
도 2는 통상의 입체 형상 측정장치의 구성도이다.2 is a configuration diagram of a conventional three-dimensional shape measuring device.
<도면의 주요 부분에 대한 부호 설명><Description of the symbols for the main parts of the drawings>
1 : 광원1: light source
11 : 시준렌즈   11: collimating lens
2 : 빔분할기2: beam splitter
20 : 빔분할기 이동수단   20: beam splitter moving means
3 : 기준미러3: reference mirror
4 : 촬영장치4: shooting device
41 : 이미징렌즈   41: imaging lens
5 : 제어 컴퓨터5: control computer
이하, 본 발명에 따른 입체 형상 측정장치를 첨부된 도면을 참조하여 상세하게 설명한다. Hereinafter, a three-dimensional shape measuring apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명에 따른 입체 형상 측정장치의 구성도이고, 도 2는 통상의 입체 형상 측정장치의 구성도이다.1 is a configuration diagram of a three-dimensional shape measuring apparatus according to the present invention, Figure 2 is a configuration diagram of a conventional three-dimensional shape measuring apparatus.
도시한 바와 같이 본 발명에 따른 입체 형상 측정장치는 빔분할기(2)를 이동시키기 위한 빔분할기 이동수단(20)을 구비하고 있다. As shown, the three-dimensional shape measuring device according to the present invention is provided with beam splitter moving means 20 for moving the beam splitter 2.
즉, 본 발명은 측정 대상물에 대한 최저점 반사거리와 동일한 기준면 반사거리 및 최저점 반사거리와 동일한 기준면 반사거리를 조절하기 위해서 빔분할기(2)를 이동시킬 수 있도록 구성하였으며, 이러한 빔분할기(2)의 이동에 의해 빔분할기와 기준미러(3) 사이의 거리가 조절되어 반사거리가 조절될 수 있는 것이다.That is, the present invention is configured such that the beam splitter 2 can be moved to adjust the reference plane reflection distance equal to the lowest point reflection distance and the reference plane reflection distance equal to the lowest point reflection distance to the measurement object. By moving, the distance between the beam splitter and the reference mirror 3 is adjusted so that the reflection distance can be adjusted.
이러한 본 발명의 입체 영상 측정 장치는 광원(1)과, 상기 광원(1)으로부터의 조명광을 분할시켜 측정 대상물에 조명광을 조사하는 빔분할기(2)와, 상기 빔분할기(2)로부터의 조명광이 조사되는 기준미러(3)와, 측정 대상물의 표면과 상기 기준미러(3)로부터 반사되어 합쳐진 간섭무늬를 촬영하는 촬영장치(4), 및 상기 촬영장치(4)를 통해 촬영된 영상을 처리하는 제어 컴퓨터(5)를 포함하여 구성되며, 상기 빔분할기(2)에는 상기 측정 대상물의 최고점의 반사거리 및 상기 측정 대상물(3)의 최저점 반사거리와 각각 동일한 반사거리를 제공할 수 있도록 빔분할기(2)의 위치를 조절하기 위한 빔분할기 이동수단(20)을 구비하고 있다. The stereoscopic image measuring apparatus of the present invention includes a light splitter 2, a beam splitter 2 for dividing illumination light from the light source 1 and irradiating illumination light onto a measurement object, and illumination light from the beam splitter 2. A photographing apparatus 4 for photographing a reference mirror 3 to be irradiated, a surface of a measurement object, and an interference fringe reflected from the reference mirror 3 and merged, and an image photographed by the photographing apparatus 4 It comprises a control computer (5), the beam splitter (2) to provide a beam splitter (2) to provide a reflection distance equal to the reflection distance of the highest point of the measurement target and the lowest reflection distance of the measurement target (3), respectively. It is provided with a beam splitter moving means 20 for adjusting the position of 2).
본 발명에 따른 입체 영상 측정장치를 구성하는 각 구성요소는 종래의 입체 영상 측정장치와 동일한 것으로 동일한 작용을 하는 것이나 이를 약술하면 아래와 같다. Each component constituting the stereoscopic image measuring apparatus according to the present invention has the same function as that of the conventional stereoscopic image measuring apparatus, but will be outlined as follows.
즉, 상기 광원(1)은 측정 대상물에 빛을 조사하기 위한 수단으로 이 빛의 반사에 형성된 간섭무늬로부터 측정 대상물의 측정면의 형상을 측정할 수 있다. That is, the light source 1 may measure the shape of the measurement surface of the measurement object from the interference fringe formed on the reflection of the light as a means for irradiating light to the measurement object.
