WO2019026576A1 - 情報処理装置、製造補助システム、バルブの組立方法、および機器交換方法 - Google Patents
情報処理装置、製造補助システム、バルブの組立方法、および機器交換方法 Download PDFInfo
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- WO2019026576A1 WO2019026576A1 PCT/JP2018/026148 JP2018026148W WO2019026576A1 WO 2019026576 A1 WO2019026576 A1 WO 2019026576A1 JP 2018026148 W JP2018026148 W JP 2018026148W WO 2019026576 A1 WO2019026576 A1 WO 2019026576A1
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- information
- valve
- manufacturing
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- manufacturing condition
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 113
- 230000010365 information processing Effects 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims description 30
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000704 physical effect Effects 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 40
- 239000012530 fluid Substances 0.000 description 28
- 239000004065 semiconductor Substances 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000010998 test method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4188—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by CIM planning or realisation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41805—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by assembly
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31027—Computer assisted manual assembly CAA, display operation, tool, result
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Definitions
- the present invention relates to an information processing apparatus, a manufacturing assistance system, a method of assembling a valve, and a method of replacing equipment.
- an object of this invention is to provide the technique which can manufacture easily the apparatus which has a proper specification.
- the information processing apparatus which is one aspect of the present invention creates appropriate specification information indicating an appropriate specification suitable for the device based on use information of the device manufactured under the manufacturing condition based on the specification information And a production condition determination unit configured to determine a production condition of the device based on the appropriate specification information created by the appropriate specification creating unit.
- Specification comparison means for comparing the appropriate specification information with the specification information indicating a predetermined specification
- specification update means for updating the specification information of the device based on the comparison result by the specification comparison means
- manufacturing condition determination The information processing apparatus may further include instruction information generation means for generating instruction information on manufacture of the device to be displayed on the display device based on the manufacturing conditions determined by the means.
- the appropriate specification creating means may create the appropriate specification information based on the specification information indicating the predetermined specification and / or the appropriate specification information and accumulated information on the specification information.
- a manufacturing assistance system includes the above-described information processing apparatus, and a display device for displaying the instruction information created by the instruction information creating means.
- the display device may be integrated with the imaging device.
- the device is a valve
- the manufacturing conditions include physical property values of the valve body of the valve, dimensions of the valve body, and Any one of the ambient temperature ranges at the time of manufacture of the said valve, and the leak detection method of the said valve are included.
- the manufacturing conditions may include the stroke amount of the valve.
- the device replacement method manufactures a device based on the manufacturing conditions determined by the manufacturing condition determination unit in the information processing apparatus, and exchanges the manufactured device with a device that has acquired usage information.
- the block diagram of a manufacture assistance system provided with the manufacture instruction information creation apparatus which concerns on embodiment of this invention is shown.
- the external appearance perspective view of a fluid control device is shown.
- the front view of a valve is shown.
- the external view of a head mounted display is shown.
- FIG. 1 shows a configuration diagram of a manufacturing support system 10 provided with an information processing apparatus 1 according to the present embodiment.
- the information processing apparatus 1 is an apparatus for creating manufacturing instruction information regarding the valve 30 provided in the fluid control apparatus 20.
- the fluid control device 20 is a device provided in a semiconductor manufacturing device.
- the valve 30 is an example of a device.
- FIG. 2 shows an external perspective view of the fluid control device 20.
- FIG. 3 shows a front view of the valve 30.
- the fluid control device 20 includes a base 21, a plurality of (three lines) gas lines 22, and a gas out manifold 23. Since the configuration of each gas line 22 is the same, only one gas line 22 of the plurality of gas lines 22 will be described below.
- the gas line 22 includes a plurality of joints 24, 25 and a plurality of fluid control devices 27-30.
- the plurality of joints 24 and 25 are constituted by an inlet joint 24 serving as an inlet for process gas, and a plurality of block-shaped joints 25 disposed between the inlet joint 24 and the gas out manifold 23.
- the plurality of joints 24, 25 are provided in a line on the base 21 and fixed to the base 21.
- An outlet pipe 26 is connected to the gas out manifold 23.
