WO2019103116A1 - Humidity detection device - Google Patents

Humidity detection device Download PDF

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Publication number
WO2019103116A1
WO2019103116A1 PCT/JP2018/043258 JP2018043258W WO2019103116A1 WO 2019103116 A1 WO2019103116 A1 WO 2019103116A1 JP 2018043258 W JP2018043258 W JP 2018043258W WO 2019103116 A1 WO2019103116 A1 WO 2019103116A1
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Prior art keywords
detection unit
humidity
space
humidity detection
electrode
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PCT/JP2018/043258
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French (fr)
Japanese (ja)
Inventor
尚信 大川
亨 宮武
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アルプスアルパイン株式会社
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Publication of WO2019103116A1 publication Critical patent/WO2019103116A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance

Definitions

  • the present invention relates to a humidity sensing device, and more particularly to a humidity sensing device in which a moisture sensitive layer is provided between two electrodes.
  • a humidity detection device As a humidity detection device, a configuration is known in which a humidity sensitive layer is provided between two electrodes, and the humidity is detected based on changes in capacitance and electrical resistance.
  • this humidity detection device since it is necessary to cause the moisture sensitive layer to be exposed to the outside air, when foreign matter such as dust contained in the outside air adheres to the moisture sensitive layer, it affects the accuracy of the detection result.
  • Patent Document 1 discloses a humidity sensor using a photocatalytic filter.
  • the photocatalyst filter is a porous filter coated with a photocatalyst, and is provided to cover the case opening of the humidity sensor.
  • Patent Document 2 discloses a humidity sensor in which a protective gel made of a water resistant material is applied to the upper surface of the sensor element.
  • the protective gel is provided in the humidity sensor so as to cover the entire circuit portion, the bonding wire, and a part of the portion of the lead terminal protruding inward of the case.
  • Patent Document 3 discloses a capacitive humidity sensor in which a moisture permeable film is provided on a detection unit.
  • This capacitive humidity sensor has a detection unit including a pair of detection electrodes and a humidity sensitive film formed on the pair of detection electrodes and whose capacitance value changes according to the humidity, and the humidity sensitive film of the detection unit A gel film as a moisture permeable film is provided on the top.
  • Patent No. 4765856 gazette Patent No. 4765848 gazette Patent No. 3855950 gazette
  • a humidity detection device using a moisture sensitive layer a photocatalyst filter, a protective gel, a gel film, etc. are formed as described in Patent Documents 1 to 3 as a configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer. Although it may be adopted, it is required to secure predetermined detection accuracy also in these cases. In addition, even with the configuration for preventing the adhesion of foreign matter, it is desirable to avoid an increase in the number of parts, an increase in cost, and an increase in the size of the apparatus.
  • a sufficient film thickness may not be ensured in terms of securing detection accuracy or avoiding enlargement of the device, and in such a case, adhesion or intrusion of foreign matter is sufficient. Difficult to prevent.
  • the photocatalyst filter is effective for the infiltration of tobacco particles and the like, it is a porous filter and therefore can not prevent the infiltration of gaseous foreign substances contained in the air.
  • an object of the present invention is to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
  • the humidity detection device of the present invention is a humidity detection device provided with a reference detection unit and a humidity detection unit on a base material, and the reference detection unit and the humidity detection unit are respectively the first A humidity sensitive layer is interposed between the electrode and the second electrode, and the reference detection unit and the humidity detection unit are covered on the front side by the cover, and the first space is between the cover and the reference detection unit.
  • the second space is formed between the lid portion and the humidity detection portion, and the humidity detection portion is provided with a humidity sensing hole extending from the second space to the humidity sensitive layer, and the lid portion is a reference detection portion.
  • the opening part which follows the first space is provided in the region which covers the first space, and the first space and the second space are connected so as to be able to ventilate each other by the communication hole.
  • this humidity detection device with a simple configuration, it is possible to prevent foreign matter such as dust from adhering to the humidity sensitive layer, and to maintain detection accuracy.
  • the lid is fixed to the base by the adhesive layer disposed on the base around the reference detecting part and the humidity detecting part, and the communication hole is in the first space. It is preferable to penetrate the adhesive layer so as to connect the second space with the second space. As a result, it is possible to simply provide a configuration that can realize both the prevention of adhesion of foreign matter and the maintenance of detection accuracy.
  • the lid is made of silicon
  • the adhesive layer is made of polyimide resin.
  • the present invention it is possible to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
  • (A) is a top view which shows schematic structure of the humidity detection apparatus based on embodiment of this invention
  • (b) is a top view which shows the state without a cover part in the humidity detection apparatus of (a). It is a sectional view in the A-A 'line of Drawing 1 (a), and is a figure showing the composition of a reference detecting part. It is a sectional view in the B-B 'line of Drawing 1 (a), and is a figure showing the composition of a humidity detection part. It is a sectional view in the C-C 'line of Drawing 1 (a), and is a figure showing a communicating hole.
  • FIG. 1 (a) is a top view which shows schematic structure of the humidity detection apparatus 10 which concerns on this embodiment
  • (b) is a top view which shows the state without the cover part 21 in the humidity detection apparatus 10 of (a).
  • FIG. 2 is a cross-sectional view taken along the line A-A 'of FIG. 1A and showing the configuration of the reference detection unit 10A.
  • FIG. 3 is a cross-sectional view taken along the line B-B 'of FIG. 1A and showing the configuration of the humidity detection unit 10B.
  • FIG. 4 is a cross-sectional view taken along the line C-C 'of FIG. In FIGS.
  • FIGS. 2 to 4 the end portions of the substrate 11 in the surface direction (left and right directions in FIGS. 2 to 4) are partially omitted.
  • the upper side of FIGS. 2 to 4 is referred to as the front side (upper direction) and the lower side is referred to as the back side (downward direction), but the vertical direction can be arbitrarily set according to the attitude of the apparatus.
  • the humidity detection apparatus 10 is an apparatus provided with 10 A of reference
  • the reference detection unit 10A and the humidity detection unit 10B are formed on the first insulating layer 12 formed on the sheet-like base material 11.
  • silicon is used as the base 11, and silicon oxide is used as the first insulating layer 12, for example.
  • a lid 21 is disposed so as to cover the front sides (upper sides in FIGS. 2 to 4) of the reference detection unit 10A and the humidity detection unit 10B.
  • the lid 21 is fixed to the base 11 side by an adhesive layer 20 (see FIG. 1B) disposed around the reference detection unit 10A and the humidity detection unit 10B.
