WO2019033708A1 - 转移装置及微型发光二极管的转移方法 - Google Patents

转移装置及微型发光二极管的转移方法 Download PDF

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Publication number
WO2019033708A1
WO2019033708A1 PCT/CN2018/073292 CN2018073292W WO2019033708A1 WO 2019033708 A1 WO2019033708 A1 WO 2019033708A1 CN 2018073292 W CN2018073292 W CN 2018073292W WO 2019033708 A1 WO2019033708 A1 WO 2019033708A1
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Prior art keywords
transfer
emitting diode
micro light
light emitting
magnetic field
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PCT/CN2018/073292
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English (en)
French (fr)
Inventor
赵芬利
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US15/761,810 priority Critical patent/US10361338B2/en
Publication of WO2019033708A1 publication Critical patent/WO2019033708A1/zh
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0608—Gripping heads and other end effectors with vacuum or magnetic holding means with magnetic holding means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3204—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a transfer device and a method for transferring a miniature light emitting diode.
  • Magnetorheological fluid is a new type of intelligent fluid material. Under the action of the magnetic field, the MRF can be instantaneously transformed into a solid-like state. When the external magnetic field is removed, the MRF can quickly return to the liquid state. It is precisely because of this unique property of MRF that it is widely used in the field of precision machining.
  • micro LED In the field of miniature LED display (Micro LED), in order to fabricate a light-emitting diode display, it is necessary to transfer the micro-light-emitting diodes from the original substrate to the receiving substrate in an array, involving a huge amount of micro-light-emitting diodes with precise transfer problems.
  • the micro light-emitting diode In the prior art, the micro light-emitting diode is generally adsorbed onto the transfer head by electrostatic adsorption and transferred to the receiving substrate.
  • the adsorption force of the electrostatic adsorption is small, so that the micro light-emitting diode is easily damaged during the transfer process, and the transfer is difficult.
  • the efficiency of electrostatic adsorption is low.
  • the invention provides a transfer device and a transfer method of a micro light-emitting diode, which reduces the difficulty of transferring the micro light-emitting diode and improves the transfer efficiency.
  • the transfer device includes a moving portion and a transfer head movably coupled to the moving portion, the transfer head including a housing, a magnetorheological fluid filled in the housing, and an electromagnetic device disposed on the housing
  • the electromagnetic device generates a magnetic field, the magnetorheological fluid is located in the magnetic field, and the outer casing includes a liquid outlet, and the magnetorheological fluid flows out from the liquid outlet.
  • the electromagnetic device comprises an electromagnet or an electromagnetic coil, and a control unit electrically connected to the electromagnet or the electromagnetic coil, and the control unit controls the generation and elimination of the magnetic field of the electromagnet or the electromagnetic coil, and controls The electromagnet or electromagnetic coil generates a magnitude and time of a magnetic field.
  • the electromagnet or the electromagnetic coil is disposed inside or outside the outer casing.
  • the electromagnet or the electromagnetic coil is the outer casing.
  • the magnetorheological fluid is in a liquid state in a natural state, and is solid under the action of the magnetic field.
  • the invention also provides a micro light emitting diode transfer method, comprising:
  • the electromagnetic device Controlling the liquid state, the electromagnetic device generates a magnetic field, the magnetorheological fluid changes from a liquid state to a solid state, and the micro light emitting diode and the transfer head are adhered by the magnetorheological fluid;
  • the magnetic field generated by the electromagnetic device is eliminated, and the magnetorheological fluid changes from a solid state to a liquid state to separate the micro light emitting diode from the transfer head.
  • the power supply of the electromagnetic device is controlled by a control unit electrically connected to the electromagnetic device to realize generation and elimination of a magnetic field of the electromagnetic device.
  • the distance between the liquid outlet hole of the transfer head and the micro light-emitting diode on the first substrate is 1 ⁇ m - 3 ⁇ m.
  • the transfer head is a plurality of, and the plurality of transfer heads simultaneously transfer a plurality of the light emitting diodes.
  • the transfer device and the method for transferring a micro light-emitting diode according to the present invention are characterized in that a magnetorheological fluid is filled in a casing of the transfer head, and a state of the magnetorheological fluid is controlled by the electromagnetic device.
