WO2019223666A1 - 压力传感器和制备方法、压力感应方法以及显示装置 - Google Patents
压力传感器和制备方法、压力感应方法以及显示装置 Download PDFInfo
- Publication number
- WO2019223666A1 WO2019223666A1 PCT/CN2019/087699 CN2019087699W WO2019223666A1 WO 2019223666 A1 WO2019223666 A1 WO 2019223666A1 CN 2019087699 W CN2019087699 W CN 2019087699W WO 2019223666 A1 WO2019223666 A1 WO 2019223666A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- conductive
- pressure sensor
- pressure
- elastic
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 62
- 239000002184 metal Substances 0.000 claims description 62
- 239000002131 composite material Substances 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 39
- 239000011810 insulating material Substances 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000002042 Silver nanowire Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 8
- 230000008901 benefit Effects 0.000 abstract description 6
- 230000004044 response Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 abstract 3
- 230000009471 action Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
Definitions
- the present disclosure relates to the field of sensing technology, and in particular, to a pressure sensor and a manufacturing method, a pressure sensing method, and a display device.
- Pressure sensor is the most commonly used sensor in industrial practice, and it is widely used in various industrial self-control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production self-control, aerospace, military, petrochemical, oil wells, electricity, ships, machine tools , Pipelines and many other industries.
- the present disclosure proposes a pressure sensor.
- the pressure sensor includes: a first electrode; at least two support portions, the at least two support portions are disposed on a first surface of the first electrode; and an elastic composite electrode, the elastic composite electrode is disposed on the support portion A side away from the first electrode, two adjacent support portions of the at least two support portions, the elastic composite electrode, and the first electrode define a compressible space, and the at least two supports
- the portion is formed of an insulating material; a second electrode provided on a side of the elastic composite electrode away from the first electrode; and an organic light emitting layer provided on the first electrode and The second electrode is in contact with one of the first electrode and the second electrode.
- the elastic composite electrode includes: a conductive sublayer, which is disposed on a side of the support part away from the first electrode; a conductive elastic sublayer, which is provided On the side of the conductive sub-layer remote from the support portion, the conductive elastic sub-layer has a planar structure.
- the pressure sensor includes a substrate attached to a second surface directly opposite the first surface of the first electrode, wherein the conductive elastic sublayer is on the substrate
- the orthographic projection on top covers the orthographic projection of the compressible space on the substrate.
- the orthographic projection of the organic light-emitting layer on the substrate and the orthographic projection of the compressible space on the substrate have overlapping areas.
- the conductive sub-layer includes a plurality of conductive blocks separated by the compressible space and corresponding to the at least two support portions one-to-one.
- the orthographic projection of each conductive block on the substrate is located within the orthographic projection region of the corresponding support on the substrate.
- the conductive sublayer further includes: a first metal layer disposed above the at least two support portions, and a second metal layer disposed on the first metal The side of the layer remote from the support.
- the conductive elastic sublayer includes: an elastic layer laminated on the conductive sublayer and a third metal layer, and a conductive component is added to the elastic layer.
- the elastic layer includes at least one of a conductive rubber, an elastic polymer added with conductive particles, and the third metal layer includes silver nanowires.
- the organic light emitting layer includes a plurality of sub light emitting layers arranged in an array.
- the organic light emitting layer is disposed between the elastic composite electrode and the second electrode.
- the organic light emitting layer is disposed on a side of the first electrode facing the compressible space, and the organic light emitting layer includes a plurality of sub light emitting layers arranged in an array.
- Another embodiment of the present disclosure provides a display device including the pressure sensor according to any one of the foregoing embodiments.
- the elastic composite electrode includes a conductive sub-layer and a conductive elastic sub-layer that are arranged in a stack.
- the conductive elastic sub-layer is a planar structure. The method includes: forming the conductive sublayer on a side of the at least two support portions remote from the first electrode; forming the conductive elastic sublayer on a substrate, and peeling the conductive elastic sublayer Printed on the conductive sublayer.
- the step of forming the conductive sublayer includes: preparing a first metal layer on a side of the at least two support portions remote from the first electrode, and providing a first metal layer on a side of the first metal layer remote from the support portion.
- Another embodiment of the present disclosure provides a method for pressure sensing by using the foregoing pressure sensor, including:
- the step of determining the pressure value of the pressure according to the light-emitting parameter includes: applying different pressures with known pressure values to the pressure sensor, and detecting all pressures at different pressures with known pressure values.
- the light-emitting parameters of the organic light-emitting layer and draw a standard pressure curve, the standard pressure curve represents the relationship between the light-emitting parameters and the pressure value of the pressure applied to the pressure sensor;
- the light-emitting parameter under pressure determines a pressure value of the unknown pressure based on the standard pressure curve.
