WO2019109626A1

WO2019109626A1 - Cooling plate

Info

Publication number: WO2019109626A1
Application number: PCT/CN2018/092236
Authority: WO
Inventors: 邓曾红; 管长乐
Original assignee: 北京创昱科技有限公司
Priority date: 2017-12-08
Filing date: 2018-06-21
Publication date: 2019-06-13
Also published as: JP2019104984A; CN108118296A; KR20190068407A; US20190178582A1

Abstract

Disclosed is a cooling plate, comprising a cooling plate body (1) internally provided with a water circulating channel (3), wherein the water circulating channel is a water channel with water intake and return channels in parallel. By providing the water circulating channel with water intake and return channels in parallel in the cooling plate body, the cooling plate has improved heat-exchange efficiency, and solves the problem of the temperature of the whole cooling plate being non-uniform caused by the difference in temperature between intake water and return water.

Description

Cooling plate

cross reference

The present application is hereby incorporated by reference in its entirety in its entirety in its entirety in its entirety in the the the the the the the the the

Technical field

The present invention relates to the field of cooling equipment in the field of vacuum coating, and more particularly to a cooling plate.

Background technique

The vacuum-coated cooling plate is generally installed in the process chamber and the exit side of the coating equipment, which can continuously remove the heat by circulating the cooling liquid, thereby accelerating the cooling rate of the substrate, effectively reducing the temperature of the substrate when the atmosphere is exposed, and shortening the overall process of the device. Beat.

In the existing vacuum coating field, most of the cooling plate structures are formed by using a thick plate deep hole drill to process a single-circuit water channel and a water pipe directly bent and formed. The structure of the thick hole deep hole drilling water channel is limited by the processing technology, mostly one-in and one-out single-circuit waterway, the cooling efficiency is low, the temperature difference between the water inlet side and the return water side is large, and the temperature uniformity of the whole plate is poor, which seriously affects the equipment. The overall process tempo; and the pipe structure of the water pipe bending is formed by the gap between the pipes, and the water pipe is fixed on the flat plate when the large area is used, the heat conduction between the pipe and the plate is poor, and the maintenance and cleaning work is large.

Summary of the invention

(1) Technical problems to be solved

The present invention provides a cold water plate to solve the technical problem of temperature unevenness of the cooling plate itself.

(2) Technical plan

In order to solve the above technical problem, the present invention provides a cooling plate comprising a cooling plate body, wherein the cooling plate body is provided with a circulating water channel, and the circulating water channel is a water channel in which the inlet and the return water passage are parallel.

Further, the cooling plate body is divided into a plurality of sections of an integrated structure, and each of the sections is correspondingly provided with a set of independent circulating water channels.

Further, each of the sub-sections of the cooling plate body is a groove adjacent to a common side wall of the sub-section, and each of the circulating water channels is disposed in a corresponding one of the grooves.

Further, the circulating water channel comprises a water inlet and a parallel water tank which are milled on the surface of the groove, and/or a water pipe in which water entering and returning are parallel.

Further, the cooling plate body is further provided with a bottom plate, and the cooling plate body is divided into four rectangular grooves with two center lines as a base line, and each of the grooves is inlaid with the groove. Connected base plate.

Further, a plurality of bosses are disposed on the cooling plate at a position offset from the circulating water channel, and the bottom plate is provided with a receiving hole corresponding to the boss, and the boss is disposed in the receiving hole And connected to the bottom plate.

Further, the bottom plate is provided with a gas dividing pipe, and the cooling plate body is further provided with a through hole at a position offset from the circulating water channel, and the bottom plate is provided with a vent hole corresponding to the air hole. The air duct is provided with a gas jet hole communicating with the air hole and the vent hole.

Further, each of the bottom plates is provided with a gas dividing pipe on each of the diagonal lines, and each of the gas dividing pipes is correspondingly provided with an air inlet pipe.

Further, the bottom plate is provided with a main intake pipe and a plurality of the air separation pipes, and the air separation pipe is in communication with the main intake pipe.

Further, the circulating water channel is provided with strip-like protrusions along the moving direction of the water flow.

Further, the cooling plate body is provided with a thermocouple and/or a controlled flow circulating water pump for detecting the temperature uniformity of the cooling plate.

