CN117006971A - Three-dimensional morphology measurement system - Google Patents
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Abstract
The invention provides a three-dimensional morphology measurement system which comprises a white light module, a laser module, a microscopic interference module and an image acquisition analysis module, wherein the white light module is used for acquiring a three-dimensional morphology of a human body; the white light module is used for generating initial white light and generating reference white light entering the micro interference module; the laser module is used for generating initial laser and generating reference laser entering the micro interference module; the micro-interference module is used for transmitting reference white light or reference laser to a sample to be measured and generating reflected white light or reflected laser, and is also used for generating an interference white light image according to the reference white light and the reflected white light and generating an interference laser image according to the reference laser and the reflected laser; the image acquisition and analysis module is used for acquiring the interference white light image or the interference laser image and generating the three-dimensional morphology of the measured sample according to the interference white light image or the interference laser image. The invention can realize the high-precision microscopic measurement of the three-dimensional morphology of the nano-millimeter structure device and improve the applicability of a three-dimensional morphology measurement system.
Description
Technical Field
The invention relates to the technical field of surface morphology measurement, in particular to a three-dimensional morphology measurement system.
Background
Interferometry is one of the most accurate three-dimensional morphology measurement technologies at present, has the advantages of non-contact, nondestructive and high-precision measurement, and has wide application in the fields of optical microlenses, IC carrier plates, medical biological imaging, etching holes and the like. The traditional interferometry technology extracts the surface information of the measured sample by directly judging the stripes or the serial numbers thereof, but the judgment of the stripes is easily affected by various factors, so that the precision of the stripes can only reach lambda/10-lambda/20, and the current mainstream interferometry comprises quantitative phase imaging and white light scanning interferometry represented by laser interferometry.
The method for measuring the morphology by the laser interferometry has high precision, but has the problem of phase wrapping, so that the situation of miscalculation occurs when the heights of two adjacent points exceed a threshold value, and further, the problem that a large-size object cannot be measured is caused. The method for measuring the three-dimensional morphology by white light interferometry is not limited by the height dimension of the surface of the sample, but when the height of the surface of the sample to be measured is nano-scale, the solution error is too large, and the determined three-dimensional morphology has lower precision.
Therefore, it is urgently needed to provide a three-dimensional morphology measurement system, which solves the technical problem that the same three-dimensional morphology measurement system in the prior art cannot take into account the three-dimensional morphology measurement and measurement accuracy of large-size objects.
Disclosure of Invention
In view of the foregoing, it is necessary to provide a three-dimensional topography measurement system for solving the technical problem that the same three-dimensional topography measurement system in the prior art cannot take into account the three-dimensional topography measurement and measurement accuracy of a large-sized object.
In order to solve the technical problems, the invention provides a three-dimensional morphology measurement system which comprises a white light module, a laser module, a microscopic interference module and an image acquisition and analysis module;
the white light module is used for generating initial white light and generating reference white light entering the micro interference module;
the laser module is used for generating initial laser and generating reference laser entering the micro interference module;
the micro-interference module is used for transmitting the reference white light or the reference laser to a sample to be measured and generating reflected white light or reflected laser, and is also used for generating an interference white light image according to the reference white light and the reflected white light and generating an interference laser image according to the reference laser and the reflected laser;
the image acquisition and analysis module is used for acquiring the interference white light image or the interference laser image and generating the three-dimensional morphology of the tested sample according to the interference white light image or the interference laser image.
In some possible implementations, the white light module includes a white light source and a collimation unit;
the white light source is used for generating the initial white light;
the collimation unit is used for carrying out collimation processing on the initial white light and generating the reference white light.
In some possible implementations, the collimating unit includes a first lens and a second lens coaxially arranged.
In some possible implementations, the laser module includes a laser light source, a filter unit, and a mirror;
the laser light source is used for generating the initial laser;
the filtering unit is used for carrying out filtering processing on the initial laser to generate the reference laser;
the reflecting mirror is used for changing the direction of the reference laser so that the reference laser enters the micro-interference module.
