WO2014115341A1

WO2014115341A1 - Confocal scanner and optical measuring device using same

Info

Publication number: WO2014115341A1
Application number: PCT/JP2013/057249
Authority: WO
Inventors: 満宏石原
Original assignee: 株式会社高岳製作所
Priority date: 2013-01-22
Filing date: 2013-03-14
Publication date: 2014-07-31
Also published as: KR101444048B1; CN104067158A; CN104067158B; JP5376076B1; JP2014142183A; TW201409073A; KR20140103833A; TWI444656B

Abstract

A confocal opening array and a movable prism having a wedge-shaped space on the interior are attached to a single axis movable table, and a fixed prism having a wedge-shaped apex angle is provided to the exterior of the movable table. At the same time that XY scanning of the opening is achieved by means of movement of the movable table, the thickness of an equivalent plane parallel substrate varies using the pair comprising the movable prism and the fixed prism, and confocal movement (Z scanning) is also simultaneously achieved.

Description

Confocal scanner and optical measurement apparatus using the same

The present invention relates to a measuring device using light. In particular, the present invention relates to speeding up and simplification of an apparatus for performing three-dimensional measurement or surface shape measurement of an object using a confocal optical system.

When an image is taken using a confocal optical system (hereinafter, an image formed by the confocal optical system is referred to as a confocal image), the light that is out of focus and spreads out is not imaged and is in focus. Only partial light is imaged. In general imaging optics, out-of-focus and out-of-focus light spreads on the image plane and degrades the image, but confocal optics does not (or very little) do so, so the contrast is sharp. An image is obtained. It is also known that the three-dimensional shape of an imaged object can be measured using the feature that only the light in focus is imaged. Applications are spreading.

The basic structure of the confocal optical system (reflection type) is shown in FIG. The light emitted from the point light source 701 is condensed by the objective lens 703 and projected onto the object. The light reflected from the object and incident on the objective lens 703 again enters the pinhole 704 that is optically located at the same position as the point light source 701 via the half mirror 702, and the amount of light that has passed through the pinhole 704 is detected by the detector. 705 is detected. This is the basic structure of the confocal optical system.

Using this optical system, the height of each position on the object surface can be measured as follows. When the object surface is at a position conjugate with the point light source 701, the reflected light converges on the surface of the pinhole 704, which is also a conjugate position, and much reflected light passes through the pinhole 704. However, when the object surface moves away from the position conjugate with the point light source 701, the amount of light passing through the pinhole 704 decreases rapidly. From this, the height of the object surface can be found by changing the distance between the object and the objective lens 703 and finding the point where the detector 705 shows the maximum output.

Since the confocal optical system is basically a point detection optical system, it is generally necessary to perform XY scanning in order to obtain a confocal image. As an XY scanning method, laser beam scanning or scanning using a rotating disk called “Nippow disk” having many spiral pinhole arrays is generally used. An optical system that obtains a confocal image using these scanning methods is used. , Known as a confocal microscope.

The three-dimensional measurement using the confocal microscope is basically the same as the height measurement using the point measurement type confocal optical system, and the detector 705 is changed by changing the distance between the object and the objective lens 703. However, the data obtained each time the distance between the object and the objective lens 703 is changed is not data of one point on the object surface but two-dimensional image data, and the maximum output is obtained. The position is different in that it is obtained for each pixel of the image data.

Specifically, when the height measurement resolution is a, the confocal image is acquired and stored every time the distance between the object and the objective lens 703 is changed by a, and the entire optical axis direction measurement range is scanned (that is, the object The distance between the object lens 703 and the objective lens 703 is finished), and the position of the object surface can be obtained for each pixel by searching for the position of the image with the largest output of the detector 705 for each pixel. Shape measurement data can be obtained. Patent Document 1 discloses a method of optically changing the distance between an object and an objective lens.

JP-A-8-304043

As described above, in the three-dimensional measurement by the confocal optical system, it is necessary to scan all three axes of XYZ after all. For this reason, the structure is complicated and large-scale, resulting in high costs. In addition, speeding up is also required from the viewpoint of measurement speed.

