CN116295102A - White light interference scanning super-resolution measuring device based on optical tweezers microsphere and application method - Google Patents
White light interference scanning super-resolution measuring device based on optical tweezers microsphere and application method Download PDFInfo
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- CN116295102A CN116295102A CN202310223374.9A CN202310223374A CN116295102A CN 116295102 A CN116295102 A CN 116295102A CN 202310223374 A CN202310223374 A CN 202310223374A CN 116295102 A CN116295102 A CN 116295102A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The invention discloses a white light interference scanning super-resolution measuring device based on optical tweezers microspheres and an application method thereof, wherein the measuring device comprises a light beam generating unit, a first beam splitting prism, a first micro objective, a second micro objective, a light beam reflecting unit, an image collecting unit, a sample adjusting table, a measured piece and microsphere lenses, wherein the light beam reflecting unit comprises a light shielding plate, and the laser reflected by the surface of a target area of the measured piece is collected under the state that the light shielding plate shields the light beam reflecting unit so as to realize transverse two-dimensional super-resolution imaging of the measured piece; and under the state that the light shielding plate does not shield the light beam reflecting unit, collecting interference of laser reflected by the surface of the target area of the measured piece and reflected light of the reflecting unit so as to realize three-dimensional morphology measurement of the target area of the measured piece. The invention combines the laser tweezers technology with the microsphere lens super-resolution technology and the white light interference microscopy technology, and can realize super-resolution, high-precision, flexible and efficient two-dimensional or three-dimensional morphology measurement of the measured piece.
Description
Technical Field
The invention relates to the technical field of microscopic interferometry, in particular to a white light interferometry super-resolution measuring device based on optical tweezers microspheres and an application method.
Background
White light interferometry is used as dual-beam interferometry, and when the optical path difference between the measuring optical path and the reference optical path is zero, the light intensity of the surface of the measured sample reaches the maximum value. The piezoelectric ceramic drives the microscope objective to vertically scan the three-dimensional structure of the surface of the measured surface, the light intensity value of each pixel point in the scanning process is recorded by the CCD camera, the corresponding relation between the light intensity value and the scanning position is utilized, and the recovery of the three-dimensional morphology of the surface of the measured part is realized by solving the height difference of the corresponding position of the maximum light intensity value of each pixel point. Currently, commercial white light interferometers have reached the sub-nanometer level in vertical resolution and the 1nm level in vertical accuracy. The white light interferometry has the advantages of no damage, high efficiency, no phase ambiguity and the like while the axial resolution is high. Therefore, the white light interferometry is widely applied to the measurement of microstructures such as steps and grooves and the surface morphology of optical components. However, the lateral resolution is still limited by the optical diffraction limit of the microscope objective, and the lateral resolution is up to 200nm in the visible light band.
In order to meet the measurement requirement of a micro-nano device with smaller dimension, the optical diffraction limit of an optical microscope is broken through, and the improvement of the transverse resolution of the optical microscope is particularly important. In recent years, a super-resolution microscopic imaging system based on a microsphere lens has become a research focus in the field of micro-optics. Wang Zengbo from Manchester university, UK was first placed on the surface of a sample without immersion using a silica microsphere lens, and the sample was observed under a conventional optical microscope to increase the imaging resolution of the visible light band optical microscope to 50nm (1.Wang, Z., guo, W., li, L., luk "Yanchuk, B., khan, A., & Liu, Z., et al Optical virtual imaging at 50nm lateral resolution with a white-light nanoscope [ J ]. Nature Communications, 2011 (2): 218.). And then scholars at home and abroad develop and explore a super-resolution microscopic imaging mode based on the microsphere lens, and combine the microsphere lens with a white light interference microscopy technology to realize three-dimensional super-resolution detection of the micro-nano device. Wang Feifei and I. Kassamakov combined microsphere lenses with Linnik and Mirau type white light interferometers, respectively, successfully achieved Three-dimensional topography measurements on blue-ray discs of 100nm periodic structure (2. Wang F, liu L, yu P, et al, three-Dimensional Super-Resolution Morphology by Near-Field Assisted White-Light Interferometry [ J ]. Scientific Reports,2016 (6): 24703 and 3. Kassamakov I, lecler S, nolvi A, et al, 3d super-resolution optical profiling using microsphere enhanced Mirau interferometry open [ J ],2017,7 (1): 3683 ]).
