WO2018216527A1 - フィルタ制御式導出方法、光計測システム、ファブリペロー干渉フィルタの制御方法、及び、フィルタ制御プログラム - Google Patents
フィルタ制御式導出方法、光計測システム、ファブリペロー干渉フィルタの制御方法、及び、フィルタ制御プログラム Download PDFInfo
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- perot interference
- interference filter
- movable mirror
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
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- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/066—Microprocessor control of functions, e.g. slit, scan, bandwidth during scan
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
Definitions
- the present disclosure relates to a filter control expression derivation method, an optical measurement system, a Fabry-Perot interference filter control method, and a filter control program.
- Patent Literature 1 includes a fixed mirror unit and a movable mirror unit, and the gap between the fixed mirror unit and the movable mirror unit is variable by displacing the movable mirror unit with respect to the fixed mirror unit.
- a Fabry-Perot interference filter is disclosed. In this Fabry-Perot interference filter, the transmission wavelength is controlled by changing the gap by controlling the voltage applied to the fixed mirror part and the movable mirror part.
- the relationship between the gap length between the mirrors and the applied voltage varies between individuals even when manufactured by the same manufacturing apparatus.
- the transmission wavelength is different for each individual. Therefore, it is necessary to acquire the relationship between the applied voltage and the transmission wavelength for each individual.
- the relationship between the applied voltage and the transmission wavelength is not generalized, enormous measurement time is required to obtain this relationship with high accuracy.
- An object of one embodiment of the present disclosure is to provide a filter control expression derivation method that can suitably acquire a relationship between an applied voltage and a transmission wavelength.
- the electrostatic force generated between the fixed mirror unit and the movable mirror unit balances with the elastic force generated in the movable mirror unit.
- the relational expression between the transmission wavelength of light transmitted through the Fabry-Perot interference filter and the voltage based on the relational expression between the electrostatic force and the elastic force.
- a second derivation step that is derived as a data control equation.
- the light transmitted through the Fabry-Perot interference filter is applied in a state where each of a plurality of different voltages is applied as a predetermined measurement. Measure the transmission wavelength.
- the distance between the fixed mirror part and the movable mirror part is controlled by the balance between the electrostatic force and the elastic force.
- the transmission wavelength is variable by controlling the distance.
- the electrostatic force is determined according to the applied voltage
- the elastic force is determined according to the deflection amount of the movable mirror portion and the elastic index.
- the amount of deflection is a distance obtained by subtracting the distance between mirrors in a state where a voltage is applied from the distance between mirrors in a state where no voltage is applied. That is, the distance between the mirrors can be obtained from the amount of deflection.
- a relational expression between the transmission wavelength of light passing through the Fabry-Perot interference filter and a voltage is derived based on the relational expression between the deflection amount and the elastic index of the movable mirror part and the relational expression between the electrostatic force and the elastic force.
- the distance between the mirrors and the amount of deflection can be obtained based on the transmission wavelength
- the relational expression between the amount of deflection and the elasticity index is obtained by measuring the transmission wavelength with each of a plurality of different voltages applied.
- the relational expression between the amount of deflection and the elasticity index is described as a second-order or higher-order polynomial with the deflection amount as a variable. Therefore, the elasticity index can be easily and accurately derived. This is a finding found by the present inventors. Therefore, the relationship between the applied voltage and the transmission wavelength can be suitably acquired.
- the method further includes a third derivation step for deriving a correction term having the amount of deflection and the amount of change in environmental temperature as a variable.
- a relational expression between the transmission wavelength and the voltage is calculated so as to include the correction term. It may be derived as a filter control expression.
- the prepared Fabry-Perot interference filter in the first derivation step, includes a predetermined environmental temperature and performs a predetermined measurement at each of a plurality of different environmental temperatures.
- a correction term having the amount of deflection and the amount of change in environmental temperature as variables may be derived, and in the second derivation step, a relational expression between the transmission wavelength and the voltage may be derived as a filter control expression so as to include the correction term.
- an electrostatic force generated between the fixed mirror unit and the movable mirror unit balances with an elastic force generated in the movable mirror unit.
- a Fabry-Perot interference filter in which the distance between the movable mirror unit and the movable mirror unit is controlled, and an electrostatic force including an elastic index of the movable mirror unit described as a second-order or higher-order polynomial with the amount of deflection of the movable mirror unit as a variable
- a control device for controlling the voltage based on the relational expression with the elastic force.
- the voltage is controlled so as to correspond to the transmission wavelength based on the relational expression between the electrostatic force and the elastic force.
- the electrostatic force is determined according to the voltage applied to the fixed mirror portion and the movable mirror portion
- the elastic force is determined according to the deflection amount and the elasticity index of the movable mirror portion.
- This elasticity index is described as a second-order or higher-order polynomial having the amount of deflection of the movable mirror as a variable, and varies according to the variation of the amount of deflection. Therefore, the transmission wavelength of light can be controlled with high accuracy.
- a control method for controlling the voltage which is a second-order or higher-order polynomial with the amount of deflection of the movable mirror unit as a variable
- the filter control program balances the electrostatic force generated between the fixed mirror unit and the movable mirror unit with the elastic force generated in the movable mirror unit when a voltage is applied.
- a program for causing a computer to execute a process for controlling the voltage wherein the computer uses the deflection amount of the movable mirror unit as a variable
- a voltage derivation for deriving a voltage corresponding to the transmission wavelength of the light transmitted through the Fabry-Perot interference filter based on the relational expression between the electrostatic force and the elastic force including the elasticity index of the movable mirror part described as a second-order or higher-order polynomial.
- a voltage setting unit that sets the derived voltage as an applied voltage.
- the recording medium according to one aspect of the present disclosure is a computer-readable recording medium that records a filter control program.
