WO2019114081A1 - 金属掩膜板 - Google Patents

金属掩膜板 Download PDF

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Publication number
WO2019114081A1
WO2019114081A1 PCT/CN2018/072498 CN2018072498W WO2019114081A1 WO 2019114081 A1 WO2019114081 A1 WO 2019114081A1 CN 2018072498 W CN2018072498 W CN 2018072498W WO 2019114081 A1 WO2019114081 A1 WO 2019114081A1
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Prior art keywords
metal mask
metal
mask sheet
sheet
frame
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PCT/CN2018/072498
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English (en)
French (fr)
Inventor
蒋谦
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武汉华星光电半导体显示技术有限公司
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Publication of WO2019114081A1 publication Critical patent/WO2019114081A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a metal mask.
  • OLED Organic Light Emitting Diode
  • the implementation method is as follows: OLED film is prepared by vacuum evaporation technology, and organic/metal materials are heated in a vacuum environment (10 -5 Pa). The material is sublimated by heat, and an organic/metal film having a shape is formed on the surface of the substrate through a patterned metal mask, and an OLED structure having a multilayer film is formed by continuous deposition of a plurality of materials.
  • the metal mask includes a general-purpose metal mask and a precision metal mask.
  • the number of chambers of the vaporizer determines the mask. Quantity, usually, the general-purpose metal mask needs to buy 5 ⁇ 9pcs, and the precision metal mask needs to buy 3 ⁇ 5pcs.
  • OLED panel factories usually have different customers. Different customers have different requirements for OLED screens. For example, one OLED panel factory has two customers, customer A needs a 5.5-inch rectangular OLED screen, and customer B needs a circular OLED screen. In this case, the OLED panel factory will purchase two metal masks according to the customer's two product requirements.
  • OLED panel manufacturers purchase metal masks by placing orders for metal mask manufacturers.
  • General metal masks typically take six weeks to deliver, and precision metal masks take six weeks or more. Delivery, and most importantly, if the masks delivered by the metal mask manufacturer do not meet the design specifications, which will lead to defects in the OLED screen during the development phase, the OLED panel factory must re-purchase the metal mask.
  • FIGS. 1 and 2 are schematic structural views of two conventional general-purpose metal masks, respectively, and the metal masks of FIGS. 1 and 2 each include a metal frame 100 and a metal mask sheet fixed to the metal frame 100. 200, the difference is that the metal mask of FIG. 1 is used to fabricate a rectangular OLED screen, so the opening 210 in the metal mask of FIG. 1 is a rectangular opening; the metal mask of FIG. 2 is used to fabricate a circular OLED Screen, so the opening 210 in the metal mask of Figure 2 is a circular opening, the above two general-purpose metal masks, the number of each type of general-purpose metal mask is 5 ⁇ 9pcs, 2 OLED screens A 10 to 18 pcs universal metal mask is required.
  • the OLED panel factory orders the two metal masks separately for two different metal mask suppliers, due to the time difference between the order times of the two orders, and the two suppliers produce metal.
  • the production line schedule of the mask is different, so the delivery time of the two suppliers is also different, which delays the development process to a certain extent, thus extending the development cycle of the OLED screen.
  • FIG. 4 is a schematic structural view of a general-purpose metal mask for fabricating a mixed type OLED substrate.
  • the general-purpose metal mask includes a metal frame 500 and a metal mask sheet 600 fixed on the metal frame 500.
  • the metal mask sheet 600 is provided with a rectangular opening 610 and a circular opening 620, although mixed It is relatively easy to make a general-purpose metal mask for the same generation of OLED substrates, but it is very difficult to produce a corresponding precision metal mask. Therefore, the development of mixed type OLED substrates is very difficult and the production yield is low.
  • the object of the present invention is to provide a metal mask which can be used to fabricate two kinds of OLED screens in succession, thereby being able to cope with the continuous development of two new OLED screen products by the OLED panel factory, and reducing the metal mask release period for the development of the OLED screen.
  • the impact of speed can also reduce the cost of masks for OLED's new screen development.
  • the present invention provides a metal mask comprising a metal frame and a first metal mask sheet and a second metal mask sheet fixed to the metal frame; the first metal mask The upper surface of the sheet is flush with the upper surface of the metal frame, the second metal mask sheet is disposed above the first metal mask sheet; and the first metal mask sheet is provided a plurality of first openings arranged at intervals; the second metal mask sheet is provided with a plurality of second openings spaced apart; the plurality of first openings respectively corresponding to the plurality of second openings, and The size of the first opening is larger than the size of the second opening.
  • the first opening is different in shape from the second opening; the plurality of first openings are arranged in an array on the first metal mask sheet; the plurality of second openings are in the second metal mask.
  • the sheets of film are arranged in an array.
  • the metal frame is provided with a plurality of first grooves arranged at intervals along the inner edge of the metal frame
  • the first metal mask sheet comprises a first metal mask body and distributed on the first a plurality of protrusions around the metal mask body, the plurality of protrusions having a shape and a size matching the shapes and sizes of the plurality of first grooves, the plurality of protrusions being respectively soldered to In the plurality of first grooves, an upper surface of the plurality of protrusions is flush with an upper surface of the metal frame except a plurality of first grooves; the plurality of first openings are distributed
  • the first metal mask body is on the body.
