WO2019200611A1 - 显示面板激光剥离方法及激光剥离设备 - Google Patents

显示面板激光剥离方法及激光剥离设备 Download PDF

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Publication number
WO2019200611A1
WO2019200611A1 PCT/CN2018/083918 CN2018083918W WO2019200611A1 WO 2019200611 A1 WO2019200611 A1 WO 2019200611A1 CN 2018083918 W CN2018083918 W CN 2018083918W WO 2019200611 A1 WO2019200611 A1 WO 2019200611A1
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WIPO (PCT)
Prior art keywords
laser beam
display panel
laser
carrier substrate
panel according
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PCT/CN2018/083918
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English (en)
French (fr)
Inventor
吕竟枫
陈国峰
林致远
林俊仪
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深圳市柔宇科技有限公司
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Application filed by 深圳市柔宇科技有限公司 filed Critical 深圳市柔宇科技有限公司
Priority to PCT/CN2018/083918 priority Critical patent/WO2019200611A1/zh
Priority to CN201880091111.4A priority patent/CN112020781A/zh
Publication of WO2019200611A1 publication Critical patent/WO2019200611A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/221—Changing the shape of the active layer in the devices, e.g. patterning by lift-off techniques

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a laser stripping method for a display panel and a laser stripping device.
  • the flexible display panel has the advantages of being foldable, curved and stretchable, and is widely favored by consumers.
  • LLO Laser Lift Off
  • the present invention provides a laser peeling method for a display panel and a laser stripping apparatus.
  • the present invention provides a laser stripping method for a display panel, comprising the steps of:
  • the display device to be stripped comprising a carrier substrate and a display panel formed on the carrier substrate;
  • the carrier substrate is peeled off from the display panel.
  • the present invention provides a laser stripping apparatus using the laser light stripping method of the display panel, comprising an optical element for changing a propagation of the first laser beam and the second laser beam path.
  • the laser light stripping method and the laser stripping apparatus of the display panel of the present invention can scan the first laser beam and the second laser beam in different directions, thereby reducing the obstruction or laser device on the surface of the carrier substrate.
  • the area blocked by the obstruction of the surface further broadens the range of scanning illumination of the first laser beam and the second laser beam.
  • the first laser beam and the second laser beam are deflected in different directions with respect to a normal line of the incident surface of the carrier substrate, so that the first laser beam and the second laser beam can be effectively illuminated.
  • the interface between the carrier substrate and the display panel is adhered to the display panel, so that the carrier substrate can be easily peeled off from the display panel to avoid damage of the display panel, thereby protecting the display panel.
  • FIG. 1 is a schematic diagram of a laser stripping manufacturing process of a display panel according to an embodiment of the invention.
  • FIG. 2 is a schematic structural view of a laser stripping apparatus according to an embodiment of the present invention.
  • FIG. 3 is a schematic view showing the structure of a first optical path of the display device to be peeled off in FIG. 1.
  • FIG. 4 is a schematic view showing the structure of a second optical path of the display device to be peeled off in FIG. 1.
  • FIG. 5 is a flow chart of a laser stripping method for a display panel according to an embodiment of the invention.
  • FIG. 1 and FIG. 2 are schematic diagrams showing the process of laser stripping manufacturing of a display panel according to an embodiment of the invention.
  • the display device 100 to be peeled off is placed in the laser stripping apparatus 200.
  • the display device 100 to be peeled off includes a carrier substrate 1 and a display panel 2 formed on the carrier substrate 1.
  • the display panel 2 has an interface 103 that is in contact with the carrier substrate 1.
  • the laser stripping apparatus 200 includes a peeling station 3, a laser 4, an optical element 5, and a controller 6.
  • the peeling station 3 is used to carry the display device 100 to be peeled off.
  • the laser 4 is used to emit a laser beam.
  • the optical element 5 is used to change the path of the laser beam propagation.
  • the optical element is for example a refractive or reflective element.
  • the optical component is a reflective member.
  • the controller 6 is for controlling the laser 4 to emit the laser beam.
  • the laser beam may be a gas laser or a solid laser.
  • the solid laser is, for example, a semiconductor laser.
  • the gas laser is, for example, but not limited to, an excimer laser, an Nd-YAG laser, an Ar laser, a CO 2 laser, or a He-Ne laser. These laser beams can be roughly classified into lasers for ultraviolet (UV) regions (less than 410 nm), lasers for visible regions (500 nm to 700 nm), large lasers for near-infrared regions (700 nm to 2000 nm), and infrared regions for lasers (2000 nm). Above).
  • the laser beam uses laser light in a wavelength region of 410 nm or less.
  • the wavelength of the laser beam is 308 nm.
  • the carrier substrate 1 is a glass substrate.
  • the glass substrate is, for example, but not limited to, soda lime glass, alkali-free glass, phosphoric acid glass, or quartz.
