WO2019208549A1 - Sliding member and manufacturing method thereof and power steering device and manufacturing method thereof - Google Patents

Sliding member and manufacturing method thereof and power steering device and manufacturing method thereof Download PDF

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Publication number
WO2019208549A1
WO2019208549A1 PCT/JP2019/017164 JP2019017164W WO2019208549A1 WO 2019208549 A1 WO2019208549 A1 WO 2019208549A1 JP 2019017164 W JP2019017164 W JP 2019017164W WO 2019208549 A1 WO2019208549 A1 WO 2019208549A1
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WIPO (PCT)
Prior art keywords
carbon
base material
metal
carbide
power steering
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PCT/JP2019/017164
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French (fr)
Japanese (ja)
Inventor
波東 久光
小室 又洋
佐通 祐一
高太郎 椎野
幸二 沼倉
信太郎 辻見
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日立オートモティブシステムズ株式会社
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Publication of WO2019208549A1 publication Critical patent/WO2019208549A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B62LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62DMOTOR VEHICLES; TRAILERS
    • B62D5/00Power-assisted or power-driven steering
    • B62D5/04Power-assisted or power-driven steering electrical, e.g. using an electric servo-motor connected to, or forming part of, the steering gear
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/28Solid state diffusion of only metal elements or silicon into metallic material surfaces using solids, e.g. powders, pastes
    • C23C10/30Solid state diffusion of only metal elements or silicon into metallic material surfaces using solids, e.g. powders, pastes using a layer of powder or paste on the surface
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • C23C8/22Carburising of ferrous surfaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/12Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/14Special methods of manufacture; Running-in
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H25/22Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H25/00Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20Screw mechanisms
    • F16H25/24Elements essential to such mechanisms, e.g. screws, nuts

Definitions

  • the present invention relates to a sliding member, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
  • Patent Document 1 in a steel sliding member, a large number of hard particles having a hardness equal to or higher than the surface hardness of the hardened layer are scattered in a crystalline state on the surface layer portion of the hardened layer obtained by heat treatment.
  • Proposed sliding members have been proposed. These hard particles are oxides, carbides or nitrides of any of the elements Cr, V, Ti and Nb originally contained in the sliding member.
  • the thickness of the hardened layer particles included in the martemper treatment is 20 to 30 ⁇ m. It is shown to form to the extent.
  • a large number of hard particles exposed on the surface of the hardened layer exert a so-called “anchor effect” and try to stay there, so that the surface of the hardened layer around the hard particles is moved by the sliding of the sliding member. It is said that it is possible to effectively prevent plastic flow, reduce adhesive wear on the surface of the sliding member, and improve wear resistance.
  • sliding members such as bearings, ball screws, chains, cams, gears, and splines are composed of a combination of two or more parts facing each other, only the parts that are easily damaged (hereinafter referred to as reinforced parts) are surfaces. Even if a strengthening process is performed to harden, depending on the hardness of the opposing parts (hereinafter referred to as relative parts), there is a possibility that the reinforcing parts may attack and damage the relative parts. For this reason, when there is a possibility that the relative part may be damaged, it is necessary to perform a strengthening process so that the relative part also has a life equivalent to that of the strengthened part.
  • an object of the present invention is to provide a sliding member with enhanced hardness while suppressing a decrease in durability, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
  • a first aspect of the present invention that solves the above problems includes a steel base material, granular iron carbide contained in the base material, a metal carbide contained in the base material and containing metal and carbon as constituent elements, and The volume fraction of iron carbide and metal carbide decreases along the depth direction from the surface to the inside of the substrate, and the metal is a group consisting of Ti, V, Nb, Ta, Zr, W, Hf and Mo It is a sliding member characterized by being one or more types selected from.
  • a nut having a female thread groove formed on an inner peripheral surface, a rack screw disposed on an axial center of the nut and having a male screw groove opposed to the female screw groove, and a female screw.
  • a ball screw mechanism having a plurality of circulating balls interposed between the groove and the male screw groove; a steering gear case that houses the ball screw mechanism; an electric motor that is used to drive the ball screw mechanism; And a power transmission mechanism for transmitting the rotational driving force of the motor to the nut, wherein the rack screw or the circulating ball is the sliding member of the present invention.
  • a metal infiltration step in which one or more kinds of metals selected from the group consisting of Ti, V, Nb, Ta, Zr, W, Hf, and Mo are infiltrated into a steel substrate;
  • a carbon permeation step for permeating carbon into the base material, and the carbon permeation step is a method for producing a sliding member characterized in that the base material is permeated with carbon at a concentration that causes hypereutectoid.
  • a nut having a female screw groove formed on the inner peripheral surface, a rack screw disposed on the axial center of the nut and having a male screw groove opposed to the female screw groove on the outer peripheral surface, and a female screw.
  • a ball screw mechanism having a plurality of circulating balls interposed between the groove and the male screw groove; a steering gear case that houses the ball screw mechanism; an electric motor that is used to drive the ball screw mechanism;
  • a method of manufacturing a power steering apparatus having a power transmission mechanism that transmits a rotational driving force of a motor to a nut, a rack screw or a circulating ball is constituted by the sliding member of the present invention, and the sliding member is of the present invention. It is a manufacturing method of a power steering device characterized by being manufactured by a manufacturing method of a sliding member.
  • a sliding member with enhanced hardness while suppressing a decrease in durability, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
  • FIG. 6A Schematic diagram of the test piece of Comparative Example 2 SEM observation photograph of Fig. 7A Mapping by EPMA in Fig. 7B Schematic diagram of test piece of Comparative Example 3 Observation photograph of the tissue in Fig. 8A
  • the graph which shows the result of the thrust fatigue test of Example 4, 7-10 and the comparative example 1 The graph which shows the relationship between the hardness difference of the test piece 5 of Example 4, 7-10, and the ball 6, and a life ratio.
  • Cross-sectional schematic diagram of an electric power steering device Enlarged view of the ball screw mechanism of FIG.
  • FIG. 1 is a schematic diagram of a sliding member according to the first embodiment.
  • the sliding member 10 a has a steel base 4 and a metal carbide 1 and an iron carbide 2 contained in the base 4.
  • the metal carbide 1 is scattered inside the base material 4, and the iron carbide 2 is scattered inside the base material 4 in the form of particles.
  • the volume ratios of the metal carbide 1 and the iron carbide 2 are reduced along the depth direction from the surface (surface on the gas phase side) 40 of the substrate 4 to the inside.
  • the base material 4 is made of steel.
  • a portion also referred to as a hard layer, a surface reinforcing layer, etc.
  • the metal carbide 1 and the iron carbide 2 of the substrate 4 are present has a martensite layer 3 having a martensite structure.
  • the metal carbide (hard particles) 1 contains metal and carbon (C) as constituent elements, and the metals are titanium (Ti), vanadium (V), niobium (Nb), tantalum (Ta), zirconium ( One or more selected from the group consisting of Zr), tungsten (W), hafnium (Hf), and molybdenum (Mo), and in this embodiment, vanadium.
  • the metal carbide is preferably a one-to-one bond between metal and carbon. Such metal carbide has a particularly high hardness.
  • FIG. 2A is an observation photograph of a cross section of Example 1.
  • FIG. 2B shows the SEM (Scanning Electron Microscope) observation photograph in the vicinity of the surface corresponding to the A portion (part near the surface) in FIG. 2A and the result of elemental analysis by EPMA (Electron Probe Micro Analyzer).
  • FIG. 2C is a SEM observation photograph of a portion corresponding to portion B in FIG. 2A (portion deep by 500 ⁇ m from the surface) and the result of elemental analysis by EPMA.
  • FIG. 2B vanadium carbide (VC) 50 formed by combining vanadium 50 and carbon as metal elements and iron carbide 2 formed by combining iron and carbon are present in the martensite layer 3 in the vicinity of the surface of the substrate. It can be seen that it is scattered in granular form. Such granular iron carbide can inhibit the growth of martensite and suppress the coarsening of the martensite layer 3. On the other hand, in the case of acicular iron carbide, it is difficult to suppress the coarsening of the martensite layer 3.
  • FIG. 2C shows that vanadium carbide 50 and iron carbide 2 are scattered in the martensite layer 3 at a depth of about 500 ⁇ m from the surface. Moreover, from FIG. 2B and FIG.
  • the volume ratio of the vanadium carbide 50 and the iron carbide 2 is decreasing along the depth direction from the surface 40 of the base material 4 to the inside. That is, it can be seen that the concentrations of vanadium carbide 50 and iron carbide 2 in the substrate 4 decrease from the surface of the substrate 4 to the inside.
  • the hardness difference of the parts constituting the sliding member is suppressed to a certain value or less, the thickness of the hardened layer is sufficiently deeper than the depth at which the maximum shear stress derived from Hertz's contact theory occurs, and A sliding member having a hardened layer sufficiently exceeding the grinding allowance can be obtained.
  • the sliding member can be used for, for example, a rack screw, a ball and a nut of a power steering device which will be described later. Since the rack screw and the ball, and the ball and the nut are in contact with each other with a force applied thereto, if the difference in hardness between the two members in contact is large, one of the members may damage the other member. In other words, the maximum Hertz stress derived from Hertz's contact theory generated by receiving a load is the largest for the rack screw and ball and the nut is smaller than that due to the geometry of the ball screw. For this reason, when the surface treatment which makes a rack screw a reinforcement
  • the sliding member 10a of this example includes a martensite layer (Vickers hardness: 500 Hv to 800 Hv) serving as a base material of a hard layer, and a metal carbide 1 (Vickers hardness: about 2500 Hv) dispersed in the martensite layer.
  • a martensite layer Vickers hardness: 500 Hv to 800 Hv
  • a metal carbide 1 Vickers hardness: about 2500 Hv
  • iron carbide 2 (Vickers hardness: about 1200 Hv) dispersed in the martensite layer, adjusting the content of metal carbide 1 and iron carbide 2 and the content ratio of metal carbide 1 and iron carbide 2
  • the hardness of the hard layer can be adjusted.
  • the metal element 1 and the carbon infiltration conditions are controlled by adjusting the metal element infiltration conditions and the carbon infiltration conditions.
  • the content of iron carbide 2 can be adjusted.
  • the anchor effect is reduced because the distance between the metal carbides increases.
  • the anchor effect is an effect of suppressing the growth and coarsening by causing the granular particles to act as anchors when the steel structure grows. By suppressing the coarsening of the tissue, it is possible to prevent a portion having a weak strength from being partially generated.
  • iron carbide 2 having intermediate hardness between metal carbide 1 and martensite layer 3 of base material 4 while suppressing deterioration in durability due to reduction in anchor effect. The hardness can be adjusted.
  • the iron carbide needs to be present in a granular form.
  • pearlite and cementite which are layered and needle-like structures that may be originally included in steel materials, are insufficient.
  • the diameter of the granular iron carbide is, for example, 0.5 ⁇ m or more and 5 ⁇ m or less (1 ⁇ m or more and 5 ⁇ m or less if the grain boundary of the steel structure, 0.5 ⁇ m or more and 1 ⁇ m or less if it is within the grain), and the aspect ratio is 1 or more and 5 or less. It is as follows.
  • FIG. 21 is an iron-carbon equilibrium diagram. As shown in FIG. 21, granular iron carbide is obtained by carburizing from the austenite state of hypereutectoid or higher, cooling to Acm line or lower, precipitating carbon that cannot be completely dissolved, and fixing by a quenching process. Can be provided.
  • a method of lowering to a point (for example, (1) in FIG. 21) higher than the A1 transformation point (about 727 ° C.) for example, (1) in FIG.
  • the metal elements Ti, Nb, V, Zr, and W are more preferable because they constitute the metal carbide 1 having high hardness.
  • the hardness difference of the hard layer of the sliding member is preferably about 200 Hv or less in terms of Vickers hardness.
  • FIG. 20 is a flowchart showing an example of the manufacturing method of the sliding member of the present invention.
  • the manufacturing method of the sliding member of the present invention includes a step (S1) of applying a slurry containing metal to a base material, and a step (permeation) of the metal to the base material by heat treatment ( S3), a step of introducing a gas containing carbon (S3), and a step of heat-treating the base material with carbon (S4).
  • S1 of applying a slurry containing metal to a base material
  • S3 a step (permeation) of the metal to the base material by heat treatment
  • S3 a step of introducing a gas containing carbon
  • S4 heat-treating the base material with carbon
  • the material constituting the base material 4 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C.
  • a round bar sample having an outer diameter of 10 mm and a length of 50 mm was used as the substrate 4.
  • vanadium powder having an average particle diameter of 50 ⁇ m and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry.
  • An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample.
  • the outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 ⁇ m.
  • the temperature is 1300 ° C. and the holding time is 5 minutes.
  • carburizing gas was flowed to diffuse about 500 ⁇ m of carbon on the outer surface of the S45C round bar sample.
  • the temperature was 1200 ° C.
  • the holding time was 5 minutes
  • acetylene was used as the carburizing gas.
  • the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. The toughness can be improved by tempering. This S45C round bar sample was cut and polished to prepare the observation sample described above.
  • the vanadium is heated at a temperature of 1300 ° C., a holding time of 5 minutes, and carbon. , 1200 ° C., holding time: 5 minutes, and then the temperature is lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram (eg, about 727 ° C.), for example, 600 ° C. It is more preferable to reheat and quench.
  • the Vickers hardness of the cross section at a position about 50 ⁇ m deep from the surface was 850 Hv to 950 Hv.
  • vanadium was used as the metal element.
  • 1 selected from the group consisting of titanium, niobium, tantalum zirconium, tungsten, hafnium, and molybdenum constituting a high-hardness metal carbide. More than one kind of metal element may be used.
  • Example 2 3A is a schematic diagram illustrating an example of the sliding member of Example 2, and FIG. 3B is a laser microscope observation photograph of the dotted line portion of FIG. 3A.
  • the sliding member 10b shown in Example 2 has the metal carbide 1 and the iron carbide 2 scattered in the martensite layer 3 of the base material 4 similarly to Example 1, and the metal carbide 1 and the iron carbide 2 The volume ratio decreases along the depth direction from the surface 40 of the substrate 4 to the inside. Further, the iron carbide 2 exists in a portion deeper than the metal carbide 1 (a portion surrounded by a dotted line in FIG. 3A) inside the base material 4. In the sliding member 10b, the hard layer extends from the surface to the layer where the iron carbide 2 exists.
  • FIG. 3B shows a state where the iron carbide 2 has penetrated to the inside of the base material more than the metal carbide 1.
  • FIG. 3B is a laser micrograph obtained by etching the dotted line portion of the base material 4 of FIG. 3A with sodium picrate soda that the iron carbide 2 is easily etched. As shown in FIG. 3B, it can be seen that iron carbides 2 etched in black are scattered in the martensite layer 3.
  • the metal element has a shorter penetration distance into the substrate than carbon, it is not practically practical to make the hard layer containing metal carbide particles and iron carbide particles generated by the metal element penetration sufficiently thick There is. Therefore, the hard layer containing both metal carbide particles and iron carbide particles is suppressed to the minimum necessary thickness, and iron carbide particles composed of iron element and carbon bonded in martensite are dispersed inside the hard layer. It is industrially realistic to provide the hardened layer. In other words, metal carbide that takes a long time to penetrate is retained near the surface, and iron carbide that is easy to penetrate penetrates deep into the interior to achieve the desired strength, thereby allowing the metal carbide particles and iron carbide particles to penetrate to the same depth. Manufacturing time can be shortened.
  • the hardened layer containing metal carbide particles and iron carbide is sufficiently deeper than the depth at which the maximum shear stress derived from Hertz's contact theory is generated, and has a surface enhancement layer thickness sufficiently exceeding the grinding allowance, A thickness obtained by adding about 2 times or more of the depth at which the maximum shearing stress derived from the grinding allowance and Hertz's contact theory occurs is preferable.
  • the material which comprises the base material 4 is the steel material S45C for mechanical structures prescribed
  • vanadium powder having an average particle diameter of 50 ⁇ m and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry.
  • An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample.
  • the outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 ⁇ m. In this example, the temperature is 1300 ° C. and the holding time is 5 minutes. Then, carburizing gas was flowed, and carbon C was diffused by about 1000 ⁇ m on the outer surface of the S45C round bar sample.
  • the temperature was 1200 ° C.
  • the holding time was 20 minutes
  • acetylene was used as the carburizing gas.
  • the carbon penetration time was increased from 5 minutes to 20 minutes. This is a treatment for allowing the iron carbide 2 to penetrate deeper than the metal carbide 1.
  • the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. This S45C round bar sample was cut and polished to prepare the observation sample described above.
  • vanadium is heated at a temperature of 1300 ° C., a holding time of 5 minutes, Temperature: 1200 ° C., holding time: 20 minutes After soaking, the temperature is lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram (about 727 ° C.), for example, 600 ° C. It is more preferable to carry out heating and quenching.
  • the Vickers hardness of the cross section at a position about 50 ⁇ m deep from the surface was 850 Hv to 950 Hv.
  • the Vickers hardness of the cross section at a position about 600 ⁇ m deep from the surface where the iron carbide 2 penetrates to the inside of the base material than the metal carbide 1 was 750 Hv to 850 Hv.
  • Example 3 is a schematic diagram illustrating an example of the sliding member of Example 3, and FIG. 4B is a laser microscope observation photograph of the dotted line portion of FIG. 4A.
  • the sliding member 10c has a martensite layer 3 constituting the base material, and a metal carbide 1 and an iron carbide 2 contained in the martensite layer 3, and the metal carbide 1 and the iron carbide 2 The volume ratio decreases along the depth direction from the surface of the substrate to the inside. Furthermore, the martensite layer 3 is formed to a deeper part than the layer in which the metal carbide 1 and the iron carbide 2 exist.
  • the hard layer extends from the surface to the martensite layer 3 formed to a deeper portion than the layer in which the metal carbide 1 and the iron carbide 2 are present.
  • FIG. 4B is a laser micrograph obtained by etching the dotted line portion of the base material 4 in FIG. 4A with sodium picrate acid so that the iron carbide 2 is easily etched. As shown in FIG. 4B, it can be seen that there is a needle-like martensite layer 3 etched in black.
  • a hardened layer having metal carbide 1 and iron carbide 2 by providing a hardened layer having metal carbide 1 and iron carbide 2, a layer having iron carbide inside thereof, and a hardened layer made of martensite inside thereof. And the freedom degree of the thickness of the layer which has the iron carbide 2 inside it increases. Moreover, the manufacturing process can be simplified and the strength can be increased by adjusting the required hardness while leaving a portion where the metal carbide and iron carbide do not penetrate.
  • the hardened layer having the metal carbide 1 and the iron carbide 2 and the internal structure of the hardened layer having the iron carbide 2 are as soft as the base material, the hardening having the metal carbide 1 and the iron carbide 2 on the soft layer. Even if the hardened layer having the layer and the iron carbide 2 is configured, and the hardened layer having the metal carbide 1 and the iron carbide 2 and the hardened layer having the iron carbide 2 resist the load acting on sliding, It can happen that a soft structure is fatigued and destroyed like a base material inside a hardened layer having iron carbide 2. For example, an iron plate is placed on tofu and a heavy object is placed on the iron plate and slid.
  • a configuration in which a hardened layer having metal carbide 1 and iron carbide 2 and a hardened layer made of martensite inside the hardened layer having iron carbide 2 is preferable.
  • a hardened layer made of martensite can be easily formed by quenching.
  • the main element constituting the hardened layer made of martensite is carbon.
  • the hardened layer made of martensite can be formed by quenching.
  • the thickness of the hardened layer made of martensite is a steel base material containing a predetermined amount of an alloy element such as manganese, chromium, nickel and molybdenum for improving the hardenability.
  • the thickness of the hardened layer composed of martensite can be adjusted.
  • the hardening layer which consists of a martensite can be comprised by infiltrating carbon to the required depth of a steel base material.
  • the material constituting the base material 4 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C.
  • a round bar sample having an outer diameter of 10 mm and a length of 50 mm was used as the substrate.
  • vanadium powder having an average particle diameter of 50 ⁇ m and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry.
  • An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample.
  • the outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 ⁇ m.
  • the temperature is 1300 ° C. and the holding time is 5 minutes.
  • a carburizing gas was flowed to diffuse about 2000 ⁇ m of carbon on the outer surface of the S45C round bar sample.
  • the temperature was 1200 ° C.
  • the holding time was 80 minutes
  • acetylene was used as the carburizing gas.
  • the carbon penetration time was increased from 20 minutes to 80 minutes. This is a treatment for penetrating the iron carbide 2 deeper than the metal carbide 1 and further forming the martensite layer 3 therein.
  • the carbon concentration of the martensite layer 3 can be prevented from generating particulate iron carbide by permeating carbon below eutectoid (carbon is about 0.8 mass% or less).
  • the carbon concentration can be controlled by adjusting the amount of carburizing gas.
  • the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. This S45C round bar sample was cut and polished to prepare the observation sample described above.
  • vanadium V is maintained at a temperature of 1300 ° C. and a holding time of 5 minutes. Was allowed to permeate at a temperature of 1200 ° C. and a holding time of 80 minutes, and then the temperature was lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram, for example, 600 ° C. It is more preferable to reheat and quench.
  • the Vickers hardness at a position about 50 ⁇ m deep from the surface was 850 Hv to 950 Hv.
  • the Vickers hardness of the cross section at a position about 600 ⁇ m deeper from the surface in which the iron carbide 2 penetrated to the inside of the substrate than the metal carbide 1 was 750 Hv to 850 Hv.
  • the Vickers hardness of the cross section of the martensite layer 3 at a position 1100 ⁇ m deep from the surface was 550 Hv to 700 Hv.
