WO2019021694A1 - 光セパレータ構造及び物質濃度測定装置 - Google Patents

光セパレータ構造及び物質濃度測定装置 Download PDF

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Publication number
WO2019021694A1
WO2019021694A1 PCT/JP2018/023282 JP2018023282W WO2019021694A1 WO 2019021694 A1 WO2019021694 A1 WO 2019021694A1 JP 2018023282 W JP2018023282 W JP 2018023282W WO 2019021694 A1 WO2019021694 A1 WO 2019021694A1
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WIPO (PCT)
Prior art keywords
light
reflector
measurement
light emitting
separator structure
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Ceased
Application number
PCT/JP2018/023282
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English (en)
French (fr)
Japanese (ja)
Inventor
庄三 中尾
順平 久野
信悟 藤原
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JFE Advantech Co Ltd
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JFE Advantech Co Ltd
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Filing date
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Application filed by JFE Advantech Co Ltd filed Critical JFE Advantech Co Ltd
Publication of WO2019021694A1 publication Critical patent/WO2019021694A1/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity

Definitions

  • the present invention relates to a light separator structure and a substance concentration measuring device.
  • a substance concentration measuring apparatus for measuring substance concentration there is, for example, a water quality monitoring apparatus for measuring organic substance concentration in water. It is known in the water quality monitoring apparatus that a light beam from a low pressure mercury lamp, which is a light source, is separated by a light separating splitter into a sample light beam for transmitting test water and another reference light beam (for example, patent documents 1).
  • the beam splitter should be arranged to cover the entire light path.
  • An object of the present invention is to provide a light separator structure and a substance concentration measuring device which are simple in design and assembly and can be miniaturized.
  • a light emitting source A reflector for obtaining reference light or measurement light by blocking and reflecting a part of the light emitted from the light emitting source; Equipped with A light separator structure is provided to obtain measurement light or reference light that passes as it is without being reflected by the reflector.
  • the reflector preferably sets the reflection angle of light from the light emitting source to 90 °. This configuration facilitates the design and assembly of the light separator structure.
  • the proportion of light from the light emitting source reflected by the reflector is preferably such that the light intensity of measurement light is equal to or higher than the light intensity of reference light.
  • the reflector is preferably provided with a substrate and a plated layer which is made of a material less in physical property change due to light irradiation from the light emitting source than the substrate and which comprises at least a reflective surface.
  • the reflector be able to select the material of the reflective surface.
  • the light emitting source may be an LED element.
  • An optical system having any one of the above light separator structures; A measurement cell unit that transmits a sample in which measurement light obtained from the optical system is interposed; A first light receiving unit that receives measurement light transmitted through the sample in the measurement cell unit; and a light receiving unit that includes a second light receiving unit that receives reference light obtained from the optical system.
  • a control unit that calculates the concentration of the inclusion in the sample based on the difference in light intensity obtained by the first light receiving unit and the second light receiving unit; To provide a substance concentration measuring device.
  • the measurement light passes through the sample of the measurement cell unit.
  • the attenuation rate differs according to the difference in the concentration of the inclusions in the sample. Therefore, the light received by the first light receiving unit has a light intensity corresponding to the attenuation factor. Therefore, the concentration of the inclusions in the sample can be calculated by comparing the light intensity detected by the first light receiving unit with the light intensity of the reference light irradiated without transmitting the sample.
  • the optical system includes a plurality of light emitting sources having different wavelengths of emitted light. It is preferable that the light receiver be configured by a plurality of light receiving units that respectively receive the reference light and the measurement light from the light emitting sources.
  • the sample may be a liquid.
  • the light emission source preferably has a peak of the spectrum of emitted light at 250 to 260 nm.
  • the concentration of the content contained in the sample can be detected as an electrical signal corresponding to the absorbance.
  • the reference light and the measurement light are obtained by reflecting a part of the light from the light emission source by the reflector, so design and assembly can be easily performed without the need for a beam splitter. In addition to being able to do things, it becomes possible to realize miniaturization.
  • FIG. 4 is a partial cross-sectional perspective view of the first mount of FIG. 3; It is a perspective view of the 2nd mounting stand of FIG. It is a schematic front sectional view which shows a part of water quality monitoring apparatus of FIG.
  • the water quality monitoring device 1 includes a device body 2, a light source 3, a reflector 4, a light receiver 5, and a control device 6 (see FIG. 4) which is a control unit.
  • the device body 2 extends from the base portion 7 having a circular shape in a plan view, and a first gap (a measurement cell portion 8) from the lower surface of the base portion 7 so as to form a predetermined gap.