  • the magnetorheological fluid When the transfer head is close to the micro light emitting diode, the magnetorheological fluid is in a liquid state and covers the micro light emitting diode; then the magnetorheological fluid is controlled to be solid, thereby realizing the micro light emitting diode and Transferring the connection of the head; transferring the micro light-emitting diode to the second substrate, and eliminating the magnetic field of the electromagnetic device, separating the micro light-emitting diode from the transfer head, thereby implementing the micro-light-emitting diode
  • the first substrate is transferred onto the second substrate.
  • the micro light emitting diode and the transfer head are physically connected by the magnetorheological fluid, thereby increasing the force between the micro light emitting diode and the transfer head, thereby preventing the The micro-light-emitting diode is damaged during the transfer process, thereby reducing the difficulty of transfer and increasing the transfer efficiency of the micro-light-emitting diode.
  • FIG. 1 is a schematic view of a transfer head according to an embodiment of the present invention.
  • FIG. 2 is a flow chart showing a transfer process of a miniature light emitting diode according to an embodiment of the present invention
  • FIGS. 3-6 are schematic diagrams showing steps of a transfer process of a miniature light emitting diode according to an embodiment of the invention.
  • the present invention provides a transfer device that can be used to transfer various micro-components such as a chip, a micro-substrate, and a patch.
  • the transfer device is mainly used for transferring the micro light emitting diode during the fabrication process of the miniature light emitting diode display.
  • the present invention provides a transfer device 100.
  • the transfer device 100 is configured to transfer the micro LEDs 210 disposed on the first substrate 220 onto the second substrate 230.
  • the first substrate 220 is an original substrate
  • the micro LED 210 is on the first substrate 220
  • the second substrate 230 is a receiving substrate on which the micro LED 210 is to be used.
  • the transfer device 100 includes a moving portion (not shown) and a transfer head movably coupled to the moving portion.
  • the moving head can drive the transfer head to realize the movement on the horizontal surface of the transfer head.
  • the transfer head is movably connected to the moving portion, and the transfer head is capable of moving on a vertical plane with respect to the moving portion.
  • the transfer head may be plural, a plurality of the transfer heads are spaced apart, and the plurality of transfer heads are connected to the moving portion.
  • Each of the transfer heads can transfer one of the micro light emitting diodes 210. Therefore, the plurality of transfer heads can simultaneously realize the transfer of a plurality of the miniature light emitting diodes 210.
  • the transfer head includes a housing 10, a magnetorheological fluid 20 filled in the housing 10, and an electromagnetic device 30 disposed on the housing 10.
  • the outer casing 10 is a hollow member including a cavity 11.
  • the outer casing 10 includes a cylindrical portion and a conical portion connected to the cylindrical portion, the cylindrical portion being disposed coaxially with the conical portion, and having a bottom surface of the same size.
  • a liquid outlet hole 12 is disposed at a top end of the conical portion of the outer casing 10, and the cavity 11 communicates with the outside through the liquid outlet hole 12.
  • a control switch is further disposed on the outer casing 10, and the control switch is adjacent to the liquid outlet 12 to control whether the magnetorheological fluid 20 is discharged from the outlet through the control switch.
  • the liquid hole 12 flows out. Specifically, when the magnetorheological fluid 20 is required to flow out from the liquid outlet hole 12, the control switch is turned on; when the magnetorheological fluid 20 is not required to flow out from the liquid outlet hole 12, Turn off the control switch.
  • the magnetorheological fluid 20 is filled in the cavity 11 of the outer casing 10.
  • the magnetorheological fluid 20 is in a liquid state in a natural state, and can be instantaneously converted from a liquid state to a solid state by the magnetic field.
  • the magnetorheological fluid can flow out of the outlet hole in the absence of a magnetic field.
  • the electromagnetic device 30 includes an electromagnet or an electromagnetic coil, and a control unit electrically connected to the electromagnet or the electromagnetic coil.
  • the electromagnet or the electromagnetic coil can generate a magnetic field under energized conditions, and the magnetic field generated by the electromagnetic coil disappears in the case of power failure.
  • the electromagnetic device 30 includes an electromagnetic coil wound around an outer wall of the outer casing 10 such that the magnetorheological fluid 20 is located in a magnetic field generated by the electromagnetic coil, thereby The magnetic field generated by the electromagnetic coil controls the state of the magnetorheological fluid.
