WO2019127025A1 - Integrated light-emitting assembly with wide temperature range and low power consumption - Google Patents

Integrated light-emitting assembly with wide temperature range and low power consumption Download PDF

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Publication number
WO2019127025A1
WO2019127025A1 PCT/CN2017/118665 CN2017118665W WO2019127025A1 WO 2019127025 A1 WO2019127025 A1 WO 2019127025A1 CN 2017118665 W CN2017118665 W CN 2017118665W WO 2019127025 A1 WO2019127025 A1 WO 2019127025A1
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Prior art keywords
layer
cold surface
low power
integrated light
wide temperature
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PCT/CN2017/118665
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French (fr)
Chinese (zh)
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宋小平
徐红春
刘成刚
岳阳阳
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武汉电信器件有限公司
武汉光迅科技股份有限公司
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Publication of WO2019127025A1 publication Critical patent/WO2019127025A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4266Thermal aspects, temperature control or temperature monitoring
    • G02B6/4268Cooling
    • G02B6/4271Cooling with thermo electric cooling
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4266Thermal aspects, temperature control or temperature monitoring

Definitions

  • the invention relates to a light emitting component capable of operating at -40 ° C to 85 ° C with thermoelectric refrigeration, and is mainly used in a 100 G optical module.
  • the invention belongs to the fields of communication and optoelectronics.
  • the future fifth-generation mobile communication has become a global research and development hotspot.
  • the main technical scenarios of 5G have four characteristics: continuous wide-area coverage, hot-spot high-capacity, low-power large connections and low latency and high reliability.
  • the low-power and large-connection scenario is mainly for smart city, environmental monitoring, intelligent agriculture, forest fire prevention and other application scenarios targeting sensing and data acquisition. It has the characteristics of small data packet, low power consumption and massive connection.
  • This kind of terminal has a wide distribution range and a large number of terminals.
  • the application environment of the integrated EML light emitting component is mainly -5 ° C ⁇ 70 ° C, as shown in Figure 1, Figure 2, can not meet the working requirements under harsh temperature conditions.
  • the main reasons for not being able to work at wide temperature are: the passive heat load caused by the heat conduction of gold wire is too large; the multiple materials are bonded together with solder or glue, and the thermal resistance is large, resulting in limited working temperature; TEC unit The area cooling efficiency is limited, making the device unable to operate at wide temperature (-40 ° C ⁇ 85 ° C).
  • the application prospect of a wide-temperature and low-power integrated light-emitting component is very broad.
  • the technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a wide temperature and low power integrated light emitting component.
  • a wide temperature and low power integrated light emitting component comprises a heat sensitive component, a TEC, a package, wherein the package is provided with a lead; the TEC comprises a second layer of cold noodles arranged in order from top to bottom, a two-layer semiconductor refrigeration element, a first layer cold surface, a first layer semiconductor refrigeration element, and a TEC hot surface double-layer refrigerator unit, wherein the heat sensitive element is fixed on a second layer cold surface of the TEC, the first A heat insulator is disposed on the layer cold surface, and the heat insulator is respectively connected to the second layer cold surface and the lead, and the first layer semiconductor refrigeration element is connected to the second layer semiconductor refrigeration element through the electrode.
  • a collimating optical unit a multiplexer assembly, a package, an output unit, a heat sensitive component, a backlight detector, a semiconductor laser chip, a thermistor, the backlight detector, the semiconductor laser chip, and the thermistor fixed to the TEC
  • the emitted light of the semiconductor laser chip is transmitted to the multiplexer assembly through the optical collimation unit.
  • the heat insulator adopts a heat insulating block, and the heat insulating block is disposed on the cold surface of the second layer.
  • the backlight detector, the semiconductor laser chip, and the thermistor are fixed on the cold surface of the second layer, and one end of the cold surface of the second layer is connected to the tube shell, and the other end is connected to the transition block.
  • the semiconductor laser chip is mounted on a transition block, and the transition block is fixed to the cold surface of the second layer.
  • the insulating block uses a material having a low thermal conductivity.
  • the optical collimating unit is disposed on the first layer of cold surface of the TEC.
  • the multiplexed optical component is fixed on the bottom of the shell, the isolator is fixed on the light window of the shell; the concentrating optical component is fixed on the shell, and the plug is inserted
  • the needle assembly is attached to the converging optic.
  • the shell adopts a shell with a high-frequency transmission line structure, the shell adopts a kovar material, the bottom of the shell adopts tungsten copper, and the shell is provided with a sapphire sealing light window.
  • the cold surface of the second layer is made of AL2O3 or ALN, and the cold surface is provided with a design pattern.
  • the present invention precisely controls the operating temperature of the entire active chip and enables it to operate in a wide temperature range of -40 ° C to 85 ° C;
  • the device of the invention adopts a double-layer TEC structure, and has higher cooling and heating efficiency per unit area, lower power consumption, and can work in a wider temperature range than the existing similar device packaging structure;
  • the double-layer TEC structure of the invention reduces the metal heat sink for height control and heat conduction, reduces the assembly components of the device, and is simpler in process.
  • the invention adopts a transition block for heat insulation, which reduces the passive heat load caused by gold wire conduction.
  • FIG. 1 is a partial transverse cross-sectional view showing the internal structure of an optical device with a single layer TEC and a single layer heat sink;
  • FIG. 2 is a partial transverse cross-sectional view showing the internal structure of an optical device with a double layer TEC and a double layer heat sink;
  • FIG. 3 is a transverse cross-sectional view showing an overall package structure of an optical device with a double layer TEC and no tungsten copper heat sink according to the present invention
  • FIG. 4 is a longitudinal cross-sectional view of an optical device overall package structure with a double layer TEC and no tungsten copper heat sink;
  • FIG. 5 is a transverse cross-sectional view showing an overall package structure of an optical device with a double-layer TEC and a tungsten-copper heat sink according to the present invention
  • FIG. 6 is a longitudinal cross-sectional view of an optical device overall package structure with a double-layer TEC and a tungsten-copper heat sink according to the present invention
  • Figure 7 is a double layer TEC structure employed in the present invention.