  • an adhesive layer 20 see FIG. 1B
  • a polyimide resin is used as the adhesive layer 20
  • a plate made of silicon is used as the lid 21.
  • an opening 22 is provided in a region covering the reference detection unit 10 ⁇ / b> A.
  • the opening 22 has a substantially square shape in a plan view as viewed from above the humidity detection device 10.
  • the opening 22 may be formed in advance in a plate member constituting the lid 21 or may be formed by etching after being fixed on the adhesive layer 20.
  • the opening 22 is provided so as to penetrate the thickness direction (vertical direction in FIG. 2) of the lid 21 from the front side to the back side.
  • the first space 23 between the reference detection unit 10A and the lid 21 and the opening 22 are connected to each other. Therefore, the first space 23 is connected to the outside of the humidity detection device 10 through the opening 22, and the outside air is introduced into the first space 23.
  • the opening 22 has a substantially square shape according to the shape of the reference detection unit 10A in a plan view, but the planar shape is not limited to this.
  • the opening area in plan view can also be set arbitrarily according to the specification of the humidity detection device 10, and can be set larger or smaller than, for example, the reference detection unit 10A.
  • a part of the opening 22 is a reference detection unit It may extend out of 10 A or may be deviated.
  • the opening 22 may be divided into two or more.
  • the reference detection unit 10 ⁇ / b> A includes a first electrode 13, a moisture sensitive layer 14, and a second electrode 15.
  • the first electrode 13 is patterned on the first insulating layer 12.
  • the second electrode 15 is patterned to be separated from the first electrode 13.
  • the moisture sensitive layer 14 is provided so as to be interposed between the first electrode 13 and the second electrode 15. That is, the moisture sensitive layer 14 is formed to cover the first electrode 13.
  • a polyimide resin is used as the moisture sensitive layer 14.
  • the second electrode 15 is formed on the moisture sensitive layer 14.
  • the second electrode 15 is provided so as to extend outward of the reference detection unit 10A, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
  • a second insulating layer 16 is provided to cover the moisture sensitive layer 14 between the patterns of the second electrode 15 and the second electrode 15.
  • a first space 23 is formed between the second insulating layer 16 and the reference detection unit 10A covered with the second insulating layer 16 and the lid 21 including the opening 22.
  • As the second insulating layer 16 an inorganic material with low hygroscopicity such as silicon nitride is used.
  • the second insulating layer 16 extends outward of the reference detection unit 10A, and an opening 16a is provided at the extension destination.
  • a pad electrode 17 is provided on the opening 16 a, and the pad electrode 17 is electrically connected to the second electrode 15 through the opening 16 a.
  • the humidity detection unit 10 ⁇ / b> B includes a first electrode 33, a moisture sensitive layer 34, and a second electrode 35.
  • the first electrode 33 is patterned on the first insulating layer 12.
  • the second electrode 35 is spaced apart from the first electrode 33 and patterned.
  • the first electrode 33 and the second electrode 35 are formed in the same thickness and pattern as the first electrode 13 and the second electrode 15 of the reference detection unit 10A.
  • the moisture sensitive layer 34 is provided so as to be interposed between the first electrode 33 and the second electrode 35. That is, the moisture sensitive layer 34 is formed to cover the first electrode 33.
  • a polyimide resin is used as the moisture sensitive layer 34.
  • the second electrode 35 is formed on the moisture sensitive layer 34.
  • the second electrode 35 is provided so as to extend outward of the humidity detection unit 10B, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
  • the second insulating layer 16 is provided to cover the moisture sensitive layer 34 between the second electrode 35 and the pattern of the second electrode 35.
  • a second space 24 is formed between the lid 21 and the second insulating layer 16 and the humidity detection unit 10B covered by the second insulating layer 16.
  • the humidity detection unit 10B a plurality of moisture sensitive holes 36 penetrating the second insulating layer 16 and the second electrode 35 in the film thickness direction are provided.
  • the humidity detection unit 10B includes the moisture sensing holes 36 extending from the second space 24 to the moisture sensing layer 34.
  • the air in the second space 24 reaches the moisture sensitive layer 34 through the moisture sensitive hole 36.
  • the second insulating layer 16 in the humidity detection unit 10B extends outward of the humidity detection unit 10B, and an opening 16a is provided at the extension destination. .
  • a pad electrode 18 is provided on the opening 16 a, and the pad electrode 18 is electrically connected to the second electrode 35 through the opening 16 a.
  • the pad electrode 18 is juxtaposed with the pad electrode 17 as shown in FIGS. 1 (a) and 1 (b).
  • a pad electrode 19 which is at a ground potential is provided in parallel with the pad electrodes 17 and 18 (see FIGS. 1A and 1B).
  • the pad electrodes 17, 18, 19 are connected to an integrated circuit not shown.
  • a communication hole 25 penetrating the adhesive layer 20 is provided so as to connect the first space 23 and the second space 24 to each other (see FIG. 1B and FIG. 4).
  • the communication hole 25 is formed so as to go straight between the first space 23 and the second space 24 in a plan view, and becomes a closed space by placing the lid 21 on the adhesive layer 20. Since the first space 23 and the second space 24 are communicated with each other by the communication hole 25, the outside air introduced into the first space 23 from the opening 22 reaches the second space 24 through the communication hole 25. Do.
  • the dielectric constant of the moisture sensitive layer 34 changes according to the amount of water contained in the moisture sensitive layer 34, and the first electrode The electrostatic capacitance (electrical characteristics) between 33 and the second electrode 35 changes.
  • the moisture-sensitive layer 14 of the reference detection unit 10A is covered with the second insulating layer 16 having low hygroscopicity, the change in the amount of moisture contained is unlikely to occur even when external air is introduced from the opening 22. There is almost no change in capacitance between the first electrode 13 and the second electrode 15.
  • the change in capacitance in the reference detection unit 10A and the humidity detection unit 10B is output to the integrated circuit (not shown) through the pad electrodes 17, 18, and 19, and the detection output from the reference detection unit 10A and the humidity detection By taking the difference of the detection output from the unit 10B, it is possible to detect the humidity change of the outside air.
  • the humidity detection unit 10B is avoided by using a simple configuration in which the reference detection unit 10A and the humidity detection unit 10B are covered by the lid 21 provided with the opening 22 in the area corresponding to the reference detection unit 10A. It is possible to effectively prevent adhesion and deposition of foreign matter on the top. Further, since such a simple configuration is adopted, it is possible to suppress a significant increase in the number of parts and the cost. Furthermore, since the outside air can be guided to the moisture sensitive layer 34 of the humidity detection unit 10B through the communication hole 25, the accuracy of the humidity detection can be maintained.