  • the electromagnetic coil can also be disposed in the cavity 11 of the outer casing 10, such as on the inner wall of the outer casing 10.
  • the electromagnetic coil or the electromagnet may also directly serve as the outer casing 10 of the transfer head, so that the state of the magnetorheological fluid 20 can be better controlled.
  • the electromagnetic device 30 further includes a control unit that is coupled to the magnetic coil or electromagnet.
  • the on/off of the electromagnet or the electromagnetic coil is controlled by the control unit, thereby controlling the generation and elimination of the magnetic field of the electromagnet or the electromagnetic coil.
  • the control unit controls the magnitude of the electric energy that is supplied to the electromagnet or the electromagnetic coil and the energization time, and can control the strength of the magnetic field generated by the electromagnet or the electromagnetic coil and the length of time the magnetic field is generated.
  • the control unit controls the electromagnet or the electromagnetic coil to be always in an energized state, thereby ensuring the outer casing of the transfer head.
  • the magnetorheological fluid in 10 is solid, preventing the magnetorheological fluid from flowing out of the outer casing 10 of the transfer head.
  • the housing 10 of the transfer device 100 is provided with a control switch, and the control unit can also be used when the transfer device 100 is not required to transfer the micro LEDs 210.
  • the electromagnet or the electromagnetic coil is controlled to be in a power-off state, and the magneto-rheological fluid is prevented from flowing out of the outer casing 10 of the transfer head by closing the control switch, thereby achieving the purpose of saving power.
  • the transfer head When the micro light emitting diode 210 is transferred, the transfer head is moved to the position of the micro light emitting diode 210 on the first substrate 220 to be transferred by the moving portion, and the moving head is adjusted to be close to the micro
  • the light emitting diode 210 causes the magnetorheological fluid in a liquid state to flow onto the micro light emitting diode 210 and partially cover the micro light emitting diode 210.
  • the distance between the liquid outlet hole 12 of the transfer head and the micro light emitting diode 210 on the first substrate 220 is 1 ⁇ m - 3 ⁇ m.
  • the electromagnetic device is controlled by the control unit to generate a magnetic field, so that the magnetorheological fluid 20 changes from a liquid state to a solid state, thereby achieving connection of the micro light emitting diode 210 to the transfer head.
  • the moving portion is moved to the position of the second substrate 230 again, and the transfer head is moved in the vertical direction until the micro light emitting diode 210 moves onto the second substrate 220.
  • the magnetic field of the electromagnetic device is again removed by the control device, and the micro light emitting diode 210 is separated from the transfer head, thereby transferring the micro light emitting diode 210 from the first substrate 220 to the second substrate. 230 on.
  • the magnetorheological fluid remaining on the micro light emitting diode 210 can also be processed by a simple processing method. 20 is removed and recovered, such as by the air knife, the magnetorheological fluid 20 remaining on the micro light-emitting diode 210 is blown into a collection tank, and the collected magnetorheological fluid 20 can be further processed. Recycling, reducing waste and reducing costs.
  • the present invention further provides a method for transferring a miniature light emitting diode 210, including:
  • Step 201 referring to FIG. 3, the above-mentioned transfer device 100 is provided, the transfer head of the transfer device is moved to the micro light-emitting diode 210 on the first substrate 220, and the liquid discharge hole 12 of the transfer head is brought close to The miniature light emitting diode 210 is described.
  • the transfer head is moved by the moving portion to a position of the micro light emitting diode 210 on the first substrate 220 that needs to be transferred, and the moving head is adjusted to be close to the micro light emitting diode 210, and the transfer is performed.
  • the liquid outlet hole 12 of the head is adjacent to the micro light emitting diode 210.
  • the distance between the liquid outlet hole 12 of the transfer head and the micro light emitting diode 210 on the first substrate 220 is 1 ⁇ m - 3 ⁇ m.
  • a plurality of the transfer heads may be disposed, and a plurality of the light emitting diodes 210 are simultaneously transferred through a plurality of the transfer heads.
  • the electromagnet or the electromagnetic coil of the electromagnetic device 30 is in an energized state, so that the magnetorheological fluid 20 at this time is in a solid state, so that it does not flow out from the liquid outlet hole 12.
