WO2019230029A1 - Dispositif d'inspection de soupapes à gaz pulsé - Google Patents

Dispositif d'inspection de soupapes à gaz pulsé Download PDF

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Publication number
WO2019230029A1
WO2019230029A1 PCT/JP2018/048514 JP2018048514W WO2019230029A1 WO 2019230029 A1 WO2019230029 A1 WO 2019230029A1 JP 2018048514 W JP2018048514 W JP 2018048514W WO 2019230029 A1 WO2019230029 A1 WO 2019230029A1
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WIPO (PCT)
Prior art keywords
pulse gas
gas valve
vacuum
pulse
valve
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Application number
PCT/JP2018/048514
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English (en)
Japanese (ja)
Inventor
祥聖 山内
岩本　慎一
Original Assignee
株式会社島津製作所
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Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP2020521674A priority Critical patent/JP6939992B2/ja
Publication of WO2019230029A1 publication Critical patent/WO2019230029A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00—Testing of machine parts

Definitions

  • the present invention relates to a pulse gas valve inspection device for inspecting whether or not a pulse gas valve operates normally.
  • the ion trap mass spectrometer is provided with a pulse gas valve for repeatedly introducing cooling gas and collision gas into the inside of the ion trap (that is, the ion trapping space) in a pulsed manner.
  • the pulse width (gas introduction time) depends on the size of the ion trap device (volume of the ion trapping space), but in the case of a normal ion trap device having an inner diameter of the ring electrode of about 10 mm, it is about several hundred ⁇ sec.
  • the repetition rate is set to several tens of Hz or less (see Patent Document 1). Since the timing and time width of gas introduction into the ion trapping space greatly affect the analysis accuracy by the mass spectrometer, the pulse gas valve is required to operate extremely accurately.
  • manufacturers of mass spectrometers use a test system such as that shown in FIG. 16 to check whether or not the pulse gas valves operate normally before shipping the device (or valve). Is called.
  • This inspection system is provided with a T-tube type vacuum vessel 11 having a straight pipe portion 12 and a branch pipe portion 13 connected in the middle thereof, and a pulse gas valve 30 is evacuated at one end of the straight pipe portion 12.
  • a vacuum introducing mechanism 14 including a seal member and the like for airtight attachment to the container 11 is provided.
  • an inspection vacuum gauge 16 composed of an ionization vacuum gauge is attached to the other end of the straight pipe portion 12 via the vacuum introduction mechanism 15 similar to the above.
  • an auxiliary vacuum gauge 17 composed of a Pirani gauge or the like for measuring the ultimate degree of vacuum in the vacuum vessel 11 at the time of vacuuming is provided.
  • a main pump 18 composed of a molecular pump or the like is attached.
  • an auxiliary pump (roughing pump) 19 such as a diaphragm pump is connected to the exhaust side of the main pump 18.
  • the pulse gas valve 30 to be inspected is attached to the vacuum vessel 11, and then the main pump 18 and the auxiliary pump 19 inside the vacuum vessel 11. Evacuate. Thereafter, when the measurement value by the auxiliary vacuum gauge 17 (that is, the degree of vacuum in the vacuum vessel 11) reaches a predetermined value (1 ⁇ 10 ⁇ 4 Pa or less), the inspection is started. That is, by applying a pulsed valve driving voltage from the valve driving circuit 20 to the pulse gas valve 30, the pulse gas valve 30 is opened for a predetermined time (about 300 ⁇ sec). A test gas cylinder 21 filled with a test gas such as helium or argon is connected to the base end side of the pulse gas valve 30.
  • the test gas By opening the pulse gas valve 30 as described above, the test gas enters the vacuum vessel 11. be introduced.
  • the degree of vacuum in the vacuum vessel 11 changes due to the test gas introduced into the vacuum vessel 11, the output current from the inspection vacuum gauge 16 changes, and this is read by the ionization vacuum gauge reading circuit 22. Measure the time change in degrees.
  • FIG. 17 shows a waveform of the output current (vacuum degree signal) of the inspection vacuum gauge 16 when a 40 V rectangular wave having a width of 300 ⁇ sec is applied to the pulse gas valve 30 every 3 seconds.
  • a vacuum level signal for three times of valve opening / closing is overwritten on a waveform indicating a time change of the valve driving voltage.
  • the valve drive voltage does not seem to change, but in reality, a rectangular wave having a very short time width (300 ⁇ sec) is applied to the pulse gas valve at the timing indicated by the downward arrow in the figure. .
  • the vacuum degree signal rises to about 6 ⁇ 10 ⁇ 2 Pa at the maximum after approximately 170 msec after opening and closing of the valve.
  • the pulse gas valve by repeatedly opening and closing the pulse gas valve and comparing the waveforms of the vacuum degree signal, it is possible to inspect the repeated stability of gas discharge by the pulse gas valve. Further, the waveform of the vacuum degree signal obtained for the pulse gas valve to be inspected is compared with a reference waveform (for example, a waveform acquired for a pulse gas valve that has been confirmed to operate normally), thereby It is possible to inspect whether or not the amount of gas discharged by the pulse gas valve and the gas discharge timing are appropriate.