  • the plurality of first grooves and the plurality of protrusions are both rectangular.
  • the second metal mask sheet is welded to the metal frame, and the metal frame is provided with a second groove, and a pressure is applied on the second metal mask sheet corresponding to the position of the second groove, The second metal mask sheet is broken.
  • the thickness of the second metal mask sheet corresponding to the position of the second groove is one-half of the thickness of the other regions.
  • the second groove has an inverted triangle in cross section.
  • the first metal mask body is provided with a plurality of first alignment marks
  • the second metal mask sheet is provided with a plurality of second alignment marks
  • the plurality of first alignment marks are respectively The second alignment mark corresponds to the top and bottom.
  • the material of the metal frame is iron-nickel alloy or stainless steel; the material of the first metal mask sheet and the second metal mask sheet are both iron-nickel alloy.
  • the present invention also provides a metal mask comprising a metal frame and a first metal mask sheet and a second metal mask sheet fixed to the metal frame; the first metal mask sheet The surface is flush with the upper surface of the metal frame, the second metal mask sheet is disposed above the first metal mask sheet; and the first metal mask sheet is provided with a number of spaces a first opening; the second metal mask sheet is provided with a plurality of second openings spaced apart; the plurality of first openings respectively corresponding to the plurality of second openings, and the first opening The size is larger than the size of the second opening;
  • first opening is different in shape from the second opening;
  • plurality of first openings are arranged in an array on the first metal mask sheet; and the plurality of second openings are in the second Metal mask sheets are arranged in an array;
  • the metal frame is provided with a plurality of first grooves arranged at intervals along the inner edge of the metal frame
  • the first metal mask sheet comprises a first metal mask body and distributed in the a plurality of protrusions around the first metal mask body, the shapes and sizes of the plurality of protrusions matching the shapes and sizes of the plurality of first grooves, the plurality of protrusions respectively Soldering in the plurality of first grooves, an upper surface of the plurality of protrusions being flush with an upper surface of the metal frame except a plurality of first grooves; the plurality of first openings Distributed on the first metal mask body;
  • the second metal mask sheet is welded to the metal frame, the metal frame is provided with a second groove, and a pressure is applied on the second metal mask sheet corresponding to the position of the second groove , capable of breaking the second metal mask sheet;
  • the thickness of the second metal mask sheet corresponding to the position of the second groove is one-half of the thickness of the other regions
  • the first metal mask plate body is provided with a plurality of first alignment marks
  • the second metal mask sheet is provided with a plurality of second alignment marks
  • the plurality of first alignment marks are respectively Corresponding to a number of second alignment marks.
  • the metal mask of the present invention comprises a metal frame and a first metal mask sheet and a second metal mask sheet fixed to the metal frame; applying the metal mask of the present invention In the evaporation process, the first OLED screen is first formed using the second metal mask sheet. After the second metal mask sheet is used for a period of time and is no longer used, the second OLED panel is removed from the metal frame.
  • a metal reticle sheet is used to fabricate a second OLED screen; since the metal mask of the present invention can be used to fabricate two OLED screens in succession, it can cope with the continuous development of two OLED panel products by the OLED panel factory, and reduce the metal mask.
  • the influence of the board delivery time on the development speed of the OLED panel, and the use of the metal mask of the invention can reduce the purchase cost of the metal mask.
  • FIG. 1 is a schematic structural view of a general-purpose metal mask for fabricating a rectangular OLED panel
  • FIG. 2 is a schematic structural view of a general-purpose metal mask for fabricating a circular OLED panel
  • FIG. 3 is a schematic structural view of a conventional mixed type OLED substrate
  • FIG. 4 is a schematic structural view of a general-purpose metal mask for fabricating a mixed type OLED substrate
  • Figure 5 is a top plan view of a metal mask of the present invention.
  • FIG. 6 is a top plan view of a metal frame in a metal mask of the present invention.
  • Figure 7 is a top plan view of a first metal mask sheet in a metal mask of the present invention.
  • Figure 8 is a top plan view of a second metal mask sheet in the metal mask of the present invention.
  • Figure 9 is a cross-sectional view of the metal mask of the present invention taken along line AA of Figure 5;
  • Figure 10 is a cross-sectional view of the metal mask of the present invention taken along line BB of Figure 5;
  • Figure 11 is a schematic view showing vapor deposition using a second metal mask sheet in the metal mask of the present invention.
  • Figure 12 is a schematic illustration of vapor deposition using a first metal mask sheet in a metal mask of the present invention.
  • the present invention provides a metal mask, comprising a metal frame 10 and a first metal mask sheet 20 and a second metal mask sheet 30 fixed to the metal frame 10;
  • the upper surface of the first metal mask sheet 20 is flush with the upper surface of the metal frame 10, and the second metal mask sheet 30 is disposed above the first metal mask sheet 20;
  • the first metal mask sheet 20 is provided with a plurality of first openings 211 disposed at intervals;
  • the second metal mask sheet 30 is provided with a plurality of second openings 31 spaced apart from each other;
  • An opening 211 corresponds to the plurality of second openings 31, and the size of the first opening 211 is larger than the size of the second opening 31 to ensure that the second opening 31 is correspondingly disposed in the first opening 211. internal.
  • the metal mask of the present invention is a general-purpose metal mask.
  • the shape of the first opening 211 and the second opening 31 are different to meet the requirements of the OLED panel factory to continuously develop two new OLED screens of different shapes.