  • Figure 8 is a prior art single layer TEC structure
  • Insulation pad 2. Tungsten copper heat sink;
  • the first layer of semiconductor refrigeration components 20, TEC hot surface;
  • the apparatus of the present invention needs to include a functional unit having a core: a two-layer refrigerator temperature control unit having a temperature difference between the first layer and the second layer.
  • the second layer of the cold surface of the refrigerator is made of alumina ceramic or aluminum nitride ceramic, directly designed on the cold surface of the upper refrigerator, placing chips and high-frequency circuits, or placing surface-mounted chips, backlight detectors and surface inclusions.
  • the double-layer TEC temperature control unit increases the number of crystals for thermal handling of the TEC in the effective area, resulting in a larger operating temperature difference for the component. The reduction in heat capacity and passive heat load also reduces the power consumption of the
  • FIGS. 3, 4, 5, and 6 are cross-sectional views of an entire package of an optical device of the present invention.
  • the device structure of the present invention comprises a heat insulating block 1, a tungsten copper heat sink 2, a thermistor 3, a backlight detector 4, a semiconductor laser chip 5, and a transition.
  • Block 6 collimating optical unit 7, refrigerator 8 (TEC), multiplexer assembly 9, optical isolator 10, converging optical assembly 11, pin assembly 12, tube casing 13, tube cover 14, and casing 13 means
  • the shell of the high-frequency transmission line structure is made of kovar material
  • the bottom of the tube shell is tungsten copper
  • the transmission line structure is composed of multi-layer high-temperature co-fired ceramics
  • the tube shell contains sapphire sealing light window
  • the tube cover 14 is thermally resisted. It is fixed to the envelope 13 to provide a sealing effect.
  • the refrigerator 8 is a double-layered refrigerator including a double-layer refrigerator second layer cold surface 16, a second layer semiconductor refrigeration element 17, a first layer cold surface 18, a first layer semiconductor refrigeration element 19, TEC hot side 20.
  • the refrigerator is fixed to the envelope 13 by solder or epoxy glue.
  • the device of the present invention is designed to make the double layer TEC adaptively generate a certain temperature difference between the first layer cold surface 18 and the double layer TEC second layer cold surface 16.
  • the double layer TEC structure employed in the present invention is shown in FIG. The temperature difference is related to the number and area of the two layers of semiconductor refrigeration components of the refrigerator, and the number and area of the upper and lower layers of the semiconductor refrigeration components are changed, and the temperature difference between the first layer cold surface and the second layer cold surface can be effectively changed.
  • the backlight detector 4, the semiconductor laser chip 5, and the thermistor 3 are fixed to the second layer cold surface 16 of the TEC 8 by solder or epoxy glue, or first fixed to the transition heat sink 2 by solder or epoxy glue, passing through Solder or epoxy glue is fixed to the second layer cold surface 16 of the TEC 8;
  • the heat insulating block 1 is a block having a heat insulating effect, and the block is made of a material having a heat insulating effect, and the block block contains a high
  • the frequency transmission line structure, together with the die, constitutes a high frequency circuit loop.
  • One end of the insulating block 1 is connected to the tube casing 13 by a gold wire, and the other portion is connected to the second layer cold surface 16 of the refrigerator 8 by a gold wire or to the tungsten copper heat sink 2 on the first layer cold surface 18.
  • the optical collimation unit 7 is placed on the first layer of cold surface 18 of the refrigerator 8; the multiplexed optical element 9 is fixed to the bottom of the envelope 13.
  • the isolator 10 is fixed to the sealing window of the envelope 13; the converging optical element 11 is fixed to the envelope 13, and the pin assembly 12 is fixed to the converging optical element 11.
  • the semiconductor laser chip 5 in this embodiment can also be mounted on the transition block 6, and the transition block 6 is fixed to the second layer cold surface 16.
  • the heat insulating block 1 is a pad of a material having a lower thermal conductivity, and the block has a high frequency circuit which is assembled to the first layer of cold surface 18 of the refrigerator 8, which has a thermal conductivity.
  • the low material is intended to prevent heat from being conducted from the first cold face 18 of the TEC through the gold wire to the surface of the transition block 6 or to the surface of the tungsten copper heat sink 2, increasing the passive heat load.
  • the insulating block is connected at one end to the tube by a gold wire, and the other end is connected to the second layer cold surface 16 of the TEC.
  • the gold wire in the case of high ambient temperature, the gold wire is a good conductor of heat, and the gold wire transmits the heat on the tube shell 13 to the surface of the TEC to cause passive heat load, effectively reducing the temperature difference between the two ends of the gold wire, which is effective
  • the heat insulating block 1 is placed on the second cold surface of the TEC, and the temperature of the second layer is higher than that of the first layer, which effectively reduces the gold wire compared with the ordinary single layer TEC structure.
  • the temperature difference between the two ends effectively reduces the passive thermal load of the device.
  • This adaptive structure creates a temperature difference between the upper and lower layers of the TEC surface, and the lower layer TEC has a higher temperature than the upper layer.
  • the metal heat sink 15 is reduced compared with the conventional device, the thermal resistance is reduced, and the power consumption is reduced.
  • the collimating optical unit 7 is placed on the first layer of cold surface 18 of the refrigerator 8, and the apparatus of the present invention also greatly reduces the heat capacity compared to the conventional structure, effectively reducing the efficiency of the device.
  • Embodiment 2 is a diagrammatic representation of Embodiment 1:
  • the backlight detector 4 and the semiconductor laser chip 5 are mounted on the first layer cold surface 18 of the refrigerator 8 through a tungsten-copper heat sink 2, and the heat generated by the semiconductor laser chip 5 is directly generated by the upper layer TEC pump. Go to the lower TEC.
  • the present invention utilizes a double-layer TEC structure to directly place a laser chip or an ALN transition block on which a laser chip and a backlight detector are mounted on a first layer TEC.
  • the present invention has the following advantages: By using the height difference between the first layer and the second layer TEC, the metal tungsten-copper heat sink element for height control and heat conduction is directly removed, the components of the laser component are reduced, the assembly process of the component is omitted, and the component is improved. Production efficiency, while also reducing the thermal capacity and thermal resistance of the components, greatly reducing the power consumption of the components.
