WO2019092353A1 - Procédé de réalisation d'une liaison électrique étanche dans un boitier céramique et tube intensificateur d'image comportant un tel boitier - Google Patents
Procédé de réalisation d'une liaison électrique étanche dans un boitier céramique et tube intensificateur d'image comportant un tel boitier Download PDFInfo
- Publication number
- WO2019092353A1 WO2019092353A1 PCT/FR2018/052732 FR2018052732W WO2019092353A1 WO 2019092353 A1 WO2019092353 A1 WO 2019092353A1 FR 2018052732 W FR2018052732 W FR 2018052732W WO 2019092353 A1 WO2019092353 A1 WO 2019092353A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ceramic housing
- ceramic
- eutectic
- tin
- intensifier tube
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
- H01J31/506—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect
- H01J31/507—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output tubes using secondary emission effect using a large number of channels, e.g. microchannel plates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4046—Through-connections; Vertical interconnect access [VIA] connections using auxiliary conductive elements, e.g. metallic spheres, eyelets, pieces of wire
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2231/00—Cathode ray tubes or electron beam tubes
- H01J2231/50—Imaging and conversion tubes
- H01J2231/501—Imaging and conversion tubes including multiplication stage
- H01J2231/5013—Imaging and conversion tubes including multiplication stage with secondary emission electrodes
- H01J2231/5016—Michrochannel plates [MCP]
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09572—Solder filled plated through-hole in the final product
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4076—Through-connections; Vertical interconnect access [VIA] connections by thin-film techniques
Definitions
- the present invention relates to the field of manufacturing image intensifier tubes. It finds particular application in night vision systems. STATE OF THE PRIOR ART
- a night vision system uses an image intensifier device to make an obscure environment perceptible to an observer. More specifically, the image intensifier device collects the radiation emitted by the environment, including the small amount of visible light as well as the infrared radiation, and amplifies it so as to output an image of the environment that is perceptible to the environment. human eye. At the output of the image intensifier device, the light signal can be recorded by a recording device, displayed on an external monitor or directly visualized by an observer. In the latter case, image intensifier devices are used in night vision goggles or binoculars worn by a person at the head so as to directly transmit the output light signal to the person's eyes. It is then usually desired to have a night vision system with reduced space and low weight.
- This image intensifier tube, 100 has been shown in FIG. 1. It essentially comprises a housing 110, ceramic, forming the body of the tube, of shape substantially annular. The body of the tube, of axis AA, is closed at one of its ends by an inlet window 120 and at the opposite end by an exit window 130.
- the entrance window generally made of glass, comprises a inner face on which is deposited the photoemissive layer of a photocathode 125.
- the exit window usually also glass (for example a bundle of optical fibers), has an inner face on which is deposited a phosphor screen 135.
- a microchannel slab, 140, or GMC is disposed between the input window and the exit window, and rests on an inner edge of the ceramic housing, 110. It has an input face parallel to the photocathode and a face of parallel output to the phosphor screen.
- this intensifier tube lies in the realization of the ceramic housing.
- This consists of a multilayer ceramic substrate for positioning the GMC at a small distance from the photocathode.
- Metal tracks (not shown) provided within the multilayer ceramic substrate enable the GMC to be connected to external contact pins 150 and thus to polarize it positively with respect to the photocathode.
- the inlet and outlet windows are sealed on the ceramic housing so as to seal the assembly and maintain the vacuum inside the tube.
- the sealing on the entrance window is done by means of an InSn joint, 141, and that on the exit window by means of an Indium joint, 142.
- the maintenance of the GMC on the annular tube body is ensured by sealing with Indium microbeads.
- a spacer (spacer), 141, disposed between the upper face of the ceramic housing and the entrance window ensures a predetermined distance between the inner face of the photocathode and the input face of the GMC.
- This image intensifier tube although substantially more compact than traditional tubes, however, has a number of limitations.
- the mechanical strength of the tube is not optimal because of the presence of the ceramic spacer between the inlet window and the annular housing. It can move during an impact and lead to geometrical positioning defects of the GMC with respect to the photocathode (parallelism defects, non-compliance with the distance command between GMC and photocathode in particular), which can be detrimental to the uniformity of the impulse response, ie the uniformity of the Modulation Transfer Function (MTF), and can degrade the resolution of the intensified image.
- MTF Modulation Transfer Function
- the metal tracks of the multilayer ceramic substrate which connect the electrodes of the GMC to the outer contact pins can lead to sealing defects of the ceramic housing and a shorter life of the tube.
