WO2019043844A1 - 光学部品及び透明封止部材 - Google Patents
光学部品及び透明封止部材 Download PDFInfo
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- WO2019043844A1 WO2019043844A1 PCT/JP2017/031211 JP2017031211W WO2019043844A1 WO 2019043844 A1 WO2019043844 A1 WO 2019043844A1 JP 2017031211 W JP2017031211 W JP 2017031211W WO 2019043844 A1 WO2019043844 A1 WO 2019043844A1
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- WIPO (PCT)
- Prior art keywords
- sealing member
- transparent sealing
- optical component
- mounting substrate
- recess
- Prior art date
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/54—Encapsulations having a particular shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/005—Processes relating to semiconductor body packages relating to encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0058—Processes relating to semiconductor body packages relating to optical field-shaping elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
Definitions
- the present invention relates to a transparent sealing member used for an optical component and an optical component, for example, to an optical component and a transparent sealing member suitable for use in, for example, an LED (light emitting diode) or an LD (semiconductor laser).
- a transparent sealing member used for an optical component and an optical component, for example, to an optical component and a transparent sealing member suitable for use in, for example, an LED (light emitting diode) or an LD (semiconductor laser).
- the ultraviolet LED device requires a transparent sealing member to protect the light emitting element from the open air and moisture. Glass and quartz glass are used for this transparent sealing member from the viewpoint of the permeability to ultraviolet light and durability.
- JP-A-2014-216532 has a non-light transmitting substrate on the upper surface of which a semiconductor light emitting element is mounted, and a concave portion opened downward and a light transmitting protective material surrounding the semiconductor light emitting element.
- a semiconductor light emitting device package is disclosed.
- JP-A-2017-011200 includes a light emitting element that emits ultraviolet light, a base on which the light emitting element is mounted, and a translucent protective member that covers the light emitting element and transmits ultraviolet light.
- a semiconductor light emitting device package is disclosed in which the light emitting device is housed in a region (recess) formed by the base and the light transmissive protective member.
- the refractive index of the translucent protective material and the refractive index of the recess are largely different, the light emitted from the semiconductor light emitting element may be surface-reflected by the translucent protective material. Therefore, it is conceivable to fill the recess with a refractive index matching agent having a refractive index between the refractive index of the translucent protective material and the refractive index of the recess.
- a refractive index matching agent having a refractive index between the refractive index of the translucent protective material and the refractive index of the recess.
- air bubbles are mixed in the refractive index matching agent, and there is a problem that the effect by the refractive index matching agent (prevention of surface reflection) can not be sufficiently exhibited.
- the present invention has been made in consideration of such problems, and it is possible to suppress the mixing of air bubbles into the refractive index matching agent, and to realize the effect (suppression of surface reflection) by the refractive index matching agent. It is an object of the present invention to provide an optical component and a transparent sealing member capable of improving the performance of the optical component.
- An optical component includes at least one optical element and a package in which the optical element is accommodated, the package being a mounting substrate on which the optical element is mounted;
- the package includes a transparent sealing member bonded onto the mounting substrate, a recess surrounding the optical element mounted on the mounting substrate, and a refractive index matching agent filled in the recess.
- At least one groove communicating with the outside from the recess is characterized.
- the said recessed part may be provided in the said transparent sealing member, and may be provided in the said mounting substrate.
- the refractive index matching agent is filled in the recess.
- the refractive index matching agent has a refractive index between the refractive index of the transparent sealing member and the refractive index of the recess (the accommodation space of the optical element).
- the package is provided with at least one groove communicating from the recess to the outside.
- the refractive index matching agent is filled in the recess of the transparent sealing member. Thereafter, the mounting substrate on which the optical element is mounted and the transparent sealing member are bonded. In this case, the optical element is bonded so as to be embedded in the recess filled with the refractive index matching agent. At the time of this bonding, a part of the refractive index matching agent is discharged to the outside through the groove, and the air bubble is also released to the outside.
- the inclusion of air bubbles in the refractive index matching agent can be suppressed, and the effect by the refractive index matching agent (suppression of surface reflection) can be realized, and the performance of the optical component is improved. be able to.
- the groove may be formed in a portion of the transparent sealing member to be bonded to the mounting substrate.
- the groove may be formed in at least a portion of the mounting substrate to be bonded to the transparent sealing member.