  • the present invention utilizes a double-layer TEC package structure to mount a transition piece of other materials having thermal insulation effects on the second layer of the TEC, because the first layer and the second layer of the TEC have temperature adaptive functions, and the TEC is second.
  • the temperature of the layer structure is higher than that of the first layer, which is connected to the tube shell by one end of the gold wire, and the other end is connected to the chip of the first layer structure of the TEC or the transition piece of the chip.
  • the gold wire is a good conductor of heat because the temperature of the second layer of the TEC is higher than that of the first layer, compared to the conventional process, such as the single layer TEC structure of FIG.
  • This structure greatly reduces the passive thermal load caused by the heat conduction of the gold wire, greatly reducing the overall power consumption of the component. The more integrated the device, the more obvious the effect of reducing power consumption.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

Disclosed is an integrated light-emitting assembly with a wide temperature range and a low power consumption, comprising a thermosensitive element (3), a refrigerator TEC (8) and a tube shell (13), wherein the tube shell is provided with a pin; the refrigerator TEC is a double-layer refrigeration unit composed of a second layer cold surface (16), a second layer semiconductor refrigeration element (17), a first layer cold surface (18), a first layer semiconductor refrigeration element (19), and a refrigerator TEC hot surface (20) successively arranged from top to bottom; the thermosensitive element is fixed to the second layer cold surface of the refrigerator TEC; the first layer cold surface is provided with a heat insulator (1) respectively connected to the second layer cold surface and the pin; and the first layer semiconductor refrigeration element is connected to the second layer semiconductor refrigeration element via an electrode. Compared with existing similar device package structures, the double-layer refrigerator TEC structure has a better cooling and heating efficiency per unit area and a lower power consumption, and can also operate in a wider temperature range.

Description

一种宽温低功耗集成光发射组件Wide temperature and low power integrated light emitting component 技术领域Technical field
本发明涉及一种能工作在-40℃~85℃带热电制冷的光发射组件,主要应用于100G光模块中,本发明属于通信以及光电子领域。The invention relates to a light emitting component capable of operating at -40 ° C to 85 ° C with thermoelectric refrigeration, and is mainly used in a 100 G optical module. The invention belongs to the fields of communication and optoelectronics.
背景技术Background technique
随着4G进入规模商用阶段,未来的第五代移动通信(5G)已成为全球研发热点。从未来移动互联网和物联网主要应用场景、业务需求及挑战出发,5G的主要技术场景有四大特点:连续广域覆盖、热点高容量、低功耗大连接和低时延高可靠。其中低功耗大连接场景主要面向智慧城市、环境监测、智能农业、森林防火等以传感和数据采集为目标的应用场景,具有小数据包、低功耗、海量连接等特点。这类终端分布范围广、数量众多,不仅要求网络具备超千亿连接的支持能力,满足100G连接数密度指标要求,而且还要保证终端的超低功耗和超低成本,在这种大环境下,对满足宽温(-40℃~85℃)的发射组件有了大量的市场需求。As 4G enters the commercial stage of scale, the future fifth-generation mobile communication (5G) has become a global research and development hotspot. Starting from the main application scenarios, service requirements and challenges of the mobile Internet and the Internet of Things in the future, the main technical scenarios of 5G have four characteristics: continuous wide-area coverage, hot-spot high-capacity, low-power large connections and low latency and high reliability. The low-power and large-connection scenario is mainly for smart city, environmental monitoring, intelligent agriculture, forest fire prevention and other application scenarios targeting sensing and data acquisition. It has the characteristics of small data packet, low power consumption and massive connection. This kind of terminal has a wide distribution range and a large number of terminals. It not only requires the network to have the support capacity of over 100 billion connections, meets the requirements of the 100G connection number density index, but also ensures the ultra-low power consumption and ultra-low cost of the terminal. Under the hood, there is a large market demand for transmitting components that meet wide temperature (-40 ° C ~ 85 ° C).
在现有技术的条件下,集成EML光发射组件的应用环境主要是-5℃~70℃,如图1、图2,不能满足在恶劣温度条件下的工作要求。造成不能够在宽温工作的主要原因有:由金丝热传导带来的被动热载太大;多个物料用焊料或胶粘接在一起,热阻较大,导致工作温度受限;TEC单位面积制冷效率有限,使得器件不能够在宽温(-40℃~85℃)条件下工作。综上,一种能满足宽温低功耗集成光发射组件的应用前景十分广泛。Under the conditions of the prior art, the application environment of the integrated EML light emitting component is mainly -5 ° C ~ 70 ° C, as shown in Figure 1, Figure 2, can not meet the working requirements under harsh temperature conditions. The main reasons for not being able to work at wide temperature are: the passive heat load caused by the heat conduction of gold wire is too large; the multiple materials are bonded together with solder or glue, and the thermal resistance is large, resulting in limited working temperature; TEC unit The area cooling efficiency is limited, making the device unable to operate at wide temperature (-40 ° C ~ 85 ° C). In summary, the application prospect of a wide-temperature and low-power integrated light-emitting component is very broad.
发明内容Summary of the invention
本发明所要解决的技术问题是克服现在技术的不足,提供一种宽温低功耗集成光发射组件。The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a wide temperature and low power integrated light emitting component.
一种宽温低功耗集成光发射组件,包括热敏感元件、TEC、管壳,所述管壳上设置有引脚;所述TEC包括由上至下依次排列的第二层冷面、第二层半导体制冷元件、第一层冷面、第一层半导体制冷元件、TEC热面组成的双层制冷器单元,所述热敏感元件固定于TEC的第二层冷面上,所述第一层冷面上设置有隔热体,该隔热体分别与第二层冷面、引脚连接,第一层半导体制冷元件通过电极与第二层半导体制冷元件连接。A wide temperature and low power integrated light emitting component comprises a heat sensitive component, a TEC, a package, wherein the package is provided with a lead; the TEC comprises a second layer of cold noodles arranged in order from top to bottom, a two-layer semiconductor refrigeration element, a first layer cold surface, a first layer semiconductor refrigeration element, and a TEC hot surface double-layer refrigerator unit, wherein the heat sensitive element is fixed on a second layer cold surface of the TEC, the first A heat insulator is disposed on the layer cold surface, and the heat insulator is respectively connected to the second layer cold surface and the lead, and the first layer semiconductor refrigeration element is connected to the second layer semiconductor refrigeration element through the electrode.