  • FIG. 5 is a schematic view of an apparatus used for the thrust fatigue test.
  • the thrust fatigue test is a test method that simulates a thrust bearing.
  • the test piece 5 is a test piece for evaluating the fatigue strength of the surface treatment, and is subjected to the surface treatment to be evaluated.
  • the test piece 5 has an outer diameter of 57 mm and a thickness of 5 mm.
  • the ball 6 is a ball used in a thrust bearing. In this test, the ball diameter was 3/8 inch and the number of balls was 3 and arranged every 120 °. The diameter of the track on which the ball 6 rolls is 38.5 mm.
  • the material of the ball 6 is high carbon chrome bearing steel SUJ2 defined by Japanese Industrial Standard JIS G 4805.
  • the Vickers hardness of the cross section at a position 50 ⁇ m deep from the surface of the SUJ2 ball 6 used in this test was in the range of 720 Hv to 780 Hv.
  • the outer ring 7 was a thrust bearing outer ring and a commercially available product was used.
  • the test piece 5, the ball 6 and the outer ring 7 are set in the test tank 8, the lubricating oil 9 is put in the test tank 8, set in the test apparatus main body (not shown), and a load 10 so as to obtain a predetermined test surface pressure.
  • rotation 11 was applied using a motor (not shown) of the test apparatus main body, and the relationship between the number N of times the test piece 5 was damaged and the test surface pressure P was obtained as fatigue characteristics.
  • a naphthenic kinematic viscosity of 8.46 mm2 / S (40 ° C.) was used.
  • the test surface pressure is the maximum Hertz stress determined from Hertz's contact theory.
  • the thrust fatigue test was performed on the following six types of test pieces in total.
  • Example 4 Specimen corresponding to Example 1
  • Example 5 Specimen corresponding to Example 2
  • Example 6 Specimen corresponding to Example 3
  • Comparative example 1 Induction-hardened test piece having a reference life
  • Comparative example 2 Test piece in which vanadium was infiltrated in Example 4 but not infiltrated with carbon
  • Comparative Example 3 Test piece in which vanadium was not infiltrated in Example 5 and only carbon was infiltrated
  • the base material of the test piece is a steel material S45C for machine structural use specified by Japanese Industrial Standard JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C.
  • Example 4 is a test piece corresponding to Example 1.
  • a slurry in which vanadium powder having an average particle size of 50 ⁇ m and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did.
  • the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 ⁇ m.
  • the temperature was lowered to 1200 ° C., and maintained for 5 minutes in a state where a carburizing gas was supplied so that carbon C diffused by about 500 ⁇ m.
  • Acetylene was used as the carburizing gas.
  • the sample was reheated to 850 ° C., and quenching was performed by spraying water-soluble quenching oil on the test piece 5.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface was 850 Hv to 950 Hv, and the hardened layer depth (hardened layer thickness) was 2 mm.
  • Example 5 is a test piece corresponding to Example 2.
  • a slurry in which vanadium powder having an average particle size of 50 ⁇ m and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did.
  • the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 ⁇ m.
  • the temperature was lowered to 1200 ° C. and kept for 20 minutes in a state in which a carburizing gas was supplied so that carbon C diffused by about 1000 ⁇ m.
  • Acetylene was used as the carburizing gas.
  • the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface is 850 Hv to 950 Hv
  • the Vickers hardness of the cross section at a position about 600 ⁇ m deep from the surface of the portion in which the iron carbide 2 penetrates to the inner side of the base material than the metal carbide 1 is The hardened layer depth was 2.5 mm from 750 Hv to 850 Hv.
  • Example 6 is a test piece corresponding to Example 3.
  • a slurry in which vanadium powder having an average particle size of 50 ⁇ m and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did.
  • the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 ⁇ m.
  • the temperature was lowered to 1200 ° C., and maintained for 80 minutes in a state where a carburizing gas was supplied so that carbon was diffused by about 2000 ⁇ m.
  • Acetylene was used as the carburizing gas.
  • the sample was reheated to 850 ° C., and quenching was performed by spraying water-soluble quenching oil on the test piece 5.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface is 850 Hv to 950 Hv
  • the Vickers hardness of the cross section at a depth of about 600 ⁇ m from the surface of the portion in which the iron carbide 2 penetrates to the inner side of the base material than the metal carbide 1 is
  • the Vickers hardness of the cross section of the martensite layer 3 1750 ⁇ m from the surface at 750 Hv to 850 Hv was 550 Hv to 700 Hv, and the hardened layer depth was 3.0 mm.
  • Comparative Example 1 is a test piece having a reference life, the test surface side of the test piece 5 is heated at a frequency of 30 kHz and a heating time of 10 seconds, and a temperature higher by about 30 ° C. than the A3 transformation point of the iron-carbon phase diagram. Quenching was performed by setting the temperature to about 900 ° C. and spraying a water-soluble quenching oil onto the test piece 5. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface was 600 Hv to 720 Hv, and the hardened layer depth was 2 mm.
  • FIG. 6A is a schematic diagram of a test piece of Comparative Example 1
  • FIG. 6B is an observation photograph of the structure of FIG. 6A.
  • FIG. 6B is a laser micrograph of the structure of Comparative Example 1 etched with nital. As shown in FIG. 6B, it can be seen that the vicinity of the surface exhibits the entire martensite structure by induction hardening. Since metal element and carbon are not permeated, metal carbide 1 and iron carbide 2 are not observed.
  • Comparative Example 2 is a comparative example with respect to Example 4, and is a test piece that does not infiltrate carbon but infiltrate vanadium with respect to Example 4.
  • vanadium powder having an average particle diameter of 50 ⁇ m and benzotriador in 2-butanone were mixed with 20% by mass of each solvent and 5% by mass of epoxy, respectively, and the slurry was immersed to form a slurry film.
  • Heat treatment was performed at a temperature of 1300 ° C. and a holding time of 5 minutes so that vanadium diffused by about 500 ⁇ m by high frequency heating. Thereafter, the temperature was lowered to 1200 ° C. and held for 5 minutes.
  • the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface was 850 Hv to 950 Hv, and the hardened layer depth was 2 mm.
  • FIG. 7A is a schematic diagram of a test piece of Comparative Example 2
  • FIG. 7B is a SEM observation photograph of FIG. 7A
  • FIG. 7C is a mapping by EPMA of FIG. 7B.
  • carbon penetration was not performed, and thus no iron carbide 2 was observed.
  • vanadium carbide 50 accompanying vanadium permeation is observed.
  • the comparative example 3 is a comparative example with respect to the example 1, and is a test piece in which the vanadium is not infiltrated and the carbon is infiltrated with respect to the example 1.
  • the surface of the test piece 5 was heat-treated at a temperature of 1300 ° C. and a holding time of 5 minutes by high-frequency heating without forming a slurry film.
  • the temperature was lowered to 1200 ° C. and held for 5 minutes in a state where a carburizing gas was supplied so that carbon diffused by about 500 ⁇ m. Acetylene was used as the carburizing gas.
  • the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a time of 90 minutes.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross-sectional hardness at a depth of about 50 ⁇ m from the surface was 800 Hv to 900 Hv, and the hardened layer depth was 2 mm.
  • FIG. 8A is a schematic view of a test piece of Comparative Example 3, and FIG. 8B is an observation photograph of the structure of FIG. 8A.
  • FIG. 8B is a laser micrograph of the structure of Comparative Example 3 etched with sodium picrate. As shown in FIG. 8B, iron carbide 2 accompanying carbon permeation is observed in the martensite layer 3 of the base material. In Comparative Example 3, no vanadium permeation was performed, so no vanadium carbide was observed.
  • FIG. 9 is a graph showing the results of the thrust fatigue test of Examples 4 to 6 and Comparative Examples 1 to 3.
  • the test surface pressure was 6 GPa.
  • the life evaluation method is set so that the test is stopped when the value of the acceleration sensor installed at a predetermined location of the test apparatus exceeds three times the value at the start of the test.
  • the surface of No. 5 was confirmed, and the time when flaking with a large sliding width (a dent caused by damage) was confirmed was defined as the life.
  • Even when the value of the acceleration sensor exceeded the set value if flaking damage did not occur on the surface of the test piece 5, the test was repeated, and the test was continued until flaking damage occurred.
  • the maximum shear stress generation depth is about 180 ⁇ m, which is sufficiently shallower than the hardened layer depths of Examples 4 to 6 and Comparative Examples 1 to 3.
  • the vertical axis in FIG. 9 indicates the ratio when the number of times of life of the test piece subjected to the treatment of Comparative Example 1 is 1, and is the life improvement rate under the same test surface pressure.
  • the test was implemented 3 conditions for each condition, and evaluated by the average value.
  • each of Examples 4 to 6 had a life of 10 times or more that of Comparative Example 1.
  • the Vickers hardness at 50 ⁇ m from the surface of Comparative Example 1 was 600 Hv to 720 Hv, and the life of Examples 4 to 6 was increased because the surface hardness was improved by the surface treatment of the present invention. This is thought to be due to an increase in resistance to dynamic damage.
  • Example 4 to 6 the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface is the same at 850 Hv to 950 Hv, but the life may be increased in the order of Example 4, Example 5, and Example 6. confirmed. From this, it is suggested that not only the hardened layer of metal carbide 1 and iron carbide 2 scattered in the martensite layer 3 but also the configuration and thickness of the internal hardened layer affect the sliding damage.
  • Comparative Example 2 the life was about half that of Comparative Example 1. This is because vanadium permeates to generate vanadium carbide by reacting with the carbon in the substrate S45C, so that the carbon in the substrate S45C is consumed, and the vanadium has not penetrated the carbon after infiltrating, It is presumed that a region having a small amount of carbon was partially formed and a region having a low hardness was partially formed. Therefore, it was suggested that it is necessary to permeate more carbon so as not to cause carbon deficiency of the base material. This phenomenon can be sufficiently prevented by infiltrating hypereutectoid (carbon concentration of about 0.8% by weight or more) as in the present invention.
  • hypereutectoid carbon concentration of about 0.8% by weight or more
  • Comparative Example 3 the life was about three times that of Comparative Example 1, but the life was shorter than in Examples 4, 5, and 6 times or more. This is presumably because Comparative Example 3 did not disperse the metal carbide 1 but dispersed only the iron carbide 2, and thus the resistance to sliding damage was not sufficiently improved.
  • Example 7 to 10 a test piece in which the diffusion concentration of vanadium was changed with respect to Example 4 (average particle diameter of vanadium: 50 ⁇ m) was prepared, the dispersion amount of metal carbide, sliding damage, and the hardness of the test piece 5 and the ball 6. The effects of difference and sliding damage were evaluated.
  • the amount of vanadium dispersed can be adjusted, for example, by changing the diffusion path by changing the particle size of vanadium.
  • the hardness of the test piece 5 also changes according to the amount of vanadium dispersed, the hardness difference between the test piece 5 and the ball 6 can be adjusted.
  • the average particle size of vanadium in Examples 7 to 10 is as follows.
  • Example 7 Average particle diameter of vanadium 10 ⁇ m
  • Example 8 Average particle diameter of vanadium 25 ⁇ m
  • Example 9 Average particle size of vanadium 100 ⁇ m
  • Example 10 Average particle diameter of vanadium V 200 ⁇ m
  • Examples 7 to 10 have the same heat treatment conditions and test conditions as Example 4 except for the particle size of vanadium.
  • FIG. 10 is a graph showing the results of the thrust fatigue test of Examples 4, 7 to 10 and Comparative Example 1.
  • Example 7 where the average particle size of vanadium is the smallest and the penetration of vanadium is predicted to be the largest, the test piece 5 is undamaged, but the test is completed with a life of 1 time due to the ball 6 damage. did.
  • the average value of the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface of the test piece 5 of Example 7 was 1350 Hv, which was about 600 Hv harder than the average value of 750 Hv of the Vickers hardness of the cross section of the ball 6. For this reason, it is considered that the surface of the ball 6 is damaged by wear or excessive sliding on the surface of the test piece 5.
  • Example 9 the average particle diameter of vanadium is larger than that in Example 4, and the penetration amount of vanadium is less than that in Example 4. Damaged (no damage to the ball was observed).
  • the average value of the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface of the test piece 5 of Example 9 was 850 Hv, which was about 100 Hv harder than the average value of 750 Hv of the Vickers hardness of the cross section of the ball 6.
  • Example 10 which is considered to have a larger average particle diameter of vanadium than Example 9 and less permeation of vanadium, was damaged by a life of twice that of Example 9 which was shorter than that of Example 9 (the ball was damaged). It was not possible.)
  • the average value of the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface of the test piece 5 of Example 10 was 750 Hv, which was equivalent to the average value of the Vickers hardness of the cross section of the ball 6 750 Hv.
  • FIG. 11 is a graph showing the relationship between the hardness difference between the test piece 5 and the ball 6 of Examples 4 and 7 to 10 and the life ratio. It can be seen that the life ratio increases as the hardness difference between the test piece 5 and the ball 6 increases (the hardness of the test piece 5 increases). However, it can be seen that when the hardness difference between the test piece 5 and the ball 6 exceeds 200 Hv and further increases, the life ratio decreases due to damage to the ball. Thus, it can be seen that in the sliding of the relative parts, the service life is regulated by the hardness difference between the relative parts.
  • FIG. 12 is a schematic sectional view of the electric power steering apparatus
  • FIG. 13 is an enlarged view of the ball screw mechanism of FIG.
  • the electric power steering apparatus has a nut 12 having a female screw groove formed on the inner peripheral surface, and a male screw groove that is disposed on the shaft center of the nut 12 and faces the female screw groove on the outer peripheral surface.
  • a rack screw 13 a ball screw mechanism including a plurality of circulating balls 6 interposed between the female screw groove and the male screw groove, a steering gear case 14 that houses the ball screw mechanism, and a ball screw mechanism.
  • the electric motor 15 is provided for driving, and a power transmission mechanism 16 that transmits the rotational driving force of the electric motor to the nut 12.
  • the rolling distance can be shortened because the durable surface pressure can be increased as compared with the conventional surface treatment.
  • the ability to shorten the rolling distance leads to a reduction in the number of turns of the ball screw and a reduction in the diameter of the rack screw, which can contribute to light weight and downsizing.
  • the electric power steering device is almost 100% popular in general vehicles, and its application to large vehicles is being studied.
  • a problem in application to a large vehicle is that the load applied to the ball screw increases, the surface pressure of the ball screw portion increases, and the life is shortened due to fatigue damage accompanying rolling.
  • increase the pressure-receiving area by increasing the diameter of the ball screw or increasing the length of the ball screw. It is necessary to make the surface pressure at the same level as that of ordinary cars, but because the sliding distance becomes longer, the load transmission efficiency decreases due to the increase in friction, and it becomes necessary to install an extra capacitor for assistance. There is a downside.
  • the diameter of the ball screw part can be reduced or the length of the ball screw part can be shortened accordingly. In addition to suppressing the reduction in transmission efficiency, it can also be expected to reduce weight.
  • the manufacturing method of the power steering device described above will be described below.
  • the nut 12 is an inner surface screw and the rack screw 13 is an outer surface screw
  • the surface pressure calculated from Hertz's contact theory is relatively larger than the nut 12 due to its geometric shape, so the rack screw 13
  • the present invention was applied to the outer surface thread portion.
  • the material of the rack screw 13 was a carbon steel material S45C for machine structure defined by Japanese Industrial Standard JIS G 4501.
  • the round bar material was finished in the shape of a predetermined rack screw 13 through processes such as turning and rolling.
  • the surface enhancement treatment of the present invention was performed on the rack screw 13 (Example 11). Moreover, in order to confirm the lifetime improvement effect of the surface reinforcement
  • FIG. 14 is a schematic diagram of an apparatus for applying a slurry to the rack screw 13.
  • Slurry application to the rack screw 13 was performed by a slurry application device 17 shown in FIG.
  • the slurry raw material charging device 18 2-butanone, vanadium powder having an average particle diameter of 50 ⁇ m, and benzotriazole are respectively charged in an amount of 20% by mass and 5% by mass of epoxy.
  • These raw materials are agitated and mixed by the slurry agitating fan 20 in the slurry agitating device 19 to become the adjusted slurry 21.
  • the adjusted slurry 21 is transferred to the slurry tank 23 by the pump 22.
  • the rack screw 13 is masked in advance so that the slurry 21 is not applied except for the external thread portion.
  • the rack screw 13 is immersed in the slurry tank 23 in the rack screw conveying device 24, pulled upward while rotating to homogenize the coating thickness, and dried in a drying device (not shown) to form a slurry film. Is done.
  • FIG. 15 is a schematic view of a heat treatment apparatus used in Example 11.
  • the rack screw 13 having the slurry film is subjected to heat treatment by a heat treatment apparatus shown in FIG.
  • the rack screw 13 is loaded into the heat treatment device 28, the inside of the heat treatment device 28 is evacuated and replaced with an inert gas, and heated by the high frequency coil 26.
  • About 500 ⁇ m vanadium is infiltrated at a heating temperature of T1: 1300 ° C. and an infiltration time t1: 5 min.
  • the temperature is lowered to T2: 1200 ° C. while injecting acetylene gas from the carburizing gas nozzle 27 in a state where the pressure inside the heat treatment apparatus 28 is reduced, and carbon is infiltrated by about 500 ⁇ m at an infiltration time t2: 5 min. .
  • the temperature was lowered to 600 ° C.
  • the mixture was reheated to 850 ° C., and water-quenching quenching oil was injected into the rack screw 13 to perform quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. Thereafter, the external thread portion and the like were finished to a predetermined dimension by grinding.
  • the Vickers hardness at a depth of 50 ⁇ m from the surface of the sliding portion of the rack screw 13 was the same as that of Example 4 confirmed with the thrust fatigue test piece.
  • the durability test was conducted by incorporating this rack screw 13 into the electric power steering device.
  • the ball 6 was made of high carbon chrome bearing steel SUJ2 defined in Japanese Industrial Standard JIS G 4805 as in the thrust fatigue test.
  • the Vickers hardness at a depth of 50 ⁇ m from the surface of the sliding portion of the ball was about 720 Hv to 780 Hv.
  • an alloy steel SCM420 for machine structure defined by Japanese Industrial Standard JIS G 4053 was used as the nut 12.
  • the round bar material was processed into a predetermined nut 12 shape through a process such as turning.
  • the life evaluation method is that the value of the acceleration sensor attached to the electric power steering at a predetermined location exceeds twice the value at the start of the test, or the value of the acoustic sensor attached to the electric power steering at the predetermined location
  • the test was set to stop when it exceeded twice the time. After the test was stopped, the ball screw portion of the electric power steering was disassembled, and the sliding portions of the rack screw 13, the ball 6 and the nut 12 were observed to confirm that damage had occurred. However, when the test stop condition was not reached even when exceeding 3 times the life of Comparative Example 4, the test was terminated at that time, assuming that a life of 3 times or more was confirmed.
  • the nut 12 and the ball 6 are the same as in the present invention, and the surface treatment of the rack screw 13 is induction hardening that has been conventionally employed.
  • FIG. 16 is a graph showing the durability test results of the electric power steering devices of Example 11 and Comparative Example 4. In Example 11, compared to Comparative Example 4, it was confirmed that the lifetime was 3 times or more. Further, as a result of observing the sliding surfaces of the rack screw 13, the ball 6 and the nut 12 after the life test, no significant damage was confirmed.
  • Example 12 In Examples 1 to 11, metal elements and carbon were diffused using diffusion, but in this example, powder containing metal and carbon is fed, and the powder and substrate are alloyed by laser. We evaluated and evaluated the method to make it.
  • FIG. 17 is a schematic view showing an example of an apparatus for laser alloying a thrust fatigue test piece.
  • the base material of the test piece 5 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C.
  • Powder 31 consisting of 1% by mass of carbon, 2% by mass of vanadium, 4% by mass of chromium, 5% by mass of molybdenum, and the remainder of iron on the surface of the test piece 5 is fed from the powder feeding device 32 into the laser welding nozzle 29, Using the laser transmitter 30, the powder 31 and the substrate S45C were simultaneously melted and alloyed.
  • the powder 31 is a gas atomized powder having an average particle diameter of 70 ⁇ m and a powder feeding amount of about 4 g / min.
  • the laser alloying conditions were as follows: laser output: 2500 W, focal diameter: 4 mm, alloying speed: 1000 mm / min. This condition is a condition that the alloying depth is about 0.5 mm and the alloying width is about 3 mm.
  • the test surface side of the test piece 5 is heated at a frequency of 30 kHz and a heating time of 10 seconds to a temperature about 30 ° C. higher than the A3 transformation point of the iron-carbon system phase diagram, about 900 ° C. Was sprayed on the test piece 5 for quenching.
  • the tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
  • the base material, metal, and carbon are melted and alloyed with a laser, and then quenched, whereby the base material is martensitic and a structure in which metal carbide and iron carbide particles are dispersed in the martensite layer can be formed.
  • toughness can be improved by tempering. Durability can be improved even with a structure that has been melted and alloyed with a laser, but the structure that has been melted and alloyed with a laser is a solidified structure, and a heat-affected zone is formed in the surrounding area that has been melted and alloyed. Therefore, considering the stabilization of the structure, it is more preferable to perform quenching and tempering.
  • both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface was 880 Hv to 980 Hv, and the total hardened layer depth was 2 mm.
  • FIG. 18 is a schematic diagram of the structure of Example 12, a macro photograph taken with a microscope showing a laser alloying region, and a detailed structure photograph composed of laser alloying.