  • the fixing strength of the lid 21 can be made uniform in the surface direction of the base material 11.
  • providing an opening in the end region of the lid 21 instead of the opening 22 is not preferable because the fixing strength of the lid 21 becomes weak in the periphery thereof.
  • the shape is changed or members are added in order to reinforce such weak portions, the size of the apparatus is increased.
  • the introduction of the outside air is ensured in the configuration where the through holes are provided along the surface direction of the base 11 instead of the through holes in the vertical direction such as the opening 22. For this reason, it is necessary to provide a space around the lid 21, which leads to an increase in the size of the apparatus.
  • the communication hole 25 is provided in a direction perpendicular to the up-down direction, that is, along the surface direction of the base 11.
  • the foreign matter that has entered the first space 23 from the opening 22 is less likely to move to the reference detection unit 10A.
  • foreign matter can be made difficult to enter the communication hole 25 by setting the cross-sectional shape of the communication hole 25.
  • the moisture sensitive layers 14 and 34 are interposed between the first electrodes 13 and 33 disposed on the back side and the second electrodes 15 and 35 disposed on the front side.
  • the arrangement of the first electrode, the second electrode, and the moisture sensitive layer is not limited to this.
  • the first electrode and the second electrode may be juxtaposed on the first insulating layer 12, and the moisture sensitive layer may be disposed therebetween.
  • the first electrode and the second electrode are alternately arranged in a comb shape.
  • the humidity detection unit In addition to the configuration for detecting a change in capacitance between the first electrode and the corresponding second electrode, the humidity detection unit also has an electrical resistance between the first electrode and the second electrode. It may be configured to detect a change.
  • the humidity detection device is useful in that the detection accuracy can be maintained while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.

Abstract

In this humidity detection device, a reference detection unit and a humidity detection unit are provided on a substrate. The reference detection unit and the humidity detection unit each have a moisture sensitive layer interposed between a first electrode and a second electrode. The front side of the reference detection unit and the humidity detection unit is covered by a lid. A first space is formed between the lid and the reference detection unit. A second space is formed between the lid and the humidity detection unit. The humidity detection unit is provided with moisture sensitive holes which extend from the second space to the moisture sensitive layer. An opening which is connected to the first space is provided in the lid in an area covering the reference detection unit. The first space and the second space are connected by a communication hole such that air can pass therebetween. Accordingly, a humidity detection device is provided with which detection accuracy can be maintained while simplifying a configuration for inhibiting the adhesion of foreign matter such as dust to the moisture sensitive layers.

Description

湿度検知装置Humidity detector
　本発明は湿度検知装置に関し、特に、２つの電極の間に感湿層が設けられた湿度検知装置に関する。 The present invention relates to a humidity sensing device, and more particularly to a humidity sensing device in which a moisture sensitive layer is provided between two electrodes.
　湿度検知装置として、２つの電極間に感湿層を設け、静電容量や電気抵抗の変化に基づき湿度を検知する構成が知られている。この湿度検知装置では、感湿層を外気に触れさせる必要があるため、外気に含まれる塵などの異物が感湿層に付着すると、検知結果の精度に影響を及ぼすことになる。 As a humidity detection device, a configuration is known in which a humidity sensitive layer is provided between two electrodes, and the humidity is detected based on changes in capacitance and electrical resistance. In this humidity detection device, since it is necessary to cause the moisture sensitive layer to be exposed to the outside air, when foreign matter such as dust contained in the outside air adheres to the moisture sensitive layer, it affects the accuracy of the detection result.
　特許文献１では、光触媒フィルタを用いた湿度センサが開示されている。上記光触媒フィルタは、光触媒がコーティングされている多孔質フィルタであり、湿度センサのケース開口部を覆うように設けられている。 Patent Document 1 discloses a humidity sensor using a photocatalytic filter. The photocatalyst filter is a porous filter coated with a photocatalyst, and is provided to cover the case opening of the humidity sensor.
　特許文献２では、センサ素子上面に、耐水性の材料からなる保護ゲルを塗布した湿度センサが開示されている。上記保護ゲルは、湿度センサにおいて、回路部の全体、ボンディングワイヤ、及び、リード端子のケース内方に突き出した部分の一部を覆うように設けられている。 Patent Document 2 discloses a humidity sensor in which a protective gel made of a water resistant material is applied to the upper surface of the sensor element. The protective gel is provided in the humidity sensor so as to cover the entire circuit portion, the bonding wire, and a part of the portion of the lead terminal protruding inward of the case.
　特許文献３では、検出部の上に透湿膜を設けた容量式湿度センサが開示されている。この容量式湿度センサは、一対の検出電極と、一対の検出電極上に形成され、湿度に応じて容量値が変化する感湿膜とを備える検出部を有し、この検出部の感湿膜上に透湿膜としてのゲル膜が設けられている。 Patent Document 3 discloses a capacitive humidity sensor in which a moisture permeable film is provided on a detection unit. This capacitive humidity sensor has a detection unit including a pair of detection electrodes and a humidity sensitive film formed on the pair of detection electrodes and whose capacitance value changes according to the humidity, and the humidity sensitive film of the detection unit A gel film as a moisture permeable film is provided on the top.
特許第４７６５８５６号公報Patent No. 4765856 gazette 特許第４７６５８４８号公報Patent No. 4765848 gazette 特許第３８５５９５０号公報Patent No. 3855950 gazette
　感湿層を用いた湿度検知装置において、感湿層に塵などの異物が付着することを防止する構成として、特許文献１～３に記載のように、光触媒フィルタ、保護ゲル、ゲル膜などを採用する場合があるが、これらの場合においても所定の検知精度を確保することが求められる。また、異物付着を防止するための構成を備えたとしても、部品点数の増加やコストアップ、装置の大型化は避けたいところである。 In a humidity detection device using a moisture sensitive layer, a photocatalyst filter, a protective gel, a gel film, etc. are formed as described in Patent Documents 1 to 3 as a configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer. Although it may be adopted, it is required to secure predetermined detection accuracy also in these cases. In addition, even with the configuration for preventing the adhesion of foreign matter, it is desirable to avoid an increase in the number of parts, an increase in cost, and an increase in the size of the apparatus.