상기 광원(1)에서 조사된 빛에 의해 형성되는 간섭무늬는 기준미러(3)와 측정 대상물의 측정면에서 반사된 후 빔분할기(2)를 통해 합쳐진 무늬로서 이렇게 간섭무늬를 얻기 위해서는 빔분할기(2)로부터 측정면과의 거리 및 빔분할기(2)로부터 기준미러(3)와의 거리가 일치시켜야 하며, 이에 따라, 단차를 가지는 측정 대상에 대해서는 높이 정보에 따라 간섭무늬 획득 구간을 일정하게 분할한 후, 분할된 구간별로 기준미러(3)나 측정 대상물을 세밀하게 이동시키면서 간섭무늬를 획득해한 후 획득된 다수의 간섭무늬를 합성하여 표면 형상을 측정해야 한다. The interference pattern formed by the light emitted from the light source 1 is a pattern that is reflected by the reference mirror 3 and the measurement surface of the measurement object and then merged through the beam splitter 2 to obtain the interference pattern. 2) and the distance between the measurement plane and the distance from the beam splitter 2 to the reference mirror 3 should match. Accordingly, for the measurement target having the step, the interference fringe acquisition section is regularly divided according to the height information. After the interference pattern is obtained while the reference mirror 3 or the measurement object is moved in detail for each divided section, the surface shape is measured by synthesizing the obtained plurality of interference patterns.
따라서, 본 발명은 이렇게 빔분할기(2)와 기준미러(3) 사이의 거리를 조절하기 위한 수단으로 상기 빔분할기 이동수단(20)을 구비하고 있는 것이다. Therefore, the present invention is provided with the beam splitter moving means 20 as a means for adjusting the distance between the beam splitter 2 and the reference mirror 3 in this way.
상기 빔분할기 이동수단(20)를 통해 기준미러(3)와의 빈분할기(2) 사이에서 조절되어야 하는 거리는 아주 미세하므로 빔분할기(2)는 아주 미세하게 이동될 수 있어야 하며, 이렇게 빔분할기(2)를 미세하게 이동시키기 위해서는 상기 빔분할기 이동수단(20)으로 미소 구동기를 사용할 수 있다. Since the distance to be adjusted between the empty splitter 2 with the reference mirror 3 through the beam splitter moving means 20 is very fine, the beam splitter 2 should be able to be moved very finely, and thus the beam splitter 2 In order to finely move), a micro driver may be used as the beam splitter moving means 20.
이와 같이 빔분할기(2)를 미세하게 이동시킬 수 있는 미소 구동기로는 많은 것이 개발되어 있으므로 이를 어느 하나로 한정할 수는 없으나 그 일예로 미세한 위치조절에 많이 사용되는 압전 구동기가 바람직하다 할 것이다. As such, many micro-drivers capable of finely moving the beam splitter 2 are not limited to any one. However, a piezoelectric driver which is used for fine position adjustment is preferable.
상기 빔분할기는 큐픽(Cubic)형, 박막(Pellicle)형 또는 평판형(Plate) 중 어느 하나를 사용하여 구성할 수 있으며, 이러한 빔 분할기는 이미 개잘되어 사용되고 있는 것 중 의 하나로 이에 대한 상세한 설명은 생략한다. The beam splitter may be configured using any one of cubic type, thin film type, or flat plate type, and one of the beam splitters has already been used. Omit.
또한, 상기 빔분할기(2)를 이동시키기 위한 수단으로 구비된 빔분할기 이동수단(20)을 빔분할기(2)와 기준미러(3) 사이의 거리를 조절하는 것만으로 설명하였으나, 이는 빔분할기(2)와 측정대상물 사이의 거리를 조절하기 위한 수단으로도 사용될 수 있으며, 이러한 빔분할기 이동수단(20)이 설치되는 위치는 빔분할기(2)를 통과하는 빛이 기준미러(3), 측정대상물 및 촬영장치(4)로 전달되는 데 방해가 되지 않는 위치에 설치되면 족하다. In addition, the beam splitter moving means 20 provided as a means for moving the beam splitter 2 has been described only by adjusting the distance between the beam splitter 2 and the reference mirror 3, which is a beam splitter ( It can also be used as a means for adjusting the distance between the 2) and the measurement object, the position where the beam splitter moving means 20 is installed, the light passing through the beam splitter 2 is the reference mirror (3), the measurement object And it is sufficient if it is installed in a position that does not interfere with the transfer to the photographing apparatus (4).
즉, 상기 빔분할기는 기준미러를 향한 좌우 방향(도면상) 또는 측정대상물을 향한 상하방향(도면상) 방향으로 이동하여 측정대상물로부터 반사되는 간섭신호를 획득할 수 있는 것이다. That is, the beam splitter may acquire the interference signal reflected from the measurement object by moving in the horizontal direction toward the reference mirror (in the drawing) or the vertical direction toward the measurement object (in the drawing).
미설명부호 11은 광원의 빛을 빔분할기로 전달하는 시준렌즈이고, 미설명부호 41은 반사된 빛을 촬영장치로 집광시키는 이미징렌즈이다. Reference numeral 11 denotes a collimating lens that transmits the light of the light source to the beam splitter, and reference numeral 41 denotes an imaging lens that focuses the reflected light with the photographing apparatus.