  • the first opening 211 has a rectangular shape, and the plurality of first openings 211 are arranged in an array on the first metal mask sheet 20 . As shown in FIG. 5, when it is required to fabricate a square OLED screen, the shape of the first opening 211 is square.
  • the shape of the second opening 31 is circular, and the plurality of second openings 31 are arranged in an array on the second metal mask sheet 30.
  • the metal frame 10 is provided with a plurality of first grooves 11 which are sequentially arranged along the inner edge of the metal frame 10, and the first metal cover
  • the film sheet 20 includes a first metal mask body 21 and a plurality of protrusions 22 distributed around the periphery of the first metal mask body 21, the shape and size of the plurality of protrusions 22 being The shapes and sizes of the plurality of first grooves 11 are matched, and the plurality of protrusions 22 are respectively welded into the plurality of first grooves 11, and the upper surfaces of the plurality of protrusions 22 are The upper surface of the metal frame 10 except for the plurality of first grooves 11 is flush.
  • the plurality of first openings 211 are distributed on the first metal mask body 21 .
  • the plurality of first grooves 11 and the plurality of protrusions 22 are both rectangular.
  • the number of the first groove 11 and the convex portion 22 is determined according to a specific design and a mechanical simulation.
  • the first metal mask sheet 20 is provided with 28 convex portions 22 uniformly distributed, and the metal frame 10 is uniformly distributed.
  • First grooves 11 are provided in FIG. 5, FIG. 6, and FIG. 7, the first metal mask sheet 20 with 28 convex portions 22 uniformly distributed, and the metal frame 10 is uniformly distributed.
  • the second metal mask sheet 30 is soldered to the metal frame 10, and the metal frame 10 is provided with a second recess 12, and the second metal mask sheet 30 corresponds to the second Pressure is applied to the position of the recess 12 to break the second metal mask sheet 30 so that the second metal mask sheet 30 can be torn from the metal frame 10 along the break.
  • the thickness of the second metal mask sheet 30 corresponding to the position of the second groove 12 is one-half of the thickness of the other regions, so the second metal mask sheet 30 corresponds to
  • the position of the second groove 12 is very easy to break, and it is only necessary to apply a small pressure to break it.
  • the second groove 12 has an inverted triangle in cross section.
  • a position on the second metal mask sheet 30 welded to the metal frame 10 is defined as a weld line 32, and a position on the second metal mask sheet 30 corresponding to the second groove 12 is defined as
  • the pressure line 33 is cut, and the welding line 32 and the cutting pressure line 33 are respectively disposed corresponding to the spacing area of the metal frame 10 between the plurality of first grooves 11, and each of them is represented by a plurality of circles.
  • the discontinuous line segment is located at the periphery of the cut-off pressure line 33.
  • the first metal mask body 21 is provided with a plurality of first alignment marks 25, and the second metal mask sheet 30 is provided with a plurality of second alignment marks 35, the plurality of The pair of bit marks 25 are vertically corresponding to the plurality of second alignment marks 35, respectively.
  • the first metal mask body 21 and the second metal mask sheet 30 are both rectangular; the first metal mask body 21 is provided. There are four first alignment marks 25 respectively located at four corners of the first metal mask body 21; the second metal mask sheet 30 is provided with four second alignment marks 35, Located at the four corners of the second metal mask sheet 30, respectively.
  • the material of the metal frame 10 is iron-nickel alloy or stainless steel.
  • the materials of the first metal mask sheet 20 and the second metal mask sheet 30 are both iron-nickel alloys.
  • FIG. 11 is a schematic view showing vapor deposition using the second metal mask sheet 30 in the metal mask of the present invention, as shown in FIG. 11, the second metal mask sheet 30 in the metal mask is The first to be vapor-deposited substrate 41 is bonded together, and the bottom-up vapor deposition material flow indicated by the arrow passes through the second opening 31 on the second metal mask sheet 30, at the first to be evaporated. Forming a film area of the same size as the second opening 31 on the surface of the substrate 41 to form a first OLED screen 51, the first OLED screen 51 having a circular shape;
  • FIG. 12 is a schematic diagram of vapor deposition using the first metal mask sheet 20 in the metal mask of the present invention. As shown in FIG. 12, the first metal mask sheet 20 in the metal mask is bonded to the second substrate to be vapor-deposited 42, and the bottom-up vapor deposition material shown by the arrow is air-permeable.
  • a first opening 211 on the first metal mask sheet 20 is formed on the surface of the second substrate to be evaporated 42 to form a film region of the same size as the first opening 211, forming a second OLED panel 52, the second The shape of the OLED panel 52 is rectangular;
  • the first to-be-vapor-deposited substrate 41 and the second to-be-vapor-deposited substrate 42 are glass substrates or glass substrates having polyimide on the surface thereof. Further, the surface of the glass substrate or the glass substrate having polyimide on its surface may have a TFT structure.
  • the vapor deposition material gas stream is an organic/metal material gas stream.
  • the use of the metal mask of the invention can realize the development of two OLED screens in a short time, reduce the influence of the universal metal mask delivery time on the development speed of the OLED screen, thereby shortening the development of the OLED screen. Cycle to accelerate the development of OLED screens.