- the plurality of fluid control devices 27 to 30 include a manual regulator (pressure reducing valve) 27, a filter 28, a flow control device (for example, a mass flow controller (MFC: Mass Flow Controller)) 29, and an automatic valve (for example, fluid drive) And the automatic valve 30 of the formula.
- the fluid control devices 27 to 30 are connected to the joints 24 and 25 respectively. Then, the gas flowing in from the inlet joint 24 passes through the fluid control devices 27 to 30 and the plurality of joints 25 and the gas out manifold 23 and is supplied to a chamber (not shown). Further, the regulator 27 or the mass flow controller 29 is provided with a flow rate sensor (not shown) for detecting the flow rate of the gas.
- FIG. 3 shows a front view of the valve 30.
- the valve 30 is connected to the body 31, the actuator 32, the body 31 and the actuator 32, and the bonnet 33 rotated by a torque wrench (not shown), and the body 31 and the bonnet 33. And a diaphragm 34 to be clamped.
- the valve 30 is a valve that is opened and closed by a drive fluid supplied to the actuator 32 from the outside.
- a sensor unit 35 is provided in the valve 30.
- the sensor unit 35 includes a pressure sensor that detects the pressure of the gas, a temperature sensor that detects the temperature of the gas, and a displacement sensor that detects the movement of the diaphragm 34.
- the diaphragm 34 corresponds to a valve body.
- the manufacturing assistance system 10 includes an information processing device 1, a camera 2, and a display device 3, and these are configured to be communicable by wire or wirelessly.
- the camera 2 is, for example, a video camera capable of capturing a moving image, and configured to capture the valve 30 being manufactured and to transmit the captured moving image to the information processing apparatus 1.
- the display device 3 has a display, and displays instruction information on the manufacture of the valve 30 transmitted from the information processing device 1.
- the information processing apparatus 1 includes a central processing unit (CPU) 11, a storage unit 12, and a communication unit 13, which are connected to one another by a bus.
- CPU central processing unit
- storage unit 12 a storage unit
- communication unit 13 a communication unit
- the CPU 11 controls the information processing device 1 and the manufacturing assistance system 10 by reading and executing the program stored in the storage unit 12.
- the storage unit 12 stores a program related to instruction information creation processing described later, and the program is read and executed by the CPU 11, whereby the functions of the processing units 11A to 11G of the CPU 11 are realized.
- the storage unit 12 stores various tables relating to usage information of the valve 30, specification (specification) information, appropriate specification (specification) information, manufacturing conditions, and accumulated information.
- FIG. 4 is a diagram showing a configuration example of the use information table 100. As shown in FIG. 4
- the usage information table 100 stores, for example, usage information of the valves 30 located on the uppermost stream and the most downstream of each gas line 22 of the fluid control device 20, and a plurality of used valve tables 101 corresponding to each valve 30. Is provided. Each used valve table 101 has a lot No. of the corresponding valve 30. Is attached.
- the used valve table 101 stores a gas type 102, an environmental temperature 103, a fluid temperature 104, an open / close frequency 105, a flow rate 106, a pressure 107, and a drive pressure 108 as items of use information.
- Gas species 102 indicate the type of gas being used at valve 30.
- the environmental temperature 103 indicates the average temperature (° C.) around the valve 30.
- the fluid temperature 104 indicates the average temperature (° C.) of the gas flowing through the valve 30.
- the open / close frequency 105 indicates the number of open / close operations (total value of open / close) of the valve 30 during the use period.
- the flow rate 106 indicates the flow rate (m 3 / s) of gas flowing through the valve 30 during the use period.
- the pressure 107 indicates the average pressure (MPa) of the gas flowing to the valve 30.
- the drive pressure 108 indicates the average drive pressure (MPa) of the drive fluid supplied to the actuator 32 to open and close the valve 30.
- the environmental temperature 103, the fluid temperature 104, and the like are acquired by the sensor unit 35 provided in the valve 30, the regulator 27, or a flow rate sensor (not shown) provided in the mass flow controller 29, and the storage unit provided in the fluid control device 20. It is accumulated. Note that the information may be transmitted to another external information processing apparatus by wireless communication without being stored in the storage unit. Then, the use information table 100 is created based on the data accumulated in the storage unit after the fluid control device 20 provided in the semiconductor manufacturing device is used for a predetermined period (for example, one week). In addition, the use information table 100 may be created by the information processing apparatus 1 or may be created by another external information processing apparatus and input to the information processing apparatus 1. Moreover, in the use information table 100, although temperature and pressure were average values, the range (upper limit and lower limit) of the temperature and pressure in a use period may be sufficient.