- FIG. 1 is a cross-sectional view of a photodetector according to an embodiment.
- FIG. 2 is a perspective view of a Fabry-Perot interference filter.
- 3 is a cross-sectional view taken along line III-III in FIG.
- FIG. 4 is a block diagram for explaining the optical measurement system.
- FIG. 5 is a schematic diagram for explaining the operation of the Fabry-Perot interference filter.
- FIG. 6 shows the result of the simulation of the relationship between the distance between the mirrors and the transmission wavelength.
- FIG. 7 is a graph plotting the relationship between the amount of deflection and the elasticity index.
- FIG. 8 is a graph in which the relationship between V 2 / x 2 and the amount of deflection is plotted for each temperature.
- FIG. 9 is a graph in which each temperature change is plotted on the horizontal axis and the amount of change in V 2 / x 2 is plotted on the vertical axis in each deflection amount of FIG.
- FIG. 10 is a graph showing the relationship between the slope of the regression line and the deflection amount of each graph of FIG.
- FIG. 11 is a graph showing a deviation from the linear approximation in each graph of FIG.
- FIG. 12 is an example of a graph in which e ⁇ ⁇ T 2 is plotted on the vertical axis and the amount of deflection is plotted on the horizontal axis.
- FIG. 13 is a flowchart showing a filter control expression derivation method.
- FIG. 14 is a diagram illustrating a filter control program.
- FIG. 15 is a diagram showing the results of the example.
- the light detection device 1 includes a package 2.
- the package 2 is a CAN package having a stem 3 and a cap 4.
- the cap 4 is integrally formed by the side wall 5 and the top wall 6.
- the stem 3 and the cap 4 are made of a metal material and are airtightly joined to each other.
- the shape of the side wall 5 is a cylindrical shape having a predetermined line L as a center line.
- the stem 3 and the top wall 6 are opposed to each other in a direction parallel to the line L, and close both ends of the side wall 5.
- a wiring board 7 is fixed to the inner surface 3 a of the stem 3.
- a substrate material of the wiring substrate 7 for example, silicon, ceramic, quartz, glass, plastic, or the like can be used.
- a light detector (light detection unit) 8 and a temperature detector 16 such as a thermistor (see FIG. 4) are mounted on the wiring board 7.
- the photodetector 8 is disposed on the line L. More specifically, the photodetector 8 is arranged so that the center line of the light receiving portion coincides with the line L.
- the photodetector 8 is an infrared detector such as a quantum sensor using InGaAs or the like, or a thermal sensor using a thermopile or bolometer.
- a silicon photodiode When detecting light in each of the ultraviolet, visible, and near-infrared wavelength regions, for example, a silicon photodiode can be used as the photodetector 8.
- the photodetector 8 may be provided with one light receiving portion, or a plurality of light receiving portions may be provided in an array.
- a plurality of photodetectors 8 may be mounted on the wiring board 7.
- the temperature detector 16 may be arranged, for example, at a position close to the Fabry-Perot interference filter 10 so that a temperature change of the Fabry-Perot interference filter 10 can be detected.
- a plurality of spacers 9 are fixed on the wiring board 7.
- a material of each spacer 9 for example, silicon, ceramic, quartz, glass, plastic, or the like can be used.
- a Fabry-Perot interference filter 10 is fixed on the plurality of spacers 9 by, for example, an adhesive.
- the Fabry-Perot interference filter 10 is disposed on the line L. More specifically, the Fabry-Perot interference filter 10 is arranged so that the center line of the light transmission region 10a coincides with the line L.
- the spacer 9 may be integrally formed with the wiring board 7.
- the Fabry-Perot interference filter 10 may be supported by one spacer 9 instead of the plurality of spacers 9.
- a plurality of lead pins 11 are fixed to the stem 3. More specifically, each lead pin 11 penetrates the stem 3 while maintaining electrical insulation and airtightness with the stem 3.
- Each lead pin 11 is electrically connected to an electrode pad provided on the wiring board 7, a terminal of the photodetector 8, a terminal of the temperature detector 16, and a terminal of the Fabry-Perot interference filter 10 by a wire 12.
- the photodetector 8, the temperature detector 16, and the Fabry-Perot interference filter 10 may be electrically connected to each lead pin 11 via the wiring board 7.
- each terminal and an electrode pad provided on the wiring board 7 may be electrically connected, and the electrode pad and each lead pin 11 may be connected by a wire 12.
- the package 2 has an opening 2a. More specifically, the opening 2 a is formed in the top wall 6 of the cap 4 so that the center line thereof coincides with the line L. When viewed from a direction parallel to the line L, the shape of the opening 2a is circular.
- a light transmitting member 13 is disposed on the inner surface 6a of the top wall 6 so as to close the opening 2a. The light transmitting member 13 is airtightly joined to the inner surface 6 a of the top wall 6.
- the light transmitting member 13 has a light incident surface 13a, a light emitting surface (inner surface) 13b, and a side surface 13c that face each other in a direction parallel to the line L.
- the light incident surface 13a of the light transmitting member 13 is substantially flush with the outer surface of the top wall 6 at the opening 2a.
- the side surface 13 c of the light transmitting member 13 is in contact with the inner surface 5 a of the side wall 5 of the package 2. That is, the light transmitting member 13 reaches the inside of the opening 2 a and the inner surface 5 a of the side wall 5.
- Such a light transmission member 13 is formed by disposing a glass pellet inside the cap 4 with the opening 2a on the lower side and melting the glass pellet. That is, the light transmission member 13 is formed of fused glass.
- a band pass filter 14 is fixed to the light emitting surface 13 b of the light transmitting member 13 by an adhesive member 15. That is, the adhesive member 15 fixes the band pass filter 14 to the inner surface 6 a of the top wall 6 through the light transmitting member 13 joined to the inner surface 6 a of the top wall 6.