  • the present invention saves the manufacture of a general-purpose metal mask, and reduces the use of a metal frame. Since the number of general-purpose metal masks required for producing two OLED screens is usually 10 to 18 pcs, The invention can greatly reduce the purchase quantity of the metal frame, reduce the production cost of the general-purpose metal mask, and further reduce the development cost of the OLED panel.
  • the process of fabricating the OLED panel by the existing OLED panel factory is not changed, and the process of the corresponding precision mask is maintained, and the existing process is maintained. Will not increase the difficulty of OLED product development.
  • inventive concept of the metal mask of the present invention can also be applied to the process of a precision metal mask to simplify the process of the precision metal mask.
  • the present invention provides a metal mask comprising a metal frame and a first metal mask sheet and a second metal mask sheet fixed to the metal frame; the metal mask of the present invention
  • the first OLED screen is first formed using the second metal mask sheet, and after the second metal mask sheet is used for a period of time and is no longer used, it is removed from the metal frame.
  • the second OLED screen is fabricated by using the first metal mask sheet; since the metal mask of the present invention can be used to sequentially fabricate two kinds of OLED screens, it can cope with the requirement of continuously developing two new OLED screen products by the OLED panel factory, and reduce the metal.
  • the influence of the mask plate delivery on the development speed of the OLED panel, and the use of the metal mask of the present invention can reduce the purchase cost of the metal mask.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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Abstract

一种金属掩膜板，包括金属框架（10）以及固定于金属框架（10）上的第一金属掩膜板薄片（20）与第二金属掩膜板薄片（30）；将金属掩膜板应用于蒸镀制程时，首先使用第二金属掩膜板薄片（30）制作第一OLED屏（51），第二金属掩膜板薄片（30）使用一段时间并不再使用之后，将其从金属框架（10）上取掉，使用第一金属掩膜板薄片（20）制作第二OLED屏（52）；由于金属掩膜板能够用于先后制作两种OLED屏（51，52），因此能够应对OLED面板厂连续开发两种OLED屏（51，52）新品的需求，减少金属掩膜板交期对OLED屏开发速度的影响，另外可以降低金属掩膜板的购买成本。

Description

金属掩膜板 技术领域
本发明涉及显示技术领域，尤其涉及一种金属掩膜板。
背景技术