At present, when the microsphere lens is used for super-resolution measurement, the microspheres are arranged on the surface of a measured piece in a random dispersion mode, and the microspheres are randomly distributed on the surface of the measured piece, so that super-resolution measurement on a designated target area cannot be realized, and because the size of the microspheres is only a few micrometers to tens of micrometers, the measurement area is small, and serious waste of the whole field of view of an objective lens exists, and therefore the measurement area needs to be spliced. The microsphere position needs to be moved whether super-resolution measurement is required for a designated target area or stitching measurement is required for a microsphere imaging area. LEE J Y and LI J move the microspheres to the target area to be observed using tungsten probes and a microsphere robot, respectively, to effect topographical measurements of the designated area to be measured, and to further complete stitching of the imaging results (4. Ju Y L, hong B H, kim W Y, et al, near-field focusing and magnification through self-assembled nanoscale spherical lenses [ J ]. Nature, 2009, 460 (7254): 498-501 and 5. Li J, liu W, li T, et al, swimming Microrobot Optical Nanoscopy [ J ]. Nano Letters, 2016:6604.). Although the above method using tungsten probe and robot successfully realizes the movement of microsphere lens, the technology is complex to realize, and the scanning efficiency is low in white light interferometry.
Disclosure of Invention
The invention aims to solve the technical problems: aiming at the problems in the prior art, the invention provides a white light interference scanning super-resolution measuring device based on optical tweezers microspheres and an application method thereof.
In order to solve the technical problems, the invention adopts the following technical scheme:
the white light interference scanning super-resolution measuring device based on the optical tweezers microsphere comprises a light beam generating unit, a first light splitting prism, a first micro-objective lens, a second micro-objective lens, a light beam reflecting unit, an image collecting unit, a sample adjusting table, a measured piece and a microsphere lens, wherein the measured piece is arranged on the sample adjusting table, the microsphere lens is arranged on the surface of the measured piece, the light beam generating unit is used for generating an optical tweezers light beam and an imaging light beam, the optical tweezers light beam is focused through the first micro-objective lens to form a tweezers tip so as to be used for capturing the microsphere lens on the surface of the measured piece and arranged in a target area of the measured piece, laser reflected by the surface of the target area of the measured piece is injected into the first light splitting prism, the light beam reflecting unit comprises a detachable light shielding plate, and the laser reflected by the surface of the target area of the measured piece is directly collected by the image collecting unit through the first light splitting prism under the state that the light shielding plate shields the light beam reflecting unit so as to realize transverse two-dimensional super-resolution imaging of the target area of the measured piece; under the state that the light shielding plate does not shield the light beam reflecting unit, laser reflected by the surface of the target area of the measured piece and imaging light beams irradiate the reflected light reflected by the light beam reflecting unit through the second micro objective lens, interference occurs at the first beam splitting prism, and the reflected light is collected by the image collecting unit so as to realize three-dimensional morphology measurement of the target area of the measured piece.
The light beam generating unit comprises a white light source, a laser light source, a second beam splitter prism and a light beam shaping component, wherein the white light source and the laser light source are mutually perpendicular and are respectively arranged on the light path input side of the second beam splitter prism, and the light beam shaping component is arranged on the light path output side of the second beam splitter prism and is used for shaping laser and white light to obtain generated light tweezers beams and imaging beams.
The beam shaping assembly comprises a first condenser, an aperture diaphragm, a second condenser and a field diaphragm which are sequentially arranged in sequence.
The light beam reflection unit further comprises a plane standard mirror and piezoelectric ceramics, the piezoelectric ceramics are arranged on the back surface of the plane standard mirror, the front surface of the plane standard mirror is vertically arranged relative to an imaging light beam, the light shielding plate is detachably arranged between the plane standard mirror and the first beam splitting prism, and the piezoelectric ceramics are used for driving the plane standard mirror to move so as to realize phase-shifting scanning of the plane standard mirror along the direction of a horizontal optical axis.
The image acquisition unit comprises an achromatic lens and a CCD camera which are sequentially arranged, a detachable optical filter is arranged between the achromatic lens and the CCD camera, and an output light beam of the first beam splitting prism is sequentially sent into a lens of the CCD camera through the achromatic lens and the optical filter to image in the CCD camera.
The sample adjusting table comprises a coarse coke lifting table, a fine coke lifting table, a first two-dimensional adjusting mechanism and a second two-dimensional adjusting mechanism, wherein the coarse coke lifting table, the fine coke lifting table, the first two-dimensional adjusting mechanism and the second two-dimensional adjusting mechanism are sequentially connected according to a designated sequence, the first two-dimensional adjusting mechanism is used for adjusting two-dimensional linear motion of a measured piece on a horizontal plane, and the second two-dimensional adjusting mechanism is used for adjusting pitching and swaying motion of the measured piece.
The sample adjusting table is arranged on the vibration isolation platform, the light beam generating unit, the first beam splitting prism, the first micro objective, the second micro objective, the light beam reflecting unit and the image collecting unit are respectively arranged on the optical bread board, and the optical bread board is fixed on the vibration isolation platform through the bread board support.