- the object of the present invention is therefore to overcome the aforementioned drawbacks and in particular to provide a method of making sealed electrical connections in a ceramic housing, in particular for an image intensifier tube.
- a second object of the present invention is to provide a sealed ceramic housing structure ensuring the mechanical strength of the tube and maintaining the geometric positioning of the GMC with respect to the input window.
- the present invention is defined by a method of producing a sealed electrical connection through the wall of a ceramic housing, in particular a ceramic housing of an image intensifier tube, the ceramic housing being provided with a hole opening on an inner surface of the housing through a first port and on an outer surface of the housing through a second port, the method comprising the steps of: metallization of the hole is carried out to obtain a via, successively depositing a metal layer of hook, a diffusion barrier and a layer of wetting agent;
- the hook layer is composed of a metal chosen from tungsten, molybdenum, titanium and chromium.
- the diffusion barrier is preferably made of a metal selected from nickel, chromium, a nickel-chromium alloy and platinum.
- the wetting agent layer is advantageously made of gold or silver.
- the AuSn eutectic is composed of 80% gold and 20% tin
- the AuGe eutectic is composed of 88% gold and 12% germanium
- the eutectic AgSn is composed of 96.5 % tin and 3.5% silver
- the eutectic InSn is composed of 52% of indium and 48% of tin the percentages being mass.
- the invention further relates to an image intensifier tube comprising a ceramic housing forming the body of the tube, an entrance window on the inner side of which is deposited a photocathode and closing the tube at a first end, an exit window on the inside of which is deposited a phosphor screen, a microchannel slab called GMC, disposed on a shoulder of the ceramic housing, the ceramic housing being provided with electrical connections passing through its wall and connecting electrodes of the GMC with contact pins external, the electrical connections being made by means of the method above.
- the ceramic housing comprises an annular vertical abutment on its upper part, said abutment being an integral part of the ceramic housing, the inner face of the inlet window resting on this abutment when it is sealed on the housing, said abutment fixing a predetermined distance between the photocathode and the upper face of the GMC.
- the inlet window and the exit window may be sealed to the ceramic housing by means of indium sealing joints or a eutectic material selected from InSn with 52% indium and 48% tin, AuSn with 80% aluminum. gold and 20% tin, AuGe with 88% gold and 12% germanium and AgSn with 96.5% tin and 3.5% silver, the percentages being mass.
- the ceramic housing is made by means of a ceramic particle injection molding followed by sintering.
- Fig. 1 is a vertical sectional view of the structure of an image intensifier tube known from the state of the art;
- Fig. 2 already described, is a vertical sectional view of the structure of an image intensifier tube according to one embodiment of the invention.
- Fig. 3 is an exploded view of the structure of the image intensifier tube of FIG. 2;
- Fig. 4 shows a ceramic housing used in the image intensifier tube of FIG. 2;
- Fig. 5 schematically shows a method of making sealed electrical connections in a ceramic housing according to one embodiment of the invention.
- FIG. 2 It is shown in FIG. 2 a sectional view of an image intensifier tube according to one embodiment of the invention.
- the image intensifier tube, 200 comprises a ceramic housing 210, forming the body of the tube, a window input 220 on the inner side of which is deposited a photocathode and an exit window, 230 on the inner side of which is deposited a phosphor screen.
- the entrance and exit windows are usually made in the form of glass blocks.
- the outer face of the exit window can be connected to a bundle of optical fibers to deport the intensified image.
- the tube 200 has a substantially cylindrical shape along an optical axis OZ.
- the tube 200 may have a shape of square section, rectangular, hexagonal, or other.
- a mark (R, Z) is represented where R is the radial direction of the tube and Z is the axial direction of the tube, parallel to the optical axis OZ, oriented in the opposite direction to the propagation of photons and electrons to the Inside the tube 200.
- the upper part of the tube consists of the entrance window and the lower part of the exit window tube.
- a microchannel slab or GMC, 240 rests on a shoulder, 211, of the ceramic housing, opposite the photocathode, the entry window resting on a vertical abutment, 219, forming an integral part of the ceramic housing and overhanging this shoulder.
- the distance between the light emitting layer of the photocathode and the input surface of the GMC is entirely determined by the geometry of the ceramic housing, more precisely by the height of the abutment with respect to the shoulder as well as by the thickness of the GMC.
- the integration of a vertical stop in the ceramic housing makes it possible to form a monolithic assembly and to reduce the number of elements of the tube, it improves both its rigidity and the respect of the geometrical constraints.