  • a laser alloying region 33 in which the metal carbide 1 and the iron carbide 2 were dispersed in the martensite layer 3 was confirmed in a range of 500 ⁇ m in depth from the surface. Further, a heat affected zone 34 accompanying laser alloying was observed inside the laser alloying region 33.
  • the Vickers hardness of the cross section at a depth of 50 ⁇ m from the surface was 880 Hv to 980 Hv.
  • the thrust fatigue test of Example 11 was performed on the test piece 5 thus produced. The test conditions are the same as in FIG. As a result, the lifetime of Example 12 was confirmed to be 10 times longer than that of Comparative Example 1 in FIG.
  • Example 13 Based on the results of the thrust fatigue test described above, the laser alloying of the present invention shown in Example 12 was applied to the ball screw portion of the electric power steering apparatus.
  • the object of application is the external thread portion of the rack screw 13 as in Example 11, and is the same as Example 11 except for laser alloying.
  • FIG. 19 is a schematic view of an apparatus for applying a laser alloying process to the external thread portion of the rack screw 13.
  • a powder 31 consisting of 2% by mass of carbon C1% by mass, 4% by mass of chromium, 5% by mass of molybdenum, and the remainder of iron Fe is fed from the powder feeding device 32 to the laser welding nozzle 29.
  • the powder 31 and the substrate S45C were simultaneously melted and alloyed using a laser transmitter 30.
  • the rack screw 13 is supported by the rotary feed device 35, controlled by the rotary feed device control panel 36, and fed in the axial direction of the rack screw 13 while rotating, so that the rack screw 13 is moved to the sliding portion of the external thread portion of the rack screw 13. Along with this, laser alloying is performed.
  • Powder 31 is a gas atomized powder having an average particle diameter of 70 ⁇ m and a powder feeding amount of about 4 g / min.
  • the laser alloying conditions were a laser output of 2500 W, a focal diameter of 4 mm, and an alloying speed of about 1000 mm / min. This condition is a condition that the alloying depth is 0.5 mm and the alloying width is 3 mm.
  • the rack screw 13 is heated at a frequency of 30 kHz and a heating time of 10 seconds to reach a temperature about 30 ° C. higher than the A3 transformation point of the iron-carbon phase diagram, about 900 ° C., and water-soluble quenching oil is injected onto the test piece 5 And quenched.
  • the tempering was performed by high frequency heating at a temperature of 200 ° C. for 1 minute.
  • the Vickers hardness of the cross section at a depth of about 50 ⁇ m from the surface was 880 Hv to 980 Hv, and the hardened layer depth was 2 mm.
  • the durability test was conducted by incorporating the above-described rack screw 13 into the electric power steering apparatus.
  • the ball 6 was made of high carbon chrome bearing steel SUJ2 defined in Japanese Industrial Standard JIS G 4805 as in the thrust fatigue test.
  • the Vickers hardness at a depth of 50 ⁇ m from the surface of the sliding portion of the ball was about 720 Hv to 780 Hv.
  • an alloy steel SCM420 for machine structure defined by Japanese Industrial Standard JIS G 4053 was used as the nut 12.
  • the round bar material was processed into a predetermined nut 12 shape through a process such as turning. Thereafter, a gas carburizing process was performed, and the inner surface screw part and the like were finished by grinding.
  • the carburizing gas is widely used in consideration of industrial feasibility, not the surface treatment of the present invention.
  • the Vickers hardness at a depth of 50 ⁇ m from the surface of the sliding portion of the nut 12 was about 660 Hv to 760 Hv.
  • the life evaluation method is that the value of the acceleration sensor attached to the electric power steering at a predetermined location exceeds twice the value at the start of the test, or the value of the acoustic sensor attached to the electric power steering at the predetermined location
  • the test was set to stop when it exceeded twice the time. After the test was stopped, the ball screw portion of the electric power steering was disassembled, and the sliding portions of the rack screw 13, the ball 6 and the nut 12 were observed to confirm that damage had occurred. However, when the test stop condition was not reached even when exceeding 3 times the life of Comparative Example 4, the test was terminated at that time, assuming that a life of 3 times or more was confirmed.
  • the nut 12 and the ball 6 are the same as in the present invention, and the surface treatment of the rack screw 13 is induction hardening that has been conventionally employed.
  • Example 14 In Example 14, the metal carbide and iron carbide layers are provided only on the rack screw 13 at positions where the balls 6 are in contact with each other.
  • FIG. 22 is an enlarged view of a portion where the rack screw 13 and the ball 6 constituting the ball screw mechanism of the electric power steering apparatus of the fourteenth embodiment come into contact with each other. As shown in FIG. 22, the rack screw 13 and the ball 6 are in contact with each other at two locations (37a, 37b) (in operation, depending on the moving direction, they are in contact with either one side).
  • FIG. 23 is an enlarged view of the surface of the rack screw 13 of FIG.
  • metal carbide and iron carbide are formed in two lines along the groove of the rack screw 13.
  • Example 13 In order to provide metal carbide and iron carbide in two places, the laser alloying shown in Example 13 can be used. A metal carbide or iron carbide layer can be provided only in the laser-treated portion.
  • metal carbide and iron carbide are added to the rack screw 13, but metal carbide and iron carbide may be added to the surface of the ball 6.
  • a sliding member having high durability and a manufacturing method thereof, a power steering device and a manufacturing method thereof can be provided.
  • a durable surface pressure can be increased as compared with a conventional surface treatment. Can contribute to
  • this invention is not limited to the above-mentioned Example, Various modifications are included.
  • the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described.
  • a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment.
  • slurry dipping device control panel 26 ... high frequency coil, 27 ... carburizing gas nozzle, 28 ... heat treatment device, 29 ... laser welding Nozzle, 30 ... laser transmitter, 31 ... powder, 32 ... powder feeding device, 33 ... laser alloying region, 34 ... heat affected zone, 3 ... rotary feeder 36 ... rotary feeder control panel, 37a, 37b ... contact portion between the ball and the rack screw, 38 ... rack screw surface metal carbide and iron carbide.

Abstract

The present invention addresses the problem of providing a sliding member less susceptible to decreased durability and having improved hardness and a manufacturing method thereof, and a power steering device and manufacturing method thereof. This power steering device has a sliding member (10a) characterized by containing a steel base material (3), granular iron carbide (2) contained in the base material, and metallic carbide (1) contained in the base material and containing metal and carbon as constituent elements, wherein the volume ratios of the iron carbide (2) and the metallic carbide (1) decrease along the depth direction from the surface of the base material toward the inside, and the metal is one or more selected from the group consisting of Ti, V, Nb, Ta, Zr, W, Hf, and Mo.

Description

摺動部材およびその製造方法ならびにパワーステアリング装置およびその製造方法Sliding member and manufacturing method thereof, power steering device and manufacturing method thereof
 本発明は、摺動部材およびその製造方法ならびにパワーステアリング装置およびその製造方法に関する。 The present invention relates to a sliding member, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
 軸受け、ボールねじ、チェーン、カム、歯車およびスプラインなどの摺動部材の表面は、摺動に伴いピッチングやフレーキングと呼ばれる疲労損傷が発生する場合があることが知られている。これらの疲労損傷は摺動部材の寿命を減じるため、摺動部の疲労強度を向上させるための種々の方法が提案されている。また、摺動部の疲労強度を向上させることで、部品を小型化および低コスト化できる利点もある。 It is known that the surface of sliding members such as bearings, ball screws, chains, cams, gears, and splines may cause fatigue damage called pitting or flaking as they slide. Since these fatigue damages reduce the life of the sliding member, various methods for improving the fatigue strength of the sliding portion have been proposed. Moreover, there is also an advantage that parts can be reduced in size and cost by improving the fatigue strength of the sliding portion.
 特許文献1では、鋼製の摺動部材において、熱処理で得られた硬化層の表層部に、硬化層の表面硬度と同じかまたはこれよりも硬度の高い多数の硬質粒子を結晶状態で点在させた摺動部材が提案されている。この硬質粒子は当該摺動部材に元々含まれていたCr、V、Ti、Nbのいずれかの元素の酸化物、炭化物または窒化物で、マルテンパー処理で硬化層粒子の含まれる厚みを20から30μm程度に形成することが示されている。硬化層の表層部に露出した多数の硬質粒子がいわゆる「アンカー効果」を発揮してその場所に留まろうとすることによって、硬質粒子の周囲の硬化層表層部が被摺動部材の摺動によって塑性流動を起こすことを効果的に防止し、摺動部材の表面の凝着摩耗を低減でき、耐摩耗性が向上するとしている。 In Patent Document 1, in a steel sliding member, a large number of hard particles having a hardness equal to or higher than the surface hardness of the hardened layer are scattered in a crystalline state on the surface layer portion of the hardened layer obtained by heat treatment. Proposed sliding members have been proposed. These hard particles are oxides, carbides or nitrides of any of the elements Cr, V, Ti and Nb originally contained in the sliding member. The thickness of the hardened layer particles included in the martemper treatment is 20 to 30 μm. It is shown to form to the extent. A large number of hard particles exposed on the surface of the hardened layer exert a so-called “anchor effect” and try to stay there, so that the surface of the hardened layer around the hard particles is moved by the sliding of the sliding member. It is said that it is possible to effectively prevent plastic flow, reduce adhesive wear on the surface of the sliding member, and improve wear resistance.
特開2015-14300号公報Japanese Patent Laying-Open No. 2015-14300
 軸受け、ボールねじ、チェーン、カム、歯車およびスプラインなどの摺動部材は、相対する2部品以上の組み合わせで構成されるため、損傷が生じやすい側の部品(以下、強化部品と称する。)だけ表面を硬くする強化処理を施しても、相対する部品(以下、相対部品と称する。)の硬さによっては、強化部品が相対部品を攻撃し損傷させる可能性が考えられる。このため、相対部品が損傷する可能性のある場合は、相対部品も強化部品と同等の寿命を持つように強化処理を施す必要が生じる。 Since sliding members such as bearings, ball screws, chains, cams, gears, and splines are composed of a combination of two or more parts facing each other, only the parts that are easily damaged (hereinafter referred to as reinforced parts) are surfaces. Even if a strengthening process is performed to harden, depending on the hardness of the opposing parts (hereinafter referred to as relative parts), there is a possibility that the reinforcing parts may attack and damage the relative parts. For this reason, when there is a possibility that the relative part may be damaged, it is necessary to perform a strengthening process so that the relative part also has a life equivalent to that of the strengthened part.
 このような背景から、相対部品が損傷しない程度に一方または両方の部材の硬度を調節する必要が生じる場合がある。相対部品を損傷させない程度に強化部品の表面硬度を高くするには、例えば特許文献1にて「硬質粒子」として記載された金属炭化物の点在量を減らすことで対応可能と考えられるが、この金属炭化物の点在量を減らすことにより、金属炭化物同士の距離が離れてしまうので、金属炭化物のアンカー効果が小さくなり、耐久性が低下することが懸念される。 From this background, it may be necessary to adjust the hardness of one or both members to the extent that the relative parts are not damaged. In order to increase the surface hardness of the reinforced parts to such an extent that the relative parts are not damaged, it is considered that this can be achieved by reducing the amount of metal carbides described as “hard particles” in Patent Document 1, for example. By reducing the interstitial amount of the metal carbide, the distance between the metal carbides is increased, so there is a concern that the anchor effect of the metal carbide is reduced and the durability is lowered.
 本発明は、上記事情に鑑み、耐久性の低下を抑制しながら、硬度を強化した摺動部材およびその製造方法ならびにパワーステアリング装置およびその製造方法の提供を目的とする。 In view of the circumstances described above, an object of the present invention is to provide a sliding member with enhanced hardness while suppressing a decrease in durability, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
 上記課題を解決する本発明の第1の態様は、鋼製の基材と、基材に含まれる粒状の鉄炭化物と、基材に含まれ、金属と炭素とを構成元素として含む金属炭化物とを含み、鉄炭化物および金属炭化物の体積率は、基材の表面から内部への深さ方向に沿って減少し、金属はTi、V、Nb、Ta、Zr、W、HfおよびMoからなる群から選択された1種類以上であることを特徴とする摺動部材である。 A first aspect of the present invention that solves the above problems includes a steel base material, granular iron carbide contained in the base material, a metal carbide contained in the base material and containing metal and carbon as constituent elements, and The volume fraction of iron carbide and metal carbide decreases along the depth direction from the surface to the inside of the substrate, and the metal is a group consisting of Ti, V, Nb, Ta, Zr, W, Hf and Mo It is a sliding member characterized by being one or more types selected from.
 本発明の第2の態様は、内周面に雌ねじ溝が形成されたナットと、ナットの軸心に配置されると共に外周面に雌ねじ溝に対峙する雄ねじ溝が形成されたラックスクリューと、雌ねじ溝と雄ねじ溝との間に介装された複数個の循環ボールとを有するボールねじ機構と、ボールねじ機構を収納するステアリングギアケースと、ボールねじ機構の駆動に供される電動モータと、電動モータの回転駆動力をナットに伝達する動力伝達機構とを有し、ラックスクリューまたは循環ボールは、上記本発明の摺動部材であることを特徴とするパワーステアリング装置である。 According to a second aspect of the present invention, there are provided a nut having a female thread groove formed on an inner peripheral surface, a rack screw disposed on an axial center of the nut and having a male screw groove opposed to the female screw groove, and a female screw. A ball screw mechanism having a plurality of circulating balls interposed between the groove and the male screw groove; a steering gear case that houses the ball screw mechanism; an electric motor that is used to drive the ball screw mechanism; And a power transmission mechanism for transmitting the rotational driving force of the motor to the nut, wherein the rack screw or the circulating ball is the sliding member of the present invention.
 本発明の第3の態様は、Ti、V、Nb、Ta、Zr、W、HfおよびMoからなる群から選択された1種類以上の金属を鋼製の基材に浸透させる金属浸透工程と、炭素を基材に浸透させる炭素浸透工程とを有し、炭素浸透工程は、基材に炭素を過共析となる濃度以上浸透させることを特徴とする摺動部材の製造方法である。 According to a third aspect of the present invention, there is provided a metal infiltration step in which one or more kinds of metals selected from the group consisting of Ti, V, Nb, Ta, Zr, W, Hf, and Mo are infiltrated into a steel substrate; A carbon permeation step for permeating carbon into the base material, and the carbon permeation step is a method for producing a sliding member characterized in that the base material is permeated with carbon at a concentration that causes hypereutectoid.
 本発明の第4の態様は、内周面に雌ねじ溝が形成されたナットと、ナットの軸心に配置されると共に外周面に雌ねじ溝に対峙する雄ねじ溝が形成されたラックスクリューと、雌ねじ溝と雄ねじ溝との間に介装された複数個の循環ボールとを有するボールねじ機構と、ボールねじ機構を収納するステアリングギアケースと、ボールねじ機構の駆動に供される電動モータと、電動モータの回転駆動力をナットに伝達する動力伝達機構とを有するパワーステアリング装置の製造方法において、ラックスクリューまたは循環ボールは上記本発明の摺動部材で構成され、摺動部材は、上記本発明の摺動部材の製造方法により製造されることを特徴とするパワーステアリング装置の製造方法である。 According to a fourth aspect of the present invention, there are provided a nut having a female screw groove formed on the inner peripheral surface, a rack screw disposed on the axial center of the nut and having a male screw groove opposed to the female screw groove on the outer peripheral surface, and a female screw. A ball screw mechanism having a plurality of circulating balls interposed between the groove and the male screw groove; a steering gear case that houses the ball screw mechanism; an electric motor that is used to drive the ball screw mechanism; In a method of manufacturing a power steering apparatus having a power transmission mechanism that transmits a rotational driving force of a motor to a nut, a rack screw or a circulating ball is constituted by the sliding member of the present invention, and the sliding member is of the present invention. It is a manufacturing method of a power steering device characterized by being manufactured by a manufacturing method of a sliding member.
 本発明のより具体的な構成は、特許請求の範囲に記載される。 More specific configurations of the present invention are described in the claims.
 本発明によれば、耐久性の低下を抑制しながら、硬度を強化した摺動部材およびその製造方法ならびにパワーステアリング装置およびその製造方法を提供することができる。 According to the present invention, it is possible to provide a sliding member with enhanced hardness while suppressing a decrease in durability, a manufacturing method thereof, a power steering device, and a manufacturing method thereof.
 上記した以外の課題、構成および効果は、以下の実施形態の説明により明らかにされる。 Issues, configurations, and effects other than those described above will be clarified by the following description of embodiments.
実施例1の摺動部材の模式図Schematic diagram of the sliding member of Example 1 実施例1の断面の観察写真Observation photograph of the cross section of Example 1 図2AのA部分(表面付近の部分)に対応する部分のSEM観察写真とEPMAによる元素分析の結果SEM observation photograph of the part corresponding to part A (part near the surface) in FIG. 2A and the result of elemental analysis by EPMA 図2AのB部分(表面から500μm深い部分)に対応する部分のSEM観察写真とEPMAによる元素分析の結果SEM observation photograph of the part corresponding to B part (the part 500 μm deep from the surface) in FIG. 2A and the result of elemental analysis by EPMA 実施例2の摺動部材の模式図Schematic diagram of the sliding member of Example 2 図3Aの点線部分のレーザー顕微鏡観察写真Laser microscope image of the dotted line in Fig. 3A 実施例3の摺動部材の模式図Schematic diagram of the sliding member of Example 3 図4Aの点線部分のレーザー顕微鏡観察写真Laser microscope image of the dotted line in Fig. 4A スラスト疲労試験に用いた装置の模式図Schematic diagram of the equipment used in the thrust fatigue test 比較例1の試験片の模式図Schematic diagram of the test piece of Comparative Example 1 図6Aの組織の観察写真Observation photograph of the tissue in FIG. 6A 比較例2の試験片の模式図Schematic diagram of the test piece of Comparative Example 2 図7AのSEM観察写真SEM observation photograph of Fig. 7A 図7BのEPMAによるマッピングMapping by EPMA in Fig. 7B 比較例3の試験片の模式図Schematic diagram of test piece of Comparative Example 3 図8Aの組織の観察写真Observation photograph of the tissue in Fig. 8A 実施例4~6および比較例1~3のスラスト疲労試験の結果を示すグラフThe graph which shows the result of the thrust fatigue test of Examples 4-6 and Comparative Examples 1-3 実施例4、7~10および比較例1のスラスト疲労試験の結果を示すグラフThe graph which shows the result of the thrust fatigue test of Example 4, 7-10 and the comparative example 1 実施例4、7~10の試験片5とボール6の硬度差と寿命比の関係を示すグラフThe graph which shows the relationship between the hardness difference of the test piece 5 of Example 4, 7-10, and the ball 6, and a life ratio. 電動パワーステアリング装置の断面模式図Cross-sectional schematic diagram of an electric power steering device 図12のボールねじ機構の拡大図Enlarged view of the ball screw mechanism of FIG. ラックスクリュー13へスラリーを塗布する装置の模式図Schematic diagram of apparatus for applying slurry to rack screw 13 実施例11で用いる熱処理装置の模式図Schematic diagram of heat treatment apparatus used in Example 11 実施例11および比較例4の電動パワーステアリング装置の耐久試験結果を示すグラフThe graph which shows the durability test result of the electric power steering apparatus of Example 11 and Comparative Example 4 スラスト疲労試験片をレーザー合金化処理する装置の一例を示す模式図Schematic diagram showing an example of equipment for laser alloying of thrust fatigue test specimens 実施例12の組織の模式図、レーザー合金化領域を示すマイクロスコープで撮影したマクロ写真およびレーザー合金化で構成された詳細組織写真Schematic diagram of the structure of Example 12, a macro photograph taken with a microscope showing a laser alloying region, and a detailed structure photograph composed of laser alloying ラックスクリュー13の外面ねじ部へレーザー合金化処理を施す装置の模式図Schematic diagram of an apparatus that performs laser alloying treatment on the external thread of the rack screw 13 本発明の摺動部材の製造方法の一例を示すフロー図The flowchart which shows an example of the manufacturing method of the sliding member of this invention 鉄-炭素平衡状態図Iron-carbon equilibrium diagram 実施例14の電動パワーステアリング装置のボールねじ機構を構成するラックスクリュー13とボール6とが接触する箇所の拡大図The enlarged view of the location where the rack screw 13 which comprises the ball screw mechanism of the electric power steering apparatus of Example 14 and the ball | bowl 6 contact. 図22のラックスクリュー13の表面を拡大する図The figure which expands the surface of the rack screw 13 of FIG.
 以下、本発明の実施形態について図面を用いて説明する。ただし、ここで取り上げた実施形態に限定されることはなく、発明の要旨を変更しない範囲で適宜組み合わせや改良が可能である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, it is not limited to the embodiment taken up here, and combinations and improvements can be appropriately made without departing from the scope of the invention.
 本発明を以下の実施例1~14に基づいて詳述する。 The present invention will be described in detail based on the following Examples 1 to 14.
 [実施例1]
 図1は実施例1の摺動部材の模式図である。図1に示すように、摺動部材10aは、鋼製の基材4と、基材4に含まれる金属炭化物1および鉄炭化物2を有する。金属炭化物1は基材4の内部で点在しており、鉄炭化物2は基材4の内部で粒子状に点在している。そして、金属炭化物1および鉄炭化物2の体積率は、基材4の表面(気相側の表面)40から内部への深さ方向に沿って減少している。
[Example 1]
FIG. 1 is a schematic diagram of a sliding member according to the first embodiment. As shown in FIG. 1, the sliding member 10 a has a steel base 4 and a metal carbide 1 and an iron carbide 2 contained in the base 4. The metal carbide 1 is scattered inside the base material 4, and the iron carbide 2 is scattered inside the base material 4 in the form of particles. The volume ratios of the metal carbide 1 and the iron carbide 2 are reduced along the depth direction from the surface (surface on the gas phase side) 40 of the substrate 4 to the inside.