In view of such circumstances, an object of the present invention is to realize a simple and high-speed confocal three-dimensional measuring apparatus.

In order to solve the above problems, a moving table having at least one moving axis, an aperture array having a number of confocal apertures attached to the moving table and moving, and directions opposite to each other with respect to the moving axis of the moving table The moving prism attached to the moving table and moving, and inclined to the moving axis of the moving table in exactly opposite directions at the same angle as the moving prism. The fixed prisms are arranged outside the moving table and do not move, and an equivalent parallel plane substrate is formed by combining the moving prism and the fixed prism. A confocal scanner is characterized in that the thickness of an equivalent parallel flat substrate changes with movement.

Alternatively, a confocal scanner further comprising at least one protective transparent plate that is attached to the moving table and moves with the moving table to prevent foreign matter from adhering to the aperture array is configured.

The aperture array is a pinhole array, and pinholes are provided at intervals P so that the confocal effect is exhibited. The pinholes adjacent to each other in the moving direction are shifted by a small distance S in the direction perpendicular to the moving direction, and It arrange | positions so that P / S may become an integer.

Also, the aperture array is a slit array instead of a pinhole array, and each slit is arranged at a constant interval P in the moving direction so as to exhibit a confocal effect.

One of the moving prism and the fixed prism is a prism having two surfaces inclined with respect to the moving axis of the moving table in opposite directions at the same angle, and the other of the moving prism and the fixed prism is An opening in which the one prism can be inserted and removed with respect to a rectangular parallelepiped member, and is sandwiched between two surfaces inclined at an equal angle to each other in opposite directions with respect to the moving axis of the moving table It is a prism having a shape formed.

The thickness of the equivalent parallel flat substrate changes as the one prism is inserted into and removed from the opening of the other prism as the moving table moves.

The confocal scanner, an objective lens in which the aperture array is arranged at an image plane position, an illumination optical system that irradiates the entire effective image plane of the objective lens, and reflected by a measurement object and incident on the objective lens. The deflected optical element that deflects the object reflected light that has passed through the aperture array in a direction different from the illumination optical system, and the object reflected light deflected by the deflecting optical element is received, photoelectrically converted, and output as an image signal. A two-dimensional detector, an imaging optical system that forms an image of the aperture array on the two-dimensional detector via the deflection optical element, and an output of the two-dimensional detector as a digital signal; The aperture array is constituted by an image processing device that searches for a focal position that gives a maximum value using different data of a series of obtained focal positions and identifies the height of the point of the searched focal position. And the moving prism is moved at a constant speed by the moving table, and an image is acquired by the two-dimensional detector a plurality of times during the movement, and one exposure time of the two-dimensional detector is determined in the moving direction of the aperture array. The moving time is set to be the same as the moving time that is an integral multiple of the aperture arrangement period.

By configuring as described above, XYZ three-axis scanning can be performed with only one axis scanning, and a simple, low-cost, and high-speed confocal three-dimensional measuring apparatus can be realized.

It is the figure which showed the Example of the confocal scanner of this invention. It is a figure for demonstrating a pinhole type opening array. It is a figure for demonstrating the focus movement by a parallel plane board | substrate. It is a figure for demonstrating a slit-type opening array. It is the figure which showed the Example of the measuring device using the confocal scanner of this invention. It is a figure for demonstrating the focus position fluctuation | variation during the exposure time of this invention. It is a figure for demonstrating a prior art. It is a figure for demonstrating a wedge type | mold. It is a figure for demonstrating a wedge-shaped prism pair.

Embodiment

In the following, embodiments that are considered to be the best for carrying out the present invention will be described.

First, an example of an embodiment embodying the confocal scanner of the present invention will be described with reference to FIGS.

As shown in FIG. 1, the confocal scanner of the present invention includes a uniaxial moving table 101, a bracket 102 mounted on the moving table 101, an aperture array 103, a moving prism 104, and the moving table 101. The fixed prism 105 is provided.

The aperture array 103 is a pinhole array as shown in FIG. 2, and the interval P between the pinholes is set to several times the pinhole diameter so that a confocal effect can be obtained. As shown in FIG. 2, the pinholes adjacent to each other in the movement axis direction are arranged with a small distance S shifted in the direction perpendicular to the movement axis.