- FIG. 5 is a view showing a configuration example of the specification information table 200. As shown in FIG.
- the specification information table 200 stores specification (specification) information of the valve 30 whose usage information is stored in the usage information table 100. Therefore, the spec information table 200 is provided with the spec valve table 201 corresponding to each valve 30.
- the spec valve table 201 includes, as items of spec information, a gas type 202, an environmental temperature range 203, a fluid temperature range 204, an upper limit switching frequency 205, an upper limit flow rate 206, a maximum pressure 207, and a driving pressure range 208.
- the gas type 202 indicates the type of gas used in the valve 30, but nothing is input since the gas used at the time of manufacture is unknown.
- the ambient temperature range 203 indicates an ambient temperature range (° C.) in which the valve 30 can be used.
- the fluid temperature range 204 indicates the temperature range (° C.) of the gas flowing through the valve 30.
- the upper limit opening / closing frequency 205 indicates the upper limit of the number of opening / closing of the valve 30 (total value of opening / closing) in the use period.
- the upper limit flow rate 206 indicates the upper limit of the flow rate (m 3 / s) of the gas flowing through the valve 30 during the use period.
- the maximum pressure 207 indicates the maximum pressure (MPa) of the gas that can flow through the valve 30.
- the drive pressure 208 indicates the range of drive pressure (MPa) of the drive fluid supplied to the actuator 32 to open and close the valve 30.
- FIG. 6 is a view showing a configuration example of the appropriate specification information table 300. As shown in FIG. 6
- the appropriate specification information table 300 is a table created based on the usage information table 100 as described later, and includes an appropriate specification valve table 301 corresponding to each valve 30.
- the appropriate spec valve table 301 is a gas type 302, an environmental temperature range 303, a fluid temperature range 304, an upper limit opening / closing frequency 305, an upper limit flow rate 306, and a maximum pressure 307 as appropriate spec information based on usage information. And the driving pressure range 308 are stored.
- the items stored in the appropriate specification valve table 301 are the same as the items stored in the specification valve table 201, and thus the description thereof is omitted.
- the gas to be used is input.
- FIG. 7 is a view showing a configuration example of the manufacturing condition table 400. As shown in FIG.
- the manufacturing condition table 400 stores the manufacturing conditions for manufacturing each valve 30. Therefore, the manufacturing condition table 400 is provided with the manufacturing valve table 401 corresponding to each valve 30.
- the manufacturing valve table 401 stores torque value 402, diaphragm dimension 403, diaphragm hardness 404, diaphragm displacement amount 405, temperature range 406, tool 407, and leak test method 408 as items of manufacturing information. .
- the torque value 402 indicates a torque value when the bonnet 33 is screwed into the body 31.
- the shape of the diaphragm 34 in which the outer peripheral edge is clamped changes according to the torque value. For example, if the torque value is increased, the shape of the diaphragm 34 becomes a sharp mountain shape, so the stroke amount of the valve 30 and the gas flow rate increase, and the durability of the diaphragm 34 decreases. On the other hand, if the torque value is lowered, the shape of the diaphragm 34 becomes a gentle mountain shape, so the stroke amount of the valve 30 and the gas flow rate decrease, and the durability of the diaphragm 34 increases.
- the diaphragm dimension 403 indicates the dimensions of the diaphragm 34.
- the dimensions of the diaphragm 34 are classified so that the dimensions increase in the order of dimensions AC, because there is a slight error depending on the manufacturing lot. Then, as the size of the diaphragm 34 is larger, the shape of the diaphragm 34 becomes a gentle mountain shape, so the stroke amount of the valve 30 and the gas flow rate decrease. On the other hand, as the dimension of the diaphragm 34 is smaller, the shape of the diaphragm 34 has a steeper peak shape, so the stroke amount of the valve 30 and the gas flow rate increase.