  • the carrier substrate 1 has an entrance face 11 facing away from the display panel 2. It can be understood that the carrier substrate 1 easily accumulates environmental pollutants such as dust and impurities during production or transportation, thereby easily forming the covering 12 on the incident surface 11 of the carrier substrate 1, and the peeling laser device is also easy. Retaining the obstruction, so that during the laser stripping process, the obstructions 12 block the path through which the laser beam passes, so that the laser beam cannot be effectively irradiated to the interface 103 where the carrier substrate 1 and the display panel 2 are attached. Therefore, cracks are easily caused in the region corresponding to the covering member 12 during the peeling process, thereby causing damage to the internal wiring of the display panel 2 and the risk of damage of Thin Film Encapsulation (TFE).
  • TFE Thin Film Encapsulation
  • the display panel 2 scans and illuminates the carrier substrate 1 by the first laser beam L1 during laser stripping, and then scans and illuminates the carrier substrate 1 with the second laser beam L2.
  • the first laser beam L1 is offset from the normal line N1 of the incident surface 11 of the carrier substrate 1 in a first direction X
  • the second laser beam L2 is opposite to the incident surface 11 of the carrier substrate 1.
  • the line N1 is deflected toward the second direction Y, which is opposite to the second direction Y. Subsequently, the carrier substrate 1 is peeled off from the display panel 2.
  • the normal line N1 of the incident surface 11 of the carrier substrate 1 refers to a straight line perpendicular to the incident surface 11.
  • the normal line N1 refers to a perpendicular line at which the first laser beam L1 and the second laser beam L2 are scanned and irradiated onto the incident surface 11 of the carrier substrate 1.
  • the first laser beam L1 and the second laser beam L2 are symmetrically distributed from the normal line N1 of the incident surface 11 of the carrier substrate 1.
  • one of the first laser beam L1 or the second laser beam L2 may be deflected toward the normal direction N1 of the incident surface 11 of the carrier substrate 1 in the first direction X or the second direction Y.
  • the other first laser beam L1 or the second laser beam L2 may be parallel to a normal line N1 of the incident surface 11 of the carrier substrate 1, that is, the first laser beam L1 and the second laser
  • a first angle ⁇ is always formed between the light beams L2 (see Fig. 4).
  • the first angle ⁇ is greater than 0 degrees and less than 180 degrees.
  • the first laser beam L1 and the second laser beam L2 are simultaneously scanned and irradiated to the carrier substrate 1. In another embodiment, after the first laser beam L1 scans and illuminates the carrier substrate 1, the second laser beam L2 is scanned again to illuminate the carrier substrate 1.
  • the display device 100 includes opposing first ends 101 and second ends 102.
  • the first laser beam L1 is scanned from the first end 101 of the display device 100 to the second end 102 of the display device 100; the second laser beam L2 is from the display device The second end 102 of the 100 scans the first end 101 of the display device 100.
  • the first laser beam L1 and the second laser beam L2 are both scanned from the first end 101 of the display device 100 to the second end 102 of the display device 100 or The second end 102 of the display device 100 is scanned for illumination to the first end 101 of the display device 100.
  • the first laser beam L1 and the second laser beam L2 are both vertically scanned and irradiated onto the incident surface 11 of the carrier substrate 1, that is, the first laser beam L1 and the second
  • the laser beam L2 is parallel, and the first laser beam L1 and the second laser beam L2 are not deflected with respect to the normal line N1 of the incident surface 11 of the carrier substrate 1.
  • the obstruction 12 on the carrier substrate 1 blocks the first laser beam L1 and the second laser beam L2 from being irradiated onto the carrier substrate 1
  • the length of the display panel 2 is D1.
  • the first laser beam L1 and the second laser beam L2 are both obliquely scanned and incident on the incident surface 11 of the carrier substrate 1, that is, the first laser beam L1 and the first The two laser beams L2 are each offset with respect to the normal line N1 of the incident surface 11 of the carrier substrate 1.
  • the first angle ⁇ is formed between the first laser beam L1 and the second laser beam L2.
  • the obstruction 12 on the carrier substrate 1 blocks the first laser beam L1 and the first
  • the length of the two laser beams L2 irradiated to the carrier substrate 1 and the display panel 2 is D2. Where D2 is less than D1.
  • the first angle ⁇ is formed between the first laser beam L1 and the second laser beam L2
  • the first laser beam L1 and the second laser beam L2 are surfaced by the carrier substrate 1.
  • the area covered by the obstruction 12 or the obstruction 12 on the surface of the laser device is reduced, thereby widening the range of scanning illumination of the first laser beam L1 and the second laser beam L2 to facilitate the carrier substrate 1 from
  • the display panel 2 is peeled off to prevent the display panel 2 from being damaged, thereby protecting the display panel 2.
  • the display panel 2 includes a substrate 10, a buffer layer 20, and a functional layer 30 which are sequentially stacked.
  • the buffer layer 20 is disposed above the substrate 10.
  • a carrier substrate 1 is disposed below the substrate 10.
  • the display panel 2 can be a flexible display panel or a non-flexible display panel.
  • the display panel 2 is a flexible display panel, and the flexible display panel is, for example, but not limited to, a liquid crystal display (LCD) panel, a Quantum Dot Light Emitting Diodes (QLED) panel, E-paper display (EPD), touch panel (Touch panel), flexible solar cell (Page View, PV) board, radio frequency identification (RFID) and other products or components with specific functions.