  • the housing 10 of the transfer head is provided with a control switch, and the electromagnet or the electromagnetic coil may be in a power-off state, and the magnetorheological fluid is prevented from being The liquid outlet hole 12 flows out.
  • Step 202 referring to FIG. 4, the magnetorheological fluid 20 flows out of the liquid outlet hole 12 and covers the micro light emitting diode 210.
  • the control switch is directly opened to cause the magnetorheological fluid to flow out of the liquid outlet 12.
  • the magnetorheological fluid 20 only needs to partially cover the micro light emitting diode 210, thereby minimizing the use of the magnetorheological fluid 20 while ensuring the connection strength between the micro light emitting diode 210 and the connector.
  • Step 203 controlling the electromagnetic device 30 to generate a magnetic field, changing the magnetorheological fluid 20 from a liquid state to a solid state, and the micro light emitting diode 210 and the transfer head are adhered by the magnetorheological fluid 20.
  • the electromagnetic device 30 is energized by the control unit, so that the electromagnetic device 30 generates a magnetic field and controls the magnitude of the electric energy that is passed to control the strength of the magnetic field generated by the electromagnetic device 30.
  • the magnetorheological fluid 20 Reacted from the liquid state to the solid state by the magnetic field, that is, the micro light-emitting diode 210 and the transfer head are connected by the magneto-rheological fluid in a solid state, such that the micro-light-emitting diode 210 and the transfer head pass through the solid magnetic body.
  • the rheological fluid realizes a physical connection, thereby increasing the force between the micro light emitting diode 210 and the transfer head, preventing damage during the transfer of the micro light emitting diode 210, and reducing the difficulty of transferring the micro light emitting diode 210. .
  • Step 204 Referring to FIG. 5, the micro LED 210 is moved to the second substrate 230.
  • the transfer head of the micro light-emitting diode 210 is fixed to the position of the second substrate 230 by the moving portion, and the movement of the micro light-emitting diode 210 is driven by the movement of the transfer head. And moving the transfer head in the vertical direction to move the micro light emitting diode 210 onto the second substrate 220.
  • Step 205 referring to FIG. 6, the magnetic field generated by the electromagnetic device 30 is eliminated, and the magnetorheological fluid 20 changes from a solid state to a liquid state, and the micro light emitting diode 210 is separated from the transfer head.
  • the electromagnetic device 30 is powered off by the control unit or the amount of electricity that is passed into the electromagnetic device 30 is reduced, and the magnetic field generated by the electromagnetic device 30 is eliminated or reduced, thereby causing the magnetorheological fluid 20 to be solid.
  • the liquid crystal is turned into a state, and the micro light emitting diode 210 is separated from the transfer head, and the micro light emitting diode 210 is transferred onto the second substrate 230.
  • the micro light emitting diode 210 and the transfer head are physically connected by the magnetorheological fluid 20, and the micro light emitting diode 210 is added to the transfer.
  • the force between the heads prevents damage during transfer of the micro-light-emitting diodes 210, thereby reducing the difficulty of transfer.
  • the transfer operation of the micro light emitting diode 210 can be simplified, and the transfer efficiency of the micro light emitting diode 210 can be improved.