- a plurality of the grooves may be provided, and the plurality of grooves may be formed radially.
- a step communicating with the recess may be formed around the recess.
- the step is a path for guiding the air bubbles to the grooves, and the air bubbles are smoothly released to the outside.
- the projected area of the portion where the transparent sealing member and the mounting substrate are joined with respect to the bottom surface of the optical component is A
- the projected area of the groove with respect to the bottom surface of the optical component is B.
- the height of the groove is preferably smaller than the thickness of the optical element. If the height of the groove is too large, air bubbles will remain around the optical element. Therefore, the height of the groove is preferably smaller than the thickness of the optical element. In addition, when the height of the groove is too small, air bubbles are less likely to come out of the groove when bonding the transparent sealing member and the mounting substrate.
- the height of the grooves is preferably 50 to 600 ⁇ m.
- the transparent sealing member is made of quartz glass or optical glass
- the refractive index matching agent is a silicone resin or a fluorine resin.
- a transparent sealing member includes at least one optical element, a mounting substrate on which the optical element is mounted, and a recess surrounding the optical element mounted on the mounting substrate. It is used for the optical component which it has, and is a transparent sealing member which comprises the package which accommodates the said optical element with the said mounting substrate.
- the transparent sealing member is bonded to the mounting substrate in a state where the recess is filled with a refractive index matching agent, and at least a portion connected to the mounting substrate communicates with the outside from the recess. It is characterized by having one groove.
- a plurality of the grooves may be provided, and the plurality of grooves may be formed radially.
- a step communicating with the recess may be formed around the recess in a portion to be joined to the mounting substrate.
- the height of the groove is preferably smaller than the thickness of the optical element.
- the transparent sealing member is made of quartz glass or optical glass
- the refractive index matching agent is a silicone resin or a fluorine resin.
- the optical component and the transparent sealing member according to the present invention it is possible to suppress the mixing of air bubbles into the refractive index matching agent, and the effect by the refractive index matching agent (suppression of surface reflection) And can improve the performance of the optical component.
- FIG. 3A is a longitudinal sectional view showing the configuration of an optical component according to Comparative Example 1
- FIG. 3B is a longitudinal sectional view showing the configuration of an optical component according to Comparative Example 2.
- FIG. 4A is a process drawing showing a state in which the refractive index matching agent is filled in the recess in a state where the opening of the recess is directed upward in the optical component according to Comparative Example 2, and FIG. 4B is for closing the opening of the recess.
- FIG. 4A is a process drawing showing a state in which the refractive index matching agent is filled in the recess in a state where the opening of the recess is directed upward in the optical component according to Comparative Example 2
- FIG. 4B is for closing the opening of the recess.
- FIG. 6 is a process diagram showing a state in which the mounting substrate is bonded to the transparent sealing member with the optical element facing downward.
- FIG. 5A is a process diagram showing a state in which the refractive index matching agent is filled in the concave portion in a state where the opening of the concave portion is directed upward in the optical component according to the present embodiment
- FIG. It is a process drawing showing a state where the mounting substrate is bonded to the transparent sealing member with the optical element facing downward.
- FIG. 6A is a longitudinal sectional view showing the configuration of an optical component (first optical component) according to a first modification
- FIG. 6B is a perspective view showing the bottom surface (bonding surface) side of the transparent sealing member of the first optical component.
- FIG. 10A is a perspective view showing the configuration of an optical component (fifth optical component) according to the fifth modification
- FIG. 10B is a plan view showing the bottom surface (bonding surface) of the transparent sealing member of the fifth optical component.
- 11A is a perspective view showing a configuration of an optical component (sixth optical component) according to a sixth modification
- FIG. 11B is a plan view showing an upper surface (bonding surface) of a mounting substrate of the sixth optical component.
- the optical component 10 has, as shown in FIG. 1, at least one optical element 12 for emitting ultraviolet light, and a package 14 in which the optical element 12 is accommodated.
- the package 14 has a mounting substrate 16 on which the optical element 12 is mounted, and a transparent sealing member 20 joined on the mounting substrate 16 via, for example, an organic adhesive layer 18.
- the mounting substrate 16 is made of, for example, AlN (aluminum nitride).
- the transparent sealing member 20 is made of, for example, quartz glass or optical glass.
- an epoxy-based adhesive, a silicone-based adhesive, a urethane-based adhesive or the like can be preferably used.