- the band-pass filter 14 is light in the measurement wavelength range of the light detection device 1 out of light transmitted through the light transmission member 13 (light in a predetermined wavelength range and is incident on the light transmission region 10 a of the Fabry-Perot interference filter 10. Light to be transmitted) is selectively transmitted (that is, only light in the wavelength range is transmitted).
- the shape of the bandpass filter 14 is a quadrangular plate.
- the bandpass filter 14 has a light incident surface 14a and a light exit surface 14b, and four side surfaces 14c that face each other in a direction parallel to the line L.
- the bandpass filter 14 has a dielectric multilayer film (for example, TiO 2, Ta 2 O 5, etc.) and a high refractive material such as TiO 2, Ta 2 O 5
- a multilayer film made of a combination with a low refractive material such as SiO 2 or MgF 2 is formed.
- the adhesive member 15 has a first portion 15 a disposed in the entire region of the light incident surface 14 a of the bandpass filter 14.
- the first portion 15 a is a portion of the adhesive member 15 that is disposed between the light emitting surface 13 b of the light transmitting member 13 and the light incident surface 14 a of the bandpass filter 14 that face each other.
- the adhesive member 15 has a second portion 15 b that protrudes outward from the outer edge of the bandpass filter 14 when viewed from a direction parallel to the line L.
- the second portion 15 b reaches the inner surface 5 a of the side wall 5 and is in contact with the inner surface 5 a of the side wall 5. Further, the second portion 15 b is in contact with the side surface 14 c of the band pass filter 14.
- the light detection device 1 when light enters the bandpass filter 14 from the outside via the opening 2a, the light transmission member 13, and the adhesive member 15, light in a predetermined wavelength range is selected. Transparent.
- the light transmitted through the bandpass filter 14 enters the light transmission region 10a of the Fabry-Perot interference filter 10
- light having a predetermined wavelength is selectively transmitted among the light in the predetermined wavelength range.
- the light transmitted through the light transmission region 10 a of the Fabry-Perot interference filter 10 enters the light receiving portion of the photodetector 8 and is detected by the photodetector 8. That is, the photodetector 8 converts the light transmitted through the Fabry-Perot interference filter 10 into an electrical signal and outputs the electrical signal.
- the distance between the first mirror part (fixed mirror part) 35 and the second mirror part (movable mirror part) 36 (between a pair of mirrors) is set.
- a light transmission region 10 a that transmits the corresponding light is provided on the line L.
- the light transmission region 10a is, for example, a columnar region.
- the distance between the first mirror part 35 and the second mirror part 36 is controlled with extremely high accuracy. That is, the light transmission region 10a controls the distance between the first mirror unit 35 and the second mirror unit 36 to a predetermined distance in order to selectively transmit light having a predetermined wavelength in the Fabry-Perot interference filter 10. This is a region where light having a predetermined wavelength corresponding to the distance between the first mirror unit 35 and the second mirror unit 36 can be transmitted.
- the Fabry-Perot interference filter 10 includes a rectangular plate-like substrate 21.
- the substrate 21 has a first surface 21a and a second surface 21b that face each other in a direction parallel to the line L.
- the first surface 21a is a surface on the light incident side.
- the second surface 21b is a surface on the photodetector 8 side (that is, the light emission side).
- the first layer structure 30 is disposed on the first surface 21a.
- the second layer structure 40 is disposed on the second surface 21b.
- the first layer structure 30 is configured by laminating the first antireflection layer 31, the first laminated body 32, the first intermediate layer 33, and the second laminated body 34 in this order on the first surface 21a. Yes.
- a gap (air gap) S is formed by the frame-shaped first intermediate layer 33 between the first stacked body 32 and the second stacked body 34.
- the substrate 21 is made of, for example, silicon, quartz, glass or the like.
- the first antireflection layer 31 and the first intermediate layer 33 are made of, for example, silicon oxide.
- the thickness of the first intermediate layer 33 is, for example, several tens of nm to several tens of ⁇ m.
- the portion corresponding to the light transmission region 10 a in the first stacked body 32 functions as the first mirror unit 35.
- the first stacked body 32 is configured by alternately stacking a plurality of polysilicon layers and a plurality of silicon nitride layers one by one.
- the optical thickness of each of the polysilicon layer and the silicon nitride layer constituting the first mirror part 35 is preferably an integral multiple of 1/4 of the center transmission wavelength.
- the 1st mirror part 35 may be directly arrange
- the portion corresponding to the light transmission region 10 a in the second stacked body 34 functions as the second mirror portion 36.
- the second mirror part 36 faces the first mirror part 35 via the gap SP in the direction parallel to the line L.
- the second stacked body 34 is configured by alternately stacking a plurality of polysilicon layers and a plurality of silicon nitride layers one by one. Each optical thickness of the polysilicon layer and the silicon nitride layer constituting the second mirror portion 36 is preferably an integral multiple of 1/4 of the center transmission wavelength.
- a silicon oxide layer may be disposed instead of the silicon nitride layer.
- titanium oxide, tantalum oxide, zirconium oxide, magnesium fluoride, aluminum oxide, calcium fluoride, silicon Germanium, zinc sulfide, or the like can be used as a material of each layer which comprises the 1st laminated body 32 and the 2nd laminated body 34.
- a plurality of through holes 34b extending from the surface 34a opposite to the first intermediate layer 33 in the second stacked body 34 to the space SP are formed in a portion corresponding to the space SP in the second stacked body 34.
- the plurality of through holes 34b are formed to such an extent that the function of the second mirror portion 36 is not substantially affected.
