WO2019103116A1 - Dispositif de détection d'humidité - Google Patents

Dispositif de détection d'humidité Download PDF

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Publication number
WO2019103116A1
WO2019103116A1 PCT/JP2018/043258 JP2018043258W WO2019103116A1 WO 2019103116 A1 WO2019103116 A1 WO 2019103116A1 JP 2018043258 W JP2018043258 W JP 2018043258W WO 2019103116 A1 WO2019103116 A1 WO 2019103116A1
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WO
WIPO (PCT)
Prior art keywords
detection unit
humidity
space
humidity detection
electrode
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Application number
PCT/JP2018/043258
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English (en)
Japanese (ja)
Inventor
尚信 大川
亨 宮武
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アルプスアルパイン株式会社
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Publication of WO2019103116A1 publication Critical patent/WO2019103116A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Definitions

  • the present invention relates to a humidity sensing device, and more particularly to a humidity sensing device in which a moisture sensitive layer is provided between two electrodes.
  • a humidity detection device As a humidity detection device, a configuration is known in which a humidity sensitive layer is provided between two electrodes, and the humidity is detected based on changes in capacitance and electrical resistance.
  • this humidity detection device since it is necessary to cause the moisture sensitive layer to be exposed to the outside air, when foreign matter such as dust contained in the outside air adheres to the moisture sensitive layer, it affects the accuracy of the detection result.
  • Patent Document 1 discloses a humidity sensor using a photocatalytic filter.
  • the photocatalyst filter is a porous filter coated with a photocatalyst, and is provided to cover the case opening of the humidity sensor.
  • Patent Document 2 discloses a humidity sensor in which a protective gel made of a water resistant material is applied to the upper surface of the sensor element.
  • the protective gel is provided in the humidity sensor so as to cover the entire circuit portion, the bonding wire, and a part of the portion of the lead terminal protruding inward of the case.
  • Patent Document 3 discloses a capacitive humidity sensor in which a moisture permeable film is provided on a detection unit.
  • This capacitive humidity sensor has a detection unit including a pair of detection electrodes and a humidity sensitive film formed on the pair of detection electrodes and whose capacitance value changes according to the humidity, and the humidity sensitive film of the detection unit A gel film as a moisture permeable film is provided on the top.
  • Patent No. 4765856 gazette Patent No. 4765848 gazette Patent No. 3855950 gazette
  • a humidity detection device using a moisture sensitive layer a photocatalyst filter, a protective gel, a gel film, etc. are formed as described in Patent Documents 1 to 3 as a configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer. Although it may be adopted, it is required to secure predetermined detection accuracy also in these cases. In addition, even with the configuration for preventing the adhesion of foreign matter, it is desirable to avoid an increase in the number of parts, an increase in cost, and an increase in the size of the apparatus.
  • a sufficient film thickness may not be ensured in terms of securing detection accuracy or avoiding enlargement of the device, and in such a case, adhesion or intrusion of foreign matter is sufficient. Difficult to prevent.
  • the photocatalyst filter is effective for the infiltration of tobacco particles and the like, it is a porous filter and therefore can not prevent the infiltration of gaseous foreign substances contained in the air.
  • an object of the present invention is to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
  • the humidity detection device of the present invention is a humidity detection device provided with a reference detection unit and a humidity detection unit on a base material, and the reference detection unit and the humidity detection unit are respectively the first A humidity sensitive layer is interposed between the electrode and the second electrode, and the reference detection unit and the humidity detection unit are covered on the front side by the cover, and the first space is between the cover and the reference detection unit.
  • the second space is formed between the lid portion and the humidity detection portion, and the humidity detection portion is provided with a humidity sensing hole extending from the second space to the humidity sensitive layer, and the lid portion is a reference detection portion.
  • the opening part which follows the first space is provided in the region which covers the first space, and the first space and the second space are connected so as to be able to ventilate each other by the communication hole.
  • this humidity detection device with a simple configuration, it is possible to prevent foreign matter such as dust from adhering to the humidity sensitive layer, and to maintain detection accuracy.
  • the lid is fixed to the base by the adhesive layer disposed on the base around the reference detecting part and the humidity detecting part, and the communication hole is in the first space. It is preferable to penetrate the adhesive layer so as to connect the second space with the second space. As a result, it is possible to simply provide a configuration that can realize both the prevention of adhesion of foreign matter and the maintenance of detection accuracy.
  • the lid is made of silicon
  • the adhesive layer is made of polyimide resin.