The microsphere lens is formed by dispersing microsphere-ethanol solution drops on the surface of a measured piece, and the microsphere-ethanol solution is obtained by putting absolute ethanol into the microsphere lens.
The application method of the white light interference scanning super-resolution measuring device based on the optical tweezers microsphere comprises the following steps:
s101, placing a measured piece on a sample adjusting table, dripping microsphere-ethanol solution on the surface of the measured piece, and adjusting the inclined measured piece to enable the microsphere lens to be dispersed under the action of gravity;
s102, turning on a laser light source, and focusing and irradiating a laser beam emitted by the laser light source to the surface of a measured piece through a first micro objective after the laser beam is collimated by a beam shaping assembly and reflected by a first beam splitting prism; the light shielding plate is arranged at the front end of the plane standard mirror, so that the laser beam cannot form coherent interference which is unfavorable for observation; removing the optical filter, and reducing the exposure of the CCD camera until a light spot imaged by the laser light source appears in the field of view of the CCD camera;
s103, adjusting a coarse focusing lifting table, and adjusting the spot size of a laser source to enable laser beams emitted by the laser source to be converged in a field of view of a CCD camera until laser forceps tips are formed;
s104, turning on a white light source, collimating a white light beam emitted by the white light source through a beam shaping assembly, splitting the white light beam by a first beam splitting prism, irradiating the white light beam onto the surface of a measured piece through a first micro-objective, reflecting illumination light carrying laser capturing sample information through the measured piece, passing through a first micro-objective, penetrating an achromatic lens, and then entering a CCD camera for imaging, and adding an optical filter at the front end of the CCD camera to eliminate the influence of the laser beam on imaging quality;
s105, the microsphere lens randomly dispersed on the surface of the measured piece is translated to the laser tweezer tip through adjusting the first two-dimensional adjusting mechanism, so that the laser captures the microsphere lens, the microsphere lens is operated to move relative to the measured piece by adjusting the clamping force of the laser beam, the microsphere lens is moved to a target area through adjusting the first two-dimensional adjusting mechanism, the white light beam is refracted through the microsphere lens and irradiates on the surface of the measured piece, and after being reflected, the white light beam is received by the first micro objective lens after being reflected again, so that the transverse two-dimensional super-resolution imaging of the target area is realized.
Step S105 further includes:
s106, removing the light shielding plate from the front end of the plane standard mirror, finely adjusting the focus adjusting lifting table until a clear enlarged result diagram of the measured piece appears on the surface of the microsphere lens, and adjusting the second two-dimensional adjusting mechanism to finely adjust the pitching and the deflection of the measured piece, so that the interference fringes are adjusted to zero fringes or a specified number of fringes which are not more than 10;
and S107, starting the main control equipment to drive and control the piezoelectric ceramic to drive the plane standard mirror to scan along the horizontal optical axis direction in a phase-shifting manner, so that the target area of the measured piece completely passes through the whole interference process, storing the interference pattern recorded by the CCD camera in the scanning process to the main control equipment, extracting the light intensity value of the interference image by using the main control equipment, and converting the light intensity value into the surface morphology information of the target area.
Compared with the prior art, the invention has the following advantages: the invention discloses a white light interference scanning super-resolution measuring device based on optical tweezers microspheres, which comprises a light beam generating unit, a first beam splitting prism, a first micro-objective lens, a second micro-objective lens, a light beam reflecting unit, an image collecting unit, a sample adjusting table, a measured piece and a microsphere lens, wherein the measured piece is arranged on the sample adjusting table; in the state that the light shielding plate does not shield the light beam reflecting unit, laser reflected by the surface of a target area of a measured piece and imaging light beams are irradiated to the light beam reflecting unit through the second micro-objective lens, reflected light reflected by the light beam reflecting unit is interfered at the first beam splitting prism and is collected by the image collecting unit to realize three-dimensional morphology measurement of the target area of the measured piece.
Drawings
Fig. 1 is a schematic structural diagram of a white light interferometry super-resolution measurement device according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of a microsphere-lens assisted micro-objective imaging according to an embodiment of the present invention.
FIG. 3 is a schematic view of a laser beam focus capture microsphere lens according to an embodiment of the present invention.
FIG. 4 is a schematic view of a laser beam migrating microsphere lens according to one embodiment of the present invention.