  • a support 9 and a second support 10 are provided.
  • the base unit 7 is provided with a display unit (not shown) and a control device 6.
  • the first support portion 9 is formed with a first recess 11 having a substantially rectangular shape in plan view from an outer side surface opposite to the second support portion 10. As shown in FIGS. 3 and 4, the bottom surface of the first recess 11 is formed with a first detection window 12 having a circular step shape having a circular plan view and opening on the inner side surface located on the second support side. ing. A stepped first transmission member 13 fitted to the shape is attached to the first detection window 12.
  • glass for example, quartz glass, calcium fluoride, magnesium fluoride or the like
  • a material having a small attenuation factor of UV light ultraviolet light
  • a first mount 15 is screwed to the bottom of the first recess 11.
  • a first recess 16 and a second recess 17 are formed on the side surface of the first mount 15.
  • a first through hole 18 and a second through hole 19 are respectively formed in the central portions of the bottoms of the first recess 16 and the second recess 17.
  • a first light emitting element 33 and a second light emitting element 34 which will be described later, are disposed in the first recess 16 and the second recess 17, respectively.
  • reflecting members 35 and 36 described later are provided on the bottom surfaces of the first recess 16 and the second recess 17 so as to close the upper half portions of the first through hole 18 and the second through hole 19, respectively.
  • a third recess 20 and a fourth recess 21 are formed on the top surface of the first mount 15.
  • Third through holes 22 and fourth through holes 23 respectively communicating with the first recess 16 and the second recess 17 are formed on the bottom of the third recess 20 and the fourth recess 21 respectively.
  • a first photoelectric conversion element 37 and a second photoelectric conversion element 38, which will be described later, are disposed in the third recess 20 and the fourth recess 21, respectively.
  • the second support portion 10 is formed with a second recess 24 having a substantially rectangular shape in plan view from an outer side surface opposite to the first support portion 9.
  • the bottom surface of the second recess 24 is formed with a second detection window 25 having a circular shape in plan view and opening on the inner side surface located on the first support portion 9 side.
  • the second detection window 25 faces the first detection window 12.
  • a second transmission member 26 having the same shape and material as the first transmission member 13 is attached to the second detection window 25.
  • the second mount 28 is screwed to the bottom of the second recess 24. As shown in FIG. 6, a fifth recess 29 and a sixth recess 30 are formed on the side surface of the second mount 28. A fifth through hole 31 and a sixth through hole 32 are respectively formed in the central portions of the bottoms of the fifth recess 29 and the sixth recess 30. A third photoelectric conversion element 39 and a fourth photoelectric conversion element 40, which will be described later, are disposed in the fifth recess 29 and the sixth recess 30, respectively.
  • the first recess 11 and the second recess 24 are closed in a sealed state by a lid (not shown).
  • the first transmission member 13 and the second transmission member 26 are attached to the first detection window 12 and the second detection window 25 in a sealed state by arranging packings or the like (not shown) at their outer edge portions. It is supposed to be Thereby, waterproofness inside the 1st support part 9 and the 2nd support part 10 is secured.
  • the light emitting source 3 includes a first light emitting element 33 and a second light emitting element 34.
  • An LED Light Emitting Diode
  • the LED used here has a configuration in which an LED chip is mounted on a lead frame and covered with a lens.
  • Each of the light emitting elements 33 and 34 is formed in a cylindrical shape, the lens on one end side is formed in a hemispherical shape, and the other end is formed with a ridge portion projecting to the outer diameter side.
  • the first light emitting element 33 one having a peak of the spectrum of emitted light at 250 to 260 nm is used (here, the peak wavelength is 253.7 nm, the directivity is high, and the half width is ⁇ 10 Using UV light LED (Urtra Violet optical Light Emitting Diode) less than °°).
  • the 1st light emitting element 33 can be used in order to measure the light absorbency of the contents of sample water which is a detection subject.
  • the second light emitting element 34 uses a light emitting spectrum having a peak at 660 nm (here, a red light having a peak wavelength of 660 nm, high directivity, and a half width of ⁇ 10 ° or more).
  • LED Red Light Emitting Diode
  • the second light emitting element 34 can be used to measure the transmitted light turbidity (for example, JIS K 0101 (1998)) of the sample water which is the detection target.
  • the reflector 4 comprises a first reflecting member 35 and a second reflecting member 36.