  • LCD liquid crystal display
  • QLED Quantum Dot Light Emitting Diodes
  • EPD E-paper display
  • Touch panel touch panel
  • PV flexible solar cell
  • RFID radio frequency identification
  • the substrate 10 is a flexible substrate, that is, a flexible substrate, and is used to support the entire display panel 2.
  • the substrate 10 is a polyimide (PI) substrate.
  • the substrate 10 can also be a polyamide (PA) substrate, a polycarbonate (PC) substrate, a polyethersulfone (PES) substrate, and a polyparaphenylene.
  • PA polyamide
  • PC polycarbonate
  • PES polyethersulfone
  • PET Polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PMMA polymethylmethacrylate
  • COC cycloolefin copolymer
  • the substrate 10 is mounted on an electronic device, and may be a curved use in which the curvature changes during use, or may be a fixed curved surface whose curvature does not change, and may be a flat surface.
  • the buffer layer 20 is disposed above the substrate 10.
  • the material of the buffer layer 20 is an inorganic insulating material.
  • the inorganic insulating material is, for example, but not limited to, silicon nitride (SiNx) or silicon oxide (SiOx). It can be understood that in other embodiments, the buffer layer 20 can also be a water oxygen barrier layer.
  • the functional layer 30 is a layer of various functional materials constituting a product or component having a display function such as a liquid crystal display, a quantum dot display, a mobile phone, a tablet computer, a navigator, or the like.
  • the functional layer 30 may be, but is not limited to, one of an electrode layer, a wiring layer, a light-emitting layer, a gas barrier layer, an adhesive layer, an adhesive layer, a thin film transistor, or a transparent conductive layer, or a combination therebetween.
  • the functional layer 30 is a wiring layer.
  • the wiring layer is specifically a metal wire.
  • FIG. 5 is a flowchart of a laser stripping method for a display panel according to an embodiment of the invention.
  • the laser stripping method of the display panel 2 includes the following steps:
  • Step 501 providing a display device 100 to be peeled off, the display device 100 to be peeled off comprises a carrier substrate 1 and a display panel 2 formed on the carrier substrate 1.
  • Step 503 scanning and illuminating the carrier substrate 1 with the first laser beam L1.
  • Step 505 scanning and illuminating the carrier substrate 1 with the second laser beam L1, wherein the first laser beam L1 is deflected toward the normal direction N1 of the incident surface 11 of the carrier substrate 1 toward the first direction X.
  • the second laser beam L2 is deflected in a second direction Y with respect to a normal N1 of the incident surface 11 of the carrier substrate 1, and the first direction X is opposite to the second direction Y.
  • step 507 the carrier substrate 1 is peeled off from the display panel 2.
  • the first laser beam L1 and the second laser beam L2 are symmetrically distributed from the normal line N1 of the incident surface 11 of the carrier substrate 1.
  • a first angle ⁇ is formed between the first laser beam L1 and the second laser beam L2, and the first angle ⁇ is greater than 0 degrees and less than 180 degrees.
  • the first laser beam L1 is scanned from the first end 101 of the display device 100 toward the second end 102, and the second laser beam L2 is scanned from the second end 102 of the display device 100 toward the first end 101. Irradiation.
  • the first laser beam L1 can be scanned from the second end 102 of the display device 100 toward the first end 101, and the second laser beam L2 can be displayed from the display.
  • the first end 101 of the device 100 is scanned for illumination toward the second end 102.
  • first laser beam L1 and the second laser beam L2 are both scanned from the first end 101 of the display device 100 toward the second end 102 or from the display device 100.
  • the two ends 102 are scanned for illumination toward the first end 101.
  • the first laser beam L1 and the second laser beam L2 are both irradiated from a side of the carrier substrate 1 facing away from the display panel 2. It is to be understood that in other embodiments, the first laser beam L1 and the second laser beam L2 may also be illuminated from a side of the carrier substrate 1 adjacent to the display panel 2. At least one of the first laser beam L1 and the second laser beam L2 is obliquely irradiated to the carrier substrate 1.
  • the first laser beam L1 and the second laser beam L2 are both obliquely irradiated to the carrier substrate 1.
  • the first laser beam L1 and the plane of the carrier substrate 1 facing away from the incident surface 11 of the display panel 2 form a second angle ⁇ away from the normal N1
  • the second laser a light beam L2 and a plane of the carrier substrate 1 facing away from the incident surface 11 of the display panel 2 form a third angle ⁇ away from the normal line N1
  • the second angle ⁇ and the third angle ⁇ are both It is an acute angle.
  • the second angle ⁇ and the third angle ⁇ are both 0-85 degrees.
  • the second angle ⁇ and The third included angle ⁇ is 0-50 degrees.
  • the second angle ⁇ is equal to the third angle ⁇ . It can be understood that in other embodiments, the second angle ⁇ is not equal to the third angle ⁇ . Specifically, when the obstruction 12 is an axisymmetric pattern, the second angle ⁇ is equal to the third angle ⁇ . When the obstruction 12 is a non-axisymmetric pattern, that is, the obstruction 12 is an irregular pattern, the second angle ⁇ and the third angle ⁇ may not be equal. Therefore, the area in which the first laser beam L1 and the second laser beam L2 are blocked by the obstruction 12 on the surface of the carrier substrate 1 or the obstruction 12 on the surface of the laser device is reduced, thereby widening the first laser. The light beam L1 and the second laser light beam L2 scan the range of the illumination to facilitate the peeling of the carrier substrate 1 from the display panel 2 to prevent the display panel 2 from being damaged, thereby protecting the display panel 2.