  • a reference waveform for example, a waveform acquired for a pulse gas valve that has been confirmed to operate normally
  • the present invention has been made in view of the above points, and an object of the present invention is to improve the work efficiency of valve inspection using a pulse gas valve inspection apparatus.
  • a pulse gas valve inspection apparatus comprises: A vacuum vessel; A vacuum pump for evacuating the vacuum vessel; A plurality of pulse gas valve mounting portions attached to the outer wall of the vacuum vessel, each capable of detachably attaching a pulse gas valve to the vacuum vessel; Pulse gas valve driving means for driving the pulse gas valve attached to each of the plurality of pulse gas valve attachment parts; Control means for controlling the pulse gas valve driving means to selectively open any one of the pulse gas valves attached to each of the plurality of pulse gas valve attachment parts; An ionization vacuum gauge for measuring a change in the degree of vacuum in the vacuum vessel by opening the pulse gas valve; It is characterized by having.
  • pulse gas valve inspection apparatus since a plurality of pulse gas valves can be attached to one vacuum vessel, a plurality of pulse gas valves are inspected each time the vacuum vessel is evacuated once. be able to. For this reason, unlike the prior art, it is not necessary to perform evacuation every time one pulse gas valve is inspected, and the time and labor required for inspecting a plurality of pulse gas valves can be greatly reduced.
  • the pulse gas valve inspection apparatus is as follows.
  • the vacuum vessel has a vacuum gauge mounting opening which is a circular opening for mounting the ionization vacuum gauge,
  • the internal space of the vacuum vessel has a rotating body shape centered on the central axis of the vacuum gauge mounting opening, It is desirable that the plurality of pulse gas valve mounting portions are arranged rotationally symmetrically with respect to the central axis.
  • the behavior when the gas (test gas) introduced into the vacuum vessel through the pulse gas valve enters the ionization vacuum gauge is determined by the plurality of pulse gas valves attached to the vacuum vessel. It can be approximately equal for each.
  • the ionization vacuum gauge may be partially or entirely disposed inside the vacuum vessel, or may be entirely disposed outside the vacuum vessel. In the latter case, the internal space of the vacuum gauge is communicated with the internal space of the vacuum vessel through the vacuum gauge mounting opening.
  • the pulse gas valve inspection apparatus further includes: A reference valve which is a pulse gas valve for acquiring a reference waveform attached to the vacuum vessel, It is good also as what has.
  • the reference valve may be detachably attached to the vacuum vessel via the pulse gas valve attachment part, or may be fixed to the vacuum vessel by welding or the like. Also in the latter case, it is desirable that the reference valve and the plurality of pulse gas valve mounting portions are arranged rotationally symmetrically with respect to the central axis of the vacuum gauge mounting opening.
  • the relative evaluation can be performed by comparing the waveform of the degree of vacuum change obtained for each pulse gas valve to be inspected with the reference waveform. Therefore, by re-acquisition of the reference waveform even when the environment in the vacuum vessel (for example, the ultimate vacuum level) changes due to the turning on / off of the power supply of the inspection device, venting of the vacuum vessel at the time of pulse gas valve replacement, etc.
  • Each pulse gas valve can be evaluated without being affected by the environmental change.
  • Each of the plurality of pulse gas valve mounting portions includes a valve mounting opening provided in the vacuum vessel, and an O-ring attached to a tip of the pulse gas valve; Furthermore, A facing surface facing the vacuum vessel and an opening provided in the facing surface, and the tips of two or more pulse gas valves of the pulse gas valves respectively attached to the plurality of pulse gas valve mounting portions are respectively inserted.
  • An O-ring pressing member that has a valve insertion hole and abuts the O-ring by the peripheral edge of each of the openings of the opposing surface;
  • the O-ring attached to two or more pulse gas valves can be pressed by one O-ring pressing member.
  • the user's work burden can be reduced.
  • the pulse gas valve inspection apparatus further includes: A test gas supply means for supplying a test gas to a gas inlet provided at a proximal end of the pulse gas valve; It is good also as what has.
  • test gas for example, in addition to an inert gas such as argon, helium, and nitrogen, for example, dry air can be used.
  • inert gas such as argon, helium, and nitrogen
  • dry air for example, dry air
  • the test gas supply means includes Among the pulse gas valves that are respectively attached to the plurality of pulse gas valve mounting portions, a sealed container that accommodates the gas inlets of two or more pulse gas valves; A test gas cylinder filled with the test gas; A test gas pipe connecting the test gas cylinder and the sealed container; It is good also as what has.
  • the inside of the sealed container can be filled with the test gas by introducing the test gas from the test gas cylinder to the sealed container via the test gas pipe.
  • a test gas can be introduced into the vacuum vessel by opening one of the two or more pulse gas valves. Therefore, it is not necessary to connect the gas inlets provided in each of the plurality of test gas valves and the test gas cylinders with pipes, and the work burden on the user in installing and replacing the pulse gas valves can be reduced.
  • the pulse gas valve inspection apparatus is as follows.