- the diaphragm hardness 404 indicates the hardness of the diaphragm 34 (Vickers hardness).
- the hardness of the diaphragm 34 is classified so that the hardness becomes harder in the order of the hardness AC, because there is a slight error depending on the production lot. Then, as the hardness of the diaphragm 34 becomes harder, the shape of the diaphragm 34 becomes a sharp mountain shape, so the stroke amount of the valve 30 and the gas flow rate increase. On the other hand, as the hardness of the diaphragm 34 becomes softer, the shape of the diaphragm 34 becomes a gentle mountain shape, so the stroke amount of the valve 30 and the gas flow rate decrease.
- the hardness of the diaphragm 34 corresponds to the physical property value of the valve body.
- the diaphragm displacement amount 405 indicates the distance until the diaphragm 34 of the valve 30 is seated on the valve seat, that is, the stroke amount of the valve 30.
- the diaphragm displacement amount 405 is an important item in determining the Cv value of the valve 30 to be used. Since the shape of the diaphragm 34 becomes steeper as the diaphragm displacement amount 405 is larger, the gas flow rate increases, and the shape of the diaphragm 34 becomes gentler as the diaphragm displacement amount 405 becomes smaller. Gas flow rate decreases.
- the temperature range 406 indicates the ambient temperature range when the valve 30 is manufactured.
- the tool 407 indicates the type of wrench used when screwing the bonnet 33 into the body 31.
- the leak test method 408 shows the method of the leak test performed after the valve 30 is completed. Depending on the type of gas flowing through the valve 30, the leak test is modified. For example, for the valve 30 that flows monosilane (SiH 4 ), a more stringent test is performed than the leak test performed on the valve 30 that flows nitrogen. The method of the leak test corresponds to the leak detection method.
- the accumulated information table 500 is a table in which the usage information table 100, the specification information table 200, the appropriate specification information table 300, and the manufacturing condition table 400 regarding the valve for which instruction information has been created in the information processing apparatus 1 in the past are accumulated. After the instruction information creation process described later is performed, the used table is stored.
- the communication unit 13 communicates with the camera 2 and the display device 3, receives a moving image transmitted from the camera 2, and transmits information from the display control unit 11 G of the CPU 11 to the display device 3.
- the CPU 11 includes an analysis unit 11A, a specification comparison unit 11B, a specification update unit 11C, a manufacturing condition generation unit 11D, a manufacturing condition update unit 11E, an instruction information generation unit 11F, and a display control unit 11G.
- the analysis unit 11A analyzes the usage information stored in the usage information table 100, and creates appropriate specification information based on the specification information stored in the specification information table 200 and the cumulative information stored in the cumulative information table 500. . For example, each item of the usage information stored in the use information table 100 is compared with each item of the spec information of the valve 30, and for the matching item, the spec is used as the appropriate spec, and for the unmatched item The spec changed to match may be taken as the proper spec.
- the appropriate specification is obtained when the opening / closing frequency 105 of the usage information does not exceed or substantially fall below the upper limit opening / closing frequency 205 of the specification information.
- the upper limit opening / closing frequency 305 of the information may not be created based on the opening / closing frequency 105 of the usage information.
- a spec that matches all items of the use information may be extracted from the appropriate spec information of the accumulated information.
- the respective items 102 to 108 of the use information of FIG. 4 and the respective items 202 to 208 of the spec information of FIG. 5 are compared. Since the items 103 and 107 to 108 of the use information match the items 203 and 207 to 208 of the specification information, the specification is used as the appropriate specification. On the other hand, since the items 102 and 104 to 106 of the usage information do not match the items 202 and 204 to 206 of the specification information, the specification changed to match is used as the appropriate specification. Thereby, the appropriate specification information shown in FIG. 6 is created.
- the analysis unit 11A corresponds to appropriate specification creating means.
- the spec comparing unit 11 B compares the spec information stored in the spec information table 200 with the appropriate spec information stored in the appropriate spec information table 300. For example, the items 203 to 208 stored in the specification information table 200 are compared with the items 303 to 308 stored in the appropriate specification information table 300 to determine whether they all match.