Legend description: 1. a white light source; 2. a laser light source; 3. a second light splitting prism; 4. a first condenser; 5. an aperture stop; 6. a second condenser lens; 7. a field stop; 8. a first microobjective; 9. a second microobjective; 10. a first beam-splitting prism; 11. an achromatic lens; 12. an optical filter; 13. a CCD camera; 14. a planar standard mirror; 15. piezoelectric ceramics; 16. coarse coke adjusting lifting table; 17. a first two-dimensional adjustment mechanism; 18. a second two-dimensional adjustment mechanism; 19. a measured piece; 20. a master control device; 21. an optical bread board; 22. a breadboard bracket; 23. a vibration isolation platform; 24. a beam shaping assembly; 25. a sample adjustment station; 26. a microsphere lens; 27. fine-tuning a coke lifting table; 28. a light shielding plate.
Detailed Description
As shown in fig. 1, the white light interferometry super-resolution measuring device based on optical tweezers microsphere in this embodiment includes a beam generating unit, a first beam splitter prism 10, a first micro objective lens 8, a second micro objective lens 9, a beam reflecting unit, an image collecting unit, a sample adjusting table 25, a measured piece 19 and a microsphere lens 26, where the measured piece 19 is disposed on the sample adjusting table 25, the microsphere lens 26 is disposed on the surface of the measured piece 19, the beam generating unit is used to generate an optical tweezers beam and an imaging beam, the optical tweezers beam is focused by the first micro objective lens 8 to form a tweezers tip for capturing the microsphere lens 26 on the surface of the measured piece 19 and is placed in a target area of the measured piece 19, the laser reflected on the surface of the target area of the measured piece 19 is incident into the first beam splitter prism 10, the beam reflecting unit includes a detachable light shielding plate 28, and the laser reflected on the surface of the target area of the measured piece 19 is directly collected by the image collecting unit after passing through the first beam splitter prism 10 in a state where the light shielding plate 28 shields the target area of the measured piece 19 to implement transverse two-dimensional super-resolution imaging on the target area of the measured piece 19; in a state that the light shielding plate 28 does not shield the beam reflection unit, the laser reflected by the surface of the target area of the measured piece 19 interferes with the imaging beam through the second micro objective 9 to the reflected light reflected by the beam reflection unit at the first beam splitting prism 10, and the interference is collected by the image collecting unit so as to realize three-dimensional shape measurement of the target area of the measured piece 19. The optical tweezers technology utilizes a three-dimensional potential well formed by the mechanical effect of momentum transfer between light and substance particles to enable the substance particles to be bound by the light, thereby realizing the capturing and the control of the substance particles. The white light interference scanning super-resolution measuring device based on the optical tweezers microsphere is based on a laser optical tweezers technology, is introduced into a three-dimensional super-resolution measuring system combining the microsphere technology and the white light interference scanning measuring technology, captures, clamps and manipulates the microsphere lens by utilizing a tweezers tip formed by focusing laser beams, realizes free migration of the microsphere lens, can flexibly move the microsphere lens to a specified region to be measured, realizes two-dimensional transverse super-resolution analytical imaging of the specified region to be measured, and can realize high-precision and high-efficiency three-dimensional morphology measurement of a super-optical diffraction limit microstructure by combining the white light interference scanning technology.
As shown in fig. 1, the light beam generating unit of the present embodiment includes a white light source 1, a laser light source 2, a second beam splitter prism 3, and a light beam shaping assembly 24, where the white light source 1 and the laser light source 2 are disposed perpendicular to each other and on the light path input side of the second beam splitter prism 3, respectively, and the light beam shaping assembly 24 is disposed on the light path output side of the second beam splitter prism 3 for shaping the laser light and the white light to generate a light tweezer beam and an imaging beam.
In this embodiment, the white light source 1 is a schottky led white light source, and the working wavelength range is 400-750nm. The white light beam is transmitted through the first beam splitter prism 3 and the beam shaping system 24 to the first beam splitter prism 10 to be split into a measuring beam and a reference beam. As shown in fig. 2, the measuring beam irradiates the surface of the microsphere lens 26 through the first microscope objective 8, irradiates the surface of the measured piece 19 after refraction, enters the microsphere lens again after being reflected by the surface of the measured piece 19, and returns to the first microscope objective 8. The reference beam irradiates the surface of the plane standard mirror 14 through the second microscope objective 9, and returns to the second microscope objective 9 after being reflected. Light reflected from the surface of the measured piece 19 and the surface of the plane standard mirror 14 interfere at the beam splitter prism 10, the interference pattern formed is imaged to the CCD camera 13 through the achromatic lens 11, and data recorded by the CCD camera 13 is saved to the main control device 20 (specifically, a computer device in this embodiment).
In this embodiment, the output power of the laser source 2 is 50mw, and the operating wavelength is 635 nm.+ -.5 nm. After being reflected by the first beam splitter prism 3, the laser beam reaches the beam splitter prism 10 through the beam shaping system 24, and then is reflected by the beam splitter prism 10 to enter the first microscope objective 8.