进一步包括准直光学单元、合波组件、管壳、输出单元,热敏感元件、背光探测器、半导体激光器芯片、热敏电阻,所述背光探测器、半导体激光器芯片、热敏电阻固定于TEC的第二层冷面上,所述半导体激光器芯片的发射光通过光学准直单元传输至合波组件。Further comprising a collimating optical unit, a multiplexer assembly, a package, an output unit, a heat sensitive component, a backlight detector, a semiconductor laser chip, a thermistor, the backlight detector, the semiconductor laser chip, and the thermistor fixed to the TEC On the second cold surface, the emitted light of the semiconductor laser chip is transmitted to the multiplexer assembly through the optical collimation unit.
所述隔热体采用隔热垫块,隔热垫块设置于第二层冷面上。The heat insulator adopts a heat insulating block, and the heat insulating block is disposed on the cold surface of the second layer.
所述背光探测器、半导体激光器芯片、热敏电阻固定于第二层冷面上,第二层冷面一端连接到管壳,另一端连接过渡块上。The backlight detector, the semiconductor laser chip, and the thermistor are fixed on the cold surface of the second layer, and one end of the cold surface of the second layer is connected to the tube shell, and the other end is connected to the transition block.
所述半导体激光器芯片安装在过渡块上,过渡块与第二层冷面固定。The semiconductor laser chip is mounted on a transition block, and the transition block is fixed to the cold surface of the second layer.
所述隔热垫块采用导热系数低的材料。The insulating block uses a material having a low thermal conductivity.
所述光学准直单元设置于TEC的第一层冷面上。The optical collimating unit is disposed on the first layer of cold surface of the TEC.
进一步包括光隔离器、汇聚光学组件、插针组件、管盖,所述合波光学元件固定在管壳底部,隔离器固定在管壳的光窗上;汇聚光学元件固定在管壳上,插针组件固定在汇聚光学元件上。Further comprising an optical isolator, a converging optical component, a pin assembly, and a tube cover, the multiplexed optical component is fixed on the bottom of the shell, the isolator is fixed on the light window of the shell; the concentrating optical component is fixed on the shell, and the plug is inserted The needle assembly is attached to the converging optic.
所述管壳采用具有高频传输线结构的管壳,壳体采用可伐材料,管壳底部采用钨铜,管壳上设置有蓝宝石密封光窗。The shell adopts a shell with a high-frequency transmission line structure, the shell adopts a kovar material, the bottom of the shell adopts tungsten copper, and the shell is provided with a sapphire sealing light window.
所述第二层冷面采用AL2O3或者ALN,该冷面设置有设计图案。The cold surface of the second layer is made of AL2O3 or ALN, and the cold surface is provided with a design pattern.
本发明装置具有如下优点:The device of the invention has the following advantages:
1)本发明精确控制整个有源芯片的工作温度,并使其可以工作在-40℃~85℃宽温范围内;1) The present invention precisely controls the operating temperature of the entire active chip and enables it to operate in a wide temperature range of -40 ° C to 85 ° C;
2)本发明装置采用双层TEC结构,相对现有同类器件封装结构,单位面积内制冷制热效率更高,功耗更低,可工作在更宽的温度范围;2) The device of the invention adopts a double-layer TEC structure, and has higher cooling and heating efficiency per unit area, lower power consumption, and can work in a wider temperature range than the existing similar device packaging structure;
3)本发明采用双层TEC结构,减少了用于高度控制及导热的金属热沉,减少了器件的装配元件,工艺更简单。3) The double-layer TEC structure of the invention reduces the metal heat sink for height control and heat conduction, reduces the assembly components of the device, and is simpler in process.
4)本发明装置整个组件的结构被动热载跟传统结构相比有大幅下降;,热阻跟传统结构相比也大大降低。4) The passive thermal load of the structure of the entire assembly of the device of the present invention is greatly reduced compared with the conventional structure; the thermal resistance is also greatly reduced compared with the conventional structure.
5)器件集成度越高,本发明装置降低功耗的效果越明显。5) The higher the degree of device integration, the more obvious the effect of the device of the present invention in reducing power consumption.
6)本发明采用了用于隔热的过渡块,减少了金丝传导带来的被动热载。6) The invention adopts a transition block for heat insulation, which reduces the passive heat load caused by gold wire conduction.
附图说明DRAWINGS
图1是现有技术一种带有单层TEC以及单层热沉的光器件内部结构的部分横向剖视图;1 is a partial transverse cross-sectional view showing the internal structure of an optical device with a single layer TEC and a single layer heat sink;
图2是现有技术一种带有双层TEC以及双层热沉的光器件内部结构的部分横向剖视图;2 is a partial transverse cross-sectional view showing the internal structure of an optical device with a double layer TEC and a double layer heat sink;
图3是本发明一种带有双层TEC且不带钨铜热沉的光器件整体封装结构的横向剖视图;3 is a transverse cross-sectional view showing an overall package structure of an optical device with a double layer TEC and no tungsten copper heat sink according to the present invention;
图4是本发明一种带有双层TEC且不带钨铜热沉的光器件整体封装结构的纵向剖视图;4 is a longitudinal cross-sectional view of an optical device overall package structure with a double layer TEC and no tungsten copper heat sink;
图5是本发明一种带有双层TEC且带钨铜热沉的光器件整体封装结构的横向剖视图;5 is a transverse cross-sectional view showing an overall package structure of an optical device with a double-layer TEC and a tungsten-copper heat sink according to the present invention;
图6是本发明一种带有双层TEC且带钨铜热沉的光器件整体封装结构的纵向剖视图;6 is a longitudinal cross-sectional view of an optical device overall package structure with a double-layer TEC and a tungsten-copper heat sink according to the present invention;
图7是本发明采用的双层TEC结构;Figure 7 is a double layer TEC structure employed in the present invention;
图8是现有技术单层TEC结构;Figure 8 is a prior art single layer TEC structure;
其中:among them:
1、隔热垫块;                    2、钨铜热沉;1. Insulation pad; 2. Tungsten copper heat sink;
3、热敏电阻;                    4、背光探测器;3, thermistor; 4, backlight detector;
5、半导体激光器芯片;            6、过渡块;5. Semiconductor laser chip; 6. Transition block;
7、准直光学单元;                8、制冷器;7. Collimating optical unit; 8. Refrigerator;
9、合波组件;                    10、光隔离器;9, multiplexer components; 10, optical isolator;
11、汇聚光学组件;               12、插针组件;11. Converging optical components; 12. Pin assembly;
13、管壳;                       14、管盖;13, the shell; 14, the tube cover;
15、金属热沉;                   16、第二层冷面;15. Metal heat sink; 16. Second layer cold surface;
17、第二层半导体制冷元件;       18、第一层冷面;17, a second layer of semiconductor refrigeration components; 18, the first layer of cold surface;
19、第一层半导体制冷元件;       20、TEC热面;19. The first layer of semiconductor refrigeration components; 20, TEC hot surface;
具体实施方式Detailed ways
下面结合实例和附图对本发明的器件封装原理封装结构做详细说明。The package structure of the device package principle of the present invention will be described in detail below with reference to the examples and the accompanying drawings.