- Vertical electrical connections 215 are provided in the shoulder of the ceramic housing so as to allow the connection of the electrodes of the GMC with external contact pins (not shown).
- the inlet window 220 is sealingly sealed to an annular surface 217 of the upper part of the ceramic housing, for example by means of an indium seal, in a manner known per se.
- the exit window is similarly sealed to the ceramic housing.
- a eutectic material having a high melting point selected from I nSn with 52% indium and 48% tin, AuSn with 80% gold and 20% of tin, AuGe with 88% gold and 12% germanium, and AgSn with 96.5% tin and 3.5% silver, the percentages being mass.
- the ceramic case can be made using an injection molding technique or ICM (Ceramic Injection Molding). This technique involves injecting into a mold a raw material composed of organic materials heavily loaded with fine ceramic particles and carrying the mold at a high temperature and pressure. After molding, the organic binders are removed by dissolution in a solvent and then heat treatment. The product thus obtained can then be sintered or cofired.
- ICM injection molding technique
- This technique involves injecting into a mold a raw material composed of organic materials heavily loaded with fine ceramic particles and carrying the mold at a high temperature and pressure. After molding, the organic binders are removed by dissolution in a solvent and then heat treatment. The product thus obtained can then be sintered or cofired.
- Fig. 3 is an exploded view of the image intensifier tube of FIG.
- It contains the ceramic housing 210 on which the GMC 240 and the input window 220 rest, the other end of the housing being closed by the exit window 230.
- the ceramic housing 210 has an annular shape with a central recess 212 defining the active zone of the intensifier tube.
- the profile of the upper part of the housing comprises, going from the center to the periphery of the housing, the annular shoulder on which the GMC is resting, the annular abutment 219 on which the entrance window and the annular surface device 210 on which is sealed the entrance window.
- Fig. 4 shows the detail of the ceramic housing, 210.
- the shoulder 211 supported by an annular base 216, the shoulder and the annular base being connected by ribs 213 extending radially from the latter.
- the inside of the annular base defines the central recess 212.
- the shoulder 211 is crossed by vias 215 opening at its lower surface 214. These vias are plugged at both ends by a metal or a metal eutectic as explained below. .
- the clogged vias provide the electrical connections between the GMC electrodes and the external contact pins, while ensuring the tightness of the tube.
- the electrodes of the GMC are at least two in number, one electrode being connected to the upper face and one electrode being connected to the lower face, which requires the presence of at least two vias in the shoulder.
- the vias can be in greater number, especially in case of segmentation of the electrodes.
- the method of making the electrical connections applies to the raw ceramic box, simply provided with holes. These holes cross the shoulder and open on its upper face and its lower face.
- the process comprises three steps 500, 540 and 550.
- the first step is a metallization step carried out by evaporation (PVD), by chemical vapor deposition (CVD), by cathodic sputtering (sputtering) or by electrolytic deposition.
- PVD evaporation
- CVD chemical vapor deposition
- sputtering cathodic sputtering
- electrolytic deposition electrolytic deposition
- This first step includes a first substep 510 of depositing a metal layer of hooked on the inner surface of the hole.
- the function of the hook layer is to adhere to the ceramic surface (formation of a metal-ceramic bond) so as to ensure in turn the adhesion of the upper layers.
- the metal of the hook layer will advantageously be selected from tungsten (W), molybdenum (Mo), titanium (Ti) and chromium (Cr).
- a second metal layer, called diffusion barrier is then directly deposited, 520, on the hooked layer. This layer has the function of preventing the migration of metal from the upper layers to the ceramic so that the interface between the hook layer and the ceramic is not deteriorated.
- the diffusion barrier metal will advantageously be chosen from nickel (Ni), chromium (Cr), a nickel-chromium alloy (NiCr), or else platinum (Pt). This layer also serves as a base metal layer.
- a thin protective layer against Au or Ag oxidation is deposited in 530, which acts as a wetting agent in the subsequent melting step.
- a filler metal is placed in 540 on the wetting agent layer, for example in the form of a ball, a pellet, a portion of ribbon or more generally of any preform. This preform is placed so as to obstruct the metallized hole or via.
- the filler metal may be indium or a eutectic selected from AuSn with 80% gold and 20% tin, AuGe with 88% gold and 12% germanium, AgSn with 96.5% of tin and 3.5% silver, InSn with 52% indium and 48% tin, the percentages being mass.
- the filler metal preform is then brought to a melting temperature.