有机电致发光技术(Organic Light Emitting Diode,OLED)是一种新型的显示技术，其实施方式为：采用真空蒸镀技术制备OLED薄膜，真空环境(10 -5Pa)中加热有机/金属材料，材料受热升华，通过具有图案的金属掩膜板在基板表面形成具有一定形状的有机/金属薄膜，经过多种材料的连续沉积成膜形成具有多层薄膜的OLED结构。
OLED面板厂每开发1款OLED屏幕都必须购买金属掩膜板，所述金属掩膜板包括通用型金属掩膜板和精密型金属掩膜板，蒸镀机腔体的数量决定掩膜板的数量，通常情况下，通用型金属掩膜板需要购买5～9pcs，精密型金属掩膜板需要购买3～5pcs。OLED面板厂通常会有不同的客户，不同的客户对OLED屏幕有不同的需求，比如1个OLED面板厂有2个客户，客户A需要5.5英寸的矩形OLED屏幕，客户B需要圆形的OLED屏幕，这种情况下，OLED面板厂会根据客户的两种产品需求外购两款金属掩膜板。
通常情况，OLED面板厂通过下订单给金属掩膜板生产厂商来购买金属掩膜板，通用型金属掩膜板一般需要6周才能交付，精密型金属掩膜板需要6周或者更长时间才能交付，最重要的是，如果金属掩膜板生产厂商交付的掩膜板不符合设计规格，将导致研发阶段的OLED屏幕出现缺陷，那么OLED面板厂必须重新购买金属掩膜板。
新款OLED屏幕的开发阶段，客户需求的屏幕数量并不多，但是往往需要新款OLED屏幕在规定的时间内产出并提供给客户，用于客户送样。OLED面板厂需要同时应对多个客户的OLED屏幕送样需求，因此在有限的时间内开发出多款OLED屏幕对OLED面板厂来说非常关键，然而目前的情况是，金属掩膜板较长的交期严重制约了OLED屏幕的开发速度。
图1与图2分别为现有的两种通用型金属掩膜板的结构示意图，图1与图2的金属掩膜板均包括金属框架100及固定于金属框架100上的金属掩膜板薄片200，区别之处在于：图1的金属掩膜板用于制作矩形OLED屏，因此图1的金属掩膜板中的开口210为矩形开口；图2的金属掩膜板 用于制作圆形OLED屏，因此图2的金属掩膜板中的开口210为圆形开口，上述2种通用型金属掩膜板，每种通用型金属掩膜板的需求数量为5～9pcs，2款OLED屏共需要10～18pcs通用型金属掩膜板。通常情况下，OLED面板厂将上述两种金属掩膜板的需求分别下单给两个不同的金属掩膜板供应商，由于两个订单的下单时间存在时间差，并且两个供应商生产金属掩膜板的产线时间排程不同，因此两个供应商的交付时间也不同，这在一定程度上拖延了研发进程，从而延长了OLED屏的开发周期。
另外，按照现有技术，必然供应商需要制作2套金属框架100，按照如上计算共需要10～18pcs金属框架100；通常情况下，通用型金属掩膜板的价格中金属框架100的费用占比大于50％，这样开发2款送客户OLED屏样品的两种通用型金属掩膜板的成本比较高。
针对OLED面板厂需要同时开发2款OLED屏幕的情况，现有一种混合排版的OLED基板，将不同尺寸、不同形状、不同分辨率的OLED屏排布在同一张玻璃基板上，如图3所示，矩形开口的第一OLED屏310与圆形开口的第二OLED屏320排布于同一玻璃基板400上，图4为用于制作混合排版的OLED基板的通用型金属掩膜板的结构示意图，所述通用型金属掩膜板包括金属框架500及固定于金属框架500上的金属掩膜板薄片600，所述金属掩膜板薄片600上设有矩形开口610与圆形开口620，虽然为混合排版的OLED基板制作相同世代的通用型金属掩膜板比较容易，但是制作对应的精密型金属掩膜板则非常困难，因此混合排版的OLED基板的开发难度非常高，生产良率也较低。
发明内容
本发明的目的在于提供一种金属掩膜板，能够用于先后制作两种OLED屏，因此能够应对OLED面板厂连续开发两种OLED屏新品的需求，减少金属掩膜板交期对OLED屏开发速度的影响，同时还能够降低OLED新款屏幕开发的掩膜板成本。
为实现上述目的，本发明提供一种金属掩膜板，包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；所述第一金属掩膜板薄片的上表面与所述金属框架的上表面齐平，所述第二金属掩膜板薄片设于所述第一金属掩膜板薄片上方；所述第一金属掩膜板薄片上设有间隔设置的数个第一开口；所述第二金属掩膜板薄片上设有间隔设置的数个第二开口；所述数个第一开口分别与数个第二开口相对应，并且所述第一开口的尺寸大于所述第二开口的尺寸。
所述第一开口与第二开口的形状不同；所述数个第一开口在所述第一金属掩膜板薄片上呈阵列排布；所述数个第二开口在所述第二金属掩膜板薄片上呈阵列排布。
所述金属框架上设有沿所述金属框架的内侧边缘依次间隔排列的数个第一凹槽，所述第一金属掩膜板薄片包括第一金属掩膜板本体以及分布于所述第一金属掩膜板本体周边的数个凸起部，所述数个凸起部的形状和尺寸与所述数个第一凹槽的形状和尺寸相匹配，所述数个凸起部分别焊接于所述数个第一凹槽内，所述数个凸起部的上表面与所述金属框架上除数个第一凹槽以外的区域的上表面齐平；所述数个第一开口分布于所述第一金属掩膜板本体上。
所述数个第一凹槽与数个凸起部均为矩形。
所述第二金属掩膜板薄片焊接于金属框架上，所述金属框架上设有第二凹槽，在所述第二金属掩膜板薄片上对应于第二凹槽的位置施加压力，能够使所述第二金属掩膜板薄片断裂。
所述第二金属掩膜板薄片上对应于第二凹槽的位置的厚度为其它区域的厚度的二分之一。
所述第二凹槽的横截面为倒三角形。
将所述第二金属掩膜板薄片上与所述金属框架焊接的位置定义为焊接线，将所述第二金属掩膜板薄片上对应于第二凹槽的位置定义为切断压力线，所述焊接线与切断压力线均对应于所述金属框架上位于数个第一凹槽之间的间隔区域设置，并且均呈现为围成一圈的数个不连续的线段，所述焊接线位于切断压力线的外围。