  • Both of the reflecting members 35 and 36 are formed by forming a metal material (in this case, stainless steel is used) as a base material into a cross-sectional right-angled isosceles triangle, and include inclined surfaces 35 a and 36 a. At least the inclined surfaces 35a and 36a are mirror-finished, and the surface is plated (in this case, Au having a small change in physical properties due to light irradiation is used) to form a plated layer, thereby forming reflective surfaces 35a and 36a.
  • the first reflection member 35 is fixed to the bottom surface of the first recess 16 by bonding, welding or the like so that the inclined surface 35 a is directed obliquely upward.
  • the upper half of the first through hole 18 of the first mount 15 is covered with one plane.
  • the second reflection member 36 is also fixed to the bottom surface of the first recess 16 in a state of covering the upper half of the second through hole 19 of the first mount 15.
  • the reflection surfaces 35a and 36a have an inclination angle of 45 ° with respect to the light emitting direction of the light from the light emitting element, and the upper half of the light is converted by 90 °.
  • the light receiver 5 is composed of the first photoelectric conversion element 37 and the second photoelectric conversion element 38 which are the first light receiving portion, and the third photoelectric conversion element 39 and the fourth photoelectric conversion element 40 which is the second light receiving portion. There is. Both the first photoelectric conversion element 37 and the second photoelectric conversion element 38 are mounted to the third concave portion 20 and the fourth concave portion 21 of the first mounting base 15 in a state where the collar 41 is mounted on the outer periphery. In this mounted state, the light whose direction is converted by 90 ° by the reflector 4 is received by the first photoelectric conversion element 37 and the second photoelectric conversion element 38, respectively. In the first photoelectric conversion element 37 and the second photoelectric conversion element 38, the received light is converted into an electric signal indicating the light intensity.
  • the third photoelectric conversion element 39 and the fourth photoelectric conversion element 40 are respectively mounted in the fifth concave portion 29 and the sixth concave portion 30 of the second mounting base 28 in a state where the collar 41 is mounted on the outer periphery .
  • the lower half of the light from each of the light emitting elements 33 and 34 that has passed the sample water in the measurement cell unit 8 goes straight without changing the direction by the reflector 4 and the third photoelectric conversion element 39
  • the light is respectively received by the fourth photoelectric conversion element 40.
  • the received light is converted into an electric signal indicating the light intensity.
  • the controller 6 calculates the absorbance and the turbidity of the sample water based on the electric signals input from the photoelectric conversion elements 37 to 40.
  • the first reflection member 35 and the second reflection member 36, the first light emitting element 33 and the second light emitting element 34, and the first photoelectric conversion element 37 and the second photoelectric conversion element 38 are mounted on the first mounting base 15 respectively.
  • the first optical unit 42 is formed.
  • the first reflecting member 35 and the second reflecting member 36 are attached to the first recess 16 of the first mounting base 15.
  • the first reflection member 35 is positioned on the bottom surface of the first recess 11 so that the upper half of the first through hole 18 is covered with the flat surface with the reflection surface 35 a at the upper side.
  • the second reflecting member 36 is positioned on the bottom surface of the first recess 11 so that the upper half of the second through hole 19 is covered by one plane with the reflecting surface 36a on the upper side. .
  • the first light emitting element 33 is attached to the first recess 16, and the second light emitting element 34 is attached to the second recess 17.
  • cylindrical collars (not shown) are attached to the outer circumferences of the light emitting elements 33 and 34. And it fixes to each recessed part 16 and 17 by adhesion etc.
  • the lenses of the light emitting elements 33 and 34 are positioned facing each other with a slight gap with respect to the reflecting members 35 and 36 mounted previously.
  • the irradiation range of the light output from the light emitting elements 33 and 34 is substantially the same size as the opening area of the through holes 18 and 19.
  • a light separator structure is configured by the first light emitting element 33 and the first reflecting member 35, and the second light emitting element 34 and the second reflecting member 36, respectively.
  • the first photoelectric conversion element 37 is attached to the third recess 20 of the first mounting base 15, and the second light emitting element 34 is attached to the fourth recess 21.
  • the first light emitting element 33 and the first photoelectric conversion element 37 are positions where the traveling direction (optical path) of the light output from the first light emitting element 33 and the axial center of the first photoelectric conversion element 37 are orthogonal to each other. It becomes a relationship.
  • the second light emitting element 34 and the second photoelectric conversion element 38 have a positional relationship in which the traveling direction (optical path) of the light output from the second light emitting element 34 is orthogonal to the axial center of the second photoelectric conversion element 38 It becomes.