- the plurality of through holes 34b are used for removing a part of the first intermediate layer 33 by etching to form the gap SP.
- the first electrode 22 is formed on the first mirror portion 35 so as to surround the light transmission region 10a.
- a second electrode 23 is formed on the first mirror portion 35 so as to include the light transmission region 10a. That is, the first mirror unit 35 includes the first electrode 22 and the second electrode 23.
- the first electrode 22 and the second electrode 23 are formed by doping impurities into the polysilicon layer closest to the gap SP in the first stacked body 32 to reduce the resistance.
- a third electrode 24 is formed on the second mirror portion 36. That is, the second mirror unit 36 includes the third electrode 24.
- the third electrode 24 faces the first electrode 22 and the second electrode 23 with the gap SP in the direction parallel to the line L.
- the third electrode 24 is formed by doping the polysilicon layer closest to the gap SP in the second stacked body 34 to reduce the resistance.
- the size of the second electrode 23 is preferably the size including the entire light transmission region 10a, but may be substantially the same as the size of the light transmission region 10a.
- the first layer structure 30 is provided with a pair of first terminals 25 and a pair of second terminals 26.
- the pair of first terminals 25 face each other across the light transmission region 10a.
- Each first terminal 25 is disposed in a through hole extending from the surface 34 a of the second stacked body 34 to the first stacked body 32.
- Each first terminal 25 is electrically connected to the first electrode 22 via a wiring 22a.
- the pair of second terminals 26 oppose each other across the light transmission region 10a in a direction perpendicular to the direction in which the pair of first terminals 25 oppose each other.
- Each second terminal 26 is disposed in a through hole extending from the surface 34 a of the second stacked body 34 to the inside of the first intermediate layer 33.
- Each second terminal 26 is electrically connected to the second electrode 23 via the wiring 23a and is also electrically connected to the third electrode 24 via the wiring 24a.
- the trenches 27 and 28 are provided on the surface 32 a on the first intermediate layer 33 side in the first stacked body 32.
- the trench 27 extends in an annular shape so as to surround a connection portion between the wiring 23a and the second terminal 26.
- the trench 27 electrically insulates the first electrode 22 and the wiring 23a.
- the trench 28 extends in a ring shape along the inner edge of the first electrode 22.
- the trench 28 electrically insulates the first electrode 22 and a region inside the first electrode 22 (that is, a region where the second electrode 23 exists).
- a trench 29 is provided on the surface 34 a of the second stacked body 34.
- the trench 29 extends in an annular shape so as to surround the first terminal 25.
- the trench 29 electrically insulates the first terminal 25 and the third electrode 24.
- the region in each of the trenches 27, 28, 29 may be an insulating material or a gap.
- the second layer structure 40 is configured by laminating the second antireflection layer 41, the third laminated body 42, the second intermediate layer 43, and the fourth laminated body 44 in this order on the second surface 21b. Yes.
- the second antireflection layer 41, the third laminate 42, the second intermediate layer 43, and the fourth laminate 44 are the first antireflection layer 31, the first laminate 32, the first intermediate layer 33, and the second laminate, respectively. It has the same configuration as the body 34.
- the second layer structure 40 has a laminated structure symmetrical to the first layer structure 30 with respect to the substrate 21. That is, the second layer structure 40 is configured to correspond to the first layer structure 30.
- the second layer structure 40 has a function of suppressing warpage of the substrate 21 and the like.
- an opening 40a is formed so as to include the light transmission region 10a.
- the center line of the opening 40a coincides with the line L.
- the opening 40a is a columnar region, for example, and has substantially the same diameter as the light transmission region 10a.
- the opening 40 a opens to the light emitting side, and the bottom surface of the opening 40 a reaches the second antireflection layer 41.
- the opening 40a allows the light transmitted through the first mirror part 35 and the second mirror part 36 to pass therethrough.
- a light shielding layer 45 is formed on the light emitting surface of the fourth laminate 44.
- the light shielding layer 45 is made of, for example, aluminum.
- a protective layer 46 is formed on the surface of the light shielding layer 45 and the inner surface of the opening 40a.
- the protective layer 46 is made of, for example, aluminum oxide. The optical influence of the protective layer 46 can be ignored by setting the thickness of the protective layer 46 to 1 to 100 nm (preferably about 30 nm).
- the Fabry-Perot interference filter 10 configured as described above has a pair of first mirror part 35 and second mirror part 36 that are opposed to each other with a gap SP therebetween, and a pair of first mirror part 35 and second mirror.
- the distance between the pair of first mirror part 35 and second mirror part 36 changes according to the potential difference generated between the parts 36. That is, in the Fabry-Perot interference filter 10, a voltage is applied to the first electrode 22 and the third electrode 24 via the pair of first terminals 25 and the pair of second terminals 26. Thereby, a potential difference is generated between the first electrode 22 and the third electrode 24 by the voltage, and an electrostatic force corresponding to the potential difference is generated between the first electrode 22 and the third electrode 24.
- the second mirror part 36 is attracted to the first mirror part 35 fixed to the substrate 21, and the distance between the first mirror part 35 and the second mirror part 36 is adjusted.
- a region surrounding the light transmission region 10a in the second stacked body 34 having the second mirror portion 36 is deformed (inclined), thereby transmitting light.
- the second mirror portion 36 corresponding to the region 10a is drawn toward the first mirror portion 35 while maintaining flatness. That is, when the part of the second stacked body 34 having the second mirror part 36 is deformed, the second mirror part 36 is attracted to the first mirror part 35 side.
- the distance between the first mirror part 35 and the second mirror part 36 is variable.
- the wavelength (peak transmission wavelength) of light transmitted through the Fabry-Perot interference filter 10 depends on the distance between the first mirror part 35 and the second mirror part 36 (inter-mirror distance) in the light transmission region 10a. Therefore, by adjusting the voltage applied to the first electrode 22 and the third electrode 24, the wavelength of the transmitted light can be appropriately selected.