In some possible implementations, the filtering unit includes a third lens, a pinhole, and a fourth lens, the pinhole being disposed between the third lens and the fourth lens, and the third lens and the fourth lens being coaxially arranged.
In some possible implementations, the microscopic interference module includes an optical path changing unit, an interference objective lens, and a tube lens, the sample to be measured being placed under the interference objective lens;
the optical path changing unit is used for changing the optical path of the reference white light or the reference laser so that the reference white light or the reference laser enters the interference objective lens;
the interference objective lens is used for receiving the reference white light or the reference laser, transmitting the reference white light or the reference laser to the sample to be measured, correspondingly generating reflected white light or reflected laser, generating interference white light according to the reference white light and the reflected white light, and generating interference laser according to the reference laser and the reflected laser;
the tube mirror is used for converging the interference white light or the interference laser to generate the interference white light image or the interference laser image.
In some possible implementations, the optical path changing unit includes a first beam splitter, a fifth lens, and a second beam splitter, the fifth lens is disposed between the first beam splitter and the second beam splitter, and an angle between a reflecting surface of the first beam splitter and a reflecting surface of the second beam splitter is 90 °.
In some possible implementations, the three-dimensional topography measurement system further includes a first displacement stage for carrying the sample under test, the first displacement stage being movable along a plane parallel to a field of view plane of the interference objective.
In some possible implementations, the three-dimensional topography measurement system further includes a second translation stage fixedly coupled to the interference objective, the second translation stage being movable in a direction toward or away from the sample under test.
In some possible implementations, the three-dimensional morphology measurement system further includes a third displacement stage fixedly connected to the white light module, the laser module, and the micro-interference module, the third displacement stage being movable in a direction approaching or separating from the sample to be measured, and a movement stroke of the third displacement stage being greater than a movement stroke of the second displacement stage.
The beneficial effects of adopting the embodiment are as follows: the three-dimensional morphology measurement system provided by the invention can realize the simultaneous realization of the laser interferometry morphology and the white light interferometry morphology in the same three-dimensional morphology measurement system by arranging the three-dimensional morphology measurement system comprising the white light module and the laser module, solves the problems that the laser interferometry morphology cannot measure the three-dimensional morphology of a large-size object and the accuracy is lower when the white light interferometry morphology measures a small-size object, and achieves the technical effects that the same three-dimensional morphology measurement system can realize the high-accuracy detection of the three-dimensional morphology of a small-size object and also realize the high-accuracy detection of the three-dimensional morphology of a large-size object, namely: the three-dimensional morphology high-precision microscopic measurement of the nano-millimeter structure device can be realized, and the applicability of the three-dimensional morphology measurement system is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of an embodiment of a three-dimensional topography measurement system according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the invention. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.
The invention provides a three-dimensional morphology measurement system, which is described in detail below.
Fig. 1 is a schematic structural diagram of an embodiment of a three-dimensional topography measurement system according to the present invention, and as shown in fig. 1, a three-dimensional topography measurement system 10 according to an embodiment of the present invention includes: the system comprises a white light module 100, a laser module 200, a micro interference module 300 and an image acquisition and analysis module 400;
the white light module 100 is used for generating initial white light and generating reference white light entering the micro interference module 300;
the laser module 200 is used for generating initial laser and generating reference laser entering the micro interference module 300;
the micro-interference module 300 is used for transmitting reference white light or reference laser light to the sample 20 to be measured and generating reflected white light or reflected laser light, and the micro-interference module 300 is also used for generating an interference white light image according to the reference white light and the reflected white light and generating an interference laser image according to the reference laser light and the reflected laser light;
the image acquisition and analysis module 400 is used for acquiring an interference white light image or an interference laser image, and generating a three-dimensional morphology of the sample 20 to be measured according to the interference white light image or the interference laser image.