  • the light emitting elements 33 and 34, the reflecting members 35 and 36, and the photoelectric conversion elements 37 and 38 can be assembled to the first mounting base 15. It is easy to set the positional relationship accurately. That is, the light emitting elements 33 and 34, the reflecting members 35 and 36, and the assembled members can be assembled simply by accurately forming the inner diameter dimension and the positional relationship of the concave portions 16 and 17 and the through holes 18 and 19 The positional relationship between the photoelectric conversion elements 37 and 38 can also be set accurately. Therefore, since parts requiring machining and assembly accuracy can be completed in advance as the first optical unit 42, subsequent assembly operations can be smoothly performed.
  • the first transmitting member 13 is attached to the first detection window 12 formed in the first recess 11 of the device body 2.
  • the first optical unit 42 completed as described above is mounted in the first recess 11.
  • the mounting of the first optical unit 42 is performed by positioning the first mount 15 at a predetermined position in the first recess 11 and screwing the first mount 15 on the bottom surface of the first recess 11.
  • the openings of the first through holes 18 and the second through holes 19 can be positioned in the regions through which the light emitted from the first light emitting element 33 and the second light emitting element 34 passes.
  • the upper half of the light emitted from the first light emitting element 33 and the second light emitting element 34 is reflected by the first reflecting member 35 and the second reflecting member 36 to become reference light, and the first photoelectric conversion element 37 And the lower half of the remaining portion becomes measurement light which passes through the first transmission member 13 as it is.
  • the third photoelectric conversion element 39 and the fourth photoelectric conversion element 40 are mounted on the second mount 28 to form the second optical unit 43. That is, the third photoelectric conversion element 39 and the fourth photoelectric conversion element 40 are respectively mounted to the fifth concave portion 29 and the sixth concave portion 30 of the second mount 28 via the collar 41.
  • the second transmission member 26 is attached to the second detection window 25 formed in the second recess 24 of the apparatus main body 2, and then the second optical unit 43 is assembled. Installing. In this mounted state, the third photoelectric conversion element 39 and the fourth photoelectric conversion element 40 are located in the lower half of the emission ranges of the first light emitting element 33 and the second light emitting element 34.
  • the water quality monitoring device 1 is immersed in the sample water, and the sample water is interposed in the measurement cell unit 8 between the first support 9 and the second support 10. Then, light having different peak values of the spectrum is emitted from the first light emitting element 33 and the second light emitting element 34 of the light emitting source 3 as described above.
  • the upper half of the light emitted from the first light emitting element 33 is reflected by the reflecting surface 35 a of the first reflecting member 35 and is 90 ° converted, and the upper first photoelectric conversion element is converted as reference light.
  • Light is received at 37.
  • the lower half of the emitted light passes through the sample water of the measurement cell unit 8 as attenuation light that travels straight and is attenuated, and then received by the third photoelectric conversion element 39.
  • the first reflection member 35 divides the light emitted from the first light emitting element 33 into reference light and measurement light having substantially the same light intensity.
  • the control device 6 receives the electrical signals converted by the photoelectric conversion elements 37 and 38 via the amplifier and compares them to determine the absorbance of the sample water. When the optical path length is constant, it is known from Lambert-Beer's law that the absorbance increases or decreases in proportion to the concentration of the sample water, so the concentration of the contents of the sample water can be calculated from the determined absorbance .
  • the upper half of the light emitted from the second light emitting element 34 is also reflected by the reflecting surface 35 a of the second reflecting member 36 so as to be 90 ° converted, and is received by the upper second photoelectric conversion element 38 as reference light.
  • the lower half of the emitted light passes through the sample water of the measurement cell unit 8 as attenuation light that travels straight and is attenuated, and then received by the fourth photoelectric conversion element 40.
  • the control device 6 receives the electric signals converted by the photoelectric conversion elements 37 and 38, and compares the two to obtain the turbidity of the sample water.
  • the reflection angle in the reflector 4 was 90 degrees, it can set not only to this angle but various angles according to the specification of an apparatus.
  • the upper half of the first through hole 18 is covered by the reflector 4, but the half may be covered at any position, such as covering the lower half, the right half or the left half. Also, the coverage is not limited to half, and the ratio can be changed as needed.
  • the light reflected by the reflector 4 is used as the reference light, and the light that is passed without being reflected is used as the measurement light, but may be reversed. In this case, reflected light which is measurement light may be transmitted to the measurement cell unit 8.
  • the reflection members 35 and 36 of the reflector 4 are configured to form a plated layer on the surface of a metal material, but the plated layer is not necessary by forming it with aluminum having high purity. It can also be done.