- FIG. 1 is a schematic partial cross-sectional view of a pressure sensor according to an embodiment of the present disclosure
- FIG. 2 shows a schematic partial cross-sectional view of a pressure sensor according to an embodiment of the present disclosure
- FIG. 3 shows a schematic partial longitudinal cross-sectional view of a pressure sensor according to another embodiment of the present disclosure
- FIG. 4 shows a schematic partial longitudinal cross-sectional view of a pressure sensor according to another embodiment of the present disclosure
- FIG. 5 shows a schematic partial longitudinal sectional view of a pressure sensor according to another embodiment of the present disclosure
- FIG. 6 is a schematic partial cross-sectional view of a pressure sensor according to another embodiment of the present disclosure.
- FIG. 7 shows a schematic partial cross-sectional view of a pressure sensor according to another embodiment of the present disclosure.
- FIG. 8 is a schematic partial longitudinal cross-sectional view of a pressure sensor according to an embodiment of the present disclosure.
- FIG. 9 is a schematic partial cross-sectional view of a pressure sensor according to another embodiment of the present disclosure.
- FIG. 10 is a schematic flowchart of a pressure sensing method using a pressure sensor according to an embodiment of the present disclosure.
- FIG. 11 is a schematic flowchart of determining a pressure value of a pressure according to a light emission parameter according to another embodiment of the present disclosure.
- the embodiment of the present disclosure proposes a new pressure sensor, which combines the structure of an organic electroluminescent device with an elastic composite electrode, and can perform pressure detection based on the light emitting parameters of the light emitting layer in the organic electroluminescent device.
- the pressure sensor includes: a first electrode 200, at least two support portions 300, an elastic composite electrode 400, a second electrode 500, and an organic light emitting layer 600.
- the support portion 300 is provided on the first surface of the first electrode 200. Because there is a gap between the support portions 300, the support portion 300 covers a part of the surface of the first electrode 200, and the elastic composite electrode 400 is provided on the support portion 300.
- a side away from the first electrode 200, the elastic composite electrode 400, two adjacent support portions 300, and the first electrode 200 define a compressible space 10, and each support portion is formed of an insulating material.
- the second electrode 500 is disposed on a side of the elastic composite electrode 400 away from the first electrode 200, and the organic light emitting layer 600 is disposed between the first electrode 200 and the second electrode 500, and is between the first electrode 200 and the second electrode 500.
- One of the contacts For the example shown in FIG. 1, when the pressure sensor is not subjected to external pressure, the first electrode and the second electrode in the sensor are in an off state, and the organic light emitting layer 600 does not emit light.
- the elastic composite electrode comes into contact with the first electrode through the compressible space 10 under the pressure, so that the first electrode and the second electrode are in an electrically connected state. At this time, a voltage applied between the first electrode and the second electrode may cause the organic light emitting layer to emit light.
- the light emitting intensity or brightness of the organic light emitting layer is related to the pressure applied to the pressure sensor. Therefore, the value of the pressure change can be obtained by testing parameters related to the light emitting condition of the organic light emitting layer. Therefore, the pressure sensor has the advantages of low power consumption, fast response and high sensitivity.
- the organic light emitting layer 600 may have a continuous layer structure. Alternatively, the organic light emitting layer 600 may also include a plurality of sub-light emitting layers independent of each other.
- the support part 300 is disposed on the first surface of the first electrode 200 and covers a part of the first surface of the first electrode 200.
- the specific shape of the support portion is not particularly limited, and those skilled in the art can design according to specific conditions.
- the support portion 300 may be a strip structure and disposed on two opposite edges of the first electrode 200 to cover the first electrode 200. Partial surface. Therefore, a compressible space can be set up between the first electrode 200 and the elastic composite electrode 400 by using the support portion 300.
- the organic light emitting layer 600 is disposed between the first electrode 200 and the second electrode 500 and is in contact with one of the first electrode 200 and the second electrode 500.
- the specific position of the organic light-emitting layer is not particularly limited, as long as the above conditions are satisfied, those skilled in the art can design sensors with different structures according to specific conditions.
- the organic light emitting layer 600 may be disposed between the elastic composite electrode 400 and the second electrode 500 (as shown in the structure shown in FIG. 1). Thereby, a top pressure sensor can be configured.
- the organic light emitting layer 600 may be further disposed on a side of the first electrode 200 facing the compressible space 10 (as shown in the structure shown in FIG. 3).
- a bottom pressure sensor can be configured.
- the pressure sensor further includes a substrate, for example, as shown in FIG. 1 or FIG. 3, the substrate 100 is attached to a second surface directly opposite the first surface of the first electrode 200.
- the elastic composite electrode 400 includes a conductive sub-layer 410 and a conductive elastic sub-layer 420.