Compared with the prior art, the three-dimensional morphology measurement system 10 provided by the embodiment of the invention can realize the simultaneous realization of the laser interferometry morphology and the white light interferometry morphology in the same three-dimensional morphology measurement system by arranging the three-dimensional morphology measurement system 10 comprising the white light module 100 and the laser module 200, overcomes the problem that the laser interferometry morphology cannot measure the three-dimensional morphology of a large-size object and the problem that the white light interferometry morphology is lower in precision when measuring a small-size object, achieves the technical effects that the same three-dimensional morphology measurement system can realize the three-dimensional morphology high-precision detection of a small-size object and also realize the three-dimensional morphology high-precision detection of the large-size object, namely: the three-dimensional morphology high-precision microscopic measurement of the nano-millimeter structure device can be realized, and the applicability of the three-dimensional morphology measurement system 10 is improved.
It should be understood that: when the image acquisition and analysis module 400 generates the three-dimensional morphology of the measured sample 20 according to the interference white light image, the method such as an envelope method, a phase shift method, a spatial frequency domain method, etc. can be used to calculate the maximum number of frames of the light intensity of each pixel point, so as to obtain the three-dimensional morphology of the measured sample 20, for example: when the three-dimensional morphology of the sample 20 to be measured is obtained by using the envelope method, the specific process is as follows: the three-dimensional morphology of the measured sample 20 can be reconstructed by obtaining the number of frames with the coherence length of 0 for each pixel point by using an envelope method, and the above methods are all methods in the prior art, and are not described in detail herein.
Similarly, when the image acquisition and analysis module 400 generates the three-dimensional morphology of the measured sample 20 according to the interference laser image, the phase information of the interference laser image can be obtained by using methods such as fourier method, phase shift method, hilbert transform method, etc., so as to obtain the three-dimensional morphology of the measured sample 20, and the methods are all methods in the prior art, and are not described herein.
In a specific embodiment of the present invention, the image acquisition analysis module 400 is a charge coupled device (Charge Coupled Device, CCD) camera or a complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) camera.
It should be noted that: when the three-dimensional morphology measurement system provided by the embodiment of the invention is used, the white light module 100 or the laser module 200 is selected to correspondingly generate the interference white light image or the interference laser image instead of simultaneously obtaining the interference white light image or the interference laser image, so that the white light module 100 or the laser module 200 is required to be selected before use.
In some embodiments of the present invention, whether to use the white light module 100 or the laser module 200 may be determined according to the experience of an operator.
In some other embodiments of the present invention, machine learning may also be used to construct a module selection model by which to determine whether the sample 20 under test requires the use of the white light module 100 or the laser module 200.
Since white light is composed of a plurality of monochromatic lights with different wavelengths, which are not completely parallel, the parallelism and uniformity of the white light are poor, and in order to avoid poor measurement accuracy of the three-dimensional topography measurement system 10 due to poor parallelism and uniformity of the white light, in some embodiments of the present invention, as shown in fig. 1, the white light module 100 includes a white light source 110 and a collimation unit 120;
the white light source 110 is used for generating initial white light;
the collimating unit 120 is configured to perform a collimation process on the initial white light, and generate reference white light.
According to the embodiment of the invention, the initial white light generated by the white light source 110 is subjected to collimation treatment, so that the parallelism and uniformity of the generated reference white light can be improved, the definition and accuracy of the generated interference white light image can be improved, and the accuracy of the three-dimensional morphology of the generated measured sample 20 can be further improved.
In some embodiments of the present invention, as shown in fig. 1, the collimating unit 120 includes a first lens 121 and a second lens 122 coaxially arranged.
Specifically, the first lens 121 and the second lens 122 are both achromatic doublet lenses.