(3) Beneficial effects

The above technical solution of the present invention has the following advantages: the cooling plate provided by the present invention solves the uneven temperature of the integral cooling plate caused by the temperature difference between the inlet water and the return water by providing a circulating water passage in parallel with the inlet and return water passages in the body of the cooling plate. The problem.

In addition to the technical problems solved by the present invention described above, the technical features of the constituent technical solutions, and the advantages brought by the technical features of the technical solutions, other technical features of the present invention and the advantages brought by these technical features, Further explanation will be made in conjunction with the drawings.

DRAWINGS

1 is a schematic view showing the assembly of a cooling plate according to an embodiment of the present invention;

2 is a schematic plan view of a cooling plate according to an embodiment of the present invention;

Figure 3 is a cross-sectional view taken along line A-A of Figure 2;

Figure 4 is an enlarged view of a portion B of Figure 3;

Figure 5 is an enlarged view of a portion C of Figure 3;

Fig. 6 is an enlarged view of a portion D of Fig. 3;

In the figure: 1: cooling plate body, 11: boss, 12: air hole; 2: bottom plate, 21: first bottom plate, 22: second bottom plate, 23: third bottom plate, 24: fourth bottom plate; 25: bottom plate and Welding position of the cooling plate body; 3: circulating water channel, 31: comb structure; 4: inlet pipe; 5: return pipe; 6: water pipe joint; 7: ferrule joint, 8: air pipe, 81: air pipe and bottom plate Welding position, 82: jet hole; 9: intake pipe, 91: welding point of the intake pipe and the gas pipe, 92: VCR male joint, 93: VCR male nut.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. It is a part of the embodiment of the invention, not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; can be mechanical or electrical; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of the two components. The specific meaning of the above terms in the present invention can be understood in a specific case by those skilled in the art.

In addition, in the description of the present invention, "multiple", "multiple", and "multiple sets" mean two or more, "several", "several roots", "several" unless otherwise stated. "Group" means one or more.

As shown in FIG. 1 , a cooling plate provided by an embodiment of the present invention includes a cooling plate body 1 , and the circulating water channel 3 is disposed in the cooling plate body 1 , and the circulating water channel 3 is parallel to the water inlet channel and the water return channel. Waterway.

It should be noted that the parallel connection between the inlet channel and the return channel means that the inlet channel and the outlet channel are the same or similar in shape and adjacent to each other, and the inlet of the inlet channel is at the same end as the outlet of the outlet channel. The water outlet of the water inlet channel communicates with the water inlet of the water outlet channel or the end of the water inlet channel is directly integrated with the head end of the water outlet channel.

For example, the circulating water channel can be S-shaped. At this time, the water inlet channel and the return water channel are the same S-type, and the same ends of the two S-shaped channels are respectively the water inlet and the water outlet, and the opposite ends are mutually connected. structure. It is equivalent to completing two S-shaped pipes, and the two ports are the water inlet and the water outlet respectively.

Naturally, the shape of the circulating water channel is not limited to the above-described S shape, and may be other shapes such as a Z shape or a serpentine shape.

It can be understood that a circulating water channel 3 with parallel inlet and outlet channels is disposed in the cooling plate body 1. On the one hand, the circulating water channel 3 increases the heat exchange area between the cooling plate and the liquid in the circulating water channel 3, thereby improving cooling. The heat exchange efficiency of the plate; on the other hand, the use of the parallel water channel 3 of the inlet and return water channels solves the problem of uneven temperature of the integral cooling plate caused by the temperature difference between the inlet water and the return water.

Preferably, the circulating water channel of the embodiment of the present invention has a back shape. As a first embodiment of the present invention, the circulating water channel 3 is directly arranged on the bottom surface of the cooling plate body 1 while welding the bottom plate to seal the circulating water channel on the bottom surface of the cooling plate body, that is, The circulating water channel 3 is formed by a circulating water tank on the bottom surface of the cooling plate body 1 in cooperation with the bottom plate.

As a second embodiment of the present invention, the circulating water channel 3 includes a water pipe and is disposed on a bottom surface of the cooling plate body 1. It should be noted that the circulating water channel in the form of a water pipe may be directly disposed in the groove of the first embodiment, or may be fixed by other forms.

As a third embodiment of the present invention, the circulating water channel 3 may be in the form of a combination of the first embodiment and the second embodiment, that is, the circulating water channel may be a concave portion that is milled. The trough, a section is in the form of a water pipe that communicates with the groove.