- the molten filler metal covers the base metal layer with the wetting agent deposited on it and migrates to the diffusion barrier.
- the molten metal obstructs the via and makes it waterproof by solidifying.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
- Secondary Cells (AREA)
- Multi-Conductor Connections (AREA)
Abstract
Description
Claims
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG11202004104PA SG11202004104PA (en) | 2017-11-08 | 2018-11-06 | Method for producing a sealed electrical connection in a ceramic case and image-intensifier tube comprising such a case |
KR1020207016291A KR20200085311A (ko) | 2017-11-08 | 2018-11-06 | 세라믹 케이스에 구비되는 밀봉 전기접속부의 제조방법 및 밀봉 전기접속부가 구비되는 세라믹 케이스를 포함하는 이미지 증배관 |
EP18804374.9A EP3692561A1 (fr) | 2017-11-08 | 2018-11-06 | Procédé de réalisation d'une liaison électrique étanche dans un boitier céramique et tube intensificateur d'image comportant un tel boitier |
JP2020524499A JP7245243B2 (ja) | 2017-11-08 | 2018-11-06 | セラミックケース内の密閉された電気接続部の製造方法及びそのケースを含む画像増倍管 |
US16/761,121 US11576258B2 (en) | 2017-11-08 | 2018-11-06 | Method for producing a sealed electrical connection in a ceramic case and image-intensifier tube comprising such a case |
AU2018363254A AU2018363254B2 (en) | 2017-11-08 | 2018-11-06 | Method for producing a sealed electrical connection in a ceramic case and image-intensifier tube comprising such a case |
CA3081403A CA3081403A1 (fr) | 2017-11-08 | 2018-11-06 | Procede de realisation d'une liaison electrique etanche dans un boitier ceramique et tube intensificateur d'image comportant un tel boitier |
RU2020118345A RU2020118345A (ru) | 2017-11-08 | 2018-11-06 | Способ для производства герметичного электрического соединения в керамическом корпусе и трубка усилителя изображения, содержащая такой корпус |
CN201880072338.4A CN111316395B (zh) | 2017-11-08 | 2018-11-06 | 制作陶瓷封装件中的密封电气连接的方法以及包含此封装件的图像增强管 |
BR112020008578-2A BR112020008578A2 (pt) | 2017-11-08 | 2018-11-06 | método de fabricação de uma conexão elétrica estanque o vazamento através da parede de uma embalagem de cerâmica e tubo intensificador de imagem |
IL274466A IL274466A (en) | 2017-11-08 | 2020-05-05 | A method for producing a sealed electrical connection in a ceramic case and an image intensifier tube that includes such a case |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1760475A FR3073320B1 (fr) | 2017-11-08 | 2017-11-08 | Procede de realisation d'une liaison electrique etanche dans un boitier ceramique et tube intensificateur d'image comportant un tel boitier |
FR1760475 | 2017-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2019092353A1 true WO2019092353A1 (fr) | 2019-05-16 |
Family
ID=61750226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2018/052732 WO2019092353A1 (fr) | 2017-11-08 | 2018-11-06 | Procédé de réalisation d'une liaison électrique étanche dans un boitier céramique et tube intensificateur d'image comportant un tel boitier |
Country Status (14)
Country | Link |
---|---|
US (1) | US11576258B2 (fr) |
EP (1) | EP3692561A1 (fr) |
JP (1) | JP7245243B2 (fr) |
KR (1) | KR20200085311A (fr) |
CN (1) | CN111316395B (fr) |
AU (1) | AU2018363254B2 (fr) |
BR (1) | BR112020008578A2 (fr) |
CA (1) | CA3081403A1 (fr) |
FR (1) | FR3073320B1 (fr) |
IL (1) | IL274466A (fr) |
RU (1) | RU2020118345A (fr) |
SG (1) | SG11202004104PA (fr) |
TW (1) | TWI798286B (fr) |
WO (1) | WO2019092353A1 (fr) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4727633A (en) * | 1985-08-08 | 1988-03-01 | Tektronix, Inc. | Method of securing metallic members together |
FR2677808A1 (fr) * | 1991-06-14 | 1992-12-18 | Thomson Composants Militaires | Dispositif de fixation d'un senseur ccd sur un tube intensificateur d'image. |
WO2009074682A2 (fr) | 2007-12-13 | 2009-06-18 | Photonis France | Tube intensificateur d'image compact et système de vision nocturne doté d'un tel tube |
