WO2019033560A1 - 一种基板预烘烤装置 - Google Patents

一种基板预烘烤装置 Download PDF

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Publication number
WO2019033560A1
WO2019033560A1 PCT/CN2017/107996 CN2017107996W WO2019033560A1 WO 2019033560 A1 WO2019033560 A1 WO 2019033560A1 CN 2017107996 W CN2017107996 W CN 2017107996W WO 2019033560 A1 WO2019033560 A1 WO 2019033560A1
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Prior art keywords
hot air
air curtain
side door
temperature
substrate
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PCT/CN2017/107996
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English (en)
French (fr)
Inventor
何恒忠
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Priority to US15/579,676 priority Critical patent/US10629854B2/en
Publication of WO2019033560A1 publication Critical patent/WO2019033560A1/zh
Anticipated expiration legal-status Critical
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/38—Treatment before imagewise removal, e.g. prebaking

Definitions

  • the invention relates to the field of display manufacturing processes and the like, and in particular to a substrate prebaking device.
  • OLED organic light-emitting diode
  • Pre-baking treatment method The glass substrate is placed on a constant temperature heating plate in a closed space for heating, and after the set heating time, the opening of the baking box is opened, and the robot takes out the substrate and puts it into the next substrate.
  • the external air will enter the baking box to cause a local temperature drop, causing the photoresist inside to condense on the cover layer, causing particles to affect the exposure effect of the product, and drying. Too low a local temperature in the oven can also cause local artifacts in the product to be developed. In addition, when the door is opened, the photoresist inside the solvent leaks out, causing air pollution.
  • the object of the present invention is to provide a substrate pre-baking device, which is provided with a hot air curtain system to form a hot air curtain that isolates the baking cavity from the external environment to improve the yield of the product.
  • a substrate pre-baking device comprising a baking box, the inside of which is a baking cavity, one side of the baking box body is provided with a side door opening; and a side door is mounted on the Side door opening; a heating mechanism disposed in the baking cavity; a hot air curtain system disposed at a side door of the baking box; and when the side door is opened, the hot air curtain system is configured to be formed at the side door opening The hot air curtain of the baking cavity and the external environment is isolated.
  • the hot air curtain system includes an air outlet disposed at an upper edge of the side door opening, a duct connected to the air outlet, and a heating tube disposed in the duct and connected to The controller, the fan, is disposed in the pipeline and connected to the controller.
  • the air outlet includes a first exhaust port located on a side of the side door opening adjacent to the baking cavity for forming a first hot air curtain; a second exhaust port; a side of the side door opening adjacent to the external environment for forming a second hot air curtain; wherein the first exhaust port is disposed side by side with the second exhaust port.
  • the wind speed of the second hot air curtain is smaller than the wind speed of the first hot air curtain.
  • the temperature of the second hot air curtain is less than the temperature of the first hot air curtain.
  • the temperature of the hot air curtain is consistent with the temperature in the baking cavity.
  • the substrate prebaking apparatus further includes a control system, the heating mechanism and the hot air curtain system signal are connected to the control system, and the control system is configured to detect the baking a real-time temperature of the cavity, and controlling a real-time temperature of the baking cavity by the heating mechanism and a real-time temperature for detecting the hot air curtain, and controlling the temperature of the hot air curtain by the hot air curtain system and using Controlling the wind speed of the hot air curtain.
  • the control system includes a first temperature sensor group disposed in the baking cavity for detecting real-time temperature information of the baking cavity; and a second temperature sensor group Provided at the side door for detecting real-time temperature information of the hot air curtain; the controller, the first temperature sensor group and the second temperature sensor group are connected to the controller; the first temperature sensor The group, the second temperature sensor group transmits the measured real-time temperature information to the controller.
  • control system further includes a wind speed sensor group connected to the controller, wherein the wind speed sensor is configured to acquire wind speed information of the hot air curtain, and transmit the wind speed information to the Controller.
  • the substrate pre-baking device further includes an angle sensor disposed on the side door and connected to the controller, wherein the angle sensor is configured to acquire the opening information of the side door And controlling the hot air curtain system to operate after the controller receives the opening information of the side door from the angle sensor.
  • the invention has the advantages that the substrate pre-baking device of the invention effectively prevents the gas in the baking cavity of the baking box from flowing to the external environment or the external environment when the door is opened in the baking box. Entering into the baking cavity effectively avoids local temperature changes caused by the alternating flow of airflow; thus effectively improving the yield of the product.