  • the pulse gas valve driving means comprises: One pulse gas valve drive circuit provided for two or more pulse gas valves among the pulse gas valves respectively attached to the plurality of pulse gas valve attachment parts; Drive valve switching means for selectively connecting the one pulse gas valve drive circuit to any one of the two or more pulse gas valves; It is good also as what has.
  • the pulse gas valve inspection apparatus is as follows.
  • the ionization vacuum gauge may be a nude gauge.
  • Ordinary ionization gauges have measurement electrodes (filaments, grids, and collectors) and envelopes such as glass tubes that cover them, but nude gauges do not have such envelopes. The measurement electrode is exposed. Therefore, the nude gauge has a characteristic that the time response is higher than that of a normal ionization vacuum gauge, and the measured value changes in the order of 1 to 10 ⁇ s. Therefore, according to the pulse gas valve inspection apparatus having the above-described configuration, it is possible to measure a change in the degree of vacuum at or below the open time scale (several hundred microseconds) of the pulse gas valve, which could not be measured conventionally.
  • the pulse gas valve inspection apparatus is as follows.
  • the adsorption of water molecules to the inner wall of the vacuum vessel when venting the vacuum vessel can be suppressed, and the time required for subsequent evacuation can be shortened.
  • the pulse gas valve inspection apparatus is The control means may control the vacuum pump and the pulse gas valve driving means so as to open the pulse gas valve in a state where the degree of vacuum in the vacuum vessel is 10 ⁇ 2 Pa to 10 ⁇ 3 Pa. Good.
  • the work efficiency of valve inspection using the pulse gas valve inspection apparatus can be improved.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 1 of this invention Sectional drawing which shows the state which attached the pulse gas valve to the pulse gas valve vacuum introduction mechanism. Sectional drawing which shows the procedure at the time of attaching a nut member, a pressing ring, and an O-ring to a pulse gas valve. Sectional drawing which shows the procedure at the time of attaching the said pulse gas valve to a flange member.
  • the flowchart which shows operation
  • Sectional drawing which shows the state which penetrated the pulse gas valve to the O-ring press member and the O-ring in the Example. Sectional drawing which shows the state which has pressed the O-ring with the O-ring pressing member in the Example. Sectional drawing which shows another structural example of the press member fixing means in the Example.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 4 of this invention.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 5 of this invention.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 6 of this invention.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 7 of this invention.
  • the schematic diagram which shows the principal part structure of the pulse gas valve inspection apparatus which concerns on Example 8 of this invention.
  • the schematic block diagram which shows the conventional pulse gas valve inspection apparatus. A waveform showing a change in the degree of vacuum in the vacuum vessel when the pulse gas is introduced.
  • FIG. 1 shows the configuration of the pulse gas valve inspection apparatus according to the first embodiment of the present invention.
  • This inspection apparatus has a cylindrical vacuum vessel 110 to which a pulse gas valve 150 to be inspected is attached, and one end surface of the vacuum vessel 110 (hereinafter referred to as a first end surface 110a) is at the center thereof.
  • a circular vacuum gauge mounting opening 111 is provided.
  • An ionization vacuum gauge 113 is attached to the vacuum gauge attachment opening 111 via an ionization vacuum gauge vacuum introduction mechanism 112.
  • any type such as a triode type, a Schulz type, or a BA gauge may be used.
  • the ionization vacuum gauge vacuum introduction mechanism 112 is a member for attaching the ionization vacuum gauge 113 to the vacuum vessel 110 in an airtight manner, and has substantially the same configuration as a pulse gas valve vacuum introduction mechanism 120 described later.
  • a circular exhaust port 114 is provided at the center of the other end surface of the vacuum vessel 110 (hereinafter referred to as the second end surface 110b), and a main pump 116 (for example, a turbo molecular pump) is provided in the exhaust port 114. Etc.) is connected to the intake side.
  • An auxiliary pump 117 (for example, a diaphragm pump) is connected to the exhaust side of the main pump 116.
  • the second end surface 110b of the vacuum vessel 110 is further provided with a plurality of valve mounting openings 115 so as to surround the exhaust port 114.
  • a pulse gas valve vacuum introduction mechanism 120 is attached to the second end face 110b at a position corresponding to these valve attachment openings 115.
  • the valve mounting opening 115 and the pulse gas valve vacuum introduction mechanism 120 correspond to the pulse gas valve mounting portion in the present invention.
  • the pulse gas valve vacuum introduction mechanism 120 is a member for attaching the pulse gas valve 150 to the vacuum vessel 110 in an airtight manner.
  • FIG. 1 shows a configuration in which eight pulse gas valve vacuum introduction mechanisms 120 are provided in a vacuum vessel, but the number of pulse gas valves is not limited to this, and may be two or more (hereinafter referred to as the following). The same in all of the examples).
  • the pulse gas valve vacuum introduction mechanism 120 includes a flange member 121, a nut member 122, a pressing ring 123, and two O-rings 124 and 125.
  • the flange member 121 includes a cylindrical portion 121a having a thread groove formed on the outer peripheral surface, and a flange portion 121b provided at one end of the cylindrical portion 121a.
  • the flange portion 121b is formed on the second end surface 110b of the vacuum vessel 110.