US20170217767A1 (en) * | 2016-01-29 | 2017-08-03 | Innovative Micro Technology | Through substrate vias using solder bumps |
US9773751B1 (en) * | 2016-06-29 | 2017-09-26 | International Business Machines Corporation | Via and trench filling using injection molded soldering |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6333175A (ja) * | 1985-08-08 | 1988-02-12 | Sony Tektronix Corp | 金属部材の接合方法 |
US6483231B1 (en) * | 1999-05-07 | 2002-11-19 | Litton Systems, Inc. | Night vision device and method |
US7482571B2 (en) | 2005-08-01 | 2009-01-27 | Itt Manufacturing Enterprises, Inc. | Low cost planar image intensifier tube structure |
JP5014642B2 (ja) | 2006-02-16 | 2012-08-29 | 株式会社トクヤマ | リード内蔵メタライズドセラミックス基板およびパッケージ |
CN101828275A (zh) | 2007-10-19 | 2010-09-08 | 日本钨合金株式会社 | Led封装基板以及使用该led封装基板的led封装 |
TWI407534B (zh) * | 2008-06-03 | 2013-09-01 | Unimicron Technology Corp | 具雙面線路之封裝基板及其製法 |
JP5409432B2 (ja) | 2010-02-23 | 2014-02-05 | 京セラ株式会社 | 電子部品搭載用パッケージおよびそれを用いた電子装置 |
TWI397190B (zh) * | 2010-09-30 | 2013-05-21 | Ind Tech Res Inst | 金屬貫穿式太陽電池的製造方法 |
JP2012084817A (ja) | 2010-10-15 | 2012-04-26 | Panasonic Corp | 半導体装置 |
US8383505B2 (en) * | 2011-04-05 | 2013-02-26 | International Business Machines Corporation | Solder ball contact susceptible to lower stress |
US9105628B1 (en) * | 2012-03-29 | 2015-08-11 | Valery Dubin | Through substrate via (TSuV) structures and method of making the same |
US20140264848A1 (en) * | 2013-03-14 | 2014-09-18 | SK Hynix Inc. | Semiconductor package and method for fabricating the same |
US10163644B2 (en) * | 2014-02-07 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company | Interconnect structure including a conductive feature and a barrier layer on sidewalls and a bottom surface of the conductive feature and method of forming the same |
-
2017
- 2017-11-08 FR FR1760475A patent/FR3073320B1/fr active Active
-
2018
- 2018-11-06 CA CA3081403A patent/CA3081403A1/fr active Pending
- 2018-11-06 BR BR112020008578-2A patent/BR112020008578A2/pt unknown
- 2018-11-06 RU RU2020118345A patent/RU2020118345A/ru unknown
- 2018-11-06 JP JP2020524499A patent/JP7245243B2/ja active Active
- 2018-11-06 AU AU2018363254A patent/AU2018363254B2/en active Active
- 2018-11-06 WO PCT/FR2018/052732 patent/WO2019092353A1/fr unknown
- 2018-11-06 KR KR1020207016291A patent/KR20200085311A/ko not_active Application Discontinuation
- 2018-11-06 US US16/761,121 patent/US11576258B2/en active Active
- 2018-11-06 SG SG11202004104PA patent/SG11202004104PA/en unknown
- 2018-11-06 EP EP18804374.9A patent/EP3692561A1/fr active Pending
- 2018-11-06 CN CN201880072338.4A patent/CN111316395B/zh active Active
- 2018-11-08 TW TW107139708A patent/TWI798286B/zh active
-
2020
- 2020-05-05 IL IL274466A patent/IL274466A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4727633A (en) * | 1985-08-08 | 1988-03-01 | Tektronix, Inc. | Method of securing metallic members together |
FR2677808A1 (fr) * | 1991-06-14 | 1992-12-18 | Thomson Composants Militaires | Dispositif de fixation d'un senseur ccd sur un tube intensificateur d'image. |
WO2009074682A2 (fr) | 2007-12-13 | 2009-06-18 | Photonis France | Tube intensificateur d'image compact et système de vision nocturne doté d'un tel tube |
US20170217767A1 (en) * | 2016-01-29 | 2017-08-03 | Innovative Micro Technology | Through substrate vias using solder bumps |
US9773751B1 (en) * | 2016-06-29 | 2017-09-26 | International Business Machines Corporation | Via and trench filling using injection molded soldering |
Also Published As
Publication number | Publication date |
---|---|
FR3073320A1 (fr) | 2019-05-10 |
US11576258B2 (en) | 2023-02-07 |
RU2020118345A3 (fr) | 2022-01-28 |
US20200275551A1 (en) | 2020-08-27 |
FR3073320B1 (fr) | 2019-11-22 |
EP3692561A1 (fr) | 2020-08-12 |
RU2020118345A (ru) | 2021-12-08 |