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Abstract

一种转移装置（100）及微型发光二极管（210）的转移方法。在所述微型发光二极管（210）的转移过程时，通过控制磁流变液（20）的状态实现所述微型发光二极管（210）与转移头之间进行物理连接，从而增加所述微型发光二极管（210）与所述转移头之间的作用力，进而防止所述微型发光二极管（210）转移过程中的损坏，从而降低所述微型发光二极管（210）的转移难度。并且，通过简单的电磁装置（30）控制所述微型发光二极管（210）与所述转移头的连接与分离，简化所述微型发光二极管（210）的转移操作，提高所述微型发光二极管（210）的转移效率。

Description

转移装置及微型发光二极管的转移方法 技术领域
本发明涉及显示技术领域，尤其涉及一种转移装置及微型发光二极管的转移方法。
背景技术
磁流变液(MRF)是一种新型智能流体材料。在磁场作用下，MRF可由液态瞬间转变为类固态，当外加磁场撤去后，MRF又能迅速的恢复到液体状态；正是由于MRF的这种独特的性质，使其广泛应用于精密加工领域。
在微型发光二极管显示(Micro LED)领域，为了制作发光二极管显示器，需要把微型发光二极管从原始衬底转移到接收基板排列成阵列，涉及巨量且微型发光二级管精确转移问题。现有技术中，一般通过静电吸附的方式将所述微型发光二极管吸附至转移头上，并转移至接收基板上。但是，静电吸附的吸附力较小，使得转移过程中容易损坏所述微型发光二极管，从而转移难度较大。并且，静电吸附的效率较低。
发明内容
本发明的提供一种转移装置及微型发光二极管的转移方法，降低所述微型发光二极管转移难度，提高转移效率。
所述转移装置包括包括移动部及与所述移动部活动连接的转移头，所述转移头包括外壳、填充于所述外壳内的磁流变液，及设于所述外壳上的电磁装置，所述电磁装置产生磁场，所述磁流变液位于所述磁场内，所述外壳包括一出液孔，所述磁流变液从所述出液孔流出。
其中，所述电磁装置包括电磁铁或者电磁线圈，及与所述电磁铁或者电磁线圈进行电连接的控制单元，通过所述控制单元控制所述电磁铁或电磁线圈磁场的产生与消除，并控制所述电磁铁或电磁线圈产生磁场的大小及时间。
其中，所述电磁铁或所述电磁线圈设于所述外壳的内部或外部。
其中，所述电磁铁或所述电磁线圈为所述外壳。
其中，所述磁流变液自然状态下为液态，在所述磁场作用下为固态。
其中，所述转移头有多个，多个所述转移头间隔设置。
本发明还提供一种微型发光二极管转移方法，包括：
提供上述的转移装置；
将所述转移装置的转移头移动至第一基板上的微型发光二极管处，并将所述转移头的出液孔靠近所述微型发光二极管；控制液态的所述磁流变液从所述出液孔流出并包覆所述微型发光二极管；
控制液态的控制所述电磁装置产生磁场，使所述磁流变液由液态变为固态，所述微型发光二极管与所述转移头通过所述磁流变液进行粘连；
移动所述微型发光二极管至第二基板；
消除所述电磁装置产生的磁场，所述磁流变液由固态变为液态，以使所述微型发光二极管与所述转移头分离。
其中，通过与所述电磁装置电连接的控制单元控制所述电磁装置的通断电，以实现所述电磁装置的磁场的产生与消除。
其中，所述转移头的出液孔靠近所述第一基板上的微型发光二极管时，所述转移头的出液孔与所述第一基板上的微型发光二极管的距离为1μm-3μm。
其中，所述转移头为多个，多个所述转移头同时转移多个所述发光二极管。
本发明提供的所述转移装置及微型发光二极管的转移方法，通过在所述转移头的外壳内填充磁流变液，并通过所述电磁装置控制所述磁流变液的状态。使得所述转移头靠近所述微型发光二极管时，所述磁流变液为液态，并包覆所述微型发光二极管；随后控制所述磁流变液为固态，从而实现所述微型发光二极管与转移头的连接；再将所述微型发光二极管转移至所述第二基板上，并消除所述电磁装置的磁场，使所述微型发光二极管与转移头分离，从而实现所述微型发光二极管从所述第一基板转移至所述第二基板上。所述微型发光二极管的转移过程中，所述微型发光二极管与转移头之间通过所述磁流变液进行物理连接，增加所述微型发光二极管与转移头之间的作用力，进而防止所述微型发光二极管转移过程中的损坏，从而降低转移难度，并增加所述微型发光二极管的转移效率。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明实施例所述转移头示意图；