By setting the distance P and the shift amount S so that P / S is an integer, a periodic structure for every P / S in the movement direction, that is, P × (P / S).

When the shift amount S is as small as possible, scanning in the direction orthogonal to the movement becomes finer. However, it is not necessary to make it uselessly fine considering the resolution of the objective lens, and P / S becomes an integer about the radius of the pinhole. It is better to set the amount.

If the aperture array 103 is left as it is, the transmitted light (information) of the non-aperture portion cannot be obtained. However, by moving by the period P × (P / S), the entire surface of the aperture array 103 is scanned all over. Information can be obtained.

Here, if the moving table 101 is moved at a constant speed v, the entire scanning is performed at an arbitrary timing (P × P / S) / v time. Thus, XY scanning can be realized with one axis.

Further, the moving prism 104 that moves together with the aperture array 103 has a shape in which two wedge-shaped prisms are combined such that their slopes face each other, as shown in FIG. Have On the other hand, the fixed prism 105 that is provided independently of the moving table 101 and does not move with respect to the object has a wedge shape having an apex angle that is the same as the V-shaped angle formed by the inclined surfaces of the moving prism 104. Have. By using the moving prism 104 and the fixed prism 105 in combination, an equivalent parallel flat substrate is formed. The thickness of the equivalent parallel flat substrate changes as the moving prism 104 moves. It is preferable that the bisector of the V-shaped apex angle formed by the inclined surfaces of the moving prism 104 and the bisector of the apex angle of the fixed prism 105 be matched.

The wedge shape here mainly means a triangular prism having a cross-sectional shape as shown in FIG. 8A or a quadrangular prism having a cross-sectional shape whose long sides facing each other are not parallel as shown in FIG. 8B. However, what is important is that it is a cross-sectional shape in which the long sides facing each other are not parallel, and the shape of the short side portion is not limited as shown in FIG.

As shown in FIG. 3, generally, the focal position of the imaging lens can be changed by the thickness of the parallel flat substrate inserted in the optical path of the imaging lens. That is, focus movement = Z scanning can be performed by changing the thickness of the parallel flat substrate. The change in the thickness of the plane parallel substrate can be realized by using a wedge prism in combination. Even if only one wedge-shaped prism is used, the focal point can be changed, but a fatal aberration is given to the imaging optical system. As shown in FIG. 9, if two wedge prisms are combined and used as a parallel plane substrate, the aberration can be reduced. However, since the distance of the space between the prisms changes as the moving table 101 moves, It will shift. The combination of the moving prism 104 and the fixed prism 105 shown in FIG. 1 has the same structure as the wedge-shaped prism pair in FIG. 9 combined in two stages in the opposite direction, and the light beam due to the change in the space distance between the prisms. This shift is restored to the original value and compensated.

Of course, the moving prism 104 and the fixed prism 105 may be combined to form an equivalent parallel plane substrate, and the reverse may be possible. That is, the prism having the wedge-shaped apex angle may be the moving prism 104, and the prism having the V-shaped space may be the fixed prism 105. That is, one of the moving prism 104 and the fixed prism 105 is configured to have two opposing surfaces that are inclined with respect to the moving axis of the moving table 101 in the opposite directions at the same angle, and the other is the prism. It is only necessary that the opening (opening space) into which can be inserted and removed has a shape formed with respect to a rectangular parallelepiped member. At this time, the space formed in the rectangular parallelepiped member has two inclined surfaces with respect to the moving axis of the moving table 101 in the opposite directions at the same angle as the two opposing surfaces of the prism inserted into the space. It should be a space sandwiched between surfaces. For example, the shape of this space may be similar to a prism inserted into and removed from the space. The space may be formed so as to divide a rectangular parallelepiped member. In this case, the rectangular parallelepiped member is divided into two prisms. At this time, each of the two prisms may be formed such that the opposite surface of the surface facing the inserted / removed prism is parallel to the moving axis of the moving table 101. In the equivalent parallel flat substrate formed by the moving prism 104 and the fixed prism 105 configured as described above, one wedge-shaped prism is inserted into and extracted from the other fitting space as the moving table 101 moves. As a result, the equivalent thickness changes.