  • FIG. 1 is a schematic view showing the dynamics of forming a hot air curtain in a baking box according to an embodiment of the present invention.
  • FIG. 2 is a block diagram of the control system of Embodiment 3 of the present invention.
  • Embodiment 1 as shown in FIG. 1, a substrate prebaking apparatus comprising a baking box 1, a side door 2, a heating mechanism 3, and a hot air curtain system 4.
  • the substrate prebaking apparatus of this embodiment is the simplest structure.
  • the interior of the baking box 1 is a baking cavity, and one side of the baking box 1 is provided with a side door 2 opening, and the baking box 1 is also provided with a connection baking.
  • the exhaust duct of the cavity is generally a rectangular parallelepiped, and the side of the baking box of the rectangular parallelepiped forms a side opening without a side panel.
  • the side door 2 is installed at the opening of the side door 2.
  • the side door 2 is a door opening, and of course, it can also be set as a sliding door, but the sealing effect of the opening door is better.
  • the lower side of the door opening is hinged to the lower side of the opening of the side door 2.
  • the heating mechanism 3 is disposed in the baking cavity. Specifically, the heating mechanism 3 includes a heating plate disposed on a bottom surface of the baking cavity.
  • the hot air curtain system 4 is disposed at the side door 2 of the baking box 1; Specifically, the hot air curtain system 4 includes an air outlet, a pipe, a heating pipe, and a fan. Wherein, the air outlets are arranged in a row along the upper edge of the opening of the side door 2.
  • the duct is connected to the air outlet; the heating tube is disposed in the duct and connected to the controller; the fan is disposed in the duct and is connected to the controller.
  • the hot air curtain system 4 is configured to form a hot air curtain that isolates the baking cavity from the external environment at the opening of the side door 2.
  • Embodiment 2 The difference between this embodiment and Embodiment 1 is that the air outlet includes a first exhaust port and a second exhaust port.
  • the first exhaust port is located on a side of the side door 2 opening adjacent to the baking cavity for forming a first hot air curtain;
  • the second exhaust port is located at an opening of the side door 2 adjacent to the external environment One side is configured to form a second hot air curtain; wherein the first exhaust air port is disposed side by side with the second exhaust air port.
  • the wind speed of the second hot air curtain is smaller than the wind speed of the first hot air curtain.
  • the first fan and the first pipe may be respectively configured for the first hot air curtain, the second fan and the second pipe are configured for the second hot air curtain, and then the wind speed is realized by the rotation speed of the fan. control. Or by sharing one fan, but respectively configuring the first pipe and the second pipe, connecting the first exhaust port through the first pipe, and connecting the second exhaust port through the second pipe.
  • the first exhaust port opening is smaller than the opening of the second exhaust port.
  • the temperature of the second hot air curtain can be close to the external environment and less than the temperature of the first hot air curtain.
  • the temperature of a hot air curtain is consistent with the temperature in the baking chamber.
  • the second hot air curtain has less heat exchange with the external environment, and the second hot air curtain and the first The heat exchange between the hot air curtains is also less, so that the original temperature of the first hot air curtain is effectively maintained, so that the temperature of the first hot air curtain and the baking cavity are substantially consistent.
  • This design is beneficial to reduce heat exchange, while effectively maintaining the constant temperature state of the baking cavity, further improving the yield of the product.
  • the difference between this embodiment and Embodiment 1 and Embodiment 2 is that the control system 5 is added to the present embodiment for intelligent replacement of manual control.
  • the heating mechanism 3 and the hot air curtain system 4 are connected to the control system 5, and the control system 5 is configured to detect a real-time temperature of the baking cavity, and control the baking capacity by the heating mechanism 3.
  • the real-time temperature of the chamber and the real-time temperature for detecting the hot air curtain, and the temperature of the hot air curtain and the wind speed for controlling the hot air curtain are controlled by the hot air curtain system 4.
  • the control system 5 includes a first temperature sensor group 51, a second temperature sensor group 52, an air speed sensor group 53, an angle sensor 54, and a controller 55.
  • the first temperature sensor group 51 is disposed in the baking cavity for detecting real-time temperature information of the baking cavity; the second temperature sensor group 52 is disposed at the side door 2 for detecting Real-time temperature information of the hot air curtain.
  • temperature detection is performed by the first temperature sensor group 51, respectively.
  • the first temperature sensor group 51 and the second temperature sensor group 52 are signally connected to the controller 55; the first temperature sensor group 51 and the second temperature sensor group 52 transmit the measured real-time temperature information to the Controller 55 is described.
