WO2019058475A1 - Dispositif de détermination d'analogie de données de forme - Google Patents

Dispositif de détermination d'analogie de données de forme Download PDF

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Publication number
WO2019058475A1
WO2019058475A1 PCT/JP2017/034029 JP2017034029W WO2019058475A1 WO 2019058475 A1 WO2019058475 A1 WO 2019058475A1 JP 2017034029 W JP2017034029 W JP 2017034029W WO 2019058475 A1 WO2019058475 A1 WO 2019058475A1
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WIPO (PCT)
Prior art keywords
shape data
local
local image
amount
image
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PCT/JP2017/034029
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English (en)
Japanese (ja)
Inventor
一也 小谷
杉山　健二
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株式会社Ｆｕｊｉ
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Application filed by 株式会社Ｆｕｊｉ filed Critical 株式会社Ｆｕｊｉ
Priority to JP2019542884A priority Critical patent/JP6837152B2/ja
Priority to PCT/JP2017/034029 priority patent/WO2019058475A1/fr
Publication of WO2019058475A1 publication Critical patent/WO2019058475A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08—Monitoring manufacture of assemblages

Definitions

  • This specification discloses a shape data similarity determination apparatus.
  • the component mounter is a device for mounting a supplied component at a designated position on a separately supplied substrate.
  • the camera picks up the suction posture of the component sucked by the nozzle from below the component, and performs positioning processing and inspection processing.
  • Shape data is used when performing positioning processing and inspection processing.
  • the shape data defines appearance characteristics such as the size of the entire part, the position of the electrode, and the size of the electrode. Shape data is created by extracting the part shape from drawings and the like with an editor and inputting numerical values, or by capturing a part absorbed by the nozzle of the part mounter with a camera and performing predetermined image processing (For example, Patent Document 1).
  • the figures included in the shape data may slightly differ depending on the creator of the shape data even if they are the same part, and the shape data of the same part is duplicated Had to exist.
  • the present disclosure has been made to solve the above-described problems, and its main object is to prevent redundant storage of shape data of the same part or mark.
  • the shape data similarity determination device of the present disclosure A local image acquisition unit for acquiring as a local image an image obtained by photographing a component mounted on a substrate by a component mounting machine or an image obtained by photographing a mark attached to the substrate; A first displacement amount acquisition unit that acquires a displacement amount between local shape data of the part or the mark and the local image; A second shift amount acquisition unit that acquires shift amounts between a plurality of global shape data stored in advance in a storage device and the local image; Similarity determination with the local shape data and each global shape data by comparing the local shape data with the local image and the amount of displacement between each global shape data and the local image Execution department, Is provided.
  • this shape data class ratio determination apparatus an image obtained by capturing a part mounted on a substrate by a component mounting machine or an image obtained by capturing a mark on a substrate is used as a local image. Then, by comparing the amount of deviation between the local shape data of the part or mark and the local image, and the amount of deviation between each global shape data and the local image, the similarity ratio judgment between the local shape data and each global shape data is determined. Do. That is, instead of simply comparing the local shape data with the global shape data, the amount of deviation between the local shape data and the local image is compared with the amount of deviation between the global shape data and the local image. Therefore, it is possible to accurately determine whether or not the shape data of the same part or mark is redundantly present, and hence it is possible to prevent redundant storage of the shape data of the same part or mark.
  • FIG. 2 is a perspective view showing a schematic configuration of a component mounter 30.
  • FIG. The flowchart of an analogy determination processing routine.
  • FIG. Explanatory drawing of the local image of the components P image
  • FIG. Explanatory drawing of the local image of the components P image
  • Explanatory drawing which shows an example of the local shape data of the components P.
  • FIG. Explanatory drawing which shows an example of global shape data.
  • FIG. Explanatory drawing which shows an example of global shape data.
  • FIG. 1 is a block diagram showing the electrical connection of the shape data category determination apparatus 10.
  • FIG. 2 is a perspective view showing a schematic configuration of the component mounter 30.
  • FIG. 3 is a perspective view of the reel 41. As shown in FIG. The left and right (X axis) direction, the front and back (Y axis) direction, and the top and bottom (Z axis) direction are as shown in FIGS. 2 and 3.
  • the shape data class ratio determination device 10 includes a CPU 12, a ROM 14, an HDD 16, a RAM 18, and the like, which are connected via a bus (not shown).
  • a known personal computer can be used as the shape data category determination device 10.