Since the laser includes a low frequency portion and a high frequency portion (stray light), the high frequency portion affects the spot quality of the laser, and in order to avoid the high frequency portion in the laser adversely affecting the final three-dimensional shape, in some embodiments of the present invention, as shown in fig. 1, the laser module 200 includes a laser light source 210, a filtering unit 220, and a reflecting mirror 230;
the laser light source 210 is used for generating initial laser light;
the filtering unit 220 is configured to perform filtering processing on the initial laser to generate a reference laser;
the mirror 230 is used to redirect the reference laser light into the micro-interference module 300.
According to the embodiment of the invention, the filter unit 220 is arranged to filter the initial laser generated by the laser source 210, so that the quality of the reference laser can be improved, the definition and accuracy of the generated interference laser image can be improved, and the accuracy of the three-dimensional morphology of the generated measured sample 20 can be improved.
In a specific embodiment of the present invention, the filtering unit 220 includes a third lens 221, a pinhole 222, and a fourth lens 223, the pinhole 222 is disposed between the third lens 221 and the fourth lens 223, and the third lens 221 and the fourth lens 223 are coaxially arranged.
Specifically, the third lens 221 and the fourth lens 223 are both achromatic cemented doublets.
In some embodiments of the present invention, as shown in fig. 1, the micro interference module 300 includes an optical path changing unit 310, an interference objective lens 320, and a tube lens 330, and the sample 20 to be measured is placed under the interference objective lens 320;
the optical path changing unit 310 is used for changing the optical path of the reference white light or the reference laser light, so that the reference white light or the reference laser light enters the interference objective 320;
the interference objective 320 is configured to receive the reference white light or the reference laser, transmit the reference white light or the reference laser to the sample 20 to be measured, and correspondingly generate reflected white light or reflected laser, and the interference objective 320 is also configured to generate interference white light according to the reference white light and the reflected white light, and generate interference laser according to the reference laser and the reflected laser;
the tube mirror 330 is used for converging the interference white light or the interference laser light to generate an interference white light image or an interference laser light image.
According to the embodiment of the invention, the light path changing unit 310 is arranged to change the light path of the reference white light or the reference laser, so that the white light module 100 and the laser module 200 can enter the interference objective lens 320 in the same light path, and the integration level of the three-dimensional morphology measuring system 10 is improved.
In a specific embodiment of the present invention, as shown in fig. 1, the optical path changing unit 310 includes a first beam splitter 311, a fifth lens 312, and a second beam splitter 313, the fifth lens 312 is disposed between the first beam splitter 311 and the second beam splitter 313, and an angle between a reflecting surface of the first beam splitter 311 and a reflecting surface of the second beam splitter 313 is 90 °.
According to the embodiment of the invention, the included angle between the reflecting surface of the first beam splitter 311 and the reflecting surface of the second beam splitter 313 is 90 degrees, so that the occupied area of the three-dimensional morphology measurement system 10 can be minimized, and the integration level of the three-dimensional morphology measurement system 10 is further improved.
In a specific embodiment of the present invention, the split ratio of the first beam splitter 311 and the second beam splitter 313 is 5:5.
It should be noted that: the first beam splitter 311 is rotatable along its central axis for controlling the reference white light and the reference laser light to enter the fifth lens 312 in the same way.
Since the field of view of the interference objective 320 is generally smaller than the area of the sample 20 to be measured, and when the three-dimensional topography measurement system 10 selects the white light module 100 to perform the three-dimensional topography measurement of the large-sized object, the whole sample 20 to be measured needs to be scanned, in some embodiments of the present invention, as shown in fig. 1, the three-dimensional topography measurement system 10 further includes a first displacement stage 500 for carrying the sample 20 to be measured, where the first displacement stage 500 can move along a plane parallel to the field of view plane of the interference objective 320.
Specifically, the field of view plane of the interference objective 320 is the XOY plane in fig. 1.