  • the flange member 121 is fixed to the vacuum vessel 110 by being screwed to the outside.
  • the nut member 122 has an inner diameter that is substantially the same as the outer diameter of the cylindrical portion 121a of the flange member 121, and a cylindrical portion 122a in which a screw groove that is screwed into the screw groove is formed on the inner peripheral surface thereof, and the cylindrical portion And an annular portion 122b having an inner diameter smaller than the inner diameter of the cylindrical portion 122a.
  • the tip of the pulse gas valve 150 When attaching the pulse gas valve 150 to the vacuum vessel 110, first, as shown in FIG. 3, the tip of the pulse gas valve 150 is inserted into the nut member 122, the holding ring 123, and the O-rings 124 and 125 in this order. Thereafter, as shown in FIG. 4, the tip of the pulse gas valve 150 is inserted into the cylindrical portion 121a of the flange member 121 attached to the second end face 110b of the vacuum vessel 110, and the nut member 122 is rotated in that state. The nut member 122 is fastened to the cylindrical portion 121a.
  • the annular portion 122 b of the nut member 122 presses the O-rings 124 and 125 via the pressing ring 123, and thereby the O-rings 124 and 125 are in close contact with both the pulse gas valve 150 and the flange member 121.
  • the gap between the pulse gas valve 150 and the flange member 121 is hermetically sealed.
  • the pulse gas valve vacuum introduction mechanism 120 is disposed rotationally symmetrically with respect to the central axis X of the vacuum gauge mounting opening 111.
  • the inspection apparatus further includes a vent pipe 131 connected to the peripheral surface 110c of the vacuum vessel 110.
  • a valve for opening and closing the pipe 131 hereinafter, referred to as the pipe 131).
  • a vent valve 132) and an auxiliary vacuum gauge 133 are provided on the pipe 131.
  • the auxiliary vacuum gauge 133 measures the ultimate degree of vacuum of the vacuum vessel 110 when performing vacuuming, and is positioned between the vacuum vessel 110 and the vent valve 132 on the vent pipe 131.
  • the inspection apparatus further includes a test gas cylinder 134 containing a test gas (helium, argon, nitrogen, etc.), a regulator 135 for adjusting the pressure of the test gas supplied from the test gas cylinder 134, and a test gas cylinder 134;
  • a test gas supply pipe 136 that connects each pulse gas valve 150 is provided (the test gas cylinder 134, the regulator 135, and the test gas supply pipe 136 correspond to the test gas supply means in the present invention).
  • the test gas supply pipe 136 has one inlet end connected to the test gas cylinder 134 via the regulator 135 and a gas introduction port 151 (see FIGS. 2 to 4) provided on the base end side of the pulse gas valve 150 to be inspected.
  • a branch pipe structure having a plurality of outlet ends respectively connected to a gas inlet in the present invention.
  • the same number of outlet ends as the pulse gas valve vacuum introduction mechanism 120 are provided, only a part of the outlet ends is shown in FIG. 1 for simplification (FIGS. 6 and 7 described later). The same applies to FIG. 12, FIG. 14, and FIG.
  • the inspection apparatus includes an ionization vacuum gauge reading circuit 141 that receives a detection signal from the ionization vacuum gauge 113 and outputs a waveform representing a time change in the degree of vacuum, and a plurality of pulse gas valves to be tested.
  • 150 includes a plurality of pulse gas valve drive circuits 142a to 142d that respectively drive 150, and a control unit 143 that controls the operation of each unit.
  • the same number of pulse gas valve drive circuits 142a to 142d as the pulse gas valve vacuum introduction mechanism 120 are provided, only some of the pulse gas valve drive circuits 142a to 142d are shown in FIG. 1 for the sake of simplicity. (The same applies to FIGS. 6, 7, 11, and 13 to 15 described later).
  • the control unit 143 further includes a storage unit 144 that records the waveform generated by the ionization gauge reading circuit 141, an output unit 145 that includes a display device and a printer for outputting the waveform, and settings related to inspection.
  • An input unit 146 composed of a keyboard, a switch and the like for the user to input values and predetermined instructions is connected.
  • the substance of the control unit 143 is a dedicated or general-purpose computer including a CPU and a memory such as a RAM. A predetermined processing program is operated on the computer, and is shown in a flowchart of FIG. 5 described later. Such control is executed.
  • the user attaches the ionization vacuum gauge 113 to the ionization vacuum gauge vacuum introduction mechanism 112 and connects the ionization vacuum gauge 113 to the ionization vacuum gauge reading circuit 141.
  • the plurality of pulse gas valves 150 to be inspected by the user are respectively attached to the pulse gas valve vacuum introduction mechanism 120, and each pulse gas valve 150 is connected to the pulse gas valve drive circuits 142a to 142d.
  • the user performs a predetermined input operation with the input unit 146 to instruct the control unit 143 to execute the inspection.