- the conductive sub-layer 410 is disposed on a side of the support portion 300 away from the first electrode 200 and is conductive.
- the elastic sub-layer 420 is disposed on a side of the conductive sub-layer 410 away from the support portion 300, and the conductive elastic sub-layer 420 has a planar structure.
- the conductive sublayer can enhance the conductivity of the elastic composite electrode.
- the conductive elastic sublayer has a certain degree of elasticity. This can enhance the degree of deformation of the pressure sensor and ensure that the pressure sensor can rebound to the uncompressed state after deformation State to ensure that the pressure sensor can be reused.
- the orthographic projection of the conductive elastic sublayer 420 on the substrate 100 covers the orthographic projection of the compressible space 10 on the substrate 100, so that the coverage area of the conductive elastic sublayer 420 includes the coverage of the compressible space 10 Area so that the compressible space 10 is fully utilized. Further, according to an embodiment of the present disclosure, the orthographic projection of the organic light emitting layer 600 on the substrate 100 and the orthographic projection of the compressible space 10 on the substrate 100 have overlapping regions.
- the orthographic projection of the conductive elastic sublayer 420 on the substrate and the orthographic projection of the organic light-emitting layer 600 on the substrate both cover the orthographic projection of the compressible space on the substrate, so that as long as the pressing Any position above the elastic composite electrode of the sensor corresponding to the compressible space can realize pressure sensing detection.
- the organic light emitting layer 600 is disposed between the second electrode 500 and the elastic composite electrode 400, and the orthographic projection of the organic light emitting layer 600 on the substrate 100 Covers the orthographic projection of the compressible space 10 on the substrate 100.
- the organic light emitting layer 600 is disposed on the side of the first electrode 200 facing the compressible space 10.
- the orthographic projection of the organic light emitting layer 600 on the substrate 100 may cover The orthographic projection of the compressed space 10 on the substrate 100. Therefore, the area above the compressible space can be used as a pressure sensing area, which is conducive to improving the effect of pressure sensing.
- the supporting portion 300 is made of an insulating material
- the conductive sublayer 410 includes a plurality of conductive blocks separated by a compressible space and corresponding to each supporting portion, that is, the number of the supporting portions 300 and the conductive The number of conductive blocks of the sub-layer 410 is equal.
- the orthographic projection of each conductive block of the conductive sub-layer 410 on the substrate is located within the orthographic projection region of the corresponding support portion 300 on the substrate 100. Therefore, the supporting portion can better support the conductive sublayer, and provide a larger compressible space for deformation of the elastic composite electrode.
- each support portion 300 covers a part of the surface of the first electrode 200, and the orthographic projection of the conductive sublayer 410 on the first electrode 200 also covers the first electrode.
- Part of the surface of 200, and each of the conductive blocks of the conductive sub-layer 410 and the support part 300 are arranged one-to-one correspondingly. Therefore, a larger compressible space can be provided for the deformation of the elastic composite electrode, and the sensitivity of the pressure sensor can be improved.
- a conductive sub-layer 410 is disposed on a side of the support portion 300 away from the first electrode 200, and the conductive sub-layer 410 is on the first electrode 200.
- the orthographic projection of the superposition coincides with the orthographic projection of the support part 300 on the first electrode 200, and each conductive block in the conductive sublayer 410 corresponds to the support part 300 one by one, and the conductive elastic sublayer 420 is disposed on the conductive sublayer 410 away from the support part
- the organic light emitting layer 600 is disposed on the side of the conductive elastic sublayer 420 away from the conductive sublayer 410
- the second electrode 500 is disposed on the side of the organic light emitting layer 600 away from the conductive elastic sublayer 420.
- the structure of the bottom pressure sensor is similar to the structure of the top pressure sensor, except that the organic light-emitting layer 600 is disposed on the side of the first electrode 200 facing the compressible space 10, and details are not described herein again.
- the organic light emitting layer 600 includes a plurality of sub light emitting layers 610 arranged in an array. Therefore, according to the light emission situation of the sub-light emitting layer, the pressure value of the pressure sensor is determined, and the pressure can be detected. These sub-light emitting layers 610 may be spaced apart from each other, and they are dispersedly disposed between the first electrode and the second electrode. When an organic light-emitting layer including a plurality of sub-light-emitting layers 610 arranged in an array is applied to the example of the bottom pressure sensor shown in FIG. 3, the magnitude of the external pressure may be determined based on the light-emitting area of the organic light-emitting layer 600.
- the pressure sensor may further include a structure such as a hole injection layer, an electron transport layer, and a carrier blocking layer.
- the hole injection layer May be formed from PEDOT: PSS.