图2是本发明实施例所述微型发光二极管的转移过程的流程图；
图3-图6是本发明实施例所述微型发光二极管的转移过程各步骤示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本发明提供一种转移装置，所述转移装置可以用于转移芯片、微型基板、贴片等各种微型件。本实施例中，所述转移装置主要用于在微型发光二极管显示器的制作过程中所述微型发光二极管的转移。
请参阅图1，本发明提供一种转移装置100。本实施例中，所述转移装置100用于将设于第一基板220上的微型发光二极管210转移至第二基板230上。其中，所述第一基板220为原始衬底基板，所述微型发光二极管210在所述第一基板220；所述第二基板230为需要使用所述微型发光二极管210的接收基板。所述转移装置100包括移动部(图中未示出)及与所述移动部活动连接的转移头。通过所述移动部能够带动所述转移头实现所述转移头水平面上的移动。并且，所述转移头与所述移动部为活动连接，所述转移头能够相对所述移动部实现竖直面上的移动。所述转移头可以为多个，多个所述转移头间隔排列，且所述多个转移头均与所述移动部连接。每个所述转移头均可以转移一个所述微型发光二极管210，因此，所述多个转移头能同时是实现多个所述微型发光二极管210的转移。所述转移头包括外壳10、填充于所述外壳10内的磁流变液20，及设于所述外壳10上的电磁装置30。
所述外壳10为一空腔件，包括空腔11。所述外壳10包括圆柱部分及与所述圆柱部分连接的圆锥部分，所述圆柱部分与所述圆锥部分同轴设置，且其底面大小相同。所述外壳10的所述圆锥部分的顶端上设有一出液孔12，所述空腔11通过所述出液孔12与外界连通。本发明另一实施例中，所述外壳10上还设置有一控制开关，所述控制开关靠近所述出液孔12，以通过所述控制开关控制所述磁流变液20是否从所述出液孔12流出。具体的，当需要所述磁流变液20是否从所述出液孔12流出时，开启所述控制开关；当不需要所述磁流变液20是否从所述出液孔12流出时，关闭所述控制开关。
所述磁流变液20填充于所述外壳10的所述空腔11内。所述磁流变液20自然状态下为液态，在所述磁场作用下能够由液态瞬间转变为固态。在没有磁场的作用时，所述磁流变液能够从所述出液孔流出。所述电磁装置30包括电磁铁或者电磁线圈，及与所述电磁铁或者电磁线圈进行电连接的控制单元。所述电磁铁或者电磁线圈在通电条件下能够产生磁场，断电情况下，所述电磁线圈产生的磁场消失。本实施例中，所述电磁装置30包括电磁线圈，所述电磁线圈缠绕于所述外壳10的外壁，使得所述磁流变液20位于所述电磁线圈产生的磁场内，从而使得通过控制所述电磁线圈产生的磁场控制所述磁流变液的状态。可以理解的是，所述电磁线圈还可以设于所述外壳10的空腔11内，如设于所述外壳10的内壁。或者，在本发明其它的实施例中，所述电磁线圈或者电磁铁还可以直接作为所述转移头的外壳10，从而能够更好控制所述磁流变液20的状态。
所述电磁装置30还包括控制单元，所述控制单元与所述磁线圈或者电磁铁相连。通过所述控制单元控制所述电磁铁或电磁线圈的通断电，从而控制所述电磁铁或电磁线圈的磁场的产生与消除。进一步的，通过所述控制单元控制通入所述电磁铁或者电磁线圈的电量的大小及通电时间，能够对所述电磁铁或电磁线圈产生的磁场强度及磁场产生的时间长短进行控制。本实施例中，在不需要使用所述转移装置100进行所述微型发光二极管210的转移时，所述控制单元控制所述电磁铁或电磁线圈一直处于通电状态，从而保证所述转移头的外壳10内的磁流变液为固态，防止所述磁流变液从所述转移头的外壳10内流出。本发明另一实施例中，所述转移装置100的所述外壳10上设有一控制开关， 在不需要使用所述转移装置100进行所述微型发光二极管210的转移时，所述控制单元也可控制所述电磁铁或电磁线圈一直处于断电状态，通过关闭所述控制开关防止所述磁流变液从所述转移头的外壳10内流出，从而达到节约电源的目的。