 基材4は鋼で構成される。図1では、基材4の金属炭化物1および鉄炭化物2が存在する部分(硬質層、表面強化層などとも称される。)は、マルテンサイト組織を有するマルテンサイト層3を有している。 The base material 4 is made of steel. In FIG. 1, a portion (also referred to as a hard layer, a surface reinforcing layer, etc.) where the metal carbide 1 and the iron carbide 2 of the substrate 4 are present has a martensite layer 3 having a martensite structure.
 また、金属炭化物(硬質粒子)1は金属と炭素(C)とを構成元素として含むものであり、金属はチタン(Ti)、バナジウム(V)、ニオブ(Nb)、タンタル(Ta)、ジルコニウム(Zr)、タングステン(W)、ハフニウム(Hf)およびモリブデン(Mo)からなる群から選択された1種類以上であり、本実施例ではバナジウムである。金属炭化物は、金属と炭素が1対1結合するものであることが好ましい。このような金属炭化物は、硬度が特に高い。 The metal carbide (hard particles) 1 contains metal and carbon (C) as constituent elements, and the metals are titanium (Ti), vanadium (V), niobium (Nb), tantalum (Ta), zirconium ( One or more selected from the group consisting of Zr), tungsten (W), hafnium (Hf), and molybdenum (Mo), and in this embodiment, vanadium. The metal carbide is preferably a one-to-one bond between metal and carbon. Such metal carbide has a particularly high hardness.
 図2Aは実施例1の断面の観察写真である。図2Bは図2AのA部分(表面付近の部分)に対応する表面付近のSEM(Scanning Electron Microscope)観察写真とEPMA(Electron Probe Micro Analyzer)による元素分析の結果である。図2Cは図2AのB部分に対応する部分(表面から500μm深い部分)のSEM観察写真とEPMAによる元素分析の結果である。 2A is an observation photograph of a cross section of Example 1. FIG. FIG. 2B shows the SEM (Scanning Electron Microscope) observation photograph in the vicinity of the surface corresponding to the A portion (part near the surface) in FIG. 2A and the result of elemental analysis by EPMA (Electron Probe Micro Analyzer). FIG. 2C is a SEM observation photograph of a portion corresponding to portion B in FIG. 2A (portion deep by 500 μm from the surface) and the result of elemental analysis by EPMA.
 図2Bから、基材の表面近傍に、金属元素としてバナジウム50と炭素が結合してなるバナジウム炭化物(VC)50と、鉄と炭素が結合してなる鉄炭化物2が、マルテンサイト層3中に粒状に点在していることが分かる。このような粒状の鉄炭化物は、マルテンサイトの成長を阻害し、マルテンサイト層3の粗大化を抑制することができる。一方、針状の鉄炭化物では、マルテンサイト層3の粗大化を抑制し難い。図2Cからは、表面から約500μmの深さで、バナジウム炭化物50と鉄炭化物2が、マルテンサイト層3中に点在していることが分かる。また、図2Bおよび図2Cから、バナジウム炭化物50と鉄炭化物2の体積率は、基材4の表面40から内部への深さ方向に沿って減少している。すなわち、基材4中のバナジウム炭化物50および鉄炭化物2の濃度は、基材4の表面から内部側にかけて減少していることが分かる。 From FIG. 2B, vanadium carbide (VC) 50 formed by combining vanadium 50 and carbon as metal elements and iron carbide 2 formed by combining iron and carbon are present in the martensite layer 3 in the vicinity of the surface of the substrate. It can be seen that it is scattered in granular form. Such granular iron carbide can inhibit the growth of martensite and suppress the coarsening of the martensite layer 3. On the other hand, in the case of acicular iron carbide, it is difficult to suppress the coarsening of the martensite layer 3. FIG. 2C shows that vanadium carbide 50 and iron carbide 2 are scattered in the martensite layer 3 at a depth of about 500 μm from the surface. Moreover, from FIG. 2B and FIG. 2C, the volume ratio of the vanadium carbide 50 and the iron carbide 2 is decreasing along the depth direction from the surface 40 of the base material 4 to the inside. That is, it can be seen that the concentrations of vanadium carbide 50 and iron carbide 2 in the substrate 4 decrease from the surface of the substrate 4 to the inside.
 上述した構成により、摺動部材を構成する部品の硬度差を一定値以下に抑え、硬化層の厚さを、ヘルツの接触理論から導かれる最大せん断応力が生じる深さより十分に深くし、かつ、研削加工代を十分に上回る硬化層を有する摺動部材を得ることができる。 With the above-described configuration, the hardness difference of the parts constituting the sliding member is suppressed to a certain value or less, the thickness of the hardened layer is sufficiently deeper than the depth at which the maximum shear stress derived from Hertz's contact theory occurs, and A sliding member having a hardened layer sufficiently exceeding the grinding allowance can be obtained.
 摺動部材は、例えば後述するパワーステアリング装置のラックスクリュー、ボールおよびナットに用いることができる。ラックスクリューとボール、ボールとナットがそれぞれ力を付加された状態で接しているため、接する二部材の硬度差が大きい場合、一方がもう一方の部材を損傷させる場合がある。すなわち、荷重を受けることで生じるヘルツの接触理論から導かれるヘルツの最大応力は、ボールねじの幾何学形状から、ラックスクリューとボールが最も大きく、ナットはそれより小さくなる。このため、ラックスクリューを強化部品として硬質粒子を点在させる表面処理を施し硬度を高くすると、相対部品であるボールが損傷する可能性がでてくる。 The sliding member can be used for, for example, a rack screw, a ball and a nut of a power steering device which will be described later. Since the rack screw and the ball, and the ball and the nut are in contact with each other with a force applied thereto, if the difference in hardness between the two members in contact is large, one of the members may damage the other member. In other words, the maximum Hertz stress derived from Hertz's contact theory generated by receiving a load is the largest for the rack screw and ball and the nut is smaller than that due to the geometry of the ball screw. For this reason, when the surface treatment which makes a rack screw a reinforcement | strengthening part and to which a hard particle is scattered is given and hardness is made high, the ball | bowl which is a relative part may be damaged.
 上記背景から、摺動部材を構成する部品の硬度差を一定値以下に抑えるためには、硬質層の硬度を任意に調整できる必要がある。本実施例の摺動部材10aは、硬質層の母材となるマルテンサイト層(ビッカース硬さ:500Hv~800Hv)と、マルテンサイト層中に分散した金属炭化物1(ビッカース硬さ:約2500Hv)と、同じくマルテンサイト層中に分散する鉄炭化物2(ビッカース硬さ:約1200Hv)を含有し、金属炭化物1および鉄炭化物2の含有量や、金属炭化物1と鉄炭化物2の含有比率を調整することで、硬質層の硬度を調整できる。具体的には、摺動部材10aの製造において、金属元素の浸透条件と炭素の浸透条件を調整することで、基材4中への金属元素および炭素の浸透量を制御し、金属炭化物1と鉄炭化物2の含有量を調整できる。 In view of the above background, it is necessary to be able to arbitrarily adjust the hardness of the hard layer in order to suppress the hardness difference of the parts constituting the sliding member to a certain value or less. The sliding member 10a of this example includes a martensite layer (Vickers hardness: 500 Hv to 800 Hv) serving as a base material of a hard layer, and a metal carbide 1 (Vickers hardness: about 2500 Hv) dispersed in the martensite layer. Also, containing iron carbide 2 (Vickers hardness: about 1200 Hv) dispersed in the martensite layer, adjusting the content of metal carbide 1 and iron carbide 2 and the content ratio of metal carbide 1 and iron carbide 2 Thus, the hardness of the hard layer can be adjusted. Specifically, in the manufacture of the sliding member 10a, the metal element 1 and the carbon infiltration conditions are controlled by adjusting the metal element infiltration conditions and the carbon infiltration conditions. The content of iron carbide 2 can be adjusted.
 単純に金属炭化物の量を減らすことでも硬さを調節することも可能だが、この場合、金属炭化物同士の距離が大きくなるためアンカー効果が小さくなってしまう。ここでアンカー効果とは、鋼材の組織が成長する際に、粒状の粒子がアンカーとして作用してこの成長・粗大化を抑えること効果である。組織の粗大化を抑制することにより、部分的に強度が弱い部分が生じることを防ぐことができる。金属炭化物の量を減らす一方で、金属炭化物1と基材4のマルテンサイト層3との中間硬度をもつ鉄炭化物2を添加することで、アンカー効果の低下による耐久性低下を抑制しながら、必要な硬度に調節することができる。 It is possible to adjust the hardness by simply reducing the amount of metal carbide, but in this case, the anchor effect is reduced because the distance between the metal carbides increases. Here, the anchor effect is an effect of suppressing the growth and coarsening by causing the granular particles to act as anchors when the steel structure grows. By suppressing the coarsening of the tissue, it is possible to prevent a portion having a weak strength from being partially generated. While reducing the amount of metal carbide, it is necessary to add iron carbide 2 having intermediate hardness between metal carbide 1 and martensite layer 3 of base material 4 while suppressing deterioration in durability due to reduction in anchor effect. The hardness can be adjusted.
 ここで、上記アンカー効果を奏するために鉄炭化物は粒状で存在する必要があり、例えば、鋼材中にもともと含まれる可能性のある層状・針状の組織であるパーライトおよびセメンタイト等では不十分である。粒状の鉄炭化物の直径は、例えば0.5μ以上5μm以下(鋼材組織の粒界であれば1μ以上5μm以下、粒内であれば0.5μm以上1μm以下)であり、アスペクト比は1以上5以下である。 Here, in order to exhibit the anchor effect, the iron carbide needs to be present in a granular form. For example, pearlite and cementite, which are layered and needle-like structures that may be originally included in steel materials, are insufficient. . The diameter of the granular iron carbide is, for example, 0.5 μm or more and 5 μm or less (1 μm or more and 5 μm or less if the grain boundary of the steel structure, 0.5 μm or more and 1 μm or less if it is within the grain), and the aspect ratio is 1 or more and 5 or less. It is as follows.
 なお、鉄炭化物2を生成するには、過共析となる濃度(炭素が約0.8重量%以上)以上の炭素を浸透させる必要がある。図21は鉄-炭素平衡状態図である。図21に示すように、過共析以上の状態のオーステナイト状態から浸炭してAcm線以下まで冷却し、固溶しきれない炭素を析出させて、焼き入れ工程により固定することで粒状の鉄炭化物を設けることができる。ここで、A1変態点(約727℃)より大きい点(例えば850℃)まで下げる方法(図21中の(1))と、一度、A1変態点(例えば600℃)以下の点まで下げてから850℃まで再加熱する方法(図21中の(2))のいずれを用いてもよい。それぞれの工程は、後述する実施例1および実施例11で説明する。ここで、金属元素Ti、Nb、V、Zr、Wが高硬度の金属炭化物1を構成するためより好適である。摺動部材の硬質層の硬度差は、ビッカース硬さで約200Hv以内が好適である。 In addition, in order to produce | generate iron carbide 2, it is necessary to osmose | permeate the carbon more than the density | concentration (carbon is about 0.8 weight% or more) used as hypereutectoid. FIG. 21 is an iron-carbon equilibrium diagram. As shown in FIG. 21, granular iron carbide is obtained by carburizing from the austenite state of hypereutectoid or higher, cooling to Acm line or lower, precipitating carbon that cannot be completely dissolved, and fixing by a quenching process. Can be provided. Here, a method of lowering to a point (for example, (1) in FIG. 21) higher than the A1 transformation point (about 727 ° C.) (for example, (1) in FIG. 21) and once lowering to a point below the A1 transformation point (for example, 600 ° C.). Any of the methods of reheating to 850 ° C. ((2) in FIG. 21) may be used. Each step will be described in Example 1 and Example 11 described later. Here, the metal elements Ti, Nb, V, Zr, and W are more preferable because they constitute the metal carbide 1 having high hardness. The hardness difference of the hard layer of the sliding member is preferably about 200 Hv or less in terms of Vickers hardness.
 図20は本発明の摺動部材の製造方法の一例を示すフロー図である。本発明の摺動部材の製造方法は、図20に示すように、基材に金属を含むスラリーを塗布する工程(S1)と、熱処理をして基材に金属を浸透(拡散)させる工程(S3)と、炭素を含むガスを導入する工程(S3)と、熱処理をして基材に炭素を浸透させる工程(S4)とを有する。以下、図1~図2Cに示す組織を有する摺動部材の作製法の一例を示す。 FIG. 20 is a flowchart showing an example of the manufacturing method of the sliding member of the present invention. As shown in FIG. 20, the manufacturing method of the sliding member of the present invention includes a step (S1) of applying a slurry containing metal to a base material, and a step (permeation) of the metal to the base material by heat treatment ( S3), a step of introducing a gas containing carbon (S3), and a step of heat-treating the base material with carbon (S4). Hereinafter, an example of a method for manufacturing a sliding member having the structure shown in FIGS. 1 to 2C will be described.
 基材4を構成する材料は、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cで、約0.45質量パーセントの炭素Cを含む鉄鋼材である。基材4として、外径10mm、長さ50mmの丸棒試料を用いた。 The material constituting the base material 4 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C. A round bar sample having an outer diameter of 10 mm and a length of 50 mm was used as the substrate 4.
 2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させスラリーを作製した。作製したスラリーに、S45C丸棒試料を浸漬し、S45C丸棒試料の外表面にスラリー膜を構成した。S45C丸棒試料外表面を、高周波で、バナジウムが約500μm拡散するように加熱・保持した。本実施例の場合は、温度:1300℃、保持時間:5分である。その後、浸炭ガスを流し、S45C丸棒試料外表面に炭素を約500μm拡散させた。本実施例の場合は、温度:1200℃、保持時間:5分で、浸炭ガスにはアセチレンを用いた。 In 2-butanone, vanadium powder having an average particle diameter of 50 μm and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry. An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample. The outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 μm. In this embodiment, the temperature is 1300 ° C. and the holding time is 5 minutes. Thereafter, carburizing gas was flowed to diffuse about 500 μm of carbon on the outer surface of the S45C round bar sample. In the case of this example, the temperature was 1200 ° C., the holding time was 5 minutes, and acetylene was used as the carburizing gas.
 その後、S45C丸棒試験片の温度を約850℃まで低下させ、水溶性焼入れ油をS45C丸棒試験片の外表面に噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持:時間90分で実施した。焼戻しを行うことで、じん性を向上することができる。このS45C丸棒試料を切断研磨して上述した観察試料として調整した。 After that, the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. The toughness can be improved by tempering. This S45C round bar sample was cut and polished to prepare the observation sample described above.
 バナジウムおよび炭素の浸透経路は主に粒界となるため、粒界へのバナジウム炭化物および鉄炭化物2の選択的な生成を防止するために、バナジウムを温度:1300℃、保持時間:5分、炭素を温度:1200℃、保持時間:5分浸透させた後、温度を鉄-炭素系平行状態図のA1変態点(約727℃)未満の温度、例えば600℃まで低下させた後、850℃まで再加熱し焼入れを実施することがより好適である。 Since the penetration path of vanadium and carbon is mainly a grain boundary, in order to prevent the selective formation of vanadium carbide and iron carbide 2 at the grain boundary, the vanadium is heated at a temperature of 1300 ° C., a holding time of 5 minutes, and carbon. , 1200 ° C., holding time: 5 minutes, and then the temperature is lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram (eg, about 727 ° C.), for example, 600 ° C. It is more preferable to reheat and quench.
 また、表面から約50μm深い位置における断面のビッカース硬さは850Hvから950Hvであった。本実施例では、金属元素としてバナジウムを用いた例を示したが、バナジウムと同様に高硬度の金属炭化物を構成するチタン、ニオブ、タンタルジルコニウム、タングステン、ハフニウム及びモリブデンからなる群から選択された1種類以上の金属元素を用いても良い。 Moreover, the Vickers hardness of the cross section at a position about 50 μm deep from the surface was 850 Hv to 950 Hv. In this example, vanadium was used as the metal element. However, as in the case of vanadium, 1 selected from the group consisting of titanium, niobium, tantalum zirconium, tungsten, hafnium, and molybdenum constituting a high-hardness metal carbide. More than one kind of metal element may be used.
 [実施例2]
 図3Aは実施例2の摺動部材の一例を示す模式図であり、図3Bは図3Aの点線部分のレーザー顕微鏡観察写真である。実施例2に示す摺動部材10bは、実施例1と同様に、基材4のマルテンサイト層3中に点在する金属炭化物1と鉄炭化物2を有し、金属炭化物1および鉄炭化物2の体積率は、基材4の表面40から内部への深さ方向に沿って減少している。さらに、鉄炭化物2は、基材4の内部において、金属炭化物1よりも深い部分(図3Aの点線で囲んだ部分)に存在している。摺動部材10bでは、表面から鉄炭化物2が存在している層までが硬質層となる。
[Example 2]
3A is a schematic diagram illustrating an example of the sliding member of Example 2, and FIG. 3B is a laser microscope observation photograph of the dotted line portion of FIG. 3A. The sliding member 10b shown in Example 2 has the metal carbide 1 and the iron carbide 2 scattered in the martensite layer 3 of the base material 4 similarly to Example 1, and the metal carbide 1 and the iron carbide 2 The volume ratio decreases along the depth direction from the surface 40 of the substrate 4 to the inside. Further, the iron carbide 2 exists in a portion deeper than the metal carbide 1 (a portion surrounded by a dotted line in FIG. 3A) inside the base material 4. In the sliding member 10b, the hard layer extends from the surface to the layer where the iron carbide 2 exists.
 図3Bに、鉄炭化物2が金属炭化物1よりも基材の内部側まで浸透した部分の様子を示している。図3Bは図3Aの基材4の点線部分を、鉄炭化物2がエッチングされやすいピクリン酸ソーダでエッチングしたレーザー顕微鏡写真である。図3Bに示すように、マルテンサイト層3中に、黒くエッチングされた鉄炭化物2が点在していることが分かる。 FIG. 3B shows a state where the iron carbide 2 has penetrated to the inside of the base material more than the metal carbide 1. FIG. 3B is a laser micrograph obtained by etching the dotted line portion of the base material 4 of FIG. 3A with sodium picrate soda that the iron carbide 2 is easily etched. As shown in FIG. 3B, it can be seen that iron carbides 2 etched in black are scattered in the martensite layer 3.
 金属元素は、基材中への浸透距離が炭素より短いため、金属元素の浸透で生成する金属炭化物粒子と鉄炭化物粒子とを含む硬質層を十分厚くすることは工業的には現実的でない場合がある。そこで、金属炭化物粒子と鉄炭化物粒子の両方を含む硬質層は必要最低限の厚さに抑え、その硬質層の内側に、マルテンサイト中に鉄元素と炭素が結合して成る鉄炭化物粒子が分散して成る硬化層を設けることの方が、工業的には現実的である。すなわち、浸透に時間がかかる金属炭化物は表面付近に留め、浸透が容易な鉄炭化物をその奥まで浸透させて目的の強度を達成させることにより、金属炭化物粒子と鉄炭化物粒子を同じ深さまで浸透させるよりも製造時間を短くすることができる。 When the metal element has a shorter penetration distance into the substrate than carbon, it is not practically practical to make the hard layer containing metal carbide particles and iron carbide particles generated by the metal element penetration sufficiently thick There is. Therefore, the hard layer containing both metal carbide particles and iron carbide particles is suppressed to the minimum necessary thickness, and iron carbide particles composed of iron element and carbon bonded in martensite are dispersed inside the hard layer. It is industrially realistic to provide the hardened layer. In other words, metal carbide that takes a long time to penetrate is retained near the surface, and iron carbide that is easy to penetrate penetrates deep into the interior to achieve the desired strength, thereby allowing the metal carbide particles and iron carbide particles to penetrate to the same depth. Manufacturing time can be shortened.
 金属炭化物粒子と鉄炭化物を含む硬化層は、ヘルツの接触理論から導かれる最大せん断応力が生じる深さより十分に深くし、かつ、研削加工代を十分に上回る表面強化層厚さとすることが望ましく、研削加工代と、ヘルツの接触理論から導かれる最大せん断応力が生じる深さの2倍程度以上を加えた厚さが好適である。 It is desirable that the hardened layer containing metal carbide particles and iron carbide is sufficiently deeper than the depth at which the maximum shear stress derived from Hertz's contact theory is generated, and has a surface enhancement layer thickness sufficiently exceeding the grinding allowance, A thickness obtained by adding about 2 times or more of the depth at which the maximum shearing stress derived from the grinding allowance and Hertz's contact theory occurs is preferable.
 以下、図3Aおよび図3Bに示す組織を有する摺動部材の作製法の一例を示す。基材4を構成する材料は、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cで、約0.45質量パーセントの炭素を含む鉄鋼材である。基材として、外径10mm、長さ50mmの丸棒試料を用いた。 Hereinafter, an example of a method for producing a sliding member having the structure shown in FIGS. 3A and 3B will be described. The material which comprises the base material 4 is the steel material S45C for mechanical structures prescribed | regulated by Japanese Industrial Standards JISG4501, and is a steel material containing about 0.45 mass percent carbon. A round bar sample having an outer diameter of 10 mm and a length of 50 mm was used as the substrate.