- the optical element 12 is mounted on the mounting substrate 16 as described above.
- the optical element 12 is configured, for example, by laminating a GaN-based crystal layer having a quantum well structure on a sapphire substrate (thermal expansion coefficient: 7.7 ⁇ 10 ⁇ 6 / ° C.).
- a so-called face-up mounting in which the light emitting surface 12a is mounted to face the transparent sealing member 20 is adopted. That is, a terminal (not shown) derived from the optical element 12 and a circuit wiring (not shown) formed on the mounting substrate 16 are electrically connected by, for example, a bonding wire (not shown) .
- the transparent sealing member 20 has an annular pedestal 22 disposed to surround the optical element 12 mounted on the mounting substrate 16, and a lens body 24 integrally formed on the pedestal 22. Further, in the pedestal 22 of the transparent sealing member 20, a recess 26 (housing space) of the lower surface opening is formed. At least the optical element 12 is accommodated in the recess 26.
- the planar shape of the bottom surface of the lens body 24 is, for example, circular, and the outer shape of the pedestal 22 is, for example, square.
- the planar shape of the bottom surface of the lens body 24 may be an elliptical shape, a track shape, or the like, and the outer shape of the pedestal 22 may be a polygonal shape such as a circular shape, a rectangular shape, a triangular shape, or a hexagonal shape.
- the manufacturing method of the transparent sealing member 20 having such a shape includes (a) cutting out from a bulk base material, (b) high temperature molding, (c) powder sintering and the like.
- a cutting process is performed from the bulk base material of the transparent sealing member 20, and as shown in FIG. 1, the transparent sealing member 20 is manufactured.
- high temperature molding a material is poured into a mold at a high temperature, or a piece of material is placed in a mold, and is deformed into a mold at a high temperature to produce a transparent sealing member 20 as shown in FIG.
- a molding slurry containing silica powder and an organic compound is cast in a molding die and solidified by a chemical reaction between organic compounds, for example, a chemical reaction between a dispersion medium and a curing agent or curing agent, and then molding It releases from a type
- the height ha of the transparent sealing member 20 is 0.5 to 10 mm
- the outer diameter Da of the pedestal 22 is 3.0 to 10 mm
- the height hb of the pedestal 22 is 0.2 to It is 1 mm.
- the lens body 24 has a bottom maximum length Lm of 2.0 to 10 mm, a maximum height hm of 0.5 to 10 mm, and an aspect ratio (hm / Lm) of 0.3 to 1.0 or the like. .
- the concave portion 26 of the transparent sealing member 20 is filled with the refractive index matching agent 28 (liquid), and a plurality of the transparent sealing member 20 is bonded to the mounting substrate 16. Grooves 30 are formed.
- a fluorine resin, a silicone resin or the like can be preferably adopted as the refractive index matching agent.
- the refractive index of air is 1, the refractive index of quartz glass is 1.57 (wavelength 185 nm) to 1.47 (wavelength 399 nm), the refractive index of fluorine resin is 1.36 (wavelength 238 nm) to 1.35 (wavelength)
- the refractive index of the silicone resin is 1.41 (wavelength 238 nm) to 1.57 (wavelength 589 nm).
- the plurality of grooves 30 are radially formed, for example, as shown in FIGS. 2A to 2C.
- FIG. 2A shows an example in which two grooves 30a and 30b are formed on one straight line
- FIG. 2B shows an example in which four grooves 30a to 30d are formed on two straight lines orthogonal to each other.
- FIG. 2C shows an example in which four grooves 30a to 30d are formed on two diagonals respectively.
- the number of grooves 30, the radial direction (the direction in which the grooves 30 are formed), and the like can be appropriately selected depending on the size, shape, and the like of the transparent sealing member 20.
- the planar shape of the recess 26 is rectangular.
- the planar shape of the recess 26 may be circular.
- the plurality of grooves 30 may be formed radially.
- the outer shape of the base 22 may be circular, and the planar shape of the recess may be rectangular, or both the outer shape of the pedestal 22 and the outer shape of the recess may be circular, and the planar shape of the recess may be rectangular.