According to the embodiment of the invention, the first displacement table 500 capable of moving along the plane parallel to the visual field plane of the interference objective 320 is arranged, so that the scanning measurement of the whole sample 20 to be measured can be realized, and the accuracy and precision of the obtained three-dimensional morphology of the sample 20 to be measured are improved.
To improve the definition of the three-dimensional morphology information carried in the interference white light image and the interference laser light image, it is necessary to control the optical path differences of the reference white light and the reflected white light, or the reference laser light and the reflected laser light, and in some embodiments of the present invention, as shown in fig. 1, the three-dimensional morphology measurement system 10 further includes a second displacement stage 600 fixedly connected to the interference objective lens 320, where the second displacement stage 600 can move in a direction approaching or separating from the measured sample 20 (i.e., the Z direction in fig. 1).
According to the embodiment of the invention, the second displacement table 600 capable of driving the interference objective lens 320 to move along the direction approaching or separating from the measured sample 20 is arranged, so that the adjustment of the optical path difference of the reference white light and the reflected white light or the reference laser and the reflected laser can be realized, the definition of three-dimensional morphology information carried in an interference white light image and an interference laser image can be improved, and the accuracy of the determined three-dimensional morphology is further improved.
Further, since in practical applications, the distance between the interference objective 320 and the second displacement stage 600 is limited, so that the adjustment range for adjusting the optical path difference between the reference white light and the reflected white light, or the reference laser light and the reflected laser light is limited, in order to further improve the adjustability of the three-dimensional topography measurement system 10, in some embodiments of the present invention, as shown in fig. 1, the three-dimensional topography measurement system 10 further includes a third displacement stage 700 fixedly connected to the white light module 100, the laser module 200, and the micro-interference module 300, and the third displacement stage 700 may move in a direction approaching or separating from the measured sample 20, and the movement stroke of the third displacement stage 700 is greater than the movement stroke of the second displacement stage 600.
According to the embodiment of the invention, by arranging the third displacement table 700 fixedly connected with the white light module 100, the laser module 200 and the micro-interference module 300, the reference white light and the reflected white light or the optical path difference of the reference laser and the reflected laser can be adjusted in a large range through the third displacement table 700, and the measurement efficiency of the three-dimensional morphology measuring system 10 for measuring the three-dimensional morphology is improved.
In practical use, the first coarse adjustment is performed by the third displacement stage 700, and then the second fine adjustment is performed by the second displacement stage 600, so as to obtain an interference white light image or an interference laser image with higher definition.
In an embodiment of the present invention, the second displacement stage 600 may be a piezo ceramic micro displacement stage.
To verify the effectiveness of the three-dimensional topography measurement system 10 proposed by the present invention, a typical tiny object is identified by the three-dimensional topography measurement system 10, namely: gold-labeled samples and typically large-sized objects, namely: ma Erkuai samples are measured, three-dimensional morphology of the samples can be accurately measured, and availability and effectiveness of the three-dimensional morphology measuring system 10 eliminated by the embodiment of the invention are verified.
In summary, the embodiment of the invention combines the laser interferometry technology and the white light interferometry technology, utilizes the interference fringes generated by laser interferometry to realize the three-dimensional shape high-precision detection of the tiny objects, and overcomes the problems of wavelength uncertainty, weak interference fringe contrast, easy influence of ambient light and the like of white light interferometry; the three-dimensional shape high-precision detection of the large-size object with the surface height is realized by utilizing a series of interferograms generated by the white light interferometry technology, the problem that the laser interferometry technology has a height threshold value is solved, and the technical effects of taking the three-dimensional shape measurement and the measurement precision of the large-size object into consideration are realized.
The three-dimensional morphology measurement system provided by the invention is described in detail, and specific examples are applied to illustrate the principles and the implementation modes of the invention, and the description of the examples is only used for helping to understand the method and the core idea of the invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in light of the ideas of the present invention, the present description should not be construed as limiting the present invention.