In a fourth embodiment of the present invention, a vent hole is added to the first embodiment, the second embodiment, or the third embodiment. Specifically, a plurality of through holes are provided at positions where the circulation water passage is shifted from the cooling plate body. It can be understood that the air holes arranged on the body of the cooling plate can be blown from the bottom to the top while passing through the cooling liquid, effectively taking away heat, and enhancing the heat exchange capability between the cooling plate and the substrate.

The gas input device of the air hole may be a gas separation pipe disposed under the body of the cooling plate, and the gas injection hole is disposed on the gas distribution pipe to communicate with the air hole. Of course, the gas input device of the air hole may also be other members, such as a ventilating plate or the like.

In a fifth embodiment of the present invention, the cooling plate body 1 is divided into a plurality of sections of an integrated structure, and each of the sections is provided with a set of independent circulating water channels 3. It should be noted that the specific arrangement of the circulating water channel of the embodiment may be in any one of the first embodiment, the second embodiment, or the third embodiment, and the fourth embodiment may also be provided. Stomatal solution.

It can be understood that the plurality of sections can shorten the time of heat exchange of the circulating liquid in the cooling plate body 1, so that a large temperature difference between the circulating liquid and the cooling plate of each part can be maintained, thereby improving heat exchange efficiency; The circulation range of each set of circulating waterways is shortened, and the uniformity of the temperature of the cooling plates is further improved.

Hereinafter, the cooling plate of the present invention will be specifically described by taking the cooling plate body into four parts and cooling separately as an example.

As shown in FIG. 1 , the bottom of the cooling plate body of the cooling plate of the embodiment is divided into four equally divided grooves by using two center lines as a base line, and the adjacent grooves share a side wall, and the groove is formed. rectangle. The four circulating water channels 3 are respectively disposed in four grooves, and each groove is embedded in the bottom plate 2. For convenience of description, the first bottom plate 21, the second bottom plate 22, and the third bottom plate 23 are respectively defined. The fourth bottom plate 24, the first bottom plate 21, the second bottom plate 22, the third bottom plate 23, and the fourth bottom plate 24 are respectively fully welded to their corresponding grooves. In Fig. 2, reference numeral 25 denotes a welding position of the bottom plate and the cooling plate body.

On the diagonal line corresponding to the groove of the bottom plate 2 and the cooling plate body 1, a plurality of air holes 12 penetrating the cooling plate body 1 are disposed at a position offset from the circulating water 3, and the bottom plate 2 is also provided with a vent hole at a corresponding position (Fig. Not shown in the drawings), the four air separation pipes 8 are respectively welded to the outer surfaces of the respective bottom plates 2 corresponding to the diagonal lines of the respective grooves (that is, in the direction of 45° with the bottom plate 2), and each of the air separation pipes 8 is arranged. The corresponding air holes 12 are provided with air injection holes 82 communicating with the air holes 12 and the air holes, and a schematic view of the specific air holes 12 and the air injection holes 82 is shown in FIG. In Fig. 2, reference numeral 81 denotes a welding position of the air separation pipe and the bottom plate. It can be understood that with the diagonal setting, the maximum jet range can be formed, and it is located at the center of the bottom plate 2, which is favorable for the uniformity of the gas coming out from the inside of the air hole 12; and the gas pipe 8 is welded to the bottom plate 2 at the same time. The structure allows the sealing of the intake side of the gas injection hole.

Meanwhile, as shown in FIG. 1 or 2, each of the air separation pipes 8 is respectively connected with an intake pipe 9, and each of the intake pipes 9 extends to an intermediate position of the entire cooling plate and is welded to the side of the air separation pipe 8 to realize an between the intake pipe and the air separation pipe. Gas seal. Reference numeral 91 in Fig. 2 denotes a welding point of the intake pipe and the air separation pipe. The other end of the intake pipe is welded with a joint, preferably a VCR male joint 92, on which is mounted a VCR male nut 93.

It can be understood that the intake pipe 9 extends to the middle position of the cooling plate body, so that the length of the intake pipe is increased, so that the intake pipe has a certain flexibility when connected with the vacuum chamber inlet of the gas; that is, the length of the intake pipe is increased. Large, so that when it is docked with the vacuum chamber inlet, even if the position of the vacuum chamber inlet is slightly deviated, the hard intake pipe will not be damaged.