  • the present invention it is possible to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
  • (A) is a top view which shows schematic structure of the humidity detection apparatus based on embodiment of this invention
  • (b) is a top view which shows the state without a cover part in the humidity detection apparatus of (a). It is a sectional view in the A-A 'line of Drawing 1 (a), and is a figure showing the composition of a reference detecting part. It is a sectional view in the B-B 'line of Drawing 1 (a), and is a figure showing the composition of a humidity detection part. It is a sectional view in the C-C 'line of Drawing 1 (a), and is a figure showing a communicating hole.
  • FIG. 1 (a) is a top view which shows schematic structure of the humidity detection apparatus 10 which concerns on this embodiment
  • (b) is a top view which shows the state without the cover part 21 in the humidity detection apparatus 10 of (a).
  • FIG. 2 is a cross-sectional view taken along the line A-A 'of FIG. 1A and showing the configuration of the reference detection unit 10A.
  • FIG. 3 is a cross-sectional view taken along the line B-B 'of FIG. 1A and showing the configuration of the humidity detection unit 10B.
  • FIG. 4 is a cross-sectional view taken along the line C-C 'of FIG. In FIGS.
  • FIGS. 2 to 4 the end portions of the substrate 11 in the surface direction (left and right directions in FIGS. 2 to 4) are partially omitted.
  • the upper side of FIGS. 2 to 4 is referred to as the front side (upper direction) and the lower side is referred to as the back side (downward direction), but the vertical direction can be arbitrarily set according to the attitude of the apparatus.
  • the humidity detection apparatus 10 is an apparatus provided with 10 A of reference
  • the reference detection unit 10A and the humidity detection unit 10B are formed on the first insulating layer 12 formed on the sheet-like base material 11.
  • silicon is used as the base 11, and silicon oxide is used as the first insulating layer 12, for example.
  • a lid 21 is disposed so as to cover the front sides (upper sides in FIGS. 2 to 4) of the reference detection unit 10A and the humidity detection unit 10B.
  • the lid 21 is fixed to the base 11 side by an adhesive layer 20 (see FIG. 1B) disposed around the reference detection unit 10A and the humidity detection unit 10B.
  • an adhesive layer 20 see FIG. 1B
  • a polyimide resin is used as the adhesive layer 20
  • a plate made of silicon is used as the lid 21.
  • an opening 22 is provided in a region covering the reference detection unit 10 ⁇ / b> A.
  • the opening 22 has a substantially square shape in a plan view as viewed from above the humidity detection device 10.
  • the opening 22 may be formed in advance in a plate member constituting the lid 21 or may be formed by etching after being fixed on the adhesive layer 20.
  • the opening 22 is provided so as to penetrate the thickness direction (vertical direction in FIG. 2) of the lid 21 from the front side to the back side.
  • the first space 23 between the reference detection unit 10A and the lid 21 and the opening 22 are connected to each other. Therefore, the first space 23 is connected to the outside of the humidity detection device 10 through the opening 22, and the outside air is introduced into the first space 23.
  • the opening 22 has a substantially square shape according to the shape of the reference detection unit 10A in a plan view, but the planar shape is not limited to this.
  • the opening area in plan view can also be set arbitrarily according to the specification of the humidity detection device 10, and can be set larger or smaller than, for example, the reference detection unit 10A.
  • a part of the opening 22 is a reference detection unit It may extend out of 10 A or may be deviated.
  • the opening 22 may be divided into two or more.
  • the reference detection unit 10 ⁇ / b> A includes a first electrode 13, a moisture sensitive layer 14, and a second electrode 15.
  • the first electrode 13 is patterned on the first insulating layer 12.
  • the second electrode 15 is patterned to be separated from the first electrode 13.
  • the moisture sensitive layer 14 is provided so as to be interposed between the first electrode 13 and the second electrode 15. That is, the moisture sensitive layer 14 is formed to cover the first electrode 13.
  • a polyimide resin is used as the moisture sensitive layer 14.
  • the second electrode 15 is formed on the moisture sensitive layer 14.
  • the second electrode 15 is provided so as to extend outward of the reference detection unit 10A, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
  • a second insulating layer 16 is provided to cover the moisture sensitive layer 14 between the patterns of the second electrode 15 and the second electrode 15.
  • a first space 23 is formed between the second insulating layer 16 and the reference detection unit 10A covered with the second insulating layer 16 and the lid 21 including the opening 22.
  • As the second insulating layer 16 an inorganic material with low hygroscopicity such as silicon nitride is used.
  • the second insulating layer 16 extends outward of the reference detection unit 10A, and an opening 16a is provided at the extension destination.
  • a pad electrode 17 is provided on the opening 16 a, and the pad electrode 17 is electrically connected to the second electrode 15 through the opening 16 a.