　さらに、保護ゲルやゲル膜を設ける場合、検知精度の確保や装置の大型化を避ける点から十分な膜厚を確保することができないこともあり、このようなケースでは異物の付着や侵入を十分に防止することが難しい。また、上記光触媒フィルタでは、タバコの粒子などの侵入に効果はあるものの、多孔質フィルタであるため空気中に含まれる気体状の異物の侵入を防止することができない。 Furthermore, in the case of providing a protective gel or gel film, a sufficient film thickness may not be ensured in terms of securing detection accuracy or avoiding enlargement of the device, and in such a case, adhesion or intrusion of foreign matter is sufficient. Difficult to prevent. In addition, although the photocatalyst filter is effective for the infiltration of tobacco particles and the like, it is a porous filter and therefore can not prevent the infiltration of gaseous foreign substances contained in the air.
　そこで本発明は、感湿層に塵などの異物が付着することを防止する構成を簡素化しつつ、検知精度を維持することができる湿度検知装置を提供することを目的とする。 Therefore, an object of the present invention is to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
　上記課題を解決するために、本発明の湿度検知装置は、基材上に基準検知部と湿度検知部を設けた湿度検知装置であって、基準検知部と湿度検知部は、それぞれ、第１電極と第２電極の間に感湿層を介在させており、基準検知部と湿度検知部は、蓋部によって表側が覆われており、蓋部と基準検知部の間には第１空間が形成され、蓋部と湿度検知部の間には第２空間が形成されており、湿度検知部は、第２空間から感湿層に至る感湿孔を備え、蓋部には、基準検知部を覆う領域に、第１空間に連なる開口部が設けられており、第１空間と第２空間は連通孔によって互いに通気可能に連なっていることを特徴としている。
　この湿度検知装置によれば、簡素な構成によって、感湿層に塵などの異物が付着することを防止でき、かつ、検知精度を維持することができる。 In order to solve the above problems, the humidity detection device of the present invention is a humidity detection device provided with a reference detection unit and a humidity detection unit on a base material, and the reference detection unit and the humidity detection unit are respectively the first A humidity sensitive layer is interposed between the electrode and the second electrode, and the reference detection unit and the humidity detection unit are covered on the front side by the cover, and the first space is between the cover and the reference detection unit. The second space is formed between the lid portion and the humidity detection portion, and the humidity detection portion is provided with a humidity sensing hole extending from the second space to the humidity sensitive layer, and the lid portion is a reference detection portion. The opening part which follows the first space is provided in the region which covers the first space, and the first space and the second space are connected so as to be able to ventilate each other by the communication hole.
According to this humidity detection device, with a simple configuration, it is possible to prevent foreign matter such as dust from adhering to the humidity sensitive layer, and to maintain detection accuracy.
　本発明の湿度検知装置において、蓋部は、基材上において基準検知部及び湿度検知部の周りに配置された接着層によって、基材に対して固定されており、連通孔は、第１空間と第２空間を結ぶように接着層を貫通していることが好ましい。
　これによって、異物の付着防止と検知精度の維持の双方を実現可能な構成を簡便に提供することができる。 In the humidity detecting device according to the present invention, the lid is fixed to the base by the adhesive layer disposed on the base around the reference detecting part and the humidity detecting part, and the communication hole is in the first space. It is preferable to penetrate the adhesive layer so as to connect the second space with the second space.
As a result, it is possible to simply provide a configuration that can realize both the prevention of adhesion of foreign matter and the maintenance of detection accuracy.
　本発明の湿度検知装置において、蓋部はシリコンによって形成され、接着層はポリイミド系樹脂によって形成されることが好ましい。
　これによって、生産工程の複雑化やコストの大幅な増加を招くことなく、異物の付着防止と検知精度の維持の双方を実現可能な構成を簡便提供することができる。 In the humidity detecting device according to the present invention, preferably, the lid is made of silicon, and the adhesive layer is made of polyimide resin.
As a result, it is possible to simply provide a configuration that can realize both the prevention of the adhesion of foreign matter and the maintenance of the detection accuracy without causing complication of the production process and a significant increase in cost.
　本発明によると、感湿層に塵などの異物が付着することを防止する構成を簡素化しつつ、検知精度を維持可能な湿度検知装置を提供することができる。 According to the present invention, it is possible to provide a humidity detection device capable of maintaining detection accuracy while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
（ａ）は本発明の実施形態に係る湿度検知装置の概略構成を示す平面図、（ｂ）は（ａ）の湿度検知装置において蓋部のない状態を示す平面図である。(A) is a top view which shows schematic structure of the humidity detection apparatus based on embodiment of this invention, (b) is a top view which shows the state without a cover part in the humidity detection apparatus of (a). 図１（ａ）のＡ－Ａ’線における断面図であって基準検知部の構成を示す図である。It is a sectional view in the A-A 'line of Drawing 1 (a), and is a figure showing the composition of a reference detecting part. 図１（ａ）のＢ－Ｂ’線における断面図であって湿度検知部の構成を示す図である。It is a sectional view in the B-B 'line of Drawing 1 (a), and is a figure showing the composition of a humidity detection part. 図１（ａ）のＣ－Ｃ’線における断面図であって連通孔を示す図である。It is a sectional view in the C-C 'line of Drawing 1 (a), and is a figure showing a communicating hole.
　以下、本発明の実施形態に係る湿度検知装置について図面を参照しつつ詳しく説明する。図１（ａ）は、本実施形態に係る湿度検知装置１０の概略構成を示す平面図、（ｂ）は、（ａ）の湿度検知装置１０において蓋部２１のない状態を示す平面図である。図２は、図１（ａ）のＡ－Ａ’線における断面図であって基準検知部１０Ａの構成を示す図である。図３は、図１（ａ）のＢ－Ｂ’線における断面図であって湿度検知部１０Ｂの構成を示す図である。図４は、図１（ａ）のＣ－Ｃ’線における断面図であって連通孔２５を示す図である。図２～図４においては、基材１１の面方向（図２～４の左右方向）の端部の図示を一部省略している。以下の説明において、図２～図４の上側を表側（上方向）、下側を裏側（下方向）と称するが、上下方向は装置の姿勢等に応じて任意に設定できる。 Hereinafter, a humidity detection device according to an embodiment of the present invention will be described in detail with reference to the drawings. Fig.1 (a) is a top view which shows schematic structure of the humidity detection apparatus 10 which concerns on this embodiment, (b) is a top view which shows the state without the cover part 21 in the humidity detection apparatus 10 of (a). . FIG. 2 is a cross-sectional view taken along the line A-A 'of FIG. 1A and showing the configuration of the reference detection unit 10A. FIG. 3 is a cross-sectional view taken along the line B-B 'of FIG. 1A and showing the configuration of the humidity detection unit 10B. FIG. 4 is a cross-sectional view taken along the line C-C 'of FIG. In FIGS. 2 to 4, the end portions of the substrate 11 in the surface direction (left and right directions in FIGS. 2 to 4) are partially omitted. In the following description, the upper side of FIGS. 2 to 4 is referred to as the front side (upper direction) and the lower side is referred to as the back side (downward direction), but the vertical direction can be arbitrarily set according to the attitude of the apparatus.