  • a display (display device) 20, a mouse 22, a keyboard 24, a camera 26, a storage device 80, and the like are connected to the shape data class ratio determination device 10.
  • the display 20 is a known output device, and the mouse 22 and the keyboard 24 are known input devices.
  • the camera 26 is the same as a part camera 48 of the component mounter 30 described later, and picks up an image of the component P placed on the component placement stand 28.
  • the component P is mounted on the substrate 32 by a component mounter 30, which will be described later, and is mounted on the component mounting table 28 such that the surface opposite to the surface adsorbed by the nozzle 64 faces the camera 26. Ru.
  • the storage device 80 stores a plurality of global shape data.
  • the shape data defines information such as the body size of the part P and the size and position of the electrode attached to the part P and the like.
  • Shape data may include tolerance and vision type. Tolerance is the dimensional tolerance, and vision type represents the type of image processing algorithm.
  • the shape data is used, for example, when the posture of the component P is obtained from an image of the component P suctioned by the nozzle 64 in the component mounter 30 described later by photographing with the part camera 48. An example of shape data is shown in FIG.
  • a cursor signal from the mouse 22, a character signal from the keyboard 24, an image signal from the camera 26, and the like are input to the shape data class ratio determination apparatus 10.
  • An image signal or the like to the display 20 is output from the shape data category determination device 10.
  • the shape data category determination device 10 reads out or updates the global shape data stored in the storage device 80.
  • the component P is mounted on the substrate 32 by the component mounter 30.
  • the component mounter 30 will be described.
  • the component mounter 30, as shown in FIG. 2, includes a component supply device 40, a substrate transfer device 45, an XY robot 50, a mounting head 60, a part camera 48, a mark camera 49, and a controller 70. ing.
  • a plurality of component supply devices 40 are provided on the front side of the component mounter 30 so as to be aligned in the left-right direction (X-axis direction).
  • the component supply device 40 is configured as a tape feeder which pulls out from the reel 41 the tape 42 containing the components P at predetermined intervals and feeds the tape 42 at a predetermined pitch.
  • the tape 42 wound around the reel 41 is formed with a plurality of recesses 42 a aligned along the longitudinal direction of the tape 42.
  • the component P is accommodated in each recess 42a. These parts P are protected by a film 43 covering the surface of the tape 42.
  • the tape 42 has sprocket holes 42b formed along the longitudinal direction.
  • the teeth of a sprocket (not shown) of the component supply device 40 are fitted into the sprocket holes 42b and rotated by a predetermined amount, whereby the tape 42 is fed at a predetermined pitch.
  • the part P which has reached the predetermined part supply position F is in a state in which the film 43 is peeled off.
  • the substrate transfer device 45 has a pair of conveyor belts 46 and 46 (only one of which is shown in FIG. 2) provided at intervals in the front and back direction and spanned in the left-right direction.
  • the substrate 32 is conveyed by the conveyor belts 46 and 46 in the arrow direction of the dashed dotted line in FIG. 2 and reaches a predetermined taking-in position, and is supported by a large number of support pins 47 erected on the back side.
  • the XY robot 50 includes an X-axis slider 52 and a Y-axis slider 54.
  • the X-axis slider 52 is movable along X-axis guide rails 51 provided on the front surface of the Y-axis slider 54 in the left-right direction (X-axis direction).
  • the Y-axis slider 54 is movable along Y-axis guide rails 53 provided in the front-rear direction (Y-axis direction).
  • the mounting head 60 is attached to the X-axis slider 52.
  • the mounting head 60 is provided with a nozzle 64 on its lower surface.
  • the nozzle 64 adsorbs the part P when the negative pressure is supplied, and releases the part P when the atmospheric pressure or the positive pressure is supplied.
  • the parts camera 48 is provided between the parts supply device 40 and the substrate transfer device 45.
  • the part camera 48 captures an image of the part P sucked by the nozzle 64 from below.
  • the mark camera 49 is attached to the lower surface of the X-axis slider 52.
  • the mark camera 49 picks up an image of the mark M attached to a predetermined position of the substrate 32 supported by the support pin 47.
  • the controller 70 is configured as a microprocessor centering on a CPU.
  • the controller 70 receives a position detection signal from the XY robot 50, an image signal from the part camera 48, an image signal from the mark camera 49, and the like. Further, from the controller 70, control signals to the component supply device 40, control signals to the substrate transfer device 45, control signals to the XY robot 50, control signals to the mounting head 60, control signals to the parts camera 48, marks Control signals and the like to the camera 49 are output.