JP7245243B2 (ja) | 2023-03-23 |
JP2021502668A (ja) | 2021-01-28 |
KR20200085311A (ko) | 2020-07-14 |
TW201923997A (zh) | 2019-06-16 |
AU2018363254B2 (en) | 2024-03-28 |
IL274466A (en) | 2020-06-30 |
CN111316395B (zh) | 2024-01-02 |
CN111316395A (zh) | 2020-06-19 |
BR112020008578A2 (pt) | 2020-10-20 |
TWI798286B (zh) | 2023-04-11 |
AU2018363254A1 (en) | 2020-05-21 |
CA3081403A1 (fr) | 2019-05-16 |
SG11202004104PA (en) | 2020-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0230336B1 (fr) | Dispositif opto-électronique pour montage en surface | |
EP2450949B1 (fr) | Structure d'encapsulation d'un micro-dispositif comportant un matériau getter | |
FR2903678A1 (fr) | Microcomposant encapsule equipe d'au moins un getter | |
FR2768813A1 (fr) | Spectrometre photoacoustique miniaturise | |
EP3157050A1 (fr) | Procédé de réalisation d'un dispositif microélectronique | |
FR2710783A1 (fr) | Dispositif à semiconducteurs optique . | |
EP3477280A1 (fr) | Source de rayonnement infrarouge modulable | |
WO1998029661A1 (fr) | Micropompe avec piece intermediaire integree | |
EP1760041A2 (fr) | Procédé d'encapsulation d'un composant, notamment électrique ou électronique au moyen d'un cordon de soudure amélioré | |
FR3073320B1 (fr) | Procede de realisation d'une liaison electrique etanche dans un boitier ceramique et tube intensificateur d'image comportant un tel boitier | |
EP0803729A1 (fr) | Dispositif comprenant deux substrats micro-usinés destinés à former un microsystème ou une partie d'un microsystème et procédé d'assemblage de deux substrats micro-usinés | |
WO2007026093A1 (fr) | Procède de scellement ou de soudure de deux éléments entre eux. | |
EP2485260B1 (fr) | Procéde d'assemblage et de fermeture hermétique d'un boîtier d'encapsulation | |
WO2009095599A1 (fr) | Agencement pour l'evacuation d'eau sur une surface optique de vehicule automobile | |
EP2782868B1 (fr) | Procédé de fabrication d'un dispositif d'encapsulage | |
EP1824779B1 (fr) | Dispositif et procede de fermeture hermetique d'une cavite d'un compose electronique | |
EP3017467B1 (fr) | Procede d'assemblage de deux composants electroniques, de type flip-chip par recuit uv, assemblage obtenu | |
EP4071557B1 (fr) | Élément de boite pour pièce d'horlogerie comportant un poussoir en verre métallique massif | |
FR2620239A1 (fr) | Systeme optique pour capteur de rayonnement | |
EP2571045B1 (fr) | Procédé d'hybridation flip-chip pour la formation de cavites hermétiques et systèmes obtenus par un tel procédé | |
CH703289B1 (fr) | Dispositif d'encapsulage pour MEMS. | |
FR2973522A1 (fr) | Module optique pour dispositif de vision panoramique, procede de fabrication et dispositif de vision panoramique | |
FR2921753A1 (fr) | Sous-ensemble optoelectronique et procede d'assemblage de ce sous-ensemble | |
CH705797A2 (fr) | Dispositif d'encapsulage et procédé de fabrication d'un tel dispositif d'encapsulage. | |
EP3120954A1 (fr) | Methode de revetement de piece |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18804374 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 3081403 Country of ref document: CA Ref document number: 2020524499 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 2018804374 Country of ref document: EP Effective date: 20200505 |
|
ENP | Entry into the national phase |
Ref document number: 2018363254 Country of ref document: AU Date of ref document: 20181106 Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20207016291 Country of ref document: KR Kind code of ref document: A |
|
REG | Reference to national code |
Ref country code: BR Ref legal event code: B01A Ref document number: 112020008578 Country of ref document: BR |
|
ENP | Entry into the national phase |
Ref document number: 112020008578 Country of ref document: BR Kind code of ref document: A2 Effective date: 20200429 |