本发明装置需要包含具备下述核心的功能单元:双层制冷器温控单元,该制冷器第一层和第二层有温度差。制冷器的第二层冷面采用氧化铝陶瓷或氮化铝陶瓷,直接在上层制冷器的冷面设计图案,放置芯片和高频电路,或放置表面贴装了芯片、背光探测器及表面包含高频电路的ALN过渡块,以减少用于高度匹配及导热的金属热沉;在第二层制冷器的冷面上添加一个具有隔热功能的隔热垫块,用于减少金丝热传导带来的被动热载;这种 结构减少了金属热沉,降低了组件的热容和热阻,又降低金丝传热导致的被动热载。双层TEC温控单元使得有效面积内TEC的用于热搬运的晶体数量得到增加,使组件具有更大的工作温度差,热容热阻和被动热载的减少也降低了整体组件的功耗。The apparatus of the present invention needs to include a functional unit having a core: a two-layer refrigerator temperature control unit having a temperature difference between the first layer and the second layer. The second layer of the cold surface of the refrigerator is made of alumina ceramic or aluminum nitride ceramic, directly designed on the cold surface of the upper refrigerator, placing chips and high-frequency circuits, or placing surface-mounted chips, backlight detectors and surface inclusions. ALN transition block for high frequency circuits to reduce metal heat sinks for high matching and heat conduction; add a thermal insulation pad on the cold side of the second layer cooler to reduce gold wire heat conduction bands Passive hot load; this structure reduces the metal heat sink, reduces the heat capacity and thermal resistance of the component, and reduces the passive heat load caused by the heat transfer of the gold wire. The double-layer TEC temperature control unit increases the number of crystals for thermal handling of the TEC in the effective area, resulting in a larger operating temperature difference for the component. The reduction in heat capacity and passive heat load also reduces the power consumption of the overall assembly. .
实施例一:如图3、图4、图5、图6是本发明的光器件整体封装的剖视图。如图3、图4、图5、图6所示,本发明装置结构中,包括隔热垫块1、钨铜热沉2、热敏电阻3、背光探测器4、半导体激光器芯片5、过渡块6、准直光学单元7、制冷器8(TEC)、合波组件9、光隔离器10、汇聚光学组件11、插针组件12、管壳13、管盖14,管壳13是指具有高频传输线结构的管壳,壳体采用可伐材料,管壳底部为钨铜,传输线结构为多层高温共烧陶瓷组成,管壳包含蓝宝石密封光窗;管盖14用热阻焊的方式固定到管壳13上,起到密封效果。制冷器8是采用双层结构的制冷器,该制冷器包括双层制冷器第二层冷面16、第二层半导体制冷元件17、第一层冷面18、第一层半导体制冷元件19、TEC热面20。该制冷器通过焊料或环氧胶固定在管壳13上,本发明装置通过设计使双层TEC在第一层冷面18和双层TEC第二层冷面16通过自适应产生一定的温度差,通过调整第二半导体制冷元件17和第一半导体制冷元件19的数量,可调整TEC的第二层冷面16和第一层冷面18的温度差。本发明采用的双层TEC结构如图7所示。该温度差跟制冷器两层半导体制冷元件数量及面积相关,改变上下两层半导体制冷元件的数量和面积,可有效改变第一层冷面和第二层冷面的温度差。背光探测器4、半导体激光器芯片5、热敏电阻3通过焊料或环氧胶固定到TEC8的第二层冷面16上,或者先用焊料或环氧胶固定到过渡热沉2上,在通过焊料或环氧胶固定到TEC8的第二层冷面16上;隔热垫块1是具有隔热效果的垫块,该垫块采用具有隔热效果的材料制成,该垫块上包 含高频传输线结构,跟管芯一起构成高频电路回路。隔热垫块1一端通过金丝连接到管壳13,另一段通过金丝连接到制冷器8的第二层冷面16上或连接到第一层冷面18上的钨铜热沉2上;光学准直单元7放置在制冷器8的第一层冷面18上;合波光学元件9固定在管壳13底部。隔离器10固定在管壳13密封光窗上;汇聚光学元件11固定在管壳13上,插针组件12固定在汇聚光学元件11上。本实施例中半导体激光器芯片5也可以安装在过渡块6上,过渡块6与第二层冷面16固定。Embodiment 1: FIGS. 3, 4, 5, and 6 are cross-sectional views of an entire package of an optical device of the present invention. As shown in FIG. 3, FIG. 4, FIG. 5 and FIG. 6, the device structure of the present invention comprises a heat insulating block 1, a tungsten copper heat sink 2, a thermistor 3, a backlight detector 4, a semiconductor laser chip 5, and a transition. Block 6, collimating optical unit 7, refrigerator 8 (TEC), multiplexer assembly 9, optical isolator 10, converging optical assembly 11, pin assembly 12, tube casing 13, tube cover 14, and casing 13 means The shell of the high-frequency transmission line structure is made of kovar material, the bottom of the tube shell is tungsten copper, the transmission line structure is composed of multi-layer high-temperature co-fired ceramics, the tube shell contains sapphire sealing light window, and the tube cover 14 is thermally resisted. It is fixed to the envelope 13 to provide a sealing effect. The refrigerator 8 is a double-layered refrigerator including a double-layer refrigerator second layer cold surface 16, a second layer semiconductor refrigeration element 17, a first layer cold surface 18, a first layer semiconductor refrigeration element 19, TEC hot side 20. The refrigerator is fixed to the envelope 13 by solder or epoxy glue. The device of the present invention is designed to make the double layer TEC adaptively generate a certain temperature difference between the first layer cold surface 18 and the double layer TEC second layer cold surface 16. By adjusting the number of the second semiconductor refrigeration element 17 and the first semiconductor refrigeration element 19, the temperature difference between the second layer cold surface 16 of the TEC and the first layer cold surface 18 can be adjusted. The double layer TEC structure employed in the present invention is shown in FIG. The temperature difference is related to the number and area of the two layers of semiconductor refrigeration components of the refrigerator, and the number