 2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させスラリーを作製した。作製したスラリーに、S45C丸棒試料を浸漬し、S45C丸棒試料の外表面にスラリー膜を構成した。S45C丸棒試料外表面を、高周波で、バナジウムが約500μm拡散するように加熱・保持した。本実施例の場合は、温度:1300℃で保持時間:5分である。その後、浸炭ガスを流し、S45C丸棒試料外表面に炭素Cを約1000μm拡散させた。本実施例の場合は、温度:1200℃で保持時間:20分で、浸炭ガスにはアセチレンを用いた。実施例1と比較すると、炭素の浸透時間を5分から20分に増加させている。これは、鉄炭化物2を金属炭化物1より深く浸透させるための処理である。 In 2-butanone, vanadium powder having an average particle diameter of 50 μm and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry. An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample. The outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 μm. In this example, the temperature is 1300 ° C. and the holding time is 5 minutes. Then, carburizing gas was flowed, and carbon C was diffused by about 1000 μm on the outer surface of the S45C round bar sample. In the case of this example, the temperature was 1200 ° C., the holding time was 20 minutes, and acetylene was used as the carburizing gas. Compared to Example 1, the carbon penetration time was increased from 5 minutes to 20 minutes. This is a treatment for allowing the iron carbide 2 to penetrate deeper than the metal carbide 1.
 その後、S45C丸棒試験片の温度を約850℃まで低下させ、水溶性焼入れ油をS45C丸棒試験片の外表面に噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。このS45C丸棒試料を切断研磨して上述した観察試料として調整した。 After that, the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. This S45C round bar sample was cut and polished to prepare the observation sample described above.
 バナジウムおよび炭素の浸透経路は主に粒界となるため、粒界へのバナジウム炭化物および鉄炭化物の選択的な生成を防止するために、バナジウムを温度:1300℃、保持時間:5分、炭素を温度:1200℃、保持時間:20分浸透させた後、温度を鉄-炭素系平行状態図のA1変態点(約727℃)未満の温度、例えば600℃まで低下させた後、850℃まで再加熱し焼入れを実施することがより好適である。 Since the penetration path of vanadium and carbon is mainly a grain boundary, in order to prevent the selective formation of vanadium carbide and iron carbide at the grain boundary, vanadium is heated at a temperature of 1300 ° C., a holding time of 5 minutes, Temperature: 1200 ° C., holding time: 20 minutes After soaking, the temperature is lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram (about 727 ° C.), for example, 600 ° C. It is more preferable to carry out heating and quenching.
 また、表面から約50μm深い位置における断面のビッカース硬さは850Hvから950Hvであった。鉄炭化物2が金属炭化物1よりも基材の内部側まで浸透している表面から約600μm深い位置における断面のビッカース硬さは750Hv~850Hvであった。 Moreover, the Vickers hardness of the cross section at a position about 50 μm deep from the surface was 850 Hv to 950 Hv. The Vickers hardness of the cross section at a position about 600 μm deep from the surface where the iron carbide 2 penetrates to the inside of the base material than the metal carbide 1 was 750 Hv to 850 Hv.
 [実施例3]
 図4Aは実施例3の摺動部材の一例を示す模式図であり、図4Bは図4Aの点線部分のレーザー顕微鏡観察写真である。図4Aに示すように、摺動部材10cは、基材を構成するマルテンサイト層3と、マルテンサイト層3に含まれる金属炭化物1および鉄炭化物2を有し、金属炭化物1および鉄炭化物2の体積率は、基材の表面から内部への深さ方向に沿って減少している。さらに、金属炭化物1および鉄炭化物2が存在する層よりもさらに深い部分までマルテンサイト層3が形成されている。摺動部材10cでは、表面から金属炭化物1および鉄炭化物2が存在する層よりもさらに深い部分まで形成されたマルテンサイト層3までが硬質層となる。
[Example 3]
4A is a schematic diagram illustrating an example of the sliding member of Example 3, and FIG. 4B is a laser microscope observation photograph of the dotted line portion of FIG. 4A. As shown in FIG. 4A, the sliding member 10c has a martensite layer 3 constituting the base material, and a metal carbide 1 and an iron carbide 2 contained in the martensite layer 3, and the metal carbide 1 and the iron carbide 2 The volume ratio decreases along the depth direction from the surface of the substrate to the inside. Furthermore, the martensite layer 3 is formed to a deeper part than the layer in which the metal carbide 1 and the iron carbide 2 exist. In the sliding member 10c, the hard layer extends from the surface to the martensite layer 3 formed to a deeper portion than the layer in which the metal carbide 1 and the iron carbide 2 are present.
 図4Bは図4Aの基材4の点線部分を、鉄炭化物2がエッチングされやすいピクリン酸ソーダでエッチングしたレーザー顕微鏡写真である。図4Bに示すように、黒くエッチングされた針状のマルテンサイト層3が存在することが分かる。 FIG. 4B is a laser micrograph obtained by etching the dotted line portion of the base material 4 in FIG. 4A with sodium picrate acid so that the iron carbide 2 is easily etched. As shown in FIG. 4B, it can be seen that there is a needle-like martensite layer 3 etched in black.
 金属炭化物1と鉄炭化物2を有する硬化層と、その内側の鉄炭化物を有する層と、さらに、その内側にマルテンサイトからなる硬化層を設けることで、金属炭化物1と鉄炭化物2を有する硬化層と、その内側の鉄炭化物2を有する層の厚さの自由度が増加する。また、金属炭化物および鉄炭化物が浸透していない箇所を残して必要な硬度に調節することで、製造工程の簡略化および高強度化を図ることができる。 A hardened layer having metal carbide 1 and iron carbide 2 by providing a hardened layer having metal carbide 1 and iron carbide 2, a layer having iron carbide inside thereof, and a hardened layer made of martensite inside thereof. And the freedom degree of the thickness of the layer which has the iron carbide 2 inside it increases. Moreover, the manufacturing process can be simplified and the strength can be increased by adjusting the required hardness while leaving a portion where the metal carbide and iron carbide do not penetrate.
 すなわち、金属炭化物1と鉄炭化物2を有する硬化層を構成するためには、金属元素と炭素を浸透させる必要があり、浸透量と浸透深さは温度と時間で支配されるから、必要硬さおよび必要最低限の厚さに抑えることが工業的である。同様に、鉄炭化物2を有する硬化層を構成するためには炭素を浸透させる必要があり、浸透量と浸透深さは温度と時間で支配されるから、必要硬さおよび必要最低限の厚さに抑えることが工業的である。 That is, in order to construct a hardened layer having metal carbide 1 and iron carbide 2, it is necessary to infiltrate the metal element and carbon, and the amount of penetration and the depth of penetration are governed by temperature and time. And it is industrial to keep it to the minimum necessary thickness. Similarly, in order to construct a hardened layer having iron carbide 2, it is necessary to infiltrate carbon, and since the amount of penetration and the depth of penetration are governed by temperature and time, the required hardness and the minimum thickness required It is industrial to keep it down.
 そのため、金属炭化物1と鉄炭化物2を有する硬化層と、鉄炭化物2を有する硬化層の内部の組織が母材なみに軟らかい場合は、軟質層の上に金属炭化物1と鉄炭化物2を有する硬化層と、鉄炭化物2を有する硬化層が構成された状態であり、金属炭化物1と鉄炭化物2を有する硬化層と、鉄炭化物2を有する硬化層が摺動で働く荷重に抗したとしても、鉄炭化物2を有する硬化層の内側の母材なみに柔らかい組織が疲労破壊することが起こりうる。これを例えると、豆腐の上に鉄板をおいて鉄板の上に重量物を載せて摺動させるような形態である。 Therefore, when the hardened layer having the metal carbide 1 and the iron carbide 2 and the internal structure of the hardened layer having the iron carbide 2 are as soft as the base material, the hardening having the metal carbide 1 and the iron carbide 2 on the soft layer. Even if the hardened layer having the layer and the iron carbide 2 is configured, and the hardened layer having the metal carbide 1 and the iron carbide 2 and the hardened layer having the iron carbide 2 resist the load acting on sliding, It can happen that a soft structure is fatigued and destroyed like a base material inside a hardened layer having iron carbide 2. For example, an iron plate is placed on tofu and a heavy object is placed on the iron plate and slid.
 このことから、より工業的な成立性を考慮すると、金属炭化物1と鉄炭化物2を有する硬化層と、鉄炭化物2を有する硬化層の内部にマルテンサイトから成る硬化層を設ける構成が好適である。マルテンサイトから成る硬化層は焼入れで容易に構成することができる。マルテンサイトから成る硬化層を構成する主要元素は炭素であり、例えば、炭素を0.15質量パーセント以上含有する鋼であれば、焼入れによりマルテンサイトから成る硬化層を構成できる。 From this, considering the industrial feasibility, a configuration in which a hardened layer having metal carbide 1 and iron carbide 2 and a hardened layer made of martensite inside the hardened layer having iron carbide 2 is preferable. . A hardened layer made of martensite can be easily formed by quenching. The main element constituting the hardened layer made of martensite is carbon. For example, if the steel contains 0.15% by mass or more of carbon, the hardened layer made of martensite can be formed by quenching.
 また、マルテンサイトから成る硬化層厚さは、合金元素、例えばマンガン、クロム、ニッケルおよびモリブデンなどの焼入れ性を向上させる元素を所定量含有する鋼製の基材であれば、含有量に応じてマルテンサイトから成る硬化層厚さを調整できる。また、炭素が0.15質量パーセントを下回るような鋼製の基材であれば、炭素を鋼製の基材の必要深さまで浸透させることでマルテンサイトから成る硬化層を構成できる。 In addition, the thickness of the hardened layer made of martensite is a steel base material containing a predetermined amount of an alloy element such as manganese, chromium, nickel and molybdenum for improving the hardenability. The thickness of the hardened layer composed of martensite can be adjusted. Moreover, if it is a steel base material in which carbon is less than 0.15 mass percent, the hardening layer which consists of a martensite can be comprised by infiltrating carbon to the required depth of a steel base material.
 以下、図4Aおよび図4Bに示す組織を有する摺動部材の作製法の一例を示す。基材4を構成する材料は、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cで、約0.45質量パーセントの炭素Cを含む鉄鋼材である。基材として、外径10mm、長さ50mmの丸棒試料を用いた。 Hereinafter, an example of a method for producing a sliding member having the structure shown in FIGS. 4A and 4B will be described. The material constituting the base material 4 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C. A round bar sample having an outer diameter of 10 mm and a length of 50 mm was used as the substrate.
 2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させスラリーを作製した。作製したスラリーに、S45C丸棒試料を浸漬し、S45C丸棒試料の外表面にスラリー膜を構成した。S45C丸棒試料外表面を、高周波で、バナジウムが約500μm拡散するように加熱・保持した。本実施例の場合は、温度:1300℃、保持時間:5分である。その後、浸炭ガスを流し、S45C丸棒試料外表面に炭素を約2000μm拡散させた。本実施例の場合は、温度:1200℃、保持時間:80分で、浸炭ガスにはアセチレンを用いた。 In 2-butanone, vanadium powder having an average particle diameter of 50 μm and benzotriador were mixed with 20% by mass and 5% by mass of epoxy, respectively, to prepare a slurry. An S45C round bar sample was immersed in the prepared slurry, and a slurry film was formed on the outer surface of the S45C round bar sample. The outer surface of the S45C round bar sample was heated and held at a high frequency so that vanadium diffused by about 500 μm. In this embodiment, the temperature is 1300 ° C. and the holding time is 5 minutes. Thereafter, a carburizing gas was flowed to diffuse about 2000 μm of carbon on the outer surface of the S45C round bar sample. In this example, the temperature was 1200 ° C., the holding time was 80 minutes, and acetylene was used as the carburizing gas.
 実施例2と比較すると、炭素の浸透時間を20分から80分に増加させている。これは、鉄炭化物2を金属炭化物1より深く浸透し、更に、その内部にマルテンサイト層3を構成させるための処理である。ここで、マルテンサイト層3の炭素濃度は、共析以下(炭素が約0.8質量%以下)の炭素を浸透させることで、粒子状の鉄炭化物を生成させないことが可能である。炭素濃度の制御は、浸炭ガスのガス量の調整で可能である。 Compared with Example 2, the carbon penetration time was increased from 20 minutes to 80 minutes. This is a treatment for penetrating the iron carbide 2 deeper than the metal carbide 1 and further forming the martensite layer 3 therein. Here, the carbon concentration of the martensite layer 3 can be prevented from generating particulate iron carbide by permeating carbon below eutectoid (carbon is about 0.8 mass% or less). The carbon concentration can be controlled by adjusting the amount of carburizing gas.
 その後、S45C丸棒試験片の温度を約850℃まで低下させ、水溶性焼入れ油をS45C丸棒試験片の外表面に噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。このS45C丸棒試料を切断研磨して上述した観察試料として調整した。 After that, the temperature of the S45C round bar test piece was lowered to about 850 ° C., and water-soluble quenching oil was sprayed onto the outer surface of the S45C round bar test piece to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. This S45C round bar sample was cut and polished to prepare the observation sample described above.
 バナジウムおよび炭素の浸透経路は主に粒界となるため、粒界へのバナジウム炭化物および鉄炭化物の選択的な生成を防止するために、バナジウムVを温度:1300℃で保持時間:5分、炭素を温度:1200℃で保持時間:80分浸透させた後、温度を鉄-炭素系平行状態図のA1変態点(約727℃)未満の温度、例えば600℃まで低下させた後
、850℃まで再加熱し焼入れを実施することがより好適である。
Since the permeation path of vanadium and carbon is mainly a grain boundary, in order to prevent the selective formation of vanadium carbide and iron carbide at the grain boundary, vanadium V is maintained at a temperature of 1300 ° C. and a holding time of 5 minutes. Was allowed to permeate at a temperature of 1200 ° C. and a holding time of 80 minutes, and then the temperature was lowered to a temperature below the A1 transformation point (about 727 ° C.) of the iron-carbon parallel phase diagram, for example, 600 ° C. It is more preferable to reheat and quench.
 また、表面から約50μm深い位置におけるビッカース硬さは850Hv~950Hvであった。鉄炭化物2が金属炭化物1よりも基材の内部側まで浸透した表面から約600μm深い位置における断面のビッカース硬さは750Hv~850Hvであった。表面から1100μm深い位置におけるマルテンサイト層3の断面のビッカース硬さは550Hv~700Hvであった。 The Vickers hardness at a position about 50 μm deep from the surface was 850 Hv to 950 Hv. The Vickers hardness of the cross section at a position about 600 μm deeper from the surface in which the iron carbide 2 penetrated to the inside of the substrate than the metal carbide 1 was 750 Hv to 850 Hv. The Vickers hardness of the cross section of the martensite layer 3 at a position 1100 μm deep from the surface was 550 Hv to 700 Hv.
 [実施例4~6および比較例1~3]
 上述した実施例1~3の効果をスラスト疲労試験で確認した。図5はスラスト疲労試験に用いた装置の模式図である。スラスト疲労試験は、スラスト軸受けを模擬した試験方法である。試験片5は、表面処理の疲労強度を評価する試験片で、評価する表面処理を施してある。試験片5の大きさは、外径が57mm、厚さが5mmである。ボール6は、スラスト軸受けで使用されるボールである。今回の試験では、ボール径3/8インチ、ボール数3個で120°置きに配置した。ボール6が転がる軌道の直径は38.5mmである。ボール6の材質は、日本工業規格JIS G 4805で規定される高炭素クロム軸受け鋼SUJ2である。
[Examples 4 to 6 and Comparative Examples 1 to 3]
The effects of Examples 1 to 3 described above were confirmed by a thrust fatigue test. FIG. 5 is a schematic view of an apparatus used for the thrust fatigue test. The thrust fatigue test is a test method that simulates a thrust bearing. The test piece 5 is a test piece for evaluating the fatigue strength of the surface treatment, and is subjected to the surface treatment to be evaluated. The test piece 5 has an outer diameter of 57 mm and a thickness of 5 mm. The ball 6 is a ball used in a thrust bearing. In this test, the ball diameter was 3/8 inch and the number of balls was 3 and arranged every 120 °. The diameter of the track on which the ball 6 rolls is 38.5 mm. The material of the ball 6 is high carbon chrome bearing steel SUJ2 defined by Japanese Industrial Standard JIS G 4805.
 今回の試験に用いたSUJ2ボール6の表面から50μm深い位置の断面のビッカース硬さは720Hv~780Hvの範囲であった。外輪7はスラスト軸受けの外輪で市販品を流用した。試験片5とボール6および外輪7を試験槽8にセットし、潤滑油9を試験槽8に入れ、試験装置本体(図示せず)にセットし、所定の試験面圧になるように荷重10を負荷した後、試験装置本体のモータ(図示せず)を用いて回転11を与えて、試験片5に損傷が生じる回数Nと試験面圧Pの関係を疲労特性として取得した。なお、潤滑油9はナフテン系の動粘度8.46mm2/S(40℃)を用いた。試験面圧はヘルツの接触理論から求められるヘルツの最大応力である。スラスト疲労試験は、全部で以下の6種類の試験片に対して実施した。 The Vickers hardness of the cross section at a position 50 μm deep from the surface of the SUJ2 ball 6 used in this test was in the range of 720 Hv to 780 Hv. The outer ring 7 was a thrust bearing outer ring and a commercially available product was used. The test piece 5, the ball 6 and the outer ring 7 are set in the test tank 8, the lubricating oil 9 is put in the test tank 8, set in the test apparatus main body (not shown), and a load 10 so as to obtain a predetermined test surface pressure. Then, rotation 11 was applied using a motor (not shown) of the test apparatus main body, and the relationship between the number N of times the test piece 5 was damaged and the test surface pressure P was obtained as fatigue characteristics. As the lubricating oil 9, a naphthenic kinematic viscosity of 8.46 mm2 / S (40 ° C.) was used. The test surface pressure is the maximum Hertz stress determined from Hertz's contact theory. The thrust fatigue test was performed on the following six types of test pieces in total.
 実施例4:実施例1に対応する試験片
 実施例5:実施例2に対応する試験片
 実施例6:実施例3に対応する試験片
 比較例1:基準寿命となる高周波焼入れ試験片
 比較例2:実施例4で、バナジウムを浸透させ、炭素を浸透させない試験片
 比較例3:実施例5で、バナジウムを浸透させず、炭素のみ浸透させた試験片 
 試験片の基材は、いずれも、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cで、約0.45質量パーセントの炭素Cを含む鉄鋼材である。
Example 4: Specimen corresponding to Example 1 Example 5: Specimen corresponding to Example 2 Example 6: Specimen corresponding to Example 3 Comparative example 1: Induction-hardened test piece having a reference life Comparative example 2: Test piece in which vanadium was infiltrated in Example 4 but not infiltrated with carbon Comparative Example 3: Test piece in which vanadium was not infiltrated in Example 5 and only carbon was infiltrated
The base material of the test piece is a steel material S45C for machine structural use specified by Japanese Industrial Standard JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C.
 実施例4は、実施例1に対応する試験片である。試験片5の表面に、2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させたスラリーを浸漬し、スラリー膜を構成した。高周波加熱により、バナジウムが約500μm拡散するように温度:1300℃、保持時間:5分とした。温度を1200℃まで低下させ、炭素Cが約500μm拡散するように浸炭ガスを流した状態で5分保持した。浸炭ガスにはアセチレンを用いた。温度を600℃まで低下させた後、850℃まで再加熱し、試験片5の試験片に水溶性焼入れ油を噴射し焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。 Example 4 is a test piece corresponding to Example 1. A slurry in which vanadium powder having an average particle size of 50 μm and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did. By high frequency heating, the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 μm. The temperature was lowered to 1200 ° C., and maintained for 5 minutes in a state where a carburizing gas was supplied so that carbon C diffused by about 500 μm. Acetylene was used as the carburizing gas. After the temperature was lowered to 600 ° C., the sample was reheated to 850 ° C., and quenching was performed by spraying water-soluble quenching oil on the test piece 5. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。表面から約50μm深さにおける断面のビッカース硬さは850Hv~950Hvで、硬化層深さ(硬化層の膜厚)は2mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface was 850 Hv to 950 Hv, and the hardened layer depth (hardened layer thickness) was 2 mm.
 実施例5は、実施例2に対応する試験片である。試験片5の表面に、2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させたスラリーを浸漬し、スラリー膜を構成した。高周波加熱により、バナジウムが約500μm拡散するように温度:1300℃、保持時間:5分とした。温度を1200℃まで低下させ、炭素Cが約1000μm拡散するように浸炭ガスを流した状態で20分保持した。浸炭ガスにはアセチレンを用いた。温度を600℃まで低下させた後、850℃まで再加熱し、試験片5の試験片に水溶性焼入れ油を噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。 Example 5 is a test piece corresponding to Example 2. A slurry in which vanadium powder having an average particle size of 50 μm and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did. By high frequency heating, the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 μm. The temperature was lowered to 1200 ° C. and kept for 20 minutes in a state in which a carburizing gas was supplied so that carbon C diffused by about 1000 μm. Acetylene was used as the carburizing gas. After the temperature was lowered to 600 ° C., the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。表面から約50μm深さにおける断面のビッカース硬さは850Hv~950Hvで、鉄炭化物2が金属炭化物1よりも基材の内部側まで浸透した部分の表面から約600μm深い位置における断面のビッカース硬さは750Hv~850Hvで、硬化層深さは2.5mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface is 850 Hv to 950 Hv, and the Vickers hardness of the cross section at a position about 600 μm deep from the surface of the portion in which the iron carbide 2 penetrates to the inner side of the base material than the metal carbide 1 is The hardened layer depth was 2.5 mm from 750 Hv to 850 Hv.