In this embodiment, the first micro objective 8 is a 100 times nikon CFI60 far-field correction bright-field lens, as shown in fig. 3 and 4, the first micro objective 8 can focus laser to form a fine tweezer tip 81, and uses the laser light capturing force to perform free grabbing on the microsphere lens 26 on the surface of the measured piece 19, and cooperates with the two-dimensional translation of the first two-dimensional adjusting mechanism 17 in the horizontal plane to control the relative movement of the microsphere lens 26 and the measured piece 19, so as to form a free particle optical tweezer optical path.
As shown in fig. 1, the beam shaping assembly 24 of the present embodiment includes a first condenser lens 4, an aperture stop 5, a second condenser lens 6, and a field stop 7, which are sequentially arranged. The first condenser 4 is a non-coated biconvex lens with the diameter of 25mm and the focal length of 35mm. The second condenser lens 6 is likewise a non-coated biconvex lens, 20mm in diameter and 25mm in focal length. The white light source 1 and the laser source 2 are vertically and crosswise arranged, the white light beam and the laser beam form an optical path through the first beam splitting prism 3, and an imaging optical path and an optical tweezer optical path are respectively formed through the beam shaping system 24 and subsequent optical elements. In this embodiment, the first dichroic prism 3 is a non-polarized dichroic prism, and the dichroic ratio is 50:50, the working wavelength is 400-700nm.
As shown in fig. 1, the beam reflection unit of the present embodiment further includes a plane standard mirror 14 and a piezoelectric ceramic 15, where the piezoelectric ceramic 15 is installed on the back surface of the plane standard mirror 14, the front surface of the plane standard mirror 14 is vertically arranged relative to the imaging beam, and a light shielding plate 28 is detachably installed between the plane standard mirror 14 and the first beam splitter prism 10, and the piezoelectric ceramic 15 is used to drive the plane standard mirror 14 to move so as to realize phase-shifting scanning of the plane standard mirror 14 along the horizontal optical axis direction. In this embodiment, the piezoelectric ceramic 15 controlled by the main control device 20 drives the plane standard mirror 14 to move, so as to realize phase-shift scanning of the plane standard mirror 14 along the horizontal optical axis direction.
As shown in fig. 1, the image capturing unit of the present embodiment includes an achromatic lens 11 and a CCD camera 13 arranged in sequence, a detachable optical filter 12 is provided between the achromatic lens 11 and the CCD camera 13, and an output beam of the first dichroic prism 10 is sent to a lens of the CCD camera 13 through the achromatic lens 11 and the optical filter 12 in sequence to image in the CCD camera 13. When the laser light source 2 is started to capture by the microsphere lens 26, the laser reflected from the measured piece 19 partially transmits through the first beam splitter prism 10 and enters the CCD camera 13 to affect imaging quality, and an optical filter 12 is added at the front end of the CCD camera 13 to filter laser beams and allow visible light wave bands to transmit. An achromatic lens 11 is added to the front of the CCD camera 13 to adjust the field of view and to increase the brightness of light incident on the CCD camera 13. In this embodiment, the optical filter 12 is a bandpass filter, and has a center wavelength 550nm and a fwhm of 50nm±5nm.
As shown in fig. 1, the sample adjusting stage 25 of the present embodiment includes a coarse focus adjusting stage 16, a fine focus adjusting stage 27, a first two-dimensional adjusting mechanism 17 and a second two-dimensional adjusting mechanism 18, the coarse focus adjusting stage 16, the fine focus adjusting stage 27, the first two-dimensional adjusting mechanism 17 and the second two-dimensional adjusting mechanism 18 being sequentially connected in the stated order, wherein the first two-dimensional adjusting mechanism 17 is used for adjusting the two-dimensional rectilinear motion of the measured piece 19 on the horizontal plane, and the second two-dimensional adjusting mechanism 18 is used for adjusting the pitch and yaw motions of the measured piece 19. In this embodiment, the first two-dimensional adjusting mechanism 17 is used for adjusting the two-dimensional linear motion of the horizontal plane of the measured piece 19, and the second two-dimensional adjusting mechanism 18 is used for adjusting the pitching and yawing motion of the measured piece 19. The stroke of the coarse coke lifting table 16 is 70mm, the fine coke lifting table Jiao Sheng is driven by a precise differential head, and the stroke is 10mm. The first two-dimensional adjusting mechanism 17 is adjusted in a two-dimensional straight line, and the stroke is 20mm. A second two-dimensional adjustment mechanism 18, two-dimensional tilt adjustment, adjustment range ±2°.