- the second electrode 23 is at the same potential as the third electrode 24. Therefore, the second electrode 23 functions as a compensation electrode for keeping the first mirror part 35 and the second mirror part 36 flat in the light transmission region 10a.
- the light detection device 1 for example, while changing the voltage applied to the Fabry-Perot interference filter 10 (that is, changing the distance between the first mirror unit 35 and the second mirror unit 36 in the Fabry-Perot interference filter 10).
- the photodetector 8 By detecting the intensity of light transmitted through the light transmission region 10a of the Fabry-Perot interference filter 10 with the photodetector 8, a spectral spectrum can be obtained.
- the optical measurement system 100 includes a light detection device 1, a power supply device 60, and a control device 70.
- the light detection device 1 includes the Fabry-Perot interference filter 10, the light detector 8, and the temperature detector 16.
- the power supply device 60 can apply a voltage to the pair of first mirror part 35 and second mirror part 36 constituting the Fabry-Perot interference filter 10. More specifically, the power supply device 60 is electrically connected to the lead pin 11, and voltage is applied to the first electrode 22 and the third electrode 24 via the pair of first terminals 25 and the pair of second terminals 26. Is applied to generate a potential difference.
- the control device 70 includes a voltage deriving unit 71, a voltage setting unit 72, a signal data acquiring unit 73, and a temperature data acquiring unit 74.
- the control device 70 may be configured by a computer including an arithmetic circuit such as a CPU that performs arithmetic processing, a recording medium including a memory such as a RAM and a ROM, and an input / output device.
- the control device 70 may be configured by a computer such as a smart device including a smartphone, a tablet terminal, and the like.
- the control device 70 is electrically connected to the power supply device 60.
- the control device 70 is electrically connected to the light detector 8 and the temperature detector 16 of the light detection device 1.
- the Fabry-Perot interference filter control method executed in the control device 70 can be executed based on a program stored in the recording medium.
- the voltage deriving unit 71 derives information on the voltage applied to the Fabry-Perot interference filter 10 based on conditions set by the user, for example. For example, the voltage deriving unit 71 derives the magnitude of the applied voltage, the application timing, and the application duration.
- the voltage setting unit 72 generates a control signal according to the voltage information derived by the voltage deriving unit 71.
- the voltage setting unit 72 outputs a control signal to the power supply device 60 and controls the voltage applied from the power supply device 60 to the Fabry-Perot interference filter 10.
- the voltage applied to the Fabry-Perot interference filter 10 is a voltage applied to the first electrode 22 and the third electrode 24.
- the signal data acquisition unit 73 acquires the electrical signal converted by the photodetector 8. For example, the signal data acquisition unit 73 is applied to the Fabry-Perot interference filter 10 based on the control signal output from the voltage setting unit 72 to the power supply device 60 and the acquired electrical signal from the photodetector 8. The voltage and the electric signal acquired in a state where the voltage is applied can be associated and held.
- the temperature data acquisition unit 74 acquires the temperature of the Fabry-Perot interference filter 10.
- the temperature data acquisition unit 74 acquires the temperature of the Fabry-Perot interference filter 10 based on the input value from the temperature detector 16 in the light detection device 1. For example, when the temperature detector 16 is a thermistor, the temperature data acquisition unit 74 acquires the electrical resistance value of the thermistor and derives the temperature from the electrical resistance value.
- the voltage deriving unit 71 derives a voltage corresponding to the wavelength of the light to be measured so that the wavelength of the light transmitted through the Fabry-Perot interference filter 10 becomes the wavelength of the light to be measured.
- the voltage deriving unit 71 derives a voltage based on a filter control expression indicating a relational expression between the peak transmission wavelength and the voltage.
- the filter control expression is an expression for obtaining the voltage V applied to the mirror unit from the target peak transmission wavelength ⁇ .
- the potential of the first electrode 22 may be fixed to 0 V, and the voltage V may be applied to the second electrode 23 and the third electrode 24.
- the applied voltage V corresponds to a potential difference between the first electrode 22 and the third electrode 24.
- the filter control formula in this embodiment has a reference temperature parameter, a first temperature correction term (correction term), and a second temperature correction term (correction term).
- the reference temperature parameter is a parameter when the Fabry-Perot interference filter 10 is used at a reference environmental temperature.
- the first temperature correction term and the second temperature correction term are parameters for correcting the reference temperature parameter when the Fabry-Perot interference filter 10 is used at an environmental temperature different from the reference environmental temperature.
- FIG. 5 is a schematic diagram for explaining the operation of the Fabry-Perot interference filter.
- a potential difference is generated between the first mirror unit 35 and the second mirror unit 36, so that the first mirror unit 35 and the second mirror unit 36 ( Hereinafter, an electrostatic force is generated between the mirrors).
- the electrostatic force causes the second mirror portion 36 to bend so that the distance between the mirrors is reduced.
- the difficulty of bending the second mirror portion 36 is expressed as a virtual spring provided in the second mirror portion 36.
- the distance between the first mirror part 35 and the second mirror part 36 is controlled by balancing the elastic force generated by the deflection of the second mirror part 36 and the electrostatic force.
- the initial gap is g
- the distance between the mirrors is x
- the mirror area is S
- the dielectric constant of the medium between the mirrors is ⁇
- the refractive index of the medium between the mirrors is n
- the applied voltage is V
- 2 / ( ⁇ S) is a coefficient C
- the product of the coefficient C and the spring constant k is set as an elastic index k ′, so that the balance equation is V 2 / x 2 and the deflection amount m. It is expressed as a relational expression.