  • the humidity detection unit 10 ⁇ / b> B includes a first electrode 33, a moisture sensitive layer 34, and a second electrode 35.
  • the first electrode 33 is patterned on the first insulating layer 12.
  • the second electrode 35 is spaced apart from the first electrode 33 and patterned.
  • the first electrode 33 and the second electrode 35 are formed in the same thickness and pattern as the first electrode 13 and the second electrode 15 of the reference detection unit 10A.
  • the moisture sensitive layer 34 is provided so as to be interposed between the first electrode 33 and the second electrode 35. That is, the moisture sensitive layer 34 is formed to cover the first electrode 33.
  • a polyimide resin is used as the moisture sensitive layer 34.
  • the second electrode 35 is formed on the moisture sensitive layer 34.
  • the second electrode 35 is provided so as to extend outward of the humidity detection unit 10B, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
  • the second insulating layer 16 is provided to cover the moisture sensitive layer 34 between the second electrode 35 and the pattern of the second electrode 35.
  • a second space 24 is formed between the lid 21 and the second insulating layer 16 and the humidity detection unit 10B covered by the second insulating layer 16.
  • the humidity detection unit 10B a plurality of moisture sensitive holes 36 penetrating the second insulating layer 16 and the second electrode 35 in the film thickness direction are provided.
  • the humidity detection unit 10B includes the moisture sensing holes 36 extending from the second space 24 to the moisture sensing layer 34.
  • the air in the second space 24 reaches the moisture sensitive layer 34 through the moisture sensitive hole 36.
  • the second insulating layer 16 in the humidity detection unit 10B extends outward of the humidity detection unit 10B, and an opening 16a is provided at the extension destination. .
  • a pad electrode 18 is provided on the opening 16 a, and the pad electrode 18 is electrically connected to the second electrode 35 through the opening 16 a.
  • the pad electrode 18 is juxtaposed with the pad electrode 17 as shown in FIGS. 1 (a) and 1 (b).
  • a pad electrode 19 which is at a ground potential is provided in parallel with the pad electrodes 17 and 18 (see FIGS. 1A and 1B).
  • the pad electrodes 17, 18, 19 are connected to an integrated circuit not shown.
  • a communication hole 25 penetrating the adhesive layer 20 is provided so as to connect the first space 23 and the second space 24 to each other (see FIG. 1B and FIG. 4).
  • the communication hole 25 is formed so as to go straight between the first space 23 and the second space 24 in a plan view, and becomes a closed space by placing the lid 21 on the adhesive layer 20. Since the first space 23 and the second space 24 are communicated with each other by the communication hole 25, the outside air introduced into the first space 23 from the opening 22 reaches the second space 24 through the communication hole 25. Do.
  • the dielectric constant of the moisture sensitive layer 34 changes according to the amount of water contained in the moisture sensitive layer 34, and the first electrode The electrostatic capacitance (electrical characteristics) between 33 and the second electrode 35 changes.
  • the moisture-sensitive layer 14 of the reference detection unit 10A is covered with the second insulating layer 16 having low hygroscopicity, the change in the amount of moisture contained is unlikely to occur even when external air is introduced from the opening 22. There is almost no change in capacitance between the first electrode 13 and the second electrode 15.
  • the change in capacitance in the reference detection unit 10A and the humidity detection unit 10B is output to the integrated circuit (not shown) through the pad electrodes 17, 18, and 19, and the detection output from the reference detection unit 10A and the humidity detection By taking the difference of the detection output from the unit 10B, it is possible to detect the humidity change of the outside air.
  • the humidity detection unit 10B is avoided by using a simple configuration in which the reference detection unit 10A and the humidity detection unit 10B are covered by the lid 21 provided with the opening 22 in the area corresponding to the reference detection unit 10A. It is possible to effectively prevent adhesion and deposition of foreign matter on the top. Further, since such a simple configuration is adopted, it is possible to suppress a significant increase in the number of parts and the cost. Furthermore, since the outside air can be guided to the moisture sensitive layer 34 of the humidity detection unit 10B through the communication hole 25, the accuracy of the humidity detection can be maintained.
  • the fixing strength of the lid 21 can be made uniform in the surface direction of the base material 11.
  • providing an opening in the end region of the lid 21 instead of the opening 22 is not preferable because the fixing strength of the lid 21 becomes weak in the periphery thereof.
  • the shape is changed or members are added in order to reinforce such weak portions, the size of the apparatus is increased.