As shown in fig. 1, the sample adjusting stage 25 in the present embodiment is disposed on the vibration isolation platform 23, and the light beam generating unit, the first beam splitter prism 10, the first micro objective lens 8, the second micro objective lens 9, the light beam reflecting unit, and the image collecting unit are respectively mounted on the optical bread board 21, and the optical bread board 21 is fixed on the vibration isolation platform 23 by the bread board bracket 22, so as to eliminate the influence of environmental factors on the white light scanning interferometry.
As shown in fig. 1, the microsphere lens 26 in this embodiment is formed by dispersing droplets of a microsphere-ethanol solution on the surface of the test piece 19, the microsphere-ethanol solution is obtained by placing absolute ethanol into the microsphere lens, and silica microspheres are used as the microspheres in this embodiment.
As described above, the white light interferometry super-resolution measuring device of the present embodiment includes the laser light source 2, the white light source 1, the first beam splitter prism 3, the beam shaping system 24, the first beam splitter prism 10, the CCD camera 13, the achromatic lens 11, the optical filter 12, the first micro-objective 8, the second micro-objective 9, the piezoelectric ceramic 15, the plane standard mirror 14, the measured piece 19, the micro-ball lens 26, the sample adjusting stage 25, the light shielding plate 28, the optical bread board 21 with the optical components, the bread board bracket 22, the vibration isolation platform 23, and the main control device 20 with built-in measurement data processing program connected to the piezoelectric ceramic and the CCD camera. The white light interferometry super-resolution measuring device of the embodiment can measure the micro-nano size of the super-optical diffraction limit with high precision and high efficiency, the microsphere lens is used as the microsphere lens to be placed on the surface of a measured piece in a random dispersion mode, the microsphere lens on the surface of the measured surface can be flexibly and freely moved by utilizing the optical tweezers technology, and the super-resolution, high precision and high efficiency two-dimensional or three-dimensional morphology measurement of the measured piece is realized by combining the white light interferometry technology on the basis of realizing two-dimensional super-resolution imaging by means of the microsphere lens.
In addition, the embodiment also provides an application method of the white light interference scanning super-resolution measuring device based on the optical tweezers microsphere, which comprises the following steps:
s101, placing a measured piece 19 on a sample adjusting table 25, dripping microsphere-ethanol solution on the surface of the measured piece 19, and adjusting the inclination of the measured piece 19 to enable a microsphere lens 26 to be dispersed under the action of gravity;
s102, turning on the laser source 2, and focusing and irradiating the laser beam emitted by the laser source 2 to the surface of the measured piece 19 through the first micro objective lens 8 after the laser beam is collimated by the beam shaping assembly 24 and reflected by the first beam splitting prism 10; a light shielding plate 28 is arranged at the front end of the plane standard mirror 14, so that the laser beams cannot form coherent interference which is unfavorable for observation; removing the optical filter 12, and reducing the exposure of the CCD camera 13 until a light spot imaged by the laser light source 2 appears in the field of view of the CCD camera 13;
s103, adjusting a coarse focus adjustment lifting table 16, and adjusting the spot size of the laser source 2, so that laser beams emitted by the laser source 2 are converged in the field of view of the CCD camera 13 until laser forceps tips are formed;
s104, turning on the white light source 1, collimating the white light beam emitted by the white light source 1 through the beam shaping assembly 24, splitting the white light beam by the first beam splitting prism 10, irradiating the white light beam onto the surface of the measured piece 19 through the first micro objective 8, reflecting the illumination light carrying the information of the laser captured sample through the measured piece 19, passing through the first micro objective 8 and the achromatic lens 11, then entering the CCD camera 13 for imaging, and adding the optical filter 12 at the front end of the CCD camera 13 to eliminate the influence of the laser beam on the imaging quality;
s105, the microsphere lens 26 scattered randomly on the surface of the measured piece 19 is translated to the laser forceps tip by adjusting the first two-dimensional adjusting mechanism 17, so that laser captures the microsphere lens 26, the microsphere lens 26 is controlled to move relative to the measured piece 19 by adjusting the clamping force of a laser beam by adjusting the first two-dimensional adjusting mechanism 17, the microsphere lens 26 is moved to a target area, the white light beam is refracted by the microsphere lens 26 and irradiates on the surface of the measured piece 19, and is received by the first micro objective 8 after being reflected by the microsphere lens 26 again, so that transverse two-dimensional super-resolution imaging of the target area is realized.