  • the control unit 143 When a signal instructing execution of the inspection is input from the input unit 146, the control unit 143 causes the vent valve 132 to close the vent pipe 131 (step S11), and starts vacuuming by the auxiliary pump 117 and the main pump 116. (Step S12). Thereafter, the control unit 143 monitors the detection signal from the auxiliary vacuum gauge 133, and when the degree of vacuum in the vacuum vessel 110 obtained from the detection signal reaches a predetermined degree of vacuum (for example, 1 ⁇ 10 ⁇ 4 Pa).
  • a predetermined degree of vacuum for example, 1 ⁇ 10 ⁇ 4 Pa
  • step S13 the inspection of each pulse gas valve 150 is started, that is, the control unit 143 sets the valve number n representing the pulse gas valve 150 to be inspected to 1 (step S14), and the first pulse gas valve 150
  • the first pulse gas valve 150 By controlling a pulse gas valve driving circuit (for example, 142a) connected to the first pulse gas valve 150, the first pulse gas valve 150 is set at a predetermined time interval (for example, every 3 seconds) for a predetermined number of times (for example, 3 times) for a predetermined time. It is opened only during (for example, 300 ⁇ sec) (step S15).
  • step S15 the ionization vacuum gauge reading circuit 141 generates a waveform representing the change in the degree of vacuum over time based on the detection signal output from the ionization vacuum gauge 113.
  • the waveform is sent to the storage unit 144 via the control unit 143 and stored.
  • the control unit 143 increments the valve number n (step S17), and then executes step S15 for the nth pulse gas valve 150, and k units (in the example of FIG. 1) attached to the vacuum vessel 110.
  • step S16 the vent valve 132 is opened to open the vacuum vessel 110 to the atmosphere (step S18).
  • a waveform as shown in FIG. 17 (that is, a waveform showing a change in the degree of vacuum at each of a plurality of times of valve opening / closing in step S15 is overlaid for each pulse gas valve 150) is output to the output unit 145. It is displayed on the screen of the provided display device. In addition to or instead of displaying the waveform on the screen of the display device, the waveform may be printed by a printer provided in the output unit 145.
  • the user evaluates whether the inspection target valve is operating normally by comparing the waveform obtained for each pulse gas valve 150 to be inspected (hereinafter sometimes referred to as the inspection target valve) with a reference waveform.
  • the reference waveform is a waveform of a change in the degree of vacuum obtained by performing the same inspection as described above for a pulse gas valve that is known to operate normally (referred to as a reference valve).
  • the reference waveform may be obtained in advance, but every time the vacuum vessel 110 is opened to the atmosphere and evacuated, or every time the inspection apparatus is turned on / off, the reference waveform is used. It is desirable to re-acquire the waveform.
  • a reference valve is attached to any one of the k pulse gas valve vacuum introduction mechanisms 120 provided in the vacuum vessel 110, and each of the remaining k-1 pulse gas valve vacuum introduction mechanisms 120 is inspected.
  • the inspection according to the flowchart of FIG. 5 is executed with the target valve attached.
  • the user compares the waveform acquired for the reference valve in the inspection with the waveform obtained for each inspection target valve to evaluate whether each inspection target valve is operating normally.
  • the computer described above is based on whether or not the difference between the waveform obtained for each valve to be inspected and the reference waveform is within a predetermined allowable range. You may make it evaluate whether a test valve is operating normally.
  • a plurality of pulse gas valves 150 can be attached to one vacuum vessel 110. Each time the vacuum vessel 110 is evacuated, the plurality of pulse gas valves 150 are inspected. It can be performed. For this reason, it is not necessary to re-evacuate each time one pulse gas valve is inspected as in the prior art, and the time and labor required for inspecting a plurality of pulse gas valves can be greatly reduced.
  • FIG. 6 shows the configuration of a pulse gas valve inspection apparatus according to the second embodiment of the present invention. Note that the same or corresponding components as those in the inspection apparatus according to the first embodiment are denoted by the same reference numerals in the last two digits, and the description thereof is omitted as appropriate (the same applies to all the following embodiments).
  • the inspection apparatus is characterized in that the pulse gas valve (reference valve 260) used for obtaining the reference waveform is always fixed to the vacuum vessel 210 (that is, in this embodiment, the reference valve 260 is Included in the components of the inspection device).
  • the reference valve 260 may be connected to the vacuum vessel 210 via the pulse gas valve vacuum introduction mechanism 220 in the same manner as the pulse gas valve 250 to be tested. However, as shown in FIG. You may make it fix to the vacuum vessel 210 directly. Also in the latter case, the attachment positions of the reference valve 260 and each pulse gas valve vacuum introduction mechanism 220 in the vacuum vessel 210 are arranged rotationally symmetrically with respect to the central axis X of the vacuum gauge attachment opening 211.
  • FIG. 7 shows a schematic configuration of a pulse gas valve inspection apparatus according to the third embodiment of the present invention.
  • 8 and 9 are sectional views of the pulse gas valve vacuum introduction mechanism 320 and the second end surface 310b of the vacuum vessel 310 in the inspection apparatus of the embodiment (the main pump 316 is not shown in these drawings). ).
  • the inspection apparatus presses O-rings 324 and 325 attached to each pulse gas valve 350 and O-rings 324 and 325 attached to a plurality of pulse gas valves 350 at a time as the pulse gas valve vacuum introduction mechanism 320.