（湿度検知装置の全体構成）
　図１（ａ）、（ｂ）に示すように、湿度検知装置１０は、基準検知部１０Ａと湿度検知部１０Ｂを備えた装置であり、外気の湿度を電気信号として検知する。図２又は図３に示すように、基準検知部１０Ａと湿度検知部１０Ｂは、シート状の基材１１上に形成された第１絶縁層１２の上に形成されている。基材１１としては、例えばシリコンが用いられ、第１絶縁層１２としては、例えば酸化シリコンが用いられる。 (Whole configuration of humidity detection device)
As shown to FIG. 1 (a), (b), the humidity detection apparatus 10 is an apparatus provided with 10 A of reference | standard detection parts and the humidity detection part 10B, and detects the humidity of open air as an electric signal. As shown in FIG. 2 or FIG. 3, the reference detection unit 10A and the humidity detection unit 10B are formed on the first insulating layer 12 formed on the sheet-like base material 11. For example, silicon is used as the base 11, and silicon oxide is used as the first insulating layer 12, for example.
　図１（ａ）に示すように、基準検知部１０Ａと湿度検知部１０Ｂの表側（図２～図４の上側）を覆うように蓋部２１が配置されている。この蓋部２１は、基準検知部１０Ａと湿度検知部１０Ｂの周りに配置された接着層２０（図１（ｂ）参照）によって、基材１１側に固定される。接着層２０としては、例えばポリイミド系樹脂を用い、蓋部２１としては、例えばシリコン製の板材が用いられる。 As shown in FIG. 1A, a lid 21 is disposed so as to cover the front sides (upper sides in FIGS. 2 to 4) of the reference detection unit 10A and the humidity detection unit 10B. The lid 21 is fixed to the base 11 side by an adhesive layer 20 (see FIG. 1B) disposed around the reference detection unit 10A and the humidity detection unit 10B. For example, a polyimide resin is used as the adhesive layer 20, and a plate made of silicon is used as the lid 21.
　図１（ａ）と図２に示すように、蓋部２１においては、基準検知部１０Ａを覆う領域に開口部２２が設けられている。開口部２２は、湿度検知装置１０の上から見た平面視において略正方形状とされている。この開口部２２は、蓋部２１を構成する板材に予め形成しておいてもよいし、接着層２０上に固定した後にエッチングによって形成してもよい。図２に示すように、開口部２２は、蓋部２１の厚み方向（図２の上下方向）を表側から裏側まで貫通するように設けられている。これにより、基準検知部１０Ａと蓋部２１の間の第１空間２３と、開口部２２とが互いに連なる。このため、上記第１空間２３が、開口部２２を介して、湿度検知装置１０の外部につながって、第１空間２３内に外気が導入される。 As shown in FIG. 1A and FIG. 2, in the lid 21, an opening 22 is provided in a region covering the reference detection unit 10 </ b> A. The opening 22 has a substantially square shape in a plan view as viewed from above the humidity detection device 10. The opening 22 may be formed in advance in a plate member constituting the lid 21 or may be formed by etching after being fixed on the adhesive layer 20. As shown in FIG. 2, the opening 22 is provided so as to penetrate the thickness direction (vertical direction in FIG. 2) of the lid 21 from the front side to the back side. Thereby, the first space 23 between the reference detection unit 10A and the lid 21 and the opening 22 are connected to each other. Therefore, the first space 23 is connected to the outside of the humidity detection device 10 through the opening 22, and the outside air is introduced into the first space 23.
　ここで、図１（ａ）に示すように、開口部２２は、平面視において、基準検知部１０Ａの形状に合わせて略正方形状としているが、平面形状はこれに限定されない。また、平面視における開口面積も、湿度検知装置１０の仕様等に応じて任意に設定でき、例えば、基準検知部１０Ａより大きく、又は、小さく設定できる。また、開口部２２は、平面視において、基準検知部１０Ａに重なるように設けることが好ましい。なお、平面視における開口部２２の位置や範囲としては、蓋部２１の端部に至らなければ、又は、湿度検知部１０Ｂ上に重ならなければ、開口部２２の一部が、基準検知部１０Ａよりも外側に広がったり、ずれたりしてもよい。また、開口部２２は、２つ以上に分割して設けても良い。 Here, as shown in FIG. 1A, the opening 22 has a substantially square shape according to the shape of the reference detection unit 10A in a plan view, but the planar shape is not limited to this. In addition, the opening area in plan view can also be set arbitrarily according to the specification of the humidity detection device 10, and can be set larger or smaller than, for example, the reference detection unit 10A. Further, it is preferable that the opening 22 be provided so as to overlap the reference detection unit 10A in a plan view. In addition, as a position or range of the opening 22 in plan view, if it does not reach the end of the lid 21 or does not overlap on the humidity detection unit 10B, a part of the opening 22 is a reference detection unit It may extend out of 10 A or may be deviated. The opening 22 may be divided into two or more.
（基準検知部１０Ａの構成）
　図２に示すように、基準検知部１０Ａは、第１電極１３と、感湿層１４と、第２電極１５とを備える。
　第１電極１３は第１絶縁層１２の上にパターニングされる。第２電極１５は、第１電極１３と離間して、パターニングされる。 (Configuration of reference detection unit 10A)
As shown in FIG. 2, the reference detection unit 10 </ b> A includes a first electrode 13, a moisture sensitive layer 14, and a second electrode 15.
The first electrode 13 is patterned on the first insulating layer 12. The second electrode 15 is patterned to be separated from the first electrode 13.
　感湿層１４は、第１電極１３と第２電極１５との間に介在するよう設けられる。すなわち、第１電極１３を覆うように感湿層１４が形成される。感湿層１４としては、ポリイミド系樹脂が用いられる。 The moisture sensitive layer 14 is provided so as to be interposed between the first electrode 13 and the second electrode 15. That is, the moisture sensitive layer 14 is formed to cover the first electrode 13. A polyimide resin is used as the moisture sensitive layer 14.