- the specific composition and installation position of the above structure are not particularly limited, and those skilled in the art may select available materials to form the above structure according to the specific situation of the light emitting layer.
- the conductive sublayer 410 includes a first metal layer 411 and a second metal layer 412.
- the first metal layer 411 is disposed above the support portion 300, and the second metal layer 412 is disposed at the first The metal layer 411 is away from a side of the support portion 300.
- the first metal layer 411 may be formed of a metal having a conductive property and a small resistivity
- the second metal layer 412 may be formed of a metal that has good ductility and does not change significantly in resistivity when deformation occurs. That is, the second metal layer 412 only needs to meet the requirements of the pressure sensing electrode, and the first metal layer 411 is used as an epitaxial electrode.
- the first metal layer and the second metal layer can ensure that the conductive sublayer has good conductivity.
- the specific materials of the first metal layer and the second metal layer are not particularly limited, as long as the conductivity and the ductility are satisfied, those skilled in the art can design according to specific conditions.
- the first metal layer 411 may be composed of Cu, Al
- the second metal layer 412 may be composed of Ag.
- the conductive sublayer 420 includes an elastic layer 421 and a third metal layer 422 laminated on the conductive sublayer, and a conductive component is added to the elastic layer 421.
- a conductive component is added to the elastic layer 421.
- the specific positions of the elastic layer and the metal layer are not limited.
- the elastic layer 421 is disposed on a side of the second metal layer 412 away from the first metal layer 411, and the third metal layer 422 is disposed on the elastic layer.
- the layer 421 is away from a side of the second metal layer 412.
- the third metal layer 422 is disposed on a side of the second metal layer 412 away from the first metal layer 411, and the elastic layer 421 is disposed on a side of the third metal layer 422 away from the second metal layer 412. .
- the elastic layer 421 includes at least one of a conductive rubber and an elastic polymer to which conductive particles are added.
- the main material of the elastic layer 421 may include polystyrene (PS), polymethyl methacrylate (PMMA), and conductive rubber.
- the metal layer 422 includes silver nanowires. Thereby, the conductive elastic sublayer can be made to have good elasticity and electrical conductivity.
- a pressure sensor provided according to an embodiment of the present disclosure includes a first electrode, a second electrode, an organic light emitting layer, and an elastic composite electrode.
- the first electrode, the second electrode, and the organic light emitting layer may actually constitute a light emitting device.
- the first electrode and the second electrode of the light-emitting device are disconnected from each other without the external pressure, and the light-emitting device does not emit light.
- the first electrode and the second electrode are electrically connected through the elastic composite electrode, and at this time, the organic light-emitting layer in the light-emitting device emits light or at least a part of the sub-light-emitting layer emits light.
- the conductive elastic sublayer in the elastic composite electrode when the top pressure sensor is under pressure, the conductive elastic sublayer in the elastic composite electrode is deformed to squeeze the compressible space and contact the first electrode, and an external voltage may be applied via the first electrode and the second electrode. Between the organic light emitting layers, the organic light emitting layer is caused to emit light.
- the conductive elastic sublayer deforms and squeezes the compressible space to contact the organic light emitting layer, so that the first electrode and the second electrode can be electrically connected, and the organic light emitting layer emits light under the action of an external voltage.
- the organic light emitting layer 600 emits light in response to external pressure, and the intensity or brightness of light emission is positively related to the magnitude of the external pressure.
- the light emitting intensity or brightness of the organic light emitting layer is positively related to the external pressure.
- the organic light-emitting layer may emit light only in its local area under the effect of external pressure, and the area of the light-emitting area (or the number of light-emitting sub-light-emitting layers), and the intensity or brightness of the light-emitting area It is positively related to the external pressure. . Therefore, the change in pressure can be obtained by testing the light-emitting parameters (for example, light-emitting brightness, light-emitting area, current efficiency, etc.) of the light-emitting device.
- the light-emitting parameters for example, light-emitting brightness, light-emitting area, current efficiency, etc.
- a method for preparing a pressure sensor is proposed.
- the pressure sensor prepared by the method may be the pressure sensor described in the previous embodiment. That is, the pressure sensor obtained by this method can have all the features and advantages of the pressure sensor described above, which will not be repeated here.
- the preparation method of the pressure sensor shown in FIG. 1 may include the following steps:
- a first electrode is provided on the substrate, and then a support portion is provided on a side of the first electrode away from the substrate.
- the formation method of the first electrode is not particularly limited, and may be formed by, for example, a method including, but not limited to, sputtering metal.
- the support portion may be formed by coating a material that can be used for support on the first electrode, such as a plastic wall, and then using a patterning process to form the support portion as described above.
- an elastic composite electrode is prepared, an organic light emitting layer is formed on a side of the elastic composite electrode away from the first electrode, and a second electrode is provided on a side of the organic light emitting layer away from the elastic composite electrode.