- the optical component 100a according to Comparative Example 1 has almost the same configuration as the optical component 10, but the groove 30 is not formed in the transparent sealing member 20, and the transparent sealing
- the refractive index matching agent 28 is not filled in the recess 26 of the stopper 20. That is, the air layer 32 is formed. Therefore, the refractive index of the lens body 24 in the transparent sealing member 20 and the refractive index of the air layer 32 in the recess 26 are largely different, and the light emitted from the optical element 12 is surface-reflected by the transparent sealing member 20.
- the loss due to surface reflection is about 10%.
- the refractive index matching agent 28 is formed in the recess 26 of the transparent sealing member 20. Is filled. However, there is a problem that air bubbles 34 mix in the assembly of the optical component 100b.
- the refractive index matching agent 28 is filled in the recess 26 with the opening of the recess 26 directed upward.
- the mounting substrate 16 is bonded to the transparent sealing member 20 with the optical element 12 facing downward so as to close the opening of the recess 26.
- air bubbles 34 will be mixed. Therefore, for example, as shown in FIG. 3B, when the air bubble 34 moves on the optical path when using the optical component 100b, the effect of the refractive index matching agent 28 (suppression of surface reflection) can not be sufficiently exhibited.
- the refractive index matching agent 28 is filled in the recess 26 of the transparent sealing member 20 as shown in FIG. Among them, a plurality of grooves 30 are formed in a portion to be bonded to the mounting substrate 16.
- the refractive index matching agent 28 is filled in the recess 26 with the opening of the recess 26 directed upward.
- the mounting substrate 16 is bonded to the transparent sealing member 20 with the optical element 12 facing downward so as to close the opening of the recess 26.
- part of the refractive index matching agent 28 (volume integral of the optical element 12) is discharged to the outside through the groove 30 and the air bubble 34 is also released to the outside at the time of the above-mentioned bonding Become.
- the mixing of the air bubble 34 into the refractive index matching agent 28 can be suppressed, and the effect by the refractive index matching agent 28 (suppression of surface reflection) is realized. And the performance of the optical component 10 can be improved.
- a plurality of grooves 30 are radially formed as shown in FIGS. 2A to 2F and the like.
- the projected area of the transparent sealing member 20 in the portion joined to the mounting substrate 16 with respect to the bottom surface of the optical component 10 is A
- the projected area of the groove 30 with respect to the bottom surface of the optical component 10 is B. It is preferable that (B / A) ⁇ 100 is 5% or more and 30% or less.
- the projected area A refers to the area of the portion to be bonded to the mounting substrate 16 when the groove 30 is not formed.
- the height hc (maximum depth) of the groove 30 is preferably smaller than the thickness hd of the optical element 12. If the height hc of the groove 30 is too large, the air bubble 34 (see FIG. 3B) remains around the optical element 12. If the height hc of the groove 30 is too small, the air bubble 34 will not easily come out of the groove 30 when the transparent sealing member 20 and the mounting substrate 16 are bonded.
- the thickness hd of the optical element 12 is 100 to 1000 ⁇ m
- the height hc of the groove 30 is preferably 50 to 600 ⁇ m.
- optical component 10 Next, some variations of the optical component 10 will be described with reference to FIGS. 6A-11B.
- the first optical component 10A has substantially the same configuration as the above-described optical component 10, but as shown in FIGS. 6A and 6B, the concave portion of the portion of the transparent sealing member 20 to be bonded to the mounting substrate 16 The difference is that a frame-like step 40 communicating with the recess 26 is formed around the periphery 26.
- the step 40 serves as a path for guiding the air bubble 34 to the groove 30, and the air bubble 34 is smoothly released to the outside.
- the groove 30 is formed in at least a portion of the mounting substrate 16 to be bonded to the transparent sealing member 20. Differ in that they are formed. That is, the difference is that the groove 30 does not exist in the transparent sealing member 20 and the groove 30 is formed in the mounting substrate 16.
- a plurality of grooves 30 are formed from the portion of the upper surface 16 a of the mounting substrate 16 on which the optical element 12 is mounted to the outer periphery of the mounting substrate 16. Also in this case, it is preferable to form the plurality of grooves 30 radially (see FIGS. 2A to 2F).
- the transparent sealing member 20 and the mounting substrate 16 are bonded in such a manner that the optical element 12 is embedded in the recess 26 filled with the refractive index matching agent 28, the refractive index While a part of the alignment agent 28 is discharged to the outside through the groove 30 formed in the mounting substrate 16, the air bubble 34 is also released to the outside.