- the specification updating unit 11C updates the information of the item different from the appropriate specification information in the specification information to the information of the item of the appropriate specification information based on the comparison result by the specification comparing unit 11B. For example, in FIGS. 5 and 6, between the spec information stored in the spec information table 200 and the proper spec information stored in the proper spec information table 300, the fluid temperature range 204, 304 and the upper limit open / close frequency 205, 305 , The upper limit flow rates 206, 306 are different. Therefore, the information of the fluid temperature range 204 of the specification information, the upper limit switching frequency 205, and the upper limit flow rate 206 is updated to the information of the fluid temperature range 304, the upper limit switching frequency 305, and the upper limit flow rate 306 of the appropriate specification information.
- the manufacturing condition creation unit 11D creates the manufacturing condition of the valve 30 based on the specification information stored in the updated specification information table 200. Specifically, items (torque value, diaphragm dimensions, etc.) similar to the manufacturing conditions stored in the manufacturing condition table 400 are created. For example, because the gas species 302 is SiH 4 , the leak test method 408 selects a more stringent test method. In addition, when the upper limit switching frequency 205 is changed by updating the specification information, the durability of the diaphragm 34 is affected, so that the appropriate torque value 402 is set, or the appropriate diaphragm dimension 403 and diaphragm A hardness 404 is selected. In addition, when the upper limit flow rate 206 is changed, an appropriate torque value 402 is set, or an appropriate diaphragm size 403 and diaphragm hardness 404 are selected in order to change the displacement amount of the diaphragm 34.
- the manufacturing condition updating unit 11E updates the manufacturing conditions stored in the manufacturing condition table 400 based on the manufacturing conditions generated by the manufacturing condition generating unit 11D.
- the manufacturing condition creating unit 11D and the manufacturing condition updating unit 11E correspond to manufacturing condition determining means.
- the instruction information creation unit 11F creates instruction information to be displayed on the display device 3 at the time of manufacturing the valve 30, based on the manufacturing conditions updated by the manufacturing condition updating unit 11E. For example, based on the instruction information for displaying the torque value “6.0” on the display device 3 based on the torque value 402 of the manufacturing condition table 400 and “dimension A” on the display device 3 based on the diaphragm dimension 403 Create instruction information etc.
- the display control unit 11G determines the manufacturing process of the valve 30 based on the moving image received from the camera 2, and transmits the instruction information generated by the instruction information generating unit 11F to the display device 3 according to the manufacturing process.
- the information processing apparatus 1 of the present embodiment having the above-described configuration performs instruction information creation processing in the procedure described below.
- FIG. 8 is a flowchart showing a procedure of instruction information creation processing.
- the instruction information creation process executed by the CPU 11 of the information processing device 1 is started, for example, by the user executing a program related to the instruction information creation process stored in the storage unit 12.
- the analysis unit 11A analyzes the usage information stored in the usage information table 100 shown in FIG. 4 and stores the proper spec information shown in FIG. 6 in the proper spec information table 300 (step S1).
- the spec comparison unit 11B compares the spec information stored in the spec information table 200 with the appropriate spec information stored in the appropriate spec information table 300 (step S2). Specifically, the items 203 to 208 stored in the specification information table 200 are compared with the items 303 to 308 stored in the appropriate specification information table 300 to determine whether they all match.
- step S2 If all the values match (step S2: YES), the spec comparison unit 11B ends the instruction information creation process. On the other hand, if there is an item that does not match (step S2. NO), the spec comparison unit 11B proceeds to step S3.
- the spec update unit 11C updates the information of the item different from the proper spec information in the spec information to the information of the item of the proper spec information based on the comparison result by the spec comparison unit 11B in step S2 (step S3).
- the manufacturing condition creation unit 11D creates the manufacturing condition of the valve 30 based on the specification information stored in the updated specification information table 200 (step S4).
- the manufacturing condition updating unit 11E updates the manufacturing conditions stored in the manufacturing condition table 400 based on the manufacturing conditions generated by the manufacturing condition generating unit 11D (step S5).
- the instruction information creation unit 11F creates instruction information to be displayed on the display device 3 when the valve 30 is manufactured, based on the manufacturing conditions updated by the manufacturing condition update unit 11E (step S6).