　感湿層１４の上には第２電極１５が形成される。第２電極１５は、基準検知部１０Ａの外方へ、より具体的には、平面視において接着層２０及び蓋部２１が設けられた領域よりも外側へ延出して設けられる。 The second electrode 15 is formed on the moisture sensitive layer 14. The second electrode 15 is provided so as to extend outward of the reference detection unit 10A, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
　第２電極１５、及び、第２電極１５のパターン間の感湿層１４を覆うように、第２絶縁層１６が設けられている。第２絶縁層１６及びこれに覆われた基準検知部１０Ａと、開口部２２を含む蓋部２１との間には第１空間２３が形成される。第２絶縁層１６としては、窒化シリコン等の吸湿性の低い無機材料が用いられる。第２絶縁層１６は、基準検知部１０Ａの外方へ延出しており、その延出先において開口１６ａが設けられている。この開口１６ａ上にはパッド電極１７が設けられており、開口１６ａを介してパッド電極１７が第２電極１５と導通する。 A second insulating layer 16 is provided to cover the moisture sensitive layer 14 between the patterns of the second electrode 15 and the second electrode 15. A first space 23 is formed between the second insulating layer 16 and the reference detection unit 10A covered with the second insulating layer 16 and the lid 21 including the opening 22. As the second insulating layer 16, an inorganic material with low hygroscopicity such as silicon nitride is used. The second insulating layer 16 extends outward of the reference detection unit 10A, and an opening 16a is provided at the extension destination. A pad electrode 17 is provided on the opening 16 a, and the pad electrode 17 is electrically connected to the second electrode 15 through the opening 16 a.
（湿度検知部１０Ｂの構成）
　図３に示すように、湿度検知部１０Ｂは、第１電極３３と、感湿層３４と、第２電極３５とを備える。
　第１電極３３は第１絶縁層１２の上にパターニングされる。第２電極３５は、第１電極３３と離間して、パターニングされる。第１電極３３と第２電極３５は、基準検知部１０Ａの第１電極１３と第２電極１５と同様の厚さ、パターンで形成される。 (Configuration of humidity detection unit 10B)
As shown in FIG. 3, the humidity detection unit 10 </ b> B includes a first electrode 33, a moisture sensitive layer 34, and a second electrode 35.
The first electrode 33 is patterned on the first insulating layer 12. The second electrode 35 is spaced apart from the first electrode 33 and patterned. The first electrode 33 and the second electrode 35 are formed in the same thickness and pattern as the first electrode 13 and the second electrode 15 of the reference detection unit 10A.
　感湿層３４は、第１電極３３と第２電極３５との間に介在するよう設けられる。すなわち、第１電極３３を覆うように感湿層３４が形成される。感湿層３４としては、ポリイミド系樹脂が用いられる。 The moisture sensitive layer 34 is provided so as to be interposed between the first electrode 33 and the second electrode 35. That is, the moisture sensitive layer 34 is formed to cover the first electrode 33. A polyimide resin is used as the moisture sensitive layer 34.
　感湿層３４の上には第２電極３５が形成される。第２電極３５は、湿度検知部１０Ｂの外方へ、より具体的には、平面視において接着層２０及び蓋部２１が設けられた領域よりも外側へ、延出して設けられる。 The second electrode 35 is formed on the moisture sensitive layer 34. The second electrode 35 is provided so as to extend outward of the humidity detection unit 10B, more specifically, outside the region where the adhesive layer 20 and the lid portion 21 are provided in a plan view.
　基準検知部１０Ａと同様に、第２電極３５、及び、第２電極３５のパターン間の感湿層３４を覆うように、第２絶縁層１６が設けられている。第２絶縁層１６及びこれに覆われた湿度検知部１０Ｂと、蓋部２１との間には第２空間２４が形成される。ここで、湿度検知部１０Ｂにおいては、第２絶縁層１６と第２電極３５を膜厚方向に貫通する複数の感湿孔３６が設けられている。別言すると、湿度検知部１０Ｂは、第２空間２４から感湿層３４に至る感湿孔３６を備える。これにより、感湿孔３６を通じて第２空間２４内の空気が感湿層３４まで到達する。基準検知部１０Ａにおける第２絶縁層１６と同様に、湿度検知部１０Ｂにおける第２絶縁層１６は、湿度検知部１０Ｂの外方へ延出しており、その延出先において開口１６ａが設けられている。この開口１６ａ上にはパッド電極１８が設けられており、開口１６ａを介してパッド電極１８が第２電極３５と導通する。パッド電極１８は、図１（ａ）、（ｂ）に示すように、パッド電極１７と並置されている。 As in the reference detection unit 10A, the second insulating layer 16 is provided to cover the moisture sensitive layer 34 between the second electrode 35 and the pattern of the second electrode 35. A second space 24 is formed between the lid 21 and the second insulating layer 16 and the humidity detection unit 10B covered by the second insulating layer 16. Here, in the humidity detection unit 10B, a plurality of moisture sensitive holes 36 penetrating the second insulating layer 16 and the second electrode 35 in the film thickness direction are provided. In other words, the humidity detection unit 10B includes the moisture sensing holes 36 extending from the second space 24 to the moisture sensing layer 34. Thus, the air in the second space 24 reaches the moisture sensitive layer 34 through the moisture sensitive hole 36. Similar to the second insulating layer 16 in the reference detection unit 10A, the second insulating layer 16 in the humidity detection unit 10B extends outward of the humidity detection unit 10B, and an opening 16a is provided at the extension destination. . A pad electrode 18 is provided on the opening 16 a, and the pad electrode 18 is electrically connected to the second electrode 35 through the opening 16 a. The pad electrode 18 is juxtaposed with the pad electrode 17 as shown in FIGS. 1 (a) and 1 (b).
　パッド電極１７、１８と並置されるように、接地電位となるパッド電極１９が設けられている（図１（ａ）、（ｂ）参照）。パッド電極１７、１８、１９は、図示しない集積回路に接続されている。 A pad electrode 19 which is at a ground potential is provided in parallel with the pad electrodes 17 and 18 (see FIGS. 1A and 1B). The pad electrodes 17, 18, 19 are connected to an integrated circuit not shown.