转移所述微型发光二极管210时，通过所述移动部带动所述转移头移动至所述第一基板220上需要转移的所述微型发光二极管210的位置，并调整所述移动头靠近所述微型发光二极管210，使得处于液体状态的所述磁流变液流至所述微型发光二极管210上并部分包覆所述微型发光二极管210。本实施例中，所述移动头靠近所述微型发光二极管210时，所述转移头的出液孔12与所述第一基板220上的微型发光二极管210的距离为1μm-3μm。随后，通过所述控制单元控制所述电磁装置产生磁场，使得所述磁流变液20从液态变为固态，从而实现所述微型发光二极管210与转移头的连接。再次移动所述移动部至所述第二基板230位置，并使所述转移头在竖直方向进行移动，至所述微型发光二极管210移动至所述第二基板220上。再次通过所述控制装置消除所述电磁装置的磁场，使所述微型发光二极管210与所述转移头分离，从而实现所述微型发光二极管210从所述第一基板220转移至所述第二基板230上。并且，在所述微型发光二极管210从所述第一基板220转移至所述第二基板230上后，还可以通过简单的处理方式将所述微型发光二极管210上残留的所述磁流变液20进行去除并回收，如通过风刀将所述微型发光二极管210上残留的所述磁流变液20吹至一收集罐中，并能将收集得到的所述磁流变液20进行进一步的回收利用，减少废气物并降低成本。
请参阅图2，本发明还提供一种微型发光二极管210的转移方法，包括：
步骤201、请参阅图3，提供上述的转移装置100，将所述转移装置的转移头移动至第一基板220上的微型发光二极管210处，并使所述转移头的出液孔12靠近所述微型发光二极管210。
通过所述移动部带动所述转移头移动至所述第一基板220上需要转移的所述微型发光二极管210的位置，并调整所述移动头靠近所述微型发光二极管210，并使所述转移头的出液孔12靠近所述微型发光二极管210。本实施例中，所述移动头靠近所述微型发光二极管210时，所述转移头的出液孔12与所述 第一基板220上的微型发光二极管210的距离为1μm-3μm。可以理解的是，当需要同时转移多个所述微型发光二极管210时，可以设置多个所述转移头，通过多个所述转移头同时转移多个所述发光二极管210。本实施例中，此时所述电磁装置30的电磁铁或电磁线圈处于通电状态，使得此时的所述磁流变液20为固态，从而不会从所述出液孔12处流出。本发明另一实施例中，所述转移头的外壳10上设有一控制开关，所述电磁铁或电磁线圈可以处于断电状态，通过关闭所述控制开关防止所述磁流变液从所述出液孔12处流出。
步骤202、请参阅图4，使所述磁流变液20从所述出液孔12流出并包覆所述微型发光二极管210。
控制所述电磁装置30的电磁铁或电磁线圈处于断电状态，使所述所述磁流变液20变为液体状态，使得所述磁流变液20自然从所述出液孔12流出并包覆所述微型发光二极管210。本发明另一实施例中，直接打开所述控制开关以使所述磁流变液从所述出液孔12处流出。所述磁流变液20只需部分包覆所述微型发光二极管210，从而在保证所述微型发光二极管210与连接头的连接强度的同时，尽量减少所述磁流变液20的使用。
步骤203、控制所述电磁装置30产生磁场，使所述磁流变液20由液态变为固态，所述微型发光二极管210与所述转移头通过所述磁流变液20进行粘连。
通过所述控制单元给所述电磁装置30进行通电，使得所述电磁装置30产生磁场并控制通入所述电量的大小控制所述电磁装置30产生磁场的强弱，所述磁流变液20受所述磁场的影响从液态变为固态，即所述微型发光二极管210与转移头通过固态的所述磁流变液进行连接，使得所述微型发光二极管210与转移头通过固态的所述磁流变液实现物理连接，进而使得所述微型发光二极管210与所述转移头之间的作用力增加，防止所述微型发光二极管210转移过程中的损坏，降低所述微型发光二极管210的转移难度。
步骤204、请参阅图5，移动所述微型发光二极管210至第二基板230。
通过所述移动部带动固定有所述微型发光二极管210的转移头至所述第二基板230位置，进而通过所述转移头的移动带动所述微型发光二极管210的移动。并使所述转移头在竖直方向进行移动，使所述微型发光二极管210 移动至所述第二基板220上。
步骤205、请参阅图6，消除所述电磁装置30产生的磁场，所述磁流变液20由固态变为液态，使所述微型发光二极管210与所述转移头分离。