  • an O-ring pressing member 326 is a ring-shaped plate-shaped member having an outer diameter smaller than the diameter of the second end surface 310b of the vacuum vessel 310 and an inner diameter larger than the diameter of the exhaust port 314 provided in the second end surface 310b.
  • the inspection apparatus further includes a motor, a rotation / linear motion conversion mechanism, and the like for moving the O-ring pressing member 326 in the direction approaching the vacuum container 310 and the direction separating from the vacuum container 310.
  • a member drive mechanism 328 is provided.
  • the valve mounting opening 115 of the vacuum vessel 310 (corresponding to the pulse gas valve mounting portion in the present invention) is the center of the vacuum gauge mounting opening 311 provided on the first end surface 310a of the vacuum vessel 310. It is provided rotationally symmetric with respect to the axis X.
  • the pulse gas valve 350 when the pulse gas valve 350 is attached to the vacuum vessel 310, first, the tip of each pulse gas valve 350 is inserted into the valve insertion hole 327 of the O-ring pressing member 326 as shown in FIG. Then, O-rings 324 and 325 are attached to the tips. Thereafter, when the user performs a predetermined operation with the input unit 346, the pressing member driving mechanism 328 moves the O-ring pressing member 326 by a predetermined distance in the direction approaching the vacuum vessel 310 under the control of the control unit 343. Then, the O-ring pressing member 326 is stopped. As a result, as shown in FIG.
  • each pulse gas valve 350 is inserted into the interior of the vacuum vessel 310 from the valve attachment opening 315 provided in the second end surface 310b, and is attached to each pulse gas valve 350.
  • the O-rings 324 and 325 are pressed by the O-ring pressing member 326 (that is, the pressing member driving mechanism 328 corresponds to the pressing member fixing means in the present invention).
  • the O-rings 324 and 325 are in close contact with the peripheral surface of the pulse gas valve 350 and the second end surface 310b of the vacuum vessel 310, so that the pulse gas valve 350 is attached to the vacuum vessel 310 in an airtight manner.
  • the O-rings 324 and 325 attached to each pulse gas valve 350 can be pressed by one O-ring pressing member 326.
  • the work burden on the user when attaching 350 can be reduced.
  • the configuration in which two O-rings 324 and 325 are attached to one pulse gas valve 350 is illustrated, but the number of O-rings is not limited to this.
  • the pressing member fixing means in the present invention is not limited to the configuration in which the O-ring pressing member 326 is moved by a motor or the like like the above-described pressing member driving mechanism 328.
  • the O-ring pressing member 326 is not limited to the vacuum vessel 310. Any device can be used as long as it can be fixed in a state where it is close to. As such a configuration, for example, as shown in FIG. 10, a configuration including a flange member 329 fixed to the second end surface 310 b of the vacuum vessel 310 and a nut member 330 screwed to the flange member 329 is conceivable. .
  • the flange member 329 has an inner diameter larger than the outer diameter of the O-ring pressing member 326, a cylindrical portion 329a having a thread groove formed on the outer peripheral surface thereof, and a flange portion provided at one end of the cylindrical portion 329a. 329b, and is fixed to the vacuum vessel 310 by screwing the flange portion 329b to the outside of the second end surface 310b.
  • the nut member 330 has an inner diameter that is substantially the same as the outer diameter of the cylindrical portion 329a of the flange member 329, and a cylindrical portion 330a in which a screw groove that is screwed into the screw groove is formed on the inner peripheral surface thereof.
  • An annular portion 330b provided at one end of the cylindrical portion 330a and having an inner diameter smaller than the outer diameter of the O-ring pressing member 326 is provided.
  • the tip of each pulse gas valve 350 is inserted into the valve insertion hole 327 of the O-ring pressing member 326, and then the O-ring 324, 325 is attached. Thereafter, the O-ring pressing member 326 is caused to enter the cylindrical portion 329 a of the flange member 329, and the tip of each pulse gas valve 350 is inserted into the valve mounting opening 315 provided in the second end surface 310 b of the vacuum vessel 310.
  • the nut member 330 is attached to the cylindrical portion 329a of the flange member 329 and rotated, whereby the nut member 330 is fastened to the flange member 329. Accordingly, the O-ring pressing member 326 is pressed by the annular portion 330 b of the nut member 330, and the O-ring pressing member 326 presses the O-rings 324 and 325 toward the vacuum vessel 310. As a result, the O-rings 324 and 325 are crushed, and the space between each pulse gas valve 350 and the second end surface 310b of the vacuum vessel 310 is hermetically sealed.
  • FIG. 11 shows the configuration of a pulse gas valve inspection apparatus according to the fourth embodiment of the present invention.
  • the inspection apparatus according to the present embodiment includes an airtight container 471 that collectively accommodates proximal ends (regions including the gas introduction port 451) of the plurality of pulse gas valves 450.
  • a pipe 437 reaching the test gas cylinder 434 is connected to the sealed container 471, and the gas introduction port 451 of each pulse gas valve 450 is open to a sealed space inside the sealed container 471.