  • the laser stripping method of the display panel 2 is improved. Specifically, before the scanning and illuminating the carrier substrate 1 and the display panel 2 by using the first laser beam L1, Also includes:
  • the degree of deflection refers to the angle between the first laser beam L1 or the second laser beam L2 and the normal line N1 of the incident surface 11 of the carrier substrate 1.
  • the size of the obstruction 12 is inversely proportional to the angle between the second angle ⁇ and the third angle ⁇ . Specifically, when the size of the obstruction 12 is large, the angle between the second angle ⁇ and the third angle ⁇ is smaller, and when the size of the obstruction 12 is smaller, the second The angle between the angle ⁇ and the third angle ⁇ is larger, so that the range in which the first laser beam L1 and the second laser beam L2 are scanned and irradiated to the carrier substrate 1 and the display panel 2 can be widened. In order to facilitate the peeling of the display substrate 2 by the peeling of the carrier substrate 1 from the display panel 2, the display panel 2 is protected.
  • the first laser beam L1 and the second laser beam L2 simultaneously scan and illuminate the carrier substrate 1 and the display panel 2, so that the display panel 2 can be shortened from the carrier substrate 1 The time of peeling, thereby improving the peeling efficiency.
  • the second laser beam L2 scans and illuminates the carrier substrate 1 and the display panel.
  • the first laser beam L1 and the second laser beam L2 scan and illuminate the carrier substrate 1 and the display panel 2, so that the laser stripping device 200 can configure one of the lasers 4, simplifying
  • the structure of the laser stripping apparatus 200 ensures that the scanning illumination parameters of the first laser beam L1 and the second laser beam L2 are identical, thereby ensuring the energy of the first laser beam L1 and the second laser beam L2
  • the stability improves the effective scanning illumination of the first laser beam L1 and the second laser beam L2 to facilitate peeling of the carrier substrate 1 from the display panel 2.
  • the first laser beam L1 and the second laser beam L2 may scan and illuminate the carrier substrate 1 and the display panel 2 at preset time intervals.
  • the laser types of the first laser beam L1 and the second laser beam L2 include a gas laser or a solid laser.
  • the carrier substrate 1 is a glass substrate.
  • the display panel 2 includes a substrate 10, a buffer layer 20, and a functional layer 30 which are sequentially formed on the carrier substrate 1.