  • the wind speed sensor group 53 is connected to the controller 55, and the wind speed sensor is configured to acquire wind speed information of the hot air curtain and transmit the wind speed information to the controller 55.
  • the angle sensor 54 is disposed on the side door 2 and connected to the controller 55, and the angle sensor is configured to acquire opening information of the side door 2, when the controller 55 receives the position from the angle sensor
  • the hot air curtain system 4 is controlled to operate after the opening information of the side door 2 is described.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

一种基板预烘烤装置，其包括烘烤箱体（1），其内部为烘烤容腔（11），所述烘烤箱体（1）的一侧面设有侧门开口；侧门（2），安装于所述侧门开口处；加热机构（3），设于所述烘烤容腔（11）中；热风幕系统（4），设于所述烘烤箱体（1）的侧门（2）处；当所述侧门（2）开启时，所述热风幕系统（4）用于在所述侧门开口处形成隔绝所述烘烤容腔（11）与外界环境的热风幕。

Description

一种基板预烘烤装置 技术领域
本发明涉及显示器制作工艺等领域，具体为一种基板预烘烤装置。
背景技术
目前的有机发光二极管（OLED）产品生产过程中需要经过很多道热烘烤制程，例如在刻光（Photo）制程中，基板涂布光阻之后，曝光前需要先经过预烘烤处理，将光阻中的溶剂通过加热烘烤的方式去除，提高光阻的感度，使曝光后得到的光阻图形更好。
预烘烤处理方式：将玻璃基板放置到一个密闭空间内的恒温加热板上进行加热，经过设定的加热时间后烘烤箱的开门开启，机器人将基板取出并放入下一片基板。
烘烤箱的开门开启过程中，外部的空气会进入到烘烤箱里面造成局部温度下降，导致里面的光阻溶剂在遮蔽层（Cover）上凝结，产生颗粒等影响产品的曝光效果，且烘烤箱中的局部温度过低也会导致产品显影出来的图形局部异常。另外，开门开启的时候里面的光阻溶剂外泄，造成空气污染。
技术问题
本发明的目的是：提供一种基板预烘烤装置，加装热风幕系统形成隔绝所述烘烤容腔与外界环境的热风幕，以提升产品的良率。
技术解决方案
实现上述目的的技术方案是：一种基板预烘烤装置，包括烘烤箱体，其内部为烘烤容腔，所述烘烤箱体的一侧面设有侧门开口；侧门，安装于所述侧门开口处； 加热机构，设于所述烘烤容腔中；热风幕系统，设于所述烘烤箱体的侧门处；当所述侧门开启时，所述热风幕系统用于在所述侧门开口处形成隔绝所述烘烤容腔与外界环境的热风幕。
在本发明一较佳实施例中，所述热风幕系统包括出气口，设于所述侧门开口的上缘；管道，连通于所述出气口；加热管，设于所述管道中并连接于所述控制器；风机，所述设于所述管道中并连接于控制器。
在本发明一较佳实施例中，所述出气口包括第一排出气口，位于所述侧门开口邻接所述烘烤容腔的一侧，用于形成第一道热风幕；第二排出气口，位于所述侧门开口邻接所述外界环境的一侧，用于形成第二道热风幕；其中，所述第一排出气口与所述第二排出气口并排设置。
在本发明一较佳实施例中，所述第二道热风幕的风速小于所述第一道热风幕的风速。
在本发明一较佳实施例中，所述第二道热风幕的温度小于所述第一道热风幕的温度。
在本发明一较佳实施例中，所述热风幕的温度与所述烘烤容腔中的温度保持一致。
在本发明一较佳实施例中，所述的基板预烘烤装置还包括控制系统，所述加热机构、热风幕系统信号连接于所述控制系统，所述控制系统用于检测所述烘烤容腔的实时温度，并通过所述加热机构控制所述烘烤容腔的实时温度以及用于检测所述热风幕的实时温度，并通过所述热风幕系统控制所述热风幕的温度以及用于控制所述热风幕的风速。