- the formation of the organic light emitting layer and the second electrode are not particularly limited.
- a person skilled in the art can form the organic light emitting layer by any known method, and then form the second electrode on the organic light emitting layer.
- the method of forming the second electrode may be the same as or different from the method of forming the first electrode, as long as an electrode having a conductive property capable of meeting the requirements of the organic light emitting device can be formed without affecting the function of the organic light emitting layer.
- the preparation process of the elastic composite electrode may be as follows: first, a first metal layer is prepared on a side of the support portion away from the first electrode, and then a second A metal layer to form a conductive sublayer. Subsequently, an elastic layer added with a conductive component is attached to the substrate, and a third metal layer is coated on a side of the elastic layer away from the substrate, and dried to form a conductive elastic sublayer. Finally, the elastic layer and the third metal layer are peeled off and transferred to the second metal layer. Thereby, the conductive elastic sublayer can be simply transferred onto the conductive sublayer (including the first metal layer and the second metal layer), and the pressure sensor can be easily obtained.
- a display device in another aspect of the present disclosure, includes the pressure sensor described in any one of the foregoing embodiments. Therefore, the display device has all the features and advantages of the pressure sensor described in the foregoing. More details.
- the present disclosure proposes a method of pressure sensing. According to an embodiment of the present disclosure, the method uses the pressure sensor described above for pressure sensing. Referring to FIG. 10, the method includes:
- S100 Apply an electrical signal to the first electrode and the second electrode to form a voltage difference between the first electrode and the second electrode.
- the light emission parameter includes at least one of brightness, light emission area, and current efficiency of the organic light emitting layer.
- the brightness when the organic light emitting layer emits light is positively related to the pressure received by the pressure sensor, so the relationship between the light emitting brightness of the organic light emitting layer and the external pressure can be established.
- the light emitting brightness of the organic light emitting layer can be detected, and the magnitude of the unknown external pressure can be obtained based on the relationship between the light emitting brightness of the organic light emitting layer and the external pressure.
- the number of light-emitting sub-light-emitting layers is positively related to the magnitude of the applied pressure, so The amount of external pressure applied is determined according to the number of light-emitting sub-light-emitting layers (ie, light-emitting areas) in the organic light-emitting layer.
- another parameter may be used to indirectly characterize the light-emitting area, that is, the ratio of the number of light-emitting sub-light-emitting layers to the total number of sub-light-emitting layers.
- the organic light-emitting layer includes a plurality of sub-light-emitting layers arranged in an array.
- the number of light-emitting sub-light-emitting layers is different. The greater the pressure, the light-emitting sub-light-emitting The more layers. Therefore, the pressure received by the pressure sensor is proportional to the number of light emitting sub-light emitting layers.
- the working parameters of a single light-emitting layer of a plurality of sub-light-emitting layers in an array of the light-emitting layer of the sensor can be obtained.
- the working parameters here can include current density, current efficiency, light-emitting efficiency, etc.
- the pressure sensor shown in FIG. 1 uses the pressure sensor shown in FIG. 1 as an example to briefly explain the principle of determining the pressure value according to the light emission parameter.
- the first electrode and the second electrode are insulated by a support portion and a compressible space.
- an elastic composite electrode occurs. The deformation contacts the first electrode, thereby electrically connecting the first electrode and the second electrode, and the organic light emitting layer emits light under the action of a voltage between the first electrode and the second electrode. It can be understood that the different degree of contact between the elastic composite electrode and the first electrode results in different resistance values between the first electrode and the second electrode.
- determining the pressure value of the pressure according to the light emission parameter may include the following steps:
- S10 Apply different pressures with known pressure values to the pressure sensor, and detect the light-emitting parameters of the organic light-emitting layer under different pressures with the known pressure values, and draw a standard pressure curve, where the standard pressure curve represents the The relationship between the light emission parameter and the pressure value of the pressure applied to the pressure sensor.
- the standard pressure curve here may be a relationship curve between brightness and pressure value, a relationship curve between light-emitting area and pressure value, a relationship curve between current efficiency and pressure value, and the like.
- S20 Obtain the light-emitting parameters of the organic light-emitting layer under the action of unknown pressure, and determine the pressure value of the unknown pressure based on the standard pressure curve
- the relevant luminous parameters can be obtained by measuring with the instrument (or through further calculations).
- the luminous parameters correspond to the previously obtained standard pressure curve, and it can be easily obtained under the luminous efficiency. The value of the pressure.
- the description with reference to the terms “one embodiment”, “another embodiment”, etc. means that a specific feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the present disclosure. .
- the schematic expressions of the above terms are not necessarily directed to the same embodiment or example.