  • the substrate 10 is a polyimide layer, and the functional layer 30 is a wiring layer.
  • the laser light stripping method of the display panel of the present invention by scanning and irradiating the first laser beam and the second laser beam in different directions, it is possible to reduce an obstruction on the surface of the carrier substrate or an obstruction on the surface of the laser device.
  • the occluded area further broadens the range of the first laser beam and the second laser beam scanning illumination.
  • the first laser beam and the second laser beam are deflected in different directions with respect to a normal line of the incident surface of the carrier substrate, so that the first laser beam and the second laser beam can be effectively illuminated.
  • the interface between the carrier substrate and the display panel is adhered to the display panel, so that the carrier substrate can be easily peeled off from the display panel to avoid damage of the display panel, thereby protecting the display panel.

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Abstract

本发明提供了一种显示面板激光剥离方法及激光剥离设备。该显示面板激光剥离方法包括如下步骤：提供待剥离的显示器件，该待剥离的显示器件包括载体基板及形成在该载体基板上的显示面板；利用第一激光光束扫描照射该载体基板；利用第二激光光束扫描照射该载体基板，其中，该第一激光光束相对该载体基板的入射面的法线朝第一方向偏折，该第二激光光束相对该载体基板的入射面的法线朝第二方向偏折，该第一方向与该第二方向相反；将该载体基板与该显示面板剥离。本发明的显示面板激光剥离方法，通过第一激光光束和第二激光光束朝不同偏折，以扩宽有效照射面积，从而载体基板能够轻易地从显示面板上剥离而避免显示面板的破损，进而保护了显示面板。

Description

显示面板激光剥离方法及激光剥离设备 技术领域
本发明涉及显示技术领域，尤其涉及一种显示面板激光剥离方法及激光剥离设备。
背景技术
随着显示技术的发展，消费者对于显示装置的显示方式、显示效果等需求越来越多样化、个性化。柔性显示面板相对于传统的显示面板，具有可折叠、曲面和可拉伸等优点，广泛地受到消费者的青睐。
现有的显示面板通过激光剥离(Laser Lift Off，LLO)工艺从载体基板上分离。由于激光的吸收率易受环境影响容易造成局部显示面板在层离时无法有效分离，进而破坏显示面板中堆叠的各膜层。
发明内容
鉴于现有技术中存在的上述问题，本发明提供一种显示面板激光剥离方法及激光剥离设备。
为了实现上述目的，本发明实施方式提供如下技术方案：
第一方面，本发明提供了一种显示面板激光剥离方法，其包括如下步骤：
提供待剥离的显示器件，所述待剥离的显示器件包括载体基板及形成在所述载体基板上的显示面板；
利用第一激光光束扫描照射所述载体基板；
利用第二激光光束扫描照射所述载体基板，其中，所述第一激光光束相对所述载体基板的入射面的法线朝第一方向偏折，所述第二激光光束相对所述载体基板的入射面的法线朝第二方向偏折，所述第一方向与所述第二方向相反；
将所述载体基板与所述显示面板剥离。
第二方面，本发明提供了一种应用所述显示面板激光剥离方法的激光剥离 设备，其包括光学元件，所述光学元件用于改变所述第一激光光束和所述第二激光光束的传播路径。
本发明的显示面板激光剥离方法和激光剥离设备，通过所述第一激光光束和所述第二激光光束朝不同的方向进行扫描照射，从而能够降低被所述载体基板表面的遮挡物或激光设备表面的遮挡物所遮挡的面积，进而扩宽所述第一激光光束和所述第二激光光束扫描照射的范围。此外，利用所述第一激光光束和所述第二激光光束相对所述载体基板的入射面的法线朝不同方向偏折，因此所述第一激光光束和所述第二激光光束能够有效照射到所述载体基板与所述显示面板贴合的界面，从而所述载体基板能够轻易地从所述显示面板上剥离而避免所述显示面板的破损，进而保护了所述显示面板。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明实施例提供的显示面板激光剥离制造流程示意图。
图2是本发明实施例提供的激光剥离设备的结构示意图。
图3是图1中的待剥离的显示器件的第一光路结构示意图。
图4是图1中的待剥离的显示器件的第二光路结构示意图。
图5是本发明实施例提供的显示面板激光剥离方法的流程图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造 性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1和图2，为本发明实施例提供了一种显示面板激光剥离制造的流程示意图。首先，将待剥离的显示器件100放置在激光剥离设备200。所述待剥离的显示器件100包括载体基板1及形成在所述载体基板1上的显示面板2。所述显示面板2具有与所述载体基板1相贴合的界面103。