 実施例6は、実施例3に対応する試験片である。試験片5の表面に、2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させたスラリーを浸漬し、スラリー膜を構成した。高周波加熱により、バナジウムが約500μm拡散するように温度:1300℃で保持時間:5分間とした。温度を1200℃まで低下させ、炭素が約2000μm拡散するように浸炭ガスを流した状態で80分保持した。浸炭ガスにはアセチレンを用いた。温度を600℃まで低下させた後、850℃まで再加熱し、試験片5の試験片に水溶性焼入れ油を噴射し焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。 Example 6 is a test piece corresponding to Example 3. A slurry in which vanadium powder having an average particle size of 50 μm and benzotriador were mixed in an amount of 20% by mass and 5% by mass of epoxy in a solvent was immersed in the surface of the test piece 5 to form a slurry film. did. By high-frequency heating, the temperature was set to 1300 ° C. and the holding time was set to 5 minutes so that vanadium diffused by about 500 μm. The temperature was lowered to 1200 ° C., and maintained for 80 minutes in a state where a carburizing gas was supplied so that carbon was diffused by about 2000 μm. Acetylene was used as the carburizing gas. After the temperature was lowered to 600 ° C., the sample was reheated to 850 ° C., and quenching was performed by spraying water-soluble quenching oil on the test piece 5. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。表面から約50μm深さにおける断面のビッカース硬さは850Hv~950Hvで、鉄炭化物2が金属炭化物1よりも基材の内部側まで浸透した部分の表面から約600μm深さにおける断面のビッカース硬さは750Hv~850Hvで、表面から1100μmのマルテンサイト層3の断面のビッカース硬さは550Hv~700Hvで、硬化層深さは3.0mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface is 850 Hv to 950 Hv, and the Vickers hardness of the cross section at a depth of about 600 μm from the surface of the portion in which the iron carbide 2 penetrates to the inner side of the base material than the metal carbide 1 is The Vickers hardness of the cross section of the martensite layer 3 1750 μm from the surface at 750 Hv to 850 Hv was 550 Hv to 700 Hv, and the hardened layer depth was 3.0 mm.
 [比較例1]
 比較例1は、基準寿命となる試験片で、試験片5の試験面側を周波数30kHz、加熱時間10秒で加熱し、鉄-炭素系状態図のA3変態点より約30℃以上高い温度、約900℃とし、水溶性焼入れ油を試験片5に噴射して焼入れを施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。
[Comparative Example 1]
Comparative Example 1 is a test piece having a reference life, the test surface side of the test piece 5 is heated at a frequency of 30 kHz and a heating time of 10 seconds, and a temperature higher by about 30 ° C. than the A3 transformation point of the iron-carbon phase diagram. Quenching was performed by setting the temperature to about 900 ° C. and spraying a water-soluble quenching oil onto the test piece 5. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。なお、表面から約50μm深さにおける断面のビッカース硬さは600Hv~720Hvで、硬化層深さは2mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface was 600 Hv to 720 Hv, and the hardened layer depth was 2 mm.
 図6Aは比較例1の試験片の模式図であり、図6Bは図6Aの組織の観察写真である。図6Bは比較例1の組織で、ナイタールでエッチングしたレーザー顕微鏡写真である。図6Bに示すように、高周波焼入れにより表面近傍が全面、マルテンサイトの組織を呈していることが分かる。金属元素および炭素は浸透させていないので、金属炭化物1や鉄炭化物2は観察されない。 6A is a schematic diagram of a test piece of Comparative Example 1, and FIG. 6B is an observation photograph of the structure of FIG. 6A. FIG. 6B is a laser micrograph of the structure of Comparative Example 1 etched with nital. As shown in FIG. 6B, it can be seen that the vicinity of the surface exhibits the entire martensite structure by induction hardening. Since metal element and carbon are not permeated, metal carbide 1 and iron carbide 2 are not observed.
 [比較例2]
 比較例2は、実施例4に対する比較例で、実施例4に対して、バナジウムを浸透させ、炭素を浸透させない試験片である。試験片5の表面に、2-ブタノン中に平均粒径50μmのバナジウム粉とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%混合させスラリーを浸漬し、スラリー膜を構成した。高周波加熱により、バナジウムが約500μm拡散するように温度:1300℃、保持時間:5分間で熱処理を行った。その後、温度を1200℃まで低下させ5分保持した。温度を600℃まで低下させた後、850℃まで再加熱し、試験片5の試験片に水溶性焼入れ油を噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。
[Comparative Example 2]
Comparative Example 2 is a comparative example with respect to Example 4, and is a test piece that does not infiltrate carbon but infiltrate vanadium with respect to Example 4. On the surface of the test piece 5, vanadium powder having an average particle diameter of 50 μm and benzotriador in 2-butanone were mixed with 20% by mass of each solvent and 5% by mass of epoxy, respectively, and the slurry was immersed to form a slurry film. . Heat treatment was performed at a temperature of 1300 ° C. and a holding time of 5 minutes so that vanadium diffused by about 500 μm by high frequency heating. Thereafter, the temperature was lowered to 1200 ° C. and held for 5 minutes. After the temperature was lowered to 600 ° C., the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。表面から約50μm深さにおける断面のビッカース硬さは850Hv~950Hvで、硬化層深さは2mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface was 850 Hv to 950 Hv, and the hardened layer depth was 2 mm.
 図7Aは比較例2の試験片の模式図であり、図7Bは図7AのSEM観察写真であり、図7Cは図7BのEPMAによるマッピングである。図7Aおよび7Bに示すように、比較例2では炭素の浸透は実施していないので、鉄炭化物2は観察されない。また、バナジウムの浸透に伴うバナジウム炭化物50が観察される。 7A is a schematic diagram of a test piece of Comparative Example 2, FIG. 7B is a SEM observation photograph of FIG. 7A, and FIG. 7C is a mapping by EPMA of FIG. 7B. As shown in FIGS. 7A and 7B, in Comparative Example 2, carbon penetration was not performed, and thus no iron carbide 2 was observed. Moreover, the vanadium carbide 50 accompanying vanadium permeation is observed.
 [比較例3]
 比較例3は、実施例1に対する比較例で、実施例1に対して、バナジウムを浸透させず、炭素を浸透させた試験片である。試験片5の表面に、スラリー膜を構成しない状態で、高周波加熱により、温度:1300℃、保持時間:5分で熱処理した。温度を1200℃まで低下させ、炭素が約500μm拡散するように浸炭ガスを流した状態で5分保持した。浸炭ガスにはアセチレンを用いた。温度を600℃まで低下させた後、850℃まで再加熱し、試験片5の試験片に水溶性焼入れ油を噴射し、焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度180℃、時間90分で実施した。
[Comparative Example 3]
The comparative example 3 is a comparative example with respect to the example 1, and is a test piece in which the vanadium is not infiltrated and the carbon is infiltrated with respect to the example 1. The surface of the test piece 5 was heat-treated at a temperature of 1300 ° C. and a holding time of 5 minutes by high-frequency heating without forming a slurry film. The temperature was lowered to 1200 ° C. and held for 5 minutes in a state where a carburizing gas was supplied so that carbon diffused by about 500 μm. Acetylene was used as the carburizing gas. After the temperature was lowered to 600 ° C., the sample was reheated to 850 ° C., and water-quenched quenching oil was sprayed onto the test piece 5 to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a time of 90 minutes.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。表面から約50μm深さにおける断面硬のビッカース硬さはで800Hv~900Hvで、硬化層深さは2mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross-sectional hardness at a depth of about 50 μm from the surface was 800 Hv to 900 Hv, and the hardened layer depth was 2 mm.
 図8Aは比較例3の試験片の模式図であり、図8Bは図8Aの組織の観察写真である。図8Bは、比較例3の組織をピクリン酸ソーダでエッチングしたレーザー顕微鏡写真である。図8Bに示すように、母材のマルテンサイト層3中に、炭素の浸透に伴う鉄炭化物2が観察される。比較例3ではバナジウムの浸透は実施していないので、バナジウム炭化物は観察されない。 FIG. 8A is a schematic view of a test piece of Comparative Example 3, and FIG. 8B is an observation photograph of the structure of FIG. 8A. FIG. 8B is a laser micrograph of the structure of Comparative Example 3 etched with sodium picrate. As shown in FIG. 8B, iron carbide 2 accompanying carbon permeation is observed in the martensite layer 3 of the base material. In Comparative Example 3, no vanadium permeation was performed, so no vanadium carbide was observed.
 図9は実施例4~6および比較例1~3のスラスト疲労試験の結果を示すグラフである。試験面圧は6GPaとした。寿命の評価方法は、試験装置の所定の場所に取り付けた加速度センサーの値が、試験開始時の3倍を超えたら試験を停止するように設定しておき、試験が停止するごとに、試験片5の表面を確認し、摺動幅大のフレーキング(損傷で生じる窪み)が確認された時点を寿命とした。加速度センサーの値が設定値を超えた場合でも、試験片5の表面にフレーキング損傷が生じていない場合は、再試験とし、フレーキング損傷が生じるまで試験を継続した。なお、試験面圧6GPaにおけるヘルツの接触理論における、最大せん断応力発生深さは約180μmであり、実施例4~6および比較例1~3の硬化層深さより十分に浅い。 FIG. 9 is a graph showing the results of the thrust fatigue test of Examples 4 to 6 and Comparative Examples 1 to 3. The test surface pressure was 6 GPa. The life evaluation method is set so that the test is stopped when the value of the acceleration sensor installed at a predetermined location of the test apparatus exceeds three times the value at the start of the test. The surface of No. 5 was confirmed, and the time when flaking with a large sliding width (a dent caused by damage) was confirmed was defined as the life. Even when the value of the acceleration sensor exceeded the set value, if flaking damage did not occur on the surface of the test piece 5, the test was repeated, and the test was continued until flaking damage occurred. In the Hertzian contact theory at a test surface pressure of 6 GPa, the maximum shear stress generation depth is about 180 μm, which is sufficiently shallower than the hardened layer depths of Examples 4 to 6 and Comparative Examples 1 to 3.
 図9の縦軸は、比較例1の処理を施した試験片の寿命回数を1とした場合の比率で示してあり、同じ試験面圧下における寿命向上率である。なお、試験は各条件3個実施し、その平均値で評価した。 The vertical axis in FIG. 9 indicates the ratio when the number of times of life of the test piece subjected to the treatment of Comparative Example 1 is 1, and is the life improvement rate under the same test surface pressure. In addition, the test was implemented 3 conditions for each condition, and evaluated by the average value.
 図9に示すように、実施例4~6は、いずれも比較例1の10倍以上の寿命を有することが確認された。比較例1の表面から50μmにおけるビッカース硬さは、600Hv~720Hvであり、実施例4~6の寿命が伸びたのは、本発明の表面処理で表面の硬さを向上させたことで、摺動損傷に対する抵抗力が増加したためと考えられる。 As shown in FIG. 9, it was confirmed that each of Examples 4 to 6 had a life of 10 times or more that of Comparative Example 1. The Vickers hardness at 50 μm from the surface of Comparative Example 1 was 600 Hv to 720 Hv, and the life of Examples 4 to 6 was increased because the surface hardness was improved by the surface treatment of the present invention. This is thought to be due to an increase in resistance to dynamic damage.
 実施例4~6において、いずれも、表面から約50μm深さにおける断面のビッカース硬さは850Hv~950Hvで同一であるが、実施例4、実施例5、実施例6の順に寿命が伸びることが確認された。これより、マルテンサイト層3中に点在する、金属炭化物1と鉄炭化物2による硬化層だけでなく、内部の硬化層の構成や厚さも摺動損傷に影響を与えることが示唆される。 In each of Examples 4 to 6, the Vickers hardness of the cross section at a depth of about 50 μm from the surface is the same at 850 Hv to 950 Hv, but the life may be increased in the order of Example 4, Example 5, and Example 6. confirmed. From this, it is suggested that not only the hardened layer of metal carbide 1 and iron carbide 2 scattered in the martensite layer 3 but also the configuration and thickness of the internal hardened layer affect the sliding damage.
 一方、比較例2においては、比較例1の約半分の寿命となった。これは、バナジウムを浸透させることで、基材S45C中の炭素と反応してバナジウム炭化物を生成することで、基材S45C中の炭素が消費され、バナジウムを浸透後に炭素を浸透させていないため、部分的に炭素の少ない領域ができれしまい、部分的に硬さの低い領域ができたためと推定される。従って、母材の炭素欠乏を起こさないように、多めに炭素を浸透させる必要があることが示唆された。本現象は、本発明のように、過共析(炭素濃度約0.8重量%以上)の炭素を浸透させることで、十分防止できる。 On the other hand, in Comparative Example 2, the life was about half that of Comparative Example 1. This is because vanadium permeates to generate vanadium carbide by reacting with the carbon in the substrate S45C, so that the carbon in the substrate S45C is consumed, and the vanadium has not penetrated the carbon after infiltrating, It is presumed that a region having a small amount of carbon was partially formed and a region having a low hardness was partially formed. Therefore, it was suggested that it is necessary to permeate more carbon so as not to cause carbon deficiency of the base material. This phenomenon can be sufficiently prevented by infiltrating hypereutectoid (carbon concentration of about 0.8% by weight or more) as in the present invention.
 比較例3においては、比較例1の約3倍の寿命となったが、実施例4、5、6の10倍以上に比べると寿命が短かった。これは、比較例3は金属炭化物1を分散させておらず、鉄炭化物2のみが分散されているので、摺動損傷に対する抵抗力の向上が十分ではなかったためと、推定される。 In Comparative Example 3, the life was about three times that of Comparative Example 1, but the life was shorter than in Examples 4, 5, and 6 times or more. This is presumably because Comparative Example 3 did not disperse the metal carbide 1 but dispersed only the iron carbide 2, and thus the resistance to sliding damage was not sufficiently improved.
 以上の実験より、マルテンサイト層3中に、金属炭化物1と鉄炭化物2を点在させることで摺動損傷に対する抵抗力を高められることが分かった。また、金属炭化物1と鉄炭化物2による硬化層だけでなく、内部の硬化層の構成や厚さも摺動損傷に影響を与えることが分かった。 From the above experiments, it was found that the resistance to sliding damage can be increased by interspersing the metal carbide 1 and the iron carbide 2 in the martensite layer 3. Moreover, it turned out that not only the hardened layer by the metal carbide 1 and the iron carbide 2 but the structure and thickness of an internal hardened layer also influence a sliding damage.
 [実施例7~10]
 次に、実施例4(バナジウムの平均粒径:50μm)に対してバナジウムの拡散濃度を変化させた試験片を作製し、金属炭化物の分散量と摺動損傷および試験片5とボール6の硬度差と摺動損傷の影響を評価した。バナジウムの分散量は、例えば、バナジウムの粒径を変えて拡散経路を変化させることで調整できる。また、バナジウムの分散量に応じて試験片5の硬さも変化するため、試験片5とボール6の硬度差を調整できる。実施例7~10のバナジウムの平均粒径は以下の通りである。
[Examples 7 to 10]
Next, a test piece in which the diffusion concentration of vanadium was changed with respect to Example 4 (average particle diameter of vanadium: 50 μm) was prepared, the dispersion amount of metal carbide, sliding damage, and the hardness of the test piece 5 and the ball 6. The effects of difference and sliding damage were evaluated. The amount of vanadium dispersed can be adjusted, for example, by changing the diffusion path by changing the particle size of vanadium. Moreover, since the hardness of the test piece 5 also changes according to the amount of vanadium dispersed, the hardness difference between the test piece 5 and the ball 6 can be adjusted. The average particle size of vanadium in Examples 7 to 10 is as follows.
 実施例7:バナジウムの平均粒径10μm
 実施例8:バナジウムの平均粒径25μm
 実施例9:バナジウムの平均粒径100μm
 実施例10:バナジウムVの平均粒径200μm
 実施例7~10とも、バナジウムの粒径以外は、実施例4と同じ熱処理条件および試験条件である。
Example 7: Average particle diameter of vanadium 10 μm
Example 8: Average particle diameter of vanadium 25 μm
Example 9: Average particle size of vanadium 100 μm
Example 10: Average particle diameter of vanadium V 200 μm
Examples 7 to 10 have the same heat treatment conditions and test conditions as Example 4 except for the particle size of vanadium.
 図10は実施例4、7~10および比較例1のスラスト疲労試験の結果を示すグラフである。図10に示すように、バナジウムの平均粒径が最も小さく、バナジウムの浸透が最も多いと予測される実施例7は、試験片5は未損傷なるもボール6損傷により寿命1倍で試験が終了した。実施例7の試験片5の表面から約50μm深さにおける断面のビッカース硬さの平均値は1350Hvで、ボール6の断面のビッカース硬さの平均値750Hvより、約600Hv硬かった。このため、試験片5の表面でボール6の表面が摩耗や過度の摺動により損傷したと考えられる。 FIG. 10 is a graph showing the results of the thrust fatigue test of Examples 4, 7 to 10 and Comparative Example 1. As shown in FIG. 10, in Example 7 where the average particle size of vanadium is the smallest and the penetration of vanadium is predicted to be the largest, the test piece 5 is undamaged, but the test is completed with a life of 1 time due to the ball 6 damage. did. The average value of the Vickers hardness of the cross section at a depth of about 50 μm from the surface of the test piece 5 of Example 7 was 1350 Hv, which was about 600 Hv harder than the average value of 750 Hv of the Vickers hardness of the cross section of the ball 6. For this reason, it is considered that the surface of the ball 6 is damaged by wear or excessive sliding on the surface of the test piece 5.
 実施例7の次にバナジウムの浸透が多いと推定される実施例8は、試験片5は未損傷なるもボール6の損傷により寿命7倍で試験が終了した。実施例8の試験片5の表面から約50μm深さにおける断面ビッカース硬さの平均値は1000Hvで、ボール6の断面のビッカース硬さの平均値750Hvより、約250Hv硬かった。このため、実施例7ほどではないが、最終的に試験片5の表面でボール6の表面が摩耗や過度の摺動により損傷したと考えられる。 Example 8 in which vanadium permeation is estimated to be next to Example 7 ended the test with a life of 7 times due to the damage of the ball 6 although the test piece 5 was not damaged. The average value of the cross-section Vickers hardness at a depth of about 50 μm from the surface of the test piece 5 of Example 8 was 1000 Hv, which was about 250 Hv harder than the average value of 750 Hv of the Vickers hardness of the cross section of the ball 6. For this reason, although not as much as Example 7, it is thought that the surface of the ball 6 was finally damaged on the surface of the test piece 5 due to wear or excessive sliding.
 実施例4よりバナジウムの平均粒径が大きく、実施例4に比べてバナジウムの浸透量が少ないと考えられる実施例9は、実施例4の寿命10倍より短い、寿命8倍で試験片5が損傷した(ボールの損傷は認められなかった。)。実施例9の試験片5の表面から約50μm深さにおける断面のビッカース硬さの平均値は850Hvで、ボール6の断面のビッカース硬さの平均値750Hvより、約100Hv硬かった。 In Example 9, the average particle diameter of vanadium is larger than that in Example 4, and the penetration amount of vanadium is less than that in Example 4. Damaged (no damage to the ball was observed). The average value of the Vickers hardness of the cross section at a depth of about 50 μm from the surface of the test piece 5 of Example 9 was 850 Hv, which was about 100 Hv harder than the average value of 750 Hv of the Vickers hardness of the cross section of the ball 6.
 実施例9よりもバナジウムの平均粒径が大きく、さらにバナジウムの浸透量が少ないと考えられる実施例10は、実施例9の寿命8倍より短い、寿命2倍で損傷した(ボールの損傷は認められなかった。)。実施例10の試験片5の表面から約50μm深さにおける断面のビッカース硬さの平均値はで750Hvで、ボール6の断面のビッカース硬さの平均値750Hvと同等の硬さであった。これは、基材のマルテンサイト層3中の、金属炭化物1の点在量が少なくなり、硬質物質である金属炭化物1同士の距離が離れてしまうことで、硬質粒子のアンカー効果が小さくなり、耐久性が低下したと推定される。 Example 10 which is considered to have a larger average particle diameter of vanadium than Example 9 and less permeation of vanadium, was damaged by a life of twice that of Example 9 which was shorter than that of Example 9 (the ball was damaged). It was not possible.) The average value of the Vickers hardness of the cross section at a depth of about 50 μm from the surface of the test piece 5 of Example 10 was 750 Hv, which was equivalent to the average value of the Vickers hardness of the cross section of the ball 6 750 Hv. This is because the interstitial amount of the metal carbide 1 in the martensite layer 3 of the base material is reduced, and the distance between the metal carbides 1 that are hard materials is increased, thereby reducing the anchor effect of the hard particles, It is estimated that the durability has decreased.
 図11は実施例4、7~10の試験片5とボール6の硬度差と寿命比の関係を示すグラフである。試験片5とボール6の硬度差が大きくなる(試験片5の硬さが大きくなる)と寿命比は増加することが分かる。但し、試験片5とボール6の硬度差が200Hvを超えて更に大きくなると、ボールの損傷により寿命比が低下することが分かる。このように、相対部品の摺動においては、相対部品同士の硬度差によっても寿命が律則されることが分かる。 FIG. 11 is a graph showing the relationship between the hardness difference between the test piece 5 and the ball 6 of Examples 4 and 7 to 10 and the life ratio. It can be seen that the life ratio increases as the hardness difference between the test piece 5 and the ball 6 increases (the hardness of the test piece 5 increases). However, it can be seen that when the hardness difference between the test piece 5 and the ball 6 exceeds 200 Hv and further increases, the life ratio decreases due to damage to the ball. Thus, it can be seen that in the sliding of the relative parts, the service life is regulated by the hardness difference between the relative parts.