Wherein, as shown in Fig. 2 (shown only in the groove in the lower right corner), the circulating water channel 3 is milled on the surface of the groove. It should be noted that the lower right corner of Fig. 2 is for showing the structure of the circulating water channel, so the structure of the bottom plate is removed.

It can be understood that the milled circulating water channel 3 can avoid the occurrence of bending damage when the water pipe is used for the coiling.

In order to enhance the fixing of the bottom plate 2 and the cooling plate body 1, as shown in FIG. 4, a plurality of bosses 11 are reserved on the cooling plate body 1 at a position offset from the circulating water channel 3, and the bottom plate corresponds to the The boss 11 is provided with a receiving hole, and the boss 11 is disposed in the receiving hole and weldedly connected to the bottom plate. The manner of soldering is specifically shown in FIG. It can be understood that the cooperation of the boss 11 and the accommodating hole forms an auxiliary welding portion of the bottom plate 2, and the welding point of the large surface of the bottom plate 2 is increased, and the rigidity of the large surface of the bottom plate 2 is improved.

Preferably, as shown in FIG. 5, the bottom surface of the cross section of the circulating water channel 3 is a comb structure 31, and the comb structure 31 is a plurality of strip-like protrusions disposed in the circulating water channel 3 and the liquid flow direction along the circulating water channel 3. Start. It can be understood that the comb structure 31 can effectively increase the heat transfer area of the liquid and the cooling plate body 1 during the water flow, and improve the heat exchange efficiency.

The specific processing of the cooling plate of the embodiment of the present invention is given below.

1. Cooling plate processing:

a. Four grooves are formed at the bottom of the cooling plate (the bottom plate is inlaid with the welding position), and a plurality of bosses are reserved at the position where the water channel is staggered (the auxiliary welding portion with the bottom plate is added, the welding point of the large surface of the bottom plate is increased, and the large surface of the bottom plate is raised) rigidity).

b. The circulating water channels are respectively milled on the four groove faces (as shown in Fig. 2), wherein each circulating water channel is a two-channel parallel circuit, and the water inlet and the water return channel are parallel, which is favorable for the high temperature of the return water. Heat exchange between (40-60 ° C) and low temperature of incoming water (16-20 ° C), reducing the impact on the thermal uniformity of the entire large plate; the cross section of the water channel is processed into a "comb structure" (as shown in Figure 5) ), effectively increase the heat transfer area in the water flow process, improve the heat exchange efficiency; four independent circulation channels, increase the water flow through the cooling plate per unit time, can effectively improve the cooling efficiency of the cooling plate.

c. Machining the inlet and return holes at the position corresponding to the waterway at both sides of the cooling plate, corresponding to the welding position of the water pipe joint (7);

d, as shown in Figure 2: uniformly punching the air holes along the 45-degree angle, the jet can effectively improve the heat exchange efficiency between the cooling plate and the substrate;

2. The first bottom plate, the second bottom plate, the third bottom plate and the fourth bottom plate are inlaid into four corresponding grooves of the cooling plate, and are fully welded into one body, pay attention to leak detection after welding, ensure sealing, and realize circulating water passage inside the cooling plate. Seal

3. The outlet ports of the four intake pipes are respectively welded to the corresponding gas distribution pipes, and the air inlets of the four intake pipes are respectively welded to the VCR male joints;

4. The air separation pipes integrally welded with the intake pipe are respectively welded with the first bottom plate, the second bottom plate, the third bottom plate and the fourth bottom plate to realize the penetration between the air inlets on the main intake and cooling plates to form a spray. Gas pipeline passage;

5. The pipe joint 6 for connecting the inlet pipe 4 and the return pipe 5 of each zone and the ferrule joint 7 are welded.

In the parallel circuit of the cooling plate of the embodiment of the invention, the independent circulating water channels are processed in a plurality of regions of the bottom portion of the cooling plate body, and the water channel is sealed by the welding bottom plate. In the embodiment of the invention, the inlet and the return channel of each water channel of the cooling plate are paralleled, and the temperature uniformity of the whole plate caused by the temperature difference between the inlet water and the return water is improved, and the cross section of the water channel adopts a comb structure, which increases the heat transfer area of the water and improves the transmission. Thermal efficiency; independent water circulation in multiple regions, disguised to increase the overall water flow rate of the whole plate, enhance the heat exchange capacity of the cooling plate, and improve the cooling rate of the substrate. At the same time, the air holes are arranged on the cooling plate, and the air is blown from the bottom to the top while passing through the cooling liquid, effectively taking away heat, and enhancing the heat exchange capability between the cooling plate and the substrate.