본 발명은, 빔분할기에 설치된 빔분할 이동수단에 의해 빔분할기가 이동되도록 하여 측정 대상물에 대한 최저점 반사거리와 동일한 기준면 반사거리 및 최저점 반사거리와 동일한 기준면 반사거리를 조절할 수 있도록 구성함으로써 입체 영상 측정 장치의 전체적인 구조를 단순화시킬 수 있다.According to the present invention, the beam splitter is moved by a beam splitting means installed in the beam splitter so that the reference plane reflecting distance and the same reference plane reflecting distance as the lowest reflecting distance to the measurement object can be adjusted so that stereoscopic image measurement is possible. The overall structure of the device can be simplified.

Claims (4)

  1. 광원과, 상기 광원으로부터의 조명광을 분할시켜 측정 대상물에 조명광을 조사하는 빔분할기와, 상기 빔분할기로부터의 조명광이 조사되는 기준미러와, 측정 대상물의 표면과 상기 기준미러로부터 반사되어 합쳐진 간섭무늬를 촬영하는 촬영장치, 및 상기 촬영장치를 통해 촬영된 영상을 처리하는 제어 컴퓨터를 포함하는 입체 형상 측정장치에 있어서, A beam splitter for dividing a light source, illumination light from the light source and irradiating illumination light onto a measurement object, a reference mirror to which illumination light from the beam splitter is irradiated, and an interference pattern reflected and reflected from the surface of the measurement object and the reference mirror In the three-dimensional shape measuring apparatus comprising a photographing apparatus for photographing, and a control computer for processing an image photographed by the photographing apparatus,
    상기 빔분할기에는 상기 측정 대상물의 최고점의 반사거리 및 측정 대상물의 최저점 반사거리와 각각 동일한 반사거리를 제공할 수 있도록 빔분할기의 위치를 조절하기 위한 빔분할기 이동수단을 더 구비함을 특징으로 하는 입체 형상 측정장치. The beam splitter further includes a beam splitter moving means for adjusting a position of the beam splitter to provide a reflection distance equal to a reflection distance of the highest point of the measurement target and a reflection distance of the lowest point of the measurement target, respectively. Shape measuring device.
  2. 제 1 항에 있어서, The method of claim 1,
    상기 빔분할기 이동수단은 미세구동기임을 특징으로 하는 입체 형상 측정장치. The beam splitter moving unit is a three-dimensional shape measuring device, characterized in that the fine driver.
  3. 제 1 항에 있어서, The method of claim 1,
    상기 빔분할기 이동수단는 빔분할기를 기준미러를 향한 방향 또는 측정대상물을 향한 방향으로 이동시킬 수 있게 하여 간섭신호를 획득하는 것을 특징으로 하는 입체 형상 측정장치. The beam splitter moving means may move the beam splitter in a direction toward a reference mirror or a direction toward a measurement object to obtain an interference signal.
  4. 제 1 항에 있어서, The method of claim 1,
    상기 빔분할기는 큐픽(Cubic)형, 박막(Pellicle)형 또는 평판형(Plate) 중 어느 하나임을 특징으로 하는 입체 형상 측정장치. The beam splitter may be any one of a cubic type, a thin film type, or a flat plate type.
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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101275749B1 (en) * 2012-12-05 2013-06-19 최상복 Method for acquiring three dimensional depth information and apparatus thereof
KR101436746B1 (en) * 2013-06-28 2014-09-11 주식회사 고영로보틱스 Tilt the mirror shape by controlling the interference distance measuring device
KR101436745B1 (en) * 2013-06-28 2014-09-11 주식회사 고영로보틱스 Spectrometer to measure the spectral shape measurement device to implement
KR101920349B1 (en) 2017-01-18 2018-11-20 유준호 Apparatus for monitoring three-dimensional shape of target object
KR102285818B1 (en) 2019-04-26 2021-08-04 ㈜넥센서 Apparatus for monitoring three-dimensional shape of target object capable of auto focusing in real time
CN113639661B (en) * 2021-08-11 2022-10-14 中国科学院长春光学精密机械与物理研究所 Morphology detection system and morphology detection method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001012926A (en) * 1999-05-10 2001-01-19 Rudolf Groskopf Three-dimensional inspection apparatus for object
JP2001059714A (en) * 1999-08-20 2001-03-06 Inst Of Physical & Chemical Res Shape measuring method and device
JP2002214129A (en) * 2001-01-16 2002-07-31 Japan Science & Technology Corp Mireau interferometer type vertical section image measuring device by heterodyne detection
KR100785802B1 (en) * 2007-05-29 2007-12-13 (주) 인텍플러스 Apparatus for measurment of three-dimensional shape

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001012926A (en) * 1999-05-10 2001-01-19 Rudolf Groskopf Three-dimensional inspection apparatus for object
JP2001059714A (en) * 1999-08-20 2001-03-06 Inst Of Physical & Chemical Res Shape measuring method and device
JP2002214129A (en) * 2001-01-16 2002-07-31 Japan Science & Technology Corp Mireau interferometer type vertical section image measuring device by heterodyne detection
KR100785802B1 (en) * 2007-05-29 2007-12-13 (주) 인텍플러스 Apparatus for measurment of three-dimensional shape

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