- the elasticity index k ′ can be an index indicating the difficulty of bending of the second mirror portion 36 as with the spring constant k.
- the value of the inter-mirror distance x is the value of the peak transmission wavelength ⁇ as it is. .
- the reflectivity depends on the wavelength, and the design value when forming each layer constituting the multilayer film
- the thickness There is a variation in thickness from the surface, and the behavior with respect to the wavelength varies from individual to individual.
- a conversion formula for converting the inter-mirror distance x into the peak transmission wavelength ⁇ is required.
- FIG. 6 shows the result of the simulation of the relationship between the mirror distance x and the peak transmission wavelength ⁇ .
- FIG. 6 shows a linear approximation of the simulation result together with the simulation result.
- a linear expression indicating the relationship between the mirror distance x and the peak transmission wavelength ⁇ can be derived.
- the conversion between the mirror distance x and the peak transmission wavelength ⁇ can be performed based on a linear expression indicating the relationship between the mirror distance x and the peak transmission wavelength ⁇ .
- FIG. 7 is a graph plotting the relationship between the deflection amount m and the elasticity index k ′ based on actual measurement data in about 2000 photodetection devices. That is, FIG. 7 shows a case where an applied voltage (as an example, 22V, 24V, 26V, 28V, 30V, 32V, 34V, 36V, 37V, 38V, 38.6V, 38 under a certain environmental temperature (for example, 25 ° C.). .9V,) is a graph in which the amount of deflection m and the elasticity index k ′ obtained based on the peak transmission wavelength ⁇ measured while changing is plotted for each photodetector.
- an applied voltage as an example, 22V, 24V, 26V, 28V, 30V, 32V, 34V, 36V, 37V, 38V, 38.6V, 38 under a certain environmental temperature (for example, 25 ° C.).
- .9V, is a graph in which the amount of deflection m and the
- the initial gap g is derived, for example, from the peak transmission wavelength ⁇ measured in a state where no voltage is applied between the mirrors.
- the relationship between the elastic index k ′ and the deflection amount m of the mirror shows a distribution that can be approximated by a quadratic polynomial. Therefore, the elasticity index k ′ can be expressed by the following equation (3) (a relational expression between the deflection amount and the elasticity index), which is a function having the deflection amount m as a variable.
- FIG. 8 is a graph in which the relationship between V 2 / x 2 and the amount of deflection m is plotted for each temperature based on actual measurement data of the photodetector.
- FIG. 9 shows an amount ⁇ (V 2 ) in which V 2 / x 2 changes with the reference temperature (25 ° C. in the illustrated example) set to zero and the temperature change ( ⁇ T) on the horizontal axis in each deflection amount m in FIG. / X 2 ) is a graph with the vertical axis. As shown in FIG.
- FIG. 10 is a graph showing the relationship between the slope ⁇ (V 2 / x 2 ) of the regression line and the deflection amount m. As shown in FIG.
- the relationship between ⁇ (V 2 / x 2 ) and the deflection amount m can be approximated in a substantially linear manner, and m in the order from the first to the third order can be obtained depending on the required accuracy. It can be expressed as a function. That is, the following expression (5) can be obtained as an expression indicating the first temperature correction term.
- the coefficients f, g, h, i are determined for each individual.
- FIG. 9 The relationship between ( ⁇ T) and ⁇ (V 2 / x 2 ) shown in FIG. 9 is actually a distribution that can be approximated by a quadratic polynomial. As the absolute value of ⁇ T increases, ⁇ ( V 2 / x 2 ) deviates from the regression line. Therefore, by using the second temperature correction term, more accurate temperature correction can be performed.
- Figure 11 is a graph showing the relationship between delta and (V 2 / x 2) deviation amount from the regression line in ⁇ (V 2 / x 2) and [Delta] T. As shown in FIG.
- FIG. 12 is an example of a graph in which e ⁇ ⁇ T 2 is plotted on the vertical axis and deflection amount m is plotted on the horizontal axis for a certain sample. As shown in FIG. 12, in this sample, e ⁇ ⁇ T 2 is expressed by a cubic expression of m. As shown in the figure, e ⁇ ⁇ T 2 may be approximated as a linear expression of m.
- the filter control formula in the present embodiment is expressed by the following formula (7).
- the filter control expression is represented by the general expression shown in Expression (8).
- step S1 preparation step
- step S1 preparation step
- Step S2 First derivation step. More specifically, for example, a voltage is applied to the Fabry-Perot interference filter 10 at a reference ambient temperature, and the peak transmission wavelength ⁇ is measured. Subsequently, the inter-mirror distance x is derived from the peak transmission wavelength ⁇ by referring to a linear expression showing the relationship between the inter-mirror distance x and the peak transmission wavelength ⁇ obtained from the simulation.
- the initial gap g can be obtained by measurement.
- a relational expression between the deflection amount m and the elasticity index k ' is derived (step S3: first derivation step).
- the deflection amount m and the elasticity index are determined by determining the coefficients a, b, and c of the polynomial.
- a relational expression with k ′ is derived. That is, the state in which the second mirror portion 36 is bent at the deflection amount m and the deflection amount m based on the inter-mirror distance x and the deflection amount m derived as described above, the voltage V and the equation (2).
- the elastic index k ′ at is derived.
- equation (4) relating to the prepared Fabry-Perot interference filter 10 is derived (step S4: second derivation step). Thereby, the filter control formula at the reference ambient temperature can be obtained.
- step S5 the first temperature correction term and the second temperature correction term are derived (step S5, step S6: third derivation step). That is, for the prepared Fabry-Perot interference filter 10, the inter-mirror distance x, the deflection amount m, and the voltage V at each environmental temperature are measured, and the above formulas (5) and (6) are derived. Thereby, Expression (7) for the prepared Fabry-Perot interference filter 10 is derived (step S7: second derivation step).