- the valve is manufactured based on the manufacturing condition updated by the manufacturing condition updating unit 11E, and the manufactured valve is exchanged with the valve 30 of the fluid control device 20 that has acquired the usage information. Do.
- the manufactured valve is exchanged with the valve 30 of the fluid control device 20 that has acquired the usage information.
- the analysis unit 11A creates the appropriate specification information indicating the appropriate specification suitable for the valve 30, based on the usage information of the valve 30, and the specification comparison unit 11B performs the appropriate specification
- the specification updating unit 11C compares the information with the specification information indicating the predetermined specification, and the specification update unit 11C updates the specification information of the valve 30 based on the comparison result by the specification comparison unit 11B, and the manufacturing condition creation unit (production condition creation unit 11D
- the manufacturing condition update unit 11E) generates the manufacturing condition of the valve 30 based on the specification information updated by the specification update unit 11C
- the instruction information generation unit 11F determines the manufacturing condition determined by the manufacturing condition determination unit. , Create instruction information on the manufacture of the valve to be displayed on the display device 3.
- a manufacturing condition for manufacturing a valve having an appropriate specification according to the use state of the valve 30 is created, and an instruction on manufacturing the valve for displaying on the display device 3 based on the manufacturing condition. Information is created. For this reason, when the same valve as the valve 30 is ordered, various valves having appropriate specifications according to the semiconductor process can be easily manufactured. This makes it possible to prevent overspec of the valve and to suppress the increase in cost of the valve. Therefore, the user can obtain the valve of the specification suitable for his own use environment if it is a repeat order or the valve of the same process.
- the analysis unit 11A creates the appropriate specification information based on the specification information and / or the accumulated information indicating the predetermined specification. Thereby, when the same valve as the valve 30 is ordered, various valves having more appropriate specifications according to the semiconductor process can be easily manufactured.
- the information processing device 1 and the display device 3 for displaying the instruction information generated by the instruction information generation unit 11F are provided, the worker can easily view the display device 3 Various valves can be manufactured.
- the device is the valve 30, but it may be another fluid control device.
- the camera 2 and the display device 3 may be a tablet terminal 4 (FIG. 1) configured integrally, for example, by disposing the tablet terminal 4 between the worker and the valve 30, the camera 2 The moving image shot in step may be displayed on the display device 3 to perform manufacturing assistance.
- the information processing device 1, the camera 2, and the display device 3 may be integrally configured.
- the camera 2 and the display device 3 may be a head mounted display 5 configured integrally.
- information processing device 2 camera 3: display device 4: tablet terminal 5: head mounted display 10: manufacturing support system 11: CPU 11A: analysis unit 11B: specification comparison unit 11C: specification Update unit 11D: manufacturing condition creation unit 11E: manufacturing condition update unit 11F: instruction information creation unit 12: storage unit 100: usage information table 200: specification information table 300: appropriate specification information table 400: Manufacturing condition table, 500: Cumulative information table, 30: Valve