  • the reflectance of UV light on the reflective surface can be 90% or more (in the case of gold plating, the reflectance of UV light is about 30%).
  • two sets of the light emitting element, the reflecting member, and the photoelectric conversion element are provided.
  • only one set may be used.
  • control device 6 is provided in the device body 2 in the above embodiment, it may be provided separately.
  • the detection signals of the photoelectric conversion elements 37 and 38 may be input to the control device 6 by wire, or may be input by wireless by providing communication means.
  • half of the light from the light emitting elements 33 and 34 is reflected by the reflecting members 35 and 36 so that the light intensities of the reference light and the measurement light become substantially the same.
  • the proportion of light may be increased to increase the light intensity. According to this, even when the content of the sample is large and the absorbance by the content is high, it is possible to cope (detect) by increasing the light intensity of the measurement light.
  • the light from the first light emitting element 33 is reflected by the first reflecting member 35, and the light from the second light emitting element 34 is reflected by the second reflecting member 36 separately.
  • the common reflecting member is used. May be configured to reflect light. According to this, it is possible to simplify the mounting operation of the reflecting members 35 and 36 and to further miniaturize the first optical unit 42.
  • SYMBOLS 1 Water quality monitoring apparatus 2 ... Device main body 3 ... Light emission source 4 ... Reflector 5 ... Light receiver 6 ... Control apparatus 7 ... Base part 8 ... Measurement cell part 9 ... 1st support part 10 ... 2nd support part 11 ... 2nd part DESCRIPTION OF SYMBOLS 1 recess 12 first detection window 13 first transmission member 15 first mount 16 first recess 17 second recess 18 first through hole 19 second through hole 20 third recess 21 Fourth recess 22: third through hole 23: fourth through hole 24: second recess 25: second detection window 26: second transmitting member 28: second mounting base 29: fifth recess 30: sixth recess 31 ... fifth through hole 32 ... sixth through hole 33 ...
  • first light emitting element 34 ... second light emitting element 35 ... first reflecting member 36 ... second reflecting member 37 ... first photoelectric conversion element 38 ... second photoelectric conversion element 39 3rd photoelectric conversion element 40 ... 4th photoelectric conversion element 41 ... color 42 ... 1st optical unit 43 ... 2nd optical unit

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2018/023282 2017-07-28 2018-06-19 光セパレータ構造及び物質濃度測定装置 Ceased WO2019021694A1 (ja)

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KR102231001B1 (ko) * 2020-09-22 2021-03-23 한창기전 주식회사 Uv led를 이용한 유기물질 측정 장치
KR102231002B1 (ko) * 2020-09-22 2021-03-23 한창기전 주식회사 Uv led를 이용한 유기물질 측정 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0915153A (ja) * 1995-06-28 1997-01-17 Dainippon Screen Mfg Co Ltd 透過率測定装置
JP2003535327A (ja) * 2000-05-31 2003-11-25 テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム 気相媒体を製造する方法および装置
JP2007147749A (ja) * 2005-11-24 2007-06-14 Nikon Corp 焦点検出装置およびオートフォーカス装置
US20100149537A1 (en) * 2006-11-02 2010-06-17 Myrick Michael L Improved signal processing for optical computing system
JP6249513B1 (ja) * 2017-03-27 2017-12-20 レーザーテック株式会社 補正方法、補正装置及び検査装置

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Publication number Priority date Publication date Assignee Title
JP2005037253A (ja) * 2003-07-15 2005-02-10 Olympus Corp グルコース濃度測定装置
JP2008002903A (ja) * 2006-06-21 2008-01-10 Mitsui Mining & Smelting Co Ltd 青果物の内部品質評価装置
JP6590344B2 (ja) * 2015-01-09 2019-10-16 国立大学法人電気通信大学 光学測定装置及び光学測定方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0915153A (ja) * 1995-06-28 1997-01-17 Dainippon Screen Mfg Co Ltd 透過率測定装置
JP2003535327A (ja) * 2000-05-31 2003-11-25 テトラ ラバル ホールデイングス エ フイナンス ソシエテ アノニム 気相媒体を製造する方法および装置
JP2007147749A (ja) * 2005-11-24 2007-06-14 Nikon Corp 焦点検出装置およびオートフォーカス装置
US20100149537A1 (en) * 2006-11-02 2010-06-17 Myrick Michael L Improved signal processing for optical computing system
JP6249513B1 (ja) * 2017-03-27 2017-12-20 レーザーテック株式会社 補正方法、補正装置及び検査装置

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