所述激光剥离设备200包括剥离台3、激光器4、光学元件5及控制器6。所述剥离台3用于承载所述待剥离的显示器件100。所述激光器4用于发射激光光束。当所述激光光束照射至所述载体基板1与所述显示面板2贴合的界面103时，所述显示面板2可从所述载体基板1上剥离。所述光学元件5用于改变所述激光光束传播的路径。所述光学元件例如是折射件或反射件。可选的，所述光学元件为反射件。所述控制器6用于控制所述激光器4发射所述激光光束。
所述激光光束可以为气体激光或固体激光。所述固体激光例如是半导体激光。所述气体激光例如是，但不局限于准分子激光、Nd-YAG激光、Ar激光、CO 2激光或He-Ne激光等。这些激光光束可根据波长而大致区分为紫外线(UV)区域用激光(410nm以下)、可见区域对激光(500nm～700nm)、近红外区域的大激光(700nm～2000nm)、红外线区域对激光(2000nm以上)等。在本实施例中，所述激光光束使用410nm以下的波长区域的激光。优选的，所述激光光束的波长为308nm。
所述载体基板1为玻璃基板。具体的，所述玻璃基板例如是，但不局限于钠钙玻璃、无碱玻璃、磷酸系玻璃或石英。所述载体基板1具有背离所述显示面板2的入射面11。可以理解的，所述载体基板1在生产或运输过程中容易堆积灰尘、杂质等环境污染物，从而容易在所述载体基板1的入射面11形成遮挡物12，且所述剥离激光设备也容易残留遮挡物，因此在激光剥离过程中，由于这些遮挡物12会阻挡激光光束穿过的路径，从而使得激光光束不能有效地照射至所述载体基板1和所述显示面板2贴合的界面103，从而在剥离过程 中易在遮挡物12对应的区域造成裂纹，进而造成显示面板2内部线路的损伤及薄膜封装(Thin Film Encapsulation，TFE)破坏的风险。
在本实施例中，所述显示面板2在激光剥离过程中，利用第一激光光束L1扫描照射所述载体基板1，再利用第二激光光束L2扫描照射所述载体基板1。其中，所述第一激光光束L1相对所述载体基板1的入射面11的法线N1朝第一方向X偏折，所述第二激光光束L2相对所述载体基板1的入射面11的法线N1朝第二方向Y偏折，所述第一方向X与所述第二方向Y相反。随后，将所述载体基板1与所述显示面板2剥离。
可以理解的，所述载体基板1的入射面11的法线N1是指垂直于所述入射面11的直线。在本实施例中，所述法线N1是指所述第一激光光束L1和第二激光光束L2扫描照射至所述载体基板1的入射面11处的垂线。所述第一激光光束L1和所述第二激光光束L2自所述载体基板1的入射面11的法线N1呈对称分布。
在其他实施例中，其中一个所述第一激光光束L1或所述第二激光光束L2可相对所述载体基板1的入射面11的法线N1朝第一方向X或第二方向Y偏折，而另一个所述第一激光光束L1或所述第二激光光束L2可平行所述载体基板1的入射面11的法线N1，也即所述第一激光光束L1和所述第二激光光束L2之间始终形成第一夹角α(参看图4)。所述第一夹角α大于0度且小于180度。
在一实施例中，所述第一激光光束L1和所述第二激光光束L2同时扫描照射所述载体基板1。在另一实施例中，在所述第一激光光束L1扫描照射所述载体基板1后，所述第二激光光束L2再扫描照射所述载体基板1。
所述显示器件100包括相对的第一末端101和第二末端102。在一实施例中，所述第一激光光束L1自所述显示器件100的第一末端101扫描照射至所述显示器件100的第二末端102；所述第二激光光束L2自所述显示器件100的第二末端102扫描照射至所述显示器件100的第一末端101。在另一实施例 中，所述第一激光光束L1和所述第二激光光束L2均自所述显示器件100的第一末端101扫描照射至所述显示器件100的第二末端102或是自所述显示器件100的第二末端102扫描照射至所述显示器件100的第一末端101。
如图3所示，所述第一激光光束L1和所述第二激光光束L2均垂直扫描照射至所述载体基板1的入射面11，也即所述第一激光光束L1与所述第二激光光束L2平行，且所述第一激光光束L1和所述第二激光光束L2相对所述载体基板1的入射面11的法线N1均未偏折。当所述第一激光光束L1与所述第二激光光束L2平行时，所述载体基板1上的遮挡物12阻挡第一激光光束L1和所述第二激光光束L2照射至所述载体基板1和所述显示面板2的长度为D1。如图4所示，所述第一激光光束L1和所述第二激光光束L2均倾斜地扫描照射至所述载体基板1的入射面11，也即所述第一激光光束L1和所述第二激光光束L2均相对所述载体基板1的入射面11的法线N1偏折。此时，所述第一激光光束L1与所述第二激光光束L2之间形成所述第一夹角α。当所述第一激光光束L1与所述第二激光光束L2之间形成所述第一夹角α时，所述载体基板1上的遮挡物12阻挡所述第一激光光束L1和所述第二激光光束L2照射至所述载体基板1和所述显示面板2的长度为D2。其中，D2小于D1。因此，当所述第一激光光束L1和所述第二激光光束L2之间形成第一夹角α时，所述第一激光光束L1和所述第二激光光束L2被所述载体基板1表面的遮挡物12或激光设备表面的遮挡物12所遮挡的面积减小，进而扩宽所述第一激光光束L1和所述第二激光光束L2扫描照射的范围，以利于所述载体基板1从所述显示面板2上剥离而避免所述显示面板2造成破损，进而保护了所述显示面板2。
所述显示面板2包括依次层叠的基板10、缓冲层20及功能层30。所述缓冲层20设置在所述基板10的上方。所述基板10的下方设置有载体基板1。
可以理解的，所述显示面板2可以是柔性显示面板或非柔性显示面板。优选的，所述显示面板2为柔性显示面板，所述柔性显示面板例如是，但不局限于液晶显示(Liquid Crystal Display,LCD)面板、量子点显示(Quantum Dot Light  Emitting Diodes，QLED)面板、电子纸(E-paper Display，EPD)、触摸屏(Touch panel)、柔性太阳能电池(Page View，PV)板、射频标签(Radio Frequency Identification,RFID)等具有特定功能的产品或部件。