- the third optical component 10C has substantially the same configuration as the above-described optical component 10, but as shown in FIG. That is, the transparent sealing member 20 is integrally formed with the lens body 24 and the pedestal 44 whose outer shape is, for example, rectangular or circular.
- a recess 42 for housing the optical element 12 is formed not on the base 44 of the transparent sealing member 20 but on the mounting substrate 16. That is, the mounting substrate 16 has a recess 42 with an upper surface opening, and the optical element 12 is mounted on the bottom of the recess 42.
- a plurality of grooves 30 are formed in the frame-like upper end portion of the mounting substrate 16. Also in this case, it is preferable to form the plurality of grooves 30 radially.
- the refractive index matching agent While a part of 28 is discharged to the outside through the groove 30 formed in the mounting substrate 16, the air bubble 34 also escapes to the outside.
- the fourth optical component 10D has substantially the same configuration as the above-described third optical component 10C, but as shown in FIG. 9, a bulging portion 46 is formed at the central portion of the lower surface of the pedestal 22. It differs in the point.
- the area of the bulging portion 46 when viewed from above is smaller than the opening area of the recess 42 of the mounting substrate 16.
- the refractive index matching agent 28 moves laterally outward by the volume integral of the bulging portion 46 rather than the third optical component 10C, the air bubble 34 also easily moves outward, and the air bubble 34 34 can be discharged to the outside smoothly.
- the fifth optical component 10E is different in that the plurality of optical components 10 described above are arranged in an array.
- the transparent sealing member 20 is configured by integrally arranging a plurality of lens bodies 24 in a matrix, for example, on one pedestal 22. Recesses 26 (see FIG. 10B) are formed in the pedestal 22 corresponding to the lens bodies 24 respectively. A plurality of grooves 30 are formed in a portion of the pedestal 22 to be bonded to the mounting substrate 16.
- the plurality of grooves 30 have a plurality of second grooves 30 b communicating with the first grooves 30 a in addition to the plurality of first grooves 30 a communicating with the concave portion 26 of the transparent sealing member 20.
- the first groove 30 a and the second groove 30 b are respectively formed up to the outer periphery of the pedestal 22.
- the discharge directions of the excess refractive index matching agent 28 flowing through the first groove 30a in the vicinity of the array center in the transparent sealing member 20 interfere with each other, and the refractive index matching is performed.
- the flow of the agent 28 is delayed.
- the air bubble 34 is likely to remain in the recess 26 in the portion where the flow is stagnant.
- the remaining refractive index matching agent 28 flowing through the first groove 30a is discharged from the recess 26 of each transparent sealing member 20 through the second groove 30b, so that air bubbles to the recess 26 can be obtained. 34 can be suppressed.
- the sixth optical component 10F has substantially the same configuration as the fifth optical component 10E described above, but, for example, a plurality of third optical components 10C (see FIG. 8) Are different in that they are arranged in an array.
- the transparent sealing member 20 is configured by integrally arranging a plurality of lens bodies 24 in a matrix, for example, on one pedestal 22. Recesses 42 (see FIG. 11B) are formed in the mounting substrate 16 corresponding to the lens bodies 24 respectively. A plurality of grooves 30 are formed in a portion of the mounting substrate 16 to be joined to the pedestal 22 of the transparent sealing member 20.
- the plurality of grooves 30 in addition to the plurality of first grooves 30a in communication with the concave portion 42 of the mounting substrate 16, the plurality of grooves 30 have a plurality of second grooves 30b in communication with the first grooves 30a.
- the first groove 30 a and the second groove 30 b are formed up to the outer periphery of the mounting substrate 16 respectively.
- the remaining refractive index matching agent 28 flowing through the first groove 30a is discharged from each recess 42 of the mounting substrate 16 through the second groove 30b.
- the mixing of the air bubbles 34 into the respective recesses 42 can be suppressed.
- optical component and the transparent sealing member according to the present invention are, of course, not limited to the above embodiment, and various configurations can be adopted without departing from the scope of the present invention.