 以上の実験より、マルテンサイト層3中の、金属炭化物1の分散量および相対部品の硬度差を適正に制御する必要があることが分かる。 From the above experiment, it can be seen that the dispersion amount of the metal carbide 1 in the martensite layer 3 and the hardness difference of the relative parts must be appropriately controlled.
 [実施例11]
 上述したスラスト疲労試験結果を踏まえて、電動パワーステアリング装置のボールねじ部に本発明を適用した。図12は電動パワーステアリング装置の断面模式図であり、図13は図12のボールねじ機構の拡大図である。図12に示すように、電動パワーステアリング装置は、内周面に雌ねじ溝が形成されたナット12と、このナット12の軸心に配置されると共に外周面に雌ねじ溝に対峙する雄ねじ溝が形成されたラックスクリュー13と、雌ねじ溝と雄ねじ溝との間に介装された複数個の循環ボール6とからなるボールねじ機構と、ボールねじ機構を収納するステアリングギアケース14と、ボールねじ機構の駆動に供される電動モータ15と、電動モータの回転駆動力をナット12に伝達する動力伝達機構16などで構成されている。
[Example 11]
Based on the thrust fatigue test results described above, the present invention was applied to the ball screw portion of the electric power steering apparatus. FIG. 12 is a schematic sectional view of the electric power steering apparatus, and FIG. 13 is an enlarged view of the ball screw mechanism of FIG. As shown in FIG. 12, the electric power steering apparatus has a nut 12 having a female screw groove formed on the inner peripheral surface, and a male screw groove that is disposed on the shaft center of the nut 12 and faces the female screw groove on the outer peripheral surface. A rack screw 13, a ball screw mechanism including a plurality of circulating balls 6 interposed between the female screw groove and the male screw groove, a steering gear case 14 that houses the ball screw mechanism, and a ball screw mechanism. The electric motor 15 is provided for driving, and a power transmission mechanism 16 that transmits the rotational driving force of the electric motor to the nut 12.
 電動パワーステアリング装置のボールねじ部に本発明を適用すると、従来の表面処理に比べて耐久面圧を高くできるので転動距離を短くできる。転動距離を短くできることは、ボールネジの巻き数低減や、ラックスクリューの小径化に繋がり、軽量・小型化に寄与できる。 When the present invention is applied to the ball screw portion of the electric power steering device, the rolling distance can be shortened because the durable surface pressure can be increased as compared with the conventional surface treatment. The ability to shorten the rolling distance leads to a reduction in the number of turns of the ball screw and a reduction in the diameter of the rack screw, which can contribute to light weight and downsizing.
 また、電動パワーステアリング装置は一般車へはほぼ100%普及し、大型車への適用が検討されつつある。大型車への適用で問題になるのは、ボールネジに掛かる荷重が増加することで、ボールねじ部の面圧が増加し、転動に伴う疲労損傷で寿命が低下することである。一般車に用いている表面強化処理と同じ処理を大型車に適用する場合、ボールねじ部の径を大きくしたり、ボールねじ部の長さを長くしたりして受圧面積を増加させ、ボールねじ部の面圧を一般車と同程度にする必要があるが、摺動距離が長くなるので、摩擦の増加により荷重の伝達効率が低下し、アシスト用のキャパシタを余分に搭載する必要が生じるなどのマイナス面がある。 Also, the electric power steering device is almost 100% popular in general vehicles, and its application to large vehicles is being studied. A problem in application to a large vehicle is that the load applied to the ball screw increases, the surface pressure of the ball screw portion increases, and the life is shortened due to fatigue damage accompanying rolling. When applying the same surface-strengthening treatment used for ordinary vehicles to large vehicles, increase the pressure-receiving area by increasing the diameter of the ball screw or increasing the length of the ball screw. It is necessary to make the surface pressure at the same level as that of ordinary cars, but because the sliding distance becomes longer, the load transmission efficiency decreases due to the increase in friction, and it becomes necessary to install an extra capacitor for assistance. There is a downside.
 そこで、ボールねじ部に高耐久の表面処理を施すことで、その分、ボールねじ部の径を小さくしたり、ボールねじ部の長さを短くしたりできるので、摺動距離が短くなり荷重の伝達効率の低下が抑えられるほか、軽量化効果も見込める。 Therefore, by applying a highly durable surface treatment to the ball screw part, the diameter of the ball screw part can be reduced or the length of the ball screw part can be shortened accordingly. In addition to suppressing the reduction in transmission efficiency, it can also be expected to reduce weight.
 上述したパワーステアリング装置の製造方法を以下に説明する。ここで、ナット12は内面ねじ、ラックスクリュー13は外面ねじのため、ヘルツの接触理論より算出される面圧は、その幾何形状よりラックスクリュー13がナット12より相対的に大きいため、ラックスクリュー13の外面ねじ部に本発明を適用した。ラックスクリュー13の素材は、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cとした。丸棒素材を旋削や転造などの工程を経て、所定のラックスクリュー13の形状に仕上げた。 The manufacturing method of the power steering device described above will be described below. Here, since the nut 12 is an inner surface screw and the rack screw 13 is an outer surface screw, the surface pressure calculated from Hertz's contact theory is relatively larger than the nut 12 due to its geometric shape, so the rack screw 13 The present invention was applied to the outer surface thread portion. The material of the rack screw 13 was a carbon steel material S45C for machine structure defined by Japanese Industrial Standard JIS G 4501. The round bar material was finished in the shape of a predetermined rack screw 13 through processes such as turning and rolling.
 ラックスクリュー13について、本発明の表面強化処理を施した(実施例11)。また、本発明の表面強化処理の寿命向上効果を確認するために、比較例4として従来処理も実施した。実施例11の表面強化処理の内容を以下に示す。 The surface enhancement treatment of the present invention was performed on the rack screw 13 (Example 11). Moreover, in order to confirm the lifetime improvement effect of the surface reinforcement | strengthening process of this invention, the conventional process was also implemented as the comparative example 4. FIG. The contents of the surface strengthening treatment of Example 11 are shown below.
 図14はラックスクリュー13へのスラリーを塗布する装置の模式図である。ラックスクリュー13へのスラリー塗布は、図14に示すスラリー塗布装置17で実施した。スラリー原料投入装置18内に、2-ブタノンと、平均粒径50μmのバナジウム粉末とベンゾトリアドールを溶媒に対して各々20質量%とエポキシを5質量%投入する。これらの原料はスラリー攪拌装置19内でスラリー攪拌ファン20により攪拌・混合され、調整スラリー21となる。 FIG. 14 is a schematic diagram of an apparatus for applying a slurry to the rack screw 13. Slurry application to the rack screw 13 was performed by a slurry application device 17 shown in FIG. In the slurry raw material charging device 18, 2-butanone, vanadium powder having an average particle diameter of 50 μm, and benzotriazole are respectively charged in an amount of 20% by mass and 5% by mass of epoxy. These raw materials are agitated and mixed by the slurry agitating fan 20 in the slurry agitating device 19 to become the adjusted slurry 21.
 調整スラリー21はポンプ22でスラリー槽23に移送される。ラックスクリュー13は外面ねじ部以外がスラリー21が塗布されないように予めマスキングが施されている。ラックスクリュー13はラックスクリュー搬送装置24にスラリー槽23内に浸漬され、塗布厚さを均質化するために回転しながら上方に引上げられ、乾燥装置(図示せず)内で乾燥されスラリー膜が構成される。 The adjusted slurry 21 is transferred to the slurry tank 23 by the pump 22. The rack screw 13 is masked in advance so that the slurry 21 is not applied except for the external thread portion. The rack screw 13 is immersed in the slurry tank 23 in the rack screw conveying device 24, pulled upward while rotating to homogenize the coating thickness, and dried in a drying device (not shown) to form a slurry film. Is done.
 原料投入から、スラリー塗布、乾燥の一連の処理は、スラリーディッピング装置制御盤25で制御される。図15は実施例11で用いる熱処理装置の模式図である。スラリー膜が構成されたラックスクリュー13は、図15に示す熱処理装置で熱処理を施される。ラックスクリュー13は、熱処理装置28内に挿荷され、熱処理装置28内を真空排気・不活性ガス置換され、高周波コイル26で加熱される。加熱温度はT1:1300℃、浸透時間t1:5minで、約500μmバナジウムが浸透される。 A series of processes from raw material input to slurry application and drying are controlled by the slurry dipping device control panel 25. FIG. 15 is a schematic view of a heat treatment apparatus used in Example 11. The rack screw 13 having the slurry film is subjected to heat treatment by a heat treatment apparatus shown in FIG. The rack screw 13 is loaded into the heat treatment device 28, the inside of the heat treatment device 28 is evacuated and replaced with an inert gas, and heated by the high frequency coil 26. About 500 μm vanadium is infiltrated at a heating temperature of T1: 1300 ° C. and an infiltration time t1: 5 min.
 上述した熱処理の後、熱処理装置28内を減圧にした状態で、浸炭ガスノズル27からアセチレンガス噴射しながら、温度をT2:1200℃まで低下させ、浸透時間t2:5minで、炭素を約500μm浸透させる。温度を600℃まで低下させた後、850℃まで再加熱し、ラックスクリュー13に水溶性焼入れ油を噴射し焼入れを実施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。その後、外面ねじ部などを所定寸法に研削加工で仕上げた。ラックスクリュー13の摺動部の表面から50μm深さにおけるビッカース硬さは、スラスト疲労試験片で確認した実施例4と同等であった。 After the heat treatment described above, the temperature is lowered to T2: 1200 ° C. while injecting acetylene gas from the carburizing gas nozzle 27 in a state where the pressure inside the heat treatment apparatus 28 is reduced, and carbon is infiltrated by about 500 μm at an infiltration time t2: 5 min. . After the temperature was lowered to 600 ° C., the mixture was reheated to 850 ° C., and water-quenching quenching oil was injected into the rack screw 13 to perform quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes. Thereafter, the external thread portion and the like were finished to a predetermined dimension by grinding. The Vickers hardness at a depth of 50 μm from the surface of the sliding portion of the rack screw 13 was the same as that of Example 4 confirmed with the thrust fatigue test piece.
 このラックスクリュー13を電動パワーステアリング装置に組み込んで耐久性試験を実施した。ボール6は、スラスト疲労試験と同様に、日本工業規格JIS G 4805で規定される高炭素クロム軸受け鋼SUJ2を用いた。ボールの摺動部の表面から50μm深さにおけるにビッカース硬さは720Hv~780Hv程度であった。ナット12は、日本工業規格JIS G 4053で規定される機械構造用合金鋼鋼材SCM420を用いた。丸棒素材を旋削などの工程を経て、所定のナット12の形状に仕上げた。 The durability test was conducted by incorporating this rack screw 13 into the electric power steering device. The ball 6 was made of high carbon chrome bearing steel SUJ2 defined in Japanese Industrial Standard JIS G 4805 as in the thrust fatigue test. The Vickers hardness at a depth of 50 μm from the surface of the sliding portion of the ball was about 720 Hv to 780 Hv. As the nut 12, an alloy steel SCM420 for machine structure defined by Japanese Industrial Standard JIS G 4053 was used. The round bar material was processed into a predetermined nut 12 shape through a process such as turning.
 この後、ガス浸炭処理を施し、内面ねじ部などを研削加工で仕上げた。前述のようにナット12は、ラックスクリュー13より作用する面圧が低いため、本発明の表面処理ではなく、工業的な成立性を考慮して、広く普及しているガス浸炭とした。ナット12の摺動部の表面から50μm深さにおけるビッカース硬さは、660Hv~760Hv程度であった。 After this, gas carburization treatment was performed, and the internal threaded parts were finished by grinding. As described above, since the surface pressure acting on the nut 12 is lower than that of the rack screw 13, the carburizing gas is widely used in consideration of industrial feasibility, not the surface treatment of the present invention. The Vickers hardness at a depth of 50 μm from the surface of the sliding portion of the nut 12 was about 660 Hv to 760 Hv.
 耐久性試験は、実際の運転時に想定される最大荷重で繰り返しの耐久試験を実施した。寿命の評価方法は、電動パワーステアリングの所定の場所に取り付けた加速度センサーの値が、試験開始時の2倍を超えるか、電動パワーステアリングの所定の場所に取り付けた音響センサーの値が、試験開始時の2倍を超えたら試験を停止するように設定した。試験停止後は、電動パワーステアリングのボールねじ部を解体して、ラックスクリュー13、ボール6、ナット12の摺動部を観察し、損傷が生じていることを確認するようにした。但し、比較例4の寿命の3倍を超えても、試験停止条件に達しない場合は、3倍以上の寿命が確認できたとして、その時点で試験を打ち切った。なお、比較例4は、ナット12およびボール6は本発明と同じで、ラックスクリュー13の表面処理は従来から採用されている高周波焼入れとした。 In the durability test, repeated durability tests were performed at the maximum load assumed during actual operation. The life evaluation method is that the value of the acceleration sensor attached to the electric power steering at a predetermined location exceeds twice the value at the start of the test, or the value of the acoustic sensor attached to the electric power steering at the predetermined location The test was set to stop when it exceeded twice the time. After the test was stopped, the ball screw portion of the electric power steering was disassembled, and the sliding portions of the rack screw 13, the ball 6 and the nut 12 were observed to confirm that damage had occurred. However, when the test stop condition was not reached even when exceeding 3 times the life of Comparative Example 4, the test was terminated at that time, assuming that a life of 3 times or more was confirmed. In Comparative Example 4, the nut 12 and the ball 6 are the same as in the present invention, and the surface treatment of the rack screw 13 is induction hardening that has been conventionally employed.
 図16は実施例11および比較例4の電動パワーステアリング装置の耐久試験結果を示すグラフである。実施例11は、比較例4に比べて、3倍以上の寿命が確認できた。また、寿命試験後のラックスクリュー13、ボール6、ナット12の摺動面を観察した結果、有意な損傷は確認されなかった。 FIG. 16 is a graph showing the durability test results of the electric power steering devices of Example 11 and Comparative Example 4. In Example 11, compared to Comparative Example 4, it was confirmed that the lifetime was 3 times or more. Further, as a result of observing the sliding surfaces of the rack screw 13, the ball 6 and the nut 12 after the life test, no significant damage was confirmed.
 [実施例12]
 実施例1~実施例11は、拡散を利用して金属元素および炭素を拡散させたが、本実施例では、金属と炭素を含む粉末を送粉し、レーザーにより粉末と基材とを合金化させる方法を検討評価した。
[Example 12]
In Examples 1 to 11, metal elements and carbon were diffused using diffusion, but in this example, powder containing metal and carbon is fed, and the powder and substrate are alloyed by laser. We evaluated and evaluated the method to make it.
 図17はスラスト疲労試験片をレーザー合金化処理する装置の一例を示す模式図である。試験片5の基材は、日本工業規格JIS G 4501で規定される機械構造用炭素鋼鋼材S45Cで、約0.45質量パーセントの炭素Cを含む鉄鋼材である。試験片5の表面に、炭素1質量%でバナジウム2質量%、クロム4質量%、モリブデン5質量%、残りが鉄からなる粉末31を送粉装置32からレーザー溶接ノズル29内に送粉し、レーザー発信機30を用いて、粉末31と基材S45Cを同時に溶融・合金化した。粉末31は、ガスアトマイズ粉で、平均粒径が70μm、送粉量は約4g/minである。レーザー合金化条件は、レーザー出力:2500W、焦点径:4mm、合金化速度1000mm/minの条件で実施した。この条件は、合金化深さが約0.5mm、合金化幅が約3mmとなる条件である。 FIG. 17 is a schematic view showing an example of an apparatus for laser alloying a thrust fatigue test piece. The base material of the test piece 5 is a carbon steel material S45C for mechanical structure defined by Japanese Industrial Standards JIS G 4501, and is a steel material containing about 0.45 mass percent carbon C. Powder 31 consisting of 1% by mass of carbon, 2% by mass of vanadium, 4% by mass of chromium, 5% by mass of molybdenum, and the remainder of iron on the surface of the test piece 5 is fed from the powder feeding device 32 into the laser welding nozzle 29, Using the laser transmitter 30, the powder 31 and the substrate S45C were simultaneously melted and alloyed. The powder 31 is a gas atomized powder having an average particle diameter of 70 μm and a powder feeding amount of about 4 g / min. The laser alloying conditions were as follows: laser output: 2500 W, focal diameter: 4 mm, alloying speed: 1000 mm / min. This condition is a condition that the alloying depth is about 0.5 mm and the alloying width is about 3 mm.
 レーザー照射後、試験片5の試験面側を周波数30kHz、加熱時間10秒で加熱し、鉄-炭素系状態図のA3変態点より約30℃以上高い温度、約900℃とし、水溶性焼入れ油を試験片5に噴射して焼入れを施した。なお、焼戻しは、電気炉を用いて、温度:180℃、保持時間:90分で実施した。 After laser irradiation, the test surface side of the test piece 5 is heated at a frequency of 30 kHz and a heating time of 10 seconds to a temperature about 30 ° C. higher than the A3 transformation point of the iron-carbon system phase diagram, about 900 ° C. Was sprayed on the test piece 5 for quenching. The tempering was performed using an electric furnace at a temperature of 180 ° C. and a holding time of 90 minutes.
 基材と金属および炭素をレーザーで溶融・合金化した後に、焼入れを施すことで、基材をマルテンサイト化すると共に、マルテンサイト層中に金属炭化物および鉄炭化物粒子が分散した組織が形成できる。また、焼戻しを行うことで、じん性を向上させることができる。レーザーで溶融・合金化したままの組織でも耐久性の向上は計れるが、レーザーで溶融・合金化したままの組織は凝固組織であること、溶融・合金化した周囲の領域に熱影響部が構成されることから、組織の安定化を考慮すると、焼入れおよび焼戻しを実施することが、より好適である。 The base material, metal, and carbon are melted and alloyed with a laser, and then quenched, whereby the base material is martensitic and a structure in which metal carbide and iron carbide particles are dispersed in the martensite layer can be formed. Moreover, toughness can be improved by tempering. Durability can be improved even with a structure that has been melted and alloyed with a laser, but the structure that has been melted and alloyed with a laser is a solidified structure, and a heat-affected zone is formed in the surrounding area that has been melted and alloyed. Therefore, considering the stabilization of the structure, it is more preferable to perform quenching and tempering.
 上述した熱処理後に、試験片5の両面を研削加工し、試験片の平行度と厚みおよび表面粗さを規定値に調整した。なお、表面から約50μm深さにおける断面のビッカース硬さは、880Hv~980Hvで、全硬化層深さは2mmであった。 After the heat treatment described above, both sides of the test piece 5 were ground, and the parallelism, thickness, and surface roughness of the test piece were adjusted to specified values. The Vickers hardness of the cross section at a depth of about 50 μm from the surface was 880 Hv to 980 Hv, and the total hardened layer depth was 2 mm.
 図18は実施例12の組織の模式図、レーザー合金化領域を示すマイクロスコープで撮影したマクロ写真およびレーザー合金化で構成された詳細組織写真である。マルテンサイト層3中に、金属炭化物1と鉄炭化物2が分散した、レーザー合金化領域33が表面から深さ500μmの範囲に確認できた。また、レーザー合金化領域33の内部には、レーザー合金化に伴う熱影響部34が観察された。表面から50μm深さにおける断面のビッカース硬さは、880Hv~980Hvであった。このようにして作製した試験片5に、実施例11のスラスト疲労試験を実施した。試験条件は図5と同じである。その結果、実施例12の寿命は、図5の比較例1に比べて10倍の寿命を確認できた。 FIG. 18 is a schematic diagram of the structure of Example 12, a macro photograph taken with a microscope showing a laser alloying region, and a detailed structure photograph composed of laser alloying. A laser alloying region 33 in which the metal carbide 1 and the iron carbide 2 were dispersed in the martensite layer 3 was confirmed in a range of 500 μm in depth from the surface. Further, a heat affected zone 34 accompanying laser alloying was observed inside the laser alloying region 33. The Vickers hardness of the cross section at a depth of 50 μm from the surface was 880 Hv to 980 Hv. The thrust fatigue test of Example 11 was performed on the test piece 5 thus produced. The test conditions are the same as in FIG. As a result, the lifetime of Example 12 was confirmed to be 10 times longer than that of Comparative Example 1 in FIG.
 [実施例13]
 上述したスラスト疲労試験の結果を踏まえて、電動パワーステアリング装置のボールねじ部に実施例12で示した本発明のレーザー合金化を適用した。適用対象は、実施例11と同じくラックスクリュー13の外面ねじ部で、レーザー合金化以外は、実施例11と同じである。
[Example 13]
Based on the results of the thrust fatigue test described above, the laser alloying of the present invention shown in Example 12 was applied to the ball screw portion of the electric power steering apparatus. The object of application is the external thread portion of the rack screw 13 as in Example 11, and is the same as Example 11 except for laser alloying.
 図19はラックスクリュー13の外面ねじ部へレーザー合金化処理を施す装置の模式図である。ラックスクリュー13の外面ねじ部の表面に、炭素C1質量%でバナジウム2質量%、クロム4質量%、モリブデン5質量%、残りが鉄Feからなる粉末31を送粉装置32からレーザー溶接ノズル29内に送粉し、レーザー発信機30を用いて、粉末31と基材S45Cを同時に溶融・合金化した。ラックスクリュー13は、回転送り装置35に支持され、回転送り装置制御盤36で制御され、回転しながらラックスクリュー13の軸方向に送られることで、ラックスクリュー13の外面ねじ部の摺動部に沿ってレーザー合金化がなされる。 FIG. 19 is a schematic view of an apparatus for applying a laser alloying process to the external thread portion of the rack screw 13. On the surface of the external thread portion of the rack screw 13, a powder 31 consisting of 2% by mass of carbon C1% by mass, 4% by mass of chromium, 5% by mass of molybdenum, and the remainder of iron Fe is fed from the powder feeding device 32 to the laser welding nozzle 29. The powder 31 and the substrate S45C were simultaneously melted and alloyed using a laser transmitter 30. The rack screw 13 is supported by the rotary feed device 35, controlled by the rotary feed device control panel 36, and fed in the axial direction of the rack screw 13 while rotating, so that the rack screw 13 is moved to the sliding portion of the external thread portion of the rack screw 13. Along with this, laser alloying is performed.