　第１空間２３と第２空間２４を互いに結ぶように、接着層２０を貫通する連通孔２５が設けられている（図１（ｂ）と図４参照）。連通孔２５は、平面視において、第１空間２３と第２空間２４の間を直進するように形成され、接着層２０上に蓋部２１を載せることによって閉じた空間となる。連通孔２５によって、第１空間２３と第２空間２４は互いに連通されるため、開口部２２から第１空間２３内に導入された外気は、連通孔２５を通って第２空間２４内に到達する。したがって、このような経路を通じて、外気が、湿度検知部１０Ｂの感湿層３４に至るため、感湿層３４に含まれる水分量に応じて感湿層３４の誘電率が変化し、第１電極３３と第２電極３５との間の静電容量（電気的特性）が変化する。 A communication hole 25 penetrating the adhesive layer 20 is provided so as to connect the first space 23 and the second space 24 to each other (see FIG. 1B and FIG. 4). The communication hole 25 is formed so as to go straight between the first space 23 and the second space 24 in a plan view, and becomes a closed space by placing the lid 21 on the adhesive layer 20. Since the first space 23 and the second space 24 are communicated with each other by the communication hole 25, the outside air introduced into the first space 23 from the opening 22 reaches the second space 24 through the communication hole 25. Do. Therefore, since the outside air reaches the moisture sensitive layer 34 of the humidity detection unit 10B through such a route, the dielectric constant of the moisture sensitive layer 34 changes according to the amount of water contained in the moisture sensitive layer 34, and the first electrode The electrostatic capacitance (electrical characteristics) between 33 and the second electrode 35 changes.
　一方、基準検知部１０Ａの感湿層１４は吸湿性の低い第２絶縁層１６で覆われているため、開口部２２から外気が導入されても、含まれる水分量に変化が生じにくく、第１電極１３と第２電極１５との間の静電容量の変化はほとんどない。 On the other hand, since the moisture-sensitive layer 14 of the reference detection unit 10A is covered with the second insulating layer 16 having low hygroscopicity, the change in the amount of moisture contained is unlikely to occur even when external air is introduced from the opening 22. There is almost no change in capacitance between the first electrode 13 and the second electrode 15.
　基準検知部１０Ａ及び湿度検知部１０Ｂにおける静電容量の変化は、パッド電極１７、１８、１９を介して、上記集積回路（不図示）に出力され、基準検知部１０Ａからの検知出力と湿度検知部１０Ｂからの検知出力の差を取ることによって、外気の湿度変化を検知することができる。 The change in capacitance in the reference detection unit 10A and the humidity detection unit 10B is output to the integrated circuit (not shown) through the pad electrodes 17, 18, and 19, and the detection output from the reference detection unit 10A and the humidity detection By taking the difference of the detection output from the unit 10B, it is possible to detect the humidity change of the outside air.
　以上のように構成されたことから、本実施形態の湿度検知装置１０によれば、次の効果を奏する。
　基準検知部１０Ａに対応する領域に開口部２２を設けた蓋部２１によって、基準検知部１０Ａと湿度検知部１０Ｂを覆う、という簡素な構成によって、装置の大型化を避けつつ、湿度検知部１０Ｂ上への異物の付着や堆積を効果的に防ぐことができる。また、このような簡素な構成を採用しているため、部品点数やコストの大幅な増大を抑えることができる。さらに、連通孔２５を通じて、湿度検知部１０Ｂの感湿層３４へ外気を導くことができるため、湿度検知の精度を維持することができる。 Since it was comprised as mentioned above, according to the humidity detection apparatus 10 of this embodiment, there exist the following effects.
The humidity detection unit 10B is avoided by using a simple configuration in which the reference detection unit 10A and the humidity detection unit 10B are covered by the lid 21 provided with the opening 22 in the area corresponding to the reference detection unit 10A. It is possible to effectively prevent adhesion and deposition of foreign matter on the top. Further, since such a simple configuration is adopted, it is possible to suppress a significant increase in the number of parts and the cost. Furthermore, since the outside air can be guided to the moisture sensitive layer 34 of the humidity detection unit 10B through the communication hole 25, the accuracy of the humidity detection can be maintained.
　基準検知部１０Ａと湿度検知部１０Ｂを囲むように接着層２０を配置しているため、基材１１の面方向において、蓋部２１の固定強度を均一にすることができる。これに対して、開口部２２に代えて、蓋部２１の端部領域に開口部を設けると、その周辺において蓋部２１の固定強度が弱くなるため好ましくない。さらに、このように強度が弱い部分を補強するために形状変更や部材の追加を行うと装置の大型化につながる。また、開口部２２のような上下方向の貫通孔ではなく、基材１１の面方向に沿った貫通孔を設けた構成では、製造工程が複雑化するという問題のほか、外気の導入を確保するために蓋部２１の周囲に空間を設ける必要が生じるため、装置の大型化につながるという問題もある。 Since the adhesive layer 20 is disposed so as to surround the reference detection unit 10A and the humidity detection unit 10B, the fixing strength of the lid 21 can be made uniform in the surface direction of the base material 11. On the other hand, providing an opening in the end region of the lid 21 instead of the opening 22 is not preferable because the fixing strength of the lid 21 becomes weak in the periphery thereof. Furthermore, if the shape is changed or members are added in order to reinforce such weak portions, the size of the apparatus is increased. In addition to the problem of complicating the manufacturing process, the introduction of the outside air is ensured in the configuration where the through holes are provided along the surface direction of the base 11 instead of the through holes in the vertical direction such as the opening 22. For this reason, it is necessary to provide a space around the lid 21, which leads to an increase in the size of the apparatus.
　また、開口部２２が蓋部２１を上下に貫通しているのに対して、連通孔２５は、上下方向に直交する方向、すなわち、基材１１の面方向に沿うように設けられているため、開口部２２から第１空間２３内に侵入した異物が基準検知部１０Ａ側へ移動しにくくなっている。さらに、連通孔２５の断面形状の設定により、異物が連通孔２５内に入りにくくすることもできる。 Further, while the opening 22 penetrates the lid 21 up and down, the communication hole 25 is provided in a direction perpendicular to the up-down direction, that is, along the surface direction of the base 11. The foreign matter that has entered the first space 23 from the opening 22 is less likely to move to the reference detection unit 10A. Furthermore, foreign matter can be made difficult to enter the communication hole 25 by setting the cross-sectional shape of the communication hole 25.
　上記実施形態の湿度検知装置１０においては、裏側に配置した第１電極１３、３３と、表側に配置した第２電極１５、３５との間に感湿層１４、３４をそれぞれ介在させていたが、第１電極、第２電極、及び、感湿層の配置はこれに限定されない。例えば、第１絶縁層１２上に、第１電極と第２電極を並置し、これらの間に感湿層を配置してもよい。この場合は例えば、第１電極と第２電極をそれぞれ櫛歯状にして互い違いに配置する。 In the humidity detection device 10 according to the above embodiment, the moisture sensitive layers 14 and 34 are interposed between the first electrodes 13 and 33 disposed on the back side and the second electrodes 15 and 35 disposed on the front side. The arrangement of the first electrode, the second electrode, and the moisture sensitive layer is not limited to this. For example, the first electrode and the second electrode may be juxtaposed on the first insulating layer 12, and the moisture sensitive layer may be disposed therebetween. In this case, for example, the first electrode and the second electrode are alternately arranged in a comb shape.