and area of the upper and lower layers of the semiconductor refrigeration components are changed, and the temperature difference between the first layer cold surface and the second layer cold surface can be effectively changed. The backlight detector 4, the semiconductor laser chip 5, and the thermistor 3 are fixed to the second layer cold surface 16 of the TEC 8 by solder or epoxy glue, or first fixed to the transition heat sink 2 by solder or epoxy glue, passing through Solder or epoxy glue is fixed to the second layer cold surface 16 of the TEC 8; the heat insulating block 1 is a block having a heat insulating effect, and the block is made of a material having a heat insulating effect, and the block block contains a high The frequency transmission line structure, together with the die, constitutes a high frequency circuit loop. One end of the insulating block 1 is connected to the tube casing 13 by a gold wire, and the other portion is connected to the second layer cold surface 16 of the refrigerator 8 by a gold wire or to the tungsten copper heat sink 2 on the first layer cold surface 18. The optical collimation unit 7 is placed on the first layer of cold surface 18 of the refrigerator 8; the multiplexed optical element 9 is fixed to the bottom of the envelope 13. The isolator 10 is fixed to the sealing window of the envelope 13; the converging optical element 11 is fixed to the envelope 13, and the pin assembly 12 is fixed to the converging optical element 11. The semiconductor laser chip 5 in this embodiment can also be mounted on the transition block 6, and the transition block 6 is fixed to the second layer cold surface 16.
图4中隔热垫块1是导热系数较低材料的垫块,该垫块上有高频电路,装配到制冷器8的第一层冷面18上,该隔热垫块采用导热系数较低的材料,目的是防止热量从TEC的第一冷面18通过金丝传导到过渡块6的表面或钨铜热沉2的表面,增加被动热载。该隔热垫块一端由金丝跟管壳相连,另一端跟TEC第二层冷面16相连。本结构中,在环境温度高的情况下,金丝是热的良导体,金丝将管壳13上的热量传导到TEC表面造成被动热载,有效的降低金丝两端的温度差,可有效的降低热载,本结构中,将隔热垫块1置于TEC的第二层冷面上,第二层温度高于第一层,跟普通单层TEC结构相比较,有效减少了金丝两端的温度差,有效的减少了器件的被动热载。这种自适应结构使上下两层TEC表面产生温度差,下层TEC上温度高于上层。本结构中,跟传统器件相比减少了金属热沉15,减少了热阻,达到降低功耗的效果。将准直光学单元7放置到制冷器8的第一层冷面18上,跟传统结构相比,本发明装置也大大降低了热容,有效降低器件的功效。In Fig. 4, the heat insulating block 1 is a pad of a material having a lower thermal conductivity, and the block has a high frequency circuit which is assembled to the first layer of cold surface 18 of the refrigerator 8, which has a thermal conductivity. The low material is intended to prevent heat from being conducted from the first cold face 18 of the TEC through the gold wire to the surface of the transition block 6 or to the surface of the tungsten copper heat sink 2, increasing the passive heat load. The insulating block is connected at one end to the tube by a gold wire, and the other end is connected to the second layer cold surface 16 of the TEC. In the structure, in the case of high ambient temperature, the gold wire is a good conductor of heat, and the gold wire transmits the heat on the tube shell 13 to the surface of the TEC to cause passive heat load, effectively reducing the temperature difference between the two ends of the gold wire, which is effective In the structure, the heat insulating block 1 is placed on the second cold surface of the TEC, and the temperature of the second layer is higher than that of the first layer, which effectively reduces the gold wire compared with the ordinary single layer TEC structure. The temperature difference between the two ends effectively reduces the passive thermal load of the device. This adaptive structure creates a temperature difference between the upper and lower layers of the TEC surface, and the lower layer TEC has a higher temperature than the upper layer. In this structure, the metal heat sink 15 is reduced compared with the conventional device, the thermal resistance is reduced, and the power consumption is reduced. The collimating optical unit 7 is placed on the first layer of cold surface 18 of the refrigerator 8, and the apparatus of the present invention also greatly reduces the heat capacity compared to the conventional structure, effectively reducing the efficiency of the device.
实施例二:Embodiment 2:
本发明实施例中,背光探测器4、半导体激光器芯片5通过一个钨铜热沉2安装到制冷器8的第一层冷面18上,半导体激光器芯片5工作时发出的热直接由上层TEC泵到下层TEC上。In the embodiment of the present invention, the backlight detector 4 and the semiconductor laser chip 5 are mounted on the first layer cold surface 18 of the refrigerator 8 through a tungsten-copper heat sink 2, and the heat generated by the semiconductor laser chip 5 is directly generated by the upper layer TEC pump. Go to the lower TEC.