  • the introduction of the outside air is ensured in the configuration where the through holes are provided along the surface direction of the base 11 instead of the through holes in the vertical direction such as the opening 22. For this reason, it is necessary to provide a space around the lid 21, which leads to an increase in the size of the apparatus.
  • the communication hole 25 is provided in a direction perpendicular to the up-down direction, that is, along the surface direction of the base 11.
  • the foreign matter that has entered the first space 23 from the opening 22 is less likely to move to the reference detection unit 10A.
  • foreign matter can be made difficult to enter the communication hole 25 by setting the cross-sectional shape of the communication hole 25.
  • the moisture sensitive layers 14 and 34 are interposed between the first electrodes 13 and 33 disposed on the back side and the second electrodes 15 and 35 disposed on the front side.
  • the arrangement of the first electrode, the second electrode, and the moisture sensitive layer is not limited to this.
  • the first electrode and the second electrode may be juxtaposed on the first insulating layer 12, and the moisture sensitive layer may be disposed therebetween.
  • the first electrode and the second electrode are alternately arranged in a comb shape.
  • the humidity detection unit In addition to the configuration for detecting a change in capacitance between the first electrode and the corresponding second electrode, the humidity detection unit also has an electrical resistance between the first electrode and the second electrode. It may be configured to detect a change.
  • the humidity detection device is useful in that the detection accuracy can be maintained while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Dans ce dispositif de détection d'humidité, une unité de détection de référence et une unité de détection d'humidité sont disposées sur un substrat. L'unité de détection de référence et l'unité de détection d'humidité comprennent chacune une couche sensible à l'humidité interposée entre une première électrode et une seconde électrode. Les côtés avant de l'unité de détection de référence et de l'unité de détection d'humidité sont recouverts par un couvercle. Un premier espace est formé entre le couvercle et l'unité de détection de référence. Un second espace est formé entre le couvercle et l'unité de détection d'humidité. L'unité de détection d'humidité est pourvue de trous sensibles à l'humidité qui s'étendent du second espace jusqu'à la couche sensible à l'humidité. Une ouverture qui est reliée au premier espace est disposée dans le couvercle dans une zone recouvrant l'unité de détection de référence. Le premier espace et le second espace sont reliés par un trou de communication de sorte que l'air puisse passer entre les deux. Par conséquent, l'invention concerne un dispositif de détection d'humidité avec lequel la précision de détection peut être maintenue tout en simplifiant une configuration pour empêcher l'adhérence de matières étrangères telles que la poussière aux couches sensibles à l'humidité.
PCT/JP2018/043258 2017-11-27 2018-11-22 Dispositif de détection d'humidité WO2019103116A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017227052A JP2021021562A (ja) 2017-11-27 2017-11-27 湿度検知装置
JP2017-227052 2017-11-27

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WO2019103116A1 true WO2019103116A1 (fr) 2019-05-31

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235745A (ja) * 1985-04-11 1986-10-21 Sharp Corp 湿度センサ−
JPH0357659U (fr) * 1989-10-09 1991-06-04
JPH06138072A (ja) * 1992-10-23 1994-05-20 Ricoh Seiki Co Ltd マイクロセンサ
JP2004504598A (ja) * 2000-07-19 2004-02-12 エルジー　エレクトロニクス　インコーポレーテッド 絶対湿度センサ
JP2011080833A (ja) * 2009-10-06 2011-04-21 Alps Electric Co Ltd 湿度検出センサ
WO2014203553A1 (fr) * 2013-06-21 2014-12-24 日立オートモティブシステムズ株式会社 Dispositif de capteur de gaz et structure de fixation pour dispositif de capteur de gaz
JP2016100403A (ja) * 2014-11-19 2016-05-30 シャープ株式会社 温度・湿度・気圧一体型センサ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235745A (ja) * 1985-04-11 1986-10-21 Sharp Corp 湿度センサ−
JPH0357659U (fr) * 1989-10-09 1991-06-04
JPH06138072A (ja) * 1992-10-23 1994-05-20 Ricoh Seiki Co Ltd マイクロセンサ
JP2004504598A (ja) * 2000-07-19 2004-02-12 エルジー　エレクトロニクス　インコーポレーテッド 絶対湿度センサ
JP2011080833A (ja) * 2009-10-06 2011-04-21 Alps Electric Co Ltd 湿度検出センサ
WO2014203553A1 (fr) * 2013-06-21 2014-12-24 日立オートモティブシステムズ株式会社 Dispositif de capteur de gaz et structure de fixation pour dispositif de capteur de gaz
JP2016100403A (ja) * 2014-11-19 2016-05-30 シャープ株式会社 温度・湿度・気圧一体型センサ

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