　また、湿度検知部としては、第１電極と、これに対応する第２電極との間の静電容量の変化を検知する構成のほか、第１電極と第２電極との間の電気抵抗の変化を検知する構成であってもよい。
　本発明について上記実施形態を参照しつつ説明したが、本発明は上記実施形態に限定されるものではなく、改良の目的又は本発明の思想の範囲内において改良又は変更が可能である。 In addition to the configuration for detecting a change in capacitance between the first electrode and the corresponding second electrode, the humidity detection unit also has an electrical resistance between the first electrode and the second electrode. It may be configured to detect a change.
Although the present invention has been described with reference to the above embodiment, the present invention is not limited to the above embodiment, and can be improved or changed within the scope of the improvement purpose or the spirit of the present invention.
　以上のように、本発明に係る湿度検知装置は、感湿層に塵などの異物が付着することを防止する構成を簡素化しつつ、検知精度を維持することができる点で有用である。 As described above, the humidity detection device according to the present invention is useful in that the detection accuracy can be maintained while simplifying the configuration for preventing foreign matter such as dust from adhering to the moisture sensitive layer.
　１０　　湿度検知装置
　１０Ａ　基準検知部
　１０Ｂ　湿度検知部
　１１　　基材
　１２　　第１絶縁層
　１３　　第１電極
　１４　　感湿層
　１５　　第２電極
　１６　　第２絶縁層
　１６ａ　開口
　１７、１８、１９　パッド電極
　２０　　接着層
　２１　　蓋部
　２２　　開口部
　２３　　第１空間
　２４　　第２空間
　２５　　連通孔
　３３　　第１電極
　３４　　感湿層
　３５　　第２電極
　３６　　感湿孔 DESCRIPTION OF SYMBOLS 10 Humidity detection apparatus 10A Reference | standard detection part 10B Humidity detection part 11 Base material 12 1st insulating layer 13 1st electrode 14 Moisture sensitive layer 15 2nd electrode 16 2nd insulating layer 16a Opening 17, 18 and 19 Pad electrode 20 Adhesive layer 21 Cover 22 opening 23 first space 24 second space 25 communication hole 33 first electrode 34 moisture sensing layer 35 second electrode 36 moisture sensing hole

Claims (3)

  1. 　基材上に基準検知部と湿度検知部を設けた湿度検知装置であって、
    　前記基準検知部と前記湿度検知部は、それぞれ、第１電極と第２電極の間に感湿層を介在させており、
    　前記基準検知部と前記湿度検知部は、蓋部によって表側が覆われており、
    　前記蓋部と前記基準検知部の間には第１空間が形成され、前記蓋部と前記湿度検知部の間には第２空間が形成されており、
    　前記湿度検知部は、前記第２空間から前記感湿層に至る感湿孔を備え、
    　前記蓋部には、前記基準検知部を覆う領域に、前記第１空間に連なる開口部が設けられており、
    　前記第１空間と第２空間は連通孔によって互いに通気可能に連なっていることを特徴とする湿度検知装置。     A humidity detection apparatus in which a reference detection unit and a humidity detection unit are provided on a base material,
    The reference detection unit and the humidity detection unit respectively interpose a moisture sensitive layer between the first electrode and the second electrode,
    The reference detection unit and the humidity detection unit are covered on the front side by a lid,
    A first space is formed between the lid and the reference detection unit, and a second space is formed between the lid and the humidity detection unit,
    The humidity detection unit includes a humidity sensing hole extending from the second space to the humidity sensing layer.
    The lid portion is provided with an opening portion connected to the first space in a region covering the reference detection portion,
    The humidity detection device according to claim 1, wherein the first space and the second space are connected to each other in an air-permeable manner by a communication hole.
  2. 　前記蓋部は、前記基材上において前記基準検知部及び前記湿度検知部の周りに配置された接着層によって、前記基材に対して固定されており、
    　前記連通孔は、前記第１空間と前記第２空間を結ぶように前記接着層を貫通している請求項１に記載の湿度検知装置。     The lid is fixed to the base by an adhesive layer disposed on the base around the reference detection unit and the humidity detection unit.
    The humidity detection device according to claim 1, wherein the communication hole penetrates the adhesive layer so as to connect the first space and the second space.
  3. 　前記蓋部はシリコンによって形成され、前記接着層はポリイミド系樹脂によって形成される請求項２に記載の湿度検知装置。 The humidity detection device according to claim 2, wherein the lid is made of silicon, and the adhesive layer is made of polyimide resin.
PCT/JP2018/043258 2017-11-27 2018-11-22 Humidity detection device WO2019103116A1 (en)

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Citations (7)

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Publication number Priority date Publication date Assignee Title
JPS61235745A (en) * 1985-04-11 1986-10-21 Sharp Corp Humidity sensor
JPH0357659U (en) * 1989-10-09 1991-06-04
JPH06138072A (en) * 1992-10-23 1994-05-20 Ricoh Seiki Co Ltd Micro-sensor
JP2004504598A (en) * 2000-07-19 2004-02-12 エルジー　エレクトロニクス　インコーポレーテッド Absolute humidity sensor
JP2011080833A (en) * 2009-10-06 2011-04-21 Alps Electric Co Ltd Humidity detection sensor
WO2014203553A1 (en) * 2013-06-21 2014-12-24 日立オートモティブシステムズ株式会社 Gas sensor device and attachment structure for gas sensor device
JP2016100403A (en) * 2014-11-19 2016-05-30 シャープ株式会社 Temperature, humidity, atmospheric pressure integrated sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235745A (en) * 1985-04-11 1986-10-21 Sharp Corp Humidity sensor
JPH0357659U (en) * 1989-10-09 1991-06-04
JPH06138072A (en) * 1992-10-23 1994-05-20 Ricoh Seiki Co Ltd Micro-sensor
JP2004504598A (en) * 2000-07-19 2004-02-12 エルジー　エレクトロニクス　インコーポレーテッド Absolute humidity sensor
JP2011080833A (en) * 2009-10-06 2011-04-21 Alps Electric Co Ltd Humidity detection sensor
WO2014203553A1 (en) * 2013-06-21 2014-12-24 日立オートモティブシステムズ株式会社 Gas sensor device and attachment structure for gas sensor device
JP2016100403A (en) * 2014-11-19 2016-05-30 シャープ株式会社 Temperature, humidity, atmospheric pressure integrated sensor

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