  • the controller 70 controls each part of the component mounter 30 to produce the substrate 32 on which the plurality of components P are mounted, based on a production program received from a management device (not shown). Specifically, the controller 70 controls the XY robot 50 such that the nozzle 64 faces the component P fed to the component supply position F (see FIG. 3) by the component supply device 40. Subsequently, the controller 70 controls the pressure of the nozzle 64 so that the part P at the part supply position F is attracted to the nozzle 64.
  • the controller 70 controls the part camera 48 so as to pick up an image of the part P absorbed by the nozzle 64, and processes the obtained image of the part P with a frame obtained from shape data of the part P described later By doing this, the posture of the part P is recognized.
  • the controller 70 controls the XY robot 50 so that the part P is disposed immediately above the designated position of the substrate 32 in consideration of the posture of the part P, and the nozzle 64 of the nozzle 64 releases the part P. Control the pressure.
  • the controller 70 mounts a predetermined number and types of components P on the substrate 32 by repeatedly executing such component mounting processing.
  • a mounting line is formed by arranging a plurality of such component mounters 30 in the left-right direction. When the substrate 32 is transported from the uppermost stream component mounter 30 of one mounting line to the lowermost component mounter 30, all predetermined components P are mounted on the substrate 32. There is. A large number of such mounting lines are provided in a component mounting factory.
  • FIG. 4 is a flowchart of the similarity determination processing routine.
  • the component P as shown in FIG. 5, it has a rectangular body B, and on the surface opposite to the nozzle suction surface, four rectangular electrodes E1 to E4 are two vertically and horizontally. An example in which two are arranged will be described.
  • the CPU 12 When starting the analog ratio determination process routine, the CPU 12 first acquires a local image of the part P (step S100). Specifically, an image obtained by photographing the surface opposite to the nozzle suction surface of the component P placed on the component placement table 28 with the camera 26 is acquired as a local image.
  • the component P is mounted on the component mounting table 28 so as to match as much as possible the posture of the component P when the component mounter 30 sucks the nozzle 64.
  • the CPU 12 acquires local shape data of the part P (step S110).
  • the local shape data may be manually created by the operator from the local image of the display 20, or may be created by measuring the actual part P with a caliper, or the operator may be represented by the CAD data of the part P May be created manually, or the CPU 12 may automatically create it from a local image.
  • the operator manually creates a local image of the display 20 will be described.
  • the local image of the part P and the cross cursor 21 are displayed.
  • the operator uses the mouse 22 to adjust the vertical and horizontal lines of the cross cursor 21 so as to be as parallel as possible to the vertical and horizontal sides of the part P, and the center of the cross cursor 21 coincides with the center of the part P as closely as possible. Make adjustments (see FIG. 7). After the adjustment, the operator inputs that the alignment of the cross cursor 21 is finished through the mouse 22 or the keyboard 24. Then, the CPU 12 places the center of the cross cursor 21 (considered as the center of the local image of the part P) at the center of the screen of the display 20 and sets the rotation angle (tilt) of the local image of the part P to zero.
  • the local image is displayed on the display 20 (see FIG. 8).
  • the operator determines the area A0 after the stretchable rectangular area A0 (see FIG. 8) displayed on the display 20 matches the rectangular outline of the body B of the part P by operating the mouse 22. .
  • region A0 expands-contracts by predetermined minimum unit, it does not necessarily correspond exactly with the rectangular-shaped outline of the body B of the components P.
  • the operator operates the mouse 22 to make the stretchable rectangular area A1 displayed on the display 20 coincide with the rectangular outline of the electrode E1 of the part P, and then determines the area A1.
  • the operator performs the same operation on the electrodes E2 to E4 to determine the regions A2 to A4 (see FIG. 9).
  • the CPU 12 determines the size of the body B of the part P and the sizes and positions of the electrodes E1 to E4 based on the length of each side of the areas A0 to A4, and stores the size in the HDD 16 as local shape data.
  • the CPU 12 also adds tolerance or vision type to the local shape data by manual input by the operator or automatically.
  • An example of the local shape data thus obtained is shown in FIG.
  • the determined areas A0 to A4 are referred to as a frame FL of the part P (see FIGS. 9 and 11).
  • the frame FL can be created from the size and position information of the local shape data of FIG.
  • the CPU 12 calculates and stores the amount of deviation (X, Y, Q) between the frame FL obtained from the local shape data and the local image of the part P (step S120). Specifically, as shown in FIG. 11, the CPU 12 matches the frame FL of the part P as closely as possible with the local image (see FIG. 6) of the part P by a predetermined optimal matching method.