- the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
- those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples without conflicting one another.
- the terms “first” and “second” are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Human Computer Interaction (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (17)
- 一种压力传感器,包括:第一电极;至少两个支撑部,所述至少两个支撑部设置在所述第一电极的第一表面上;弹性复合电极,所述弹性复合电极设置在所述支撑部远离所述第一电极的一侧,所述至少两个支撑部中相邻的两个支撑部、所述弹性复合电极、以及所述第一电极限定出可压缩空间,所述至少两个支撑部由绝缘材料形成;第二电极,所述第二电极设置在所述弹性复合电极远离所述第一电极的一侧;以及有机发光层,所述有机发光层设置在所述第一电极以及所述第二电极之间,并与所述第一电极以及所述第二电极之中的一个接触。
- 根据权利要求1所述的压力传感器,其中所述弹性复合电极包括:导电亚层,所述导电亚层设置在所述支撑部远离所述第一电极的一侧;导电弹性亚层,所述导电弹性亚层设置在所述导电亚层远离所述支撑部的一侧,所述导电弹性亚层为面状结构。
- 根据权利要求2所述的压力传感器,其中所述压力传感器包括衬底,所述衬底附接至与所述第一电极的第一表面正对的第二表面,其中所述导电弹性亚层在所述衬底上的正投影覆盖所述可压缩空间在所述衬底上的正投影。
- 根据权利要求3所述的压力传感器,其中所述有机发光层在所述衬底上的正投影与所述可压缩空间在所述衬底上的正投影具有交叠区域。
- 根据权利要求3所述的压力传感器,其中所述导电亚层包括由所述可压缩空间分隔的、与所述至少两个支撑部一一对应的多个导电块。
- 根据权利要求5所述的压力传感器,其中每个导电块在所述衬底上的正投影位于相应的支撑部在所述衬底上的正投影区域之内。
- 根据权利要求2-6任一项所述的压力传感器,其中所述导电亚层进一步包括:设置在所述至少两个支撑部上方的第一金属层,以及;第二金属层,所述第二金属层设置在所述第一金属层远离所述支撑部的一侧。
- 根据权利要求2所述的压力传感器,其中所述导电弹性亚层包括:层叠在所述导电亚层上的弹性层以及第三金属层,所述弹性层中添加有导电组分。
- 根据权利要求8所述的压力传感器,其中所述弹性层包括导电橡胶、添加有导电粒子的弹性聚合物的至少之一;所述第三金属层包括银纳米线。
- 根据权利要求1所述的压力传感器,其中所述有机发光层包括阵列排布的多个子发光层。
- 根据权利要求1所述的压力传感器,其中所述有机发光层设置在所述弹性复合电极以及所述第二电极之间。
- 根据权利要求1所述的压力传感器,其中所述有机发光层设置在所述第一电极朝向所述可压缩空间的一侧,所述有机发光层包括阵列排布的多个子发光层。
- 一种显示装置,包括权利要求1-12任一项所述的压力传感器。
- 一种制备权利要求1-12任一项所述的压力传感器的方法,其中所述弹性复合电极包括层叠设置的导电亚层以及导电弹性亚层,所述导电弹性亚层为面状结构,所述方法包括:在所述至少两个支撑部远离所述第一电极的一侧形成所述导电亚层;在基板上形成所述导电弹性亚层,并将所述导电弹性亚层剥离转印至所述导电亚层上。
- 根据权利要求14所述的方法,其中形成所述导电亚层的步骤包括:在所述至少两个支撑部远离第一电极的一侧制备第一金属层,在第一金属层远离支撑部的一侧设置第二金属层,其中形成所述导电弹性亚层的步骤包括:将添加有导电组分的弹性层贴附于所述基板上,并在所述弹性层远离所述基板的一侧涂覆第三金属层并进行干燥,以 及将所述弹性层以及第三金属层剥离转印至所述第二金属层上。
- 一种利用权利要求1-12任一项所述的压力传感器进行压力感应的方法,包括:向所述第一电极以及所述第二电极施加电信号以在第一电极和第二电极之间产生电压差;检测所述有机发光层在受到压力情况下的发光参数,发光参数包括有机发光层的亮度、发光面积、以及电流效率中的至少一个;以及根据所述发光参数确定所述压力的压力值。
- 根据权利要求16所述的方法,其中根据所述发光参数确定所述压力的压力值的步骤包括:向所述压力传感器施加压力值已知的不同压力,并检测在所述压力值已知的不同压力下所述有机发光层的发光参数,并绘制标准压力曲线,所述标准压力曲线表示所述发光参数与向所述压力传感器施加的压力的压力值之间的关系;获得所述有机发光层在受到未知压力作用下的发光参数,基于所述标准压力曲线确定所述未知压力的压力值。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/649,502 US11698316B2 (en) | 2018-05-22 | 2019-05-21 | Pressure sensor, manufacturing method thereof, pressure sensing method and display device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810494408.7A CN108760111B (zh) | 2018-05-22 | 2018-05-22 | 压力传感器和制备方法、压力感应方法以及显示装置 |
CN201810494408.7 | 2018-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2019223666A1 true WO2019223666A1 (zh) | 2019-11-28 |
Family
ID=64007792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2019/087699 WO2019223666A1 (zh) | 2018-05-22 | 2019-05-21 | 压力传感器和制备方法、压力感应方法以及显示装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11698316B2 (zh) |
CN (1) | CN108760111B (zh) |
WO (1) | WO2019223666A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108760111B (zh) | 2018-05-22 | 2020-02-21 | 京东方科技集团股份有限公司 | 压力传感器和制备方法、压力感应方法以及显示装置 |