所述第一金属掩膜板本体上设有数个第一对位标记，所述第二金属掩膜板薄片上设有数个第二对位标记，所述数个第一对位标记分别与数个第二对位标记上下对应。
所述金属框架的材料为铁镍合金或不锈钢；所述第一金属掩膜板薄片与第二金属掩膜板薄片的材料均为铁镍合金。
本发明还提供一种金属掩膜板，包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；所述第一金属掩膜板薄片的上表面与所述金属框架的上表面齐平，所述第二金属掩膜板薄片设于所述第一金属掩膜板薄片上方；所述第一金属掩膜板薄片上设有间隔设置的数个第一开口；所述第二金属掩膜板薄片上设有间隔设置的数个第二开口；所述数个第一开口分别与数个第二开口相对应，并且所述第一开口的尺寸大于所述第二开口的尺寸；
其中，所述第一开口与第二开口的形状不同；所述数个第一开口在所述第一金属掩膜板薄片上呈阵列排布；所述数个第二开口在所述第二金属掩膜板薄片上呈阵列排布；
其中，所述金属框架上设有沿所述金属框架的内侧边缘依次间隔排列的数个第一凹槽，所述第一金属掩膜板薄片包括第一金属掩膜板本体以及分布于所述第一金属掩膜板本体周边的数个凸起部，所述数个凸起部的形状和尺寸与所述数个第一凹槽的形状和尺寸相匹配，所述数个凸起部分别焊接于所述数个第一凹槽内，所述数个凸起部的上表面与所述金属框架上除数个第一凹槽以外的区域的上表面齐平；所述数个第一开口分布于所述第一金属掩膜板本体上；
其中，所述第二金属掩膜板薄片焊接于金属框架上，所述金属框架上设有第二凹槽，在所述第二金属掩膜板薄片上对应于第二凹槽的位置施加压力，能够使所述第二金属掩膜板薄片断裂；
其中，所述第二金属掩膜板薄片上对应于第二凹槽的位置的厚度为其它区域的厚度的二分之一；
其中，所述第一金属掩膜板本体上设有数个第一对位标记，所述第二金属掩膜板薄片上设有数个第二对位标记，所述数个第一对位标记分别与数个第二对位标记上下对应。
本发明的有益效果：本发明的金属掩膜板包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；将本发明的金属掩膜板应用于蒸镀制程时，首先使用第二金属掩膜板薄片制作第一OLED屏，所述第二金属掩膜板薄片使用一段时间并不再使用之后，将其从金属框架上取掉，使用第一金属掩膜板薄片制作第二OLED屏；由于本发明的金属掩膜板能够用于先后制作两种OLED屏，因此能够应对OLED面板厂连续开发两种OLED屏新品的需求，减少金属掩膜板交期对OLED屏开发速度的影响，另外采用本发明的金属掩膜板可以降低金属掩膜板的购买成本。
为了能更进一步了解本发明的特征以及技术内容，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考与说明用，并非用来对本发明加以限制。
附图说明
下面结合附图，通过对本发明的具体实施方式详细描述，将使本发明的技术方案及其它有益效果显而易见。
附图中，
图1为用于制作矩形OLED屏的通用型金属掩膜板的结构示意图；
图2为用于制作圆形OLED屏的通用型金属掩膜板的结构示意图；
图3为现有的一种混合排版的OLED基板的结构示意图；
图4为用于制作混合排版的OLED基板的通用型金属掩膜板的结构示意图；
图5为本发明的金属掩膜板的俯视示意图；
图6为本发明的金属掩膜板中的金属框架的俯视示意图；
图7为本发明的金属掩膜板中的第一金属掩膜板薄片的俯视示意图；
图8为本发明的金属掩膜板中的第二金属掩膜板薄片的俯视示意图；
图9为本发明的金属掩膜板沿图5中的AA线的剖视示意图；
图10为本发明的金属掩膜板沿图5中的BB线的剖视示意图；
图11为使用本发明的金属掩膜板中的第二金属掩膜板薄片进行蒸镀的示意图；
图12为使用本发明的金属掩膜板中的第一金属掩膜板薄片进行蒸镀的示意图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果，以下结合本发明的优选实施例及其附图进行详细描述。
请参阅图5至图10，本发明提供一种金属掩膜板，包括金属框架10以及固定于所述金属框架10上的第一金属掩膜板薄片20与第二金属掩膜板薄片30；所述第一金属掩膜板薄片20的上表面与所述金属框架10的上表面齐平，所述第二金属掩膜板薄片30设于所述第一金属掩膜板薄片20上方；所述第一金属掩膜板薄片20上设有间隔设置的数个第一开口211；所述第二金属掩膜板薄片30上设有间隔设置的数个第二开口31；所述数个第一开口211分别与数个第二开口31相对应，并且所述第一开口211的尺寸大于所述第二开口31的尺寸，以保证所述第二开口31对应设于所述第一开口211内部。
具体的，本发明的金属掩膜板为通用型金属掩膜板(common mask)。
可选的，所述第一开口211与第二开口31的形状不同，以应对OLED面板厂连续开发2款不同形状的OLED屏新品的需求。
具体的，所述第一开口211的形状为矩形，所述数个第一开口211在所述第一金属掩膜板薄片20上呈阵列排布。如图5所示，当需要制作正方 形OLED屏时，所述第一开口211的形状为正方形。
具体的，所述第二开口31的形状为圆形，所述数个第二开口31在所述第二金属掩膜板薄片30上呈阵列排布。