  • the predetermined optimum matching method is not particularly limited. For example, the center of the electrode E3 of the local image of the part P and the center of the small frame at the upper right of the frame FL coincide with each other and the rotation angle of the electrode E3 and the small frame There is a method of arranging so as to match the rotation angle of.
  • the CPU 12 recognizes, from the local image of the part P, the XY coordinates of the center position of the part P and the rotation angle (inclination to the horizontal line) of the part P. Further, the CPU 12 recognizes the XY coordinates of the center position of the frame FL and the rotation angle of the frame FL after performing the predetermined optimal matching method. Then, the CPU 12 calculates the shift amounts between the XY coordinates of the central position of the local image of the part P and the XY coordinates of the central position of the frame FL as X and Y, and the rotation angle of the local image of the part P and the rotation of the frame FL The amount of deviation from the corner is calculated as Q.
  • the amount of deviation (X, Y, Q) is (0.01, 0.02, 1).
  • the unit of X and Y is mm, and the unit of Q is degree (°). If the amount of deviation (X, Y, Q) falls within a predetermined allowable range, the CPU 12 stores the amount of deviation in the HDD 16 as the amount of deviation serving as a search key. On the other hand, if the amount of deviation (X, Y, Q) does not fall within the allowable range, the CPU 12 discards the amount of deviation and requests the operator to re-create local shape data. When the CPU 12 automatically creates local shape data from a local image, the amount of displacement (X, Y, Q) is substantially zero, and therefore always falls within the allowable range.
  • n represents the total number of global shape data stored in the storage device 80.
  • the CPU 12 calculates the amount of deviation (X, Y, Q) as in step S120.
  • two global shape data (FIGS. 12 and 14) will be described as an example.
  • the CPU 12 creates a frame F1 (see FIG. 13) from the information of the size and position of the global shape data in FIG.
  • the frame F1 is a local image of the part P by the same optimal matching method as described above (see FIG. 6). Match as much as possible.
  • the CPU 12 recognizes the XY coordinates of the center position of the frame F1 and the rotation angle of the frame F1 after performing the predetermined optimal matching method. Then, the CPU 12 calculates the shift amount between the XY coordinates of the central position of the local image of the part P and the XY coordinates of the central position of the frame F1 as X and Y, and the rotation angle of the local image of the part P and the rotation of the frame F1
  • the amount of deviation from the corner is calculated as Q.
  • the amount of deviation (X, Y, Q) is (0.02, 0.03, 2).
  • the CPU 12 stores the amount of deviation in the HDD 16 as one of search targets. Subsequently, the CPU 12 creates a frame F2 (see FIG. 15) from the information of the size and position of the global shape data in FIG. 14, and the frame F2 is a local image of the part P by the same optimal matching method as described above (FIG. 6). Match as much as possible.
  • the CPU 12 recognizes the XY coordinates of the center position of the frame F2 and the rotation angle of the frame F2 after performing the predetermined optimum matching method.
  • the CPU 12 calculates the shift amount between the XY coordinates of the central position of the local image of the part P and the XY coordinates of the central position of the frame F2 as X and Y, and the rotation angle of the local image of the part P and the rotation of the frame F2
  • the amount of deviation from the corner is calculated as Q.
  • the amount of deviation (X, Y, Q) is (0.19, 0.03, 2).
  • the CPU 12 stores the amount of deviation in the HDD 16 as one of search targets.
  • the CPU 12 compares the shift amount serving as the search key obtained in step S120 with the shift amount stored as the search target in step S130 to perform the analogy determination (step S140).
  • the CPU 12 compares each of the shift amounts of the plurality of search targets with the shift amount of the key.
  • the CPU 12 calculates the absolute value (.DELTA.X, .DELTA.Y, .DELTA.Q) of the difference between the two amounts of deviation, and the sum of .DELTA.X, .DELTA.Y, .DELTA.Q or the sum after weighting .DELTA.X, .DELTA.Y, .DELTA.Q is for overlap judgment Whether the local shape data and the global shape data are similar may be determined based on whether or not they are within the numerical range. In the example described above, it is determined that the frame F1 is similar and the frame F2 is dissimilar.
  • the CPU 12 displays the analogy determination result on the display 20 (step S150), and ends this routine.
  • the CPU 12 may display on the display 20 global shape data determined to be similar.