TWI803704B (zh) * | 2018-12-13 | 2023-06-01 | 新加坡商雷蛇(亞太)私人有限公司 | 類比輸入裝置、計算系統及用於接收和處理類比輸入的方法 |
CN112568878A (zh) * | 2020-12-09 | 2021-03-30 | 魏培企 | 基于视觉的压力传感器、设备及应用方法 |
CN115863242B (zh) * | 2023-03-02 | 2023-05-09 | 惠科股份有限公司 | 暂态基板和发光芯片的转移方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110080368A1 (en) * | 2009-10-01 | 2011-04-07 | Samsung Electro-Mechanics Co., Ltd. | Input device of touch screen and method of manufacturing the same |
CN104679359A (zh) * | 2013-11-29 | 2015-06-03 | 天津富纳源创科技有限公司 | 触控装置 |
CN106020540A (zh) * | 2016-05-18 | 2016-10-12 | 麦克思商务咨询(深圳)有限公司 | 触控模组、触控压力感测方法及电子装置 |
CN106129098A (zh) * | 2016-08-31 | 2016-11-16 | 上海天马微电子有限公司 | 有机发光显示面板及包含其的显示装置 |
CN107290084A (zh) * | 2017-06-28 | 2017-10-24 | 京东方科技集团股份有限公司 | 一种压力传感器及其制作方法、电子器件 |
CN108760111A (zh) * | 2018-05-22 | 2018-11-06 | 京东方科技集团股份有限公司 | 压力传感器和制备方法、压力感应方法以及显示装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0641890B2 (ja) * | 1986-01-22 | 1994-06-01 | 三ツ星ベルト株式会社 | 応力分布検出センサ− |
US4914416A (en) * | 1988-09-01 | 1990-04-03 | Takahiro Kunikane | Pressure sensing electric conductor and its manufacturing method |
WO2003023745A1 (fr) * | 2001-09-07 | 2003-03-20 | Matsushita Electric Industrial Co., Ltd. | Appareil d'affichage et son procede de fabrication |
FR2892594B1 (fr) * | 2005-10-21 | 2007-12-07 | Saint Gobain | Structure lumineuse comportant au moins une diode electroluminescente, sa fabrication et ses applications |
JP5116004B2 (ja) | 2006-08-03 | 2013-01-09 | 日東電工株式会社 | 透明導電性積層体及びそれを備えたタッチパネル |
US8739390B2 (en) * | 2008-12-16 | 2014-06-03 | Massachusetts Institute Of Technology | Method for microcontact printing of MEMS |
CN102769109B (zh) * | 2012-07-05 | 2015-05-13 | 青岛海信电器股份有限公司 | 柔性显示器的制作方法以及制作柔性显示器的基板 |
CN103713761A (zh) * | 2012-10-09 | 2014-04-09 | 联胜(中国)科技有限公司 | 触控板以及触控显示装置 |
US20150062065A1 (en) * | 2013-08-30 | 2015-03-05 | Tianjin Funayuanchuang Technology Co.,Ltd. | Touch sensitive device |
EP2889596B1 (en) * | 2013-12-24 | 2020-07-22 | Honeywell Romania S.R.L. | Dynamic strain sensor and method |
KR20160145236A (ko) * | 2015-06-09 | 2016-12-20 | (주)이미지스테크놀로지 | 오엘이디 기반의 디스플레이 패널을 사용하는 장치에서의 압력 감지 터치 시스템 |
CN204808275U (zh) * | 2015-06-10 | 2015-11-25 | 宸鸿科技(厦门)有限公司 | 压力感测装置 |
DE102015113694B4 (de) * | 2015-08-19 | 2021-09-09 | Preh Gmbh | Kapazitives Bedienelement mit verbesserter Störunanfälligkeit |
CN205038626U (zh) * | 2015-10-26 | 2016-02-17 | 京东方科技集团股份有限公司 | 一种内嵌式触摸屏及显示装置 |
CN105675178A (zh) * | 2015-12-31 | 2016-06-15 | 联想(北京)有限公司 | 一种具有压力检测功能的电子设备以及压力检测方法 |
CN206249279U (zh) * | 2016-08-30 | 2017-06-13 | 上海天马微电子有限公司 | 阵列基板、柔性显示面板及显示装置 |
CN107421681B (zh) * | 2017-07-31 | 2019-10-01 | 京东方科技集团股份有限公司 | 一种压力传感器及其制作方法 |
CN107394052B (zh) * | 2017-08-31 | 2024-01-09 | 京东方科技集团股份有限公司 | 一种有机发光二极管器件及其制备方法、显示装置 |
CN112414595A (zh) * | 2020-09-25 | 2021-02-26 | 河北大学 | 基于摩擦电致发光的自供电可视化柔性压力传感器 |
-
2018
- 2018-05-22 CN CN201810494408.7A patent/CN108760111B/zh active Active