Abstract
Description
Claims (14)
- 少なくとも1つの光学素子(12)と、
前記光学素子(12)が収容されるパッケージ(14)と、を有し、
前記パッケージ(14)は、
前記光学素子(12)が実装される実装基板(16)と、
前記実装基板(16)上に接合される透明封止部材(20)と、
前記実装基板(16)に実装された前記光学素子(12)を囲む凹部(26)と、
前記凹部(26)内に充填された屈折率整合剤(28)と、を有し、
前記パッケージ(14)は、前記凹部(26)から外部に連通する少なくとも1つの溝(30)を有することを特徴とする光学部品。 - 請求項1記載の光学部品において、
前記透明封止部材(20)のうち、前記実装基板(16)と接合する部分に前記溝(30)が形成されていることを特徴とする光学部品。 - 請求項1又は2記載の光学部品において、
前記実装基板(16)のうち、少なくとも前記透明封止部材(20)と接合する部分に前記溝(30)が形成されていることを特徴とする光学部品。 - 請求項1~3のいずれか1項に記載の光学部品において、
複数の前記溝(30)を有し、
複数の前記溝(30)は、放射状に形成されていることを特徴とする光学部品。 - 請求項1~4のいずれか1項に記載の光学部品において、
前記透明封止部材(20)と前記実装基板(16)とが接合する部分のうち、前記凹部(26)の周囲に、前記凹部(26)に連通する段差(40)が形成されていることを特徴とする光学部品。 - 請求項1~5のいずれか1項に記載の光学部品において、
前記透明封止部材(20)と前記実装基板(16)とが接合する部分の前記光学部品(10)の底面に対する投影面積をA、前記溝(30)の前記光学部品(10)の底面に対する投影面積をBとしたとき、(B/A)×100が5%以上30%以下であることを特徴とする光学部品。 - 請求項1~6のいずれか1項に記載の光学部品において、
前記溝(30)の高さ(hc)は、前記光学素子(12)の厚み(hd)より小さいことを特徴とする光学部品。 - 請求項1~7のいずれか1項に記載の光学部品において、
前記透明封止部材(20)が石英ガラス又は光学ガラスにて構成され、前記屈折率整合剤(28)がシリコーン樹脂又はフッ素樹脂であることを特徴とする光学部品。 - 少なくとも1つの光学素子(12)と、前記光学素子(12)が実装された実装基板(16)と、前記実装基板(16)に実装された前記光学素子(12)を囲む凹部(26)と、を有する光学部品(10)に用いられ、前記実装基板(16)と共に前記光学素子(12)を収容するパッケージ(14)を構成する透明封止部材(20)であって、
前記透明封止部材(20)は、
前記凹部(26)に屈折率整合剤(28)が充填された状態で前記実装基板(16)に接合されるものであって、
前記実装基板(16)と接合する部分に前記凹部(26)から外部に連通する少なくとも1つの溝(30)を有することを特徴とする透明封止部材。 - 請求項9記載の透明封止部材において、
複数の前記溝(30)を有し、
複数の前記溝(30)は、放射状に形成されていることを特徴とする透明封止部材。 - 請求項9又は10記載の透明封止部材において、
前記実装基板(16)と接合する部分のうち、前記凹部(26)の周囲に、前記凹部(26)に連通する段差(40)が形成されていることを特徴とする透明封止部材。 - 請求項9~11のいずれか1項に記載の透明封止部材において、
前記実装基板(16)と接合する部分の前記光学部品(10)の底面に対する投影面積をA、前記溝(30)の前記光学部品(10)の底面に対する投影面積をBとしたとき、(B/A)×100が5%以上30%以下であることを特徴とする透明封止部材。 - 請求項9~12のいずれか1項に記載の透明封止部材において、
前記溝(30)の高さ(hc)は、前記光学素子(12)の厚み(hd)より小さいことを特徴とする透明封止部材。 - 請求項9~13のいずれか1項に記載の透明封止部材において、
前記透明封止部材(20)が石英ガラス又は光学ガラスにて構成され、前記屈折率整合剤(28)がシリコーン樹脂又はフッ素樹脂であることを特徴とする透明封止部材。
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DE112017007951.9T DE112017007951T5 (de) | 2017-08-30 | 2017-08-30 | Optische komponente und transparentes einkapselungselement |
KR1020207006029A KR20200040788A (ko) | 2017-08-30 | 2017-08-30 | 광학 부품 및 투명 밀봉 부재 |
CN201780094531.3A CN111052420A (zh) | 2017-08-30 | 2017-08-30 | 光学部件及透明密封部件 |
PCT/JP2017/031211 WO2019043844A1 (ja) | 2017-08-30 | 2017-08-30 | 光学部品及び透明封止部材 |
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