  • the global shape data determined to be similar may be displayed on the display 20 in descending order of the degree of matching. In this case, it may be determined that the smaller the sum of ⁇ X, ⁇ Y, ⁇ Q, the higher the degree of coincidence, or the sum after weighting ⁇ X, ⁇ Y, ⁇ Q is obtained, and the smaller the sum, the degree of coincidence is It may be determined to be high.
  • the CPU 12 may limit the number of global shape data displayed on the display 20 to a predetermined number or less.
  • the operator determines whether or not the part P is the same as the part of the global shape data, based on the result of the similarity determination displayed on the display 20. If the part is the same, the local shape data created this time is the same as the part P. It overwrites with global shape data of the judged part, and if it is not identical, newly created local shape data is added to global shape data.
  • the shape data class ratio determination device 10 of the present embodiment corresponds to the shape data class ratio determination device of the present disclosure, and the CPU 12 is a local image acquisition unit, a first shift amount acquisition unit, a second shift amount acquisition unit, and a ratio determination. It corresponds to the execution unit.
  • the local shape data and each global are compared by comparing the deviation between the local shape data of the part P and the local image and the deviation between each global shape data and the local image.
  • Perform analogy determination with shape data That is, instead of simply comparing the local shape data with the global shape data, the amount of deviation between the local shape data and the local image is compared with the amount of deviation between the global shape data and the local image. Therefore, it is possible to accurately determine whether or not shape data of the same part is redundantly present, and as a result, redundant storage of shape data of the same part can be prevented.
  • the deviation amount includes the deviation amount (X, Y) of the plane coordinates and the deviation amount (Q) of the rotation angle, it can be obtained relatively easily.
  • the CPU 12 determines whether the local shape data and the global shapes are different depending on whether the difference between the local shape data and the local image and the difference between the global shape data and the local image are within the overlap determination numerical range. It is determined whether or not the data is similar. Therefore, analog ratio determination can be performed relatively easily.
  • the CPU 12 displays global shape data similar to the local shape data on the display 20. Therefore, the operator can easily determine whether global shape data overlapping the current local shape data already exists in the storage device 80 by looking at such display contents. Such judgment can be made more easily by displaying in order from the one with the highest degree of coincidence, or by displaying the one with the highest degree of coincidence.
  • the CPU 12 calculates the amount of deviation (X, Y, Q) from the local image of the part P for all of the plurality of global shape data stored in the storage device 80 in step S130. , May be as follows. That is, the CPU 12 selects one of the plurality of pieces of global shape data stored in the storage device 80 that matches the predetermined characteristic portion of the local shape data, and selects the selected global shape data and the local image of the part P. The amount of deviation (X, Y, Q) of may be calculated. This makes it possible to increase the analogy determination speed because it suffices to determine the amount of deviation for the narrowed global shape data, as compared to the case of determining the amount of deviation for all global shape data.
  • the size of the body of the global shape data or the size and position of the electrode may fall within the tolerance of the size of the body of the component P or the size and position of the electrode, or the electrode
  • the number (the number of leads, the number of bumps, etc.) may be the same, the vision type may be the same, or these may be combined as appropriate.
  • an image obtained by imaging the part P placed on the part placement table 28 with the camera 26 is used as the local image of the part P, but the invention is not particularly limited thereto.
  • a local image of the component P an image of the component P captured by the nozzle 64 in the component mounter 30 may be used. Even in this case, the same effect as that of the above-described embodiment can be obtained.
  • the component P as shown in FIG. 5, one in which the rectangular electrodes E1 to E4 are provided on the back surface of the body is exemplified, but any component may be used.
  • it may be a component in which a lead protrudes from the body, or a component having a plurality of bumps on the back surface of the body.
  • the local image of the part P is used, but a local image of the mark M (see FIG. 2) of the substrate 32 may be used. Even in this case, the same effect as that of the above-described embodiment can be obtained.
  • the mark M is, for example, a circle, a triangle, or a square. In the case of a circle, the diameter may be used as the size, and in the case of a triangle or a square, the side length may be used as the size.
  • the shape data includes the size of the body and the size and position of the electrode, but may include other external features.
  • the position of the direction check mark S is included in the shape data It is also good. In this way, it is possible to distinguish between the bumped component P1 shown outside the brackets in FIG. 16 and the bumped component P1 shown in the brackets (where the direction check mark S is located in the lower right corner). In the bumped component P1 as shown in FIG.
  • the difference between the brightness of the bump without transfer agent and the brightness of the bump with transfer agent obtained from the images before and after dipping the bump in the transfer agent (flux etc.) It may be included in shape data.