本发明利用双层TEC结构,将激光器芯片或安装了激光器芯片及背光探测器的ALN过渡块直接放置在第一层TEC上,跟传统的封装结构相比,本发明的优点在于:第一、利用第一层和第二层TEC的高度差,直接去掉了用于高度控制及导热的金属钨铜热沉元件,减少了激光器组件的元件,省略了该元件的装配工艺,有利于提高组件的制作效率,同时也减少了组件的热容及热阻,大大降低组件的功耗。第二、本发明利用双层TEC封装结构,将或其他具有隔热效果的材料的过渡块装配在TEC的第二层,因TEC第一层和第二层有温度自适应功能,TEC第二层结构的温度高于第一层,该过渡块由金丝一端连接到管壳,另一端连接到TEC第一层结构的芯片或安装芯片的过渡块。金丝是热的良导体,因TEC第二层结构温度高于第一层,跟传统工艺相比,例如图8的单层TEC结构。这种结构大大降低了由于金丝导热造成的被动热载,大大降低组件的整体功耗。集成度越高的器件,降低功耗的效果越明显。The present invention utilizes a double-layer TEC structure to directly place a laser chip or an ALN transition block on which a laser chip and a backlight detector are mounted on a first layer TEC. Compared with a conventional package structure, the present invention has the following advantages: By using the height difference between the first layer and the second layer TEC, the metal tungsten-copper heat sink element for height control and heat conduction is directly removed, the components of the laser component are reduced, the assembly process of the component is omitted, and the component is improved. Production efficiency, while also reducing the thermal capacity and thermal resistance of the components, greatly reducing the power consumption of the components. Secondly, the present invention utilizes a double-layer TEC package structure to mount a transition piece of other materials having thermal insulation effects on the second layer of the TEC, because the first layer and the second layer of the TEC have temperature adaptive functions, and the TEC is second. The temperature of the layer structure is higher than that of the first layer, which is connected to the tube shell by one end of the gold wire, and the other end is connected to the chip of the first layer structure of the TEC or the transition piece of the chip. The gold wire is a good conductor of heat because the temperature of the second layer of the TEC is higher than that of the first layer, compared to the conventional process, such as the single layer TEC structure of FIG. This structure greatly reduces the passive thermal load caused by the heat conduction of the gold wire, greatly reducing the overall power consumption of the component. The more integrated the device, the more obvious the effect of reducing power consumption.
虽然本发明已经详细示例并描述了相关的特定实施例做参考,但对本领域的技术人员来说,在阅读和理解了该说明书和附图后,在不背离本发明的思想和范围特别是上述装置实施的功能上,可以在装置形式和细节上作出各种改变。这些改变都将落入本发明的权利要求所要求的保护范围。The present invention has been described in detail and described with reference to the specific embodiments of the embodiments of the invention Various changes in the form and details of the device can be made in the function of the device. These changes are intended to fall within the scope of protection as claimed in the appended claims.

Claims (10)

  1. 一种宽温低功耗集成光发射组件,其特征在于:包括热敏感元件、致冷器(8)、管壳,所述管壳上设置有引脚;所述致冷器(8)包括由上至下依次排列的第二层冷面(16)、第二层半导体制冷元件(17)、第一层冷面(18)、第一层半导体制冷元件(19)、TEC热面(20)组成的双层制冷器单元,所述热敏感元件固定于致冷器(8)的第二层冷面(16)上,所述第一层冷面(18)上设置有隔热体,该隔热体分别与第二层冷面(16)、引脚连接,第一层半导体制冷元件(19)通过电极与第二层半导体制冷元件(17)连接。A wide temperature and low power integrated light emitting component, comprising: a heat sensitive component, a refrigerator (8), a package, wherein the package is provided with a lead; the refrigerator (8) comprises A second layer of cold surface (16), a second layer of semiconductor refrigeration element (17), a first layer of cold surface (18), a first layer of semiconductor refrigeration element (19), and a TEC hot side (20) arranged in order from top to bottom a double-layer refrigerator unit, the heat-sensitive element is fixed to the second layer cold surface (16) of the refrigerator (8), and the first layer cold surface (18) is provided with a heat insulator. The heat insulator is connected to the second layer cold surface (16) and the lead, and the first layer semiconductor refrigeration element (19) is connected to the second layer semiconductor refrigeration element (17) through the electrode.
  2. 根据权利要求1所述的一种宽温低功耗集成光发射组件,其特征在于:进一步包括准直光学单元(7)、合波组件(9)、管壳(13)、输出单元,热敏感元件、背光探测器(4)、半导体激光器芯片(5)、热敏电阻(3),所述背光探测器(4)、半导体激光器芯片(5)、热敏电阻(3)固定于TEC(8)的第二层冷面(16)上,所述半导体激光器芯片(5)的发射光通过光学准直单元(7)传输至合波组件(9)。A wide temperature low power integrated light emitting device according to claim 1, further comprising a collimating optical unit (7), a multiplexing assembly (9), a package (13), an output unit, and a heat a sensitive component, a backlight detector (4), a semiconductor laser chip (5), a thermistor (3), the backlight detector (4), a semiconductor laser chip (5), and a thermistor (3) are fixed to the TEC ( The second layer of cold surface (16) of 8), the emitted light of the semiconductor laser chip (5) is transmitted to the multiplexer assembly (9) through the optical collimation unit (7).
  3. 根据权利要求2所述的一种宽温低功耗集成光发射组件,其特征在于:所述隔热体采用隔热垫块(1),隔热垫块(1)设置于第二层冷面(16)上。The invention relates to a wide temperature and low power integrated light emitting component according to claim 2, wherein the heat insulating body adopts a heat insulating block (1), and the heat insulating block (1) is disposed on the second layer cold. On the face (16).
  4. 根据权利要求2或权利要求3所述的一种宽温低功耗集成光发射组件,其特征在于:所述背光探测器(4)、半导体激光器芯片(5)、热敏电阻(3)固定于第二层冷面(16)上,第二层冷面(16)一端连接到管壳(13),另一端连接过渡块(6)上。A wide temperature low power integrated light emitting device according to claim 2 or claim 3, wherein the backlight detector (4), the semiconductor laser chip (5), and the thermistor (3) are fixed On the second cold surface (16), one end of the second cold surface (16) is connected to the envelope (13) and the other end is connected to the transition block (6).