具体的，如图5、图6、图7所示，所述金属框架10上设有沿所述金属框架10的内侧边缘依次间隔排列的数个第一凹槽11，所述第一金属掩膜板薄片20包括第一金属掩膜板本体21以及分布于所述第一金属掩膜板本体21周边的数个凸起部22，所述数个凸起部22的形状和尺寸与所述数个第一凹槽11的形状和尺寸相匹配，所述数个凸起部22分别焊接于所述数个第一凹槽11内，所述数个凸起部22的上表面与所述金属框架10上除数个第一凹槽11以外的区域的上表面齐平。所述数个第一开口211分布于所述第一金属掩膜板本体21上。
具体的，所述数个第一凹槽11与数个凸起部22均为矩形。
具体的，所述第一凹槽11与凸起部22的数量根据具体设计与力学模拟决定。
优选的，如图5、图6、图7所示，所述第一金属掩膜板薄片20上设有均匀分布的28个凸起部22，所述金属框架10上设有均匀分布的28个第一凹槽11。
具体的，所述第二金属掩膜板薄片30焊接于金属框架10上，所述金属框架10上设有第二凹槽12，在所述第二金属掩膜板薄片30上对应于第二凹槽12的位置施加压力，能够使所述第二金属掩膜板薄片30断裂，从而可以沿断裂的地方将所述第二金属掩膜板薄片30从金属框架10上撕掉。
具体的，所述第二金属掩膜板薄片30上对应于第二凹槽12的位置的厚度为其它区域的厚度的二分之一，因此所述第二金属掩膜板薄片30上对应于第二凹槽12的位置非常容易断裂，只需要施加很小的压力就可以将其断开。
优选的，所述第二凹槽12的横截面为倒三角形。
将所述第二金属掩膜板薄片30上与所述金属框架10焊接的位置定义为焊接线32，将所述第二金属掩膜板薄片30上对应于第二凹槽12的位置定义为切断压力线33，所述焊接线32与切断压力线33均对应于所述金属框架10上位于数个第一凹槽11之间的间隔区域设置，并且均呈现为围成一圈的数个不连续的线段，所述焊接线32位于切断压力线33的外围。
具体的，所述第一金属掩膜板本体21上设有数个第一对位标记25，所述第二金属掩膜板薄片30上设有数个第二对位标记35，所述数个第一对位标记25分别与数个第二对位标记35上下对应。
具体的，如图5、图7、图8所示，所述第一金属掩膜板本体21与第二金属掩膜板薄片30均为矩形；所述第一金属掩膜板本体21上设有四个第一对位标记25，分别位于所述第一金属掩膜板本体21的四个角处；所述第二金属掩膜板薄片30上设有四个第二对位标记35，分别位于所述第二金属掩膜板薄片30的四个角处。
具体的，所述金属框架10的材料为铁镍合金或不锈钢。
具体的，所述第一金属掩膜板薄片20与第二金属掩膜板薄片30的材料均为铁镍合金。
图11为使用本发明的金属掩膜板中的第二金属掩膜板薄片30进行蒸镀的示意图，如图11所示，所述金属掩膜板中的第二金属掩膜板薄片30与第一待蒸镀基板41贴合在一起，箭头所示的自下而上的蒸镀材料气流透过所述第二金属掩膜板薄片30上的第二开口31，在第一待蒸镀基板41表面形成与第二开口31大小相同的薄膜区域，形成第一OLED屏51，所述第一OLED屏51的形状为圆形；
当第二金属掩膜板薄片30使用一段时间，不再使用之后，于切断压力线33的位置向下压第二金属掩膜板薄片30，将第二金属掩膜板薄片30切断，并从金属框架10上去除，此时金属框架10上仅设有第一金属掩膜板薄片20，图12为使用本发明的金属掩膜板中的第一金属掩膜板薄片20进行蒸镀的示意图，如图12所示，所述金属掩膜板中的第一金属掩膜板薄片20与第二待蒸镀基板42贴合在一起，箭头所示的自下而上的蒸镀材料气流透过所述第一金属掩膜板薄片20上的第一开口211，在第二待蒸镀基板42表面形成与第一开口211大小相同的薄膜区域，形成第二OLED屏52，所述第二OLED屏52的形状为矩形；
具体的，所述第一待蒸镀基板41与第二待蒸镀基板42为玻璃基板或者表面具有聚酰亚胺的玻璃基板。进一步的，所述玻璃基板或表面具有聚酰亚胺的玻璃基板的表面可以具有TFT结构。
具体的，所述蒸镀材料气流为有机/金属材料气流。
可以看出，采用本发明的金属掩膜板可以在较短的时间内实现2款OLED屏的开发，降低通用型金属掩膜板交期对OLED屏开发速度的影响，从而缩短OLED屏的开发周期，加速OLED屏的研发进程。
现有技术中，开发两款OLED屏需要两种通用型金属掩膜板，而本发明只需要采用一种通用型金属掩膜板即可连续实现两款OLED屏的开发，因此与现有技术相比，本发明节约了一种通用型金属掩膜板的制作，减少了一道金属框架的使用，由于生产2款OLED屏需要的通用型金属掩膜板 的数量通常为10～18pcs，因此本发明可以大幅度降低金属框架的购买数量，降低通用型金属掩膜板的生产成本，进而降低OLED屏的开发成本。
本发明的通用型金属掩膜板应用于OLED屏的制程时，不会改变现有的OLED面板厂制作OLED屏的制程，并且相应的精密型掩膜板的制程维持现有制程不变，因此不会增加OLED产品开发的难度。
值得一提的是，本发明的金属掩膜板的发明构思还可以应用于精密型金属掩膜板的制程中，以简化精密型金属掩膜板的制程。
综上所述，本发明提供一种金属掩膜板，包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；将本发明的金属掩膜板应用于蒸镀制程时，首先使用第二金属掩膜板薄片制作第一OLED屏，所述第二金属掩膜板薄片使用一段时间并不再使用之后，将其从金属框架上取掉，使用第一金属掩膜板薄片制作第二OLED屏；由于本发明的金属掩膜板能够用于先后制作两种OLED屏，因此能够应对OLED面板厂连续开发两种OLED屏新品的需求，减少金属掩膜板交期对OLED屏开发速度的影响，另外采用本发明的金属掩膜板可以降低金属掩膜板的购买成本。