 粉末31は、ガスアトマイズ粉で、平均粒径が70μm、送粉量は約4g/minである。レーザー合金化条件は、レーザー出力2500W、焦点径4mm、合金化速度約1000mm/minの条件で実施した。この条件は、合金化深さが0.5mm、合金化幅が3mmとなる条件である。その後、ラックスクリュー13を周波数30kHz、加熱時間10秒で加熱し、鉄-炭素系状態図のA3変態点より約30℃以上高い温度、約900℃とし、水溶性焼入れ油を試験片5に噴射して焼入れを施した。なお、焼戻しは、高周波加熱で、温度200℃、時間1分で実施した。表面から約50μm深さにおける断面のビッカース硬さは、880Hv~980Hvで、硬化層深さは2mmであった。 Powder 31 is a gas atomized powder having an average particle diameter of 70 μm and a powder feeding amount of about 4 g / min. The laser alloying conditions were a laser output of 2500 W, a focal diameter of 4 mm, and an alloying speed of about 1000 mm / min. This condition is a condition that the alloying depth is 0.5 mm and the alloying width is 3 mm. After that, the rack screw 13 is heated at a frequency of 30 kHz and a heating time of 10 seconds to reach a temperature about 30 ° C. higher than the A3 transformation point of the iron-carbon phase diagram, about 900 ° C., and water-soluble quenching oil is injected onto the test piece 5 And quenched. The tempering was performed by high frequency heating at a temperature of 200 ° C. for 1 minute. The Vickers hardness of the cross section at a depth of about 50 μm from the surface was 880 Hv to 980 Hv, and the hardened layer depth was 2 mm.
 上述したラックスクリュー13を電動パワーステアリング装置に組み込んで耐久性試験を実施した。ボール6は、スラスト疲労試験と同様に、日本工業規格JIS G 4805で規定される高炭素クロム軸受け鋼SUJ2を用いた。ボールの摺動部の表面から50μm深さにおけるにビッカース硬さは720Hv~780Hv程度であった。ナット12は、日本工業規格JIS G 4053で規定される機械構造用合金鋼鋼材SCM420を用いた。丸棒素材を旋削などの工程を経て、所定のナット12の形状に仕上げた。この後、ガス浸炭処理を施し、内面ねじ部などを研削加工で仕上げた。前述のようにナット12は、ラックスクリュー13より作用する面圧が低いため、本発明の表面処理ではなく、工業的な成立性を考慮して、広く普及しているガス浸炭とした。ナット12の摺動部の表面から50μm深さにおけるビッカース硬さは、660Hv~760Hv程度であった。 The durability test was conducted by incorporating the above-described rack screw 13 into the electric power steering apparatus. The ball 6 was made of high carbon chrome bearing steel SUJ2 defined in Japanese Industrial Standard JIS G 4805 as in the thrust fatigue test. The Vickers hardness at a depth of 50 μm from the surface of the sliding portion of the ball was about 720 Hv to 780 Hv. As the nut 12, an alloy steel SCM420 for machine structure defined by Japanese Industrial Standard JIS G 4053 was used. The round bar material was processed into a predetermined nut 12 shape through a process such as turning. Thereafter, a gas carburizing process was performed, and the inner surface screw part and the like were finished by grinding. As described above, since the surface pressure acting on the nut 12 is lower than that of the rack screw 13, the carburizing gas is widely used in consideration of industrial feasibility, not the surface treatment of the present invention. The Vickers hardness at a depth of 50 μm from the surface of the sliding portion of the nut 12 was about 660 Hv to 760 Hv.
 耐久性試験は、実際の運転時に想定される最大荷重で繰り返しの耐久試験を実施した。寿命の評価方法は、電動パワーステアリングの所定の場所に取り付けた加速度センサーの値が、試験開始時の2倍を超えるか、電動パワーステアリングの所定の場所に取り付けた音響センサーの値が、試験開始時の2倍を超えたら試験を停止するように設定した。試験停止後は、電動パワーステアリングのボールねじ部を解体して、ラックスクリュー13、ボール6、ナット12の摺動部を観察し、損傷が生じていることを確認するようにした。但し、比較例4の寿命の3倍を超えても、試験停止条件に達しない場合は、3倍以上の寿命が確認できたとして、その時点で試験を打ち切った。なお、比較例4は、ナット12およびボール6は本発明と同じで、ラックスクリュー13の表面処理は従来から採用されている高周波焼入れとした。 In the durability test, repeated durability tests were performed at the maximum load assumed during actual operation. The life evaluation method is that the value of the acceleration sensor attached to the electric power steering at a predetermined location exceeds twice the value at the start of the test, or the value of the acoustic sensor attached to the electric power steering at the predetermined location The test was set to stop when it exceeded twice the time. After the test was stopped, the ball screw portion of the electric power steering was disassembled, and the sliding portions of the rack screw 13, the ball 6 and the nut 12 were observed to confirm that damage had occurred. However, when the test stop condition was not reached even when exceeding 3 times the life of Comparative Example 4, the test was terminated at that time, assuming that a life of 3 times or more was confirmed. In Comparative Example 4, the nut 12 and the ball 6 are the same as in the present invention, and the surface treatment of the rack screw 13 is induction hardening that has been conventionally employed.
 電動パワーステアリングでの耐久試験の結果、比較例4に比べて、3倍以上の寿命が確認できた。また、寿命試験後のラックスクリュー13、ボール6、ナット12の摺動面を観察した結果、有意な損傷は確認されなかった。
[実施例14]
 実施例14は、実施例13において、ラックスクリュー13のうち、ボール6と接触する箇所にのみ金属炭化物および鉄炭化物層を設けたものである。
As a result of the durability test with the electric power steering, it was confirmed that the life was three times longer than that of Comparative Example 4. Further, as a result of observing the sliding surfaces of the rack screw 13, the ball 6 and the nut 12 after the life test, no significant damage was confirmed.
[Example 14]
In Example 14, the metal carbide and iron carbide layers are provided only on the rack screw 13 at positions where the balls 6 are in contact with each other.
 図22は実施例14の電動パワーステアリング装置のボールねじ機構を構成するラックスクリュー13とボール6とが接触する箇所の拡大図である。図22に示すように、ラックスクリュー13とボール6とは2ヵ所(37a,37b)にて接触する(なお、作動時は移動方向に依存していずれか一方側に接触する。)。 FIG. 22 is an enlarged view of a portion where the rack screw 13 and the ball 6 constituting the ball screw mechanism of the electric power steering apparatus of the fourteenth embodiment come into contact with each other. As shown in FIG. 22, the rack screw 13 and the ball 6 are in contact with each other at two locations (37a, 37b) (in operation, depending on the moving direction, they are in contact with either one side).
 図23は図22のラックスクリュー13の表面を拡大する図である。図23に示すように、ラックスクリュー13の表面38には、ラックスクリュー13の溝に沿って2本の線状に金属炭化物と鉄炭化物とが形成される。表面38にこのように2本の線に対応する箇所のみに金属炭化物、鉄炭化物を設け、周囲には未処理部を残すことで、硬く強度に優れた箇所と、強度は低いものの靱性に優れた箇所が共存するため、衝撃に強い構造とすることができる。 FIG. 23 is an enlarged view of the surface of the rack screw 13 of FIG. As shown in FIG. 23, on the surface 38 of the rack screw 13, metal carbide and iron carbide are formed in two lines along the groove of the rack screw 13. By providing metal carbide and iron carbide only on the surface 38 corresponding to the two wires in this way and leaving an untreated part around the surface, it is hard and excellent in strength and excellent in toughness but low in strength. Since these parts coexist, a structure that is resistant to impact can be obtained.
 金属炭化物、鉄炭化物を2ヵ所に設けるには、実施例13に示したレーザー合金化を用いることができる。レーザー処理をした部分にのみ金属炭化物、鉄炭化物層を設けることができる。 In order to provide metal carbide and iron carbide in two places, the laser alloying shown in Example 13 can be used. A metal carbide or iron carbide layer can be provided only in the laser-treated portion.
 なお、実施例11~14は、ラックスクリュー13に金属炭化物と鉄炭化物を添加した例だが、ボール6の表面に金属炭化物と鉄炭化物を添加しても構わない。 In Examples 11 to 14, metal carbide and iron carbide are added to the rack screw 13, but metal carbide and iron carbide may be added to the surface of the ball 6.
 以上、説明したように、本発明によれば、高い耐久性を備えた摺動部材およびその製造方法ならびにパワーステアリング装置およびその製造方法を提供することができることが実証された。本発明によれば、相対する2部品以上の組み合わせで構成される摺動部材の耐久性を向上させることができ、摺動部材の小型化および低コスト化が達成でき、地球資源保護や地球環境保全にも有益である。また、本発明を電動パワーステアリング装置のボールねじ部に使用すると、従来の表面処理に比べて耐久面圧を高くできるので、ボールネジの巻き数低減や、ラックスクリューの小径化に繋がり、軽量・小型化に寄与できる。 As described above, according to the present invention, it has been proved that a sliding member having high durability and a manufacturing method thereof, a power steering device and a manufacturing method thereof can be provided. According to the present invention, it is possible to improve the durability of a sliding member composed of a combination of two or more parts facing each other, to achieve downsizing and cost reduction of the sliding member, and to protect earth resources and the global environment. It is also beneficial for conservation. In addition, when the present invention is used for a ball screw portion of an electric power steering device, a durable surface pressure can be increased as compared with a conventional surface treatment. Can contribute to
 なお、本発明は上記した実施例に限定されるものではなく、様々な変形例が含まれる。例えば、上記した実施例は本発明を分かり易く説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものではない。また、ある実施例の構成の一部を他の実施例の構成に置き換えることが可能であり、ある実施例の構成に他の実施例の構成を加えることも可能である。また、各実施例の構成の一部について、他の構成の追加・削除・置換をすることが可能である。 In addition, this invention is not limited to the above-mentioned Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.
 1…金属炭化物、2…鉄炭化物、3…マルテンサイト、4…バナジウム炭化物、5…試験片、6…ボール、7…外輪、8…試験槽、9…潤滑油、10…荷重、11…回転、12…ナット、13…ラックスクリュー、14…ステアリングギアケース、15…電動モータ、16…動力伝達機構、17…スラリー塗布装置、18…スラリー原料投入装置、19…スラリー攪拌装置、20…スラリー攪拌ファン、21…調整スラリー、22…ポンプ、23…スラリー槽、24…ラックスクリュー搬送装置、25…スラリーディッピング装置制御盤、26…高周波コイル、27…浸炭ガスノズル、28…熱処理装置、29…レーザー溶接ノズル、30…レーザー発信機、31…粉末、32…送粉装置、33…レーザー合金化領域、34…熱影響部、35…回転送り装置、36…回転送り装置制御盤、37a,37b…ボールとラックスクリューとの接触箇所、38…ラックスクリュー表面の金属炭化物と鉄炭化物。 DESCRIPTION OF SYMBOLS 1 ... Metal carbide, 2 ... Iron carbide, 3 ... Martensite, 4 ... Vanadium carbide, 5 ... Test piece, 6 ... Ball, 7 ... Outer ring, 8 ... Test tank, 9 ... Lubricating oil, 10 ... Load, 11 ... Rotation , 12 ... nuts, 13 ... rack screw, 14 ... steering gear case, 15 ... electric motor, 16 ... power transmission mechanism, 17 ... slurry coating device, 18 ... slurry raw material charging device, 19 ... slurry stirring device, 20 ... slurry stirring Fan, 21 ... adjusted slurry, 22 ... pump, 23 ... slurry tank, 24 ... rack screw conveying device, 25 ... slurry dipping device control panel, 26 ... high frequency coil, 27 ... carburizing gas nozzle, 28 ... heat treatment device, 29 ... laser welding Nozzle, 30 ... laser transmitter, 31 ... powder, 32 ... powder feeding device, 33 ... laser alloying region, 34 ... heat affected zone, 3 ... rotary feeder 36 ... rotary feeder control panel, 37a, 37b ... contact portion between the ball and the rack screw, 38 ... rack screw surface metal carbide and iron carbide.

Claims (16)

  1.  鋼製の基材と、前記基材に含まれる粒状の鉄炭化物と、前記基材に含まれ、金属と炭素とを構成元素として含む金属炭化物とを含み、
     前記鉄炭化物および前記金属炭化物の体積率は、前記基材の表面から内部への深さ方向に沿って減少し、
     前記金属はTi、V、Nb、Ta、Zr、W、HfおよびMoからなる群から選択された1種類以上であることを特徴とする摺動部材。
    A steel base material, a granular iron carbide contained in the base material, and a metal carbide contained in the base material and containing metal and carbon as constituent elements,
    The volume fraction of the iron carbide and the metal carbide decreases along the depth direction from the surface to the inside of the base material,
    The sliding member according to claim 1, wherein the metal is at least one selected from the group consisting of Ti, V, Nb, Ta, Zr, W, Hf, and Mo.
  2.  前記基材の内部において、前記鉄炭化物は前記金属炭化物よりも深い部分まで存在することを特徴とする請求項1に記載の摺動部材。 2. The sliding member according to claim 1, wherein the iron carbide exists up to a portion deeper than the metal carbide inside the base material.
  3.  前記基材はマルテンサイト組織を有するマルテンサイト層を有し、前記基材の内部において、前記マルテンサイト層は前記鉄炭化物および前記金属炭化物よりも深い部分に存在することを特徴とする請求項1に記載の摺動部材。 The said base material has a martensite layer which has a martensite structure | tissue, The said martensite layer exists in the deeper part than the said iron carbide and the said metal carbide inside the said base material. The sliding member according to 1.
  4.  内周面に雌ねじ溝が形成されたナットと、
     前記ナットの軸心に配置されると共に外周面に前記雌ねじ溝に対峙する雄ねじ溝が形成されたラックスクリューと、
     前記雌ねじ溝と前記雄ねじ溝との間に介装された複数個の循環ボールとを有するボールねじ機構と、
     前記ボールねじ機構を収納するステアリングギアケースと、
     前記ボールねじ機構の駆動に供される電動モータと、
     前記電動モータの回転駆動力を前記ナットに伝達する動力伝達機構とを有し、
    前記ラックスクリューまたは前記循環ボールは、請求項1~3のいずれか1項に記載の摺動部材であることを特徴とするパワーステアリング装置。
    A nut having a female thread groove formed on the inner peripheral surface;
    A rack screw disposed on the axis of the nut and having an external thread groove formed on the outer peripheral surface thereof opposed to the internal thread groove;
    A ball screw mechanism having a plurality of circulating balls interposed between the female screw groove and the male screw groove;
    A steering gear case that houses the ball screw mechanism;
    An electric motor used to drive the ball screw mechanism;
    A power transmission mechanism that transmits the rotational driving force of the electric motor to the nut;
    The power steering device according to any one of claims 1 to 3, wherein the rack screw or the circulating ball is a sliding member according to any one of claims 1 to 3.
  5.  前記鉄炭化物および前記金属炭化物は、前記ラックスクリューの雄ねじ溝の表面または前記ナットの表面に含まれていることを特徴とする請求項4に記載のパワーステアリング装置。 The power steering device according to claim 4, wherein the iron carbide and the metal carbide are included in a surface of a male screw groove of the rack screw or a surface of the nut.
  6.  前記ラックスクリューと前記循環ボールは、少なくとも2点で接触しており、
     前記鉄炭化物および前記金属炭化物は、前記2点に対応して、前記雄ねじ溝に沿って設けられていることを特徴とする請求項5に記載のパワーステアリング装置。
    The rack screw and the circulating ball are in contact at least at two points,
    6. The power steering apparatus according to claim 5, wherein the iron carbide and the metal carbide are provided along the male screw groove corresponding to the two points.
  7.  前記鉄炭化物の直径は0.5μ以上5μm以下であり、アスペクト比は1以上5以下であることを特徴とする請求項4~6のいずれか1項に記載のパワーステアリング装置。 The power steering apparatus according to any one of claims 4 to 6, wherein the iron carbide has a diameter of 0.5 µm to 5 µm and an aspect ratio of 1 to 5.
  8.  Ti、V、Nb、Ta、Zr、W、HfおよびMoからなる群から選択された1種類以上の金属を鋼製の基材に浸透させる金属浸透工程と、
     炭素を前記基材に浸透させる炭素浸透工程と、を有し、
     前記炭素浸透工程は、前記基材に前記炭素を過共析となる濃度以上浸透させることを特徴とする摺動部材の製造方法。
    A metal permeation step for permeating one or more metals selected from the group consisting of Ti, V, Nb, Ta, Zr, W, Hf, and Mo into a steel substrate;
    A carbon infiltration step for infiltrating carbon into the substrate,
    In the carbon infiltration step, the carbon is infiltrated into the base material at a concentration that causes hypereutectoid deposition.
  9.  前記炭素浸透工程において前記基材に鉄炭化物および金属炭化物が形成され、
     前記鉄炭化物および前記金属炭化物の体積率は、前記基材の表面から内部への深さ方向に沿って減少することを特徴とする請求項8に記載の摺動部材の製造方法。
    In the carbon infiltration step, iron carbide and metal carbide are formed on the base material,
    The volume ratio of the iron carbide and the metal carbide decreases along the depth direction from the surface to the inside of the base material.
  10.  前記炭素の前記過共析となる濃度は、前記基材に対して前記炭素が0.8質量%であることを特徴とする請求項9に記載の摺動部材の製造方法。 The method for producing a sliding member according to claim 9, wherein the concentration of the carbon that causes hypereutectoid is 0.8% by mass of the carbon with respect to the base material.
  11.  内周面に雌ねじ溝が形成されたナットと、
     前記ナットの軸心に配置されると共に外周面に前記雌ねじ溝に対峙する雄ねじ溝が形成されたラックスクリューと、
     前記雌ねじ溝と前記雄ねじ溝との間に介装された複数個の循環ボールとを有するボールねじ機構と、
     前記ボールねじ機構を収納するステアリングギアケースと、
     前記ボールねじ機構の駆動に供される電動モータと、
     前記電動モータの回転駆動力を前記ナットに伝達する動力伝達機構とを有するパワーステアリング装置の製造方法において、
     前記ラックスクリューまたは前記循環ボールは、請求項1~3のいずれか1項に記載の前記摺動部材で構成され、
     前記摺動部材は、請求項8~10のいずれか1項に記載の前記摺動部材の製造方法により製造されることを特徴とするパワーステアリング装置の製造方法。
    A nut having a female thread groove formed on the inner peripheral surface;
    A rack screw disposed on the axis of the nut and having an external thread groove formed on the outer peripheral surface thereof opposed to the internal thread groove;
    A ball screw mechanism having a plurality of circulating balls interposed between the female screw groove and the male screw groove;
    A steering gear case that houses the ball screw mechanism;
    An electric motor used to drive the ball screw mechanism;
    In a method for manufacturing a power steering apparatus, including a power transmission mechanism that transmits a rotational driving force of the electric motor to the nut,
    The rack screw or the circulating ball is configured by the sliding member according to any one of claims 1 to 3,
    A method for manufacturing a power steering device, wherein the sliding member is manufactured by the method for manufacturing the sliding member according to any one of claims 8 to 10.
  12.  前記金属浸透工程の前に、前記金属を含むスラリーを前記基材の表面に塗布する塗布工程を有することを特徴とする請求項11に記載のパワーステアリング装置の製造方法。 12. The method of manufacturing a power steering device according to claim 11, further comprising an application step of applying a slurry containing the metal to the surface of the base material before the metal infiltration step.
  13.  前記炭素浸透工程の後に、焼入れおよび焼戻し工程を有することを特徴とする請求項12に記載のパワーステアリング装置の製造方法。 The method for manufacturing a power steering apparatus according to claim 12, further comprising a quenching and tempering step after the carbon infiltration step.
  14.  前記金属浸透工程および前記炭素浸透工程は、それぞれ熱拡散によって前記金属または前記炭素を拡散させることを特徴とする請求項13に記載のパワーステアリング装置の製造方法。 The method for manufacturing a power steering device according to claim 13, wherein the metal infiltration step and the carbon infiltration step diffuse the metal or the carbon by thermal diffusion, respectively.
  15.  前記金属浸透工程および前記炭素浸透工程は、前記金属と前記炭素を含む粉末を送粉し、レーザーにより前記粉末と前記基材とを合金化させる合金化工程であることを特徴とする請求項11に記載のパワーステアリング装置の製造方法。 12. The metal infiltration step and the carbon infiltration step are alloying steps in which powder containing the metal and the carbon is fed and the powder and the base material are alloyed by laser. The manufacturing method of the power steering apparatus as described in any one of.
  16.  前記合金化工程の後に、焼入れおよび焼戻し工程を有することを特徴とする請求項15に記載のパワーステアリング装置の製造方法。 The method for manufacturing a power steering device according to claim 15, further comprising a quenching and tempering step after the alloying step.
PCT/JP2019/017164 2018-04-27 2019-04-23 Sliding member and manufacturing method thereof and power steering device and manufacturing method thereof WO2019208549A1 (en)

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