When super-resolution three-dimensional measurement is performed on the target area, further related operations are required. Specifically, in this embodiment, step S105 further includes:
s106, moving the light shielding plate 28 away from the front end of the plane standard mirror 14, finely adjusting the focus adjusting lifting table 27 until a clear enlarged result diagram of the measured piece 19 appears on the surface of the microsphere lens 26, and adjusting the second two-dimensional adjusting mechanism 18 to finely adjust the pitching and the swaying of the measured piece 19, so as to adjust interference fringes to zero fringes or a specified number of fringes not more than 10;
s107, the main control equipment 20 is started to drive and control the piezoelectric ceramic 15 to drive the plane standard mirror 14 to scan along the horizontal optical axis direction in a phase-shifting manner, so that the target area of the measured piece 19 completely passes through the whole interference process, the interference pattern recorded by the CCD camera 13 in the scanning process is stored in the main control equipment 20, the main control equipment 20 is utilized to extract the light intensity value of the interference image, and the surface morphology information of the target area is obtained through conversion.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (10)
1. The white light interference scanning super-resolution measuring device based on the optical tweezers microsphere is characterized by comprising a light beam generating unit, a first light splitting prism (10), a first micro-objective lens (8), a second micro-objective lens (9), a light beam reflecting unit, an image collecting unit, a sample adjusting table (25), a measured piece (19) and a micro-sphere lens (26), wherein the measured piece (19) is arranged on the sample adjusting table (25), the micro-sphere lens (26) is arranged on the surface of the measured piece (19), the light beam generating unit is used for generating an optical tweezers beam and an imaging beam, the optical tweezers beam is focused through the first micro-objective lens (8) to form a tweezer tip so as to be used for capturing the micro-sphere lens (26) on the surface of the measured piece (19) and is arranged on a target area of the measured piece (19), laser reflected by the surface of the target area of the measured piece (19) is injected into the first light splitting prism (10), the light beam reflecting unit comprises a detachable shading plate (28), and the target area of the measured piece (19) is directly subjected to the first light splitting prism (10) to collect the image of the laser to realize the super-resolution of the target area of the measured piece (19) after the first light splitting prism passes through the first micro-sphere lens (10) under the state of the light shading plate (28) to shield the light reflecting unit; under the state that the light shielding plate (28) does not shield the light beam reflecting unit, laser reflected by the surface of the target area of the measured piece (19) and imaging light beams are irradiated to the reflected light reflected by the light beam reflecting unit through the second micro objective (9), interference occurs at the first beam splitting prism (10) and the interference occurs, so that the three-dimensional shape measurement of the target area of the measured piece (19) is realized.
2. The white light interferometry super-resolution measurement device based on the optical tweezers microsphere according to claim 1, wherein the light beam generating unit comprises a white light source (1), a laser light source (2), a second beam splitting prism (3) and a light beam shaping component (24), the white light source (1) and the laser light source (2) are mutually perpendicular to each other and are respectively arranged on the light path input side of the second beam splitting prism (3), and the light beam shaping component (24) is arranged on the light path output side of the second beam splitting prism (3) for shaping laser light and white light to generate an optical tweezers light beam and an imaging light beam.
3. The white light interferometry super-resolution measurement device based on optical tweezers microspheres according to claim 2, wherein the beam shaping assembly (24) comprises a first condenser lens (4), an aperture diaphragm (5), a second condenser lens (6) and a field diaphragm (7) sequentially arranged in sequence.
4. The white light interference scanning super-resolution measuring device based on the optical tweezers microsphere according to claim 1, wherein the beam reflecting unit further comprises a plane standard mirror (14) and piezoelectric ceramics (15), the piezoelectric ceramics (15) are installed on the back surface of the plane standard mirror (14), the front surface of the plane standard mirror (14) is vertically arranged relative to an imaging beam, the light shielding plate (28) is detachably installed between the plane standard mirror (14) and the first beam splitting prism (10), and the piezoelectric ceramics (15) are used for driving the plane standard mirror (14) to move so as to realize phase-shifting scanning of the plane standard mirror (14) along the horizontal optical axis direction.
5. The white light interferometry super-resolution measurement device based on the optical tweezers microsphere according to claim 1, wherein the image acquisition unit comprises an achromatic lens (11) and a CCD camera (13) which are sequentially arranged, a detachable optical filter (12) is arranged between the achromatic lens (11) and the CCD camera (13), and an output light beam of the first beam splitting prism (10) sequentially passes through the achromatic lens (11) and the optical filter (12) and is sent into a lens of the CCD camera (13) to image in the CCD camera (13).
6. The white light interferometry super-resolution measuring device based on optical tweezers microsphere according to claim 1, wherein the sample adjusting table (25) comprises a coarse focus adjusting lifting table (16), a fine focus adjusting lifting table (27), a first two-dimensional adjusting mechanism (17) and a second two-dimensional adjusting mechanism (18), the coarse focus adjusting lifting table (16), the fine focus adjusting lifting table (27), the first two-dimensional adjusting mechanism (17) and the second two-dimensional adjusting mechanism (18) are sequentially connected in a specified sequence, wherein the first two-dimensional adjusting mechanism (17) is used for adjusting two-dimensional linear motion of a measured piece (19) on a horizontal plane, and the second two-dimensional adjusting mechanism (18) is used for adjusting pitching and swaying motion of the measured piece (19).