  • the intake side is connected to the sealed container 471 in addition to a pipe for connecting the intake side of the auxiliary pump 417 to the main pump 416 (hereinafter referred to as the first connection pipe 472).
  • the intake side is connected to the sealed container 471.
  • a pipe hereinafter referred to as a second connection pipe 473
  • a pump valve 474 for opening and closing the second connection pipe 473 is provided on the second connection pipe 473.
  • the pulse gas valve 450 is inspected using the inspection apparatus according to the present embodiment, the pulse gas valve 450 is first attached to the vacuum vessel 410, and then the sealed vessel 471 is attached to the second end surface 410b of the vacuum vessel 410.
  • the base end side of the pulse gas valve 450 is accommodated in the sealed container 471.
  • the inside of the vacuum vessel 410 is evacuated by the auxiliary pump 417 and the main pump 416, and the inside of the sealed vessel 471 is evacuated by the auxiliary pump 417.
  • the controller 443 opens the pump valve 474.
  • the evacuation of the sealed container 471 may be performed before or after the evacuation of the vacuum container 410, or may be performed in parallel with the evacuation of the vacuum container 410.
  • the user operates the regulator 435 to introduce the test gas from the test gas cylinder 434 to the sealed container 471.
  • the internal space of the sealed container 471 is filled with the test gas.
  • the test gas passes through the pulse gas valve 450 and is released into the vacuum vessel 410. Therefore, as in the inspection apparatus of the first embodiment, A change in the degree of vacuum in the vacuum vessel 410 is measured by an ionization vacuum gauge 413.
  • the inspection apparatus it is necessary to connect one pipe to the test gas cylinder 434 (the outlet end of the test gas supply pipe 136 in the first embodiment) to the gas introduction port 451 of each pulse gas valve 450 one by one. Therefore, it is possible to further reduce the work burden on the user in the inspection.
  • FIG. 12 shows the configuration of a pulse gas valve inspection apparatus according to the fifth embodiment of the present invention.
  • one pulse gas valve drive circuit 542 is provided for a plurality of pulse gas valves 550.
  • a switch part 547 (corresponding to the drive valve switching means in the present invention) is provided, and the pulse gas valve 550 connected to the pulse gas valve drive circuit 542 by this switch part 547. (That is, the pulse gas valve 550 for performing the opening / closing operation) can be switched alternatively.
  • pulse gas valves 550 are connected to the switch unit 547, but in reality, all the pulse gas valves 550 attached to the vacuum vessel 510 are connected to the switch unit 547. Any one of them is selected by the switch unit 547 and connected to the pulse gas valve drive circuit 542.
  • the manufacturing cost can be reduced and the maintainability can be improved.
  • the influence on the measurement result by the individual difference of the pulse gas valve drive circuit can be eliminated.
  • only one set of the pulse gas valve drive circuit and the switch unit is provided, but the number of pulse gas valve drive circuits and the switch units provided in the inspection apparatus is not limited to this.
  • two sets of pulse gas valve drive circuits and switch units are provided, half of the plurality of pulse gas valves 550 connected to the vacuum vessel 510 are connected to one switch unit, and the other half is connected to the other switch unit (and the pulse unit). It is good also as a structure connected to a gas valve drive circuit.
  • FIG. 13 shows the configuration of a pulse gas valve inspection apparatus according to the sixth embodiment of the present invention.
  • the inspection apparatus according to the present embodiment uses air as a test gas. Therefore, the test apparatus according to the present embodiment is not provided with the test gas valve supply means (that is, the test gas cylinder 134 and the test gas supply pipe 136 in the first embodiment), and the gas introduction port 651 of each pulse gas valve 650 is not provided. Open to the atmosphere.
  • the device configuration can be simplified to reduce the manufacturing cost, and the running cost can be reduced as compared with the case where helium or argon is used as the test gas. Further, since the pipe connection work between each pulse gas valve and the test gas cylinder is not required, the work burden on the user can be further reduced.
  • FIG. 14 shows the configuration of a pulse gas valve inspection apparatus according to the seventh embodiment of the present invention.
  • the inspection apparatus according to the present embodiment uses a nude gauge 713a as an ionization vacuum gauge.
  • a measurement electrode is housed in an envelope made of glass or the like, but the nude gauge 713a does not have an envelope, and the electrodes (filament, grid, collector) ) Is exposed.
  • Such a nude gauge 713a is more time responsive than an ionization vacuum gauge having an envelope, and the measured value changes on the order of 1 to 10 ⁇ sec. It is possible to observe a change in the degree of vacuum on a short time scale.
  • the opening of the pulse gas valve 750 with respect to the abnormality of the vacuum degree change on such a short time scale, or the driving voltage waveform which is difficult with the inspection apparatus using the ionization vacuum gauge equipped with the conventional envelope, or It becomes possible to evaluate the delay time of the closing operation.
  • FIG. 15 shows the configuration of a pulse gas valve inspection apparatus according to the eighth embodiment of the present invention.
  • the vent gas cylinder 881 is connected to the vent pipe 831, and when the inspection target valve is replaced, the control unit 843 uses the vent valve 832 provided on the vent pipe 831.