  5. 根据权利要求4所述的一种宽温低功耗集成光发射组件,其特征在于:所述半导体激光器芯片(5)安装在过渡块(6)上,过渡块(6)与第二层冷面(16)固定。A wide temperature low power integrated light emitting device according to claim 4, wherein said semiconductor laser chip (5) is mounted on the transition block (6), and the transition block (6) is cooled to the second layer. Face (16) is fixed.
  6. 根据权利要求3所述的一种宽温低功耗集成光发射组件,其特征在于:所述隔热垫块(1)采用导热系数低的材料。A wide temperature low power integrated light emitting device according to claim 3, characterized in that the heat insulating block (1) is made of a material having a low thermal conductivity.
  7. 根据权利要求2或权利要求3所述的一种宽温低功耗集成光发射组件,其特征在于:所述光学准直单元(7)设置于致冷器(8)的第一层冷面(18)上。A wide temperature low power integrated light emitting device according to claim 2 or claim 3, wherein the optical collimating unit (7) is disposed on the first layer of the cold surface of the refrigerator (8) (18) Upper.
  8. 根据权利要求2所述的一种宽温低功耗集成光发射组件,其特征在于:进一步包括光隔离器(10)、汇聚光学组件(11)、插针组件(12)、管盖(14),所述合波光学元件(9)固定在管壳(13)底部,隔离器(10)固定在管壳(13)的光窗上;汇聚光学元件(11)固定在管壳(13)上,插针组件(12)固定在汇聚光学元件(11)上。A wide temperature low power integrated light emitting device according to claim 2, further comprising an optical isolator (10), a converging optical component (11), a pin assembly (12), and a tube cover (14) The multiplexed optical element (9) is fixed to the bottom of the envelope (13), the isolator (10) is fixed to the light window of the envelope (13); the concentrating optical element (11) is fixed to the envelope (13) Upper, the pin assembly (12) is attached to the converging optical element (11).
  9. 根据权利要求8所述的一种宽温低功耗集成光发射组件,其特征在于:所述管壳(13)采用具有高频传输线结构的管壳,壳体采用可伐材料,管壳底部采用钨铜,管壳上设置有蓝宝石密封光窗。A wide-temperature low-power integrated light emitting device according to claim 8, wherein the casing (13) adopts a casing having a high-frequency transmission line structure, and the casing is made of kovar material, and the bottom of the casing Tungsten copper is used, and a sapphire sealed light window is arranged on the casing.
  10. 根据权利要求2所述的一种宽温低功耗集成光发射组件,其特征在于:所述第二层冷面(16)采用AL 2O 3或者ALN,该冷面设置有设计图案。 A wide temperature low power integrated light emitting device according to claim 2, characterized in that the second layer cold surface (16) is made of AL 2 O 3 or ALN, and the cold surface is provided with a design pattern.
PCT/CN2017/118665 2017-12-26 2017-12-26 Integrated light-emitting assembly with wide temperature range and low power consumption WO2019127025A1 (en)

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108957645A (en) * 2018-07-06 2018-12-07 江苏奥雷光电有限公司 A kind of single mode parallel optical module
CN108614332A (en) * 2018-07-24 2018-10-02 大连优迅科技有限公司 A kind of multichannel light high-speed transmission sending device
CN109188614B (en) * 2018-08-28 2020-02-14 武汉电信器件有限公司 Double-carrier integrated optical device and photoelectric module
CN109586797B (en) * 2018-11-16 2020-05-12 武汉电信器件有限公司 Laser emitting assembly and corresponding optical module
CN111610603A (en) * 2019-02-26 2020-09-01 晶连股份有限公司 Improved structure of light emission sub-module
CN110530056B (en) * 2019-08-20 2021-05-18 武汉联特科技股份有限公司 Multichannel parallel light emitting device and semiconductor refrigerator
CN111708131A (en) * 2020-06-22 2020-09-25 武汉光迅科技股份有限公司 Light emitting module and optical module
CN113219600B (en) * 2021-04-20 2022-07-15 武汉光迅科技股份有限公司 Transmitter optical subassembly
CN114783711A (en) * 2022-04-20 2022-07-22 中国电子科技集团公司第三十八研究所 Method for manufacturing resistor on surface of aluminum nitride high-temperature co-fired ceramic substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4922822A (en) * 1988-12-12 1990-05-08 Bierschenk James L Thermoelectric cooler
US20120312031A1 (en) * 2011-06-08 2012-12-13 Richard Elliot Olsen Cooler for Temperature Sensitive Items
CN104570236A (en) * 2014-11-27 2015-04-29 武汉电信器件有限公司 High-speed butterfly-shaped packaging optical emitter component
CN106998230A (en) * 2017-03-07 2017-08-01 武汉光迅科技股份有限公司 Built-in signal calibrates dual rate DML devices, module and the signal calibration method of circuit

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2411626Y (en) * 2000-02-22 2000-12-20 汪中 Direct integrated light emission module
CN201004104Y (en) * 2006-12-05 2008-01-09 深圳新飞通光电子技术有限公司 Small cooling light radiation component
CN101813951B (en) * 2009-12-07 2012-06-06 中国科学院西安光学精密机械研究所 Temperature controlled focal plane detector mechanism
CN201853143U (en) * 2010-09-10 2011-06-01 北京怡孚和融科技有限公司 Laser radar temperature control device
CN201898279U (en) * 2010-12-16 2011-07-13 刘兴胜 Two-way refrigeration type LD
JP2013153136A (en) * 2011-12-27 2013-08-08 Sumitomo Electric Ind Ltd Light-emitting module and optical transceiver

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4922822A (en) * 1988-12-12 1990-05-08 Bierschenk James L Thermoelectric cooler
US20120312031A1 (en) * 2011-06-08 2012-12-13 Richard Elliot Olsen Cooler for Temperature Sensitive Items
CN104570236A (en) * 2014-11-27 2015-04-29 武汉电信器件有限公司 High-speed butterfly-shaped packaging optical emitter component
CN106998230A (en) * 2017-03-07 2017-08-01 武汉光迅科技股份有限公司 Built-in signal calibrates dual rate DML devices, module and the signal calibration method of circuit

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