- the voltage setting unit 72 controls the voltage applied by the power supply device 60 based on the voltage derived by the voltage deriving unit 71.
- FIG. 14 is a diagram showing a recording medium 70a in which a filter control program P1 for causing a computer to function as the control device 70 is stored.
- the filter control program P1 stored in the recording medium 70a includes a voltage derivation module P11, a voltage setting module P12, a signal data acquisition module P13, and a temperature data acquisition module P14.
- the functions realized by executing the voltage derivation module P11, the voltage setting module P12, the signal data acquisition module P13, and the temperature data acquisition module P14 are the voltage derivation unit 71, the voltage setting unit 72, and the signal data acquisition unit 73, respectively.
- the function of the temperature data acquisition unit 74 is the same.
- the filter control program P1 is recorded in the program recording area of the recording medium 70a.
- the recording medium 70a is constituted by a recording medium such as a CD-ROM, a DVD, a ROM, or a semiconductor memory.
- the filter control program P1 may be provided via a communication network as a computer data signal superimposed on a carrier wave.
- the mirror distance is controlled by the balance between the electrostatic force and the elastic force, and the transmission wavelength is controlled by controlling the distance between the mirrors. Is variable.
- the electrostatic force is determined according to the voltage applied to the first mirror part 35 and the second mirror part 36
- the elastic force is determined according to the deflection amount and the elasticity index of the second mirror part 36.
- the amount of deflection is a distance obtained by subtracting the distance between mirrors in a state where a voltage is applied from the distance between mirrors in a state where no voltage is applied. That is, the distance between the mirrors can be obtained from the amount of deflection.
- the present inventors have analyzed the characteristics of as many as about 2,000 photodetectors, and have obtained FIG. 7 showing the relationship between the mirror deflection amount m and the elastic index k ′. Then, it is found from FIG. 7 that there is a certain regularity between the deflection amount m and the elasticity index k ′. As shown in the equation (3), the elasticity index k ′ is determined by a function having the mirror deflection amount m as a variable. I knew it could be described. This is considered to be because the spring constant k changes with the deformation of the second stacked body 34 when the second mirror portion 36 operates according to the electrostatic force.
- the elasticity index can be described as a second or higher order polynomial with the deflection amount as a variable. According to this configuration, the elasticity index can be easily derived with high accuracy.
- the deflection amount of the movable mirror unit is measured by measuring the deflection amount when the voltage is applied to the prepared Fabry-Perot interference filter 10 while changing the environmental temperature. Then, a correction term having a variable amount of environmental temperature as a variable is derived, and a relational expression between the transmission wavelength and the voltage can be derived so as to include the correction term. According to this configuration, the relationship between the transmission wavelength and the applied voltage according to changes in the environmental temperature can be acquired with high accuracy.
- the voltage is controlled so as to correspond to the transmission wavelength based on the relational expression between the electrostatic force and the elastic force.
- the electrostatic force is determined according to the voltage V applied to the first mirror unit 35 and the second mirror unit 36
- the elastic force is determined by the amount of deflection m of the second mirror unit 36 and the elasticity index k ′. It is decided according to.
- the elasticity index k ′ is described as a function of the deflection amount m of the second mirror portion 36, and varies according to the variation of the deflection amount m. Therefore, the peak transmission wavelength ⁇ of light can be controlled with high accuracy.
- the first temperature correction term and the second temperature correction term obtained for another Fabry-Perot interference filter corresponding to the prepared Fabry-Perot interference filter are included.
- a relational expression between the transmission wavelength and the voltage may be derived.
- “another Fabry-Perot interference filter corresponding to the prepared Fabry-Perot interference filter” refers to, for example, a Fabry-Perot interference filter of the same type and a same lot of the prepared Fabry-Perot interference filter.
- index k ' showed the example represented by the quadratic polynomial which makes deflection amount m a variable, it was not limited to this.
- the elasticity index k ′ may be approximated as a second or higher order polynomial such as a third order polynomial, as shown in the following formula (9).
- n is a natural number of 2 or more, and a n to a 0 are coefficients.
- the initial gap g in each Fabry-Perot interference filter 10 is derived from an actual measurement value
- the initial gap g may be derived by simulation.
- the product of the coefficient C and the spring constant k is set as an elasticity index k ′, and the elasticity index k ′ is specified as a function of the deflection amount m (a relational expression between the deflection amount m and the elasticity index k ′ is derived).
- the present invention is not limited to this.
- the elastic coefficient k may be specified as an elasticity index, and the elastic coefficient k may be specified as a function of the deflection amount m (that is, as a value that changes according to the deflection amount m).
- the room temperature is assumed to be 25 ° C. with respect to the standard environment temperature (predetermined environment temperature)
- the present invention is not limited thereto.
- the reference ambient temperature may be arbitrarily determined according to the ambient temperature at which the Fabry-Perot interference filter 10 is actually used. In this case, the relationship between the transmission wavelength and the applied voltage according to the actual use environment can be acquired with higher accuracy.
- Example 10 The accuracy of the derived filter control expression was evaluated for the photodetection device manufactured based on the above embodiment. In this example, 30 samples were prepared. In this example, each sample was evaluated based on the difference between the peak transmission wavelength obtained from the filter control equation and the peak transmission wavelength obtained by actual measurement. The maximum difference when the environmental temperature and voltage were varied was evaluated as the transmission wavelength control accuracy.
- A) of FIG. 15 shows the result in which d and e are approximated by a cubic equation in equation (7).
- (B) of FIG. 15 shows the result obtained by approximating both d and e by a linear expression in the equation (7).