所述基板10为可弯曲的基板，也即为柔性基板，且用于支撑整个所述显示面板2。在本实施例中，所述基板10为聚酰亚胺(Polyimide，简称PI)基板。可以理解的，在其他实施例中，所述基板10还可以为聚酰胺(polyamide，PA)基板、聚碳酸酯(polycarbonate，PC)基板、聚苯醚砜(polyethersulfone，PES)基板、聚对苯二甲酸乙二醇酯(polyethylene terephthalate，PET)基板、聚萘二甲酸乙二醇酯(polyethylene naphthalate，PEN)基板、聚甲基丙烯酸甲酯(polymethylmethacrylate，PMMA)基板、环烯烃共聚物(cycloolefin copolymer，COC)基板中的一种。所述基板10搭载于电子设备的形态中，可为曲率在使用时发生变化的弯曲用途，也可为曲率不发生变化的固定曲面，另外还可为平面。
所述缓冲层20设置在所述基板10的上方。所述缓冲层20的材料为无机绝缘材料。所述无机绝缘材料例如是，但不局限于氮化硅(SiNx)或氧化硅(SiOx)。可以理解的，在其他实施例中，所述缓冲层20还可以水氧阻隔层。
可以理解的，所述功能层30是构成液晶显示器、量子点显示器、手机、平板电脑、导航仪等具有显示功能的产品或部件的各种功能性材料层。所述功能层30可以是，但不局限于电极层、配线层、发光层、阻气层、接着层、粘着层、薄膜晶体管或透明导电层等中的一种或他们之间的组合。在本实施例中，所述功能层30为配线层。所述配线层具体为金属线。
请参看图5，为本发明实施例提供了一种显示面板激光剥离方法的流程图。所述显示面板2激光剥离方法包括如下步骤：
步骤501，提供待剥离的显示器件100，所述待剥离的显示器件100包括载体基板1及形成在所述载体基板1上的显示面板2。
步骤503，利用第一激光光束L1扫描照射所述载体基板1。
步骤505，利用第二激光光束L2扫描照射所述载体基板1，其中，所述第 一激光光束L1相对所述载体基板1的入射面11的法线N1朝第一方向X偏折，所述第二激光光束L2相对所述载体基板1的入射面11的法线N1朝第二方向Y偏折，所述第一方向X与所述第二方向Y相反。
步骤507，将所述载体基板1与所述显示面板2剥离。
如图1至图4所示，在一实施例中，所述第一激光光束L1和所述第二激光光束L2自所述载体基板1的入射面11的法线N1呈对称分布。所述第一激光光束L1和所述第二激光光束L2之间形成第一夹角α，所述第一夹角α大于0度小于180度。所述第一激光光束L1自所述显示器件100的第一末端101朝第二末端102扫描照射，所述第二激光光束L2自所述显示器件100的第二末端102朝第一末端101扫描照射。可以理解的，在另一实施例中，所述第一激光光束L1可自所述显示器件100的第二末端102朝第一末端101扫描照射，所述第二激光光束L2可自所述显示器件100的第一末端101朝第二末端102扫描照射。
在另一实施例中，所述第一激光光束L1和所述第二激光光束L2均从所述显示器件100的第一末端101朝第二末端102扫描照射或从所述显示器件100的第二末端102朝第一末端101扫描照射。
在本实施例中，所述第一激光光束L1和所述第二激光光束L2均自所述载体基板1背离所述显示面板2的一侧照射。可以理解的，在其他实施例中，所述第一激光光束L1和所述第二激光光束L2也可自所述载体基板1靠近所述显示面板2的一侧照射。所述第一激光光束L1和所述第二激光光束L2中的至少一个倾斜地照射至所述载体基板1。可选的，所述第一激光光束L1和所述第二激光光束L2均倾斜地照射至所述载体基板1。
请再次参看图4，所述第一激光光束L1与所述载体基板1背离所述显示面板2的入射面11所在平面形成背离所述法线N1的第二夹角β，所述第二激光光束L2与所述载体基板1背离所述显示面板2的入射面11所在平面形成背离所述法线N1的第三夹角δ，所述第二夹角β和所述第三夹角δ均为锐角。
可选的，所述第二夹角β和所述第三夹角δ均为0-85度。优选的，为了使所述第一激光光束L1和所述第二激光光束L2更有效地照射至所述载体基板1和所述基板10贴合的界面103上，所述第二夹角β和所述第三夹角δ均为0-50度。
在本实施例中，所述第二夹角β与所述第三夹角δ相等。可以理解的，在其他实施例中，所述第二夹角β与所述第三夹角δ不相等。具体的，当所述遮挡物12为轴对称图形时，所述第二夹角β与所述第三夹角δ相等。当所述遮挡物12为非轴对称图形时，也即所述遮挡物12为不规则图形，所述第二夹角β与所述第三夹角δ可不相等。因此，所述第一激光光束L1和所述第二激光光束L2被所述载体基板1表面的遮挡物12或激光设备表面的遮挡物12遮挡的面积减小，从而扩宽所述第一激光光束L1和所述第二激光光束L2扫描照射的范围，以利于所述载体基板1从所述显示面板2上剥离而避免所述显示面板2造成破损，进而保护了所述显示面板2。
可选的，在上述实施例的基础上，对显示面板2激光剥离方法做了改进，具体的，在所述利用第一激光光束L1扫描照射所述载体基板1和所述显示面板2之前，还包括：
检测所述载体基板1的入射面11上的遮挡物12的尺寸大小；
根据所述遮挡物12的尺寸大小确定根据所述表面遮挡物的尺寸大小确定所述第一激光光束L1和所述第二激光光束L2的偏折度，也即确定所述第二夹角β和所述第三夹角δ的角度大小。
可以理解的，所述偏折度是指所述第一激光光束L1或所述第二激光光束L2与所述载体基板1的入射面11的法线N1之间的角度。所述遮挡物12的尺寸大小与所述第二夹角β和所述第三夹角δ的角度大小呈反比。具体的，当所述遮挡物12的尺寸较大时，所述第二夹角β和所述第三夹角δ的角度越小，当所述遮挡物12的尺寸较小时，所述第二夹角β和所述第三夹角δ的角度越大，从而可扩宽所述第一激光光束L1和所述第二激光光束L2扫描照射所述 载体基板1和所述显示面板2的范围，以利于所述载体基板1从所述显示面板2上剥离而避免所述显示面板2造成破损，进而保护了所述显示面板2。