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Abstract
Description
Claims (8)
- スペック情報に基づく製造条件により製造された機器の使用情報に基づき、機器に適した適正スペックを示す適正スペック情報を作成する適正スペック作成手段と、
前記適正スペック作成手段により作成された前記適正スペック情報に基づき、機器の製造条件を決定する製造条件決定手段と、を備える、情報処理装置。 - 前記適正スペック情報と、所定のスペックを示す前記スペック情報とを比較するスペック比較手段と、
前記スペック比較手段による比較結果に基づき、機器の前記スペック情報を更新するスペック更新手段と、
前記製造条件決定手段により決定された製造条件に基づき、表示装置に表示するための前記機器の製造に関する指示情報を作成する指示情報作成手段と、を備える、請求項1に記載の情報処理装置。 - 前記適正スペック作成手段は、前記所定のスペックを示す前記スペック情報および/または前記適正スペック情報、および前記スペック情報に関する累積情報に基づき、前記適正スペック情報を作成する、請求項1または請求項2に記載の情報処理装置。
- 請求項2または請求項3に記載された情報処理装置と、
前記指示情報作成手段により作成された前記指示情報を表示する表示装置と、を備える製造補助システム。 - 前記表示装置は、撮影装置と一体に構成されている、請求項4に記載の製造補助システム。
- 前記機器は、バルブであり、
前記製造条件は、前記バルブの弁体の物性値、前記弁体の寸法、前記バルブの製造時の周囲の温度範囲、および、前記バルブのリーク検出方法の少なくともいずれか一つ含む、請求項4または請求項5に記載の製造補助システムを用いたバルブの組立方法。 - 前記製造条件は、前記バルブのストローク量を含む、請求項6に記載のバルブの組立および検査方法。
- 請求項1から請求項3のいずれか一項に記載された情報処理装置における製造条件決定手段により決定された製造条件に基づき、機器を製造し、
製造した機器を、使用情報を取得した機器と交換する、機器交換方法。
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KR1020207002550A KR20200023645A (ko) | 2017-07-31 | 2018-07-11 | 정보 처리 장치, 제조 보조 시스템, 밸브의 조립 방법, 및 기기 교환 방법 |
JP2019534011A JP7219472B2 (ja) | 2017-07-31 | 2018-07-11 | 情報処理装置、製造補助システム、バルブの組立方法、および機器交換方法 |
CN201880037554.5A CN110741403A (zh) | 2017-07-31 | 2018-07-11 | 信息处理装置、制造辅助系统、阀的组装方法及设备更换方法 |
US16/778,599 US20200183368A1 (en) | 2017-07-31 | 2020-01-31 | Information processor, manufacturing assistance system, and valve device assembly method |
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US16/778,599 Continuation US20200183368A1 (en) | 2017-07-31 | 2020-01-31 | Information processor, manufacturing assistance system, and valve device assembly method |
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JP (1) | JP7219472B2 (ja) |
KR (1) | KR20200023645A (ja) |
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Citations (3)
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JPH10240794A (ja) * | 1997-02-28 | 1998-09-11 | Toshiba Corp | 仕様書作成装置及び仕様書作成方法 |
JP2007128501A (ja) * | 2005-10-07 | 2007-05-24 | Daikin Ind Ltd | 産業機械部品の選定装置 |
JP2007196485A (ja) * | 2006-01-25 | 2007-08-09 | Konica Minolta Business Technologies Inc | 画像形成装置、ホームサーバシステム、画像形成装置における新製品提案方法 |
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US7357298B2 (en) * | 2001-12-28 | 2008-04-15 | Kimberly-Clark Worldwide, Inc. | Integrating event-based production information with financial and purchasing systems in product manufacturing |
KR101322434B1 (ko) * | 2005-07-11 | 2013-10-28 | 브룩스 오토메이션 인코퍼레이티드 | 지능형 상태 감시 및 결함 진단 시스템 |
JP5028506B2 (ja) * | 2010-04-21 | 2012-09-19 | 日立情報通信エンジニアリング株式会社 | 変更管理分析方法、変更管理分析装置、および変更管理分析プログラム |
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- 2018-07-11 CN CN201880037554.5A patent/CN110741403A/zh active Pending
- 2018-07-11 JP JP2019534011A patent/JP7219472B2/ja active Active
- 2018-07-11 KR KR1020207002550A patent/KR20200023645A/ko not_active Application Discontinuation
- 2018-07-26 TW TW107125808A patent/TWI695241B/zh not_active IP Right Cessation
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10240794A (ja) * | 1997-02-28 | 1998-09-11 | Toshiba Corp | 仕様書作成装置及び仕様書作成方法 |
JP2007128501A (ja) * | 2005-10-07 | 2007-05-24 | Daikin Ind Ltd | 産業機械部品の選定装置 |
JP2007196485A (ja) * | 2006-01-25 | 2007-08-09 | Konica Minolta Business Technologies Inc | 画像形成装置、ホームサーバシステム、画像形成装置における新製品提案方法 |
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TW201921204A (zh) | 2019-06-01 |
JPWO2019026576A1 (ja) | 2020-05-28 |
US20200183368A1 (en) | 2020-06-11 |
JP7219472B2 (ja) | 2023-02-08 |
CN110741403A (zh) | 2020-01-31 |
KR20200023645A (ko) | 2020-03-05 |
TWI695241B (zh) | 2020-06-01 |
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