以上所述，对于本领域的普通技术人员来说，可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形，而所有这些改变和变形都应属于本发明权利要求的保护范围。

Claims (15)

  1. 一种金属掩膜板，包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；所述第一金属掩膜板薄片的上表面与所述金属框架的上表面齐平，所述第二金属掩膜板薄片设于所述第一金属掩膜板薄片上方；所述第一金属掩膜板薄片上设有间隔设置的数个第一开口；所述第二金属掩膜板薄片上设有间隔设置的数个第二开口；所述数个第一开口分别与数个第二开口相对应，并且所述第一开口的尺寸大于所述第二开口的尺寸。
  2. 如权利要求1所述的金属掩膜板，其中，所述第一开口与第二开口的形状不同；所述数个第一开口在所述第一金属掩膜板薄片上呈阵列排布；所述数个第二开口在所述第二金属掩膜板薄片上呈阵列排布。
  3. 如权利要求1所述的金属掩膜板，其中，所述金属框架上设有沿所述金属框架的内侧边缘依次间隔排列的数个第一凹槽，所述第一金属掩膜板薄片包括第一金属掩膜板本体以及分布于所述第一金属掩膜板本体周边的数个凸起部，所述数个凸起部的形状和尺寸与所述数个第一凹槽的形状和尺寸相匹配，所述数个凸起部分别焊接于所述数个第一凹槽内，所述数个凸起部的上表面与所述金属框架上除数个第一凹槽以外的区域的上表面齐平；所述数个第一开口分布于所述第一金属掩膜板本体上。
  4. 如权利要求3所述的金属掩膜板，其中，所述数个第一凹槽与数个凸起部均为矩形。
  5. 如权利要求1所述的金属掩膜板，其中，所述第二金属掩膜板薄片焊接于金属框架上，所述金属框架上设有第二凹槽，在所述第二金属掩膜板薄片上对应于第二凹槽的位置施加压力，能够使所述第二金属掩膜板薄片断裂。
  6. 如权利要求5所述的金属掩膜板，其中，所述第二金属掩膜板薄片上对应于第二凹槽的位置的厚度为其它区域的厚度的二分之一。
  7. 如权利要求5所述的金属掩膜板，其中，所述第二凹槽的横截面为倒三角形。
  8. 如权利要求5所述的金属掩膜板，其中，将所述第二金属掩膜板薄片上与所述金属框架焊接的位置定义为焊接线，将所述第二金属掩膜板薄片上对应于第二凹槽的位置定义为切断压力线，所述焊接线与切断压力线均对应于所述金属框架上位于数个第一凹槽之间的间隔区域设置，并且均 呈现为围成一圈的数个不连续的线段，所述焊接线位于切断压力线的外围。
  9. 如权利要求3所述的金属掩膜板，其中，所述第一金属掩膜板本体上设有数个第一对位标记，所述第二金属掩膜板薄片上设有数个第二对位标记，所述数个第一对位标记分别与数个第二对位标记上下对应。
  10. 如权利要求1所述的金属掩膜板，其中，所述金属框架的材料为铁镍合金或不锈钢；所述第一金属掩膜板薄片与第二金属掩膜板薄片的材料均为铁镍合金。
  11. 一种金属掩膜板，包括金属框架以及固定于所述金属框架上的第一金属掩膜板薄片与第二金属掩膜板薄片；所述第一金属掩膜板薄片的上表面与所述金属框架的上表面齐平，所述第二金属掩膜板薄片设于所述第一金属掩膜板薄片上方；所述第一金属掩膜板薄片上设有间隔设置的数个第一开口；所述第二金属掩膜板薄片上设有间隔设置的数个第二开口；所述数个第一开口分别与数个第二开口相对应，并且所述第一开口的尺寸大于所述第二开口的尺寸；
    其中，所述第一开口与第二开口的形状不同；所述数个第一开口在所述第一金属掩膜板薄片上呈阵列排布；所述数个第二开口在所述第二金属掩膜板薄片上呈阵列排布；
    其中，所述金属框架上设有沿所述金属框架的内侧边缘依次间隔排列的数个第一凹槽，所述第一金属掩膜板薄片包括第一金属掩膜板本体以及分布于所述第一金属掩膜板本体周边的数个凸起部，所述数个凸起部的形状和尺寸与所述数个第一凹槽的形状和尺寸相匹配，所述数个凸起部分别焊接于所述数个第一凹槽内，所述数个凸起部的上表面与所述金属框架上除数个第一凹槽以外的区域的上表面齐平；所述数个第一开口分布于所述第一金属掩膜板本体上；
    其中，所述第二金属掩膜板薄片焊接于金属框架上，所述金属框架上设有第二凹槽，在所述第二金属掩膜板薄片上对应于第二凹槽的位置施加压力，能够使所述第二金属掩膜板薄片断裂；
    其中，所述第二金属掩膜板薄片上对应于第二凹槽的位置的厚度为其它区域的厚度的二分之一；
    其中，所述第一金属掩膜板本体上设有数个第一对位标记，所述第二金属掩膜板薄片上设有数个第二对位标记，所述数个第一对位标记分别与数个第二对位标记上下对应。
  12. 如权利要求11所述的金属掩膜板，其中，所述数个第一凹槽与数个凸起部均为矩形。
  13. 如权利要求11所述的金属掩膜板，其中，所述第二凹槽的横截面为倒三角形。
  14. 如权利要求11所述的金属掩膜板，其中，将所述第二金属掩膜板薄片上与所述金属框架焊接的位置定义为焊接线，将所述第二金属掩膜板薄片上对应于第二凹槽的位置定义为切断压力线，所述焊接线与切断压力线均对应于所述金属框架上位于数个第一凹槽之间的间隔区域设置，并且均呈现为围成一圈的数个不连续的线段，所述焊接线位于切断压力线的外围。
  15. 如权利要求11所述的金属掩膜板，其中，所述金属框架的材料为铁镍合金或不锈钢；所述第一金属掩膜板薄片与第二金属掩膜板薄片的材料均为铁镍合金。
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