Further, here, the two prisms of the moving prism 104 and the fixed prism 105 are used. However, as described above, the wedge-shaped prism pair of FIG.

From the above, when the moving table 101 is moved at a constant speed, scanning in the XY direction and scanning in the Z direction can be performed simultaneously.

Further, the aperture array 103 may be a slit array as shown in FIG. 4, for example. In the slit array, since it is not necessary to scan in the direction perpendicular to the moving direction, the slit pitch P becomes the period as it is.

Further, since the opening array 103 is fatal if foreign matter such as dust adheres to it, it is essential to take measures to prevent the foreign matter from adhering. Therefore, it is necessary to provide a protective transparent plate 106 on the moving table 101 as shown in FIG. For example, when an opaque film of chromium, for example, is deposited on the protective transparent plate 106 and the aperture array 103 is patterned by a lithography technique, it is necessary to provide the protective transparent plate 106 on one side of the aperture array 103. No. Further, the protection on the other side can be performed by the moving prism 104.

Next, an example of a confocal three-dimensional measuring apparatus using the above confocal scanner is shown. This will be described with reference to FIG.

The light from the light source 501 illuminates the aperture array 103 in an optimal state by the illumination optical system 502. The light source 501 can be a coherent light source such as a laser, or an incoherent thermal light source. However, each optimum optical system is different. Since the coherency of the illumination light is not necessary in the confocal optical system, a mechanism for making it incoherent is provided in the illumination optical system 502 when using a laser.

The illumination light that has passed through the aperture array 103 passes through the moving prism 104 of the confocal scanner, passes through the fixed prism 105, passes through the moving prism 104 again, and enters the objective lens 503. The illumination light becomes an image of the aperture array 103 by the image forming action of the objective lens 503 and illuminates the object 504. The illumination light reflected by the object 504 becomes reflected light and enters the objective lens 503, and forms an image again in the image space by the imaging action of the objective lens 503, and a part or almost all of it passes through the openings of the aperture array 103. It will be.

The reflected light that has passed through the aperture array 103 is deflected by a deflection optical element 505 provided inside the illumination optical system 502 or between the illumination optical system 502 and the aperture array 103, and is two-dimensionally transmitted through the imaging optical system 506. The detector 507 is reached. The imaging optical system 506 is disposed so as to form an image of the aperture array 103 on the two-dimensional detector 507.

The reflected light from the object 504 detected by the two-dimensional detector 507 is photoelectrically converted and output as image data (two-dimensional data), stored in the image processing device 508, and then converted into three-dimensional information of the object by calculation. Is done.

Normally, a polarizing beam splitter is used as the deflecting optical element 505 to prevent the illumination light reflected by the aperture array 103 from going toward the two-dimensional detector 507, and the inside of the objective lens 503 or the objective lens 503 and the object 504 is used. In general, a λ / 4 retardation plate 509 is inserted therebetween.

The illumination light reflected by the aperture array 103 is absolutely unnecessary light, while the reflected light that is signal light from the object 504 is not necessarily large in intensity, and therefore needs to be removed as completely as possible. With the above configuration, the illumination light becomes linearly polarized light by the deflecting optical element 505 that is a polarization beam splitter and is reflected by the aperture array 103 without being deflected by the deflecting optical element 505. Never go towards the detector 507. On the other hand, the linearly polarized illumination light that has passed through the aperture array 103 becomes circularly polarized light once it has passed through the λ / 4 retardation plate 509, and is reflected by the object 504 and passes through the λ / 4 retardation plate 509 again. Can be converted into linearly polarized light in a direction orthogonal to, and deflected by the deflecting optical element 505 to reach the two-dimensional detector 507.

Further, in order to remove illumination light reflected by the aperture array 103 more completely, a polarizing plate is provided in the illumination optical system 502 separately from the deflection optical element 505 that is a polarization beam splitter, and further in the imaging optical system 506. An analyzer may be provided.

In recent years, a non-reflective surface treatment that can almost completely eliminate reflection on the surface of the optical element has been developed. Therefore, a countermeasure using such a polarizing element is not necessarily required.