Claims (10)
1. The three-dimensional morphology measurement system is characterized by comprising a white light module, a laser module, a micro-interference module and an image acquisition and analysis module;
the white light module is used for generating initial white light and generating reference white light entering the micro interference module;
the laser module is used for generating initial laser and generating reference laser entering the micro interference module;
the micro-interference module is used for transmitting the reference white light or the reference laser to a sample to be measured and generating reflected white light or reflected laser, and is also used for generating an interference white light image according to the reference white light and the reflected white light and generating an interference laser image according to the reference laser and the reflected laser;
the image acquisition and analysis module is used for acquiring the interference white light image or the interference laser image and generating the three-dimensional morphology of the tested sample according to the interference white light image or the interference laser image.
2. The three-dimensional topography measurement system of claim 1, wherein the white light module comprises a white light source and a collimation unit;
the white light source is used for generating the initial white light;
the collimation unit is used for carrying out collimation processing on the initial white light and generating the reference white light.
3. The three-dimensional topography measurement system of claim 2, wherein the collimation unit comprises a first lens and a second lens coaxially arranged.
4. The three-dimensional topography measurement system of claim 1, wherein the laser module comprises a laser light source, a filter unit, and a mirror;
the laser light source is used for generating the initial laser;
the filtering unit is used for carrying out filtering processing on the initial laser to generate the reference laser;
the reflecting mirror is used for changing the direction of the reference laser so that the reference laser enters the micro-interference module.
5. The three-dimensional topography measurement system of claim 4, wherein the filtering unit comprises a third lens, a pinhole, and a fourth lens, the pinhole being disposed between the third lens and the fourth lens, and the third lens and the fourth lens being coaxially arranged.
6. The three-dimensional topography measurement system of claim 1, wherein the microscopic interference module comprises an optical path changing unit, an interference objective lens, and a tube lens, the sample under test being placed under the interference objective lens;
the optical path changing unit is used for changing the optical path of the reference white light or the reference laser so that the reference white light or the reference laser enters the interference objective lens;
the interference objective lens is used for receiving the reference white light or the reference laser, transmitting the reference white light or the reference laser to the sample to be measured, correspondingly generating reflected white light or reflected laser, generating interference white light according to the reference white light and the reflected white light, and generating interference laser according to the reference laser and the reflected laser;
the tube mirror is used for converging the interference white light or the interference laser to generate the interference white light image or the interference laser image.
7. The three-dimensional topography measurement system of claim 6, wherein the optical path changing unit comprises a first beam splitter, a fifth lens, and a second beam splitter, the fifth lens is disposed between the first beam splitter and the second beam splitter, and an angle between a reflecting surface of the first beam splitter and a reflecting surface of the second beam splitter is 90 °.
8. The three-dimensional topography measurement system of claim 6, further comprising a first displacement stage for carrying the sample under test, the first displacement stage being movable along a plane parallel to a field of view plane of the interference objective.
9. The three-dimensional topography measurement system of claim 6, further comprising a second translation stage fixedly coupled to the interference objective, the second translation stage being movable in a direction toward or away from the sample under test.
10. The three-dimensional topography measurement system of claim 9, further comprising a third displacement stage fixedly connected to the white light module, the laser module, and the micro-interference module, the third displacement stage being movable in a direction toward or away from the sample under test, a movement stroke of the third displacement stage being greater than a movement stroke of the second displacement stage.