在本发明一较佳实施例中，所述控制系统包括第一温度传感器组，设于所述烘烤容腔中，用于检测所述烘烤容腔的实时温度信息；第二温度传感器组，设于所述侧门处，用于检测所述热风幕的实时温度信息；控制器，所述第一温度传感器组、第二温度传感器组信号连接于所述控制器；所述第一温度传感器组、第二温度传感器组将所测得的实时温度信息传递至所述控制器。
在本发明一较佳实施例中，所述控制系统还包括风速传感器组，连接于所述控制器，所述风速传感器用于获取所述热风幕的风速信息，并将该风速信息传递至所述控制器。
在本发明一较佳实施例中，所述的基板预烘烤装置还包括角度传感器，设于所述侧门上并连接于所述控制器，所述角度传感器用于获取所述侧门的开启信息，当所述控制器从所述角度传感器接收到所述侧门的开启信息后控制所述热风幕系统运行。
 有益效果
本发明的优点是：本发明的基板预烘烤装置，当烘烤箱体中开门开启时，有效的阻止烘烤箱体的烘烤容腔里面的气体流到外界环境或外界环境中的气流进入到烘烤容腔里面，有效的避免了因气流交互流动而引起局部温度变化；从而有效的提高了产品的良率。
 附图说明
下面结合附图和实施例对本发明作进一步解释。
图1是本发明实施例的烘烤箱体形成热风幕的动态示意图。
图2是本发明实施例3的所述控制系统的模块图。
其中，
1烘烤箱体； 2侧门；
3加热机构； 4热风幕系统；
5控制系统； 6基板；
11烘烤容腔； 12排气管道；
51第一温度传感器组； 52第二温度传感器组；
53风速传感器组； 54角度传感器；
55控制器。
 本发明的最佳实施方式
以下实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「顶」、「底」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
实施例1，如图1所示，一种基板预烘烤装置，包括烘烤箱体1、侧门2、加热机构3、热风幕系统4。本实施例的基板预烘烤装置是最简单的结构。
本实施例中，所述烘烤箱体1的内部为烘烤容腔，所述烘烤箱体1的一侧面设有侧门2开口，所述烘烤箱体1上还设有连通烘烤容腔的排气管道。在具体实施时，烘烤箱体1一般为长方体，长方体的烘烤箱的一侧不设侧面板即形成侧面开口。
本实施例中，所述侧门2安装于所述侧门2开口处。具体的，该侧门2为开门，当然也可以设置成拉门，但开门的密封性更好。其中，开门的下侧边铰接于所述侧门2开口的下侧边。
本实施例中，所述加热机构3设于所述烘烤容腔中。具体的，该加热机构3包括加热板，设于所述烘烤容腔的底面。
本实施例中，所述热风幕系统4设于所述烘烤箱体1的侧门2处； 具体的，所述热风幕系统4包括出气口、管道、加热管、风机。其中，所述出气口沿所述侧门2开口的上缘设置成排。所述管道连通于所述出气口；所述加热管设于所述管道中并连接于所述控制器；所述风机设于所述管道中并连接于控制器。当所述侧门2开启时，所述热风幕系统4用于在所述侧门2开口处形成隔绝所述烘烤容腔与外界环境的热风幕。
实施例2，本实施例与实施例1的区别在于：所述出气口包括第一排出气口、第二排出气口。所述第一排出气口位于所述侧门2开口邻接所述烘烤容腔的一侧，用于形成第一道热风幕；所述第二排出气口位于所述侧门2开口邻接所述外界环境的一侧，用于形成第二道热风幕；其中，所述第一排出气口与所述第二排出气口并排设置。
本实施例中，所述第二道热风幕的风速小于所述第一道热风幕的风速。本实施例中，可以分别为所述第一道热风幕配置第一风机和第一管道，为所述第二道热风幕配置第二风机和第二管道，然后通过风机的转速来实现风速的控制。或者通过共用一台风机，但分别配置第一管道和第二管道，通过第一管道连接第一排出气口，通过第二管道连接第二排出气口。其中，第一排出气口开口小于第二排出气口的开口。总之，无论何种形式，需要使第一道热风幕和第二道热风幕之间形成速差，第二道热风幕的温度可以与外界环境接近，且小于第一道热风幕的温度，第一道热风幕的温度与所述烘烤容腔中的温度保持一致。此时，由于外界环境的气流、第二道热风幕、第一道热风幕之间存在梯级速差，第二道热风幕与外界环境的热交换少，所述第二道热风幕和第一道热风幕之间的热交换也较少，那么就有效的保持了第一道热风幕的原有温度，使第一道热风幕与所述烘烤容腔中的温度基本保持一致。
这种设计，有利于减少热交换，同时有效的保持了烘烤容腔的恒温状态，进一步提高产品的良率。
实施例3