The following describes how the above configuration works during actual measurement.

The start of the measurement operation starts with the movement of the movement table 101 of the confocal scanner. When the moving table 101 is accelerated and reaches a predetermined speed and becomes stable, image data acquisition is started.

In image data acquisition, each sensor pixel of a two-dimensional detector 507, which is a so-called video camera, is exposed, and an electrical signal for each pixel corresponding to the amount of charge photoelectrically converted by the exposure is output as image data to the image processing device 508. It means that it is stored.

At this time, if the exposure time is set to a time during which the moving table 101 moves by one period or a multiple of the period of the periodic structure of the aperture array 103, a confocal image completely scanned in XY can be obtained. This is specifically shown below.

If the aperture array 103 is the pinhole array type shown in FIG. 2, one cycle is P × P / S. Therefore, if the speed at the constant speed of the moving table is v, the exposure time T is (P × P / S). Set to / v. Alternatively, the multiple is set to N × (P × P / S) / v. N is a natural number. With this setting, the pinholes in the aperture array 103 exist at the same time in every position in the moving direction, and the interval between the pinhole intervals P in the direction orthogonal to the moving direction is equal to the P / S line. Therefore, complete XY scanning can be realized. If the movement table 101 is moving at a constant speed, a confocal image that has been XY scanned at an arbitrary timing can be acquired. The only condition is that the exposure time is T.

On the other hand, the moving prism 104 and the fixed prism 105 can be equivalently regarded as parallel plane substrates with respect to the imaging light flux passing through them. Here, when the moving table 101 moves, the thickness of the parallel plane substrate continuously changes accordingly. As described above, when the thickness of the plane-parallel substrate changes in the optical path of the imaging lens, the focal position moves. In this apparatus, the focal position of the objective lens 503 moves and Z scanning is realized. The If the speed of the moving table 101 is constant, the thickness changes in proportion to time, and the focal position changes at a constant speed.

From the above, when a plurality of images are acquired at equal time intervals after the moving table 101 starts and enters a constant speed state after acceleration, a series of confocal images whose focal positions change at constant intervals can be obtained. This means that XYZ triaxial scanning can be realized only by uniaxial movement. After the image acquisition, the image processing device 508 can perform three-dimensional measurement calculation.

3D measurement calculation is realized by searching for a confocal image having a maximum value for each pixel, using a series of confocal images whose focal positions are changed at regular intervals. Since the object surface (or interface) exists at the focal position where the confocal image giving the maximum value is obtained, the position in the Z direction, that is, the height can be specified.

When acquiring confocal images with the focal position changed at regular intervals, it is not always necessary to acquire images at the necessary measurement accuracy intervals. Even with a relatively coarse focal position change interval, it is possible to specify the position of the surface (or interface) of the object with accuracy exceeding the interval by interpolation processing.

In addition, although it has been shown above that the focal position interval is constant for easy understanding, this is not an absolute requirement. Even if the intervals are different, the position of the surface (or interface) of the object can be specified.

As described above, XYZ triaxial scanning can be realized only by uniaxial movement, but since the movement of Z is continuous, the focal position changes during the exposure time of the two-dimensional detector 507. it is conceivable that. Therefore, the obtained confocal image includes data having different focal positions for the exposure time. For example, when the Z movement, that is, the focal movement is 1 mm / s, if the exposure time is 1 ms, the focal position is moved by about 1 μm, and the confocal image includes data having different focal positions by about 1 μm. It becomes a state.

Consider a P × P region surrounded by pinholes as shown in FIG. During the exposure time, the P × P area is scanned with P / S lines, but the timing of passing through the position of each line is different. The line L1 passes this position around the beginning of the exposure time, and the line L10 passes around the end of the exposure time.

That is, all the timings from the start to the end of exposure are aligned in this area. This condition is the same at an arbitrary position in the image, and the P × P region at the arbitrary position includes all timings of the exposure time. Assuming that the height of the object 504 is uniform within the P × P region, which is a minute region, each pixel simply changes in height during the exposure time T by setting the pixel size to P × P. It is only integrated, and it can be considered that it represents the average focal position data at T / 2 after the start of exposure. The same applies to multiples of P × P.