7. The white light interferometry super-resolution measurement device based on the optical tweezers microsphere according to claim 1, wherein the sample adjusting table (25) is arranged on the vibration isolation platform (23), the light beam generating unit, the first beam splitting prism (10), the first micro objective lens (8), the second micro objective lens (9), the light beam reflecting unit and the image collecting unit are respectively arranged on the optical bread board (21), and the optical bread board (21) is fixed on the vibration isolation platform (23) through the bread board support (22).
8. The white light interferometry super-resolution measuring device based on optical tweezers microsphere according to claim 1, wherein the microsphere lens (26) is formed by dispersing microsphere-ethanol solution drops on the surface of the measured piece (19), and the microsphere-ethanol solution is obtained by putting absolute ethanol into the microsphere lens.
9. An application method of the white light interferometry scanning super-resolution measuring device based on the optical tweezers microsphere as claimed in claim 1, comprising the following steps:
s101, placing a measured piece (19) on a sample adjusting table (25), dripping microsphere-ethanol solution on the surface of the measured piece (19), and adjusting the inclination of the measured piece (19) to enable a microsphere lens (26) to be dispersed under the action of gravity;
s102, turning on a laser light source (2), and focusing and irradiating a laser beam emitted by the laser light source (2) to the surface of a measured piece (19) through a first microscope objective (8) after the laser beam is collimated by a beam shaping assembly (24) and reflected by a first beam splitting prism (10); a light shielding plate (28) is arranged at the front end of the plane standard mirror (14), so that coherent interference which is unfavorable for observation cannot be formed by laser beams; removing the optical filter (12), and reducing the exposure of the CCD camera (13) until a light spot imaged by the laser light source (2) appears in the field of view of the CCD camera (13);
s103, adjusting a coarse focusing lifting table (16), and adjusting the spot size of the laser light source (2) to enable laser beams emitted by the laser light source (2) to be converged in a field of view of the CCD camera (13) until laser forceps tips are formed;
s104, turning on a white light source (1), collimating a white light beam emitted by the white light source (1) through a beam shaping assembly (24), splitting the white light beam by a first beam splitting prism (10), irradiating the white light beam onto the surface of a tested piece (19) through a first micro objective (8), reflecting illumination light carrying laser capturing sample information through the tested piece (19), passing through the first micro objective (8) and an achromatic lens (11), then, making the illumination light incident on a CCD camera (13) for imaging, and adding an optical filter (12) at the front end of the CCD camera (13) to eliminate the influence of the laser beam on imaging quality;
s105, the microsphere lens (26) randomly dispersed on the surface of the measured piece (19) is translated to the laser forceps tip by adjusting the first two-dimensional adjusting mechanism (17), so that the microsphere lens (26) is captured by laser, the microsphere lens (26) is moved to a target area by adjusting the clamping force of a laser beam by operating the microsphere lens (26) relative to the measured piece (19) by adjusting the first two-dimensional adjusting mechanism (17), the white light beam is refracted and irradiated to the surface of the measured piece (19) through the microsphere lens (26), and is received by the first micro objective lens (8) after being reflected again through the microsphere lens (26), so that transverse two-dimensional super-resolution imaging of the target area is realized.
10. The method for applying the white light interferometry super-resolution measuring device based on the optical tweezers microsphere according to claim 9, wherein the step S105 further comprises:
s106, moving the light shielding plate (28) away from the front end of the plane standard mirror (14), and finely adjusting the focus adjusting lifting table (27) until a clear enlarged result diagram of the measured piece (19) appears on the surface of the microsphere lens (26), and adjusting the second two-dimensional adjusting mechanism (18) to finely adjust the pitching and the deflection of the measured piece (19) so as to adjust the interference fringes to zero fringes or a specified number of fringes which are not more than 10;
s107, starting the main control equipment (20) to drive and control the piezoelectric ceramic (15) to drive the plane standard mirror (14) to scan along the horizontal optical axis direction in a phase-shifting manner, enabling the target area of the measured piece (19) to completely pass through the whole interference process, storing the interference pattern recorded by the CCD camera (13) in the scanning process to the main control equipment (20), extracting the light intensity value of the interference image by using the main control equipment (20), and converting the light intensity value into the surface topography information of the target area.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117006971A (en) * | 2023-09-25 | 2023-11-07 | 板石智能科技(深圳)有限公司 | Three-dimensional morphology measurement system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117006971A (en) * | 2023-09-25 | 2023-11-07 | 板石智能科技(深圳)有限公司 | Three-dimensional morphology measurement system |
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