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5416587A (en) * | 1993-07-09 | 1995-05-16 | Northeast Photosciences | Index interferometric instrument including both a broad band and narrow band source |
| EP0843154A2 (en) * | 1996-11-13 | 1998-05-20 | Olympus Optical Co., Ltd. | Method for measuring shape of object and apparatus for carrying out the same |
| JP2000074618A (en) * | 1998-08-27 | 2000-03-14 | Fuji Xerox Co Ltd | Method and instrument for measuring interference |
| CN1254088A (en) * | 1998-11-17 | 2000-05-24 | 株式会社三丰 | Interferometer and measurement method adopting said interferometer |
| US20070035744A1 (en) * | 2004-05-04 | 2007-02-15 | Peter Lehmann | Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering |
| JP2007263904A (en) * | 2006-03-30 | 2007-10-11 | Anritsu Corp | Device and method for measuring three-dimensional shape |
| CN101726260A (en) * | 2008-10-13 | 2010-06-09 | 陈亮嘉 | Vibration resistance type interference scanning system and method thereof |
| CN102057269A (en) * | 2008-11-26 | 2011-05-11 | 齐戈股份有限公司 | Scan error correction in low coherence scanning interferometry |
| CN103712553A (en) * | 2013-12-26 | 2014-04-09 | 镇江超纳仪器有限公司（中外合资） | Interference method with phase method and vertical scanning method compatible |
| CN105758294A (en) * | 2015-01-05 | 2016-07-13 | 株式会社三丰 | Interference objective lens and light interference measuring device |
| CN107144217A (en) * | 2017-04-25 | 2017-09-08 | 西安交通大学 | Fiber optic interferometric confocal system for optical element crudy on-line checking |
| CN110869696A (en) * | 2018-06-25 | 2020-03-06 | 科美仪器公司 | Vibration-resistant white light interference microscope and vibration influence removing method thereof |
| CN116295102A (en) * | 2023-03-09 | 2023-06-23 | 中国人民解放军国防科技大学 | White light interference scanning super-resolution measuring device based on optical tweezers microsphere and application method |
-
2023
- 2023-09-25 CN CN202311241375.2A patent/CN117006971A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5416587A (en) * | 1993-07-09 | 1995-05-16 | Northeast Photosciences | Index interferometric instrument including both a broad band and narrow band source |
| EP0843154A2 (en) * | 1996-11-13 | 1998-05-20 | Olympus Optical Co., Ltd. | Method for measuring shape of object and apparatus for carrying out the same |
| US6061136A (en) * | 1996-11-13 | 2000-05-09 | Olympus Optical Co., Ltd. | Method for measuring shape of object and apparatus for carrying out the same |
| JP2000074618A (en) * | 1998-08-27 | 2000-03-14 | Fuji Xerox Co Ltd | Method and instrument for measuring interference |
| CN1254088A (en) * | 1998-11-17 | 2000-05-24 | 株式会社三丰 | Interferometer and measurement method adopting said interferometer |
| US20070035744A1 (en) * | 2004-05-04 | 2007-02-15 | Peter Lehmann | Device and method for a combined interferometry and image-based determination of geometry, especially for use in micro system engineering |
| JP2007263904A (en) * | 2006-03-30 | 2007-10-11 | Anritsu Corp | Device and method for measuring three-dimensional shape |
| CN101726260A (en) * | 2008-10-13 | 2010-06-09 | 陈亮嘉 | Vibration resistance type interference scanning system and method thereof |
| CN102057269A (en) * | 2008-11-26 | 2011-05-11 | 齐戈股份有限公司 | Scan error correction in low coherence scanning interferometry |
| CN103712553A (en) * | 2013-12-26 | 2014-04-09 | 镇江超纳仪器有限公司（中外合资） | Interference method with phase method and vertical scanning method compatible |
| CN105758294A (en) * | 2015-01-05 | 2016-07-13 | 株式会社三丰 | Interference objective lens and light interference measuring device |
| CN107144217A (en) * | 2017-04-25 | 2017-09-08 | 西安交通大学 | Fiber optic interferometric confocal system for optical element crudy on-line checking |
| CN110869696A (en) * | 2018-06-25 | 2020-03-06 | 科美仪器公司 | Vibration-resistant white light interference microscope and vibration influence removing method thereof |
| CN116295102A (en) * | 2023-03-09 | 2023-06-23 | 中国人民解放军国防科技大学 | White light interference scanning super-resolution measuring device based on optical tweezers microsphere and application method |
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