如图2所示，本实施例与实施例1和实施例2的区别在于，本实施例加装了控制系统5，用于智能化的代替人工控制。所述加热机构3、热风幕系统4信号连接于所述控制系统5，所述控制系统5用于检测所述烘烤容腔的实时温度，并通过所述加热机构3控制所述烘烤容腔的实时温度以及用于检测所述热风幕的实时温度，并通过所述热风幕系统4控制所述热风幕的温度以及用于控制所述热风幕的风速。
所述控制系统5包括第一温度传感器组51、第二温度传感器组52、风速传感器组53、角度传感器54以及控制器55。
所述第一温度传感器组51设于所述烘烤容腔中，用于检测所述烘烤容腔的实时温度信息；第二温度传感器组52，设于所述侧门2处，用于检测所述热风幕的实时温度信息。如设置双层风幕时，则利用第一温度传感器组51分别进行温度检测。所述第一温度传感器组51、第二温度传感器组52信号连接于所述控制器55；所述第一温度传感器组51、第二温度传感器组52将所测得的实时温度信息传递至所述控制器55。
所述风速传感器组53连接于所述控制器55，所述风速传感器用于获取所述热风幕的风速信息，并将该风速信息传递至所述控制器55。
所述角度传感器54设于所述侧门2上并连接于所述控制器55，所述角度传感器用于获取所述侧门2的开启信息，当所述控制器55从所述角度传感器接收到所述侧门2的开启信息后控制所述热风幕系统4运行。
以上仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种基板预烘烤装置，其包括
    烘烤箱体，其内部为烘烤容腔，所述烘烤箱体的一侧面设有侧门开口；
    侧门，安装于所述侧门开口处；
    加热机构，设于所述烘烤容腔中；
    热风幕系统，设于所述烘烤箱体的侧门处；
    当所述侧门开启时，所述热风幕系统用于在所述侧门开口处形成隔绝所述烘烤容腔与外界环境的热风幕。
  2. 根据权利要求1所述的基板预烘烤装置，其中，所述热风幕系统包括
    出气口，设于所述侧门开口的上缘；
    管道，连通于所述出气口；
    加热管，设于所述管道中并连接于所述控制器；
    风机，所述设于所述管道中并连接于控制器。
  3. 根据权利要求2所述的基板预烘烤装置，其中，所述出气口包括
    第一排出气口，位于所述侧门开口邻接所述烘烤容腔的一侧，用于形成第一道热风幕；
    第二排出气口，位于所述侧门开口邻接所述外界环境的一侧，用于形成第二道热风幕；
    其中，所述第一排出气口与所述第二排出气口并排设置。
  4. 根据权利要求3所述的基板预烘烤装置，其中，所述第二道热风幕的风速小于所述第一道热风幕的风速。
  5. 根据权利要求3所述的基板预烘烤装置，其中，所述第二道热风幕的温度小于所述第一道热风幕的温度。
  6. 根据权利要求1所述的基板预烘烤装置，其中，所述热风幕的温度与所述烘烤容腔中的温度保持一致。
  7. 根据权利要求1所述的基板预烘烤装置，其中，还包括控制系统，所述加热机构、热风幕系统信号连接于所述控制系统，所述控制系统用于检测所述烘烤容腔的实时温度，并通过所述加热机构控制所述烘烤容腔的实时温度以及用于检测所述热风幕的实时温度，并通过所述热风幕系统控制所述热风幕的温度以及用于控制所述热风幕的风速。
  8. 根据权利要求7所述的基板预烘烤装置，其中，所述控制系统包括
    第一温度传感器组，设于所述烘烤容腔中，用于检测所述烘烤容腔的实时温度信息；
    第二温度传感器组，设于所述侧门处，用于检测所述热风幕的实时温度信息；
    控制器，所述第一温度传感器组、第二温度传感器组信号连接于所述控制器；所述第一温度传感器组、第二温度传感器组将所测得的实时温度信息传递至所述控制器。
  9. 根据权利要求8所述的基板预烘烤装置，其中，所述控制系统还包括风速传感器组，连接于所述控制器，所述风速传感器用于获取所述热风幕的风速信息，并将该风速信息传递至所述控制器。
  10. 根据权利要求8所述的基板预烘烤装置，其中，还包括角度传感器，设于所述侧门上并连接于所述控制器，所述角度传感器用于获取所述侧门的开启信息，当所述控制器从所述角度传感器接收到所述侧门的开启信息后控制所述热风幕系统运行。
PCT/CN2017/107996 2017-08-18 2017-10-27 一种基板预烘烤装置 Ceased WO2019033560A1 (zh)

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