-
2019
- 2019-05-21 US US16/649,502 patent/US11698316B2/en active Active
- 2019-05-21 WO PCT/CN2019/087699 patent/WO2019223666A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110080368A1 (en) * | 2009-10-01 | 2011-04-07 | Samsung Electro-Mechanics Co., Ltd. | Input device of touch screen and method of manufacturing the same |
CN104679359A (zh) * | 2013-11-29 | 2015-06-03 | 天津富纳源创科技有限公司 | 触控装置 |
CN106020540A (zh) * | 2016-05-18 | 2016-10-12 | 麦克思商务咨询(深圳)有限公司 | 触控模组、触控压力感测方法及电子装置 |
CN106129098A (zh) * | 2016-08-31 | 2016-11-16 | 上海天马微电子有限公司 | 有机发光显示面板及包含其的显示装置 |
CN107290084A (zh) * | 2017-06-28 | 2017-10-24 | 京东方科技集团股份有限公司 | 一种压力传感器及其制作方法、电子器件 |
CN108760111A (zh) * | 2018-05-22 | 2018-11-06 | 京东方科技集团股份有限公司 | 压力传感器和制备方法、压力感应方法以及显示装置 |
Also Published As
Publication number | Publication date |
---|---|
CN108760111B (zh) | 2020-02-21 |
CN108760111A (zh) | 2018-11-06 |
US11698316B2 (en) | 2023-07-11 |
US20200309629A1 (en) | 2020-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2019223666A1 (zh) | 压力传感器和制备方法、压力感应方法以及显示装置 | |
CN107290084B (zh) | 一种压力传感器及其制作方法、电子器件 | |
CN104535227B (zh) | 压入式介电高弹体压力传感器 | |
CN110416269B (zh) | 一种显示面板和显示面板的制作方法 | |
CN104868778B (zh) | 一种自驱动瞬态应力传感装置 | |
TW200501827A (en) | Light-emitting devices with fullerene layer | |
TW200725880A (en) | Semiconductor piezoresistive sensor and operation method thereof | |
CN111952323B (zh) | 一种显示基板的制备方法、显示基板及显示装置 | |
JP2007511046A5 (zh) | ||
JP2006511916A5 (zh) | ||
US11462719B2 (en) | Organic light emitting transistor, temperature sensing device and temperature detecting method | |
WO2007089599A3 (en) | Led illumination assembly with compliant foil construction | |
JP2004127933A5 (zh) | ||
CN206293441U (zh) | 有机电致发光显示面板和显示装置 | |
WO2006108272A3 (en) | Metal/fullerene anode structure and application of same | |
CN109599426B (zh) | 显示面板和显示装置 | |
WO2005045947A3 (en) | Segmented organic light emitting device | |
TW200644311A (en) | Organic electroluminescent device | |
KR20150052609A (ko) | 누액 감지 센서 및 그 제조 방법 | |
Yu et al. | Soft human–machine interface sensing displays: materials and devices | |
US8551310B2 (en) | Method for making a nano-composite gas sensor | |
WO1997016834A1 (en) | Piezoluminescent sensor sheet with a piezoresistive layer | |
CN108663142A (zh) | 压力传感器等电压接线法及压力传感器 | |
TWI646377B (zh) | 顯示裝置及其製造方法 | |
TWI223463B (en) | Organic electro-luminescent display, its production method and organic electro-luminescent active matrix-display |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 19807922 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 19807922 Country of ref document: EP Kind code of ref document: A1 |
|
32PN | Ep: public notification in the ep bulletin as address of the adressee cannot be established |
Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 28/01/2021) |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 19807922 Country of ref document: EP Kind code of ref document: A1 |