在一实施例中，所述第一激光光束L1和所述第二激光光束L2同时扫描照射所述载体基板1和所述显示面板2，从而能够缩短所述显示面板2从所述载体基板1剥离的时间，进而提高剥离效率。在另一实施例中，当所述第一激光光束L1扫描照射所述载体基板1和所述显示面板2后，所述第二激光光束L2再扫描照射所述载体基板1和所述显示面板2，也即所述第一激光光束L1和所述第二激光光束L2来回扫描照射所述载体基板1和所述显示面板2，因此所述激光剥离设备200可配置一个所述激光器4，简化激光剥离设备200的结构，并且确保所述第一激光光束L1和所述第二激光光束L2的扫描照射参数一致，从而保证了所述第一激光光束L1和所述第二激光光束L2的能量稳定性，进而提高了所述第一激光光束L1和所述第二激光光束L2的有效扫描照射，以利于所述载体基板1与所述显示面板2的剥离。进一步的，在其他实施例中，所述第一激光光束L1和所述第二激光光束L2可按照预设时间间隔扫描照射所述载体基板1和所述显示面板2。
其中，在本实施例中，所述第一激光光束L1和所述第二激光光束L2的激光类型包括气体激光或固体激光。所述载体基板1为玻璃基板。所述显示面板2包括依次形成在所述载体基板1上的基板10，缓冲层20和功能层30。所述基板10为聚酰亚胺层，所述功能层30为配线层。
本发明的显示面板激光剥离方法，通过所述第一激光光束和所述第二激光光束朝不同的方向进行扫描照射，从而能够降低被所述载体基板表面的遮挡物或激光设备表面的遮挡物所遮挡的面积，进而扩宽所述第一激光光束和所述第二激光光束扫描照射的范围。此外，利用所述第一激光光束和所述第二激光光束相对所述载体基板的入射面的法线朝不同方向偏折，因此所述第一激光光束和所述第二激光光束能够有效照射到所述载体基板与所述显示面板贴合的界面，从而所述载体基板能够轻易地从所述显示面板上剥离而避免所述显示面板 的破损，进而保护了所述显示面板。
以上所述的实施方式，并不构成对该技术方案保护范围的限制。任何在上述实施方式的精神和原则之内所作的修改、等同替换和改进等，均应包含在该技术方案的保护范围之内。

Claims (20)

  1. 一种显示面板激光剥离方法，其包括如下步骤:
    提供待剥离的显示器件，所述待剥离的显示器件包括载体基板及形成在所述载体基板上的显示面板；
    利用第一激光光束扫描照射所述载体基板；
    利用第二激光光束扫描照射所述载体基板，其中，所述第一激光光束相对所述载体基板的入射面的法线朝第一方向偏折，所述第二激光光束相对所述载体基板的入射面的法线朝第二方向偏折，所述第一方向与所述第二方向相反；
    将所述载体基板与所述显示面板剥离。
  2. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束自所述载体基板的入射面的法线呈对称分布。
  3. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束均自所述载体基板背离所述显示面板的一侧照射。
  4. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束之间形成第一夹角，所述第一夹角大于0度且小于180度。
  5. 如权利要求4所述的显示面板激光剥离方法，其特征在于，所述第一激光光束与所述载体基板背离所述显示面板的入射面所在平面形成背离所述法线的第二夹角，所述第二激光光束与所述载体基板背离所述显示面板的入射面所在平面形成背离所述法线的第三夹角，所述第二夹角和所述第三夹角均为锐角。
  6. 如权利要求5所述的显示面板激光剥离方法，其特征在于，所述锐角为0-85度。
  7. 如权利要求6所述的显示面板激光剥离方法，其特征在于，所述锐角为0-50度。
  8. 如权利要求5所述的显示面板激光剥离方法，其特征在于，所述第二夹角与所述第三夹角相等。
  9. 如权利要求1所述的显示面板激光剥离方法，其特征在于，在所述利用第一激光光束扫描照射所述载体基板之前，还包括：
    检测所述载体基板的入射面的遮挡物的尺寸大小；
    根据所述表面遮挡物的尺寸大小确定所述第一激光光束和所述第二激光光束的偏折度。
  10. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束同时扫描照射所述载体基板。
  11. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束按预设时间间隔扫描照射所述载体基板。
  12. 如权利要求11所述的显示面板激光剥离方法，其特征在于，在所述第一激光光束扫描照射所述载体基板后，所述第二激光光束再扫描照射所述载体基板。
  13. 如权利要求12所述的显示面板激光剥离方法，其特征在于，所述显示器件具有相对的第一末端和第二末端，所述第一激光光束自所述显示器件的第一末端扫描照射至所述显示器件的第二末端；所述第二激光光束自所述显示器件的第二末端扫描照射至所述显示器件的第一末端。
  14. 如权利要求13所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束均自所述显示器件的第一末端扫描照射至所述显示器件的第二末端或是自所述显示器件的第二末端扫描照射至所述显示器件的第一末端。
  15. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述载体基板为玻璃基板。
  16. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束的类型包括气体激光或固体激光。
  17. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述第一激光光束和所述第二激光光束的波长均为308nm。
  18. 如权利要求1所述的显示面板激光剥离方法，其特征在于，所述显示面板包括依次形成在所述载体基板上的基板，缓冲层和功能层。
  19. 如权利要求18所述的显示面板激光剥离方法，其特征在于，所述基板为聚酰亚胺层，所述功能层为配线层。
  20. 一种应用权利要求1-19任意一项所述显示面板激光剥离方法的激光剥离设备，其特征在于，包括光学元件，所述光学元件用于改变所述第一激光光束和所述第二激光光束的传播路径。
PCT/CN2018/083918 2018-04-20 2018-04-20 显示面板激光剥离方法及激光剥离设备 WO2019200611A1 (zh)

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