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Abstract
Description
上記実施形態に基づいて製造された光検出装置について、導出されたフィルタ制御式の精度を評価した。本実施例では、30個のサンプルを用意した。本実施例では、各サンプルについて、フィルタ制御式から得られたピーク透過波長と、実測によって得られたピーク透過波長との差に基づいて評価が行われた。環境温度及び電圧を変動させた際の差の最大値を透過波長制御精度として評価対象とした。図15の(a)は、式(7)において、d及びeがいずれも3次式で近似された結果を示す。図15の(b)は、式(7)において、d及びeがいずれも1次式で近似された結果を示す。図15の(c)は、式(7)において、d及びeがいずれも1次式であって、各係数が30個のサンプルの平均値である場合の結果を示す。図15の(a)~(c)では、透過波長制御精度ごとのサンプル数が集計されている。すなわち、透過波長制御精度の値が小さいサンプル数が多いほど高精度である。図15の(a)に示すように、d及びeがいずれも3次式で近似された場合、透過波長制御精度の値が0.4nm以下のサンプルが多く、高精度で波長の制御がなされていることが確認できた。図15の(b)に示すように、d及びeがいずれも1次式で近似された場合、3次式の近似に比べて透過波長制御精度の値が0.1nm程度大きくなっているものの、十分に高い精度で波長の制御がなされていることが確認できた。図15の(c)に示すように、d及びeが1次式の平均で近似された場合、透過波長制御精度の値に若干のばらつきが見られるが、求められる測定精度によって十分有用であることが確認できた。
Claims (6)
- 電圧が印加された際に、固定ミラー部と可動ミラー部との間に生じる静電気力と前記可動ミラー部に生じる弾性力とが釣り合うことにより、前記固定ミラー部と前記可動ミラー部との間の距離が制御されるファブリペロー干渉フィルタを準備する準備ステップと、
準備した前記ファブリペロー干渉フィルタについて、所定の環境温度下において所定の計測を実施することにより、前記可動ミラー部の弾性指標が前記可動ミラー部のたわみ量を変数とする2次以上の多項式として記述された、前記たわみ量と前記弾性指標との関係式を導出する第1導出ステップと、
前記たわみ量と前記弾性指標との前記関係式、及び、前記静電気力と前記弾性力との関係式に基づいて、前記ファブリペロー干渉フィルタを透過する光の透過波長と前記電圧との関係式をフィルタ制御式として導出する第2導出ステップと、を備え、
前記第1導出ステップでは、前記所定の計測として、互いに異なる複数の電圧のそれぞれを前記電圧として印加した状態で、前記ファブリペロー干渉フィルタを透過する光の透過波長を計測する、フィルタ制御式導出方法。 - 準備した前記ファブリペロー干渉フィルタに対応する他のファブリペロー干渉フィルタについて、前記所定の環境温度を含み且つ互いに異なる複数の環境温度のそれぞれの温度下において前記所定の計測を実施することにより、前記たわみ量及び環境温度の変化量を変数とする補正項を導出する第3導出ステップを更に備え、
前記第2導出ステップでは、前記補正項を含むように、前記透過波長と前記電圧との前記関係式を前記フィルタ制御式として導出する、請求項1に記載のフィルタ制御式導出方法。 - 前記第1導出ステップでは、準備した前記ファブリペロー干渉フィルタについて、前記所定の環境温度を含み且つ互いに異なる複数の環境温度のそれぞれの温度下において前記所定の計測を実施することにより、前記たわみ量及び環境温度の変化量を変数とする補正項を導出し、
前記第2導出ステップでは、前記補正項を含むように、前記透過波長と前記電圧との前記関係式を前記フィルタ制御式として導出する、請求項1に記載のフィルタ制御式導出方法。 - 電圧が印加された際に、固定ミラー部と可動ミラー部との間に生じる静電気力と前記可動ミラー部に生じる弾性力とが釣り合うことにより、前記固定ミラー部と前記可動ミラー部との間の距離が制御されるファブリペロー干渉フィルタと、
前記可動ミラー部のたわみ量を変数とする2次以上の多項式として記述された前記可動ミラー部の弾性指標を含む前記静電気力と前記弾性力との関係式に基づいて、前記電圧を制御する制御装置と、を備える、光計測システム。 - 電圧が印加された際に、固定ミラー部と可動ミラー部との間に生じる静電気力と前記可動ミラー部に生じる弾性力とが釣り合うことにより、前記固定ミラー部と前記可動ミラー部との間の距離が制御されるファブリペロー干渉フィルタにおいて、前記電圧を制御する制御方法であって、
前記可動ミラー部のたわみ量を変数とする2次以上の多項式として記述された前記可動ミラー部の弾性指標を含む前記静電気力と前記弾性力との関係式に基づいて、前記ファブリペロー干渉フィルタを透過する光の透過波長に対応する電圧を導出するステップと、
導出した前記電圧を、印加する前記電圧として設定するステップと、を備える、ファブリペロー干渉フィルタの制御方法。 - 電圧が印加された際に、固定ミラー部と可動ミラー部との間に生じる静電気力と前記可動ミラー部に生じる弾性力とが釣り合うことにより、前記固定ミラー部と前記可動ミラー部との間の距離が制御されるファブリペロー干渉フィルタにおいて、前記電圧を制御する処理をコンピュータに実行させるためのプログラムであって、
前記コンピュータを、
前記可動ミラー部のたわみ量を変数とする2次以上の多項式として記述された前記可動ミラー部の弾性指標を含む前記静電気力と前記弾性力との関係式に基づいて、前記ファブリペロー干渉フィルタを透過する光の透過波長に対応する電圧を導出する電圧導出部、及び、
導出した前記電圧を、印加する前記電圧として設定する電圧設定部、として機能させる、フィルタ制御プログラム。
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