  • vent gas dry air or the like
  • vent gas cylinder 881 is supplied to the vacuum vessel 410 (these vent gas cylinder 881, vent pipe 831 and vent valve 832 serve as vent gas supply means in the present invention. Equivalent to).
  • the vent gas is not limited to the dry air, and may be any kind of gas as long as it has a low moisture content (humidity of 1% or less).
  • the pulse gas valve 150 is inspected in a state where the vacuum chamber 110 is at a degree of vacuum of about 10 ⁇ 4 Pa, but instead, 10 ⁇ 2 Pa to 10 ⁇ 3 Pa.
  • the pulse gas valve 150 may be inspected at a degree of vacuum. In this case, at the time of evacuation, each pulse gas valve 150 is reached when the ultimate degree of vacuum inside the vacuum vessel 110 detected by the auxiliary vacuum gauge 133 reaches a predetermined degree of vacuum of about 10 ⁇ 2 Pa to 10 ⁇ 3 Pa.
  • the control unit 143 controls the main pump 116, the auxiliary pump 117, and the pulse gas valve drive circuits 142a to 142d (the same applies to the embodiments other than the first embodiment) so as to start the inspection. If the degree of vacuum is about 10 ⁇ 2 Pa to 10 ⁇ 3 Pa, the adsorption of water molecules on the inner wall surface of the vacuum vessel does not greatly affect the evacuation time. Even so, the time required for evacuation can be shortened and a large number of pulse gas valves can be efficiently inspected.
  • the pulse gas valve is attached to the end surface of the vacuum vessel.
  • the pulse gas valve is attached to the peripheral surface of the vacuum vessel (that is, the circumference).
  • a configuration may be adopted in which a pulse gas valve vacuum introduction mechanism is provided on the surface.
  • the pulse gas valve vacuum introduction mechanisms are arranged so as to be rotationally symmetric with respect to the central axis X of the vacuum gauge mounting opening provided in the vacuum vessel.
  • the vacuum container is not limited to having the cylindrical internal space as described above, but may have another rotary body-shaped (for example, spherical) internal space.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

Dispositif d'inspection de soupapes à gaz pulsé, composé de: un récipient 110 sous vide; des pompes 116, 117 à vide qui produisent un vide dans le récipient 110 sous vide; une pluralité de parties 115, 120 de fixation de soupapes à gaz pulsé qui sont fixées à une paroi extérieure du récipient 110 sous vide et dont chacune permet à une soupape 150 à gaz pulsé d'être fixée à la chambre 110 sous vide de manière à pouvoir être fixée/détachée librement; des moyens 142a-142d d'actionnement de soupapes à gaz pulsé qui actionnent les soupapes 150 à gaz pulsé fixées à la pluralité de parties 115, 120 de fixation de soupapes à gaz pulsé; un moyen 143 de commande qui commande les moyens 142a-142d d'actionnement de soupapes à gaz pulsé de façon à ouvrir sélectivement une des soupapes 150 à gaz pulsé fixées à la pluralité de parties 115, 120 de fixation de soupapes à gaz pulsé; et un manomètre 113 de vide à ionisation qui mesure la variation du degré de vide à l'intérieur de la chambre 110 sous vide du fait de l'ouverture de la soupape 150 à gaz pulsé. Le rendement de travail lors des inspections de soupapes à gaz pulsé peut ainsi être amélioré.
PCT/JP2018/048514 2018-05-28 2018-12-28 Dispositif d'inspection de soupapes à gaz pulsé WO2019230029A1 (fr)

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KR102515060B1 (ko) * 2022-07-18 2023-03-29 한전케이피에스 주식회사 밸브 성능진단 시험장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07310841A (ja) * 1994-05-19 1995-11-28 Fujikin:Kk 流体の流量制御方法
CN1587951A (zh) * 2004-08-18 2005-03-02 武汉天澄环保科技股份有限公司 脉冲阀性能检测装置及方法
JP2009204045A (ja) * 2008-02-27 2009-09-10 Fujikin Inc 圧電素子駆動式ダイヤフラム型制御弁
CN106404366A (zh) * 2016-08-31 2017-02-15 苏州协昌环保科技股份有限公司 电磁脉冲阀检测方法及检测系统
CN107421723A (zh) * 2016-12-13 2017-12-01 中国第汽车股份有限公司 可同时对多个电磁阀进行可靠性试验的装置及其检测方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07310841A (ja) * 1994-05-19 1995-11-28 Fujikin:Kk 流体の流量制御方法
CN1587951A (zh) * 2004-08-18 2005-03-02 武汉天澄环保科技股份有限公司 脉冲阀性能检测装置及方法
JP2009204045A (ja) * 2008-02-27 2009-09-10 Fujikin Inc 圧電素子駆動式ダイヤフラム型制御弁
CN106404366A (zh) * 2016-08-31 2017-02-15 苏州协昌环保科技股份有限公司 电磁脉冲阀检测方法及检测系统
CN107421723A (zh) * 2016-12-13 2017-12-01 中国第汽车股份有限公司 可同时对多个电磁阀进行可靠性试验的装置及其检测方法

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