At the same time, in the cooling plate of the embodiment, the thermocouple temperature measurement can be added on the cooling plate to detect the uniformity of the cooling plate; the controllable flow circulating water pump can be added to the water supply outside the cooling plate, and the thermocouple installed on the cooling plate is added. Thereby, the automatic temperature control function of the cooling temperature of the surface of the cooling plate is realized. At the same time, it is also a feasible solution of the present invention to adopt a method in which a water pipe is arranged in the groove to form a water inlet and a return water in parallel, and the bottom plate seal is no longer used.

In the above-mentioned specific embodiment, the intake mode is not limited to the four air pipes respectively given in the embodiment, and one air intake pipe is connected to each other, or the four air pipes may be connected to the same main air intake pipe to realize the air intake. That is, one main intake pipe is connected to the plurality of air separation pipes. At the same time, the arrangement of the air separation pipe is not limited to the above-mentioned form set on the diagonal line, but it is also possible to directly arrange a main intake pipe at a central position, and a plurality of air separation pipes are connected from the different positions to the main air pipe two In the form of the side, for example, the air holes are arranged in a substantially "king" shape at positions offset from the circulating water channel, and correspondingly, the plurality of air separation pipes are connected to both sides of the main intake pipe to form a substantially "King" shape.

In summary, the cooling plate of the embodiment of the invention enhances the cooling effect, improves the cooling efficiency of the cooling plate to the substrate, and reduces the influence of the cooling time on the overall process tempo of the device; and the overall temperature uniformity of the cooling plate of the embodiment It is better; and it adopts a welded integrated structure for post-maintenance.

It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not limited thereto; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that The technical solutions described in the foregoing embodiments are modified, or the equivalents of the technical features are replaced. The modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

A cooling plate, comprising: a cooling plate body, wherein the cooling plate body is provided with a circulating water channel, wherein the circulating water channel is a parallel water channel of the inlet and the return water passage.
The cooling plate according to claim 1, wherein the cooling plate body is divided into a plurality of sections of a unitary structure, and each of the sections is provided with a set of independent circulating water channels.
The cooling plate according to claim 2, wherein each of said sub-sections of said cooling plate body is a groove adjacent to a common side wall of said sub-section, and each of said circulating water channels is disposed at a corresponding one. Inside the groove.
The cooling plate according to claim 3, wherein said circulating water channel comprises a parallel inlet and outlet water milled on said groove surface, and/or in parallel with water returning Water pipe.
The cooling plate according to claim 4, wherein the cooling plate body is further provided with a bottom plate, and the cooling plate body is divided into four rectangular grooves by using two center lines thereof as a base line, and each of the The groove is inlaid with a bottom plate that is sealingly connected to the groove.
The cooling plate according to claim 5, wherein a plurality of bosses are disposed on the cooling plate at a position offset from the circulating water channel, and the bottom plate is provided with a receiving hole corresponding to the boss. The boss is disposed in the receiving hole and connected to the bottom plate.
The cooling plate according to claim 6, wherein the bottom plate is provided with a gas dividing pipe, and the cooling plate body is further provided with a through hole at a position offset from the circulating water channel, and the bottom plate is provided with a vent hole corresponding to the air hole, wherein the air pipe is provided with a gas vent hole communicating with the air hole and the vent hole.
The cooling plate according to claim 7, wherein each of the bottom plates is provided with a gas dividing pipe on each of the diagonal lines, and each of the gas dividing pipes is correspondingly provided with an air inlet pipe.
The cooling plate according to claim 8, wherein said bottom plate is provided with a main intake pipe and a plurality of said gas distribution pipes, and said gas distribution pipe is in communication with said main intake pipe.
The cooling plate according to any one of claims 1 to 9, characterized in that the circulating water channel is provided with strip-like projections in the direction of movement of the water flow.
The cooling plate according to claim 1, wherein the cooling plate body is provided with a thermocouple and/or a controlled flow circulating water pump for detecting temperature uniformity of the cooling plate.