通过所述控制单元给所述电磁装置30进行断电或者降低通入所述电磁装置30的电量，消除或减小所述电磁装置30产生的磁场，从而使得所述磁流变液20从固态变为液态，进而使所述微型发光二极管210与所述转移头分离，所述微型发光二极管210转移至所述第二基板230上。
本发明中，在所述微型发光二极管210的转移过程时，所述微型发光二极管210与转移头之间通过所述磁流变液20进行物理连接，增加所述微型发光二极管210与所述转移头之间的作用力，进而防止所述微型发光二极管210转移过程中的损坏，从而降低转移难度。并且，通过简单的电磁装置控制所述微型发光二极管210与所述转移头的连接与分离，能够简化所述微型发光二极管210的转移操作，提高所述微型发光二极管210的转移效率。
以上所揭露的仅为本发明一种较佳实施例而已，当然不能以此来限定本发明之权利范围，本领域普通技术人员可以理解实现上述实施例的全部或部分流程，并依本发明权利要求所作的等同变化，仍属于发明所涵盖的范围。

Claims (15)

  1. 一种转移装置，其中，包括移动部及与所述移动部活动连接的转移头，所述转移头包括外壳、填充于所述外壳内的磁流变液，及设于所述外壳上的电磁装置，所述电磁装置产生磁场，所述磁流变液位于所述磁场内，所述外壳包括一出液孔，所述磁流变液从所述出液孔流出。
  2. 如权利要求1所述的转移装置，其中，所述电磁装置包括电磁铁或者电磁线圈，及与所述电磁铁或者电磁线圈进行电连接的控制单元，通过所述控制单元控制所述电磁铁或电磁线圈磁场的产生与消除，并控制所述电磁铁或电磁线圈产生磁场的大小及时间。
  3. 如权利要求2所述的转移装置，其中，所述电磁铁或所述电磁线圈设于所述外壳的内部或外部。
  4. 如权利要求2所述的转移装置，其中，所述电磁铁或所述电磁线圈为所述外壳。
  5. 如权利要求1所述的转移装置，其中，所述磁流变液自然状态下为液态，在所述磁场作用下为固态。
  6. 如权利要求1所述的转移装置，其中，所述转移头有多个，多个所述转移头间隔设置。
  7. 一种微型发光二极管转移方法，其中，包括：
    提供转移装置，所述转移装置包括移动部及与所述移动部活动连接的转移头，所述转移头包括外壳、填充于所述外壳内的磁流变液，及设于所述外壳上的电磁装置，所述电磁装置产生磁场，所述磁流变液位于所述磁场内，所述外壳包括一出液孔，所述磁流变液从所述出液孔流出；
    将所述转移装置的转移头移动至第一基板上的微型发光二极管处，并将所述转移头的出液孔靠近所述微型发光二极管；
    控制液态的所述磁流变液从所述出液孔流出并包覆所述微型发光二极管；
    控制所述电磁装置产生磁场，使所述磁流变液由液态变为固态，以使所述微型发光二极管与所述转移头通过所述磁流变液进行粘连；
    移动所述微型发光二极管至第二基板；
    消除所述电磁装置产生的磁场，所述磁流变液由固态变为液态，使所述微型发光二极管与所述转移头分离。
  8. 如权利要求7所述的微型发光二极管转移方法，其中，通过与所述电磁装置电连接的控制单元控制所述电磁装置的通断电，以实现所述电磁装置的磁场的产生与消除。
  9. 如权利要求7所述的微型发光二极管转移方法，其中，所述转移头的出液孔靠近所述第一基板上的微型发光二极管时，所述转移头的出液孔与所述第一基板上的微型发光二极管的距离为1μm-3μm。
  10. 如权利要求7所述的微型发光二极管转移方法，其中，所述转移头为多个，多个所述转移头同时转移多个所述发光二极管。
  11. 如权利要求7所述的微型发光二极管转移方法，其中，所述电磁装置包括电磁铁或者电磁线圈，及与所述电磁铁或者电磁线圈进行电连接的控制单元，通过所述控制单元控制所述电磁铁或电磁线圈磁场的产生与消除，并控制所述电磁铁或电磁线圈产生磁场的大小及时间。
  12. 如权利要求11所述的微型发光二极管转移方法，其中，所述电磁铁或所述电磁线圈设于所述外壳的内部或外部。
  13. 如权利要求11所述的微型发光二极管转移方法，其中，所述电磁铁或所述电磁线圈为所述外壳。
  14. 如权利要求7所述的微型发光二极管转移方法，其中，所述磁流变液自然状态下为液态，在所述磁场作用下为固态。
  15. 如权利要求7所述的微型发光二极管转移方法，其中，所述转移头有多个，多个所述转移头间隔设置。
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