Even if the pixel size is not necessarily adjusted to P × P, any point in the image is the average position during the exposure time if it is optically smoothed more than the diameter P, that is, if it is blurred. It can be regarded as a state represented, and the same effect can be obtained.

In other words, if the measurement does not require a high lateral resolution greater than the pinhole interval P level in the confocal image, it can be said that this problem is not a big problem.

When measurement with a resolution higher than the pinhole interval P level is required, the focal position change during the exposure time is a problem for the measurement accuracy by shortening the exposure time T or reducing the scanning speed in the Z direction. It is necessary to set it to the extent that it does not become.

As mentioned above, although the Example of this invention was described, this is only an example of this invention. The pattern of the aperture array 103 can be other patterns that can achieve the same effect, and the aperture array 103 has a micro lens for each pinhole, that is, the aperture array and the micro lens array are combined. There may be cases where the structure is different. These are also included in the present invention.

According to the present invention, XYZ three-axis scanning can be performed with only one axis scanning, and a simple, low-cost, and high-speed confocal three-dimensional measuring apparatus can be realized. As a result, it is considered that there is a great demand in the semiconductor industry where there are many parts that require high-speed and high-precision measurement using light.

Claims

A moving table having at least one moving axis;
An aperture array having a number of confocal apertures attached to the moving table and moving with the moving table;
A moving prism attached to the moving table and moving together with the moving table;
A fixed prism installed outside the moving table so as to form an equivalent parallel plane substrate in combination with the moving prism, and the thickness of the equivalent parallel plane substrate as the moving table moves A confocal scanner characterized by changing.
At least one protective transparent plate that is attached to the moving table and moves together with the moving table to prevent foreign matter from adhering to the opening array;
The confocal scanner according to claim 1, further comprising:
The aperture array is a pinhole array, and pinholes are provided at intervals P so that a confocal effect is exhibited, and pinholes adjacent to each other in the moving direction are shifted by a minute distance S in a direction perpendicular to the moving direction and The confocal scanner according to claim 1, wherein P / S is arranged to be an integer.
3. The aperture array according to claim 1, wherein the aperture array is a slit array, and the slits are arranged with a constant interval P in the moving direction so that a confocal effect is exhibited. Focus scanner.
One of the moving prism and the fixed prism is
A prism having two surfaces inclined at an equal angle to each other and in opposite directions with respect to the moving axis of the moving table;
The other of the moving prism and the fixed prism is
An opening in which the one prism can be inserted and removed with respect to a rectangular parallelepiped member, and is sandwiched between two surfaces inclined at an equal angle to each other in opposite directions with respect to the moving axis of the moving table The confocal scanner according to any one of claims 1 to 4, wherein the confocal scanner is a prism having a shape in which is formed.
The equivalent parallel plane substrate is
6. The confocal scanner according to claim 5, wherein the thickness of the one prism is changed by being inserted into and removed from the opening of the other prism as the moving table moves.
In a measuring device using light,
A confocal scanner according to any one of claims 1 to 6,
An objective lens in which the aperture array is disposed at an image plane position;
An illumination optical system for irradiating the entire effective image surface of the objective lens;
A deflecting optical element that reflects from a measurement object, enters the objective lens, and deflects the object reflected light that has passed through the aperture array in a direction different from the illumination optical system;
A two-dimensional detector that receives the object reflected light deflected by the deflection optical element, photoelectrically converts it, and outputs it as an image signal;
An imaging optical system that forms an image of the aperture array on the two-dimensional detector via the deflection optical element;
The output of the two-dimensional detector is input as a digital signal, and using the obtained series of different data of the focus position, the focus position that gives the maximum value is searched, and the height of the point is specified from the searched focus position. And an image processing device that
The aperture array and the moving prism are moved at a constant speed by the moving table, and an image is acquired by the two-dimensional detector a plurality of times during the movement, and one exposure time of the two-dimensional detector is determined by the aperture array. An optical measuring device, which is set so as to have the same moving time as an integral multiple of the aperture arrangement period in the moving direction.