  • heights of bodies, electrodes, and bumps obtained from three-dimensional data may be included in the shape data.
  • the operator checks the analogy determination result displayed on the display 20 to determine whether or not the part P of this time is the same as the part of the global shape data. Good. For example, if the absolute value ((.DELTA.X, .DELTA.Y, .DELTA.Q) of the difference between the amounts of deviation is substantially zero, the CPU 12 determines that the part to be searched is the same as the part P of this time and creates this time You may overwrite the saved local shape data with the global shape data of the search target part.
  • the shape data category determination apparatus of the present disclosure may be configured as follows.
  • the shift amount may include a shift amount of plane coordinates and a shift amount of a rotation angle. In this way, the amount of deviation between the shape data and the local image can be determined relatively easily.
  • the class ratio determination execution unit determines whether the difference between the local shape data and the local image and the difference between each global shape data and the local image are for overlap determination. Whether or not the local shape data and each global shape data are similar may be determined based on whether or not they are within the numerical range. In this way, analog ratio determination can be performed relatively easily.
  • the second shift amount acquisition unit selects one of the plurality of pieces of global shape data that matches a predetermined characteristic portion of the local shape data, and is selected. An amount of deviation between shape data and the local image may be acquired. By so doing, global shape data are narrowed down, so it is possible to increase the analogy determination speed.
  • the similarity determination execution unit may display the global shape data similar to the local shape data on a display device.
  • similar global shape data may be displayed on the display device in order from the one with the highest degree of coincidence, or the one with the highest degree of coincidence may be displayed on the display device.
  • the operator can easily determine whether global shape data overlapping the current local shape data already exists in the storage device by looking at such display contents.
  • the number of pieces of global shape data displayed on the display device may be limited to a predetermined number or less.
  • the present invention is applicable to various industries that perform work of mounting components on a substrate.
  • SYMBOLS 10 Shape data class ratio determination device, 12 CPU, 14 ROM, 16 HDD, 18 RAM, 20 display, 21 cross cursor, 22 mouse, 24 keyboard, 26 camera, 28 parts mounting base, 30 parts mounting machine, 32 boards, 40 parts Supplying device, 41 reel, 42 tape, 42a recessed portion, 42b sprocket hole, 43 film, 45 substrate transfer device, 46 conveyor belt, 47 support pin, 48 parts camera, 49 mark camera, 50 XY robot, 51 X axis guide rail, 52 X-axis slider 53 Y-axis guide rail 54 Y-axis slider 60 mounting head 64 nozzle 70 controller 80 storage device A0 to A4 area B body E1 to E4 electrode FL, F1, F2 Frame, M mark, P, P1 parts, S direction check labels.

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  • Manufacturing & Machinery (AREA)
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  • Computer Vision & Pattern Recognition (AREA)
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  • General Physics & Mathematics (AREA)
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Abstract

La présente invention concerne un dispositif de détermination d'analogie de données de forme comprenant : une unité d'acquisition d'image locale qui acquiert, en tant qu'image locale, soit une image capturée d'un élément qui est destiné à être monté sur un substrat par une machine de montage d'élément, soit une image capturée d'un repère fixé au substrat; une première unité d'acquisition de quantité d'écart qui acquiert une quantité d'écart entre l'image locale et des données de forme locales de l'élément ou du repère; une seconde unité d'acquisition de quantité d'écart qui acquiert des quantités d'écart entre l'image locale et une pluralité d'ensembles de données de forme globales stockés à l'avance dans un dispositif de stockage; et une unité de détermination d'analogie qui détermine une analogie entre les données de forme locales et chaque ensemble de données de forme globales par comparaison de la quantité d'écart entre les données de forme locales et l'image locale avec la quantité d'écart entre chaque ensemble de données de forme globales et l'image locale.
PCT/JP2017/034029 2017-09-21 2017-09-21 Dispositif de détermination d'analogie de données de forme WO2019058475A1 (fr)

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JP2019542884A JP6837152B2 (ja) 2017-09-21 2017-09-21 シェイプデータ類比判定装置
PCT/JP2017/034029 WO2019058475A1 (fr) 2017-09-21 2017-09-21 Dispositif de détermination d'analogie de données de forme

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WO2021144971A1 (fr) * 2020-01-17 2021-07-22 株式会社Ｆｕｊｉ Dispositif et procédé d'inspection
JPWO2021144971A1 (fr) * 2020-01-17 2021-07-22
JP7425091B2 (ja) 2020-01-17 2024-01-30 株式会社Fuji 検査装置及び検査方法

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